TWI447256B - Deposition of ternary oxide films containing ruthenium and alkali earth metals - Google Patents

Deposition of ternary oxide films containing ruthenium and alkali earth metals Download PDF

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Publication number
TWI447256B
TWI447256B TW098109866A TW98109866A TWI447256B TW I447256 B TWI447256 B TW I447256B TW 098109866 A TW098109866 A TW 098109866A TW 98109866 A TW98109866 A TW 98109866A TW I447256 B TWI447256 B TW I447256B
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TW
Taiwan
Prior art keywords
deposition
earth metals
oxide films
alkali earth
films containing
Prior art date
Application number
TW098109866A
Other versions
TW201006951A (en
Inventor
Satoko Gatineau
Julien Gatineau
Christian Dussarrat
Original Assignee
Air Liquide
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Filing date
Publication date
Priority to US3951608P priority Critical
Application filed by Air Liquide filed Critical Air Liquide
Publication of TW201006951A publication Critical patent/TW201006951A/en
Application granted granted Critical
Publication of TWI447256B publication Critical patent/TWI447256B/en

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TW098109866A 2008-03-26 2009-03-26 Deposition of ternary oxide films containing ruthenium and alkali earth metals TWI447256B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US3951608P true 2008-03-26 2008-03-26

Publications (2)

Publication Number Publication Date
TW201006951A TW201006951A (en) 2010-02-16
TWI447256B true TWI447256B (en) 2014-08-01

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TW098109866A TWI447256B (en) 2008-03-26 2009-03-26 Deposition of ternary oxide films containing ruthenium and alkali earth metals

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TW (1) TWI447256B (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020004293A1 (en) * 2000-05-15 2002-01-10 Soininen Pekka J. Method of growing electrical conductors
US20030073294A1 (en) * 2000-05-15 2003-04-17 Marsh Eugene P. Method of fabricating an SrRuO3, film
CN101063196A (en) * 2005-04-29 2007-10-31 波克股份有限公司 Method and apparatus for using solution based precursors for atomic layer deposition

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020004293A1 (en) * 2000-05-15 2002-01-10 Soininen Pekka J. Method of growing electrical conductors
US20030073294A1 (en) * 2000-05-15 2003-04-17 Marsh Eugene P. Method of fabricating an SrRuO3, film
CN101063196A (en) * 2005-04-29 2007-10-31 波克股份有限公司 Method and apparatus for using solution based precursors for atomic layer deposition

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Publication number Publication date
TW201006951A (en) 2010-02-16

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