TWI418258B - 以電漿處理多孔性原材的方法及裝置 - Google Patents
以電漿處理多孔性原材的方法及裝置 Download PDFInfo
- Publication number
- TWI418258B TWI418258B TW095133620A TW95133620A TWI418258B TW I418258 B TWI418258 B TW I418258B TW 095133620 A TW095133620 A TW 095133620A TW 95133620 A TW95133620 A TW 95133620A TW I418258 B TWI418258 B TW I418258B
- Authority
- TW
- Taiwan
- Prior art keywords
- porous
- plasma
- gas
- raw material
- ground electrode
- Prior art date
Links
- 239000002994 raw material Substances 0.000 title claims description 119
- 238000000034 method Methods 0.000 title claims description 49
- 239000007789 gas Substances 0.000 claims description 192
- 239000011148 porous material Substances 0.000 claims description 77
- 229910052751 metal Inorganic materials 0.000 claims description 28
- 239000002184 metal Substances 0.000 claims description 28
- 238000012545 processing Methods 0.000 claims description 26
- 239000011261 inert gas Substances 0.000 claims description 20
- 238000007664 blowing Methods 0.000 claims description 4
- 239000012495 reaction gas Substances 0.000 claims description 3
- 238000009832 plasma treatment Methods 0.000 description 57
- -1 polyethylene Polymers 0.000 description 47
- 239000004698 Polyethylene Substances 0.000 description 46
- 229920000573 polyethylene Polymers 0.000 description 46
- 239000012982 microporous membrane Substances 0.000 description 31
- 229920000098 polyolefin Polymers 0.000 description 19
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
- 239000000178 monomer Substances 0.000 description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 238000005259 measurement Methods 0.000 description 8
- 239000002002 slurry Substances 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 229910052734 helium Inorganic materials 0.000 description 7
- 229920003023 plastic Polymers 0.000 description 7
- 239000004033 plastic Substances 0.000 description 7
- 238000003672 processing method Methods 0.000 description 7
- 229910052786 argon Inorganic materials 0.000 description 6
- 230000006837 decompression Effects 0.000 description 6
- 239000012298 atmosphere Substances 0.000 description 5
- 239000001307 helium Substances 0.000 description 5
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 5
- 239000004745 nonwoven fabric Substances 0.000 description 5
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 4
- 239000004743 Polypropylene Substances 0.000 description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 4
- 125000005586 carbonic acid group Chemical group 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 239000013626 chemical specie Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000002985 plastic film Substances 0.000 description 4
- 229920006255 plastic film Polymers 0.000 description 4
- 229920001155 polypropylene Polymers 0.000 description 4
- 229920005992 thermoplastic resin Polymers 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 239000008204 material by function Substances 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010559 graft polymerization reaction Methods 0.000 description 2
- 230000002209 hydrophobic effect Effects 0.000 description 2
- 229910052756 noble gas Inorganic materials 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229920002635 polyurethane Polymers 0.000 description 2
- 239000004814 polyurethane Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000032258 transport Effects 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 239000004699 Ultra-high molecular weight polyethylene Substances 0.000 description 1
- 150000008378 aryl ethers Chemical class 0.000 description 1
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 238000011437 continuous method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 229920001903 high density polyethylene Polymers 0.000 description 1
- 239000004700 high-density polyethylene Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- GBMDVOWEEQVZKZ-UHFFFAOYSA-N methanol;hydrate Chemical compound O.OC GBMDVOWEEQVZKZ-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000002798 polar solvent Substances 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229920000193 polymethacrylate Polymers 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229920000785 ultra high molecular weight polyethylene Polymers 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0081—After-treatment of organic or inorganic membranes
- B01D67/009—After-treatment of organic or inorganic membranes with wave-energy, particle-radiation or plasma
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/06—Organic material
- B01D71/26—Polyalkenes
- B01D71/261—Polyethylene
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
- D06M10/00—Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements
- D06M10/02—Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements ultrasonic or sonic; Corona discharge
- D06M10/025—Corona discharge or low temperature plasma
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
- D06M14/00—Graft polymerisation of monomers containing carbon-to-carbon unsaturated bonds on to fibres, threads, yarns, fabrics, or fibrous goods made from such materials
- D06M14/18—Graft polymerisation of monomers containing carbon-to-carbon unsaturated bonds on to fibres, threads, yarns, fabrics, or fibrous goods made from such materials using wave energy or particle radiation
- D06M14/26—Graft polymerisation of monomers containing carbon-to-carbon unsaturated bonds on to fibres, threads, yarns, fabrics, or fibrous goods made from such materials using wave energy or particle radiation on to materials of synthetic origin
- D06M14/28—Graft polymerisation of monomers containing carbon-to-carbon unsaturated bonds on to fibres, threads, yarns, fabrics, or fibrous goods made from such materials using wave energy or particle radiation on to materials of synthetic origin of macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2323/00—Details relating to membrane preparation
- B01D2323/26—Spraying processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2323/00—Details relating to membrane preparation
- B01D2323/34—Use of radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2323/00—Details relating to membrane preparation
- B01D2323/42—Details of membrane preparation apparatus
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/62—Plasma-deposition of organic layers
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Textile Engineering (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Inorganic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- General Health & Medical Sciences (AREA)
- Organic Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Manufacture Of Porous Articles, And Recovery And Treatment Of Waste Products (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Plasma Technology (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005264269A JP4930913B2 (ja) | 2005-09-12 | 2005-09-12 | 多孔性素材のプラズマ処理方法及び処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200718291A TW200718291A (en) | 2007-05-01 |
TWI418258B true TWI418258B (zh) | 2013-12-01 |
Family
ID=37864914
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095133620A TWI418258B (zh) | 2005-09-12 | 2006-09-12 | 以電漿處理多孔性原材的方法及裝置 |
Country Status (9)
Country | Link |
---|---|
US (1) | US8475724B2 (fr) |
EP (1) | EP1933608A4 (fr) |
JP (1) | JP4930913B2 (fr) |
KR (1) | KR20080044325A (fr) |
CN (1) | CN101263749A (fr) |
CA (1) | CA2622229A1 (fr) |
RU (1) | RU2402374C2 (fr) |
TW (1) | TWI418258B (fr) |
WO (1) | WO2007032321A1 (fr) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0919274D0 (en) * | 2009-11-03 | 2009-12-16 | Univ The Glasgow | Plasma generation apparatus and use of plasma generation apparatus |
JP2011222404A (ja) * | 2010-04-13 | 2011-11-04 | Akitoshi Okino | プラズマ処理方法およびプラズマ処理装置ならびにプラズマ処理された処理対象物 |
US8723423B2 (en) * | 2011-01-25 | 2014-05-13 | Advanced Energy Industries, Inc. | Electrostatic remote plasma source |
US20140101930A1 (en) * | 2011-06-13 | 2014-04-17 | Nitto Denko Corporation | Method for producing separator for nonaqueous electrolyte electricity storage devices and method for producing nonaqueous electrolyte electricity storeage device |
KR101945212B1 (ko) * | 2011-10-20 | 2019-02-07 | 도레이 카부시키가이샤 | 다공질막의 제조 방법 및 그 다공질막, 전지용 세퍼레이터 및 전지 |
EP2586322A1 (fr) * | 2011-10-27 | 2013-05-01 | Creepservice S.à.r.l. | Filtre et procédé de fabrication associé |
GB201215098D0 (en) * | 2012-08-24 | 2012-10-10 | Fujifilm Mfg Europe Bv | Method of treating a porous substrate and manufacture of a membrane |
US11326255B2 (en) * | 2013-02-07 | 2022-05-10 | Uchicago Argonne, Llc | ALD reactor for coating porous substrates |
JP6020483B2 (ja) * | 2014-02-14 | 2016-11-02 | トヨタ自動車株式会社 | 表面処理装置と表面処理方法 |
EP2937890B1 (fr) * | 2014-04-22 | 2020-06-03 | Europlasma nv | Appareil de revêtement au plasma avec un diffuseur de plasma et procédé prévenant la décoloration d'un substrat |
TWI701292B (zh) * | 2014-06-20 | 2020-08-11 | 日商東京應化工業股份有限公司 | 醯亞胺系樹脂膜製造系統及醯亞胺系樹脂膜製造方法 |
TWI673154B (zh) * | 2014-06-20 | 2019-10-01 | 日商東京應化工業股份有限公司 | 多孔性之醯亞胺系樹脂膜製造系統、分隔膜及多孔性之醯亞胺系樹脂膜製造方法 |
JP2016083658A (ja) | 2014-10-24 | 2016-05-19 | パナソニックIpマネジメント株式会社 | プラズマ生成装置 |
JP6545053B2 (ja) * | 2015-03-30 | 2019-07-17 | 東京エレクトロン株式会社 | 処理装置および処理方法、ならびにガスクラスター発生装置および発生方法 |
WO2016158054A1 (fr) | 2015-03-30 | 2016-10-06 | 東京エレクトロン株式会社 | Dispositif et procédé de traitement, dispositif et procédé de génération d'agrégats de gaz |
JP6779300B2 (ja) * | 2016-08-22 | 2020-11-04 | 株式会社Fuji | プラズマ照射装置、および、プラズマ照射方法 |
JP6988522B2 (ja) * | 2018-01-30 | 2022-01-05 | トヨタ自動車株式会社 | 光照射装置 |
KR102243998B1 (ko) * | 2019-06-06 | 2021-04-23 | 박봄이 | 유수 분리 기재의 표면 처리 장치 |
WO2021020427A1 (fr) * | 2019-07-31 | 2021-02-04 | 株式会社ユポ・コーポレーション | Film de conversion d'énergie, élément de conversion d'énergie et procédé de production d'un film de conversion d'énergie |
WO2021072502A1 (fr) * | 2019-10-16 | 2021-04-22 | David R Mckenzie | Traitement ionique de substrats par plasma |
KR20220093149A (ko) * | 2019-11-01 | 2022-07-05 | 도쿄엘렉트론가부시키가이샤 | 기판 세정 장치 및 기판 세정 방법 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1994028568A1 (fr) * | 1993-05-28 | 1994-12-08 | The University Of Tennessee | Procede et appareil pour le traitement au plasma a decharge luminescente de materiaux polymeres a la pression atmospherique |
JP2000208124A (ja) * | 1999-01-11 | 2000-07-28 | Sekisui Chem Co Ltd | 2次電池用セパレ―タ及びその製造方法 |
TW429280B (en) * | 1998-06-05 | 2001-04-11 | Ind Tech Res Inst | A method of surface treatment and modification on fibrous products and making the same |
WO2004099490A1 (fr) * | 2003-05-05 | 2004-11-18 | Commonwealth Scientific And Industrial Research Organisation | Appareil et procede de traitement par plasma |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS5254688A (en) * | 1975-10-30 | 1977-05-04 | Sumitomo Chem Co Ltd | Method of producing semipermeable memebrane |
DE3337763A1 (de) * | 1983-10-18 | 1985-05-02 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München | Verfahren und vorrichtung zur oberflaechenmodifizierung der poreninnenwaende von membranen |
JPH02132327A (ja) | 1988-11-14 | 1990-05-21 | Toshiba Corp | 高温用超音波センサー |
JPH0663099B2 (ja) * | 1989-03-06 | 1994-08-17 | 善八 小久見 | 薄膜の製造方法 |
JP3286816B2 (ja) | 1992-12-24 | 2002-05-27 | イーシー化学株式会社 | 大気圧グロ−放電プラズマ処理法 |
US5403453A (en) | 1993-05-28 | 1995-04-04 | The University Of Tennessee Research Corporation | Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure |
DE4432919C2 (de) | 1994-07-22 | 1997-10-23 | Fraunhofer Ges Forschung | Verfahren und Vorrichtung zur Plasmamodifizierung von flächigen porösen Gegenständen |
JP2805002B2 (ja) | 1995-04-12 | 1998-09-30 | 三洋化成工業株式会社 | 水性接着剤組成物 |
JP3455610B2 (ja) * | 1995-06-09 | 2003-10-14 | 森 勇蔵 | 多孔体の改質処理方法およびその装置 |
JP3455611B2 (ja) * | 1995-06-09 | 2003-10-14 | 森 勇蔵 | 多孔体の改質処理方法およびその装置 |
JPH0931226A (ja) | 1995-07-20 | 1997-02-04 | Tonen Chem Corp | 親水性ポリエチレン微多孔膜、その製造方法及びそれを用いた電池用セパレータ |
JPH11128634A (ja) | 1997-11-04 | 1999-05-18 | Nippon Millipore Kk | 不織布フィルタおよびその製造方法並びに不織布フィルタカートリッジ |
US6149985A (en) | 1999-07-07 | 2000-11-21 | Eastman Kodak Company | High-efficiency plasma treatment of imaging supports |
CA2395180A1 (fr) * | 1999-12-15 | 2001-06-21 | Erich Kunhardt | Decharge capillaire par electrode segmentee, dispositif a plasma non thermique, et procede destine a induire des reactions chimiques |
US6955794B2 (en) * | 1999-12-15 | 2005-10-18 | Plasmasol Corporation | Slot discharge non-thermal plasma apparatus and process for promoting chemical reaction |
JP2003007497A (ja) | 2001-06-19 | 2003-01-10 | Pearl Kogyo Kk | 大気圧プラズマ処理装置 |
WO2003005397A2 (fr) * | 2001-07-02 | 2003-01-16 | Plasmasol Corporation | Electrode nouvelle a utiliser avec un appareil emetteur de plasma et son procede d'utilisation |
JP3824302B2 (ja) * | 2001-11-02 | 2006-09-20 | シャープ株式会社 | プラズマ処理装置 |
JP2005203166A (ja) | 2004-01-14 | 2005-07-28 | Pioneer Electronic Corp | プラズマ処理方法およびプラズマ処理装置 |
-
2005
- 2005-09-12 JP JP2005264269A patent/JP4930913B2/ja active Active
-
2006
- 2006-09-11 KR KR1020087008063A patent/KR20080044325A/ko not_active Application Discontinuation
- 2006-09-11 US US12/066,447 patent/US8475724B2/en active Active
- 2006-09-11 EP EP06797811A patent/EP1933608A4/fr not_active Withdrawn
- 2006-09-11 CN CNA2006800333234A patent/CN101263749A/zh active Pending
- 2006-09-11 RU RU2008114322/05A patent/RU2402374C2/ru active
- 2006-09-11 CA CA002622229A patent/CA2622229A1/fr not_active Abandoned
- 2006-09-11 WO PCT/JP2006/318004 patent/WO2007032321A1/fr active Application Filing
- 2006-09-12 TW TW095133620A patent/TWI418258B/zh not_active IP Right Cessation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1994028568A1 (fr) * | 1993-05-28 | 1994-12-08 | The University Of Tennessee | Procede et appareil pour le traitement au plasma a decharge luminescente de materiaux polymeres a la pression atmospherique |
TW429280B (en) * | 1998-06-05 | 2001-04-11 | Ind Tech Res Inst | A method of surface treatment and modification on fibrous products and making the same |
JP2000208124A (ja) * | 1999-01-11 | 2000-07-28 | Sekisui Chem Co Ltd | 2次電池用セパレ―タ及びその製造方法 |
WO2004099490A1 (fr) * | 2003-05-05 | 2004-11-18 | Commonwealth Scientific And Industrial Research Organisation | Appareil et procede de traitement par plasma |
Also Published As
Publication number | Publication date |
---|---|
RU2008114322A (ru) | 2009-10-20 |
KR20080044325A (ko) | 2008-05-20 |
JP2007080588A (ja) | 2007-03-29 |
CN101263749A (zh) | 2008-09-10 |
RU2402374C2 (ru) | 2010-10-27 |
TW200718291A (en) | 2007-05-01 |
EP1933608A1 (fr) | 2008-06-18 |
US20090277776A1 (en) | 2009-11-12 |
EP1933608A4 (fr) | 2011-02-16 |
CA2622229A1 (fr) | 2007-03-22 |
JP4930913B2 (ja) | 2012-05-16 |
WO2007032321A1 (fr) | 2007-03-22 |
US8475724B2 (en) | 2013-07-02 |
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