TWI416874B - Shift register apparatus and active array substrate - Google Patents

Shift register apparatus and active array substrate Download PDF

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Publication number
TWI416874B
TWI416874B TW099127137A TW99127137A TWI416874B TW I416874 B TWI416874 B TW I416874B TW 099127137 A TW099127137 A TW 099127137A TW 99127137 A TW99127137 A TW 99127137A TW I416874 B TWI416874 B TW I416874B
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gate
source
shift register
drain
branches
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TW099127137A
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TW201208254A (en
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Chuan Sheng Wei
Guang Ren Shen
chang yu Huang
pei ming Chen
Chun Hsiun Chen
Wei Ming Huang
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Au Optronics Corp
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Abstract

A shift register apparatus and an active array substrate are provided. The shift register apparatus includes a plurality of shift registers, wherein each of the shift registers coupled to each other in series and includes a start transistor, an output transistor and a capacitor. The start transistor has a first gate coupling to a last shift register, a first source coupling to a start signal and a first drain. The output transistor has a second gate coupling to the first drain, a second source outputting a scanning signal and a second drain coupling to a first clock signal. Moreover, a capacitance between the second gate and the second source is greater than a capacitance between the second gate and the second drain. The capacitor is coupled between the second source and the second gate.

Description

移位暫存裝置與主動陣列基板Shift register device and active array substrate

本發明是有關於一種移位暫存裝置與基板,且特別是有關於一種配置於基板的移位暫存裝置與主動陣列基板(active array substrate)。The present invention relates to a shift register device and a substrate, and more particularly to a shift register device disposed on a substrate and an active array substrate.

近年來,隨著半導體科技蓬勃發展,攜帶型電子產品及平面顯示器產品也隨之興起。而在眾多平面顯示器的類型當中,液晶顯示器(Liquid Crystal Display,LCD)基於其低電壓操作、無輻射線散射、重量輕以及體積小等優點,隨即已成為顯示器產品之主流。也亦因如此,無不驅使著各家廠商針對液晶顯示器的開發技術要朝向微型化及低製作成本發展。In recent years, with the rapid development of semiconductor technology, portable electronic products and flat panel display products have also emerged. Among the many types of flat panel displays, liquid crystal displays (LCDs) have become the mainstream of display products based on their low voltage operation, no radiation scattering, light weight and small size. Because of this, all of them are driving the development technology of liquid crystal displays to miniaturization and low production costs.

為了要將液晶顯示器的製作成本壓低,已有部份廠商透過非晶矽製程而直接在面板之玻璃基板上製作多級非晶矽移位暫存器(a-Si shift register),藉以來取代習知所慣用的閘極驅動器(gate driver),從而達到降低液晶顯示器之的製作成本的目的。In order to reduce the manufacturing cost of the liquid crystal display, some manufacturers have made a multi-stage amorphous shift register (a-Si shift register) directly on the glass substrate of the panel through the amorphous germanium process. The gate driver is conventionally used to achieve the purpose of reducing the manufacturing cost of the liquid crystal display.

一般而言,每一移位暫存器中會設置一輸出電晶體,其在移位暫存器被開啟時導通。此時,輸出電晶體的汲極接收到的時脈訊號會由其源極輸出以作為掃描訊號,以藉由輸出時脈訊號來提升掃描訊號的電壓準位。然而,在輸出電晶體未導通時,輸出電晶體的汲極仍會接收到時脈訊號。此時,輸出電晶體等同於兩顆串聯的電容器,即電晶體的閘極與汲極間的等效電容器及電晶體的閘極與源極間的等效電容器,以致於輸出電晶體的源極會輸出漣波(ripple),並且若漣波過大時,則可能會影響電路的運作。因此,為了降低漣波的大小,一般會在輸出電晶體的閘極及源極間並聯一較大電容值的電容器。由於此電容器須具有較大電容值,因此會佔有一定的佈局面積,進而影響移位暫存器內部線路佈局的彈性。In general, an output transistor is provided in each shift register that is turned on when the shift register is turned on. At this time, the clock signal received by the drain of the output transistor is outputted by its source as a scan signal to increase the voltage level of the scan signal by outputting a clock signal. However, when the output transistor is not conducting, the drain of the output transistor still receives the clock signal. At this time, the output transistor is equivalent to two capacitors connected in series, that is, the equivalent capacitor between the gate and the drain of the transistor and the equivalent capacitor between the gate and the source of the transistor, so that the source of the output transistor The output will be rippled, and if the ripple is too large, it may affect the operation of the circuit. Therefore, in order to reduce the size of the chopping, a capacitor of a large capacitance value is generally connected in parallel between the gate and the source of the output transistor. Since this capacitor must have a large capacitance value, it will occupy a certain layout area, thereby affecting the flexibility of the internal circuit layout of the shift register.

本發明提供一種移位暫存裝置,可提升輸出電晶體的閘極與源極之間的電容值,以降低其並聯的電容器的電容值。The invention provides a shift temporary storage device which can increase the capacitance value between the gate and the source of the output transistor to reduce the capacitance value of the capacitor connected in parallel.

本發明亦提供一種主動陣列基板,可降低輸出電晶體的閘極與源極並聯的電容器的面積,以降低移位暫存器的面積。The invention also provides an active array substrate, which can reduce the area of the capacitor of the output transistor in parallel with the source to reduce the area of the shift register.

本發明提出一種移位暫存裝置,包括多個彼此串接的移位暫存器。各移位暫存器包括一啟始電晶體、一輸出電晶體、一電容器、一第一下拉電路及一第二下拉電路。啟始電晶體具有一第一閘極、一第一源極以及一第一汲極,其中第一閘極耦接至前一級移位暫存器,而第一源極耦接至一啟始訊號。輸出電晶體具有一第二閘極、一第二源極以及一第二汲極,其中第二閘極耦接至第一汲極,第二源極輸出一掃描訊號,而第二汲極耦接至一第一時脈訊號,並且第二閘極與第二源極之間的電容值(Cgs)大於第二閘極與第二汲極之間的電容值(Cgd)。電容器耦接於第二源極與第二閘極之間。第一下拉電路耦接至第二閘極。第二下拉電路耦接至第二源極。The invention provides a shift register device comprising a plurality of shift registers connected in series with each other. Each shift register includes a start transistor, an output transistor, a capacitor, a first pull down circuit, and a second pull down circuit. The starting transistor has a first gate, a first source and a first drain, wherein the first gate is coupled to the previous stage shift register, and the first source is coupled to the start Signal. The output transistor has a second gate, a second source and a second drain, wherein the second gate is coupled to the first drain, the second source outputs a scan signal, and the second drain is coupled Connected to a first clock signal, and the capacitance value (Cgs) between the second gate and the second source is greater than the capacitance value (Cgd) between the second gate and the second drain. The capacitor is coupled between the second source and the second gate. The first pull-down circuit is coupled to the second gate. The second pull-down circuit is coupled to the second source.

在本發明之一實施例中,上述之第二閘極與第二源極之間的電容值(Cgs)與電容器之電容值(C)之比例介於1:100至37:100之間。In an embodiment of the invention, the ratio of the capacitance value (Cgs) between the second gate and the second source to the capacitance value (C) of the capacitor is between 1:100 and 37:100.

在本發明之一實施例中,上述之輸出電晶體為底閘極電晶體。In an embodiment of the invention, the output transistor is a bottom gate transistor.

在本發明之一實施例中,上述之輸出電晶體為頂閘極電晶體。In an embodiment of the invention, the output transistor is a top gate transistor.

在本發明之一實施例中,上述之第二源極包括多個彼此連接的源極分支,而第二汲極包括多個彼此連接的汲極分支,這些源極分支與這些汲極分支彼此電性絕緣,且這些源極分支的數量大於這些汲極分支的數量。In an embodiment of the invention, the second source includes a plurality of source branches connected to each other, and the second drain includes a plurality of drain branches connected to each other, and the source branches and the drain branches are mutually connected Electrically insulated, and the number of these source branches is greater than the number of these bungee branches.

在本發明之一實施例中,上述之這些源極分支與第二閘極的重疊面積大於這些汲極分支與第二閘極的重疊面積。In an embodiment of the invention, the overlapping area of the source branches and the second gates is greater than the overlapping area of the drain branches and the second gates.

在本發明之一實施例中,上述之輸出電晶體具有一半導體層,且半導體層與閘極的面積比例約為0.001至0.9。In an embodiment of the invention, the output transistor has a semiconductor layer, and the ratio of the area of the semiconductor layer to the gate is about 0.001 to 0.9.

在本發明之一實施例中,上述之第二閘極為一矩形閘極,而半導體層為一矩形半導體層。In an embodiment of the invention, the second gate is a rectangular gate and the semiconductor layer is a rectangular semiconductor layer.

在本發明之一實施例中,上述之矩形閘極為一正方形閘極,而半導體層為一正方形半導體層。In one embodiment of the invention, the rectangular gate is a square gate and the semiconductor layer is a square semiconductor layer.

在本發明之一實施例中,上述之矩形閘極為一長方形閘極,而半導體層為一長方形半導體層。In an embodiment of the invention, the rectangular gate is a rectangular gate and the semiconductor layer is a rectangular semiconductor layer.

在本發明之一實施例中,上述之這些源極分支與這些汲極分支的延伸方向平行於矩形閘極的二短邊,且這些源極分支與這些汲極分支分別從矩形閘極的二長邊延伸至半導體層上。In an embodiment of the invention, the source branches and the extension directions of the dipole branches are parallel to the two short sides of the rectangular gate, and the source branches and the dipole branches are respectively from the rectangular gate The long side extends onto the semiconductor layer.

在本發明之一實施例中,上述之矩形閘極的至少一邊與矩形半導體層的一邊的最短距離大於3微米。In an embodiment of the invention, the shortest distance between at least one side of the rectangular gate and one side of the rectangular semiconductor layer is greater than 3 microns.

在本發明之一實施例中,上述之這些源極分支與這些汲極分支的延伸方向彼此平行。In an embodiment of the invention, the source branches and the extension directions of the drain branches are parallel to each other.

在本發明之一實施例中,上述之半導體層包括多個彼此獨立之半導體圖案,且任二相鄰的半導體圖案之間維持一間隙。In an embodiment of the invention, the semiconductor layer comprises a plurality of semiconductor patterns independent of each other, and a gap is maintained between any two adjacent semiconductor patterns.

在本發明之一實施例中,上述之間隙約為3微米至100微米。In one embodiment of the invention, the gap described above is between about 3 microns and 100 microns.

本發明亦提出一種主動陣列基板,其包括一基板、一驅動電路及一主動陣列。基板具有一主動區以及一週邊電路區。驅動電路位於基板上並位於週邊電路區內,驅動電路包括如上所述之移位暫存裝置。主動陣列位於基板上並位於主動區內,與驅動電路電性連接。The invention also provides an active array substrate comprising a substrate, a driving circuit and an active array. The substrate has an active area and a peripheral circuit area. The driving circuit is located on the substrate and located in the peripheral circuit region, and the driving circuit includes the shift register device as described above. The active array is located on the substrate and located in the active area, and is electrically connected to the driving circuit.

基於上述,本發明的移位暫存裝置與主動陣列基板,其透過增加輸出電晶體的源極與閘極的重疊面積,以增加輸出電晶體閘極與源極間的電容值。藉此,可減少與輸出電晶體耦接的電容器的電容值,以降低電容器的面積。Based on the above, the shift register device and the active array substrate of the present invention increase the capacitance between the gate and the source of the output transistor by increasing the overlap area between the source and the gate of the output transistor. Thereby, the capacitance value of the capacitor coupled to the output transistor can be reduced to reduce the area of the capacitor.

為讓本發明之上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。The above described features and advantages of the present invention will be more apparent from the following description.

圖1為依照本發明一實施例所繪示的主動陣列基板之上視示意圖。請參照圖1,主動陣列基板100包括基板102、驅動電路104與主動陣列。基板100具有主動區106以及週邊電路區108。基板110的材料例如為玻璃、塑膠或是其他合適的材質。主動陣列位於基板100上並位於主動區106內,與驅動電路104電性連接。主動陣列包括多個畫素結構110、與畫素結構110電性連接的多條資料線114與多條掃描線112。資料線114與掃描線112的材料例如為金屬。每一個畫素結構110電性連接於一條資料線114與一條掃描線112,以藉由資料線114與掃描線112而進行驅動。每個畫素結構110中主要具有薄膜電晶體110a與畫素電極110b。FIG. 1 is a top plan view of an active array substrate according to an embodiment of the invention. Referring to FIG. 1, the active array substrate 100 includes a substrate 102, a driving circuit 104, and an active array. The substrate 100 has an active region 106 and a peripheral circuit region 108. The material of the substrate 110 is, for example, glass, plastic or other suitable material. The active array is located on the substrate 100 and located in the active area 106, and is electrically connected to the driving circuit 104. The active array includes a plurality of pixel structures 110, a plurality of data lines 114 electrically connected to the pixel structure 110, and a plurality of scan lines 112. The material of the data line 114 and the scan line 112 is, for example, a metal. Each pixel structure 110 is electrically connected to a data line 114 and a scan line 112 for driving by the data line 114 and the scan line 112. Each of the pixel structures 110 mainly has a thin film transistor 110a and a pixel electrode 110b.

驅動電路104位於基板100上並位於週邊電路區110內。驅動電路104包括源極驅動器116及移位暫存裝置118。移位暫存裝置118依序提供掃描訊號SC至掃描線112。源極驅動器116提供顯示資料至資料線114。在本實施例中,移位暫存裝置118包括多個彼此串接在一起的移位暫存器SR,而這些移位暫存器SR依據垂直啟始訊號VST、時脈訊號CK與XCK依序開啟並輸出掃描訊號SC,其中時脈訊號CK可與XCK相位差180度,亦即時脈訊號CK可時脈訊號XCK的反相訊號),但其他實施例並不限制於此。The drive circuit 104 is located on the substrate 100 and is located within the peripheral circuit region 110. The drive circuit 104 includes a source driver 116 and a shift register 118. The shift register 118 sequentially supplies the scan signal SC to the scan line 112. Source driver 116 provides display data to data line 114. In this embodiment, the shift register 118 includes a plurality of shift registers SR connected in series with each other, and the shift registers SR are based on the vertical start signal VST, the clock signal CK and the XCK. The scan signal SC is turned on and the scan signal SC is output, wherein the clock signal CK can be 180 degrees out of phase with the XCK, and the instant pulse signal CK can be the inverted signal of the clock signal XCK. However, other embodiments are not limited thereto.

圖2為圖1依據本發明一實施例所繪示的移位暫存器的電路圖。請參照圖1及圖2,在本實施例中,移位暫存器SR包括啟始電晶體MS、輸出電晶體MO、電容器C1、電晶體M1及M2,其中啟始電晶體MS、輸出電晶體MO、電晶體M1及M2可以為一底閘極電晶體或一頂閘極電晶體。啟始電晶體MS的閘極及源極可耦接至前一級移位暫存器RS以接收啟始訊號SS,其中啟始訊號SS為前一級移位暫存器RS的掃描訊號SC。但若移位暫存器SR為第一個,則啟始電晶體MS的閘極及源極則耦接至一垂直啟動訊號VST。FIG. 2 is a circuit diagram of a shift register according to an embodiment of the invention. Referring to FIG. 1 and FIG. 2, in the embodiment, the shift register SR includes a start transistor MS, an output transistor MO, a capacitor C1, and transistors M1 and M2, wherein the transistor MS and the output power are started. The crystal MO, the transistors M1 and M2 may be a bottom gate transistor or a top gate transistor. The gate and the source of the start transistor MS can be coupled to the previous stage shift register RS to receive the start signal SS, wherein the start signal SS is the scan signal SC of the previous stage shift register RS. However, if the shift register SR is the first one, the gate and the source of the start transistor MS are coupled to a vertical start signal VST.

輸出電晶體MO的閘極耦接至啟始電晶體MS的汲極,輸出電晶體MO的源極輸出對應的掃描訊號SC(n)。當移位暫存器為奇數的移位暫存器時,輸出電晶體MO的汲極耦接至時脈訊號CK;反之,則輸出電晶體MO的汲極耦接至時脈訊號XCK。其中,輸出電晶體MO的閘極與源極之間的等效電容器Cgs的電容值大於輸出電晶體MO的閘極與汲極之間的等效電容器Cgd的電容值。電容器C1耦接於輸出電晶體MO的閘極與源極之間,並且等效電容器Cgs之電容值與電容器C1之電容值的比例介於1:100至37:100之間。The gate of the output transistor MO is coupled to the drain of the start transistor MS, and the source of the output transistor MO outputs a corresponding scan signal SC(n). When the shift register is an odd shift register, the drain of the output transistor MO is coupled to the clock signal CK; otherwise, the drain of the output transistor MO is coupled to the clock signal XCK. The capacitance value of the equivalent capacitor Cgs between the gate and the source of the output transistor MO is greater than the capacitance of the equivalent capacitor Cgd between the gate and the drain of the output transistor MO. The capacitor C1 is coupled between the gate and the source of the output transistor MO, and the ratio of the capacitance of the equivalent capacitor Cgs to the capacitance of the capacitor C1 is between 1:100 and 37:100.

電晶體M1的汲極耦接至輸出電晶體MO的閘極,電晶體M1的源極耦接至參考電壓VSS,電晶體M1的閘極耦接至後一級移位暫存器RS的掃描訊號SC(n+1),其中電晶體M1可視為一下拉電路,以下拉輸出電晶體MO的閘極的電壓準位。電晶體M2的汲極耦接至輸出電晶體MO的源極,電晶體M2的源極耦接至參考電壓VSS。當移位暫存器為奇數的移位暫存器時,電晶體M2的閘極耦接至時脈訊號XCK;反之,則電晶體M2的閘極耦接至時脈訊號CK。其中,電晶體M2亦可視為一下拉電路,以下拉掃描訊號SC(n)的電壓準位。The gate of the transistor M1 is coupled to the gate of the output transistor MO, the source of the transistor M1 is coupled to the reference voltage VSS, and the gate of the transistor M1 is coupled to the scan signal of the shift register RS of the subsequent stage. SC(n+1), in which the transistor M1 can be regarded as a pull-down circuit, and the voltage level of the gate of the output transistor MO is pulled down. The drain of the transistor M2 is coupled to the source of the output transistor MO, and the source of the transistor M2 is coupled to the reference voltage VSS. When the shift register is an odd shift register, the gate of the transistor M2 is coupled to the clock signal XCK; otherwise, the gate of the transistor M2 is coupled to the clock signal CK. The transistor M2 can also be regarded as a pull-down circuit, and the voltage level of the scan signal SC(n) is pulled down.

圖3為本發明一實施例所繪示移位暫存器SR的運作時序圖。請參照圖1至圖3,在此以第一個移位暫存器為例,在期間T1中,啟始電晶體MS接收到啟始訊號SS(即垂直啟始訊號VST),啟始電晶體MS會導通以將啟始訊號SS傳送至輸出電晶體MO的閘極。此時,啟始訊號SS會對電容器C1充電,以致於節點A的電壓準位會上升,並且當節點A的電壓準位大於輸出電晶體MO的臨界電壓時,輸出電晶體MO會導通。FIG. 3 is a timing diagram showing the operation of the shift register SR according to an embodiment of the invention. Referring to FIG. 1 to FIG. 3, the first shift register is taken as an example. In the period T1, the start transistor MS receives the start signal SS (ie, the vertical start signal VST), and starts the power. The crystal MS is turned on to transfer the start signal SS to the gate of the output transistor MO. At this time, the start signal SS charges the capacitor C1, so that the voltage level of the node A rises, and when the voltage level of the node A is greater than the threshold voltage of the output transistor MO, the output transistor MO is turned on.

在期間T2中,輸出電晶體MO會接收到時脈訊號CK,並且將時脈訊號CK輸出以作為掃描訊號SC(n)。如圖2所示,電容器C1與輸出電晶體MO形成自舉(bootstrap)組態,因此在時脈訊號CK輸出時脈訊號CK時,節點A的電壓準位會突然上升。換言之,在輸出電晶體MO輸出時脈訊號CK時,輸出電晶體MO的源極的電壓準位會等於時脈訊號CK,而電容器C1儲存的電位差仍然存在,以致於節點A的電壓準位會被抬升。In the period T2, the output transistor MO receives the clock signal CK and outputs the clock signal CK as the scan signal SC(n). As shown in FIG. 2, the capacitor C1 and the output transistor MO form a bootstrap configuration. Therefore, when the clock signal CK outputs the clock signal CK, the voltage level of the node A suddenly rises. In other words, when the output transistor MO outputs the pulse signal CK, the voltage level of the source of the output transistor MO is equal to the clock signal CK, and the potential difference stored by the capacitor C1 is still present, so that the voltage level of the node A will be Was raised.

在期間T3中,電晶體M2會接收到時脈訊號XCK而導通,藉此下拉掃描訊號SC(n)的電壓準位為參考電壓VSS。並且,電晶體M1會接收到掃描訊號SC(n+1)而導通,藉此下拉節點A的電壓準位為參考電壓VSS。在期間T4中及其之後,雖然輸出電晶體MO處於不導通狀態,但輸出電晶體MO會相似於兩顆電容器串接,因此在時脈訊號CK的上升緣及下降緣時,節點A及掃描訊號SC(n)仍會產生漣波。由於節點A位於電路內部,因此可以忽略。但掃描訊號SC(n)的漣波可能造成薄膜電晶體110a錯誤的動作,因此掃描訊號SC(n)的漣波越小越好。In the period T3, the transistor M2 receives the clock signal XCK and is turned on, whereby the voltage level of the pull-down scan signal SC(n) is the reference voltage VSS. Moreover, the transistor M1 receives the scan signal SC(n+1) and is turned on, whereby the voltage level of the pull-down node A is the reference voltage VSS. In the period T4 and after, although the output transistor MO is in a non-conducting state, the output transistor MO will be similar to the two capacitors in series, so when the rising edge and the falling edge of the clock signal CK, the node A and the scanning The signal SC(n) will still generate ripples. Since node A is inside the circuit, it can be ignored. However, the chopping of the scanning signal SC(n) may cause the erroneous action of the thin film transistor 110a, so the smaller the chopping of the scanning signal SC(n), the better.

依據上述,本發明的電容器C1的電容值與等效電容器Cgs的電容值的總和會大於等效電容器Cgd的電容值,以此抑制掃描訊號SC(n)的漣波的大小。並且,本發明可透過修改輸出電晶體MO製程的光罩(此於稍後說明),進而提升等效電容器Cgs的電容值。在等效電容器Cgs的電容值提升之後,則可對應的減少電容器C1的電容值,進而減少形成電容器C1的面積。According to the above, the sum of the capacitance value of the capacitor C1 of the present invention and the capacitance value of the equivalent capacitor Cgs is larger than the capacitance value of the equivalent capacitor Cgd, thereby suppressing the magnitude of the chopping of the scanning signal SC(n). Moreover, the present invention can improve the capacitance value of the equivalent capacitor Cgs by modifying the mask of the output transistor MO process (which will be described later). After the capacitance value of the equivalent capacitor Cgs is increased, the capacitance value of the capacitor C1 can be correspondingly reduced, thereby reducing the area in which the capacitor C1 is formed.

此外,其他移位暫存器SR的動作可參照上述說明,其不同之處在於運作時序上的不同,並且圖3中A’為繪示第二個移存暫存器的節點A的運作時序,本領域通常知識者可自行理解,則不再詳述。In addition, the operation of the other shift register SR can be referred to the above description, the difference is in the operation timing difference, and A' in FIG. 3 is the operation timing of the node A of the second shift register. It is generally understood by those skilled in the art and will not be described in detail.

圖4A為依照本發明一實施例所繪示的輸出電晶體MO之上視示意圖。請參照圖4A,輸出電晶體MO包括閘極400、閘絕緣層(為了便於說明,未繪示)、半導體層402、多個源極分支406、源極連接線410、多個汲極分支404與汲極連接線408。閘極400的材料例如為金屬。閘極400例如為矩形閘極。閘絕緣層配置於閘極400上,而閘絕緣層的材料例如為氧化矽、氮化矽或是其他合適的介電材料。FIG. 4A is a top view of an output transistor MO according to an embodiment of the invention. Referring to FIG. 4A, the output transistor MO includes a gate 400, a gate insulating layer (not shown for convenience of explanation), a semiconductor layer 402, a plurality of source branches 406, a source connection line 410, and a plurality of drain branches 404. Connect with the drain line 408. The material of the gate 400 is, for example, a metal. The gate 400 is, for example, a rectangular gate. The gate insulating layer is disposed on the gate 400, and the material of the gate insulating layer is, for example, tantalum oxide, tantalum nitride or other suitable dielectric material.

半導體層402配置於閘絕緣層上且位於閘極400上方,以作為通道層之用,而半導體層402的材料例如為非晶矽。半導體層402例如為矩形半導體層。半導體層402與閘極400的面積比例約為0.001至0.9。源極分支406透過源極連接線410彼此電性連接以形成源極,而汲極分支404透過汲極連接線408彼此電性連接以形成汲極,且源極分支406與汲極分支404彼此電性絕緣。源極分支406、源極連接線410、汲極分支404與汲極連接線408的材料例如為金屬。此外,源極分支406與汲極分支404的延伸方向彼此平行,且源極分支406與汲極分支404分別從閘極400的二個對邊延伸至半導體層402上,且交替排列於半導體層402上。如圖4A所示,源極分支406的數量大於汲極分支404的數量,進而使源極分支406與閘極400的重疊面積大於汲極分支404與閘極400的重疊面積,藉此可提升輸出電晶體MO的閘極與源極間的等效電容器Cgs的電容值。The semiconductor layer 402 is disposed on the gate insulating layer and above the gate 400 for use as a channel layer, and the material of the semiconductor layer 402 is, for example, amorphous germanium. The semiconductor layer 402 is, for example, a rectangular semiconductor layer. The area ratio of the semiconductor layer 402 to the gate 400 is about 0.001 to 0.9. The source branches 406 are electrically connected to each other through the source connection line 410 to form a source, and the drain branches 404 are electrically connected to each other through the gate connection line 408 to form a drain, and the source branch 406 and the drain branch 404 are mutually connected to each other. Electrical insulation. The material of the source branch 406, the source connection line 410, the drain leg 404, and the drain connection line 408 is, for example, a metal. In addition, the source branch 406 and the drain branch 404 extend in parallel with each other, and the source branch 406 and the drain branch 404 extend from the opposite sides of the gate 400 to the semiconductor layer 402, respectively, and are alternately arranged on the semiconductor layer. 402. As shown in FIG. 4A, the number of source branches 406 is greater than the number of the drain branches 404, so that the overlapping area of the source branches 406 and the gates 400 is larger than the overlapping area of the drain branches 404 and the gates 400, thereby improving The capacitance value of the equivalent capacitor Cgs between the gate and the source of the output transistor MO.

詳細地說,在本實施例中,閘極400例如為正方形閘極,而半導體層402例如為正方形導體層。此外,採用增加閘極400的面積的方式以使半導體層402與閘極400的面積比例約為0.001至0.9。增加閘極400的面積的方式例如是使閘極400的一邊與半導體層402的一邊的最短距離大於3微米。In detail, in the present embodiment, the gate 400 is, for example, a square gate, and the semiconductor layer 402 is, for example, a square conductor layer. Further, the area of the gate 400 is increased such that the ratio of the area of the semiconductor layer 402 to the gate 400 is about 0.001 to 0.9. The manner in which the area of the gate 400 is increased is, for example, such that the shortest distance between one side of the gate 400 and one side of the semiconductor layer 402 is greater than 3 μm.

特別一提的是,在本實施例中,閘極400的一邊與半導體層402的一邊的最短距離大於3微米,使得半導體層402與閘極400的面積比例可以約為0.001至0.9。在另一實施例中,也可以是閘極的四邊與半導體層的四邊的最短距離皆大於3微米(如圖4B所示),以進一步地增加閘極的面積(減小半導體層與閘極的面積比例)。此外,在圖4B中,閘極400’的每一邊與半導體層402的每一邊的最短距離可以彼此相同或不同。當然,在其他實施例中,也可以是閘極二邊與半導體層的二邊的最短距離皆大於3微米,或是閘極的三邊與半導體層的三邊的最短距離皆大於3微米,且這些最短距離可以相同或不同。In particular, in the present embodiment, the shortest distance between one side of the gate 400 and one side of the semiconductor layer 402 is greater than 3 microns, such that the ratio of the area of the semiconductor layer 402 to the gate 400 may be about 0.001 to 0.9. In another embodiment, the shortest distance between the four sides of the gate and the four sides of the semiconductor layer may be greater than 3 micrometers (as shown in FIG. 4B) to further increase the gate area (reducing the semiconductor layer and the gate). Area ratio). Further, in Fig. 4B, the shortest distance between each side of the gate 400' and each side of the semiconductor layer 402 may be the same or different from each other. In other embodiments, the shortest distance between the two sides of the gate and the two sides of the semiconductor layer is greater than 3 micrometers, or the shortest distance between the three sides of the gate and the three sides of the semiconductor layer is greater than 3 micrometers. And these shortest distances can be the same or different.

再者,在本實施例中,閘極400可往圖示下方延伸,以增加閘極400與源極分支406重疊的面積,甚至與源極連接線410重疊(如圖4C所示)。在圖示4C中,閘極400”往圖示下方延伸,致使源極連接線410位於閘極400”上,藉此可增加輸出電晶體MO的閘極與源極間的等效電容器Cgs的電容值。在本實施例中,源極連接線410與閘極400”為部份重疊,但在其他實施例中,源極連接線410與閘極400”可以為完全重疊,並且源極連接線410與閘極400”重疊的比例可自行調整。Moreover, in the present embodiment, the gate 400 can extend below the illustration to increase the area of the gate 400 overlapping the source branch 406, even overlapping the source connection line 410 (as shown in FIG. 4C). In FIG. 4C, the gate 400" extends below the figure such that the source connection line 410 is located on the gate 400", thereby increasing the equivalent capacitor Cgs between the gate and the source of the output transistor MO. Capacitance value. In this embodiment, the source connection line 410 and the gate 400" partially overlap, but in other embodiments, the source connection line 410 and the gate 400" may be completely overlapped, and the source connection line 410 and The proportion of the gate 400" overlap can be adjusted by itself.

圖4D為依照本發明另一實施例所繪示的輸出電晶體MO之上視示意圖。請參照圖4D,在輸出電晶體MO中,半導體層202’為多個彼此獨立的半導體圖案(未標示),且任二個相鄰的半導體圖案之間維持一個間隙S,致使半導體層402’與閘極400的面積比例約為0.001至0.9。間隙S例如約為3微米至100微米,並且這些間隙S可以相同或不同。並且,在每一半導體圖案上,源極分支406的數量大於汲極分支404的數量,進而使源極分支406與閘極400的重疊面積遠大於汲極分支404與閘極400的重疊面積,藉此可大幅提升輸出電晶體MO的閘極與源極間的等效電容器Cgs的電容值。值得一提的是,在以上各個實施例中,閘極皆為正方形,但在其他實施例中,閘極與半導體層也可以皆為長方形。FIG. 4D is a top view of an output transistor MO according to another embodiment of the invention. Referring to FIG. 4D, in the output transistor MO, the semiconductor layer 202' is a plurality of semiconductor patterns (not labeled) that are independent of each other, and a gap S is maintained between any two adjacent semiconductor patterns, so that the semiconductor layer 402' The ratio of the area to the gate 400 is about 0.001 to 0.9. The gap S is, for example, about 3 micrometers to 100 micrometers, and these gaps S may be the same or different. Moreover, on each semiconductor pattern, the number of source branches 406 is greater than the number of drain branches 404, so that the overlap area of the source branches 406 and the gates 400 is much larger than the overlap area of the drain branches 404 and the gates 400. Thereby, the capacitance value of the equivalent capacitor Cgs between the gate and the source of the output transistor MO can be greatly improved. It should be noted that in each of the above embodiments, the gates are all square, but in other embodiments, the gate and the semiconductor layer may also be rectangular.

圖4E為依照本發明另一實施例所繪示的底閘極薄膜電晶體之上視示意圖。請參照圖4E,在本實施例中,閘極400’’’與半導體層402”皆為長方形。源極分支406與汲極分支404的延伸方向例如平行於閘極400’’’的二個短邊,且源極分支404與汲極分支406分別從閘極400’’’的二個長邊延伸至半導體層402”上。此外,在圖4E中,其餘元件之間的配置關係皆與圖4B中的元件的配置關係相同,即閘極400’’’的四邊與半導體層402”的四邊的最短距離皆大於3微米,且這些最短距離可以相同或不同。4E is a top plan view of a bottom gate thin film transistor according to another embodiment of the invention. Referring to FIG. 4E, in the embodiment, the gate 400"" and the semiconductor layer 402" are both rectangular. The source branch 406 and the drain branch 404 extend in parallel, for example, to the gate 400"". The short side, and the source branch 404 and the drain branch 406 extend from the two long sides of the gate 400"" to the semiconductor layer 402", respectively. In addition, in FIG. 4E, the arrangement relationship between the remaining components is the same as that of the components in FIG. 4B, that is, the shortest distance between the four sides of the gate 400''' and the four sides of the semiconductor layer 402" is greater than 3 micrometers. And these shortest distances can be the same or different.

當然,在閘極400’’’與半導體層402”皆為長方形的情況下,也可以是閘極400’’’的一邊(二邊或三邊)與半導體層402”的一邊(二邊或三邊)的最短距離皆大於3微米;或是半導體層402”為多個彼此獨立的半導體圖案,且任二個相鄰的半導體圖案之間維持一個間隙;或是閘極400’’’的一邊(二邊或三邊)與半導體層402”的一邊(二邊或三邊)的最短距離皆大於3微米,且半導體層402”為多個彼此獨立的半導體圖案,且任二個相鄰的半導體圖案之間維持一個間隙。Of course, in the case where the gate 400''' and the semiconductor layer 402" are both rectangular, one side (two or three sides) of the gate 400"' and one side of the semiconductor layer 402" (two sides or The shortest distance of the three sides is greater than 3 microns; or the semiconductor layer 402" is a plurality of mutually independent semiconductor patterns, and a gap is maintained between any two adjacent semiconductor patterns; or the gate 400"' The shortest distance between one side (two sides or three sides) and one side (two sides or three sides) of the semiconductor layer 402" is greater than 3 micrometers, and the semiconductor layer 402" is a plurality of semiconductor patterns independent of each other, and any two adjacent A gap is maintained between the semiconductor patterns.

圖5為圖1依據本發明另一實施例所繪示的移位暫存器的電路圖。請參照圖2及圖5,其不同之處在於本實施的移位暫存器SR更包括電晶體M3、M4、M5及電容器C2,與相同於圖2的元件其動作亦相似,在此則不再贅述。電晶體M3的閘極耦接至啟始電晶體MS的汲極,電晶體M3的源極耦接至參考電壓VSS。電容器C2耦接於時脈訊號CK(或XCK)與電晶體M3的汲極之間。電晶體M4的汲極耦接至啟始電晶體MS的汲極,電晶體M4的閘極耦接至電晶體M3的汲極,電晶體M4的源極耦接至參考電壓VSS2。電晶體M5的汲極耦接至輸出電晶體MO的源極,電晶體M5的閘極耦接至電晶體M3的汲極,電晶體M5的源極耦接至參考電壓VSS。FIG. 5 is a circuit diagram of a shift register according to another embodiment of the invention. Referring to FIG. 2 and FIG. 5, the difference is that the shift register SR of the present embodiment further includes transistors M3, M4, M5 and a capacitor C2, and the same operation as the element of FIG. 2 is performed here. No longer. The gate of the transistor M3 is coupled to the drain of the start transistor MS, and the source of the transistor M3 is coupled to the reference voltage VSS. The capacitor C2 is coupled between the clock signal CK (or XCK) and the drain of the transistor M3. The gate of the transistor M4 is coupled to the drain of the start transistor MS, the gate of the transistor M4 is coupled to the drain of the transistor M3, and the source of the transistor M4 is coupled to the reference voltage VSS2. The gate of the transistor M5 is coupled to the source of the output transistor MO, the gate of the transistor M5 is coupled to the drain of the transistor M3, and the source of the transistor M5 is coupled to the reference voltage VSS.

圖6為本發明另一實施例所繪示移位暫存器SR的運作時序圖。請參照圖5及圖6,在此同樣以第一個位移暫存器SR為例,在期間T1中,電晶體M3會接收到啟始訊號SS而導通,電晶體M4、M5則呈現不導通,電容器C2經由導通的電晶體M3而耦接至參考電壓VSS。在期間T2中,而導通的電晶體M3將電容器C2耦接於時脈訊號CK與參考電壓VSS之間,並且時脈訊號CK會對電容器C2充電,因此節點B會在時脈訊號CK上升緣出現突波。在期間T3中,電晶體M1及M2會導通,以分別下拉節點A及掃描訊號SC(n)的電壓準位,以致於電晶體M3會不導通。FIG. 6 is a timing diagram showing the operation of the shift register SR according to another embodiment of the present invention. Referring to FIG. 5 and FIG. 6 , the first shift register SR is taken as an example. In the period T1 , the transistor M3 receives the start signal SS and is turned on, and the transistors M4 and M5 are non-conductive. The capacitor C2 is coupled to the reference voltage VSS via the turned-on transistor M3. In the period T2, the turned-on transistor M3 couples the capacitor C2 between the clock signal CK and the reference voltage VSS, and the clock signal CK charges the capacitor C2, so the node B rises at the clock signal CK. There was a surge. During the period T3, the transistors M1 and M2 are turned on to pull down the voltage levels of the node A and the scanning signal SC(n), respectively, so that the transistor M3 is not turned on.

在期間T4中,由於電晶體M3會不導通,因此時脈訊號CK可透過電容器C2拉抬節點B的電壓準位,以致於電晶體M4及M5會導通,而導通的電晶體M4會下拉節點A的電壓準位至參考電壓VSS2,而導通的電晶體M5會下拉掃描訊號SC(n)的電壓準位至參考電壓VSS。值得一提的是,在其他實施例中,電晶體M4的源極亦可耦接至參考電壓VSS,此可依據設計的需求而自行變更。In the period T4, since the transistor M3 is not turned on, the clock signal CK can pull the voltage level of the node B through the capacitor C2, so that the transistors M4 and M5 are turned on, and the turned-on transistor M4 pulls down the node. The voltage level of A is to the reference voltage VSS2, and the turned-on transistor M5 pulls down the voltage level of the scan signal SC(n) to the reference voltage VSS. It is worth mentioning that in other embodiments, the source of the transistor M4 can also be coupled to the reference voltage VSS, which can be changed according to the design requirements.

綜上所述,本發明的移位暫存裝置與主動陣列基板,其透過增加源極分支與閘極的重疊面積,甚至使源極連接線與閘極重疊,以增加輸出電晶體閘極與源極間的電容值。藉此,可減少與輸出電晶體耦接的電容器的電容值,以降低電容器的面積。並且,可藉由使輸出電晶體的半導體層與閘極的面積比例約為0.001至0.9,因此輸出電晶體產生高自發熱時,可以有效地提高散熱率,以避免因自發熱而導致元件的可靠度降低。In summary, the shift register device and the active array substrate of the present invention increase the overlap area of the source branch and the gate, and even overlap the source connection line and the gate to increase the output gate of the transistor. The value of the capacitance between the sources. Thereby, the capacitance value of the capacitor coupled to the output transistor can be reduced to reduce the area of the capacitor. Moreover, by making the ratio of the area of the semiconductor layer and the gate of the output transistor to about 0.001 to 0.9, when the output transistor generates high self-heating, the heat dissipation rate can be effectively improved to avoid the component due to self-heating. Reliability is reduced.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,故本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.

100...主動陣列基板100. . . Active array substrate

102...基板102. . . Substrate

104...驅動電路104. . . Drive circuit

106...主動區106. . . Active zone

108...週邊電路區108. . . Peripheral circuit area

110...畫素結構110. . . Pixel structure

110a...薄膜電晶體110a. . . Thin film transistor

110b...畫素電極110b. . . Pixel electrode

112...掃描線112. . . Scanning line

114‧‧‧資料線114‧‧‧Information line

116‧‧‧源極驅動器116‧‧‧Source Driver

118‧‧‧移位暫存裝置118‧‧‧Shift register

400、400’、400”、400'''‧‧‧閘極400, 400', 400", 400'''‧‧‧ gate

402、402’、402”‧‧‧半導體層402, 402', 402" ‧‧ ‧ semiconductor layer

404‧‧‧汲極分支404‧‧‧Bungan branch

406‧‧‧源極分支406‧‧‧Source branch

408‧‧‧汲極連接線408‧‧‧汲 connection cable

410‧‧‧源極連接線410‧‧‧Source cable

A、B‧‧‧節點A, B‧‧‧ nodes

C1、C2‧‧‧電容器C1, C2‧‧‧ capacitor

Cgs、Cgd‧‧‧等效電容器Cgs, Cgd‧‧‧ equivalent capacitor

CK、XCK‧‧‧時脈訊號CK, XCK‧‧‧ clock signal

L‧‧‧長度L‧‧‧ length

MS、MO、M1~M5‧‧‧電晶體MS, MO, M1~M5‧‧‧O crystal

S‧‧‧間隙S‧‧‧ gap

SC、SC(n)、SC(n+1)‧‧‧掃描訊號SC, SC(n), SC(n+1)‧‧‧ scan signals

SR‧‧‧移位暫存器SR‧‧‧Shift register

SS‧‧‧啟始訊號SS‧‧‧ start signal

T1~T4‧‧‧期間During the period of T1~T4‧‧

VSS、VSS2‧‧‧參考電壓VSS, VSS2‧‧‧ reference voltage

VST‧‧‧垂直啟始訊號VST‧‧‧ vertical start signal

W‧‧‧寬度W‧‧‧Width

圖1為依照本發明一實施例所繪示的主動陣列基板之上視示意圖。FIG. 1 is a top plan view of an active array substrate according to an embodiment of the invention.

圖2為圖1依據本發明一實施例所繪示的移位暫存器的電路圖。FIG. 2 is a circuit diagram of a shift register according to an embodiment of the invention.

圖3為本發明一實施例所繪示移位暫存器SR的運作時序圖。FIG. 3 is a timing diagram showing the operation of the shift register SR according to an embodiment of the invention.

圖4A為依照本發明一實施例所繪示的輸出電晶體MO之上視示意圖。FIG. 4A is a top view of an output transistor MO according to an embodiment of the invention.

圖4B為依照本發明另一實施例所繪示的輸出電晶體MO之上視示意圖。FIG. 4B is a top view of an output transistor MO according to another embodiment of the invention.

圖4C為依照本發明另一實施例所繪示的輸出電晶體MO之上視示意圖。FIG. 4C is a top view of an output transistor MO according to another embodiment of the invention.

圖4D為依照本發明另一實施例所繪示的輸出電晶體MO之上視示意圖。FIG. 4D is a top view of an output transistor MO according to another embodiment of the invention.

圖4E為依照本發明另一實施例所繪示的輸出電晶體MO之上視示意圖。4E is a top view of an output transistor MO according to another embodiment of the invention.

圖5為圖1依據本發明另一實施例所繪示的移位暫存器的電路圖。FIG. 5 is a circuit diagram of a shift register according to another embodiment of the invention.

圖6為本發明另一實施例所繪示移位暫存器SR的運作時序圖。FIG. 6 is a timing diagram showing the operation of the shift register SR according to another embodiment of the present invention.

400...閘極400. . . Gate

402...半導體層402. . . Semiconductor layer

404...汲極分支404. . . Bungee branch

406...源極分支406. . . Source branch

408...汲極連接線408. . . Bungee connection line

410...源極連接線410. . . Source connection line

L...長度L. . . length

W...寬度W. . . width

Claims (17)

一種移位暫存裝置,包括:多個彼此串接的移位暫存器,各該移位暫存器包括:一啟始電晶體,具有一第一閘極、一第一源極以及一第一汲極,該第一閘極耦接至前一級移位暫存器,而該第一源極耦接至一啟始訊號;一輸出電晶體,具有一第二閘極、一第二源極以及一第二汲極,該第二閘極耦接至該第一汲極,該第二源極輸出一掃描訊號,而該第二汲極耦接至一第一時脈訊號,其中該第二閘極與該第二源極之間的電容值(Cgs)大於該第二閘極與該第二汲極之間的電容值(Cgd);一電容器,耦接於該第二源極與該第二閘極之間,其中該第二閘極與該第二源極之間的電容值(Cgs)與該電容器之電容值(C)之比例介於1:100至37:100之間;一第一下拉電路,耦接至該第二閘極;以及一第二下拉電路,耦接至該第二源極。 A shift register device includes: a plurality of shift registers connected in series with each other, each of the shift registers comprising: a start transistor having a first gate, a first source, and a a first gate, the first gate is coupled to the previous stage shift register, and the first source is coupled to a start signal; and an output transistor has a second gate and a second a source and a second drain, the second gate is coupled to the first drain, the second source outputs a scan signal, and the second drain is coupled to a first clock signal, wherein the second drain a capacitance value (Cgs) between the second gate and the second source is greater than a capacitance value (Cgd) between the second gate and the second drain; a capacitor coupled to the second source Between the pole and the second gate, wherein a ratio of a capacitance value (Cgs) between the second gate and the second source to a capacitance value (C) of the capacitor is between 1:100 and 37:100 a first pull-down circuit coupled to the second gate; and a second pull-down circuit coupled to the second source. 如申請專利範圍第1項所述之移位暫存裝置,其中該輸出電晶體為底閘極電晶體。 The shift register device of claim 1, wherein the output transistor is a bottom gate transistor. 如申請專利範圍第2項所述之移位暫存裝置,其中該第二源極包括多個彼此連接的源極分支,而該第二汲極包括多個彼此連接的汲極分支,該些源極分支與該些汲極分支彼此電性絕緣,且該些源極分支的數量大於該些汲極分支的數量。 The shift register device of claim 2, wherein the second source comprises a plurality of source branches connected to each other, and the second drain comprises a plurality of drain branches connected to each other, The source branches and the drain branches are electrically insulated from each other, and the number of the source branches is greater than the number of the drain branches. 如申請專利範圍第2項所述之移位暫存裝置,其中該些源極分支與該第二閘極的重疊面積大於該些汲極分支與該第二閘極的重疊面積。 The shift register device of claim 2, wherein an overlap area of the source branches and the second gates is larger than an overlap area of the drain branches and the second gates. 如申請專利範圍第1項所述之移位暫存裝置,其中該輸出電晶體為頂閘極電晶體。 The shift register device of claim 1, wherein the output transistor is a top gate transistor. 如申請專利範圍第5項所述之移位暫存裝置,其中該第二源極包括多個彼此連接的源極分支,而該第二汲極包括多個彼此連接的汲極分支,該些源極分支與該些汲極分支彼此電性絕緣,且該些源極分支的數量大於該些汲極分支的數量。 The shift register device of claim 5, wherein the second source comprises a plurality of source branches connected to each other, and the second drain comprises a plurality of drain branches connected to each other, The source branches and the drain branches are electrically insulated from each other, and the number of the source branches is greater than the number of the drain branches. 如申請專利範圍第5項所述之移位暫存裝置,其中該些源極分支與該第二閘極的重疊面積大於該些汲極分支與該第二閘極的重疊面積。 The shift register device of claim 5, wherein an overlap area of the source branches and the second gates is larger than an overlap area of the drain branches and the second gates. 如申請專利範圍第1項所述之移位暫存裝置,其中該輸出電晶體具有一半導體層,且該半導體層與該閘極的面積比例約為0.001至0.9。 The shift register device of claim 1, wherein the output transistor has a semiconductor layer, and an area ratio of the semiconductor layer to the gate is about 0.001 to 0.9. 如申請專利範圍第1項所述之移位暫存裝置,其中該第二閘極為一矩形閘極,而該半導體層為一矩形半導體層。 The shift register device of claim 1, wherein the second gate is a rectangular gate and the semiconductor layer is a rectangular semiconductor layer. 如申請專利範圍第9項所述之移位暫存裝置,其中該矩形閘極為一正方形閘極,而該半導體層為一正方形半導體層。 The shift register device of claim 9, wherein the rectangular gate is a square gate and the semiconductor layer is a square semiconductor layer. 如申請專利範圍第9項所述之移位暫存裝置,其中該矩形閘極為一長方形閘極,而該半導體層為一長方形半導體層。 The shift register device of claim 9, wherein the rectangular gate is a rectangular gate and the semiconductor layer is a rectangular semiconductor layer. 如申請專利範圍第11項所述之移位暫存裝置,其 中該些源極分支與該些汲極分支的延伸方向平行於該矩形閘極的二短邊,且該些源極分支與該些汲極分支分別從該矩形閘極的二長邊延伸至該半導體層上。 A shift register device according to claim 11 of the patent application, The source branches and the extension directions of the drain branches are parallel to the two short sides of the rectangular gate, and the source branches and the drain branches respectively extend from the two long sides of the rectangular gate to On the semiconductor layer. 如申請專利範圍第9項所述之移位暫存裝置,其中該矩形閘極的至少一邊與該矩形半導體層的一邊的最短距離大於3微米。 The shift register device of claim 9, wherein a shortest distance between at least one side of the rectangular gate and one side of the rectangular semiconductor layer is greater than 3 micrometers. 如申請專利範圍第1項所述之移位暫存裝置,其中該些源極分支與該些汲極分支的延伸方向彼此平行。 The shift register device of claim 1, wherein the source branches and the extension directions of the drain branches are parallel to each other. 如申請專利範圍第1項所述之移位暫存裝置,其中該半導體層包括多個彼此獨立之半導體圖案,且任二相鄰的該些半導體圖案之間維持一間隙。 The shift register device of claim 1, wherein the semiconductor layer comprises a plurality of semiconductor patterns independent of each other, and a gap is maintained between any two adjacent semiconductor patterns. 如申請專利範圍第15項所述之移位暫存裝置,其中該間隙約為3微米至100微米。 The shift register device of claim 15, wherein the gap is about 3 microns to 100 microns. 一種主動陣列基板,包括:一基板,具有一主動區以及一週邊電路區;一驅動電路,位於該基板上並位於該週邊電路區內,該驅動電路包括如申請專利範圍第1項至第17項中任一項所述之移位暫存裝置;以及一主動陣列,位於該基板上並位於該主動區內,與該驅動電路電性連接。 An active array substrate comprises: a substrate having an active region and a peripheral circuit region; a driving circuit located on the substrate and located in the peripheral circuit region, the driving circuit comprising the first to the 17th as claimed in the patent scope The shift register device of any one of the preceding claims; and an active array on the substrate and located in the active region, electrically connected to the driving circuit.
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