TWI416204B - Method of fabricating a capacitive touch panel - Google Patents

Method of fabricating a capacitive touch panel Download PDF

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Publication number
TWI416204B
TWI416204B TW98114569A TW98114569A TWI416204B TW I416204 B TWI416204 B TW I416204B TW 98114569 A TW98114569 A TW 98114569A TW 98114569 A TW98114569 A TW 98114569A TW I416204 B TWI416204 B TW I416204B
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forming
conductive
substrate
insulating
conductive patterns
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TW98114569A
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TW201039002A (en
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Chao Sung Li
Lien Hsin Lee
Kai Meng
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Innolux Corp
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Abstract

The present invention relates to a method of fabricating a capacitive touch panel. The method comprises: providing a substrate; forming a plurality groups of first conductive patterns that stretch along a first direction, a plurality groups of second conductive patterns that stretch along a second direction and a plurality of first connection components; forming a plurality of curved insulation mounds that covers the first connection components; then forming a plurality of second connection components to electrically connect each second conductive patterns of the same group.

Description

電容式觸控螢幕的製作方法Capacitive touch screen manufacturing method

本發明係提供一種觸控螢幕的製作方法,特別是一種準確性高且步驟簡單的電容式觸螢幕的控製作方法。The invention provides a method for manufacturing a touch screen, in particular to a control method for a capacitive touch screen with high accuracy and simple steps.

在現今各式消費性電子產品市場中,個人數位助理(personal digital assistant,PDA)、行動電話(mobile Phone)及筆記型電腦(notebook)等可攜式電子產品乃至於個人電腦、數位家電系統皆已逐漸使用觸控面板(touch panel)作為使用者與電子裝置間之資料溝通介面工具。使用觸控面板時,使用者可直接透過螢幕上顯示的物件進行操作與下達指令,因此可提供使用者更人性化的操作介面。此外電子產品的設計皆以輕、薄、短、小為方向,因此在產品設計上希望能節省如按鍵、鍵盤、滑鼠等傳統輸入裝置的設置空間,因此搭配觸控式面板的顯示裝置已逐漸成為各式電子產品的關鍵零組件之一。In today's consumer electronics market, portable digital products such as personal digital assistants (PDAs), mobile phones, and notebooks are even personal computers and digital home appliances. The touch panel has been gradually used as a data communication interface tool between the user and the electronic device. When using the touch panel, the user can directly operate and release commands through the objects displayed on the screen, thereby providing a more user-friendly operation interface. In addition, the design of electronic products is light, thin, short, and small. Therefore, in product design, it is hoped to save the installation space of traditional input devices such as buttons, keyboards, and mouse. Therefore, the display device with the touch panel has been It has gradually become one of the key components of various electronic products.

習知的觸控面板依照其偵測方式,可概分為電容式、電阻式或者是波動式的觸控螢幕,各自具有不同的優缺點與適用領域。電阻式觸控面板係由上、下兩組透明導電薄膜疊合而成,使用者按壓觸碰時使得其上、下電極導通,經由其電壓變化之量測而可計算觸碰點的位置。波動式的觸控螢幕則是在螢幕的X軸與Y軸的一側設置波動源,通常是紅外線或超音波,並在另一側設置接收源,當使用者觸碰時,其波形即受到干擾,此干擾圖形被接收源感知而可計算出觸碰位置。而電容式觸控螢幕則是在面板四個角落提供均勻電場,並利用使用者觸碰後所引起的電容變化來檢測輸入座標。According to the detection method, the conventional touch panel can be roughly classified into a capacitive, resistive or wave-type touch screen, each having different advantages and disadvantages and applicable fields. The resistive touch panel is formed by stacking two upper and lower transparent conductive films. When the user presses the touch, the upper and lower electrodes are turned on, and the position of the touch point can be calculated through the measurement of the voltage change. The wave-type touch screen is equipped with a wave source on the X-axis and Y-axis side of the screen, usually infrared or ultrasonic, and the receiving source is set on the other side. When the user touches, the waveform is affected. Interference, the interference pattern is sensed by the receiving source to calculate the touch position. The capacitive touch screen provides a uniform electric field at the four corners of the panel, and detects the input coordinates by using the capacitance change caused by the user's touch.

一般電容式觸控螢幕由於具有防塵、耐高溫,並且可多點觸控的優點,因此廣泛應用於各種電子攜帶式產品。但習知電容式觸控螢幕至少需要有五層膜的堆疊,無法得 到良好的產品透光率,使得其顯示品質下降,且其厚重的體積亦難整合於目前輕薄的電子裝置中。另外多層膜的結構在製程上更為煩瑣,尤其若其感測的導電薄膜分別位於透明基板的兩側,其製程的難度更加提升。Generally, capacitive touch screens are widely used in various electronic portable products because of their advantages of dustproof, high temperature resistance and multi-touch. However, the conventional capacitive touch screen requires at least five layers of film stacking, which cannot be obtained. To a good product transmittance, its display quality is degraded, and its heavy volume is difficult to integrate into the current thin and light electronic devices. In addition, the structure of the multilayer film is more cumbersome in the process, especially if the sensed conductive films are respectively located on both sides of the transparent substrate, and the process difficulty is further improved.

本發明係提供一種電容式觸控螢幕的製作方法,以解決習知技術中多層堆疊所產生產品透光率下降且製程煩雜之問題。The invention provides a method for manufacturing a capacitive touch screen, which solves the problem that the light transmittance of the product produced by the multi-layer stack in the prior art is reduced and the process is troublesome.

根據本發明之申請專利範圍,本發明係揭露一種製作觸控螢幕的方法。該方法包括下列步驟,首先提供一基板,接著於基板上形成複數組沿一第一方向排列之第一導電圖案、複數組沿一第二方向排列之第二導電圖案以及複數個連接部,其中位於同一組之各第一導電圖案係透過其間之各連接部與各相鄰之第一導電圖案電性連接,而各組之第二導電圖案與各組之第一導電圖案係錯位設置且彼此電性絕緣。接著形成複數個具有弧度之絕緣丘,以至少覆蓋住各連接部之部份。最後在絕緣丘上形成複數個橋接元件,使得位於同一組之各第二導電圖案透過各橋接元件與各相鄰之第二導電圖案電性連接。In accordance with the scope of the present invention, the present invention discloses a method of making a touch screen. The method includes the following steps, first providing a substrate, and then forming a first array of conductive patterns arranged in a first direction, a second conductive pattern arranged in a second direction, and a plurality of connecting portions on the substrate, wherein Each of the first conductive patterns in the same group is electrically connected to each of the adjacent first conductive patterns through the connecting portions therebetween, and the second conductive patterns of each group are misaligned with the first conductive patterns of each group and are mutually arranged Electrical insulation. A plurality of insulating hills having a curvature are then formed to cover at least portions of the joints. Finally, a plurality of bridging elements are formed on the insulating mound such that the second conductive patterns in the same group are electrically connected to the adjacent second conductive patterns through the bridging elements.

本發明還提供另一種製作觸控螢幕的方法。該方法包括包括下列步驟,首先提供一基板,接著於基板上形成複數組沿一第一方向排列之第一導電圖案以及複數個連接部,其中位於同一組之各第一導電圖案係透過各連接部與各相鄰之第一導電圖案電性連接。接著形成複數個具有弧度之絕緣丘,以至少覆蓋住各連接部之部份。最後在基板上形成複數組沿一第二方向排列之第二導電圖案以及複數個橋接元件,其中各組之第二導電圖案與各組之第一導電圖案係錯位設置且彼此電性絕緣,而各橋接元件係形成於各絕緣丘上,使得位於同一組之各第二導電圖案係透過各橋接元件與各相鄰之第二導電圖案電性連接。The present invention also provides another method of making a touch screen. The method includes the steps of: first providing a substrate, and then forming a first array of conductive patterns arranged in a first direction and a plurality of connecting portions on the substrate, wherein each of the first conductive patterns in the same group passes through the respective connections The portion is electrically connected to each of the adjacent first conductive patterns. A plurality of insulating hills having a curvature are then formed to cover at least portions of the joints. Finally, a second conductive pattern arranged in a second direction and a plurality of bridging elements are formed on the substrate, wherein the second conductive patterns of each group are offset from each other and electrically insulated from each other, and Each of the bridging elements is formed on each of the insulating mounds such that the second conductive patterns in the same group are electrically connected to the adjacent second conductive patterns through the respective bridging elements.

本發明還提供另一種製作觸控螢幕的方法。該方法包括下列步驟,首先提供一基板,接著於基板上形成複數個橋接元件。接著形成複數個具有弧度之絕緣丘,以分別覆蓋住各橋接元件,並裸露出各橋接元件之部份。接著於基板上形成複數組沿一第一方向排列之第一導電圖案、複數組沿一第二方向排列之第二導電圖案以及複數個連接部,其中位於同一組之各第一導電圖案係透過其間之各連接部與各相鄰之第一導電圖案電性連接,而各組之第二導電圖案與各組之第一導電圖案係錯位設置且彼此電性絕緣,位於同一組之各第二導電圖案係透過埋臥於各絕緣丘下方之各橋接元件與各相鄰之第二導電圖案電性連接。The present invention also provides another method of making a touch screen. The method includes the steps of first providing a substrate and then forming a plurality of bridging elements on the substrate. A plurality of insulating hills having a curvature are then formed to cover the bridging elements, respectively, and to expose portions of the bridging elements. And forming a first conductive pattern arranged in a first direction, a second conductive pattern arranged in a second direction, and a plurality of connecting portions on the substrate, wherein each of the first conductive patterns in the same group is transmitted through Each of the connecting portions is electrically connected to each of the adjacent first conductive patterns, and the second conductive patterns of each group are offset from each other and electrically insulated from each other, and are located in the second group of the same group. The conductive pattern is electrically connected to each adjacent second conductive pattern through each of the bridging elements buried under each insulating dome.

依據本發明所提供之電容式觸控螢幕的製作方法,能製作一種少層堆疊且高透光率之電容式觸控螢幕,不僅製程簡單,且能配合各種連接元件的材質進行製作,並提供一圓弧之絕緣丘結構,能確保橋接結構之完整,可大大提高產品的良率以及使用壽命。According to the manufacturing method of the capacitive touch screen provided by the invention, a capacitive touch screen with a small stack and high transmittance can be fabricated, which is not only simple in process, but also can be made with materials of various connecting components, and provides An arc-shaped insulating hill structure ensures the integrity of the bridge structure and greatly improves the yield and service life of the product.

請參閱圖1至圖8,圖1至圖8所繪示為本發明中一種製作電容式觸控螢幕方法的第一實施例。請參閱圖1,首先提供一基板301。基板301可包括有機材質或無機材質,例如玻璃、石英、塑膠、樹脂、壓克力或其他合適的透明材質。接著於基板301上形成一透明導電層(未顯示),其可為單層或多層結構,材質包括習知各種透明導電材質,例如氧化銦錫(ITO)、氧化銦鋅(IZO)、氧化鋅鋁(AZO)、氧化鋅鎵(GZO)和氧化銦鎂(MIO)等。Please refer to FIG. 1 to FIG. 8 . FIG. 1 to FIG. 8 illustrate a first embodiment of a method for fabricating a capacitive touch screen according to the present invention. Referring to FIG. 1, a substrate 301 is first provided. The substrate 301 may comprise an organic material or an inorganic material such as glass, quartz, plastic, resin, acrylic or other suitable transparent material. Then, a transparent conductive layer (not shown) is formed on the substrate 301, which may be a single layer or a multilayer structure, and the material includes various transparent conductive materials such as indium tin oxide (ITO), indium zinc oxide (IZO), and zinc oxide. Aluminum (AZO), zinc gallium oxide (GZO), and indium magnesium oxide (MIO).

接著如圖1所示,進行一微影暨蝕刻製程(photo-etching-process,PEP)以圖案化該透明導電層,使得透明導電層在基板301表面同時形成複數組第一導電圖案303、複數組第二導電圖案307以及複數個連接部305。其中,各組之第一導電圖案303分別沿著一第一方向309排 列,各組之第二導電圖案307分別沿一第二方向311排列。而位於同一組之各第一導電圖案303係透過其間之各連接部305與各相鄰之第一導電圖案電性連接且彼此為一體成型。另外,每一組之第二導電圖案307則與各組之第一導電圖案303係錯位設置並彼此電性絕緣。Then, as shown in FIG. 1 , a photo-etching-process (PEP) is performed to pattern the transparent conductive layer, so that the transparent conductive layer simultaneously forms a complex array of first conductive patterns 303 on the surface of the substrate 301. The second conductive pattern 307 and a plurality of connecting portions 305 are disposed. The first conductive patterns 303 of each group are respectively arranged along a first direction 309. The second conductive patterns 307 of each group are arranged along a second direction 311, respectively. The first conductive patterns 303 in the same group are electrically connected to the adjacent first conductive patterns through the connecting portions 305 therebetween and integrally formed with each other. In addition, each of the second conductive patterns 307 is disposed offset from the first conductive patterns 303 of each group and electrically insulated from each other.

如圖1所示,在本發明之實施例當中,第一方向309與第二方向311為垂直相交,但亦可改變其導電圖案之排列分布,使第一方向309與第二方向311呈一非垂直之夾角。而所屬領域中具有通常知識者應可理解,若將該基板301沿逆時針或順時針旋轉90度所產生之排列,例如使各組之第一導電圖案303係沿第二方向311排列,而各組之第二導電圖案307沿第一方向309排列之方式,其仍為本發明之均等變化與修飾,皆應屬本發明之涵蓋範圍。As shown in FIG. 1 , in the embodiment of the present invention, the first direction 309 and the second direction 311 are perpendicularly intersected, but the arrangement of the conductive patterns may be changed such that the first direction 309 and the second direction 311 are one. Non-vertical angle. It should be understood by those of ordinary skill in the art that if the substrate 301 is rotated 90 degrees counterclockwise or clockwise, for example, the first conductive patterns 303 of each group are arranged along the second direction 311. The manner in which the second conductive patterns 307 of the respective groups are arranged along the first direction 309, which are still equivalent variations and modifications of the present invention, are all within the scope of the present invention.

隨後於基板301的邊緣形成複數條導線308。其中各導線308之一端分別連接各組(行)之第一導電圖案303與各組(列)之第二導電圖案307,另一端延伸至該基板301之邊緣,以作為後續連接至面板外部的控制電路使用。形成各組導線308的步驟,還可包括於基板301的邊緣形成至少一個對準標記(alignment mark)310,以協助後續面板上各製程的定位校準。上述形成導線308與對準標記310的步驟,應不限於形成第一導電圖案303、第二導電圖案307與連接部305之後,亦可於第一導電圖案303、第二導電圖案307與連接部305形成之前或同時形成,或在不影響其他製程情況下,設置於其他步驟之間。A plurality of wires 308 are then formed at the edges of the substrate 301. One end of each of the wires 308 is connected to the first conductive pattern 303 of each group (row) and the second conductive pattern 307 of each group (column), and the other end extends to the edge of the substrate 301 for subsequent connection to the outside of the panel. Control circuit is used. The step of forming each set of wires 308 may further include forming at least one alignment mark 310 at the edge of the substrate 301 to assist in positioning calibration of each process on the subsequent panel. The step of forming the wire 308 and the alignment mark 310 is not limited to the formation of the first conductive pattern 303, the second conductive pattern 307, and the connecting portion 305, and may be performed on the first conductive pattern 303, the second conductive pattern 307, and the connecting portion. The 305 is formed before or at the same time, or is disposed between other steps without affecting other processes.

接著請參閱圖2,圖2分為左半部L與右半部R兩部份,左半部L為圖1中區塊A之放大示意圖,而右半部R為區塊A中沿著切線BB’之剖面示意圖,藉此以更清楚表示本發明細部元件之製作流程。如圖2所示,於基板301上全面形成一光阻層(未顯示)或其他光敏絕緣層,經過對準標記310之位置校正後對光阻層進行一微影製程,例如 曝光與顯影,以形成複數個光阻圖案313,且各光阻圖案313係分別覆蓋住相對應之各連接部305,較佳者為至少覆蓋住各連接部305與其所連接之第一導電圖案303之部份,如圖2所示。Referring to FIG. 2, FIG. 2 is divided into two parts of the left half L and the right half R, the left half L is an enlarged schematic view of the block A in FIG. 1, and the right half R is along the block A. A schematic cross-sectional view of the tangent line BB', whereby the manufacturing process of the detailed component of the present invention is more clearly shown. As shown in FIG. 2, a photoresist layer (not shown) or other photosensitive insulating layer is formed on the substrate 301, and the photoresist layer is subjected to a lithography process after being aligned with the alignment mark 310, for example, Exposure and development to form a plurality of photoresist patterns 313, and each of the photoresist patterns 313 respectively covers the corresponding connection portions 305, preferably at least covering the connection portions 305 and the first conductive patterns connected thereto Part 303, as shown in Figure 2.

然後請參閱圖3,進行一烘烤製程(未顯示),其烘烤溫度範圍為200至300℃,較佳者為220℃,並持續進行約1小時。於烘烤時,各光阻圖案313會產生一內聚現象,使得各光阻圖案313分別形成一具有弧度之絕緣丘315。Referring now to Figure 3, a baking process (not shown) is carried out having a baking temperature in the range of 200 to 300 ° C, preferably 220 ° C, for about 1 hour. When baking, each photoresist pattern 313 generates a cohesion phenomenon, so that each photoresist pattern 313 forms an insulating hill 315 having a curvature.

值得注意的是,相較於習知光阻層於微影暨蝕刻製程後皆會被移除,本發明之絕緣丘315係直接由光阻圖案313烘烤而形成,因此其選用之材質除了具有光敏性以外,亦須考慮其持久與穩固性,以提供絕緣丘315穩固與支撐之功用。It is worth noting that, compared with the conventional photoresist layer, it will be removed after the lithography and etching process. The insulating mound 315 of the present invention is directly formed by baking the photoresist pattern 313, so that the selected material is photosensitive. In addition to its nature, its durability and stability must also be considered to provide the stability and support of the insulating mound 315.

除了上述直接以一光阻層來形成絕緣丘315以外,亦可利用微影暨蝕刻製程來加以製備。例如先於基板上形成一絕緣層,接著蝕刻該絕緣層以形成複數個絕緣圖案並分別部份覆蓋各連接部。最後再進行一熱回流(reflow)製程,使得各絕緣圖案分別形成具有弧度之各絕緣丘315。或者,本發明之絕緣丘315還可利用噴墨塗佈(ink jet printing)來加以製作。In addition to forming the insulating mound 315 directly with a photoresist layer as described above, it can also be prepared by using a photolithography and etching process. For example, an insulating layer is formed on the substrate, and then the insulating layer is etched to form a plurality of insulating patterns and partially cover the respective connecting portions. Finally, a thermal reflow process is performed such that each of the insulating patterns forms an insulating mound 315 having a curvature. Alternatively, the insulating mound 315 of the present invention can also be fabricated by ink jet printing.

形成絕緣丘315後,接著請參閱圖4,於基板301上全面沈積一光阻層317,光阻層317係採用一剝離(lift-off)式光阻材質,接著進行一軟烤(soft bake)製程。並藉由對準標記310之定位以進行一曝光(exposure)步驟,隨後於基板301進行一烘烤製程319。特別的是,此烘烤製程319係針對基板301的背部進行烘烤,亦即以熱傳導之方式通過基板301來對光阻層317之底部進行加熱。其烘烤之溫度範圍為80至120℃,較佳者為100℃,進行時間約為90秒。之後進行一顯影(development)製程與一硬烤(hard bake)製程,以在光阻層317上形成複數個孔洞321。其中各孔洞 321均暴露其對應之各絕緣丘315及各第二導電圖案307之部份。由於在顯影製程之前還具有一對基板301底面之烘烤步驟319,因此光阻層317所形成之各孔洞321皆具有一由下而上漸縮的開口結構,並具有一傾斜內壁323,如圖4所示。在本發明之實施例中,傾斜內壁323與基板301表面之夾角θ係小於90度,較佳者為45度≦θ<90度。After forming the insulating mound 315, referring to FIG. 4, a photoresist layer 317 is deposited on the substrate 301. The photoresist layer 317 is made of a lift-off photoresist material, followed by a soft bake (soft bake). )Process. And an exposure step is performed by aligning the alignment mark 310, and then a baking process 319 is performed on the substrate 301. In particular, the baking process 319 is to bake the back of the substrate 301, that is, to heat the bottom of the photoresist layer 317 through the substrate 301 in a thermally conductive manner. The baking temperature ranges from 80 to 120 ° C, preferably 100 ° C, for a time of about 90 seconds. A development process and a hard bake process are then performed to form a plurality of holes 321 in the photoresist layer 317. Each hole Each of the 321 portions exposes a portion of the corresponding insulating mound 315 and each of the second conductive patterns 307. Because of the baking step 319 of the bottom surface of the pair of substrates 301 before the development process, each of the holes 321 formed by the photoresist layer 317 has an opening structure which is tapered from the bottom to the top and has an inclined inner wall 323. As shown in Figure 4. In an embodiment of the invention, the angle θ between the inclined inner wall 323 and the surface of the substrate 301 is less than 90 degrees, preferably 45 degrees ≦ θ < 90 degrees.

接著請參閱圖5,於基板301上全面形成一導電薄膜325。導電薄膜325可包括各種透明導電材質,例如ITO、IZO等,或為各種金屬材質,如銅、鋁等。特別的是,本發明中形成導電薄膜325的步驟,係採用非等向性的沈積方式,例如一濺鍍(sputtering)或蒸鍍(evaporation)製程。是以,本發明便可在各孔洞321具有「上小下大」的開口結構情況下,將導電薄膜325以一具方向性的沈積方式形成於基板301上,故不論是ITO或是金屬材質所形成的導電薄膜325,皆只會覆蓋於光阻層317表面以及位於各孔洞321內之絕緣丘315及第二導電圖案307的部份,且藉由光阻層317的遮蔽,在孔洞321的傾斜內壁323上並沒有導電薄膜325的形成。如圖5所示,各導電薄膜325係沿著相對應之絕緣丘315之弧度而形成,並跨接兩相鄰之第二導電圖案307a、307b,並使其電性相連。Referring to FIG. 5, a conductive film 325 is formed on the substrate 301. The conductive film 325 may include various transparent conductive materials such as ITO, IZO, etc., or various metal materials such as copper, aluminum, and the like. In particular, the step of forming the conductive film 325 in the present invention is carried out by an anisotropic deposition method such as a sputtering or evaporation process. Therefore, in the present invention, the conductive film 325 can be formed on the substrate 301 by a directional deposition method in the case where each of the holes 321 has an opening structure of "upper and lower", so whether it is ITO or metal. The conductive film 325 is formed only on the surface of the photoresist layer 317 and the portions of the insulating hills 315 and the second conductive patterns 307 in the holes 321 and is shielded by the photoresist layer 317 in the holes 321 There is no formation of the conductive film 325 on the inclined inner wall 323. As shown in FIG. 5, each of the conductive films 325 is formed along the arc of the corresponding insulating mound 315, and is connected to and electrically connected to the two adjacent second conductive patterns 307a, 307b.

接著請參閱圖6,剝除光阻層317,例如以適當的清洗液去除光阻層317。由於孔洞321的傾斜內壁323上並沒有覆蓋導電薄膜325,部份之光阻層317也因此暴露至外部環境。因此清洗液可順利接觸光阻層317並將其移除,連帶移除了覆蓋於光阻層317上的導電薄膜325,但位於各絕緣丘315上導電薄膜325並未被移除。如此一來,各組(列)相鄰的第二導電圖案307a、307b便可順利地透過其間之導電薄膜325而電性連接,使得跨接於各絕緣丘315上方之導電薄膜325形成了橋接元件327。Next, referring to FIG. 6, the photoresist layer 317 is stripped, for example, the photoresist layer 317 is removed with a suitable cleaning solution. Since the conductive film 325 is not covered on the inclined inner wall 323 of the hole 321, the portion of the photoresist layer 317 is thus exposed to the external environment. Therefore, the cleaning liquid can smoothly contact the photoresist layer 317 and remove it, and the conductive film 325 covering the photoresist layer 317 is removed, but the conductive film 325 is not removed on each of the insulating hills 315. In this way, the adjacent second conductive patterns 307a, 307b of each group (column) can be electrically connected through the conductive film 325 therebetween, so that the conductive film 325 across the insulating hills 315 forms a bridge. Element 327.

藉由上述步驟,即可在基板301之同一側形成兩不同方向排列之複數組(行)第一導電圖案303與複數組(列)第二導電圖案307,如圖7所示。同組(行)之各第一導電圖案303透過各連接部305延伸於第一方向309,而同組(列)之各第二導電圖案307則透過各橋接元件327延伸於第二方向311。各橋接元件327跨接於各絕緣丘315上,因此仍能維持各第一導電圖案303與各第二導電圖案307彼此電性絕緣。如此一來,位於基板301同一側表面之各第一導電圖案303與各第二導電圖案307所形成之佈局,即可作為電容式觸控螢幕的感應電極,以分別感應使用者觸碰位置於第一方向309與第二方向311兩方向之座標軸度,藉以偵測其觸碰位置。By the above steps, a complex array (row) of first conductive patterns 303 and a plurality of arrays (columns) of second conductive patterns 307 arranged in two different directions can be formed on the same side of the substrate 301, as shown in FIG. Each of the first conductive patterns 303 of the same group (rows) extends through the respective connection portions 305 in the first direction 309, and the second conductive patterns 307 of the same group (columns) extend through the respective bridge members 327 in the second direction 311. The bridging elements 327 are connected across the insulating mounds 315, so that the first conductive patterns 303 and the second conductive patterns 307 can be electrically insulated from each other. In this way, the layouts formed by the first conductive patterns 303 and the second conductive patterns 307 on the same side surface of the substrate 301 can be used as the sensing electrodes of the capacitive touch screen to respectively sense the touch position of the user. The coordinate axis of the first direction 309 and the second direction 311 are both to detect the touch position.

另外,若構成橋接元件327的材質為金屬時,由於蝕刻率的差異,因此形成橋接元件327之金屬製程並不會影響ITO所形成的第一導電圖案303、第二導電圖案307及連接部305,故可直接進行一習知之圖案化之金屬製程,以取代圖4與圖5之步驟。例如,在圖3形成絕緣丘315步驟之後,請參閱圖8,於基板301上全面性形成一金屬層329,再直接圖案化此金屬層329,以形成如圖6所示之各橋接元件327。由於設於各第二導電圖案307間之橋接元件327的面積很小,所以不透明的金屬材質並不會影響觸控螢幕的透光率,而且藉由金屬的低電阻又可補償各第二導電圖案307與各橋接元件327之串接介面的影響,而得到一良好之導電率。In addition, when the material constituting the bridge member 327 is metal, the metal process for forming the bridge member 327 does not affect the first conductive pattern 303, the second conductive pattern 307, and the connection portion 305 formed by the ITO due to the difference in etching rate. Therefore, a conventionally patterned metal process can be directly performed instead of the steps of FIGS. 4 and 5. For example, after the step of forming the insulating mound 315 in FIG. 3, referring to FIG. 8, a metal layer 329 is formed on the substrate 301 in a comprehensive manner, and the metal layer 329 is directly patterned to form the bridging elements 327 as shown in FIG. . Since the area of the bridging element 327 disposed between the second conductive patterns 307 is small, the opaque metal material does not affect the transmittance of the touch screen, and the second conductive can be compensated by the low resistance of the metal. The effect of the pattern 307 and the series interface of the bridging elements 327 results in a good electrical conductivity.

於本發明之第二實施例中,亦可先形成第一導電圖案與連接部,接著形成絕緣丘,最後再形成第二導電圖案與橋接元件。請參閱圖9至圖11,為本發明製作電容式觸控螢幕之方法的第二實施例示意圖。請先參考圖9,首先提供一基板401,接著於基板401上形成複數組沿一第一方向409排列之第一導電圖案403以及複數個連接部405, 位於同一組之各第一導電圖案403係透過各連接部405與各相鄰之第一導電圖案403電性連接,較佳者為第一導電圖案403與連接部405同時形成。第一導電圖案403與連接部405的材質包括各種透明導電材質如ITO等,其形成方式與前述相同,在此不再贅述。In the second embodiment of the present invention, the first conductive pattern and the connecting portion may be formed first, then the insulating mound is formed, and finally the second conductive pattern and the bridging element are formed. Please refer to FIG. 9 to FIG. 11 , which are schematic diagrams showing a second embodiment of a method for fabricating a capacitive touch screen according to the present invention. Referring to FIG. 9 , a substrate 401 is first provided, and then a first conductive pattern 403 and a plurality of connecting portions 405 arranged in a first direction 409 are formed on the substrate 401. The first conductive patterns 403 located in the same group are electrically connected to the adjacent first conductive patterns 403 through the respective connecting portions 405. Preferably, the first conductive patterns 403 and the connecting portions 405 are simultaneously formed. The material of the first conductive pattern 403 and the connecting portion 405 includes various transparent conductive materials such as ITO, and the like is formed in the same manner as described above, and details are not described herein again.

隨後形成複數個具有弧度之絕緣丘415,以至少覆蓋住各連接部405之部份。絕緣丘415之形成方式和前述相同,在此不多做描述。A plurality of insulating hills 415 having a curvature are then formed to cover at least portions of the connecting portions 405. The manner in which the insulating mounds 415 are formed is the same as described above and will not be described here.

接著,在基板401上形成第二導電圖案407與橋接元件427。形成第二導電圖案407與橋接元件427的步驟,可使用前述剝離(lift-off)式光阻的方式來形成,請參考圖4至圖6,其差別僅將孔洞321的範圍由原先橋接元件327的範圍擴大至第二導電圖案407加上橋接元件427的範圍,其細節和前述相同,在此不多做描述。或者,請參考圖10,圖10為圖9中區域C之放大圖,左半部L為區域C中使用之光罩圖案414示意圖(以下詳述),而右半部R為區域C之立體示意圖。首先,在基板401上全面沈積一透明導電薄膜(未顯示),接著於其上方沈積一光阻層(未顯示),隨後進行一微影暨蝕刻製程,其使用之光罩圖案414如圖10之左半部L所示。此光罩圖案414包括四個區域,區域4141對應為第一導電圖案403,區域4142對應為連接部405,區域4143對應為第二導電圖案407,區域4144則對應為橋接元件427。其中區域4142相對於已在基板401上形成並被絕緣丘415覆蓋之連接部405,區域4142所涵蓋的區域係些微向內突出於絕緣丘之上(絕緣丘之位置,在圖10中以虛線顯示為區域D)。因此,經微影暨蝕刻製程後,此導電薄膜會形成第二導電圖案407、橋接元件427、輔助第一導電圖案404與輔助連接部406,係分別對應於光罩圖案414之四個區域,如圖10右半部R所示。特別的是,輔助第一導電圖案404係形成於已存在之第一導電圖 案403上,而輔助連接部406係形成於未被絕緣丘415覆蓋之連接部405上,而呈現一雙層之導電結構,如圖10右半部R所示。且由於光罩圖案414之區域4142係些微部份突出於絕緣丘,因此所對應形成之輔助連接部406除了形成在連接部405上,還有部份會形成於絕緣丘415上,此凸出之結構可以確保輔助連接部406與下方連接部405之電性連接而避免其斷線。Next, a second conductive pattern 407 and a bridging element 427 are formed on the substrate 401. The step of forming the second conductive pattern 407 and the bridging element 427 may be formed by using the aforementioned lift-off type photoresist, please refer to FIG. 4 to FIG. 6, the difference is only that the range of the hole 321 is from the original bridging element. The range of 327 is extended to the extent of the second conductive pattern 407 plus the bridging element 427, the details of which are the same as previously described and will not be described here. Alternatively, please refer to FIG. 10. FIG. 10 is an enlarged view of a region C in FIG. 9. The left half L is a schematic view of the reticle pattern 414 used in the region C (described in detail below), and the right half R is a solid portion of the region C. schematic diagram. First, a transparent conductive film (not shown) is deposited on the substrate 401, and then a photoresist layer (not shown) is deposited thereon, followed by a lithography and etching process, and the reticle pattern 414 is used as shown in FIG. The left half L is shown. The reticle pattern 414 includes four regions, the region 4141 corresponds to the first conductive pattern 403, the region 4142 corresponds to the connection portion 405, the region 4143 corresponds to the second conductive pattern 407, and the region 4144 corresponds to the bridging element 427. Wherein the region 4142 is opposite to the connecting portion 405 which has been formed on the substrate 401 and covered by the insulating mound 415, and the region covered by the region 4142 protrudes slightly inward from the insulating mound (the position of the insulating mound, which is dotted in FIG. 10) Displayed as area D). Therefore, after the lithography and etching process, the conductive film forms the second conductive pattern 407, the bridging element 427, the auxiliary first conductive pattern 404 and the auxiliary connecting portion 406, respectively corresponding to the four regions of the reticle pattern 414. As shown in the right half of Figure 10R. In particular, the auxiliary first conductive pattern 404 is formed on the existing first conductive pattern On the case 403, the auxiliary connecting portion 406 is formed on the connecting portion 405 which is not covered by the insulating mound 415, and presents a double-layered conductive structure as shown in the right half R of FIG. And since the region 4142 of the reticle pattern 414 protrudes slightly from the insulating mound, the corresponding auxiliary connecting portion 406 is formed on the connecting portion 405, and a portion is formed on the insulating mound 415. The structure can ensure that the auxiliary connection portion 406 is electrically connected to the lower connection portion 405 to avoid disconnection thereof.

此外,第二導電圖案407與橋接元件427亦可分別於兩個步驟形成,例如當橋接元件427為金屬導電材質時,則可以如上述兩種方式先形成第二導電圖案407,再以金屬製程形成橋接元件427。其金屬製程如第一實施例之圖8所示,在此不再贅述。In addition, the second conductive pattern 407 and the bridging element 427 can also be formed in two steps. For example, when the bridging element 427 is made of a metal conductive material, the second conductive pattern 407 can be formed in the above two manners, and then the metal process is performed. A bridging element 427 is formed. The metal process is as shown in FIG. 8 of the first embodiment, and details are not described herein again.

接著請參考第11圖,利用上述方式,即可在基板401上形成第二導電圖案407與橋接元件427,其中各組之第二導電圖案407與各組之第一導電圖案403係錯位設置且彼此電性絕緣。各橋接元件427係形成於各絕緣丘415上,使得位於同一組之各第二導電圖案407係透過各橋接元件427與各相鄰之第二導電圖案407電性連接。Referring to FIG. 11 , a second conductive pattern 407 and a bridging element 427 can be formed on the substrate 401 by using the above method, wherein the second conductive patterns 407 of each group are misaligned with the first conductive patterns 403 of each group and Electrically insulated from each other. Each of the bridging elements 427 is formed on each of the insulating mounds 415 such that the second conductive patterns 407 in the same group are electrically connected to the adjacent second conductive patterns 407 through the bridging elements 427.

本實施例之電容式觸控螢幕亦可以製作成於該第一方向409及該第二方向411均為雙層ITO的結構。即,利用微影暨蝕刻製程在形成該第一導電圖案403與連接部405的同時,亦可以於第二方向411形成彼此絕緣的第二輔助導電圖案(圖未示),接著形成絕緣丘,方法和前述相同,最後再利用圖10左半部份L所示光罩形成第二導電圖案407、輔助第一導電圖案404及輔助連接部406。The capacitive touch screen of this embodiment can also be configured such that both the first direction 409 and the second direction 411 are double-layered ITO. That is, while forming the first conductive pattern 403 and the connecting portion 405 by using a lithography and etching process, a second auxiliary conductive pattern (not shown) insulated from each other may be formed in the second direction 411, and then an insulating hill is formed. The method is the same as described above, and finally the second conductive pattern 407, the auxiliary first conductive pattern 404 and the auxiliary connecting portion 406 are formed by using the mask shown in the left half of FIG.

此外,本實施例之第一方向409與第二方向411為垂直相交,但亦可改變其導電圖案之排列分布,使第一方向409與第二方向411呈一非垂直之夾角。或者,在本發明另一實施例中,將該基板401沿逆時針或順時針旋轉90度,例如使各組之第一導電圖案403沿第二方向411延伸, 而各組之第二導電圖案407沿第一方向409延伸。本實施例的步驟還可包括在基板401的邊緣形成複數條導線408及至少一個的對準標記410,例如在形成各第一導電圖案403與連接部405之前,以習知金屬製程形成複數條導線408與對準標記410,但亦可在不影響其他製程的情況下,設置於其他步驟之間。In addition, the first direction 409 and the second direction 411 of the embodiment are perpendicularly intersected, but the arrangement of the conductive patterns may be changed such that the first direction 409 and the second direction 411 form a non-perpendicular angle. Alternatively, in another embodiment of the present invention, the substrate 401 is rotated 90 degrees counterclockwise or clockwise, for example, the first conductive patterns 403 of each group are extended along the second direction 411. The second conductive patterns 407 of each group extend in the first direction 409. The step of the embodiment may further include forming a plurality of wires 408 and at least one alignment mark 410 on the edge of the substrate 401. For example, before forming each of the first conductive patterns 403 and the connecting portion 405, a plurality of strips are formed by a conventional metal process. The wire 408 is aligned with the alignment mark 410, but may be disposed between other steps without affecting other processes.

於本發明之第三實施例中,亦可以先形成橋接元件,接著形成絕緣丘,最後再同時形成第一導電圖案、第二導電圖案與連接部。請參閱圖12至圖14,為本發明製作電容式觸控螢幕之方法的第三實施例示意圖,其中圖12與圖13分為左半部L與右半部R,右半部R為左半部L中沿切線EE’之剖面示意圖。請先參考圖12,在一基板501上形成複數個橋接元件527,接著於基板501上形成複數個具有弧度之絕緣丘515,以分別覆蓋住相對應之各橋接元件527,並裸露出橋接元件527兩端之部份。構成橋接元件527的材質可包括透明導電層材質或金屬材質,其形成方式包括習知的曝光與顯影製程。而形成絕緣丘515的方式與前述相同,在此不多贅述。In the third embodiment of the present invention, the bridging element may be formed first, then the insulating mound is formed, and finally the first conductive pattern, the second conductive pattern and the connecting portion are simultaneously formed. 12 to FIG. 14 are schematic diagrams showing a third embodiment of a method for fabricating a capacitive touch screen according to the present invention, wherein FIG. 12 and FIG. 13 are divided into a left half L and a right half R, and a right half R is left. A schematic cross-sectional view of the half L along the tangent line EE'. Referring to FIG. 12, a plurality of bridging elements 527 are formed on a substrate 501, and then a plurality of insulating mounds 515 having a curvature are formed on the substrate 501 to cover the corresponding bridging elements 527, respectively, and the bridging elements are exposed. Part of both ends of 527. The material constituting the bridging member 527 may include a transparent conductive layer material or a metal material, and the formation thereof includes a conventional exposure and development process. The manner of forming the insulating mound 515 is the same as that described above, and will not be described here.

接著請參閱圖13,於基板501上形成一透明導電層(未顯示),再圖案化該透明導電層以同時形成複數組第一導電圖案503、複數組第二導電圖案507以及複數個連接部505,各元件的排列方式與位置亦相同於圖7之描述,位於同一組(行)之各第一導電圖案503係透過其間之各連接部505與各相鄰之第一導電圖案503電性連接,而各組之第二導電圖案507則與各組之第一導電圖案503係錯位設置並彼此電性絕緣。由於基板501表面已形成有複數個橋接元件527,故使得比鄰的各第二導電圖案507c、507d可透過位於各絕緣丘515下方之橋接元件527彼此電性連接。如圖14所示,位於同一組之各第一導電圖案503透過各連接部505延伸於第一方向509,而位於同一組之各第二導 電圖案507則透過埋臥於各絕緣丘515下方之各橋接元件527延伸於第二方向511,所形成陣列之偵測電極便能提供良好的觸控螢幕結構。Referring to FIG. 13, a transparent conductive layer (not shown) is formed on the substrate 501, and the transparent conductive layer is patterned to simultaneously form a complex array of first conductive patterns 503, a plurality of second conductive patterns 507, and a plurality of connections. 505, the arrangement and location of the components are the same as those in FIG. 7. The first conductive patterns 503 located in the same group (rows) are electrically connected to the adjacent first conductive patterns 503 through the connecting portions 505 therebetween. The second conductive patterns 507 of each group are disposed offset from the first conductive patterns 503 of each group and electrically insulated from each other. Since a plurality of bridging elements 527 have been formed on the surface of the substrate 501, the adjacent second conductive patterns 507c, 507d can be electrically connected to each other through the bridging elements 527 located under the insulating mounds 515. As shown in FIG. 14, each of the first conductive patterns 503 in the same group extends through the respective connecting portions 505 in the first direction 509, and is located in the second group of the same group. The electrical pattern 507 extends through the bridging elements 527 buried under the insulating domes 515 in the second direction 511, and the array of detecting electrodes can provide a good touch screen structure.

同樣的,本實施例之第一方向509與第二方向511為垂直相交,但亦可改變其導電圖案之排列分布,使第一方向509與第二方向511呈一非垂直之夾角。或者,將該基板501沿逆時針或順時針旋轉90度,例如使各組之第一導電圖案503沿第二方向511延伸,而各組之第二導電圖案507沿第一方向509延伸。本實施例的步驟還可包括在基板501的邊緣形成複數條導線508及至少一個的對準標記510,例如當橋接元件527材質為金屬時,可於一開始形成橋接元件527時,同時於基板501邊緣形成導線508與對準標記510,可省卻一道步驟並協助後續微影製程之位置校正。當然,各條導線508與對準標記510之形成,亦可在不影響其他製程的情況下,設置於其他步驟之間。Similarly, the first direction 509 and the second direction 511 of the embodiment are perpendicular to each other, but the arrangement of the conductive patterns may be changed such that the first direction 509 and the second direction 511 form a non-perpendicular angle. Alternatively, the substrate 501 is rotated 90 degrees counterclockwise or clockwise, for example, the first conductive patterns 503 of the respective groups are extended in the second direction 511, and the second conductive patterns 507 of the respective groups are extended along the first direction 509. The step of the embodiment may further include forming a plurality of wires 508 and at least one alignment mark 510 on the edge of the substrate 501. For example, when the bridge member 527 is made of metal, the bridge member 527 can be formed at the same time as the substrate. The 501 edge forms the wire 508 with the alignment mark 510, which eliminates a single step and assists in the positional correction of subsequent lithography processes. Of course, the formation of the individual wires 508 and the alignment marks 510 can also be disposed between other steps without affecting other processes.

因此,依照本發明第三實施例所完成的電容式觸控螢幕,如圖13與圖14所示,其結構包括一基板501、複數組第一導電圖案503、複數組第二導電圖案507、複數個連接部505、複數個橋接元件527以及複數個絕緣丘515,各元件皆位於該基板501之同一側。各絕緣丘515分別覆蓋住各橋接元件527,並裸露出各橋接元件527之部份,而各連接部505則跨接於各絕緣丘515之上方。其中各絕緣丘515並不限於前述製作方法所形成有弧度之丘形絕緣體,而應亦包括各種形狀之絕緣塊。各組第一導電圖案503分別沿第一方向509排列,而各組第二導電圖案507分別沿第二方向511排列。其中位於同一組之各第一導電圖案503係透過各連接部505與各相鄰之第一導電圖案503電性連接;而位於同一組之各第二導電圖案507係透過埋臥於各絕緣丘515下方之各橋接元件527與各相鄰之第二導電圖案507電性連接。Therefore, the capacitive touch screen according to the third embodiment of the present invention, as shown in FIG. 13 and FIG. 14, includes a substrate 501, a plurality of arrays of first conductive patterns 503, and a plurality of arrays of second conductive patterns 507. A plurality of connecting portions 505, a plurality of bridging members 527, and a plurality of insulating mounds 515 are disposed on the same side of the substrate 501. Each of the insulating mounds 515 covers each of the bridging elements 527 and exposes portions of the bridging elements 527, and the connecting portions 505 are bridged over the insulating mounds 515. Each of the insulating mounds 515 is not limited to the arcuate insulator formed by the above-described manufacturing method, but should also include insulating blocks of various shapes. Each set of first conductive patterns 503 are respectively arranged along the first direction 509, and each set of second conductive patterns 507 are respectively arranged along the second direction 511. The first conductive patterns 503 in the same group are electrically connected to the adjacent first conductive patterns 503 through the connecting portions 505; and the second conductive patterns 507 in the same group are buried in the insulating layers. The bridging elements 527 below the 515 are electrically connected to the adjacent second conductive patterns 507.

綜上而言,本發明提供一種製作少層數且高透光率之電容式觸控螢幕的方法,其具有特殊的橋接構造,能有效降低其厚度與堆積的層數,並解決習知技術中透光率過低以及製程複雜的問題。In summary, the present invention provides a method for fabricating a capacitive touch screen with a small number of layers and high transmittance, which has a special bridging structure, can effectively reduce the thickness and the number of stacked layers, and solve the conventional technology. The problem of low light transmittance and complicated process.

另外,本發明製作過程中所使用的絕緣丘構造,由於具有一彎曲之弧度,因此連接部或橋接元件皆沿著其丘面而形成,而產生一圓弧形之橋接結構。如此一來,可避免習知橋接裝置在一垂直或具有稜角的底面結構下,易造成斷裂或是接觸不良的情況發生,可大大提高產品的良率以及使用壽命。In addition, the insulating mound structure used in the manufacturing process of the present invention has a curved curvature, so that the connecting portion or the bridging element is formed along the mound surface thereof to produce a circular arc-shaped bridging structure. In this way, it can be avoided that the conventional bridging device is likely to cause breakage or poor contact under a vertical or angular bottom structure, which can greatly improve the product yield and service life.

此外,本發明考慮到第一導電圖案、第二導電圖案、連接部與橋接元件彼此間材質於製程上的相容性,因此提供橋接元件的各種形成方式,並適用於各種橋接元件材質。當第一導電圖案、第二導電圖案與連接部為透明導電材質如ITO,而橋接元件亦為ITO時,由於圖案化的過程無法直接以相同的蝕刻液進行,因此本發明第一實施例的圖4與圖5,提供了一種形成橋接元件的方式,形成具有傾斜內壁的孔洞,使得在濺鍍導電薄膜時,孔洞傾斜內壁上並不會沈積導電薄膜,因此可直接去除光阻層與其上之導電薄膜,而得到各橋接元件,其中並不會影響到位於光阻層下方之各第一導電圖案、第二導電圖案與連接部。In addition, the present invention contemplates compatibility of the first conductive pattern, the second conductive pattern, the connection portion and the bridging element with each other in the process, thus providing various forms of formation of the bridging element and being applicable to various bridging element materials. When the first conductive pattern, the second conductive pattern and the connecting portion are transparent conductive materials such as ITO, and the bridging element is also ITO, since the patterning process cannot be directly performed with the same etching liquid, the first embodiment of the present invention 4 and FIG. 5, a manner of forming a bridging element is provided to form a hole having an inclined inner wall, so that when the conductive film is sputtered, the conductive film is not deposited on the inner wall of the hole, so that the photoresist layer can be directly removed. Instead of the conductive film thereon, the bridging elements are obtained, which do not affect the first conductive patterns, the second conductive patterns and the connecting portions under the photoresist layer.

若橋接元件係為一金屬材質時,除了上述第一實施例所提供的方式外,本發明還提供第三實施例之實施方式。由於金屬與ITO層具有一蝕刻選擇比,因此當第一導電圖案、第二導電圖案與連接部為ITO時,而第二導電薄膜為金屬材質時,便可直接透過一習知圖案化之金屬製程,而形成橋接元件,並不會影響第一導電圖案、第二導電圖案與連接部之形成。且金屬比習知透明薄膜如ITO的導電率高出許多,因此以金屬材質作為橋接元件的材質,可降低各連接電極的電阻值,而大大提升觸控面板之靈敏度。When the bridging element is made of a metal material, the present invention provides an embodiment of the third embodiment in addition to the manner provided by the first embodiment. Since the metal and the ITO layer have an etching selectivity ratio, when the first conductive pattern, the second conductive pattern and the connecting portion are ITO, and the second conductive film is made of a metal material, the metal can be directly transmitted through a conventional patterned metal. The process of forming the bridging element does not affect the formation of the first conductive pattern, the second conductive pattern and the connection portion. Moreover, the conductivity of the metal is much higher than that of the conventional transparent film such as ITO. Therefore, the metal material is used as the material of the bridge component, which can reduce the resistance value of each connection electrode and greatly improve the sensitivity of the touch panel.

綜合以上優點,本發明不僅提供一種步驟簡單的低層數高透光率電容式觸控螢幕的結構與製作方法,亦考量到各種製作層面,適用於各種橋接元件的材質,還提供一良好之圓弧結構,以確保其橋接結構之完整,使得該製程能提供一絕佳的使用性。Based on the above advantages, the present invention not only provides a structure and a manufacturing method of a low-layer high-transmittance capacitive touch screen with simple steps, but also considers various manufacturing levels, is suitable for materials of various bridging components, and provides a good circle. The arc structure ensures the integrity of its bridging structure, making the process an excellent usability.

綜上所述,本發明確已符合發明專利之要件,爰依法提出申請專利。惟,以上所述者僅係本發明之較佳實施方式,本發明之範圍並不以上述實施方式為限,舉凡熟悉本案技藝之人士援依本發明之精神所作之等效修飾或變化,皆應涵蓋於以下申請專利範圍內。In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above-mentioned embodiments are merely preferred embodiments of the present invention, and the scope of the present invention is not limited to the above-described embodiments, and equivalent modifications or variations made by those skilled in the art in light of the spirit of the present invention are It should be covered by the following patent application.

301,401,501‧‧‧基板301,401,501‧‧‧substrate

303,403,503‧‧‧第一導電圖案303,403,503‧‧‧first conductive pattern

404‧‧‧輔助第一導電圖案404‧‧‧Assisted first conductive pattern

305,405,505‧‧‧連接部305, 405, 505 ‧ ‧ connection

406‧‧‧輔助連接部406‧‧‧Auxiliary Connections

307,407,507‧‧‧第二導電圖案307,407,507‧‧‧second conductive pattern

308,408,508‧‧‧導線308,408,508‧‧‧ wire

414‧‧‧光罩圖案414‧‧‧mask pattern

4141,4142 4143,4144‧‧‧區域4141, 4142 4143, 4144‧‧‧ Area

315,415,515‧‧‧絕緣丘315,415,515‧‧‧Insert Hill

317‧‧‧光阻層317‧‧‧Photoresist layer

319‧‧‧烘烤製程319‧‧‧Bake process

321‧‧‧孔洞321‧‧‧ hole

323‧‧‧傾斜內壁323‧‧‧ sloping inner wall

309,409,509‧‧‧第一方向309,409,509‧‧‧First direction

310,410,510‧‧‧對準標記310,410,510‧‧‧ alignment marks

311,411,511‧‧‧第二方向311,411,511‧‧‧second direction

313‧‧‧光阻圖案313‧‧‧resist pattern

325‧‧‧導電薄膜325‧‧‧Electrical film

327,427,527‧‧‧橋接元件327,427,527‧‧‧Bridge components

329‧‧‧金屬層329‧‧‧metal layer

圖1至圖8所繪示為本發明中一種製作電容式觸控螢幕方法的第一實施例。FIG. 1 to FIG. 8 illustrate a first embodiment of a method for fabricating a capacitive touch screen according to the present invention.

圖9至圖11所繪示為本發明中一種製作電容式觸控螢幕方法的第二實施例。FIG. 9 to FIG. 11 illustrate a second embodiment of a method for fabricating a capacitive touch screen according to the present invention.

圖12至圖14所繪示為本發明中一種製作電容式觸控螢幕方法的第三實施例。12 to FIG. 14 illustrate a third embodiment of a method for fabricating a capacitive touch screen according to the present invention.

301‧‧‧基板301‧‧‧Substrate

303‧‧‧第一導電圖案303‧‧‧First conductive pattern

305‧‧‧連接部305‧‧‧Connecting Department

307‧‧‧第二導電圖案307‧‧‧Second conductive pattern

308‧‧‧導線308‧‧‧Wire

309‧‧‧第一方向309‧‧‧First direction

310‧‧‧對準標記310‧‧‧ alignment mark

311‧‧‧第二方向311‧‧‧ second direction

315‧‧‧絕緣丘315‧‧‧Insert Hill

327‧‧‧橋接元件327‧‧‧Bridge components

Claims (42)

一種製作觸控面板的方法,其包括:提供一基板;於該基板上形成複數組沿一第一方向排列之第一導電圖案、複數組沿一第二方向排列之第二導電圖案以及複數個連接部,其中位於同一組之各該第一導電圖案係透過各該連接部與各相鄰之該第一導電圖案電性連接,而各該組之第二導電圖案與各該組之第一導電圖案係錯位設置且彼此電性絕緣;於該基板上形成複數個具有弧度之絕緣丘,至少覆蓋住各該連接部之部份;以及於各該絕緣丘上形成複數個橋接元件,使得位於同一組之各該第二導電圖案係透過各該橋接元件與各相鄰之該第二導電圖案電性連接;其中,形成該等橋接元件的步驟包括:於該基板上形成一圖案化遮罩層,其中該圖案化遮罩層具有複數個由下而上漸縮之孔洞,且各該孔洞均係分別暴露各該絕緣丘及各該第二導電圖案之部份;於該基板上形成一導電薄膜,分別覆蓋該圖案化遮罩層與各該孔洞內之各該絕緣丘及各該第二導電圖案之部份;以及去除該圖案化遮罩層及其上之該導電薄膜;其中,各該由下而上漸縮之孔洞均具有一傾斜內壁,且該傾斜內壁與該基板表面之夾角小於90度。 A method for manufacturing a touch panel, comprising: providing a substrate; forming, on the substrate, a first conductive pattern arranged in a first direction, a second conductive pattern arranged in a second direction, and a plurality of a connecting portion, wherein each of the first conductive patterns in the same group is electrically connected to each adjacent first conductive pattern through each of the connecting portions, and the second conductive pattern of each of the groups and the first of the groups The conductive patterns are misaligned and electrically insulated from each other; a plurality of insulating hills having a curvature are formed on the substrate to cover at least a portion of each of the connecting portions; and a plurality of bridging elements are formed on each of the insulating hills so that the plurality of bridging elements are located Each of the second conductive patterns of the same group is electrically connected to each of the adjacent second conductive patterns through each of the bridging elements; wherein the step of forming the bridging elements comprises: forming a patterned mask on the substrate a layer, wherein the patterned mask layer has a plurality of holes that are tapered from bottom to top, and each of the holes respectively exposes each of the insulating mounds and portions of the second conductive patterns; Forming a conductive film covering the patterned mask layer and each of the insulating mounds and portions of the second conductive patterns in the holes respectively; and removing the patterned mask layer and the conductive film thereon Wherein each of the holes which are tapered from the bottom to the top has an inclined inner wall, and the angle between the inclined inner wall and the surface of the substrate is less than 90 degrees. 如申請專利範圍第1項之方法,其中位於同一組之各該第一導電圖案與各該連接部係同時形成。 The method of claim 1, wherein each of the first conductive patterns in the same group is formed simultaneously with each of the connecting portions. 如申請專利範圍第1項之方法,其中形成該等絕緣丘之步驟,包括:形成一光阻層; 對該光阻層進行一微影製程,以形成複數個光阻圖案分別覆蓋各該連接部;以及進行一烘烤製程,使得各該光阻圖案分別形成具有弧度之各該絕緣丘。 The method of claim 1, wherein the step of forming the insulating hills comprises: forming a photoresist layer; Performing a lithography process on the photoresist layer to form a plurality of photoresist patterns respectively covering the connection portions; and performing a baking process such that each of the photoresist patterns forms each of the insulating hills having an arc. 如申請專利範圍第3項之方法,其中該烘烤製程溫度範圍為200至300℃。 The method of claim 3, wherein the baking process temperature ranges from 200 to 300 °C. 如申請專利範圍第3項之方法,其中該烘烤製程之烘烤時間為1小時。 The method of claim 3, wherein the baking process has a baking time of 1 hour. 如申請專利範圍第1項之方法,其中形成該等絕緣丘之步驟包括:於該基板上形成一絕緣層;蝕刻該絕緣層,以形成複數個絕緣圖案分別覆蓋各該連接部;以及進行一熱回流製程,使得各該絕緣圖案分別形成具有弧度之各該絕緣丘。 The method of claim 1, wherein the forming the insulating hills comprises: forming an insulating layer on the substrate; etching the insulating layer to form a plurality of insulating patterns respectively covering the connecting portions; and performing a The thermal reflow process is such that each of the insulating patterns respectively forms each of the insulating mounds having an arc. 如申請專利範圍第1項之方法,其中形成該等絕緣丘之步驟包括噴墨塗佈法。 The method of claim 1, wherein the step of forming the insulating mounds comprises an inkjet coating process. 如申請專利範圍第1項之方法,其中構成該等第一導電圖案、該等第二導電圖案及該等連接部的材質包括透明導電材質。 The method of claim 1, wherein the first conductive patterns, the second conductive patterns, and the connecting portions are made of a transparent conductive material. 如申請專利範圍第1項之方法,其中形成該等橋接元件的步驟包括:於該基板上形成一金屬層;以及圖案化該金屬層以分別形成各該橋接元件。 The method of claim 1, wherein the step of forming the bridging elements comprises: forming a metal layer on the substrate; and patterning the metal layers to form the bridging elements, respectively. 如申請專利範圍第1項之方法,其中形成該圖案化遮罩層的步驟包括:於該基板上形成一光阻層;對該光阻層進行一曝光製程;進行一烘烤製程;以及 對該光阻層進行一顯影製程以形成該圖案化遮罩層。 The method of claim 1, wherein the step of forming the patterned mask layer comprises: forming a photoresist layer on the substrate; performing an exposure process on the photoresist layer; performing a baking process; A photoresist process is performed on the photoresist layer to form the patterned mask layer. 如申請專利範圍第10項之方法,其中該烘烤製程係以熱傳導之方式通過該基板來加熱該光阻層。 The method of claim 10, wherein the baking process heats the photoresist layer through the substrate in a thermally conductive manner. 如申請專利範圍第10項之方法,其中該光阻層包括剝離式光阻材質。 The method of claim 10, wherein the photoresist layer comprises a peel-off photoresist material. 如申請專利範圍第10項之方法,其中該烘烤製程之溫度範圍為80至120℃。 The method of claim 10, wherein the baking process has a temperature in the range of 80 to 120 °C. 如申請專利範圍第10項之方法,其中該烘烤製程之烘烤時間為90秒。 The method of claim 10, wherein the baking process has a baking time of 90 seconds. 如申請專利範圍第1項之方法,其中構成該導電薄膜的材質包括金屬或透明導電材質。 The method of claim 1, wherein the material constituting the conductive film comprises a metal or a transparent conductive material. 如申請專利範圍第1項之方法,其中形成該導電薄膜的方法包括一非等向性沈積製程。 The method of claim 1, wherein the method of forming the conductive film comprises an anisotropic deposition process. 如申請專利範圍第1項之方法,還包括:在該基板邊緣形成複數條導線,其中各該導線之一端分別連接各該組第一導電圖案與各該組第二導電圖案,另一端延伸至該基板之邊緣。 The method of claim 1, further comprising: forming a plurality of wires on the edge of the substrate, wherein one end of each of the wires is connected to each of the first conductive patterns and the second conductive patterns, and the other end is extended to The edge of the substrate. 如申請專利範圍第17項之方法,其中形成各該條導線的步驟,還包括於該基板的邊緣形成至少一個對準標記。 The method of claim 17, wherein the step of forming each of the wires further comprises forming at least one alignment mark on an edge of the substrate. 如申請專利範圍第1項之方法,其中該第一方向與該第二方向具有一夾角。 The method of claim 1, wherein the first direction has an angle with the second direction. 如申請專利範圍第19項之方法,其中該夾角為直角。 The method of claim 19, wherein the included angle is a right angle. 一種製作觸控面板的方法,其包括:提供一基板;於該基板上形成複數組沿一第一方向排列之第一導電圖案以及複數個連接部,其中位於同一組之各該第一導電圖案係透過各該連接部與各相鄰之該第一導電圖案電性連接;於該基板上形成複數個具有弧度之絕緣丘,至少覆蓋 住各該連接部之部份;以及於該基板上形成複數組沿一第二方向排列之第二導電圖案以及複數個橋接元件,其中各該組之第二導電圖案與各該組之第一導電圖案係錯位設置且彼此電性絕緣,而各該橋接元件係形成於各該絕緣丘上,使得位於同一組之各該第二導電圖案係透過各該橋接元件與各相鄰之該第二導電圖案電性連接;其中,形成該等橋接元件與該等第二導電圖案的步驟包括:於該基板上形成一圖案化遮罩層,其中該圖案化遮罩層具有複數個由下而上漸縮之孔洞,且各該孔洞均係分別暴露欲形成該等橋接元件與該等第二導電圖案之區域;於該基板上形成一導電薄膜,分別覆蓋該圖案化遮罩層與欲形成該等橋接元件與該等第二導電圖案;以及去除該圖案化遮罩層及其上之該導電薄膜;其中,各該由下而上漸縮之孔洞均具有一傾斜內壁,且該傾斜內壁與該基板表面之夾角小於90度。 A method for manufacturing a touch panel, comprising: providing a substrate; forming, on the substrate, a first conductive pattern arranged in a first direction and a plurality of connecting portions, wherein each of the first conductive patterns in the same group The first conductive pattern is electrically connected to each adjacent through the connecting portion; a plurality of insulating hills having a curvature are formed on the substrate, at least a portion of each of the connection portions; and a second conductive pattern arranged in a second direction and a plurality of bridging elements on the substrate, wherein the second conductive pattern of each of the groups and the first of the groups The conductive patterns are misaligned and electrically insulated from each other, and each of the bridging elements is formed on each of the insulating mounds such that each of the second conductive patterns in the same group passes through each of the bridging elements and the adjacent second The conductive pattern is electrically connected; wherein the step of forming the bridging elements and the second conductive patterns comprises: forming a patterned mask layer on the substrate, wherein the patterned mask layer has a plurality of bottom-up a tapered hole, wherein each of the holes respectively exposes a region where the bridging element and the second conductive patterns are to be formed; forming a conductive film on the substrate, respectively covering the patterned mask layer and forming the layer And a second conductive pattern; and removing the patterned mask layer and the conductive film thereon; wherein each of the bottom-up tapered holes has an inclined inner wall, and the tilt Wall and the substrate surface an angle of less than 90 degrees. 如申請專利範圍第21項之方法,其中位於同一組之各該第一導電圖案與各該連接部係同時形成。 The method of claim 21, wherein each of the first conductive patterns in the same group is formed simultaneously with each of the connecting portions. 如申請專利範圍第21項之方法,其中形成該等絕緣丘之步驟,包括:形成一光阻層;對該光阻層進行一微影製程,以形成複數個光阻圖案分別覆蓋各該連接部;以及進行一烘烤製程,使得各該光阻圖案分別形成具有弧度之各該絕緣丘。 The method of claim 21, wherein the forming the insulating hills comprises: forming a photoresist layer; performing a lithography process on the photoresist layer to form a plurality of photoresist patterns respectively covering the connections And performing a baking process such that each of the photoresist patterns respectively forms each of the insulating mounds having an arc. 如申請專利範圍第23項之方法,其中該烘烤製程溫度 範圍為200至300℃。 For example, the method of claim 23, wherein the baking process temperature The range is from 200 to 300 °C. 如申請專利範圍第23項之方法,其中該烘烤製程之烘烤時間為1小時。 The method of claim 23, wherein the baking process has a baking time of 1 hour. 如申請專利範圍第21項之方法,其中形成該等絕緣丘之步驟包括:於該基板上形成一絕緣層;蝕刻該絕緣層,以形成複數個絕緣圖案分別覆蓋各該連接部;以及進行一熱回流製程,使得各該絕緣圖案分別形成具有弧度之各該絕緣丘。 The method of claim 21, wherein the forming the insulating hills comprises: forming an insulating layer on the substrate; etching the insulating layer to form a plurality of insulating patterns respectively covering the connecting portions; and performing a The thermal reflow process is such that each of the insulating patterns respectively forms each of the insulating mounds having an arc. 如申請專利範圍第21項之方法,其中形成該等絕緣丘之步驟包括噴墨塗佈法。 The method of claim 21, wherein the step of forming the insulating mounds comprises an inkjet coating process. 如申請專利範圍第21項之方法,其中構成該等第一導電圖案、該等第二導電圖案及該等連接部的材質包括透明導電材質。 The method of claim 21, wherein the first conductive patterns, the second conductive patterns, and the connecting portions are made of a transparent conductive material. 如申請專利範圍第21項之方法,其中形成該等橋接元件的步驟包括:於該基板上形成一金屬層;以及圖案化該金屬層以分別形成各該橋接元件。 The method of claim 21, wherein the forming the bridging elements comprises: forming a metal layer on the substrate; and patterning the metal layers to form the bridging elements, respectively. 如申請專利範圍第21項之方法,其中形成該圖案化遮罩層的步驟包括:於該基板上形成一光阻層;對該光阻層進行一曝光製程;進行一烘烤製程;以及對該光阻層進行一顯影製程以形成該圖案化遮罩層。 The method of claim 21, wherein the step of forming the patterned mask layer comprises: forming a photoresist layer on the substrate; performing an exposure process on the photoresist layer; performing a baking process; The photoresist layer is subjected to a development process to form the patterned mask layer. 如申請專利範圍第30項之方法,其中該烘烤製程係以熱傳導之方式通過該基板來加熱該光阻層。 The method of claim 30, wherein the baking process heats the photoresist layer through the substrate in a thermally conductive manner. 如申請專利範圍第30項之方法,其中該光阻層包括剝離式光阻材質。 The method of claim 30, wherein the photoresist layer comprises a peel-off photoresist material. 如申請專利範圍第30項之方法,其中該烘烤製程之溫度範圍為80至120℃。 The method of claim 30, wherein the baking process has a temperature in the range of 80 to 120 °C. 如申請專利範圍第30項之方法,其中該烘烤製程之烘烤時間為90秒。 The method of claim 30, wherein the baking process has a baking time of 90 seconds. 如申請專利範圍第21項之方法,其中構成該導電薄膜的材質包括透明導電材質。 The method of claim 21, wherein the material constituting the conductive film comprises a transparent conductive material. 如申請專利範圍第21項之方法,其中形成該導電薄膜的方法包括一非等向性沈積製程。 The method of claim 21, wherein the method of forming the conductive film comprises an anisotropic deposition process. 如申請專利範圍第21項之方法,其中形成該等第一導電圖案及複數個連接部之步驟,包括:於第二方向形成輔助第二導電圖案,該等第二導電圖案位於該等輔助第二導電圖案上。 The method of claim 21, wherein the forming the first conductive pattern and the plurality of connecting portions comprises: forming an auxiliary second conductive pattern in the second direction, wherein the second conductive patterns are located in the auxiliary On the two conductive patterns. 如申請專利範圍第37項之方法,其中形成該等橋接元件與該等第二導電圖案之步驟,包括:於基板上沈積一導電薄膜;於該導電薄膜上沈積一光阻層;進行一微影暨蝕刻製程,使得該導電薄膜分別形成該等第二導電圖案、該等橋接元件、複數個輔助第一導電圖案以及複數個輔助連接部,其中該等輔助第一導電圖案係相對應形成於該等第一導電圖案上,而該等輔助連接部相對應形成於未被該等絕緣丘覆蓋之該等連接部上;以及移除該光阻層。 The method of claim 37, wherein the step of forming the bridging element and the second conductive pattern comprises: depositing a conductive film on the substrate; depositing a photoresist layer on the conductive film; And the etching process, the conductive film respectively forming the second conductive patterns, the bridging elements, the plurality of auxiliary first conductive patterns, and the plurality of auxiliary connecting portions, wherein the auxiliary first conductive patterns are correspondingly formed on And the auxiliary connecting portions are correspondingly formed on the connecting portions not covered by the insulating mounds; and the photoresist layer is removed. 如申請專利範圍第21項之方法,還包括:在該基板邊緣形成複數條導線,其中各該導線之一端分別連接各該組第一導電圖案與各該組第二導電圖案,另一端延伸至該基板之邊緣。 The method of claim 21, further comprising: forming a plurality of wires on the edge of the substrate, wherein one end of each of the wires is connected to each of the first conductive patterns and each of the second conductive patterns, and the other end is extended to The edge of the substrate. 如申請專利範圍第39項之方法,其中形成各該條導線的步驟,還包括於該基板的邊緣形成至少一個對準標記。 The method of claim 39, wherein the step of forming each of the wires further comprises forming at least one alignment mark on an edge of the substrate. 如申請專利範圍第21項之方法,其中該第一方向與該第二方向具有一夾角。 The method of claim 21, wherein the first direction has an angle with the second direction. 如申請專利範圍第41項之方法,其中該夾角為直角。 The method of claim 41, wherein the included angle is a right angle.
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