TWI384550B - - Google Patents

Info

Publication number
TWI384550B
TWI384550B TW96139020A TW96139020A TWI384550B TW I384550 B TWI384550 B TW I384550B TW 96139020 A TW96139020 A TW 96139020A TW 96139020 A TW96139020 A TW 96139020A TW I384550 B TWI384550 B TW I384550B
Authority
TW
Taiwan
Application number
TW96139020A
Other languages
Chinese (zh)
Other versions
TW200919583A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW96139020A priority Critical patent/TW200919583A/en
Publication of TW200919583A publication Critical patent/TW200919583A/en
Application granted granted Critical
Publication of TWI384550B publication Critical patent/TWI384550B/zh

Links

TW96139020A 2007-10-18 2007-10-18 Method of manufacturing zinc aluminum oxide (AZO)-made transparent conductive membrane and equipment thereof TW200919583A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW96139020A TW200919583A (en) 2007-10-18 2007-10-18 Method of manufacturing zinc aluminum oxide (AZO)-made transparent conductive membrane and equipment thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW96139020A TW200919583A (en) 2007-10-18 2007-10-18 Method of manufacturing zinc aluminum oxide (AZO)-made transparent conductive membrane and equipment thereof

Publications (2)

Publication Number Publication Date
TW200919583A TW200919583A (en) 2009-05-01
TWI384550B true TWI384550B (en) 2013-02-01

Family

ID=44727165

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96139020A TW200919583A (en) 2007-10-18 2007-10-18 Method of manufacturing zinc aluminum oxide (AZO)-made transparent conductive membrane and equipment thereof

Country Status (1)

Country Link
TW (1) TW200919583A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040045810A1 (en) * 2002-09-05 2004-03-11 Plasmion Corporation Apparatus and method of forming thin film from negatively charged sputtered ions
TW200511457A (en) * 2003-09-08 2005-03-16 Fcm Co Ltd Conductive sheet having conductive layer with improved adhesion and product including the same
TW200602506A (en) * 2004-04-09 2006-01-16 Ulvac Inc Film forming apparatus and film forming method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040045810A1 (en) * 2002-09-05 2004-03-11 Plasmion Corporation Apparatus and method of forming thin film from negatively charged sputtered ions
TW200511457A (en) * 2003-09-08 2005-03-16 Fcm Co Ltd Conductive sheet having conductive layer with improved adhesion and product including the same
TW200602506A (en) * 2004-04-09 2006-01-16 Ulvac Inc Film forming apparatus and film forming method

Also Published As

Publication number Publication date
TW200919583A (en) 2009-05-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees