TWI384550B - - Google Patents
Info
- Publication number
- TWI384550B TWI384550B TW96139020A TW96139020A TWI384550B TW I384550 B TWI384550 B TW I384550B TW 96139020 A TW96139020 A TW 96139020A TW 96139020 A TW96139020 A TW 96139020A TW I384550 B TWI384550 B TW I384550B
- Authority
- TW
- Taiwan
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW96139020A TW200919583A (en) | 2007-10-18 | 2007-10-18 | Method of manufacturing zinc aluminum oxide (AZO)-made transparent conductive membrane and equipment thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW96139020A TW200919583A (en) | 2007-10-18 | 2007-10-18 | Method of manufacturing zinc aluminum oxide (AZO)-made transparent conductive membrane and equipment thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200919583A TW200919583A (en) | 2009-05-01 |
TWI384550B true TWI384550B (en) | 2013-02-01 |
Family
ID=44727165
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW96139020A TW200919583A (en) | 2007-10-18 | 2007-10-18 | Method of manufacturing zinc aluminum oxide (AZO)-made transparent conductive membrane and equipment thereof |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW200919583A (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040045810A1 (en) * | 2002-09-05 | 2004-03-11 | Plasmion Corporation | Apparatus and method of forming thin film from negatively charged sputtered ions |
TW200511457A (en) * | 2003-09-08 | 2005-03-16 | Fcm Co Ltd | Conductive sheet having conductive layer with improved adhesion and product including the same |
TW200602506A (en) * | 2004-04-09 | 2006-01-16 | Ulvac Inc | Film forming apparatus and film forming method |
-
2007
- 2007-10-18 TW TW96139020A patent/TW200919583A/en not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040045810A1 (en) * | 2002-09-05 | 2004-03-11 | Plasmion Corporation | Apparatus and method of forming thin film from negatively charged sputtered ions |
TW200511457A (en) * | 2003-09-08 | 2005-03-16 | Fcm Co Ltd | Conductive sheet having conductive layer with improved adhesion and product including the same |
TW200602506A (en) * | 2004-04-09 | 2006-01-16 | Ulvac Inc | Film forming apparatus and film forming method |
Also Published As
Publication number | Publication date |
---|---|
TW200919583A (en) | 2009-05-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |