TWI365519B - Apparatuses and methods for suppressing thermally induced motion of a workpiece - Google Patents
Apparatuses and methods for suppressing thermally induced motion of a workpieceInfo
- Publication number
- TWI365519B TWI365519B TW093139109A TW93139109A TWI365519B TW I365519 B TWI365519 B TW I365519B TW 093139109 A TW093139109 A TW 093139109A TW 93139109 A TW93139109 A TW 93139109A TW I365519 B TWI365519 B TW I365519B
- Authority
- TW
- Taiwan
- Prior art keywords
- workpiece
- apparatuses
- methods
- thermally induced
- induced motion
- Prior art date
Links
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/742,575 US9627244B2 (en) | 2002-12-20 | 2003-12-19 | Methods and systems for supporting a workpiece and for heat-treating the workpiece |
US56868504P | 2004-05-07 | 2004-05-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200525721A TW200525721A (en) | 2005-08-01 |
TWI365519B true TWI365519B (en) | 2012-06-01 |
Family
ID=47787473
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093139109A TWI365519B (en) | 2003-12-19 | 2004-12-16 | Apparatuses and methods for suppressing thermally induced motion of a workpiece |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP5926142B2 (en) |
TW (1) | TWI365519B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114608475A (en) * | 2022-02-28 | 2022-06-10 | 南京中安半导体设备有限责任公司 | Chuck, phase-shift interferometer and wafer morphology interference measurement method |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59121821A (en) * | 1982-12-28 | 1984-07-14 | Ushio Inc | Set-up means for heater |
JPS59218722A (en) * | 1983-05-27 | 1984-12-10 | Ushio Inc | Method for formation of film |
JPS61129834A (en) * | 1984-11-28 | 1986-06-17 | Dainippon Screen Mfg Co Ltd | Heat treatment apparatus |
JPS6237927U (en) * | 1985-08-27 | 1987-03-06 | ||
JP2680202B2 (en) * | 1991-03-20 | 1997-11-19 | 国際電気株式会社 | Vapor phase growth method and apparatus |
US5163312A (en) * | 1991-05-31 | 1992-11-17 | Texas Instruments Incorporated | Wafer proximity sensor |
JPH0778830A (en) * | 1993-09-07 | 1995-03-20 | Hitachi Ltd | Semiconductor manufacturing equipment |
EP0669640A1 (en) * | 1994-02-25 | 1995-08-30 | Applied Materials, Inc. | Susceptor for deposition apparatus |
WO1999023691A2 (en) * | 1997-11-03 | 1999-05-14 | Asm America, Inc. | Improved low mass wafer support system |
JP2001319887A (en) * | 2000-02-08 | 2001-11-16 | Matsushita Electric Ind Co Ltd | Lamp annealing apparatus and substrate for display element |
WO2002047123A1 (en) * | 2000-12-04 | 2002-06-13 | Vortek Industries Ltd. | Heat-treating methods and systems |
US6594446B2 (en) * | 2000-12-04 | 2003-07-15 | Vortek Industries Ltd. | Heat-treating methods and systems |
JP2005050904A (en) * | 2003-07-30 | 2005-02-24 | Dainippon Screen Mfg Co Ltd | Apparatus and method for heat treatment, and substrate installing mechanism |
-
2004
- 2004-12-16 TW TW093139109A patent/TWI365519B/en active
-
2012
- 2012-07-17 JP JP2012158761A patent/JP5926142B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
TW200525721A (en) | 2005-08-01 |
JP5926142B2 (en) | 2016-05-25 |
JP2013030772A (en) | 2013-02-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SG109615A1 (en) | Method of dividing a plate-like workpiece | |
GB0325192D0 (en) | Method of use | |
GB2415257B (en) | Estimation of borehole geometry parameters and lateral tool displacements | |
SI1459833T1 (en) | Method of friction welding | |
GB2395211B (en) | Sprung member and actuator for downhole tools | |
EP1575495A4 (en) | Compounds and methods | |
EP1597590A4 (en) | Method of scheduling | |
AU2003291295A8 (en) | Methods and apparatuses for electronics cooling | |
EP1679388A4 (en) | Method of thermal spraying | |
PL1512324T3 (en) | Method of deflavoring soy-derived materials | |
EP1577280A4 (en) | Method of deuterization | |
AU2003258618A8 (en) | Damped tools | |
AU153239S (en) | Fastener tool | |
GB0206415D0 (en) | Deracemisation of amines | |
PL362012A1 (en) | Jig head | |
TWI365519B (en) | Apparatuses and methods for suppressing thermally induced motion of a workpiece | |
GB0322963D0 (en) | Methods of controlling reducant addition | |
GB0311195D0 (en) | Glyoxalase inhibitors | |
AU2003234599A8 (en) | Methods and compounds for reducing biofilm formation | |
GB0220125D0 (en) | Method of forming pocketted sponges | |
GB2406589C (en) | Head stone base | |
GB0322685D0 (en) | Method of position determination | |
TW559125U (en) | Improved moving device of tool magazine | |
TW541882U (en) | Positioning component for preventing slippage of zipper head | |
TW554796U (en) | Fast disassembling/replacing structure of tool grip |