TWI364071B - - Google Patents

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TWI364071B
TWI364071B TW97131410A TW97131410A TWI364071B TW I364071 B TWI364071 B TW I364071B TW 97131410 A TW97131410 A TW 97131410A TW 97131410 A TW97131410 A TW 97131410A TW I364071 B TWI364071 B TW I364071B
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Taiwan
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image
step
unit
boundary
axis
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TW97131410A
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TW201009911A (en
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1364071 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates to a search method, and more particularly to a method for finding a boundary of a crystal circle. [Prior Art]

As shown in FIG. 1 , the applicant of the present application, No. 91124245 (4), proposes a method for determining a cutting mode according to the result of the crystal edge finding method, which is used in conjunction with a wafer cutting machine. The cutting machine has a table unit 可 movable along a first axial direction X and rotatable about a third axial direction z, and is movable back and forth along a second axial direction γ along the third axial direction Z a cutting unit 2 that moves up and down, and a central processing unit (not shown), which is an automatic edge finding procedure proposed in the patent application No. 90117229, which is filed by the applicant of the present application. The processor finds coordinates (x〇1,), (y〇2), (xG3, y) of four points of the absolute upper, lower, left, and right boundary points of the fragment wafer 3 positioned on the table unit i. ()3), (x〇4, yC)4), and let the central processing cry calculate the distance D1 between the absolute upper and lower boundary points, and the distance D2 between the absolute left and °° boundary points, Finally, the central processor determines the distances ^, D2 and a comparison parameter (for example, the diameter d 1 of a complete wafer 4) Between equality, to decide through a circular or rectangular pattern cut dicing die cutting the wafer 3 fragments. However, since the boundary point around the fragment wafer 3 is not known by this method, the cutting efficiency may be affected by cutting the fragment wafer 3 in any mode. [5] SUMMARY OF THE INVENTION The object of the present invention is to provide a method for automatically searching for a wafer boundary to be obtained by the peripheral boundary coordinates required for the (4) working phase.

The invention finds a method for the boundary of a wafer, which is suitable for the four units of the cutting device for cutting and the positioning of the workpiece... the cutting unit I is an early morning and the central processor, and the table unit can be along with the image a first axial direction and a second axis perpendicular to the first axial direction move toward the eyepiece. The central processor can control the operating table unit, and the cutting early U takes an image unit, the center The processor has at least one aligned sample image stored in advance by the image capturing unit, the method comprising: step (A) separating the table unit along the workpiece along a parallel to the first axis: The line is divided into four detection areas by a second separation line parallel to the two axial directions and being opposite to the first separation. (8) Let the image capture sheet: photograph the towel - block detection (4) - unit image image heart) and compare the unit = image with the tb image image. (7)) Make the work: The early movement is relatively moved along the first axial direction as early as the 5th. (E) repeating the steps (B), (C), and (D) to the two consecutive unit image images = medium is consistent with the comparison sample image, and the other is the pair The sample image is completely inconsistent, and the position of the unit screen (4) that is completely inconsistent is recorded as a boundary coordinate. (7) causing the table unit to move relative to the second axis along the second axis. (6) Repeat step (B) (D) (E), (F) until the imaging unit is photographed across the area. [Poverty mode] 6 1364071 The foregoing and other technical contents and special effects of the present invention are evaluated from one of the following reference patterns: η. The knives are in the details of the (4) embodiment of the magazine. Wj β Refer to Figures 2, 3, and 4, which is a preferred example of the method for finding the date of the Japanese ® Α Α Α Α 咢 咢 咢 搭配 搭配 搭配 搭配 搭配 搭配 搭配 搭配In the case of the cut

f is set to 1 〇 0 is a wafer cutting machine, and has - can move along the first wheel to the left and right X and can rotate around a third axis, turn the table unit 1 〇, one can two = Υ Moving and moving up and down along the third axial direction: cutting..., an image capturing unit 3〇, a 可, which can be moved back and forth along the second axial direction in synchronization with the cutting unit 2〇,兀30 linked analog/digital converter 40, an image memory connected to the analog/number ^$ digit conversion, 50, - a central processor connected to the image memory device 5Q, and a central processing The display 60 is connected to the display 7 and an alarm 80 controlled by the central processing unit (10). The cutting unit 2 has a cutter shaft Η, and a 77-mesh cutter 22 fixed on the cutter shaft 21, the image capturing unit 30 is a camera, and has a lens 3 (the central processing unit 6) ( It is operable to control the workbench 7L 10, the cutting unit 2Q and the image capturing unit 3Q, and the display is capable of displaying the image captured by the image capturing unit 3G. As shown in FIG. 5, the stage unit 1() is a workpiece 200' that can be placed to be cut. In the embodiment, the workpiece 2 is a fragment wafer, and the piece 200 is first adhered to A tape "ο adhered to the bottom surface of the jig frame 9 is placed on the table unit ig with the jig frame 9G. It is to be noted that the conventional tapeiess fixing technique in which the workpiece is adhered to the table unit 10 by the butterfly is also applicable to the present invention. As shown in FIG. 6, the central processing unit 60 (see FIG. 4) has built-in at least - pre-sampling (four) storing (four) pairs of sample images 12 〇 ' via the image capturing sheet A 3G (see FIG. 4), in this embodiment, There are three kinds of alignment sample images 120 built in. These comparison sample images 12〇 are taken from a complete wafer (not shown) of the specification of the guard (4). Referring to FIG. 7, the method for finding a wafer boundary includes the following steps: Step 300 As shown in FIGS. 7 and 8, the central processing unit 60 (see FIG. 4) connects the workbench unit H) along with the guard member. a first dividing line 13G parallel to the first axial direction X and a second dividing line 14〇 parallel to the two axial directions γ and intersecting the first dividing line 13〇 are divided into an upper left detecting area 丨5〇, Four detection zones, such as the upper right detection zone 160, the lower left detection zone 丨7〇, and the lower right detection zone (10).

In this embodiment, the central processing unit 60 (see FIG. 4) initially drives the satellite station unit 1 and the image capturing unit 3 () to move relative to the first and second axes X and Y to the corresponding The image unit 30 is located above the workpiece 2, and then drives the table unit 10 to move along the first axis and the right direction, so that the image capturing unit 3G continuously (four) images, the towel processor 6 () (see Figure 4) Using the gray-scale judging technique of image processing, judging the boundary between the workpiece 2〇〇 and the tape 110, and defining a left edge point marked as (χΐ, yi) on the workpiece 2〇〇 , and - the right edge of the coordinate (x2, y2) is 'same'. The central processor 60 (see ® 4) drives the image capturing unit 3 to move along the second axis γ ±, lower # move' Image capturing unit 3〇 continuous shooting photography

For example, a lower edge point marked with (8, y3) and a lower edge with a coordinate of (x4'y4) can be defined on the workpiece 200. The first dividing line 130 is one of the coordinate values (y3, y4) passing through the upper and lower edge points (x3y3) and the second axial direction Y, the point η 2, and the second dividing line 140 is After the left and right edge points (the value of xl (2 especially 13⁄4 in the 3 axis first axis χ on the coordinate value (X!, χ 2) Figure 310. As shown in Figures 7, 8, 9, the central processing The controller 60 (see: driving the satellite station unit 1G and the image capturing unit % to move relative to the first _, Y) to make the image capturing unit 3G at the coordinates of the first starting point of the image. (4) Taking the unit of the upper left detection area by 15°: In the present embodiment, 'the unit pupil image i5i is in the first axial direction;: long' and has a width distance of 480 in the second axial direction. The distance is L ^ 640 pixels (P1Xel), and the width is 48 pixels (pixel) from the W. Step (10): as shown in Figures 7'8 and 9, the middle figure 4) will be 哕i+ v... As shown in the figure, the shirt figure 151 performs image comparison with the sample images 120 (see Fig. 6). [See the comparison in this embodiment. FIG. 9 and FIG. 6 can be like 151.丄〆 昼 昼 昼 者 、 、 、 、 、 、 、 、 、 、 、 、 、 See at least step 330 of FIG. 6): as shown in FIG. 6 to drive the table unit 3 to move, as shown by ι , the central processing unit 60 (see FIG. 4 10 along the first-axis X relative to the The image unit 4071 is in the step 320. The unit image is produced by the distance L: the width of the image is 1. The long (four) image capturing unit 3G is moved to the right along the first axis X; The step is like: == 151 (see FIG. Μ) and the comparison sample studio table... the first step in the step, the working image taking unit moves the length distance X to the left to be close to the embodiment. In, due to the first starting point (χΐ,

= ΓΓ 象 151 is the same as the sample image i2. 2 (see Figure 6 „ 4 'so 'the central processor (9) (see Figure 4) will make the work A = °: T axis x to the right The length distance l is away from the take-up image unit 3. Located at - - in Figure 4, step = 3, as shown by circle 7, 1 〇, 11, the central processing unit 60 (see bit screen 4 to order this step) 310, 320, 330 to one of the two single-shirts 151 taken one after another (see Figure 8: Image 12. (see "), and the other (see circle 2, image 12. (see circle 6) When it is completely inconsistent, the position of the image 151 is recorded as a - boundary coordinate. In the present embodiment, when the step is repeated, the step is performed in the transition position. 152 shooting another - unit book:: 5 丄 will only take the tape, therefore, the unit is written; will be completely inconsistent with the sample image 12 〇 (see Figure 6), such as 10 1364071, the central processor 60 (g is the same as z, ^ Λ Fig. 4), the transition position 152 where the unit picture image 151 is located is recorded as - boundary coordinates (7), y5). Step 350: as shown in Fig. 7, 1 if not the central processor 6 (See FIG. 4) driving the image capturing unit 30 along the _th, the brother (2) 4 w, and moving the width distance away from the table unit 1G axially upwards to step 360: as shown in FIG. 7, η (see FIG. 4) This step 31 (), \ Μ Μ 处理 处理 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( If the coordinate value is less than Ning, repeat the step, as shown in FIG. 13, when the step 310 is repeated to the next step, in step 340, the step 3H)~3 times is repeated. Let the work: station = 10 move the length distance along the first axis x to the left [two-person' to the sum of the two unit picture images i5i taken in succession and the sample image of the comparison is shown in Figure 6) The other one is ^ Π completely different from the sample image 12〇 (see Figure 6), so find a boundary coordinate (x6'y6). In the same way, if you repeat this step as shown in the figure, you can find the other four in order = ^ (x7, y7), (x8, y8), (x9, y9), (xl0, yl0) . Conversely, 'as shown in FIG. 15', when the coordinate value of the unit pupil image 5 1 in the step 310 on the first-axis χ is not less than the step in the step 320, 2: 2 in the 12〇ri ^ ^ , , the bird is more than the sample image (see Figure 6), the coordinate value y of the unit picture image 151 in the second direction Y and the previous boundary coordinates The seat 'value X of the first-axis X above 11 Ή 64071' is defined as the - boundary coordinate and stops repeating this step ~350. In this embodiment, when the step 31〇35〇 is repeated for the sixth time, in the step 340, the step 31〇~33〇_ times is repeated to make the workbench unit 1G along the first- When the axial direction X moves to the left by the length distance L-time, the unit picture image 151 in the step 310 will cross the second tlfxf 140, so that the coordinate value x11 on the first-axis X is greater than 2. Thus, as shown in FIG. 16, in the step 320, since the unit 昼 | | 151 and the comparison sample images 12 〇 (see FIG. 6) are not at all, the central processing unit 60 (see FIG. 4) The coordinate value yU of the unit pupil image i5i on the second axis γ and the coordinate value χ1〇 of the previous boundary coordinate ("Ο, yi〇" in the first axis X are defined as - boundary ΧίΟ , yll) Kenting 4 see Figure 17, 18, 19 'The method of finding the wafer boundary is then further included: steps 41〇, 420, 430, 44〇, 45〇, 46〇, to find the right upper heart area 160 The boundary coordinates, the steps 41〇~46〇 are similar to the step ~360, the difference is: the step 41〇(4) the starting point is: same as the step The moving direction of the table unit 1 in the step 43 is opposite to the step 33, and it is determined in the step paste whether or not the coordinate value range of the steps 410 to 450 is different from the (four). Step 410: As shown in Fig. 17, Jing Haobei. (χ9 3^4 $ video early % 3G at - coordinate is position 佥, 2) starts from the second starting point of the upper right detection area 160. Step 420: Perform image comparison on the unit picture image 16... comparing the sample image 120 (see Fig. 6) as shown in Fig. 17. 12 1364071

Wheel = Γ3〇: As shown in Fig. 17, the H-axis x is moved relative to the image capturing unit 30. Work. Along the first step - in the step 420, the sample image uo (see Fig. 6); the early two-face image (6) and the comparison table unit 10 along the first wheel direction ^2 in the step 43" In the step (4), the length distance L is away from the sample image 120 (see the right side of the unit image image (6), so that the workbench unit 1 does not match. Then, in the step distance L, the image capturing unit is moved closer to the image capturing unit, and the vehicle is moved to the right by X. The length is 430 m, and H7 is repeated to perform the step 420, the unit image 161 of the unit image 161 successively shot. _ Japanese Temple compares the sample image 12 (see Figure 6), and the other: the two pairs of sample images are completely referred to as Figure 6). The position of the == face image m is recorded as the border coordinate ( Χΐ 2: Early) Step 450: As shown in FIG. 17, the image taking unit is buckled along the second axis. γ moves the width distance w upwardly away from the table unit 1〇. Step Yang: As shown in FIGS. 18, 19, and 20, repeating the steps (4), 420, 430, 440, and 450 until the image capturing unit 3 is panned as shown in FIGS. 18 and 19, when the step 41 is performed. When the coordinate value of the unit pupil image in the first axis X is greater than ^^, the steps 410 to 450 are repeated. As shown in Fig. 18, when the steps 41 〇 450 450 are repeated for the first time, another boundary coordinate (χ 13, yl3) can be found. As shown in Fig. 19, 13 ~imm, when the steps 410 to 450 are repeated from the second to the ninth time, the other eight boundary coordinates (xl4 'yU), (xl5, yl5), (xl6, yl5), (xl6, yl5), ( χ17, y17), ( xl8 ' yl8), ( xl9, yl9), ( χ 2 〇, y2 〇 y, ( χ 21, 丫 21 ) 0 as shown in FIG. 20, when the step 46 is repeated for the tenth time Step 4i 〇 ~ 450 when 'in this step - 440, this step will be repeated 41 〇 ~ 43 〇 five times 'to make the X sheet single it 1G along the first - axis X to the right to move the length distance L Five times, the unit picture image ΐ6ι in the step 41〇 will cross the second dividing line 140', causing the unit picture image ι6ι in the step Yang to have a coordinate value χ22 on the first-axis X is not greater than Ning At this time, as shown in FIG. 21, in this step 420, since the unit pupil image 161 completely does not match the comparison sample image 12G (see FIG. 6), the unit screen image 161 is on the second axis. The coordinate value of the coordinate value y on the γ and the previous boundary coordinate U21 ' y21 on the first axial axis is defined as a boundary coordinate (x21, y22), and the repetition is stopped. Referring to Figures 22 and 23, the method of finding a wafer boundary further includes steps 500, 510, 520, 530, 540, 550, 56D stations ^, 560, to find the upper left area 150 or The boundary coordinates of the upper right detection area 160 that are not found are described in the context of finding the upper right detection area 160. This step 51. ~ _疋 is similar to the steps 310~鸠 and 41〇~46〇, :step:=Γ The starting shooting point is different from the one of the workbench unit (7) in step (b) of step 530. The step 56 is the same as the step. ^ C1A T judges whether to repeat the process 哕 510 510 The range of coordinate values is different from the step 鸠, 46〇. μ 14 1364071 Step 500: Determine whether the total number of boundary blocks 5^ of the upper left and upper right detection areas 15〇' 16〇 are equal 'if not equal' Step 5 1 〇 〜 560 ' In the present embodiment, the total number of boundary coordinates (seven) of the upper left detection area 15 少于 is less than the total number of boundary coordinates (one eleven) of the upper right detection area 160.

Step 510: As shown in FIG. 22, the image capturing unit 3 is caused to start shooting a unit of the pupil image 191 at the last boundary coordinate (x10, y11) of the upper left detection area 150. It should be noted that, conversely, if the total number of boundary coordinates of the upper right detection area 160 is less than the total number of boundary coordinates of the upper left detection area 丨5〇 in the step 5, the image capturing unit 3 is placed in the The last boundary coordinate (5), y22) of the upper right detection area 16〇 starts to take the unit picture image v 520: as shown in FIG. 22, the unit is compared with the sample image 120 (see FIG. 6) for image comparison.

Step 53: As shown in Fig. 22, the table unit 10 is moved relative to the image taking unit 3G along the first axis X. It should be noted that the work p is two. The movement mode is the same as the total number of boundary coordinates of the two regions 160 15G of the steps 33G, 43() is less than the total number of boundary coordinates detected by the upper right side, and then the left=ground' of the (four) 33〇 is used. The total number of boundary coordinates of 160 is less than; the total number of boundary coordinates of the upper private test area 150 is the mode of movement. In the present embodiment, the number of the boundary I of the left-hand 裇 裇 s, μ upper left 区 区 150 is less by the left 43 43 , μ, μ, and therefore the step 33 is employed in the step 520, if the single mode, , turn 4 (four) image 191 and material comparison sample 15 image 120 (see Figure 6) unit H) along the first direction ^ then in this step, so that the table image unit 30, in this step = shift _ length distance [And away from the sample material 12G ([= unit picture material m with this, make the workbench u1Q does not match] then in this step [and away from the recording unit 3 (; the first " (four) X to the left The length distance step 540: as shown in FIG. 22 22 23, repeating the step 510, g to the two consecutive (four) unit pictures f彡 image 191 # one of which is 12 相 with the comparison sample image (see Figure 6), while the other is that the spot image is completely inconsistent with the sample image (see Figure 6), and the position of the early mismatched shadow image $191 is recorded as - the trap boundary (x23 y23) 'The first trap boundary (χ23, y23) will cover the last boundary of the upper left detection zone 150 (xlG, yU). Conversely, in the step 53, if the movement mode of the step 43 is adopted, the first trap boundary (x23, y23) will cover the last boundary coordinate of the upper right detection area 160 (χ21, Y22) Step 550: As shown in FIG. 23, the image capturing unit 3 is moved upward along the second axial direction Y by the width distance W away from the table unit 10. Step 560: As shown in FIG. The coordinate value x of the unit-written image 191 in the first axial direction X in the step 510 is smaller than the boundary of the upper right detection zone 160 in which the second vehicle is equal to the coordinate value y on the Y. When the coordinate value X on X is repeated, the steps 510 to 550 are repeated; conversely, the coordinate value X of the unit pupil image 191 in the first axial direction 该 in the step 510 is not less than The coordinate value y of the two axial upper jaws is the same 16

When the boundary coordinates of the upper right detection area 160 of the IJ04U/I are in the first axial direction, the steps 5i to 55〇 are stopped repeatedly. Move the square meaning: step 53", if the step = 43 is used, the judgment mode of = _560 is changed to · · when in step (4): the bit screen image 191 is on the first axial axis

When the large side 2 of the upper left inspection pocket 15 of the seat (four) on the second (four) γ is marked with the coordinate value X on the first axial direction x, the steps 51 〇 550 550 are repeated, and conversely, when this step The unit pupil image in the 51 〇 (9) The coordinate value on the #-(4)X is not greater than the boundary coordinate of the upper left detection region 15G which is the same as the coordinate value y on the second axis γ. When the coordinate value of X is stopped, the steps 51 〇 55 55 〇 are repeated. In this embodiment, the coordinate value x23疋 of the trap boundary (χ23, y23) is smaller than the coordinate value (χΐ8, yu) coordinate value xl8 of the upper right detection area 16〇, so the first step 51〇55 is repeated. When you are, you can find another

The coordinate value X on X is a boundary coordinate (x24'y24). Similarly, when the second and third times repeat steps 510 to 550, the other two boundary coordinates (χ25, y25), (χ26, y26) can be found. ). When the step 5 1 〇 550 550 is repeated for the fourth time, in the step 54 ,, the steps 510 530 530 are repeated repeatedly to make the table unit 1 X along the first axial direction of the s Xu The length distance L is moved to the left once. At this time, the coordinate value χ27 of the unit pupil image 191 in the first axis X in the step 510 is equal to the coordinate value of the boundary coordinates (X2l, y22) of the upper right detection area 160. X21 'So, stop repeating this step 51〇~55〇. Referring to FIG. 24, the method for finding a wafer boundary further includes the step 17 "1354117 factory 61〇, 620, 630, 640, 65〇, 66〇' to find the boundary coordinates of the lower left detection area 170, the step 61G~ _ is similar to the step then ~ 360' is different in that the moving direction of the image capturing unit % in the step 65 is opposite to the step 350, that is, in the step 65, the image capturing unit is made The 3G moves downward along the second axial direction γ by the width distance w away from the table unit 1 〇. In this way, in step 660, repeating the steps 61〇~65〇, we can find seven boundary coordinates (x28, y28), (x29, y29), (x3〇, y30). (x315y31), ( X32, y32), (x33, y33), (x33, y34) ° Referring to FIG. 25, the method for finding the wafer boundary further includes steps 71〇, 72〇, 73〇, 74(), 75(), 76. (), in order to find the boundary coordinates of the lower right detection area 180, the step 71G~ is similar to the steps 41 〇 460 460', the difference is that the moving direction of the image capturing unit % in the step 75 是 is opposite In the step 450, that is, in the step 75, the image capturing unit 30 is moved downward along the second axial direction γ by the width distance % away from the table unit 1 〇. Thus, in step 760, the steps 71 〇 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 75 (x39, y39). (X4〇, y4〇). (x4〇, y4l) 〇 Through the above description, the advantages of the present invention can be further summarized as follows: As shown in FIG. 26, the present invention can find the workpiece 2 〇〇 in the upper left detection area 150 upper right detection area 16 〇, lower left detection area j7 〇 and the lower right detection area just 18 ^ 04071 surrounding boundary coordinates, so that when the workpiece 2 〇〇 subsequent cutting operation, it can be regarded as The cutter 22 of the cutting unit 20 determines the range in which the workpiece unit 1 moves the workpiece 200 every first axial direction X in the second axial γ, for example, when the workpiece is to be cut. 2 (8) of the first pass J 2 210, the table unit 1 带 moves the workpiece 200 from the coordinate value χ26 to the coordinate value χ2ι along the first axis X, and again, when the other cutting path 22 of the workpiece 200 is to be cut In the case of 〇, the table unit 1 带 moves the workpiece 200 from the coordinate value χ25 to the coordinate value along the first axial direction X. Improve the cutting efficiency by freeing the cut. Hit 'The method of searching for the wafer boundary of the present invention can not only find the surrounding boundary coordinates of the member, but also can reduce the time of the empty cutting when the workpiece is placed in the subsequent cutting operation by these boundary coordinates. It is true that the New Moon has reached the purpose of invention. The above description is only a preferred embodiment of the present invention, and the present invention is not limited to the present invention, that is, the patent application according to the present invention belongs to the present invention, and the special effect of the invention is r... Changes and modifications are still within the scope of the patent.

TJ6407I [Simplified description of the drawing j: 1 is a schematic diagram showing the method of determining the cutting mode according to the wafer edge finding result; FIG. 2 is a method for finding the wafer boundary of the present invention - a preferred embodiment 3 is a schematic perspective view of a cutting device used in combination; FIG. 3 is a schematic perspective view of the cutting device after removing a casing; FIG. 4 is a schematic diagram of a system configuration of the cutting device; Figure 6 is a plan view showing a plurality of comparison sample images stored in advance by an image taking unit of the cutting device; Figure 7 is a flow chart of the preferred embodiment; . Figure 8 is a plan view showing the preferred embodiment for dividing the table unit and the workpiece along a first and second dividing lines into an upper left detection area, an upper right detection area, a lower left detection area, and a lower right detection area, and driven The image capturing unit captures a unit image image in the upper left detection area; FIG. 9 is a plan view of the unit screen image; FIG. 10 is a view similar to FIG. 8 illustrating the preferred embodiment driving the captured image unit in the The upper left detection area captures another unit picture image; FIG. 11 is a plan view of the other unit picture image; FIG. 12 is a view similar to FIG. 10, illustrating the first embodiment of the upper left detection area. The boundary coordinates and drives the image capturing unit up by a width distance; FIG. 13 is a view similar to FIG. 12, illustrating that the preferred embodiment finds the second boundary coordinate of the upper left detection zone; FIG. 14 is a Similar to the view of Fig. 13, the preferred embodiment finds the third to sixth boundary coordinates of the upper left detection zone; Fig. 15 is a view similar to Fig. 14 illustrating the preferred embodiment driving the table unit Moving to the left, the image capturing unit is photographed across the second dividing line to capture the unit facial image; and the preferred embodiment is shown in the preferred embodiment. The preferred embodiment is used to illustrate the preferred embodiment. Figure 16 is a view similar to Figure 15 showing the seventh boundary of the upper left detection zone; Figure 17 is a view similar to Figure 16 showing the first boundary of the upper right detection zone; Figure 1 8 is a second boundary coordinate of the upper right detection area similar to that of FIG. 17; FIG. 19 is a third to ten boundary coordinates of the upper right detection area similar to the view of FIG. 18. FIG. - similar to the view of FIG. 19', the preferred embodiment drives the table unit to move to the right, allowing the image capturing unit to capture the unit picture image across the second dividing line; FIG. 21 is a view similar to FIG. View, description &一 > Where is the preferred embodiment of the mouth to find the eleventh boundary coordinate of the upper right detection zone; Figure 2 2 is a view similar to the circle 21, the ambiguous 兮 - Q 况明The e-car parent embodiment finds the first trapping boundary of the upper right detection zone Figure 2 3 is a view similar to Figure 2 2, showing the second to fourth trapping boundary coordinates of the upper right detection zone, and Figure 24 is a similar In the rhyme diagram of Fig. 23, the sentence as is divided into ± the rule circle to indicate that the preferred embodiment finds 21 Τ 3 Μ 07 Γ out the first to seven boundary coordinates of the lower left detection area; Fig. 25 is a view similar to Fig. 24, illustrating The preferred embodiment finds the first to seventh boundary coordinates of the lower right detection zone; and the cutting unit is a planar schematic circle. The description of the cutting device is - 22 1364071 [Main component symbol description] 100 .... Cutting device 10 ···· ... table unit 20 ··· ... cutting unit 21 ·..... tool axis 22...·tool 30 ···· ... image capturing unit 31 ···· ... lens 4〇· ··· ... Analog/Digital Converter 50 ·····Image Memory Device 60 ····...Central Processing Unit 70·····Display 80._··...Alarm 90..., Fixture Frame 110 ··· ...adhesive tape 120····Compared sample image 130···...first dividing line 140··· ... Two separate lines 150··· ... double upper double test £ 151 ··· ... unit face image 152··· ... transition position 160···...right upper double test £161...unit face image 170...lower left Detection area 180 ... bottom right detection area 191 ... unit screen image 200 ... workpiece 210 ... cutting lane 220 ... cutting lane 300 ... step 310 ... step 320 ... step 330 ... step 340 ...step 350...step 360...step X.........first axial direction z.........second axial direction Y...... Triaxial L.........length distance W........width distance 23

Claims (1)

  1. T36407T X. Patent application scope: L A method for finding the boundary of a wafer, which is suitable for - the device has a workpiece set from the v-position, the table unit for cutting the workpiece is clamped, -... - the image taking unit And - the central processing unit, :... the unit can be moved along the first axial disk "疋 and the image is moved relative to each other in the second axis, or the central processor can manipulate the work" ^ 7L and the operation of the image capturing unit, the Xiao central processor: less than the image taking unit pre-wire storage (4) The sample image method includes the following steps: '^ square (4) the worktable unit along with the workpiece along the axial direction a dividing line is separated from the first dividing line intersecting the first axis into four detecting areas; 4 (8) letting the image taking unit photograph the towel-block detecting surface image ; early position 昼 comparison; (C0 image of the unit screen image and the comparison sample image (D) so that the work station 罝士命# says you οσ _ with the image taken along the first Μ# (E Repeat the steps (b), (c), (d) The unit image of the unit is Z-connected': in addition, the position of the early screen image that is completely unreserved with the comparison sample image is recorded as - boundary coordinates; Wang. (F) Make the workbench unit Repeat this step (B) with the image capture unit and the moving axis and the axial phase 24 1364071 (G) until the image capturing unit is shot across the area.), (d), (e), (f) 2. According to the item i of the patent application scope, in the step (C) t, if the method of finding the wafer boundary, the image is consistent, and the step (D (4) is compared with the comparison, The image capturing unit is spaced apart from the unit along the first axial direction by the length in the axial direction. In this step (the image of the face is in the image of the first image and the image of the comparison sample, the unit is right) To make the table unit win, then the length distance in the step (8). The first wheel approaches each other 3. According to the patent application scope 2, in the step (7) towel, the method of making the heart, the circle boundary, along the first The two axial directions are away from the single:: wide and the width distance of the image capturing unit. Early position - the first In the axial direction, according to the scope of the patent application, in the step (4), the method of the wide circular boundary, the first axial direction is the X axial direction, and the first axial direction is the Y axial direction, on the workpiece The left side of the mountain is the right side of the _ table. The coordinates are (6... is the right edge of the (X3,...2:X2'y2)' point, and the first coordinate is the edge point. The first coordinate is (χ4 μ) The lower axial direction of the seat... the upper, 'edge point on the second cymbal of the private value (y3, y4) - the first axial direction, the cough • eight" 2 parallel to the - axial The seat V: the factory line is passed through the left and right f edge points at the middle point of the first = (xl 'x2) and parallel to the axial direction, and the table unit is associated with the workpiece Λ - 1 25 1364071 The separation line is divided into four detection areas, such as the upper right detection area, the lower left detection area, and the lower right detection area. 5. The method for finding a wafer boundary according to item 4 of the patent application scope, wherein in the step (8), the image capturing unit starts shooting the unit of the upper left detection area at a first starting point of the coordinate - (X1 2 ) Book image. - Back to 6. According to the patent application method, the method for finding the wafer boundary, as described in item 5 of the dry circumference, wherein, in the step (C), y: 兮留 & 4 ^ ^ Λ The middle right screen image matches the comparison sample shirt image', in this step (筮一红一邵(3)), 'move the table unit to move the unit book to the right along the axis of the brother ώ The dry mdan is like a length distance in the first axial direction away from the image capturing army, in the case of 〇v (C), if the unit is in the same pattern as the one) The workbench unit along the 'then in this step (D is close to the image taking unit ^11 to the left to move the length of the distance 7. According to the patent application, the basin is in the middle of the search for the crystal according to item 6) The boundary method, /, medium, in the 垓 step (F), estimates that you are moving up the image unit along the second axis upwards and moving the 4th face image away from the table unit in the second axis. a width distance upwards and δ· according to the method of claim 7 of the patent scope, wherein the method of rounding the boundary at the step (8) Repeatedly when the coordinate value on the unit picture glaze in the Kanda-Han 6H Hb2) of the first round is smaller than the steps (B), (C), (D), (E), and (F)e 2 According to the 8th item of the patent application scope, the method of finding the wafer boundary by the *兮丰厅, ', A, in this step (G) t, material (four) Wan Pan, Tanaka's unit face 26 1364071 When the coordinate value of the image on the first axial axis is not less than A, in the step (c), if the unit facial image and the comparison sample material are completely matched, the unit image image is in the second axial direction. The coordinates of the coordinate value ^_front_boundary coordinates are defined as the boundary coordinates on the first-axis, and the repetition of the steps (b), (c), (d), (e)' (f) is stopped. ). 10. The method for finding the wafer boundary described in item 9 of the patent application further includes a step (H) after the step (G), a step (1) after the step, and after the step (1) Step (7), - step (1) after the step (J) 'one step (L) after the step..., and one step (M) after the step (1), %fyt^(H), let The image capturing unit starts to shoot a unit-written image of the upper right detection area at a second starting point of the coordinate - (x2, 2), and in the step (Ϊ), the zero-denier morning image and the comparison sample: the image The binding shirt is compared, in this step (1) towel, if the unit 昼 = =, than the «this image corresponds, then in the step (1) +, so that the work: early two. (4)—(4) Move the length distance to the left like early 兀' At this step (the sample image does not match at all, the heart ^ Μ screen image and the comparison, at this step (7) t, make the table single 兀> 〇 the first axis To the right g, in this step (1), it is close to the image capturing unit to two successively photographed units ///step (η), (1), (7) # * ^ ^ Λ, - the figure of the top One is compared with the sample shirt image, and the other - β character will be completely inconsistent Ϊ1: the position of the early screen image that is completely inferior to the comparison sample image is recorded as 1 I. (1), causing the image capturing unit to move the width distance along the second 27 /i :: away from the worktable single s, in the step (8), when the unit brake in the step is said to be wide toward μ λα When the coordinate value on "· xl + x2 ^ ^ is greater than one ^-, repeat this step (Η ), (7), (K), (L) eu U· according to the application for the special (4) surrounding the 1G item U boundary method, where 'in step (M) ^, when the unit in step (8), like the coordinate value in the first axis is not greater than At the time of the two (1) order. 'If the unit picture image and the comparison sample image are completely inconsistent with the coordinate value of the h unit screen image in the second axis and the coordinate value of the previous boundary coordinate in the first axis Defined as a boundary coordinate, and stop A to repeat the steps (H), (1), (υ, (κ), (1). U. According to the method of finding the circle boundary as described in item u of the towel, Further comprising a step after the step (M) (one step (M2) after the MU, - at the step (M2) = 3 steps (M3), and a step (m4) after the step (M3) a step (M5) after the step (M4), a step (M6) after the step (M5), and a step (M7) after the step (M6), in which the step (Μ). In the middle, determine whether the total number of boundary coordinates of the upper left and upper right detection zones are equal. If not equal, perform the steps (Μ2), (Μ3), (Μ4), (Μ5), (Μ6), (Μ7), In this step (μ2), let the image capturing unit start shooting at the last boundary coordinate of one of the detection areas with a small total number of boundary coordinates. In the unit screen image, in this step (M3), the unit "image" is compared with the comparison sample image, and in this step (Μ3), if the unit pupil image 28 1J04071 and the comparison sample image Correspondingly, in the step (M4), the work unit and the image capture unit are separated from each other by the length direction. In the step (M3), if the unit picture image is compared with the ratio In the case of "I don't match the king", in the step (M4), the worktable is single, and the image capturing unit is adjacent to the length distance along the first-axis, in the "M5; Repeat this step (M2), (make), (just:: one of the two consecutive unit image images is consistent with the image) and the other is more complete than the comparison sample image: The sign of the location of the image of the vertebrae image of the Tsuijiu's completely inconsistent image. The boundary of the border of the Γ Γ 个 个 个 个 覆盖 覆盖 覆盖 覆盖 覆盖 覆盖 覆盖 覆盖 覆盖 覆盖 覆盖 覆盖 覆盖 覆盖 覆盖 覆盖 覆盖 覆盖 覆盖 边界 边界 边界 边界 边界 边界 边界 边界 边界 边界 边界 边界Μ6) in 'make the workbench unit and the image capture unit; two the width distance In this step (Μ7), when the coordinate value of the early facial image on the first axial direction is the coordinate value of the edge of the other detection region having the same coordinate value in the first axial direction, Repeat the steps (M2), (M3), (M4), (M5), and set the step (from the left to go; the field in the step (M2): the image is on the first-axis When the 榡 value is equal to or exceeds the coordinate value of the same in the first axial direction of 4, when the coordinate value of the first-axis is detected, 'stop, up- (off)' (Μ4), (Μ5), (Μ6) β仃 骤 ( 间 13. 13. 13. 13. 13. 13. 13. 13. 13. 13. 13. 13. 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找 寻找, the workbench unit with the image 29 1364071
    The early cymbal can move relative to each other along an axis _ axially and perpendicular to the first axis, the central processor can control the operation of the working 4 cutting unit and the image capturing unit, the central portion (9) = has: less than one The image taking unit is pre-processed in the light door and includes the following steps: storing the sample image of the comparison, the side (A) is parallel with the workpiece along the first-axis line of the workpiece In the two axial directions, the second dividing line intersecting is divided into four detecting areas; the force dividing line (B) allows the s Xuan image taking unit to take an image of one of the detecting areas; (C) the unit picture f彡 image and the (four) sample image are axially phased (D) to move the table unit and the image capturing unit along the pair; repeating the (4)(b), (c), (d) to one of the two consecutive early facial images is consistent with the comparison sample image and the other is completely inconsistent with the comparison sample image, and will be completely inconsistent The position of the unit's face image is recorded as a boundary coordinate; (F) makes the hai workbench兀 and the image capturing unit move in the opposite direction; the tooth gate phase ▲ (G) repeats the steps (b), (c), (d), (e), (f) to shoot the image capturing unit And (H) repeat steps (b), (c), (d), (e), (f) (G) until the boundary coordinates of the last detection zone are found.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI460049B (en) * 2012-05-21 2014-11-11 Himax Tech Ltd Method of cutting

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* Cited by examiner, † Cited by third party
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TWI430094B (en) 2011-09-22 2014-03-11 Phison Electronics Corp Memory storage device, memory controller, and temperature management method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI460049B (en) * 2012-05-21 2014-11-11 Himax Tech Ltd Method of cutting

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