TWI358805B - Ultra slim semiconductor package and method of fab - Google Patents

Ultra slim semiconductor package and method of fab Download PDF

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Publication number
TWI358805B
TWI358805B TW096149788A TW96149788A TWI358805B TW I358805 B TWI358805 B TW I358805B TW 096149788 A TW096149788 A TW 096149788A TW 96149788 A TW96149788 A TW 96149788A TW I358805 B TWI358805 B TW I358805B
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Taiwan
Prior art keywords
layer
semiconductor package
semiconductor
electrically connected
semiconductor wafer
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TW096149788A
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English (en)
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TW200903754A (en
Inventor
Gi Jo Jung
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Nepes Corp
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Publication of TW200903754A publication Critical patent/TW200903754A/zh
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Publication of TWI358805B publication Critical patent/TWI358805B/zh

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Description

1358805 九、發明說明： 【發明所屬之技術領域】 t發'8月大致關於一超薄半導體封裝及其製造方法，且 更明 ’係關於一輕薄短小且未使用封裝用基材的半 導體， & ’以及製造晶圓等級或載體等級之該半導體封裝 的方法。 【先前技術】 半導體元件係藉由將許多電子元件集成在單一基材的 方式進行多種操作。為此，一般使用多種高技術性的製造 方法’且半導體元件製造中的每一元件已微型化發展成較 小尺寸的組件。 藉由發展封裝半導體元件的技術可實現高集成度及高 容量的半導體系統。半導體封裝技術已由金屬線連結轉為 能夠實現晶片等級的笨晶凸塊（flip-chip bumping)’以符合 市場要求。 第1圖為傳統球狀矩陣（BGA)封裝1 0的結構範例《獨 立的半導體晶片14藉由連接層20連接至基材12之一側以 作封裝’且一部份的半導體晶片藉由金屬線電性連接至基 材的一部份。許多銲錫凸塊18形成在基材底側上，保護模 3〇覆蓋該半導體晶片，並在基材頂側上形成金屬線。 如前文所述，於習知技術中，需要具有預定厚度的基 材以封裝半導體晶片。當半導體晶片運作時，訊號係經由 電性内連線由基材頂側上的金屬線轉移至基材底側上的鮮 5 1358805 鎮凸塊。然而，由於半導體元件的發展，半導體元件的運 作遑度已有顯著的改善。因此’當封較内有長的内連線長 度時，訊號會因高速運作或高容量訊號處理而延遲或失 真’因而無法滿足不同應用元件的需求。 此外，由於封裝需預定厚度的基材，對縮減整個封裝 尺寸及厚度上會造成限，卜基材因而成為發展輕巧通訊： 件或電子元件的阻礙。 再者，習知球狀矩陣封裝技術限制了各種堆疊封裝或 系統化封裝的發展，且無法大量生產。 【發明内容】 因此’本發明旨在於提.出新的半導體封裝，其厚度非 常薄、結構簡單且易於堆疊。 本發明另一目的在於提出一種半導體封裝’其具有短 的電内連線長度以利高速運作。
本發明另一目的在於提出一種製造半導體封裝的方 法，其製程簡單利於大量製造。 依據本發明之一態樣，本發明提出一種超薄半導體封 裝其至少包括：一多層薄琪層，其包括至少一介電層以及 至）一或夕層的導電重分配層（redistribution layer);至少 一半導體晶片，其電性連接至該重分配層且安裝在該多層 薄膜層上·’數個導.電性.結構，其電性連接至該重分配層且 各以一柱狀（post shape)形成在該多層薄臈層一側；一模造 部（molding part)，形成在該多層薄膜層上且至少部分地覆 6
1358805 蓋該導電結構及該半導體晶片；以及數個用於外部連 凸塊、或一用於外部連接之電極端，其形成在該模造 且電性連接至該等導電結構。 半導體晶片可藉由附加的獨立銲錫凸塊電性連接 層薄膜層，且以此方式，該等銲錫凸塊能藉由重分配 性連接至該多層薄膜層的多個導電結構。 或者，該半導體晶片之一側可藉由晶粒黏著 attachment)的方式直接安裝在多層薄膜層之頂側上。 方式，電極墊可形成在該半導體晶片之另一側，且該 墊可藉由重分配層電性連接至該多層薄膜層的數個導 構。 在依據本發明的半導體封裝中，該半導體晶片係 朝上形式安裝。半導體晶片的底側可暴露於外或加上 導.層，以使熱量易於分散開。 再者，由於半導體晶片之電極墊至外部連接之銲 塊的内連線長度較短，故使電子信號傳遞特性表現極’ 此外，即使外部連接端使用尺寸相當小的錫球， 它會電性連接至柱形的導電結構，故支腳高度仍高且 穩定性極佳。 依據本發明另一態樣。本發明提出一種製造半導 裝之方法，其包括下列步驟··在晶圓或載體之頂側上 介電層；在介電層頂.側上形成導電重分配層；在該重 層上形成數個各為枉形的導電結構；將一半導體晶片 於該介電層上；於該重分配層上形成一模造層，以至 接之 部上 至多 層電 (die 以此 電極 電結 以面 熱傳 錫凸 圭。 但因 機械 體封 形成 分配 安裝 少部 7
1358805 分地覆蓋該導電結構及該半導體晶片；研磨該模造部的 側；以及形成數個用於外部連接的凸塊以便電性連接至 等導電結構。 依據該製造方法，由於該封裝結構僅以模造的方式 行，故在沒有任何用於封裝的外加結構下，該封裝厚度 成厚·度會非常薄且尺寸易於控制。再者，由於導電性重 配層及柱形的導電結構係以晶圓等級或載體等級形成， 製程相當簡單且可降低製造成本。更明確而言，如此非 容易堆疊多個晶圓等級的封裝。 【實施方式】 本發明將參照附加圖式（顯示本發明較佳實施例）作 詳細的說明。 第一實施例 如第2圖所示，依據本發明第一實施例之半導體封 具有較薄的封裝結構，其中模造部及半導體晶片係安裝 多層薄膜層上。 如圖所示，導電性重分配層120形成於數個介電層1 及130之間，且數個介電層及重分配層120共同形成多 薄膜層。 於多層薄膜層之一側處，半導體晶片2 0 0係經安裝 藉由數個銲錫凸塊220電性連接至該重分配層120。 該半導體晶片2 0 0係電性連接至導電結構1 4 0，導 結構各以柱狀（post shape)形成在多層薄膜層之一側，通 頂 該 進 形 分 故 常 更 裝 於 10 層 以 電 過 8
1358805 重分配層1 2 0，且半導體晶片2 0 0最終電性連接至銲 塊240以作外部連接（其電性連接至導電結構140)。 結構可由例如銅、金、鉑、鎳、鎢或高導電性金屬或 金，然本發明並未特別限制導電結構的材料。 形成在多層薄膜層之一側的導電結構140及半導 片2 0 0係藉由模造部1 5 0與外界分隔，該模造部部分 蓋該等導電結構140及半導體晶片200，藉以形成整 看具實際支撐力及結構穩定性的半導體封裝。 由於前述半導體封裝不需任何獨立的支撐基材， 層薄膜層、模造部150及安裝的半導體晶片200形成 裝結構，故結構特性在此半導體封裝中很輕、薄、短且 更明確而言，由於電性内連線長度縮減，故對高速傳 子訊號相當有幫助。 在模造部1 5 0表面上，可形成另一導電性重分配層 以電性連接至該等導電結構 140，且用於外部連接的 凸塊2 4 0係經由重分配層 1 2 2電性連接至該等導電 140。於連接至銲錫凸塊240的重分配層122上，可進 形成上方凸塊金屬（未示出）以增加銲錫凸塊240的黏 並避免銲錫凸塊240氧化。 於重分配層1 2 2 —側會部分形成介電層1 3 2。該 層132藉由覆蓋該半導體晶片200 —側的方式作為隔 界的保護層。 . 再者，該等用於外部連接的銲錫凸塊240可直接 至導電結構14 0。參照第3圖’該等導電結構1 4 0及 錫ib 導電 其合 體晶 地覆 體來 且多 一封 小 〇 送電 122 鲜錫 結構 一步 著性 介電 絕外 連接 模造 9 240, 240,
1358805 部150之一側暴露於外界，不具電性層，且銲錫凸塊 直接連在導電結構140表面上。更明確而言，與第2 施例不同的是銲錫凸塊 240’尺寸非常小。雖然銲錫 240’所用尺寸非常小，但可藉由導電結構140及銲錫 240’電性連接至半導體晶片200的方式維持高支腳高 以使封裝厚度越來越輕薄。 半導體晶片2 00背側與暴露於外界的模造部表面 同高度。當半導體晶片200背側厚度薄至可改善導 時，半導體晶片200運作所形成的熱量便可有效的分 外界。再者，較佳而言可均勻研磨模造部150及導電 1 4 0的暴露側，以均勻維持其高度使銲錫凸塊2 4 0 ’安 外部電路板及類似者上。 此外，於第3圖實施例中，由於導電結構14 0及 凸塊240’彼此垂直地電性接觸在相同位置，故電子訊 易於傳送。 依據本發明實施例之半導體封裝中，可在其頂側 側安裝獨立的散熱物。參照第4圖，一散熱片3 0 0a係 至多層薄膜層之表面，而另一散熱片30 Ob係接附至該 體晶片200之底側。散熱片3 00a及3 00b可使用高導 且具良好耐用性的材料，且可直接接附或藉由高導熱 黏附薄膜黏附上。 再者，依據本發明實施例之半導體封裝另可包括 膜被動元件，其在重分配層形成的同時係位於介電 間。例如，參照第4圖，被動元件是由鄰接該重分配 圖實 凸塊 凸塊 度， 有相 熱性 散至 結構 裝在 銲錫 號較 及底 接附 半導 熱性 性的 一薄 層之 層之 10 1358805 區域A中的薄膜所形成。該被動元件可為，例如，電感或 電容。包括該薄膜元件的多層薄膜結構可以相同方式施加 至第2及3圖的封裝結構中。
依據本發明實施例的半導體封裝不僅輕、薄、短且小， 許多半導體封裝也容易水平地或垂直堆疊地安裝在外部電 路板。參照第5圖，兩半導體封裝PI及PII係垂直堆疊且 彼此以銲錫凸塊240’作電性連接。此等半導體封裝PI及 PII可連接至外部電路板或經由用於外部連接之銲錫凸塊 240’連接至另一半導體封裝，其等形成在下方封裝PII之 底側上。 半導體晶片200a建置在上方封裝PI中，而另一半導 體晶片200b建置在下方封裝PII中。在上方封裝PI頂側 上，可如圖所示加置散熱片300a。兩個堆疊的封裝彼此以 銲錫凸塊240’電性連接，且可接著藉由微分圖示各封裝中 銲錫凸塊240’之尺寸而進一步縮減堆疊高度。此外，由於 建置在各封裝中之半導體晶片200的一側係暴露於外界， 產生的熱量雖多但易於散出。 依據本發明第一實施例製造半導體之封裝方法將參照 第6至16圖說明。 可使用用於封裝製造的臨時基材、晶圓載件以及普通 的半導體晶圓。臨時基材在製造半導體封裝的過程中會移 除，且實際的封裝會藉其自身結構（無須基材）固定機械支 撐力及結構穩定性。 參照第6圖，包括結合層1 1 0 ’的介電層1 1 0形成在晶 11
1358805 圓（或載體）1〇〇上。導電重分配層 120或電極墊形 電層110(第7圖）上。重分配層可由，例如，電錢的 成，且形成該重分配層的方法並不受限。當該重分 成時，薄膜被動元件可藉由形成部分電極圖案的 之，如第4圖所示。 在該重分配層120形成後，在該重分配層120 另一介電層130。該介電層130會部分被姓刻以部 露出該重分配層120(第8圖）。該暴露的部分相當 配層 120(或電極墊）及其他電子元件間的電性連接 等介電層110及130及重分配層120形成多層薄膜 作為本發明半導體封裝的基底層。 繼而，在介電層130的暴露部分上，會形成呈 導電結構140(第9圖）。較佳來說，導電結構140 電材料形成，例如銅，且此等可以高度大於寬度方3 亦即，使深寬比較大。 在形成導電結構1 4 0後，半導體晶片2 0 0便安 分配層120(第10圖）的暴露部分上。安置半導體晶 的過程係以，例如，將具有較佳操作特性的半導 2 0 0 (經由測試選出）配置在晶圓等級或載體等級的 膜層上的方式進行。銲錫凸塊210可在半導體晶片 一側形成。或者，半導體晶片200可藉由在多層薄 導電重分I層120的電極墊上形成銲錫凸塊210的 裝。 於該半導體晶片 200内，可設多個薄膜元卡 成在介 方式形 配層形 方式為 上形成 分地暴 於重分 區。該 層，並 柱狀的 可由導 ,形成， 裝在重 片200 體晶片 多層薄 200之 膜層之 方式安 卜（未示 12 1358805 出），例如，諸如電晶體、二極體以及電内連線。半導體晶 片2 00可為記憶體或邏輯電路。 在有多個導電結構140形成且安裝半導體晶片200的 多層薄膜層上，可塗覆模造材料以形成覆蓋該等導電結構 及半導體晶片（第11圖）的模造部150。該模造部150可支 撐其他元件以使本發明半導體封裝成為一具有實體穩定性 的結構。
為最小化封裝厚度，較佳而言，該模造部1 5 0可堆積 成層（layered)以僅與導電結構140及半導體晶片200的高 度同高。為達此目的，該模造部頂側背側有研磨 (back-grinded)以暴露出該等導電結構 140及半導體晶片 200的頂部（見第12圖）。於此製程中，半導體晶片200頂 側可研磨以更縮減整個封裝厚度。 其後，藉由利用模造部表面上暴露的導電結構頂側（第 13圖），該模造部表面上會形成另一重分配層（或電極 墊）122 ° 另一介電層132形成在該模造部150表面有重分配層 122形成之處，且銲錫凸塊240將形成處的介電層132也 會部分被移除，以部分暴露出重分配層1 2 2 (第1 4圖）。 於本發明中，各介電層110、130及132可由介電材料 形成，例如，聚醯亞胺、苯並環丁稀（benzocyclobutene, B C B )、氧化矽或氮化石夕，且重分西己層1 2 0及1 2 2可由例如 銅、金、鋁或鎢等材料形成。然而，每一者也可由其他材 料形成，且本發明並未特別限制所用的材料。 13
1358805 其後’在上方安裝有半導體晶片200之多層薄膜層 的該晶圓（或載體）會由多層薄膜層底側移除（第圖）。 後’用於外部連接的銲錫凸塊24〇會形成重分配層122 其在部分移除介電層132時會暴露出。該銲錫凸塊240 由球黏附、電鍍、無電電鍍、印刷或濺鍍的方式形成。 晶圓（或載體）可在銲錫凸塊240形成後移除。 在銲錫凸塊240形成在重分配層122之前，一下方 塊金屬（UBM)(未示出）可形成在該重分配層122上以改 該銲錫凸塊240的厚度’並避免銲料凸塊240氧化。下 凸塊金屬可包括一或多層由金屬或合金形成之層。該下 凸塊金屬可形成在一層結構中、或形成在包含兩層或多 的多層中’其材料選自下列一或多種：例如銅（Cu)、銅 金（Cu-alloy)' 鎳（Ni)、鎳合金（Ni-alloy)、鶴（W)、鎮合 (W-alloy)、鈦（Ti)、鈦合金（Ti-alloy)、鋁（A1) ' 鋁合 (Al-alloy)、鉻（Cr)、鉻合金（Cr-alloy)、金（Au)、.金合 (Au-alloy)、鈀（Pd)、鈀合金（Pd-alloy)、銻（Sb)、銻合 (Sb-alloy)、銦（In)、銦合金（In-alloy)、鉍（Bi)、鉍合 (Bi-alloy)、鉑（P0 及鉑合金（Pt-alloy)。 於前揭圖式中，為清楚起見，僅圖示出一獨立多層 膜層及一獨立半導體晶片200。然而，於實際情況中， 多的多層薄膜層及許多的半導體晶片200會同時形成並 晶圓等級或載體等級安裝’並在最後製程完成後分.隔成 個獨立的封裝。 第二實施例 下 最 > 可 凸 善 方 方 層 合 金 金 金 金 金 薄 許 以 數 14
1358805 依據本發明第二實施例的半導體封裝 圖。與第一實施例不同的是，在依據本發明 半導體封裝中，半導體晶片200’的一側係藉 式安裝在多層薄膜層上，且沒有用於電性連 形成在半導體晶片200’中。反之，電極墊21 體晶片2 0 0的另一側，以便電性連接至該封 件。 更明確而言，導電重分配層120形成在藝 及130之間，且介電層110及130及重分配 成多層薄膜層。該半導體晶片200’直接接附 層之一側處。 該半導體晶片200’係電性連接至該等導 各以一柱形方式形成在該多層薄膜層之一側 極墊210’及重分配層122，且該半導體晶片 連接至銲錫凸塊240以供外部連接，其等係 電結構1 4 0。參考號1 6 0表示保護該重分配 層。藉由採用相同材料及僅以高度作區分的 墊2 1 0 ’可形成在類似，例如，導電結構1 4 0 同樣的，在依據本發明第二實施例之半 形成在該多層薄膜層之一側的導電結構1 4 0 200’係由一模造部150所部分覆蓋，且該多 造部 150實體地支撐該半導體晶片 200’以 構。 直接接附在該多層薄膜層之該半導體1 圖示於第 17 第二實施例的 由晶片黏著方 接的銲錫凸塊 0’形成在半導 裝内的其他元 c層介電層1 1 〇 層1 1 0整體形 於該多層薄膜 電結構1 4 0， 處’通過該電 2 0 0 ’最後電性 電性連接至導 層122的介電 方式’該電極 的結構中。 導體封裝中， 及半導體晶片 層薄膜層及模 形成一封裝結 I片 200’為面 15 1358805 朝上形式。形成在該半導體晶片200’底側處之該多層薄膜 層的一部份可移除以暴露於外界，或可將熱傳導片接附至 該多層薄膜層，以順利將熱量由該半導體晶片200’散出。
在多層薄膜層下方，可形成銲錫凸塊240以電性連接 至重分配層120。可再重分配層120及銲錫凸塊240之間 另設一下方凸塊金屬（未示出）。此外，依據本發明第二實 施例之半導體封裝也可在其中形成一薄膜被動元件（未示 出），且若有需要，可在模造部150内設一集成的被動元件 (未示出）。 參照第1 8圖，兩個半導體晶片2 0 0 a及2 0 0 b係安裝在 一半導體封裝内。半導體晶片200a及200b的每一者係經 由每一電極墊210a及210b電性連接至重分配層122。該 等半導體晶片200a及200b也可經由各個導電結構140個 別連接至重分配層 1 2 2，以使訊號傳送能經由各個導電路 徑進行。或者，訊號傳送可經由重分配層1 2 2由半導體晶 片2 0 0 a及2 0 0 b間的部分電性連接作同步進行。此外，安 裝在該多層薄膜層上之半導體晶片200’可水平配置，但可 與圖示不同作垂直配置。 第19圖繪製依據本發明第二實施例作垂直堆疊的半 導體封裝。該堆疊封裝ΡΙ、ΡΠ及PIII彼此以銲錫凸塊240’ 作電性連接。為縮減堆疊厚度，可使用兩個尺寸不同的銲 錫凸塊240及240’。 用於外部電路連接的銲錫凸塊240可電性連接至印刷 電路板或其他封裝。 16
1358805 依據第二實施例製造半導體封裝的製程與依據第一 施例製造半導體封裝的製程類似，但兩實施例安裝半導 晶片200’的方法不同。參照第20至第30圖，其將詳述 據第二實施例製造半導體封裝的方法。 一介電層110形成在晶圓（或載體）1 00上且該介電 會部分移除以暴露出一部份晶圓（第20圖）。其後，為易 移動晶圓，在形成介電層110之前可先在晶圓上形成一 附薄膜。 其後，重分配層（或電極墊）120可形成在介電層1 移除之處（第21圖），且部分形成另一介電層130以部分 露該重分配層120(第22圖）。該介電層110及130及該 分配層1 2 0係形成一多層薄膜層，並作為第二實施例之 導體封裝的底部基材。此外，重分配層1 2 0係電性連接 銲錫凸塊240以作外部連接，此將於下文詳述。 之後，導電結構 1 4 0 (各呈柱狀）係形成在暴露的重 配層120上（第23圖）且一半導體晶片200’係接附在多層 膜層之頂側上（第24圖）。如第18圖所述，兩個或多個 導體晶片可作水平或垂直安裝。該等電極墊210’可先形 在多層薄膜層之頂側上。或者，在形成導電結構140之 可安裝半導體晶片200’，導電結構140及電極墊210’可 時形成。 在半導體晶片200’、導電結構140及電極墊210’形 後，模造材料會塗覆至多層薄膜層的頂側，以形成至少 分覆蓋半導體晶片200’、導電結構及電極墊210’的模造 實 體 依 層 於 黏 10 暴 重 半 至 分 薄 半 成 前 同 成 部 部 17 1358805 150(第25圖）。當模造部150表面位於導電結構140及電 極墊2 1 0 ’頂侧上時，模造部1 5 0頂側係經研磨以縮減整個 封裝（第26圖）。當模造部150頂側被研磨時，其具有的好 處是各呈柱形之導電結構140及半導體晶片200’頂側上的 電極墊2 1 0 ’高度很一致。
其後，會形成另一重分配層1 2 2以電性連接該導電結 構140及該電極墊210’（第27圖），並在該重分配層122 之頂側上形成作為保護層的另一介電層160(第28圖）。 在包括多層薄膜層及模造部150的封裝結構完成後， 會移除多層薄膜層下的晶圓1〇〇(第29圖），且會形成連接 至多層薄膜層之重分配層120的銲錫凸塊240以作外部連 接（第30圖）。 與本發明第一實施例之半導體封裝比較，依據第二實 施例的最終半導體封裝除了安裝半導體晶片的方法不同 外，皆具有類似結構。
如前文所述，由於多層薄膜層及模造部依據本發明可 作為半導體封裝的基材，故無須任何基材而可實現超薄半 導體封裝。由於多個半導體封裝同時以晶圓等級或載體等 級形成，製程會簡化並利於大量製造。依據本發明的超薄 半導體封裝有助於小型且輕薄的通訊元件、顯示器及其他 不同電子元件，且具有良好電性以增加產品競爭性。 本發明已藉由較佳實施例描述如上。然而，應理解的 是本發明範圍並不限於所揭示之實施例。反之，在熟習此 項技術人士利用已知或未來技術能力内的不同變化及替換 18
1358805 配置與均等物均應涵蓋在本發明範圍内。因此， 範圍應以最廣範圍解釋以涵蓋所有變化及類似配 【圖式簡單說明】 本發明更詳細的說明在參照下文實施例及附 將更可清楚為熟習此項技術人士所領會，其中： 第1圖為習知半導體封裝結構之截面圖； 第2至5圖為依據本發明第一實施例之半導 構的截面圖； 第6至16圖為製造依據本發明第一實施例之 裝之製程的截面圖； 第17至19圖為依據本發明第二實施例之半 結構的截面圖；以及 第20至30圖為製造依據本發明第二實施例 封裝之製程的截面圖。 申請專利 置。 加圖示後 體封裝結 半導體封 導體封裝 之半導體
【主要元件符號說明】 10 球狀矩陣封裝 12 基材 14 半導體晶片 18 銲錫凸塊 20 連接層 30 保護模 100 晶圓（或載體） 1 1 05 結合層 110 介電層 120 重分配層 122 重分配層 130 介電層 132 介電層 140 導電結構 19 1358805 150 模造部 1 60 介電層 200 半導體晶片 200a 半導體晶 200b 半導體晶片 220 銲錫凸塊 240 鲜錫凸塊 2405 銲錫凸塊 300a 散熱片 300b 散熱片
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Claims (1)

1358805 第％丨竹？胙號專利案ι<5σ年7月修正;^ 十、申請專利範圍： 1. 一種超薄半導體封裝，包含： 一多層薄膜層，包括一第一介電層、一第一重分配 層位在該第一介電層上，以及一第二介電層位在該第一重 分配層上； 至少一半導體晶片，電性連接至該第一重分配層並 安裝於該多層薄膜層上；
數個導電結構，電性連接至該第一重分配層，且各 以柱狀形成在該多層薄膜層之一側； 一模造部（molding part)，形成在該多層薄膜層上且 至少部分地覆蓋該等導電結構及該半導體晶片； 一第二重分配層，形成於該模造部上並與該第一重 分配層相對，且電性連接至該導電結構；以及 數個用於外部連接之凸塊，形成在該模造部上且電 性連接至該等導電結構。
2 ·如申請專利範圍第1項所述之超薄半導體封裝，其中該 半導體晶片係藉由額外的焊錫凸塊電性連接至該.多層 薄膜層。 3 .如申請專利範圍第2項所述之超薄半導體封裝，其中該 等銲錫凸塊係經由該第一重分配層電性連接至該多層 薄膜層的該等導電結構。 21 1358805 4. 如申請專利範圍第1項所述之超薄半導體封裝，其中該 模造部之頂側與該半導體晶片之頂側具有相同高度。 5. 如申請專利範圍第1項所述之超薄半導體封裝，其中該 等導電結構及用於外部連接之該等凸塊彼此在相同位 置處垂直地電性連接。
6. 如申請專利範圍第1項所述之超薄半導體封裝，其中該 半導體晶片之一側處設有一散熱物。 7. 如申請專利範圍第6項所述之超薄半導體封裝，其中該 多層薄膜層包含一薄膜被動元件。
8.如申請專利範圍第1項所述之超薄半導體封裝，更包 含： 另一半導體封裝，其將堆疊在該半導體封裝的上方 或下方。 9.如申請專利範圍第8項所述之超薄半導體封裝，其中該 兩堆疊之半導體封裝彼此藉由該等用於外部連接之凸 塊而電性連接，且用於外部連接該兩封裝之該等凸塊的 尺寸不相同。 22 1358805 • » ' 10. 如申請專利範圍第1項所述之超薄半導體封裝，其中該 半導體晶片之一側暴露於外界。 11. 如申請專利範圍第1項所述之超薄半導體封裝，其中該 半導體晶片之一側係藉由晶粒黏著（die attachment)的 方式安裝於該多層薄膜層上。
1 2.如申請專利範圍第1 1項所述之超薄半導體封裝，其中 數個電極墊形成在該半導體晶片之另一側。 13.如申請專利範圍第12項所述之超薄半導體封裝，其中 該半導體晶片之該等電極墊係藉由該重分配層電性連 接至該多層薄膜層之該等導電結構。
14.如申請專利範圍第1項所述之超薄半導體封裝，其中兩 個或多個半導體晶片係電性連接至該第一重分配層並 安裝於該多層薄膜層上，且該等半導體晶片彼此係呈水 平或垂直地配置。 15.—種製造一超薄半導體封裝的方法，其包含下列步驟： 於一晶圓或載體之頂側上形成一介電層； 於該介電層之頂側上形成一第一導電重分配層； 23 1358805 • · ^ 於該第一重分配層上形成各呈柱形之數個導電結 構； 於該介電層上安裝一半導體晶片； 於該重分配層上形成一模造部，以至少部分地覆蓋 該等導電結構及該半導體晶片； 研磨該模造部之頂側；
於該模造部上形成一第二重分配層；以及 形成數個用於外部連接之凸塊，其將電性連接至該 等導電結構。 1 6.如申請專利範圍第1 5項所述之方法，其中該半導體晶 片係藉由數個額外銲錫凸塊電性連接至該重分配層。
17.如申請專利範圍.第15項所述之方法，其中該半導體晶 片係以晶粒黏著（die attachment)的方式安裝於該介電 層上。 18,如申請專利範圍第15項所述之方法，更包含下列步驟： 堆疊另一半導體封裝以電性連接至用於外部連接 的該等凸塊。 19.如申請專利範圍第15項所述之方法，更包含下列步驟： 形成一薄膜被動元件。 24 1358805 • I · 2 0.如申請專利範圍第15項所述之方法，更包含下列步驟： 在用於外部連接之該等凸塊形成前或後，移除該晶 圓或載體。 21.如申請專利範圍第15項所述之方法，其中兩個或多個 半導體晶片係以可使彼此水平或垂直配置的方式安裝。
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Families Citing this family (58)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7993972B2 (en) * 2008-03-04 2011-08-09 Stats Chippac, Ltd. Wafer level die integration and method therefor
US8021907B2 (en) 2008-06-09 2011-09-20 Stats Chippac, Ltd. Method and apparatus for thermally enhanced semiconductor package
US7888184B2 (en) * 2008-06-20 2011-02-15 Stats Chippac Ltd. Integrated circuit packaging system with embedded circuitry and post, and method of manufacture thereof
JP2010205851A (ja) * 2009-03-02 2010-09-16 Shinko Electric Ind Co Ltd 半導体装置及びその製造方法、並びに電子装置
JP5188426B2 (ja) * 2009-03-13 2013-04-24 新光電気工業株式会社 半導体装置及びその製造方法、電子装置
US8163597B2 (en) * 2009-03-24 2012-04-24 Stats Chippac, Ltd. Semiconductor device and method of forming no-flow underfill material around vertical interconnect structure
US8169070B2 (en) 2009-05-15 2012-05-01 Infineon Technologies Ag Semiconductor device
US9397050B2 (en) * 2009-08-31 2016-07-19 STATS ChipPAC Pte. Ltd. Semiconductor device and method of forming pre-molded semiconductor die having bumps embedded in encapsulant
US8476775B2 (en) * 2009-12-17 2013-07-02 Stats Chippac Ltd. Integrated circuit packaging system with embedded interconnect and method of manufacture thereof
TWI401753B (zh) * 2009-12-31 2013-07-11 Advanced Semiconductor Eng 可堆疊式封裝結構之製造方法
US9735113B2 (en) * 2010-05-24 2017-08-15 STATS ChipPAC Pte. Ltd. Semiconductor device and method of forming ultra thin multi-die face-to-face WLCSP
US9202715B2 (en) 2010-11-16 2015-12-01 Stats Chippac Ltd. Integrated circuit packaging system with connection structure and method of manufacture thereof
US20120139095A1 (en) 2010-12-03 2012-06-07 Manusharow Mathew J Low-profile microelectronic package, method of manufacturing same, and electronic assembly containing same
KR20120091694A (ko) * 2011-02-09 2012-08-20 삼성전자주식회사 반도체 패키지
JPWO2013035655A1 (ja) * 2011-09-09 2015-03-23 株式会社村田製作所 モジュール基板
US9691706B2 (en) 2012-01-23 2017-06-27 Taiwan Semiconductor Manufacturing Company, Ltd. Multi-chip fan out package and methods of forming the same
KR101985236B1 (ko) 2012-07-10 2019-06-03 삼성전자주식회사 멀티-칩 패키지 및 그의 제조 방법
US9059107B2 (en) * 2012-09-12 2015-06-16 Taiwan Semiconductor Manufacturing Company, Ltd. Packaging methods and packaged devices
US10192796B2 (en) 2012-09-14 2019-01-29 STATS ChipPAC Pte. Ltd. Semiconductor device and method of forming dual-sided interconnect structures in FO-WLCSP
US9443797B2 (en) * 2012-09-14 2016-09-13 STATS ChipPAC Pte. Ltd. Semiconductor device having wire studs as vertical interconnect in FO-WLP
US9818734B2 (en) * 2012-09-14 2017-11-14 STATS ChipPAC Pte. Ltd. Semiconductor device and method of forming build-up interconnect structures over a temporary substrate
KR101411810B1 (ko) * 2012-09-27 2014-06-27 앰코 테크놀로지 코리아 주식회사 반도체 디바이스 및 그 제조 방법
US9653442B2 (en) 2014-01-17 2017-05-16 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated circuit package and methods of forming same
US20150206866A1 (en) * 2014-01-17 2015-07-23 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor Package and Methods of Forming Same
KR101538573B1 (ko) * 2014-02-05 2015-07-21 앰코 테크놀로지 코리아 주식회사 반도체 디바이스의 제조 방법 및 이에 따른 반도체 디바이스
US9355997B2 (en) 2014-03-12 2016-05-31 Invensas Corporation Integrated circuit assemblies with reinforcement frames, and methods of manufacture
US20150262902A1 (en) 2014-03-12 2015-09-17 Invensas Corporation Integrated circuits protected by substrates with cavities, and methods of manufacture
US9165793B1 (en) 2014-05-02 2015-10-20 Invensas Corporation Making electrical components in handle wafers of integrated circuit packages
US20150340308A1 (en) * 2014-05-21 2015-11-26 Broadcom Corporation Reconstituted interposer semiconductor package
US9741649B2 (en) 2014-06-04 2017-08-22 Invensas Corporation Integrated interposer solutions for 2D and 3D IC packaging
US11239138B2 (en) 2014-06-27 2022-02-01 Taiwan Semiconductor Manufacturing Company Methods of packaging semiconductor devices and packaged semiconductor devices
US9252127B1 (en) 2014-07-10 2016-02-02 Invensas Corporation Microelectronic assemblies with integrated circuits and interposers with cavities, and methods of manufacture
US10056352B2 (en) * 2014-07-11 2018-08-21 Intel IP Corporation High density chip-to-chip connection
US9502364B2 (en) * 2014-08-28 2016-11-22 Taiwan Semiconductor Manufacturing Company Limited Semiconductor package and method of forming the same
US20160240457A1 (en) * 2015-02-18 2016-08-18 Altera Corporation Integrated circuit packages with dual-sided stacking structure
US9583472B2 (en) * 2015-03-03 2017-02-28 Apple Inc. Fan out system in package and method for forming the same
US9893017B2 (en) 2015-04-09 2018-02-13 STATS ChipPAC Pte. Ltd. Double-sided semiconductor package and dual-mold method of making same
KR101691099B1 (ko) * 2015-04-30 2016-12-29 하나 마이크론(주) 팬 아웃 패키지, 팬 아웃 pop 패키지 및 그 제조 방법
US9478504B1 (en) 2015-06-19 2016-10-25 Invensas Corporation Microelectronic assemblies with cavities, and methods of fabrication
KR102192569B1 (ko) 2015-11-06 2020-12-17 삼성전자주식회사 전자 부품 패키지 및 그 제조방법
KR101912278B1 (ko) 2015-12-21 2018-10-29 삼성전기 주식회사 전자 부품 패키지 및 그 제조방법
US10797038B2 (en) * 2016-02-25 2020-10-06 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor package and rework process for the same
JP6770331B2 (ja) * 2016-05-02 2020-10-14 ローム株式会社 電子部品およびその製造方法
US10068853B2 (en) * 2016-05-05 2018-09-04 Taiwan Semiconductor Manufacturing Co., Ltd. Integrated fan-out package and method of fabricating the same
US10217716B2 (en) 2016-09-12 2019-02-26 Mediatek Inc. Semiconductor package and method for fabricating the same
US9991206B1 (en) * 2017-04-05 2018-06-05 Powertech Technology Inc. Package method including forming electrical paths through a mold layer
CN107507816A (zh) * 2017-08-08 2017-12-22 中国电子科技集团公司第五十八研究所 扇出型晶圆级多层布线封装结构
US10103038B1 (en) * 2017-08-24 2018-10-16 Micron Technology, Inc. Thrumold post package with reverse build up hybrid additive structure
US20190067248A1 (en) 2017-08-24 2019-02-28 Micron Technology, Inc. Semiconductor device having laterally offset stacked semiconductor dies
CN107579058A (zh) * 2017-09-02 2018-01-12 中国电子科技集团公司第五十八研究所 一种多类型芯片叠层封装结构及其制作方法
CN107579009A (zh) * 2017-09-02 2018-01-12 中国电子科技集团公司第五十八研究所 一种多芯片叠层封装结构及其制作方法
US10283461B1 (en) * 2017-11-22 2019-05-07 Taiwan Semiconductor Manufacturing Company, Ltd. Info structure and method forming same
CN108922853A (zh) * 2018-07-09 2018-11-30 中国电子科技集团公司第五十八研究所 一种基于Fan-out工艺的三维结构制作方法
US11569159B2 (en) * 2019-08-30 2023-01-31 Taiwan Semiconductor Manufacturing Company, Ltd. Structure and formation method of chip package with through vias
US11315862B2 (en) * 2020-01-31 2022-04-26 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor structure and manufacturing method thereof
WO2022024361A1 (ja) * 2020-07-31 2022-02-03 三菱電機株式会社 アクティブフェーズドアレーアンテナ
WO2022123785A1 (ja) * 2020-12-11 2022-06-16 三菱電機株式会社 ３次元実装集積回路
WO2023119450A1 (ja) * 2021-12-21 2023-06-29 ウルトラメモリ株式会社 半導体モジュール及び積層モジュール

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010002843A (ko) * 1999-06-18 2001-01-15 김영환 몰드형 웨이퍼 레벨 패키지
JP2001217340A (ja) * 2000-02-01 2001-08-10 Nec Corp 半導体装置及びその製造方法
JP2002134653A (ja) * 2000-10-23 2002-05-10 Matsushita Electric Ind Co Ltd 半導体装置とその製造方法
JP4240899B2 (ja) * 2001-03-26 2009-03-18 Ｎｅｃエレクトロニクス株式会社 半導体装置及び半導体装置の製造方法
JP3861669B2 (ja) * 2001-11-22 2006-12-20 ソニー株式会社 マルチチップ回路モジュールの製造方法
JP4077261B2 (ja) * 2002-07-18 2008-04-16 富士通株式会社 半導体装置
US6987031B2 (en) * 2002-08-27 2006-01-17 Micron Technology, Inc. Multiple chip semiconductor package and method of fabricating same
JP4271590B2 (ja) * 2004-01-20 2009-06-03 新光電気工業株式会社 半導体装置及びその製造方法
JP4204989B2 (ja) * 2004-01-30 2009-01-07 新光電気工業株式会社 半導体装置及びその製造方法
JP4865197B2 (ja) * 2004-06-30 2012-02-01 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
KR100616670B1 (ko) * 2005-02-01 2006-08-28 삼성전기주식회사 웨이퍼 레벨의 이미지 센서 모듈 및 그 제조방법
US20080136004A1 (en) * 2006-12-08 2008-06-12 Advanced Chip Engineering Technology Inc. Multi-chip package structure and method of forming the same
US8304923B2 (en) * 2007-03-29 2012-11-06 ADL Engineering Inc. Chip packaging structure

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