TWI279259B - Apparatus for cleaning flat display panel - Google Patents
Apparatus for cleaning flat display panel Download PDFInfo
- Publication number
- TWI279259B TWI279259B TW094106047A TW94106047A TWI279259B TW I279259 B TWI279259 B TW I279259B TW 094106047 A TW094106047 A TW 094106047A TW 94106047 A TW94106047 A TW 94106047A TW I279259 B TWI279259 B TW I279259B
- Authority
- TW
- Taiwan
- Prior art keywords
- gas
- liquid
- cleaning
- supply unit
- passage
- Prior art date
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 56
- 239000007788 liquid Substances 0.000 claims abstract description 84
- 239000012459 cleaning agent Substances 0.000 claims abstract description 54
- 239000007921 spray Substances 0.000 claims abstract description 27
- 239000000203 mixture Substances 0.000 claims abstract description 22
- 238000005507 spraying Methods 0.000 claims abstract description 11
- 230000004888 barrier function Effects 0.000 claims description 12
- 238000000926 separation method Methods 0.000 claims description 11
- 238000006243 chemical reaction Methods 0.000 claims description 8
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 241000282994 Cervidae Species 0.000 claims 1
- 210000003195 fascia Anatomy 0.000 claims 1
- 239000007789 gas Substances 0.000 description 113
- 239000012530 fluid Substances 0.000 description 18
- 238000003860 storage Methods 0.000 description 16
- 238000007789 sealing Methods 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 239000003599 detergent Substances 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 206010010071 Coma Diseases 0.000 description 1
- 101100289061 Drosophila melanogaster lili gene Proteins 0.000 description 1
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000006210 lotion Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 235000012054 meals Nutrition 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- A—HUMAN NECESSITIES
- A45—HAND OR TRAVELLING ARTICLES
- A45F—TRAVELLING OR CAMP EQUIPMENT: SACKS OR PACKS CARRIED ON THE BODY
- A45F5/00—Holders or carriers for hand articles; Holders or carriers for use while travelling or camping
- A45F5/02—Fastening articles to the garment
- A45F5/021—Fastening articles to the garment to the belt
-
- A—HUMAN NECESSITIES
- A45—HAND OR TRAVELLING ARTICLES
- A45C—PURSES; LUGGAGE; HAND CARRIED BAGS
- A45C11/00—Receptacles for purposes not provided for in groups A45C1/00-A45C9/00
- A45C2011/002—Receptacles for purposes not provided for in groups A45C1/00-A45C9/00 for portable handheld communication devices, e.g. mobile phone, pager, beeper, PDA, smart phone
-
- A—HUMAN NECESSITIES
- A45—HAND OR TRAVELLING ARTICLES
- A45F—TRAVELLING OR CAMP EQUIPMENT: SACKS OR PACKS CARRIED ON THE BODY
- A45F5/00—Holders or carriers for hand articles; Holders or carriers for use while travelling or camping
- A45F5/02—Fastening articles to the garment
- A45F2005/025—Fastening articles to the garment with a holder or item rotatably connected to the fastening device, e.g. having a rotation axis perpendicular to the garment
- A45F2005/027—Fastening articles to the garment with a holder or item rotatably connected to the fastening device, e.g. having a rotation axis perpendicular to the garment with a horizontal and parallel rotation axis, i.e. the axis being parallel to the surface of the garment
-
- A—HUMAN NECESSITIES
- A45—HAND OR TRAVELLING ARTICLES
- A45F—TRAVELLING OR CAMP EQUIPMENT: SACKS OR PACKS CARRIED ON THE BODY
- A45F2200/00—Details not otherwise provided for in A45F
- A45F2200/05—Holder or carrier for specific articles
- A45F2200/0516—Portable handheld communication devices, e.g. mobile phone, pager, beeper, PDA, smart phone
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Liquid Crystal (AREA)
- Nozzles (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020040019568A KR100591475B1 (ko) | 2004-03-23 | 2004-03-23 | 평판디스플레이용 세정장치 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200537181A TW200537181A (en) | 2005-11-16 |
| TWI279259B true TWI279259B (en) | 2007-04-21 |
Family
ID=35045738
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW094106047A TWI279259B (en) | 2004-03-23 | 2005-03-01 | Apparatus for cleaning flat display panel |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4099488B2 (ja) |
| KR (1) | KR100591475B1 (ja) |
| CN (1) | CN100455367C (ja) |
| TW (1) | TWI279259B (ja) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100783763B1 (ko) | 2007-01-04 | 2007-12-07 | 주식회사 디엠에스 | 기판 세정장치 |
| KR101328722B1 (ko) | 2007-04-02 | 2013-11-11 | 주식회사 디엠에스 | 기판 세정장치 |
| KR100888190B1 (ko) * | 2007-09-28 | 2009-03-10 | 주식회사 디엠에스 | 유체분사장치 |
| KR101303808B1 (ko) * | 2011-12-07 | 2013-09-04 | 주식회사 케이씨텍 | 오토 셔터 |
| CN103537457B (zh) * | 2013-10-21 | 2016-06-01 | 中航三鑫太阳能光电玻璃有限公司 | 一种液膜尾边堆积液体的清除装置 |
| CN105068285A (zh) * | 2015-09-01 | 2015-11-18 | 武汉华星光电技术有限公司 | 传送装置及具有该传送装置的清洗装置 |
| JP6841633B2 (ja) * | 2016-11-08 | 2021-03-10 | 東洋熱工業株式会社 | 気液除塵装置 |
| JP2018089548A (ja) * | 2016-11-30 | 2018-06-14 | 独立行政法人国立高等専門学校機構 | 洗浄機のノズル機構 |
| KR101894088B1 (ko) | 2017-03-23 | 2018-09-04 | 가천대학교 산학협력단 | 품질검사 관리장치, 품질검사 의뢰 시스템 및 그 방법 |
| KR102179851B1 (ko) * | 2019-04-09 | 2020-11-17 | 주식회사 디엠에스 | 기판처리장치 및 이를 이용한 인라인 기판처리시스템 |
| CN111921955B (zh) * | 2020-08-10 | 2021-12-10 | 哈尔滨工业大学 | 一种风刀装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3530270B2 (ja) * | 1995-04-27 | 2004-05-24 | 島田理化工業株式会社 | 精密洗浄装置 |
| JP2003145064A (ja) * | 2001-11-12 | 2003-05-20 | Tokyo Electron Ltd | ２流体ジェットノズル及び基板洗浄装置 |
| KR100586239B1 (ko) * | 2002-04-19 | 2006-06-02 | 주식회사 디엠에스 | 평판 디스플레이 세정용 유체 혼합 분사 장치 |
| JP2003332401A (ja) * | 2002-05-09 | 2003-11-21 | Hugle Electronics Inc | 基板用搬送除塵装置 |
| JP2004074021A (ja) * | 2002-08-19 | 2004-03-11 | Dainippon Screen Mfg Co Ltd | 基板処理装置及び基板洗浄ユニット |
-
2004
- 2004-03-23 KR KR1020040019568A patent/KR100591475B1/ko active IP Right Grant
-
2005
- 2005-03-01 TW TW094106047A patent/TWI279259B/zh not_active IP Right Cessation
- 2005-03-16 CN CNB2005100555843A patent/CN100455367C/zh not_active Expired - Fee Related
- 2005-03-18 JP JP2005080440A patent/JP4099488B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP4099488B2 (ja) | 2008-06-11 |
| CN100455367C (zh) | 2009-01-28 |
| KR100591475B1 (ko) | 2006-06-20 |
| CN1672820A (zh) | 2005-09-28 |
| TW200537181A (en) | 2005-11-16 |
| JP2005279643A (ja) | 2005-10-13 |
| KR20050094933A (ko) | 2005-09-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |