TWI277437B - Ionizing fan filter unit - Google Patents

Ionizing fan filter unit Download PDF

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Publication number
TWI277437B
TWI277437B TW094143297A TW94143297A TWI277437B TW I277437 B TWI277437 B TW I277437B TW 094143297 A TW094143297 A TW 094143297A TW 94143297 A TW94143297 A TW 94143297A TW I277437 B TWI277437 B TW I277437B
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TW
Taiwan
Prior art keywords
unit
fan
high voltage
positive
negative
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TW094143297A
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Chinese (zh)
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TW200711711A (en
Inventor
Jong-Tae Woo
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Ionpia Co Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0027—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions
    • B01D46/0032—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions using electrostatic forces to remove particles, e.g. electret filters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/42—Auxiliary equipment or operation thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/42—Auxiliary equipment or operation thereof
    • B01D46/44—Auxiliary equipment or operation thereof controlling filtration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2279/00—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses
    • B01D2279/50—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning
    • B01D2279/51—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning in clean rooms, e.g. production facilities for electronic devices, laboratories

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Elimination Of Static Electricity (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Electrostatic Separation (AREA)

Abstract

This invention provides an ionizing fan filter unit, capable of preventing the problem caused by electrostatic discharge (ESD) or tiny dust in a clean room of a semiconductor factory or a LCD factory, to enhance the yield rate and productivity of the product. This invention relates to an ionizing fan filter unit used for sucking the external air in a clean room of a semiconductor factory or a LCD factory, comprising a fan motor driven by a fan motor control mechanism, provided on the upper part of the upper case in a manner of exposing a part thereof to the upper part, the upper case being stacked above the lower case which is opened at top and bottom; an ion generating mechanism, applying high voltage by selection of the ion outputting manner for eliminating the ions of static electricity by generating corona discharge, and emitting the ions into the air sucked by the fan motor; and a filtering mechanism provided in the lower case, filtering the air sucked by the fan motor to diffuse the ions generated by the ion generating mechanism into the filtered air.

Description

1277437 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種半導體工廠或LCD工廠等之無塵〜 (clean room)中使用之電離風機（fan)過濾單元。本&明= 別係關於一種電離風機過濾單元，其可過濾自外部吸入^空$ 中所包含之塵埃專雜質’再將其供給至無塵室或裝備等，並1 產生用以除去靜電之離子，使其擴散至空氣中。 ” 【先前技術】 造半導體或LCD等之工薇係無塵室（也如r⑽），於 塵至中最為重要且必須維持f理之條件係除去塵埃 你。^除去塵埃’域，如圖1所示’另外設置空峨（1、， 之頂_置過濾空氣之聰/ULpA過濾 ) 電，於賊料備上另外設置有靜裝置 外還：==^情=空調機及過濾器之 於^固設備”外設之會 算’存有必須 供給電源機及麵11糾設置時，必須 電纜，故而致使^辨作3堂ϋ用以控制此等裝置之驅動的其他 又，：作業變得複雜，且外觀亦不美觀。 定，靜電除電時間或離子之^動不固 1277437 【發明所欲解決之課題】 化，在於’防止因離子之巾和造成除靜電效果劣 ;消除必須另4胃有並 =:步置驟之加:部:: 氣之要之靜電管理中，儘管空 平衡及除靜’但亦可將離子 【發明内容】 於，ίίί::為^明之電離風機過濾單元之特徵在 機構氣者’藉由風扇馬達控制 該上部盒疊層於上於上雜(暖)内， >1藉由離子輸出方式之選擇而施加高電 ;:=用之：去中靜r子，並將其放射於】 過濾機構，其設置於上述下部盒内， 達而吸入之线，並使自上述離子產生機由土述風扇馬 上述經過濾之空氣甲。 產生機構產生之離子擴散至 又，於本發明申，較好的是 操作部，其包含用以設定達控制機構包含·· 之開關； ° 又疋風扇馬達之驅動環境 其感知包含風 CPU ’其分析上述操作部L達感應H輸入部之輸 1277437 1277437 入 將控制彳§號輸出至馬達控制部與顯示部等· 轉速：Ϊ達，其藉由上述cpu之控制’控制風扇馬達之旋 轉速由上述CPU之控制’顯示包含風賴達之旋 轉逮度在内的電離風機過滤單元之動作狀離。 運之灰 包含鋼機構進而 電離風機猶單元之動1277437 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to an ion filtering fan unit used in a clean room of a semiconductor factory or an LCD factory. This & Ming = is related to an ionization fan filter unit, which can filter the dust-specific impurities contained in the external vacuum, and then supply it to a clean room or equipment, etc., and 1 to generate static electricity. The ions diffuse into the air. [Prior Art] Making a clean room (such as r(10)) in the semiconductor or LCD, etc., is the most important in the dust and must be maintained. The dust is removed. ^Removing the dust' field, as shown in Figure 1. As shown in the 'additional space (1, top _ filter air Sonic / ULpA filter) electric, in addition to the static device installed on the thief material: ==^情 = air conditioner and filter ^ Solid equipment "peripheral calculations" must be supplied to the power supply unit and face 11 correction settings, must be cable, so that ^ is identified as 3 to control the drive of these devices, the work becomes complicated And the appearance is not beautiful. The static electricity removal time or the ionization is not solid 1277437 [The problem to be solved by the invention] is to prevent the ion wipe and cause the static elimination effect; eliminate the need for another stomach and = step Plus: Department:: In the static management of gas, although the air balance and static removal, but also the ion [invention] at, ίίί:: is the characteristics of the ionization fan filter unit in the body of the body The fan motor controls the upper box to be stacked on the upper (warm), >1 to apply high power by the selection of the ion output mode;:=Use: go to the static r and radiate it] A filter mechanism is disposed in the lower casing to reach the line of inhalation, and the air is filtered from the ion generator by the fan. The ion generated by the generating mechanism is diffused to the present invention. Preferably, in the present invention, the operating portion includes a switch for setting the control mechanism to include: · The driving environment of the fan motor is perceived to include the wind CPU. The above-mentioned operation unit L is connected to the input H input unit 1277437 1277437, and the control 彳§ number is output to the motor control unit and the display unit, etc., and the rotation speed is controlled by the control of the above cpu to control the rotation speed of the fan motor. The control of the CPU described above shows the action of the ionization fan filter unit including the rotational catch of the wind. The ash of the ship contains the steel mechanism and then the ionizing fan

ΐ號ΐίϊΥ“較好的是，上述離子產生機構包含： 負“二β /、產生用以湖離子輸出方式之正極信號與 輸出選擇部，其選擇離子輸出方式； 負極來自上述信號產生部之正極信號與 出才方^虎伽桃用糟由上述離子輸出選擇部選擇之離子輸 :===自離:高輸 1::及 輸出部之綱保持為固定位準，而將“ΐ号ΐίϊΥ "It is preferable that the above ion generating mechanism comprises: a negative "two beta /, a positive signal and an output selection portion for generating a lake ion output mode, the selected ion output mode; and a negative electrode from the positive electrode of the signal generating portion The signal and the talented party ^ Huo Jiatao use the ion input selected by the above ion output selection part: ===Self-off: High-input 1:: and the output part remains at a fixed level, and will be "

部’其根據由上述反饋電路部輸入之電壓位準 之用以調節高電壓之高電壓調節信號施加 至正極n電壓輸出部或負極高電壓輸出部； ，極，電壓輸出部及負極高電壓輸出部，其由上述高電壓 屑即。P之南電壓調節信號生成用以產生離子之高 ，至正極發^點（Positive膽ter p〇int)及負4射= (Negative Emitter Point);以及 金屬性及非金屬性之正極發射點（p〇sitive祝 1277437The portion 'the high voltage adjustment signal for adjusting the high voltage according to the voltage level input by the feedback circuit portion is applied to the positive n voltage output portion or the negative high voltage output portion; the pole, the voltage output portion, and the negative high voltage output The part is made up of the above high voltage chips. The voltage regulation signal of P is generated to generate the high of the ion, to the positive emitter point (Positive biliary ter p〇int) and the negative 4 shot = (Negative Emitter Point); and the metallic and non-metallic positive emitter point ( P〇sitive wish 1277437

Poin^)及負極發射點（NegativeEmitterp〇int)，其自上述 極咼，壓輸出部與上述負極高電壓輸出部施加以高電壓，為 藉由電暈放電產生離子而設置於HEPA/ULpA過濾器上。 ^又二於本發明中，較好的是，上述離子產生機構進而包含 錯誤?示部，其比触上敍舰路部輸人之賴辦信號與 亡述2電壓調節部之基準辦信號，斷正極高電壓輸出部與 負極高電壓輸出部之高電壓輸出狀祕正常抑雜正常，並^ 示該判定結果。 ’ 又’於本發财，較好的是，上述正極發射點及上述負極 毛射點關定間隔被隔開地設置財撐臺上 於上述HEPA/ULPA過溏器之上。 文牙口叹置 f，於本^明中，較好的是，上述過濾機構包含： 置過濾器（pre—filter)，其為從藉由上述風扇馬達而 自外邛吸入之空氣中一次性地過濾塵埃等，以 於上述上部如之闕馬達収 狀方式认置 過清慮1，其再:娜也過雜虹述前置過濾器 之工軋，為使由正極發射點（positive Emitter P0int) 而射點（Negative Emitter P0int)產生之離子擴散， 而水平地設置於上述下部盒内。 【發明效果】 料防止因離子之中和而造成除靜電效果 置，、情特別要求之重要步㈣行局部性地設 I。松必外購買並設置靜電控制裝置之顿，且節約經 電控之靜電f对’齡以之流動與靜 工衣#者極八重要之關係’但亦可離子平衡及除靜電時 1277437 間整合（matching)為最理想之狀態。 【實施方式】 以下就本發明加以詳細說明。 圖2及圖3圖示有使塵埃過濾功能以及靜電控制功能與空 調機成一體化之本發明之電離風機過濾單元，該電離風機過渡 單元包含上部盒（32)、與其成一對之下部盒（33)以及用以 固定正極發射點（21a)與負極發射點（21b)之固定框（34)Poin^) and a negative emission point (NegativeEmitterp〇int), which is applied to the HEPA/ULpA filter by applying a high voltage to the high voltage output portion of the negative electrode and the high voltage output portion of the negative electrode. on. Further, in the present invention, it is preferable that the ion generating means further includes an error indicating portion, which is higher than the reference signal of the voltage regulating unit of the dead ship and the second voltage adjusting unit. The high voltage output of the positive high voltage output unit and the high voltage output unit of the negative electrode are normal and normal, and the determination result is displayed. Further, it is preferable that the positive electrode emission point and the negative electrode hair point separation interval are spaced apart from each other to be placed on the above-mentioned HEPA/ULPA filter. In the present invention, it is preferable that the filter mechanism includes: a pre-filter which is disposable from the air sucked from the outer casing by the fan motor. Filtering the dust, etc., in the above-mentioned upper part, such as the motor receiving mode, the precautions are recognized, and again: Na is also too complicated to pre-filter the work of the pre-filter, in order to make the positive emitter point (positive Emitter P0int) The ions generated by the Negative Emitter P0int are diffused and placed horizontally in the lower case. [Effect of the Invention] The material is prevented from being neutralized by ions, and the static electricity removal effect is set, and the important step (4) is particularly required. Song must buy and set up the static control device, and save the electronically controlled static electricity f to the 'eight-important relationship between the flow and the static clothing #, but also the ion balance and static elimination 1277437 integration (matching) is the most ideal state. [Embodiment] Hereinafter, the present invention will be described in detail. 2 and 3 illustrate an ionization fan filter unit of the present invention in which a dust filter function and an electrostatic control function are integrated with an air conditioner, and the ionizer fan transition unit includes an upper case (32) and a pair of lower boxes ( 33) and a fixing frame (34) for fixing the positive emitting point (21a) and the negative emitting point (21b)

於上部盒（32)中，將用以吸入外部空氣或無塵室内部之 空氣的風扇馬達（24)以露出其一部分之方式設置於上部盒 (32)，於上部盒（32)上部具有：離子產生機構（u),其產 生用以除去靜電之離子；風扇馬達控制機構（12)，其用以控 制風扇馬達（24)之驅動；以及無線通信模組（3〇)，盆用^ 接收自遠程調整器（31)無線發送之無線信號。 /、 此處，固定於上部盒（32)上部之把手（36)之作用在於， 於組裝或設置電離風機過濾單元時可便於移動。 、 上口H U心内部當中，於風扇馬達（24) 之方式設置有前置過遽器⑼，於與上部盒（32)兩^^ 下部盒（33)中水平地設置有HEpA/ULpA ^HEPA/ULPA^h (22) , (233} ί® =框（34)的支撐台（35)上，以固定間隔相互j = 放射=之正極發射點(21a)與負極發射點也-又置有 離子ίίίΓίΐί靜電之離子而設置於上部盒(32)上部之 離子產生機構（11)，如圖4所示 、= 其產生用以採用離子輪出方弋夕技 口儿生邛〇4)， 出選擇部（16)，其選擇離子輸出 ，=于， 被施加以信號產生部（14) ^彻。卩U5)，其 用藉由離子輸出選擇部i極信號，調節為採 路部⑼，其自正極高電顯出f f離方式；反饋電 °K20a)及負極高電屢輸出 1277437 極離子或貞轉子之輸出辦錢，為將正 伴：二U (20a)與負極高電壓輸出部（2〇b)之高電壓 ❿ 據由反饋電路部（17)輸入之電壓位準信號與自 凋整之基準位準信號的比較結果以及上述信號調 Γίϋ之離子輸出方式，將由正極高電壓輸出部（施） 電壓輸出部（2Gb)產生之用以調節高電壓之高電壓 虎、施加至正極高電壓輸出部（2Ga)或負極高電壓輸出 mb) ’正極^高電壓輸出部（2〇a)及負極高電壓輸出部 (、b) ’其根據高電壓調節部（18)之高電壓調節信號，生成 用以產生離子之高電壓，將其施加至正極發射點⑵a)及負 極發射點（21b);以及金屬性及非金屬性之正極發射點（21a) f負極發射點（21b)等，其自正極高電壓輸出部(2〇a)與負極 向電壓輸出部（20b)施加以高電壓，為藉由電暈放電產生離子 而設置於HEPA/ULPA過濾器（22)上。 ^又二於高電壓調節部（18)連接有錯誤顯示部（19)，該 錯誤顯示部（19)比較由反饋電路部（17)輸入之電壓位準信 號與馬電壓調節部（18)之基準位準信號，判斷正極高電壓輸 ，部（20a)與負極高電壓輸出部（2〇b)處之高電壓輸出狀態 係正常抑或非正常，並顯示該判定結果。 上述風扇馬達控制機構（12)包含如下部分等：操作部 (29)’其包含用以設定id、設定風扇馬達（24)之驅動環境 之開關；馬達感應器輸入部（28)，其感知包含風扇馬達（24) 在内之電離風機過濾單元的運轉狀態；CPU (26)，其分析操作 部（29)與馬達感應器輸入部（28)之輸入，將控制信號輸出 至馬達控制部（25)與顯示部（27)等；馬達控制部（25)， 其藉由CPU (26)之控制，控制風扇馬達（24)之旋轉速度； 以及顯示部（27)，其藉由CPU (26)之控制，顯示包含風扇 馬達（24)之旋轉速度在内的電離風機過濾單元之動作狀態。 1277437 組，〇\無線通信模組（3〇)連接於CPU (26)，該無線通信 接收自雜調整器（31)發出之用以遠程控制電離 早元之動作之無線錢，並將該無線信號提供至CPU 且可於遠距離調節電離風機過濾單元之動作。 =下將說明如此構成之電離風機過濾單元之動作。 伽if二f源部（13)向離子產生機構（11)與風扇馬達控 冓（12)供給所需要之電源。從而，由電源部（13)供給 二主、之離子產生機構（11)生成並輸出用以產生離子之高麼， 有反饋被輸出之輸出位準信號且將輸出調整為維持 赤之功能。又，風扇馬達控制機構（12)吸入外部空氣 L:、塵ί之空氣，藉由各種過濾、器除去塵埃等後，將其供給至 雨要之場所。 2源部（13)供給電源之信號產生部（14)生成決定離 ^^斤需要之正極信號及負極信號，並將其發送至信 二，即卩（15) ’於設置電離風機過濾單元時控制設置距離及 等’選擇離子選擇部（16)之選擇位置時，信 =周=(15)將脈衝 DC⑽se DC)或穩態 DC(Steady State )畜中之一種選擇信號發送至反饋電路部（17)。 雷厭部（17)，自正極高電壓輸出部（20a)與負極高 將(2()b)輸人正極離子及1極離子之輸出位準信號， 出用，正極高電壓輸出部（20a)與負極高電壓輪 :j2Gb)之⑤龍輸出保持為固定位準之電壓位準信號， 厭二Z 號調節部（15〕接收之選擇信號，調節自正極高電 =出口P (20a)與負極高電壓輸出部（2〇b)反饋之電壓位準 且將其發送至高電壓調節部（18)並輸出至錯誤顯示部 人’,錯_不部（19)比較分析由反饋電路部（⑺輸 i 高電_節部⑽之基準位準信號’依據其結果 ，、、、不電離風機過濾單元㈣以產生離子之高電壓產生動作係 1277437 正常抑或非正常。 ^ ’兩壓調節部（18)比較及調節由反饋電 (18) 換為用以調節高電壓之高電壓調節信號，並發送至 β间電堊輸^部（2〇a)與負極高電壓輸出部（2此）。 古雷if 1電壓調節部（18)接收高電壓調節信號之正極 ΐ所(2Ga)與負極高電壓輸出部（施）生成產生離 (21a)In the upper case (32), a fan motor (24) for taking in air outside the outside air or the clean room is provided to the upper case (32) in such a manner as to expose a part thereof, and the upper part (32) has an upper portion of the upper case (32): An ion generating mechanism (u) for generating ions for removing static electricity; a fan motor control mechanism (12) for controlling driving of the fan motor (24); and a wireless communication module (3〇) for receiving the basin The wireless signal transmitted wirelessly from the remote adjuster (31). Here, the handle (36) fixed to the upper portion of the upper case (32) functions to facilitate movement when assembling or providing the ionization fan filter unit. In the interior of the upper hub, a pre-pulse device (9) is provided in the manner of the fan motor (24), and HEpA/ULpA ^HEPA is horizontally disposed in the lower box (33) of the upper box (32). /ULPA^h (22) , (233} ί® = on the support table (35) of the frame (34), at a fixed interval mutual j = radiation = the positive emission point (21a) and the negative emission point are also - Ion ίίίΓίΐί The ion generating mechanism (11) disposed on the upper part of the upper box (32), as shown in Fig. 4, = which is generated by using the ion wheel to produce the 弋 技 技 邛〇 4 4 4 4 4 A selection portion (16) that selects an ion output, =, is applied to the signal generating portion (14).卩U5), which is adjusted to the circuit-collecting part (9) by the ion-output selection part i-pole signal, which exhibits a ff-off mode from the positive electrode high-voltage; feedback power °K20a) and negative electrode high-voltage output 1277437 polar ion or 贞The output of the rotor is used for the power supply, and the high voltage of the second U (20a) and the negative high voltage output unit (2〇b) is based on the voltage level signal input from the feedback circuit unit (17) and self-depletion. The comparison result of the reference level signal and the ion output mode of the above-mentioned signal modulation are generated by the positive high voltage output portion (2Gb) to adjust the high voltage of the high voltage tiger, and applied to the positive high voltage output. Part (2Ga) or negative high voltage output mb) 'Positive positive high voltage output unit (2〇a) and negative high voltage output unit (, b) 'Generate according to high voltage adjustment signal of high voltage adjustment unit (18) a high voltage for generating ions, which is applied to the positive electrode emission point (2) a) and the negative electrode emission point (21b); and a metallic and non-metallic positive electrode emission point (21a) f negative electrode emission point (21b), etc. Positive high voltage output (2〇a) and negative pole An output section (20b) applied with a high voltage for generating ions by corona discharge provided in the HEPA / ULPA filter (22). Further, an error display unit (19) is connected to the high voltage adjusting unit (18). The error display unit (19) compares the voltage level signal input by the feedback circuit unit (17) with the horse voltage adjusting unit (18). The reference level signal determines whether the high voltage output state of the positive high voltage input portion (20a) and the negative high voltage output portion (2〇b) is normal or abnormal, and the determination result is displayed. The fan motor control mechanism (12) includes a portion (the) that includes a switch for setting an id, setting a driving environment of the fan motor (24), and a motor sensor input portion (28), the sensing portion thereof The operation state of the ionization fan filter unit of the fan motor (24); the CPU (26) analyzes the input of the operation unit (29) and the motor sensor input unit (28), and outputs a control signal to the motor control unit (25) And a display unit (27) or the like; a motor control unit (25) that controls the rotation speed of the fan motor (24) by the control of the CPU (26); and a display unit (27) by the CPU (26) The control displays the operating state of the ionization fan filter unit including the rotational speed of the fan motor (24). 1277437 group, 〇 \ wireless communication module (3 〇) is connected to the CPU (26), the wireless communication receives the wireless money issued by the self-tuning regulator (31) for remotely controlling the ionization early action, and the wireless The signal is supplied to the CPU and the action of the ionization fan filter unit can be adjusted over long distances. = The action of the ionization fan filter unit thus constructed will be explained. The gamma-f source portion (13) supplies the required power to the ion generating mechanism (11) and the fan motor control (12). Therefore, the ion generating means (11) supplied from the power supply unit (13) generates and outputs an output level signal for generating the high level of the output, and the output is adjusted to maintain the red function. Further, the fan motor control means (12) takes in the air of the outside air L: and dust, and removes dust or the like by various filters and devices, and supplies it to the place where the rain is required. 2 The signal generating unit (14) for supplying power to the source unit (13) generates a positive signal and a negative signal for determining the required distance, and sends the signal to the second signal, that is, 卩(15)' is controlled when the ionizing fan filter unit is installed. When the distance is set and the selected position of the selected ion selection unit (16) is selected, the letter = week = (15) sends a selection signal of the pulse DC (10) se DC) or the steady state DC (Steady State) to the feedback circuit portion (17). ). The anaerobic part (17), from the positive high voltage output unit (20a) and the negative electrode high (2 () b) input positive ion and 1 pole ion output level signal, used, positive high voltage output (20a) ) and the negative high voltage wheel: j2Gb) 5 dragon output maintains a fixed level voltage level signal, and the versatile Z number adjustment unit (15) receives the selection signal, adjusted from the positive high voltage = outlet P (20a) and The voltage level of the negative high voltage output unit (2〇b) is fed back to the high voltage adjustment unit (18) and output to the error display unit', and the error analysis is performed by the feedback circuit unit ((7) The high-voltage _ section (10) of the reference level signal 'according to the results, , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The comparison and adjustment are changed from the feedback power (18) to the high voltage regulation signal for adjusting the high voltage, and sent to the inter-β electric power transmission unit (2〇a) and the negative high voltage output unit (2). The Lei 1 voltage regulating unit (18) receives the high voltage adjustment signal of the positive electrode (2Ga) and the negative electrode Voltage output unit (application) that generates an off (21a)

上过正極咼電壓輸出部（2〇a)與負極高電壓輸出部 以由電=雷高Λ壓田之正極發射點(21a)及負歸射點(21b) 猎由冤軍放電產生用以除去靜電之離子。 友f此、，自外部或無塵室内部藉由風扇馬達（24)吸入之空 氣被别置過濾器（23)與HEPA/ULPA過濾器（22)過濾，另一 方ί i將其與由正極發射點（21a)及負極發射點（2ΐΐ)放射 之離子一同提供至整個工廠或特定空間。 ^處，風扇馬達（24)係由馬達控制部（25)控制旋轉速 度f者’其作用在於，為使由正極發射點（21a)及負極發射 點⑵b)產生之離子擴散，自外部或無塵室自身吸入空氣並 使之循環。 K斜之方式配置於風扇馬達（24)之兩侧的前置過濾器 ^夂性地過濾藉由風扇馬達（24)自外部或無塵室吸入 之空氣，除去塵埃等之後，將其送至HEpA/ULpA過濾器（22)。 於是，HEPA/ULPA過濾、器（22)將經前置過遽器（23)過滤之 空氣再次完整地磁，使纽極發雜（21a)及貞極發射點 (21b)產生之離子擴散，並將其供給至整個卫廠鱗定空間。 如此，對調節吸入外部或無塵室之空氣之風扇馬達（24) 之旋轉速度的馬達控制部（25)施加cpu (26)之控制信號， 控制風扇馬達（24)之驅動。此處，操作部⑵）包含用以設 1277437 定ID及設定風扇馬達（24)之驅動環境之開關，馬達感應器 輪入部（28)感知包含風扇馬達（24)在内之電離風機過濾單 元之運轉狀態並將其提供至OPU (26)。 、又，顯示部（27)藉由CPU (26)之控制，顯示包含風扇 馬達（24)之旋轉速度在内的電離風機過濾單元之動作狀態。 ^特別是’由於CPU (26)連接有無線通信模組（30)，該 模組接1^1自遠程調整器（31)無線發送之用以遠程控制電離風 機過濾單元之動作的無線信號並將其提供給CPU(26)，故而管 理者即使於遠距離也可調節電離風機過濾單元之驅動。The positive electrode 咼 voltage output unit (2〇a) and the negative electrode high voltage output unit are used to generate the positive electrode emission point (21a) and the negative home point (21b) of the electric field; Remove static ions. Friends, the air sucked in by the fan motor (24) from the outside or inside the clean room is filtered by the filter (23) and the HEPA/ULPA filter (22), and the other is connected to the positive electrode. The ions emitted by the emission point (21a) and the negative emission point (2ΐΐ) are supplied to the entire plant or a specific space. ^, the fan motor (24) is controlled by the motor control unit (25) to control the rotational speed f. The function of the fan motor (24) is to diffuse ions generated by the positive electrode emission point (21a) and the negative electrode emission point (2) b) from the outside or none. The dust chamber itself takes in air and circulates it. The front filter disposed on both sides of the fan motor (24) is configured to filter the air sucked from the outside or the clean room by the fan motor (24), remove the dust, etc., and then send it to the air. HEpA/ULpA filter (22). Thus, the HEPA/ULPA filter (22) completely re-magnetizes the air filtered by the pre-pass filter (23), causing the ions generated by the neon (21a) and the bungee emission point (21b) to diffuse, and Supply it to the entire factory scale space. In this manner, a control signal of the cpu (26) is applied to the motor control unit (25) that adjusts the rotational speed of the fan motor (24) that sucks the air to the outside or the clean room, and the drive of the fan motor (24) is controlled. Here, the operation unit (2) includes a switch for setting a 1277437 ID and setting a driving environment of the fan motor (24), and the motor sensor wheeling portion (28) senses an ionization fan filter unit including a fan motor (24). Operating status and providing it to the OPU (26). Further, the display unit (27) displays the operation state of the ionization fan filter unit including the rotational speed of the fan motor (24) under the control of the CPU (26). ^ In particular, because the CPU (26) is connected to the wireless communication module (30), the module is connected to the wireless signal transmitted by the remote adjuster (31) for remotely controlling the action of the ionization fan filter unit. Providing it to the CPU (26), the regulator can adjust the drive of the ionization fan filter unit even at a long distance.

圖5係表示將本發明之電離風機過濾單元（100)設置於 整個無塵室中之狀態的設置狀態圖，圖6係表示將本發明之電 離風機過渡單元（100)設置於_個裝置巾之狀態的設置狀態 根據此種電離風機過濾單元之構成及動作，可保持製造無 ^室所需要之過濾塵埃之風機過濾單元功能，並且亦可具有^ 靜電效果及平衡良好之靜電控制功能。 曰以上所説明之本發明係關於一種電離風機過濾單元，特別 巧於用崎絲塵室之越且放祕電者，雜就可簡便有 f地設置麵且適於提高半導體或LCD οι廠种產品之良^ 單元加以說明’但本發明 思想並非限定於此，#然可依據作業者加以變形，多 樣化地實施。 夕 【圖式簡單說明】 圖1係表示先前之無塵室構造之概略圖。 顺過鮮摘立。 體^。3絲4侧之狀電觀機猶私的分解立 圖4係表示圖2及圖3所示之離子產生機構（丨丨）與風扇馬5 is a view showing a state in which the ionizing fan filter unit (100) of the present invention is disposed in the entire clean room, and FIG. 6 is a view showing that the ionizing fan transition unit (100) of the present invention is disposed in the device. According to the configuration and operation of the ionization fan filter unit, the state of the filter unit can be used to maintain the function of the fan filter unit for filtering dust required for the room, and it is also possible to have an electrostatic effect and a well-balanced electrostatic control function. The invention described above relates to an ionization fan filter unit, which is particularly skillful in that the use of the dust chamber and the occlusion of the dust chamber can easily set the surface and is suitable for improving the semiconductor or LCD οι plant species. The product is described in terms of a unit. However, the present invention is not limited thereto, and may be modified in various ways according to the operator.夕 [Simplified illustration of the drawings] Fig. 1 is a schematic view showing the structure of a prior clean room. Follow the fresh pick. Body ^. Fig. 4 shows the ion generating mechanism (丨丨) and fan horse shown in Fig. 2 and Fig. 3

13 1277437 達控制機構（12)的構成圖。 圖5係表示將本發明之電離風機過濾單元設置於整個無塵 室之狀態的設置狀態圖。 圖6係表示將本發明之電離風機過濾單元設置於一個裝置 之狀態的設置狀態圖。13 1277437 Composition of the control unit (12). Fig. 5 is a view showing a state in which the ionization fan filter unit of the present invention is installed in the entire clean room. Fig. 6 is a view showing a state in which the ionization fan filter unit of the present invention is placed in a state of one device.

【主要元件符號說明】 100 級別 101 空調機 102 過渡器 103 靜電控制裝置 11 離子產生機構 12 風扇馬達控制機構 13 電源部 14 信號產生部 15 信號調節部 16 離子輸出選擇部 17 反饋電路部 18 南電壓調卽部 19 錯誤顯示部 20a 正極高電壓輸出部 20b 負極高電壓輸出部 21a 正極發射點 21b 負極發射點 22 HEPA/ULPA過濾器 23 前置過濾器 24 風扇馬達 25 馬達控制部 14 1277437[Description of main component symbols] 100 level 101 air conditioner 102 transition device 103 electrostatic control device 11 ion generation mechanism 12 fan motor control mechanism 13 power supply unit 14 signal generation unit 15 signal adjustment unit 16 ion output selection unit 17 feedback circuit unit 18 south voltage Alarm portion 19 Error display portion 20a Positive high voltage output portion 20b Negative high voltage output portion 21a Positive emission point 21b Negative emission point 22 HEPA/ULPA filter 23 Pre-filter 24 Fan motor 25 Motor control unit 14 1277437

26 CPU 27 顯示部 28 感應器輸入部 29 操作部 30 無線通信模組 31 遠程調整器 32 上部盒 33 下部盒 34 固定框 35 支撐台 36 把手26 CPU 27 Display 28 Sensor Input 29 Operation Unit 30 Wireless Communication Module 31 Remote Adjuster 32 Upper Box 33 Lower Box 34 Fixed Frame 35 Support Table 36 Handle

Claims (1)

I277ft437 卜、申請專利範圍·· ^體1電離風機過濾單元，其特徵在於，使如下部分構成為 機構=達以馬達控制 下部盒之上的上部盒内；：疊層於上下敞開之 壓，念冓“其藉由離子輸出方式之選擇而施加高電 由上述風扇馬達而吸入之空氣中 子趣其放射於藉 以及 達而上述下部细，過_由上述風扇馬 上述二i:;氣;使自上述離子產生機構產生之離子擴散至 i述2 ΐίϋ?圍第1項所述之電離風機過濾單元，其中， 上迷風扇馬達控制機構包含·· ，、r 開關 操作部，其包含用以設定ID及設定風扇馬達之驅動環境之 將押5 斤上述操作部與上述馬達感應器輸入部之輸入， 、控tHa唬輸出至馬達控制部與顯示部等； 轉速部’其藉由上述CPU之控制，控制風扇馬達之旋 轉速由上述CPU之控制，顯示包含風扇馬達之旋 轉速度在内的電離風機過濾單元之動作狀態。 t H月專她圍第1或2項所述之電離風機過濾、單元，其 =風扇ί達控制機構進而包含無線通信模組，該無線通 ;ί、、且接f自遠程調整器無線發出之用以遠程控制電離風機過 濾早π之動作的無線信號，並將其提供至cpu。 16 1277437 4如申請專利範圍第i項所述之電離 上述離子產生機構包含： 馎過/慮早7L，其中， 信號產生部，其產生用以採用離子輪屮 負極信號； 式之正極信號與 離子輸出選擇部，其選擇離子輸出方式； 信號調節部，其被施加上述信號產生丄 :號，調節為採用藉由上述離子輸出選擇; 輪入;=====壓輪出部 部之高電壓保持為固定位準， ，電壓調節部，其根據由上述反饋電 域與自身產生之_整之基準辦信號之f準 ^號調節部之離子輸出方式’將於正極高電壓心部1負極ί 電壓輸出部產生之用以調節高電壓之高電 ^ 極高電壓輸出部或負極高電壓輸出部4壓咖域把加至正 正極高電壓輸出部及負極高電壓輸出部，i藉 =節部之綱糊麻蝴以產生‘=1 &=至正極^射點（pQsitive Emitter p〇int)及負極發 射”、、占（Negative Emitter Point);以及 p金^屬性及非金屬性之正極發射點（p〇sitive 、〇int)^負極發射點（Negative Emitter p〇int)，其藉由上 ，士極，電壓輸㈣與上述貞極高賴輸出部而施加電壓，為 错由電暈放電產生離子而設置於HEpA/ULpA過濾器上。 t如申請專利範圍第1或4項所述之電離風機過濾單元，其 工，上述離子產生機構進而包含錯誤顯示部，該錯誤顯示部比 較由上述反饋電路部輸入之電壓位準信號與上述高電壓調節部 之基準位準仏號，判斷正極高電壓輸出部與負極高電壓輸出部 17 1277437 之尚電壓輸出狀態係正常抑或非正常，而顯示該判定結果。 6·如申請專利範圍第4項所述之電離風機過濾單元，其中， 上述正極發射點及上述負極發射點以固定間隔相互隔開地設置 於支撐台’該支撐台設置於上述HEPA/ULPA過濾器之上。 7·如申請專利範圍第1項所述之電離風機過濾單元，其中， 上述過濾、機構包含： 前置過濾器，其為自藉由上述風扇馬達自外部吸入之空氣 一次性地過滤塵埃等，而以傾斜之方式設置於上述上部盒内之 風扇馬達兩侧；以及 HEPA/ULPA過渡器，其再次性地過濾經上述前置過濾器過 濾之空氣，為使由正極發射點（Positive Emitter Point)及 負極發射點（Negative Emitter Point)產生之離子擴散，而 水平地設置於上述下部盒内。 ' 18I277ft437 卜, application patent scope · · body 1 ionization fan filter unit, characterized in that the following part is configured as a mechanism = up to the upper box on the motor control lower box;: laminated on the upper and lower open pressure, read冓 “It applies high power by the choice of ion output mode. The air neutrons sucked by the fan motor are fun to radiate and reach the lower part, and the above-mentioned lower part is fined by the above-mentioned fan horse; The ionizing fan filter unit according to the first aspect of the present invention, wherein the fan motor control unit includes a ··, r switch operation unit, which is configured to set The ID and the driving environment of the fan motor are set to be 5 kg of the input of the operation unit and the motor sensor input unit, and the control tHa唬 is output to the motor control unit and the display unit; and the rotation speed unit 'is controlled by the CPU The rotation speed of the control fan motor is controlled by the CPU, and displays the operation state of the ionization fan filter unit including the rotation speed of the fan motor. She surrounds the ionizing fan filter and unit described in item 1 or 2, and the fan-to-fan control mechanism further includes a wireless communication module, and the wireless communication device is wirelessly transmitted from the remote adjuster for remote use. Controlling the ionizing fan to filter the wireless signal of the action of the early π and providing it to the CPU. 16 1277437 4 The ionization mechanism described in claim i of the scope of the invention includes: 馎过/早早 7L, wherein the signal is generated a portion for generating an ion rim negative signal; a positive signal and an ion output selection portion for selecting an ion output mode; and a signal adjustment portion for applying the signal to generate a 丄: number, adjusted to use the ion Output selection; wheeling; ===== The high voltage of the pressure wheel outlet portion is maintained at a fixed level, and the voltage regulating portion is based on the signal of the signal generated by the feedback electric field and itself. The ion output mode of the ^ number adjustment section 'will be used to adjust the high voltage of the high voltage high voltage output part or the negative high voltage output part 4 which is generated by the positive voltage high voltage core 1 negative voltage ί voltage output part The coffee field is added to the positive positive high voltage output unit and the negative high voltage output unit, and the i == section of the section is used to generate '=1 &= to the positive ^ point (pQsitive Emitter p〇int) and the negative pole "Negative Emitter Point"; and p-gold attribute and non-metallic positive emitter point (p〇sitive, 〇int)^Negative Emitter p〇int, which is used by Shangshi The voltage is applied to the HEpA/ULpA filter by applying a voltage to the output of the drain and the drain of the voltage, and generating ions by corona discharge. The ionization fan filter unit according to claim 1 or 4, wherein the ion generating means further includes an error display unit that compares a voltage level signal input by the feedback circuit unit with the high The reference level 仏 of the voltage adjustment unit determines whether the voltage output state of the positive high voltage output unit and the negative high voltage output unit 17 1277437 is normal or abnormal, and the determination result is displayed. 6. The ionizing fan filter unit according to claim 4, wherein the positive electrode emission point and the negative electrode emission point are disposed at a fixed interval from each other at a support table. The support table is disposed on the HEPA/ULPA filter. Above the device. The ionizing fan filter unit according to claim 1, wherein the filtering and the mechanism include: a pre-filter that filters dust at a time from air taken in from the outside by the fan motor, And disposed on both sides of the fan motor in the upper box in an inclined manner; and a HEPA/ULPA transition device that re-filters the air filtered through the pre-filter to make the positive emitter point (Positive Emitter Point) And ions generated by the Negative Emitter Point are diffused horizontally in the lower case. ' 18
TW094143297A 2005-09-23 2005-12-08 Ionizing fan filter unit TWI277437B (en)

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TWI580978B (en) * 2016-03-25 2017-05-01 Electron component testing and sorting machine with discharge detection device
CN106451083B (en) * 2016-08-31 2018-01-30 北京众清科技有限公司 A kind of ion generating device and ion generator
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