TWI269773B - Substrate delivering device - Google Patents

Substrate delivering device Download PDF

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Publication number
TWI269773B
TWI269773B TW94132488A TW94132488A TWI269773B TW I269773 B TWI269773 B TW I269773B TW 94132488 A TW94132488 A TW 94132488A TW 94132488 A TW94132488 A TW 94132488A TW I269773 B TWI269773 B TW I269773B
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TW
Taiwan
Prior art keywords
substrate
base
disposed
gear
pad
Prior art date
Application number
TW94132488A
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Chinese (zh)
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TW200711969A (en
Inventor
Ching-Hua Tsai
Sheng-Sz Wu
Shiang-Jen Shiu
Guo-Chi Lan
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Kingroup Automation Industry C
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Priority to TW94132488A priority Critical patent/TWI269773B/en
Application granted granted Critical
Publication of TWI269773B publication Critical patent/TWI269773B/en
Publication of TW200711969A publication Critical patent/TW200711969A/en

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Abstract

The present invention is to provide a substrate delivering device, comprising a base, a floating mechanism, two moving sets, a plurality of guiding wheels, a lifting piece, and a delivery frame, wherein: the floating mechanism has an air compressor and a pad for supporting a substrate, the pad having a plurality of pores communicated with the air compressor; the two moving sets are slidingly disposed to the base and two sides of the pad; the guiding wheels are pivoted to the two moving set; the lifting piece is connected to the base and the moving set; the delivery frame is sleeved to the base and across the pad in a transverse manner; and the delivery frame may support the guiding wheels by its two ends. Accordingly, the substrate delivering device may be used to deliver fragile substrates, and the substrates are free from scratches or damage due to the non-direct contact between the guiding wheels and the substrates.

Description

1269773 九、發明說明: 【發明所屬之技術領域】 本發明係與輸送裝置有關,特別是指-種用於輪送易 碎薄板之基板輸送裝置。 5【先前技術】 、習知用於基板之輸送裝置係包含有錄導輪以及一動 力源驅使該等導輪旋轉,該等導輪係用以支撐該基板,藉 由该等導輪之同步旋轉以使該基板朝既定之傳送方向前 進,達到輸送基板的目的。 1〇 習知之基板輸送裝置雖具有輸送基板的功能,但該等 導輪與基板係直接接觸,不但容易刮傷基板,而且基板邊 緣容易捲入導輪與導輪之間的縫隙導致折損,尤其是目前 缓造LCD玻璃基板之尺寸愈來愈大,重量也愈來愈重,如 何能輸送基板並避免刮傷或折損,已成為業界亟待努力解 15 決之課題。 【發明内容】 鑑於上述缺失,本發明之主要目的在於提供一種基板 輪送裝罝,可有效避免基板刮傷及折損者。 20 為達前揭目的,本發明之基板輸送裝置係包含有一基 座、一上浮機構、二移動座、多數導輪、一升降件以及一 運送框,其中··該上浮機構係包含一空壓機以及一墊板供 承载該基板,該墊板係設於該基座且包含有多數氣孔,該 等氣孔係連通於該空壓機,該二移動座係滑設於該基座且 1269773 位於該墊板兩側,該等導輪係樞設於該二移動座,該升降 件係連結錄餘該移動座,魏絲設該基板且橫 跨该墊板,該運送框並以其兩端承載於該等導輪。 【實施方式】 為更了解本發明之構造及特點所在,兹舉一較佳實施 例並配合圖示說明如下,其中·· 第一圖係本發明一較佳實施例之頂視圖; 第二圖係本發明一較佳實施例之剖視圖; 第二圖係本發明一較佳實施例之剖視圖,且係主要顯 示該傳動機構; $顯 &第四圖係略同於第二圖,但係顯示該移動座上升之狀 悲0 15 夕A第圖至第四圖,本發明—較佳實施例所提供 裝置10係用以輪送一基板15,該基板輸送裝置 數導—基座20、一上浮機構30、二移動座40、多 及-叙*、一升降件50、一運送框55、二傳動機構60以 及一動力源70。 壓機trU構3G係包含—墊板3卜—氣管32以及一空 咳L iff係舖設於該基座20且供承載該基板15, 二㈣Λ含有多數相互連通之氣孔34,且該等氣孔34 33 i過32連通於該空壓機33,藉此,當該空屢機 面日Λ 4錢時,紐將吹向職板15之底表 ’且產生-空氣塾支擇該基板15之重量,進而使該基板 20 1269773 浮起,此外,該空壓機33也可透過該等氣孔34抽氣,而 使該基板15落下而且緊貼該墊板31,以進行後續加工製 程。1269773 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD The present invention relates to a conveying device, and more particularly to a substrate conveying device for conveying a fragile sheet. 5 [Prior Art] The conventional conveying device for a substrate includes a recording wheel and a power source for driving the rotation of the guide wheels, wherein the guide wheels are used to support the substrate, and the guide wheels are synchronized by the guide wheels. Rotating to advance the substrate in a predetermined transport direction for the purpose of transporting the substrate. 1. Although the conventional substrate transfer device has the function of transporting the substrate, the guide wheels are in direct contact with the substrate, which not only easily scratches the substrate, but also the edge of the substrate is easily caught in the gap between the guide wheel and the guide wheel, resulting in damage, especially At present, the size of the retarded LCD glass substrate is getting larger and larger, and the weight is getting heavier. How to transport the substrate and avoid scratching or breakage has become an urgent task for the industry. SUMMARY OF THE INVENTION In view of the above-mentioned deficiencies, it is a primary object of the present invention to provide a substrate wheel carrier that can effectively prevent substrate scratches and breakage. 20 In order to achieve the above, the substrate conveying device of the present invention comprises a base, an upper floating mechanism, two moving seats, a plurality of guide wheels, a lifting member and a transport frame, wherein the floating mechanism comprises an air compressor And a pad for supporting the substrate, the pad is disposed on the base and includes a plurality of air holes, the air holes are connected to the air compressor, the two mobile seats are slidably disposed on the base and 1269773 is located therein On both sides of the pad, the guide wheels are pivotally disposed on the two movable seats, and the lifting member is coupled to the movable seat. The WES sets the substrate and spans the pad. The transport frame is carried by both ends thereof. On these guide wheels. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In order to better understand the structure and features of the present invention, a preferred embodiment will be described below with reference to the accompanying drawings, wherein the first drawing is a top view of a preferred embodiment of the invention; BRIEF DESCRIPTION OF THE DRAWINGS FIG. 2 is a cross-sectional view of a preferred embodiment of the present invention, and mainly shows the transmission mechanism; the display and the fourth diagram are similar to the second diagram, but The device 10 of the present invention is provided for rotating a substrate 15 , and the substrate transporting device is provided with a base 20 . An upper floating mechanism 30, two moving seats 40, a multi-and-slide, a lifting member 50, a transport frame 55, two transmission mechanisms 60, and a power source 70. The presser trU 3G system comprises a pad 3 - a trachea 32 and an air cough L iff laying on the base 20 for carrying the substrate 15, and the second (four) crucible contains a plurality of mutually communicating air holes 34, and the air holes 34 33 The i over 32 is connected to the air compressor 33, whereby when the empty machine face is 4 yuan, the button will be blown to the bottom table of the job board 15 and the air is generated to determine the weight of the substrate 15. Further, the substrate 20 1269773 is floated. Further, the air compressor 33 can also be evacuated through the air holes 34, so that the substrate 15 falls and is in close contact with the backing plate 31 for subsequent processing.

10 1510 15

遠一移動座40分別位於該塾板31之兩側且以可升降 之方式滑設於該基座20,各該移動座具有一座體41以及一 蓋體42,該座體41與該蓋體42係界定一容置空間43,此 外,該蓋體42並具有多數矩形孔44。 滅等導輪45係各包含有一小徑部46以及一大徑部47 =該小徑部46 _延伸而出,該等導輪45係位於該容置 空間43且分別藉由一樞軸48樞設於該座體4〇,該等導輪 45之上緣係通過該等矩形孔44並凸出於該移動座4〇之 外,且該小徑部46之上緣略高於該墊板31之頂表面。 α玄一升降件5〇係連結該基座2〇以及該二移動座, 用以提供動力使該移動座4G升降,該升降件%可採用而 不限於氣壓缸、油壓缸或線性馬達。 ,運送框55係套設該基板ls且以其兩端承載於該等 =輪5之46,該等導輪45之大徑部47則位於該運 m之外儀以輔助其定位,藉此,當該等導輪衫朝 步旋轉時’該運送框55係帶動該基板15朝輪 屮^?1力源7G係設於絲座,各軸力源7G係具有 ;===該傳動機構60係包含有-第-獅與 =人!力轴71連接,一第二齒輪62與該第-齒 輪—傳動桿63以可旋轉之以設於該移動座40 20 1269773 5 15 20 =藉-婦64触第二雜62連接,—第三錄&設於 轉動桿63綱,-贿66可_地設於該麵41且斑 ,第三齒輪65科’以及多數第_輪67分別與該齒桿 =唾合錢於該等樞軸48,藉此,該二動力源%可透過 〜-傳動機構6G將動力舰·#導輪45使其滾動 而輸送該運送框55及該基板15。 此外,該第二齒輪62之轴心處具有一與該槽轴64外 ,相互對紅航621,城_ 64 _設霞齒孔62ι, =1該移動座40上升或下降時,該_ 64係於_ 内進行軸向移動’藉此’無論移動座⑽上升或下降, :弟-齒輪62均能藉由該鄕64帶_傳轉63進行旋 轉’達到傳動的目的。 j上述結構,當該空壓機%透過該等氣孔弘吹氣 兮黎〜板15係呈上浮狀態,此時可配合該運送框55受 =導輪45之帶動而推送該基板15朝既㈣送方^ 白兮^達到輸送的目的,除此之外,該空壓機33也可以 則ΐ進氣ΪΓ抽氣,以使該基板15緊貼該墊板31,此時 55則可^^加卫、清洗或是檢查等程序’至於該運送框 第四㈣料報45停止轉_健在祕,或是如 ;Γ55所:;Γ咖牛50抬升該移動座40— 進,而遠離該離該基板15,並繼續朝運送方向前 運送=1知^本發明所提供之基板輸送裝置10係使用該 作為傳达動力之媒介,使得在輸送的過程中,該 7 1269773 基板輸送裝置10只會接觸到該基板15之側周面,不像習 知之輸送裝置’係以導輪直接接觸基板板面,因此本發明 所提供之基板輸送裝置係可避免該基板因為直接接觸該 等導輪45所造成之到傷,此外,也可避免該基板15捲入 該等導輪45而造成折損。The remote moving seats 40 are respectively located on the two sides of the sill plate 31 and are slidably mounted on the pedestal 20 in a movable manner. Each of the moving bases has a body 41 and a cover body 42. The base body 41 and the cover body The 42 series defines an accommodating space 43 and, in addition, the cover 42 has a plurality of rectangular holes 44. The guide rollers 45 each include a small diameter portion 46 and a large diameter portion 47. The small diameter portion 46_ extends out. The guide wheels 45 are located in the accommodating space 43 and are respectively supported by a pivot 48. The upper edge of the guide wheel 45 passes through the rectangular holes 44 and protrudes beyond the movable seat 4, and the upper edge of the small diameter portion 46 is slightly higher than the pad. The top surface of the plate 31. The 玄 一 升降 升降 升降 升降 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The transport frame 55 is sleeved with the substrate ls and carried at both ends thereof by 46 of the = wheel 5, and the large diameter portion 47 of the guide wheel 45 is located outside the device to assist in positioning thereof. When the roller guides are rotated step by step, the transport frame 55 drives the substrate 15 toward the rim. 1 force source 7G system is set in the silk seat, each axial force source 7G system has; === the transmission mechanism 60 contains - the first lion and = person! The force shaft 71 is connected, a second gear 62 and the first gear-transmission rod 63 are rotatably disposed on the movable seat 40 20 1269773 5 15 20 = l-wife 64 touch second miscellaneous 62 connection, - third Recorded & set on the rotating rod 63, - bribe 66 can be set on the surface 41 and the spot, the third gear 65 section 'and the majority of the wheel_67 respectively with the rack = saliva in the pivot 48. Thereby, the two power source % can transport the transport frame 55 and the substrate 15 by rolling the power ship ## guide wheel 45 through the transmission mechanism 6G. In addition, the axis of the second gear 62 has a space outside the slot shaft 64, and the pair of red air 621, the city _ 64 _ set the spur hole 62 i, =1 when the moving seat 40 rises or falls, the _ 64 The axial movement is carried out in _ 'by this', regardless of whether the moving seat (10) is raised or lowered, the brother-gear 62 can be rotated by the 鄕 64 belt _transmission 63 to achieve the purpose of transmission. j. In the above configuration, when the air compressor % is ventilated through the air holes, the air pumping unit 15 is in a floating state. At this time, the carrier frame 55 can be pushed by the transporting frame 55 to push the substrate 15 toward (4). In addition, the air compressor 33 can also draw air into the air intake , so that the substrate 15 is in close contact with the backing plate 31, and at this time, 55 can be ^^ Procedures such as adding, cleaning, or inspecting 'As for the fourth (four) of the shipping frame, the report 45 stops turning _ Jian is secret, or as; Γ55:; Γ 牛牛 50 lifts the moving seat 40-, and away from the away The substrate 15 is continuously transported in the transport direction. The substrate transport device 10 provided by the present invention uses the medium as a power transmission, so that the 7 1269773 substrate transport device 10 can only be used during transport. Contacting the side peripheral surface of the substrate 15 is different from the conventional conveying device's in that the guide wheel directly contacts the substrate plate surface, so the substrate conveying device provided by the present invention can prevent the substrate from being directly contacted by the guide wheels 45. Injury is caused, and in addition, the substrate 15 can be prevented from being caught in the guide wheels 45. Impairment.

口 ,要特別說明的是w简々啊丹,夕種變化, 只要能將動力源7G之動力傳達至該等導輪45即可, =易於思及之結構變化’均應為本發明申請專利範“ 1269773 【圖式簡單說明】 第一圖係本發明一較佳實施例之頂視圖; 第二圖係本發明一較佳實施例之剖視圖; • 第三圖係本發明一較佳實施例之剖視圖,且係主要顯 • 5示該傳動機構; 第四圖係略同於第二圖,但係顯示該移動座上升之狀 【主要元件符號說明】 10 10基板輸送裝置 15基板 20基座 30上浮機構 31墊板 32氣管 33空壓機 34氣孔 40移動座 41座體 42蓋體 43容置空間 44矩形孔 45導輪 15 46小徑部 47大徑部 48樞軸 50升降件 55運送框 60傳動機構 61第一齒輪 62第二齒輪 63傳動桿 64槽轴 65第三齒輪 66齒桿 67第四齒輪 70動力源 71出力軸The mouth should be specially described as w 々 々 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , BRIEF DESCRIPTION OF THE DRAWINGS The first drawing is a top view of a preferred embodiment of the present invention; the second drawing is a cross-sectional view of a preferred embodiment of the present invention; and the third drawing is a preferred embodiment of the present invention. The cross-sectional view is mainly shown in Fig. 5. The fourth figure is similar to the second figure, but shows the rising position of the moving seat. [Main component symbol description] 10 10 substrate conveying device 15 base plate 20 30 floating mechanism 31 pad 32 air pipe 33 air compressor 34 air hole 40 moving seat 41 seat body 42 cover body 43 accommodation space 44 rectangular hole 45 guide wheel 15 46 small diameter portion 47 large diameter portion 48 pivot 50 lifting member 55 transport Block 60 transmission mechanism 61 first gear 62 second gear 63 transmission rod 64 slot shaft 65 third gear 66 gear rod 67 fourth gear 70 power source 71 output shaft

Claims (1)

1269773 十、申請專利範圍: ’係用以輸送一基板,該基板輸送 1· 一種基板輸送裝置 裝置包含有: 一基座; 一上洋機構,係包含一空壓機以及一墊板供承載該基 反、,該墊板係設於雜座且包含有多數氣孔 ,該等氣孔係 連通於該空壓機; _ 一移動座’係滑設於該基座且分別位於該墊板兩側; 多數導輪,係樞設於該二移動座; 10 一升降件,係連結該基座與該移動座;以及 、一運送框,係套設該基板且橫跨該墊板,該運送框並 以其兩端承載於該等導輪。 2·如專利申請範圍第1項所述之基板輸送裝置,其中該 升降件係為氣壓缸、油壓缸或線性馬達。 15人3如專利申請範圍第1項所述之基板輸送裝置,係更包 • 各有動力源设於該基座,以及一傳動機構設於該動力源 • 與該等導輪之間,藉此,該動力源可透過該等傳動機構驅 動該等導輪。 4 4·如專利申請範圍第3項所述之基板輸送裝置,其中該 等V輪係分別藉一樞軸設於該移動座,該傳動機構包含有 20 —第一齒輪與該動力源連接,一第二齒輪與該第一齒輪嚙 合,一傳動桿藉一槽軸與該第二齒輪連接,一第三齒輪設 於該傳動桿一端,一齒桿可旋轉地設於該移動座且與該第 三齒輪嚙合,以及一第四齒輪設於該樞軸且與該齒桿嚙 合,該傳動桿並以可旋轉之方式設於該移動座。1269773 X. Patent application scope: ' is used to transport a substrate, the substrate is transported. 1. A substrate transport device comprises: a base; an upper ocean mechanism comprising an air compressor and a backing plate for carrying the base Conversely, the pad is disposed in the miscellaneous seat and includes a plurality of air holes, the air holes are connected to the air compressor; _ a moving seat is slidably disposed on the base and respectively located on two sides of the pad; a guide wheel pivotally disposed on the two movable seats; 10 a lifting member connecting the base and the moving base; and a transport frame sleeveping the substrate and spanning the pad, the transport frame Both ends are carried on the guide wheels. 2. The substrate transfer device of claim 1, wherein the lifting member is a pneumatic cylinder, a hydraulic cylinder or a linear motor. 15 persons 3, such as the substrate conveying device described in the first aspect of the patent application, further comprising: each power source is disposed on the base, and a transmission mechanism is disposed between the power source and the guide wheels, Thus, the power source can drive the guide wheels through the transmission mechanisms. The substrate transport device of claim 3, wherein the V-wheel systems are respectively disposed on the movable base by a pivot, and the transmission mechanism includes a first gear coupled to the power source. a second gear is meshed with the first gear, a transmission rod is coupled to the second gear by a slot shaft, a third gear is disposed at one end of the transmission rod, and a toothed rod is rotatably disposed on the movable seat and The third gear is engaged, and a fourth gear is disposed on the pivot shaft and meshes with the rack gear, and the transmission rod is rotatably disposed on the movable seat.
TW94132488A 2005-09-20 2005-09-20 Substrate delivering device TWI269773B (en)

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