TWD177006S - 半導體製造裝置用附設研磨部之清洗刷之部分 - Google Patents

半導體製造裝置用附設研磨部之清洗刷之部分

Info

Publication number
TWD177006S
TWD177006S TW104303363D01F TW104303363D01F TWD177006S TW D177006 S TWD177006 S TW D177006S TW 104303363D01 F TW104303363D01 F TW 104303363D01F TW 104303363D01 F TW104303363D01 F TW 104303363D01F TW D177006 S TWD177006 S TW D177006S
Authority
TW
Taiwan
Prior art keywords
substrate
parts
design
article
cleaning
Prior art date
Application number
TW104303363D01F
Other languages
English (en)
Chinese (zh)
Inventor
Kenji Yada
Masahiro Fukuda
Taro Yamamoto
Noboru Nakashima
Original Assignee
東京威力科創股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京威力科創股份有限公司 filed Critical 東京威力科創股份有限公司
Publication of TWD177006S publication Critical patent/TWD177006S/zh

Links

TW104303363D01F 2014-12-25 2015-06-23 半導體製造裝置用附設研磨部之清洗刷之部分 TWD177006S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2014-29094F JP1528261S (cs) 2014-12-25 2014-12-25

Publications (1)

Publication Number Publication Date
TWD177006S true TWD177006S (zh) 2016-07-11

Family

ID=53779669

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104303363D01F TWD177006S (zh) 2014-12-25 2015-06-23 半導體製造裝置用附設研磨部之清洗刷之部分

Country Status (2)

Country Link
JP (1) JP1528261S (cs)
TW (1) TWD177006S (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD931240S1 (en) 2019-07-30 2021-09-21 Applied Materials, Inc. Substrate support pedestal

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD931240S1 (en) 2019-07-30 2021-09-21 Applied Materials, Inc. Substrate support pedestal

Also Published As

Publication number Publication date
JP1528261S (cs) 2016-06-27

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