TW585836B - Semi-sealed micro-fluid system and the driving method for fluid - Google Patents

Abstract

This invention relates to a semi-sealed micro fluid system and the driving method of fluid. The micro fluid system includes a substrate and a thin film, and is characterized in that: the thin film is elastic and deformable and includes an opening at a location that corresponds to a venting hole of the substrate to thereby construct a semi-sealed micro fluid. The substrate is provided with micro fluid members and deformable cavities, which are connected by micro channels to form a complete circuit. Because the thin film is elastic and deformable, the thin film is able to apply a pressure towards a thin film located above the deformable cavities in the semi-sealed micro fluid system to force flowing of the fluid therein. The fluid is flow backwards upon releasing such a pressure.

Description

585836 _ Case No. 91109209 V. Description of the invention (1) [Application field of the invention] The present invention relates to a microfluidic system on a wafer, and a semi-closed microfluidic I # capable of providing a reciprocating motion. One | law. System and fluid driving method [Background of the invention] The method generally used for fluid driving is nothing more than the method for driving the wafer at the current stage of B and I, except the Xiaopu system. The outline of the pumps used is built on the chip; it is divided into: mechanical micropumps and non-mechanical micropumps, and non-mechanic micropups. Among them, the mechanical type has two If; reciprocating (reciprocating_diaphragm motion

Ifperistaltic). Most of the developed micropumps are reciprocating. Many of these types of pump structures are pump bodies, plus actuators and non-return & Commonly used actuators are: Piezoelectric, Electrostatic, Thermopneumatic and so on. | Non-mechanical micro-pumps include Bubble Pumps, Di ffuser Pumps, Electrohydrodynamic Pumps (EHD), Injection-type Hydroelectric Pumps (Injection Type EHD Pumps), Non-Injection Type EHD Pumps, Electroosmosis / Electrophoretic Pumps, Ultraos Pumps, Ultrasonic Pumps, Thermocapillary Ipumps, Pnuematic Pumps and Vacuum Pumps.

Page 5 V. Description of the invention (2) Generally speaking, mechanical pumps belong to unidirectional flow and cannot meet the requirements of bidirectional driving. There are different restrictions than the mechanical gang design. For example, capillary tubes with a diameter of less than 50 micrometers (μm) for electroosmotic pumps can only be viewed as on-chip pumps. The MEMS manufacturing process has a cost High and unsuitable on disposable wafers. Therefore, 'Medical technology is now one of the important development directions for wafer inspection type wafers. Given the existing needs, it is necessary to design other simple responses. [Objective and Summary of the Invention] In view of the problems of the conventional technology, the present invention provides a fluid system and a fluid driving method to achieve the purpose of manufacturing disposable products. To achieve the above object, the semi-dense system provided by the present invention is filled with a substrate and a flexible and deformable film shape. The present invention is more special in the design of the base, which has more than one microfluidic element, shaped cavity, an exhaust hole and a plurality of micro-channels, micro-pipe components, deformable cavity and exhaust holes to form a fluid road. The film is adhered to the substrate and forms a semi-closed state in the exhaust hole. Through such a simple design, the present invention can simplify the fluid in the substrate, that is, the fluid that moves through the deformable cavity, so often because of its different dynamic effects, it can only be reached in ^. In addition, these three must use micro-electro-mechanical fabrication to meet the needs of limited work. The drive method that pump technology cannot meet is required to provide a semi-closed micro-easy, low-cost closed micro-fluidic system. (Substrate) More than one method of connecting microfluidic elements to flow back and forth through an opening to make a path-shaped sheet to drive a thin film above to apply 585836 _ Case No. 91109209_ Month and Day ___ V. Description of the Invention (3) Way of stress. When pressure is applied, the fluid in the deformable cavity is under pressure, which pushes the fluid to flow, and the other end is relieved by the exhaust hole. When the pressure is released, it returns due to the elastic recovery of the film itself. In addition, the present invention further provides a semi-closed microfluidic system. A plurality of sets of microfluidic channels are designed on the substrate, and these channels share a vent hole and a microfluidic element. In this way, different fluids can be injected in different paths and pushed back and forth. Finally, individual fluids can be mixed in a common microfluidic element. In addition, in order to solve the limitation of the distance of the pushing fluid, one or more of the deformable cavities mentioned above can be solved. The deformable cavities can be connected in series or in parallel to achieve the purpose of increasing the distance of pushing fluid flow. With regard to the features and implementation of the present invention, the preferred embodiment is described in detail with reference to the drawings: [Detailed description of the invention] The semi-closed microfluidic system and fluid driving method of the present invention are designed in a microfluidic system or Multiple deformable cavities, and then press the deformable cavities to drive fluid flow. That is, a flexible, deformable thin film substance is pasted on the substrate of the microfluidic wafer to form a semi-closed microfluidic system. The so-called semi-closed (p a r t a a 1 1 y c 1 0 s ed) microfluidic wafer is that when the wafer starts operation, there are no holes or pipes connected to the outside except the exhaust hole. In addition to the necessary microfluidic elements on the wafer, the present invention also designs one to several deformable cavities. These deformable cavities are connected in series or independently using micro-channels to microfluidic elements on the wafer. The deformable cavity is connected to the microfluidic element for the pipeline, forming the designed microfluidic transport

Page 7 585836

The moving line of the actuator. In the position of each deformable cavity, μ_, the transformer pressure. The microfluidic motion on the wafer is caused by g: ;; the volume of the movable cavity is deformed, causing the positive pressure in the cavity to decrease, allowing the film to be released, and then using the elasticity of the film to move the micro fluid. When actuated, the microfluid moves in the opposite direction. It will cause negative in the deformable cavity. "Figure 1" is the microfluidic crystal of the present invention.

On this microfluidic wafer 10, there are two different maps of Keshi. The stomata and a deformable cavity. The three ministry eight ::? Reaction ⑤, a combination of this figure, " clearly illustrates the present invention. The configuration is composed of the deformable cavity 16, the exhaust hole 18, and operation; Micro, body wafer 1 (m). Among them, the first-'second brother: micro 9 fluid; ^ cattle 1〗, such micro-fluidic elements, such as heating cavity, the reaction is: the first, second, m 一 # $ ^ f / ^ ^ connection is connected. The second Weiguan Road 13, 15, 19

Please refer to "Figure 2", which is "the top of the entire microfluidic wafer 10 is composed of a wafer substrate 17 and a flexible and j = variable film il. The substrate 17 is a pipeline for microfluidic components Where ^ = points. The material of the substrate 17 can be a silicon substrate, such as glass, quartz, silicon = (silicon) or polycrystalline silicon (polymer silicon), or a polymer material (polymeric material), also That is, plastics materials, for example, polymethyl-methacrylate (PMMA), polycarbonate, polycarbonate, polytetrafluoroethylene (TEFL0NTM), polyvinyl-chloride (PVC), (polydimethylsiloxane) , PDMS), polysulfone, SU-8, and other similar materials

Page 8 585836

Case No. 91109209 V. Description of the invention (5). On the other hand, the elastic and deformable film 11 is used for packaging a chip. The material of the film 11 may be selected from general daily-use tapes, to similar films such as AMC D291 polyester film (ρ ο 1 y s ΐ e r f i 1 m). The fabrication of microfluidic components and microchannels depends on the materials selected. These fabrication technologies include: photolithography, MEMS technology, pulsed laser evaporation (aseaser ablati〇n), gas Grinding (air abrasion), injection molding (injecti0I1 m〇iding), embossing or embossing (embossing or stamping), polymerizing the polymeric precursor material in the mold (Iκ composite (polymerizing the polymeric precursor material in the mold), etc. . The bonding of the film 11 and the substrate 7 is based on the sticky side of the film 丨. The use of the adhesive film n enables the packaging of the wafer i 0 to be performed at normal temperature. In addition to being easy to handle, this method does not require the reagent to be pre-loaded and the reagent itself is not exposed to high temperatures. In addition, the use of thin film materials can also make filling reagents easier. For example, ^ filling reagents can be accomplished with a syringe. Just put the reagent in the syringe, and inject the syringe into the syringe at the position to be filled. After filling, seal the injection hole with a small piece of film. In the part of the deformable cavity, the power source for pushing the microfluid is to deform the deformable cavity by external force 'to form a positive pressure in the deformed cavity to promote the microfluidic motion in the microfluidic wafer. The transmission of pressure can be accomplished by air, or a liquid such as oil can be injected into the deformable cavity to form a hydraulic system. The use of air as a medium for pressure transmission will cause the reaction of this driving method (responsion) to be slow due to the compressibility of air ’, which will cause crystal

Page 9 585836

_ Case No. 9TinQ? F) Q said 5. Description of the invention (6) The microfluidics on the chip cannot respond to external forces. If the whole microfluidic flow channel is worse, the situation will be more serious. Therefore, the less the gaseous part, the faster the effect of promoting the microfluidic response. In addition to air compressibility, air (permeability) is also better. If the user does not complete the package when the film is packaged, such a driving method has a great effect on the liquid, it depends on the design and use. Bu Qishi's Ministry X 丨 $ on Correction Tian Ran problem or the above problems will not have sufficient requirements as a medium, it is the easiest mechanism to make a large shadow to promote the deformation of the film =. The eccentric circle or cam of the linear motion, the line is a line (thermodynamic dri: air soil or heat "Figure 3A" to "the deformation of the first cavity 16 to allow micro-flow ^" is the case. Microfluidic chip 10 : The slice 10 moves to the first microfluidic element 12 and the domain fluid will move to the second microfluidic element 14. So the microfluidic element is at the position of the "body element 12" at the beginning of the reaction. At ^ U The position of the microfluid inside the element 14 is subject to deformation. The reaction is completed after the deformable time flows to the first microfluidic element. If there are too many liquids in the deformable cavity, the better the air will be, that is, the obtained liquid-permeable film has good penetrability, or it is easy to breathe, which will make this, whether the deformable cavity should be perfused. As long as the above-mentioned question can be avoided, the actuator and the actuating drive of the air-like movement show the micro-fluid from the second stage, 3A ", and the cavity 16 above the cavity 16 3B The pressure inventor created a microfluid and re-centered it. Shows how to release the microfluidic transport element back and forth to the first and second reaction reagent slight positive pressure through. Due to the variable back drive 14 moving a micro flow agent fluid, in some film

Page 10 585836 Illustrated painting number 9110 shame V. Description of the invention (7) Pressure body; make the pressure in the deformable cavity 16 lower than the atmospheric pressure of 16 differential pressure ^ ΐ 的 0 microfluid on the exhaust hole 1 8 and the deformable cavity b'k back to the second microfluidic element 14, 杣 "黧 ac Pavilion, no. In this way, the material Shima production ρ 曰 4 Rudi 3C map" is used & ^ I micro-body requirements for driving back and forth in Japanese and Japanese films. Straight point] When the second deformable cavity is actuated, the inner part of the deformable cavity of the actuator pressure part. -The aspect is that if the two phases are j =, it will be difficult to achieve the driving effect because of the strength of the film itself. On the other hand, it will cause a large permanent deformation of the film, but it is difficult to achieve the reflow = the knot. After some experimental results using a spiral micrometer as an actuator ', under the condition of a deformable cavity with a size of 10 ¾ m (mm), a 6 mm diameter portion of the actuator has the best effect. That is to say, in such a size ratio, it is the easiest to control the microfluid to move back and forth. This depends on the condition of the film used. The thin film used in this experiment was A M C D 2 9 1 polyester film. Theoretically, the driving method of the present invention can express its controllability by the following formula. Assuming that the deformable cavity is circular, its radius is r 2, the radius of the pressing part of the actuator is r 1, and the depth of the actuator's depression is h, then the volume of the depression is ... H2 is the height of the cone formed by r2, hi is the height of rl or the cone formed, and h = h2-hi, and there is a proportional relationship between h2 and hi, so the final expression can be simplified as:

Page 11 585836 Case No. 91109209 A_ Amendment

Const x h (2) The microfluid whose product change is positive to the depth of the depression will also have the liquid in a microchannel. If the description of the invention (8) Δ ^ = ^ (Γ2 + Γ2η + η)

From the second formula, it can be seen that the body ratio is down. Under volume conservation conditions, the "volume shift" of a wafer-like sample. If the junction area of the moving pipe is the same, it is foreseeable that AV

A The third formula is a linear relationship and easy to operate. With a calculable volume displacement, the method is of great help. First, determine what components are available and use fewer reagents. Wait until the size of the deformable cavity is calculated by the components, micropipes, and layout. However, the driving method of the present invention is limited by the following methods. That is, "Figure 4A" and the reference "Figure 4A", which are formed by the first, second 2, 2 2, 2 3, 2 4 and the first, second 8 . Please refer to "Figure 4B", the passage formed by the fluid element 3 1, 3 2, 3 3, 3 4 and the third exhaust hole 38, of which (3) is quite suitable for how to apply in this way of driving After the driving method of the present invention determines the amount of buffer on the microfluidic wafer to be designed (the amount of buff er0 (1 ay ut)), it can be considered that there is still a limit on the driving distance. This decision, that is, through Figure 4B in series and parallel. The second, third, and fourth microfluidic elements, two deformable cavities 25, 26, and exhaust holes, the second deformable cavity 2 5, 2, 6 Is a string of first, second, third, fourth micro one, second deformable cavity 35, 36, and first and second deformable cavity 35,

Page 12 585836 Amendment No. 91109209 V. Description of Invention (9) ^, Continued. Applicable to the two implementation examples, the driving distance can be increased through two Ding and Xi: body 4. In design, | port 1 forms multiple deformable cavities to achieve greater driving distance. In addition, "Figure 5" is composed of two sets of independent deformable cavities and independent microfluidic paths, respectively: the first microfluidic path composed of 1 kg. It consists of the second deformable cavity 45 /, the first: the micro-element 44, the second micro-fluidic element 43 and the exhaust hole 48. Through these two sets of independent microfluidic pathways, it is possible to add different sets of reaction reagents to the first microfluidic pathway and the second material pathway, respectively, and drive them separately. Finally, two groups of non-reactive reactions were mixed at the second microfluidic element 43. d shows the embodiment in Fig. 5 from "Fig. 5", and the present invention can further derive 嗖 ft ::: mi; 立 之 微 fluid path. Each microfluidic channel can be injected with a single reagent early, and finally lies in the same microfluidic element ^. Therefore, the present invention can simply achieve another effect of reagent mixing. The same I 'driving method is the same as the above. 7 I Actually, the present invention has been verified, and the results are as follows. Using a 100 mm long X 50 mm wide PMMA, a 10 mm (millimeter) diameter, deep-working deformable cavity was made with a grinder (m ± i 丄 called Imachine);

| Then mill a micropipe 8 2 · 5 mm long, 1 mm deep and 1 mm wide. The above two are connected by micro-pipes with a length of 2 mm, a width of 0.5 mm and a depth of 1 mm, and are then packaged with AMC D291 polyester film. After packaging, fill the variable cavity with red ink. At this time, the red ink filled the deformable cavity, a micropipe of 0.5 mm and a small micropipe of 1 mm wide. The pressure part is 6mm. Page 13 585836 Case No. 91109209 Λ: _ Revision V. Description of the invention (10) Spiral micrometer with diameter. When the spiral micrometer is pushed to the surface of the film, no pressure has been applied at this time. The display of the spiral micrometer is 1 8. 7 8 mm. "Table 1" is a few experimental data, please refer to it. After sorting the experimental data of "Table 1", the graph of "Figure 6" is obtained. From Figure 6 it can be found that, first of all, this is a linear driving method, which means that this driving method is easy to control and can be predicted by calculation. Secondly, after two back-and-forth driving, it can show the reciprocating bidirectional movement and stability of this driving method. The agreement between the experimental values and the calculated values can prove the above argument. The difference between the experimental data and the calculated data may originate from processing errors and experimental errors during the experiment. In summary, under such a semi-closed system, the present invention can use different degrees of deformation of the deformable cavity to achieve the movement of microfluids of different distances and distances, and it is very easy to control. Therefore, the present invention can meet the needs of short distances, different displacements, and back and forth movements. Efficacy of the invention] The deformable cavity microfluidic driving method of the present invention has the following advantages ... 1. The actuating gas part in the driving system is separated from the reaction reagent, so there is no problem of contamination and it can be reused. In addition to avoiding contamination, the contamination of the reaction reagent by the actuator is also isolated. 2. Easy to make and low cost, so it is disposable. 3. The chip and external system do not need to connect pipelines, so it is easy to disassemble. 4. Because the film itself is elastic, the elasticity can be used to achieve the purpose of microfluids to move back and forth. 5. Since the applied pressure has a linear relationship with fluid motion,

Page 14 585836 Case No. 91109209 Amendment V. Description of the invention (11) The effect of accurate positioning of microfluidics is achieved. Although the present invention is disclosed in the foregoing preferred embodiments as described above, it is not intended to limit the present invention. Any person skilled in the related arts can make some changes and retouch without departing from the spirit and scope of the present invention. The patent protection scope of the invention shall be determined by the scope of the patent application scope attached to this specification.

Page 15 585836 Amendment No. 91109209 Brief Description of Drawings Figure 1 is a schematic diagram of the microfluidic wafer arrangement of the present invention; Figure 2 is a cross-sectional view of Figure 1; Figures 3 A to 3C are through the deformable cavity of the present invention Figure 4A is a schematic diagram of microfluids in a wafer moving; Figure 4A is a schematic diagram of a series of deformable cavities of the present invention; Figure 4B is a schematic diagram of a parallel connection of deformable cavities of the present invention; Figure 6 is the specific implementation of the present invention. [Symbol said Hu 10 Microfluidic wafer 11 Thin film 12 First microfluidic element 13 First microchannel 14 Second microfluidic element 15 Second microchannel 16 Deformable cavity 17 Substrate 18 Row Air hole 19 second micropipe 20 microfluidic wafer 21 first microfluidic element 22 second microfluidic element 23 second microfluidic element 24 fourth microfluidic element 25 schematic view of a deformable cavity of a first deformable cavity; and

Page 16 585836 Case No. 91109209_Year Month and Day Revised Schematic Description 26 Second Deformable Cavity 28 Vent Hole 30 Microfluidic Chip 31 First Microfluidic Element 32 Second Microfluidic Element 33 Second Microfluidic Element 34 No. Four microfluidic elements 35 first deformable cavity 36 second deformable cavity 38 exhaust hole 40 microfluidic wafer 41 first deformable cavity 42 first microfluidic element 43 second microfluidic element 44 second microfluidic element 45 Two deformable cavity 48 exhaust holes

Claims (1)

Namely, the scope of the patent application is modified: closed microfluidic system—fluid path; parts and substrates (Substrat, the plurality of deformable cavities above e include:, having more than one microfluidic element exhaust hole and a plurality of micropipes and The row; the micro-channels are individually connected to the micro-fluidic element and the variable flow; = holes to form a passage so that the fluid can return in the passage ^ the exhaust and elastic film, adhere to the A semi-closed microfluidic system as described in item 1 of the patent scope is formed on the substrate and the opening is formed by applying L. The semi-closed microfluidic system described in item 1 of the patent scope, where k is changed above the deformable cavity. The film exerts positive pressure to generate, can promote the fluid flow, and returns after the positive pressure is released. • The application of the positive pressure of the semi-closed microfluidic system described in item 2 of the patent scope is consistent. • The semi-closed microfluidic system described in item 1 of the patent scope ^, the device for applying a positive pressure to the film above the deformable cavity is selected from a linear motion actuator and a curved motion bias Center circle or cam, air pressure or thermodynamic drive. • The semi-closed microfluidic system described in item 1 or 2 of the patent application scope, which further includes a driving fluid, which is filled in the deformable cavity. In order to drive the fluid and the fluid in the passage when the deformable cavity is deformed, the semi-closed microfluidic system according to item 5 of the patent application scope, wherein the cavity is in the shape of the fluid. Page 18 585836 ____ Case No. 91109209_ Fangyue a Amendment _ 6. Scope of patent application The driving flow system is oily fluid. 7. The semi-closed microfluidic system as described in item 5 of the patent application scope, wherein the driving flow system is filled in the deformable cavity. 8. The semi-closed microfluidic system according to item 1 of the scope of the patent application, wherein the one or more deformable cavities are disposed at the end of the path opposite to the exhaust hole. 9 · The semi-closed microfluidic system as described in item 1 of the scope of the patent application, wherein the one or more deformable cavities are disposed in the passageway relative to the exhaust hole, and the number of the plurality of microchannels is Form a concatenation. 1 0. The semi-closed microfluidic system described in item 1 of the scope of the patent application, wherein the one or more deformable cavities are disposed at the end of the passageway with respect to the exhaust hole, and are formed by the plurality of microchannels. Several form a join. 1 1 · The semi-closed microfluidic system according to item 1 of the scope of patent application, wherein the material of the film can be selected from tape, polyester film, and the like. 1 2 · The semi-closed microfluidic system according to item 1 of the scope of the patent application, wherein the substrate is a silicon substrate, which can be selected from glass, quartz, silicon, and polysilicon Polymeric materials and plastics materials, such as polymethyl-methacrylate (PMMA), polycarbonate, polytetrafluoroethylene (TEFLONTM), and polyvinyl chloride (polyvinyl- chloride, PVC), (polydimethylsiloxane (PDMS), polysulfone, SU-8〇 Page 19 585836 _Case No. 91109209__Che Yueyue Amendment __ VI. Patent application scope 1 3. The semi-closed microfluidic system described in item 1 of the patent application scope, wherein the one or more micro-fluidic systems on the substrate The method for forming the fluid element, the exhaust hole, and the one or more deformable cavities is selected from the group consisting of photolithography, MEMS technology, 'pulse laser ablation, and air grinding. abrasion), injection molding, embossing or stamping, polymerizing the polymeric precursor material in the mold 0 1 4 · a semi-hermetic Microfluidic system, including: two fluid pathways; a substrate, with 3 shared by one or more microfluidic multiple microtubule elements, respectively, which can be deformed so that the supreme fluid can be combined in The common deformed film port enables the cavity, an exhaust hole and a hole in the fluid passage described in item 14 of the passage to be connected to the microfluid by one or more microfluids. One of the seventy bodies forming the microfluidic channel flows back and forth in the channel, a flexible and can be opened in the exhaust hole 1 5 · As per the scope of the patent application, each micro The upper microfluidic element and one or more variable channels are formed, wherein the exhaust common microfluidic element is the individual cavity and the exhaust hole of the plurality of micro-channels, so as to be different from the one or more The fluids are each mixed in the individual microfluidic microfluidic element; and 'adhered to the substrate and formed into a semi-hermetic state. Semi-closed microfluidic system, which is more than one deformable 585836 _ case number 91109209_ year month day__ Six, the patent application range above the cavity applies positive pressure to generate deformation, which can be pushed in the microfluidic path The fluid flows, and after the positive pressure is released, the fluid returns. 16. The semi-closed microfluidic system according to item 15 of the scope of patent application, wherein the positive pressure is provided by an actuator. 17. The semi-closed microfluidic system according to item 14 of the scope of the patent application, wherein the device for applying a positive pressure to the film above the deformable cavity is selected from a linear motion actuator and an eccentricity for curved motion Round or cam, pneumatic or thermodynamic drive. 18. The semi-closed microfluidic system according to item 14 or 15 of the scope of the patent application, wherein each of the microfluidic channels further includes a driving fluid filled in the deformable cavity for When the one or more deformable cavities in each of the microfluidic channels are deformed, the fluid and the fluid in the channel are caused to flow. 19. The semi-closed microfluidic system according to item 18 of the scope of patent application, wherein the driving fluid system is an oily fluid. 20. The semi-closed microfluidic system according to item 18 of the scope of patent application, wherein the driving flow system is filled in each of the deformable cavities. 2 1. The semi-closed microfluidic system according to item 18 of the scope of patent application, wherein the two or more microfluidic channels are partially filled with the driving fluid, and part of the microfluidic channels are filled by the The drive fluid is partially filled. 2 2. The semi-closed microfluidic system described in item 14 of the scope of patent application, wherein more than one deformable cavity in each of the microfluidic channels is installed Page 21 585836 Case No. 91109209 J. Six. The scope of patent application is located at the end of the passage opposite to the exhaust hole. 2 3 · The semi-closed microfluidic system according to item 14 of the scope of patent application, wherein the one or more deformable cavities in each of the microfluidic channels are disposed at the end of the channel opposite to the exhaust hole , And form a concatenation with the plurality of micro-channels. 2 4 · The semi-closed microfluidic system according to item 14 of the scope of patent application, wherein the one or more deformable cavities in each of the microfluidic channels are disposed at the end of the channel opposite to the exhaust hole And form a concatenation with the plurality of micro-channels. 25. The semi-closed microfluidic system according to item 14 of the scope of patent application, wherein the material of the film can be selected from tape, polyester film and the like. 2 6 · The semi-closed microfluidic system according to item 14 of the scope of the patent application, wherein the substrate is a broken substrate, and may be selected from glass, quartz, silicon, polycrystalline silicon ( polysilicon) and polymer materials (plastics), such as polymethyl-methacrylate (pmma), polycarbonate, polycarbonate, polytetrafluoroethylene (TEFLONTM), polyvinyl chloride (polyvinyl chloride) polyvinyl-chloride (PVC), (polydimethylsiloxane (PDMS), polysulfone, SU-8〇 2 7 · The semi-closed microfluidic system according to item 14 of the scope of the patent application, wherein the one or more microfluidic elements and the exhaust hole on the substrate ^ the method of forming one or more deformable cavities' are From the light micro-view: 585836 Case No. 91109209 Amendment VI. Patent application scope (photo 1 ithography), MEMS technology, pulse laser ablation, air abrasion, injection molding, convex Embossing or stamping, polymerizing the polymeric precursor material in the mold. 2 8 · —A method for driving a fluid in a semi-closed microfluidic system, including the following steps: Provide a semi-closed microfluidic system, which is formed of a substrate and a thin film, and has more than one path forming a pathway. Deformation cavity, more than one microfluidic element and one exhaust hole. The film has an opening in the exhaust hole to form a semi-closed state, and a fluid is filled in the passage; according to the distance that the fluid is to be pushed, a certain amount is applied. The positive pressure of the proportion is on the film above the one or more deformable cavities to push the fluid to flow; and when the positive pressure is released, the fluid flows back. 29. The method for driving a fluid of a semi-closed microfluidic system as described in item 28 of the scope of patent application, wherein the supply of the positive pressure uses an actuator. 3 0 · The fluid driving method for a semi-closed microfluidic system as described in item 28 of the scope of patent application, wherein the device for applying positive pressure to the deformable cavity is selected from linear motion actuators and eccentricity for curved motion Round or cam, pneumatic or thermodynamic drive. Page 23