TW581871B - Probe card for testing liquid crystal display - Google Patents

Probe card for testing liquid crystal display Download PDF

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Publication number
TW581871B
TW581871B TW091124320A TW91124320A TW581871B TW 581871 B TW581871 B TW 581871B TW 091124320 A TW091124320 A TW 091124320A TW 91124320 A TW91124320 A TW 91124320A TW 581871 B TW581871 B TW 581871B
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TW
Taiwan
Prior art keywords
stylus
plate
guide plate
needle
base
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TW091124320A
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Chinese (zh)
Inventor
Tae-Un Jun
Original Assignee
Yoon Soo
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Publication of TW581871B publication Critical patent/TW581871B/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R33/00Coupling devices specially adapted for supporting apparatus and having one part acting as a holder providing support and electrical connection via a counterpart which is structurally associated with the apparatus, e.g. lamp holders; Separate parts thereof
    • H01R33/94Holders formed as intermediate parts for linking a counter-part to a coupling part

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Liquid Crystal (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

That supporting needle plate by reducing the insert thickness of needle plate to save cost and makes product microminiaturization. Especially the test efficiency of the character of liquid crystal display can be enhanced by protect connect part of needle plate for contact circuit pattern stably. The probe card for testing a liquid crystal display is consisted of an assembly holder, a substrate holder is connected and fixed at one side of the bottom surface of the assembly holder, a needle holder is connected and fixed at another side of the bottom surface of the assembly holder in opposition to the substrate holder, a circuit substrate with driver IC thereon is sticked on the bottom surface of the substrate holder, a guide plate sticked at the bottom surface of the needle holder is consist of a plurality of needle insert trench formed on the upper surface and an align trench formed at the outer surface of two side and parallel to the needle insert trench and is formed through the needle insert trench, and a needle plate inserted to the needle trench of guide plate is flexible at two end, one end of the needle plate is through the guide hole formed on the guide plate to form an LCD connect end, the another end of the needle plate is stand out the upper surface of guide plate to form substrate connect end, and the needle plate connect to the outside surface of the needle holder is stand out the upper surface of back end of needle holder to form a salient.

Description

581871 五、發明說明(1) 發明領域 本發明是有關於一種液晶顯示裝置(L i cl u i d C r y s t a 1 D i s p 1 a y,L C D )檢驗用探測卡,且特別是有關於一種藉由 縮小測針板的插入厚度,而使支撐測針板的矽材料導向板 的厚度縮小,而在節省製造費用之同時,促進探測卡之薄 型化;尤其是藉由穩定地保護接觸電路圖案的測針板的各 連接末端,而可以提升LCD的性能檢驗效率之LCD檢驗用探 測卡。 發明背景 一般說來,作為如小型電視與筆記型電腦的影像顯示 裝置,主要是使用LCD (液晶顯示裝置),在此LCD的邊緣 部高密度的設置有為了施加電信號(如影像信號、同步信 C、色相信號等)之數十乃至數百個連接端子,這樣的 L C D在裝著於產品中之前,藉由施加實驗信號,而實施檢 測或試驗畫面是否不良之畫面顯示檢驗。 此種作為檢驗L C D的電特性用的裝置所具備的構件就 是探測卡。 習知所使用的探測卡,其測針具備有金屬線的形態, 由於此測針是經由環氧樹脂接著固定而構成的,因此測針 外徑之縮小是有限度的,而產生無法與最近朝高度積集化 的圖案趨勢相對應的問題點。 亦即,安裝有測針的測針座安裝面會受到限制,由於 LCD之高積集化會使連接端子的數量變得非常多而並變得 非常密,因此具有金屬線的測針,要使其緊密的排列成適581871 V. Description of the invention (1) Field of the invention The present invention relates to a detection card for testing a liquid crystal display device (Li c uid Crysta 1 D isp 1 ay, LCD), and in particular to a method for reducing the size of a stylus. The insertion thickness of the plate reduces the thickness of the silicon material guide plate that supports the styli plate, and saves manufacturing costs while promoting the thinning of the probe card; especially by stably protecting the styli plate that contacts the circuit pattern An LCD inspection probe card that can improve the efficiency of LCD performance inspection at each connection end. BACKGROUND OF THE INVENTION Generally speaking, as an image display device such as a small television and a notebook computer, an LCD (Liquid Crystal Display Device) is mainly used, and an edge portion of the LCD is provided with a high density for applying electrical signals (such as image signals, synchronization, etc.). Letter C, hue signal, etc.) dozens or even hundreds of connection terminals. Before such an LCD is installed in a product, it performs a picture display inspection to check whether the test picture is bad by applying an experimental signal. A component included in such a device for testing the electrical characteristics of the LC is a detection card. The probe used in the conventional method has a stylus with a metal wire. Since the stylus is fixed by epoxy resin, the reduction of the outer diameter of the stylus is limited. The problem points corresponding to the highly accumulated pattern trend. That is, the mounting surface of the styli base with the styli installed will be limited. Due to the high accumulation of LCD, the number of connection terminals will be very large and very dense. Make it tightly aligned

581871 五、發明說明(2) 當數量是不可能的。 為此,已有許多能夠縮小測針外徑的結構與改善支撐 測針的結構的方案被提出了 ,另一方面,即使對本申請人 而言,在之前也申請了日本專利申請第2 0 0 1 - 3 2 1 1 7號與第 2 0 0 1 - 3 2 1 1 8號專利案。 在本申請人之前申請的發明中,已提出一種測針,此 種測針是以使用晶片加工技術之薄板狀之板形成的,同 時,具有可以使外徑大幅度縮小的結構。 亦即,藉由在薄板狀之矽板上圖案化出多數個具有所 需要形狀之測針的結構,而同時製作出多數個測針。 然而,在本申請人的發明中,因為其主要目的為縮小 這種測針的外徑,所以會產生所謂測針板與支撐多數測針 的'结構變得更為複雜的問題點。而且,也會有起因於複雜 的結構與製造程序所造成製造成本上升的不經濟問題。 為此,最近本發明人通過以2001年8月29日提出申請 的專利申請第2 0 0 1 - 5 2 4 3 3號專利案中,提出一種將L C D的 圖案與電路基板圖案間同時連接,藉由使測針板的L C D側 的連接端子與基板側連接端子之間的長度最大限度的縮小 而促進小型化與積集化,藉由將支撐測針板之導向板簡便 的安裝在測針座上,而可以進行更簡便的製作及組裝的結 構。 亦即,如第6圖所示,組裝座1、基板座2、測針座3以 及電路基板4的結構與現在大致相同。 在這種結構中,在測針座3的底部具備有導向板5,在581871 V. Description of invention (2) When quantity is impossible. For this reason, many structures have been proposed that can reduce the outer diameter of the stylus and improve the structure that supports the stylus. On the other hand, even for the applicant, Japanese Patent Application No. 200 Patent cases No. 1-3 2 1 1 7 and No. 2 0 1-3 2 1 1 8 In the invention previously applied by the present applicant, a styli has been proposed. The styli are formed of a thin plate-like plate using wafer processing technology, and have a structure capable of greatly reducing the outer diameter. That is, a plurality of styli having a desired shape are patterned on a thin-plate-shaped silicon plate, and a plurality of styli are simultaneously produced. However, in the applicant's invention, since the main purpose is to reduce the outer diameter of such styli, a problem arises that the so-called styli plate and the structure that supports most styli become more complicated. In addition, there are also uneconomic problems caused by rising manufacturing costs caused by complicated structures and manufacturing procedures. For this reason, recently, the inventor has proposed a method for simultaneously connecting a pattern of an LCD and a pattern of a circuit substrate in a patent application No. 2000-1-5 2 4 3 3 filed on August 29, 2001. By minimizing the length between the connection terminal on the LCD side of the styli board and the connection terminal on the substrate side, miniaturization and accumulation are promoted, and the guide plate supporting the styli board is simply mounted on the styli It can be more easily manufactured and assembled. That is, as shown in Fig. 6, the structures of the assembly base 1, the base base 2, the stylus base 3, and the circuit board 4 are substantially the same as those of the present. In this structure, a guide plate 5 is provided at the bottom of the stylus holder 3,

581871 五、發明說明(3) 上述導向板5中形成有在寬度方向以一定的間隔設置向上 敞開並以一定深度向下凹,同時能夠使測針座3前端部的 末端以具有一定長度而能夠垂直貫通之測針插入槽5 a。 而且,插入導向板5的測針插入槽5 a中的測針板6是將 由一端向下延長成” L π字形,且延長的末端較測針座3的前 端部向前方突出之具有升降彈力的LCD連接末端6a與另一 端的上部延長到電路基板4底部為止,且延長的末端部彈 性的接觸電路基板4之電路圖案的基板連接末端6b所構成 的薄板狀石夕板圖案化而形成之。 發明欲解決的問題點 然而,在這種結構中,導向板5的厚度會過度的變 厚,且為了使兩片導向板5經由接合而形成堆疊層的結 構%,也會產生作業變得太繁雜等不便利問題。 尤其是在導向板5上形成測針插入槽5 a時,因為加工 深度(約5 0 0 // m )形成過深,所以存在著所謂藉由顯微鏡 所確認加工性是不準確的問題。 亦即,藉由顯微鏡所看到的深度為1 7 0〜3 0 0 // m的程 度,因為在上述結構中是形成約5 0 0 // m的深度,所以在加 工測針插入槽5 d狀態下,無法準確地核對其加工程度。 於是,測針插入槽5 a之設置面的狀態並不能準確地辨 認,因而使測針板6之插入狀態變得不均勻而造成組裝狀 態不良。 而且,在已申請發明中,由於測針板6的L C D連接末端 6 a與基板連接末端6 b側的導向板5的兩側末端具有朝向外581871 V. Description of the invention (3) The above guide plate 5 is formed to be open at a certain interval in the width direction and recessed downward at a certain depth, and at the same time, the tip of the front end portion of the stylus holder 3 can be a certain length. The stylus penetrating perpendicularly is inserted into the groove 5 a. Furthermore, the stylus plate 6 inserted into the stylus insertion groove 5 a of the guide plate 5 is extended downward from one end into an “L π” shape, and the extended end has a lifting elastic force that protrudes forward from the front end of the stylus holder 3. The upper end of the LCD connection end 6a and the other end are extended to the bottom of the circuit board 4, and the extended end part is formed by patterning a thin plate-shaped stone board composed of the substrate connection end 6b that contacts the circuit pattern of the circuit board 4. Problems to be Solved by the Invention However, in this structure, the thickness of the guide plate 5 becomes excessively thick, and in order to make the two guide plates 5 form a stacked layer structure by joining, the operation becomes difficult. It is too complicated and inconvenient. Especially when the stylus insertion groove 5 a is formed on the guide plate 5, the machining depth (about 50 0 // m) is too deep, so there is a so-called processability confirmed by a microscope. It is an inaccurate problem. That is, the depth seen through a microscope is about 17 0 to 3 0 0 // m, because a depth of about 5 0 0 // m is formed in the above structure, so Processing stylus insertion groove 5 d Therefore, it is impossible to accurately check the degree of processing. Therefore, the state of the setting surface of the stylus insertion groove 5 a cannot be accurately recognized, so that the insertion state of the stylus plate 6 becomes uneven and the assembly state is poor. In the claimed invention, since the LCD connection end 6 a of the stylus plate 6 and the substrate connection end 6 b have both side ends of the guide plate 5 facing outward,

581871 五、發明說明(4) 側完全開放的狀態,所以會產生所謂測針板6的各連接末 端6 a、6 b發生撓曲變形而使發生接觸不良等問題。 發明概述 本發明的目的為提供一種使導向板的厚度薄型化,同 時使測針插入槽形成能夠用顯微鏡進行辨認的厚度,並使 測針板具有與測針插入溝之深度相同之寬度,而具有超薄 型化及正確組裝性之LCD檢驗用探測卡。 本發明的目的為提供一種藉由將測針插入槽的兩側前 端部封閉,而可防止L C D影像連接末端與基板連接末端的 撓曲變形之LCD檢驗用探測卡。 本發明提供另外一種藉由節省材料費使商品製造單價 。降低,而可以適用於更經濟的LCD之高積集化圖案的LCD檢 驗用探測卡。 為達成這種目的,本發明的結構是由組裝座;連接固 定於上述組裝座底面之一側的基板座;與上述基板座相對 應而連接固定於上組裝座底面之另一側的測針座;連接在 上述基板座的底面,且上表面接著有驅動1C之電路基板; 具備有接著在上述測針座的底面,且在上表面中單一方向 均勻地形成向上敞開而向下凹陷的多數個長孔狀測針插入 槽、形成於與測針插入槽同一水平線上兩側的外側端面上 的校準槽、且測針插入槽的前端部側的一末端向下貫通之 導向板:具備有向下插入上述導向板的測針插入槽中且兩 側形成能夠上下撓曲變形,一側的末端部向下延長而藉由 上述導向板之前端部向下貫通所形成之導向孔並較上述導581871 5. Description of the invention (4) The side is completely open, so that the so-called stylus plate 6 connection ends 6 a and 6 b may be deformed to cause contact failure. SUMMARY OF THE INVENTION An object of the present invention is to provide a thinning of the thickness of a guide plate and a thickness of a stylus insertion groove that can be recognized with a microscope, and a stylus plate having the same width as the depth of the insertion groove of the stylus. Ultra-thin and correctly assembled LCD detection card for inspection. An object of the present invention is to provide a detection card for an LCD inspection, which can prevent the deformation of the L C D image connection end and the substrate connection end by closing the front ends of both sides of the stylus insertion groove. The present invention provides another unit price of goods manufactured by saving material costs. Reduced, and can be applied to more economical LCD high-accumulation pattern LCD inspection probe card. In order to achieve this purpose, the structure of the present invention is an assembly base; a substrate base connected to one side of the bottom surface of the assembly base; and a styli corresponding to the substrate base and connected to the other side of the bottom surface of the upper assembly base. A base connected to the bottom surface of the substrate holder and having a circuit board for driving 1C on the upper surface; provided with a majority of the bottom surface of the stylus holder which is uniformly open upward and recessed downward in a single direction on the upper surface Guide plates with long hole-shaped stylus insertion grooves, alignment grooves formed on the outer end surfaces on both sides of the same horizontal line as the stylus insertion grooves, and one end of the front end side of the stylus insertion grooves penetrating downward: The stylus inserted into the above guide plate is inserted downwards, and both sides are formed to be able to flex and deform upwards and downwards, and an end portion on one side is extended downward, and a guide hole formed through the front end portion of the above guide plate is penetrated downward and is larger than the above. guide

第10頁 581871 五、發明說明(5) 向板的底面向下突出而形成之LCD連接末端、另一側之末 端部從上述導向板的上面向上突出而形成之基板連接末 端、在上述測針座的後端部側上部表面向上突出於密接上 述測針座的側面之勾搭突起的測針板所構成。 為讓本發明之上述目的、特徵、優點能更明顯易懂下 文特舉一較佳實施例,並配合所附圖式,作詳細說明如 下: 圖式之標記說明: 10 組 裝 座 20 基 板 座 3 1 測 針 座 40 電 路 基 板 50 導 向 板 5 1 測 針 插 入 槽 52 導 向 孔 53 校 準 槽 54 緩 衝 構 件 60 測 針 板 70 LCD( 液 晶 顯示器) 較佳實施例之詳細說明 以下,有關本發明的實施形態,請參照附圖,詳細加 以說明。 本發明的特徵在於藉由使導向板具有與習知晶片同一 材料的矽板,同時使其薄型化,在上述矽板中經圖案化而Page 10 581871 V. Description of the invention (5) The LCD connection end formed by protruding downward to the bottom surface of the board, and the other end of the substrate connection end formed by protruding upward from the above guide plate. The upper surface of the rear end portion side of the seat is constituted by a stylus plate which protrudes upward from the hook protrusions closely contacting the side surface of the stylus seat. In order to make the above-mentioned objects, features, and advantages of the present invention more comprehensible and easy to understand, a preferred embodiment is given below, and in accordance with the accompanying drawings, the detailed description is as follows: Marking description of the drawings: 10 Assembly base 20 Substrate base 3 1 Stylus holder 40 Circuit board 50 Guide plate 5 1 Stylus insertion groove 52 Guide hole 53 Calibration groove 54 Cushioning member 60 Stylus plate 70 LCD (liquid crystal display) Detailed description of the preferred embodiment The following is about the embodiment of the present invention Please refer to the drawings for a detailed description. The present invention is characterized in that the guide plate has a silicon plate made of the same material as a conventional wafer and is thinned at the same time.

581871 五、發明說明(6) 得到測針插入 鏡進行辨認的 並防止插入測 曲變形。 本發明如 的一側連接固 槽’且此測針插入槽的深度係形成可 程度,而可以檢驗測針插入槽的加工 針插入槽之測針板的兩末端側之連接 用顯微 程度, 末端撓581871 V. Description of the invention (6) Obtain the stylus insertion mirror for identification and prevent the deformation of the insertion curve. According to the present invention, one side is connected to the solid groove, and the depth of the stylus insertion groove is formed to a degree, and the microscopic degree of the connection between the two end sides of the stylus plate of the processing needle insertion groove of the stylus insertion groove can be checked. Tip scratch

備有 其是 以使 緣性 相> 類 料的 測針 已提 由絕 接固 基板 動I C 測針座3 0 這時,基 測針座3 0 用非絕緣 薄膜是較 這種結構 似的。 但是,本 導向板50 座6〇之變 以下,詳 案之發明 緣材料構 剛針座3 0 定在組裝 另外,測 座20厚的 (圖中未 第1圖所示 定基板座20 而形成與習 板座2 0與測 較基板座2 0 材料,但這 理想的。 與本申請人 ’在組裝座1 0與該組裝座1 〇底面 ,並在與基板座2 0對應另一側具 知類似的結構。 針座3 0是由絕緣材料所構成,尤 更進一步要求其剛性,所以也可 時在測針座3 0的底面接著使用絕 之已提案發明中的探測卡是大致 發明與 薄型化 形。 細加以 那樣整 成,並 與基板 座1 0的 針座3 0 厚度, 示出) 前申,可 說明 體支 連接 座2 〇 底面 從基 而且 的電 睛發明之不同點在於藉由 促進整體上之薄型化,同 ’在本發明中的組裝座 樓探測卡的結構,而基板 固定在組裝座1〇底面。 同樣的是由絕緣材料 與基板座2 0對應的 板座20更向下延長另=側 在基板座20的底面接 路基板40。 者有 將矽材 時防止 具有像 座20是 ,而連 〇 形成較 具備驅It is equipped so that the styli of the same type as the material have been lifted off from the fixed substrate. The IC styli base 30 is now more similar to this structure with a non-insulating film for the base styli base 30. However, the guide plate 50 of this guide plate is changed less than 60, and the detailed invention of the invention is made of a rigid needle holder 30. In addition, the probe base 20 is thick (the base plate 20 is not fixed as shown in the first figure). Compare with the base plate 20 and test the base plate material 20, but this is ideal. With the applicant's bottom surface of the assembly base 10 and the assembly base 10, and the other side corresponding to the base plate 20 The needle holder 30 is made of insulating material, and its rigidity is even more required, so it is also possible to use the probe card in the proposed invention on the bottom surface of the probe holder 30. It is thinly shaped. It is shaped like that, and it has the thickness of the pin base 30 of the base plate 10, as shown in the previous application. It can be explained that the bottom surface of the body support connection base 〇 differs from the base and the electro-eye invention is different. By promoting the overall thinning, the structure of the building detection card is assembled in the present invention, and the substrate is fixed on the bottom surface of the assembly base 10. Similarly, the base plate 20 corresponding to the base plate 20 made of an insulating material is further extended downward and the other side is connected to the base plate 40 on the bottom surface of the base plate 20. For example, when the silicon material is prevented from having an image seat 20, and even the formation of the

第12頁 581871 五、發明說明(7) 因此,電路基板40的一端接著於基板座20的底面,同 B夺在電路基板4 0的底面形成與印刷電路電性連接的電路圖 案。 另一方面,電路基板4 0使用可撓性基板是更理想的。 導向板5 0接著在測針座3 0的底面,同時,位於在基板 座20的正下方。 上述導向板50,如第2圖所示,具備有向寬度方向以 一定間隔設置在向上開放並以規定深度向下凹陷所形成的 多數測針插入槽5 1。 這時,測針插入槽5 1的厚度為能夠藉由顯微鏡確認加 工特性而形成200 /zm〜300 //m之厚度,較佳是形成300 //m 之厚度。 ^ 另外,測針插入槽5 1 ,如第2圖所示,特別是在位於 測針座3 0的前端側之末端部設置有垂直貫通的導向孔5 2。 尤其是導向板5 0的測針插入槽5 1加工成兩端封閉的狀 態,而在兩側形成外側端部,此結構與前申請發明的結構 是不同的。 在這種外側端部的外側面較佳是分別在與各測針插入 槽5 1之同一水平線上垂直設置有可清楚的知道測針插入槽 5 1位置之校準槽5 3。 另外,在導向板50的LCD圖案側前端部的底部具備有 如第2圖所示之緩衝構件5 4,該緩衝構件5 4較佳是稍微從 導向板50的底面進一步向下延長。 作為上述緩衝構件5 4的材料是採用陶瓷線,當然也可Page 12 581871 V. Description of the invention (7) Therefore, one end of the circuit substrate 40 is connected to the bottom surface of the substrate holder 20, and a circuit pattern electrically connected to the printed circuit is formed on the bottom surface of the circuit substrate 40 with B. On the other hand, it is more desirable to use a flexible substrate for the circuit substrate 40. The guide plate 50 is next to the bottom surface of the stylus holder 30, and at the same time, is located directly below the substrate holder 20. As shown in FIG. 2, the guide plate 50 includes a plurality of stylus insertion grooves 51 which are formed at a predetermined interval in the width direction and are opened upward and recessed downward with a predetermined depth. At this time, the thickness of the stylus insertion groove 51 can be formed to a thickness of 200 / zm to 300 // m by confirming the processing characteristics through a microscope, and preferably a thickness of 300 // m. ^ In addition, as shown in FIG. 2, the stylus insertion groove 5 1 is provided with a vertically penetrating guide hole 5 2 at a tip portion located on the front end side of the stylus holder 30. In particular, the stylus insertion groove 51 of the guide plate 50 is processed into a state in which both ends are closed, and outer end portions are formed on both sides. This structure is different from the structure of the previously applied invention. On the outer side surface of such an outer end portion, it is preferable that calibration grooves 53 are provided on the same horizontal lines as the stylus insertion grooves 51, so that the positions of the stylus insertion grooves 51 can be clearly known. In addition, the bottom portion of the front end portion of the LCD pattern side of the guide plate 50 is provided with a cushioning member 54 as shown in FIG. 2, and the cushioning member 54 is preferably extended slightly downward from the bottom surface of the guide plate 50. As the material of the buffer member 54, ceramic wires are used.

第13頁 581871 五、發明說明(8) 以使用鎢金屬線。 另一方面,如習知一樣,導向板50可以只使用兩片厚 度與測針插入槽5 1的深度相同的矽板結合而形成之,但1 以一片具有同一厚度的矽板來製作是較容易的。 測針板6 0插入形成於導向板5 0上的測針插入槽5丨中, 而形成分別電性連接LCD側電路圖案與基板側電路圖案的 結構。 如第3圖所示,測針板6 0是形成兩側能夠撓曲,而在 兩側末端部分別形成L C D連接末端6 1與基板連接末端6 2的 結構。 L C D連接末端6 1是使測針板6 〇的一末端向下延長,藉 由、在導向板6 〇的前端部側貫通測針插入槽5丨的導向孔5 2, 並從導向板5 0的底部進一步向下突出而具備的端子接線部 位。 於疋’各連接末端6 1、6 2側的兩側端部係插入設置在 1,插入槽5 1中,且兩側端部與中央部相比較,使其厚度 變薄而形成能夠上下撓曲變形的厚度是較理想的。 於疋,在測針插入槽5 1中插入的中央部之厚度形成與 測針插入槽5 1相同的厚度。 另一方面’測針板6 〇 —體形成有向上突出而使測針座 3〇的基板座20側的末端緊密連接的上端部,可在測針座30 的側端面下部緊密連接之勾搭突起6 3。 一 尤其是測針板6 0的基板連接末端可以形成如第4 Α圖所 不的結構。但如第4Β圖所示,藉由使從向上突出的部位向Page 13 581871 V. Description of the invention (8) To use tungsten metal wire. On the other hand, as is known, the guide plate 50 may be formed by combining only two silicon plates with the same thickness as the depth of the stylus insertion groove 51, but 1 is more preferably made of one silicon plate with the same thickness. Easy. The stylus plate 60 is inserted into the stylus insertion groove 5 丨 formed on the guide plate 50 to form a structure for electrically connecting the LCD-side circuit pattern and the substrate-side circuit pattern, respectively. As shown in FIG. 3, the stylus plate 60 has a structure capable of being bent on both sides, and an L C D connection end 61 and a substrate connection end 6 2 are formed at the end portions of both sides, respectively. The LCD connection end 61 is extended downward from one end of the stylus plate 60, and passes through the guide hole 5 2 of the stylus insertion groove 5 丨 at the front end side of the guide plate 60, and extends from the guide plate 50. The bottom of the terminal is provided with a terminal connection portion protruding further downward. The ends on the sides of each of the connecting ends 6 1 and 6 2 of Yu 'are inserted into 1 and inserted into the groove 51, and the ends on both sides are made thinner than the central part so that they can flex up and down. The thickness of the bending deformation is ideal. The thickness of the central part inserted into the stylus insertion groove 51 is the same as that of the stylus insertion groove 51. On the other hand, the styli plate 60 is formed with an upper end that protrudes upward to tightly connect the end of the styli base 30 to the end of the base plate 20 side, and a hook protrusion can be tightly connected to the lower end of the side end surface of the styli base 30. 6 3. First, the connection end of the substrate of the stylus board 60 may be formed as shown in FIG. 4A. However, as shown in FIG. 4B,

第14頁 581871 五、發明說明(9) 對應的底部向下延長,則可以進一步的防止測針插入槽5 i 内的剖面積擴張與撓曲。 而且,如第1圖所示,與測針座3 〇的測針板6 〇緊密連 接的底面,在其一部份形成凹陷,在測針板6 0製造時,在 移除連接測針板6 0之間的連接接點6 4後,而在留下來的部 分位置在於上述凹陷空間3 1内填充環氧樹脂時,可以固定 出堅固的測針板6 0。 由上述構成的探測卡,在導向板5 〇中由上部分別使測 針板6 0向下插入測針插入槽5 〇中,在這種組裝狀態下,從 導向板5 0的上部利用環氧樹脂接合測針座3 〇。 這時,測針座3 0在與其上側的組裝座丨〇的一側緊密結 合、的狀態下、在另一側中結合基板座、同時在基板座2 〇的 底面上接著電路基板40。 因此’若使插入測針板6 〇的導向板5 〇接合在測針座3 0 上’則在電路基板40上所形成的電路圖案會成為各自連接 測針座6 0的基板連接末端6 2的狀態。 另外’由於基板連接末端6 2側之導向板5 〇的末端部是 封閉的狀態,所以當導向板5 〇與測針座3 〇結合時,測針板 60的基板連接末端62正確地連接至電路基板4〇的圖案上, 在與測針板5 0的測針插入槽5 1在同一水平線上的外側面形 成的校準槽5 3可觀察到並正確地設定結合位置。 而且’在使用這種方法組裝的探測卡對LCI)的電氣特 性進行檢驗時,如第5圖所示,測針板6〇的LCD連接末端61 正確地連接至L C D 7 0的電路圖案上,在探測卡5 〇的L c D 7 〇側Page 14 581871 V. Description of the invention (9) The corresponding bottom is extended downward, which can further prevent the cross-sectional area of the stylus from being inserted into the groove 5 i from expanding and flexing. In addition, as shown in FIG. 1, the bottom surface which is tightly connected to the styli plate 60 of the styli base 30 is formed with a recess in a part thereof. When the styli plate 60 is manufactured, the connecting styli plate is removed. After connecting the contacts 64 between 60, the remaining part is located in the above-mentioned recessed space 31 when epoxy resin is filled, so that a solid stylus board 60 can be fixed. In the probe card configured as described above, the stylus plate 60 is inserted downwardly into the stylus insertion groove 50 from the upper part of the guide plate 50. In this assembled state, a ring is used from the upper part of the guide plate 50. Oxygen resin styli holder 30. At this time, the stylus base 30 is tightly coupled to one side of the upper assembly base, and the substrate base is bonded to the other side, and the circuit board 40 is bonded to the bottom surface of the base base 20 at the same time. Therefore, if the guide plate 50 inserted into the styli plate 60 is joined to the styli base 30, the circuit pattern formed on the circuit board 40 will become the substrate connection end 6 of the styli base 60, respectively. status. In addition, since the end portion of the guide plate 50 on the substrate connection end 62 side is closed, when the guide plate 50 is combined with the stylus holder 30, the substrate connection end 62 of the stylus plate 60 is correctly connected to On the pattern of the circuit board 40, a calibration groove 53 formed on the outer surface of the stylus insertion groove 51 of the stylus board 50 on the same horizontal line can be observed and the joint position can be set correctly. And 'when using the probe card assembled in this way to check the electrical characteristics of the LCI), as shown in Figure 5, the LCD connection end 61 of the stylus board 60 is correctly connected to the circuit pattern of the LCD 70, On the L c D 7 〇 side of the detection card 5 〇

第15頁 581871 五 發明說明(10) —-- 則端部的最外側面,也如上述那樣,藉由與剛 在同一水平線上所形成的校準槽5 3而能夠連 2入槽5 1 置。 义條正確的位 尤其是在導向板5 0的前端部側的外側面的 的緩衝部材54在LCD70製造時,因為在圖案側擊-:卩所具備 形成勾搭突起7 1的情況下,可以防止與矽材料、的^不良而 直接接觸,而能夠防止因導向板50的破損所 =板5 〇 的損傷。 座玍的採測卡 另外,在LCD70的勾搭突起71形成過大的 T=LCD接線端部61與1^〇的電路圖案間的連接,/ ’曰 具有對LCD70進行產品不良檢測的功能。 同日^也 而且,本發明的最顯著的特徵是:藉由使在暮 插::彳的測針插入槽51的深度形成用顯微鏡可ί二ΐ: 插入:51的加工性的深度,^夠進行正確檢:辨,Page 15 581871 Fifth invention description (10) --- the outermost side surface of the end can also be connected to the groove 5 1 by the calibration groove 5 3 formed on the same horizontal line as above. . When the correct position of the stripe, especially the buffer member 54 on the outer side of the front end side of the guide plate 50, is manufactured in the LCD 70, it is possible to prevent the contact with The silicon material is not in direct contact with each other, and it is possible to prevent damage to the plate 50 caused by the damage of the guide plate 50. Sampling test card In addition, the overhanging protrusion 71 of the LCD 70 forms an excessively large connection between the T = LCD terminal 61 and the circuit pattern of 1 ^ 0, and has a function of detecting the product defect of the LCD 70. On the same day, the most significant feature of the present invention is that by using a microscope for forming the depth of the stylus insertion groove 51 inserted at dusk :::, the depth of the workability of the insertion: 51 is sufficient. Perform the correct inspection: identify,

5〇〇 ,在前申請發明十是藉由使測針插入槽在A :在使;;ΓΓ度’而無法正確進行加工狀態以: 便在使測針板插入的狀態下, 饿紛,即 法均勻的排列之情況。這是因11有測針板的插入狀態無 與個接線端間的接觸不良所產:J J】路及LCD電路圖案 這種電路圖案的接觸不良防仃檢驗,目此就可使 因此,藉由本發明的結椹未Μ ° 傷,而進—步的延長使料t,可利用防止探測卡的損 的電特性,可使檢驗的可靠:太m 士穩定的維持lcd $大幅度提咼。500, the previous application for the tenth invention is that the stylus is inserted into the groove at A: Γ; the degree of ΓΓ cannot be processed correctly to: In the state where the stylus plate is inserted, Method of uniform arrangement. This is caused by the contact state between the stylus board and the terminals due to the insertion state of the stylus board: JJ] circuit and LCD circuit pattern. The circuit pattern is not good for contact inspection. The result of the invention is not injured, and the further extension of the material t can use the electrical characteristics to prevent the damage of the detection card, which can make the test reliable: the Tm stably maintains the LCD $ greatly.

581871 五、發明說明(11) 如上所述,本發明由於具有藉由使探測卡5 0與插入該 探測卡5 0上的測針板6 0的厚度薄型化,因此,在促使整體 薄型化的同時,可以節省材料費用而進行經濟的製作,並 且藉由使測針插入槽5 1的兩側端部形成封閉的結構,所以 能夠防止測針板6 0的兩側末端所形成的連接末端6 1、6 2撓 曲變形,而達到可與電路圖案穩定連接的效果。 而且,本發明藉由使測針插入槽5 1的深度形成能夠以 顯微鏡進行加工狀態的確認的程度,因為可使測針板6 0的 均勻排列並安定的連接電連接部位,而可以達到所謂使檢 驗可靠性進一步提高的效果。 尤其是本發明藉由事先預防探測卡與LCD電路圖案相 連接時,與矽材料導向板5 0的直接接觸,因此可防止損傷 Pf止,對產品可靠性與作業效率性可以達到大幅度提高的 效果。 雖然本發明已以一較佳實施例揭露如上,然其並非用 以限定本發明,任何熟習此技藝者,在不脫離本發明之精 神和範圍内,當可作些許之更動與潤飾,因此本發明之保 護範圍當視後附之申請專利範圍所界定者為準。581871 V. Description of the invention (11) As described above, since the present invention has a thinning of the thickness of the probe card 50 and the stylus board 60 inserted in the probe card 50, the overall thickness is promoted. At the same time, the material cost can be saved for economical production, and the closed ends of both sides of the stylus insertion groove 51 can be formed, so that the connecting ends 6 formed by the both ends of the stylus plate 60 can be prevented. 1, 6 2 flex and deform to achieve the effect of stable connection with the circuit pattern. In addition, the present invention allows the depth of the stylus insertion groove 51 to be set to a degree capable of confirming the processing state with a microscope, because the stylus plate 60 can be uniformly arranged and connected stably to the electrical connection portion, so that the so-called The effect of further improving inspection reliability. In particular, the present invention prevents direct contact with the silicon material guide plate 50 when the detection card is connected to the LCD circuit pattern in advance, so it can prevent damage to the Pf, and can greatly improve product reliability and work efficiency. effect. Although the present invention has been disclosed as above with a preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art can make some changes and retouch without departing from the spirit and scope of the present invention. The scope of protection of the invention shall be determined by the scope of the attached patent application.

581871 圖式簡單說明 第1圖為繪示本發明的LCD檢驗用探測卡的側斷面圖。 第2圖為繪示本發明的導向板一部分的斜視圖。 第3圖為表示採用本發明測針板斜視圖。 第4 A圖與第4 B圖為繪示本發明的測針板的基板連接末 端的側斷面圖。 第5圖為繪示本發明的使用狀態圖。 第6圖為繪示習知L C D檢驗用探測卡的側斷面圖。581871 Brief Description of Drawings Fig. 1 is a side sectional view showing a detection card for an LCD inspection of the present invention. Fig. 2 is a perspective view showing a part of the guide plate of the present invention. Fig. 3 is a perspective view showing a stylus plate using the present invention. Fig. 4A and Fig. 4B are side sectional views showing the substrate connection ends of the styli plate of the present invention. FIG. 5 is a diagram showing a use state of the present invention. FIG. 6 is a side cross-sectional view showing a conventional detection card for LC detection.

第18頁Page 18

Claims (1)

581871 六、申請專利範圍 1. 一種LCD檢驗用探測卡,其特徵在於具備有: 一組裝座; 一基板座,連接固定在該組裝座的底面一側; 一測針座,連接固定在與該基板座對應的該組裝座底 面之另一側; 一電路基板,接著在該基板座的底面,且上表面接著 有驅動I C ; 一導向板,具備有接著在該測針座的底面,且上表面 在單一方向均勻的形成向上敞開並向下凹陷的多數個長孔 測針插入槽,在與該些測針插入槽同一水平線上的兩側的 外側端面上形成之一校準槽,且該些測針插入槽的前端側 的一端部向下貫通;以及 一測針板,具備有向下插入至上述導向板的測針插入 槽中,且兩側形成能夠上下撓曲變形,一側的末端部向下 延長而通過在該導向板的前端部向下貫通所形成的一導向 孔並較該導向板的底面向下突出而形成之一 LCD連接末 端,另一側末端部從該導向板的上面向上突出而形成之一 基板連接末端與在該測針板的後端部側上部表面向上突出 於密接該測針板的側面的一勾搭突起所構成。 2 .如申請專利範圍第1項所述之LCD檢驗用探測卡,其 特徵在於: 該測針板與該導向板緊密連接的底面的一部分形成向 上凹陷,且該測針板上之其一部分收容在所形成的連接 點,並利用充電的環氧樹脂結合在一起。581871 VI. Patent application scope 1. A detection card for LCD inspection, which is characterized by having: an assembly base; a base plate base connected and fixed on the bottom side of the assembly base; a styli base connected and fixed to the base A base plate corresponding to the other side of the bottom surface of the assembly base; a circuit board, then the bottom surface of the base plate, and a driving IC on the upper surface; a guide plate, provided with the bottom surface of the styli base, and The surface is uniformly formed in a single direction with a plurality of long-hole stylus insertion grooves that are open upward and recessed downward, and an alignment groove is formed on the outer end surfaces of both sides of the same horizontal line as the stylus insertion grooves, and these A tip end of the stylus insertion groove penetrates downward; and a stylus plate having a stylus insertion groove inserted downwardly into the guide plate, and both ends are formed to be flexibly deformable up and down, and an end on one side is formed. One of the LCD connection ends is formed by extending downwardly through a guide hole formed at the front end portion of the guide plate and protruding downward from the bottom surface of the guide plate, and the other end Projecting upwardly from the upper surface of the guide plate is formed with one end connected to the substrate in close contact with upwardly projecting side plates of the stylus at the upper side surface of the rear end portion of the stylus of a hooking plate projection formed. 2. The detection card for LCD inspection according to item 1 of the scope of patent application, characterized in that: a part of the bottom surface of the stylus plate tightly connected to the guide plate forms an upward depression, and a part of the stylus plate accommodates The formed connection points are bonded together using a charged epoxy. 第19頁 581871 六、申請專利範圍 3 .如申請專利範圍第1項所述之LCD檢驗用探測卡,其 特徵在於:在該導向板上,在前端側外周表面的下部具備 有一緩衝構件。 4 .如申請專利範圍第3項所述之LCD檢驗用探測卡,其 特徵在於:該緩衝構件由鎢金屬線構成。 5 .如申請專利範圍第3項所述之LCD檢驗用探測卡,其 特徵在於:該緩衝構件由陶瓷構成。 6 .如申請專利範圍第1項所述之L C D檢驗用探測卡, 其特徵在於:該導向板的該些測針插入槽形成2 0 0 // m〜 3 0 0 // m的深度。 1Page 19 581871 VI. Patent application scope 3. The detection card for LCD inspection according to item 1 of the patent application scope, characterized in that: on the guide plate, a buffer member is provided at the lower part of the outer peripheral surface on the front side. 4. The detection card for LCD inspection according to item 3 of the scope of patent application, wherein the buffer member is made of tungsten metal wire. 5. The detection card for LCD inspection according to item 3 of the scope of patent application, wherein the buffer member is made of ceramic. 6. The detection card for L C D inspection according to item 1 of the scope of patent application, characterized in that the stylus insertion grooves of the guide plate form a depth of 2 0 0 // m to 3 0 0 // m. 1 11 第20頁Page 20
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KR100599767B1 (en) * 2004-06-07 2006-07-13 (주)유비프리시젼 a probe and an assembly body of probe with using the above probe
TWI281026B (en) * 2004-12-30 2007-05-11 De & T Co Ltd Needle assembly of probe unit for testing flat display panel
KR100684045B1 (en) * 2005-08-08 2007-02-16 주식회사 프로텍 Probe assembly for a tester of the liquid crystal display
CN100424514C (en) * 2005-08-09 2008-10-08 陈文祺 Semiconductor test plate structure for preventing noise interference
JP2008180716A (en) * 2007-01-23 2008-08-07 Nictech Co Ltd Probe, and probe card therewith
KR100883269B1 (en) * 2008-02-14 2009-02-10 (주) 루켄테크놀러지스 Low cost lcd inspection system of probe unit
KR100872966B1 (en) * 2008-04-15 2008-12-08 유명자 A device for testing for display panel
JP5396104B2 (en) * 2009-03-05 2014-01-22 株式会社日本マイクロニクス Probe assembly
KR101123887B1 (en) * 2009-11-11 2012-03-23 주식회사 코디에스 Probe unit
CN102103152A (en) * 2009-12-22 2011-06-22 沋博普利斯金股份有限公司 Integrated probe module easy to use for entire liquid crystal display (LCD) detection equipment
CN102103150B (en) * 2009-12-22 2015-03-25 Klt Support needle and probe provided with support needle
IT201600084921A1 (en) * 2016-08-11 2018-02-11 Technoprobe Spa Contact probe and relative measuring head of a test device for electronic devices

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