TW564791U - A parallel six degrees-of-freedom nano-positioning stage - Google Patents

A parallel six degrees-of-freedom nano-positioning stage

Info

Publication number
TW564791U
TW564791U TW91221038U TW91221038U TW564791U TW 564791 U TW564791 U TW 564791U TW 91221038 U TW91221038 U TW 91221038U TW 91221038 U TW91221038 U TW 91221038U TW 564791 U TW564791 U TW 564791U
Authority
TW
Taiwan
Prior art keywords
degrees
parallel
positioning stage
freedom nano
freedom
Prior art date
Application number
TW91221038U
Other languages
Chinese (zh)
Inventor
Suo-Hung Jang
Dung-Li Wu
Original Assignee
Suo-Hung Jang
Dung-Li Wu
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suo-Hung Jang, Dung-Li Wu filed Critical Suo-Hung Jang
Priority to TW91221038U priority Critical patent/TW564791U/en
Publication of TW564791U publication Critical patent/TW564791U/en

Links

TW91221038U 2002-12-25 2002-12-25 A parallel six degrees-of-freedom nano-positioning stage TW564791U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW91221038U TW564791U (en) 2002-12-25 2002-12-25 A parallel six degrees-of-freedom nano-positioning stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW91221038U TW564791U (en) 2002-12-25 2002-12-25 A parallel six degrees-of-freedom nano-positioning stage

Publications (1)

Publication Number Publication Date
TW564791U true TW564791U (en) 2003-12-01

Family

ID=32503855

Family Applications (1)

Application Number Title Priority Date Filing Date
TW91221038U TW564791U (en) 2002-12-25 2002-12-25 A parallel six degrees-of-freedom nano-positioning stage

Country Status (1)

Country Link
TW (1) TW564791U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110794546A (en) * 2019-11-24 2020-02-14 北京长峰科威光电技术有限公司 Six-axis parallel piezoelectric actuation mirror frame posture automatic adjusting system and method
CN112192544A (en) * 2020-10-10 2021-01-08 金陵科技学院 Two-degree-of-freedom micro-motion platform device based on material expansion with heat and contraction with cold principle

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110794546A (en) * 2019-11-24 2020-02-14 北京长峰科威光电技术有限公司 Six-axis parallel piezoelectric actuation mirror frame posture automatic adjusting system and method
CN112192544A (en) * 2020-10-10 2021-01-08 金陵科技学院 Two-degree-of-freedom micro-motion platform device based on material expansion with heat and contraction with cold principle
CN112192544B (en) * 2020-10-10 2023-06-06 金陵科技学院 Two-degree-of-freedom micro-motion platform device based on material expansion and contraction principle

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004
MM4K Annulment or lapse of a utility model due to non-payment of fees