TW564791U - A parallel six degrees-of-freedom nano-positioning stage - Google Patents
A parallel six degrees-of-freedom nano-positioning stageInfo
- Publication number
- TW564791U TW564791U TW91221038U TW91221038U TW564791U TW 564791 U TW564791 U TW 564791U TW 91221038 U TW91221038 U TW 91221038U TW 91221038 U TW91221038 U TW 91221038U TW 564791 U TW564791 U TW 564791U
- Authority
- TW
- Taiwan
- Prior art keywords
- degrees
- parallel
- positioning stage
- freedom nano
- freedom
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW91221038U TW564791U (en) | 2002-12-25 | 2002-12-25 | A parallel six degrees-of-freedom nano-positioning stage |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW91221038U TW564791U (en) | 2002-12-25 | 2002-12-25 | A parallel six degrees-of-freedom nano-positioning stage |
Publications (1)
Publication Number | Publication Date |
---|---|
TW564791U true TW564791U (en) | 2003-12-01 |
Family
ID=32503855
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW91221038U TW564791U (en) | 2002-12-25 | 2002-12-25 | A parallel six degrees-of-freedom nano-positioning stage |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW564791U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110794546A (en) * | 2019-11-24 | 2020-02-14 | 北京长峰科威光电技术有限公司 | Six-axis parallel piezoelectric actuation mirror frame posture automatic adjusting system and method |
CN112192544A (en) * | 2020-10-10 | 2021-01-08 | 金陵科技学院 | Two-degree-of-freedom micro-motion platform device based on material expansion with heat and contraction with cold principle |
-
2002
- 2002-12-25 TW TW91221038U patent/TW564791U/en not_active IP Right Cessation
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110794546A (en) * | 2019-11-24 | 2020-02-14 | 北京长峰科威光电技术有限公司 | Six-axis parallel piezoelectric actuation mirror frame posture automatic adjusting system and method |
CN112192544A (en) * | 2020-10-10 | 2021-01-08 | 金陵科技学院 | Two-degree-of-freedom micro-motion platform device based on material expansion with heat and contraction with cold principle |
CN112192544B (en) * | 2020-10-10 | 2023-06-06 | 金陵科技学院 | Two-degree-of-freedom micro-motion platform device based on material expansion and contraction principle |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GD4K | Issue of patent certificate for granted utility model filed before june 30, 2004 | ||
MM4K | Annulment or lapse of a utility model due to non-payment of fees |