546396 A7 經濟部智慧財產局員工消費合作社印製 五、發明說明（1 ) [技術^領域] 本發明係有關經捆包的高純度靶 以經捆包的狀態保管•搬運， ’、 (^ ·、#“ 後從捆包取出並用於濺鍍 (sputtemig)#作，其濺鍍開始 ^ ^ L 便用時之女疋性以及耐久特 性均不會劣化的經捆包之高純度乾體。[背景技術] 近年來’減鍍廣泛應用於半導， 干等體70件、積體電路、扁 平面板顯示器（FPD)等之顯示元件、料媒體（輕哪 meiium)等之製造方面。為保管•搬運起見1於此㈣ 的咼純度靶體’一般係經捆包者。然而，由於捆包工作， 而有將高純度乾體用於濺鍍之F夕卜4 瑕 < 際之性施，特別是使用開始 時之安定性及耐久特性會劣化的問題。 另一方面，由於半導體元件、積體電路、FPD等之顯 示元件、儲存媒體等之需求之增加及其低價化，高純度靶 體之捆包係不能不做的事宜，因而急需發展一種即使經捆 包高純度靶體，仍不會致使高純度靶體用於濺鍍之際的性 能，特別是使用開始時之安定性及耐久特性劣化的捆包技 術。 本發明人等’為解決上述問題而銳意研究之結果，發 現藉由使用具有特定表面狀態的薄膜進行捆包，即可獲得 從捆包取出並用於濺鑛之際的性能，特別是使用開始時之 安定性及耐久特性均不會劣化的經捆包之高純度靶體，而 完成本發明。[發明揭示] 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 1 311887 (請先閱讀背面之注意事項再填寫本頁) 裝546396 A7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Description of the Invention (1) [Technical Field] The present invention relates to the storage and transportation of packed high-purity targets in a packed state, ', (^ · ， # “After being taken out from the bale and used for sputtering (sputtemig) #, the sputtering begins ^ ^ L The baled high-purity dry body that will not deteriorate during the use of the son-in-law and durability characteristics. [ [Background Art] In recent years, 'reduction plating has been widely used in the manufacture of semiconducting, 70-piece semiconductors, integrated circuits, display elements such as flat panel displays (FPDs), and materials (light meiium). For storage • For transporting purposes, the "purity targets" here are generally bundled. However, due to the packaging work, there are some problems with the use of high-purity dry bodies for sputtering. In particular, the stability and durability characteristics at the beginning of use may be deteriorated. On the other hand, due to the increased demand for semiconductor elements, integrated circuits, FPD and other display elements, storage media, etc., and their low cost, high purity The packing of the target is something that cannot be done, so There is an urgent need to develop a packaging technology that does not cause the performance of the high-purity target to be used for sputtering even if it is packaged, especially the stability and durability characteristics at the beginning of use. The present inventors, etc. 'As a result of intensive research to solve the above problems, it was found that by using a film with a specific surface state for packaging, the performance when taken out of the package and used for splattering, especially the stability at the beginning of use and the The present invention has been completed with a packaged high-purity target that does not deteriorate in durability characteristics. [Invention of the Invention] This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 1 311887 (Please read first (Notes on the back then fill out this page)
-ϋ I I ----訂--------- #· 546396 A7 --------— 五、發明說明（2 ) ~--- 本發明，係使薄臈之至少一面成為具有不存在直獲 2.〇_以上之脫離録子的表面，制㈣膜並以該表面 置於局純度把體侧進行捆包為特徵的經拥包的高純度數 體。 又，本發明，係使薄膜之至少一面成為具有不存在直 徑2_Mm以上之脫離性粒子的表面，且該表面所存在的直 徑〇.2μΐη以上之脫離性粒子數為每lcm2薄膜表面1〇〇〇個 以下，使用該薄膜並以該表面置於高純度把體侧進行拥包 為特徵的經捆包之高純度靶體。 本發明中，脫離性粒子，係指使用薄膜捆包高純度靶 體時，其靶體側薄膜表面所存在的粒子被轉於因捆包而接 觸的高純度靶體表面時之該粒子之意。作為此類脫離性粒 子之簡便的判定方法，有如下方法。例如，袋尺寸 150mmxl67mm、内表面積500cm2之袋中裝入25〇ml超純 水，振盪15秒鐘。其後靜止2〇分鐘後，以Lpc(液中粒子 計數器）側定5ml超純水中之預定尺寸範圍之粒子數，並換 鼻為薄臈表面每lcm2之數值。 又’本發明中，高純度靶體包含高純度IT〇(銦鍚氧化 物）靶體、高純度陶瓷系靶體、高純度金屬系（含合金）靶體 等。 [圖面之簡單說明] 第1圖為製造本發明所用薄膜的吹塑（infiation)成型 裝置之概略圖。 第2圖為第1圖所示吹塑成型裝置機器中之模頭（die) -·-裳 (請先閱讀背面之注意事項再填寫本頁) 訂---------# 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格⑵〇 χ 297公餐） 2 311887 546396 A7 Β7__ 、發明說明（3 ) 之剖面圖 〇 [元件符號 :說明] 1 擠出機 2 螺旋 3 環狀模頭 4 管 5 圓筒狀小軟管 6 冷卻用空氣吹入裝置 7 冷卻線 8 導板 9 夾輥 10 薄膜 11 捲取裝置 12 聚合物入口 13 空氣入口 [實施本發明之最佳形態] 在本發明之經捆包之高純度靶體中，係使用在薄膜之 至少一面具有不存在直徑2〇μιη以上之脫離性粒子的表面 的薄臈，或使用在薄膜之至少一面具有不存在直徑厶卟❿ 以上之脫離性粒子的表面且該表面所存在的直徑〇^m以 上之脫離性粒子數為薄臈表面每lcm21〇〇〇個以下的薄 膜’並將該表面置於高純度靶體侧進行捆包者。 在經捆包的狀態下，成為高純度靶體側的薄膜表面（以 下簡稱把體側薄膜表面）上存在直徑2·0μηι以上之脫離性 粒子時，或如靶體側表面所存在的直徑〇2μηι以上之脫離 性粒子超過薄臈表面每lcm21〇〇〇個時，其靶體侧薄臈表 面所存在的脫離性粒子將被轉印於因捆包而接觸的高純度 靶體表面，而這些被轉錄的直徑2 〇μηι以上之粒子或直徑 0·2μηι以上2μηι以下之多數個粒子，使將高純度靶體用於 錢鍍時之性能，特別是使用開始時之安定性及耐久特性劣 尺度適用中國國家標準（CNS)A4在_格⑽χ视公爱） 3 3 Μ----------------- (請先閱讀背面之注意事項再填寫本頁) #_ 546396 經濟部智慧財產局員工消費合作社印製 311887 A7 B7 五、發明說明（4 ) 化- 在此’對存在於與靶體側或相反側之薄膜表面的脫離 性粒子之大小、數目雖不予特別規定，惟必須為捆包作業 等之際不致污染靶體側薄膜表面的程度的乾淨度。例如與 乾體侧成相反侧之薄膜表面上較佳為不存在直徑2 〇μιη以 上之脫離性粒子且該表面所存在的直徑〇 2μηι以上之脫離 性粒子數為薄臈表面每lcm21〇〇〇〇個以下。當然，與數體 側成相反側之薄膜表面最好為與靶體侧薄膜表面具有同程 度的乾淨度。 本發明所使用的薄膜，係將高純度樹脂組成物經由吹 塑成型、注塑成型、T模頭成型、擠出成型、中空成型、 熱成型等方法作成薄膜而製造之。又，可將此等方法所製 得的薄膜複數張貼合或設置鎳等金屬蒸鍍層以製成多層構 造者。接著，依吹塑成型的薄膜製造方法說明如下，惟本 發明係不被此方法所限定者。 第1圖係為製造本發明所用薄膜之吹塑成型裝置之概 略圖。擠出機1内藏有螺旋2而連結於環狀模頭3。環狀 模頭3之空氣吸引口係介由管4而連接於空氣壓縮機（未圖 示）’管4上裝配有空氣過滤器。高純度樹脂組成物係被擠 出機1所熔融，由螺旋2送至環狀模頭3,被與空氣一起 從環狀模頭擠出以形成圓筒狀小軟管（閥）5。此圓筒狀小軟 管5係在從環狀模頭3稍微離開的位置被來自冷卻用空氣 吹入裝置6的空氣所冷卻。7係冷卻線。圓筒狀小軟管$ 係由導板8所引導而到達夾輥（nipr〇1i)9,通過夾輥9的薄 「纸張f度適用t國國規格⑵〇 χ撕公髮- ------------^--------訂---------· (請先閱讀背面之注意事項再填寫本頁) 546396 Α7 ---- 五、發明說明（5 ) 膜1 〇將被捲取裝置11所捲取。 第2圖係第1圖所示的環狀模 碉j之4面圖，高绌成 樹脂組成物（聚合物）係從聚合物入口 ] 9 Q、、毛度 入％狀模頭2 另一方面，空氣則從空氣入口 13進入環狀模頭3。 ’ 為製造本發明所使用的薄膜，如上述之方戈 ★ 吹塑成型製造時，作為吹入圓筒狀小款營 二依薄膜 子人& 3内的空氣，必 須使用經空氣過濾器所濾過的清淨空氣。使來自空氣 機的空氣通過空氣過滤器，成為空氣清淨度6級==^2 淨空氣。在此所稱的空氣清淨度係根據JIS B 992〇所2二 者。藉由如此的清淨空氣，幾乎看不出對圓筒狀薄膜<内= 有害的大小，有害的數量之脫離性粒子之附著。 在此，圓筒狀薄膜之内面所附著的脫離性粒子之大 小 '數量之測定，係可依前述的簡便方法實施之。亦即， 袋尺寸150mm XI 67mm、内表面積500cm2之袋中放入超純 水250m卜搖動15秒鐘。其後靜置20分鐘，以LPC(液中 粒子計算器）測定5ml中預定尺寸範圍之粒子數並換算為 每lcm2薄膜面積的數值。 又，作為高純度靶體之使用開始時之安定性之指標， 係採用從使用開始時起1分鐘内所發生的擊穿（arcing，異 常放電）之次數。再者，作為高純度靶體壽命之指標，係採 用從使用開始之1分鐘後擊穿累積數到達50次止的累積施 加電力量。 本發明中，由於使用在薄膜之至少一個具有不存在直 徑2·0μιη以上之脫離性粒子的表面的薄膜，或使用在薄膜 ------------裝 (請先閱讀背面之注意事項再填寫本頁) ----訂--------- #· 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 5 311887 546396 經 濟 部 智 慧 財 產 局 員 工 消 費 合 作 社 印 製 A7 五、發明說明（6 ) 之至少一面具有不存在直徑2 ·Ομηι以上之脫離性粒子的表 面I該表面所存在的直徑0·2μπι以上之脫離性粒子數為每 lcm2薄膜面積1000個以下的薄膜，並將該表面置於高純 度乾體側以捆包之故，幾乎看不出從捆包用薄膜對高純度 靶體表面的有害大小 '有害數目之粒子之轉印。因而，即 使將高純度靶體以經捆包的狀態保管•搬運，其後從捆包 取出而用於濺鍍，仍可實現在濺鍍的使用開始時之安定性 及財久特性均未劣化的經捆包的高純度乾體。 實施例1 使用第1圖所示的薄膜吹塑成型裝置，使用以空氣過 慮器所過滤的’根據JIS B 9920的空氣清淨度為6級以下 之乾淨空氣作為吹入圓筒狀小軟管5内的空氣，製作乾淨 的聚乙稀袋。依上述的方法測定附著於此袋内面及外面的 脫離性粒子之預定尺寸範圍之粒子數。未能檢出直徑 2·0 μπι以上之粒子。又，直徑〇 2pm以上2.〇pm以下之粒 子數在袋内面為每lcm2薄膜面積有6〇〇個，在袋外面為每 1cm2薄膜面積有3000個。 使用由以厚度為約20μπι之聚氣化亞乙烯所塗覆的延 伸聚丙稀薄膜層、及厚度為約2〇μηι之聚乙婦薄膜層、以 及厚度為約60 μιη之直鏈狀低密度聚乙烯薄膜而成的三層 薄骐，製備使直鏈狀低密度聚乙烯薄膜層能成為袋内面之 方式製袋而得的以往技術之三層薄膜袋。依上述的方法測 定附著於其袋之内面及外面的脫離性粒子之預定尺寸範圍 之教子數。直徑2·0μπι以上之粒子數在袋内面及外面均為 本紙張尺度適时國國家標準（CNS)A4規格⑽χ 297公髮） 〇 3II88/ ------------裝--------訂---------· (請先閱讀背面之注意事項再填寫本頁) 546396 A7-ϋ II ---- Order --------- # · 546396 A7 ------------ V. Description of the Invention (2) ~ --- The present invention is to make at least One side becomes a high-purity number body which has a characteristic of having a surface free of 2.00+ or more detached records, forming a diaphragm, and packaging the surface with the local purity and packaging the body side. In the present invention, at least one side of the film is a surface having no detachable particles having a diameter of 2_Mm or more, and the number of detachable particles having a diameter of 0.2 μΐη or more existing on the surface is 1,000 per 1 cm2 of the film surface. Below, a packed high-purity target using the film and characterized in that the surface is placed on the body side for high-purity wrapping. In the present invention, detachable particles mean that when a high-purity target is packaged with a thin film, the particles existing on the surface of the target-side film are transferred to the surface of the high-purity target contacted by the packaging. . As a simple method for determining such detachable particles, there are the following methods. For example, a bag with a bag size of 150 mm x 1 67 mm and an internal surface area of 500 cm2 is filled with 25 ml of ultrapure water and shaken for 15 seconds. After 20 minutes of inactivity, the number of particles in a predetermined size range in 5 ml of ultrapure water was determined by Lpc (particle counter in liquid), and the nose was changed to a value of 1 cm2 on the surface of the thin palate. Further, in the present invention, the high-purity target includes a high-purity IT0 (indium osmium oxide) target, a high-purity ceramic-based target, a high-purity metal-based (alloy-containing) target, and the like. [Brief description of the drawings] Fig. 1 is a schematic view of an inflation molding apparatus for manufacturing a film used in the present invention. Figure 2 is the die in the blow molding machine shown in Figure 1-· -Shang (Please read the precautions on the back before filling this page) Order --------- # Economy Printed by the Ministry of Intellectual Property Bureau's Consumer Cooperatives. The paper size is applicable to the Chinese National Standard (CNS) A4 specifications ⑵〇χ 297 public meals. 2 311887 546396 A7 Β7__, the sectional view of the invention description (3) 〇 [component symbol: description] 1 Extruder 2 Spiral 3 Ring die 4 Tube 5 Small cylindrical tube 6 Air blowing device for cooling 7 Cooling line 8 Guide plate 9 Pinch roller 10 Film 11 Winding device 12 Polymer inlet 13 Air inlet [Implementation The best form of the present invention] In the packaged high-purity target of the present invention, a thin sheet having a surface on which at least one side of the film does not have detachable particles having a diameter of 20 μm or more is used, or it is used in a film At least one side has a surface on which no detachable particles having a diameter of 厶 or more are present, and the number of detachable particles having a diameter of ^^ m or more on the surface is a thin film having a thickness of 210,000 or less per lcm of the surface. High purity target Packing the person. In the state of packing, when there are detachable particles with a diameter of 2.0 μm or more on the surface of the thin film side (hereinafter referred to as the surface of the thin film body) that becomes a high-purity target, or the diameter existing on the surface of the target side. When the number of detachable particles of 2 μηι or more exceeds 210,000 per lcm of the surface of the thin cymbal, the detachable particles present on the surface of the thin cymbal on the target side will be transferred to the surface of the high-purity target contacted by the packing, Transcribed particles with a diameter of 2 μm or more or a number of particles with a diameter of 0.2 μm or more and 2 μm or less make the performance of high-purity targets for coin plating, especially the poor stability and durability characteristics at the beginning of use. Applicable to China National Standard (CNS) A4 in _ Grid ⑽ Seeing public love) 3 3 Μ ----------------- (Please read the precautions on the back before filling this page) # _ 546396 Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Cooperatives 311887 A7 B7 V. Description of the Invention (4)-Here, 'the size and number of detachable particles that exist on the surface of the film on the opposite side of the target body are not Special provisions, but only for packing operations Cleanliness to the extent that it does not contaminate the surface of the target-side film. For example, on the surface of the film on the side opposite to the dry body side, it is preferable that no detachable particles having a diameter of 20 μm or more exist and the number of detachable particles having a diameter of 2 μm or more on the surface is 21,000 per lcm of the thin surface. 〇 or less. Of course, it is preferable that the surface of the film on the side opposite to the number body side has the same degree of cleanliness as the surface of the film on the target side. The film used in the present invention is manufactured by forming a high-purity resin composition into a film through a method such as blow molding, injection molding, T-die molding, extrusion molding, hollow molding, and thermoforming. In addition, a plurality of thin films produced by these methods can be laminated or provided with a metal vapor-deposited layer such as nickel to form a multilayer structure. Next, a method for manufacturing a film by blow molding is described below, but the present invention is not limited by this method. Fig. 1 is a schematic view of a blow molding apparatus for manufacturing a film used in the present invention. The extruder 1 has a screw 2 therein and is connected to a ring die 3. The air suction port of the annular die 3 is connected to an air compressor (not shown) through a pipe 4 and the pipe 4 is equipped with an air filter. The high-purity resin composition is melted by the extruder 1, and is sent from the spiral 2 to the annular die 3, and is extruded from the annular die together with air to form a small cylindrical hose (valve) 5. The small cylindrical flexible tube 5 is cooled by the air from the cooling air blowing device 6 at a position slightly separated from the annular die 3. 7 series cooling line. The small cylindrical tube $ is guided by the guide plate 8 and reaches the nip roller 9 (nipr01i). ---------- ^ -------- Order --------- · (Please read the notes on the back before filling this page) 546396 Α7 ---- 5 Explanation of the invention (5) The film 10 will be taken up by the take-up device 11. Fig. 2 is a four-side view of the ring mold 碉 j shown in Fig. 1, and the resin composition (polymer) is formed by polymerization. [Inlet entrance] 9 Q. The gross degree of the die 2 On the other hand, the air enters the annular die 3 from the air inlet 13. 'To manufacture the film used in the present invention, the above-mentioned Fangge ★ blow molding When molding and manufacturing, as the air blown into the cylindrical small section of the yingyiyiziren & 3, the clean air filtered by the air filter must be used. The air from the air machine passes through the air filter and becomes air. Cleanliness level 6 == 2 clean air. The air cleanliness referred to here are both according to JIS B 992〇 2. With such clean air, it is almost impossible to see the cylindrical film < inside = Harmful size, there is The number of detachable particles attached to the inner surface of the cylindrical film can be measured according to the simple method described above. That is, the bag size is 150mm XI 67mm. 2. Put 500m2 ultrapure water in a bag with an inner surface area of 500cm2 and shake it for 15 seconds. Then let it stand for 20 minutes, measure the number of particles in a predetermined size range in 5ml with LPC (Particle in Liquid Calculator), and convert it into a film per lcm2. The numerical value of the area. As an indicator of the stability of the high-purity target at the start of use, the number of breakdowns (arcing, abnormal discharge) that occur within 1 minute from the start of use is used. Furthermore, as a high The index of purity target life is the cumulative amount of applied power until the cumulative number of breakdowns reaches 50 times after 1 minute from the start of use. In the present invention, since at least one of the thin films has a diameter of 2.0 μm or more, The film on the surface of detachable particles, or used in the film ------------ install (please read the precautions on the back before filling this page) ---- Order ------- -# · Staff Consumption Copies printed by the cooperative apply the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 5 311887 546396 Printed by the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 Printed on V. At least one side of the invention description (6) has no diameter 2. The surface of detachable particles of more than 0 μηι I. The number of detachable particles of 0. 2 μπι or more in diameter on the surface is 1,000 or less films per lcm2 of film area, and the surface is placed on the side of a high-purity dry body to bundle For packaging, it is almost impossible to see the transfer of the harmful size 'harmful number of particles from the packaging film to the surface of the high-purity target. Therefore, even if the high-purity target is stored and transported in a packaged state, and then removed from the package for sputtering, the stability and financial properties at the beginning of the use of the sputtering are not deteriorated. Packed High Purity Dry Body. Example 1 A thin-film blow molding apparatus shown in FIG. 1 was used, and clean air having a degree of air cleanliness of Class 6 or lower according to JIS B 9920 filtered by an air filter was used as a small cylindrical blowing hose 5 Air inside to make a clean polyethylene bag. The number of particles in a predetermined size range of the release particles attached to the inside and outside of the bag was measured according to the method described above. Failed to detect particles with a diameter greater than 2.0 μm. In addition, the number of particles having a diameter of ≧ 2pm to 2.00pm is 600 particles per 1 cm2 of film area on the inner surface of the bag, and 3,000 particles per 1 cm2 of film area on the outside of the bag. An extended polypropylene film layer coated with polygasified vinylidene with a thickness of about 20 μm, a polyethylene film layer with a thickness of about 20 μm, and a linear low-density polymer with a thickness of about 60 μm A three-layer thin film made of an ethylene film is used to prepare a conventional three-layer film bag obtained by making a linear low-density polyethylene film layer into a bag. The number of teachers of a predetermined size range of detachable particles attached to the inner and outer surfaces of the bag was measured according to the method described above. The number of particles with a diameter of more than 2.0μm is on the inside and outside of the bag. This paper is in accordance with the national standard (CNS) A4 specification of the paper in time (适 297). 〇3II88 / ------------ pack- ------- Order --------- · (Please read the precautions on the back before filling this page) 546396 A7
546396 經 濟 部 智 慧 財 產 局 員 工 消 費 合 作 社 印 製 A7546396 Printed by the Consumer Affairs Cooperative of the Intellectual Property Agency of the Ministry of Economic Affairs A7
吕丁 i 請 先 閱 讀 背 面 I 之1 注1Lu Ding i Please read the back I 1 Note 1
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^ I 546396 ^__ 五、發明說明（9 ) 本發明之經捆包的高純度靶體，不僅限定於高純度 ΙΤ〇靶體，而於高純度陶瓷系靶體、高純度金屬系（包含合 金)靶體等之情形亦同樣，即使以經捆包的狀態保管·搬 運’而其後從捆包取屮廿 ^ ^ 取出並用於濺鍍，均可實現在濺鍍的使 用開始時之安定性以及耐久特性。 ------------裝--------訂---------. (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 311887 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）^ I 546396 ^ __ 5. Description of the invention (9) The packaged high-purity target of the present invention is not limited to high-purity ITO target, but also to high-purity ceramic target, high-purity metal system (including alloys) ) The same applies to the target body, even if it is stored and transported in a bundled state, and then taken out of the package ^ ^ and taken out for sputtering, the stability at the beginning of the use of sputtering can be achieved And durability. ------------ Installation -------- Order ---------. (Please read the notes on the back before filling this page) Intellectual Property Bureau of the Ministry of Economic Affairs Printed by Employee Consumer Cooperatives 311887 This paper is sized for China National Standard (CNS) A4 (210 X 297 mm)