TW526360B - Liquid crystal display device and its manufacturing method - Google Patents
Liquid crystal display device and its manufacturing method Download PDFInfo
- Publication number
- TW526360B TW526360B TW090104495A TW90104495A TW526360B TW 526360 B TW526360 B TW 526360B TW 090104495 A TW090104495 A TW 090104495A TW 90104495 A TW90104495 A TW 90104495A TW 526360 B TW526360 B TW 526360B
- Authority
- TW
- Taiwan
- Prior art keywords
- liquid crystal
- pixel
- pixel electrode
- display device
- electrode
- Prior art date
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 83
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 210000002858 crystal cell Anatomy 0.000 claims abstract description 41
- 239000011159 matrix material Substances 0.000 claims abstract description 11
- 239000010409 thin film Substances 0.000 claims abstract description 11
- 239000010408 film Substances 0.000 claims description 53
- 239000010410 layer Substances 0.000 claims description 36
- 239000000758 substrate Substances 0.000 claims description 31
- 238000000034 method Methods 0.000 claims description 18
- 239000011229 interlayer Substances 0.000 claims description 17
- 230000004888 barrier function Effects 0.000 claims description 5
- 230000001681 protective effect Effects 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 3
- 238000002834 transmittance Methods 0.000 abstract 1
- 230000000875 corresponding effect Effects 0.000 description 14
- 229910010282 TiON Inorganic materials 0.000 description 6
- 230000002079 cooperative effect Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 239000012535 impurity Substances 0.000 description 4
- 230000003993 interaction Effects 0.000 description 4
- 239000004988 Nematic liquid crystal Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 210000004027 cell Anatomy 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910000789 Aluminium-silicon alloy Inorganic materials 0.000 description 1
- 101000588924 Anthopleura elegantissima Delta-actitoxin-Ael1a Proteins 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 235000013601 eggs Nutrition 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 125000004437 phosphorous atom Chemical group 0.000 description 1
- 239000005360 phosphosilicate glass Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
- G02F1/134336—Matrix
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133371—Cells with varying thickness of the liquid crystal layer
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13373—Disclination line; Reverse tilt
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/137—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering
- G02F1/139—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering based on orientation effects in which the liquid crystal remains transparent
- G02F1/1396—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering based on orientation effects in which the liquid crystal remains transparent the liquid crystal being selectively controlled between a twisted state and a non-twisted state, e.g. TN-LC cell
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
- G02F2201/123—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode pixel
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Geometry (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000054840 | 2000-02-29 | ||
| JP2000102790A JP4089123B2 (ja) | 2000-02-29 | 2000-04-04 | 液晶表示装置及びその製造方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW526360B true TW526360B (en) | 2003-04-01 |
Family
ID=26586459
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW090104495A TW526360B (en) | 2000-02-29 | 2001-02-27 | Liquid crystal display device and its manufacturing method |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US20010040660A1 (https=) |
| EP (1) | EP1130455B1 (https=) |
| JP (1) | JP4089123B2 (https=) |
| KR (1) | KR100761672B1 (https=) |
| DE (1) | DE60111288T2 (https=) |
| TW (1) | TW526360B (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI281582B (en) * | 2001-01-20 | 2007-05-21 | Ind Tech Res Inst | Silicon wafer liquid crystal display and its fabrication method |
| US6784966B2 (en) * | 2001-03-06 | 2004-08-31 | Seiko Epson Corp. | Liquid crystal device, projection type display and electronic equipment |
| KR100796749B1 (ko) | 2001-05-16 | 2008-01-22 | 삼성전자주식회사 | 액정 표시 장치용 박막 트랜지스터 어레이 기판 |
| JP3989238B2 (ja) | 2001-12-07 | 2007-10-10 | シャープ株式会社 | 液晶表示装置 |
| JP2004347838A (ja) | 2003-05-22 | 2004-12-09 | Seiko Epson Corp | 電気光学装置並びに電子機器及び投射型表示装置 |
| KR100987859B1 (ko) * | 2003-11-03 | 2010-10-13 | 엘지디스플레이 주식회사 | 다결정실리콘 액정표시소자 및 그 제조방법 |
| JP2006278539A (ja) * | 2005-03-28 | 2006-10-12 | Matsushita Electric Ind Co Ltd | Ｍｏｓ型固体撮像装置 |
| JP4717533B2 (ja) | 2005-07-06 | 2011-07-06 | 株式会社 日立ディスプレイズ | 表示装置 |
| KR102739014B1 (ko) | 2019-10-01 | 2024-12-05 | 삼성디스플레이 주식회사 | 표시 장치 및 그 제조 방법 |
Family Cites Families (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59202433A (ja) * | 1983-04-30 | 1984-11-16 | Sharp Corp | 電界効果型液晶表示素子 |
| JP2828990B2 (ja) * | 1988-04-19 | 1998-11-25 | 株式会社東芝 | 液晶表示素子 |
| JPH03144420A (ja) * | 1989-10-30 | 1991-06-19 | Sharp Corp | アクティブマトリクス液晶表示装置 |
| JP2731044B2 (ja) * | 1991-04-19 | 1998-03-25 | シャープ株式会社 | アクティブマトリクス液晶表示装置 |
| JPH04323625A (ja) * | 1991-04-23 | 1992-11-12 | Sony Corp | 液晶表示装置 |
| JPH05165061A (ja) * | 1991-12-17 | 1993-06-29 | Sony Corp | 液晶表示装置 |
| JPH06110082A (ja) * | 1992-09-29 | 1994-04-22 | Kyocera Corp | 液晶装置 |
| JP3383047B2 (ja) * | 1992-12-25 | 2003-03-04 | ソニー株式会社 | アクティブマトリクス基板 |
| DE69332142T2 (de) * | 1992-12-25 | 2003-03-06 | Sony Corp., Tokio/Tokyo | Substrat mit aktiver Matrix |
| JP2925880B2 (ja) * | 1993-02-25 | 1999-07-28 | 三洋電機株式会社 | 液晶表示装置 |
| EP0843194B1 (en) * | 1993-07-27 | 2005-03-16 | Sharp Kabushiki Kaisha | Liquid crystal display |
| GB9316101D0 (en) * | 1993-08-03 | 1993-09-15 | Philips Electronics Uk Ltd | Active matrix display devices |
| US5781262A (en) * | 1994-04-19 | 1998-07-14 | Nec Corporation | Liquid crystal display cell |
| JP3266861B2 (ja) * | 1994-06-13 | 2002-03-18 | 株式会社半導体エネルギー研究所 | アクティブマトリクス装置 |
| US5483366A (en) * | 1994-07-20 | 1996-01-09 | David Sarnoff Research Center Inc | LCD with hige capacitance pixel having an ITO active region/poly SI pixel region electrical connection and having poly SI selection line extensions along pixel edges |
| JP2934875B2 (ja) * | 1994-09-30 | 1999-08-16 | カシオ計算機株式会社 | マトリックス型液晶表示装置 |
| JP3240858B2 (ja) * | 1994-10-19 | 2001-12-25 | ソニー株式会社 | カラー表示装置 |
| US5936685A (en) * | 1995-02-28 | 1999-08-10 | Nec Corporation | Liquid crystal display device with pixel electrode overlapping drain wiring |
| JPH08271899A (ja) * | 1995-03-30 | 1996-10-18 | Nec Corp | 液晶表示装置 |
| JP3184771B2 (ja) * | 1995-09-14 | 2001-07-09 | キヤノン株式会社 | アクティブマトリックス液晶表示装置 |
| US5657101A (en) * | 1995-12-15 | 1997-08-12 | Industrial Technology Research Institute | LCD having a thin film capacitor with two lower capacitor electrodes and a pixel electrode serving as an upper electrode |
| JP3558145B2 (ja) * | 1995-12-28 | 2004-08-25 | 富士通ディスプレイテクノロジーズ株式会社 | 液晶表示パネル |
| JPH09265083A (ja) * | 1996-03-29 | 1997-10-07 | Matsushita Electric Ind Co Ltd | 液晶表示パネル |
| TW373114B (en) * | 1996-08-05 | 1999-11-01 | Sharp Kk | Liquid crystal display device |
| US6088070A (en) * | 1997-01-17 | 2000-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Active matrix liquid crystal with capacitor between light blocking film and pixel connecting electrode |
| JP3680527B2 (ja) * | 1997-01-31 | 2005-08-10 | 富士通ディスプレイテクノロジーズ株式会社 | 薄膜トランジスタマトリクス基板及びその製造方法 |
| US6115087A (en) * | 1997-05-30 | 2000-09-05 | Nec Corporation | Active matrix liquid crystal display unit having pixel accompanied with accumulating capacitor varied in width along gate line |
| JPH11125830A (ja) * | 1997-10-21 | 1999-05-11 | Canon Inc | 液晶表示装置 |
| GB9811477D0 (en) * | 1998-05-29 | 1998-07-29 | Sharp Kk | Liquid crystal device |
| JP4130008B2 (ja) * | 1998-06-11 | 2008-08-06 | 三洋電機株式会社 | 液晶表示装置 |
| US6266058B1 (en) * | 1998-09-08 | 2001-07-24 | Hewlett Packard Company | Apparatus and method for linking browser bars with active documents for a browser |
| US6194039B1 (en) * | 1999-10-22 | 2001-02-27 | Elsicon, Inc. | Materials for inducing alignment in liquid crystals and liquid crystal displays |
-
2000
- 2000-04-04 JP JP2000102790A patent/JP4089123B2/ja not_active Expired - Fee Related
-
2001
- 2001-02-27 TW TW090104495A patent/TW526360B/zh not_active IP Right Cessation
- 2001-02-28 EP EP01104460A patent/EP1130455B1/en not_active Expired - Lifetime
- 2001-02-28 DE DE60111288T patent/DE60111288T2/de not_active Expired - Lifetime
- 2001-02-28 KR KR1020010010285A patent/KR100761672B1/ko not_active Expired - Fee Related
- 2001-02-28 US US09/795,387 patent/US20010040660A1/en not_active Abandoned
-
2002
- 2002-09-06 US US10/236,744 patent/US20030011733A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| EP1130455A2 (en) | 2001-09-05 |
| JP2001318388A (ja) | 2001-11-16 |
| JP4089123B2 (ja) | 2008-05-28 |
| KR20010085697A (ko) | 2001-09-07 |
| KR100761672B1 (ko) | 2007-10-02 |
| EP1130455B1 (en) | 2005-06-08 |
| DE60111288T2 (de) | 2006-03-23 |
| US20010040660A1 (en) | 2001-11-15 |
| EP1130455A3 (en) | 2003-11-05 |
| DE60111288D1 (de) | 2005-07-14 |
| US20030011733A1 (en) | 2003-01-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MM4A | Annulment or lapse of patent due to non-payment of fees |