TW502140B - Control system and control device - Google Patents
Control system and control device Download PDFInfo
- Publication number
- TW502140B TW502140B TW90123440A TW90123440A TW502140B TW 502140 B TW502140 B TW 502140B TW 90123440 A TW90123440 A TW 90123440A TW 90123440 A TW90123440 A TW 90123440A TW 502140 B TW502140 B TW 502140B
- Authority
- TW
- Taiwan
- Prior art keywords
- value
- control
- temperature
- detection
- target
- Prior art date
Links
- 238000001514 detection method Methods 0.000 claims description 178
- 238000004364 calculation method Methods 0.000 claims description 87
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- 238000012360 testing method Methods 0.000 claims description 9
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Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B11/00—Automatic controllers
- G05B11/01—Automatic controllers electric
- G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
- G05B11/42—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D.
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B5/00—Anti-hunting arrangements
- G05B5/01—Anti-hunting arrangements electric
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Feedback Control In General (AREA)
- Control Of Temperature (AREA)
- Control Of Resistance Heating (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001017480A JP3833479B2 (ja) | 2001-01-25 | 2001-01-25 | 制御装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW502140B true TW502140B (en) | 2002-09-11 |
Family
ID=18883684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW90123440A TW502140B (en) | 2001-01-25 | 2001-09-24 | Control system and control device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP3833479B2 (fr) |
| CN (1) | CN1246745C (fr) |
| TW (1) | TW502140B (fr) |
| WO (1) | WO2002059700A1 (fr) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4256236B2 (ja) * | 2003-09-04 | 2009-04-22 | 株式会社山武 | 制御装置および制御方法 |
| JP4634197B2 (ja) * | 2005-03-25 | 2011-02-16 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法 |
| JP4989455B2 (ja) * | 2007-12-28 | 2012-08-01 | アズビル株式会社 | 制御装置および制御方法 |
| EP2980496A4 (fr) * | 2013-03-29 | 2017-07-26 | Mitsubishi Electric Corporation | Dispositif de commande de climatisation, système de commande de climatisation et procédé de commande de climatisation |
| JP6415332B2 (ja) * | 2015-01-16 | 2018-10-31 | キヤノン株式会社 | 温度制御装置、リソグラフィ装置、および物品の製造方法 |
| JP6531605B2 (ja) * | 2015-10-07 | 2019-06-19 | オムロン株式会社 | 温度制御装置およびオートチューニング方法 |
| CN106444899B (zh) * | 2016-11-16 | 2018-07-24 | 中南大学 | 一种3d打印机温度控制系统 |
| JP6909921B2 (ja) * | 2018-03-26 | 2021-07-28 | 日本たばこ産業株式会社 | エアロゾル生成装置及び制御方法並びにプログラム |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5233278B2 (fr) * | 1971-11-08 | 1977-08-26 | ||
| JPS6215603A (ja) * | 1985-07-12 | 1987-01-24 | Omron Tateisi Electronics Co | Ｐｉｄ制御装置 |
| JPH0525502U (ja) * | 1991-09-13 | 1993-04-02 | 理化工業株式会社 | 多点調節計 |
| JPH0665901U (ja) * | 1993-02-04 | 1994-09-16 | 理化工業株式会社 | 多点調節計 |
| JPH07200078A (ja) * | 1993-12-28 | 1995-08-04 | Komatsu Electron Metals Co Ltd | 温度制御装置 |
| JPH07200076A (ja) * | 1993-12-28 | 1995-08-04 | Komatsu Electron Metals Co Ltd | 熱処理装置 |
| JPH09311727A (ja) * | 1996-05-22 | 1997-12-02 | Mitsubishi Heavy Ind Ltd | 加圧槽加温制御方法及び装置 |
| JP3433685B2 (ja) * | 1998-11-19 | 2003-08-04 | 理化工業株式会社 | 制御装置 |
| JP2001318702A (ja) * | 2000-05-08 | 2001-11-16 | Yamatake Corp | 制御システム |
| JP3776297B2 (ja) * | 2000-07-12 | 2006-05-17 | 株式会社山武 | 制御システム |
-
2001
- 2001-01-25 JP JP2001017480A patent/JP3833479B2/ja not_active Expired - Lifetime
- 2001-09-21 WO PCT/JP2001/008240 patent/WO2002059700A1/fr active Application Filing
- 2001-09-21 CN CN 01822061 patent/CN1246745C/zh not_active Expired - Lifetime
- 2001-09-24 TW TW90123440A patent/TW502140B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| CN1486452A (zh) | 2004-03-31 |
| CN1246745C (zh) | 2006-03-22 |
| JP2002222001A (ja) | 2002-08-09 |
| WO2002059700A1 (fr) | 2002-08-01 |
| JP3833479B2 (ja) | 2006-10-11 |
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| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MK4A | Expiration of patent term of an invention patent |