TW473885B - Bonding apparatus and bonding method - Google Patents

Bonding apparatus and bonding method Download PDF

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Publication number
TW473885B
TW473885B TW089126699A TW89126699A TW473885B TW 473885 B TW473885 B TW 473885B TW 089126699 A TW089126699 A TW 089126699A TW 89126699 A TW89126699 A TW 89126699A TW 473885 B TW473885 B TW 473885B
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Taiwan
Prior art keywords
camera
detection
processing
component
aforementioned
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TW089126699A
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Chinese (zh)
Inventor
Shigeru Hayata
Ryuichi Kyomasu
Satoshi Enokido
Toshiaki Sasano
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Shinkawa Kk
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Priority to JP2000012738A priority Critical patent/JP3416091B2/en
Application filed by Shinkawa Kk filed Critical Shinkawa Kk
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Publication of TW473885B publication Critical patent/TW473885B/en

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    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78Apparatus for connecting with wire connectors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/002Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
    • B23K20/004Wire welding
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78Apparatus for connecting with wire connectors
    • H01L2224/7825Means for applying energy, e.g. heating means
    • H01L2224/783Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78301Capillary
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    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/852Applying energy for connecting
    • H01L2224/85201Compression bonding
    • H01L2224/85205Ultrasonic bonding
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    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01004Beryllium [Be]
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    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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    • H01L2924/01005Boron [B]
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    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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    • H01L2924/01027Cobalt [Co]
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    • H01L2924/01033Arsenic [As]
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    • H01L2924/01039Yttrium [Y]
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    • H01L2924/095Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
    • H01L2924/097Glass-ceramics, e.g. devitrified glass
    • H01L2924/09701Low temperature co-fired ceramic [LTCC]
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    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/12Passive devices, e.g. 2 terminal devices
    • H01L2924/1204Optical Diode
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    • H01L2924/10Details of semiconductor or other solid state devices to be connected
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    • H01L2924/12Passive devices, e.g. 2 terminal devices
    • H01L2924/1204Optical Diode
    • H01L2924/12042LASER

Abstract

The present invention is to provide a wire bonding apparatus and method, which operates without the use of a dedicated offset correction camera in cases where a reference member is used during offset correction. The solution is: an axial center (4a) of a bonding tool (4) is moved to the vicinity of a reference member (30), laser diodes (16, 17) are sequentially lit, images of the reference member (30) and bonding tool (4) in the XY (horizontal) directions are acquired by a position detection camera (7), and amounts of deviation between the tool (4) and the reference member (30) are measured. Then, the position detection camera (7) is caused to approach the reference member (30), and the amounts of deviation between the optical axis (7a) of the position detection camera (7) and the reference member (30) are measured by the position detection camera (7). The accurate offset amounts are determined from the measured values and amounts of movement. As image light of the tool (4) and reference member (30) is conducted to the position detection camera (7) by prisms (13, 14, 18) and translucent mirror (15), no dedicated camera is needed for detecting the amount of deviation between the tool (4) and reference member (30).

Description

473385 A7 Printed clothing by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the Invention (Technical Field to which the Invention belongs) The present invention relates to a coupling device and a coupling method, and more particularly to a device capable of accurately calculating a video of a coupling element. Device and method for processing eccentricity of processing members such as camera and tool for position detection. [Conventional Technology] Hereinafter, a wire bonding device will be described as an example. On the combination head mounted on the XY platform, a position detection camera is provided, which is a combination point on a combination element such as a specific semiconductor element, and photographs a reference pattern on the combination element; and a combination arm is used for The combined tool is assembled at one end. In addition, when the camera for position detection is used to record the reference pattern on the coupling element, in order to prevent the tool and the coupling arm from obstructing the field of view of the camera for position detection and measurement, the optical axis of the camera for position detection and the axis of the tool It is offset by a certain distance and is assembled on the bonding head. Generally, the distance between the optical axis of the camera for position detection and the axis of the tool is called eccentricity. Because the position detection camera is used to find the reference point (the position of the mobile worker's stomach) and the user, it is important to know that the position detection camera has fewer tools from the tool. However, the actual amount of eccentricity will change from moment to moment due to the camera fixings or the combination arm & spoon shape caused by the radiant heat from the combination platform, so it must be at the beginning of the combination operation or a suitable time for leisure, Correct the amount of eccentricity. Based on the above-mentioned purpose, the combination method and arrangement proposed by the applicant (Japanese Patent No. 29820⑻) is to find the correct f-center and quantity in the following way. Set a reference member at a predetermined position and let the position detect The camera scale of the test camera is adapted to the Chinese National Standard (CNS) A4 (210 X 297 mm). F Jingxian read the phonetic on the back? Fill in this page again with the items> 衣 Ί-ά _ 线 _ 473885 Printed clothing A7 B7 by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (y) Move the reference part above the reference part to determine the reference part and position The positional relationship between the optical axis of the camera for detection, and the tool is moved to the reference part according to the eccentricity memorized in advance, and the positional relationship between the reference part and the tool is measured with the camera for eccentricity correction. The amount of eccentricity memorized in advance. According to this configuration, the position detection _ eccentricity of the camera and the tool can be obtained with high accuracy through the reference member. [Problems to be Solved by the Invention] However, in this configuration, not only a position detection camera is required to detect the position of the coupling point, but also a dedicated eccentricity correction camera is required to correct the eccentricity (amount), so the structure is too complicated question. The present invention aims to provide a device and a method for solving the above-mentioned problems. The purpose is to provide a device and a method which do not require the use of a dedicated eccentricity correction camera even when a reference member is used. [Means to solve the problem] The first invention relates to a coupling device including: a position detection camera that images a coupling element; a reference member 'is arranged at a predetermined position; and an optical member , It is to introduce the image light of the processing component (for processing the combination element) and the reference component into the aforementioned position detection camera. / In the first aspect of the present invention, since the optical component is provided to introduce the image light of the processing component and the reference component into the position detection camera 'by this', the position detection camera combined with the position of the component can be used simultaneously 5__ ------------- ^ -------- order --------- line (please read the precautions on the back before filling in this Page) This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 473885 Α7 Β7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention) and reference components, even when using reference components , Also does not require the use of a dedicated camera for eccentricity correction. The term "processing member" used in this specification refers to various types of X-heads and g that are used to physically process semiconductor devices. The second invention is the coupling device of the first invention. The optical component is the image light captured by the processing component and the reference component from a plurality of mutually different directions into the position detection camera. . In the second aspect of the present invention, since the processing component and the reference component are captured from a plurality of mutually different directions, more accurate position data can be obtained from these components. A third aspect of the present invention is the combination device of the first or second aspect of the present invention, wherein the position detection camera includes a telecentric lens. It is generally thought that 'the position detection camera used to detect the position of the coupling element is also used to image the processing component and the reference component, because the distance from the coupling element to the position detection camera and the processing component And the distance between the reference component and the position detection camera is different, so that the image size of the latter changes. As a result, the position relationship between the processing component and the reference component cannot be detected correctly. This is the third aspect of the present invention. Since the position detection camera is equipped with a telecentric lens (which has the characteristic that the size of the image (that is, the distance from the optical axis) does not change even if the position of the subject changes), It can correctly perform detection based on the positional relationship of these cameras. The fourth invention is a combination of the invention / invention of any one of the first to third inventions, further comprising a correction lens provided in the optical path of the position detection camera; a reference member and a processing member The image is formed on the imaging surface of the position detection camera through the correction lens. 6 (Please read the precautions on the back before filling out this page) &-3; -3 · · Γ 龛 · This paper size applies to China National Standard (CNS) A4 (21〇χ 297 public love) 473885 Employees of Intellectual Property Bureau, Ministry of Economic Affairs Printed by the consumer cooperative A7 B7 V. Description of the invention (f) In the fourth invention, because the correction lens is further provided in the optical path of the position detection camera, the position detection camera is imaged through the correction lens. The image of the reference member and the processing member is formed on the surface, so even if the distance from the combination element to the position detection camera is not the same as the distance from the processing member and the reference member to the position detection camera, The camera is still _ can be implemented in a good focus. The fifth invention is the coupling device of the fourth invention, wherein the correction lens is integrally held with the reference member. In the fifth aspect of the present invention, since the correction lens is held integrally with the reference member, if the position detection camera (for imaging the processing member and the reference member) and the processing member are moved, the correction lens is disposed at In the optical path of the position detection camera. That is, the fifth invention has the advantage of being able to mount and remove the correction lens in the optical path with a very simple structure. The sixth invention relates to a coupling device, which is characterized by: The camera for position detection is used to image the combination element; the reference component is set at a predetermined position; the light source is used to illuminate the processing component (for processing the combination element) and the reference component; and the screen component, The image of the processing member and the reference member is projected thereon by the illumination of the light source; the position detecting camera is used to image the coupling element from the position detecting camera to the aforementioned The distance 'of the coupling element' is substantially equal to the distance from the camera for position detection to the screen member in a posture after the processing member approaches the reference member. 7 This paper size applies to China National Standard (CNS) A4 specifications (210 X 297 Public Love 1 " " (Please read the precautions on the back before filling this page) \ -------- ^ --- ----! Line I ------------------------- 473S85 A7 B7 V. Description of the invention (y) In the sixth invention, The image of the processing member and the reference member irradiated by the light source is injected into the screen member. Here, the position detection camera is used to detect the position of the coupling element from the position detection camera to the coupling element. The distance is the same as when the processing member approaches the reference member. The distance from the position detection camera is approximately the same, so the position detection camera can be in the same focusing state as when the camera is combined with the camera. The screen members are imaged, whereby these images can be performed in a good in-focus state. The seventh invention is a combination method and a combination device (equipped with: a camera for position detection, which is a combination element) Performing imaging; the processing member is eccentrically disposed with respect to the position detection camera to process the aforementioned coupling element; and The reference member is a combination method set in a predetermined position); it is characterized by:-in the first position after the camera for position detection approaches the reference member, the camera for position detection A step of determining a positional relationship between the position detection camera and the reference member; and introducing the image light of the processing member and the reference member (in a second posture after the processing member approaches the reference member) to the position detection Measuring a camera, and then using the position detecting camera to determine a positional relationship between the processing member and the reference member; and according to the measurement results, the position between the first posture and the second posture The step of obtaining the correct eccentricity by detecting the moving amount of the camera and the processing member. Another eighth aspect of the present invention is a combination device having: position detection 8 This paper size is applicable to the Chinese national standard (CNS ) A4 size (210 X 297 mm) ^ (Please read the notes on the back before filling out this page) ^ -------- Order --------- * ^ 1 Printed by the Consumer Cooperatives of the Ministry of Intellectual Property Bureau 473885 A7 B7 V. Description of the invention (t) The camera for measurement is used to camera the combined components; the processing component is set eccentrically to the camera for position detection and used to Processing the aforementioned coupling elements: and the reference member is set at a predetermined position; it is characterized by having an arithmetic control device based on: a first posture after the camera for position detection is brought close to the reference member Next, the position detection camera is used to measure the positional relationship between the position detection camera and the reference member; and the processing member and the reference member are placed in a position where the processing member approaches the reference member. The second position) image light is introduced into the position detection camera, and then the position detection camera is used to measure the position relationship between the processing member and the reference member; and The movement amount of the position detection camera and the processing member between the posture and the second posture; The amount of heart. The seventh and eighth inventions have the same effects as the first invention. [Embodiment of the invention] An embodiment of the present invention will be described below with reference to the drawings. Fig. 1 is a display showing a wire bonder according to an embodiment of the present invention. As shown in the figure, the coupling head 2 mounted on the XY stage 1 is provided with a coupling arm 3, and the coupling arm 3 is driven in the up-down direction by means of up and down driving means (not shown). A tool 4 is attached to the front end of the coupling arm 3, and a lead 5 is inserted into the tool 4. In addition, a camera fixing member 6 is fixed on the coupling head 2 and a photoelectric conversion camera with a charge coupling element (CCD) is positioned at the front end of the camera fixing member 6. A position detection 9 This paper size applies to Chinese national standards (CNS) A4 specification (210 X 297 mm) (Please read the notes on the back before filling out this page) Γ Printed by the Employees 'Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 473SS5 Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 5 2. Description of the invention (1) Testing camera 7. The optical axis 7a of the position detection camera 7 and the axis 4a of the work 4 are oriented vertically downward, that is, in the Z direction. The optical axis 7a and the axis 4a are shifted in the XY direction by eccentric amounts Xt and Yt, respectively. The XY stage 1 is configured to be accurately moved in the X direction and the Y direction by two pulsating motors (not shown) provided near the XY stage. These are well-known structures. A reference section support table 11 on which a reference member 30 is placed is provided near a bonding table (not shown) on which a semiconductor device (not shown) is positioned. The reference desk support stand 11 is provided with 13'14, 18, a translucent mirror 15, and laser diodes 16, 17 of a light source for illumination. As shown in Fig. 2, 稜鏡 13 is located on the lower side in the figure with respect to the reference member 30, and 稜鏡 14 is provided on the left side in the figure with respect to 稜鏡 13. In the figure of the reference member 30, a semi-transparent mirror 15 is provided on the left side, and a laser diode 16 is provided on the right side, and a laser diode 17 is provided on the opposite side of the reference member 30 between the reference member 30. The laser diodes 16, 17 are arranged so as to generate parallel light.稜鏡 18 is provided on the left side of the semi-transparent mirror 15 in the figure. The distance dw between the center of the reflecting surface of 稜鏡 18 and the reference member 30 is substantially equal to the eccentricity Xt in the X direction of the optical axis 7a of the position detecting camera 7 and the axis 4a of the tool 4. „The reflecting surface of 稜鏡 13 intersects at an angle of -45 ° with respect to the X direction (that is, the direction formed by laser diode 16 and translucent mirror 15). On the other hand, the reflecting surface of 稜鏡 14 and The reflective surfaces of the translucent mirror 15 are parallel to each other and all cross at an angle of 45 ° to the X direction. The reflective surfaces of 稜鏡 18 cross at an angle of 45 ° to the horizontal direction as shown in Figure 3. Therefore, from the laser The light of diode 17 is reflected at 稜鏡 13, 14 and translucent. 10 paper sizes are applicable to China National Standard (CNS) A4 (210 X 297 mm) ------------ Take the -------- order --------- line (please read the precautions on the back before filling this page) 473885 A7 B7 V. Description of the invention (1) After the reflection surface of the mirror 15 is reflected To reach the reflecting surface of 稜鏡 18. On the other hand, the light from laser diode 16 reaches the reflecting surface of 稜鏡 18 through translucent mirror 15. Then the light system from two laser diodes 16,17 Reflected on the reflecting surface of 稜鏡 18, and introduce camera 7 for position detection. Also, instead of 稜鏡 13, 14, 18, you can use mirrors such as mirrors. Camera 7 for position detection, A lens 7b with a telecentric lens. The term "telecentric lens" as used in this application refers to a telecentric optical system, that is, an optical system constituted by passing the imaging main light through the focal point behind the lens. As is generally known, a telecentric lens The tolerance range for the position deviation of the imaging surface in the opposite direction is wide, especially when the passing light of parallel light is irradiated, even if the position of the object changes, the size of the image (that is, the distance from the optical axis) does not change; although it is used in Various industrial measuring devices, but telecentric lenses or optical systems with characteristics close to telecentric lenses are also widely used in combination devices. As shown in FIGS. 4 and 5, the XY platform 1 is based on the instructions of the arithmetic control device 20 It is driven by the XY stage control device 21. The image captured by the camera 7 for position detection is converted into electrical signals and processed by the image processing device 22. The calculation control device 20 composed of a computer is used to calculate the correct one. The eccentricity amounts Xt and Yt. The eccentricity amounts Xw and Yw are stored in advance in the memory 23. Therefore, if the correct eccentricity amounts Xt and Yt are stored in advance, The difference between the eccentricity amounts Xw and Yw of the memory 23 (that is, the eccentricity correction amount) is ΔX, ΔΥ, then these correct eccentricity amounts Xt, Yt, the eccentricity amount Xw, Yw, and the eccentricity correction amount ΔX, ΔΥ are memorized There is a relationship of [number i]. Moreover, 24 in the figure shows the input and output devices. 11 This paper size applies the Chinese National Standard (CNS) A4 specification (210 x 297 mm) (Please read the precautions on the back before filling in (This page) ----------- Order --- Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs # ------------ 473885 _ 丨 Qing, employee of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the consumer cooperative A7 ____ Β7 _______ V. Description of the invention) [Number 1]

Xt = Xw + Δ X Yt = Yw + ΔΥ Next, the calculation method of the eccentricity amounts Xt and Yt will be described. First, as shown by the solid line in FIG. 5, in order that the axis 4 a of the tool 4 is located near the reference member 30, the XY platform 1 is driven by the XY platform control device 21 by the instruction of the arithmetic control device 20 (FIG. 3). , Lower the tool 4 to a height that almost contacts the reference member 30. Here, the tool 4 only needs to be at a position where the position detecting camera 7 can image the tool 4 and the reference member 30 ', and it is not necessary to make the axis 4a of the tool 4 to the axis 30a of the reference member 30. Then, the position detection camera 7 is used to image both the tool 4 and the reference member 30, and the positional relationship between the two is measured, that is, Δχι, ΔΥι ° First, the laser diode 16 is turned on and the laser diode 17 is turned off. In this state, the image light of the tool 4 and the reference member 30 becomes a shadow of the light from the laser diode 16, and is reflected by the transflective mirror 15 and reflected by the reflecting surface of the 稜鏡 18 into the position detection camera 7 ° As a result, the position detection camera 7 obtains an image as shown in FIG. 6 (a). By applying appropriate image processing to the image, the amount of deviation in the Y direction between the axis 4a of the tool 4 and the axis 30a of the reference member 30 / can be calculated. Second, the laser diode 16 is turned off and the laser is turned off. When the emitter diode 17 is activated, the image of the tool 4 and the reference member 30 becomes a shadow of the light from the frost emitter tube 17, and is reflected on the reflecting surface of the translucent mirror 15 by 稜鏡 13,14. The reflection is further reflected on the reflecting surface of 稜鏡 18 and is introduced into the position detection camera 7. As a result, the camera for position detection 7 ^ ^ -------- ^ ------- (Please read the precautions on the back before filling in this page)

This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 473SS5 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 5. The invention description (fc) is shown in Figure 6 (b). By subjecting the image to appropriate image processing, a deviation amount ΔX! In the X direction between the axis 4a of the tool 4 and the axis 30a of the reference member 30 can be calculated. Once the positional relationship between the tool 4 and the reference member 30 is measured, that is, △ Υι, then the operation control device 20 drives the XY through the eccentricity Λ Xw, Yw of the billion body 23 beforehand, and the XY platform control device 21 The platform 1 moves the position detection camera 7 near the reference member 30 as shown by the dotted line in FIG. 5. Then, the reference member 30 is imaged in this state, and appropriate image processing is performed on the image to calculate the deviation amounts ΔX2 and ΔΥ2 between the axis 30a of the reference member 30 and the optical axis 7a of the position detection camera 7. If the eccentricity amounts Xw, Yw memorized in advance are correct eccentricity amounts Xt, Yt ', then the eccentricity correction amounts Ax, λυ are zero, and AYi should be consistent with △ X2, ΔΥ2. However, if the eccentricity amounts Xw and Yw memorized in advance are large numbers, and if the camera fixing member 6 or the joint arm 3 expands due to the influence of heat, so that the eccentricity amounts Xt and Yt change, AXi, will not be the same as Δχ2 , △ Υ2 are the same, and errors (eccentricity correction amounts) Αχ, Δγ will occur. Then, by measuring 値 Λχ !, AYi and 値 Λχ2, ΛΥ2, the eccentricity correction amounts AX, ΑΥ are calculated by [Equation 2]. [Number 2] Δχ = Δχι-· ΔX2, ΔΥ = ΔΥι-ΔΥ2 Then, the arithmetic control device 20 calculates the eccentricity correction amount eight X, ΔΥ with [number 2], and adds the eccentricity correction amounts Δχ, Δγ to [number 1] Pre-memory 13 This paper size applies Chinese National Standard (CNS) A4 specification (21〇X 297 public love. ^ ----------------- (Please read the precautions on the back before (Fill in this page) 473SS5 Printed by A7 B7 of the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (丨) The eccentricity Xw, Yw is calculated, and the correct eccentricity Xt, Yt is calculated. The amounts Xw and Yw are corrected (updated) to be the correct eccentricity amounts Xt and Yt. The eccentricity amounts Xt and Yt obtained in this way will be used as the eccentricity amounts of the position detection camera 7 and tool 4 in the subsequent combination operation. As above As described above, in this embodiment, since the image light of the tool 4 and the reference member 30 are introduced into the cameras 13, 14, 18, and the translucent mirror 15 of the position detection camera 7, the detection can be combined. Position detection camera 7 for component position, also used for imaging of tool 4 and reference member 30 This can be done without using a dedicated eccentricity correction camera. In addition, in the case where the position detection camera 7 is also used for the imaging of the tool 4 and the reference member 30, it is necessary to consider that from the combination part to the position detection camera 7 The distance is different from the distance from the tool 4 and the reference member 30 to the position detection camera 7, and the size of the latter image is changed. As a result, the positional relationship between the tool 4 and the reference member 30 cannot be detected correctly. In this embodiment, since the camera 7 for position detection is equipped with a lens 7b with a telecentric lens (which has the characteristic that the size of the image does not change even if the position of the subject changes), it is possible to accurately perform detection based on the positional relationship of these cameras In addition, since the tool 4 and the reference member 30 are configured so that the images captured from the plural and different directions are introduced into the position detection camera 7, it is possible to obtain more accurate position data. Although the present embodiment is configured to use laser diodes 16 and 17 set to generate parallel light, instead of such a configuration, pinholes and lenses may be made non-parallel. The light source is combined to obtain parallel light. At this time, the light source for non-parallel light is, for example, LED (light emitting diode), halogen lamp, tungsten. 14 The paper size is applicable to China National Standard (CNS) A4 specification (21〇X 297). Public love) ------------ ^ -------- ^ --------- line (please read the precautions on the back before filling this page)

Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the Invention (A) Wire light bulbs, or fiber optic outlets are suitable. Although pinholes are not necessary, the parallelism of light becomes worse when the pinholes are not used. Next, a second embodiment will be described. In the second embodiment shown in FIG. 14 (a), the three 稜鏡 93 and the translucent mirror 95 are arranged in contact with each other as shown in the figure, and further, the reflected light is reflected upward to be introduced into the position detection. The 稜鏡 18 with a 45 ° inclined reflecting surface of the testing camera 7 is arranged in a contact manner, and is irradiated with laser diodes 16 and Π from two directions. As shown in FIG. 8, the lens 7c mounted on the position detecting camera 7 can change the focal distance by a driving device (not shown) according to the control output of the arithmetic control device 20 of FIG. 4; and the focal position of the lens 7c ' From the imaging surface of the camera 7 for position detection, leave the center 18b of the reflecting surface 18a of di 稜鏡 18 from the imaging surface of the camera 7 for position detection. From the imaging surface of the camera 7 for position detection, the axis 30a of the reference member 30 Change between. The lens 7c may be a non-telecentric lens. In Fig. 8, the illustration of "稜鏡 93" and "translucent mirror 95" is omitted, and configurations not specifically mentioned in the following embodiments are the same as those of the first embodiment described above, and therefore the same reference numerals are used, and descriptions thereof are omitted. In the second embodiment, in a state where the distance to the focus position is d 1+ d 2, both the tool 4 and the reference member 30 are imaged by the position detection camera 7. Next, the position detection camera 7 is moved to approach the reference member 30, and the lens 7c is driven to change the distance to the focal position to d1. In this state, the position detection camera 7 directly photographs the reference member 30. As described above, in this embodiment, the case where both the tool 4 and the reference member 30 are photographed by the position detection camera 7 and the case where the reference member 30 is directly photographed by the position detection camera 7 are respectively 15_____ This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) ^ -------- ^ --------- ^ I (Please read the precautions on the back before (Fill in this page) 4: 7388 A7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of invention (Γ)) Selecting a moderate focus position has the advantage of performing these cameras in good focus. In this embodiment, not only the optical path lengths from the tool 4 and the reference member 30 can be made equal to each other in two directions, but also because three 稜鏡 93, 稜鏡 18, and translucent mirror 95 are in contact with each other, it is easy to obtain optics. Assembly accuracy of components. In this embodiment, although the focus position is changed by driving the lens 7c, instead of such a configuration, a position detection camera 7 can be moved up and down to provide a driving mechanism, and the focus can be obtained by the lifting. The same effect. Moreover, in the modification of this embodiment, as shown in FIG. 14 (b), the four 稜鏡 103s and the translucent mirror 105 can be reflected upward and introduced into the position detection camera 7 at a 45 ° tilt. The 稜鏡 108 on the reflecting surface is arranged in contact with each other as shown in the figure. In this case, there is an advantage that the laser diodes 96 and 97 for radiating from two directions are arranged adjacent to each other. In addition, the light source for irradiating from two directions is singularized, and the light path corresponding to one direction is selected by a mechanical shutter or a liquid crystal shutter or the blocking degree (or passing degree) is different, and the position detection is introduced. With the camera 7, the image of the tool 4 and the reference member from two directions can be separated. At this time, if the images captured by the position detection camera 7 are further synchronized with the change of the opacity by the mechanical shutter or the liquid crystal shutter, the images from the two directions can be separated from each other. / Next, a third embodiment will be described. The third embodiment shown in FIG. 9 is provided with a camera 37 for position detection (having image sensors 37b and 37c provided at different positions), and the focus position of the image sensor 37b is determined from the image (please read the back first) Note: Please fill in this page again.) Clothes. 'Line * Private paper size applies Chinese National Standard (CNS) A4 (210 X 297 mm) 473885 Printed by A7 B7, Consumer Cooperative of Intellectual Property Bureau, Ministry of Economic Affairs The center Wb of the reflecting surface 18a of 稜鏡 18 whose plane is separated from the distance di and the focal position of the imaging element 37c is determined as the axis 30a of the reference member 30 which is separated from the imaging plane by the distance di + d2. The remaining structure is the same as that of the second embodiment. In the third embodiment, both the tool 4 and the reference member 3_0 are imaged by the imaging element 37c. Next, the position detection camera 37 is moved closer to the reference member 30, and the reference member 30 is directly imaged by the imaging element 37b. According to this configuration, since both the tool 4 and the reference member 30 are imaged by the imaging element 37c and the reference member 30 is directly imaged by the imaging element 37b, appropriate focus positions are selected, so that not only the Such imaging is performed in a good focusing state, and there is an advantage that it is not necessary to change the mechanical focus position between the two cameras. Next, a fourth embodiment will be described. Lenses that have not been achromatic corrected have different focal positions depending on the wavelength of the light. The fourth embodiment makes use of this phenomenon. That is, in the fourth embodiment, instead of the lens 7c shown in FIG. 8, a lens without achromatic correction is used. The focus position of the lens on the blue light is a distance d from the imaging surface of the position detection camera 7. The center 18b of the reflecting surface 18a of 稜鏡 18, and the focal position of the red light is the axis 30a of the reference member 30 separated from the imaging surface of the position detection camera 7 by a distance d1 + d2. A blue light source and a red light source are provided in the optical system of the position detection camera 7, so that the light from these blue and red light sources is emitted along the optical axis 7a of the position detection camera 7. The remaining structure is the same as that of the third embodiment. However, in the fourth embodiment, the red light source is driven first to apply the Chinese National Standard (CNS) A4 specification (210 X 297 mm) at 17 paper sizes Ί -------------- --- I (Please read the precautions on the back before filling this page) 473885 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (| <) Camera 7 for tools 4 for position detection and reference Both members of the member 30 are imaged. Next, the position detection camera 7 is moved closer to the reference member 30, the blue light source is driven to illuminate, and the reference member 30 is directly imaged. According to this constitution, since the red light is used to image both the tool 4 and the reference member 30, and the blue light is used to directly image the reference member 30, the appropriate focus position is selected respectively, which is the same as the fourth embodiment. Similarly, not only can such imaging be performed in a good in-focus state, but also there is an advantage that it is not necessary to perform a change operation of the mechanical focus position between two photographs. Next, a fifth embodiment will be described. The fifth embodiment shown in Fig. 10 is characterized by including a correction lens 40. The lens 7d mounted on the position detecting camera 7 may be a non-telecentric lens. The focal position when only the lens 7d is used is the center 18b of the reflecting surface 18a of the prism 18 that is separated from the imaging surface of the position detecting camera 7 by a distance d ^. The focal position when using both the lens 7d and the correction lens 40 is the axis 30a of the reference member 30 separated from the imaging surface of the position detection camera 7 by a distance di + h. The correction lens 40 is fixed to the reference portion support table 11 by a correction lens support table 42. Also in this embodiment, although the 稜鏡 93 and the translucent mirror 95 arranged in the same manner as in Fig. 14 (a) are used, the illustration is omitted in Fig. 10. However, in the fifth embodiment, both the tool 4 and the reference member 30 are imaged with the position detection camera 7 'through the correction lenses 40 and 稜鏡 18. At this time, the distance to the focal position becomes d 2 because the correction lens 40 is interposed. Next, the position detection camera 7 is moved to approach the reference member 30, and in this state, the reference member 30 is directly imaged by the position detection camera 7. At this time, the distance to the focal point is not corrected through 18 papers. The Chinese paper standard (CNS) A4 (210 X 297 mm) is applicable. I ^ innn ϋ · ΛΛ9 II n N «ϋ ϋ n (ϋ an n in- >-< · X7Jβ innn ϋ * n «_ I (Please read the precautions on the back before filling out this page) 473885 Printed by the Consumers’ Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of Invention (ft) Mirror 40 therefore becomes d 1. As described above, in the fifth embodiment, the distance to the focal position is changed by the correction lens 40 that is integrated with the reference section support table 11 or the reference member 30, so the correction lens 40 moves with it. In the light path, the camera 4 and the reference member 30 are photographed, and therefore, the camera 4 is used to detect both the tool 4 and the reference member 30 by position detection. In the case where the camera 7 directly photographs the reference member 30, there is no need to perform mechanical or electrical focusing operations. Next, the sixth embodiment will be described. The sixth embodiment shown in FIG. 11 is provided with Correction lens 50 is special In this embodiment, although the prism 93 and the translucent reflector 95 are used in the same arrangement as in FIG. 14 (a), the difference is that the correction lens 50 is installed on the prism 93 and the translucent reflector 95. The correction lens 50 is fixed to the reference part support table 11 by the correction lens support table 52, and is connected to the 稜鏡 93 and the translucent mirror 95. In order to make it easier to understand, the illustration 稜鏡 93 and The translucent mirror 95 only shows the correction lens 50 schematically. The lens 7e mounted on the position detecting camera 7 may be a non-telecentric lens. The focal position when using the lens 7e only is the reflection surface 18a of 稜鏡 18 Center 18b. In addition, the focal position when using both the lens 7e and the correction lens 50 is the axis 30a of the reference member 30. / However, in the sixth embodiment, the position detection camera 7 is used to pass through the correction. Lenses 50 and 稜鏡 18 are used to image both the tool 4 and the reference member 30. At this time, the distance to the focal position is adjusted by the correction lens 50 19 This paper size is applicable to the Chinese National Standard (CNS) A4 specification (21〇x 297) (Public)) ------------ ¾ .------ -Order -------- * Line * (please read the precautions on the back before filling in this page) 473SS5 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Invention Description (j) d i + d 2. Next, the position detection camera 7 approaches the reference member 30, and in this state, the reference member 30 is directly imaged by the position detection camera 7. At this time, the distance to the focus position is not separated by The correction lens 50 thus becomes d1. As described above, in the sixth embodiment, in addition to the same advantages as the fifth embodiment described above, since the correction lens 50 is arranged at a lower height position, there is an advantage that the device can be designed to be relatively small. Also, unlike the fifth embodiment described above, the image of the tool 4 and the reference member 30 is imaged on the center 18b of the reflecting surface 18a of the 稜鏡 18 so that the image is relayed, so that a sharper image can be obtained. Next, a seventh embodiment will be described. The seventh embodiment shown in Fig. 12 is characterized by including a parallel flat plate 70. In this embodiment, the 稜鏡 93 and the translucent mirror 95 arranged in the same manner as in Fig. 14 (a) are used, but the illustration is omitted in Fig. 12. The lens 7f mounted on the position detecting camera 7 may be a non-telecentric lens. The focal position when only the lens 7f is used is the center 18b of the reflecting surface 18a of 稜鏡 18. The focal position when using both the lens 7f and the parallel flat plate 70 is the axis 30a of the reference member 30. The parallel plate 70 is fixed to the reference portion support table 11 by a parallel plate support table 72. The parallel plate 70 is made of glass. Since the refractive index of the parallel flat plate 70 is different from the refractive index of air, the distance to the focal position can be changed by passing through the parallel flat plate 70. As the material of the parallel flat plate 70, other transparent bodies such as plastic can also be used. However, in the seventh embodiment, the position detection camera 7 is used to parallelize both the tool 4 and the reference member 30 through the parallel flat plates 70 and 稜鏡 18. The paper size is in accordance with the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ^ -------- ^ --------- ^ I (Please read the notes on the back before filling out this page) 473S85 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 ----- BZ__ V. Description of the invention (//) Video recording. At this time, the distance to the focal point is changed to d 1 + d 2 by the parallel flat plate 70. Next, the position detection camera 7 is moved to approach the reference member 30, and in this state, the reference member 30 is directly imaged by the position detection camera 7. At this time, the distance to the focal point is di because the parallel plate 70 is not interposed. Therefore, in the seventh embodiment, the same effects as those in the fifth embodiment can be obtained. Next, an eighth embodiment will be described. The eighth embodiment can be said to be a modification of the optical member of the sixth embodiment. It replaces 稜鏡 93 and the translucent mirror 95. As shown in FIG. 13 (a), the mirror 81 and the reflective surface 82a are provided. The semi-transparent mirrors 82 and the semi-transparent reflecting surface 82 b are arranged parallel to each other, and the reference members 30 are irradiated with the laser diodes 86 and 87 from two directions. A 稜鏡 88 and a correction lens 89 are arranged in the path of the reflected light. The 稜鏡 88 has a reflecting surface inclined at 45 ° so that the reflected light is reflected upward and introduced into the camera 7 for position detection. The correction lens 89 is fixed to the reference portion support table 11 and is used to correct the distance to the focal position in the same manner as in the sixth embodiment. The distance d w between the center of the reflecting surface of 稜鏡 88 and the reference member 30 is substantially equal to the eccentricity Xt in the X direction of the optical axis 7a of the position detecting camera 7 and the axial center 4a of the tool 4. The remaining structure is the same as the sixth embodiment. The eighth embodiment is the same as the sixth embodiment described above. By using the position detection camera 7 through the correction lens 89 and the translucent mirror 82, both the tool 4 and the reference member 30 are imaged, followed by moving the particles. The detection camera 7 is set to approach the reference member 30, and in this state, the reference member 30 is directly imaged by the position detection camera 7. However, in the eighth embodiment, except that the paper size is the same as the sixth embodiment 21 above, the paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ^ -------- ^ ---- ---- »^ I. (Please read the notes on the back before filling out this page) 473S85 Printed by the Consumers’ Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (1) In addition to the advantages of the same state, there is no comparison The first to sixth embodiments have the advantage of using a smaller number of optical components. Furthermore, in the eighth embodiment of the translucent mirror 82, the refractive index of the material (for example, glass) and the refractive index of air are different, and it is necessary to adjust the thickness of the glass so that the optical path lengths of the light in the two directions are equal. Therefore, instead of the translucent mirror 82, a mirror 83 and a pelUcle beam splitter 85 are arranged as shown in FIG. 13 (b). At this time, the thickness of the thin film beam splitter 85 can be substantially ignored. The advantage is that it is easy to make the light path lengths of the two directions equal. Next, a ninth embodiment will be described. In the ninth embodiment shown in FIG. 15, the laser diodes 106 and 107 of the light source are not provided on the reference portion support table 111 and are provided on the bonding head 2. In this ninth embodiment, the laser diodes 106 and 107 are respectively fixed to the bonding head 2 when the tool 4 is close to the reference member 30 so that the laser diode 107 faces the 稜鏡 113 and the laser The diode 106 is opposed to 设置 109 (set on the support section 111 of the reference section). In addition, 22 is a rail for transporting a lead frame, and 24 is a bonding platform that maintains a coupling element (not shown). However, in the ninth embodiment, since the laser diodes 106 and 107 are provided on the coupling head 2, the design of the reference section support table 111 can be made smaller than that of the reference section support table 111. It is an advantage to avoid heat-resistant laser diodes 106, 107 from approaching the high heat of the bonding platform 24. Further, instead of the 稜鏡 H3, 114 and the translucent mirror 115 of this embodiment, the same effect can be obtained by using the 稜鏡 103 and the translucent mirror 105 shown in Fig. 14 (b). Next, the tenth embodiment will be described with reference to FIG. 16. In each of the above-mentioned embodiments, although the image of the tool 4 and the reference member 30 is transmitted through 18, 88, and 22 paper sizes, the Chinese National Standard (CNS) A4 specification (21,297 mm) is applied ------ ------ Clothes -------- Order --------- Line (Please read the notes on the back before filling this page) 473885 A7 B7 V. Description of the invention (y °) 108 and 118 are used for the position detection camera 7 ′. In this embodiment, the image of the tool 4 and the reference member 3Q is projected on the screen member 128. The screen member 128 is provided with a projection surface 128a inclined at 45 ° along the incident direction of the light L. The projection surface 128a is formed by coating a light-diffusing substance on the surface of a mirror. In addition, the materials of the projection surface 128a and the screen member 128 are suitable, such as frosted glass, plating, ceramics, and resins, which have light diffusivity. Also, phosphors and phosphors may be used. Furthermore, if infrared light is used as the light source, it is appropriate to use an infrared detection chip (such as the IR Detection Card (trademark) produced by Kodak). Furthermore, a temperature detection sheet that changes color with temperature using a liquid crystal or the like may be used. The distance from the position detection camera 7 to the projection surface 128a of the screen member 128 when the tool 4 is close to the reference member 30 is substantially equal to the position of the position detection camera 7 to detect the position of the combined component. The distance from the position detection camera 7 to the coupling element, and the distance from the position detection camera 7 to the reference member 30 in a position where the position detection camera 7 directly photographs the reference member 30. Therefore, the camera 7 for position detection can image the projection surface 128a and the reference member 30 without changing the focus when detecting the position of the coupling element. Also in this embodiment, 稜鏡 13, 14, translucent mirrors 15, and laser diodes 16, 17 are provided in the same manner as in the first embodiment, but these illustrations 0 are omitted in FIG. 16, however, In the tenth embodiment, the image of the tool 4 and the reference member 30 irradiated by the laser diodes 16 and 17 is projected on the projection surface 128 a of the screen member 128. Here, in this embodiment, if the tool 23 projected on the projection surface 128a (please read the precautions on the back before filling this page). ------- Order --------- Line · The paper size printed by the Employees 'Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs applies the Chinese National Standard (CNS) A4 specification (21 × 297 mm) 473885 A7 B7 printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economy ; \) 4 and the image of the reference member 30, no matter how far the distance between the projection surface 128a and the reference member 30 is, a clear image of the tool 4 and the reference member 30 can be obtained, so the optical member can be freely designed without Means for correcting the focal position such as the correction lens 40 of the fifth embodiment are required. Next, an eleventh embodiment will be described. The eleventh embodiment shown in Figs. Π and 18 is characterized by having 稜鏡 135 (with reference numeral 135a). The lens 7g mounted on the position detecting camera 7 may be a non-telecentric lens. The focus position when only the lens 7g is used is the distance from the imaging surface of the position detection camera 7 to the center 138b of the reflective surface 138a of the 稜鏡 138. The focal position when using both the lens 7g and the correction lens 14o is the center 135b of the reference mark 135a. The correction lens 140 is fixed to the reference portion support table 11 by a correction lens support table 142. However, the eleventh embodiment uses the position detecting camera 7 to take pictures of both the tool 4 and the reference mark 135 a through the correction lenses 140 and 稜鏡 135 and 138, converts them to electrical signals, and applies an image. By this processing, the deviation amounts ΔX1 and ΔΥ1 are obtained. Next, the position detection camera 7 is moved to approach the reference mark 135a. In this state, the reference mark 135a is directly photographed by the position detection camera 7 to convert it to an electrical signal, and then apply image processing to thereby Then, find the deviations ΔX2 and ΔΥ2. Then, from these deviation amounts, the correct eccentricity is calculated according to the above [Number 2]. As described above, in the eleventh embodiment, it is changed by the correction lens 140 held by the reference unit support table 11 or the reference mark 135a. The distance to the focus position, so with the movement to the tool 4 and reference mark 135a 24 ___ This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm). Μ -------- ^ --------- line, (Please read the precautions on the back before filling this page) || ___ 473S85 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of Invention (> Ί ") OK In the posture of shooting, the correction lens 140 will enter the optical path, and when both the tool 4 and the reference reference mark 135a are captured by the position detection camera 7, the reference mark 135a is detected by the position detection camera 7. In the case of direct camera shooting, no mechanical or electrical focusing is required. In addition, when imaging the tool 4 and the reference mark 135a, operations such as switching the light source due to imaging of the image in the X direction and imaging of the image in the Y direction can be omitted. Also, the case of using a telecentric lens as the lens 7g of this embodiment, the case of performing the operation of changing the focus position between the two cameras, or the case of using a plurality of imaging elements with different focus positions. 'Even if the correction lens 140 is not provided, Both can correctly perform detection based on the positional relationship between the two cameras. In addition, the sizes of the 稜鏡 135, 138, and the correction lens 140 may be appropriately selected, and they may be arranged so as to be mutually connected. Moreover, in the above-mentioned first to tenth embodiments, although the light sources in two different directions are selectively activated, that is, when one is turned on and the other is turned off, it is also possible to replace such a structure and replace The lightness ratio of one of the two directions of the light source § week round, the other * decrease, etc. 'to change the power ratio of the two. Also, the wavelengths of the light from the light sources in the two directions can be different from each other, and the images captured by the position detection camera 7 can be separated according to the wavelengths, and the separated images of each wavelength can be subjected to image processing. At this time, Simultaneously activate the light source in 2 directions. Moreover, in the first to tenth embodiments described above, although the images captured at angles different from each other by 90 ° are used to measure the deviation between the tool 4 and the reference member 3 (K, the relative angle between the two is also It can be different from 90 °. Moreover, the position for setting the reference member 30 is not limited to the position shown in each embodiment, and it can also be set closer to the position of the coupling element. Furthermore, the 25 yuan paper size can be applied to China National Standard (CNS) A4 specifications (210 X 297 public) ------------ f -------- ^ --------- (Please read the back first Note: Please fill in this page again) 47388 Printed A7 by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs -------- —_B7__ V. Description of the Invention (/ ^) Some protrusions of the piece (such as lead frame) Or, a through hole having a shape suitable for detection is used as a reference member. In the above-mentioned embodiments, although the positional relationship between the tool 4 and the reference member 30 (or the reference mark 135a) is first measured, then the tool 4 is moved and measured. The positional relationship between the position detecting camera 7 and the reference member 30 (or the reference mark 135a) ', but the order of the two measurements may be reversed. In the above-mentioned embodiments, "Although the processing member of the present invention is described as a separate tool 4", the present invention can also be applied to the measurement of the eccentricity of a plurality of processing heads and position detection cameras, or Measurement of the eccentricity of these plural processing heads. In each of the above-mentioned embodiments, although a gadolinium, a translucent mirror, or a mirror is used as the optical member, as long as the optical member of the present invention can process the member and reference The image light of the member 30 (or reference mark 135a) may be introduced into the position detection camera. For example, it may be an optical fiber that is arranged opposite to each other at an angle different from the reference member 30. In each of the above embodiments, In the form, although a camera for position detection is used, as long as the camera of the present invention can detect light, it may be a line sensor, for example. Also, in each of the above embodiments, the present invention will be described It is used in the case of wire bonding devices, but of course it can be applied to other kinds of bonding devices such as die bonding devices, ribbon bonding devices, flip chip bonding devices, etc. [Figure] Brief description] Figure 1 is a perspective view showing the main part of the coupling device related to the first embodiment. 26 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ------- ----- ^ -------- ^ -------- I ^ »(Please read the precautions on the back before filling out this page) 473SS5 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (/ [) Fig. 2 is a plan view showing a main part of the first embodiment. Fig. 3 is a front view showing a part of the main part of the first embodiment. Fig. 4 is a view showing the first part. Block diagram of the control system of the implementation form. Fig. 5 is a plan view showing the arrangement state of a tool, a position detection camera, and a reference member during eccentricity correction. Figs. 6 (a) and 6 (b) are explanatory views showing portraits in a posture where the tool is brought close to the reference member. FIG. 7 is an explanatory diagram showing a portrait in a position where the camera for position detection is brought close to a reference member. Fig. 8 is a front view showing a main part of the second embodiment. Fig. 9 is a perspective view showing a main part of the third embodiment. Fig. 10 is a front view showing a main part of the fifth embodiment. Fig. 11 is a front view showing a main part of the sixth embodiment. Fig. 12 is a front view showing a main part of the seventh embodiment. Fig. 13 (a) is a plan view showing a main part of the eighth embodiment, and (b) is a plan view showing a main part of a modification thereof. Fig. 14 (a) is a plan view showing the main parts of the optical members according to the second to seventh embodiments, and (b) is a plan view showing a modification thereof. FIG. 15 is a plan view showing a main part of the ninth embodiment. FIG. 16 is a perspective view showing a main part of the tenth embodiment. FIG. 17 is a perspective view showing a main part of the eleventh embodiment. Fig. 18 is a front view showing a main part of the eleventh embodiment. ----------- -------- Order --------- Line (Please read the precautions on the back before filling this page) This paper size applies to Chinese national standards (CNS) A4 specification (210 X 297 mm) 473385 Α7 Β7 Printed by the Consumers' Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of invention (β) [Symbol] 1 XY platform 2 Joint head 3 Joint arm 4 Tool 4a- axis Heart 7 Position detection camera 7a Optical axes 7b, 7c, 7d, 7e, 7f, 7g Lens 1U11 Reference section support stand 13, 14, 18, 88, 93, 103, 108, 109, 113, 114, 118, 135, 138稜鏡 15,82,95,105,115 Translucent mirrors 16, 17, 86, 87, 96, 97, 106, 107 Laser diodes 22 Rails for lead frame transportation 24 Mounting table 30 Reference member 30a Axes 40, 50, 89 Correction lens 128 Screen member 135a Reference mark 28 ^ -------- ^ --------- Line t (Please read the precautions on the back before filling this page) This paper size applies to China Standard (CNS) A4 specification (210 X 297 mm)

Claims (1)

  1. 473885 A8 B8 C8 D8 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 6. Application for patent scope 1. A combination device, which is characterized by: a camera for position detection, which is used to camera the combination element; a reference component, which It is arranged at a predetermined position; and the optical component is to introduce the image light of the processing component (for processing the aforementioned coupling element) and the reference component into the aforementioned position detection camera. 2. The coupling device according to item 1 of the scope of patent application, wherein the aforementioned optical component is the image light captured by the processing component and the reference component from a plurality of mutually different directions into the aforementioned position detection camera. 3. For the combined device of the first or second scope of the patent application, wherein the aforementioned position detection camera is provided with a telecentric lens. 4. For the combined device of the first or second scope of the patent application, which is further provided with a correction lens in the optical path of the aforementioned position detection camera; the images of the reference member and the processing member are passed through the correction mirror. The image is formed on the imaging surface of the position detection camera. 5. The combination device according to item 3 of the scope of patent application, which further includes a correction lens in the optical path of the position detection camera; the image of the reference member and the processing member is passed through the correction lens and imaged at the aforementioned position. * j The imaging surface of the camera for detection. 6. The coupling device according to item 4 of the patent application, wherein the correction lens is integrally held with the reference member. 7. The coupling device according to claim 5 in which the aforementioned correction lens is held integrally with the aforementioned reference member. 8.—A combined device, featuring: ·· 29 order ------ t-(Please read the notes on the back before filling out this page) This paper size applies to China National Standards (CNS) A4 specifications (Gongchu) 473385 8 8 8 8 ABCD Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 6. The patent-applying position detection camera is used to camera the combined components; the reference component is set at a predetermined position; the light source, It is used to irradiate the processing member (for processing the combined component) and the aforementioned reference member; and the screen member is to project the image of the aforementioned processing member and the aforementioned reference member onto it by the irradiation of the aforementioned light source; In a posture where the camera images the coupling element, the distance from the position detection camera to the coupling element is substantially equal to the position detection position when the processing member approaches the reference member. The distance from the camera to the aforementioned screen member. 9. A bonding method, which is a coupling device (equipped with: a camera for position detection, which is used for shooting a coupling element; a processing component, which is eccentrically disposed with respect to the camera for position detection, and is used for processing the aforementioned coupling element And a combination method provided in a predetermined position); characterized in that it includes: in a first posture after the position detection camera approaches the reference member, the position detection A step of measuring the positional relationship between the camera for position detection and the reference component; an image of the processing component and the reference component (in a second posture after the processing component approaches the reference (the second position after the test component)) Steps of introducing light into the camera for position detection, and then measuring the positional relationship between the processing member and the reference member with the camera for position detection; & Based on the results of these measurements, the ~~ posture group First; the amount of movement of the aforementioned position detection camera and the aforementioned processing member between ^ potential, to find 30 paper standards applicable to Chinese national standards CNS) A4 specification (210X2W mm " ^^ * ---- One (please read the precautions on the back before filling this page) 473SS5 A8 B8 C8 D8 VI. The steps for applying the patent to the correct eccentricity amount. 10 .—A coupling device comprising: a position detection camera that images a coupling element; a processing member that is eccentrically disposed with respect to the position detection camera to process the aforementioned coupling element; and, reference The component is set at a predetermined position; it is characterized by being provided with an arithmetic control device based on: in a first posture after the position detection camera is brought close to the reference component, the position detection Camera to measure the position detection \ Measurement using the positional relationship between the camera and the reference component 値; Place the processing component and the reference component (in the second position after the processing component approaches the reference component) The image light is introduced into the position detecting camera, and then the position detecting camera is used to measure the positional relationship between the processing member and the reference member. And the amount of movement of the position detection camera and the processing member between the first and second poses to determine the amount of eccentricity. (Please read the precautions on the back before filling this page ) The paper size printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs applies to the Chinese National Standard (CNS) A4 specification (210X297 mm)
TW089126699A 2000-01-21 2000-12-14 Bonding apparatus and bonding method TW473885B (en)

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KR20010076276A (en) 2001-08-11
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JP2001203234A (en) 2001-07-27
JP3416091B2 (en) 2003-06-16

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