TW440059U - Device for protecting the semiconductor etching reaction chamber apparatus - Google Patents
Device for protecting the semiconductor etching reaction chamber apparatusInfo
- Publication number
- TW440059U TW440059U TW88219579U TW88219579U TW440059U TW 440059 U TW440059 U TW 440059U TW 88219579 U TW88219579 U TW 88219579U TW 88219579 U TW88219579 U TW 88219579U TW 440059 U TW440059 U TW 440059U
- Authority
- TW
- Taiwan
- Prior art keywords
- protecting
- reaction chamber
- etching reaction
- chamber apparatus
- semiconductor etching
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW88219579U TW440059U (en) | 1999-11-18 | 1999-11-18 | Device for protecting the semiconductor etching reaction chamber apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW88219579U TW440059U (en) | 1999-11-18 | 1999-11-18 | Device for protecting the semiconductor etching reaction chamber apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
TW440059U true TW440059U (en) | 2001-06-07 |
Family
ID=21656239
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW88219579U TW440059U (en) | 1999-11-18 | 1999-11-18 | Device for protecting the semiconductor etching reaction chamber apparatus |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW440059U (zh) |
-
1999
- 1999-11-18 TW TW88219579U patent/TW440059U/zh not_active IP Right Cessation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GD4K | Issue of patent certificate for granted utility model filed before june 30, 2004 | ||
MK4K | Expiration of patent term of a granted utility model |