經濟部智慧財產局員工消費合作社印製 r^ 32 37 〇 五、發明說明（1 ) 【相關專利申請案之參考文獻】 本項專利申請案在此宣稱受益於以下之相關專利申請 案：1996年7月30日提出之臨時申請編號是60/022,775 之檁題爲“一個以飛行磁光頭爲基本架構之資料儲存和回 復系統”的專利案件；1996年8月6日提出之臨時申請編 號是6〇/〇23,1 276之標題爲“一個以飛行磁光頭爲基本架構 之資料儲存和回復系統”的專利案件；以及1996年8月 27曰提出之臨時申請編號是60/025,801之標題爲“一個以 飛行磁光頭爲基本架構之資料儲存和回復系統，，的專利案 件。每一項上述相關專利申請案的內容在此作爲參考之作 。所有相關的專利申請案亦共同被受託。 【發明背景】 1. 發明範圍 本項發明通常是有關於光學資料儲存系統，而且更特 別是有關被用於光學資料儲存系統中的飛行光學頭。 2. 背景技術 在一磁光儲存系統中，使用一塗覆於—旋轉中磁碟片 上的磁光（MO)記錄材料，由於磁域的空間變異，資訊可 以被記錄在磁碟片上。當讀取資料時，磁域模式會調變一 光學極化現象’而且一個偵測系統會將從光學產生的訊號 轉變成爲電子型式。 -------- ί! *-------訂------- * 線！ ΐ:請先閱讀背面之注意事項再填寫本頁) 1 2 本紙張尺度適用中國國家標準（CNS)A4規格（210 χ 297公：i ) 432 3 7 0 經濟部智慧財產局員工消費合作社印製 五、發明說明（〆） 在一種磁光儲存系統中，一個磁光頭組件被安置於一 線性致動器上，用以在資料被記錄和讀取時，將光學頭沿 著磁碟片之徑向而移動’且將該光學頭組件定位在資料磁 軌上。一個磁性線圈被安置在一位於光學頭組件上的獨立 組件上，用以生成一個在與磁碟片表面保持垂直之方向上 具有一磁性元件的磁場。藉由首次將雷射光束聚焦在磁碟 片上來形成一光學點，所產生的標記會指示爲零或一，因 此一個與媒體之周邊材料位置相對的極性垂直磁化現象會 被加以記錄β該光學點的功用是將磁光材料加熱到接近或 超過居禮點（亦即是在施加磁場之狀況下，磁化現象立即 會發生的溫度）。通過磁性線圈的電流會調整自發性磁化 現象往上或向下。此種調整動作只會發生在光學點中溫度 高的適宜區域內。當雷射光束被移開之後，磁化現象標記 的調整會被保存下來。倘若藉由磁性線圈生成一個位於相 反方向上之磁場所產生的雷射光束來將標記局部加熱至居 禮點，上述之標記才會被抹除或複寫。 由於磁性Kerr氏作用能夠偵測出藉由將特定標記加以 磁化而產生在一反射光束上的光學極化Kerr氏旋轉，資訊 能夠從一在磁碟片上的特殊標記處被讀取’ Kerr氏旋轉的 大小是由材料特性來決定（具體的型式爲Kerr氏係數） .藉由依照在特定標記處之自發性磁化現象的旋轉方向是順 時針或逆時針來建立有所差別之偵測方式，可以量測出旋 轉量的大小。 4 (請先閱讀背面之注意事項再填寫本頁》 -------- 訂----I--- -- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） A7 經濟部智慧財產局員工消費合作社印製 五、發明說明（$ ) 目前被提供讀取區域密度在每平方英吋十億位元左右 之磁光磁碟片的傳統式磁光頭容易因爲相當大之光學組件 ，造成光學頭的尺寸大小變得十分龐大（線性尺寸爲3 — 15mm)，因此，以機械方式驅動傳統式磁光頭去讀取位於 —磁光儲存磁碟片上之新資料磁軌的移動速度就會很慢。 此外，由於以上這些光學組件的大型尺寸，市面上最可能 採用之磁光磁碟片驅動器僅使用一個磁光頭來同時讀寫磁 光磁碟片的一側。舉例而言，目前市面上已有的商品化磁 光儲存裝置被提供用來讀取一 130mm雙側2.6 ISO十億位 元組磁光磁碟片的一側，其中磁碟片讀取時間爲40毫秒， 而且資料傳送速率爲每秒4.6百萬位元組。 N· Yamada (美國專利第5,255,260號）揭示了一種較 低形狀之飛行光學頭，用以讀寫若干光學磁碟片的上側和 下側表面。由Yamada所揭示之飛行光學頭使用一個用於 傳送光線至一相位變化光學磁碟片和從該相位變化光學磁 碟片接收光線的靜態反射鏡或稜鏡。雖然由Yamada所描 述之靜態光學裝置提供了如何讀寫若干個包含於固定體積 內之相位變化光學磁碟片之二上下表面的方法，但是由 Yamada所揭示之光學裝置的使用則會受到上述之光學裝置 能夠被做到多麼小的限制。因此，被製造出來能夠在已知 體積內產生作用之光學磁碟片的數目亦會受到限制。另外 一項缺點是有關於靜態折疊反射鏡的使用°此種處理方式 5Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs r ^ 32 37 05. Invention Description (1) [References to Related Patent Applications] This patent application hereby claims to benefit from the following related patent applications: 1996 The provisional application number filed on July 30 is 60 / 022,775, a patent case entitled "A data storage and recovery system based on a flying magnetic head as the basic structure"; the provisional application number filed on August 6, 1996 is 6 〇 / 〇23,1 276 is a patent case entitled "A data storage and recovery system based on a flying magneto-optical head as the basic structure"; and the provisional application No. 60 / 025,801 filed on August 27, 1996 is entitled " A patent storage case based on a flying magneto-optical head as the basic structure of the data storage and recovery system. The contents of each of the above-mentioned related patent applications are hereby incorporated by reference. All related patent applications are also jointly entrusted. [Invention Background] 1. Scope of the Invention This invention is generally related to optical data storage systems, and more particularly to flight used in optical data storage systems. Optical head 2. Background Art In a magneto-optical storage system, a magneto-optical (MO) recording material coated on a rotating magnetic disk is used, and information can be recorded on the magnetic disk due to the spatial variation of the magnetic domain. On-chip. When reading data, the magnetic domain mode will modulate an optical polarization phenomenon 'and a detection system will transform the signal generated from the optical into an electronic type. -------- ί! *- ------ Order ------- * line! Ϊ́: Please read the notes on the back before filling out this page) 1 2 This paper size applies to China National Standard (CNS) A4 (210 χ 297 mm) : I) 432 3 7 0 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the Invention (〆) In a magneto-optical storage system, a magneto-optical head assembly is placed on a linear actuator to store data During recording and reading, the optical head is moved in the radial direction of the magnetic disk and the optical head assembly is positioned on the data track. A magnetic coil is placed on a separate component on the optical head assembly , Used to generate a The magnetic field of the magnetic element. By focusing the laser beam on the disk for the first time to form an optical spot, the generated mark will indicate zero or one, so a polar perpendicular magnetization phenomenon opposite the position of the surrounding material of the medium will be The function of the optical point β is to heat the magneto-optical material close to or exceed the Curie point (that is, the temperature at which the magnetization occurs immediately under the condition of applying a magnetic field). The current passing through the magnetic coil will adjust the spontaneity The magnetization phenomenon is upward or downward. This adjustment action will only occur in a suitable area where the temperature is high in the optical point. When the laser beam is removed, the adjustment of the magnetization phenomenon mark will be preserved. If by the magnetic coil A laser beam generated by a magnetic field located in the opposite direction is generated to locally heat the mark to the Curie point, and the above mark will be erased or rewritten. Because the magnetic Kerr effect can detect the optical polarization Kerr's rotation on a reflected beam by magnetizing a specific mark, the information can be read from a special mark on the magnetic disk 'Kerr's The size of the rotation is determined by the material characteristics (the specific type is the Kerr's coefficient). By detecting the direction of rotation of the spontaneous magnetization at a specific mark is clockwise or counterclockwise to establish a different detection method, You can measure the amount of rotation. 4 (Please read the precautions on the back before filling out this page "-------- Order ---- I ----This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) A) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the Invention ($) The conventional magneto-optical heads that currently provide magneto-optical disks with a reading area density of about one billion bits per square inch are easy because The relatively large optical components cause the size of the optical head to become very large (the linear size is 3-15mm). Therefore, the traditional magneto-optical head is mechanically driven to read new data located on the magneto-optical storage disk. The magnetic track will move very slowly. In addition, due to the large size of these optical components, the most likely magneto-optical disk drive on the market uses only one magneto-optical head to read and write to one side of the magneto-optical disk at the same time For example, currently available commercially available magneto-optical storage devices are provided to read one side of a 130mm double-sided 2.6 ISO gigabyte magneto-optical disk, where the disk read time 40 milliseconds, and the data transfer rate 4.6 million bytes per second. N. Yamada (US Patent No. 5,255,260) discloses a lower-shaped flying optical head for reading and writing the upper and lower surfaces of several optical disks. Revealed by Yamada The flying optical head uses a static mirror or chirp for transmitting light to and receiving light from a phase-change optical disk. Although the static optical device described by Yamada provides how to read A method of writing a number of phase change optical disks contained in a fixed volume, two upper and lower surfaces, but the use of the optical device disclosed by Yamada is limited by how small the above optical device can be made. Therefore, The number of optical disks that can be made to work in a known volume is also limited. Another disadvantage is the use of static folding mirrors. This method of processing 5
,(請先閱讀背面之注意事項再填寫本頁V I ^-------訂-------•線. 本紙張&度適用中國國家標準（CNS)A4規格（210 X 297公釐） ^ 432 37 Ο Α7 ____Β7____ 五、發明說明（化） 會造成整個光學頭組件移動所需之磁軌伺服頻寬受到限制 ，該光學頭組件的移動是爲了改變已聚焦光學點之所在位 置。相同的限制亦會發生於由Murakami等人在美國專利 第5,197,050號所揭示之飛行磁光頭上。一般而言’用於 施行精細循跡伺服動作之元件質量愈大，伺服頻寬就變得 愈小和能夠被讀寫的磁軌密度亦變小° 一種用於移動一折疊稜鏡或反射鏡連同一精細循跡所 需之小型電流計致動器的方法已被揭示於C_ Wang在美國 專利第5,243,241號中，此電流計是由龐大的線圈和一個 被安裝於一附著在一飛行磁光頭上之線性致動器臂狀物上 的可旋轉式磁鐵所共同組成，上述之可旋轉式磁鐵則未被 安裝於滑件本體上。由於尺寸大小和重量，此種設計方式 限制了循跡伺服頻寬的大小和可使用的磁軌密度。其本身 的複雜程度亦增加製造成本和困難度。 因此，所需之改良式磁光飛行頭是要簡潔的’於是’ 相較於先前之技術，容許增加能夠被安置於一已知體積內 之磁光磁碟片的數目。改良過的飛行光學頭必須以能夠提 供高數字口徑、減小的光學頭質量、非常高共振頻率的精 細循跡伺服裝置，用以產生非常精細的磁軌伺服頻寬，以 及相當容易製造等項爲較適宜。此外，該飛行磁光頭亦必 須改善磁光磁碟驅動讀取時間、資料傳送速率和可使用的 磁光磁碟片磁軌密度。 6 I--— — — [I, I I I I . — (請先彻讀背面之注意事項再填寫本頁> 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（2】〇χ297公釐） •Ο"?。 a7 -- 五、發明說明（< ) 【發明簡述】 本項發明的功能是爲了改良一個以一飛行磁光（FMO )頭爲基本架構之系統中的資料儲存和回復’而且本項發 明以能夠提供以下功用爲較適宜：高數字口徑、減小的光 學頭質量、高精度磁軌伺服頻寬、增加磁光磁碟片的磁軌 密度、降低資料讀取時間、增加資料傳送速率、增加在一 已知體積內可讀取之磁光磁碟片的數目，以及能夠讀寫每 一個所使用之磁碟片的二側邊。 在較佳之實施例中，一個磁光儲存裝置之機械構造結 合一較低形狀光學頭共同組成一種採用一溫徹斯特式旋轉 致動臂、懸吊和空氣軸承技術的磁光資料系統。在較佳之 實施例中，雷射光學組件耦合一個光源共同組成一個或更 多個光學頭臂狀物，每一個臂狀物則被用來支撐一個用於 讀寫磁碟片儲存媒體所需之資料的光學頭。在較佳之實施 例中，當在寫資料時，光線經由一個別不同之單模式極化 維持（SMPM)光纖而被傳送至一個別不同的磁光頭，用 以局部加熱一旋轉中磁光（M0)儲存媒體的表面，於是生 成一個“熱點”。一個被埋入在光學頭內的磁性線圈被用 來製造一個依序以一往上或向下之垂直方向定位來自發地 將在熱點內區域磁化的磁場。因此，當磁光儲存媒體旋轉 時，所施加之磁場會被加以調變，用以將數位資料編碼成 爲一種“上或下”的磁域定位型式。當在讀取資料時，低 強度光線從個別不同單模式極化維持光纖而被傳送至一飛 7 (請先閱讀背面之注意事項再填寫本頁} 訂------- -線！ 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS>A4規格（210 X 297公釐） r4 32 3 7 ο A7 ____Z____B7__ 五、發明說明（L ) 行磁光頭，用以探索旋轉中的儲存媒體連同一已聚焦之光 學點。上述之資料讀取動作會被加以程式化，使得在已聚 焦之光學點位置上的媒體之磁化方向可以經由磁光Kerr氏 效應來改善光線的光學極化作用。以此方式，往上或向下 的極化定位型式代表著所儲存之數位資料將從磁光儲存媒 體反射出去之光線極化作用加以調整的結果。然後，從儲 存媒體反射出去的光線訊號則會往後耦合經過飛行磁光頭 而至一個用於解碼的差動放大器處。 從光纖傳送至光學頭的雷射光束被反射於一可導引式 微機械之折疊鏡上。從折疊鏡反射出去的光線被導引經過 一個例如是一 GRIN透鏡之埋入式微物鏡透鏡。在較佳之 實施例中，藉由將微機械之反射鏡繞著一旋轉軸轉動，來 施行精細循跡和短時間找尋相鄰磁軌的動作。以此方式， 一個已聚焦之光學點以一幾乎與儲存磁碟片之徑向保持平 行的方向被前後掃描。採用一微機械之可導引式反射鏡可 以得到一個具有相當高資料密度之磁光儲存媒體的重量輕 、成本低廉之飛行磁光頭。 【圖式說明】 圖1爲較佳之磁光儲存裝置的正視圖； 圖2爲表示圖1之磁光儲存裝置中雷射光學組件的槪 略視圖； 圖3爲表示圖1之飛行磁光頭的俯視圖： 8 (請先閱讀背面之泫意事項再填寫本頁> 訂--------線！ 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)Al規格（210 X 297公釐） F F4 32 3 7 ο 五、發明說明（1 ) 圖4爲圖3之飛行磁光頭的側視圖： 圖5爲圖3之飛行磁光頭的前視圖； 圖6爲表示光線路徑經過圖4之磁光頭的側視圖； 圖7爲表示圖4之磁光頭詳細內容的槪略側視圖； 圖8爲表示圖1組件中較佳微機械反射鏡的立體圖； 圖9爲表示較佳實施例之磁光頭的立體圖；及 圖10爲表示較佳實施例之磁光頭的立體圖" 【元件符號說明】 (請先閱讀背面之注意事項再填寫本頁). 經濟部智慧財產局員工消費合作社印製 100 磁光儲存裝置 110 雷射光學組件 120 相位補償器 130 單模式極化維持(SMPM)光纖 140 複數個SMPM光纖 145 線圈 150 光纖開關 155 磁光頭 160 光學頭臂狀物 165 懸吊 170 飛行磁光頭 180 磁光儲存媒體 185 心軸 203 相位補償器 210 差動放大器 9 本紙張尺度適用令國國家標準（CNS)A4蜆格（210 X 297公釐） 訂-------.線. 釁 4323 7 Ο A7 B7 五、發明說明（容 經濟部智慧財產局員工消費合作社印製 215 二極體偵測器 240 耦合式透鏡 245 洩漏光束分流器 250 瞄準光學裝置 255 雷射二極體 310 磁性線圏 330 滑件主體 340 可導引式微機械折疊反射鏡 350 SMPM光纖 360 v型溝槽 410 旋轉軸 420 GRIN微物鏡 440 聚焦光學點 510 空氣軸承表面 520 方向 620 透鏡直徑 630 光線焦點 640 厚度 650 外凸表面 710 電子線圏導線 720 光線通道 730 外殻 740 蝕刻孔洞 810 矽質單體 ---------- ---^ -------訂------- .(請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 經濟部智慧財產局員工消費合作社印製 Γ432 3 7 〇 A7 B7 五、發明說明（ί ) 815,820 接合墊 825,830 驅動電極 835 反射區域 840 鉸鍊 845 撓性層 850 矽質平板 855 矽質平板層 910 反射鏡支架 915,920 電極墊 925,930 孔洞 940,945 階梯 【較佳實施例之詳細說明】 在此參考圖1，其中表示一個磁光儲存裝置的實施例 。在本項發明中，磁光儲存裝置100之機槭構造結合飛行 磁光（FMO)頭的技術共同組成一個採用溫徹斯特式旋轉 致動臂、懸吊和空氣軸承技術的磁光（MO)資料儲存系統 。在較佳之實施例中，磁光儲存裝置100包括雷射光學組 件100、一單模式極化維持（SMPM)光纖130、—個相位 補償器12〇、一個光纖開關150、一個致動器磁鐵和線圈 145、若干個單模式極化維持（SMPM)光纖140、若千個 光學頭臂狀物160、若干個懸吊165、若干個磁光儲存媒體 180,以及若干個飛行磁光頭170。每一個磁光儲存媒體 180以被安裝於一心軸185上爲較適宜，用以在一固定角 11 ---------- ----' --------訂------- -- _{請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210x297公釐） ^4 32 3 7 〇 Α7 _____Β7_______ 五、發明說明UG) 速度下連續旋轉，而且每一個飛行磁光頭170以經由一個 別彈性懸吊165和光學頭臂狀物160而被連結至電磁致動 器磁鐵和線圈145爲較適宜。熟知本項技術之人士將可以 得知：磁光儲存裝置1〇〇可以包含最少一個飛行磁光頭 Π0和一個磁光儲存媒體180，或是每一個磁光儲存媒體 180有一個上側和下側飛行磁光頭17ί^ 在此亦參考圖2，雷射光學組件110包括一個雷射光 源，一個差動光二極體偵測系統和相關之光學元件，此雷 射光學組件本身以是獨立之次組件110或是一混成積體電 路元件爲較適宜。在較佳之實施例中，雷射光學組件110 更包括一個用於將光源加以極化之30到40mW雷射二極 體255或是在可見光或近紫外線區域（以在635nm附近爲 較適宜）下作動的二極體驅動微晶片雷射、一個洩漏光束 分流器245、在雷射光線從雷射二極體255通過至一洩漏 光束分流器245之前所使用的瞄準光學裝置250,和一個 以是一梯度折射指示（GRIN)透鏡爲較適宜的耦合式透鏡 24〇，此耦合式透鏡本身則被用來聚焦從洩漏光束分流器 245傳送至一個單模式極化維持（SMPM)光纖130內的光 線。 在較佳之實施例中，相位補償器120被用來補償產生 於一個極化維持光纖130和140之固有雙重極化模式間的 相對相位變異現象由於光纖的固有雙重折射現象，每一 12 本紙張尺度適用中國國家標準（CNS)A_4規格（210 X 297公釐） <請先閲讀背面之ii意事項再填寫本頁》 訂----—--|線！ 經濟部智M財產局員工消費合作社印製 '432 3 7 0 A7 _^_B7______ 五、發明說明（丨（） 個光纖130和14〇的極化模式均會承受不同折射指數。舉 例而言，由於每一個光纖和在溫度 '壓力及機械 運動方面之變化會導致二折射指數間產生些許差異，因此 相對相位的變異現象則會增強。上述之變異現象會被雷射 一光學組件no偵測出來，而且在嚴重的變化發生之前’ 有一個回授伺服機構（圖形中未表示出來）會調整相位補 償器，用以抵消該變異現象。以此方式，一個由光纖130 和140組成之往返飛行磁光頭I55的光學路徑會被依據其 本身之極化特性而被視爲與一自由空間光學路徑相類似。 在較佳之實施例中，相位補償器12〇包括一個以是由 一例如是鉛锆酸鹽鈦酸鹽之壓電材料所製成爲較適宜的壓 電圓柱形殼體，用以組成一個相位調變器’而且此相位調 變器的長度以小於其本身之直徑大小爲較適宜’用以提供 一個適用於在快速操作狀況下，電容已被減小之簡潔磁光 儲存系統中的較低形狀。光纖130則以一紫外線硬化環氧 樹脂或相類似黏著劑，將其附著於相位補償器203的周邊 。在較佳之實施例中，金屬電極被塗覆在圓柱殼體的平坦 末端上，用以減小電容’使得施加於電極之間的電壓被用 來促成殼體在徑向上產生膨脹，於是伸展光纖130。該伸 展作用被提供用來做爲相位調變。爲了減少作用於光纖 130上的機械應力，相位補償器120的直徑大小以是大於 光纖130之纖維被覆直徑的幾百倍爲較適宜。舉例而言’ 纖維被覆直徑在80微米左右所對應之相位補償器120的直 13 本紙張尺度適用中國國家標隼<CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填窝本頁- --------訂--II---I . 經濟部智慧財產局員工消費合作社印製 B7 靨4 32 3 ； 五、發明說明（\〆） 徑約在10到40mm附近。 在較佳之實施例中，光纖開關150於一入口通道處接 收單模式極化維持光纖130,而且於一出口通道處將從此 光纖130發射出去的光線傳送至若干單模式極化維持光纖 140的其中之一處。光纖開關150之開關切換特性是雙向 的，使得於出口通道處沿著任何一個單模式極化維持光纖 140而被傳送回到開關150的光線能夠於入口通道處被傳 送至光纖130。該單模式極化維持光纖140以能夠從光纖 開關150，沿著個別不同光學頭臂狀物160和懸吊165而 被傳送至個別不同飛行磁光頭170爲較適宜。在較佳之實 施例中，每一個飛行磁光頭170具有一個單模式極化維持 光纖140，而且光纖開關150則被用來決定磁光頭170是 否被驅動去讀取或記錄磁光儲存.媒體180的個別不同表面 在較佳之實施例中，經由個別獨立光纖140傳送至個 別不同飛行磁光頭170的光線被用來局部加熱一旋轉中磁 光儲存媒體180的個別不同表面，於是生成一個"熱點” 。一個埋入於飛行磁光頭170中的磁性線圈（將在下文中 詳加討論）被用來生成一個磁場，此磁場能夠以一往上或 向下之垂直方向定位，依序將在熱點內的區域加以自發性 地磁化。於是，當磁光儲存媒體180旋轉時，所施加之磁 場會被加以調變，用以將數位資料編碼成爲一種“上或下 14 本紙張尺度適用中國國家標準（CNS)A4規格（2丨0 X 297公釐） (請先閲讀背面之'注意事項再填寫本頁> --------訂*------ -線—— 經濟部智慧財產局員工消費合作社印製 Γ M32 37 Ο 經濟部智慧財產局員工消費合作社印製 Β7 五、發明說明（〇 ) ”磁域定位型式。當在讀取資料時，低密度極化光線經由 一單模式極化維持光纖140而被傳送至個別不同飛行磁光 頭170，用以探索旋轉中的儲存媒體180連同一已聚焦之 光學點。資料讀取動作的完成是由在已聚焦之光學點位置 上的磁光儲存媒體180之磁化方向經由磁光Kerr氏效應來 改善光線的光學極化作用。以此方式，往上或向下的極化 定位型式代表著所儲存之數位資料將從磁光儲存媒體180 反射出去之光線極化作用加以調變的結果。然後，從儲存 媒體180反射出去的光線訊號則會往後耦合經過飛行磁光 頭170、若干單模式極化維持光纖140的其中之一和光纖 開關150，最後到達二個光二極體偵測器215處，用以藉 由差動放大器210將光線訊號轉換成爲電子型式。 在此參考圖3，其中表示一個飛行磁光頭170的詳細 上視圖。在較佳之實施例中，每一個飛行磁光頭170包括 一個小型滑件主體330。此飛行磁光頭170更包括一個用 於握持住一單模式極化維持光纖350的V形溝槽360 ’ 一 個可導引式微機械折叠反射鏡340和一個磁性線圈310 ° 在此參考圖4，其中表示飛行磁光頭170的側視圖。 圖5表示同一個飛行磁光頭170的正視圖。在較佳之實施 例中，光學頭Π0採用一個飛行磁光儲存媒體180之上側 塗覆表面上方或下方的空氣軸承表面510。一個極化之雷 射光束經由單模式極化維持光纖350而被傳送至可導引式 15 (請先閱讀背面之d意事項再填寫本頁) --------訂·------ —線-- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 經濟部智慧財產局員工消費合作社印製 432370, (Please read the precautions on the back before filling in this page VI ^ ------- Order ------- • line. This paper & degree applies to China National Standard (CNS) A4 specification (210 X 297 mm) ^ 432 37 〇 Α7 ____ Β7 ____ 5. Description of the invention (chemical) will cause the limit of the servo bandwidth of the magnetic track required to move the entire optical head assembly. The movement of the optical head assembly is to change the position of the focused optical point Position. The same limitation will also occur on the flying magneto-optical head disclosed by Murakami et al. In US Patent No. 5,197,050. Generally speaking, 'the greater the mass of the component used to perform the fine tracking servo action, the greater the servo bandwidth The smaller the magnetic track density that can be read and written becomes, the smaller the method used to move a small galvanometer actuator for a folding cymbal or mirror to the same fine track has been revealed in C_ Wang in In U.S. Patent No. 5,243,241, this galvanometer is composed of a large coil and a rotatable magnet mounted on a linear actuator arm attached to a flying magneto-optical head. Type magnet is not installed On the slider body. Due to the size and weight, this design method limits the size of the tracking servo bandwidth and the usable track density. The complexity of itself also increases the manufacturing cost and difficulty. Therefore, it is necessary The improved magneto-optical flying head is to be concise 'so that' compared with the prior art, it allows to increase the number of magneto-optical disks that can be placed in a known volume. The modified flying optical head must be capable of It is suitable to provide a high digital aperture, reduced optical head quality, a very high tracking frequency fine tracking servo device for generating very fine track servo bandwidth, and being relatively easy to manufacture. In addition, the flying magnetic The optical head must also improve the magneto-optical disk drive read time, data transfer rate, and usable magneto-optical disk track density. 6 I --— — — [I, IIII. — (Please read the notes on the back first Please fill in this page again for the items > Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, the paper size is applicable to the Chinese National Standard (CNS) A4 specification (2) 0 × 297 mm) • 0 "?. A7- Description of the invention (<) Brief description of the invention The function of this invention is to improve the data storage and recovery in a system based on a flying magneto-optical (FMO) head. The functions are more suitable: high digital aperture, reduced optical head quality, high-precision magnetic track servo bandwidth, increased magnetic track density of magneto-optical disks, reduced data reading time, increased data transmission rate, increased Know the number of magneto-optical disks that can be read in the volume, and the ability to read and write the two sides of each disk used. In a preferred embodiment, the mechanical structure of a magneto-optical storage device is combined with a comparison The low-profile optical heads together form a magneto-optical data system using a Winchester-style rotary actuator arm, suspension, and air bearing technology. In a preferred embodiment, the laser optical component is coupled to a light source to form one or more optical head arms, and each arm is used to support a required for reading and writing a magnetic disk storage medium. Information of the optical head. In a preferred embodiment, when writing data, the light is transmitted to a different magneto-optic head through a different single-mode polarization maintenance (SMPM) fiber to locally heat a rotating magneto-optic (M0) ) The surface of the storage medium, so a "hot spot" is created. A magnetic coil embedded in the optical head is used to create a magnetic field that is sequentially positioned vertically upward or downward from the source and will be magnetized in the hot spot area. Therefore, when the magneto-optical storage medium is rotated, the applied magnetic field is modulated to encode the digital data into an "up or down" magnetic domain positioning pattern. When reading data, low-intensity light is transmitted from a single different-mode polarization-maintaining fiber to one fly 7 (Please read the precautions on the back before filling this page} Order --------Line! The paper size printed by the Employees' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs applies the Chinese national standard (CNS > A4 size (210 X 297 mm) r4 32 3 7 ο A7 ____Z____B7__ V. Description of the invention (L) Magnetic head for exploration The rotating storage medium is connected to the same focused optical point. The above data reading action will be programmed so that the magnetization direction of the medium at the focused optical point position can be improved by the magneto-optic Kerr effect Optical polarization effect. In this way, the upward or downward polarization positioning pattern represents the result of adjusting the polarization effect of the light reflected from the magneto-optical storage medium. The outgoing light signal is then coupled back through the flying magnetic head to a differential amplifier for decoding. The laser beam transmitted from the optical fiber to the optical head is reflected in a Guided micro-mechanical folding mirror. The light reflected from the folding mirror is guided through a buried micro-objective lens such as a GRIN lens. In a preferred embodiment, the micro-mechanical mirror is wound around A rotation axis is rotated to perform fine tracking and seek adjacent magnetic tracks for a short time. In this way, a focused optical point is scanned back and forth in a direction that is almost parallel to the radial direction of the storage disk. A micromechanical steerable mirror can be used to obtain a light-weight and low-cost flying magneto-optical head with a relatively high data density magneto-optical storage medium. [Illustration of the drawings] Figure 1 shows a preferred magneto-optical storage device. Front view; Figure 2 is a schematic view showing the laser optical component in the magneto-optical storage device of Figure 1; Figure 3 is a top view showing the flying magneto-optical head of Figure 1: 8 (Please read the intention on the back before filling in this Page > Order -------- line! The paper printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economy applies the Chinese National Standard (CNS) Al specification (210 X 297 mm) F F4 32 3 7 ο 5 , Explanation (1) Fig. 4 is a side view of the flying magneto-optical head of Fig. 3: Fig. 5 is a front view of the flying magneto-optical head of Fig. 3; Fig. 6 is a side view showing a light path passing through the magneto-optical head of Fig. 4; 4 is a schematic side view showing the details of the magneto-optical head of FIG. 4; FIG. 8 is a perspective view showing a preferred micro-mechanical reflector in the assembly of FIG. 1; FIG. 9 is a perspective view showing a magneto-optical head of a preferred embodiment; A perspective view of the magneto-optical head of the preferred embodiment " [component symbol description] (please read the precautions on the back before filling out this page). Printed by the Ministry of Economic Affairs, Intellectual Property Bureau, Consumer Cooperative, 100 magneto-optical storage devices, 110 laser optical components 120 Phase compensator 130 Single-mode polarization maintenance (SMPM) fiber 140 Multiple SMPM fibers 145 Coil 150 Fiber switch 155 Magneto-optic head 160 Optical arm 165 Suspension 170 Flying magneto-optical head 180 Magneto-optical storage medium 185 Mandrel 203 Phase Compensator 210 Differential amplifier 9 This paper size is applicable to the national standard (CNS) A4 grid (210 X 297 mm) Order -------. Line. Provo 4323 7 〇 A7 B7 V. Description of the invention ( Capacity Printed by the Ministry of Economic Affairs of the Ministry of Consumer Affairs, Consumer Cooperatives, 215 Diode Detector 240 Coupling Lens 245 Leakage Beam Splitter 250 Aiming Optics 255 Laser Diode 310 Magnetic Coil 330 Slider Body 340 Guided Micromachine Folding mirror 350 SMPM fiber 360 v-groove 410 rotation axis 420 GRIN micro objective 440 focusing optical point 510 air bearing surface 520 direction 620 lens diameter 630 light focus 640 thickness 650 convex surface 710 electronic wire conductor 720 light channel 730 outside Shell 740 Etched hole 810 Silicon monomer ---------- --- ^ ------- Order -------. (Please read the precautions on the back before filling in this Page) This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy Γ432 3 7 〇A7 B7 V. Description of the invention (ί) 815,820 Bonding pads 825,830 Drive electrodes 835 reflection area 840 hinge 845 flexible layer 850 silicon plate 855 silicon plate layer 910 mirror holder 915,920 electrode pad 925,930 hole 940,945 step [preferred embodiment ] Described in detail herein with reference to FIG. 1, which shows an embodiment of a magneto-optical storage device. In this invention, the magneto-optical structure of the magneto-optical storage device 100 combined with the technology of the flying magneto-optical (FMO) head constitutes a magneto-optic (MO) using Winchester-style rotary actuator, suspension and air bearing technology. ) Data storage system. In a preferred embodiment, the magneto-optical storage device 100 includes a laser optical assembly 100, a single-mode polarization maintenance (SMPM) fiber 130, a phase compensator 120, a fiber switch 150, an actuator magnet, and The coil 145, a plurality of single-mode polarization maintenance (SMPM) optical fibers 140, a thousand optical head arms 160, a plurality of suspensions 165, a plurality of magneto-optical storage media 180, and a plurality of flying magneto-optical heads 170. It is more appropriate that each magneto-optical storage medium 180 is mounted on a mandrel 185 and is used at a fixed angle 11 ---------- ---- '-------- order --------_ {Please read the precautions on the back before filling this page) This paper size applies to China National Standard (CNS) A4 (210x297 mm) ^ 4 32 3 7 〇Α7 _____ Β7 _______ V. Description of the invention UG) Continuous rotation at a speed, and each flying magneto-optical head 170 is preferably connected to an electromagnetic actuator magnet and a coil 145 via an elastic suspension 165 and an optical head arm 160. Those skilled in the art will know that the magneto-optical storage device 100 can include at least one flying magneto-optical head Π0 and one magneto-optical storage medium 180, or each magneto-optical storage medium 180 has one upper side and one lower side. Magneto-optic head 17 Also referring to FIG. 2, the laser optical component 110 includes a laser light source, a differential light diode detection system and related optical components. The laser optical component itself is an independent secondary component 110. Or it is more suitable to integrate the integrated circuit components. In a preferred embodiment, the laser optical module 110 further includes a 30 to 40 mW laser diode 255 for polarizing a light source or in a visible or near ultraviolet region (preferably around 635 nm). An actuated diode-driven microchip laser, a leaky beam splitter 245, a targeting optic 250 used before the laser light passes from the laser diode 255 to a leaky beam splitter 245, and a A GRIN lens is a more suitable coupling lens 24. The coupling lens itself is used to focus the light transmitted from the leaked beam splitter 245 to a single-mode polarization maintenance (SMPM) fiber 130. . In a preferred embodiment, the phase compensator 120 is used to compensate for the relative phase variation between the inherent dual polarization modes of a polarization maintaining fiber 130 and 140. Due to the inherent double refraction of the fiber, each 12 papers Standards are applicable to China National Standard (CNS) A_4 specifications (210 X 297 mm) < Please read the notice on the back before filling in this page. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs' 432 3 7 0 A7 _ ^ _ B7______ V. Description of the invention () () The polarization modes of the optical fibers 130 and 14O will all bear different refractive indices. For example, because Each optical fiber and changes in temperature, pressure, and mechanical movement will cause a slight difference in the birefringence index, so the relative phase variation will be enhanced. The above variation will be detected by the laser-optical component no. And before serious changes occur, a feedback servo (not shown in the figure) adjusts the phase compensator to offset this variation. In this way, a round-trip flying magneto-optic head composed of optical fibers 130 and 140 The optical path of I55 is considered to be similar to a free-space optical path based on its own polarization characteristics. In a preferred embodiment, the phase compensator 120 includes a component such as lead zirconate The titanate piezoelectric material is made into a more suitable piezoelectric cylindrical shell to form a phase modulator ', and the length of the phase modulator is It is more suitable to be smaller than its own diameter 'to provide a lower shape suitable for compact magneto-optical storage systems whose capacitance has been reduced under fast operating conditions. The optical fiber 130 is made of a UV-cured epoxy resin or Similar to an adhesive, it is attached to the periphery of the phase compensator 203. In a preferred embodiment, the metal electrode is coated on the flat end of the cylindrical case to reduce the capacitance 'so that the The voltage is used to cause the housing to expand in the radial direction, thereby stretching the fiber 130. This stretching effect is provided for phase modulation. In order to reduce the mechanical stress on the fiber 130, the diameter of the phase compensator 120 is It is more suitable to be several hundred times larger than the fiber coating diameter of the optical fiber 130. For example, 'the fiber coating diameter is about 80 micrometers corresponding to the phase compensator 120 straight 13 This paper size applies to the Chinese national standard < CNS) A4 Specifications (210 X 297 mm) (Please read the notes on the back before filling in this page--------- Order --II --- I. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs B7靥 4 32 3; V. Description of the invention (\ 〆) The diameter is about 10 to 40mm. In a preferred embodiment, the fiber switch 150 receives a single-mode polarization maintaining fiber 130 at an entrance channel, and an exit channel The light emitted from this fiber 130 is transmitted to one of several single-mode polarization maintaining fibers 140. The switching characteristics of the fiber switch 150 are bidirectional, so that any single-mode polarization is maintained at the exit channel The optical fiber 140 and the light transmitted back to the switch 150 can be transmitted to the optical fiber 130 at the entrance channel. The single-mode polarization maintaining optical fiber 140 can be passed from the optical fiber switch 150 along the respective optical head arms 160 and suspensions. It is more suitable to be transmitted to individual different flying magneto-optic heads 165. In the preferred embodiment, each flying magneto-optical head 170 has a single-mode polarization maintaining fiber 140, and the fiber switch 150 is used to determine whether the magneto-optical head 170 is driven to read or record magneto-optical storage. The medium 180 Individual Different Surfaces In a preferred embodiment, the light transmitted to individual different flying magneto-optical heads 170 through individual independent optical fibers 140 is used to locally heat a different surface of a rotating magneto-optical storage medium 180, thus creating a " hot spot " A magnetic coil embedded in the flying magneto-optic head 170 (to be discussed in detail below) is used to generate a magnetic field, which can be positioned in a vertical direction up or down, and will be sequentially located in the hot spot. The area is spontaneously magnetized. Therefore, when the magneto-optical storage medium 180 is rotated, the applied magnetic field is modulated to encode the digital data into an "upper or lower 14 paper standards applicable to Chinese national standards (CNS ) A4 specification (2 丨 0 X 297 mm) (Please read the 'Cautions on the back side and then fill out this page> -------- Order * ------ -Line——Ministry of Economy Printed by the Consumer Cooperative of the Property Bureau Γ M32 37 〇 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economics B7 V. Invention Description (〇) “Magnetic domain positioning type. When reading data, low-density polarized light passes through a single The mode polarization maintaining fiber 140 is transmitted to each of the different flying magnetic heads 170 to explore the rotating storage medium 180 with the same focused optical point. The completion of the data reading operation is at the position of the focused optical point. The magnetization direction of the magneto-optical storage medium 180 is to improve the optical polarization of the light through the magneto-optic Kerr effect. In this way, the upward or downward polarization positioning pattern represents that the stored digital data will be stored from magneto-optical storage. The polarization effect of the light reflected from the medium 180 is modulated. Then, the light signal reflected from the storage medium 180 is coupled back through the flying magnetic head 170, one of the single-mode polarization maintaining fibers 140, and The optical fiber switch 150 finally reaches two photodiode detectors 215 to convert the light signal into an electronic type by using a differential amplifier 210 Referring to Figure 3, a detailed top view of a flying magneto-optical head 170 is shown. In a preferred embodiment, each flying magneto-optical head 170 includes a small slider body 330. The flying magneto-optic head 170 further includes a handle for holding A V-shaped groove 360 ′ holding a single-mode polarization-maintaining optical fiber 350 ′, a steerable micromechanical folding mirror 340 and a magnetic coil 310 ° is referred to FIG. 4, which shows a side view of the flying magneto-optical head 170. FIG. 5 indicates a front view of the same flying magneto-optical head 170. In a preferred embodiment, the optical head Π0 uses an air bearing surface 510 above or below the coated surface of the flying magneto-optical storage medium 180. A polarized laser beam is transmitted to the steerable 15 through a single-mode polarization maintaining fiber 350 (please read the notice on the back before filling this page) -------- Order ·- ---- —Line-- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 432370
五、發明說明（vM 微機械折疊反射鏡34〇。V形溝槽的主軸（因此，依靠於 該V形溝槽上之光纖350的主軸）幾乎是平行於媒體180 之表面。從光纖350處離開的光線被微機械折疊反射鏡 340以幾乎與光纖350之主軸成90度角的平均角度加以反 射出去。此反射出去的光線被導引經過一個例如是一 GRIN透鏡之埋入式微物鏡透鏡420。在較佳之實施例中， 藉由將反射鏡340繞著一旋轉軸410轉動，來施行精細循 跡和短時間找尋相鄰磁軌的動作（如圖4之所示）。以此 方式，一個已聚焦之光學點440以一幾乎與媒體180之徑 向保持平行的方向被前後掃瞄。當致動器臂狀物160移動 滑件主體330前後越過媒體180之表面#，該滑件主體的 位置會稍微歪斜，使得方向520不致於精確地與磁光儲存 媒體180之徑向保持平行。雖然無法精確地保持平行*該 歪斜角的角度相當小，使得在掃瞄方向520的部份元件能 夠沿著儲存媒體180之徑向依靠。 在此亦參考圖6,其中表示一個本項發明之較佳透鏡 420的側視圖。從折疊反射鏡340反射出去的光線會被一 個由一物鏡GRIN透鏡420所組成之聚焦光學裝置收集， 該物鏡GRIN透鏡被用來將反射出來的光線聚焦於磁光儲 存媒體180的表面上。光纖350在V形溝槽360內的位置 可以被調整，於是改變了從單模式極化維持光纖350之末 端到反射鏡340處的距離。重新安置單模式極化維持光纖 350在V形溝槽內的位置可以有效地調整從透鏡420處離 本紙張尺度適用中國國家標準（CNS)A4規格<210 X 297公釐） (請先閱讀背面之注意事項再填宵本頁、 訂------- -線！ Β7 鱭4 32 3 7 Ο 五、發明說明（/ ) 開之光線焦點630位置。一旦光纖350被定位用於適宜地 聚焦在媒體180的表面上時，此光纖藉由施加紫外線（UV )硬化環氧樹脂或其他類似黏著劑而被牢牢固定住。 GRIN透鏡420的使用提供了一種簡潔的圓柱形狀， 容許透鏡容易被插入至位於滑件主體330的孔洞中。爲了 減小球面像差和得到限制繞射聚焦現象，透鏡42〇會被擦 光，用以與一簡單球面形狀之外凸表面650共同組成一個 平凸的形狀。透鏡420的厚度640和曲率半徑大小是由以 下因素來決定，其中包括折射率梯度的大小、光線波長、 單模式極化維持光纖350的數字口徑，以及由透鏡420之 有效數字口徑決定的所需聚焦光學點440。在較佳之實施 例中，透鏡420的厚度640大約爲170到500微米，曲率 半徑大約爲150到400微米，以及透鏡的直徑620大約爲 200到500微米》 雖然在圖3到圖6所示之較佳實施例中揭示了一個包 含一GRIN透鏡的單元件物鏡透鏡，但是熟知本項技術之 人士亦可得知：額外之物鏡光學裝置可以被用來增強透鏡 42〇的性能。舉例而言，聚焦物鏡光學裝置可以包括一個 平面透鏡或是一個與GRIN透鏡420相結合的固態浸入式 透鏡。上述之額外透鏡元件的使用可以得到較大之數字口 徑和較小之聚焦光學點440的尺寸。較小的光學點440尺 寸容許有較多的區域資料密度被寫入和從磁光儲存媒體 本紙張尺度適用t國國家標準（CNS)A4規烙（210 X 297公楚） -------- ----- ---------訂------- 線 ί (請先閱績背面之沒意事項再填寫本頁} 經濟部智慧財產局員工消費合作社印製 r - ---................. - ...................... 經濟部智慧財產局員工消費合作社印製 *4 3 2 3 7 〇 a? _____Β7 五、發明說明（4) 180中讀取。 由塑造玻璃或塑膠材料所製成的微光學透鏡亦可以被 用來取代GRIN透鏡420。舉例而言，二個塑造完成之平 凸球面透鏡可以藉由放置二個朝向彼此之外凸表面而提供 —個當反射鏡340旋轉時，具有高數字口徑和良好偏離軸 心性能的微型透鏡系統。在一個雙重球面光學設計中，光 線幾乎被瞄準於二個光學元件之間，於是，在不需要額外 透鏡之狀況下，一個卡片形光波照片可以被放置於二元件 之間，在另外一項實施例中，一個具有較低之數字口徑（ 0.2到0.4)的小型塑造球面透鏡可以被用來結合一個平面 或固態浸入式透鏡，用以生成一個具有相當高數字口徑（ 大於0.6)的光學聚焦系統。從製造的觀點來看’由於大量 製造之成本低廉，因此採用塑造的透鏡就很有利。在此所 揭示之一種用於大量製造透鏡的方法包含塑造一透鏡陣列 ，然後而用鑽石鋸切割或雷射切割來分割該透鏡陣列，用 以得到個別不同的透鏡。當考慮到以上所提及之二透鏡設 計方式時，在透鏡陣列被分割之前，該二塑造完成之平凸 透鏡陣列會藉由錐狀配件而匹配在一起，用以確保透鏡精 確地對準在同一直線上。 在此亦可參考圖7，其中表示一個圖4所示之光學頭 170的槪略側視圖。在較佳之實施例中，磁性線圈310被 埋入於GRIN透鏡420以下，成爲飛行磁光頭170的一部 — — — — — ——1— - t — —'— — — — · I I I •(請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 經濟部智慧財產局員工消費合作社印製V. Description of the invention (vM micromechanical folding mirror 34 °. The main axis of the V-shaped groove (thus, the main axis of the optical fiber 350 on the V-shaped groove) is almost parallel to the surface of the medium 180. From the optical fiber 350 The exiting light is reflected by the micromechanical folding mirror 340 at an average angle of almost 90 degrees with the main axis of the optical fiber 350. The reflected light is guided through a buried micro-objective lens 420 such as a GRIN lens In a preferred embodiment, the mirror 340 is rotated around a rotation axis 410 to perform a fine tracking and a short-term search of adjacent magnetic tracks (as shown in FIG. 4). In this way, A focused optical spot 440 is scanned back and forth in a direction that is almost parallel to the radial direction of the medium 180. When the actuator arm 160 moves the slider body 330 back and forth over the surface # of the medium 180, the slider body Will be slightly skewed so that the direction 520 will not be exactly parallel to the radial direction of the magneto-optical storage medium 180. Although it cannot be accurately parallelized * the angle of the skew angle is quite small, so that in the scanning direction 520 Some components can be relied on along the radial direction of the storage medium 180. Reference is also made to FIG. 6, which shows a side view of a preferred lens 420 of the present invention. The light reflected from the folding mirror 340 is A collection of focusing optics consisting of an objective GRIN lens 420. The objective GRIN lens is used to focus the reflected light on the surface of the magneto-optical storage medium 180. The position of the optical fiber 350 in the V-shaped groove 360 can be adjusted. The distance from the end of the single-mode polarization maintaining fiber 350 to the reflector 340 was changed. Relocating the position of the single-mode polarization maintaining fiber 350 in the V-shaped groove can effectively adjust the size of the paper from the lens 420 Applicable to China National Standard (CNS) A4 specifications < 210 X 297 mm) (Please read the precautions on the back before filling in this page, ordering ------line! Β7 鲚 4 32 3 7 〇 5 Explanation of the invention (/) The position of the focus 630 of the open light. Once the optical fiber 350 is positioned to appropriately focus on the surface of the medium 180, the optical fiber is applied by applying ultraviolet (UV) hardening epoxy resin or other similar adhesives. Be The GRIN lens 420 is used to provide a simple cylindrical shape, allowing the lens to be easily inserted into the hole located in the slider body 330. In order to reduce spherical aberration and limit the diffraction focus, the lens 42 will be Polishing is used to form a flat convex shape with a simple spherical convex surface 650. The thickness 640 and the radius of curvature of the lens 420 are determined by the following factors, including the size of the refractive index gradient, the wavelength of the light, The single-mode polarization-maintaining digital aperture of the optical fiber 350 and the required focusing optical point 440 determined by the effective digital aperture of the lens 420. In a preferred embodiment, the thickness 640 of the lens 420 is approximately 170 to 500 microns, the radius of curvature is approximately 150 to 400 microns, and the diameter 620 of the lens is approximately 200 to 500 microns. The preferred embodiment discloses a single-piece objective lens including a GRIN lens, but those skilled in the art can also know that additional objective optics can be used to enhance the performance of the lens 42. For example, the focusing objective optical device may include a flat lens or a solid-state immersion lens combined with a GRIN lens 420. The use of the additional lens element described above can result in a larger digital aperture and a smaller focusing optical spot 440 size. The smaller optical spot 440 size allows more regional data density to be written to and from the magneto-optical storage media. The paper size applies the National Standard (CNS) A4 (210 X 297 cm) ----- --- ----- --------- Order ------- Line ί (please read the unintentional matters on the back of the results before filling out this page) Employee Consumer Cooperatives, Intellectual Property Bureau, Ministry of Economic Affairs Printing r----......................-............ Ministry of Economics Printed by the Consumer Cooperative of the Property Bureau * 4 3 2 3 7 〇a? _____ Β7 V. Description of the invention (4) 180. Micro-optical lenses made of molded glass or plastic materials can also be used instead of GRIN lenses 420. For example, two finished plano-convex spherical lenses can be provided by placing two convex surfaces facing each other-a miniature with high digital aperture and good off-axis performance when the mirror 340 rotates Lens system. In a dual-spherical optical design, light is almost aimed between two optical elements, so a card-shaped photo can be placed on the two elements without the need for additional lenses. Meanwhile, in another embodiment, a small shaped spherical lens with a lower digital aperture (0.2 to 0.4) can be used in combination with a flat or solid-state immersion lens to produce a relatively high digital aperture (Greater than 0.6) optical focusing system. From a manufacturing point of view 'Because mass manufacturing is inexpensive, it is advantageous to use shaped lenses. A method for mass manufacturing of lenses disclosed herein includes shaping a lens array Then, the lens array is divided by diamond saw cutting or laser cutting to obtain individual different lenses. When the two lens design methods mentioned above are considered, the two shaping is completed before the lens array is divided. The plano-convex lens array is matched together by a cone-shaped fitting to ensure that the lenses are accurately aligned on the same straight line. Reference can also be made to FIG. 7 here, which shows a schematic of the optical head 170 shown in FIG. 4 Side view. In the preferred embodiment, the magnetic coil 310 is buried below the GRIN lens 420 and becomes a part of the flying magneto-optical head 170- — — ——1—-t — —'— — — — • • • Please read the notes on the back before filling out this page) This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs
f Λ 32 3 1 Q u A7 ____B7___ 五、發明說明（β ) 份。磁性線圈310產生一個在一與磁光儲存媒體180正交 (亦即是垂直）之方向上具有一較大分量的磁場。一個被 插入至透鏡420內的蝕刻孔洞740或溝槽從頂端處被加以 蝕刻，而且停止在一已預先設定的深度。在蝕刻孔洞74〇 被製作完成之前，一個小直徑的光線通道72〇開口會成形 於滑件主體330的底端上。當在被製作時，光線通道720 的深度和直徑大小會被做成能夠提供一淸晰之光學路徑予 一聚焦光束。光線通道72〇以是具有一幾乎與極化光線之 聚焦錐形角度（在數字口徑爲之狀況下，半角大約爲 37度）相等之錐角的錐形形狀爲較適宜。以此方式，一個 外殼730區域被成形用來支撐透鏡420，同時，亦容許一 平面磁性線圈310被安置於一個被蝕刻在外殼底端側邊上 的凹部區域內。在較佳之實施例中，光線通道720的直徑 大到足夠容納極化光線的偏離軸心導引。 在較佳之實施例中，平面線圈310傳送一個與磁光儲 存媒體180保持垂直的磁場，此磁場在磁光儲存媒體180 之磁性儲存層處的兩個極性大小約爲170磁場強度，而且 包括2到3個儲存層，其中每一層具有5到10個電鍍導體 圈。儲存層的數目和每一個儲存層的圈數是介於線圈310 與磁性記錄層間之空間大小（一般是在5到20微米的範圍 內）的函數。在較佳之實施例中，儲存層相隔大約6微米 ，電鍍導體線圈310的迴圈則具有大約5微米的徑向節距 ，而且產生大約170磁場強度之磁場所需的線圏電流大約 19 — — — — — ——1 1 I- / I ' I .— I [ n 1 I 4 I n [ t _r r t I T (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 經濟部智慧財產局員工消費合作社印製 P4 32 37 Ο Α7 ______Β7___ 五、發明說明（^¾) 是50到70毫安培（零點到尖峰値）。由線圏電感（大約 爲200奈亨利或更小）和驅動用電子元件所記錄的線圈切 換時間在10奈秒或更短時間之範圍內，而且依據以上所提 及之介於線圈與磁性記錄層間的間隙，線圏310的直徑範 圍從在最內側區域處之1〇微米到在周邊處之80微米。電 子線圈導線710以沿著孔洞740之壁面經過或是穿過位於 滑件主體之分離孔洞爲較適宜（圖形中未表示出來）。 在此參考圖8，其中表示一個微機械反射鏡340之較 佳實施例的立體視圖。在較佳之實施例中，反射鏡340是 一種扭轉型反射鏡，其中包含一個矽質單體810、驅動電 極825和830、接合墊815和820、一個已接合之矽質平板 850，以及一個以例如是二氧化矽、氮化矽或矽等材料所組 成的薄膜撓性層845。反射鏡340可以使用微機械技術來 製作，用以產生一個反射的內部扭轉反射區域835，其中 包含位於頂端之撓性層845和位於底端之機械剛性所需的 矽質平板層855，而且該反射區域是被撓性層鉸鏈840所 支撐。反射區域835可以塗覆一層金或其他類似物質，用 以增加光學反射性和改善反射鏡的靜電致動作用。在較佳 之實施例中，由於反射鏡本身的特定幾何形狀和材料性質 ，反射鏡340的共振頻率大約是在50到200千赫玆的範圍 內。在較佳之實施例中，反射鏡340大約是一個正方形， 其中外側線性尺寸大約是在100到170微米的範圍內，而 且厚度大約是從2到50微米。在較佳實施例中，內部反射 20 本紙張尺度適用中國國家標準<CNS)A4規格（210 X 297公釐〉 -------- ----... --------訂---------線! (請先閲讀背面之ii意事項再填窝本頁)· 經濟部智慧財產局員工消費合作社印製 Γ »4323 7 ο Α7 _____ Β7 五、發明說明（J) 區域835的外側線性尺寸大約是在25到200微米之範圍內 ，而且厚度大約是在1到20微米。反射鏡34〇本身則以能 夠在沒有任何過度側向運動之狀況下被加以扭轉驅動爲較 適宜。 在一項做爲例證之實施例中，反射區域835在一側邊 之尺寸以是在微米左右爲較適宜’共振頻率以是大約 100千赫玆爲較適宜，而且最大的物理角度偏離量以是2 度爲較適宜。此外，反射鏡340在作動時無論靜態或動態 上均必須不會產生彎曲，而且在靜電偏離時的最大應力必 須要小於被用來製作該反射鏡之材料（例如是矽' 二氧化 矽、氮化矽和鋁）的預期降伏應力。 反射鏡340的作動是藉由施加一差動電壓至驅動電極 825和830。作用在電極825和830上的差動電壓會導致一 靜電作用力產生於反射區域835。反射區域835繞著鉸鏈 840而旋轉，使得反射出去的光線被加以導引和沿著媒體 180之表面被前後掃瞄。參考以下之圖10，反射鏡340的 操作方式會做更進一步討論。 在此參考圖9,其中表示一個包含有一滑件主體330 和反射鏡支架910之飛行磁光頭170的立體視圖。在較佳 之實施例中，反射鏡支架910包括電極墊915和920，用 以提供將差動電壓施加至位於反射鏡340上之相對應接合 (請先間讀背面之注音？事項再填鸢本頁) 訂------ •線！ 本紙張尺度適用中圉國家標準（CNS)A4規格（210 X 297公釐） r 14 32 3 / u A7 經濟部智慧財產居員工消費合作社印製 B7 五、發明說明（7°) 墊815和820所需的電子接點。反射鏡支架910額外包括 出入口孔洞925和930，如同以上所討論過之內容，此二 出入口孔洞被用來提供一個從單模式極性維持光纖350到 反射鏡反射區域835，隨後到達透鏡420處的淸晰光學路 徑。在較佳之實施例中，反射鏡支架910提供一個45度 的支撐表面給反射鏡340。熟知本項技術之人士將可以得 知：反射鏡支架910可以被連結至滑件主體330，而且使 用任何數目之例如是分開微機械滑件主體330和反射鏡支 架910，然後再將此二組件黏接在一起的製作方式。在另 外一項實施例中，使用例如是傾斜反射鏡組件抵住一個具 有適宜尺寸階梯940和945之適宜尺寸滑件的其他方法， 亦可以產生45度的支撐表面。 在此參考圖10，其中表示一個可導引式反射鏡340被 安裝於一反射鏡支架910上。將差動電壓施加至電極墊 915和92〇的作用是用來導引由單摸式極性維持光纖350 所產生之雷射光束。可導引式微機械反射鏡400被用來改 變極性化雷射光束在被傳送至一物鏡透鏡420之前的傳播 角度。光線630之合成焦點沿著儲存媒體180之徑向520 的運動被用來循跡和短時間從一個資料磁軌找尋到下一個 磁軌。在較佳之實施例中，循跡作用的完成可以藉由使用 組合式之粗略和精確循跡伺服技巧。一個取樣過之區段伺 服模式可以被用來界定軌跡。這些伺服標記包括印入媒體 之浮起凹洞或是讀取方式與資料標記相類似的磁性標記β 22 {請先，聞讀背面之注意事項再填寫本頁) 訂----- —線！ 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 經濟部智慧財產局員工消費合作社印製 r 4 32 37 0 A7 _______B7 五、發明說明（^/) 在採用浮起凹洞之狀況下，熟知本項技術之人士將可得知 :雷射光學組件110的差動放大器210輸出必須另外補充 一個加法器電路。藉由連續調整輸入至一致動器線圈（在 圖1中.表示出部份致動器磁鐵和線圈145)之電流大小來 維持粗略的循跡作用，用以控制光學頭臂狀物懸吊165的 位置，同時，精確循跡作用的完成則是藉由連續調整一個 可導引式反射鏡340的角度偏離。 由於能夠供提供一種非常快速操作一光學光束的方法 ，因此，採用一可導引式微機械反射鏡就很有利。此種方 法方便高速循跡和短時間找尋，用以大幅度改善資料存取 時間。由於能夠使用非常窄的磁軌節距，上述之改良結果 所產生的高區域密度得以超過傳統式光學頭技術。飛行磁 光頭Π0之設計在本質上是共焦的。當在讀取資料時，從 磁光儲存媒體180反射出去的光線會往後耦合至在一共焦 系統中作爲口徑的單模式極性維持光纖140。一項因爲使 用共焦光學系統所導致的優點包括沿著光學軸方向具有非 常高深度之解析度和改善橫向解析度。另外一項因爲使用 共焦系統所得到的優點是從物鏡光學表面反射出去之光線 不會被收集，使得不須使用到抗反射塗覆層。使用一平面 式透鏡和若干不爲零的工作距離在設計上特別有利。另外 ’高深度之解析度容許在一多層媒體（圖形中未表示出來 )中之各層的間隔可以非常接近，各層之間的資料洩漏現 象亦變得很少，同時，相較於在一非共焦系統之狀況下， 23 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） {請^S讀背面之注意事項再填窝本頁) 訂·------ 線！ r 432 37 〇 經濟部智慧財產局員工消費合作社印製 五、發明說明（方〇 改善過的橫向解析度被提供用來偵測出較小的儲存媒體標 記和較尖銳的儲存媒體標記邊緣。 在圖1到圖10中所說明之儲存裝置100架構和飛行 磁光頭設計代表著一種用於在高密度磁光儲存媒體上儲存 資訊的方法。熟知本項技術之人士將可以得知：爲了得到 事實上相同的目標，本項發明的許多項不同交換方式亦可 以被應用。舉例而言，不同種類的光纖開關（例如是微機 械、電子一光學、熱一光學）均可以被採用》此外，飛行 磁光頭的設計可以被修改成使用一自由空間光學輸入光束 ，於是除去了光纖140。另外，由於其他微物鏡透鏡（例 如是塑造完成之球面、雷射攝影式透鏡、二位元或其他繞 射式光學透鏡），聚焦用物鏡透鏡就不須被限制成僅是一 個GRIN透鏡。本項發明亦可以被使用作爲一個僅供讀取 或一個僅供記錄乙次的飛行光學頭，或是另外一方面，一 個飛行光學頭。熟知本項技術之人士可以得知：本項發明 可以被應用於光碟（CD)和數位影音光碟（DVD)。於是 *熟知本項技術之人士亦可以得知：本項發明可以被應用 於所有的光學儲存系統。 熟知本項技術之人士在讀過以上之描述內容後，顯然 可以針對本項發明做許多其他的改變和修正，但是値得注 意之處是圖形中說明所示和描述的特定實施例不是做爲限 制之用。 24 (請先_閲讀背面之注意事項再填窝本頁> 訂----- . _線！ 本紙張又度適用中國國家標準（CNS)A4規格（210 X 297公釐）f Λ 32 3 1 Q u A7 ____B7___ 5. Description of the invention (β). The magnetic coil 310 generates a magnetic field having a larger component in a direction orthogonal to (ie, perpendicular to) the magneto-optical storage medium 180. An etched hole 740 or groove inserted into the lens 420 is etched from the top and stopped at a predetermined depth. Before the etching hole 74 is completed, a small-diameter light channel 72 opening is formed on the bottom end of the slider body 330. When being fabricated, the depth and diameter of the light channel 720 will be made to provide a clear optical path to a focused beam. The light channel 72 is preferably a cone shape having a cone angle almost equal to the focusing cone angle of the polarized light (in the case of the digital aperture, the half angle is about 37 degrees). In this way, an area of the housing 730 is shaped to support the lens 420, while also allowing a planar magnetic coil 310 to be placed in a recessed area etched on the bottom side of the housing. In the preferred embodiment, the diameter of the light channel 720 is large enough to accommodate off-axis guidance of polarized light. In a preferred embodiment, the planar coil 310 transmits a magnetic field that is perpendicular to the magneto-optical storage medium 180. The two polarities of the magnetic field at the magnetic storage layer of the magneto-optical storage medium 180 are about 170 magnetic field strength, and include 2 To 3 storage layers, each of which has 5 to 10 plated conductor loops. The number of storage layers and the number of turns per storage layer are a function of the amount of space between the coil 310 and the magnetic recording layer (typically in the range of 5 to 20 microns). In a preferred embodiment, the storage layers are separated by about 6 microns, and the loop of the plated conductor coil 310 has a radial pitch of about 5 microns, and the coil current required to generate a magnetic field of about 170 magnetic field strength is about 19 — — — — — ——1 1 I- / I 'I .— I [n 1 I 4 I n [t _r rt IT (Please read the precautions on the back before filling this page) This paper size applies Chinese National Standard (CNS ) A4 size (210 X 297 mm) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs P4 32 37 〇 Α7 ______ Β7 ___ V. The description of the invention (^ ¾) is 50 to 70 milliamps (zero to sharp peak). The coil switching time recorded by the line inductance (approximately 200 nano-Henry or less) and the driving electronics is within 10 nanoseconds or less, and according to the above mentioned, between coil and magnetic recording The gap between the layers, the diameter of the coils 310 ranges from 10 microns at the innermost region to 80 microns at the periphery. The electronic coil wire 710 is preferably passed along the wall surface of the hole 740 or passed through a separate hole in the slider body (not shown in the figure). Reference is now made to Fig. 8 which shows a perspective view of a preferred embodiment of a micromechanical mirror 340. In a preferred embodiment, the mirror 340 is a twist-type mirror, which includes a silicon monomer 810, driving electrodes 825 and 830, bonding pads 815 and 820, a bonded silicon flat plate 850, and a For example, it is a thin film flexible layer 845 composed of silicon dioxide, silicon nitride, or silicon. Mirror 340 can be fabricated using micromechanical technology to create a reflective internal torsional reflection region 835, which includes a flexible layer 845 at the top and a silicon flat layer 855 at the bottom for mechanical rigidity. The reflective area is supported by a flexible layer hinge 840. The reflective area 835 may be coated with a layer of gold or other similar material to increase the optical reflectivity and improve the electrostatic actuation of the mirror. In the preferred embodiment, due to the specific geometry and material properties of the mirror itself, the resonance frequency of the mirror 340 is approximately in the range of 50 to 200 kHz. In a preferred embodiment, the mirror 340 is approximately a square, wherein the outer linear dimension is approximately in the range of 100 to 170 microns, and the thickness is approximately 2 to 50 microns. In the preferred embodiment, the internal reflection 20 paper size is applicable to the Chinese National Standard < CNS) A4 specification (210 X 297 mm) -------- ----... ----- --- Order --------- line! (Please read the notice on the back of the page before filling in this page) · Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy Γ »4323 7 ο Α7 _____ Β7 5 Explanation of the invention (J) The outside linear size of the region 835 is in the range of 25 to 200 microns, and the thickness is approximately 1 to 20 microns. The mirror 34 itself is capable of being in a state without any excessive lateral movement. It is more suitable to be driven by twisting. In an exemplary embodiment, the size of the reflection region 835 on one side is preferably about micrometers, and the resonance frequency is about 100 kHz. Moreover, the maximum deviation of the physical angle is preferably 2 degrees. In addition, the mirror 340 must not bend when it is static or dynamic, and the maximum stress during the static deviation must be less than that used for fabrication. The material of the mirror (such as silicon 'silicon dioxide, silicon nitride and aluminum) Expected stress drop. The action of the mirror 340 is by applying a differential voltage to the driving electrodes 825 and 830. The differential voltage acting on the electrodes 825 and 830 will cause an electrostatic force to be generated in the reflective region 835. The reflective region 835 Rotate around the hinge 840, so that the reflected light is guided and scanned back and forth along the surface of the medium 180. Referring to Figure 10 below, the operation mode of the mirror 340 will be discussed further. Reference figure here 9, which shows a perspective view of a flying magneto-optical head 170 including a slider body 330 and a mirror support 910. In a preferred embodiment, the mirror support 910 includes electrode pads 915 and 920 to provide differential voltage Applies to the corresponding joint on the reflector 340 (please read the phonetic on the back first? Matters and then fill in this page) Order -------- • Line! This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) r 14 32 3 / u A7 Printed by B7 of the Intellectual Property Department of the Ministry of Economic Affairs and Consumer Cooperatives. V. Description of the invention (7 °) Electronic contacts required for pads 815 and 820. Mirror bracket 910 additionally includes The entrance holes 925 and 930, as discussed above, are used to provide a clear optical path from the single-mode polarity maintaining fiber 350 to the mirror reflection area 835, and then to the lens 420. In the preferred embodiment, the mirror support 910 provides a 45 degree support surface for the mirror 340. Those skilled in the art will know that the mirror support 910 can be connected to the slider body 330, and any number of For example, it is a manufacturing method in which the micromechanical slider body 330 and the mirror support 910 are separated, and then the two components are bonded together. In another embodiment, other methods, such as tilting a mirror assembly against a suitably sized slider having steps 940 and 945 of appropriate size, can also produce a 45 degree support surface. Reference is made here to FIG. 10, which shows that a steerable mirror 340 is mounted on a mirror holder 910. The role of applying the differential voltage to the electrode pads 915 and 92 is to guide the laser beam generated by the single-touch polarity maintaining fiber 350. The steerable micromechanical mirror 400 is used to change the propagation angle of a polarized laser beam before being transmitted to an objective lens 420. The movement of the synthetic focus of the light 630 along the radial direction 520 of the storage medium 180 is used for tracking and searching for a short time from one data track to the next track. In the preferred embodiment, the tracking effect can be accomplished by using a combination of coarse and precise tracking servo techniques. A sampled sector servo pattern can be used to define the trajectory. These servo marks include floating pits printed on the media or magnetic marks β 22 similar to data marks (please read the precautions on the back before filling out this page) Order ----- —Line !! This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy r 4 32 37 0 A7 _______B7 V. Description of the invention (^ /) In the use of floating recesses In this situation, those skilled in the art will know that the output of the differential amplifier 210 of the laser optical component 110 must be supplemented with an adder circuit. By continuously adjusting the current input to the actuator coil (in Fig. 1, some actuator magnets and coils 145 are shown) to maintain a rough tracking effect to control the optical head arm suspension 165 At the same time, the precise tracking function is completed by continuously adjusting the angle deviation of a steerable mirror 340. Since a method for operating an optical beam can be provided very quickly, it is advantageous to use a steerable micromechanical mirror. This method facilitates high-speed tracing and short-term searching, and is used to greatly improve data access time. Due to the ability to use very narrow track pitches, the high area density produced by the above improved results exceeds conventional optical head technology. The design of the flying magnetic head Π0 is confocal in nature. When reading data, the light reflected from the magneto-optical storage medium 180 is coupled back to the single-mode polarity-maintaining fiber 140 as the aperture in a confocal system. One of the advantages of using a confocal optical system includes resolution with very high depth along the optical axis and improved lateral resolution. Another advantage is that the confocal system has the advantage that the light reflected from the optical surface of the objective lens will not be collected, making it unnecessary to use an anti-reflection coating. The use of a flat lens and several non-zero working distances are particularly advantageous in design. In addition, 'high-depth resolution allows the intervals between layers in a multi-layered medium (not shown in the figure) to be very close, and the data leakage between each layer has become very small. At the same time, compared with a non- Under the condition of the confocal system, 23 paper sizes are applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) {Please read the precautions on the back and fill in this page again) Order · ------ line! r 432 37 〇 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the Invention (The improved lateral resolution is provided to detect smaller storage media marks and sharper edges of storage media marks. The storage device 100 architecture and flying magneto-optical head design illustrated in Figures 1 to 10 represent a method for storing information on high-density magneto-optical storage media. Those skilled in the art will know that in order to get the facts For the same purpose, many different exchange methods of this invention can also be applied. For example, different types of fiber switches (such as micromechanics, electronics-optics, thermal-optics) can be used. In addition, flight The design of the magneto-optical head can be modified to use a free-space optical input beam, so that the optical fiber 140 is removed. In addition, because of other micro-objective lenses (such as shaped spheres, laser-type lenses, two-bit or other diffraction) Optical lens), the objective lens for focusing need not be limited to just a GRIN lens. This invention can also be used Used as a read-only or record-only flying optical head, or on the other hand, a flying optical head. Those skilled in the art can know that this invention can be applied to optical discs (CDs) ) And digital audio and video discs (DVD). So * people familiar with this technology can also know: this invention can be applied to all optical storage systems. After reading the above description, it is obvious to those who are familiar with this technology Many other changes and modifications can be made to this invention, but it should be noted that the specific embodiment shown and described in the figure is not intended as a limitation. 24 (Please read the notes on the back before filling Nest page > Order -----. _Line! This paper is again applicable to China National Standard (CNS) A4 (210 X 297 mm)