TW367561B - Wet-etching method - Google Patents
Wet-etching methodInfo
- Publication number
- TW367561B TW367561B TW085113538A TW85113538A TW367561B TW 367561 B TW367561 B TW 367561B TW 085113538 A TW085113538 A TW 085113538A TW 85113538 A TW85113538 A TW 85113538A TW 367561 B TW367561 B TW 367561B
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- etching
- wet
- insulation
- passivation layer
- Prior art date
Links
Landscapes
- Weting (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
A kind of wet-etching method of the surface of semiconductor substrate which includes the welding of insulation/passivation layer on the surface of substrate and forming the thin film circuit pattern thereon by wet-etching. The insulation/passivation layer is formed by two steps: first, to arrange the substrate on the surface of substrate in a suitable pitch for growth of insulation film; second, to turn 180 degree of the completed test sheet and arranged with a suitable pitch and to depose or coat a pair of etching agent of dull protection film on the other exposed substrate surface so that the thin film to be etched on the substrate can be completely isolated with the etching solution. Because there is only the material to be etched existing in the wet-etching environment, the effect of etching solution can be best employed and controlled.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW085113538A TW367561B (en) | 1996-11-04 | 1996-11-04 | Wet-etching method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW085113538A TW367561B (en) | 1996-11-04 | 1996-11-04 | Wet-etching method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW367561B true TW367561B (en) | 1999-08-21 |
Family
ID=57941244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW085113538A TW367561B (en) | 1996-11-04 | 1996-11-04 | Wet-etching method |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW367561B (en) |
-
1996
- 1996-11-04 TW TW085113538A patent/TW367561B/en active
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