TW202423818A - Receiving and placing machine and transferring mechanism - Google Patents

Receiving and placing machine and transferring mechanism Download PDF

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Publication number
TW202423818A
TW202423818A TW111146883A TW111146883A TW202423818A TW 202423818 A TW202423818 A TW 202423818A TW 111146883 A TW111146883 A TW 111146883A TW 111146883 A TW111146883 A TW 111146883A TW 202423818 A TW202423818 A TW 202423818A
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Taiwan
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lifting
plate
arm
transmission
group
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TW111146883A
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Chinese (zh)
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TWI831505B (en
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楊仲平
謝忠明
吳東芳
曾凱駿
劉奎延
謝忠晉
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迅得機械股份有限公司
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Priority to TW111146883A priority Critical patent/TWI831505B/en
Priority claimed from TW111146883A external-priority patent/TWI831505B/en
Priority to CN202310804155.XA priority patent/CN117585439A/en
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Publication of TWI831505B publication Critical patent/TWI831505B/en
Publication of TW202423818A publication Critical patent/TW202423818A/en

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Abstract

A receiving and placing machine that is used for transferring plates includes a loading port, a transferring mechanism and a conveying mechanism. An object container can be transported to the loading port and the transferring mechanism is disposed between the loading port and the conveying mechanism. The transferring mechanism can deliver the plates from the object container to the conveying mechanism, or deliver the plates from the conveying mechanism to the object container. As a result, automated production can be facilitated and the production efficiency can be improved. The transferring mechanism includes a four-axis robotic arm, a bearing member and a travel axis. The bearing member is connected to the four-axis robotic arm and can be used to carry and move the plates. The four-axis robotic arm is disposed on the travel axis that can be used to drive the four-axis robotic arm and the bearing member to move linearly. The four-axis robotic arm includes a robotic arm and a lifting device, the robotic arm is disposed on the lifting device that can drive the robotic arm to move up and down.

Description

收放板機構及移載機構Retractable plate mechanism and transfer mechanism

本發明涉及一種收放板機構(EFEM)及移載機構,尤指一種能用於移載板件的收放板機構及移載機構。The present invention relates to an EFEM and a transfer mechanism, and in particular to an EFEM and a transfer mechanism that can be used for transferring panels.

收放板機構(EFEM)能用以移載板件,收放板機構可以使用機械手臂來移動板件,然而現有的收放板機構及機械手臂,生產動線不佳,往往難以達到自動化生產,使生產效率難以提升。The EFEM can be used to transfer panels. The EFEM can use a robot to move panels. However, the existing EFEM and robot have poor production lines and are often difficult to achieve automated production, making it difficult to improve production efficiency.

本發明所要解決的技術問題在於,針對現有技術的不足提供一種收放板機構及移載機構,能便利於自動化生產,使生產效率提升。The technical problem to be solved by the present invention is to provide a plate retracting and releasing mechanism and a transfer mechanism to address the deficiencies of the prior art, which can facilitate automated production and improve production efficiency.

為了解決上述的技術問題,本發明提供一種收放板機構,用於移載板件,該收放板機構包括:一裝載埠,該裝載埠能用以暫存物件容器,該物件容器能用以容納該板件;一移載機構,該移載機構包含至少一四軸機械手臂、至少一承載件及一走行軸,該承載件連接於該四軸機械手臂,該四軸機械手臂能驅動該承載件,用於承載及移動該板件,該四軸機械手臂包含一機械臂及一升降裝置,該機械臂設置於該升降裝置上,該升降裝置能驅動該機械臂升降移動,該四軸機械手臂設置於該走行軸上,該走行軸能帶動該四軸機械手臂及該承載件直線移動;以及一輸送機構,該輸送機構能用以輸送該板件,該移載機構設置於該裝載埠及該輸送機構之間,該移載機構能將該物件容器內的板件移動至該輸送機構,或將該輸送機構上的板件移動至該物件容器內;其中該機械臂包括一基座、一第一臂體、一第二臂體、一手臂動力源、一第一傳動組、一第二傳動組及一第三傳動組,該基座連接於該升降裝置,該第一臂體能相對於該基座轉動,該第二臂體能相對於該第一臂體轉動,該第二臂體的一端設置一操作端,該操作端連接於該承載件,該操作端可轉動設置於該第二臂體,該手臂動力源及該第一傳動組設置於該基座內,該第一傳動組連接於該手臂動力源,該第二傳動組設置於該第一臂體內,該第三傳動組設置於該第二臂體內,該第二傳動組連接於該第一傳動組及該第三傳動組之間,該第三傳動組連接於該操作端。In order to solve the above technical problems, the present invention provides a plate retracting mechanism for transferring plates, the plate retracting mechanism comprising: a loading port, the loading port can be used to temporarily store an object container, the object container can be used to accommodate the plate; a transfer mechanism, the transfer mechanism comprising at least one four-axis robot arm, at least one bearing member and a travel axis, the bearing member is connected to the four-axis robot arm, the four-axis robot arm can drive the bearing member, and is used to carry and The four-axis robot comprises a robot arm and a lifting device, wherein the robot arm is arranged on the lifting device, and the lifting device can drive the robot arm to move up and down, and the four-axis robot arm is arranged on the running axis, and the running axis can drive the four-axis robot arm and the carrier to move linearly; and a conveying mechanism, which can be used to convey the plate, and the transfer mechanism is arranged between the loading port and the conveying mechanism, and the transfer mechanism The mechanism can move the plate in the object container to the conveying mechanism, or move the plate on the conveying mechanism into the object container; wherein the mechanical arm includes a base, a first arm body, a second arm body, an arm power source, a first transmission group, a second transmission group and a third transmission group, the base is connected to the lifting device, the first arm body can rotate relative to the base, the second arm body can rotate relative to the first arm body, and the second arm body can rotate relative to the first arm body. An operating end is provided at one end, the operating end is connected to the supporting member, the operating end is rotatably provided on the second arm body, the arm power source and the first transmission group are provided in the base, the first transmission group is connected to the arm power source, the second transmission group is provided in the first arm body, the third transmission group is provided in the second arm body, the second transmission group is connected between the first transmission group and the third transmission group, and the third transmission group is connected to the operating end.

為了解決上述的技術問題,本發明還提供一種移載機構,包括:至少一四軸機械手臂,該四軸機械手臂包含一機械臂及一升降裝置,該機械臂設置於該升降裝置上,該升降裝置能驅動該機械臂升降移動;至少一承載件,該承載件連接於該四軸機械手臂,該四軸機械手臂能驅動該承載件,用於承載及移動該板件;以及一走行軸,該四軸機械手臂設置於該走行軸上,該走行軸能帶動該四軸機械手臂及該承載件直線移動;其中該機械臂包括一基座、一第一臂體、一第二臂體、一手臂動力源、一第一傳動組、一第二傳動組及一第三傳動組,該基座連接於該升降裝置,該第一臂體能相對於該基座轉動,該第二臂體能相對於該第一臂體轉動,該第二臂體的一端設置一操作端,該操作端連接於該承載件,該操作端可轉動設置於該第二臂體,該手臂動力源及該第一傳動組設置於該基座內,該第一傳動組連接於該手臂動力源,該第二傳動組設置於該第一臂體內,該第三傳動組設置於該第二臂體內,該第二傳動組連接於該第一傳動組及該第三傳動組之間,該第三傳動組連接於該操作端。In order to solve the above technical problems, the present invention also provides a transfer mechanism, including: at least one four-axis robot arm, the four-axis robot arm includes a robot arm and a lifting device, the robot arm is arranged on the lifting device, and the lifting device can drive the robot arm to move up and down; at least one bearing member, the bearing member is connected to the four-axis robot arm, the four-axis robot arm can drive the bearing member to carry and move the plate; and a running shaft, the four-axis robot arm is arranged on the running shaft, the running shaft can drive the four-axis robot arm and the bearing member to move linearly; wherein the robot arm includes a base, a first arm body, a second arm body, an arm power source, A first transmission group, a second transmission group and a third transmission group, the base is connected to the lifting device, the first arm body can rotate relative to the base, the second arm body can rotate relative to the first arm body, an operating end is set at one end of the second arm body, the operating end is connected to the supporting member, and the operating end can be rotatably set on the second arm body, the arm power source and the first transmission group are set in the base, the first transmission group is connected to the arm power source, the second transmission group is set in the first arm body, the third transmission group is set in the second arm body, the second transmission group is connected between the first transmission group and the third transmission group, and the third transmission group is connected to the operating end.

本發明的有益效果在於,本發明所提供的收放板機構及移載機構,該收放板機構包括一裝載埠、一移載機構及一輸送機構。物件容器能輸送至裝載埠,移載機構設置於裝載埠及輸送機構之間,移載機構能將物件容器內的板件移動至輸送機構,或將輸送機構上的板件移動至物件容器內,具有較佳的生產動線,能便利於自動化生產,使生產效率提升。The beneficial effect of the present invention lies in that the plate retracting and unretracting mechanism and the transfer mechanism provided by the present invention include a loading port, a transfer mechanism and a conveying mechanism. The object container can be conveyed to the loading port, the transfer mechanism is arranged between the loading port and the conveying mechanism, and the transfer mechanism can move the plate in the object container to the conveying mechanism, or move the plate on the conveying mechanism to the object container, which has a better production line, can facilitate automated production, and improve production efficiency.

該移載機構包含至少一四軸機械手臂、至少一承載件及一走行軸,承載件連接於四軸機械手臂,四軸機械手臂包含一機械臂及一升降裝置,機械臂設置於升降裝置上,升降裝置能驅動機械臂升降移動,四軸機械手臂設置於走行軸上,走行軸能帶動四軸機械手臂及承載件直線移動,能擴大四軸機械手臂及承載件的移動範圍。機械臂包括一基座、一第一臂體、一第二臂體、一手臂動力源、一第一傳動組、一第二傳動組及一第三傳動組,手臂動力源及第一傳動組設置於基座內,第一傳動組連接於手臂動力源,第二傳動組設置於第一臂體內,第三傳動組設置於第二臂體內,第二傳動組連接於第一傳動組及第三傳動組之間,機械臂使用單一手臂動力源,可使結構簡化、成本降低。The transfer mechanism includes at least one four-axis robot arm, at least one carrier and a traveling shaft. The carrier is connected to the four-axis robot arm. The four-axis robot arm includes a robot arm and a lifting device. The robot arm is arranged on the lifting device. The lifting device can drive the robot arm to move up and down. The four-axis robot arm is arranged on the traveling shaft. The traveling shaft can drive the four-axis robot arm and the carrier to move linearly, and can expand the moving range of the four-axis robot arm and the carrier. The robot arm includes a base, a first arm body, a second arm body, an arm power source, a first transmission group, a second transmission group and a third transmission group. The arm power source and the first transmission group are arranged in the base, the first transmission group is connected to the arm power source, the second transmission group is arranged in the first arm body, the third transmission group is arranged in the second arm body, and the second transmission group is connected between the first transmission group and the third transmission group. The robot arm uses a single arm power source, which can simplify the structure and reduce the cost.

為使能更進一步瞭解本發明的特徵及技術內容,請參閱以下有關本發明的詳細說明與圖式,然而所提供的圖式僅用於提供參考與說明,並非用來對本發明加以限制。To further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, the drawings provided are only used for reference and description and are not used to limit the present invention.

以下是通過特定的具體實施例來說明本發明所公開有關的實施方式,本領域技術人員可由本說明書所公開的內容瞭解本發明的優點與效果。本發明可通過其他不同的具體實施例加以施行或應用,本說明書中的各項細節也可基於不同觀點與應用,在不背離本發明的構思下進行各種修改與變更。另外,本發明的附圖僅為簡單示意說明,並非依實際尺寸的描繪,事先聲明。以下的實施方式將進一步詳細說明本發明的相關技術內容,但所公開的內容並非用以限制本發明的保護範圍。另外,本文中所使用的術語“或”,應視實際情況可能包括相關聯的列出項目中的任一個或者多個的組合。The following is an explanation of the relevant implementation methods disclosed by the present invention through specific concrete embodiments. Those skilled in the art can understand the advantages and effects of the present invention from the contents disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and the details in this specification can also be modified and changed in various ways based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only simple schematic illustrations and are not depicted according to actual sizes. Please note in advance. The following implementation methods will further explain the relevant technical contents of the present invention in detail, but the disclosed contents are not intended to limit the scope of protection of the present invention. In addition, the term "or" used in this article may include any one or more combinations of the related listed items depending on the actual situation.

[實施例][Example]

請參閱圖1至圖4,本發明提供一種收放板機構,包括一裝載埠1、一移載機構2及一輸送機構3。Please refer to FIG. 1 to FIG. 4 , the present invention provides a plate retracting and releasing mechanism, including a loading port 1 , a transfer mechanism 2 and a conveying mechanism 3 .

該裝載埠1(load port)能用以暫存物件容器100,該物件容器100能容納板件200,該物件容器100輸送至裝載埠1預定位置後,該裝載埠1會開啟物件容器100,以便取放物件容器100內的板件200。由於裝載埠1並非本發明訴求的重點,且本發明並不限制裝載埠1的結構,故不再予以贅述。The loading port 1 can be used to temporarily store an object container 100, which can accommodate a plate 200. After the object container 100 is transported to a predetermined position of the loading port 1, the loading port 1 will open the object container 100 so as to take out and place the plate 200 in the object container 100. Since the loading port 1 is not the focus of the present invention and the present invention does not limit the structure of the loading port 1, it will not be described in detail.

該移載機構2設置於裝載埠1及輸送機構3之間,該移載機構2能將物件容器100內的板件200移動至輸送機構3,或將輸送機構3上的板件200移動至物件容器100內。請參閱圖3及圖4,該移載機構2包含至少一四軸機械手臂21、至少一承載件22及一走行軸23,該承載件22連接於四軸機械手臂21,該四軸機械手臂21能驅動承載件22,用於承載及移動板件200。該四軸機械手臂21包含一機械臂211及一升降裝置212,該機械臂211設置於升降裝置212上,該升降裝置212能驅動機械臂211升降移動。該四軸機械手臂21設置於走行軸23上,而能利用該走行軸23帶動四軸機械手臂21及承載件22直線移動。本實施例的圖式揭示有兩機械臂211,兩機械臂211共用一個基座2111,而能分別移載板件200。The transfer mechanism 2 is disposed between the loading port 1 and the conveying mechanism 3. The transfer mechanism 2 can move the plate 200 in the object container 100 to the conveying mechanism 3, or move the plate 200 on the conveying mechanism 3 into the object container 100. Please refer to Figures 3 and 4. The transfer mechanism 2 includes at least one four-axis robot arm 21, at least one carrier 22 and a travel axis 23. The carrier 22 is connected to the four-axis robot arm 21. The four-axis robot arm 21 can drive the carrier 22 to carry and move the plate 200. The four-axis robot arm 21 includes a robot arm 211 and a lifting device 212. The robot arm 211 is disposed on the lifting device 212. The lifting device 212 can drive the robot arm 211 to move up and down. The four-axis robot 21 is disposed on a travel shaft 23, and the travel shaft 23 can be used to drive the four-axis robot 21 and the carrier 22 to move linearly. The diagram of this embodiment discloses two robot arms 211, and the two robot arms 211 share a base 2111, and can move the plate 200 respectively.

請參閱圖5,該機械臂211使用一個動力源(馬達)驅動運作,該機械臂211包括一基座2111、一第一臂體2112、一第二臂體2113、一手臂動力源2114、一第一傳動組2115、一第二傳動組2116及一第三傳動組2117。該基座2111連接於升降裝置212,而能以升降裝置212帶動機械臂211升降移動。Please refer to FIG5 , the robot arm 211 is driven by a power source (motor) and includes a base 2111, a first arm body 2112, a second arm body 2113, an arm power source 2114, a first transmission group 2115, a second transmission group 2116 and a third transmission group 2117. The base 2111 is connected to the lifting device 212, and the lifting device 212 can drive the robot arm 211 to move up and down.

該基座2111、第一臂體2112及第二臂體2113皆為中空體,該第一臂體2112的後端靠近基座2111,第一臂體2112能相對於基座2111轉動,該第二臂體2113的後端靠近第一臂體2112的前端,該第二臂體2113能相對於第一臂體2112轉動。該基座2111、第一臂體2112及第二臂體2113之間可相互轉動,以形成關節式結構。該第二臂體2113的前端(一端)設置一操作端2118,可用以連接承載件22,該操作端2118可轉動的設置於第二臂體2113上,以便帶動承載件22轉動。The base 2111, the first arm 2112 and the second arm 2113 are all hollow bodies. The rear end of the first arm 2112 is close to the base 2111, and the first arm 2112 can rotate relative to the base 2111. The rear end of the second arm 2113 is close to the front end of the first arm 2112, and the second arm 2113 can rotate relative to the first arm 2112. The base 2111, the first arm 2112 and the second arm 2113 can rotate with each other to form an articulated structure. The front end (one end) of the second arm 2113 is provided with an operating end 2118, which can be used to connect the carrier 22. The operating end 2118 is rotatably arranged on the second arm 2113 so as to drive the carrier 22 to rotate.

該手臂動力源2114及第一傳動組2115設置於基座2111內,第一傳動組2115連接於手臂動力源2114,使該手臂動力源2114能通過第一傳動組2115輸出動力。該第二傳動組2116設置於第一臂體2112內,該第三傳動組2117設置於第二臂體2113內,第二傳動組2116連接於第一傳動組2115及第三傳動組2117之間,該第三傳動組2117連接於操作端2118。當該手臂動力源2114輸出動力時,即可依序通過第一傳動組2115、第二傳動組2116及第三傳動組2117傳遞動力,並帶動第一臂體2112及第二臂體2113轉動,使該第二臂體2113一端的操作端2118能移動至預定位置,而利用操作端2118上的承載件22,用於承載及移動板件200。The arm power source 2114 and the first transmission group 2115 are disposed in the base 2111, and the first transmission group 2115 is connected to the arm power source 2114, so that the arm power source 2114 can output power through the first transmission group 2115. The second transmission group 2116 is disposed in the first arm body 2112, and the third transmission group 2117 is disposed in the second arm body 2113. The second transmission group 2116 is connected between the first transmission group 2115 and the third transmission group 2117, and the third transmission group 2117 is connected to the operating end 2118. When the arm power source 2114 outputs power, it can transmit power in sequence through the first transmission group 2115, the second transmission group 2116 and the third transmission group 2117, and drive the first arm 2112 and the second arm 2113 to rotate, so that the operating end 2118 at one end of the second arm 2113 can move to a predetermined position, and the supporting part 22 on the operating end 2118 is used to support and move the plate 200.

較佳的,該第一傳動組2115及第二傳動組2116之間可設置一第一減速機2119,該第二傳動組2116及第三傳動組2117之間可設置一第二減速機2220,可通過第一減速機2119帶動第一臂體2112轉動,且通過第二減速機2220帶動第二臂體2113轉動,較佳的,第一減速機2119及第二減速機2220為諧波減速機,可使傳動精度提高,且運作更為平穩。Preferably, a first reducer 2119 can be provided between the first transmission group 2115 and the second transmission group 2116, and a second reducer 2220 can be provided between the second transmission group 2116 and the third transmission group 2117. The first reducer 2119 can drive the first arm 2112 to rotate, and the second reducer 2220 can drive the second arm 2113 to rotate. Preferably, the first reducer 2119 and the second reducer 2220 are harmonic reducers, which can improve the transmission accuracy and make the operation smoother.

該升降裝置212的結構並不限制,請參閱圖6及圖7,在本實施例中,該升降裝置212包括一底座2121、一升降第一層2122、一升降第二層2123及一升降傳動機構2124,該升降第一層2122可升降的設置於底座2121上,該升降第二層2123可升降的設置於升降第一層2122上,藉以組成一多段升降結構。該升降傳動機構2124可為馬達螺桿組、馬達皮帶組或馬達齒輪組等各種現有的傳動機構,較佳的,該升降傳動機構2124為馬達螺桿組,該升降傳動機構2124設置於底座2121內,且該升降傳動機構2124連接於升降第一層2122及升降第二層2123,該升降傳動機構2124能傳動升降第一層2122及升降第二層2123升降移動,而能用以帶動機械臂211升降移動,使該機械臂211能移動至預定高度,以便於取放板件200。The structure of the lifting device 212 is not limited, please refer to Figures 6 and 7. In this embodiment, the lifting device 212 includes a base 2121, a first lifting layer 2122, a second lifting layer 2123 and a lifting transmission mechanism 2124. The first lifting layer 2122 can be lifted on the base 2121, and the second lifting layer 2123 can be lifted on the first lifting layer 2122 to form a multi-stage lifting structure. The lifting transmission mechanism 2124 can be various existing transmission mechanisms such as a motor-screw set, a motor-belt set or a motor-gear set. Preferably, the lifting transmission mechanism 2124 is a motor-screw set. The lifting transmission mechanism 2124 is disposed in the base 2121, and the lifting transmission mechanism 2124 is connected to the first lifting layer 2122 and the second lifting layer 2123. The lifting transmission mechanism 2124 can drive the first lifting layer 2122 and the second lifting layer 2123 to move up and down, and can be used to drive the robot arm 211 to move up and down, so that the robot arm 211 can move to a predetermined height to facilitate the placement of the panel 200.

該承載件22(fork)連接於機械臂211的操作端2118,該承載件22可由下方承托板件200或由上方吸取板件200,在本實施例中,該承載件22可由下方承托板件200。該承載件22的結構並不限制,該承載件22可為四叉型式,該承載件22亦可為單板型式,該承載件22亦可為兩叉、三叉或四叉等各種分叉型式,該承載件22上亦可設置多個第一吸盤221(如圖4所示),能用以吸附板件200,使板件200可穩定的固定在承載件22上。The support member 22 (fork) is connected to the operating end 2118 of the robot arm 211. The support member 22 can support the plate 200 from below or absorb the plate 200 from above. In this embodiment, the support member 22 can support the plate 200 from below. The structure of the support member 22 is not limited. The support member 22 can be a four-pronged type, the support member 22 can also be a single-board type, the support member 22 can also be a two-pronged, three-pronged or four-pronged type. A plurality of first suction cups 221 (as shown in FIG. 4 ) can be provided on the support member 22 to absorb the plate 200 so that the plate 200 can be stably fixed on the support member 22.

該走行軸23能用以帶動四軸機械手臂21及承載件22直線移動,藉以擴大四軸機械手臂21及承載件22的移動範圍。請參閱圖8,在本實施例中,該走行軸23包含一固定座231、一移動座232、一走行動力源233及一走行傳動機構234,該移動座232可移動的設置於固定座231上,該移動座232可在固定座231上進行線性移動,該四軸機械手臂21設置於移動座232上,該四軸機械手臂21是以升降裝置212的底座2121設置於移動座232上。另,可在固定座231及移動座232之間設置線性滑軌235,使該移動座232能在固定座231上穩定的移動。該走行動力源233可為馬達等,該走行動力源233可設置於移動座232或固定座231上,該走行傳動機構234連接於走行動力源233,該走行傳動機構234另連接於固定座231或移動座232。The travel axis 23 can be used to drive the four-axis robot 21 and the carrier 22 to move linearly, thereby expanding the moving range of the four-axis robot 21 and the carrier 22. Please refer to FIG8. In this embodiment, the travel axis 23 includes a fixed seat 231, a moving seat 232, a travel power source 233 and a travel transmission mechanism 234. The moving seat 232 is movably arranged on the fixed seat 231. The moving seat 232 can move linearly on the fixed seat 231. The four-axis robot 21 is arranged on the moving seat 232. The four-axis robot 21 is arranged on the moving seat 232 by the base 2121 of the lifting device 212. In addition, a linear slide rail 235 may be provided between the fixed seat 231 and the movable seat 232, so that the movable seat 232 can stably move on the fixed seat 231. The travel power source 233 may be a motor, etc., and the travel power source 233 may be provided on the movable seat 232 or the fixed seat 231. The travel transmission mechanism 234 is connected to the travel power source 233, and the travel transmission mechanism 234 is further connected to the fixed seat 231 or the movable seat 232.

當該走行動力源233啟動時,可通過走行傳動機構234傳動移動座232移動,使移動座232能在固定座231上移動,以便帶動該四軸機械手臂21移動。較佳的,該走行動力源233設置於移動座232,該走行傳動機構234連接於走行動力源233及固定座231,該走行傳動機構234可包含一齒條2341及一齒輪2342,該齒條2341設置於固定座231上,該齒輪2342連接於走行動力源233,且齒輪2342嚙合於齒條2341。當走行動力源233啟動時,可驅動齒輪2342轉動,使齒輪2342在齒條2341上滾動,藉以帶動移動座232在固定座231上移動,本實施例的走行傳動機構234具有較佳的剛性及穩定度。When the travel power source 233 is started, the travel transmission mechanism 234 can be used to drive the moving seat 232 to move, so that the moving seat 232 can move on the fixed seat 231, so as to drive the four-axis robot arm 21 to move. Preferably, the travel power source 233 is disposed on the moving seat 232, and the travel transmission mechanism 234 is connected to the travel power source 233 and the fixed seat 231. The travel transmission mechanism 234 may include a gear 2341 and a gear 2342. The gear 2341 is disposed on the fixed seat 231, and the gear 2342 is connected to the travel power source 233, and the gear 2342 is engaged with the gear 2341. When the travel power source 233 is started, the gear 2342 can be driven to rotate, so that the gear 2342 rolls on the gear 2341, thereby driving the moving seat 232 to move on the fixed seat 231. The travel transmission mechanism 234 of this embodiment has better rigidity and stability.

該輸送機構3能用於輸送板件200,該輸送機構3的結構並不限制,該輸送機構3可為輸送帶或輸送滾輪組等,在本實施例中,該輸送機構3為輸送滾輪組,該輸送機構3可包含一輸送動力源31、一傳動機構32及多個輸送滾輪33(如圖9所示),該輸送動力源31可為馬達等,該傳動機構32可包含一傳動皮帶321、一第一傳動軸322及多個第二傳動軸323,該傳動皮帶321連接於輸送動力源31及第一傳動軸322之間,該些第二傳動軸323間隔的設置,該些輸送滾輪33分別設置於該些第二傳動軸323上,該些輸送滾輪33上可放置板件200。該些第二傳動軸323的一端與第一傳動軸322之間可通過非接觸式的磁力環324傳動,使該傳動機構32連接於輸送動力源31及該些輸送滾輪33之間,且磁力環324利用磁力吸引,為非接觸傳動,無磨損、無粉塵,可使潔淨度提升。該輸送動力源31能通過傳動機構32驅動該些輸送滾輪33轉動,用以輸送板件200移動。The conveying mechanism 3 can be used to convey the plate 200. The structure of the conveying mechanism 3 is not limited. The conveying mechanism 3 can be a conveyor belt or a conveyor roller set. In this embodiment, the conveying mechanism 3 is a conveyor roller set. The conveying mechanism 3 can include a conveying power source 31, a transmission mechanism 32 and a plurality of conveying rollers 33 (as shown in FIG. 9). The conveying power source 31 can be a motor, etc. The transmission mechanism 32 may include a transmission belt 321, a first transmission shaft 322 and a plurality of second transmission shafts 323. The transmission belt 321 is connected between the transmission power source 31 and the first transmission shaft 322. The second transmission shafts 323 are arranged at intervals. The transmission rollers 33 are respectively arranged on the second transmission shafts 323. The plates 200 may be placed on the transmission rollers 33. One end of the second transmission shafts 323 and the first transmission shaft 322 can be driven through a non-contact magnetic ring 324, so that the transmission mechanism 32 is connected between the transport power source 31 and the transport rollers 33. The magnetic ring 324 uses magnetic attraction, which is a non-contact transmission, no wear, no dust, and can improve the cleanliness. The transport power source 31 can drive the transport rollers 33 to rotate through the transmission mechanism 32 to transport the plate 200.

該收放板機構還可進一步包括一轉板機構4(如圖10所示),該轉板機構4靠近輸送機構3,該轉板機構4可設置於輸送機構3的上方或下方,該轉板機構4能對輸送機構3上的板件200進行轉板動作。在本實施例中,該轉板機構4設置於輸送機構3的上方,該轉板機構4可包含一升降模組41、一旋轉組42及一取板組43,該升降模組41可為電動滑台等升降機構,該旋轉組42連接於升降模組41,該旋轉組42可包含馬達等旋轉動力源421。該取板組43安裝於旋轉組42上,該取板組43可為吸盤款式或夾爪款式等,在本實施例中,該取板組43為吸盤款式,該取板組43包含多個第二吸盤431,可利用該取板組43拿取板件200,並以升降模組41帶動板件200上升至預定高度,而後以該旋轉組42驅動板件200進行轉板動作,使板件200轉動至預定角度,再繼續輸送。在另一實施例中,該轉板機構4設置於輸送機構3的下方,該轉板機構4包含一升降模組41及一旋轉組42,該旋轉組42連接於升降模組41,該板件200能放置於旋轉組42上,並以該升降模組41帶動板件200上升,以該旋轉組42驅動板件200進行轉板動作。The retractable plate mechanism may further include a plate turning mechanism 4 (as shown in FIG. 10 ), which is close to the conveying mechanism 3 and may be disposed above or below the conveying mechanism 3. The plate turning mechanism 4 can turn the plate 200 on the conveying mechanism 3. In this embodiment, the plate turning mechanism 4 is disposed above the conveying mechanism 3, and may include a lifting module 41, a rotating group 42, and a plate taking group 43. The lifting module 41 may be a lifting mechanism such as an electric slide, and the rotating group 42 is connected to the lifting module 41. The rotating group 42 may include a rotating power source 421 such as a motor. The plate picking group 43 is installed on the rotating group 42. The plate picking group 43 can be a suction cup style or a clamp style, etc. In the present embodiment, the plate picking group 43 is a suction cup style. The plate picking group 43 includes a plurality of second suction cups 431. The plate picking group 43 can be used to pick up the plate 200, and the lifting module 41 can be used to drive the plate 200 to rise to a predetermined height, and then the rotating group 42 can be used to drive the plate 200 to rotate the plate 200 to a predetermined angle, and then continue to transport it. In another embodiment, the transfer plate mechanism 4 is disposed below the conveying mechanism 3, and the transfer plate mechanism 4 includes a lifting module 41 and a rotating group 42. The rotating group 42 is connected to the lifting module 41. The plate 200 can be placed on the rotating group 42, and the lifting module 41 drives the plate 200 to rise, and the rotating group 42 drives the plate 200 to transfer.

[實施例的有益效果][Beneficial Effects of the Embodiments]

本發明的有益效果在於,本發明所提供的收放板機構及移載機構,該收放板機構包括一裝載埠、一移載機構及一輸送機構。物件容器能輸送至裝載埠,移載機構設置於裝載埠及輸送機構之間,移載機構能將物件容器內的板件移動至輸送機構,或將輸送機構上的板件移動至物件容器內,具有較佳的生產動線,能便利於自動化生產,使生產效率提升。The beneficial effect of the present invention lies in that the plate retracting and unretracting mechanism and the transfer mechanism provided by the present invention include a loading port, a transfer mechanism and a conveying mechanism. The object container can be conveyed to the loading port, the transfer mechanism is arranged between the loading port and the conveying mechanism, and the transfer mechanism can move the plate in the object container to the conveying mechanism, or move the plate on the conveying mechanism to the object container, which has a better production line, can facilitate automated production, and improve production efficiency.

該移載機構包含至少一四軸機械手臂、至少一承載件及一走行軸,承載件連接於四軸機械手臂,四軸機械手臂包含一機械臂及一升降裝置,機械臂設置於升降裝置上,升降裝置能驅動機械臂升降移動,四軸機械手臂設置於走行軸上,走行軸能帶動四軸機械手臂及承載件直線移動,能擴大四軸機械手臂及承載件的移動範圍。機械臂包括一基座、一第一臂體、一第二臂體、一手臂動力源、一第一傳動組、一第二傳動組及一第三傳動組,手臂動力源及第一傳動組設置於基座內,第一傳動組連接於手臂動力源,第二傳動組設置於第一臂體內,第三傳動組設置於第二臂體內,第二傳動組連接於第一傳動組及第三傳動組之間,機械臂使用單一手臂動力源,可使結構簡化、成本降低。The transfer mechanism includes at least one four-axis robot arm, at least one carrier and a traveling shaft. The carrier is connected to the four-axis robot arm. The four-axis robot arm includes a robot arm and a lifting device. The robot arm is arranged on the lifting device. The lifting device can drive the robot arm to move up and down. The four-axis robot arm is arranged on the traveling shaft. The traveling shaft can drive the four-axis robot arm and the carrier to move linearly, and can expand the moving range of the four-axis robot arm and the carrier. The robot arm includes a base, a first arm body, a second arm body, an arm power source, a first transmission group, a second transmission group and a third transmission group. The arm power source and the first transmission group are arranged in the base, the first transmission group is connected to the arm power source, the second transmission group is arranged in the first arm body, the third transmission group is arranged in the second arm body, and the second transmission group is connected between the first transmission group and the third transmission group. The robot arm uses a single arm power source, which can simplify the structure and reduce the cost.

以上所公開的內容僅為本發明的優選可行實施例,並非因此侷限本發明的申請專利範圍,所以凡是運用本發明說明書及圖式內容所做的等效技術變化,均包含於本發明的申請專利範圍內。The contents disclosed above are only preferred feasible embodiments of the present invention and are not intended to limit the scope of the patent application of the present invention. Therefore, all equivalent technical changes made using the contents of the specification and drawings of the present invention are included in the scope of the patent application of the present invention.

1:裝載埠 2:移載機構 21:四軸機械手臂 211:機械臂 2111:基座 2112:第一臂體 2113:第二臂體 2114:手臂動力源 2115:第一傳動組 2116:第二傳動組 2117:第三傳動組 2118:操作端 2119:第一減速機 2220:第二減速機 212:升降裝置 2121:底座 2122:升降第一層 2123:升降第二層 2124:升降傳動機構 22:承載件 221:第一吸盤 23:走行軸 231:固定座 232:移動座 233:走行動力源 234:走行傳動機構 2341:齒條 2342:齒輪 235:線性滑軌 3:輸送機構 31:輸送動力源 32:傳動機構 321:傳動皮帶 322:第一傳動軸 323:第二傳動軸 324:磁力環 33:輸送滾輪 4:轉板機構 41:升降模組 42:旋轉組 421:旋轉動力源 43:取板組 431:第二吸盤 100:物件容器 200:板件 1: Loading port 2: Transfer mechanism 21: Four-axis robot arm 211: Robot arm 2111: Base 2112: First arm body 2113: Second arm body 2114: Arm power source 2115: First transmission group 2116: Second transmission group 2117: Third transmission group 2118: Operation end 2119: First reducer 2220: Second reducer 212: Lifting device 2121: Base 2122: Lifting first layer 2123: Lifting second layer 2124: Lifting transmission mechanism 22: Carrying part 221: First suction cup 23: Traveling axis 231: Fixed seat 232: Moving seat 233: Traveling power source 234: Traveling transmission mechanism 2341: Rack 2342: Gear 235: Linear slide 3: Conveying mechanism 31: Conveying power source 32: Transmission mechanism 321: Transmission belt 322: First transmission shaft 323: Second transmission shaft 324: Magnetic ring 33: Conveying roller 4: Turning plate mechanism 41: Lifting module 42: Rotating group 421: Rotating power source 43: Plate picking group 431: Second suction cup 100: Object container 200: Plate

圖1為本發明收放板機構的立體圖。FIG. 1 is a perspective view of the retractable plate mechanism of the present invention.

圖2為本發明收放板機構另一角度的立體圖。FIG. 2 is a three-dimensional diagram of the retractable plate mechanism of the present invention from another angle.

圖3為本發明移載機構的立體圖。FIG. 3 is a perspective view of the transfer mechanism of the present invention.

圖4為本發明移載機構另一角度的立體圖。FIG. 4 is a three-dimensional diagram of the transfer mechanism of the present invention from another angle.

圖5為本發明機械臂的剖視圖。FIG5 is a cross-sectional view of the robot arm of the present invention.

圖6為本發明升降裝置的立體圖。FIG6 is a perspective view of the lifting device of the present invention.

圖7為本發明升降裝置的剖視圖。FIG. 7 is a cross-sectional view of the lifting device of the present invention.

圖8為本發明走行軸的立體圖。FIG8 is a three-dimensional diagram of the travel axis of the present invention.

圖9為本發明輸送機構的立體圖。FIG. 9 is a three-dimensional diagram of the conveying mechanism of the present invention.

圖10為本發明轉板機構的立體圖。FIG. 10 is a perspective view of the plate transfer mechanism of the present invention.

1:裝載埠 1: Loading port

2:移載機構 2: Transfer mechanism

21:四軸機械手臂 21: Four-axis robotic arm

211:機械臂 211:Robotic Arm

212:升降裝置 212: Lifting device

22:承載件 22: Carrier

23:走行軸 23: Traveling shaft

231:固定座 231: Fixed seat

232:移動座 232: Mobile seat

233:走行動力源 233: Walking power source

3:輸送機構 3: Transport mechanism

33:輸送滾輪 33:Conveyor roller

100:物件容器 100: Object container

200:板件 200: Panels

Claims (13)

一種收放板機構,用於移載板件,該收放板機構包括: 一裝載埠,該裝載埠能用以暫存物件容器,該物件容器能用以容納該板件; 一移載機構,該移載機構包含至少一四軸機械手臂、至少一承載件及一走行軸,該承載件連接於該四軸機械手臂,該四軸機械手臂能驅動該承載件,用於承載及移動該板件,該四軸機械手臂包含一機械臂及一升降裝置,該機械臂設置於該升降裝置上,該升降裝置能驅動該機械臂升降移動,該四軸機械手臂設置於該走行軸上,該走行軸能帶動該四軸機械手臂及該承載件直線移動;以及 一輸送機構,該輸送機構能用以輸送該板件,該移載機構設置於該裝載埠及該輸送機構之間,該移載機構能將該物件容器內的板件移動至該輸送機構,或將該輸送機構上的板件移動至該物件容器內; 其中該機械臂包括一基座、一第一臂體、一第二臂體、一手臂動力源、一第一傳動組、一第二傳動組及一第三傳動組,該基座連接於該升降裝置,該第一臂體能相對於該基座轉動,該第二臂體能相對於該第一臂體轉動,該第二臂體的一端設置一操作端,該操作端連接於該承載件,該操作端可轉動設置於該第二臂體,該手臂動力源及該第一傳動組設置於該基座內,該第一傳動組連接於該手臂動力源,該第二傳動組設置於該第一臂體內,該第三傳動組設置於該第二臂體內,該第二傳動組連接於該第一傳動組及該第三傳動組之間,該第三傳動組連接於該操作端。 A plate retracting mechanism for transferring plates, the plate retracting mechanism comprising: a loading port, the loading port can be used to temporarily store an object container, the object container can be used to accommodate the plate; a transfer mechanism, the transfer mechanism comprising at least one four-axis robot arm, at least one bearing member and a running shaft, the bearing member is connected to the four-axis robot arm, the four-axis robot arm can drive the bearing member, and is used to carry and move the plate, the four-axis robot arm comprises a robot arm and a lifting device, the robot arm is arranged on the lifting device, the lifting device can drive the robot arm to move up and down, the four-axis robot arm is arranged on the running shaft, the running shaft can drive the four-axis robot arm and the bearing member to move linearly; and A conveying mechanism, which can be used to convey the plate, and the transfer mechanism is arranged between the loading port and the conveying mechanism, and the transfer mechanism can move the plate in the object container to the conveying mechanism, or move the plate on the conveying mechanism into the object container; The mechanical arm includes a base, a first arm body, a second arm body, an arm power source, a first transmission group, a second transmission group and a third transmission group. The base is connected to the lifting device. The first arm body can rotate relative to the base. The second arm body can rotate relative to the first arm body. An operating end is set at one end of the second arm body. The operating end is connected to the bearing member. The operating end can be rotatably set on the second arm body. The arm power source and the first transmission group are set in the base. The first transmission group is connected to the arm power source. The second transmission group is set in the first arm body. The third transmission group is set in the second arm body. The second transmission group is connected between the first transmission group and the third transmission group. The third transmission group is connected to the operating end. 如請求項1所述的收放板機構,其中該第一傳動組及該第二傳動組之間設置一第一減速機,該第二傳動組及該第三傳動組之間設置一第二減速機,該第一減速機及該第二減速機為諧波減速機。As described in claim 1, a first reducer is arranged between the first transmission group and the second transmission group, and a second reducer is arranged between the second transmission group and the third transmission group, and the first reducer and the second reducer are harmonic reducers. 如請求項1所述的收放板機構,其中該升降裝置包括一底座、一升降第一層、一升降第二層及一升降傳動機構,該升降第一層可升降的設置於該底座上,該升降第二層可升降的設置於該升降第一層上,該升降傳動機構設置於該底座內,該升降傳動機構連接於該升降第一層及該升降第二層,該升降傳動機構能傳動該升降第一層及該升降第二層升降移動。A retractable plate mechanism as described in claim 1, wherein the lifting device includes a base, a first lifting layer, a second lifting layer and a lifting transmission mechanism, the first lifting layer is liftably arranged on the base, the second lifting layer is liftably arranged on the first lifting layer, the lifting transmission mechanism is arranged in the base, the lifting transmission mechanism is connected to the first lifting layer and the second lifting layer, and the lifting transmission mechanism can drive the first lifting layer and the second lifting layer to move up and down. 如請求項1所述的收放板機構,其中該走行軸包含一固定座、一移動座、一走行動力源及一走行傳動機構,該移動座可移動的設置於該固定座上,該四軸機械手臂設置於該移動座上,該走行傳動機構連接於該走行動力源,該走行動力源啟動時,能通過該走行傳動機構傳動該移動座帶動該四軸機械手臂移動。A retractable plate mechanism as described in claim 1, wherein the traveling axis comprises a fixed seat, a movable seat, a traveling power source and a traveling transmission mechanism, the movable seat is movably disposed on the fixed seat, the four-axis robot arm is disposed on the movable seat, and the traveling transmission mechanism is connected to the traveling power source. When the traveling power source is started, it can drive the moving seat to drive the four-axis robot arm to move through the traveling transmission mechanism. 如請求項4所述的收放板機構,其中該走行傳動機構包含一齒條及一齒輪,該齒條設置於該固定座上,該齒輪連接於該走行動力源,該齒輪嚙合於該齒條,該走行動力源啟動時,能驅動該齒輪轉動,使該齒輪在該齒條上滾動,以帶動該移動座在該固定座上移動。A retractable plate mechanism as described in claim 4, wherein the travel transmission mechanism includes a gear and a gear, the gear is arranged on the fixed base, the gear is connected to the travel power source, and the gear is engaged with the gear. When the travel power source is started, it can drive the gear to rotate, so that the gear rolls on the gear to drive the movable base to move on the fixed base. 如請求項1所述的收放板機構,其中還包括一轉板機構,該轉板機構靠近該輸送機構,該轉板機構能對該輸送機構上的板件進行轉板動作。The plate retracting and extending mechanism as described in claim 1 further includes a plate turning mechanism, which is close to the conveying mechanism and can turn the plate on the conveying mechanism. 如請求項6所述的收放板機構,其中該轉板機構包含一升降模組、一旋轉組及一取板組,該旋轉組連接於該升降模組,該取板組安裝於該旋轉組上,該取板組能拿取該板件,並以該升降模組帶動該板件上升,以該旋轉組驅動該板件進行轉板動作。A plate retracting and extending mechanism as described in claim 6, wherein the plate turning mechanism comprises a lifting module, a rotating group and a plate taking group, the rotating group is connected to the lifting module, the plate taking group is installed on the rotating group, the plate taking group can take the plate, and the lifting module drives the plate to rise, and the rotating group drives the plate to turn. 如請求項6所述的收放板機構,其中該轉板機構設置於該輸送機構的下方,該轉板機構包含一升降模組及一旋轉組,該旋轉組連接於該升降模組,該板件能放置於該旋轉組上,並以該升降模組帶動該板件上升,以該旋轉組驅動該板件進行轉板動作。A retractable plate mechanism as described in claim 6, wherein the plate turning mechanism is arranged below the conveying mechanism, and the plate turning mechanism includes a lifting module and a rotating group, the rotating group is connected to the lifting module, the plate can be placed on the rotating group, and the lifting module drives the plate to rise, and the rotating group drives the plate to turn. 一種移載機構,包括: 至少一四軸機械手臂,該四軸機械手臂包含一機械臂及一升降裝置,該機械臂設置於該升降裝置上,該升降裝置能驅動該機械臂升降移動; 至少一承載件,該承載件連接於該四軸機械手臂,該四軸機械手臂能驅動該承載件,用於承載及移動該板件;以及 一走行軸,該四軸機械手臂設置於該走行軸上,該走行軸能帶動該四軸機械手臂及該承載件直線移動; 其中該機械臂包括一基座、一第一臂體、一第二臂體、一手臂動力源、一第一傳動組、一第二傳動組及一第三傳動組,該基座連接於該升降裝置,該第一臂體能相對於該基座轉動,該第二臂體能相對於該第一臂體轉動,該第二臂體的一端設置一操作端,該操作端連接於該承載件,該操作端可轉動設置於該第二臂體,該手臂動力源及該第一傳動組設置於該基座內,該第一傳動組連接於該手臂動力源,該第二傳動組設置於該第一臂體內,該第三傳動組設置於該第二臂體內,該第二傳動組連接於該第一傳動組及該第三傳動組之間,該第三傳動組連接於該操作端。 A transfer mechanism, comprising: At least one four-axis robot, the four-axis robot includes a robot arm and a lifting device, the robot arm is arranged on the lifting device, and the lifting device can drive the robot arm to move up and down; At least one bearing member, the bearing member is connected to the four-axis robot arm, the four-axis robot arm can drive the bearing member to carry and move the plate; and A running shaft, the four-axis robot arm is arranged on the running shaft, and the running shaft can drive the four-axis robot arm and the bearing member to move linearly; The mechanical arm includes a base, a first arm body, a second arm body, an arm power source, a first transmission group, a second transmission group and a third transmission group. The base is connected to the lifting device. The first arm body can rotate relative to the base. The second arm body can rotate relative to the first arm body. An operating end is set at one end of the second arm body. The operating end is connected to the bearing member. The operating end can be rotatably set on the second arm body. The arm power source and the first transmission group are set in the base. The first transmission group is connected to the arm power source. The second transmission group is set in the first arm body. The third transmission group is set in the second arm body. The second transmission group is connected between the first transmission group and the third transmission group. The third transmission group is connected to the operating end. 如請求項9所述的移載機構,其中該第一傳動組及該第二傳動組之間設置一第一減速機,該第二傳動組及該第三傳動組之間設置一第二減速機,該第一減速機及該第二減速機為諧波減速機。A transfer mechanism as described in claim 9, wherein a first speed reducer is arranged between the first transmission group and the second transmission group, and a second speed reducer is arranged between the second transmission group and the third transmission group, and the first speed reducer and the second speed reducer are harmonic speed reducers. 如請求項9所述的移載機構,其中該升降裝置包括一底座、一升降第一層、一升降第二層及一升降傳動機構,該升降第一層可升降的設置於該底座上,該升降第二層可升降的設置於該升降第一層上,該升降傳動機構設置於該底座內,該升降傳動機構連接於該升降第一層及該升降第二層,該升降傳動機構能傳動該升降第一層及該升降第二層升降移動。A transfer mechanism as described in claim 9, wherein the lifting device includes a base, a first lifting layer, a second lifting layer and a lifting transmission mechanism, the first lifting layer is liftably arranged on the base, the second lifting layer is liftably arranged on the first lifting layer, the lifting transmission mechanism is arranged in the base, the lifting transmission mechanism is connected to the first lifting layer and the second lifting layer, and the lifting transmission mechanism can drive the first lifting layer and the second lifting layer to move up and down. 如請求項9所述的移載機構,其中該走行軸包含一固定座、一移動座、一走行動力源及一走行傳動機構,該移動座可移動的設置於該固定座上,該四軸機械手臂設置於該移動座上,該走行傳動機構連接於該走行動力源,該走行動力源啟動時,能通過該走行傳動機構傳動該移動座帶動該四軸機械手臂移動。A transfer mechanism as described in claim 9, wherein the travel axis includes a fixed seat, a movable seat, a travel power source and a travel transmission mechanism, the movable seat is movably disposed on the fixed seat, the four-axis robot is disposed on the movable seat, and the travel transmission mechanism is connected to the travel power source. When the travel power source is started, it can drive the four-axis robot to move by transmitting the movable seat through the travel transmission mechanism. 如請求項12所述的移載機構,其中該走行傳動機構包含一齒條及一齒輪,該齒條設置於該固定座上,該齒輪連接於該走行動力源,該齒輪嚙合於該齒條,該走行動力源啟動時,能驅動該齒輪轉動,使該齒輪在該齒條上滾動,以帶動該移動座在該固定座上移動。A transfer mechanism as described in claim 12, wherein the travel transmission mechanism includes a gear and a gear, the gear is arranged on the fixed seat, the gear is connected to the travel power source, and the gear is engaged with the gear. When the travel power source is started, it can drive the gear to rotate, so that the gear rolls on the gear to drive the moving seat to move on the fixed seat.
TW111146883A 2022-12-07 2022-12-07 Receiving and placing machine and transferring mechanism TWI831505B (en)

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US6091498A (en) * 1996-07-15 2000-07-18 Semitool, Inc. Semiconductor processing apparatus having lift and tilt mechanism
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