TW202421548A - 搬運裝置及保管裝置 - Google Patents

搬運裝置及保管裝置 Download PDF

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Publication number
TW202421548A
TW202421548A TW112136587A TW112136587A TW202421548A TW 202421548 A TW202421548 A TW 202421548A TW 112136587 A TW112136587 A TW 112136587A TW 112136587 A TW112136587 A TW 112136587A TW 202421548 A TW202421548 A TW 202421548A
Authority
TW
Taiwan
Prior art keywords
arm
drive unit
transport device
base
rotation
Prior art date
Application number
TW112136587A
Other languages
English (en)
Chinese (zh)
Inventor
伊藤宣之
矢河一馬
Original Assignee
日商村田機械股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商村田機械股份有限公司 filed Critical 日商村田機械股份有限公司
Publication of TW202421548A publication Critical patent/TW202421548A/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/06—Program-controlled manipulators characterised by multi-articulated arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
TW112136587A 2022-09-27 2023-09-25 搬運裝置及保管裝置 TW202421548A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022153344 2022-09-27
JP2022-153344 2022-09-27

Publications (1)

Publication Number Publication Date
TW202421548A true TW202421548A (zh) 2024-06-01

Family

ID=90477474

Family Applications (1)

Application Number Title Priority Date Filing Date
TW112136587A TW202421548A (zh) 2022-09-27 2023-09-25 搬運裝置及保管裝置

Country Status (4)

Country Link
JP (1) JP7831619B2 (https=)
CN (1) CN119836392A (https=)
TW (1) TW202421548A (https=)
WO (1) WO2024070630A1 (https=)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58188193U (ja) * 1982-06-10 1983-12-14 株式会社シマノ 作業用ロボツト
JPS60238286A (ja) * 1984-05-10 1985-11-27 ダイキン工業株式会社 組立て作業用ロボツト
JPS6464787A (en) * 1987-09-04 1989-03-10 Nippon Seiko Kk Joint type robot
JPH02237783A (ja) * 1989-03-13 1990-09-20 Hitachi Ltd 産業用ロボット
JP2004071925A (ja) * 2002-08-08 2004-03-04 Nikon Corp 基板ローダ及び露光装置
JP6024720B2 (ja) * 2014-09-10 2016-11-16 村田機械株式会社 移載装置

Also Published As

Publication number Publication date
JPWO2024070630A1 (https=) 2024-04-04
CN119836392A (zh) 2025-04-15
JP7831619B2 (ja) 2026-03-17
WO2024070630A1 (ja) 2024-04-04

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