TW202409164A - Laminated body including a glass substrate and a laminated resin layer - Google Patents

Laminated body including a glass substrate and a laminated resin layer Download PDF

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Publication number
TW202409164A
TW202409164A TW112127518A TW112127518A TW202409164A TW 202409164 A TW202409164 A TW 202409164A TW 112127518 A TW112127518 A TW 112127518A TW 112127518 A TW112127518 A TW 112127518A TW 202409164 A TW202409164 A TW 202409164A
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Taiwan
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resin layer
glass substrate
laminated
laminated body
corner
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TW112127518A
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Chinese (zh)
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高田晃右
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日商Agc股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/1055Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/1055Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer
    • B32B17/10779Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer containing polyester
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/1055Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer
    • B32B17/10798Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer containing silicone
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/28Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • B32B27/281Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/28Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • B32B27/283Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polysiloxanes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/30Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
    • B32B27/304Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers comprising vinyl halide (co)polymers, e.g. PVC, PVDC, PVF, PVDF
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/30Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
    • B32B27/308Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers comprising acrylic (co)polymers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/32Layered products comprising a layer of synthetic resin comprising polyolefins
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/32Layered products comprising a layer of synthetic resin comprising polyolefins
    • B32B27/322Layered products comprising a layer of synthetic resin comprising polyolefins comprising halogenated polyolefins, e.g. PTFE
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/36Layered products comprising a layer of synthetic resin comprising polyesters
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/40Layered products comprising a layer of synthetic resin comprising polyurethanes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • B32B7/06Interconnection of layers permitting easy separation
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0306Inorganic insulating substrates, e.g. ceramic, glass
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0183Dielectric layers
    • H05K2201/0195Dielectric or adhesive layers comprising a plurality of layers, e.g. in a multilayer structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

An object of the present invention is to provide a laminated body in which peeling failures of a peelable resin layer is unlikely to occur. The laminated body includes a glass substrate and a laminated resin layer arranged on the glass substrate. The laminated resin layer includes an intermediate resin layer and a peelable resin layer starting from the side of the glass substrate. A peripheral area where the laminated resin layer is not placed exists on a surface of the laminated resin layer side on the glass substrate. The length of a long side of the glass substrate is 400 mm or more, and the length of a short side of the glass substrate is 320 mm or more. In at least one corner of the glass substrate, a distance from a vertex of the corner to a position closest to the laminated resin layer is 4 mm or more.

Description

積層體Laminated body

本發明係關於一種積層體。The present invention relates to a laminate.

太陽電池(PV)、液晶面板(LCD)、有機EL(Electro Luminescence,電致發光)面板(OLED)、感測電磁波、X射線、紫外線、可見光線、紅外線等之接收感測器面板等電子器件越來越薄型化、輕量化。隨之,用於電子器件之聚醯亞胺基板等基板亦越來越薄板化。若因薄板化而基板之強度不足,則存在基板之處理性降低,於在基板上形成電子器件用構件之步驟等中產生問題之情形。Electronic devices such as solar cells (PV), liquid crystal panels (LCD), organic EL (Electro Luminescence) panels (OLED), and receiving sensor panels that sense electromagnetic waves, X-rays, ultraviolet rays, visible rays, infrared rays, etc. are becoming thinner and lighter. As a result, substrates such as polyimide substrates used in electronic devices are also becoming thinner. If the strength of the substrate is insufficient due to the thinning, the substrate's handling properties may be reduced, causing problems in the steps of forming components for electronic devices on the substrate.

因此,最近,為了使基板之處理性良好,而提出了使用於支持基板上配置聚醯亞胺基板之積層體之技術(專利文獻1)。更具體而言,於專利文獻1中揭示了,可於熱硬化性樹脂組合物硬化體層上塗佈聚醯亞胺清漆而形成樹脂清漆硬化膜(相當於聚醯亞胺層),於樹脂清漆硬化膜上配置精密元件。 [先前技術文獻] [專利文獻] Therefore, recently, in order to improve the handling property of the substrate, a technology for using a laminated body of a polyimide substrate arranged on a supporting substrate has been proposed (Patent Document 1). More specifically, Patent Document 1 discloses that a polyimide varnish can be applied on a cured layer of a thermosetting resin composition to form a resin varnish cured film (equivalent to a polyimide layer), and precision components can be arranged on the resin varnish cured film. [Prior Technical Document] [Patent Document]

[專利文獻1]日本專利特開2018-193544號公報[Patent Document 1] Japanese Patent Publication No. 2018-193544

[發明所欲解決之問題][The problem that the invention aims to solve]

於專利文獻1之熱硬化性樹脂組合物硬化體層上塗佈聚醯亞胺清漆而形成樹脂清漆硬化膜之前,有時對在熱硬化性樹脂組合物硬化體層上設置有PET(polyethylene terephthalate,聚對苯二甲酸乙二酯)膜等剝離性樹脂層之積層體進行處理。 本發明人等對獲得由上述聚醯亞胺清漆形成之聚醯亞胺膜時,使用具有剝離性樹脂層之玻璃基板(支持基板)之技術進行了研究。發現於準備具有剝離性之玻璃基板時,於玻璃基板較大時,存在不易將剝離性樹脂層剝離等剝離性之問題。 Before the polyimide varnish is coated on the cured body layer of the thermosetting resin composition of Patent Document 1 to form a cured resin varnish film, PET (polyethylene terephthalate, polyethylene terephthalate) is sometimes provided on the cured body layer of the thermosetting resin composition. Processing of laminates of releasable resin layers such as ethylene terephthalate (ethylene terephthalate) films. The present inventors studied a technique of using a glass substrate (support substrate) having a releasable resin layer when obtaining a polyimide film formed of the above-mentioned polyimide varnish. When preparing a releasable glass substrate, it was discovered that when the glass substrate is large, there is a releasable problem such as difficulty in peeling off the releasable resin layer.

本發明之課題在於提供一種不易產生剝離性樹脂層之剝離不良之積層體。 [解決問題之技術手段] The subject of the present invention is to provide a laminated body that is not prone to poor peeling of the peelable resin layer. [Technical means for solving the problem]

本發明人等進行了銳意研究,結果發現,藉由以下之構成而可解決上述課題。 (1)一種積層體,其具有玻璃基板及配置於玻璃基板上之積層樹脂層,積層樹脂層自玻璃基板側起具有中間樹脂層及剝離性樹脂層,於玻璃基板之積層樹脂層側之表面,存在未配置積層樹脂層之周緣區域,玻璃基板之長邊之長度為400 mm以上,玻璃基板之短邊之長度為320 mm以上,於玻璃基板之至少1個角部中,自角部之頂點至處於最接近之位置之積層樹脂層為止的距離X為4 mm以上。 The inventors of the present invention have conducted intensive research and found that the above-mentioned problems can be solved by the following structure. (1) A laminated body having a glass substrate and a laminated resin layer disposed on the glass substrate, the laminated resin layer having an intermediate resin layer and a peelable resin layer from the glass substrate side, a peripheral area where the laminated resin layer is not disposed exists on the surface of the laminated resin layer side of the glass substrate, the length of the long side of the glass substrate is 400 mm or more, the length of the short side of the glass substrate is 320 mm or more, and in at least one corner of the glass substrate, the distance X from the vertex of the corner to the laminated resin layer at the closest position is 4 mm or more.

(2)如(1)之積層體,其中自玻璃基板之一邊上之點至處於最接近之位置之積層樹脂層為止的距離中最小之距離Y為1 mm以上。 (3)如(1)或(2)之積層體,其中距離X為21 mm以下。 (4)如(1)至(3)中任一項之積層體,其中距離Y為15 mm以下。 (5)如(1)至(4)中任一項之積層體,其中設為距玻璃基板之1個角部之頂點最接近之積層樹脂層的位置P1、及距與玻璃基板之1個角部鄰接之角部之頂點最接近之積層樹脂層的位置P2,於較連接位置P1與P2之直線更靠玻璃基板之邊側存在積層樹脂層。 (6)如(1)至(5)中任一項之積層體,其中玻璃基板之4個各角部中之距離X中之至少一者不同。 (7)如(2)之積層體,其中玻璃基板之4個各邊中之距離Y中之至少一者不同。 (8)如(1)至(7)中任一項之積層體,其中積層樹脂層被分割為複數個區域。 (9)如(1)至(8)中任一項之積層體,其中中間樹脂層由矽酮樹脂構成。 (10)如(1)至(9)中任一項之積層體,其中剝離性樹脂層由聚對苯二甲酸乙二酯構成。 (11)如(1)至(10)中任一項之積層體,其中玻璃基板之厚度為0.2~1 mm。 (12)如(1)至(11)中任一項之積層體,其中玻璃基板之楊氏模數為100 GPa以下。 [發明之效果] (2) A laminate as in (1), wherein the shortest distance Y between a point on one side of the glass substrate and the laminate resin layer at the closest position is greater than 1 mm. (3) A laminate as in (1) or (2), wherein the distance X is less than 21 mm. (4) A laminate as in any one of (1) to (3), wherein the distance Y is less than 15 mm. (5) A laminate as in any one of (1) to (4), wherein the laminate resin layer is located at a position P1 closest to the vertex of one corner of the glass substrate and a position P2 closest to the vertex of a corner adjacent to one corner of the glass substrate, and the laminate resin layer is located on the side of the glass substrate closer to the straight line connecting the positions P1 and P2. (6) A laminate as in any one of (1) to (5), wherein at least one of the distances X at the four corners of the glass substrate is different. (7) A laminate as in (2), wherein at least one of the distances Y at the four sides of the glass substrate is different. (8) A laminate as described in any one of (1) to (7), wherein the laminate resin layer is divided into a plurality of regions. (9) A laminate as described in any one of (1) to (8), wherein the intermediate resin layer is composed of a silicone resin. (10) A laminate as described in any one of (1) to (9), wherein the exfoliative resin layer is composed of polyethylene terephthalate. (11) A laminate as described in any one of (1) to (10), wherein the thickness of the glass substrate is 0.2 to 1 mm. (12) A laminate as described in any one of (1) to (11), wherein the Young's modulus of the glass substrate is 100 GPa or less. [Effect of the Invention]

根據本發明,可提供一種不易產生剝離性樹脂層之剝離不良之積層體。According to the present invention, a laminated body can be provided which is less likely to cause poor peeling of the peelable resin layer.

以下,參照圖式對本發明之實施方式進行說明。但是,以下之實施方式係用以說明本發明之例示性者,並不限制於以下所示之實施方式。再者,能夠不脫離本發明之範圍,對以下之實施方式施加各種變化及置換。 使用「~」表示之數值範圍係指包含「~」之前後所記載之數值作為下限值及上限值之範圍。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the following embodiments are illustrative for describing the present invention and are not limited to the embodiments shown below. In addition, various changes and substitutions can be made to the following embodiments without departing from the scope of the present invention. The numerical range expressed by "~" refers to the range including the numerical values written before and after "~" as the lower limit and upper limit.

發現作為本發明之積層體之特徵點,具有玻璃基板及配置於玻璃基板上之積層樹脂層,積層樹脂層自玻璃基板側起具有中間樹脂層及剝離性樹脂層,於玻璃基板之積層樹脂層側之表面,存在未配置積層樹脂層之周緣區域,玻璃基板之長邊之長度為400 mm以上,玻璃基板之短邊之長度為320 mm以上,於玻璃基板之至少1個角部中,自角部之頂點至處於最接近之位置之積層樹脂層為止的距離X為4 mm以上,藉此能夠抑制剝離性樹脂層之剝離不良。藉此,獲得所期望之效果。It was found that a characteristic point of the laminated body of the present invention is that it has a glass substrate and a laminated resin layer arranged on the glass substrate. The laminated resin layer has an intermediate resin layer and a peelable resin layer from the glass substrate side. The laminated resin layer on the glass substrate On the surface of the side, there is a peripheral area where the laminated resin layer is not arranged. The length of the long side of the glass substrate is more than 400 mm, and the length of the short side of the glass substrate is more than 320 mm. In at least one corner of the glass substrate, from The distance X from the vertex of the corner portion to the laminated resin layer at the closest position is 4 mm or more, thereby suppressing peeling defects of the peelable resin layer. In this way, the desired effect is obtained.

<積層體> 圖1係表示本發明之實施方式之積層體之第1例的模式性剖視圖,圖2係表示本發明之實施方式之積層體之第1例的模式性俯視圖。 如圖1所示,積層體10具有玻璃基板12及配置於玻璃基板12上之積層樹脂層14。積層樹脂層14自玻璃基板12側起具有中間樹脂層16及剝離性樹脂層18。中間樹脂層16設置於玻璃基板12之表面12a,中間樹脂層16與剝離性樹脂層18積層。於積層樹脂層14中,中間樹脂層16與剝離性樹脂層18為相同之大小。積層樹脂層14例如係自玻璃基板12之表面12a之法線方向觀察之外形為超橢圓形。 <Laminated body> FIG. 1 is a schematic cross-sectional view showing the first example of the laminated body according to the embodiment of the present invention, and FIG. 2 is a schematic plan view showing the first example of the laminated body according to the embodiment of the present invention. As shown in FIG. 1 , the laminated body 10 has a glass substrate 12 and a laminated resin layer 14 arranged on the glass substrate 12 . The laminated resin layer 14 has an intermediate resin layer 16 and a peelable resin layer 18 from the glass substrate 12 side. The intermediate resin layer 16 is provided on the surface 12a of the glass substrate 12, and the intermediate resin layer 16 and the peelable resin layer 18 are laminated. In the laminated resin layer 14, the intermediate resin layer 16 and the peelable resin layer 18 have the same size. The laminated resin layer 14 has, for example, a super elliptical shape when viewed from the normal direction of the surface 12 a of the glass substrate 12 .

剝離性樹脂層18自積層體10剝離,於中間樹脂層16上例如形成聚醯亞胺層(未圖示)。玻璃基板12係作為支持基板而發揮功能者,於自積層樹脂層14側之表面12a之法線方向觀察之情形時,外形例如為四邊形。 積層體10如圖2所示,玻璃基板12之長邊12b之長度L 1為400 mm以上,玻璃基板12之短邊12c之長度L 2為320 mm以上。 玻璃基板12較積層樹脂層14大,於玻璃基板12之積層樹脂層14側之表面12a,存在未配置積層樹脂層14之周緣區域13。玻璃基板12之周緣區域13之表面12a露出。 於積層體10中,於玻璃基板12之至少1個角部12d中,自角部12d之頂點12e至處於最接近之位置之積層樹脂層14為止的距離X為4 mm以上。 於此種積層體10中,即便因輸送或高壓釜處理而加熱積層體10,亦可抑制玻璃基板12之翹曲,不易產生難以將剝離性樹脂層18剝離等剝離不良。 The release resin layer 18 is peeled off from the laminate 10, and a polyimide layer (not shown) is formed on the intermediate resin layer 16. The glass substrate 12 functions as a supporting substrate, and when viewed in the normal direction of the surface 12a on the laminate resin layer 14, the outer shape is, for example, a quadrilateral. The laminate 10 is shown in FIG. 2 , and the length L1 of the long side 12b of the glass substrate 12 is greater than 400 mm, and the length L2 of the short side 12c of the glass substrate 12 is greater than 320 mm. The glass substrate 12 is larger than the laminated resin layer 14, and there is a peripheral region 13 where the laminated resin layer 14 is not disposed on the surface 12a of the glass substrate 12 on the laminated resin layer 14 side. The surface 12a of the peripheral region 13 of the glass substrate 12 is exposed. In the laminated body 10, in at least one corner 12d of the glass substrate 12, the distance X from the vertex 12e of the corner 12d to the laminated resin layer 14 at the closest position is 4 mm or more. In such a laminate 10, even if the laminate 10 is heated during transportation or autoclave processing, the glass substrate 12 can be prevented from warping, and peeling failures such as difficulty in peeling the peelable resin layer 18 are unlikely to occur.

玻璃基板12有時將外緣倒角。於該情形時,有時角部12d之頂點12e亦成為具有規定之曲率半徑之圓弧。於角部12d為圓弧之情形時,使將玻璃基板12之各邊之直接部分於各邊之延伸方向延長,鄰接之2個邊之各自之延長線相交的點為假想頂點。設將該假想頂點中於玻璃基板12中處於對角之關係之假想頂點彼此連接所得的線為假想對角線。設該假想對角線與圓弧相交之點為頂點。 又,玻璃基板12之角部12d亦有時如定向平面般被切角。於該情形時,與上述圓弧相同地,設切角後形成之邊(未圖示)與上述假想對角線相交之點為頂點。 The glass substrate 12 is sometimes chamfered at the outer edge. In this case, the vertex 12e of the corner 12d is sometimes also an arc with a predetermined radius of curvature. When the corner 12d is an arc, the direct portion of each side of the glass substrate 12 is extended in the extension direction of each side, and the point where the extension lines of the two adjacent sides intersect is the virtual vertex. The line obtained by connecting the virtual vertices that are diagonally opposite to each other in the glass substrate 12 is the virtual diagonal line. The point where the virtual diagonal line intersects with the arc is the vertex. In addition, the corner 12d of the glass substrate 12 is sometimes cut like an orientation plane. In this case, as with the above-mentioned arc, the point where the edge (not shown) formed after cutting the corner intersects with the above-mentioned virtual diagonal line is the vertex.

積層體10中,自上述角部12d之頂點12e至處於最接近之位置之積層樹脂層14為止的距離X較佳為21 mm以下,更佳為10 mm以下。若上述距離X為21 mm以下,則相對於玻璃基板12之表面12a設置積層樹脂層14之區域變寬,故而較佳。 再者,自上述角部12d之頂點12e至處於最接近之位置之積層樹脂層14為止的距離X不需要於玻璃基板12之4個角部12d中全部相同。上述距離X可於玻璃基板12之4個各角部12d中,至少1者不同,亦可全部不同。又,例如,亦可為如下構成,即,設4個角部12d中2個角部與其餘2個角部成對,於2個對中,距離X不同。 積層體10較佳為自玻璃基板12之一邊上之點P至處於最接近之位置之積層樹脂層14為止的距離中最小之距離Y為1 mm以上。 若最小之距離Y為15 mm以下,則相對於玻璃基板12之表面12a設置積層樹脂層14之區域變寬,故而較佳。 再者,於玻璃基板12之4個邊中,自一邊上之點至處於最接近之位置之積層樹脂層14為止的距離中最小之距離Y可於玻璃基板12之4個各邊中,至少1者不同,亦可全部不同。於該情形時,積層樹脂層14靠近4個邊中之至少1個邊而配置。如此,積層樹脂層14並不限定為以積層樹脂層14之周圍之周緣區域13均等之方式配置於玻璃基板12之表面12a,亦可使積層樹脂層14靠近1個邊而配置。 In the laminated body 10, the distance X from the vertex 12e of the corner portion 12d to the laminated resin layer 14 at the closest position is preferably 21 mm or less, more preferably 10 mm or less. It is preferable that the distance X is 21 mm or less because the area where the laminated resin layer 14 is provided with respect to the surface 12 a of the glass substrate 12 becomes wider. Furthermore, the distance X from the vertex 12e of the corner portion 12d to the laminated resin layer 14 at the closest position does not need to be the same in all four corner portions 12d of the glass substrate 12. The distance X may be different in at least one of the four corners 12d of the glass substrate 12, or may be different in all. Furthermore, for example, it may be configured such that two of the four corner portions 12d are paired with the remaining two corner portions, and the distance X between the two pairs may be different. The laminated body 10 is preferably such that the smallest distance Y among the distances from the point P on one side of the glass substrate 12 to the laminated resin layer 14 at the closest position is 1 mm or more. It is preferable that the minimum distance Y is 15 mm or less because the area where the laminated resin layer 14 is provided with respect to the surface 12 a of the glass substrate 12 becomes wider. Furthermore, among the four sides of the glass substrate 12, the smallest distance Y among the distances from a point on one side to the laminated resin layer 14 at the closest position can be at least 1 may be different, or all of them may be different. In this case, the laminated resin layer 14 is disposed close to at least one of the four sides. In this way, the laminated resin layer 14 is not limited to being disposed on the surface 12 a of the glass substrate 12 so that the peripheral area 13 around the laminated resin layer 14 is evenly distributed. The laminated resin layer 14 may be disposed close to one side.

如圖2所示,於積層體10中,設為距玻璃基板12之1個角部12d之頂點12e最接近的積層樹脂層14之位置P1、及距與玻璃基板12之1個角部12d鄰接之角部12d之頂點12e最接近的積層樹脂層14之位置P2,較佳為於較連接位置P1與位置P2之直線Lp更靠玻璃基板12之邊側存在積層樹脂層14。即,積層樹脂層14於較上述直線Lp靠玻璃基板12之邊側存在區域14d。 上述直線Lp如圖2所示,存在於長邊12b側及短邊12c側之兩者。於積層樹脂層14中,於較長邊12b側之直線Lp靠玻璃基板12之長邊12b側存在區域14d。又,於積層樹脂層14中,於較短邊12c側之直線Lp靠玻璃基板12之短邊12c側存在區域14d。 於將積層體10之剝離性樹脂層18剝離,於玻璃基板12及中間樹脂層16上形成聚醯亞胺層(未圖示)之情形時,若如上所述於較連接位置P1與位置P2之直線Lp靠玻璃基板12之長邊12b側、或短邊12c側存在積層樹脂層14,則可抑制於高溫加熱時聚醯亞胺層劣化,聚醯亞胺層不易產生裂縫,故而較佳。 根據該情況,積層樹脂層14較之自玻璃基板12之表面12a之法線方向觀察的外形為四邊形(參照圖3),而較佳為圖2所示之積層樹脂層14之外形。 再者,於積層樹脂層14中,於存在區域14d之情形時,距離X與距離Y滿足距離X>距離Y×1.4之關係。 As shown in FIG. 2 , in the laminated body 10 , the position P1 of the laminated resin layer 14 closest to the apex 12 e of one corner 12 d of the glass substrate 12 is set, and the position P1 is the position P1 closest to the one corner 12 d of the glass substrate 12 . The position P2 of the laminated resin layer 14 closest to the vertex 12e of the adjacent corner portion 12d is preferably located closer to the side of the glass substrate 12 than the straight line Lp connecting the position P1 and the position P2. That is, the laminated resin layer 14 has a region 14d on the side of the glass substrate 12 relative to the straight line Lp. As shown in FIG. 2 , the straight line Lp exists on both the long side 12b side and the short side 12c side. In the laminated resin layer 14, the straight line Lp on the long side 12b side has a region 14d close to the long side 12b side of the glass substrate 12. In addition, in the laminated resin layer 14, the straight line Lp on the short side 12c side has a region 14d close to the short side 12c side of the glass substrate 12. When the peelable resin layer 18 of the laminated body 10 is peeled off and a polyimide layer (not shown) is formed on the glass substrate 12 and the intermediate resin layer 16, if the connection position P1 and the position P2 are connected as described above, It is preferable that the straight line Lp is close to the long side 12b side or the short side 12c side of the glass substrate 12 when the laminated resin layer 14 is present. This can suppress the deterioration of the polyimide layer during high-temperature heating and make the polyimide layer less prone to cracks. . In this case, the outer shape of the laminated resin layer 14 when viewed from the normal direction of the surface 12 a of the glass substrate 12 is a quadrangle (see FIG. 3 ), and preferably the outer shape of the laminated resin layer 14 is as shown in FIG. 2 . Furthermore, in the laminated resin layer 14, when the region 14d is present, the distance X and the distance Y satisfy the relationship of distance X>distance Y×1.4.

積層體10之積層樹脂層14之外形若滿足上述距離X,則並不特別限定,亦可為四邊形,於如圖3所示之積層體10a般自玻璃基板12之積層樹脂層14側之表面12a之法線方向觀察之情形時,外形亦可為長方形。 再者,圖3係表示本發明之實施方式之積層體之第2例的模式性俯視圖。於圖3中,對與圖1及圖2所示之積層體10相同之構成物,標註相同之符號,省略其詳細之說明。 The shape of the laminated resin layer 14 of the laminated body 10 is not particularly limited if it satisfies the above-mentioned distance X, and may be a quadrilateral. When the laminated body 10a is observed from the normal direction of the surface 12a of the laminated resin layer 14 side of the glass substrate 12 as shown in FIG3, the shape may also be a rectangle. Furthermore, FIG3 is a schematic top view of the second example of the laminated body of the embodiment of the present invention. In FIG3, the same symbols are marked for the same components as the laminated body 10 shown in FIG1 and FIG2, and their detailed description is omitted.

圖4係表示本發明之實施方式之積層體之第3例的模式性俯視圖。於圖4中,對與圖1及圖2所示之積層體10相同之構成物,標註相同之符號,省略其詳細之說明。 圖4所示之積層體10b與圖1及圖2所示之積層體10相比,將積層樹脂層14分割為複數個區域之方面不同,除此以外,為與圖1及圖2所示之積層體10相同之構成。 積層體10b之積層樹脂層14設置於長邊12b之一半長度之位置,藉由沿著短邊12c延伸之直線狀之槽19而分割為2個區域15a、15b。2個區域15a、15b之形狀及大小相同。 槽19自積層樹脂層14之表面14a到達玻璃基板12之表面12a,於槽19無積層樹脂層14,玻璃基板12之表面12a露出。 槽19之長邊12b之延伸方向上之長度,即,槽19之寬度Z例如亦可較上述距離Y寬。 槽19例如藉由使用切割器或雷射將積層樹脂層14切斷且去除而形成。又,亦可將積層樹脂層14空開間隔配置而設置槽19。 又,將積層樹脂層14分割為2個區域,但是分割數量並不限定為2,例如,亦可為3~240。 2個區域15a、15b並不限定為形狀及大小相同,形狀或大小中之至少一者亦可不同。 並不限定為沿著短邊12c延伸之直線狀之槽19,亦可藉由設置於短邊12c之一半長度之位置,且沿著長邊12b延伸之直線狀之槽19,而分割積層樹脂層14。 FIG. 4 is a schematic top view of the third example of the laminated body of the embodiment of the present invention. In FIG. 4 , the same symbols are assigned to the same components as the laminated body 10 shown in FIG. 1 and FIG. 2 , and detailed description thereof is omitted. The laminated body 10b shown in FIG. 4 is different from the laminated body 10 shown in FIG. 1 and FIG. 2 in that the laminated resin layer 14 is divided into a plurality of regions. Otherwise, the laminated body 10b has the same structure as the laminated body 10 shown in FIG. 1 and FIG. 2 . The laminated resin layer 14 of the laminated body 10b is provided at a position half the length of the long side 12b, and is divided into two regions 15a and 15b by a straight groove 19 extending along the short side 12c. The two regions 15a and 15b have the same shape and size. The groove 19 extends from the surface 14a of the laminated resin layer 14 to the surface 12a of the glass substrate 12. There is no laminated resin layer 14 in the groove 19, and the surface 12a of the glass substrate 12 is exposed. The length of the long side 12b of the groove 19 in the extending direction, that is, the width Z of the groove 19, for example, can also be wider than the above-mentioned distance Y. The groove 19 is formed by, for example, cutting and removing the laminated resin layer 14 using a cutter or a laser. In addition, the laminated resin layer 14 can be arranged at intervals to provide the groove 19. Furthermore, the laminate resin layer 14 is divided into two regions, but the number of divisions is not limited to 2, and may be, for example, 3 to 240. The two regions 15a and 15b are not limited to being the same in shape and size, and at least one of the shapes or sizes may be different. The laminate resin layer 14 may be divided by a linear groove 19 that is provided at a position half the length of the short side 12c and extends along the long side 12b, rather than being limited to a linear groove 19 that extends along the long side 12b.

即便於圖3所示之積層樹脂層14之形狀於自玻璃基板12之積層樹脂層14側之表面12a之法線方向觀察的情形時為四邊形之情形時,積層樹脂層14亦可分割為複數個區域。具體而言,亦可如圖5所示之積層體10c之積層樹脂層14般,藉由槽19而分割為2個區域15a、15b。 再者,圖5係表示本發明之實施方式之積層體之第4例的模式性俯視圖。於圖3中,對與圖1及圖2所示之積層體10相同之構成物,標註相同之符號,省略其詳細之說明。 Even when the shape of the laminated resin layer 14 shown in FIG. 3 is a quadrilateral when observed in the normal direction of the surface 12a on the laminated resin layer 14 side of the glass substrate 12, the laminated resin layer 14 can be divided into a plurality of regions. Specifically, it can also be divided into two regions 15a and 15b by the groove 19, as in the laminated resin layer 14 of the laminated body 10c shown in FIG. 5. Furthermore, FIG. 5 is a schematic top view of the fourth example of the laminated body of the embodiment of the present invention. In FIG. 3, the same symbols are marked for the same components as the laminated body 10 shown in FIG. 1 and FIG. 2, and their detailed description is omitted.

以下,對構成上述積層體之各構件進行詳細敍述。 (玻璃基板) 玻璃基板係支持積層樹脂層14而進行補強之構件,作為支持基板而發揮功能。 作為構成玻璃基板之玻璃,較佳為無鹼硼矽酸玻璃、硼矽酸玻璃、鈉鈣玻璃、高氧化矽玻璃、其他以氧化矽為主成分之氧化物系玻璃。作為氧化物系玻璃,較佳為氧化物換算之氧化矽之含量為40~90質量%之玻璃。 作為玻璃基板,更具體而言,可例舉包括無鹼硼矽酸玻璃之玻璃基板(AGC股份有限公司製造商品名「AN100」)。 玻璃基板之製造方法係通常將玻璃原料熔融,並將熔融玻璃成形為板狀而獲得。此種成形方法可為一般性者,例如可例舉浮式法、熔融法、槽下拉法。 玻璃基板之形狀並不特別限制,但是自輸送及移送等處理之觀點而言,於自玻璃基板12之積層樹脂層14側之表面12a之法線方向觀察之情形時,外形較佳為四邊形。 於玻璃基板係外形為四邊形之情形時,玻璃基板之長邊與短邊可為不同之長度,又,玻璃基板之長邊與短邊亦可為相同之長度。 Hereinafter, each member constituting the above-mentioned laminated body will be described in detail. (Glass base board) The glass substrate is a member that supports and reinforces the laminated resin layer 14 and functions as a supporting substrate. As the glass constituting the glass substrate, alkali-free borosilicate glass, borosilicate glass, soda-lime glass, high-oxide silica glass, and other oxide-based glasses containing silicon oxide as the main component are preferred. As the oxide-based glass, glass having a silicon oxide content of 40 to 90% by mass in terms of oxide is preferred. More specifically, the glass substrate may include a glass substrate including alkali-free borosilicate glass (trade name "AN100" manufactured by AGC Co., Ltd.). The manufacturing method of a glass substrate is usually obtained by melting a glass raw material and shaping the molten glass into a plate shape. This forming method may be a general one, and examples thereof include a float method, a melting method, and a trough down-draw method. The shape of the glass substrate is not particularly limited, but from the viewpoint of processing such as transportation and transfer, when viewed from the normal direction of the surface 12 a of the glass substrate 12 on the side of the laminated resin layer 14 , the outer shape is preferably a quadrangular shape. When the shape of the glass substrate is a quadrilateral, the long and short sides of the glass substrate can be of different lengths, and the long and short sides of the glass substrate can also be of the same length.

玻璃基板較佳為並非可撓性。玻璃基板之楊氏模數較佳為100 GPa以下。玻璃基板之楊氏模數係藉由超音波脈衝法而測定之值。若玻璃基板之楊氏模數為100 GPa以下,則可抑制因搬運玻璃基板時與周邊構件之接觸所致之破損。玻璃基板之楊氏模數較佳為65 GPa以上。若玻璃基板之楊氏模數為65 GPa以上,則可抑制因搬運玻璃基板時與周邊構件之接觸所致之破損。 玻璃基板之厚度Dt(參照圖1)較佳為0.2~1 mm。上述玻璃基板之厚度Dt係測定玻璃基板12之任意之10點之厚度,並將其等進行算術平均而求出之值。 The glass substrate is preferably non-flexible. The Young's modulus of the glass substrate is preferably 100 GPa or less. The Young's modulus of the glass substrate is a value measured by an ultrasonic pulse method. If the Young's modulus of the glass substrate is 100 GPa or less, damage caused by contact with peripheral components when the glass substrate is transported can be suppressed. The Young's modulus of the glass substrate is preferably 65 GPa or more. If the Young's modulus of the glass substrate is 65 GPa or more, damage caused by contact with peripheral components when the glass substrate is transported can be suppressed. The thickness Dt of the glass substrate (see FIG. 1) is preferably 0.2 to 1 mm. The thickness Dt of the above-mentioned glass substrate is a value obtained by measuring the thickness of any 10 points of the glass substrate 12 and arithmetically averaging them.

(積層樹脂層) 積層樹脂層14如上所述設為中間樹脂層16與剝離性樹脂層18。例如,於將剝離性樹脂層18剝離之後,於玻璃基板12及中間樹脂層16上形成聚醯亞胺層(未圖示)。 (Build-up resin layer) The build-up resin layer 14 is provided as the intermediate resin layer 16 and the release resin layer 18 as described above. For example, after the release resin layer 18 is peeled off, a polyimide layer (not shown) is formed on the glass substrate 12 and the intermediate resin layer 16.

[中間樹脂層] 中間樹脂層16形成於玻璃基板12之表面12a。 中間樹脂層16係用以防止配置於其上之聚醯亞胺層(未圖示)剝離之膜。 作為中間樹脂層16之材質,例如可例舉丙烯酸樹脂、聚烯烴樹脂、聚胺基甲酸酯樹脂、聚醯亞胺樹脂、矽酮樹脂、聚醯亞胺矽酮樹脂、氟樹脂。又,亦可將幾種樹脂混合而構成中間樹脂層16。 其中,自耐熱性或剝離性之點而言,作為中間樹脂層16之材質,較佳為矽酮樹脂、聚醯亞胺矽酮樹脂,更佳為矽酮樹脂,更佳為由縮合硬化型矽酮形成之矽酮樹脂。將由矽酮樹脂構成之中間樹脂層16稱為矽酮樹脂層。 以下,對中間樹脂層16為矽酮樹脂層之形態進行詳細敍述。 [Middle resin layer] The intermediate resin layer 16 is formed on the surface 12a of the glass substrate 12. The intermediate resin layer 16 is a film used to prevent the polyimide layer (not shown) disposed thereon from peeling off. Examples of the material of the intermediate resin layer 16 include acrylic resin, polyolefin resin, polyurethane resin, polyimide resin, silicone resin, polyimide silicone resin, and fluororesin. Alternatively, several types of resins may be mixed to form the intermediate resin layer 16 . Among them, from the viewpoint of heat resistance or peelability, as the material of the intermediate resin layer 16, silicone resin or polyimide silicone resin is preferred, silicone resin is more preferred, and condensation-hardening type resin is more preferred. Silicone resin formed from silicone. The intermediate resin layer 16 made of silicone resin is called a silicone resin layer. Hereinafter, the form in which the intermediate resin layer 16 is a silicone resin layer will be described in detail.

所謂矽酮樹脂,係指包含規定之有機矽烷氧基單元之樹脂,通常,使硬化性矽酮硬化而獲得。硬化性矽酮根據其硬化機制而被分類為加成硬化型矽酮、縮合硬化型矽酮、紫外線硬化型矽酮、及電子束硬化型矽酮,任一種均可使用。其中,較佳為縮合硬化型矽酮。 作為縮合硬化型矽酮,可較佳地使用作為單體之水解性有機矽烷化合物或其混合物(單體混合物)、或者使單體或單體混合物局部水解縮合反應所得之局部水解縮合物(有機聚矽氧烷)。 藉由使用該縮合硬化型矽酮,進行水解/縮合反應(溶膠凝膠反應)而可形成矽酮樹脂。 The silicone resin refers to a resin containing a predetermined organosiloxy group unit, and is usually obtained by hardening curable silicone. Hardening silicone is classified into addition-hardening silicone, condensation-hardening silicone, ultraviolet-hardening silicone, and electron-beam hardening silicone according to its hardening mechanism, and any of them can be used. Among them, condensation-hardening silicone is preferred. As the condensation-hardening silicone, a hydrolyzable organosilane compound as a monomer or a mixture thereof (monomer mixture), or a partially hydrolyzed condensate (organic silane compound) obtained by subjecting a monomer or a monomer mixture to a partial hydrolysis-condensation reaction can be preferably used. polysiloxane). By using this condensation-hardening silicone, a hydrolysis/condensation reaction (sol-gel reaction) proceeds to form a silicone resin.

中間樹脂層16較佳為使用包含硬化性矽酮之硬化性組合物來形成。 硬化性組合物除了包含硬化性矽酮以外,亦可包含溶劑、鉑觸媒(於使用加成反應型矽酮作為硬化性矽酮之情形時)、整平劑、金屬化合物等。作為金屬化合物中所包含之金屬元素,例如可例舉3d過渡金屬、4d過渡金屬、鑭系元素系金屬、鉍(Bi)、鋁(Al)、錫(Sn)。金屬化合物之含量並不特別限制,可適當調整。 The intermediate resin layer 16 is preferably formed using a curable composition containing curable silicone. In addition to curable silicone, the curable composition may also contain a solvent, a platinum catalyst (when an addition reaction type silicone is used as the curable silicone), a leveling agent, a metal compound, etc. Examples of the metal element contained in the metal compound include 3d transition metals, 4d transition metals, lanthanide series metals, bismuth (Bi), aluminum (Al), and tin (Sn). The content of the metal compound is not particularly limited and can be adjusted appropriately.

中間樹脂層16較佳為具有羥基。將構成中間樹脂層16之矽酮樹脂之Si-O-Si鍵之一部分切斷而出現羥基。又,於使用縮合反應型矽酮之情形時,該羥基會成為中間樹脂層16之羥基。The middle resin layer 16 preferably has a hydroxyl group. The hydroxyl group is generated by cutting a portion of the Si-O-Si bonds of the silicone resin constituting the middle resin layer 16. In addition, when a condensation reaction type silicone is used, the hydroxyl group becomes the hydroxyl group of the middle resin layer 16.

自將一樹脂基板剝離之後,於未配置中間層之樹脂基板之側積層玻璃製之支持基板時異物之填埋性優異的方面而言,中間樹脂層16之厚度較佳為1 μm以上,更佳為6 μm以上。中間樹脂層16之厚度之上限自加工成本、製程產距之方面而言,較佳為50 μm以下,更佳為30 μm以下,進而較佳為12 μm以下。 再者,所謂異物填埋性優異,係指即便於玻璃基板12與中間樹脂層16之間存在異物,亦藉由中間樹脂層16而填埋異物。若異物之填埋性優異,則於中間樹脂層16不易產生由異物所致之凸部。根據該情況,若異物填埋性優異,則如上所述於中間樹脂層16上形成聚醯亞胺層,進而於聚醯亞胺層上形成電子器件用構件時,可抑制由凸部所致之電子器件用構件中之斷線等風險。 中間樹脂層16之厚度係使用三鷹光器股份有限公司製造之非接觸表面性狀測定裝置「PF-60」測定5點以上之任意位置的中間樹脂層16之厚度,將其等進行算術平均所得者。 After peeling off a resin substrate, the thickness of the intermediate resin layer 16 is preferably 1 μm or more in order to have excellent burying properties when a glass supporting substrate is laminated on the side of the resin substrate without an intermediate layer. Preferably it is above 6 μm. From the aspects of processing cost and process throughput, the upper limit of the thickness of the intermediate resin layer 16 is preferably 50 μm or less, more preferably 30 μm or less, and further preferably 12 μm or less. Furthermore, excellent foreign matter filling performance means that even if foreign matter exists between the glass substrate 12 and the intermediate resin layer 16 , the foreign matter is filled by the intermediate resin layer 16 . If the embedding ability of foreign matter is excellent, convex portions caused by foreign matter are less likely to occur in the intermediate resin layer 16 . According to this situation, if the foreign matter filling property is excellent, a polyimide layer is formed on the intermediate resin layer 16 as described above, and when a member for an electronic device is formed on the polyimide layer, it is possible to suppress defects caused by protrusions. Risks such as wire breakage in components used in electronic devices. The thickness of the intermediate resin layer 16 is obtained by measuring the thickness of the intermediate resin layer 16 at any position above 5 points using a non-contact surface quality measuring device "PF-60" manufactured by Mitaka Optoelectronics Co., Ltd. and averaging the results. .

[剝離性樹脂層] 剝離性樹脂層18係配置於中間樹脂層16上者,保護中間樹脂層16。 剝離性樹脂層18例如由聚醯亞胺樹脂、聚酯樹脂(例如,聚對苯二甲酸乙二酯、聚萘二甲酸乙二酯)、聚烯烴樹脂(例如,聚乙烯、聚丙烯)、或聚胺基甲酸酯樹脂構成。其中,自容易獲得之觀點而言,構成剝離性樹脂層18之樹脂較佳為聚酯樹脂,更佳為聚對苯二甲酸乙二酯。 [Releasable resin layer] The peelable resin layer 18 is disposed on the intermediate resin layer 16 and protects the intermediate resin layer 16 . The peelable resin layer 18 is made of, for example, polyimide resin, polyester resin (for example, polyethylene terephthalate, polyethylene naphthalate), polyolefin resin (for example, polyethylene, polypropylene), Or polyurethane resin. Among them, from the viewpoint of easy availability, the resin constituting the releasable resin layer 18 is preferably polyester resin, and more preferably polyethylene terephthalate.

為了降低自外部所受之力之影響,剝離性樹脂層之厚度較佳為20 μm以上,更佳為30 μm以上,進而較佳為50 μm以上。作為剝離性樹脂層之厚度之上限值,較佳為500 μm以下,更佳為300 μm以下,進而較佳為100 μm以下。In order to reduce the influence of external force, the thickness of the peelable resin layer is preferably 20 μm or more, more preferably 30 μm or more, and further preferably 50 μm or more. The upper limit of the thickness of the peelable resin layer is preferably 500 μm or less, more preferably 300 μm or less, and still more preferably 100 μm or less.

剝離性樹脂層亦可於中間樹脂層16側之表面進而具有密接層。 作為密接層,可使用周知之黏著層。作為構成黏著層之黏著劑,例如可例舉(甲基)丙烯酸系黏著劑、矽酮系黏著劑、胺基甲酸酯系黏著劑。 又,密接層亦可由樹脂構成,作為樹脂,例如可例舉乙酸乙烯酯樹脂、乙烯-乙酸乙烯酯共聚物樹脂、氯乙烯-乙酸乙烯酯共聚樹脂、(甲基)丙烯酸樹脂、丁醛樹脂、聚胺基甲酸酯樹脂、聚苯乙烯彈性體。 為了降低將剝離性樹脂層剝離時之剝離力,剝離性樹脂層之中間樹脂層16側之表面粗糙度(Ra)較佳為50 nm以下,更佳為30 nm以下,進而較佳為15 nm以下。又,為了能夠維持剝離性樹脂層與中間樹脂層密接之狀態,Ra較佳為0.1 nm以上,更佳為0.5 nm以上。表面粗糙度(Ra)係使用三菱化學系統股份有限公司製造之非接觸表面/層剖面形狀計測系統「VertscanR3300-lite」來測定。 The release resin layer may further have a close contact layer on the surface of the intermediate resin layer 16. As the close contact layer, a well-known adhesive layer may be used. As the adhesive constituting the adhesive layer, for example, (meth) acrylic adhesive, silicone adhesive, and urethane adhesive may be exemplified. In addition, the close contact layer may also be composed of resin, and as the resin, for example, vinyl acetate resin, ethylene-vinyl acetate copolymer resin, vinyl chloride-vinyl acetate copolymer resin, (meth) acrylic resin, butyral resin, polyurethane resin, and polystyrene elastomer may be exemplified. In order to reduce the peeling force when peeling the release resin layer, the surface roughness (Ra) of the intermediate resin layer 16 of the release resin layer is preferably 50 nm or less, more preferably 30 nm or less, and further preferably 15 nm or less. In addition, in order to maintain the close contact between the release resin layer and the intermediate resin layer, Ra is preferably 0.1 nm or more, and more preferably 0.5 nm or more. The surface roughness (Ra) is measured using the non-contact surface/layer cross-section shape measurement system "VertscanR3300-lite" manufactured by Mitsubishi Chemical Systems Co., Ltd.

<積層體之製造方法> 積層體之製造方法並不特別限制,可例舉周知之方法。 例如,可例舉形成玻璃基板12上之規定區域之中間樹脂層16,然後於中間樹脂層16上形成剝離性樹脂層18之方法。 以下,對各層之製造順序進行詳細敍述。 <Manufacturing method of laminated body> The manufacturing method of laminated body is not particularly limited, and a well-known method can be cited as an example. For example, a method of forming an intermediate resin layer 16 in a predetermined area on a glass substrate 12 and then forming a release resin layer 18 on the intermediate resin layer 16 can be cited as an example. The manufacturing sequence of each layer is described in detail below.

首先,形成玻璃基板12上之規定區域之中間樹脂層16。 中間樹脂層16之形成方法可根據中間樹脂層16之材料而適當選擇最佳之方法。例如,於形成矽酮樹脂層作為中間樹脂層16之情形時,可例舉將上述包含硬化性矽酮之硬化性組合物塗佈於玻璃基板12上之規定區域,對塗膜實施加熱處理之方法。 First, the intermediate resin layer 16 is formed in a predetermined area on the glass substrate 12 . The method for forming the intermediate resin layer 16 can be appropriately selected according to the material of the intermediate resin layer 16 . For example, when forming a silicone resin layer as the intermediate resin layer 16, the above-mentioned curable composition containing curable silicone is applied to a predetermined area on the glass substrate 12, and the coating film is heated. method.

其中,於使用矽酮樹脂層作為中間樹脂層16之情形時,於生產性優異之情形時,可例舉以下方法:準備具有臨時支持體與配置於臨時支持體上之加熱處理後成為矽酮樹脂層之前驅物膜之轉印膜(積層膜),使轉印膜中之前驅物膜貼合於玻璃基板12上之規定位置,對具有所獲得之玻璃基板12、前驅物膜、及臨時支持體之積層體實施加熱處理。藉由實施加熱處理而形成矽酮樹脂層。 以下,對上述順序進行詳細敍述。 Among them, when a silicone resin layer is used as the intermediate resin layer 16, in the case of excellent productivity, the following method can be cited as an example: prepare a transfer film (laminated film) having a temporary support and a pre-drive film disposed on the temporary support to become a silicone resin layer after heat treatment, make the pre-drive film in the transfer film adhere to a predetermined position on the glass substrate 12, and actually heat treat the laminate having the obtained glass substrate 12, the pre-drive film, and the temporary support. The silicone resin layer is formed by actually applying heat treatment. The above sequence is described in detail below.

於上述中,首先,準備具有加熱處理後成為矽酮樹脂層之前驅物膜及成為剝離性樹脂層之PET膜的轉印膜。於轉印膜,於PET膜形成前驅物膜。將轉印膜之前驅物膜貼合於玻璃基板12上之規定位置而獲得積層基體。 於將上述轉印膜貼合於玻璃基板12之後,亦可將所獲得之積層基體利用鹼性洗劑洗淨。又,於利用鹼性洗劑洗淨之後,亦可視需要利用純水來沖洗。進而,於利用純水沖洗之後,亦可視需要利用氣刀除掉水。 In the above, first, a transfer film including a precursor film that becomes a silicone resin layer after heat treatment and a PET film that becomes a releasable resin layer is prepared. On the transfer film, a precursor film is formed on the PET film. The transfer film precursor film is bonded to a predetermined position on the glass substrate 12 to obtain a laminated base. After the above-mentioned transfer film is bonded to the glass substrate 12, the obtained laminated base body may also be washed with an alkaline detergent. In addition, after washing with alkaline detergent, you can also use pure water to rinse if necessary. Furthermore, after rinsing with pure water, an air knife can also be used to remove the water if necessary.

於用以形成矽酮樹脂層之加熱處理時,較佳為一面施加壓力一面實施。具體而言,較佳為使用高壓釜實施加熱處理及加壓處理。 作為加熱處理時之加熱溫度,較佳為50~350℃,更佳為55~300℃,進而較佳為60~250℃。作為加熱時間,較佳為10~60分鐘,更佳為20~40分鐘。 作為加壓處理時之壓力,較佳為0.5~1.5 MPa,更佳為0.8~1.0 MPa。 When heat treatment is used to form the silicone resin layer, it is preferably carried out while applying pressure. Specifically, it is preferred to use an autoclave to carry out the heat treatment and the pressure treatment. The heating temperature during the heat treatment is preferably 50 to 350°C, more preferably 55 to 300°C, and further preferably 60 to 250°C. The heating time is preferably 10 to 60 minutes, more preferably 20 to 40 minutes. The pressure during the pressure treatment is preferably 0.5 to 1.5 MPa, more preferably 0.8 to 1.0 MPa.

又,加熱處理亦可進行複數次。於將加熱處理實施複數次之情形時,亦可變更各自之加熱條件。In addition, the heat treatment may be performed a plurality of times. When the heat treatment is performed a plurality of times, the respective heating conditions can also be changed.

其次,於積層基體中,自轉印膜之PET膜側,將PET膜(剝離性樹脂層18)及矽酮樹脂層(中間樹脂層16)切斷為規定尺寸而形成積層體。 又,例如於將轉印膜切斷為規定尺寸之後,亦可將規定尺寸之轉印膜貼附於玻璃基板。又,於將轉印膜貼附於玻璃基板之後,亦可將轉印膜切斷為規定尺寸。 於形成圖4所示之具有槽19之積層體之情形時,於積層基體中,將轉印膜切斷為規定尺寸之後,進而將轉印膜自PET膜側切斷而形成槽19。 除此以外,亦可於將轉印膜切斷為規定尺寸之後,將規定尺寸之轉印膜隔開成為槽19之間隔而貼附於玻璃基板。 又,即便於形成圖4所示之具有槽19之積層體之情形時,亦可於將轉印膜貼附於玻璃基板之後,將轉印膜切斷為規定尺寸。 [實施例] Next, in the laminate base, the PET film (peelable resin layer 18) and the silicone resin layer (intermediate resin layer 16) are cut into predetermined sizes from the PET film side of the transfer film to form a laminate. Moreover, for example, after cutting the transfer film into a predetermined size, the transfer film of a predetermined size may be attached to the glass substrate. In addition, after the transfer film is attached to the glass substrate, the transfer film may be cut into a predetermined size. When forming a laminated body having grooves 19 as shown in FIG. 4 , the transfer film is cut into a predetermined size in the laminated base, and then the transfer film is cut from the PET film side to form grooves 19 . Alternatively, after the transfer film is cut into a predetermined size, the transfer film of the predetermined size may be separated into intervals between the grooves 19 and attached to the glass substrate. Moreover, even when forming the laminated body having the groove 19 as shown in FIG. 4 , the transfer film may be cut into a predetermined size after being attached to the glass substrate. [Example]

以下,根據實施例等對本發明具體地進行說明,但是本發明並不受該等之例限制。以下,例1~例4為比較例,例5~例13為實施例。Hereinafter, the present invention will be specifically described based on the examples, but the present invention is not limited to these examples. Hereinafter, Examples 1 to 4 are comparative examples, and Examples 5 to 13 are embodiments.

(硬化性矽酮之製備) 於1 L之燒瓶中添加三乙氧基甲基矽烷(179 g)、甲苯(300 g)、乙酸(5 g),將混合物於25℃攪拌20分鐘之後,進而,加熱至60℃使之反應12小時,獲得反應粗液。 將所獲得之反應粗液冷卻至25℃之後,使用水(300 g),將反應粗液洗淨3次。對洗淨後之反應粗液添加氯化三甲基矽烷(70 g),將混合物於25℃攪拌20分鐘之後,進而,加熱至50℃使之反應12小時。將所獲得之反應粗液冷卻至25℃之後,使用水(300 g)將反應粗液洗淨3次。 自洗淨後之反應粗液減壓蒸餾去除甲苯,形成為漿料狀態之後,利用真空乾燥機終夜乾燥,藉此獲得作為白色之有機聚矽氧烷化合物之硬化性矽酮1。 硬化性矽酮1係M單元、T單元之莫耳比為13:87,有機基全部為甲基,平均OX基數為0.02。M單元係指由(R)3SiO 1/2表示之有機矽烷氧基單元,T單元係指由RSiO 3/2表示之有機矽烷氧基單元,各式中之R表示氫原子或有機基。平均OX基數係表示於1個Si原子平均鍵結幾個OX基(X為氫原子或烴基)之數值。 (Preparation of curable silicone) Triethoxymethylsilane (179 g), toluene (300 g), and acetic acid (5 g) were added to a 1 L flask, and the mixture was stirred at 25°C for 20 minutes, and then heated to 60°C to react for 12 hours to obtain a crude reaction solution. The obtained crude reaction solution was cooled to 25°C, and then washed three times with water (300 g). Trimethylsilyl chloride (70 g) was added to the washed crude reaction solution, and the mixture was stirred at 25°C for 20 minutes, and then heated to 50°C to react for 12 hours. The obtained crude reaction solution was cooled to 25°C, and then washed three times with water (300 g). The crude reaction liquid after washing was distilled under reduced pressure to remove toluene, and after forming a slurry state, it was dried overnight in a vacuum dryer to obtain a curable silicone 1 as a white organic polysiloxane compound. The curable silicone 1 has a molar ratio of M unit and T unit of 13:87, all organic groups are methyl groups, and the average OX group number is 0.02. The M unit refers to an organic silaneoxy unit represented by (R)3SiO 1/2 , and the T unit refers to an organic silaneoxy unit represented by RSiO 3/2 . R in each formula represents a hydrogen atom or an organic group. The average OX group number represents the number of OX groups (X is a hydrogen atom or a hydrocarbon group) bonded to one Si atom on average.

(硬化性組合物之製備) 將硬化性矽酮1(20 g)、作為金屬化合物之辛酸鋯化合物(「ORGATIX ZC-200」,Matsumoto Fine Chemical股份有限公司製造)(0.16 g)、2-乙基己酸鈰(III)(Alfa Aesar公司製造,金屬含有率12質量%)(0.17 g)、及作為溶劑之Isoper G(東燃Genera石油股份有限公司製造)(19.7 g)混合,將所獲得之混合液使用孔徑0.45 μm之過濾器進行過濾,藉此獲得硬化性組合物1。 (Preparation of curable composition) Curing silicone 1 (20 g), zirconium octanoate compound ("ORGATIX ZC-200", manufactured by Matsumoto Fine Chemical Co., Ltd.) (0.16 g) as a metal compound, 2-ethylhexanoic acid (III) (manufactured by Alfa Aesar, metal content 12% by mass) (0.17 g), and Isoper G (manufactured by Tonen Genera Oil Co., Ltd.) (19.7 g) as a solvent were mixed, and the obtained mixed solution was filtered using a filter with a pore size of 0.45 μm to obtain curable composition 1.

(積層膜之製作) 作為成為剝離性樹脂層之離型膜,準備PET膜(東洋紡公司製造,東洋紡酯(註冊商標)膜HPE(高密度聚乙烯),厚度50 μm),於該膜表面上塗佈所製備之硬化性組合物1,使用加熱板以140℃加熱10分鐘,藉此形成矽酮樹脂層。 於所塗佈之矽酮樹脂層之上,貼合PET膜(東洋紡公司製造,東洋紡酯(註冊商標)膜HPE,厚度50 μm)作為保護膜,獲得將離型膜、矽酮樹脂層(中間層)及保護膜依次積層而成之積層膜1。所獲得之積層膜1之厚度為110 μm。 (Production of laminated film) As a release film to be the peelable resin layer, a PET film (manufactured by Toyobo Co., Ltd., Toyobo Ester (registered trademark) film HPE (high density polyethylene), thickness 50 μm) was prepared, and the prepared hardened film was applied to the surface of the film. The silicone resin layer was formed by heating Composition 1 at 140° C. for 10 minutes using a hot plate. On the coated silicone resin layer, a PET film (manufactured by Toyobo Co., Ltd., Toyobo Ester (registered trademark) film HPE, thickness 50 μm) was bonded as a protective film to obtain a release film and silicone resin layer (middle The laminated film 1 is formed by laminating layers) and protective films in sequence. The thickness of the obtained laminated film 1 was 110 μm.

(積層膜之切斷) 自積層膜1之離型膜之PET膜側插入切割器,切斷為所期望之尺寸(400×320 mm、880×690 mm、890×700 mm、912×722 mm、914.4×724.4 mm、918×728 mm、920×730 mm)。藉此,積層樹脂層之外形形成為四邊形。 於例1中,使用切割器,切斷為400×320 mm之尺寸。 又,將積層膜1配置於衝壓機(TAMARI機工股份有限公司製造之油壓裁斷機,裝置名「TP-12801000×100TON」),將由刀寬0.5 mm、刀角30度之Thomson刀製作之刀組(398×318 mm之角R6.2 mm、458×728 mm之角R6.2 mm、910×720 mm之角R0.1 mm、910×724 mm之角R0.1 mm、918×728 mm之角R6.2 mm、920×730 mm之角R4.8 mm)自離型膜之PET膜側入射,切斷積層膜1。藉此,積層樹脂層之外形形成為四角由曲線構成之超橢圓形。此處,所謂角R,表示構成積層樹脂層之外形之4角之曲線之曲率半徑。 再者,作為積層樹脂層之切斷方式,將使用切割器之方式稱為切割器方式。又,作為積層樹脂層之切斷方式,將使用衝壓機之方式稱為衝壓方式。 (Cutting of laminated film) Insert the PET film side of the release film of the laminated film 1 into the cutter and cut it into the desired size (400×320 mm, 880×690 mm, 890×700 mm, 912×722 mm, 914.4×724.4 mm, 918 ×728 mm, 920×730 mm). Thereby, the outer shape of the laminated resin layer is formed into a quadrangular shape. In Example 1, a cutter was used to cut into a size of 400×320 mm. Furthermore, the laminated film 1 was placed on a stamping machine (hydraulic cutting machine manufactured by TAMARI Machinery Co., Ltd., device name "TP-12801000×100TON"), and the knife was made from a Thomson knife with a blade width of 0.5 mm and a blade angle of 30 degrees. Group (398×318 mm corner R6.2 mm, 458×728 mm corner R6.2 mm, 910×720 mm corner R0.1 mm, 910×724 mm corner R0.1 mm, 918×728 mm Angle R6.2 mm, angle R4.8 mm of 920×730 mm) is incident from the PET film side of the release film, cutting off the laminated film 1. Thereby, the outer shape of the laminated resin layer is formed into a super elliptical shape with four corners formed by curved lines. Here, the angle R represents the radius of curvature of the four-cornered curve constituting the outer shape of the laminated resin layer. In addition, as a method of cutting the laminated resin layer, the method of using a cutter is called a cutter method. In addition, as a cutting method of the laminated resin layer, the method using a stamping machine is called a stamping method.

(於玻璃基板之中配置1片積層膜之積層基板之製作) 相當於下述表1之例1~12。 將利用水系玻璃洗淨劑(Parker Corporation股份有限公司製造「PK-LCG213」)洗淨後,利用純水洗淨之920×730 mm、厚度0.5 mm或400×320 mm、厚度0.5 mm之角部、及邊部倒角之玻璃基板「AN Wizus」(支持基板,楊氏模數85 GPa)與形成有保護膜剝離之積層膜1之矽酮樹脂層之PET膜貼合,製作玻璃基板、矽酮樹脂層、及PET膜依次配置而成之積層體。再者,於上述貼合時,以玻璃基板之側面(邊)與矽酮樹脂層及PET膜之距離、以及玻璃基板之角部與矽酮樹脂層及PET膜之距離成為下述表1所示之例1之關係的方式,將玻璃基板與矽酮樹脂層、及PET膜貼合。 例1及例7使用上述400×320 mm、厚度0.5 mm之玻璃基板。 例2~6及例8~13使用上述920×730 mm、厚度0.5 mm之玻璃基板。 (Production of a laminated substrate with one laminated film arranged in a glass substrate) Equivalent to Examples 1 to 12 in Table 1 below. A glass substrate "AN Wizus" (support substrate, Young's modulus 85 GPa) of 920×730 mm, 0.5 mm thick or 400×320 mm, 0.5 mm thick, with corner and edge chamfers washed with a water-based glass cleaner ("PK-LCG213" manufactured by Parker Corporation) and then washed with pure water is laminated to a PET film with a silicone resin layer of laminated film 1 formed by peeling off a protective film, to produce a laminated body in which a glass substrate, a silicone resin layer, and a PET film are arranged in sequence. Furthermore, during the above bonding, the glass substrate, the silicone resin layer, and the PET film are bonded in such a manner that the distance between the side (edge) of the glass substrate and the silicone resin layer and the PET film, and the distance between the corner of the glass substrate and the silicone resin layer and the PET film become the relationship of Example 1 shown in Table 1 below. Examples 1 and 7 use the above-mentioned 400×320 mm, 0.5 mm thick glass substrate. Examples 2 to 6 and Examples 8 to 13 use the above-mentioned 920×730 mm, 0.5 mm thick glass substrate.

(於玻璃基板中配置2片積層膜之積層基板之製作) 相當於下述表1之例13。 將利用水系玻璃洗淨劑洗淨後利用純水洗淨之920×730 mm、厚度0.5 mm之角部、及邊部倒角之玻璃基板「AN Wizus」(支持基板)、與剝離了保護膜之458×728 mm之形成有積層膜1之矽酮樹脂層之PET膜貼合之後,進而將另1片458×728 mm之剝離了保護膜之形成有積層膜1之矽酮樹脂層的PET膜貼合,於玻璃基板配置2片矽酮樹脂層及PET膜,製作玻璃基板、矽酮樹脂層、及PET膜依次配置而成之積層體。再者,於上述貼合時,2片剝離了保護膜之積層膜1之沿著長邊的距離,大於玻璃基板之側面(邊)與剝離了保護膜之積層膜1的距離。 (Production of a laminated substrate with two laminated films on a glass substrate) This corresponds to Example 13 in Table 1 below. A 920 × 730 mm, 0.5 mm thick glass substrate "AN Wizus" (support substrate) with corner and edge chamfers, which was washed with a water-based glass cleaner and then washed with pure water, and the protective film was peeled off After laminating the 458×728 mm PET film with the silicone resin layer of the laminated film 1 formed on it, another 458×728 mm PET film with the silicone resin layer of the laminated film 1 formed on it was peeled off. For film lamination, two silicone resin layers and PET films are placed on a glass substrate to create a laminate in which the glass substrate, silicone resin layer, and PET film are placed in sequence. Furthermore, during the above lamination, the distance along the long sides of the two laminated films 1 with the protective films peeled off is larger than the distance between the side surfaces (edges) of the glass substrate and the laminated films 1 with the protective films peeled off.

(積層基板之加熱) 以所獲得之積層體之玻璃基板與加熱板接觸之方式配置,以60℃加熱30分鐘之後,將積層體於無塵室環境下(室溫23℃,濕度55%)靜置1天。 (Heating of laminated substrate) The obtained laminated body was arranged so that the glass substrate was in contact with the heating plate, and after heating at 60°C for 30 minutes, the laminated body was left to stand in a clean room environment (room temperature 23°C, humidity 55%) for 1 day.

<例2~12> 於上述貼合時,以使玻璃基板之側面(邊)與矽酮樹脂層及PET膜之距離、和玻璃基板之角部與矽酮樹脂層及PET膜之距離成為下述表1所示之例2~12之關係的方式,將玻璃基板與矽酮樹脂層及PET膜(保護膜剝離後之積層膜1)貼合,除此以外按照與例1相同之順序獲得積層體。 <Examples 2 to 12> During the above lamination, the glass substrate, the silicone resin layer and the PET film (laminated film 1 after the protective film is peeled off) are laminated in a manner such that the distance between the side (edge) of the glass substrate and the silicone resin layer and the PET film, and the distance between the corner of the glass substrate and the silicone resin layer and the PET film become the relationship of Examples 2 to 12 shown in Table 1 below. Except for this, a laminated body is obtained in the same order as in Example 1.

於例2中,將積層膜1使用切割器切斷為920×730 mm之尺寸。於例3中,將積層膜1使用衝壓機切斷為920×730 mm(角R4.8 mm)之尺寸。 於例4中,將積層膜1使用切割器切斷為918×728 mm之尺寸。於例5中,將積層膜1使用衝壓機切斷為918×728 mm(角R6.2 mm)之尺寸。 於例6中,將積層膜1使用切割器切斷為914.4×724.4 mm之尺寸。於例7中,將積層膜1使用衝壓機切斷為398×318 mm(角R6.2 mm)之尺寸。 In Example 2, the laminated film 1 was cut into a size of 920×730 mm using a cutter. In Example 3, the laminated film 1 was cut into a size of 920×730 mm (angle R 4.8 mm) using a punching machine. In Example 4, the laminated film 1 was cut into a size of 918×728 mm using a cutter. In Example 5, the laminated film 1 was cut into a size of 918×728 mm (angle R6.2 mm) using a punching machine. In Example 6, the laminated film 1 was cut into a size of 914.4×724.4 mm using a cutter. In Example 7, the laminated film 1 was cut into a size of 398×318 mm (angle R6.2 mm) using a punching machine.

於例8中,將積層膜1使用切割器切斷為912×722 mm之尺寸。於例9中,將積層膜1使用衝壓機切斷為910×720 mm(角R0.1 mm)之尺寸。 於例10中,將積層膜1使用切割器切斷為890×700 mm之尺寸。於例11中,將積層膜1使用切割器切斷為880×690 mm之尺寸。 於例12中,將積層膜1使用衝壓機切斷為910×724 mm(角R0.1 mm)之尺寸。例12中,於上述貼合時,更具體而言,以使玻璃基板(920×730 mm)之短邊12c(參照圖2)上之距離Y分別為5 mm,長邊12b(參照圖2)上之距離Y為1 mm與5 mm之方式,將矽酮樹脂層及PET膜(保護膜剝離後之積層膜1)貼合於玻璃基板。 In Example 8, the laminated film 1 was cut into a size of 912×722 mm using a cutter. In Example 9, the laminated film 1 was cut into a size of 910×720 mm (corner R0.1 mm) using a punch press. In Example 10, the laminated film 1 was cut into a size of 890×700 mm using a cutter. In Example 11, the laminated film 1 was cut into a size of 880×690 mm using a cutter. In Example 12, the laminated film 1 was cut into a size of 910×724 mm (corner R0.1 mm) using a punch press. In Example 12, during the above bonding, more specifically, the silicone resin layer and the PET film (laminated film 1 after the protective film is peeled off) are bonded to the glass substrate (920×730 mm) in such a way that the distance Y on the short side 12c (see FIG. 2) is 5 mm, and the distance Y on the long side 12b (see FIG. 2) is 1 mm and 5 mm.

<例13> 於例13中,將積層膜1使用衝壓機切斷為458×728 mm(角R6.2 mm)之尺寸,獲得2個矽酮樹脂層及PET膜。 例13中,於上述貼合時,以使玻璃基板之側面與矽酮樹脂層及PET膜之距離、和玻璃基板之角部與矽酮樹脂層及PET膜之距離成為表1之例13之關係的方式,於玻璃基板貼合2個矽酮樹脂層及PET膜(保護膜剝離後之積層膜1)。於例13中,以於2個矽酮樹脂層及PET膜之間形成槽之方式空開間隔而貼合。再者,槽設置於玻璃基板12之長邊之中間之位置,使槽之寬度為2 mm。 <Example 13> In Example 13, the laminated film 1 was cut into a size of 458×728 mm (corner R6.2 mm) using a punch press to obtain two silicone resin layers and a PET film. In Example 13, during the above-mentioned lamination, two silicone resin layers and a PET film (laminated film 1 after the protective film was peeled off) were laminated to the glass substrate in such a manner that the distance between the side surface of the glass substrate and the silicone resin layer and the PET film, and the distance between the corner of the glass substrate and the silicone resin layer and the PET film became the relationship of Example 13 in Table 1. In Example 13, the two silicone resin layers and the PET film were laminated with a gap formed between them. Furthermore, the groove is set in the middle of the long side of the glass substrate 12 so that the width of the groove is 2 mm.

<翹曲之評估> 使包括玻璃基板、矽酮樹脂層、及PET膜之積層體以玻璃基板與石壓盤接觸之方式靜置於石壓盤之上,使用厚度規(親和測定股份有限公司製造,厚度規D 65 mm 25片組(製品名))來測定積層體之角部之玻璃基板與石壓盤之間隙。評估4角中最大之間隙量(翹曲量)。又,於PET膜之角貼附Scotch Tape(3M股份有限公司製造Scotch Mending tape寬度「810-1-18D」),提拉剝離PET膜。將積層體放置於螢光燈之下,基於矽酮樹脂層之光之反射狀態,利用目視觀察有無剝離後之缺陷。 A:最大之翹曲量小於0.2 mm,且不產生剝離後缺陷 B:最大之翹曲量為0.2 mm以上,且產生剝離後缺陷 <Evaluation of warpage> The laminate including the glass substrate, silicone resin layer, and PET film was placed on the stone platen in such a manner that the glass substrate was in contact with the stone platen, and a thickness gauge (manufactured by Affinity Measurement Co., Ltd., thickness gauge D 65) was used. mm 25 piece set (product name)) to measure the gap between the glass substrate and the stone plate at the corner of the laminate. Evaluate the largest gap amount (warp amount) among the four corners. Also, attach Scotch Tape (Scotch Mending tape width "810-1-18D" manufactured by 3M Co., Ltd.) to the corners of the PET film, and pull and peel the PET film. The laminated body is placed under a fluorescent lamp, and based on the light reflection state of the silicone resin layer, the presence or absence of defects after peeling is visually observed. A: The maximum warpage is less than 0.2 mm, and no post-peel defects will occur. B: The maximum warpage is more than 0.2 mm, and defects after peeling are produced

<基板有效面積率之評估> 計算玻璃基板之面積與矽酮樹脂層及PET膜之面積之比率並進行評估。 A:基板有效面積率大於90.5% B:基板有效面積率為90.5%以下 <Evaluation of substrate effective area ratio> Calculate and evaluate the ratio of the area of the glass substrate to the area of the silicone resin layer and the PET film. A: The effective area ratio of the substrate is greater than 90.5% B: The effective area ratio of the substrate is less than 90.5%

(聚醯亞胺層之形成) 將包括玻璃基板與矽酮樹脂層、及PET膜之例5與例6之積層體之PET膜剝離,使用潔淨烘箱於大氣環境下於250℃加熱30分鐘。其次,對矽酮樹脂層實施電暈處理之後,塗佈無色聚醯亞胺清漆(三菱氣體化學股份有限公司製造「Neopulim H230」)之後,使用加熱板於80℃加熱20分鐘。繼而,使用惰性氣體烘箱於氮氣環境下於400℃加熱30分鐘(固化步驟),製作依次具有玻璃基板、矽酮樹脂層、及聚醯亞胺層(厚度:7 μm)之積層樣品。 (氮化矽層之形成) 其次,使用電漿CVD(Chemical Vapor Deposition,化學氣相沈積)裝置,於積層樣品之聚醯亞胺層之整個表面製作厚度100 nm之氮化矽層。 (Formation of polyimide layer) The PET film of the laminate of Examples 5 and 6 including the glass substrate, silicone resin layer, and PET film was peeled off, and heated at 250° C. for 30 minutes in an atmospheric environment using a clean oven. Next, after corona treatment was performed on the silicone resin layer, a colorless polyimide varnish ("Neopulim H230" manufactured by Mitsubishi Gas Chemical Co., Ltd.) was applied and then heated at 80° C. for 20 minutes using a hot plate. Then, an inert gas oven was used to heat at 400°C for 30 minutes in a nitrogen atmosphere (curing step) to prepare a laminated sample having a glass substrate, a silicone resin layer, and a polyimide layer (thickness: 7 μm) in sequence. (Formation of silicon nitride layer) Secondly, a plasma CVD (Chemical Vapor Deposition) device was used to form a silicon nitride layer with a thickness of 100 nm on the entire surface of the polyimide layer of the laminated sample.

<耐熱評估> 對基於例5及例6之積層樣品,於氮氣環境下,於420℃加熱1小時,實施耐熱試驗。利用目視確認耐熱試驗後之積層樣品之外觀,評估於聚醯亞胺層中,是否於較連接距玻璃基板之1個角部之頂點最接近之積層樹脂層的位置P1、及距與玻璃基板之1個角部鄰接之角部之頂點最接近之積層樹脂層的位置P2之直線更靠玻璃基板之邊側產生裂縫。 A:產生裂縫 B:未產生裂縫 再者,耐熱評估僅於例1~13中例5及例6進行評估。因此,關於其餘之例1~4及例7~13,於表1之「耐熱評估」之欄記為「-」。 <Heat resistance evaluation> The laminated samples based on Examples 5 and 6 were subjected to a heat resistance test by heating at 420°C for 1 hour in a nitrogen environment. The appearance of the laminated samples after the heat resistance test was visually confirmed to evaluate whether cracks were generated in the polyimide layer closer to the edge of the glass substrate than the straight line connecting the position P1 of the laminated resin layer closest to the vertex of one corner of the glass substrate and the position P2 of the laminated resin layer closest to the vertex of the corner adjacent to one corner of the glass substrate. A: Cracks were generated B: No cracks were generated In addition, the heat resistance evaluation was performed only on Examples 5 and 6 among Examples 1 to 13. Therefore, for the remaining examples 1 to 4 and examples 7 to 13, the "Heat Resistance Evaluation" column in Table 1 is marked as "-".

[表1]    玻璃基板之尺寸(mm) 積層樹脂層之切斷方式 積層樹脂層之尺寸(mm) 角R (mm) 相對於玻璃基板之積層樹脂層之數量 距離X (mm) 距離Y (mm) 積層樹脂層間之距離 (mm) 翹曲之評估 基板有效面積率 耐熱評估 翹曲量(mm) 剝離性 例1 400×320 切割器方式 400×320 - 1 0.0 0.0 - 0.21 B A - 例2 920×730 切割器方式 920×730 - 1 0.0 0.0 - 0.21 B A - 例3 920×730 衝壓方式 920×730 4.8 1 2.0 0.0 - 0.2 B A - 例4 920×730 切割器方式 918×728 - 1 1.4 1.0 - 0.2 B A - 例5 920×730 衝壓方式 918×728 6.2 1 4.0 1.0 - 0.17 A A A 例6 920×730 切割器方式 914.4×724.4 - 1 4.0 2.8 - 0.16 A A B 例7 400×320 衝壓方式 398×318 6.2 1 4.0 1.0 - 0.16 A A - 例8 920×730 切割器方式 912×722 - 1 5.6 4.0 - 0.13 A A - 例9 920×730 衝壓方式 910×720 0.1 1 7.1 5.0 - 0.1 A A - 例10 920×730 切割器方式 890×700 - 1 21.0 15.0 - 0.07 A A - 例11 920×730 切割器方式 880×690 - 1 28.0 20.0 - 0.06 A B - 例12 920×730 衝壓方式 910×724 0.1 1 5.1 1.0 - 0.1 A A - 例13 920×730 衝壓方式 458×728 6.2 2 4.0 1.0 2 0.15 A A - [Table 1] Size of glass substrate (mm) How to cut the laminated resin layer Dimensions of laminated resin layer (mm) Angle R (mm) The number of laminated resin layers relative to the glass substrate DistanceX (mm) Distance Y (mm) Distance between laminated resin layers (mm) Warpage assessment Effective area ratio of substrate Heat resistance evaluation Warpage(mm) Peelability example 1 400×320 Cutter method 400×320 - 1 0.0 0.0 - 0.21 B A - Example 2 920×730 Cutter method 920×730 - 1 0.0 0.0 - 0.21 B A - Example 3 920×730 Stamping method 920×730 4.8 1 2.0 0.0 - 0.2 B A - Example 4 920×730 Cutter method 918×728 - 1 1.4 1.0 - 0.2 B A - Example 5 920×730 Stamping method 918×728 6.2 1 4.0 1.0 - 0.17 A A A Example 6 920×730 Cutter method 914.4×724.4 - 1 4.0 2.8 - 0.16 A A B Example 7 400×320 Stamping method 398×318 6.2 1 4.0 1.0 - 0.16 A A - Example 8 920×730 Cutter method 912×722 - 1 5.6 4.0 - 0.13 A A - Example 9 920×730 Stamping method 910×720 0.1 1 7.1 5.0 - 0.1 A A - Example 10 920×730 Cutter method 890×700 - 1 21.0 15.0 - 0.07 A A - Example 11 920×730 Cutter method 880×690 - 1 28.0 20.0 - 0.06 A B - Example 12 920×730 Stamping method 910×724 0.1 1 5.1 1.0 - 0.1 A A - Example 13 920×730 Stamping method 458×728 6.2 2 4.0 1.0 2 0.15 A A -

根據例1~4與例5~13之比較可知,若自玻璃基板之角部之頂點至處於最接近之位置之積層樹脂層為止的距離X為4 mm以上,則不易產生剝離後缺陷。 根據例1~10及例12~13及例11之比較可知,若自玻璃基板之角部之頂點至處於最接近之位置之積層樹脂層為止的距離X為21 mm以下,自玻璃基板之一邊上之點至處於最接近之位置之積層樹脂層為止的距離中最小之距離Y為15 mm以下,則有效面積提高。 根據例5與例6之比較可知,例5中由於在較連接距玻璃基板之1個角部之頂點最接近之積層樹脂層的位置P1、及距與玻璃基板之1個角部鄰接之角部之頂點最接近之積層樹脂層的位置P2之直線更靠玻璃基板之邊側存在積層樹脂層,故而不易產生裂縫。 Comparison of Examples 1 to 4 and Examples 5 to 13 shows that if the distance X from the apex of the corner of the glass substrate to the laminated resin layer at the closest position is 4 mm or more, post-peeling defects are less likely to occur. From the comparison of Examples 1 to 10, Examples 12 to 13 and Example 11, it can be seen that if the distance X from the vertex of the corner of the glass substrate to the laminated resin layer at the closest position is 21 mm or less, the distance If the minimum distance Y between the above point and the closest laminated resin layer is 15 mm or less, the effective area increases. Comparing Example 5 and Example 6, it can be seen that in Example 5, the position P1 of the laminated resin layer closest to the vertex of one corner of the glass substrate is connected to the position P1 of the laminated resin layer, and the position P1 of the laminated resin layer is located at the corner adjacent to one corner of the glass substrate. The straight line at the position P2 where the vertex of the portion is closest to the laminated resin layer is closer to the side of the glass substrate where the laminated resin layer exists, so cracks are less likely to occur.

參照特定之實施態樣對本發明詳細地進行了說明,但是業者知曉能夠不脫離本發明之精神與範圍施加各種修正或變更。本申請案係基於2022年8月23日提出申請之日本專利申請案2022-132515號者,其內容作為參照引用於此。The present invention has been described in detail with reference to specific embodiments, but it is understood that various modifications or changes can be made without departing from the spirit and scope of the present invention. This application is based on Japanese Patent Application No. 2022-132515 filed on August 23, 2022, the contents of which are incorporated herein by reference.

10:積層體 10a:積層體 10b:積層體 10c:積層體 12:玻璃基板 12a:表面 12b:長邊 12c:短邊 12d:角部 12e:頂點 13:周緣區域 14:積層樹脂層 14a:表面 14d:區域 15a:區域 15b:區域 16:中間樹脂層 18:剝離性樹脂層 19:槽 Dt:厚度 L 1:長度 L 2:長度 Lp:直線 P:點 P1:位置 P2:位置 X:距離 Y:距離 Z:寬度 10: laminate 10a: laminate 10b: laminate 10c: laminate 12: glass substrate 12a: surface 12b: long side 12c: short side 12d: corner 12e: vertex 13: peripheral area 14: laminate resin layer 14a: surface 14d: area 15a: area 15b: area 16: intermediate resin layer 18: release resin layer 19: groove Dt: thickness L1 : length L2 : length Lp: straight line P: point P1: position P2: position X: distance Y: distance Z: width

圖1係表示本發明之實施方式之積層體之第1例的模式性剖視圖。 圖2係表示本發明之實施方式之積層體之第1例的模式性俯視圖。 圖3係表示本發明之實施方式之積層體之第2例的模式性俯視圖。 圖4係表示本發明之實施方式之積層體之第3例的模式性俯視圖。 圖5係表示本發明之實施方式之積層體之第4例的模式性俯視圖。 FIG. 1 is a schematic cross-sectional view showing the first example of the laminated body of the embodiment of the present invention. FIG. 2 is a schematic top view showing the first example of the laminated body of the embodiment of the present invention. FIG. 3 is a schematic top view showing the second example of the laminated body of the embodiment of the present invention. FIG. 4 is a schematic top view showing the third example of the laminated body of the embodiment of the present invention. FIG. 5 is a schematic top view showing the fourth example of the laminated body of the embodiment of the present invention.

10:積層體 10: Laminated body

12:玻璃基板 12: Glass substrate

12a:表面 12a: Surface

12b:長邊 12b: Long side

12c:短邊 12c: Short side

12d:角部 12d: Corner

12e:頂點 12e: Vertex

13:周緣區域 13: Peripheral area

14:積層樹脂層 14:Laminated resin layer

14d:區域 14d:Area

L1:長度 L 1 : Length

L2:長度 L 2 : Length

Lp:直線 Lp: straight line

P:點 P:point

P1:位置 P1: Location

P2:位置 P2: Location

X:距離 X: distance

Y:距離 Y: distance

Claims (12)

一種積層體,其具有玻璃基板及配置於上述玻璃基板上之積層樹脂層, 上述積層樹脂層自上述玻璃基板側起具有中間樹脂層及剝離性樹脂層, 於上述玻璃基板之上述積層樹脂層側之表面,存在未配置上述積層樹脂層之周緣區域, 上述玻璃基板之長邊之長度為400 mm以上, 上述玻璃基板之短邊之長度為320 mm以上, 於上述玻璃基板之至少1個角部中,自上述角部之頂點至處於最接近之位置之上述積層樹脂層為止的距離X為4 mm以上。 A laminated body having a glass substrate and a laminated resin layer disposed on the glass substrate, the laminated resin layer having an intermediate resin layer and a releasable resin layer from the side of the glass substrate, a peripheral area where the laminated resin layer is not disposed exists on the surface of the glass substrate on the side of the laminated resin layer, the length of the long side of the glass substrate is 400 mm or more, the length of the short side of the glass substrate is 320 mm or more, in at least one corner of the glass substrate, the distance X from the vertex of the corner to the laminated resin layer at the closest position is 4 mm or more. 如請求項1之積層體,其中自上述玻璃基板之一邊上之點至處於最接近之位置之上述積層樹脂層為止的距離中最小之距離Y為1 mm以上。The laminated body of claim 1, wherein the smallest distance Y among the distances from a point on one side of the glass substrate to the laminated resin layer at the closest position is 1 mm or more. 如請求項1之積層體,其中上述距離X為21 mm以下。Such as the laminated body of claim 1, wherein the distance X is 21 mm or less. 如請求項2之積層體,其中上述距離Y為15 mm以下。Such as the laminated body of claim 2, wherein the distance Y is 15 mm or less. 如請求項1至4中任一項之積層體,其中設為距上述玻璃基板之1個角部之頂點最接近之上述積層樹脂層的位置P1、及距與上述玻璃基板之1個上述角部鄰接之角部之頂點最接近之上述積層樹脂層的位置P2,於較連接上述位置P1與上述P2之直線更靠上述玻璃基板之邊側存在上述積層樹脂層。The laminated body according to any one of claims 1 to 4, wherein the position P1 of the laminated resin layer closest to the apex of one corner of the glass substrate is the position P1 of the laminated resin layer, and the position P1 is the position P1 of the corner of the glass substrate. The position P2 where the apex of the adjacent corner portion is closest to the laminated resin layer is located closer to the side of the glass substrate than the straight line connecting the positions P1 and P2. 如請求項1至4中任一項之積層體,其中上述玻璃基板之4個各角部中之上述距離X中的至少一者不同。The laminated body according to any one of claims 1 to 4, wherein at least one of the distances X at the four corners of the glass substrate is different. 如請求項2之積層體,其中上述玻璃基板之4個各邊中之上述距離Y中之至少一者不同。The laminated body of claim 2, wherein at least one of the distances Y on each of the four sides of the glass substrate is different. 如請求項1至4中任一項之積層體,其中上述積層樹脂層被分割為複數個區域。A laminate as claimed in any one of claims 1 to 4, wherein the laminate resin layer is divided into a plurality of regions. 如請求項1至4中任一項之積層體,其中上述中間樹脂層由矽酮樹脂構成。A laminate as claimed in any one of claims 1 to 4, wherein the intermediate resin layer is composed of silicone resin. 如請求項1至4中任一項之積層體,其中上述剝離性樹脂層由聚對苯二甲酸乙二酯構成。The laminated body according to any one of claims 1 to 4, wherein the peelable resin layer is composed of polyethylene terephthalate. 如請求項1至4中任一項之積層體,其中上述玻璃基板之厚度為0.2~1 mm。The laminate of any one of claims 1 to 4, wherein the thickness of the glass substrate is 0.2 to 1 mm. 如請求項1至4中任一項之積層體,其中上述玻璃基板之楊氏模數為100 GPa以下。The laminate according to any one of claims 1 to 4, wherein the Young's modulus of the glass substrate is 100 GPa or less.
TW112127518A 2022-08-23 2023-07-24 Laminated body including a glass substrate and a laminated resin layer TW202409164A (en)

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