TW202132359A - Photosensitive resin composition, partition wall, organic electroluminescent element and image display device - Google Patents

Photosensitive resin composition, partition wall, organic electroluminescent element and image display device Download PDF

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TW202132359A
TW202132359A TW109144648A TW109144648A TW202132359A TW 202132359 A TW202132359 A TW 202132359A TW 109144648 A TW109144648 A TW 109144648A TW 109144648 A TW109144648 A TW 109144648A TW 202132359 A TW202132359 A TW 202132359A
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裴麗華
沢井良尚
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日商三菱化學股份有限公司
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00Processes of polymerisation
    • C08F2/46Polymerisation initiated by wave energy or particle radiation
    • C08F2/48Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
    • C08F2/50Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F290/00Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0045Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/029Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00Electroluminescent light sources
    • H05B33/12Light sources with substantially two-dimensional radiating surfaces
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00Electroluminescent light sources
    • H05B33/12Light sources with substantially two-dimensional radiating surfaces
    • H05B33/22Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of auxiliary dielectric or reflective layers

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Abstract

The present invention provides a photosensitive resin composition which is capable of achieving a good balance between level difference control and inkjet coatability. A photosensitive resin composition according to the present invention contains (A) a photopolymerization initiator, (B) an alkali-soluble resin, (C) a photopolymerizable compound and (D) a liquid repellent agent, and is characterized in that: the photopolymerization initiator (A) contains a photopolymerization initiator represented by general formula (I); and the liquid repellent agent (D) contains an acrylic resin (D1) that contains a fluorine atom and a repeating unit represented by general formula (II).

Description

感光性樹脂組合物、阻隔壁、有機電致發光元件、及圖像顯示裝置Photosensitive resin composition, barrier ribs, organic electroluminescence element, and image display device

本發明係關於一種感光性樹脂組合物、使感光性樹脂組合物硬化而成之阻隔壁、具備阻隔壁之有機電致發光元件、及包含有機電致發光元件之圖像顯示裝置。The present invention relates to a photosensitive resin composition, a barrier wall formed by curing the photosensitive resin composition, an organic electroluminescence element provided with the barrier rib, and an image display device including the organic electroluminescence element.

先前以來,有機電致顯示器等所包含之有機電致發光元件係於基板上形成阻隔壁(障壁)之後,於由阻隔壁包圍之區域內積層各種功能層而製造。作為此種容易地形成阻隔壁之方法,已知有使用感光性樹脂組合物之藉由光微影法來形成之方法。In the past, organic electroluminescent elements included in organic electroluminescent displays and the like are manufactured by laminating various functional layers in the area surrounded by the barrier ribs after forming barrier ribs (barrier ribs) on the substrate. As a method of easily forming such barrier ribs, a method of forming by photolithography using a photosensitive resin composition is known.

又,作為於由阻隔壁包圍之區域內積層各種功能層之方法,已知有如下方法:首先製備包含構成功能層之材料之墨水,繼而,將所製備之墨水注入至由阻隔壁包圍之區域內。該方法之中,就容易將特定量墨水準確地注入至特定部位之方面而言,多採用噴墨法。In addition, as a method of laminating various functional layers in an area surrounded by barrier walls, the following method is known: firstly, an ink containing the material constituting the functional layer is prepared, and then the prepared ink is injected into the area surrounded by the barrier wall Inside. Among these methods, the inkjet method is often used in terms of the ease of accurately injecting a specific amount of ink into a specific location.

進而,於使用墨水形成功能層之情形時,存在如下情況:為了預防墨水附著於阻隔壁、或防止注入至鄰接之區域間之墨水彼此混合等,要求對阻隔壁賦予撥墨性(撥液性)。Furthermore, in the case of using ink to form a functional layer, there are cases where it is required to impart ink repellency (liquid repellency) to the barrier wall in order to prevent the ink from adhering to the barrier wall, or to prevent the ink injected into adjacent areas from mixing with each other. ).

於藉由噴墨法形成有機發光層之情形時,難以控制有機發光層之膜厚。由於有機發光層之膜厚係與阻隔壁鄰接之端部厚於中心部地形成,故而存在如下問題:發光不均勻,發光效率減小,有機電致顯示器之壽命亦變短。為了解決該問題,專利文獻1中提出有如下方法:製作具有高度不同之第1阻隔壁及第2阻隔壁之阻隔壁作為劃分像素區域之阻隔壁(障壁),並於第2阻隔壁上線狀地塗佈有機發光層,藉此將配置於第2阻隔壁內之像素區域內之膜厚控制得均勻。又,作為該等第1阻隔壁及第2阻隔壁之形成方法,亦提出有應用透過率不同之光罩(半色調光罩)一次性形成高度不同之第1阻隔壁及第2阻隔壁的方法。When the organic light-emitting layer is formed by the inkjet method, it is difficult to control the film thickness of the organic light-emitting layer. Since the film thickness of the organic light-emitting layer is formed so that the end adjacent to the barrier wall is thicker than the central part, there are problems such as uneven light emission, reduced light-emitting efficiency, and shorter life span of the organic electroluminescent display. In order to solve this problem, Patent Document 1 proposes the following method: fabricating barrier ribs having first barrier ribs and second barrier ribs with different heights as barrier ribs (barriers) dividing pixel regions, and linearly on the second barrier ribs The organic light-emitting layer is coated on the ground, thereby controlling the film thickness of the pixel area arranged in the second barrier wall to be uniform. In addition, as a method of forming the first barrier wall and the second barrier wall, it is also proposed to use masks (halftone masks) with different transmittances to form first barrier walls and second barrier walls with different heights at once. method.

另一方面,於專利文獻2中記載:藉由使用包含特定鹼可溶性樹脂之感光性樹脂組合物能夠形成同時具有微細之線圖案及微小之接觸孔之阻隔壁,尤其是藉由使用特定光聚合起始劑能夠對阻隔壁賦予充分之撥墨性。又,於專利文獻3中記載:藉由使用包含特定聚合物及特定光聚合起始劑之感光性樹脂組合物,能夠形成所需彈性特性之間隔物。 [先前技術文獻] [專利文獻]On the other hand, Patent Document 2 describes that by using a photosensitive resin composition containing a specific alkali-soluble resin, it is possible to form barrier walls having both fine line patterns and minute contact holes, especially by using specific photopolymerization. The initiator can impart sufficient ink repellency to the barrier wall. In addition, Patent Document 3 describes that by using a photosensitive resin composition containing a specific polymer and a specific photopolymerization initiator, a spacer with desired elastic properties can be formed. [Prior Technical Literature] [Patent Literature]

[專利文獻1]國際公開第2009/147838號 [專利文獻2]國際公開第2013/069789號 [專利文獻3]日本專利特開2015-184411號公報[Patent Document 1] International Publication No. 2009/147838 [Patent Document 2] International Publication No. 2013/069789 [Patent Document 3] Japanese Patent Laid-Open No. 2015-184411

[發明所欲解決之問題][The problem to be solved by the invention]

於使用高度不同之阻隔壁並藉由噴墨法形成有機發光層之情形時,要求控制第1阻隔壁與第2阻隔壁之高度之差(階差)或噴墨塗佈性。 於專利文獻1中雖然記載有藉由控制第1阻隔壁及第2阻隔壁之撥液性能夠塗佈具有均勻之膜厚之有機發光層,但並無關於控制階差之具體方法之記載,關於階差與噴墨塗佈性之兼顧亦未記載。 又,本發明者等人進行研究之結果明瞭:於專利文獻2中記載之感光性樹脂組合物難以兼顧階差之控制與噴墨塗佈性。於專利文獻3中無任何關於撥液劑之記載,且於使用撥液劑之情形時會表現何種特性並不明瞭。When barrier ribs with different heights are used and the organic light-emitting layer is formed by an inkjet method, it is required to control the height difference (step difference) between the first barrier rib and the second barrier rib or the inkjet coatability. Although Patent Document 1 describes that by controlling the liquid repellency of the first barrier wall and the second barrier wall, an organic light-emitting layer having a uniform film thickness can be coated, but there is no description of a specific method for controlling the level difference. There is no description about the balance between the level difference and the inkjet coating property. In addition, as a result of studies conducted by the inventors of the present invention, it is clear that the photosensitive resin composition described in Patent Document 2 is difficult to balance the control of the step difference and the inkjet coatability. There is no description about the liquid repellent in Patent Document 3, and it is not clear what kind of characteristics it exhibits when the liquid repellent is used.

因此,本發明之目的在於提供一種能夠兼顧階差之控制與噴墨塗佈性之感光性樹脂組合物。 又,本發明提供一種使感光性樹脂組合物硬化而成之阻隔壁、具備阻隔壁之有機電致發光元件、包含有機電致發光元件之圖像顯示裝置。 [解決問題之技術手段]Therefore, the object of the present invention is to provide a photosensitive resin composition that can balance the control of the step difference and inkjet coating properties. In addition, the present invention provides a barrier rib formed by curing a photosensitive resin composition, an organic electroluminescence element provided with the barrier rib, and an image display device including the organic electroluminescence element. [Technical means to solve the problem]

本發明者等人進行了努力研究,結果發現藉由於含有光聚合起始劑、鹼可溶性樹脂、光聚合性化合物、及撥液劑之感光性樹脂組合物中組合使用特定光聚合起始劑及特定撥液劑能夠解決上述問題,從而完成本發明。 即,本發明之主旨如下。The inventors of the present invention conducted diligent studies, and found that a combination of a specific photopolymerization initiator and a photosensitive resin composition containing a photopolymerization initiator, an alkali-soluble resin, a photopolymerizable compound, and a liquid repellent The specific liquid repellent can solve the above-mentioned problems, thereby completing the present invention. That is, the gist of the present invention is as follows.

[1]一種感光性樹脂組合物,其特徵在於:其係含有(A)光聚合起始劑、(B)鹼可溶性樹脂、(C)光聚合性化合物、及(D)撥液劑者,且 上述(A)光聚合起始劑含有下述通式(I)所表示之光聚合起始劑, 上述(D)撥液劑含有包含下述通式(II)所表示之重複單元及氟原子之丙烯酸系樹脂(D1)。 [化1]

Figure 02_image003
(式(I)中,R1a 表示可具有取代基之烷基、或可具有取代基之芳香族環基; R2a 表示烷基; R3a 表示1價取代基; n表示0或1; h表示0~2之整數) [化2]
Figure 02_image005
(式(II)中,R11 分別獨立地表示氫原子或甲基,R12 表示可具有取代基之碳數2~6之烷基,可被-O-、-C(=O)-、-S-、-NH-之任一者以上中斷; *表示鍵結部) [2]如[1]中記載之感光性樹脂組合物,其中於上述式(I)中,R3a 為R4a -O-(其中,R4a 表示可具有取代基之烷基、或可具有取代基之芳香族環基),h為1。 [3]如[1]或[2]中記載之感光性樹脂組合物,其中上述通式(I)所表示之光聚合起始劑之含量相對於總光聚合起始劑為80~100質量%。 [4]如[1]至[3]中任一項記載之感光性樹脂組合物,其中(B)鹼可溶性樹脂相對於上述(C)光聚合性化合物100質量份之含量為200質量份以下。 [5]如[1]至[4]中任一項記載之感光性樹脂組合物,上述丙烯酸系樹脂(D1)具有氟烷基及/或氟伸烷基。 [6]如[1]至[5]中任一項記載之感光性樹脂組合物,其中上述(B)鹼可溶性樹脂包含具有下述通式(i)或(iii)所表示之部分結構之樹脂。 [化3]
Figure 02_image009
(式(i)中,Ra 表示氫原子或甲基,Rb 表示可具有取代基之2價烴基; 式(i)中之苯環可進而被任意取代基取代; *表示鍵結鍵) [化4]
Figure 02_image011
(式(iii)中,Re 表示氫原子或甲基,γ表示單鍵、-CO-、可具有取代基之伸烷基、或可具有取代基之2價環狀烴基;  式(iii)中之苯環可進而被任意取代基取代;  *表示鍵結鍵)  [7]如[1]至[6]中任一項記載之感光性樹脂組合物,其用於形成阻隔壁。 [8]如[7]中記載之感光性樹脂組合物,其用於藉由光微影法一次性形成具有階差之阻隔壁。 [9]一種阻隔壁,其係使如[1]至[8]中任一項記載之感光性樹脂組合物硬化而成。 [10]一種有機電致發光元件,其具備如[9]中記載之阻隔壁。 [11]一種圖像顯示裝置,其包含如[10]中記載之有機電致發光元件。 [發明之效果][1] A photosensitive resin composition characterized in that it contains (A) a photopolymerization initiator, (B) an alkali-soluble resin, (C) a photopolymerizable compound, and (D) a liquid repellent, And the above (A) photopolymerization initiator contains the photopolymerization initiator represented by the following general formula (I), and the above (D) liquid repellent contains the repeating unit represented by the following general formula (II) and fluorine Atomic acrylic resin (D1). [化1]
Figure 02_image003
(In formula (I), R 1a represents an optionally substituted alkyl group or an optionally substituted aromatic cyclic group; R 2a represents an alkyl group; R 3a represents a monovalent substituent; n represents 0 or 1; h Represents an integer from 0 to 2) [化2]
Figure 02_image005
(In formula (II), R 11 each independently represents a hydrogen atom or a methyl group, and R 12 represents an optionally substituted alkyl group having 2 to 6 carbon atoms, which may be substituted by -O-, -C(=O)-, Any one or more of -S- and -NH- is interrupted; * indicates a bonding portion) [2] The photosensitive resin composition as described in [1], wherein in the above formula (I), R 3a is R 4a -O- (wherein R 4a represents an optionally substituted alkyl group or an optionally substituted aromatic ring group), h is 1. [3] The photosensitive resin composition as described in [1] or [2], wherein the content of the photopolymerization initiator represented by the general formula (I) is 80-100 mass relative to the total photopolymerization initiator %. [4] The photosensitive resin composition according to any one of [1] to [3], wherein the content of (B) alkali-soluble resin relative to 100 parts by mass of the above-mentioned (C) photopolymerizable compound is 200 parts by mass or less . [5] The photosensitive resin composition according to any one of [1] to [4], wherein the acrylic resin (D1) has a fluoroalkyl group and/or a fluoroalkylene group. [6] The photosensitive resin composition according to any one of [1] to [5], wherein the above-mentioned (B) alkali-soluble resin comprises a partial structure represented by the following general formula (i) or (iii) Resin. [化3]
Figure 02_image009
(In formula (i), R a represents a hydrogen atom or a methyl group, and R b represents a divalent hydrocarbon group that may have a substituent; the benzene ring in formula (i) may be further substituted with any substituent; * represents a bonding bond) [化4]
Figure 02_image011
(In formula (iii), R e represents a hydrogen atom or a methyl group, and γ represents a single bond, -CO-, an alkylene group which may have a substituent, or a bivalent cyclic hydrocarbon group which may have a substituent; formula (iii) The benzene ring in may be further substituted with any substituent; * represents a bonding bond) [7] The photosensitive resin composition as described in any one of [1] to [6], which is used to form a barrier rib. [8] The photosensitive resin composition as described in [7], which is used to form barrier ribs having a step difference at one time by a photolithography method. [9] A barrier rib obtained by curing the photosensitive resin composition as described in any one of [1] to [8]. [10] An organic electroluminescence device including the barrier rib as described in [9]. [11] An image display device comprising the organic electroluminescence element as described in [10]. [Effects of Invention]

根據本發明,能夠提供一種能夠兼顧階差之控制與噴墨塗佈性之感光性樹脂組合物。According to the present invention, it is possible to provide a photosensitive resin composition capable of achieving both step control and inkjet coating properties.

以下,對本發明進行詳細地說明。以下之記載為本發明之實施形態之一例,只要不超過其主旨,則本發明並不特定於該等。 於本發明中,所謂「(甲基)丙烯酸」,意指「丙烯酸及/或甲基丙烯酸」。 於本發明中,所謂「總固形物成分」,意指感光性樹脂組合物中之除溶劑以外之所有成分。 於本發明中,使用「~」所表示之數值範圍意指包含「~」之前後所記載之數值作為下限值及上限值之範圍。 於本發明中,所謂「A及/或B」,意指A及B之一者或兩者,具體而言,意指A、B、或A及B。 於本發明中,所謂「(共)聚合物」,意指包含均聚物(homopolymer)及共聚物(copolymer)之兩者,又,所謂「多元酸(酐)」,意指「多元酸及/或多元酸酐」。 於本發明中,所謂重量平均分子量,意指藉由GPC(凝膠滲透層析法)而得之聚苯乙烯換算之重量平均分子量(Mw)。 於本發明中,所謂酸值,係表示有效固形物成分換算之酸值,係藉由中和滴定而算出。Hereinafter, the present invention will be described in detail. The following description is an example of the embodiment of the present invention, and as long as it does not exceed the gist, the present invention is not limited to these. In the present invention, "(meth)acrylic acid" means "acrylic acid and/or methacrylic acid". In the present invention, the "total solid content" means all the components in the photosensitive resin composition excluding the solvent. In the present invention, the numerical range represented by "~" means a range that includes the numerical values described before and after "~" as the lower limit and the upper limit. In the present invention, the so-called "A and/or B" means one or both of A and B, and specifically means A, B, or A and B. In the present invention, the so-called "(co)polymer" means both homopolymer and copolymer (copolymer), and the so-called "polyacid (anhydride)" means "polyacid and /Or polybasic acid anhydride". In the present invention, the weight average molecular weight means the weight average molecular weight (Mw) in terms of polystyrene obtained by GPC (Gel Permeation Chromatography). In the present invention, the so-called acid value means the acid value converted from effective solid content, which is calculated by neutralization titration.

於本發明中,所謂阻隔壁材,係指障壁材、壁材、牆材,同樣,所謂阻隔壁,係指障壁、壁、牆。 於本發明中,所謂發光部(像素部),係指於賦予電能之情形時會發出光之部分。In the present invention, the so-called barrier wall material refers to barrier wall material, wall material, and wall material. Similarly, the so-called barrier wall refers to barrier wall, wall, and wall. In the present invention, the so-called light-emitting portion (pixel portion) refers to a portion that emits light when electric energy is applied.

[1]感光性樹脂組合物 本發明之感光性樹脂組合物含有(A)光聚合起始劑、(B)鹼可溶性樹脂、(C)光聚合性化合物、及(D)撥液劑,且(A)光聚合起始劑含有下文所述之通式(I)所表示之光聚合起始劑,(D)撥液劑含有包含下文所述之通式(II)所表示之重複單元及氟原子之丙烯酸系樹脂(D1)。本發明之感光性樹脂組合物亦可視需要進而包含其他成分,例如亦可包含紫外線吸收劑、或聚合抑制劑。[1] Photosensitive resin composition The photosensitive resin composition of the present invention contains (A) a photopolymerization initiator, (B) an alkali-soluble resin, (C) a photopolymerizable compound, and (D) a liquid repellent, and (A) a photopolymerization initiator Contains the photopolymerization initiator represented by the general formula (I) described below, (D) the liquid repellent contains the acrylic resin (D1) containing the repeating unit represented by the general formula (II) described below and fluorine atoms ). The photosensitive resin composition of the present invention may further include other components as necessary, for example, an ultraviolet absorber or a polymerization inhibitor may also be included.

於本發明中,所謂阻隔壁,例如為主動矩陣型有機電致發光元件中之用以劃分功能層(有機層、發光部)者,例如為用於藉由使作為用以構成功能層之材料之墨水噴出至所劃分之區域(像素區域)並進行乾燥而形成包含功能層及阻隔壁之像素者。In the present invention, the so-called barrier ribs are, for example, those used to divide functional layers (organic layers, light-emitting parts) in active matrix organic electroluminescence devices, and for example, are used as materials for forming the functional layers by using The ink is ejected to the divided area (pixel area) and dried to form a pixel that includes a functional layer and barrier ribs.

[1-1]感光性樹脂組合物之成分及組成 針對構成本發明之感光性樹脂組合物之成分及其組成進行說明。 本發明之感光性樹脂組合物含有(A)光聚合起始劑、(B)鹼可溶性樹脂、(C)光聚合性化合物、及(D)撥液劑。[1-1] Components and composition of photosensitive resin composition The components and composition of the photosensitive resin composition of the present invention will be described. The photosensitive resin composition of the present invention contains (A) a photopolymerization initiator, (B) an alkali-soluble resin, (C) a photopolymerizable compound, and (D) a liquid repellent.

[1-1-1](A)成分:光聚合起始劑 本發明之感光性樹脂組合物含有(A)光聚合起始劑。光聚合起始劑係藉由活性光線使(C)光聚合性化合物所具有之乙烯性不飽和鍵進行聚合之化合物。[1-1-1] Component (A): photopolymerization initiator The photosensitive resin composition of the present invention contains (A) a photopolymerization initiator. The photopolymerization initiator is a compound that polymerizes the ethylenically unsaturated bond of the (C) photopolymerizable compound with active light.

本發明之感光性樹脂組合物中之(A)光聚合起始劑含有下述通式(I)所表示之光聚合起始劑(以下,有時稱為「光聚合起始劑(a1)」)。The (A) photopolymerization initiator in the photosensitive resin composition of the present invention contains a photopolymerization initiator represented by the following general formula (I) (hereinafter, sometimes referred to as "photopolymerization initiator (a1)" ").

[化5]

Figure 02_image013
[化5]
Figure 02_image013

(式(I)中,R1a 表示可具有取代基之烷基、或可具有取代基之芳香族環基; R2a 表示烷基; R3a 表示1價取代基; n表示0或1; h表示0~2之整數)(In formula (I), R 1a represents an optionally substituted alkyl group or an optionally substituted aromatic cyclic group; R 2a represents an alkyl group; R 3a represents a monovalent substituent; n represents 0 or 1; h Represents an integer from 0 to 2)

光聚合起始劑(a1)由於具有硫醚骨架,故而表面之硬化性適度且容易形成所需階差。因此認為,於與像素區域鄰接之第2阻隔壁上線狀地均勻地塗佈有機發光層變得容易。又,作為自由基產生部位之R2a 為烷基,所產生之自由基之遷移率較大,從而認為:於與第2阻隔壁鄰接之線狀之第1阻隔壁之側面亦能夠充分地保持撥液劑,能夠抑制塗佈時之墨水覆蓋於第1阻隔壁上。Since the photopolymerization initiator (a1) has a sulfide skeleton, the surface hardenability is moderate and the desired step is easily formed. Therefore, it is considered that it becomes easy to apply the organic light-emitting layer uniformly and linearly on the second barrier wall adjacent to the pixel region. In addition, R 2a , which is a radical generating site, is an alkyl group, and the mobility of the generated radicals is large. It is considered that the linear first barrier wall adjacent to the second barrier wall can be sufficiently maintained The liquid repellent can prevent the ink from covering the first barrier wall during application.

(R1a ) 上述式(I)中之R1a 中之烷基可為直鏈狀,可為支鏈狀,可為環狀,亦可為該等鍵結而成者。烷基之碳數並無特別限定,通常為1以上,又,較佳為20以下,更佳為10以下,進而較佳為6以下,進而更佳為2以下。例如較佳為1~20,更佳為1~10,進而較佳為1~6,尤佳為1~2。又,藉由設為上述上限值以下,存在內部硬化性變高之傾向。(R 1a ) The alkyl group in R 1a in the above formula (I) may be linear, branched, cyclic, or bonded. The carbon number of the alkyl group is not particularly limited, and is usually 1 or more, and is preferably 20 or less, more preferably 10 or less, still more preferably 6 or less, and still more preferably 2 or less. For example, it is preferably 1-20, more preferably 1-10, still more preferably 1-6, and particularly preferably 1-2. Moreover, by setting it as below the said upper limit, there exists a tendency for internal hardenability to become high.

作為烷基,例如可例舉:甲基、乙基、丙基、丁基、戊基、異戊基、己基、環戊基、環己基、環戊基甲基、環戊基乙基、環己基甲基、環己基乙基,該等中,就內部硬化性之觀點而言,較佳為甲基、己基、異戊基、環戊基甲基、環己基甲基,更佳為甲基。As the alkyl group, for example, methyl, ethyl, propyl, butyl, pentyl, isopentyl, hexyl, cyclopentyl, cyclohexyl, cyclopentylmethyl, cyclopentylethyl, cyclopentyl Hexylmethyl and cyclohexylethyl, among them, methyl, hexyl, isopentyl, cyclopentylmethyl, cyclohexylmethyl are preferred from the viewpoint of internal hardening, and methyl is more preferred .

作為烷基可具有之取代基,例如可例舉芳香族環基、羥基、羧基,就合成容易性之觀點而言,較佳為未經取代。Examples of the substituent that the alkyl group may have include an aromatic ring group, a hydroxyl group, and a carboxyl group. From the viewpoint of ease of synthesis, it is preferably unsubstituted.

作為上述式(I)中之R1a 中之芳香族環基,可例舉芳香族烴環基及芳香族雜環基。芳香族環基之碳數並無特別限定,較佳為4以上,更佳為5以上,又,較佳為30以下,更佳為20以下,進而較佳為12以下。上述上限及下限可任意地組合,例如較佳為4~30,更佳為5~20,進而較佳為5~12。藉由設為上述下限值以上,存在於溶劑中之溶解性變得良好之傾向。又,藉由設為上述上限值以下,存在內部硬化性變高之傾向。 Examples of the aromatic ring group in R 1a in the above formula (I) include an aromatic hydrocarbon ring group and an aromatic heterocyclic group. The carbon number of the aromatic ring group is not particularly limited, but is preferably 4 or more, more preferably 5 or more, more preferably 30 or less, more preferably 20 or less, and still more preferably 12 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 4-30 are preferable, 5-20 are more preferable, and 5-12 are still more preferable. By setting it as the above-mentioned lower limit or more, the solubility in a solvent tends to become favorable. Moreover, by setting it as below the said upper limit, there exists a tendency for internal hardenability to become high.

作為芳香族環基,例如可例舉苯基、萘基、吡啶基、呋喃基,該等中,就顯影性之觀點而言,較佳為苯基、萘基,更佳為苯基。 作為芳香族環基可具有之取代基,例如可例舉羥基、烷基,就顯影性之觀點而言,較佳為烷基。 該等中,就內部硬化性之觀點而言,較佳為R1a 為可具有取代基之烷基。The aromatic ring group may, for example, be a phenyl group, a naphthyl group, a pyridyl group, and a furyl group. Among them, from the viewpoint of developability, a phenyl group and a naphthyl group are preferable, and a phenyl group is more preferable. Examples of the substituent that the aromatic ring group may have include a hydroxyl group and an alkyl group, and from the viewpoint of developability, an alkyl group is preferred. Among these, from the viewpoint of internal curability, it is preferable that R 1a is an alkyl group which may have a substituent.

(R2a ) 上述式(I)中之R2a 中之烷基可為直鏈狀,可為支鏈狀,可為環狀,亦可為該等鍵結而成者。烷基之碳數並無特別限定,通常為1以上,又,較佳為5以下,更佳為3以下,進而較佳為2以下。例如較佳為1~5,更佳為1~3,進而較佳為1~2。藉由設為上述上限值以下,存在內部硬化性變高之傾向。(R 2a ) The alkyl group in R 2a in the above formula (I) may be linear, branched, cyclic, or bonded. The carbon number of the alkyl group is not particularly limited, but is usually 1 or more, and is preferably 5 or less, more preferably 3 or less, and still more preferably 2 or less. For example, it is preferably 1 to 5, more preferably 1 to 3, and still more preferably 1 to 2. By setting it as the upper limit or less mentioned above, there exists a tendency for internal hardenability to become high.

作為烷基,例如可例舉甲基、乙基、丙基、戊基,該等中,就內部硬化性之觀點而言,較佳為甲基。As the alkyl group, for example, a methyl group, an ethyl group, a propyl group, and a pentyl group may be mentioned. Among them, a methyl group is preferred from the viewpoint of internal hardenability.

(R3a ) 上述式(I)中之R3a 中之1價取代基並無特別限定,就顯影性之觀點而言,較佳為R4a -O-、R4a -(C=O)-。(R 3a ) The monovalent substituent in R 3a in the above formula (I) is not particularly limited, but from the viewpoint of developability, R 4a -O-, R 4a -(C=O)- .

作為R4a ,可例舉:可具有取代基之烷基、可具有取代基之芳香族環基。 R4a 之烷基可為直鏈狀,可為支鏈狀,可為環狀,亦可為該等鍵結而成者。烷基之碳數並無特別限定,通常為1以上,較佳為2以上,又,較佳為8以下,更佳為5以下,進而較佳為3以下。上述上限及下限可任意地組合,例如較佳為1~8,更佳為1~5,進而較佳為1~3,尤佳為2~3。藉由設為上述下限值以上,存在合成變得容易之傾向。又,藉由設為上述上限值以下,存在顯影性變得良好之傾向。Examples of R 4a include an optionally substituted alkyl group and an optionally substituted aromatic ring group. The alkyl group of R 4a may be linear, branched, cyclic, or bonded. The carbon number of the alkyl group is not particularly limited, and is usually 1 or more, preferably 2 or more, and preferably 8 or less, more preferably 5 or less, and still more preferably 3 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 1-8 are preferred, 1-5 are more preferred, 1-3 are more preferred, and 2-3 are particularly preferred. By setting it as the above-mentioned lower limit or more, there exists a tendency for synthesis to become easy. Moreover, by setting it as the said upper limit or less, developability tends to become favorable.

作為烷基,例如可例舉甲基、乙基、丙基、戊基,該等中,就顯影性之觀點而言,較佳為甲基、乙基,更佳為乙基。 作為烷基可具有之取代基,例如可例舉羥基、羧基,就顯影性之觀點而言,較佳為羥基。The alkyl group may, for example, be a methyl group, an ethyl group, a propyl group, or a pentyl group. Among these, from the viewpoint of developability, a methyl group and an ethyl group are preferable, and an ethyl group is more preferable. Examples of the substituent that the alkyl group may have include a hydroxyl group and a carboxyl group, and from the viewpoint of developability, a hydroxyl group is preferred.

作為R4a 之芳香族環基,可例舉芳香族烴環基及芳香族雜環基。芳香族環基之碳數並無特別限定,通常為4以上,較佳為5以上,又,較佳為30以下,更佳為20以下,進而較佳為12以下。上述上限及下限可任意地組合,例如較佳為4~30,更佳為5~20,進而較佳為5~12。藉由設為上述下限值以上,存在合成變得容易之傾向。又,藉由設為上述上限值以下,存在顯影性變得良好之傾向。 作為芳香族環基,例如可例舉:苯基、萘基、噻吩基、呋喃基、苯并噻吩基、苯并呋喃基。該等中,就感度之觀點而言,較佳為苯并噻吩基、苯并呋喃基,更佳為苯并呋喃基。 作為芳香族環基可具有之取代基,例如可例舉烷基、羥基、羧基,就合成性之觀點而言,較佳為未經取代。The aromatic ring group of R 4a may, for example, be an aromatic hydrocarbon ring group and an aromatic heterocyclic group. The number of carbon atoms of the aromatic ring group is not particularly limited, but is usually 4 or more, preferably 5 or more, more preferably 30 or less, more preferably 20 or less, and still more preferably 12 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 4-30 are preferable, 5-20 are more preferable, and 5-12 are still more preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for synthesis to become easy. Moreover, by setting it as the said upper limit or less, developability tends to become favorable. As an aromatic ring group, a phenyl group, a naphthyl group, a thienyl group, a furyl group, a benzothienyl group, and a benzofuryl group are mentioned, for example. Among them, from the viewpoint of sensitivity, benzothienyl and benzofuranyl are preferred, and benzofuranyl is more preferred. As the substituent which the aromatic ring group may have, for example, an alkyl group, a hydroxyl group, and a carboxyl group may be mentioned, and from the viewpoint of synthesis properties, it is preferably unsubstituted.

作為上述式(I)中之R3a 之1價取代基,就適度之內部硬化性之觀點而言,較佳為R4a 為經羥基取代之乙基之R4a -O-、R4a 為苯并呋喃基之R4a -(C=O)-,更佳為R4a 為經羥基取代之乙基之R4a -O-。 As the monovalent substituent of R 3a in the above formula (I), from the viewpoint of moderate internal hardenability, R 4a in which R 4a is an ethyl group substituted with a hydroxyl group and R 4a -O- and R 4a are preferably benzene benzofuranyl of R 4a - (C = O) -, more preferably R 4a is hydroxy substituted ethyl of the R 4a -O-.

(n) 於上述式(I)中,n表示0或1。就適度之內部硬化性之觀點而言,較佳為n為1。就合成容易性之觀點而言,較佳為n為0。(n) In the above formula (I), n represents 0 or 1. From the viewpoint of moderate internal hardenability, n is 1 preferably. From the viewpoint of ease of synthesis, n is preferably zero.

(h) 於上述式(I)中,h表示0~2之整數。就顯影性之觀點而言,較佳為h為0或1,更佳為1。 於h為1以上之整數之情形時,R3a 之取代位置並無特別限定,就合成方面之觀點而言,較佳為鄰位或對位,更佳為對位。(h) In the above formula (I), h represents an integer of 0-2. From the viewpoint of developability, h is preferably 0 or 1, more preferably 1. When h is an integer of 1 or more, the substitution position of R 3a is not particularly limited. From the viewpoint of synthesis, it is preferably an ortho position or a para position, and more preferably a para position.

作為光聚合起始劑(a1)之公知化合物之具體例,可例舉以下化合物。As specific examples of known compounds of the photopolymerization initiator (a1), the following compounds may be mentioned.

[化6]

Figure 02_image015
[化6]
Figure 02_image015

該等中,就適度之內部硬化性之觀點而言,較佳為式(a1-3)所表示之化合物。Among them, the compound represented by the formula (a1-3) is preferred from the viewpoint of moderate internal hardenability.

本發明之感光性樹脂組合物中之(A)光聚合起始劑亦可進而包含除光聚合起始劑(a1)以外之光聚合起始劑(以下,有時稱為「其他光聚合起始劑(a2)」)。 作為其他光聚合起始劑(a2),可使用該領域中通常所使用之光聚合起始劑。作為此種光聚合起始劑,例如可例舉:六芳基聯咪唑系光聚合起始劑、醯基氧化膦系光聚合起始劑、除光聚合起始劑(a1)以外之肟酯系光聚合起始劑、三𠯤系光聚合起始劑、苯乙酮系光聚合起始劑、二苯甲酮系光聚合起始劑。The (A) photopolymerization initiator in the photosensitive resin composition of the present invention may further include photopolymerization initiators other than the photopolymerization initiator (a1) (hereinafter, sometimes referred to as "other photopolymerization initiators"). Starter (a2)”). As the other photopolymerization initiator (a2), photopolymerization initiators generally used in this field can be used. As such a photopolymerization initiator, for example, a hexaarylbiimidazole-based photopolymerization initiator, an phosphine oxide-based photopolymerization initiator, and an oxime ester other than the photopolymerization initiator (a1) It is a photopolymerization initiator, a three-series photopolymerization initiator, an acetophenone-based photopolymerization initiator, and a benzophenone-based photopolymerization initiator.

作為六芳基聯咪唑系光聚合起始劑,就吸光度及感度、紫外線吸收劑與吸收波長之匹配性之觀點而言,較佳為下述通式(1-1)及/或下述通式(1-2)所表示之六芳基聯咪唑系化合物。As the hexaarylbiimidazole-based photopolymerization initiator, from the viewpoint of absorbance and sensitivity, and the compatibility of the ultraviolet absorber with the absorption wavelength, it is preferably the following general formula (1-1) and/or the following general formula (1-1) The hexaarylbiimidazole compound represented by the formula (1-2).

[化7]

Figure 02_image017
[化7]
Figure 02_image017

上述式中,R11 ~R13 表示碳數1~4之烷基、碳數1~4之烷氧基、或鹵素原子,m、n及l分別獨立地表示0~5之整數。In the above formula, R 11 to R 13 represent an alkyl group having 1 to 4 carbons, an alkoxy group having 1 to 4 carbons, or a halogen atom, and m, n, and l each independently represent an integer of 0 to 5.

R11 ~R13 之烷基之碳數只要為1~4,則並無特別限定,就感度之觀點而言,較佳為1~3,更佳為1~2。烷基可為鏈狀者,亦可為環狀者。作為烷基,例如可例舉甲基、乙基、丙基、異丙基,其中較佳為甲基、乙基。The carbon number of the alkyl group of R 11 to R 13 is not particularly limited as long as it is 1 to 4. From the viewpoint of sensitivity, it is preferably 1 to 3, and more preferably 1 to 2. The alkyl group may be chain-like or cyclic. As the alkyl group, for example, a methyl group, an ethyl group, a propyl group, and an isopropyl group may be mentioned, and among them, a methyl group and an ethyl group are preferable.

R11 ~R13 之烷氧基之碳數只要為1~4,則無特別限定,就感度之觀點而言,較佳為1~3,更佳為1~2。烷氧基之烷基部分可為鏈狀者,亦可為環狀者。作為烷氧基,例如可例舉甲氧基、乙氧基、丙氧基、異丙基氧基、丁氧基,其中較佳為甲氧基、乙氧基。The carbon number of the alkoxy group of R 11 to R 13 is not particularly limited as long as it is 1 to 4. From the viewpoint of sensitivity, it is preferably 1 to 3, and more preferably 1 to 2. The alkyl part of the alkoxy group may be chain-like or cyclic. As the alkoxy group, for example, a methoxy group, an ethoxy group, a propoxy group, an isopropyloxy group, and a butoxy group may be mentioned. Among them, a methoxy group and an ethoxy group are preferable.

又,作為R11 ~R13 之鹵素原子,例如可例舉氯原子、碘原子、溴原子、氟原子,其中就合成容易性之觀點而言,較佳為氯原子、氟原子,更佳為氯原子。 該等中,就感度或合成容易性之觀點而言,R11 ~R13 較佳為分別獨立地為鹵素原子,更佳為氯原子。Moreover, as the halogen atom of R 11 to R 13 , for example, a chlorine atom, an iodine atom, a bromine atom, and a fluorine atom can be exemplified. Among them, from the viewpoint of ease of synthesis, a chlorine atom and a fluorine atom are preferred, and more preferred are Chlorine atom. Among these, from the viewpoint of sensitivity and ease of synthesis, R 11 to R 13 are preferably each independently a halogen atom, and more preferably a chlorine atom.

m、n及l分別獨立地為0~5之整數,就合成容易性之觀點而言,較佳為m、n及l之至少一者為1以上之整數,更佳為m、n及l中任一者為1且其餘兩者為0。m, n, and l are each independently an integer of 0 to 5. From the viewpoint of ease of synthesis, at least one of m, n, and l is preferably an integer of 1 or more, more preferably m, n, and l Either one is 1 and the other two are 0.

作為通式(1-1)及/或通式(1-2)所表示之六芳基聯咪唑系化合物,例如可例舉:2,2'-雙(鄰氯苯基)-4,5,4',5'-四苯基聯咪唑、2,2'-雙(鄰甲基苯基)-4,5,4',5'-四苯基聯咪唑、2,2'-雙(鄰氯苯基)-4,4',5,5'-四(鄰,對二氯苯基)聯咪唑、2,2'-雙(鄰,對二氯苯基)-4,4',5,5'-四(鄰,對二氯苯基)聯咪唑、2,2'-雙(鄰氯苯基)-4,4',5,5'-四(對氟苯基)聯咪唑、2,2'-雙(鄰氯苯基)-4,4',5,5'-四(鄰,對二溴苯基)聯咪唑、2,2'-雙(鄰溴苯基)-4,4',5,5'-四(鄰,對二氯苯基)聯咪唑、2,2'-雙(鄰氯苯基)-4,4',5,5'-四(對氯萘基)聯咪唑。其中,較佳為六苯基聯咪唑化合物,更佳為與咪唑環上之2,2'-位鍵結之苯環之鄰位經甲基、甲氧基、或鹵素原子取代、與咪唑環上之4,4',5,5'-位鍵結之苯環未經取代、或者經鹵素原子或甲氧基取代。As the hexaarylbiimidazole compound represented by the general formula (1-1) and/or the general formula (1-2), for example, 2,2'-bis(o-chlorophenyl)-4,5 ,4',5'-tetraphenylbiimidazole, 2,2'-bis(o-methylphenyl)-4,5,4',5'-tetraphenylbiimidazole, 2,2'-bis( O-chlorophenyl)-4,4',5,5'-tetra(o,p-dichlorophenyl)biimidazole, 2,2'-bis(o,p-dichlorophenyl)-4,4', 5,5'-tetra(o,p-dichlorophenyl)biimidazole, 2,2'-bis(o-chlorophenyl)-4,4',5,5'-tetra(p-fluorophenyl)biimidazole , 2,2'-bis(o-chlorophenyl)-4,4',5,5'-tetra(o,p-dibromophenyl)biimidazole, 2,2'-bis(o-bromophenyl)- 4,4',5,5'-tetra(o,p-dichlorophenyl)biimidazole, 2,2'-bis(o-chlorophenyl)-4,4',5,5'-tetra(p-chloro Naphthyl) biimidazole. Among them, hexaphenylbiimidazole compounds are preferred, and the ortho position of the benzene ring bonded to the 2,2'-position on the imidazole ring is substituted with a methyl group, a methoxy group, or a halogen atom, and the imidazole ring The above 4,4',5,5'-bonded benzene ring is unsubstituted, or substituted with a halogen atom or a methoxy group.

作為其他光聚合起始劑(a2),可使用通式(1-1)所表示之六芳基聯咪唑系化合物與通式(1-2)所表示之六芳基聯咪唑系化合物之任一者,亦可將兩者併用。於併用之情形時,對其比率無特別限定。As the other photopolymerization initiator (a2), any of the hexaarylbiimidazole-based compound represented by the general formula (1-1) and the hexaarylbiimidazole-based compound represented by the general formula (1-2) can be used One or both can be used together. In the case of combined use, the ratio is not particularly limited.

作為醯基氧化膦系光聚合起始劑,例如可例舉:2,4,6-三甲基苯甲醯基二苯基氧化膦、雙(2,4,6-三甲基苯甲醯基)苯基氧化膦。As the phosphine oxide-based photopolymerization initiator, for example, 2,4,6-trimethylbenzyl diphenyl phosphine oxide, bis(2,4,6-trimethylbenzyl) Group) phenyl phosphine oxide.

作為除光聚合起始劑(a1)以外之肟酯系光聚合起始劑,例如可例舉:1,2-辛二酮-1-[4-(苯硫基)苯基]-2-(O-苯甲醯基肟)乙酮、1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-1-(O-乙醯基肟)、日本專利特表2004-534797號公報中記載之化合物、日本專利特開2000-80068號公報中記載之化合物、國際公開第2012/45736號中記載之化合物、日本專利特開2006-36750號公報中記載之化合物、日本專利特開2008-179611號公報中記載之化合物、國際公開第2009/131189號中記載之化合物、日本專利特表2012-526185號公報中記載之化合物、日本專利特表2012-519191號公報中記載之化合物、國際公開第2006/18973號中記載之化合物、國際公開第2008/78678號中記載之化合物。As the oxime ester-based photopolymerization initiator other than the photopolymerization initiator (a1), for example, 1,2-octanedione-1-[4-(phenylthio)phenyl]-2- (O-benzyl oxime) ethyl ketone, 1-[9-ethyl-6-(2-methylbenzyl)-9H-carbazol-3-yl)-1-(O-acetyl Oxime), the compound described in Japanese Patent Application Publication No. 2004-534797, the compound described in Japanese Patent Application Publication No. 2000-80068, the compound described in International Publication No. 2012/45736, Japanese Patent Application Publication No. 2006- The compound described in No. 36750, the compound described in Japanese Patent Laid-Open No. 2008-179611, the compound described in International Publication No. 2009/131189, the compound described in Japanese Patent Publication No. 2012-526185, and the Japanese Patent The compound described in JP 2012-519191, the compound described in International Publication No. 2006/18973, and the compound described in International Publication No. 2008/78678.

作為三𠯤系光聚合起始劑,例如可例舉:2,4,6-三(單氯甲基)-對稱三𠯤、2,4,6-三(二氯甲基)-對稱三𠯤、2,4,6-三(三氯甲基)-對稱三𠯤、2-甲基-4,6-雙(三氯甲基)-對稱三𠯤、2-正丙基-4,6-雙(三氯甲基)-對稱三𠯤、2-(α,α,β-三氯乙基)-4,6-雙(三氯甲基)-對稱三𠯤、2-苯基-4,6-雙(三氯甲基)-對稱三𠯤、2-(對甲氧基苯基)-4,6-雙(三氯甲基)-對稱三𠯤、2-(3,4-環氧苯基)-4,6-雙(三氯甲基)-對稱三𠯤、2-(對氯苯基)-4,6-雙(三氯甲基)-對稱三𠯤、2-[1-(對甲氧基苯基)-2,4-丁二烯基]-4,6-雙(三氯甲基)-對稱三𠯤、2-苯乙烯基-4,6-雙(三氯甲基)-對稱三𠯤、2-(對甲氧基苯乙烯基)-4,6-雙(三氯甲基)-對稱三𠯤、2-(對甲氧基-間羥基苯乙烯基)-4,6-雙(三氯甲基)-對稱三𠯤、2-(對異丙基氧基苯乙烯基)-4,6-雙(三氯甲基)-對稱三𠯤、2-(對甲苯基)-4,6-雙(三氯甲基)-對稱三𠯤、2-(對甲氧基萘基)-4,6-雙(三氯甲基)-對稱三𠯤、2-(對乙氧基萘基)-4,6-雙(三氯甲基)-對稱三𠯤、2-(對乙氧基羰基萘基)-4,6-雙(三氯甲基)-對稱三𠯤、2-苯硫基-4,6-雙(三氯甲基)-對稱三𠯤、2-苄硫基-4,6-雙(三氯甲基)-對稱三𠯤、2,4,6-三(二溴甲基)-對稱三𠯤、2,4,6-三(三溴甲基)-對稱三𠯤、2-甲基-4,6-雙(三溴甲基)-對稱三𠯤、2-甲氧基-4,6-雙(三溴甲基)-對稱三𠯤、2-(4-甲氧基苯基)-4,6-雙(三氯甲基)-對稱三𠯤等鹵甲基化對稱三𠯤衍生物類,其中就感度之觀點而言,較佳為雙(三鹵甲基)-對稱三𠯤類。As the tris-based photopolymerization initiator, for example, 2,4,6-tris(monochloromethyl)-symmetric tris, 2,4,6-tris(dichloromethyl)-symmetrical tris , 2,4,6-tris(trichloromethyl)-symmetrical tris, 2-methyl-4,6-bis(trichloromethyl)-symmetrical, 2-n-propyl-4,6- Bis(trichloromethyl)-symmetric tris, 2-(α,α,β-trichloroethyl)-4,6-bis(trichloromethyl)-symmetric tris, 2-phenyl-4, 6-Bis(trichloromethyl)-symmetric tris, 2-(p-methoxyphenyl)-4,6-bis(trichloromethyl)-symmetric tris, 2-(3,4-epoxy Phenyl)-4,6-bis(trichloromethyl)-symmetric tris, 2-(p-chlorophenyl)-4,6-bis(trichloromethyl)-symmetric tris, 2-(1- (P-Methoxyphenyl)-2,4-butadienyl)-4,6-bis(trichloromethyl)-symmetric tris, 2-styryl-4,6-bis(trichloromethyl) Group)-symmetric three 𠯤, 2-(p-methoxystyryl)-4,6-bis (trichloromethyl)-symmetric three 𠯤, 2-(p-methoxy-m-hydroxystyryl)- 4,6-Bis(trichloromethyl)-symmetric tris, 2-(p-isopropyloxystyryl)-4,6-bis(trichloromethyl)-symmetric tris, 2-(p Tolyl)-4,6-bis(trichloromethyl)-symmetric tris, 2-(p-methoxynaphthyl)-4,6-bis(trichloromethyl)-symmetric tris, 2-( P-ethoxynaphthyl)-4,6-bis(trichloromethyl)-symmetric tris, 2-(p-ethoxycarbonylnaphthyl)-4,6-bis(trichloromethyl)-symmetric tris 𠯤, 2-phenylthio-4,6-bis(trichloromethyl)-symmetric tris, 2-benzylthio-4,6-bis(trichloromethyl)-symmetric tris, 2,4, 6-Tris(Dibromomethyl)-Symmetric Tris, 2,4,6-Tris(Tribromomethyl)-Symmetric Tris, 2-Methyl-4,6-Bis(Tribromomethyl)-Symmetry Tris, 2-methoxy-4,6-bis(tribromomethyl)-symmetric tris, 2-(4-methoxyphenyl)-4,6-bis(trichloromethyl)-symmetry Among them, from the viewpoint of sensitivity, bis(trihalomethyl)-symmetric tris derivatives are preferred.

作為苯乙酮系光聚合起始劑,例如可例舉:2,2-二乙氧基苯乙酮、2,2-二甲氧基-2-苯基苯乙酮、1-羥基環己基苯基酮、1-羥基-1-(對十二烷基苯基)酮、1-羥基-1-甲基乙基-(對異丙基苯基)酮、1-三氯甲基-(對丁基苯基)酮、α-羥基-2-甲基苯基丙酮、2-甲基-1[4-(甲硫基)苯基]-2-嗎啉基丙烷-1-酮、2-苄基-2-二甲基胺基-1-(4-嗎啉基苯基)丁烷-1-酮、4-二甲基胺基乙基苯甲酸酯、4-二甲基胺基異戊基苯甲酸酯、4-二乙基胺基苯乙酮、4-二甲基胺基苯丙酮、2-乙基己基-1,4-二甲基胺基苯甲酸酯、2,5-雙(4-二乙基胺基亞苄基)環己酮、4-(二乙基胺基)查耳酮。 作為二苯甲酮系光聚合起始劑,例如可例舉:二苯甲酮、2-甲基二苯甲酮、3-甲基二苯甲酮、4-甲基二苯甲酮、2-羧基二苯甲酮、2-氯二苯甲酮、4-溴二苯甲酮、米其勒酮。As an acetophenone-based photopolymerization initiator, for example, 2,2-diethoxyacetophenone, 2,2-dimethoxy-2-phenylacetophenone, 1-hydroxycyclohexyl Phenyl ketone, 1-hydroxy-1-(p-dodecylphenyl) ketone, 1-hydroxy-1-methylethyl-(p-isopropylphenyl) ketone, 1-trichloromethyl-( P-Butylphenyl) ketone, α-hydroxy-2-methylphenylacetone, 2-methyl-1[4-(methylthio)phenyl]-2-morpholinopropan-1-one, 2 -Benzyl-2-dimethylamino-1-(4-morpholinylphenyl)butan-1-one, 4-dimethylaminoethyl benzoate, 4-dimethylamine 2-ethylhexyl-1,4-dimethylaminobenzoate, 4-diethylaminoacetophenone, 4-dimethylaminopropiophenone, 2-ethylhexyl-1,4-dimethylaminobenzoate, 2,5-bis(4-diethylaminobenzylidene)cyclohexanone, 4-(diethylamino)chalcone. As the benzophenone-based photopolymerization initiator, for example, benzophenone, 2-methylbenzophenone, 3-methylbenzophenone, 4-methylbenzophenone, 2 -Carboxybenzophenone, 2-chlorobenzophenone, 4-bromobenzophenone, Michele ketone.

本發明之感光性樹脂組合物中之(A)光聚合起始劑之含量並無特別限定,於感光性樹脂組合物之總固形物成分中,較佳為0.5質量%以上,更佳為1質量%以上,進而較佳為1.5質量%以上,尤佳為2質量%以上,又,較佳為10質量%以下,更佳為8質量%以下,進而較佳為6質量%以下,尤佳為4質量%以下。上述上限及下限可任意地組合,例如較佳為0.5~10質量%,更佳為1~8質量%,進而較佳為1.5~6質量%,尤佳為2~4質量%。藉由設為上述下限值以上,存在如下傾向:於顯影時不會產生膜減少,可形成塗膜,又,會產生充分之撥墨性。又,藉由設為上述上限值以下,存在容易形成所需圖案形狀之傾向。The content of the (A) photopolymerization initiator in the photosensitive resin composition of the present invention is not particularly limited. In the total solid content of the photosensitive resin composition, it is preferably 0.5% by mass or more, more preferably 1 % By mass or more, more preferably 1.5% by mass or more, more preferably 2% by mass or more, more preferably 10% by mass or less, more preferably 8% by mass or less, and still more preferably 6 mass% or less, particularly preferably It is 4% by mass or less. The above upper limit and lower limit can be combined arbitrarily, and for example, it is preferably 0.5-10% by mass, more preferably 1-8% by mass, still more preferably 1.5-6% by mass, and particularly preferably 2-4% by mass. By setting it to be more than the above lower limit value, there is a tendency that film reduction does not occur during development, a coating film can be formed, and sufficient ink repellency can be produced. Moreover, by setting it as the above upper limit or less, there exists a tendency for the desired pattern shape to be easily formed.

本發明之感光性樹脂組合物中之光聚合起始劑(a1)之含量亦無特別限定,於感光性樹脂組合物之總固形物成分中,較佳為0.5質量%以上,更佳為1質量%以上,進而較佳為1.5質量%以上,尤佳為2質量%以上,又,較佳為10質量%以下,更佳為8質量%以下,進而較佳為6質量%以下,尤佳為4質量%以下。上述上限及下限可任意地組合,例如較佳為0.5~10質量%,更佳為1~8質量%,進而較佳為1.5~6質量%,尤佳為2~4質量%。藉由設為上述下限值以上,存在容易抑制潰決且容易形成第2阻隔壁之傾向。又,藉由設為上述上限值以下,存在容易控制階差之傾向。The content of the photopolymerization initiator (a1) in the photosensitive resin composition of the present invention is also not particularly limited. In the total solid content of the photosensitive resin composition, it is preferably 0.5% by mass or more, more preferably 1 % By mass or more, more preferably 1.5% by mass or more, more preferably 2% by mass or more, more preferably 10% by mass or less, more preferably 8% by mass or less, and still more preferably 6 mass% or less, particularly preferably It is 4% by mass or less. The above upper limit and lower limit can be combined arbitrarily, and for example, it is preferably 0.5-10% by mass, more preferably 1-8% by mass, still more preferably 1.5-6% by mass, and particularly preferably 2-4% by mass. By setting it as the above-mentioned lower limit value or more, there exists a tendency which becomes easy to suppress a collapse, and to form a 2nd barrier wall. In addition, there is a tendency to easily control the level difference by setting it to the upper limit or less.

(A)光聚合起始劑中之光聚合起始劑(a1)之含量亦無特別限定,較佳為20質量%以上,更佳為40質量%以上,進而較佳為60質量%以上,進而更佳為70質量%以上,尤佳為80質量%以上,又,通常為100質量%以下。例如較佳為20~100質量%,更佳為40~100質量%,進而較佳為60~100質量%,進而更佳為70~100質量%,尤佳為80~100質量%。藉由設為上述下限值以上,存在容易抑制潰決且容易形成第2阻隔壁之傾向。(A) The content of the photopolymerization initiator (a1) in the photopolymerization initiator is also not particularly limited, but is preferably 20% by mass or more, more preferably 40% by mass or more, and still more preferably 60% by mass or more, Still more preferably 70% by mass or more, particularly preferably 80% by mass or more, and usually 100% by mass or less. For example, it is preferably from 20 to 100% by mass, more preferably from 40 to 100% by mass, still more preferably from 60 to 100% by mass, still more preferably from 70 to 100% by mass, and particularly preferably from 80 to 100% by mass. By setting it as the above-mentioned lower limit value or more, there exists a tendency which becomes easy to suppress a collapse, and to form a 2nd barrier wall.

作為感光性樹脂組合物中之(A)光聚合起始劑相對於(C)光聚合性化合物之調配比,相對於(C)光聚合性化合物100質量份,較佳為1質量份以上,更佳為2質量份以上,進而較佳為3質量份以上,又,較佳為200質量份以下,更佳為100質量份以下,進而較佳為50質量份以下,進而更佳為20質量份以下,尤佳為10質量份以下,最佳為8質量份以下。上述上限及下限可任意地組合,例如較佳為1~200質量份,更佳為1~100質量份,進而較佳為2~50質量份,進而更佳為2~20質量份,尤佳為3~10質量份,最佳為3~8質量份。藉由設為上述下限值以上,存在成為合適之感度之傾向。又,藉由設為上述上限值以下,存在容易形成所需圖案形狀之傾向。As a compounding ratio of the (A) photopolymerization initiator to (C) the photopolymerizable compound in the photosensitive resin composition, it is preferably 1 part by mass or more with respect to 100 parts by mass of the (C) photopolymerizable compound, More preferably 2 parts by mass or more, still more preferably 3 parts by mass or more, more preferably 200 parts by mass or less, more preferably 100 parts by mass or less, still more preferably 50 parts by mass or less, and even more preferably 20 parts by mass Parts or less, particularly preferably 10 parts by mass or less, most preferably 8 parts by mass or less. The above upper limit and lower limit can be combined arbitrarily, for example, preferably 1 to 200 parts by mass, more preferably 1 to 100 parts by mass, still more preferably 2 to 50 parts by mass, and still more preferably 2 to 20 parts by mass, particularly preferably It is 3-10 parts by mass, most preferably 3-8 parts by mass. By setting it as the above-mentioned lower limit value or more, there exists a tendency to become a suitable sensitivity. Moreover, by setting it as the above upper limit or less, there exists a tendency for the desired pattern shape to be easily formed.

亦可將增感劑與光聚合起始劑併用。藉由增感劑,感度會提昇,同時,於感光性樹脂組合物內部之透光率會減少,因此存在錐角變大之傾向。A sensitizer and a photopolymerization initiator can also be used in combination. With the sensitizer, the sensitivity is improved, and at the same time, the light transmittance inside the photosensitive resin composition is reduced, so there is a tendency for the taper angle to increase.

作為增感劑,可使用該領域中通常使用之增感劑。增感劑具有如下特徵:使吸收所得之能量轉移至光聚合起始劑、或者與光聚合起始劑發生電子轉移而高效率地促進自由基聚合反應。作為此種增感劑,例如可例舉:查耳酮衍生物或二亞苄丙酮等不飽和酮類;二苯乙二酮(Benzil)或樟腦醌等1,2-二酮系化合物;安息香系化合物、茀系化合物、萘醌系化合物、蒽醌系化合物、𠮿

Figure 109144648-A0304-12-01
系化合物、9-氧硫𠮿
Figure 109144648-A0304-12-01
系化合物、𠮿酮系化合物、9-氧硫𠮿
Figure 109144648-A0304-12-01
系化合物、香豆素系化合物、酮香豆素系化合物、花青系化合物、部花青系化合物、氧喏衍生物等聚次甲基色素、吖啶系化合物、𠯤系化合物、噻𠯤系化合物、㗁 𠯤系化合物、吲哚啉系化合物、薁系化合物、薁鎓系化合物、方酸鎓系化合物、卟啉系化合物、四苯基卟啉系化合物、三芳基甲烷系化合物、四苯并卟啉系化合物、四吡𠯤并四氮雜卟啉系化合物、酞菁系化合物、四氮雜卟啉系化合物、四喹㗁啉并四氮雜卟啉系化合物、萘酞菁系化合物、亞酞菁系化合物、吡喃鎓系化合物、噻喃鎓系化合物、新西蘭雞蛋果青苷系化合物、輪烯系化合物、螺哌喃系化合物、螺㗁 𠯤系化合物、硫代螺哌喃系化合物、金屬芳烴錯合物、有機釕錯合物、二苯甲酮系化合物。 該等可單獨使用1種,亦可將2種以上併用。As the sensitizer, sensitizers commonly used in this field can be used. The sensitizer has the characteristic of transferring energy obtained by absorption to the photopolymerization initiator or electron transfer with the photopolymerization initiator to efficiently promote the radical polymerization reaction. As such a sensitizer, for example, chalcone derivatives or unsaturated ketones such as dibenzylidene acetone; 1,2-diketone compounds such as Benzil or camphorquinone; Benzoin Series compounds, 茀 series compounds, naphthoquinone series compounds, anthraquinone series compounds, 𠮿
Figure 109144648-A0304-12-01
Series compounds, 9-oxysulfur 𠮿
Figure 109144648-A0304-12-01
Series compounds, ketone series compounds, 9-oxysulfur𠮿
Figure 109144648-A0304-12-01
Based compounds, coumarin-based compounds, keto-coumarin-based compounds, cyanine-based compounds, merocyanine-based compounds, oxo derivatives, and other polymethine pigments, acridine-based compounds, 𠯤-based compounds, thionin-based compounds Compounds, indoline-based compounds, indoline-based compounds, azulene-based compounds, azulenium-based compounds, squaraine-based compounds, porphyrin-based compounds, tetraphenylporphyrin-based compounds, triarylmethane-based compounds, tetrabenzo Porphyrin-based compounds, tetrapyrazine-tetraazaporphyrin-based compounds, phthalocyanine-based compounds, tetraazaporphyrin-based compounds, tetraquinophyrin-tetraazaporphyrin-based compounds, naphthalocyanine-based compounds, sub- Phthalocyanine-based compounds, pyrylium-based compounds, thiopyrylium-based compounds, New Zealand egg fructinoside-based compounds, anemone-based compounds, spiropyran-based compounds, spiropyran-based compounds, thiosiropiperane-based compounds, Metal arene complexes, organic ruthenium complexes, benzophenone compounds. These may be used individually by 1 type, and may use 2 or more types together.

該等中,就感度提昇及錐角增大之觀點而言,較佳為9-氧硫𠮿

Figure 109144648-A0304-12-01
系化合物、二苯甲酮系化合物。Among them, from the viewpoint of increased sensitivity and increased cone angle, 9-oxysulfur is preferred.
Figure 109144648-A0304-12-01
Series compounds, benzophenone series compounds.

作為9-氧硫𠮿

Figure 109144648-A0304-12-01
系化合物,例如可例舉:9-氧硫𠮿
Figure 109144648-A0304-12-01
、2-甲基9-氧硫𠮿
Figure 109144648-A0304-12-01
、4-甲基9-氧硫𠮿
Figure 109144648-A0304-12-01
、2,4-二甲基9-氧硫𠮿
Figure 109144648-A0304-12-01
、2-乙基9-氧硫𠮿
Figure 109144648-A0304-12-01
、4-乙基9-氧硫𠮿
Figure 109144648-A0304-12-01
、2,4-二乙基9-氧硫𠮿
Figure 109144648-A0304-12-01
、2-異丙基9-氧硫𠮿
Figure 109144648-A0304-12-01
、4-異丙基9-氧硫𠮿
Figure 109144648-A0304-12-01
、2,4-二異丙基9-氧硫𠮿
Figure 109144648-A0304-12-01
、2-氯9-氧硫𠮿
Figure 109144648-A0304-12-01
、4-氯9-氧硫𠮿
Figure 109144648-A0304-12-01
、2,4-二氯9-氧硫𠮿
Figure 109144648-A0304-12-01
。該等中,就感度提昇及錐角增大之觀點而言,較佳為2,4-二乙基9-氧硫𠮿
Figure 109144648-A0304-12-01
。As 9-oxysulfur 𠮿
Figure 109144648-A0304-12-01
Series compounds, for example: 9-oxysulfur 𠮿
Figure 109144648-A0304-12-01
, 2-Methyl 9-oxysulfur 𠮿
Figure 109144648-A0304-12-01
, 4-Methyl 9-oxysulfur 𠮿
Figure 109144648-A0304-12-01
, 2,4-Dimethyl 9-oxysulfur 𠮿
Figure 109144648-A0304-12-01
, 2-ethyl 9-oxysulfur 𠮿
Figure 109144648-A0304-12-01
, 4-ethyl 9-oxysulfur 𠮿
Figure 109144648-A0304-12-01
, 2,4-Diethyl 9-oxysulfur 𠮿
Figure 109144648-A0304-12-01
, 2-isopropyl 9-oxysulfur 𠮿
Figure 109144648-A0304-12-01
, 4-isopropyl 9-oxysulfur 𠮿
Figure 109144648-A0304-12-01
, 2,4-Diisopropyl 9-oxysulfur 𠮿
Figure 109144648-A0304-12-01
, 2-chloro-9-oxysulfur 𠮿
Figure 109144648-A0304-12-01
, 4-Chloro 9-oxysulfur 𠮿
Figure 109144648-A0304-12-01
, 2,4-Dichloro 9-oxysulfur 𠮿
Figure 109144648-A0304-12-01
. Among them, 2,4-diethyl 9-oxysulfur 𠮿 is preferred from the viewpoint of increased sensitivity and increased cone angle.
Figure 109144648-A0304-12-01
.

作為二苯甲酮系化合物,例如可例舉:二苯甲酮、4,4'-雙(二甲基胺基)二苯甲酮、4,4'-雙(二乙胺基)二苯甲酮、4,4'-雙(乙基甲基胺基)二苯甲酮。該等中,就感度提昇及錐角增大之觀點而言,較佳為4,4'-雙(二乙胺基)二苯甲酮。As the benzophenone compound, for example, benzophenone, 4,4'-bis(dimethylamino)benzophenone, 4,4'-bis(diethylamino)benzophenone Methyl ketone, 4,4'-bis(ethylmethylamino)benzophenone. Among them, 4,4'-bis(diethylamino)benzophenone is preferred from the viewpoint of sensitivity improvement and cone angle increase.

於感光性樹脂組合物包含增感劑之情形時,感光性樹脂組合物中之增感劑之含量於感光性樹脂組合物之總固形物成分中較佳為0.1質量%以上,更佳為0.3質量%以上,進而較佳為0.5質量%以上,進而更佳為0.8質量%以上,尤佳為1質量%以上,最佳為1.2質量%以上,又,較佳為10質量%以下,更佳為7質量%以下,進而較佳為5質量%以下,尤佳為3質量%以下。上述上限及下限可任意地組合,例如較佳為0.1~10質量%,更佳為0.3~10質量%,進而較佳為0.5~7質量%,進而更佳為0.8~7質量%,尤佳為1~5質量%,最佳為1.2~3質量%。藉由設為上述下限值以上,存在感度提昇,能夠提高錐角之傾向。又,藉由設為上述上限值以下,存在容易形成所需圖案之傾向。When the photosensitive resin composition contains a sensitizer, the content of the sensitizer in the photosensitive resin composition in the total solid content of the photosensitive resin composition is preferably 0.1% by mass or more, more preferably 0.3 Mass% or more, more preferably 0.5 mass% or more, still more preferably 0.8 mass% or more, particularly preferably 1 mass% or more, most preferably 1.2 mass% or more, and more preferably 10 mass% or less, more preferably It is 7% by mass or less, more preferably 5% by mass or less, and particularly preferably 3% by mass or less. The above upper limit and lower limit can be combined arbitrarily, for example, preferably 0.1-10% by mass, more preferably 0.3-10% by mass, still more preferably 0.5-7% by mass, still more preferably 0.8-7% by mass, particularly preferably It is 1 to 5% by mass, and most preferably 1.2 to 3% by mass. By setting it as the above lower limit value or more, there is a tendency for the sensitivity to be improved and the taper angle can be increased. In addition, by setting it below the above upper limit value, there is a tendency to easily form a desired pattern.

[1-1-2](B)成分:鹼可溶性樹脂 本發明之感光性樹脂組合物含有(B)鹼可溶性樹脂。作為鹼可溶性樹脂,只要利用鹼性顯影液能夠顯影之樹脂,則無特別限定。作為鹼可溶性樹脂,可例舉含有羧基及/或羥基之各種樹脂。其中,就可獲得適度錐角之阻隔壁、及可抑制後烘烤時阻隔壁表面之熱熔融引起撥液劑流出從而能夠保持撥墨性等觀點而言,較佳為具有羧基之樹脂。[1-1-2] (B) Component: Alkali-soluble resin The photosensitive resin composition of this invention contains (B) alkali-soluble resin. The alkali-soluble resin is not particularly limited as long as it can be developed with an alkaline developer. As the alkali-soluble resin, various resins containing a carboxyl group and/or a hydroxyl group may be mentioned. Among them, a resin having a carboxyl group is preferable from the viewpoints of obtaining a barrier wall with a moderate taper angle and suppressing the outflow of the liquid repellent caused by the thermal melting of the barrier wall surface during post-baking, thereby maintaining ink repellency.

[具有乙烯性雙鍵之鹼可溶性樹脂(b)] 於本發明之感光性樹脂組合物中,(B)鹼可溶性樹脂較佳為包含具有乙烯性雙鍵之鹼可溶性樹脂(b)(以下,有時簡記為「鹼可溶性樹脂(b)」)。藉由包含具有乙烯性雙鍵之鹼可溶性樹脂(b),感度會變高,會抑制顯影時之撥液劑流出,藉此存在所獲得之阻隔壁之撥墨性變高之傾向。[Alkali-soluble resin with ethylenic double bond (b)] In the photosensitive resin composition of the present invention, (B) the alkali-soluble resin preferably contains an alkali-soluble resin (b) having an ethylenic double bond (hereinafter, it may be abbreviated as "alkali-soluble resin (b)"). The inclusion of the alkali-soluble resin (b) having an ethylenic double bond increases the sensitivity and suppresses the outflow of the liquid repellent during development, thereby tending to increase the ink repellency of the obtained barrier wall.

具有乙烯性雙鍵之鹼可溶性樹脂(b)之具體結構並無特別限定,就顯影溶解性之觀點而言,較佳為環氧(甲基)丙烯酸酯樹脂(b1)及/或丙烯酸系共聚樹脂(b2),就釋氣減少之觀點而言,更佳為環氧(甲基)丙烯酸酯樹脂(b1)。 以下,針對環氧(甲基)丙烯酸酯樹脂(b1)進行詳細說明。The specific structure of the alkali-soluble resin (b) having an ethylenic double bond is not particularly limited. From the viewpoint of developing solubility, epoxy (meth)acrylate resin (b1) and/or acrylic copolymer are preferred. The resin (b2) is more preferably an epoxy (meth)acrylate resin (b1) from the viewpoint of reducing outgassing. Hereinafter, the epoxy (meth)acrylate resin (b1) will be described in detail.

[環氧(甲基)丙烯酸酯樹脂(b1)] 環氧(甲基)丙烯酸酯樹脂(b1)係對環氧樹脂加成具有乙烯性不飽和鍵(乙烯性雙鍵)之酸或酯化合物並進而加成多元酸或其酐而得之樹脂。例如可例舉藉由對環氧樹脂之環氧基開環加成具有乙烯性不飽和鍵之酸之羧基,經由酯鍵(-COO-)對環氧樹脂加成乙烯性不飽和鍵,並且對此時所產生之羥基加成多元酸酐之一羧基而得者。又,亦可例舉於加成多元酸酐時同時添加多元醇進行加成而得者。進而,環氧(甲基)丙烯酸酯樹脂(b1)亦包括使上述反應所獲得之樹脂與具有可與該樹脂之羧基進一步反應之官能基之化合物反應而獲得的樹脂。 因此,環氧(甲基)丙烯酸酯樹脂於化學結構上實質上不具有環氧基,且不限定於「(甲基)丙烯酸酯」,但由於環氧化合物(環氧樹脂)為原料,且「(甲基)丙烯酸酯」為代表例,故而依照慣用而如此命名。[Epoxy (meth)acrylate resin (b1)] The epoxy (meth)acrylate resin (b1) is a resin obtained by adding an acid or ester compound having an ethylenically unsaturated bond (ethylenic double bond) to an epoxy resin and further adding a polybasic acid or an anhydride thereof. For example, the carboxyl group of an acid having an ethylenically unsaturated bond is added to the epoxy group of the epoxy resin by ring-opening, and the ethylenic unsaturated bond is added to the epoxy resin through the ester bond (-COO-), and The hydroxyl group produced at this time is obtained by adding one of the carboxyl groups of polybasic acid anhydrides. Moreover, when adding a polybasic acid anhydride, a polyhydric alcohol is added simultaneously for addition. Furthermore, the epoxy (meth)acrylate resin (b1) also includes a resin obtained by reacting the resin obtained by the above reaction with a compound having a functional group capable of further reacting with the carboxyl group of the resin. Therefore, the epoxy (meth)acrylate resin does not substantially have an epoxy group in the chemical structure, and is not limited to "(meth)acrylate", but because the epoxy compound (epoxy resin) is a raw material, and "(Meth)acrylate" is a representative example, so it is named as usual.

此處,所謂環氧樹脂,係指亦包含藉由熱硬化形成樹脂以前之原料化合物,作為該環氧樹脂,可自公知之環氧樹脂之中適當選擇而使用。又,環氧樹脂可使用使酚性化合物與表鹵醇進行反應而獲得之化合物。作為酚性化合物,較佳為具有2價或者2價以上之酚性羥基之化合物,可為單體亦可為聚合物。 具體而言,例如可例舉:雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、苯酚酚醛清漆環氧樹脂、甲酚酚醛清漆環氧樹脂、聯苯酚醛清漆環氧樹脂、三苯酚環氧樹脂、苯酚與二環戊烷之聚合物之環氧化物、二氫烴氧基茀型環氧樹脂、二氫烴氧基伸烷基烴氧基茀型環氧樹脂、9,9-雙(4'-羥基苯基)茀之二縮水甘油醚化物、1,1-雙(4'-羥基苯基)金剛烷之二縮水甘油醚化物,可較佳地使用主鏈上具有芳香族環者。Here, the term “epoxy resin” refers to a raw material compound before forming a resin by thermosetting, and as the epoxy resin, it can be appropriately selected from among known epoxy resins and used. In addition, as the epoxy resin, a compound obtained by reacting a phenolic compound with epihalohydrin can be used. The phenolic compound is preferably a compound having a divalent or higher phenolic hydroxyl group, and it may be a monomer or a polymer. Specifically, for example, bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, phenol novolak epoxy resin, cresol novolak epoxy resin, biphenol Aldehyde epoxy resin, triphenol epoxy resin, epoxide of polymer of phenol and dicyclopentane, dihydroalkylene oxide type epoxy resin, dihydroalkylene alkylene oxide type ring Oxygen resin, 9,9-bis(4'-hydroxyphenyl) diglycidyl etherate, 1,1-bis(4'-hydroxyphenyl)adamantane diglycidyl etherate, preferably Use those with aromatic rings on the main chain.

其中,就硬化膜強度之觀點而言,較佳為雙酚A型環氧樹脂、苯酚酚醛清漆環氧樹脂、甲酚酚醛清漆環氧樹脂、苯酚與二環戊二烯之聚合物之環氧化物、9,9-雙(4'-羥基苯基)茀之環氧化物,進而較佳為雙酚A型環氧樹脂。Among them, from the viewpoint of the strength of the cured film, bisphenol A type epoxy resin, phenol novolac epoxy resin, cresol novolac epoxy resin, epoxy resin of a polymer of phenol and dicyclopentadiene are preferred. The epoxide of 9,9-bis(4'-hydroxyphenyl) sulfide, and more preferably bisphenol A type epoxy resin.

作為具有乙烯性不飽和鍵之酸,例如可例舉:(甲基)丙烯酸、丁烯酸、順丁烯二酸、反丁烯二酸、檸康酸、季戊四醇三(甲基)丙烯酸酯琥珀酸酐加成物、季戊四醇三(甲基)丙烯酸酯四氫鄰苯二甲酸酐加成物、二季戊四醇五(甲基)丙烯酸酯琥珀酸酐加成物、二季戊四醇五(甲基)丙烯酸酯鄰苯二甲酸酐加成物、二季戊四醇五(甲基)丙烯酸酯四氫鄰苯二甲酸酐加成物、(甲基)丙烯酸與ε-己內酯之反應產物。其中,就感度之觀點而言,較佳為(甲基)丙烯酸。Examples of the acid having an ethylenically unsaturated bond include (meth)acrylic acid, crotonic acid, maleic acid, fumaric acid, citraconic acid, pentaerythritol tri(meth)acrylate succinate Acid anhydride adduct, pentaerythritol tri(meth)acrylate tetrahydrophthalic anhydride adduct, dipentaerythritol penta(meth)acrylate succinic anhydride adduct, dipentaerythritol penta(meth)acrylate phthalate Dicarboxylic acid anhydride adduct, dipentaerythritol penta(meth)acrylate tetrahydrophthalic anhydride adduct, reaction product of (meth)acrylic acid and ε-caprolactone. Among them, from the viewpoint of sensitivity, (meth)acrylic acid is preferred.

作為多元酸(酐),例如可例舉:琥珀酸、順丁烯二酸、伊康酸、鄰苯二甲酸、四氫鄰苯二甲酸、3-甲基四氫鄰苯二甲酸、4-甲基四氫鄰苯二甲酸、3-乙基四氫鄰苯二甲酸、4-乙基四氫鄰苯二甲酸、六氫鄰苯二甲酸、3-甲基六氫鄰苯二甲酸、4-甲基六氫鄰苯二甲酸、3-乙基六氫鄰苯二甲酸、4-乙基六氫鄰苯二甲酸、偏苯三甲酸、均苯四甲酸、二苯甲酮四羧酸、聯苯基四羧酸、及該等之酐。該等可單獨使用1種,亦可將2種以上併用。該等中,就顯影後之像素部之殘渣減少之觀點而言,較佳為琥珀酸酐、順丁烯二酸酐、伊康酸酐,更佳為琥珀酸酐。As the polybasic acid (anhydride), for example, succinic acid, maleic acid, itaconic acid, phthalic acid, tetrahydrophthalic acid, 3-methyltetrahydrophthalic acid, 4- Methyltetrahydrophthalic acid, 3-ethyltetrahydrophthalic acid, 4-ethyltetrahydrophthalic acid, hexahydrophthalic acid, 3-methylhexahydrophthalic acid, 4 -Methylhexahydrophthalic acid, 3-ethylhexahydrophthalic acid, 4-ethylhexahydrophthalic acid, trimellitic acid, pyromellitic acid, benzophenone tetracarboxylic acid, Biphenyltetracarboxylic acid, and anhydrides of these. These may be used individually by 1 type, and may use 2 or more types together. Among them, from the viewpoint of reduction of residues in the pixel portion after development, succinic anhydride, maleic anhydride, and itaconic anhydride are preferred, and succinic anhydride is more preferred.

藉由使用多元醇,使環氧(甲基)丙烯酸酯樹脂(b1)之分子量增大,能夠於分子中導入分支,存在能夠取得分子量與黏度之平衡性之傾向。又,能夠提高酸基於分子中之導入率,存在容易取得感度或密接性等之平衡性之傾向。 作為多元醇,例如可例舉:三羥甲基丙烷、二-三羥甲基丙烷、季戊四醇、二季戊四醇、三羥甲基乙烷、1,2,3-丙烷三醇。該等可單獨使用1種,亦可將2種以上併用。By using polyols, the molecular weight of the epoxy (meth)acrylate resin (b1) is increased, branches can be introduced into the molecule, and there is a tendency that a balance between molecular weight and viscosity can be achieved. In addition, it is possible to increase the rate of introduction of the acid into the molecule, and there is a tendency to easily achieve a balance of sensitivity, adhesion, and the like. Examples of polyols include trimethylolpropane, ditrimethylolpropane, pentaerythritol, dipentaerythritol, trimethylolethane, and 1,2,3-propane triol. These may be used individually by 1 type, and may use 2 or more types together.

環氧(甲基)丙烯酸酯樹脂(b1)之酸值並無特別限定,較佳為10 mgKOH/g以上,更佳為20 mgKOH/g以上,進而較佳為40 mgKOH/g以上,進而更佳為60 mgKOH/g以上,又,較佳為200 mgKOH/g以下,更佳為180 mgKOH/g以下,進而較佳為150 mgKOH/g以下,進而更佳為120 mgKOH/g以下,尤佳為100 mgKOH/g以下。上述上限及下限可任意地組合,例如較佳為10~200 mgKOH/g,更佳為10~180 mgKOH/g,進而較佳為20~150 mgKOH/g,進而更佳為40~120 mgKOH/g,尤佳為60~100 mgKOH/g。藉由設為上述下限值以上,殘渣容易減少。又,藉由設為上述上限值以下,存在元件發光時之釋氣減少之傾向。The acid value of the epoxy (meth)acrylate resin (b1) is not particularly limited, but is preferably 10 mgKOH/g or more, more preferably 20 mgKOH/g or more, still more preferably 40 mgKOH/g or more, and still more It is preferably 60 mgKOH/g or more, more preferably 200 mgKOH/g or less, more preferably 180 mgKOH/g or less, still more preferably 150 mgKOH/g or less, and still more preferably 120 mgKOH/g or less, particularly preferably Less than 100 mgKOH/g. The above upper and lower limits can be combined arbitrarily, for example, preferably 10 to 200 mgKOH/g, more preferably 10 to 180 mgKOH/g, still more preferably 20 to 150 mgKOH/g, and even more preferably 40 to 120 mgKOH/g g, particularly preferably 60-100 mgKOH/g. By setting it as the above-mentioned lower limit or more, residue is easy to reduce. In addition, by setting it below the above upper limit value, outgassing when the device emits light tends to decrease.

環氧(甲基)丙烯酸酯樹脂(b1)之重量平均分子量(Mw)並無特別限定,較佳為1000以上,更佳為2000以上,進而較佳為3000以上,進而更佳為4000以上,尤其較佳為5000以上,尤佳為6000以上,最佳為7000以上,又,較佳為30000以下,更佳為20000以下,進而較佳為15000以下,尤佳為10000以下。上述上限及下限可任意地組合,較佳為1000~30000,更佳為2000~30000,進而較佳為3000~20000,進而更佳為4000~20000,尤其較佳為5000~15000,尤佳為6000~15000,最佳為7000~10000。藉由設為上述下限值以上,存在元件發光時之釋氣減少之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。The weight average molecular weight (Mw) of the epoxy (meth)acrylate resin (b1) is not particularly limited, but is preferably 1000 or more, more preferably 2000 or more, still more preferably 3000 or more, and still more preferably 4000 or more, It is particularly preferably 5,000 or more, particularly preferably 6,000 or more, most preferably 7,000 or more, more preferably 30,000 or less, more preferably 20,000 or less, still more preferably 15,000 or less, and particularly preferably 10,000 or less. The above upper limit and lower limit can be combined arbitrarily, preferably 1,000 to 30,000, more preferably 2,000 to 30,000, still more preferably 3,000 to 20,000, still more preferably 4,000 to 20,000, particularly preferably 5,000 to 15,000, particularly preferably 6000 to 15000, preferably 7000 to 10000. By setting it above the above lower limit value, outgassing when the device emits light tends to decrease. In addition, there is a tendency for residue to decrease by setting it below the above upper limit.

於(B)鹼可溶性樹脂包含環氧(甲基)丙烯酸酯樹脂(b1)之情形時,(B)鹼可溶性樹脂所包含之環氧(甲基)丙烯酸酯樹脂(b1)之含量並無特別限定,較佳為30質量%以上,更佳為50質量%以上,進而較佳為70質量%以上,進而更佳為80質量%以上,尤佳為90質量%以上,又,通常為100質量%以下。上述上限及下限可任意地組合。例如較佳為30~100質量%,更佳為50~100質量%,進而較佳為70~100質量%,進而更佳為80~100質量%,尤佳為90~100質量%。藉由設為上述下限值以上,存在釋氣減少之傾向。When (B) alkali-soluble resin contains epoxy (meth)acrylate resin (b1), the content of epoxy (meth)acrylate resin (b1) contained in (B) alkali-soluble resin is not particularly Limited, preferably 30% by mass or more, more preferably 50% by mass or more, still more preferably 70% by mass or more, still more preferably 80% by mass or more, particularly preferably 90% by mass or more, and usually 100% by mass %the following. The above upper limit and lower limit can be combined arbitrarily. For example, it is preferably from 30 to 100% by mass, more preferably from 50 to 100% by mass, still more preferably from 70 to 100% by mass, still more preferably from 80 to 100% by mass, and particularly preferably from 90 to 100% by mass. By setting it as above the above lower limit value, outgassing tends to decrease.

環氧(甲基)丙烯酸酯樹脂(b1)可藉由先前公知之方法而合成。具體而言,可使用如下方法:使上述環氧樹脂溶解於有機溶劑中,於觸媒與熱聚合抑制劑之共存下,加入上述具有乙烯性不飽和鍵之酸或酯化合物使其等進行加成反應,並進而加入多元酸或其酐使反應繼續。The epoxy (meth)acrylate resin (b1) can be synthesized by a previously known method. Specifically, the following method can be used: the above epoxy resin is dissolved in an organic solvent, in the coexistence of a catalyst and a thermal polymerization inhibitor, the above-mentioned acid or ester compound having an ethylenically unsaturated bond is added to add the above-mentioned acid or ester compound. Then, the polybasic acid or its anhydride is added to continue the reaction.

作為有機溶劑,例如可例舉:甲基乙基酮、環己酮、二乙二醇乙基醚乙酸酯、丙二醇單甲醚乙酸酯。作為觸媒,例如可例舉:三乙胺、二甲苄胺、三苄胺等三級胺類;氯化四甲基銨、氯化甲基三乙基銨、氯化四乙基銨、氯化四丁基銨、氯化三甲基苄基銨等四級銨鹽類;三苯基膦等磷化合物;三苯基銻等銻類。作為熱聚合抑制劑,例如可例舉:對苯二酚、對苯二酚單甲基醚、甲基對苯二酚。 該等可單獨使用1種,亦可將2種以上併用。Examples of the organic solvent include methyl ethyl ketone, cyclohexanone, diethylene glycol ethyl ether acetate, and propylene glycol monomethyl ether acetate. As the catalyst, for example, tertiary amines such as triethylamine, dimethylbenzylamine, and tribenzylamine; tetramethylammonium chloride, methyltriethylammonium chloride, tetraethylammonium chloride, Quaternary ammonium salts such as tetrabutylammonium chloride and trimethylbenzylammonium chloride; phosphorus compounds such as triphenylphosphine; antimony such as triphenyl antimony. Examples of the thermal polymerization inhibitor include hydroquinone, hydroquinone monomethyl ether, and methyl hydroquinone. These may be used individually by 1 type, and may use 2 or more types together.

關於具有乙烯性不飽和鍵之酸或酯化合物,可使用相對於環氧樹脂之環氧基之1化學當量較佳為成為0.7~1.3化學當量、更佳為成為0.9~1.1化學當量的量。加成反應時之溫度較佳為60~150℃,更佳為80~120℃。多元酸(酐)可使用相對於加成反應中所產生之羥基之1化學當量較佳為成為0.1~1.2化學當量、更佳為成為0.2~1.1化學當量的量。The acid or ester compound having an ethylenically unsaturated bond can be used in an amount that is preferably 0.7 to 1.3 stoichiometry, and more preferably 0.9 to 1.1 stoichiometry with respect to 1 stoichiometric weight of the epoxy group of the epoxy resin. The temperature during the addition reaction is preferably 60 to 150°C, more preferably 80 to 120°C. The polybasic acid (anhydride) can be used in an amount that is preferably 0.1 to 1.2 stoichiometry, more preferably 0.2 to 1.1 stoichiometry with respect to 1 stoichiometric weight of the hydroxyl group generated in the addition reaction.

關於環氧(甲基)丙烯酸酯樹脂(b1),就元件發光時之釋氣之觀點而言,較佳為含有選自由包含下述通式(i)所表示之部分結構之環氧(甲基)丙烯酸酯樹脂(b1-1)(以下,有時稱為「環氧(甲基)丙烯酸酯樹脂(b1-1)」)、包含下述通式(ii)所表示之部分結構之環氧(甲基)丙烯酸酯樹脂(b1-2)(以下,有時稱為「環氧(甲基)丙烯酸酯樹脂(b1-2)」)、及包含下述通式(iii)所表示之部分結構之環氧(甲基)丙烯酸酯樹脂(b1-3)(以下,有時稱為「環氧(甲基)丙烯酸酯樹脂(b1-3)」)所組成之群中之至少1種。Regarding the epoxy (meth)acrylate resin (b1), from the viewpoint of outgassing when the device emits light, it preferably contains an epoxy (former) selected from the group consisting of a partial structure represented by the following general formula (i) Base) acrylate resin (b1-1) (hereinafter sometimes referred to as "epoxy (meth)acrylate resin (b1-1)"), a ring containing a partial structure represented by the following general formula (ii) Oxygen (meth)acrylate resin (b1-2) (hereinafter, sometimes referred to as "epoxy (meth)acrylate resin (b1-2)"), and includes those represented by the following general formula (iii) Partially structured epoxy (meth)acrylate resin (b1-3) (hereinafter, sometimes referred to as "epoxy (meth)acrylate resin (b1-3)") at least one of the group consisting of .

關於環氧(甲基)丙烯酸酯樹脂(b1),該等中,就元件發光時之釋氣減少之觀點而言,較佳為含有包含下述通式(i)所表示之部分結構之環氧(甲基)丙烯酸酯樹脂(b1-1),更佳為包含下述通式(i)所表示之部分結構之環氧(甲基)丙烯酸酯樹脂(b1-1)。推測其原因之一在於:由於具有剛直之主骨架,故而受熱時不易分解等。Regarding the epoxy (meth)acrylate resin (b1), among these, from the viewpoint of reducing outgassing when the device emits light, it is preferable to contain a ring including a partial structure represented by the following general formula (i) The oxygen (meth)acrylate resin (b1-1) is more preferably an epoxy (meth)acrylate resin (b1-1) containing a partial structure represented by the following general formula (i). It is speculated that one of the reasons is: due to the rigid main skeleton, it is not easy to decompose when heated.

[化8]

Figure 02_image019
[化8]
Figure 02_image019

式(i)中,Ra 表示氫原子或甲基,Rb 表示可具有取代基之2價烴基。式(i)中之苯環可進而被任意取代基取代。*表示鍵結鍵。In the formula (i), R a represents a hydrogen atom or a methyl group, R b represents a divalent hydrocarbon group of substituents. The benzene ring in formula (i) may be further substituted with any substituent. * Indicates a bonding key.

(Rb ) 於上述式(i)中,Rb 表示可具有取代基之2價烴基。 作為2價烴基,可例舉:2價脂肪族基、2價芳香族環基、將1個以上2價脂肪族基與1個以上2價芳香族環基連結而成之基。(R b ) In the above formula (i), R b represents a divalent hydrocarbon group which may have a substituent. The divalent hydrocarbon group may, for example, be a divalent aliphatic group, a divalent aromatic ring group, and a group formed by linking one or more divalent aliphatic groups and one or more divalent aromatic ring groups.

2價脂肪族基可例舉直鏈狀、支鏈狀、環狀者。該等中,就顯影溶解性之觀點而言,較佳為直鏈狀者,另一方面,就減少顯影液對曝光部之滲透之觀點而言,較佳為環狀者。其碳數通常為1以上,較佳為3以上,更佳為6以上,又,較佳為20以下,更佳為15以下,進而較佳為10以下。上述上限及下限可任意地組合,例如較佳為1~20,更佳為3~15,進而較佳為6~10。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。The divalent aliphatic group may, for example, be linear, branched, or cyclic. Among them, from the standpoint of development solubility, the linear form is preferable, and on the other hand, the cyclic form is preferable from the standpoint of reducing the penetration of the developer into the exposed portion. The carbon number is usually 1 or more, preferably 3 or more, more preferably 6 or more, more preferably 20 or less, more preferably 15 or less, and still more preferably 10 or less. The above upper limit and lower limit can be combined arbitrarily, and for example, 1-20 are preferable, 3-15 are more preferable, and 6-10 are still more preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit.

作為2價直鏈狀脂肪族基,例如可例舉:亞甲基、伸乙基、正伸丙基、正伸丁基、正伸己基、正伸庚基。該等中,就殘渣減少之觀點而言,較佳為亞甲基。 作為2價支鏈狀脂肪族基,例如可例舉於上述2價直鏈狀脂肪族基上具有甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基作為側鏈之結構。 2價環狀之脂肪族基具有之環之數量並無特別限定,通常為1以上,較佳為2以上,又,較佳為10以下,更佳為5以下。上述上限及下限可任意地組合,例如較佳為1~10,更佳為1~5,進而較佳為2~5。藉由設為上述下限值以上,存在殘膜率提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。作為2價環狀之脂肪族基,例如可例舉自環己烷環、環庚烷環、環癸烷環、環十二烷環、降𦯉烷環、異冰片烷環、金剛烷環之環除去2個氫原子而成之基。該等中,就顯影密接性之觀點而言,較佳為自金剛烷環除去2個氫原子而成之基。Examples of the bivalent linear aliphatic group include methylene, ethylene, n-propyl, n-butyl, n-hexyl, and n-heptyl. Among these, the methylene group is more preferable from the viewpoint of residue reduction. As the bivalent branched aliphatic group, for example, the above-mentioned bivalent linear aliphatic group has a methyl group, an ethyl group, a n-propyl group, an isopropyl group, a n-butyl group, an isobutyl group, and a second group. Butyl and tertiary butyl are the side chain structures. The number of rings possessed by the bivalent cyclic aliphatic group is not particularly limited, and is usually 1 or more, preferably 2 or more, more preferably 10 or less, more preferably 5 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 1-10 are preferable, 1-5 are more preferable, and 2-5 are still more preferable. By setting it to the above lower limit or more, there is a tendency for the residual film rate to increase. In addition, there is a tendency for residue to decrease by setting it below the above upper limit. As the bivalent cyclic aliphatic group, for example, a cyclohexane ring, a cycloheptane ring, a cyclodecane ring, a cyclododecane ring, a nordane ring, an isobornane ring, and an adamantane ring can be exemplified. The ring is formed by removing two hydrogen atoms. Among these, from the viewpoint of development adhesiveness, a group obtained by removing two hydrogen atoms from an adamantane ring is preferred.

作為2價脂肪族基可具有之取代基,例如可例舉:甲氧基、乙氧基等碳數1~5之烷氧基;羥基;硝基;氰基;羧基,就合成容易性之觀點而言,較佳為未經取代。As the substituent that the divalent aliphatic group may have, for example, alkoxy groups having 1 to 5 carbon atoms such as methoxy and ethoxy groups; hydroxyl groups; nitro groups; cyano groups; carboxyl groups are easy to synthesize From a viewpoint, it is preferable to be unsubstituted.

作為2價芳香族環基,可例舉:2價芳香族烴環基及2價芳香族雜環基。其碳數通常為4以上,較佳為5以上,更佳為6以上,又,較佳為20以下,更佳為15以下,進而較佳為10以下。上述上限及下限可任意地組合,例如較佳為4~20,更佳為5~15,進而較佳為6~10。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。The divalent aromatic ring group may, for example, be a divalent aromatic hydrocarbon ring group and a divalent aromatic heterocyclic group. The carbon number is usually 4 or more, preferably 5 or more, more preferably 6 or more, more preferably 20 or less, more preferably 15 or less, and still more preferably 10 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 4-20 are preferable, 5-15 are more preferable, and 6-10 are still more preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit.

作為2價芳香族烴環基中之芳香族烴環,可為單環亦可為縮合環。作為2價芳香族烴環基,例如可例舉:具有2個自由原子價之苯環、萘環、蒽環、菲環、苝環、稠四苯環、芘環、苯并芘環、

Figure 109144648-A0304-12-02
環、聯三伸苯環、乙烷合萘環、螢蒽環、茀環。 作為2價芳香族雜環基中之芳香族雜環,可為單環亦可為縮合環。作為2價芳香族雜環基,例如可例舉:具有2個自由原子價之呋喃環、苯并呋喃環、噻吩環、苯并噻吩環、吡咯環、吡唑環、咪唑環、㗁二唑環、吲哚環、咔唑環、吡咯并咪唑環、吡咯并吡唑環、吡咯并吡咯環、噻吩并吡咯環、噻吩并噻吩環、呋喃并吡咯環、呋喃并呋喃環、噻吩并呋喃環、苯并異㗁唑環、苯并異噻唑環、苯并咪唑環、吡啶環、吡𠯤環、嗒𠯤環、嘧啶環、三𠯤環、喹啉環、異喹啉環、㖕啉環、喹㗁啉環、啡啶環、呸啶環、喹唑啉環、喹唑啉酮環、薁環。該等中,就光硬化性之觀點而言,較佳為具有2個自由原子價之苯環、萘環,更佳為具有2個自由原子價之苯環。The aromatic hydrocarbon ring in the divalent aromatic hydrocarbon ring group may be a monocyclic ring or a condensed ring. Examples of the divalent aromatic hydrocarbon ring group include: benzene ring, naphthalene ring, anthracene ring, phenanthrene ring, perylene ring, fused tetrabenzene ring, pyrene ring, benzopyrene ring,
Figure 109144648-A0304-12-02
Ring, bis-terphenylene ring, ethane naphthalene ring, fluoranthene ring, pyrene ring. The aromatic heterocyclic ring in the divalent aromatic heterocyclic group may be a monocyclic ring or a condensed ring. Examples of the divalent aromatic heterocyclic group include: furan ring, benzofuran ring, thiophene ring, benzothiophene ring, pyrrole ring, pyrazole ring, imidazole ring, and oxadiazole having 2 free valences. Ring, indole ring, carbazole ring, pyrroloimidazole ring, pyrrolopyrazole ring, pyrrolopyrrole ring, thienopyrrole ring, thienothiophene ring, furopyrrole ring, furofuran ring, thienofuran ring , Benzisothiazole ring, benzisothiazole ring, benzimidazole ring, pyridine ring, pyrimidine ring, pyridine ring, pyrimidine ring, tricyclic ring, quinoline ring, isoquinoline ring, oxoline ring, Quinoline ring, phenanthridine ring, pyridine ring, quinazoline ring, quinazolinone ring, azulene ring. Among these, from the viewpoint of photocurability, a benzene ring and a naphthalene ring having 2 free valences are preferred, and a benzene ring having 2 free valences is more preferred.

作為2價芳香族環基可具有之取代基,例如可例舉:羥基、甲基、甲氧基、乙基、乙氧基、丙基、丙氧基、縮水甘油醚基。該等中,就硬化性之觀點而言,較佳為未經取代。Examples of the substituent that the divalent aromatic ring group may have include a hydroxyl group, a methyl group, a methoxy group, an ethyl group, an ethoxy group, a propyl group, a propoxy group, and a glycidyl ether group. Among these, from the viewpoint of hardening properties, it is preferable to be unsubstituted.

作為將1個以上2價脂肪族基與1個以上2價芳香族環基連結而成之基,可例舉將1個以上之上述2價脂肪族基與1個以上之上述2價芳香族環基連結而成之基。 2價脂肪族基之數量並無特別限定,通常為1以上,較佳為2以上,又,較佳為10以下,更佳為5以下,進而較佳為3以下。上述上限及下限可任意地組合,例如較佳為1~10,更佳為1~5,進而較佳為2~3。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。 2價芳香族環基之數量並無特別限定,通常為1以上,較佳為2以上,又,較佳為10以下,更佳為5以下,進而較佳為3以下。上述上限及下限可任意地組合,例如較佳為1~10,更佳為1~5,進而較佳為2~3。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。As a group formed by linking one or more divalent aliphatic groups and one or more divalent aromatic ring groups, there can be mentioned one or more of the above-mentioned divalent aliphatic groups and one or more of the above-mentioned divalent aromatic groups. The base formed by the connection of the ring base. The number of divalent aliphatic groups is not particularly limited, and is usually 1 or more, preferably 2 or more, and more preferably 10 or less, more preferably 5 or less, and still more preferably 3 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 1-10 are preferable, 1-5 are more preferable, and 2-3 are still more preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit. The number of divalent aromatic ring groups is not particularly limited, but is usually 1 or more, preferably 2 or more, more preferably 10 or less, more preferably 5 or less, and still more preferably 3 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 1-10 are preferable, 1-5 are more preferable, and 2-3 are still more preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit.

作為將1個以上2價脂肪族基與1個以上2價芳香族環基連結而成之基,例如可例舉下述式(i-A)~(i-F)所表示之基。該等中,就骨架之剛性及膜之疏水化之觀點而言,較佳為下述式(i-A)所表示之基。化學式中之*表示鍵結鍵。As a group formed by linking one or more divalent aliphatic groups and one or more divalent aromatic ring groups, for example, groups represented by the following formulas (i-A) to (i-F) can be mentioned. Among these, the group represented by the following formula (i-A) is preferred from the viewpoint of the rigidity of the skeleton and the hydrophobization of the film. The * in the chemical formula represents a bonding bond.

[化9]

Figure 02_image021
[化9]
Figure 02_image021

如上所述,式(i)中之苯環可進而被任意取代基取代。作為式(i)中之苯環之取代基,例如可例舉:羥基、甲基、甲氧基、乙基、乙氧基、丙基、丙氧基。取代基之數量亦無特別限定,只要化學上容許,可為1個,亦可為2個以上。 就硬化性之觀點而言,較佳為未經取代。As mentioned above, the benzene ring in formula (i) may be further substituted with any substituent. As the substituent of the benzene ring in the formula (i), for example, a hydroxyl group, a methyl group, a methoxy group, an ethyl group, an ethoxy group, a propyl group, and a propoxy group may be mentioned. The number of substituents is also not particularly limited, as long as it is chemically permissible, it may be one or two or more. From the viewpoint of hardening properties, it is preferably unsubstituted.

上述式(i)所表示之部分結構就顯影溶解性之觀點而言,較佳為下述式(i-1)所表示之部分結構。The partial structure represented by the above formula (i) is preferably a partial structure represented by the following formula (i-1) from the viewpoint of development solubility.

[化10]

Figure 02_image023
[化10]
Figure 02_image023

式(i-1)中,Ra 及Rb 與上述式(i)之Ra 及Rb 同義。R1 表示可具有取代基之碳數1~4之2價烴基。*表示鍵結鍵。式(i-1)中之苯環可進而被任意取代基取代。Of formula (i-1), R a is and R b in the above formula (i) of R a and R b are synonymous. R 1 represents a divalent hydrocarbon group having 1 to 4 carbon atoms which may have a substituent. * Indicates a bonding key. The benzene ring in formula (i-1) may be further substituted with any substituent.

(R1 ) 於上述通式(i-1)中,R1 表示可具有取代基之碳數1~4之2價烴基。作為2價烴基,可例舉:伸烷基、伸烯基。(R 1 ) In the above general formula (i-1), R 1 represents an optionally substituted divalent hydrocarbon group with 1 to 4 carbon atoms. The divalent hydrocarbon group may, for example, be an alkylene group and an alkenylene group.

伸烷基可為直鏈亦可為支鏈,就顯影溶解性之觀點而言,較佳為直鏈。其碳數並無特別限定,通常為1以上,較佳為2以上,又,較佳為4以下,更佳為3以下。上述上限及下限可任意地組合,例如較佳為1~4,更佳為1~3,進而較佳為2~3。藉由設為上述下限值以上,存在殘膜率變高之傾向。又,藉由設為上述上限值以下,存在元件發光時之釋氣產生量變少之傾向。The alkylene group may be a straight chain or a branched chain, and from the viewpoint of development solubility, a straight chain is preferred. The carbon number is not particularly limited, and is usually 1 or more, preferably 2 or more, and more preferably 4 or less, more preferably 3 or less. The above upper limit and lower limit can be combined arbitrarily, and for example, 1 to 4 are preferred, 1 to 3 are more preferred, and 2 to 3 are still more preferred. By setting it as the above-mentioned lower limit or more, there exists a tendency for the residual film rate to become high. In addition, by setting it below the above upper limit value, there is a tendency that the amount of outgassing generated when the device emits light is reduced.

作為伸烷基之具體例,可例舉亞甲基、伸乙基、伸丙基、伸丁基,就釋氣減少之觀點而言,較佳為亞甲基或伸乙基,更佳為伸乙基。Specific examples of alkylene include methylene, ethylene, propylene, and butylene. From the viewpoint of reducing outgassing, methylene or ethylene is preferred, and more preferred is Ethylene.

伸烯基可為直鏈亦可為支鏈,就顯影溶解性之觀點而言,較佳為直鏈。其碳數並無特別限定,通常為2以上,又,較佳為4以下,更佳為3以下。例如較佳為2~4,更佳為2~3。藉由設為上述下限值以上,存在殘膜率變高之傾向。又,藉由設為上述上限值以下,存在元件發光時之釋氣產生量變少之傾向。The alkenylene group may be a straight chain or a branched chain, and from the viewpoint of development solubility, a straight chain is preferred. The carbon number is not particularly limited, but it is usually 2 or more, more preferably 4 or less, and more preferably 3 or less. For example, it is preferably 2 to 4, more preferably 2 to 3. By setting it as the above-mentioned lower limit or more, there exists a tendency for the residual film rate to become high. In addition, by setting it below the above upper limit value, there is a tendency that the amount of outgassing generated when the device emits light is reduced.

作為伸烯基之具體例,可例舉伸乙烯基、伸丙烯基、伸丁烯基,就釋氣之觀點而言,較佳為伸乙烯基。Specific examples of the alkenylene group include an ethylene group, an propylene group, and a butenylene group. From the viewpoint of outgassing, an ethylene group is preferable.

碳數1~4之2價烴基可具有之取代基並無特別限定,例如可例舉鹵素原子、烷氧基、苯甲醯基、羥基,就合成之容易性之觀點而言,較佳為未經取代。The substituents that the divalent hydrocarbon group having 1 to 4 carbons may have are not particularly limited, and examples thereof include a halogen atom, an alkoxy group, a benzyl group, and a hydroxyl group. From the viewpoint of ease of synthesis, it is preferably Not replaced.

該等中,就釋氣減少之觀點而言,較佳為R1 為碳數1~4之2價伸烷基,更佳為亞甲基或伸乙基,進而較佳為伸乙基。Among these, from the viewpoint of reducing outgassing, R 1 is preferably a divalent alkylene group having 1 to 4 carbon atoms, more preferably a methylene group or an ethylene group, and still more preferably an ethylene group.

環氧(甲基)丙烯酸酯樹脂(b1-1)1分子中所包含之上述式(i-1)所表示之部分結構可為1種,亦可為2種以上。The partial structure represented by the above formula (i-1) contained in one molecule of the epoxy (meth)acrylate resin (b1-1) may be one type or two or more types.

環氧(甲基)丙烯酸酯樹脂(b1-1)1分子中所包含之上述式(i)所表示之部分結構之數量並無特別限定,較佳為1以上,更佳為2以上,進而較佳為3以上,又,較佳為10以下,進而較佳為8以下。上述上限及下限可任意地組合,例如較佳為1~10,更佳為2~10,進而較佳為3~8。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。The number of the partial structure represented by the above formula (i) contained in 1 molecule of the epoxy (meth)acrylate resin (b1-1) is not particularly limited, and is preferably 1 or more, more preferably 2 or more, and further It is preferably 3 or more, more preferably 10 or less, and still more preferably 8 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 1-10 are preferable, 2-10 are more preferable, and 3-8 are still more preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit.

環氧(甲基)丙烯酸酯樹脂(b1-1)1分子中所包含之上述式(i-1)所表示之部分結構之數量並無特別限定,較佳為1以上,更佳為2以上,進而較佳為3以上,又,較佳為10以下,進而較佳為8以下。上述上限及下限可任意地組合,例如較佳為1~10,更佳為2~10,進而較佳為3~8。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。The number of the partial structures represented by the above formula (i-1) contained in 1 molecule of the epoxy (meth)acrylate resin (b1-1) is not particularly limited, and is preferably 1 or more, more preferably 2 or more , More preferably 3 or more, more preferably 10 or less, and still more preferably 8 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 1-10 are preferable, 2-10 are more preferable, and 3-8 are still more preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit.

以下例舉環氧(甲基)丙烯酸酯樹脂(b1-1)之具體例。Specific examples of epoxy (meth)acrylate resin (b1-1) are given below.

[化11]

Figure 02_image025
[化11]
Figure 02_image025

[化12]

Figure 02_image027
[化12]
Figure 02_image027

[化13]

Figure 02_image029
[化13]
Figure 02_image029

[化14]

Figure 02_image031
[化14]
Figure 02_image031

[化15]

Figure 02_image033
[化15]
Figure 02_image033

[化16]

Figure 02_image035
[化16]
Figure 02_image035

[化17]

Figure 02_image037
[化17]
Figure 02_image037

作為另一形態,環氧(甲基)丙烯酸酯樹脂(b1)就顯影密接性之觀點而言,較佳為包含下述式(ii)所表示之部分結構之環氧(甲基)丙烯酸酯樹脂(b1-2)。As another aspect, the epoxy (meth)acrylate resin (b1) is preferably an epoxy (meth)acrylate containing a partial structure represented by the following formula (ii) from the viewpoint of developing adhesiveness Resin (b1-2).

[化18]

Figure 02_image039
[化18]
Figure 02_image039

式(ii)中,Rc 分別獨立地表示氫原子或甲基。Rd 表示具有環狀烴基作為側鏈之2價烴基。*表示鍵結鍵。In formula (ii), R c each independently represents a hydrogen atom or a methyl group. R d represents a divalent hydrocarbon group having a cyclic hydrocarbon group as a side chain. * Indicates a bonding key.

(Rd ) 於上述式(ii)中,Rd 表示具有環狀烴基作為側鏈之2價烴基。 作為環狀烴基,可例舉脂肪族環基或芳香族環基。(R d ) In the above formula (ii), R d represents a divalent hydrocarbon group having a cyclic hydrocarbon group as a side chain. The cyclic hydrocarbon group may, for example, be an aliphatic ring group or an aromatic ring group.

脂肪族環基具有之環之數量並無特別限定,通常為1以上,較佳為2以上,又,較佳為10以下,更佳為5以下,進而較佳為3以下。上述上限及下限可任意地組合,例如較佳為1~10,更佳為1~5,進而較佳為2~3。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。 脂肪族環基之碳數通常為4以上,較佳為6以上,更佳為8以上,又,較佳為40以下,更佳為30以下,進而較佳為20以下,尤佳為15以下。上述上限及下限可任意地組合,例如較佳為4~40,更佳為4~30,進而較佳為6~20,尤佳為8~15。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。 作為脂肪族環基中之脂肪族環,例如可例舉:環己烷環、環庚烷環、環癸烷環、環十二烷環、降𦯉烷環、異冰片烷環、金剛烷環。該等中,就顯影密接性之觀點而言,較佳為金剛烷環。The number of rings possessed by the aliphatic ring group is not particularly limited, and is usually 1 or more, preferably 2 or more, more preferably 10 or less, more preferably 5 or less, and still more preferably 3 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 1-10 are preferable, 1-5 are more preferable, and 2-3 are still more preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit. The carbon number of the aliphatic ring group is usually 4 or more, preferably 6 or more, more preferably 8 or more, more preferably 40 or less, more preferably 30 or less, still more preferably 20 or less, particularly preferably 15 or less . The above upper limit and lower limit can be combined arbitrarily, for example, 4-40 are preferable, 4-30 are more preferable, 6-20 are still more preferable, and 8-15 are especially preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit. As the aliphatic ring in the aliphatic ring group, for example, a cyclohexane ring, a cycloheptane ring, a cyclodecane ring, a cyclododecane ring, a norbornane ring, an isobornane ring, and an adamantane ring may be mentioned. . Among these, an adamantane ring is preferable from the viewpoint of development adhesiveness.

芳香族環基具有之環之數量並無特別限定,通常為1以上,較佳為2以上,更佳為3以上,又,較佳為10以下,更佳為5以下,進而較佳為4以下。上述上限及下限可任意地組合,例如較佳為1~10,更佳為2~5,進而較佳為3~4。藉由設為上述下限值以上,存在殘渣減少之傾向。又,藉由設為上述上限值以下,存在顯影密接性提昇之傾向。 作為芳香族環基,可例舉:芳香族烴環基、芳香族雜環基。芳香族環基之碳數通常為4以上,較佳為6以上,更佳為8以上,進而更佳為10以上,尤佳為12以上,又,較佳為40以下,更佳為30以下,進而較佳為20以下,尤佳為15以下。上述上限及下限可任意地組合,例如較佳為4~40,更佳為6~40,進而較佳為8~30,進而更佳為10~20,尤佳為12~15。藉由設為上述下限值以上,存在殘渣減少之傾向。又,藉由設為上述上限值以下,存在顯影密接性提昇之傾向。 作為芳香族環基中之芳香族環,例如可例舉:苯環、萘環、蒽環、菲環、苝環、稠四苯環、芘環、苯并芘環、

Figure 109144648-A0304-12-02
環、聯三伸苯環、乙烷合萘環、螢蒽環、茀環。該等中,就圖案化特性之觀點而言,較佳為茀環。The number of rings possessed by the aromatic ring group is not particularly limited, and is usually 1 or more, preferably 2 or more, more preferably 3 or more, more preferably 10 or less, more preferably 5 or less, and still more preferably 4 the following. The above upper limit and lower limit can be combined arbitrarily, for example, 1-10 are preferable, 2-5 are more preferable, and 3-4 are still more preferable. By setting it to be more than the above lower limit value, there is a tendency for residue to decrease. Moreover, by setting it as below the said upper limit, there exists a tendency for development adhesiveness to improve. The aromatic ring group may, for example, be an aromatic hydrocarbon ring group and an aromatic heterocyclic group. The carbon number of the aromatic ring group is usually 4 or more, preferably 6 or more, more preferably 8 or more, still more preferably 10 or more, particularly preferably 12 or more, more preferably 40 or less, more preferably 30 or less , More preferably 20 or less, and particularly preferably 15 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 4-40 is preferable, 6-40 is more preferable, 8-30 is still more preferable, 10-20 is still more preferable, and 12-15 is especially preferable. By setting it to be more than the above lower limit value, there is a tendency for residue to decrease. Moreover, by setting it as below the said upper limit, there exists a tendency for development adhesiveness to improve. As the aromatic ring in the aromatic ring group, for example, a benzene ring, a naphthalene ring, an anthracene ring, a phenanthrene ring, a perylene ring, a fused tetrabenzene ring, a pyrene ring, a benzopyrene ring,
Figure 109144648-A0304-12-02
Ring, bis-terphenylene ring, ethane naphthalene ring, fluoranthene ring, pyrene ring. Among them, from the viewpoint of patterning characteristics, a chrysanthemum ring is preferable.

具有環狀烴基作為側鏈之2價烴基中之2價烴基並無特別限定,例如可例舉:2價脂肪族基、2價芳香族環基、將1個以上2價脂肪族基與1個以上2價芳香族環基連結而成之基。The divalent hydrocarbon group in the divalent hydrocarbon group having a cyclic hydrocarbon group as a side chain is not particularly limited, and examples include: a divalent aliphatic group, a divalent aromatic ring group, and a combination of one or more divalent aliphatic groups with 1 A group formed by linking two or more divalent aromatic ring groups.

2價脂肪族基可例舉直鏈狀、支鏈狀、環狀者。該等中,就顯影溶解性之觀點而言,較佳為直鏈狀者,另一方面,就減少顯影液對曝光部之滲透之觀點而言,較佳為環狀者。其碳數通常為1以上,較佳為3以上,更佳為6以上,又,較佳為25以下,更佳為20以下,進而較佳為15以下。上述上限及下限可任意地組合,例如較佳為1~25,更佳為3~20,進而較佳為6~15。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。The divalent aliphatic group may, for example, be linear, branched, or cyclic. Among them, from the standpoint of development solubility, the linear form is preferable, and on the other hand, the cyclic form is preferable from the standpoint of reducing the penetration of the developer into the exposed portion. The carbon number is usually 1 or more, preferably 3 or more, more preferably 6 or more, more preferably 25 or less, more preferably 20 or less, and still more preferably 15 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 1-25 are preferable, 3-20 are more preferable, and 6-15 are still more preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit.

作為2價直鏈狀脂肪族基,例如可例舉:亞甲基、伸乙基、正伸丙基、正伸丁基、正伸己基、正伸庚基。該等中,就殘渣之觀點而言,較佳為亞甲基。 作為2價支鏈狀脂肪族基,例如可例舉於上述之2價直鏈狀脂肪族基上具有甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基作為側鏈之結構。 2價環狀之脂肪族基具有之環之數量並無特別限定,通常為1以上,較佳為2以上,又,較佳為10以下,更佳為5以下,進而較佳為3以下。上述上限及下限可任意地組合,例如較佳為1~10,更佳為1~5,進而較佳為2~3。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。 作為2價環狀之脂肪族基,例如可例舉自環己烷環、環庚烷環、環癸烷環、環十二烷環、降𦯉烷環、異冰片烷環、金剛烷環除去2個氫原子而成之基。該等中,就顯影密接性之觀點而言,較佳為自金剛烷環除去2個氫原子而成之基。Examples of the bivalent linear aliphatic group include methylene, ethylene, n-propyl, n-butyl, n-hexyl, and n-heptyl. Among these, from the viewpoint of residue, methylene is preferred. As the bivalent branched aliphatic group, for example, the above-mentioned bivalent linear aliphatic group has a methyl group, an ethyl group, a n-propyl group, an isopropyl group, a n-butyl group, an isobutyl group, and a third group. Dibutyl and tertiary butyl are the side chain structures. The number of rings possessed by the bivalent cyclic aliphatic group is not particularly limited, and is usually 1 or more, preferably 2 or more, more preferably 10 or less, more preferably 5 or less, and still more preferably 3 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 1-10 are preferable, 1-5 are more preferable, and 2-3 are still more preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit. As the bivalent cyclic aliphatic group, for example, a cyclohexane ring, a cycloheptane ring, a cyclodecane ring, a cyclododecane ring, a nordecane ring, an isobornane ring, and adamantane ring can be cited. The base formed by 2 hydrogen atoms. Among these, from the viewpoint of development adhesiveness, a group obtained by removing two hydrogen atoms from an adamantane ring is preferable.

作為2價脂肪族基可具有之取代基,例如可例舉:甲氧基、乙氧基等碳數1~5之烷氧基;羥基;硝基;氰基;羧基,就合成容易性之觀點而言,較佳為未經取代。As the substituent that the divalent aliphatic group may have, for example, alkoxy groups having 1 to 5 carbon atoms such as methoxy and ethoxy groups; hydroxyl groups; nitro groups; cyano groups; carboxyl groups are easy to synthesize From a viewpoint, it is preferable to be unsubstituted.

作為2價芳香族環基,可例舉2價芳香族烴環基及2價芳香族雜環基。其碳數通常為4以上,較佳為5以上,更佳為6以上,又,較佳為30以下,更佳為20以下,進而較佳為15以下。上述上限及下限可任意地組合,例如較佳為4~30,更佳為5~20,進而較佳為6~15。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。The divalent aromatic ring group may, for example, be a divalent aromatic hydrocarbon ring group and a divalent aromatic heterocyclic group. The carbon number is usually 4 or more, preferably 5 or more, more preferably 6 or more, more preferably 30 or less, more preferably 20 or less, and still more preferably 15 or less. The above upper limit and lower limit can be arbitrarily combined, for example, 4-30 are preferable, 5-20 are more preferable, and 6-15 are still more preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit.

作為2價芳香族烴環基中之芳香族烴環,可為單環亦可為縮合環。作為2價芳香族烴環基,例如可例舉具有2個自由原子價之苯環、萘環、蒽環、菲環、苝環、稠四苯環、芘環、苯并芘環、

Figure 109144648-A0304-12-02
環、聯三伸苯環、乙烷合萘環、螢蒽環、茀環。 作為2價芳香族雜環基中之芳香族雜環,可為單環亦可為縮合環。作為2價芳香族雜環基,例如可例舉具有2個自由原子價之呋喃環、苯并呋喃環、噻吩環、苯并噻吩環、吡咯環、吡唑環、咪唑環、㗁二唑環、吲哚環、咔唑環、吡咯并咪唑環、吡咯并吡唑環、吡咯并吡咯環、噻吩并吡咯環、噻吩并噻吩環、呋喃并吡咯環、呋喃并呋喃環、噻吩并呋喃環、苯并異㗁唑環、苯并異噻唑環、苯并咪唑環、吡啶環、吡𠯤環、嗒𠯤環、嘧啶環、三𠯤環、喹啉環、異喹啉環、㖕啉環、喹㗁啉環、啡啶環、呸啶環、喹唑啉環、喹唑啉酮環、薁環。該等中,就光硬化性之觀點而言,較佳為具有2個自由原子價之苯環、萘環,更佳為具有2個自由原子價之苯環。The aromatic hydrocarbon ring in the divalent aromatic hydrocarbon ring group may be a monocyclic ring or a condensed ring. As the divalent aromatic hydrocarbon ring group, for example, a benzene ring, a naphthalene ring, an anthracene ring, a phenanthrene ring, a perylene ring, a fused tetraphenyl ring, a pyrene ring, a benzopyrene ring and
Figure 109144648-A0304-12-02
Ring, bis-terphenylene ring, ethane naphthalene ring, fluoranthene ring, pyrene ring. The aromatic heterocyclic ring in the divalent aromatic heterocyclic group may be a monocyclic ring or a condensed ring. As the divalent aromatic heterocyclic group, for example, a furan ring, a benzofuran ring, a thiophene ring, a benzothiophene ring, a pyrrole ring, a pyrazole ring, an imidazole ring, and an oxadiazole ring having two free valences can be mentioned. , Indole ring, carbazole ring, pyrroloimidazole ring, pyrrolopyrazole ring, pyrrolopyrrole ring, thienopyrrole ring, thienothiophene ring, furopyrrole ring, furofuran ring, thienofuran ring, Benzoisoxazole ring, benzisothiazole ring, benzimidazole ring, pyridine ring, pyrimidine ring, pyridine ring, pyrimidine ring, tricyclic ring, quinoline ring, isoquinoline ring, quinoline ring, quinoline Acetyl ring, phenanthridine ring, pyridine ring, quinazoline ring, quinazolinone ring, azulene ring. Among these, from the viewpoint of photocurability, a benzene ring and a naphthalene ring having 2 free valences are preferred, and a benzene ring having 2 free valences is more preferred.

作為2價芳香族環基可具有之取代基,例如可例舉:羥基、甲基、甲氧基、乙基、乙氧基、丙基、丙氧基。該等中,就硬化性之觀點而言,較佳為未經取代。Examples of the substituent that the divalent aromatic ring group may have include a hydroxyl group, a methyl group, a methoxy group, an ethyl group, an ethoxy group, a propyl group, and a propoxy group. Among these, from the viewpoint of hardening properties, it is preferable to be unsubstituted.

作為將1個以上2價脂肪族基與1個以上2價芳香族環基連結而成之基,可例舉將1個以上之上述2價脂肪族基與1個以上之上述2價芳香族環基連結而成之基。 2價脂肪族基之數量並無特別限定,通常為1以上,較佳為2以上,又,較佳為10以下,更佳為5以下,進而較佳為3以下。上述上限及下限可任意地組合,例如較佳為1~10,更佳為1~5,進而較佳為2~3。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。 2價芳香族環基之數量並無特別限定,通常為1以上,較佳為2以上,又,較佳為10以下,更佳為5以下,進而較佳為3以下。上述上限及下限可任意地組合,例如較佳為1~10,更佳為1~5,進而較佳為2~3。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。As a group formed by linking one or more divalent aliphatic groups and one or more divalent aromatic ring groups, there can be mentioned one or more of the above-mentioned divalent aliphatic groups and one or more of the above-mentioned divalent aromatic groups. The base formed by the connection of the ring base. The number of divalent aliphatic groups is not particularly limited, and is usually 1 or more, preferably 2 or more, and more preferably 10 or less, more preferably 5 or less, and still more preferably 3 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 1-10 are preferable, 1-5 are more preferable, and 2-3 are still more preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit. The number of divalent aromatic ring groups is not particularly limited, but is usually 1 or more, preferably 2 or more, more preferably 10 or less, more preferably 5 or less, and still more preferably 3 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 1-10 are preferable, 1-5 are more preferable, and 2-3 are still more preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit.

作為將1個以上2價脂肪族基與1個以上2價芳香族環基連結而成之基,例如可例舉上述式(i-A)~(i-F)所表示之基等。該等中,就殘渣減少之觀點而言,較佳為上述式(i-C)所表示之基。As the group formed by linking one or more divalent aliphatic groups and one or more divalent aromatic ring groups, for example, the groups represented by the above-mentioned formulas (i-A) to (i-F) and the like can be mentioned. Among these, the group represented by the above-mentioned formula (i-C) is preferable from the viewpoint of reduction of residue.

作為側鏈之環狀烴基對該等2價烴基之鍵結形態並無特別限定,例如可例舉於側鏈上取代脂肪族基或芳香族環基之1個氫原子之形態、或包含脂肪族基之1個碳原子而構成作為側鏈之環狀烴基之形態。As the side chain cyclic hydrocarbon group, the bonding form of the divalent hydrocarbon group is not particularly limited. For example, a form in which one hydrogen atom of an aliphatic group or an aromatic ring group is substituted on the side chain, or a form containing an aliphatic group can be mentioned. One carbon atom of the group constitutes the form of a cyclic hydrocarbon group as a side chain.

上述式(ii)所表示之部分結構就顯影密接性之觀點而言,較佳為下述式(ii-1)所表示之部分結構。The partial structure represented by the above formula (ii) is preferably the partial structure represented by the following formula (ii-1) from the viewpoint of development adhesion.

[化19]

Figure 02_image041
[化19]
Figure 02_image041

式(ii-1)中,Rc 與上述式(ii)同義。Rα 表示可具有取代基之1價環狀烴基。n為1以上之整數。式(ii-1)中之苯環可進而被任意取代基取代。*表示鍵結鍵。In the formula (ii-1), R c has the same meaning as in the above formula (ii). R α represents a monovalent cyclic hydrocarbon group which may have a substituent. n is an integer of 1 or more. The benzene ring in formula (ii-1) may be further substituted with any substituent. * Indicates a bonding key.

(Rα ) 於上述式(ii-1)中,Rα 表示可具有取代基之1價環狀烴基。 作為環狀烴基,可例舉脂肪族環基或芳香族環基。(R α ) In the above formula (ii-1), R α represents a monovalent cyclic hydrocarbon group which may have a substituent. The cyclic hydrocarbon group may, for example, be an aliphatic ring group or an aromatic ring group.

脂肪族環基具有之環之數量並無特別限定,通常為1以上,較佳為2以上,又,較佳為6以下,更佳為4以下,進而較佳為3以下。上述上限及下限可任意地組合,例如較佳為1~6,更佳為1~4,進而較佳為2~3。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。 又,脂肪族環基之碳數通常為4以上,較佳為6以上,更佳為8以上,又,較佳為40以下,更佳為30以下,進而較佳為20以下,尤佳為15以下。上述上限及下限可任意地組合,例如較佳為4~40,更佳為4~30,進而較佳為6~20,尤佳為8~15。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。 作為脂肪族環基中之脂肪族環,例如可例舉:環己烷環、環庚烷環、環癸烷環、環十二烷環、降𦯉烷環、異冰片烷環、金剛烷環。該等中,就顯影密接性之觀點而言,較佳為金剛烷環。The number of rings possessed by the aliphatic ring group is not particularly limited, and is usually 1 or more, preferably 2 or more, more preferably 6 or less, more preferably 4 or less, and still more preferably 3 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 1-6 are preferable, 1-4 are more preferable, and 2-3 are still more preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit. In addition, the carbon number of the aliphatic ring group is usually 4 or more, preferably 6 or more, more preferably 8 or more, more preferably 40 or less, more preferably 30 or less, still more preferably 20 or less, and particularly preferably 15 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 4-40 are preferable, 4-30 are more preferable, 6-20 are still more preferable, and 8-15 are especially preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit. As the aliphatic ring in the aliphatic ring group, for example, a cyclohexane ring, a cycloheptane ring, a cyclodecane ring, a cyclododecane ring, a norbornane ring, an isobornane ring, and an adamantane ring may be mentioned. . Among these, an adamantane ring is preferable from the viewpoint of development adhesiveness.

芳香族環基具有之環之數量並無特別限定,通常為1以上,較佳為2以上,更佳為3以上,又,較佳為10以下,更佳為5以下。上述上限及下限可任意地組合,例如較佳為1~10,更佳為2~10,進而較佳為3~5。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。 作為芳香族環基,可例舉:芳香族烴環基、芳香族雜環基。又,芳香族環基之碳數通常為4以上,較佳為5以上,更佳為6以上,又,較佳為30以下,更佳為20以下,進而較佳為15以下。上述上限及下限可任意地組合,例如較佳為4~30,更佳為5~20,進而較佳為6~15。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。 作為芳香族環基中之芳香族環,例如可例舉:苯環、萘環、蒽環、菲環、茀環。該等中,就顯影密接性之觀點而言,較佳為茀環。The number of rings possessed by the aromatic ring group is not particularly limited, and is usually 1 or more, preferably 2 or more, more preferably 3 or more, and more preferably 10 or less, more preferably 5 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 1-10 are preferred, 2-10 are more preferred, and 3-5 are still more preferred. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit. The aromatic ring group may, for example, be an aromatic hydrocarbon ring group and an aromatic heterocyclic group. In addition, the carbon number of the aromatic ring group is usually 4 or more, preferably 5 or more, more preferably 6 or more, more preferably 30 or less, more preferably 20 or less, and still more preferably 15 or less. The above upper limit and lower limit can be arbitrarily combined, for example, 4-30 are preferable, 5-20 are more preferable, and 6-15 are still more preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit. Examples of the aromatic ring in the aromatic ring group include a benzene ring, a naphthalene ring, an anthracene ring, a phenanthrene ring, and a sulphur ring. Among these, from the viewpoint of development adhesiveness, a sage ring is preferable.

作為環狀烴基可具有之取代基,例如可例舉:甲基、乙基、正丙基、異丙基、正丁基、第二丁基、第三丁基、戊基、異戊基等碳數1~5之烷基;甲氧基、乙氧基等碳數1~5之烷氧基;羥基;硝基;氰基;羧基,就合成之容易性之觀點而言,較佳為未經取代。Examples of substituents that the cyclic hydrocarbon group may have include methyl, ethyl, n-propyl, isopropyl, n-butyl, sec-butyl, tert-butyl, pentyl, isopentyl, etc. Alkyl groups with 1 to 5 carbons; alkoxy groups with 1 to 5 carbons such as methoxy and ethoxy groups; hydroxyl groups; nitro groups; cyano groups; carboxyl groups. From the viewpoint of ease of synthesis, preferably Not replaced.

n表示1以上之整數,較佳為2以上,又,較佳為3以下。例如較佳為1~3,更佳為1~2。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。n represents an integer of 1 or more, preferably 2 or more, and more preferably 3 or less. For example, 1-3 are preferable, and 1-2 are more preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit.

該等中,就強固之膜硬化度及電特性之觀點而言,較佳為Rα 為1價脂肪族環基,更佳為金剛烷基。Among them, from the viewpoint of a strong film curing degree and electrical characteristics, R α is preferably a monovalent aliphatic ring group, and more preferably an adamantyl group.

如上所述,式(ii-1)中之苯環可進而被任意取代基取代。作為取代基,例如可例舉:羥基、甲基、甲氧基、乙基、乙氧基、丙基、丙氧基。取代基之數量亦無特別限定,可為1個,亦可為2個以上。就硬化性之觀點而言,較佳為未經取代。As mentioned above, the benzene ring in formula (ii-1) may be further substituted with any substituent. Examples of the substituent include a hydroxyl group, a methyl group, a methoxy group, an ethyl group, an ethoxy group, a propyl group, and a propoxy group. The number of substituents is also not particularly limited, and may be one or two or more. From the viewpoint of hardening properties, it is preferably unsubstituted.

以下例舉上述式(ii-1)所表示之部分結構之具體例。The following is a specific example of the partial structure represented by the above formula (ii-1).

[化20]

Figure 02_image043
[化20]
Figure 02_image043

[化21]

Figure 02_image045
[化21]
Figure 02_image045

[化22]

Figure 02_image047
[化22]
Figure 02_image047

[化23]

Figure 02_image049
[化23]
Figure 02_image049

[化24]

Figure 02_image051
[化24]
Figure 02_image051

上述式(ii)所表示之部分結構就顯影密接性之觀點而言,較佳為下述式(ii-2)所表示之部分結構。The partial structure represented by the above formula (ii) is preferably the partial structure represented by the following formula (ii-2) from the viewpoint of development adhesion.

[化25]

Figure 02_image053
[化25]
Figure 02_image053

式(ii-2)中,Rc 與上述式(ii)同義。Rβ 表示可具有取代基之2價環狀烴基。式(ii-2)中之苯環可進而被任意取代基取代。*表示鍵結鍵。In the formula (ii-2), R c has the same meaning as in the above formula (ii). R β represents a bivalent cyclic hydrocarbon group which may have a substituent. The benzene ring in formula (ii-2) may be further substituted with any substituent. * Indicates a bonding key.

(Rβ ) 於上述式(ii-2)中,Rβ 表示可具有取代基之2價環狀烴基。 作為環狀烴基,可例舉脂肪族環基或芳香族環基。(R β ) In the above formula (ii-2), R β represents a bivalent cyclic hydrocarbon group which may have a substituent. The cyclic hydrocarbon group may, for example, be an aliphatic ring group or an aromatic ring group.

脂肪族環基具有之環之數量並無特別限定,通常為1以上,較佳為2以上,又,較佳為10以下,更佳為5以下。上述上限及下限可任意地組合,例如較佳為1~10,更佳為2~5。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。 又,脂肪族環基之碳數通常為4以上,較佳為6以上,更佳為8以上,又,較佳為40以下,更佳為35以下,進而較佳為30以下。上述上限及下限可任意地組合,例如較佳為4~40,更佳為6~35,進而較佳為8~30。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。 作為脂肪族環基中之脂肪族環,可例舉:環己烷環、環庚烷環、環癸烷環、環十二烷環、降𦯉烷環、異冰片烷環、金剛烷環。該等中,就顯影密接性之觀點而言,較佳為金剛烷環。The number of rings possessed by the aliphatic ring group is not particularly limited, but it is usually 1 or more, preferably 2 or more, more preferably 10 or less, and more preferably 5 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 1-10 are preferable, and 2-5 are more preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit. In addition, the carbon number of the aliphatic ring group is usually 4 or more, preferably 6 or more, more preferably 8 or more, more preferably 40 or less, more preferably 35 or less, and still more preferably 30 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 4-40 are preferable, 6-35 are more preferable, and 8-30 are still more preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit. The aliphatic ring in the aliphatic ring group may, for example, be a cyclohexane ring, a cycloheptane ring, a cyclodecane ring, a cyclododecane ring, a nordecane ring, an isobornane ring, and an adamantane ring. Among these, an adamantane ring is preferable from the viewpoint of development adhesiveness.

芳香族環基具有之環之數量並無特別限定,通常為1以上,較佳為2以上,更佳為3以上,又,較佳為10以下,較佳為5以下。上述上限及下限可任意地組合,例如較佳為1~10,更佳為2~10,進而較佳為3~5。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。 作為芳香族環基,可例舉:芳香族烴環基、芳香族雜環基。又,芳香族環基之碳數通常為4以上,較佳為6以上,更佳為8以上,進而較佳為10以上,又,較佳為40以下,更佳為30以下,進而較佳為20以下,尤佳為15以下。上述上限及下限可任意地組合,例如較佳為4~40,更佳為6~30,進而較佳為8~20,尤佳為10~15。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。 作為芳香族環基中之芳香族環,例如可例舉:苯環、萘環、蒽環、菲環、茀環。該等中,就顯影密接性之觀點而言,較佳為茀環。The number of rings possessed by the aromatic ring group is not particularly limited, and is usually 1 or more, preferably 2 or more, more preferably 3 or more, and more preferably 10 or less, and preferably 5 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 1-10 are preferred, 2-10 are more preferred, and 3-5 are still more preferred. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit. The aromatic ring group may, for example, be an aromatic hydrocarbon ring group and an aromatic heterocyclic group. In addition, the carbon number of the aromatic ring group is usually 4 or more, preferably 6 or more, more preferably 8 or more, still more preferably 10 or more, more preferably 40 or less, more preferably 30 or less, and still more preferably It is 20 or less, particularly preferably 15 or less. The above upper limit and lower limit can be arbitrarily combined, for example, 4-40 are preferred, 6-30 are more preferred, 8-20 are more preferred, and 10-15 are particularly preferred. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit. Examples of the aromatic ring in the aromatic ring group include a benzene ring, a naphthalene ring, an anthracene ring, a phenanthrene ring, and a sulphur ring. Among these, from the viewpoint of development adhesiveness, a sage ring is preferable.

作為環狀烴基可具有之取代基,例如可例舉:甲基、乙基、正丙基、異丙基、正丁基、第二丁基、第三丁基、戊基、異戊基等碳數1~5之烷基;甲氧基、乙氧基等碳數1~5之烷氧基;羥基;硝基;氰基;羧基。該等中,就合成之簡易性之觀點而言,較佳為未經取代。Examples of substituents that the cyclic hydrocarbon group may have include methyl, ethyl, n-propyl, isopropyl, n-butyl, sec-butyl, tert-butyl, pentyl, isopentyl, etc. Alkyl with 1 to 5 carbons; Alkoxy with 1 to 5 carbons such as methoxy and ethoxy; hydroxy; nitro; cyano; carboxyl. Among them, from the viewpoint of ease of synthesis, it is preferable to be unsubstituted.

該等中,就硬化性之觀點而言,較佳為Rβ 為2價脂肪族環基,更佳為2價金剛烷環基。 作為又一形態,就顯影密接性之觀點而言,較佳為Rβ 為2價芳香族環基,更佳為2價茀環基。Among these, from the viewpoint of hardening properties, R β is preferably a divalent aliphatic ring group, and more preferably a divalent adamantane ring group. As another aspect, from the viewpoint of development adhesiveness, R β is preferably a divalent aromatic ring group, and more preferably a divalent fluorine ring group.

如上所述,式(ii-2)中之苯環可進而被任意取代基取代。作為式(ii-2)中之苯環之取代基,例如可例舉:羥基、甲基、甲氧基、乙基、乙氧基、丙基、丙氧基。取代基之數量亦無特別限定,可為1個,亦可為2個以上。就硬化性之觀點而言,較佳為未經取代。As described above, the benzene ring in formula (ii-2) may be further substituted with any substituent. As the substituent of the benzene ring in the formula (ii-2), for example, a hydroxyl group, a methyl group, a methoxy group, an ethyl group, an ethoxy group, a propyl group, and a propoxy group may be mentioned. The number of substituents is also not particularly limited, and may be one or two or more. From the viewpoint of hardening properties, it is preferably unsubstituted.

以下例舉上述式(ii-2)所表示之部分結構之具體例。The following is a specific example of the partial structure represented by the above formula (ii-2).

[化26]

Figure 02_image055
[化26]
Figure 02_image055

[化27]

Figure 02_image057
[化27]
Figure 02_image057

[化28]

Figure 02_image059
[化28]
Figure 02_image059

[化29]

Figure 02_image061
[化29]
Figure 02_image061

上述式(ii)所表示之部分結構就硬化性之觀點而言,較佳為下述式(ii-3)所表示之部分結構。The partial structure represented by the above formula (ii) is preferably the partial structure represented by the following formula (ii-3) from the viewpoint of curability.

[化30]

Figure 02_image063
[化30]
Figure 02_image063

式(ii-3)中,Rc 及Rd 與上述式(ii)同義。R1 與上述式(i-1)同義。*表示鍵結鍵。In the formula (ii-3), R c and R d have the same meaning as in the above formula (ii). R 1 is synonymous with the above formula (i-1). * Indicates a bonding key.

環氧(甲基)丙烯酸酯樹脂(b1-2)1分子中所包含之上述式(ii-3)所表示之部分結構為1種或2種以上均可。The partial structure represented by the above formula (ii-3) contained in one molecule of the epoxy (meth)acrylate resin (b1-2) may be one type or two or more types.

環氧(甲基)丙烯酸酯樹脂(b1-2)1分子中所包含之上述式(ii)所表示之部分結構之數量並無特別限定,較佳為1以上,更佳為3以上,又,較佳為20以下,更佳為15以下,進而較佳為10以下。上述上限及下限可任意地組合,例如較佳為1~20,更佳為1~15,進而較佳為3~10。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。The number of the partial structure represented by the above formula (ii) contained in one molecule of the epoxy (meth)acrylate resin (b1-2) is not particularly limited, and is preferably 1 or more, more preferably 3 or more, and , Preferably 20 or less, more preferably 15 or less, and still more preferably 10 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 1-20 are preferable, 1-15 are more preferable, and 3-10 are still more preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit.

作為進而又一形態,環氧(甲基)丙烯酸酯樹脂(b1)就元件發光時之釋氣減少之觀點而言,較佳為包含下述通式(iii)所表示之部分結構之環氧(甲基)丙烯酸酯樹脂(b1-3)。As yet another aspect, the epoxy (meth)acrylate resin (b1) is preferably an epoxy containing a partial structure represented by the following general formula (iii) from the viewpoint of reducing outgassing when the device emits light (Meth)acrylate resin (b1-3).

[化31]

Figure 02_image065
[化31]
Figure 02_image065

式(iii)中,Re 表示氫原子或甲基,γ表示單鍵、-CO-、可具有取代基之伸烷基、或可具有取代基之2價環狀烴基。式(iii)中之苯環可進而被任意取代基取代。*表示鍵結鍵。In the formula (iii), R e represents a hydrogen atom or a methyl group, gamma] represents a single bond, CO-, it may have a substituent group of the alkylene group, or a divalent radical of a cyclic hydrocarbon substituent. The benzene ring in formula (iii) may be further substituted with any substituent. * Indicates a bonding key.

(γ) 於上述式(iii)中,γ表示單鍵、-CO-、可具有取代基之伸烷基、或可具有取代基之2價環狀烴基。(γ) In the above formula (iii), γ represents a single bond, -CO-, an alkylene group which may have a substituent, or a bivalent cyclic hydrocarbon group which may have a substituent.

伸烷基可為直鏈狀,亦可為支鏈狀,就顯影溶解性之觀點而言,較佳為直鏈狀,就顯影密接性之觀點而言,較佳為支鏈狀。其碳數並無特別限定,通常為1以上,較佳為2以上,又,較佳為6以下,更佳為4以下。上述上限及下限可任意地組合,例如較佳為1~6,更佳為2~4。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。The alkylene group may be linear or branched. From the viewpoint of development solubility, it is preferably linear, and from the viewpoint of development adhesion, it is preferably branched. The carbon number is not particularly limited, and is usually 1 or more, preferably 2 or more, and more preferably 6 or less, more preferably 4 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 1 to 6 are preferable, and 2 to 4 are more preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit.

作為伸烷基,例如可例舉:亞甲基、伸乙基、伸丙基、伸丁基、伸己基、伸庚基,就兼顧顯影密接性與顯影溶解性之觀點而言,較佳為亞甲基、伸乙基、伸丙基,更佳為二甲基亞甲基(2,2-伸丙基)。As the alkylene group, for example, methylene, ethylene group, propylene group, butylene group, hexylene group, and heptylene group may be mentioned. From the viewpoint of compatibility of development adhesion and development solubility, preferred is Methylene, ethylene, and propylene, more preferably dimethylmethylene (2,2-propylene).

作為伸烷基可具有之取代基,例如可例舉:甲氧基、乙氧基等碳數1~5之烷氧基;羥基;硝基;氰基;羧基,就兼顧顯影密接性與顯影溶解性之觀點而言,較佳為未經取代。The substituents that the alkylene group may have include, for example, alkoxy groups with 1 to 5 carbon atoms such as methoxy groups and ethoxy groups; hydroxyl groups; nitro groups; cyano groups; From the viewpoint of solubility, it is preferably unsubstituted.

作為2價環狀烴基,可例舉2價脂肪族環基或2價芳香族環基。The divalent cyclic hydrocarbon group may, for example, be a divalent aliphatic ring group or a divalent aromatic ring group.

脂肪族環基具有之環之數量並無特別限定,通常為1以上,較佳為2以上,又,較佳為10以下,更佳為5以下。上述上限及下限可任意地組合,例如較佳為1~10,更佳為2~5。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。 又,脂肪族環基之碳數通常為4以上,較佳為6以上,更佳為8以上,又,較佳為40以下,更佳為35以下,進而較佳為30以下。上述上限及下限可任意地組合,例如較佳為4~40,更佳為6~35,進而較佳為8~30。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。 作為脂肪族環基中之脂肪族環,例如可例舉:環己烷環、環庚烷環、環癸烷環、環十二烷環、降𦯉烷環、異冰片烷環、金剛烷環。該等中,就顯影密接性之觀點而言,較佳為金剛烷環。The number of rings possessed by the aliphatic ring group is not particularly limited, but it is usually 1 or more, preferably 2 or more, more preferably 10 or less, and more preferably 5 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 1-10 are preferable, and 2-5 are more preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit. In addition, the carbon number of the aliphatic ring group is usually 4 or more, preferably 6 or more, more preferably 8 or more, more preferably 40 or less, more preferably 35 or less, and still more preferably 30 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 4-40 are preferable, 6-35 are more preferable, and 8-30 are still more preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit. As the aliphatic ring in the aliphatic ring group, for example, a cyclohexane ring, a cycloheptane ring, a cyclodecane ring, a cyclododecane ring, a norbornane ring, an isobornane ring, and an adamantane ring may be mentioned. . Among these, an adamantane ring is preferable from the viewpoint of development adhesiveness.

芳香族環基具有之環之數量並無特別限定,通常為1以上,較佳為2以上,更佳為3以上,又,較佳為10以下,更佳為5以下。上述上限及下限可任意地組合,例如較佳為1~10,更佳為2~10,進而較佳為3~5。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。 作為芳香族環基,可例舉:芳香族烴環基、芳香族雜環基。芳香族環基之碳數通常為4以上,較佳為6以上,更佳為8以上,進而較佳為10以上,又,較佳為40以下,更佳為30以下,進而較佳為20以下,尤佳為15以下。上述上限及下限可任意地組合,例如較佳為4~40,更佳為6~30,進而較佳為8~20,尤佳為10~15。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。 作為芳香族環基中之芳香族環,例如可例舉:苯環、萘環、蒽環、菲環、茀環。該等中,就顯影密接性之觀點而言,較佳為茀環。The number of rings possessed by the aromatic ring group is not particularly limited, and is usually 1 or more, preferably 2 or more, more preferably 3 or more, and more preferably 10 or less, more preferably 5 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 1-10 are preferred, 2-10 are more preferred, and 3-5 are still more preferred. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit. The aromatic ring group may, for example, be an aromatic hydrocarbon ring group and an aromatic heterocyclic group. The carbon number of the aromatic ring group is usually 4 or more, preferably 6 or more, more preferably 8 or more, still more preferably 10 or more, more preferably 40 or less, more preferably 30 or less, and still more preferably 20 Below, 15 or less is particularly preferable. The above upper limit and lower limit can be arbitrarily combined, for example, 4-40 are preferred, 6-30 are more preferred, 8-20 are more preferred, and 10-15 are particularly preferred. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit. Examples of the aromatic ring in the aromatic ring group include a benzene ring, a naphthalene ring, an anthracene ring, a phenanthrene ring, and a sulphur ring. Among these, from the viewpoint of development adhesiveness, a sage ring is preferable.

作為環狀烴基可具有之取代基,例如可例舉:甲基、乙基、正丙基、異丙基、正丁基、第二丁基、第三丁基、戊基、異戊基等碳數1~5之烷基;甲氧基、乙氧基等碳數1~5之烷氧基;羥基;硝基;氰基;羧基,就合成之簡易性之觀點而言,較佳為未經取代。Examples of substituents that the cyclic hydrocarbon group may have include methyl, ethyl, n-propyl, isopropyl, n-butyl, sec-butyl, tert-butyl, pentyl, isopentyl, etc. Alkyl groups with 1 to 5 carbons; alkoxy groups with 1 to 5 carbons such as methoxy and ethoxy groups; hydroxyl groups; nitro groups; cyano groups; Not replaced.

該等中,就殘渣減少之觀點而言,較佳為γ為可具有取代基之伸烷基,更佳為二甲基亞甲基。Among these, from the viewpoint of reducing residues, γ is preferably an alkylene group which may have a substituent, and more preferably dimethylmethylene.

如上所述,式(iii)中之苯環可進而被任意取代基取代。作為式(iii)中之苯環之取代基,例如可例舉:羥基、甲基、甲氧基、乙基、乙氧基、丙基、丙氧基。取代基之數量亦無特別限定,可為1個,亦可為2個以上。就硬化性之觀點而言,較佳為未經取代。As mentioned above, the benzene ring in formula (iii) may be further substituted with any substituent. As the substituent of the benzene ring in formula (iii), for example, a hydroxyl group, a methyl group, a methoxy group, an ethyl group, an ethoxy group, a propyl group, and a propoxy group may be mentioned. The number of substituents is also not particularly limited, and may be one or two or more. From the viewpoint of hardening properties, it is preferably unsubstituted.

上述式(iii)所表示之部分結構就顯影溶解性之觀點而言,較佳為下述式(iii-1)所表示之部分結構。The partial structure represented by the above formula (iii) is preferably the partial structure represented by the following formula (iii-1) from the viewpoint of development solubility.

[化32]

Figure 02_image067
[化32]
Figure 02_image067

式(iii-1)中,Re 及γ與上述式(iii)同義。R1 與上述式(i-1)之R1 同義。*表示鍵結鍵。式(iii-1)中之苯環可進而被任意取代基取代。Of formula (iii-1) in a, R e, and γ is synonymous with the above-described formula (iii). R 1 and R the formula (i-1) of 1 synonymous. * Indicates a bonding key. The benzene ring in formula (iii-1) may be further substituted with any substituent.

環氧(甲基)丙烯酸酯樹脂(b1-3)1分子中所包含之上述式(iii)所表示之部分結構之數量並無特別限定,較佳為1以上,更佳為5以上,進而較佳為10以上,又,較佳為18以下,進而較佳為15以下。上述上限及下限可任意地組合,例如較佳為1~18,更佳為5~18,進而較佳為10~15。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。The number of the partial structure represented by the above formula (iii) contained in one molecule of the epoxy (meth)acrylate resin (b1-3) is not particularly limited, and is preferably 1 or more, more preferably 5 or more, and further It is preferably 10 or more, more preferably 18 or less, and more preferably 15 or less. The above upper limit and lower limit can be arbitrarily combined, for example, 1-18 are preferable, 5-18 are more preferable, and 10-15 are still more preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit.

環氧(甲基)丙烯酸酯樹脂(b1-3)1分子中所包含之上述式(iii-1)所表示之部分結構之數量並無特別限定,較佳為1以上,更佳為3以上,進而較佳為5以上,又,較佳為18以下,進而較佳為15以下。上述上限及下限可任意地組合,例如較佳為1~18,更佳為3~18,進而較佳為5~15。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。The number of the partial structures represented by the above formula (iii-1) contained in one molecule of the epoxy (meth)acrylate resin (b1-3) is not particularly limited, and is preferably 1 or more, more preferably 3 or more , More preferably 5 or more, more preferably 18 or less, and still more preferably 15 or less. The above upper limit and lower limit can be arbitrarily combined, for example, 1-18 are preferable, 3-18 are more preferable, and 5-15 are still more preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit.

以下例舉環氧(甲基)丙烯酸酯樹脂(b1-3)之具體例。Specific examples of epoxy (meth)acrylate resin (b1-3) are given below.

[化33]

Figure 02_image069
[化33]
Figure 02_image069

[化34]

Figure 02_image071
[化34]
Figure 02_image071

[化35]

Figure 02_image073
[化35]
Figure 02_image073

[丙烯酸系共聚樹脂(b2)] 丙烯酸系共聚樹脂(b2)就硬化性之觀點而言,較佳為於側鏈具有乙烯性雙鍵者。[Acrylic copolymer resin (b2)] From the viewpoint of curability, the acrylic copolymer resin (b2) preferably has an ethylenic double bond in the side chain.

丙烯酸系共聚樹脂(b2)之中,就顯影溶解性之觀點而言,較佳為包含下述通式(I)所表示之部分結構之丙烯酸系共聚樹脂(b2-1)。Among the acrylic copolymer resins (b2), from the viewpoint of development solubility, an acrylic copolymer resin (b2-1) containing a partial structure represented by the following general formula (I) is preferred.

[化36]

Figure 02_image075
[化36]
Figure 02_image075

式(I)中,RA 及RB 分別獨立地表示氫原子或甲基。*表示鍵結鍵。In formula (I), R A and R B each independently represent a hydrogen atom or a methyl group. * Indicates a bonding key.

上述式(I)所表示之部分結構就顯影性之觀點而言,較佳為下述通式(I-1)所表示之部分結構。The partial structure represented by the above formula (I) is preferably a partial structure represented by the following general formula (I-1) from the viewpoint of developability.

[化37]

Figure 02_image077
[化37]
Figure 02_image077

式(I-1)中,RA 及RB 與上述式(I)之RA 及RB 同義。R1 與上述式(i-1)之R1 同義。In the formula (I-1), R A and R B have the same meaning as R A and R B of the above formula (I). R 1 and R the formula (i-1) of 1 synonymous.

上述式(I)所表示之部分結構就感度之觀點而言,較佳為下述式(I-2)所表示之部分結構。The partial structure represented by the above formula (I) is preferably the partial structure represented by the following formula (I-2) from the viewpoint of sensitivity.

[化38]

Figure 02_image079
[化38]
Figure 02_image079

式(I-2)中,RA 及RB 與上述式(I)之RA 及RB 同義。In the formula (I-2), R A and R B have the same meaning as R A and R B in the above formula (I).

於丙烯酸系共聚樹脂(b2-1)包含上述通式(I)所表示之部分結構之情形時,丙烯酸系共聚樹脂(b2-1)所包含之上述通式(I)所表示之部分結構之含量並無特別限定,較佳為5莫耳%以上,更佳為20莫耳%以上,進而較佳為30莫耳%以上,進而更佳為50莫耳%以上,尤佳為70莫耳%以上,最佳為80莫耳%以上,又,較佳為99莫耳%以下,更佳為97莫耳%以下,進而較佳為95莫耳%以下。上述上限及下限可任意地組合,例如,較佳為5~99莫耳%,更佳為20~99莫耳%,進而較佳為30~97莫耳%,進而更佳為50~97莫耳%,尤佳為70~95莫耳%,最佳為80~95莫耳%。藉由設為上述下限值以上,存在殘渣減少之傾向。又,藉由設為上述上限值以下,存在顯影密接性提昇之傾向。When the acrylic copolymer resin (b2-1) contains the partial structure represented by the above general formula (I), the acrylic copolymer resin (b2-1) contains the partial structure represented by the above general formula (I) The content is not particularly limited, and is preferably 5 mol% or more, more preferably 20 mol% or more, still more preferably 30 mol% or more, still more preferably 50 mol% or more, and particularly preferably 70 mol% % Or more, preferably 80 mol% or more, more preferably 99 mol% or less, more preferably 97 mol% or less, and still more preferably 95 mol% or less. The above upper and lower limits can be combined arbitrarily, for example, preferably 5 to 99 mol%, more preferably 20 to 99 mol%, still more preferably 30 to 97 mol%, and even more preferably 50 to 97 mol% Ear%, particularly preferably 70 to 95 mol%, most preferably 80 to 95 mol%. By setting it to be more than the above lower limit value, there is a tendency for residue to decrease. Moreover, by setting it as below the said upper limit, there exists a tendency for development adhesiveness to improve.

於丙烯酸系共聚樹脂(b2-1)包含上述通式(I-1)所表示之部分結構之情形時,丙烯酸系共聚樹脂(b2-1)所包含之上述通式(I-1)所表示之部分結構之含量並無特別限定,較佳為1莫耳%以上,更佳為5莫耳%以上,進而較佳為8莫耳%以上,進而更佳為10莫耳%以上,又,較佳為99莫耳%以下,更佳為60莫耳%以下,進而較佳為40莫耳%以下,進而更佳為30莫耳%以下,尤佳為20莫耳%以下。上述上限及下限可任意地組合,例如較佳為1~99莫耳%,更佳為1~60莫耳%,進而較佳為5~40莫耳%,進而更佳為8~30莫耳%,尤佳為10~20莫耳%。藉由設為上述下限值以上,存在感度變高,殘渣減少之傾向。又,藉由設為上述上限值以下,存在顯影密接性提昇之傾向。When the acrylic copolymer resin (b2-1) contains the partial structure represented by the general formula (I-1), the acrylic copolymer resin (b2-1) is represented by the general formula (I-1) The content of the partial structure is not particularly limited, and is preferably 1 mol% or more, more preferably 5 mol% or more, still more preferably 8 mol% or more, and still more preferably 10 mol% or more, and, It is preferably 99 mol% or less, more preferably 60 mol% or less, further preferably 40 mol% or less, still more preferably 30 mol% or less, and particularly preferably 20 mol% or less. The above upper limit and lower limit can be arbitrarily combined, for example, preferably 1 to 99 mol%, more preferably 1 to 60 mol%, still more preferably 5 to 40 mol%, and even more preferably 8 to 30 mol% %, particularly preferably 10-20 mol%. By setting it to the above lower limit or more, the sensitivity increases and the residue tends to decrease. Moreover, by setting it as below the said upper limit, there exists a tendency for development adhesiveness to improve.

於丙烯酸系共聚樹脂(b2-1)包含上述通式(I-2)所表示之部分結構之情形時,丙烯酸系共聚樹脂(b2-1)所包含之上述通式(I-2)所表示之部分結構之含量並無特別限定,較佳為10莫耳%以上,更佳為20莫耳%以上,進而較佳為30莫耳%以上,進而更佳為40莫耳%以上,尤佳為50莫耳%以上,最佳為70莫耳%以上,又,較佳為99莫耳%以下,更佳為95莫耳%以下,進而較佳為90莫耳%以下,尤佳為85莫耳%以下。上述上限及下限可任意地組合,例如較佳為10~99莫耳%,更佳為20~99莫耳%,進而較佳為30~95莫耳%,進而更佳為40~95莫耳%,尤佳為50~90莫耳%,最佳為70~85莫耳%。藉由設為上述下限值以上,存在感度變高之傾向。又,藉由設為上述上限值以下,存在顯影性提昇之傾向。When the acrylic copolymer resin (b2-1) contains the partial structure represented by the general formula (I-2), the acrylic copolymer resin (b2-1) is represented by the general formula (I-2) The content of the part of the structure is not particularly limited, preferably 10 mol% or more, more preferably 20 mol% or more, still more preferably 30 mol% or more, and still more preferably 40 mol% or more, especially 50 mol% or more, preferably 70 mol% or more, more preferably 99 mol% or less, more preferably 95 mol% or less, further preferably 90 mol% or less, and particularly preferably 85 mol% Mole% or less. The above upper limit and lower limit can be combined arbitrarily, for example, preferably 10 to 99 mol%, more preferably 20 to 99 mol%, still more preferably 30 to 95 mol%, and even more preferably 40 to 95 mol% %, particularly preferably 50-90 mol%, most preferably 70-85 mol%. By setting it as the above-mentioned lower limit or more, there exists a tendency for sensitivity to become high. Moreover, by setting it as below the said upper limit, there exists a tendency for developability to improve.

於丙烯酸系共聚樹脂(b2-1)包含上述通式(I)所表示之部分結構之情形時,其他可包含之部分結構並無特別限定,就顯影密接性之觀點而言,例如較佳為包含下述通式(I')所表示之部分結構。When the acrylic copolymer resin (b2-1) includes the partial structure represented by the general formula (I), other partial structures that can be included are not particularly limited. From the viewpoint of development adhesion, for example, it is preferably The partial structure represented by the following general formula (I') is included.

[化39]

Figure 02_image081
[化39]
Figure 02_image081

上述式(I')中,RD 表示氫原子或甲基,RE 表示可具有取代基之烷基、可具有取代基之芳基(芳香族環基)、或可具有取代基之烯基。In the above formula (I'), R D represents a hydrogen atom or a methyl group, and RE represents an optionally substituted alkyl group, an optionally substituted aryl group (aromatic ring group), or an optionally substituted alkenyl group .

(RE ) 於上述式(I')中,RE 表示可具有取代基之烷基、可具有取代基之芳基、或可具有取代基之烯基。 作為RE 中之烷基,可例舉直鏈狀、支鏈狀或環狀之烷基。其碳數較佳為1以上,更佳為3以上,進而較佳為5以上,又,較佳為20以下,更佳為18以下,進而較佳為16以下,進而更佳為14以下,尤佳為12以下。上述上限及下限可任意地組合,例如較佳為1~20,更佳為1~18,進而較佳為3~16,進而更佳為3~14,尤佳為5~12。藉由設為上述下限值以上,存在膜強度變高,顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。(R E ) In the above formula (I'), RE represents an optionally substituted alkyl group, an optionally substituted aryl group, or an optionally substituted alkenyl group. As R E in the group include linear, branched or cyclic alkyl group of. The carbon number is preferably 1 or more, more preferably 3 or more, still more preferably 5 or more, more preferably 20 or less, more preferably 18 or less, still more preferably 16 or less, and still more preferably 14 or less, Particularly preferably, it is 12 or less. The above upper limit and lower limit can be combined arbitrarily, for example, preferably 1-20, more preferably 1-18, still more preferably 3-16, still more preferably 3-14, and particularly preferably 5-12. By setting it as the above-mentioned lower limit value or more, there exists a tendency for film strength to become high, and development adhesiveness improves. In addition, there is a tendency for residue to decrease by setting it below the above upper limit.

作為烷基,例如可例舉:甲基、乙基、環己基、二環戊基、十二烷基。該等中,就膜強度之觀點而言,較佳為二環戊基、十二烷基,更佳為二環戊基。 作為烷基可具有之取代基,例如可例舉:甲氧基、乙氧基、氯基、溴基、氟基、羥基、胺基、環氧基、低聚乙二醇基、苯基、羧基、丙烯醯基、甲基丙烯醯基,就顯影性之觀點而言,較佳為羥基、低聚乙二醇基。As the alkyl group, for example, a methyl group, an ethyl group, a cyclohexyl group, a dicyclopentyl group, and a dodecyl group may be mentioned. Among these, from the viewpoint of film strength, dicyclopentyl and dodecyl are preferred, and dicyclopentyl is more preferred. Examples of substituents that the alkyl group may have include: methoxy, ethoxy, chloro, bromo, fluoro, hydroxyl, amino, epoxy, oligoethylene glycol, phenyl, From the viewpoint of developability, the carboxyl group, acryl group, and methacryl group are preferably a hydroxyl group or an oligoethylene glycol group.

作為RE 中之芳基(芳香族環基),可例舉:1價芳香族烴環基、1價芳香族雜環基。其碳數較佳為4以上,更佳為6以上,又,較佳為24以下,更佳為22以下,進而較佳為20以下,尤佳為18以下。上述上限及下限可任意地組合,例如較佳為4~24,更佳為4~22,進而較佳為6~20,尤佳為6~18。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。 作為芳香族烴環基中之芳香族烴環,為單環或縮合環均可,例如可例舉:苯環、萘環、蒽環、菲環、苝環、稠四苯環、芘環、苯并芘環、

Figure 109144648-A0304-12-01
環、聯三伸苯環、乙烷合萘環、螢蒽環、茀環。 作為芳香族雜環基中之芳香族雜環基,為單環或縮合環均可,例如可例舉:呋喃環、苯并呋喃環、噻吩環、苯并噻吩環、吡咯環、吡唑環、咪唑環、㗁二唑環、吲哚環、咔唑環、吡咯并咪唑環、吡咯并吡唑環、吡咯并吡咯環、噻吩并吡咯環、噻吩并噻吩環、呋喃并吡咯環、呋喃并呋喃環、噻吩并呋喃環、苯并異㗁唑環、苯并異噻唑環、苯并咪唑環、吡啶環、吡𠯤環、嗒𠯤環、嘧啶環、三𠯤環、喹啉環、異喹啉環、㖕啉環、喹㗁啉環、啡啶環、呸啶環、喹唑啉環、喹唑啉酮環、薁環。該等中,就硬化性之觀點而言,較佳為苯環基、萘環基,更佳為苯環基。 作為芳基可具有之取代基,例如可例舉:甲基、乙基、丙基、甲氧基、乙氧基、氯基、溴基、氟基、羥基、胺基、環氧基、低聚乙二醇基、苯基、羧基,就顯影性之觀點而言,較佳為羥基、低聚乙二醇基。As R E of the aryl group (aromatic ring group), include: a monovalent aromatic hydrocarbon ring group, a monovalent aromatic heterocyclic group. The carbon number is preferably 4 or more, more preferably 6 or more, more preferably 24 or less, more preferably 22 or less, still more preferably 20 or less, and particularly preferably 18 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 4-24 are preferable, 4-22 are more preferable, 6-20 are still more preferable, and 6-18 are particularly preferable. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit. The aromatic hydrocarbon ring in the aromatic hydrocarbon ring group may be a single ring or a condensed ring, for example, a benzene ring, a naphthalene ring, an anthracene ring, a phenanthrene ring, a perylene ring, a fused tetraphenyl ring, a pyrene ring, Benzopyrene ring,
Figure 109144648-A0304-12-01
Ring, bis-terphenylene ring, ethane naphthalene ring, fluoranthene ring, pyrene ring. The aromatic heterocyclic group in the aromatic heterocyclic group may be a single ring or a condensed ring, for example: furan ring, benzofuran ring, thiophene ring, benzothiophene ring, pyrrole ring, pyrazole ring , Imidazole ring, oxadiazole ring, indole ring, carbazole ring, pyrroloimidazole ring, pyrrolopyrazole ring, pyrrolopyrrole ring, thienopyrrole ring, thienothiophene ring, furopyrrole ring, furo Furan ring, thienofuran ring, benzisoxazole ring, benzisothiazole ring, benzimidazole ring, pyridine ring, pyrimidine ring, pyrimidine ring, pyrimidine ring, tricyclic ring, quinoline ring, isoquine A quinoline ring, a oxoline ring, a quinoline ring, a phenanthridine ring, a piperidine ring, a quinazoline ring, a quinazolinone ring, and a azulene ring. Among these, from the viewpoint of curability, a benzene ring group and a naphthalene ring group are preferable, and a benzene ring group is more preferable. As the substituent that the aryl group may have, for example, methyl, ethyl, propyl, methoxy, ethoxy, chloro, bromo, fluoro, hydroxyl, amino, epoxy, low A polyethylene glycol group, a phenyl group, and a carboxyl group are preferably a hydroxyl group or an oligoethylene glycol group from the viewpoint of developability.

作為RE 中之烯基,可例舉:直鏈狀、支鏈狀或環狀之烯基。其碳數較佳為2以上,又,較佳為22以下,更佳為20以下,進而較佳為18以下,進而更佳為16以下,尤佳為14以下。例如較佳為2~22,更佳為2~20,進而較佳為2~18,進而更佳為2~16,尤佳為2~14。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。As the alkenyl group of R E, include: linear, branched or cyclic alkenyl group of. The carbon number is preferably 2 or more, more preferably 22 or less, more preferably 20 or less, still more preferably 18 or less, still more preferably 16 or less, and particularly preferably 14 or less. For example, it is preferably 2-22, more preferably 2-20, still more preferably 2-18, still more preferably 2-16, particularly preferably 2-14. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit.

作為烯基,例如可例舉:乙烯基、丙烯基、丁烯基、環己烯基。該等中,就硬化性之觀點而言,較佳為乙烯基、丙烯基,更佳為乙烯基。 作為烯基可具有之取代基,例如可例舉:甲氧基、乙氧基、氯基、溴基、氟基、羥基、胺基、環氧基、低聚乙二醇基、苯基、羧基,就顯影性之觀點而言,較佳為羥基、低聚乙二醇基。Examples of alkenyl groups include vinyl groups, propenyl groups, butenyl groups, and cyclohexenyl groups. Among these, from the viewpoint of curability, vinyl group and acrylic group are preferred, and vinyl group is more preferred. Examples of substituents that the alkenyl group may have include: methoxy, ethoxy, chloro, bromo, fluoro, hydroxyl, amino, epoxy, oligoethylene glycol, phenyl, The carboxyl group is preferably a hydroxyl group or an oligoethylene glycol group from the viewpoint of developability.

該等中,就顯影性之觀點而言,作為RE ,較佳為烷基、烯基,更佳為烷基,進而較佳為二環戊基。Among these, from the viewpoint of developability, R E is preferably an alkyl group and an alkenyl group, more preferably an alkyl group, and still more preferably a dicyclopentyl group.

於丙烯酸系共聚樹脂(b2-1)包含上述通式(I')所表示之部分結構之情形時,丙烯酸系共聚樹脂(b2-1)所包含之上述通式(I')所表示之部分結構之含量並無特別限定,較佳為0.5莫耳%以上,更佳為1莫耳%以上,進而較佳為1.5莫耳%以上,尤佳為2莫耳%以上,又,較佳為90莫耳%以下,更佳為70莫耳%以下,進而較佳為50%莫耳以下,進而更佳為30莫耳%以下,尤佳為10莫耳%以下。上述上限及下限可任意地組合,例如較佳為0.5~90莫耳%,更佳為0.5~70莫耳%,進而較佳為1~50%莫耳,進而更佳為1.5~30莫耳%,尤佳為2~10莫耳%。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。When the acrylic copolymer resin (b2-1) contains the partial structure represented by the general formula (I'), the acrylic copolymer resin (b2-1) contains the part represented by the general formula (I') The content of the structure is not particularly limited, and is preferably 0.5 mol% or more, more preferably 1 mol% or more, further preferably 1.5 mol% or more, particularly preferably 2 mol% or more, and more preferably 90 mol% or less, more preferably 70 mol% or less, still more preferably 50% mol% or less, still more preferably 30 mol% or less, particularly preferably 10 mol% or less. The above upper limit and lower limit can be combined arbitrarily, for example, 0.5 to 90 mol% is preferred, 0.5 to 70 mol% is more preferred, 1 to 50% mol is more preferred, and 1.5 to 30 mol% is more preferred %, particularly preferably 2-10 mol%. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit.

於丙烯酸系共聚樹脂(b2-1)包含上述通式(I)所表示之部分結構之情形時,就耐熱性、膜強度之觀點而言,較佳為進而包含下述通式(I'')所表示之部分結構。When the acrylic copolymer resin (b2-1) includes the partial structure represented by the above general formula (I), it is preferable to further include the following general formula (I'' from the viewpoint of heat resistance and film strength. ) Part of the structure.

[化40]

Figure 02_image083
[化40]
Figure 02_image083

上述式(I'')中,RF 表示氫原子或甲基,RG 表示可具有取代基之烷基、可具有取代基之烯基、羥基、羧基、鹵素原子、可具有取代基之烷氧基、硫醇基、或可具有取代基之烷基硫醚基。t表示0~5之整數。In the above formula (I''), R F represents a hydrogen atom or a methyl group, and R G represents an optionally substituted alkyl group, an optionally substituted alkenyl group, a hydroxyl group, a carboxyl group, a halogen atom, and an optionally substituted alkyl group. An oxy group, a thiol group, or an alkyl sulfide group which may have a substituent. t represents an integer of 0-5.

(RG ) 於上述式(I'')中,RG 表示可具有取代基之烷基、可具有取代基之烯基、羥基、羧基、鹵素原子、可具有取代基之烷氧基、硫醇基、或可具有取代基之烷基硫醚基。 作為RG 中之烷基,可例舉:直鏈狀、支鏈狀或環狀之烷基。其碳數較佳為1以上,更佳為3以上,進而較佳為5以上,又,較佳為20以下,更佳為18以下,進而較佳為16以下,進而更佳為14以下,尤佳為12以下。上述上限及下限可任意地組合,例如較佳為1~20,更佳為1~18,進而較佳為3~16,進而更佳為3~14,尤佳為5~12。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。(R G ) In the above formula (I''), R G represents an optionally substituted alkyl group, an optionally substituted alkenyl group, a hydroxyl group, a carboxyl group, a halogen atom, an optionally substituted alkoxy group, sulfur Alcohol group or alkyl sulfide group which may have a substituent. As R G of the group include: a linear, branched or cyclic alkyl group of. The carbon number is preferably 1 or more, more preferably 3 or more, still more preferably 5 or more, more preferably 20 or less, more preferably 18 or less, still more preferably 16 or less, and still more preferably 14 or less, Particularly preferably, it is 12 or less. The above upper limit and lower limit can be combined arbitrarily, for example, preferably 1-20, more preferably 1-18, still more preferably 3-16, still more preferably 3-14, and particularly preferably 5-12. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit.

作為烷基,例如可例舉:甲基、乙基、環己基、二環戊基、十二烷基。該等中,就顯影密接性之觀點而言,較佳為二環戊基、十二烷基,更佳為二環戊基。 作為烷基可具有之取代基,例如可例舉:甲氧基、乙氧基、氯基、溴基、氟基、羥基、胺基、環氧基、低聚乙二醇基、苯基、羧基、丙烯醯基、甲基丙烯醯基,就顯影性之觀點而言,較佳為羥基、低聚乙二醇基。As the alkyl group, for example, a methyl group, an ethyl group, a cyclohexyl group, a dicyclopentyl group, and a dodecyl group may be mentioned. Among these, from the viewpoint of development adhesiveness, dicyclopentyl and dodecyl are preferred, and dicyclopentyl is more preferred. Examples of substituents that the alkyl group may have include: methoxy, ethoxy, chloro, bromo, fluoro, hydroxyl, amino, epoxy, oligoethylene glycol, phenyl, From the viewpoint of developability, the carboxyl group, acryl group, and methacryl group are preferably a hydroxyl group or an oligoethylene glycol group.

作為RG 中之烯基,可例舉:直鏈狀、支鏈狀或環狀之烯基。其碳數較佳為2以上,又,較佳為22以下,更佳為20以下,進而較佳為18以下,進而更佳為16以下,尤佳為14以下。例如較佳為2~22,更佳為2~20,進而較佳為2~18,進而更佳為2~16,尤佳為2~14。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。As the alkenyl group of R G, include: linear, branched or cyclic alkenyl group of. The carbon number is preferably 2 or more, more preferably 22 or less, more preferably 20 or less, still more preferably 18 or less, still more preferably 16 or less, and particularly preferably 14 or less. For example, it is preferably 2-22, more preferably 2-20, still more preferably 2-18, still more preferably 2-16, particularly preferably 2-14. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit.

作為烯基,例如可例舉:乙烯基、丙烯基、丁烯基、環己烯基。該等中,就硬化性之觀點而言,較佳為乙烯基、丙烯基,更佳為乙烯基。 作為烯基可具有之取代基,例如可例舉:甲氧基、乙氧基、氯基、溴基、氟基、羥基、胺基、環氧基、低聚乙二醇基、苯基、羧基,就顯影性之觀點而言,較佳為羥基、低聚乙二醇基。Examples of alkenyl groups include vinyl groups, propenyl groups, butenyl groups, and cyclohexenyl groups. Among these, from the viewpoint of curability, vinyl group and acrylic group are preferred, and vinyl group is more preferred. Examples of substituents that the alkenyl group may have include: methoxy, ethoxy, chloro, bromo, fluoro, hydroxyl, amino, epoxy, oligoethylene glycol, phenyl, The carboxyl group is preferably a hydroxyl group or an oligoethylene glycol group from the viewpoint of developability.

作為RG 中之鹵素原子,可例舉:氟原子、氯原子、溴原子、碘原子,該等中,就撥墨性之觀點而言,較佳為氟原子。As the halogen atom in R G, include: a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, those in the ink will be allocated in terms of viewpoint, preferably fluorine atom.

作為RG 中之烷氧基,可例舉直鏈狀、支鏈狀或環狀之烷氧基。其碳數較佳為1以上,又,較佳為20以下,更佳為18以下,進而較佳為16以下,進而更佳為14以下,尤佳為12以下。例如較佳為1~20,更佳為1~18,進而較佳為1~16,進而更佳為1~14,尤佳為1~12。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。As the alkoxy group in R G , a linear, branched or cyclic alkoxy group may be mentioned. The carbon number is preferably 1 or more, more preferably 20 or less, more preferably 18 or less, still more preferably 16 or less, still more preferably 14 or less, and particularly preferably 12 or less. For example, it is preferably 1-20, more preferably 1-18, still more preferably 1-16, still more preferably 1-14, particularly preferably 1-12. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit.

作為烷氧基可具有之取代基,例如可例舉:甲氧基、乙氧基、氯基、溴基、氟基、羥基、胺基、環氧基、低聚乙二醇基、苯基、羧基、丙烯醯基、甲基丙烯醯基,就顯影性之觀點而言,較佳為羥基、低聚乙二醇基。As the substituent that the alkoxy group may have, for example, a methoxy group, an ethoxy group, a chloro group, a bromo group, a fluoro group, a hydroxyl group, an amino group, an epoxy group, an oligoethylene glycol group, and a phenyl group From the viewpoint of developability, carboxyl group, acryl group, and methacryl group are preferably a hydroxyl group or an oligoethylene glycol group.

作為RG 中之烷基硫醚基,可例舉:直鏈狀、支鏈狀或環狀之烷基硫醚基。其碳數較佳為1以上,又,較佳為20以下,更佳為18以下,進而較佳為16以下,進而更佳為14以下,尤佳為12以下。例如較佳為1~20,更佳為1~18,進而較佳為1~16,進而更佳為1~14,尤佳為1~12。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。The alkyl sulfide group in R G may, for example, be a linear, branched or cyclic alkyl sulfide group. The carbon number is preferably 1 or more, more preferably 20 or less, more preferably 18 or less, still more preferably 16 or less, still more preferably 14 or less, and particularly preferably 12 or less. For example, it is preferably 1-20, more preferably 1-18, still more preferably 1-16, still more preferably 1-14, particularly preferably 1-12. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit.

作為烷基硫醚基,例如可例舉:甲基硫醚基、乙基硫醚基、丙基硫醚基、丁基硫醚基。該等中,就顯影性之觀點而言,較佳為甲基硫醚基、乙基硫醚基。 作為烷基硫醚基中之烷基可具有之取代基,例如可例舉:甲氧基、乙氧基、氯基、溴基、氟基、羥基、胺基、環氧基、低聚乙二醇基、苯基、羧基、丙烯醯基、甲基丙烯醯基,就顯影性之觀點而言,較佳為羥基、低聚乙二醇基。As an alkyl sulfide group, a methyl sulfide group, an ethyl sulfide group, a propyl sulfide group, and a butyl sulfide group are mentioned, for example. Among these, from the viewpoint of developability, a methyl sulfide group and an ethyl sulfide group are preferred. As the substituent that the alkyl group in the alkyl sulfide group may have, for example, a methoxy group, an ethoxy group, a chlorine group, a bromine group, a fluoro group, a hydroxyl group, an amino group, an epoxy group, and an oligoethylene group may be mentioned. From the viewpoint of developability, the glycol group, phenyl group, carboxyl group, acryl group, and methacryl group are preferably a hydroxyl group or an oligoethylene glycol group.

該等中,就顯影性之觀點而言,作為RG ,較佳為羥基、羧基,更佳為羧基。Among these, from the viewpoint of developability, R G is preferably a hydroxyl group or a carboxyl group, and more preferably a carboxyl group.

(t) 於上述式(I'')中,t表示0~5之整數。就顯影性之觀點而言,較佳為0~2,更佳為0~1,進而較佳為0。(t) In the above formula (I''), t represents an integer of 0-5. From the viewpoint of developability, 0-2 is preferable, 0-1 is more preferable, and 0 is still more preferable.

於丙烯酸系共聚樹脂(b2-1)包含上述通式(I'')所表示之部分結構之情形時,丙烯酸系共聚樹脂(b2-1)所包含之上述通式(I'')所表示之部分結構之含量並無特別限定,較佳為1莫耳%以上,更佳為2莫耳%以上,進而較佳為3莫耳%以上,尤佳為5莫耳%以上,又,較佳為90莫耳%以下,更佳為70莫耳%以下,進而較佳為50莫耳%以下,進而更佳為30莫耳%以下,尤佳為20莫耳%以下,最佳為10莫耳%以下。上述上限及下限可任意地組合,例如較佳為1~90莫耳%,更佳為1~70莫耳%,進而較佳為2~50莫耳%,進而更佳為2~30莫耳%,尤佳為3~20莫耳%,最佳為5~10莫耳%。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。When the acrylic copolymer resin (b2-1) contains the partial structure represented by the above general formula (I''), the acrylic copolymer resin (b2-1) is represented by the above general formula (I'') The content of the part of the structure is not particularly limited, and is preferably 1 mol% or more, more preferably 2 mol% or more, further preferably 3 mol% or more, particularly preferably 5 mol% or more, and more It is preferably 90 mol% or less, more preferably 70 mol% or less, further preferably 50 mol% or less, still more preferably 30 mol% or less, particularly preferably 20 mol% or less, and most preferably 10 mol% Mole% or less. The above upper limit and lower limit can be combined arbitrarily, for example, preferably 1 to 90 mol%, more preferably 1 to 70 mol%, still more preferably 2 to 50 mol%, and even more preferably 2 to 30 mol% %, particularly preferably 3-20 mol%, most preferably 5-10 mol%. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit.

於丙烯酸系共聚樹脂(b2-1)包含上述通式(I)所表示之部分結構之情形時,就顯影性之觀點而言,較佳為進而包含下述通式(I''')所表示之部分結構。When the acrylic copolymer resin (b2-1) includes the partial structure represented by the above general formula (I), it is preferable to further include the following general formula (I''') from the viewpoint of developability Represents part of the structure.

[化41]

Figure 02_image085
[化41]
Figure 02_image085

上述式(I''')中,RH 表示氫原子或甲基。In the above formula (I'''), R H represents a hydrogen atom or a methyl group.

於丙烯酸系共聚樹脂(b2-1)包含上述通式(I''')所表示之部分結構之情形時,丙烯酸系共聚樹脂(b2-1)所包含之上述通式(I''')所表示之部分結構之含量並無特別限定,較佳為5莫耳%以上,更佳為10莫耳%以上,進而較佳為30莫耳%以上,又,較佳為90莫耳%以下,更佳為80莫耳%以下,進而較佳為70莫耳%以下,尤佳為50莫耳%以下。上述上限及下限可任意地組合,例如較佳為5~90莫耳%,更佳為5~80莫耳%,進而較佳為10~70莫耳%,尤佳為30~50莫耳%。藉由設為上述下限值以上,存在殘渣減少之傾向。又,藉由設為上述上限值以下,存在顯影密接性提昇之傾向。When the acrylic copolymer resin (b2-1) contains the partial structure represented by the above general formula (I'''), the above general formula (I''') contained in the acrylic copolymer resin (b2-1) The content of the partial structure shown is not particularly limited, and is preferably 5 mol% or more, more preferably 10 mol% or more, further preferably 30 mol% or more, and more preferably 90 mol% or less , More preferably 80 mol% or less, further preferably 70 mol% or less, and particularly preferably 50 mol% or less. The above upper limit and lower limit can be combined arbitrarily, for example, preferably 5 to 90 mol%, more preferably 5 to 80 mol%, further preferably 10 to 70 mol%, and particularly preferably 30 to 50 mol% . By setting it to be more than the above lower limit value, there is a tendency for residue to decrease. Moreover, by setting it as below the said upper limit, there exists a tendency for development adhesiveness to improve.

丙烯酸系共聚樹脂(b2)之酸值並無特別限定,較佳為5 mgKOH/g以上,更佳為10 mgKOH/g以上,進而較佳為20 mgKOH/g以上,進而更佳為25 mgKOH/g以上,又,較佳為100 mgKOH/g以下,更佳為80 mgKOH/g以下,進而較佳為60 mgKOH/g以下,進而更佳為40 mgKOH/g以下。上述上限及下限可任意地組合,例如較佳為5~100 mgKOH/g,更佳為10~80 mgKOH/g,進而較佳為20~60 mgKOH/g,進而更佳為25~40 mgKOH/g。藉由設為上述下限值以上,存在殘渣減少之傾向。又,藉由設為上述上限值以下,存在顯影密接性提昇之傾向。The acid value of the acrylic copolymer resin (b2) is not particularly limited, but is preferably 5 mgKOH/g or more, more preferably 10 mgKOH/g or more, still more preferably 20 mgKOH/g or more, and still more preferably 25 mgKOH/g g or more, more preferably 100 mgKOH/g or less, more preferably 80 mgKOH/g or less, still more preferably 60 mgKOH/g or less, and still more preferably 40 mgKOH/g or less. The above upper limit and lower limit can be combined arbitrarily, for example, preferably 5-100 mgKOH/g, more preferably 10-80 mgKOH/g, still more preferably 20-60 mgKOH/g, and still more preferably 25-40 mgKOH/g g. By setting it to be more than the above lower limit value, there is a tendency for residue to decrease. Moreover, by setting it as below the said upper limit, there exists a tendency for development adhesiveness to improve.

丙烯酸系共聚樹脂(b2)之重量平均分子量(Mw)並無特別限定,較佳為1000以上,更佳為2000以上,進而較佳為3000以上,進而更佳為4000以上,尤佳為5000以上,又,較佳為30000以下,更佳為20000以下,進而較佳為15000以下,進而更佳為10000以下。尤佳為8000以下。上述上限及下限可任意地組合,例如較佳為1000~30000,更佳為2000~20000,進而較佳為3000~15000,進而更佳為4000~10000,尤佳為5000~8000。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在殘渣減少之傾向。The weight average molecular weight (Mw) of the acrylic copolymer resin (b2) is not particularly limited, but is preferably 1,000 or more, more preferably 2,000 or more, still more preferably 3,000 or more, still more preferably 4,000 or more, and particularly preferably 5,000 or more Also, it is preferably 30,000 or less, more preferably 20,000 or less, still more preferably 15,000 or less, and still more preferably 10,000 or less. Especially preferably, it is below 8000. The above upper limit and lower limit can be combined arbitrarily, for example, preferably 1,000 to 30,000, more preferably 2,000 to 20,000, still more preferably 3,000 to 15,000, still more preferably 4,000 to 10,000, and particularly preferably 5,000 to 8,000. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, there is a tendency for residue to decrease by setting it below the above upper limit.

於(B)鹼可溶性樹脂包含丙烯酸系共聚樹脂(b2)之情形時,(B)鹼可溶性樹脂所包含之丙烯酸系共聚樹脂(b2)之含量並無特別限定,較佳為5質量%以上,更佳為10質量%以上,進而較佳為15質量%以上,尤佳為20質量%以上,又,通常較佳為100質量%以下,更佳為80質量%以下,進而較佳為50質量%以下。上述上限及下限可任意地組合,例如較佳為5~100質量%,更佳為10~100質量%,進而較佳為15~80質量%,尤佳為20~50質量%。藉由設為上述下限值以上,存在顯影溶解性變得良好之傾向。藉由設為上述上限值以下,存在錐角變高之傾向。When (B) the alkali-soluble resin contains the acrylic copolymer resin (b2), the content of the acrylic copolymer resin (b2) contained in the (B) alkali-soluble resin is not particularly limited, but is preferably 5 mass% or more, It is more preferably 10% by mass or more, still more preferably 15% by mass or more, particularly preferably 20% by mass or more, and generally preferably 100% by mass or less, more preferably 80% by mass or less, and still more preferably 50% by mass %the following. The above upper limit and lower limit can be combined arbitrarily, and for example, it is preferably from 5 to 100% by mass, more preferably from 10 to 100% by mass, still more preferably from 15 to 80% by mass, and particularly preferably from 20 to 50% by mass. By setting it as the above-mentioned lower limit or more, there exists a tendency for developing solubility to become favorable. By setting it below the above upper limit value, the taper angle tends to increase.

於(B)鹼可溶性樹脂中,可單獨包含環氧(甲基)丙烯酸酯樹脂(b1)及丙烯酸系共聚樹脂(b2)之任一者,亦可包含兩者。進而,於(B)鹼可溶性樹脂中亦可包含除鹼可溶性樹脂(b)以外之鹼可溶性樹脂。In (B) alkali-soluble resin, either epoxy (meth)acrylate resin (b1) and acrylic copolymer resin (b2) may be contained individually, and both may be contained. Furthermore, (B) alkali-soluble resin may contain alkali-soluble resin other than alkali-soluble resin (b).

關於本發明之感光性樹脂組合物中之(B)鹼可溶性樹脂之含量,於感光性樹脂組合物之總固形物成分中,較佳為5質量%以上,更佳為10質量%以上,進而較佳為20質量%以上,進而更佳為30質量%以上,尤佳為40質量%以上,又,較佳為90質量%以下,更佳為70質量%以下,進而較佳為60質量%以下,尤佳為50質量%以下。上述上限及下限可任意地組合,例如較佳為5~90質量%,更佳為10~90質量%,進而較佳為20~70質量%,進而更佳為30~60質量%,尤佳為40~50質量%。藉由設為上述下限值以上,存在顯影性提昇之傾向。又,藉由設為上述上限值以下,存在減少元件發光時之釋氣之傾向。Regarding the content of (B) alkali-soluble resin in the photosensitive resin composition of the present invention, in the total solid content of the photosensitive resin composition, it is preferably 5% by mass or more, more preferably 10% by mass or more, and further It is preferably 20% by mass or more, more preferably 30% by mass or more, particularly preferably 40% by mass or more, more preferably 90% by mass or less, more preferably 70% by mass or less, and still more preferably 60% by mass Below, it is especially preferable that it is 50 mass% or less. The above upper limit and lower limit can be combined arbitrarily, for example, preferably 5 to 90 mass%, more preferably 10 to 90 mass%, still more preferably 20 to 70 mass%, still more preferably 30 to 60 mass%, particularly preferably It is 40-50% by mass. By setting it as the above-mentioned lower limit or more, there exists a tendency for developability to improve. In addition, by setting it below the above upper limit value, there is a tendency to reduce outgassing when the device emits light.

於本發明之感光性樹脂組合物包含環氧(甲基)丙烯酸酯樹脂(b1)之情形時,環氧(甲基)丙烯酸酯樹脂(b1)之含量並無特別限定,於感光性樹脂組合物之總固形物成分中,較佳為5質量%以上,更佳為10質量%以上,進而較佳為20質量%以上,進而更佳為30質量%以上,尤佳為40質量%以上,又,較佳為90質量%以下,更佳為70質量%以下,進而較佳為60質量%以下,尤佳為50質量%以下。上述上限及下限可任意地組合,例如較佳為5~90質量%,更佳為10~90質量%,進而較佳為20~70質量%,進而更佳為30~60質量%,尤佳為40~50質量%。藉由設為上述下限值以上,存在顯影性提昇之傾向。又,藉由設為上述上限值以下,存在減少元件發光時之釋氣之傾向。When the photosensitive resin composition of the present invention contains the epoxy (meth)acrylate resin (b1), the content of the epoxy (meth)acrylate resin (b1) is not particularly limited, and is used in the photosensitive resin combination The total solid content of the substance is preferably 5% by mass or more, more preferably 10% by mass or more, still more preferably 20% by mass or more, still more preferably 30% by mass or more, and particularly preferably 40% by mass or more, Furthermore, it is preferably 90% by mass or less, more preferably 70% by mass or less, still more preferably 60% by mass or less, and particularly preferably 50% by mass or less. The above upper limit and lower limit can be combined arbitrarily, for example, preferably 5 to 90 mass%, more preferably 10 to 90 mass%, still more preferably 20 to 70 mass%, still more preferably 30 to 60 mass%, particularly preferably It is 40-50% by mass. By setting it as the above-mentioned lower limit or more, there exists a tendency for developability to improve. In addition, by setting it below the above upper limit value, there is a tendency to reduce outgassing when the device emits light.

又,於本發明之感光性樹脂組合物包含丙烯酸系共聚樹脂(b2)之情形時,丙烯酸系共聚樹脂(b2)之含量並無特別限定,於感光性樹脂組合物之總固形物成分中,較佳為5質量%以上,更佳為10質量%以上,進而較佳為20質量%以上,進而更佳為30質量%以上,尤佳為40質量%以上,又,較佳為90質量%以下,更佳為70質量%以下,進而較佳為60質量%以下,尤佳為50質量%以下。上述上限及下限可任意地組合,例如較佳為5~90質量%,更佳為10~90質量%,進而較佳為20~70質量%,進而更佳為30~60質量%,尤佳為40~50質量%。藉由設為上述下限值以上,存在顯影性提昇之傾向。又,藉由設為上述上限值以下,存在減少元件發光時之釋氣之傾向。In addition, when the photosensitive resin composition of the present invention contains the acrylic copolymer resin (b2), the content of the acrylic copolymer resin (b2) is not particularly limited, and is based on the total solid content of the photosensitive resin composition. It is preferably 5% by mass or more, more preferably 10% by mass or more, still more preferably 20% by mass or more, still more preferably 30% by mass or more, particularly preferably 40% by mass or more, and more preferably 90% by mass Hereinafter, it is more preferably 70% by mass or less, still more preferably 60% by mass or less, and particularly preferably 50% by mass or less. The above upper limit and lower limit can be combined arbitrarily, for example, preferably 5 to 90 mass%, more preferably 10 to 90 mass%, still more preferably 20 to 70 mass%, still more preferably 30 to 60 mass%, particularly preferably It is 40-50% by mass. By setting it as the above-mentioned lower limit or more, there exists a tendency for developability to improve. In addition, by setting it below the above upper limit value, there is a tendency to reduce outgassing when the device emits light.

又,感光性樹脂組合物之總固形物成分中之(B)鹼可溶性樹脂及(C)光聚合性化合物之含量之合計較佳為5質量%以上,更佳為10質量%以上,進而較佳為30質量%以上,進而更佳為50質量%以上,尤佳為70質量%以上,進而尤佳為80質量%以上,最佳為90質量%以上,又,較佳為99質量%以下,更佳為97質量%以下,進而較佳為95質量%以下。上述上限及下限可任意地組合,例如較佳為5~99質量%,更佳為10~99質量%,進而較佳為30~99質量%,進而更佳為50~97質量%,尤其較佳為70~97質量%,尤佳為80~95質量%,最佳為90~95質量%。藉由設為上述下限值以上,存在硬化性提昇之傾向。又,藉由設為上述上限值以下,存在元件發光時之釋氣減少之傾向。In addition, the total content of (B) alkali-soluble resin and (C) photopolymerizable compound in the total solid content of the photosensitive resin composition is preferably 5% by mass or more, more preferably 10% by mass or more, and more It is preferably 30% by mass or more, more preferably 50% by mass or more, particularly preferably 70% by mass or more, still more preferably 80% by mass or more, most preferably 90% by mass or more, and more preferably 99% by mass or less , More preferably 97% by mass or less, and still more preferably 95% by mass or less. The above upper limit and lower limit can be combined arbitrarily, for example, preferably 5 to 99 mass%, more preferably 10 to 99 mass%, still more preferably 30 to 99 mass%, still more preferably 50 to 97 mass%, especially It is preferably 70 to 97% by mass, particularly preferably 80 to 95% by mass, and most preferably 90 to 95% by mass. By setting it as the above lower limit value or more, there exists a tendency for hardenability to improve. In addition, by setting it below the above upper limit value, outgassing when the device emits light tends to decrease.

作為感光性樹脂組合物中之(B)鹼可溶性樹脂相對於(C)光聚合性化合物之調配比,相對於(C)光聚合性化合物100質量份,較佳為50質量份以上,更佳為60質量份以上,進而較佳為70質量份以上,尤佳為80質量份以上,又,較佳為400質量份以下,更佳為300質量份以下,進而較佳為200質量份以下,尤佳為120質量份以下。所有上限及下限可任意地組合,例如較佳為50~400質量份,更佳為60~300質量份,進而較佳為70~200質量份,尤佳為80~120質量份。藉由設為上述下限值以上,存在顯影密接性提昇之傾向。又,藉由設為上述上限值以下,存在硬化性提昇之傾向。The blending ratio of (B) alkali-soluble resin to (C) photopolymerizable compound in the photosensitive resin composition is preferably 50 parts by mass or more with respect to 100 parts by mass of (C) photopolymerizable compound, more preferably 60 parts by mass or more, more preferably 70 parts by mass or more, particularly preferably 80 parts by mass or more, more preferably 400 parts by mass or less, more preferably 300 parts by mass or less, and still more preferably 200 parts by mass or less, Particularly preferably, it is 120 parts by mass or less. All upper and lower limits can be combined arbitrarily, for example, preferably 50-400 parts by mass, more preferably 60-300 parts by mass, still more preferably 70-200 parts by mass, and particularly preferably 80-120 parts by mass. By setting it as the above-mentioned lower limit or more, there exists a tendency for development adhesiveness to improve. In addition, by setting it below the above upper limit value, there is a tendency for the curability to improve.

[1-1-3](C)成分:光聚合性化合物 本發明之感光性樹脂組合物含有(C)光聚合性化合物。認為藉由包含(C)光聚合性化合物,會成為高感度。 作為此處所使用之光聚合性化合物,意指分子內具有1個以上乙烯性不飽和鍵(乙烯性雙鍵)之化合物,就聚合性、交聯性、及與之相伴之能夠擴大曝光部與非曝光部之顯影液溶解性之差異等方面而言,較佳為分子內具有2個以上乙烯性不飽和鍵之化合物。又,該不飽和鍵進而較佳為源自(甲基)丙烯醯氧基,即,(甲基)丙烯酸酯化合物。[1-1-3] (C) Component: Photopolymerizable compound The photosensitive resin composition of this invention contains (C) a photopolymerizable compound. It is thought that by containing (C) a photopolymerizable compound, it will become high sensitivity. As the photopolymerizable compound used here, it means a compound having one or more ethylenically unsaturated bonds (ethylenic double bond) in the molecule, and can expand the exposure area and the exposure area in terms of polymerizability, crosslinking properties, and the accompanying In terms of the difference in the solubility of the developer in the non-exposed part, etc., a compound having two or more ethylenic unsaturated bonds in the molecule is preferred. In addition, the unsaturated bond is more preferably derived from a (meth)acryloyloxy group, that is, a (meth)acrylate compound.

於本發明之感光性樹脂組合物中,尤其理想的是使用1分子中具有2個以上乙烯性不飽和鍵之多官能乙烯性單體。多官能乙烯性單體具有之乙烯性不飽和基之數量並無特別限定,較佳為2個以上,更佳為3個以上,進而較佳為4個以上,尤佳為5個以上,又,較佳為15個以下,更佳為10個以下,進而較佳為8個以下,尤佳為7個以下。上述上限及下限可任意地組合,例如較佳為2~15個,更佳為3~10個,進而較佳為4~8個,尤佳為5~7個。藉由設為上述下限值以上,聚合性會提昇,存在成為高感度之傾向。藉由設為上述上限值以下,存在顯影性變得更良好之傾向。 作為光聚合性化合物,例如可例舉:脂肪族多羥基化合物與不飽和羧酸之酯;芳香族多羥基化合物與不飽和羧酸之酯;藉由脂肪族多羥基化合物、芳香族多羥基化合物等多元羥基化合物與不飽和羧酸及多元羧酸之酯化反應而獲得之酯。In the photosensitive resin composition of the present invention, it is particularly desirable to use a multifunctional ethylenic monomer having two or more ethylenic unsaturated bonds in one molecule. The number of ethylenically unsaturated groups possessed by the multifunctional ethylenic monomer is not particularly limited, and is preferably 2 or more, more preferably 3 or more, more preferably 4 or more, particularly preferably 5 or more, and , Preferably 15 or less, more preferably 10 or less, still more preferably 8 or less, and particularly preferably 7 or less. The above upper limit and lower limit can be combined arbitrarily, for example, preferably 2-15, more preferably 3-10, still more preferably 4-8, and particularly preferably 5-7. By setting it as the above-mentioned lower limit or more, polymerizability will improve, and there exists a tendency to become high sensitivity. By setting it as the above upper limit or less, there exists a tendency for developability to become more favorable. As the photopolymerizable compound, for example, an aliphatic polyhydroxy compound and an unsaturated carboxylic acid ester; an aromatic polyhydroxy compound and an unsaturated carboxylic acid ester; an aliphatic polyhydroxy compound, an aromatic polyhydroxy compound It is an ester obtained by the esterification reaction of a polyvalent hydroxyl compound with an unsaturated carboxylic acid and a polyvalent carboxylic acid.

作為脂肪族多羥基化合物與不飽和羧酸之酯,例如可例舉:乙二醇二丙烯酸酯、三乙二醇二丙烯酸酯、三羥甲基丙烷三丙烯酸酯、三羥甲基乙烷三丙烯酸酯、季戊四醇二丙烯酸酯、季戊四醇三丙烯酸酯、季戊四醇四丙烯酸酯、二季戊四醇四丙烯酸酯、二季戊四醇五丙烯酸酯、二季戊四醇六丙烯酸酯、丙烯酸甘油酯等脂肪族多羥基化合物之丙烯酸酯;將該等化合物之丙烯酸酯替代為甲基丙烯酸酯而得之甲基丙烯酸酯;將該等化合物之丙烯酸酯替代為伊康酸酯而得之伊康酸酯;將該等化合物之丙烯酸酯替代為巴豆酸酯而得之丁烯酸酯;將該等化合物之丙烯酸酯替代為順丁烯二酸酯而得之順丁烯二酸酯。As esters of aliphatic polyhydroxy compounds and unsaturated carboxylic acids, for example, ethylene glycol diacrylate, triethylene glycol diacrylate, trimethylolpropane triacrylate, trimethylolethane triacrylate may be mentioned. Acrylates of aliphatic polyhydroxy compounds such as acrylate, pentaerythritol diacrylate, pentaerythritol triacrylate, pentaerythritol tetraacrylate, dipentaerythritol tetraacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, glycerol acrylate, etc.; Methacrylate obtained by substituting methacrylate for the acrylate of these compounds; Iconate obtained by substituting the acrylate of these compounds with itconate; Substituting the acrylate of these compounds with Crotonic acid ester derived from crotonate; maleic acid ester derived from replacing the acrylate of these compounds with maleic acid ester.

作為芳香族多羥基化合物與不飽和羧酸之酯,例如可例舉:對苯二酚二丙烯酸酯、對苯二酚二甲基丙烯酸酯、間苯二酚二丙烯酸酯、間苯二酚二甲基丙烯酸酯、鄰苯三酚三丙烯酸酯等芳香族多羥基化合物之丙烯酸酯及甲基丙烯酸酯。 作為藉由脂肪族多羥基化合物、芳香族多羥基化合物等多元羥基化合物與不飽和羧酸及多元羧酸之酯化反應而獲得之酯,不一定為單一物質,例如可例舉:丙烯酸、鄰苯二甲酸、及乙二醇之縮合物;丙烯酸、順丁烯二酸、及二乙二醇之縮合物;甲基丙烯酸、對苯二甲酸及季戊四醇之縮合物;丙烯酸、己二酸、丁二醇及甘油之縮合物。As esters of aromatic polyhydroxy compounds and unsaturated carboxylic acids, for example, hydroquinone diacrylate, hydroquinone dimethacrylate, resorcinol diacrylate, resorcinol diacrylate, Acrylate and methacrylate of aromatic polyhydroxy compounds such as methacrylate and pyrogallol triacrylate. The ester obtained by the esterification reaction of a polyhydric hydroxy compound such as aliphatic polyhydroxy compound and aromatic polyhydric compound with unsaturated carboxylic acid and polycarboxylic acid is not necessarily a single substance. For example, acrylic acid, ortho Condensate of phthalic acid and ethylene glycol; Condensate of acrylic acid, maleic acid, and diethylene glycol; Condensate of methacrylic acid, terephthalic acid and pentaerythritol; Acrylic acid, adipic acid, butane Condensate of glycol and glycerin.

作為本發明之感光性樹脂組合物所使用之光聚合性化合物之除上述以外之例,例如有用的是如使多元醇及含羥基(甲基)丙烯酸酯與聚異氰酸酯化合物及含羥基(甲基)丙烯酸酯或聚異氰酸酯化合物進行反應而獲得之胺基甲酸酯(甲基)丙烯酸酯類;多元環氧化合物與含羥基(甲基)丙烯酸酯或(甲基)丙烯酸之加成反應物之類之環氧丙烯酸酯類;伸乙基雙丙烯醯胺等丙烯醯胺類;鄰苯二甲酸二烯丙酯等烯丙基酯類;鄰苯二甲酸二乙烯酯等之含乙烯基化合物。 作為胺基甲酸酯(甲基)丙烯酸酯類,例如可例舉:DPHA-40H、UX-5000、UX-5002D-P20、UX-5003D、UX-5005(日本化藥公司製造)、U-2PPA、U-6LPA、U-10PA、U-33H、UA-53H、UA-32P、UA-1100H(新中村化學工業公司製造)、UA-306H、UA-510H、UF-8001G(協榮社化學公司製造)、UV-1700B、UV-7600B、UV-7605B、UV-7630B、UV7640B(日本合成化學工業公司製造)。As examples of the photopolymerizable compound used in the photosensitive resin composition of the present invention other than the above, for example, it is useful to combine polyols and hydroxyl-containing (meth)acrylates with polyisocyanate compounds and hydroxyl-containing (methyl) ) Urethane (meth)acrylates obtained by reacting acrylate or polyisocyanate compounds; among the addition reactants of polyepoxy compounds and hydroxyl-containing (meth)acrylate or (meth)acrylic acid Class epoxy acrylates; acrylamides such as ethylene bisacrylamide; allyl esters such as diallyl phthalate; vinyl-containing compounds such as divinyl phthalate. As urethane (meth)acrylates, for example, DPHA-40H, UX-5000, UX-5002D-P20, UX-5003D, UX-5005 (manufactured by Nippon Kayaku Co., Ltd.), U- 2PPA, U-6LPA, U-10PA, U-33H, UA-53H, UA-32P, UA-1100H (manufactured by Shinnakamura Chemical Industry Co., Ltd.), UA-306H, UA-510H, UF-8001G (Kyoeisha Chemical Company manufacture), UV-1700B, UV-7600B, UV-7605B, UV-7630B, UV7640B (manufactured by Nippon Synthetic Chemical Industry Co., Ltd.).

該等中,就合適之錐角及感度之觀點而言,作為(C)光聚合性化合物,較佳為使用酯系(甲基)丙烯酸酯類或胺基甲酸酯(甲基)丙烯酸酯類,更佳為使用二季戊四醇六(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、鄰苯二甲酸2-三(甲基)丙烯醯氧基甲基乙酯、季戊四醇四(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯之二元酸酐加成物、季戊四醇三(甲基)丙烯酸酯之二元酸酐加成物。 該等可單獨使用1種,亦可將2種以上併用。Among them, from the viewpoint of suitable taper angle and sensitivity, as (C) the photopolymerizable compound, it is preferable to use ester-based (meth)acrylates or urethane (meth)acrylates It is more preferable to use dipentaerythritol hexa(meth)acrylate, dipentaerythritol penta(meth)acrylate, 2-tri(meth)acryloyloxymethyl phthalate, and pentaerythritol tetra(meth)acrylate. Base) acrylate, pentaerythritol tri(meth)acrylate, dipentaerythritol penta(meth)acrylate dibasic anhydride adduct, pentaerythritol tri(meth)acrylate dibasic anhydride adduct. These may be used individually by 1 type, and may use 2 or more types together.

於本發明之感光性樹脂組合物中,(C)光聚合性化合物之分子量並無特別限定,就感度、撥墨性、錐角之觀點而言,較佳為100以上,更佳為150以上,進而較佳為200以上,進而更佳為300以上,尤佳為400以上,最佳為500以上,較佳為1000以下,更佳為700以下。上述上限及下限可任意地組合,例如較佳為100~1000,更佳為150~1000,進而較佳為200~1000,進而更佳為300~700,尤佳為400~700,最佳為500~700。 (C)光聚合性化合物之碳數並無特別限定,就感度、撥墨性、錐角之觀點而言,較佳為7以上,更佳為10以上,進而較佳為15以上,進而更佳為20以上,尤佳為25以上,較佳為50以下,更佳為40以下,進而較佳為35以下,尤佳為30以下。上述上限及下限可任意地組合,例如較佳為7~50,更佳為10~50,進而較佳為15~40,進而更佳為20~35,尤佳為25~30。 就感度、撥墨性、錐角之觀點而言,較佳為酯系(甲基)丙烯酸酯類、環氧(甲基)丙烯酸酯類、及胺基甲酸酯(甲基)丙烯酸酯類,其中,進而較佳為季戊四醇四(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯等3官能以上之酯系(甲基)丙烯酸酯類、鄰苯二甲酸2,2,2-三(甲基)丙烯醯氧基甲基乙酯、二季戊四醇五(甲基)丙烯酸酯之二元酸酐加成物等對3官能以上之酯系(甲基)丙烯酸酯類加成酸酐而得之加成物。In the photosensitive resin composition of the present invention, the molecular weight of the (C) photopolymerizable compound is not particularly limited, but from the viewpoints of sensitivity, ink repellency, and taper angle, it is preferably 100 or more, more preferably 150 or more , More preferably 200 or more, still more preferably 300 or more, particularly preferably 400 or more, most preferably 500 or more, preferably 1000 or less, more preferably 700 or less. The above upper limit and lower limit can be combined arbitrarily, for example, preferably 100-1000, more preferably 150-1000, still more preferably 200-1000, still more preferably 300-700, particularly preferably 400-700, most preferably 500~700. (C) The carbon number of the photopolymerizable compound is not particularly limited. From the viewpoints of sensitivity, ink repellency, and taper angle, it is preferably 7 or more, more preferably 10 or more, still more preferably 15 or more, and still more It is preferably 20 or more, particularly preferably 25 or more, more preferably 50 or less, more preferably 40 or less, still more preferably 35 or less, and particularly preferably 30 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 7-50 are preferable, 10-50 are more preferable, 15-40 are still more preferable, 20-35 are still more preferable, and 25-30 are especially preferable. From the viewpoints of sensitivity, ink repellency, and taper angle, ester-based (meth)acrylates, epoxy (meth)acrylates, and urethane (meth)acrylates are preferred Among them, pentaerythritol tetra(meth)acrylate, pentaerythritol tri(meth)acrylate, dipentaerythritol hexa(meth)acrylate, dipentaerythritol penta(meth)acrylate, etc. are more preferred Series of (meth)acrylates, 2,2,2-tris(meth)acryloxymethyl ethyl phthalate, dipentaerythritol penta(meth)acrylate dibasic acid anhydride adducts, etc. An adduct obtained by adding an acid anhydride to a trifunctional or higher ester-based (meth)acrylate.

關於本發明之感光性樹脂組合物中之(C)光聚合性化合物之含量,於感光性樹脂組合物之總固形物成分中較佳為5質量%以上,更佳為10質量%以上,進而較佳為20質量%以上,進而更佳為30質量%以上,尤佳為40質量%以上,又,較佳為80質量%以下,更佳為70質量%以下,進而較佳為60質量%以下,進而更佳為55質量%以下,尤佳為50質量%以下。上述上限及下限可任意地組合,例如較佳為5~80質量%,更佳為10~70質量%,進而較佳為20~60質量%,進而更佳為30~55質量%,尤佳為40~50質量%。藉由設為上述下限值以上,存在成為合適之內部硬化性之傾向。藉由設為上述上限值以下,存在顯影性變得良好之傾向。Regarding the content of the (C) photopolymerizable compound in the photosensitive resin composition of the present invention, in the total solid content of the photosensitive resin composition, it is preferably 5% by mass or more, more preferably 10% by mass or more, and further It is preferably 20% by mass or more, still more preferably 30% by mass or more, particularly preferably 40% by mass or more, more preferably 80% by mass or less, more preferably 70% by mass or less, and still more preferably 60% by mass Hereinafter, it is more preferably 55% by mass or less, and particularly preferably 50% by mass or less. The above upper limit and lower limit can be combined arbitrarily, for example, preferably 5 to 80% by mass, more preferably 10 to 70% by mass, still more preferably 20 to 60% by mass, still more preferably 30 to 55% by mass, particularly preferably It is 40-50% by mass. By setting it as the above-mentioned lower limit or more, there exists a tendency to become a suitable internal hardening property. By setting it as the said upper limit or less, developability tends to become favorable.

[1-1-4](D)成分:撥液劑 本發明之感光性樹脂組合物中之(D)撥液劑含有包含以下之下述通式(II)所表示之重複單元及氟原子之丙烯酸系樹脂(D1)。[1-1-4] (D) Component: Liquid repellent The (D) liquid repellent in the photosensitive resin composition of the present invention contains an acrylic resin (D1) containing a repeating unit represented by the following general formula (II) and a fluorine atom.

[化42]

Figure 02_image087
[化42]
Figure 02_image087

(式(II)中,R11 分別獨立地表示氫原子或甲基,R12 表示可具有取代基之碳數2~6之烷基,可被-O-、-C(=O)-、-S-、-NH-之任一者以上中斷;*表示鍵結部)(In formula (II), R 11 each independently represents a hydrogen atom or a methyl group, and R 12 represents an optionally substituted alkyl group having 2 to 6 carbon atoms, which may be substituted by -O-, -C(=O)-, Any one of -S-, -NH- is interrupted; * indicates the bonding part)

R12 之烷基所具有之碳數通常為2以上,較佳為碳數4以上,又,通常為6以下,較佳為5以下。上述上限及下限可任意地組合,例如較佳為2~6,更佳為4~5。藉由設為上述下限值以上,合成變得容易。又,藉由設為上述上限值以下,乙烯性不飽和鍵之自由度變高,存在硬化性、撥液性變好之傾向。 又,R12 之烷基可被-O-、-C(=O)-、-S-、-NH-之任一者以上中斷;作為又一形態,可被-O-、-C(=O)-、或-NH-中斷,作為進而又一形態,可被-O-C(=O)-NH-中斷。The carbon number of the alkyl group of R 12 is usually 2 or more, preferably 4 or more carbon atoms, and usually 6 or less, preferably 5 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 2-6 are preferable, and 4-5 are more preferable. By setting it as the above lower limit or more, synthesis becomes easy. Moreover, by setting it to the above upper limit or less, the degree of freedom of the ethylenic unsaturated bond becomes high, and there exists a tendency for hardenability and liquid repellency to improve. In addition, the alkyl group of R 12 may be interrupted by any one or more of -O-, -C(=O)-, -S-, and -NH-; as another form, it may be interrupted by -O-, -C(= O)- or -NH- interruption, as yet another form, can be interrupted by -OC(=O)-NH-.

於R12 具有取代基之情形時,作為取代基,例如可例舉:羥基、碳數1~3之烷氧基。較佳為未經取代、或經羥基取代,更佳為未經取代。When R 12 has a substituent, examples of the substituent include a hydroxyl group and an alkoxy group having 1 to 3 carbon atoms. It is preferably unsubstituted or substituted with a hydroxyl group, more preferably unsubstituted.

作為R12 ,就撥液性之方面而言,較佳為-(C2 H4 )2 -NHCOO-(C2 H4 )2 -、-(CH)2 -CHOH-(CH2 )-所表示之基,更佳為-(C2 H4 )2 -NHCOO-(C2 H4 )2 -所表示之基。As R 12 , in terms of liquid repellency, -(C 2 H 4 ) 2 -NHCOO-(C 2 H 4 ) 2 -, -(CH) 2 -CHOH-(CH 2 )- The group represented is more preferably the group represented by -(C 2 H 4 ) 2 -NHCOO-(C 2 H 4 ) 2 -.

由於藉由含有丙烯酸系樹脂(D1)能夠對所獲得之阻隔壁之表面賦予撥墨性(撥液性),因此認為:於用噴墨製作有機電致發光元件時,可預防墨水附著於阻隔壁,又,能夠預防注入至鄰接之區域間之墨水彼此混合。Since it is possible to impart ink repellency (liquid repellency) to the surface of the barrier wall obtained by containing acrylic resin (D1), it is believed that when the organic electroluminescent element is produced by inkjet, the ink can be prevented from adhering to the barrier. The wall, in addition, can prevent the ink injected into the adjacent areas from mixing with each other.

認為:藉由使用具有如通式(II)之乙烯性不飽和基之撥液劑,於對所形成之塗佈膜進行曝光時能夠加速在其表面之交聯反應,撥液劑不易於顯影處理時流出,其結果,能夠使所獲得之阻隔壁表現出較高之撥墨性。It is believed that by using a liquid repellent having an ethylenically unsaturated group as the general formula (II), the crosslinking reaction on the surface of the formed coating film can be accelerated when the formed coating film is exposed, and the liquid repellent is not easy to develop It flows out during processing, and as a result, the obtained barrier wall can exhibit high ink repellency.

由於為含有氟原子之樹脂,故而含有氟原子之樹脂會於阻隔壁之表面配向,存在會發揮防止油墨之暈開或混色之作用的傾向。更詳細而言,具有氟原子之基排斥油墨,存在會發揮防止因油墨越過阻隔壁進入至鄰接之區域而引起之油墨之暈開或混色之作用的傾向。Since it is a resin containing fluorine atoms, the resin containing fluorine atoms is aligned on the surface of the barrier wall, and there is a tendency to play a role in preventing blooming or color mixing of the ink. In more detail, the radicals having fluorine atoms repel the ink and tend to play a role in preventing the blooming or color mixing of the ink caused by the ink crossing the barrier wall and entering the adjacent area.

丙烯酸系樹脂(D1)較佳為具有氟烷基及氟伸烷基之任一者或兩者,更佳為具有全氟烷基及全氟伸烷基醚鏈之任一者或兩者。藉由具有氟烷基及氟伸烷基之任一者或兩者、或者全氟烷基及全氟伸烷基醚鏈之任一者或兩者,存在如下傾向:含有氟原子之樹脂更容易於阻隔壁之表面配向,表現出更高之撥墨性,進一步防止油墨之暈開或混色。The acrylic resin (D1) preferably has either or both of a fluoroalkyl group and a fluoroalkylene group, and more preferably has either or both of a perfluoroalkyl group and a perfluoroalkylene ether chain. By having either or both of the fluoroalkyl group and the fluoroalkylene group, or either or both of the perfluoroalkyl group and the perfluoroalkylene ether chain, there is a tendency that the resin containing a fluorine atom is more It is easy to align on the surface of the barrier wall, showing higher ink repellency, and further preventing ink blooming or color mixing.

作為全氟烷基,例如可例舉:全氟丁基、全氟己基、全氟辛基。 作為全氟伸烷基醚鏈,例如可例舉-CF2 -O-、-(CF2 )2 -O-、-(CF2 )3 -O-、-CF2 -C(CF3 )O-、-C(CF3 )-CF2 -O-及具有該等重複單元之2價基。Examples of perfluoroalkyl groups include perfluorobutyl, perfluorohexyl, and perfluorooctyl. As the perfluoroalkylene ether chain, for example, -CF 2 -O-, -(CF 2 ) 2 -O-, -(CF 2 ) 3 -O-, -CF 2 -C(CF 3 )O -, -C(CF 3 )-CF 2 -O- and divalent groups having these repeating units.

丙烯酸系樹脂(D1)亦可具有除通式(II)所表示之重複單元或包含氟原子之結構單元以外之結構單元。例如可例舉:包含環氧基之結構單元、包含羧基之結構單元、具有環氧烷鏈之結構單元。The acrylic resin (D1) may have structural units other than the repeating unit represented by the general formula (II) or the structural unit containing a fluorine atom. For example, a structural unit containing an epoxy group, a structural unit containing a carboxyl group, and a structural unit having an alkylene oxide chain can be exemplified.

作為丙烯酸系樹脂(D1)之市售品,可使用DIC公司製造之以「MEGAFAC(註冊商標;以下相同)RS-72-K」、「MEGAFAC RS-90」等商品名而市售之含氟有機化合物。As a commercial product of acrylic resin (D1), fluorine-containing products commercially available under the trade names of "MEGAFAC (registered trademark; the same below) RS-72-K" and "MEGAFAC RS-90" manufactured by DIC can be used Organic compounds.

丙烯酸系樹脂(D1)中之氟原子含量並無特別限制,於丙烯酸系樹脂(D1)中,較佳為5質量%以上,更佳為10質量%以上,進而較佳為20質量%以上,進而更佳為25質量%以上。又,較佳為50質量%以下,更佳為35質量%以下。上述上限及下限可任意地組合,例如較佳為1~50質量%,更佳為10~50質量%,進而較佳為20~35質量%,進而更佳為25~35質量%。藉由設為上述下限值以上,容易確保較高之接觸角,又,藉由設為上述上限值以下,存在能夠抑制向像素部流出之傾向。The content of fluorine atoms in the acrylic resin (D1) is not particularly limited. In the acrylic resin (D1), it is preferably 5% by mass or more, more preferably 10% by mass or more, and even more preferably 20% by mass or more, Furthermore, it is more preferable that it is 25 mass% or more. Furthermore, it is preferably 50% by mass or less, and more preferably 35% by mass or less. The above upper limit and lower limit can be combined arbitrarily, and for example, it is preferably 1-50% by mass, more preferably 10-50% by mass, still more preferably 20-35% by mass, and still more preferably 25-35% by mass. By setting it as above the lower limit value, it is easy to ensure a high contact angle, and by setting it as below the upper limit value, there is a tendency that outflow to the pixel portion can be suppressed.

丙烯酸系樹脂(D1)之分子量並無特別限制,為低分子量之化合物、或高分子量體均可。較佳為高分子量體,其原因在於可抑制因後烘烤引起之流動性,能夠抑制自阻隔壁之流出,就該觀點而言,丙烯酸系樹脂(D1)之重量平均分子量較佳為100以上,更佳為500以上,較佳為100000以下,更佳為10000以下。上述上限及下限可任意地組合,例如較佳為100~100000,更佳為500~10000。The molecular weight of the acrylic resin (D1) is not particularly limited, and it may be a low-molecular-weight compound or a high-molecular-weight compound. A high-molecular-weight body is preferred because it can suppress fluidity caused by post-baking and can suppress outflow from the barrier wall. From this point of view, the weight average molecular weight of the acrylic resin (D1) is preferably 100 or more , More preferably 500 or more, more preferably 100,000 or less, more preferably 10,000 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 100 to 100,000 are preferred, and 500 to 10,000 are more preferred.

丙烯酸系樹脂(D1)可單獨使用1種,亦可將2種以上併用。Acrylic resin (D1) may be used individually by 1 type, and may use 2 or more types together.

於本發明中,亦可併用除丙烯酸系樹脂(D1)以外之撥液劑作為(D)撥液劑。In the present invention, a liquid repellent other than the acrylic resin (D1) may be used in combination as the (D) liquid repellent.

本發明之感光性樹脂組合物中之(D)撥液劑之含量並無特別限定,於感光性樹脂組合物之總固形物成分中,較佳為0.01質量%以上,更佳為0.05質量%以上,進而較佳為0.1質量%以上,尤佳為0.2質量%以上,又,較佳為5質量%以下,更佳為3質量%以下,進而較佳為1質量%以下。上述上限及下限可任意地組合,例如較佳為0.01~5質量%較佳,更佳為0.05~5質量%,進而較佳為0.1~3質量%,尤佳為0.2~1質量%。藉由設為上述下限值以上,存在撥墨性提昇之傾向。又,藉由設為上述上限值以下,於阻隔壁形成後將墨水塗佈於像素部時,存在容易獲得均勻之塗膜之傾向。The content of the (D) liquid repellent in the photosensitive resin composition of the present invention is not particularly limited. In the total solid content of the photosensitive resin composition, it is preferably 0.01% by mass or more, more preferably 0.05% by mass Above, it is more preferably 0.1% by mass or more, particularly preferably 0.2% by mass or more, more preferably 5% by mass or less, more preferably 3% by mass or less, and still more preferably 1% by mass or less. The above upper limit and lower limit can be combined arbitrarily, for example, 0.01 to 5 mass% is preferred, 0.05 to 5 mass% is more preferred, 0.1 to 3 mass% is still more preferred, and 0.2 to 1 mass% is particularly preferred. By setting it to be higher than the above lower limit value, there is a tendency for the ink repellency to improve. In addition, by setting it to the upper limit or less, when the ink is applied to the pixel portion after the barrier ribs are formed, there is a tendency that a uniform coating film is easily obtained.

本發明之感光性樹脂組合物中之丙烯酸系樹脂(D1)之含量並無特別限定,於感光性樹脂組合物之總固形物成分中,較佳為0.01質量%以上,更佳為0.1質量%以上,進而較佳為0.2質量%以上,又,較佳為5質量%以下,更佳為3質量%以下,進而較佳為1質量%以下。上述上限及下限可任意地組合,例如較佳為0.01~5質量%較佳,更佳為0.1~3質量%,進而較佳為0.2~1質量%。藉由設為上述下限值以上,存在撥墨性提昇之傾向。又,藉由設為上述上限值以下,於阻隔壁形成後將墨水塗佈於像素部時,存在容易獲得均勻之塗膜之傾向。The content of the acrylic resin (D1) in the photosensitive resin composition of the present invention is not particularly limited, but in the total solid content of the photosensitive resin composition, it is preferably 0.01% by mass or more, more preferably 0.1% by mass Above, it is more preferably 0.2% by mass or more, more preferably 5% by mass or less, more preferably 3% by mass or less, and still more preferably 1% by mass or less. The above upper limit and lower limit can be arbitrarily combined, for example, 0.01 to 5 mass% is preferred, 0.1 to 3 mass% is more preferred, and 0.2 to 1 mass% is still more preferred. By setting it to be higher than the above lower limit value, there is a tendency for the ink repellency to improve. In addition, by setting it to the upper limit or less, when the ink is applied to the pixel portion after the barrier ribs are formed, there is a tendency that a uniform coating film is easily obtained.

[1-1-5](E)鏈轉移劑 本發明之感光性樹脂組合物亦可含有(E)鏈轉移劑。藉由包含鏈轉移劑,得以改善因表面附近之氧抑制等引起之自由基失活,能夠提高表面硬化性,存在錐角變高之傾向。又,藉由提高表面硬化性,能夠抑制撥液劑之流出,容易將撥液劑固定於阻隔壁之表面附近,存在接觸角變高之傾向。 作為鏈轉移劑,例如可例舉含巰基化合物、或四氯化碳,更佳為含巰基化合物,其原因在於存在鏈轉移效果較高之傾向。含巰基化合物由於S-H鍵結能較小,由此容易引起斷鍵,並且容易引起鏈轉移反應,故而存在能夠提高表面硬化性之傾向。[1-1-5] (E) Chain transfer agent The photosensitive resin composition of this invention may contain (E) a chain transfer agent. By including a chain transfer agent, the deactivation of free radicals caused by oxygen suppression near the surface can be improved, the surface hardenability can be improved, and the taper angle tends to increase. In addition, by improving the surface hardenability, the outflow of the liquid repellent can be suppressed, and the liquid repellent can be easily fixed near the surface of the barrier wall, and the contact angle tends to increase. As the chain transfer agent, for example, a mercapto group-containing compound or carbon tetrachloride can be exemplified, and a mercapto group-containing compound is more preferable because the chain transfer effect tends to be higher. The mercapto group-containing compound has a small S-H bonding energy, which tends to cause bond scission and chain transfer reaction. Therefore, there is a tendency to improve the surface hardenability.

鏈轉移劑之中,就錐角、表面硬化性之觀點而言,較佳為具有芳香族環之含巰基化合物及脂肪族系之含巰基化合物。Among chain transfer agents, from the viewpoints of taper angle and surface hardening properties, mercapto group-containing compounds having aromatic rings and aliphatic mercapto group-containing compounds are preferred.

作為具有芳香族環之含巰基化合物,就錐角之觀點而言,可較佳地使用下述通式(E-1)所表示之化合物。As a mercapto group-containing compound having an aromatic ring, a compound represented by the following general formula (E-1) can be preferably used from the viewpoint of a taper angle.

[化43]

Figure 02_image089
[化43]
Figure 02_image089

式(E-1)中,Z表示-O-、-S-或-NH-,R61 、R62 、R63 及R64 分別獨立地表示氫原子或1價取代基。 其中,就錐角之觀點而言,Z較佳為-S-或-NH-,更佳為-NH-。 又,就錐角之觀點而言,R61 、R62 、R63 及R64 較佳為分別獨立地為氫原子、碳數1~4之烷基或碳數1~4之烷氧基,更佳為氫原子。In formula (E-1), Z represents -O-, -S- or -NH-, and R 61 , R 62 , R 63 and R 64 each independently represent a hydrogen atom or a monovalent substituent. Among them, from the viewpoint of the taper angle, Z is preferably -S- or -NH-, and more preferably -NH-. Furthermore, from the viewpoint of the cone angle, R 61 , R 62 , R 63 and R 64 are preferably each independently a hydrogen atom, an alkyl group having 1 to 4 carbons, or an alkoxy group having 1 to 4 carbons, More preferably, it is a hydrogen atom.

作為具有芳香族環之含巰基化合物,例如可例舉:2-巰基苯并噻唑、2-巰基苯并咪唑、2-巰基苯并㗁唑、3-巰基-1,2,4-三唑、2-巰基-4(3H)-喹唑啉、β-巰基萘、1,4-二甲基巰基苯等具有芳香族環之含巰基化合物,就錐角之觀點而言,較佳為2-巰基苯并噻唑、2-巰基苯并咪唑。As the mercapto group-containing compound having an aromatic ring, for example, 2-mercaptobenzothiazole, 2-mercaptobenzimidazole, 2-mercaptobenzoxazole, 3-mercapto-1,2,4-triazole, 2-mercapto-4(3H)-quinazoline, β-mercaptonaphthalene, 1,4-dimethylmercaptobenzene, and other mercapto group-containing compounds having an aromatic ring, from the viewpoint of cone angle, 2- Mercaptobenzothiazole, 2-mercaptobenzimidazole.

作為脂肪族系之含巰基化合物,就表面硬化性之觀點而言,可較佳地使用己二硫醇、癸烷二硫醇、或下述通式(E-2)所表示之化合物。As the aliphatic mercapto group-containing compound, from the viewpoint of surface hardening properties, hexamethylene dithiol, decane dithiol, or a compound represented by the following general formula (E-2) can be preferably used.

[化44]

Figure 02_image091
[化44]
Figure 02_image091

式(E-2)中,m表示0~4之整數,n表示2~4之整數。R71 及R72 分別獨立地表示氫原子或碳數1~4之烷基。X表示n價基。In formula (E-2), m represents an integer of 0-4, and n represents an integer of 2-4. R 71 and R 72 each independently represent a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. X represents an n-valent group.

於上述通式(E-2)中,就合成容易性之觀點而言,m較佳為1或2。又,就表面硬化性之觀點而言,n較佳為3或4。 作為R71 及R72 之烷基,就表面硬化性之觀點而言,較佳為碳數1~3者。就表面硬化性之觀點而言,較佳為R71 及R72 中之至少一者例如R72 為氫原子,於該情形時,R71 較佳為氫原子或碳數1~3之烷基。In the above general formula (E-2), m is preferably 1 or 2 from the viewpoint of ease of synthesis. In addition, from the viewpoint of surface hardenability, n is preferably 3 or 4. The alkyl group of R 71 and R 72 preferably has 1 to 3 carbon atoms from the viewpoint of surface hardenability. From the viewpoint of surface hardenability, it is preferable that at least one of R 71 and R 72 , for example, R 72 is a hydrogen atom. In this case, R 71 is preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms. .

於n為2之情形時,就表面硬化性之觀點而言,X較佳為醚鍵、可具有分枝部之碳數1~6之伸烷基。其中,就表面硬化性、合成容易性之觀點而言,更佳為碳數1~6之伸烷基,進而較佳為碳數4之伸烷基。When n is 2, from the viewpoint of surface hardenability, X is preferably an ether bond and a C1-C6 alkylene group which may have a branch. Among them, from the viewpoint of surface hardenability and ease of synthesis, the alkylene group having 1 to 6 carbon atoms is more preferred, and the alkylene group having 4 carbon atoms is more preferred.

於n為3之情形時,就表面硬化性、合成容易性之觀點而言,X較佳為下述通式(E-2-1)或(E-2-2)所表示之結構。When n is 3, X is preferably a structure represented by the following general formula (E-2-1) or (E-2-2) from the viewpoint of surface hardenability and ease of synthesis.

[化45]

Figure 02_image093
[化45]
Figure 02_image093

式(E-2-1)中,R73 表示氫原子、碳數1~6之烷基、或羥甲基。R73 之中,就錐角之觀點而言,較佳為乙基。In the formula (E-2-1), R 73 represents a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, or a hydroxymethyl group. Among R 73 , an ethyl group is preferred from the viewpoint of a taper angle.

[化46]

Figure 02_image095
[化46]
Figure 02_image095

式(E-2-2)中,R74 表示碳數1~4之伸烷基。R74 之中,就錐角之觀點而言,較佳為伸乙基。In the formula (E-2-2), R 74 represents an alkylene group having 1 to 4 carbon atoms. Among R 74 , from the viewpoint of the taper angle, an ethylene group is preferred.

於n為4之情形時,X較佳為下述通式(E-2-3)所表示之結構。When n is 4, X is preferably a structure represented by the following general formula (E-2-3).

[化47]

Figure 02_image097
[化47]
Figure 02_image097

作為脂肪族系之含巰基化合物,例如可例舉:丁二醇雙(3-巰基丙酸酯)、丁二醇雙巰基乙酸酯、乙二醇雙(3-巰基丙酸酯)、乙二醇雙巰基乙酸酯、三羥甲基丙烷三(3-巰基丙酸酯)、三羥甲基丙烷三巰基乙酸酯、三硫代丙酸三羥基乙酯、季戊四醇四(3-巰基丙酸酯)、季戊四醇三(3-巰基丙酸酯)、丁二醇雙(3-巰基丁酸酯)、乙二醇雙(3-巰基丁酸酯)、三羥甲基丙烷三(3-巰基丁酸酯)、季戊四醇四(3-巰基丁酸酯)、季戊四醇三(3-巰基丁酸酯)、1,3,5-三(3-巰基丁基氧基乙基)-1,3,5-三𠯤-2,4,6(1H,3H,5H)-三酮。As the aliphatic mercapto group-containing compound, for example, butanediol bis(3-mercaptopropionate), butanediol bismercaptoacetate, ethylene glycol bis(3-mercaptopropionate), ethyl Glycol dimercaptoacetate, trimethylolpropane tris(3-mercaptopropionate), trimethylolpropane trimercaptoacetate, trihydroxyethyl trithiopropionate, pentaerythritol tetra(3-mercapto) Propionate), pentaerythritol tris(3-mercaptopropionate), butanediol bis(3-mercaptobutyrate), ethylene glycol bis(3-mercaptobutyrate), trimethylolpropane tris(3 -Mercaptobutyrate), pentaerythritol tetra(3-mercaptobutyrate), pentaerythritol tris(3-mercaptobutyrate), 1,3,5-tris(3-mercaptobutyloxyethyl)-1, 3,5-Three 𠯤-2,4,6(1H,3H,5H)-trione.

該等中,較佳為三羥甲基丙烷三(3-巰基丙酸酯)、季戊四醇四(3-巰基丙酸酯)、季戊四醇三(3-巰基丙酸酯)、三羥甲基丙烷三(3-巰基丁酸酯)、季戊四醇四(3-巰基丁酸酯)、季戊四醇三(3-巰基丁酸酯)、1,3,5-三(3-巰基丁基氧基乙基)-1,3,5-三𠯤-2,4,6(1H,3H,5H)-三酮,更佳為季戊四醇四(3-巰基丙酸酯)、季戊四醇四(3-巰基丁酸酯)。Among these, trimethylolpropane tris(3-mercaptopropionate), pentaerythritol tetrakis(3-mercaptopropionate), pentaerythritol tris(3-mercaptopropionate), trimethylolpropane tris(3-mercaptopropionate) are preferred. (3-mercaptobutyrate), pentaerythritol tetra(3-mercaptobutyrate), pentaerythritol tris(3-mercaptobutyrate), 1,3,5-tris(3-mercaptobutyloxyethyl)- 1,3,5-tris-2,4,6(1H,3H,5H)-trione, more preferably pentaerythritol tetrakis (3-mercaptopropionate), pentaerythritol tetrakis (3-mercaptobutyrate).

該等可單獨使用1種,亦可將2種以上併用。These may be used individually by 1 type, and may use 2 or more types together.

該等中,就提高撥墨性之觀點而言,較佳為將選自由2-巰基苯并噻唑、2-巰基苯并咪唑、及2-巰基苯并㗁唑所組成之群之1者以上與光聚合起始劑組合用作光聚合起始劑系。例如可使用2-巰基苯并噻唑,亦可使用2-巰基苯并咪唑,亦可將2-巰基苯并噻唑與2-巰基苯并咪唑併用。 作為又一形態,就表面硬化性之觀點而言,較佳為使用選自由季戊四醇四(3-巰基丙酸酯)、及季戊四醇四(3-巰基丁酸酯)所組成之群之1或2者以上。Among them, from the viewpoint of improving ink repellency, it is preferable to select at least one member selected from the group consisting of 2-mercaptobenzothiazole, 2-mercaptobenzimidazole, and 2-mercaptobenzoazole In combination with a photopolymerization initiator, it is used as a photopolymerization initiator system. For example, 2-mercaptobenzothiazole may be used, 2-mercaptobenzimidazole may also be used, or 2-mercaptobenzothiazole and 2-mercaptobenzimidazole may be used in combination. As yet another aspect, from the viewpoint of surface hardening, it is preferable to use 1 or 2 selected from the group consisting of pentaerythritol tetra(3-mercaptopropionate) and pentaerythritol tetra(3-mercaptobutyrate) Above.

於本發明之感光性樹脂組合物包含(E)鏈轉移劑之情形時,其含量並無特別限定,於感光性樹脂組合物之總固形物成分中,較佳為0.01質量%以上,更佳為0.025質量%以上,進而較佳為0.05質量%以上,進而更佳為0.1質量%以上,尤佳為1質量%以上,又,較佳為5質量%以下,更佳為4質量%以下,進而較佳為3質量%以下。上述上限及下限可任意地組合,例如較佳為0.01~5質量%,更佳為0.025~5質量%,進而較佳為0.05~4質量%,進而更佳為0.1~4質量%,尤佳為1~3質量%。藉由設為上述下限值以上,存在錐角較高,表面硬化性變高,撥墨性變高之傾向。又,藉由設為上述上限值以下,存在容易形成所需圖案之傾向。When the photosensitive resin composition of the present invention contains (E) a chain transfer agent, its content is not particularly limited. In the total solid content of the photosensitive resin composition, it is preferably 0.01% by mass or more, more preferably 0.025% by mass or more, more preferably 0.05% by mass or more, still more preferably 0.1% by mass or more, particularly preferably 1% by mass or more, more preferably 5% by mass or less, more preferably 4% by mass or less, More preferably, it is 3% by mass or less. The above upper limit and lower limit can be combined arbitrarily, for example, 0.01 to 5 mass% is preferred, 0.025 to 5 mass% is more preferred, 0.05 to 4 mass% is still more preferred, and 0.1 to 4 mass% is even more preferred. It is 1 to 3% by mass. By setting it to more than the above-mentioned lower limit value, there exists a tendency for the taper angle to become high, surface hardening property becomes high, and ink repellency becomes high. In addition, by setting it below the above upper limit value, there is a tendency to easily form a desired pattern.

作為將具有芳香族環之含巰基化合物與脂肪族系之含巰基化合物併用作為鏈轉移劑時之其含量,相對於具有芳香族環之含巰基化合物100質量份,脂肪族系之含巰基化合物較佳為10質量份以上,更佳為50質量份以上,進而較佳為80質量份以上,又,較佳為400質量份以下,更佳為300質量份以下,進而較佳為200質量份以下,尤佳為150質量份以下。上述上限與下限可任意地組合,例如較佳為10~400質量份,更佳為10~300質量份,進而較佳為50~200質量份,尤佳為80~150質量份。藉由設為上述下限值以上,存在撥墨性變高之傾向。又,藉由設為上述上限值以下,存在感度變高之傾向。As the content when a mercapto group-containing compound having an aromatic ring and an aliphatic mercapto group-containing compound are used together as a chain transfer agent, relative to 100 parts by mass of a mercapto group-containing compound having an aromatic ring, the aliphatic mercapto group-containing compound is more It is preferably 10 parts by mass or more, more preferably 50 parts by mass or more, still more preferably 80 parts by mass or more, more preferably 400 parts by mass or less, more preferably 300 parts by mass or less, and still more preferably 200 parts by mass or less , Particularly preferably 150 parts by mass or less. The above upper limit and lower limit can be combined arbitrarily, and for example, it is preferably 10 to 400 parts by mass, more preferably 10 to 300 parts by mass, still more preferably 50 to 200 parts by mass, and particularly preferably 80 to 150 parts by mass. By setting it to more than the above-mentioned lower limit value, there exists a tendency for ink repellency to become high. In addition, by setting it below the above upper limit value, the sensitivity tends to increase.

作為感光性樹脂組合物中之(E)鏈轉移劑相對於(D)光聚合起始劑之調配比,相對於(D)光聚合起始劑100質量份,較佳為10質量份以上,更佳為25質量份以上,進而較佳為50質量份以上,尤佳為80質量份以上,又,較佳為500質量份以下,更佳為400質量份以下,進而較佳為300質量份以下,進而更佳為200質量份以下,尤佳為150質量份以下。上述上限及下限可任意地組合,例如較佳為10~500質量份,更佳為10~400質量份,進而較佳為25~300質量份,進而更佳為50~200質量份,尤佳為80~150質量份。藉由設為上述下限值以上,存在錐角較高,表面硬化性變高,撥墨性變高之傾向。又,藉由設為上述上限值以下,存在容易形成所需圖案之傾向。As a compounding ratio of the (E) chain transfer agent to the (D) photopolymerization initiator in the photosensitive resin composition, it is preferably 10 parts by mass or more with respect to 100 parts by mass of the (D) photopolymerization initiator, More preferably 25 parts by mass or more, still more preferably 50 parts by mass or more, particularly preferably 80 parts by mass or more, more preferably 500 parts by mass or less, more preferably 400 parts by mass or less, and still more preferably 300 parts by mass Hereinafter, it is more preferably 200 parts by mass or less, and particularly preferably 150 parts by mass or less. The above upper limit and lower limit can be combined arbitrarily, for example, preferably 10 to 500 parts by mass, more preferably 10 to 400 parts by mass, still more preferably 25 to 300 parts by mass, still more preferably 50 to 200 parts by mass, especially It is 80 to 150 parts by mass. By setting it to more than the above-mentioned lower limit value, there exists a tendency for the taper angle to become high, surface hardening property becomes high, and ink repellency becomes high. In addition, by setting it below the above upper limit value, there is a tendency to easily form a desired pattern.

[1-1-6]紫外線吸收劑 本發明之感光性樹脂組合物亦可含有紫外線吸收劑。紫外線吸收劑係為了如下目的而添加者:藉由紫外線吸收劑來吸收曝光所使用之光源之特定波長,藉此控制光硬化分佈。藉由包含紫外線吸收劑,存在可獲得改善顯影後之錐角形狀、或減少顯影後殘留於非曝光部之殘渣等效果之傾向。作為紫外線吸收劑,就抑制藉由光聚合起始劑之光吸收之觀點而言,例如可使用於波長250 nm至400 nm之間具有吸收極大之化合物。 作為紫外線吸收劑,例如可例舉:苯并三唑系化合物、三𠯤系化合物、二苯甲酮化合物、苯甲酸酯化合物、肉桂酸衍生物、萘衍生物、蒽及其衍生物、二萘化合物、啡啉化合物、染料。 該等紫外線吸收劑可單獨使用1種,亦可將2種以上併用。[1-1-6]Ultraviolet absorber The photosensitive resin composition of this invention may contain an ultraviolet absorber. The ultraviolet absorber is added for the following purpose: the ultraviolet absorber absorbs the specific wavelength of the light source used for exposure, thereby controlling the light hardening distribution. By including the ultraviolet absorber, there is a tendency that effects such as improvement of the cone angle shape after development or reduction of residue remaining in the non-exposed part after development can be obtained. As the ultraviolet absorber, from the viewpoint of suppressing light absorption by the photopolymerization initiator, for example, it can be used for a compound having a maximum absorption between 250 nm and 400 nm. As the ultraviolet absorber, for example, benzotriazole-based compounds, tris-based compounds, benzophenone compounds, benzoate compounds, cinnamic acid derivatives, naphthalene derivatives, anthracene and its derivatives, two Naphthalene compounds, phenanthroline compounds, dyes. These ultraviolet absorbers may be used individually by 1 type, and may use 2 or more types together.

該等中,就提高錐角之觀點而言,較佳為苯并三唑化合物及/或羥基苯基三𠯤化合物,尤佳為苯并三唑化合物。Among them, from the viewpoint of increasing the cone angle, benzotriazole compounds and/or hydroxyphenyltriazole compounds are preferred, and benzotriazole compounds are particularly preferred.

苯并三唑系化合物之中,就錐狀之方面而言,較佳為下述通式(Z1)中所記載之苯并三唑化合物。Among the benzotriazole-based compounds, the benzotriazole compound described in the following general formula (Z1) is preferred in terms of the cone shape.

[化48]

Figure 02_image099
[化48]
Figure 02_image099

上述式(Z1)中,R1e 及R2e 分別獨立地表示氫原子、可具有取代基之烷基、下述通式(Z2)所表示之基、或下述通式(Z3)所表示之基。R3e 表示氫原子或鹵素原子。In the above formula (Z1), R 1e and R 2e each independently represent a hydrogen atom, an optionally substituted alkyl group, a group represented by the following general formula (Z2), or a group represented by the following general formula (Z3) base. R 3e represents a hydrogen atom or a halogen atom.

[化49]

Figure 02_image101
[化49]
Figure 02_image101

上述式(Z2)中,R4e 表示可具有取代基之伸烷基,R5e 表示可具有取代基之烷基。In the above formula (Z2), R 4e represents an alkylene group which may have a substituent, and R 5e represents an alkyl group which may have a substituent.

[化50]

Figure 02_image103
[化50]
Figure 02_image103

上述式(Z3)中,R6e 表示可具有取代基之伸烷基,R7e 表示氫原子或甲基。In the above formula (Z3), R 6e represents an alkylene group which may have a substituent, and R 7e represents a hydrogen atom or a methyl group.

(R1e 及R2e ) 於上述式(Z1)中,R1e 及R2e 分別獨立地表示氫原子、可具有取代基之烷基、通式(Z2)所表示之基、或通式(Z3)所表示之基。 作為烷基,可例舉直鏈狀、支鏈狀或環狀之烷基。其碳數較佳為1以上,更佳為2以上,進而較佳為4以上,又,較佳為10以下,更佳為6以下,進而較佳為4以下。上述上限及下限可任意地組合,例如較佳為1~10,更佳為2~6,進而較佳為4~6。(R 1e and R 2e ) In the above formula (Z1), R 1e and R 2e each independently represent a hydrogen atom, an optionally substituted alkyl group, a group represented by the general formula (Z2), or a general formula (Z3 ) Represents the base. As the alkyl group, a linear, branched or cyclic alkyl group may be mentioned. The carbon number is preferably 1 or more, more preferably 2 or more, still more preferably 4 or more, more preferably 10 or less, more preferably 6 or less, and still more preferably 4 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 1-10 are preferable, 2-6 are more preferable, and 4-6 are still more preferable.

作為烷基,例如可例舉:甲基、乙基、丙基、異丙基、丁基、異丁基、第三丁基。該等中,較佳為第三丁基。 作為烷基可具有之取代基,例如可例舉:甲氧基、乙氧基、氯基、溴基、氟基、羥基、胺基、環氧基、低聚乙二醇基、苯基、羧基、丙烯醯基、甲基丙烯醯基。As the alkyl group, for example, a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, and a tertiary butyl group may be mentioned. Among them, the tertiary butyl group is preferred. Examples of substituents that the alkyl group may have include: methoxy, ethoxy, chloro, bromo, fluoro, hydroxyl, amino, epoxy, oligoethylene glycol, phenyl, Carboxyl, acryloyl, and methacryloyl.

(R3e ) 於上述式(Z1)中,R3e 表示氫原子或鹵素原子。 作為鹵素原子,可例舉:氟原子、氯原子、溴原子、碘原子。 該等中,就合成之觀點而言,較佳為R3e 為氫原子。(R 3e ) In the above formula (Z1), R 3e represents a hydrogen atom or a halogen atom. The halogen atom may, for example, be a fluorine atom, a chlorine atom, a bromine atom, or an iodine atom. Among them, from the viewpoint of synthesis, R 3e is preferably a hydrogen atom.

(R4e ) 於上述式(Z2)中,R4e 表示可具有取代基之伸烷基。 作為伸烷基,可例舉直鏈狀、支鏈狀或環狀之伸烷基。其碳數通常為1以上,較佳為2以上,又,較佳為6以下,更佳為4以下,進而較佳為3以下。上述上限及下限可任意地組合,例如較佳為1~6,更佳為1~4,進而較佳為2~3。(R 4e ) In the above formula (Z2), R 4e represents an alkylene group which may have a substituent. As the alkylene group, a linear, branched or cyclic alkylene group may be mentioned. The carbon number is usually 1 or more, preferably 2 or more, more preferably 6 or less, more preferably 4 or less, and still more preferably 3 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 1-6 are preferable, 1-4 are more preferable, and 2-3 are still more preferable.

作為伸烷基,例如可例舉:亞甲基、伸乙基、伸丙基、伸丙基、伸丁基。該等中,較佳為伸乙基。 作為伸烷基可具有之取代基,例如可例舉:甲氧基、乙氧基、氯基、溴基、氟基、羥基、胺基、環氧基、低聚乙二醇基、苯基、羧基、丙烯醯基、甲基丙烯醯基。As the alkylene group, for example, a methylene group, an ethylene group, a propylene group, a propylene group, and a butylene group may be mentioned. Among them, ethylene is preferred. As the substituent that the alkylene group may have, for example, a methoxy group, an ethoxy group, a chlorine group, a bromine group, a fluoro group, a hydroxyl group, an amino group, an epoxy group, an oligoethylene glycol group, and a phenyl group , Carboxyl, acryloyl, methacryloyl.

該等中,較佳為R4e 為伸乙基。Among them, R 4e is preferably an ethylene group.

(R5e ) 於上述式(Z2)中,表示可具有取代基之烷基。 作為烷基,可例舉直鏈狀、支鏈狀或環狀之烷基。其碳數較佳為4以上,更佳為5以上,進而較佳為7以上,又,較佳為15以下,更佳為10以下,進而較佳為9以下。上述上限及下限可任意地組合,例如較佳為5~15,更佳為5~10,進而較佳為7~9。(R 5e ) In the above formula (Z2), it represents an alkyl group which may have a substituent. As the alkyl group, a linear, branched or cyclic alkyl group may be mentioned. The carbon number is preferably 4 or more, more preferably 5 or more, still more preferably 7 or more, more preferably 15 or less, more preferably 10 or less, and still more preferably 9 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 5-15 are preferable, 5-10 are more preferable, and 7-9 are still more preferable.

作為烷基,例如可例舉:甲基、乙基、丙基、丁基、戊基、己基、庚基、辛基、壬基。 作為烷基可具有之取代基,例如可例舉:甲氧基、乙氧基、氯基、溴基、氟基、羥基、胺基、環氧基、低聚乙二醇基、苯基、羧基、丙烯醯基、甲基丙烯醯基。 該等中,就錐狀之觀點而言,較佳為R5e 為庚基、辛基、壬基。Examples of the alkyl group include methyl, ethyl, propyl, butyl, pentyl, hexyl, heptyl, octyl, and nonyl. Examples of substituents that the alkyl group may have include: methoxy, ethoxy, chloro, bromo, fluoro, hydroxyl, amino, epoxy, oligoethylene glycol, phenyl, Carboxyl, acryloyl, and methacryloyl. Among these, from the viewpoint of the cone shape, R 5e is preferably heptyl, octyl, or nonyl.

(R6e ) 於上述式(Z3)中,R6e 表示可具有取代基之伸烷基。 作為伸烷基,可例舉直鏈狀、支鏈狀或環狀之伸烷基。其碳數通常為1以上,較佳為2以上,又,較佳為6以下,更佳為4以下,進而較佳為3以下。上述上限及下限可任意地組合,例如較佳為1~6,更佳為1~4,進而較佳為2~3。(R 6e ) In the above formula (Z3), R 6e represents an alkylene group which may have a substituent. As the alkylene group, a linear, branched or cyclic alkylene group may be mentioned. The carbon number is usually 1 or more, preferably 2 or more, more preferably 6 or less, more preferably 4 or less, and still more preferably 3 or less. The above upper limit and lower limit can be combined arbitrarily, for example, 1-6 are preferable, 1-4 are more preferable, and 2-3 are still more preferable.

作為伸烷基,例如可例舉:亞甲基、伸乙基、伸丙基、伸丙基、伸丁基。該等中,較佳為伸乙基。 作為伸烷基可具有之取代基,例如可例舉:甲氧基、乙氧基、氯基、溴基、氟基、羥基、胺基、環氧基、低聚乙二醇基、苯基、羧基、丙烯醯基、甲基丙烯醯基。As the alkylene group, for example, a methylene group, an ethylene group, a propylene group, a propylene group, and a butylene group may be mentioned. Among them, ethylene is preferred. As the substituent that the alkylene group may have, for example, a methoxy group, an ethoxy group, a chlorine group, a bromine group, a fluoro group, a hydroxyl group, an amino group, an epoxy group, an oligoethylene glycol group, and a phenyl group , Carboxyl, acryloyl, methacryloyl.

該等中,就錐狀之觀點而言,較佳為R1e 為第三丁基、R2e 為上述式(Z2)所表示之基(其中,R4e 為伸乙基,及R5e 為碳數7~9之烷基)、R3e 為氫原子之化合物、或R1e 為氫原子、R2e 為上述式(Z3)所表示之基(其中,R6e 為伸乙基,及R7e 為甲基)且R3e 為氫原子之化合物,更佳為R1e 為第三丁基、R2e 為上述式(Z2)所表示之基(其中,R4e 為伸乙基,及R5e 為碳數7~9之烷基)且R3e 為氫原子之化合物。Among them, from the viewpoint of the cone shape, it is preferable that R 1e is a tertiary butyl group, and R 2e is a group represented by the above formula (Z2) (wherein, R 4e is an ethylene group, and R 5e is a carbon The number 7-9 alkyl), R 3e is a hydrogen atom compound, or R 1e is a hydrogen atom, R 2e is the group represented by the above formula (Z3) (wherein, R 6e is an ethylene group, and R 7e is A compound in which R 3e is a hydrogen atom, more preferably R 1e is a tertiary butyl group, and R 2e is a group represented by the above formula (Z2) (wherein, R 4e is an ethylene group, and R 5e is a carbon A compound having an alkyl group of 7 to 9) and R 3e is a hydrogen atom.

作為苯并三唑系化合物,例如可例舉:2-(5甲基-2-羥基苯基)苯并三唑、2-(2-羥基-5-第三丁基苯基)-2H-苯并三唑、3[3-第三丁基-4-羥基-5-(5-氯-2H-苯并三唑-2-基)苯基]丙酸辛酯與3-[3-第三丁基-4-羥基-5-(5-氯-2H-苯并三唑-2-基)苯基]丙酸2-乙基己酯之混合物、2-[2-羥基-3,5-雙(α,α-二甲基苄基)苯基]-2H-苯并三唑、2-(3-第三丁基-5-甲基-2-羥基苯基)-5-氯苯并三唑、2-(3,5-二-第三戊基-2-羥基苯基)苯并三唑、2-(2'-羥基-5'-第三辛基苯基)苯并三唑、3-[3-第三丁基-5-(2H-苯并三唑-2-基)-4-羥基苯基]丙酸庚酯、3-[3-第三丁基-5-(2H-苯并三唑-2-基)-4-羥基苯基]丙酸辛酯、3-[3-第三丁基-5-(2H-苯并三唑-2-基)-4-羥基苯基]丙酸壬酯、2-(2H-苯并三唑-2-基)-4,6-雙(1-甲基-1-苯基乙基)苯酚、2-(2H-苯并三唑-2-基)-6-(1-甲基-1-苯基乙基)-4-(1,1,3,3-四甲基丁基)苯酚。該等中,就錐角及曝光感度之觀點而言,較佳為3-[3-第三丁基-5-(2H-苯并三唑-2-基)-4-羥基苯基]丙酸庚酯、3-[3-第三丁基-5-(2H-苯并三唑-2-基)-4-羥基苯基]丙酸辛酯、3-[3-第三丁基-5-(2H-苯并三唑-2-基)-4-羥基苯基]丙酸壬酯、及該等之混合物。As the benzotriazole-based compound, for example, 2-(5methyl-2-hydroxyphenyl)benzotriazole, 2-(2-hydroxy-5-tert-butylphenyl)-2H- Benzotriazole, 3[3-tert-butyl-4-hydroxy-5-(5-chloro-2H-benzotriazol-2-yl)phenyl] octyl propionate and 3-[3-third Butyl-4-hydroxy-5-(5-chloro-2H-benzotriazol-2-yl)phenyl]propionic acid 2-ethylhexyl mixture, 2-[2-hydroxy-3,5- Bis(α,α-dimethylbenzyl)phenyl)-2H-benzotriazole, 2-(3-tert-butyl-5-methyl-2-hydroxyphenyl)-5-chlorobenzo Triazole, 2-(3,5-di-tertiary pentyl-2-hydroxyphenyl)benzotriazole, 2-(2'-hydroxy-5'-tertiary octylphenyl)benzotriazole , 3-[3-tert-butyl-5-(2H-benzotriazol-2-yl)-4-hydroxyphenyl]propionic acid heptyl ester, 3-[3-tert-butyl-5-( 2H-benzotriazol-2-yl)-4-hydroxyphenyl]octyl propionate, 3-[3-tert-butyl-5-(2H-benzotriazol-2-yl)-4-hydroxyl Phenyl) nonyl propionate, 2-(2H-benzotriazol-2-yl)-4,6-bis(1-methyl-1-phenylethyl)phenol, 2-(2H-benzo Triazol-2-yl)-6-(1-methyl-1-phenylethyl)-4-(1,1,3,3-tetramethylbutyl)phenol. Among them, 3-[3-tertiarybutyl-5-(2H-benzotriazol-2-yl)-4-hydroxyphenyl]propane is preferred from the viewpoint of taper angle and exposure sensitivity. Heptyl acrylate, 3-[3-tert-butyl-5-(2H-benzotriazol-2-yl)-4-hydroxyphenyl] octyl propionate, 3-[3-tert-butyl-5 -(2H-Benzotriazol-2-yl)-4-hydroxyphenyl]nonyl propionate, and mixtures thereof.

作為市售之苯并三唑系化合物,例如可例舉:SUMISORB(註冊商標,以下相同)200、SUMISORB250、SUMISORB300、SUMISORB340、SUMISORB350(住友化學公司製造)、JF77、JF78、JF79、JF80、JF83(城北化學工業公司製造)、TINUVIN(註冊商標,以下相同)PS、TINUVIN99-2、TINUVIN109、TINUVIN384-2、TINUVIN326、TINUVIN900、TINUVIN928、TINUVIN1130(BASF公司製造)、EVERSORB70、EVERSORB71、EVERSORB72、EVERSORB73、EVERSORB74、EVERSORB75、EVERSORB76、EVERSORB234、EVERSORB77、EVERSORB78、EVERSORB80、EVERSORB81(臺灣永光化學工業公司製造)、TOMISORB(註冊商標,以下相同)100、TOMISORB 600(API Corporation公司製造)、SEESORB(註冊商標,以下相同)701、SEESORB702、SEESORB703、SEESORB704、SEESORB706、SEESORB707、SEESORB709(Shipro Kasei公司製造)、RUVA-93(大塚化學公司製造)。As commercially available benzotriazole compounds, for example, SUMISORB (registered trademark, the same hereinafter) 200, SUMISORB250, SUMISORB300, SUMISORB340, SUMISORB350 (manufactured by Sumitomo Chemical Co., Ltd.), JF77, JF78, JF79, JF80, JF83 ( Seonghoku Chemical Industry Co., Ltd.), TINUVIN (registered trademark, the same below) PS, TINUVIN99-2, TINUVIN109, TINUVIN384-2, TINUVIN326, TINUVIN900, TINUVIN928, TINUVIN1130 (manufactured by BASF Corporation), EVERSORB70, EVERSORB71, EVERSORB72, EVERSORB73, EVERSORB74, EVERSORB75, EVERSORB76, EVERSORB234, EVERSORB77, EVERSORB78, EVERSORB80, EVERSORB81 (manufactured by Everlight Chemical Industry Co., Ltd.), TOMISORB (registered trademark, the same below) 100, TOMISORB 600 (manufactured by API Corporation), SEESORB (registered trademark, the same below) 701 , SEESORB702, SEESORB703, SEESORB704, SEESORB706, SEESORB707, SEESORB709 (manufactured by Shipro Kasei), RUVA-93 (manufactured by Otsuka Chemical Co., Ltd.).

作為三𠯤系化合物,例如可例舉:2-[4,6-二(2,4-二甲苯基)-1,3,5-三𠯤-2-基]-5-辛基氧基苯酚、2-[4,6-雙(2,4-二甲基苯基)-1,3,5-三𠯤-2-基]-5-[3-(十二烷氧基)-2-羥基丙氧基]苯酚、2-(2,4-二羥基苯基)-4,6-雙(2,4-二甲基苯基)-1,3,5-三𠯤與去水甘油酸(2-乙基己基)酯之反應產物、2,4-雙[2-羥基-4-丁氧基苯基]-6-(2,4-二丁氧基苯基)-1,3,5-三𠯤。該等中,就錐角及曝光感度之觀點而言,較佳為羥基苯基三𠯤化合物。 作為市售之三𠯤系化合物,例如可例舉:TINUVIN400、TINUVIN405、TINUVIN460、TINUVIN477、TINUVIN479(BASF公司製造)等。Examples of the tris-based compound include: 2-[4,6-bis(2,4-xylenyl)-1,3,5-tris-2-yl]-5-octyloxyphenol , 2-[4,6-bis(2,4-dimethylphenyl)-1,3,5-tris-2-yl]-5-[3-(dodecyloxy)-2- (Hydroxypropoxy)phenol, 2-(2,4-dihydroxyphenyl)-4,6-bis(2,4-dimethylphenyl)-1,3,5-triglyceric acid The reaction product of (2-ethylhexyl) ester, 2,4-bis[2-hydroxy-4-butoxyphenyl]-6-(2,4-dibutoxyphenyl)-1,3, 5-Three 𠯤. Among these, from the viewpoint of taper angle and exposure sensitivity, a hydroxyphenyl triphenyl compound is preferred. As a commercially available tri-series compound, for example, TINUVIN400, TINUVIN405, TINUVIN460, TINUVIN477, TINUVIN479 (manufactured by BASF Corporation), etc. may be mentioned.

作為其他紫外線吸收劑,例如可例舉:SUMISORB130(住友化學公司製造)、EVERSORB10、EVERSORB11、EVERSORB12(臺灣永光化學工業公司製造)、TOMISORB 800(API Corporation公司製造)、SEESORB100、SEESORB101、SEESORB101S、SEESORB102、SEESORB103、SEESORB105、SEESORB106、SEESORB107、SEESORB151(Shipro Kasei公司製造)等二苯甲酮化合物;SUMISORB400(住友化學公司製造)、水楊酸苯酯等苯甲酸酯化合物;肉桂酸2-乙基己酯、對甲氧基肉桂酸2-乙基己酯、甲氧基肉桂酸異丙酯、甲氧基肉桂酸異戊酯等肉桂酸衍生物;α-萘酚、β-萘酚、α-萘酚甲基醚、α-萘酚乙基醚、1,2-二羥基萘、1,3-二羥基萘、1,4-二羥基萘、1,5-二羥基萘、1,6-二羥基萘、1,7-二羥基萘、1,8-二羥基萘、2,3-二羥基萘、2,6-二羥基萘、2,7-二羥基萘等萘衍生物;蒽、9,10-二羥基蒽等蒽及其衍生物;偶氮系染料、二苯甲酮系染料、胺基酮系染料、喹啉系染料、蒽醌系染料、二苯基氰基丙烯酸酯系染料、三𠯤系染料、對胺基苯甲酸系染料等染料。該等中,就曝光感度之觀點而言,較佳為使用肉桂酸衍生物、萘衍生物,尤佳為使用肉桂酸衍生物。As other ultraviolet absorbers, for example, SUMISORB130 (manufactured by Sumitomo Chemical Co., Ltd.), EVERSORB10, EVERSORB11, EVERSORB12 (manufactured by Taiwan Everlight Chemical Industry Co., Ltd.), TOMISORB 800 (manufactured by API Corporation), SEESORB100, SEESORB101, SEESORB101S, SEESORB102, Benzophenone compounds such as SEESORB103, SEESORB105, SEESORB106, SEESORB107, SEESORB151 (manufactured by Shipro Kasei); SUMISORB400 (manufactured by Sumitomo Chemical Co., Ltd.), benzoic acid ester compounds such as phenyl salicylate; 2-ethylhexyl cinnamate , 2-ethylhexyl p-methoxycinnamate, isopropyl methoxycinnamate, isoamyl methoxycinnamate and other cinnamic acid derivatives; α-naphthol, β-naphthol, α-naphthalene Phenol methyl ether, α-naphthol ethyl ether, 1,2-dihydroxynaphthalene, 1,3-dihydroxynaphthalene, 1,4-dihydroxynaphthalene, 1,5-dihydroxynaphthalene, 1,6-dihydroxynaphthalene Hydroxynaphthalene, 1,7-dihydroxynaphthalene, 1,8-dihydroxynaphthalene, 2,3-dihydroxynaphthalene, 2,6-dihydroxynaphthalene, 2,7-dihydroxynaphthalene and other naphthalene derivatives; anthracene, 9 , 10-Dihydroxyanthracene and other anthracene and its derivatives; azo dyes, benzophenone dyes, aminoketone dyes, quinoline dyes, anthraquinone dyes, diphenylcyanoacrylate dyes , Three 𠯤 series dyes, p-aminobenzoic acid series dyes and other dyes. Among them, from the viewpoint of exposure sensitivity, it is preferable to use a cinnamic acid derivative and a naphthalene derivative, and it is particularly preferable to use a cinnamic acid derivative.

於本發明之感光性樹脂組合物包含紫外線吸收劑之情形時,關於感光性樹脂組合物中之紫外線吸收劑之含量,於感光性樹脂組合物之總固形物成分中,較佳為0.01質量%以上,更佳為0.05質量%以上,進而較佳為0.1質量%以上,進而更佳為0.5質量%以上,尤佳為1質量%以上,又,較佳為15質量%以下,更佳為10質量%以下,進而較佳為5質量%以下,尤佳為3質量%以下。上述上限及下限可任意地組合,例如較佳為0.01~15質量%,更佳為0.05~15質量%,進而較佳為0.1~10質量%,進而更佳為0.5~5質量%,尤佳為1~3質量%。藉由設為上述下限值以上,存在錐角變大之傾向。又,藉由設為上述上限值以下,存在成為高感度之傾向。When the photosensitive resin composition of the present invention contains an ultraviolet absorber, the content of the ultraviolet absorber in the photosensitive resin composition is preferably 0.01% by mass in the total solid content of the photosensitive resin composition Above, more preferably 0.05% by mass or more, still more preferably 0.1% by mass or more, still more preferably 0.5% by mass or more, particularly preferably 1% by mass or more, more preferably 15% by mass or less, more preferably 10 Mass% or less, more preferably 5% by mass or less, and particularly preferably 3% by mass or less. The above upper limit and lower limit can be combined arbitrarily, for example, 0.01 to 15% by mass is preferable, 0.05 to 15% by mass is more preferable, 0.1 to 10% by mass is still more preferable, and 0.5 to 5% by mass is still more preferable, particularly It is 1 to 3% by mass. By setting it to be equal to or higher than the above lower limit value, the taper angle tends to increase. Moreover, by setting it as below the said upper limit, there exists a tendency for high sensitivity.

於本發明之感光性樹脂組合物包含紫外線吸收劑之情形時,作為相對於(D)光聚合起始劑之調配比,相對於(D)光聚合起始劑100質量份,較佳為1質量份以上,更佳為10質量份以上,進而較佳為30質量份以上,進而更佳為50質量份以上,尤佳為80質量份以上,又,較佳為500質量份以下,更佳為300質量份以下,進而較佳為200質量份以下,尤佳為150質量份以下。上述上限及下限可任意地組合,例如較佳為10~500質量份,更佳為30~300質量份,進而較佳為50~200質量份,尤佳為80~150質量份。藉由設為上述下限值以上,存在錐角變大之傾向。又,藉由設為上述上限值以下,存在成為高感度之傾向。When the photosensitive resin composition of the present invention contains an ultraviolet absorber, the blending ratio with respect to (D) photopolymerization initiator is preferably 1 with respect to 100 parts by mass of (D) photopolymerization initiator Parts by mass or more, more preferably 10 parts by mass or more, still more preferably 30 parts by mass or more, still more preferably 50 parts by mass or more, particularly preferably 80 parts by mass or more, and more preferably 500 parts by mass or less, more preferably It is 300 parts by mass or less, more preferably 200 parts by mass or less, and particularly preferably 150 parts by mass or less. The above upper limit and lower limit can be combined arbitrarily, and for example, it is preferably 10 to 500 parts by mass, more preferably 30 to 300 parts by mass, still more preferably 50 to 200 parts by mass, and particularly preferably 80 to 150 parts by mass. By setting it to be equal to or higher than the above lower limit value, the taper angle tends to increase. Moreover, by setting it as below the said upper limit, there exists a tendency for high sensitivity.

[1-1-7]聚合抑制劑 本發明之感光性樹脂組合物亦可含有聚合抑制劑。由於藉由含有聚合抑制劑可抑制自由基聚合,因此認為能夠增大所獲得之阻隔壁之錐角。 作為聚合抑制劑,例如可例舉:對苯二酚、對苯二酚單甲醚、甲基對苯二酚、甲氧基苯酚、2,6-二-第三丁基-4-甲酚(BHT)。該等中,就聚合抑制能力之觀點而言,較佳為甲基對苯二酚、甲氧基苯酚,更佳為甲基對苯二酚。[1-1-7] Polymerization inhibitor The photosensitive resin composition of this invention may contain a polymerization inhibitor. Since radical polymerization can be suppressed by containing a polymerization inhibitor, it is considered that the taper angle of the obtained barrier wall can be increased. As the polymerization inhibitor, for example, hydroquinone, hydroquinone monomethyl ether, methylhydroquinone, methoxyphenol, 2,6-di-tert-butyl-4-methylphenol (BHT). Among these, from the viewpoint of polymerization inhibitory ability, methylhydroquinone and methoxyphenol are preferred, and methylhydroquinone is more preferred.

聚合抑制劑可單獨使用1種,亦可將2種以上併用。通常於製造(B)鹼可溶性樹脂時,存在樹脂中包含聚合抑制劑之情況,可將其作為本發明之感光性樹脂組合物所包含之聚合抑制劑來使用,亦可於製造感光性樹脂組合物時除樹脂中所包含之聚合抑制劑以外,添加與其相同、或不同之聚合抑制劑。A polymerization inhibitor may be used individually by 1 type, and may use 2 or more types together. Generally, in the production of (B) alkali-soluble resin, there is a case where the resin contains a polymerization inhibitor. It can be used as the polymerization inhibitor contained in the photosensitive resin composition of the present invention, and it can also be used in the production of a photosensitive resin composition. In addition to the polymerization inhibitor contained in the resin, a polymerization inhibitor that is the same or different from it is added.

於本發明之感光性樹脂組合物包含聚合抑制劑之情形時,關於感光性樹脂組合物中之聚合抑制劑之含量,於感光性樹脂組合物之總固形物成分中,較佳為0.0005質量%以上,更佳為0.001質量%以上,進而較佳為0.01質量%以上,又,較佳為0.3質量%以下,更佳為0.2質量%以下,進而較佳為0.1質量%以下。上述上限及下限可任意地組合,例如較佳為0.0005~0.3質量%,更佳為0.001~0.2質量%,進而較佳為0.01~0.1質量%。藉由設為上述下限值以上,存在能夠提高錐角之傾向。又,藉由設為上述上限值以下,存在能夠保持高感度之傾向。When the photosensitive resin composition of the present invention contains a polymerization inhibitor, the content of the polymerization inhibitor in the photosensitive resin composition is preferably 0.0005 mass% in the total solid content of the photosensitive resin composition Above, it is more preferably 0.001% by mass or more, still more preferably 0.01% by mass or more, more preferably 0.3% by mass or less, more preferably 0.2% by mass or less, and still more preferably 0.1% by mass or less. The above upper limit and lower limit can be combined arbitrarily, and for example, it is preferably 0.0005 to 0.3% by mass, more preferably 0.001 to 0.2% by mass, and still more preferably 0.01 to 0.1% by mass. By setting it as the above lower limit or more, there is a tendency that the taper angle can be increased. In addition, there is a tendency that high sensitivity can be maintained by setting it below the above upper limit value.

[1-1-8]胺基化合物 本發明之感光性樹脂組合物亦可含有胺基化合物,以促進熱硬化。 於本發明之感光性樹脂組合物包含胺基化合物之情形時,作為感光性樹脂組合物中之胺基化合物之含量,於感光性樹脂組合物之總固形物成分中,較佳為40質量%以下,更佳為30質量%以下。又,較佳為0.5質量%以上,更佳為1質量%以上。上述上限及下限可任意地組合,例如較佳為0.5~40質量%,更佳為1~30質量%。藉由設為上述上限值以下,存在能夠維持保存穩定性之傾向。藉由設為上述下限值以上,存在能夠確保充分之熱硬化性之傾向。[1-1-8] Amino compound The photosensitive resin composition of the present invention may also contain an amino compound to promote thermal curing. When the photosensitive resin composition of the present invention contains an amine-based compound, the content of the amine-based compound in the photosensitive resin composition is preferably 40% by mass in the total solid content of the photosensitive resin composition Below, it is more preferably 30% by mass or less. Moreover, it is preferably 0.5% by mass or more, and more preferably 1% by mass or more. The above upper limit and lower limit can be combined arbitrarily, and for example, it is preferably 0.5 to 40% by mass, and more preferably 1 to 30% by mass. By setting it as the upper limit or less mentioned above, there exists a tendency which can maintain storage stability. By setting it as the above-mentioned lower limit or more, there exists a tendency which can ensure sufficient thermosetting property.

作為胺基化合物,例如可例舉具有至少2個羥甲基、或用碳數1~8之醇對羥甲基進行縮合改性而得之烷氧基甲基作為官能基的胺基化合物。具體而言,例如可例舉:使三聚氰胺與甲醛進行縮聚而得之三聚氰胺樹脂;使苯并胍胺與甲醛進行縮聚而得之苯并胍胺樹脂;使甘脲與甲醛進行縮聚而得之甘脲樹脂;使脲與甲醛進行縮聚而得之脲樹脂;使三聚氰胺、苯并胍胺、甘脲、或脲等之2種以上與甲醛進行共縮聚而得之樹脂;對上述樹脂之羥甲基進行醇縮合改性而得之改性樹脂。 該等可單獨使用1種,亦可將2種以上併用。 作為胺基化合物,其中,較佳為三聚氰胺樹脂及其改性樹脂,進而較佳為羥甲基之改性比率為70%以上之改性樹脂,尤佳為80%以上之改性樹脂。As the amino compound, for example, an amino compound having at least two methylol groups or an alkoxymethyl group obtained by condensation-modifying a methylol group with an alcohol having 1 to 8 carbon atoms as a functional group can be mentioned. Specifically, for example, a melamine resin obtained by polycondensing melamine and formaldehyde; a benzoguanamine resin obtained by polycondensing benzoguanamine and formaldehyde; and a sweetened resin obtained by polycondensing glycoluril and formaldehyde. Urea resin; urea resin obtained by polycondensation of urea and formaldehyde; resin obtained by copolycondensation of two or more of melamine, benzoguanamine, glycoluril, or urea with formaldehyde; the methylol of the above resin Modified resin obtained by alcohol condensation modification. These may be used individually by 1 type, and may use 2 or more types together. As the amine-based compound, among them, melamine resin and its modified resins are preferred, modified resins with a methylol modification ratio of 70% or more are more preferred, and modified resins with 80% or more of them are particularly preferred.

關於作為胺基化合物之三聚氰胺樹脂及其改性樹脂,例如可例舉:Cytec公司製造之CYMEL(註冊商標,以下相同)300、301、303、350、736、738、370、771、325、327、703、701、266、267、285、232、235、238、1141、272、254、202、1156、1158、及SANWA CHEMICAL公司製造之NIKALAC(註冊商標,以下相同)MW-390、MW-100LM、MX-750LM、MW-30M、MX-45、MX-302。 作為苯并胍胺樹脂及其改性樹脂,例如可例舉Cytec公司製造之CYMEL 1123、1125、1128。 作為甘脲樹脂及其改性樹脂,例如可例舉:Cytec公司製造之CYMEL 1170、1171、1174、1172、及、SANWA CHEMICAL公司製造之NIKALAC MX-270。 作為脲樹脂及其改性樹脂,例如可例舉:Cytec公司製造之UFR(註冊商標,以下相同)65、300、及SANWA CHEMICAL公司製造之NIKALAC MX-290。Regarding the melamine resin and its modified resin as an amino compound, for example, CYMEL (registered trademark, the same below) 300, 301, 303, 350, 736, 738, 370, 771, 325, 327 manufactured by Cytec Corporation , 703, 701, 266, 267, 285, 232, 235, 238, 1141, 272, 254, 202, 1156, 1158, and NIKALAC manufactured by SANWA CHEMICAL (registered trademark, the same below) MW-390, MW-100LM , MX-750LM, MW-30M, MX-45, MX-302. As the benzoguanamine resin and its modified resin, for example, CYMEL 1123, 1125, and 1128 manufactured by Cytec Corporation can be mentioned. As the glycoluril resin and its modified resin, for example, CYMEL 1170, 1171, 1174, 1172 manufactured by Cytec Corporation, and NIKALAC MX-270 manufactured by SANWA CHEMICAL Corporation may be mentioned. As the urea resin and its modified resin, for example, UFR (registered trademark, the same below) 65 and 300 manufactured by Cytec Corporation, and NIKALAC MX-290 manufactured by SANWA CHEMICAL Corporation may be mentioned.

[1-1-9]著色劑 本發明之感光性樹脂組合物亦可含有著色劑,以使阻隔壁著色。作為著色劑,可使用顏料、染料等公知之著色劑。 於使用顏料時,亦可併用公知之分散劑或分散助劑,以使該顏料能夠穩定地存在於感光性樹脂組合物中,而不凝集。尤其是藉由將撥墨性阻隔壁著色成黑色,具有可獲得清晰之像素顯示之效果。作為黑色著色劑,除黑色染料或黑色顏料、碳黑、鈦黑等以外,作為保持低導電性之效果亦有效的是混合有機顏料來著色成黑色。 作為著色劑之含量,就製版性及顏色特性之觀點而言,於感光性樹脂組合物之總固形物成分中,較佳為60質量%以下,更佳為40質量%以下。 作為又一形態,若感光性樹脂組合物中包含著色劑,則存在如下傾向:阻隔壁之硬化性降低,阻隔壁之撥液性降低,亦容易產生釋氣。因此,較理想為感光性樹脂組合物中之著色劑之含量較低,例如相對於感光性樹脂組合物之總固形物成分較佳為20質量%以下,更佳為10質量%以下,尤佳為5質量%以下,最佳為0質量%。[1-1-9] Coloring agent The photosensitive resin composition of the present invention may contain a coloring agent to color the barrier ribs. As the coloring agent, known coloring agents such as pigments and dyes can be used. When a pigment is used, a well-known dispersant or dispersion aid may be used in combination so that the pigment can stably exist in the photosensitive resin composition without aggregation. In particular, by coloring the ink repellent barrier wall into black, it has the effect of obtaining a clear pixel display. As a black coloring agent, in addition to black dyes, black pigments, carbon black, titanium black, etc., it is also effective to maintain low conductivity by mixing organic pigments to color black. The content of the colorant is preferably 60% by mass or less, and more preferably 40% by mass or less in the total solid content of the photosensitive resin composition from the viewpoint of plate-making properties and color characteristics. As another aspect, if the photosensitive resin composition contains a coloring agent, there is a tendency that the curability of the barrier ribs is reduced, the liquid repellency of the barrier ribs is reduced, and outgassing is likely to occur. Therefore, it is desirable that the content of the coloring agent in the photosensitive resin composition is relatively low. For example, relative to the total solid content of the photosensitive resin composition, it is preferably 20% by mass or less, more preferably 10% by mass or less, especially It is 5% by mass or less, preferably 0% by mass.

[1-1-10]塗佈性改善劑、顯影改良劑 本發明之感光性樹脂組合物亦可含有塗佈性改善劑或顯影改良劑,以提昇塗佈性或顯影溶解性。 作為塗佈性改善劑或者顯影改良劑,例如可使用公知之界面活性劑。 界面活性劑可以提昇感光性樹脂組合物之作為塗佈液之塗佈性、及塗佈膜之顯影性等為目的而使用,其中較佳為氟系界面活性劑或聚矽氧系界面活性劑。 尤其是就顯影時具有自未曝光部去除感光性樹脂組合物之殘渣之作用並且具有表現潤濕性之功能之方面而言,較佳為聚矽氧系界面活性劑,進而較佳為聚醚改性聚矽氧系界面活性劑。[1-1-10] Coatability improver, development improver The photosensitive resin composition of the present invention may also contain a coatability improver or a development modifier to improve coatability or development solubility. As the coatability improver or the development improver, for example, a well-known surfactant can be used. Surfactants can be used for the purpose of improving the coatability of the photosensitive resin composition as a coating liquid and the developability of the coating film. Among them, a fluorine-based surfactant or a silicone-based surfactant is preferred. . Especially in terms of having the function of removing the residue of the photosensitive resin composition from the unexposed part during development and having the function of expressing wettability, a silicone-based surfactant is preferred, and a polyether is more preferred. Modified silicone surfactants.

作為氟系界面活性劑,較佳為於末端、主鏈及側鏈之至少任一部位具有氟烷基或氟伸烷基之化合物。具體而言可例舉:1,1,2,2-四氟辛基(1,1,2,2-四氟丙基)醚、1,1,2,2-四氟辛基己基醚、八乙二醇二(1,1,2,2-四氟丁基)醚、六乙二醇二(1,1,2,2,3,3-六氟戊基)醚、八丙二醇二(1,1,2,2-四氟丁基)醚、六丙二醇二(1,1,2,2,3,3-六氟戊基)醚、全氟十二烷基磺酸鈉、1,1,2,2,8,8,9,9,10,10-十氟十二烷、1,1,2,2,3,3-六氟癸烷等。作為該等之市售品,例如可例舉:BM Chemie公司製造之「BM-1000」、「BM-1100」、DIC公司製造之「MEGAFACF 470」、「MEGAFACF 475」、「MEGAFACF 554」、「MEGAFACF 559」、3M Japan公司製造之「FC430」、NEOS公司製造之「DFX-18」。The fluorine-based surfactant is preferably a compound having a fluoroalkyl group or a fluoroalkylene group in at least any one of the terminal, main chain, and side chain. Specifically, examples include: 1,1,2,2-tetrafluorooctyl (1,1,2,2-tetrafluoropropyl) ether, 1,1,2,2-tetrafluorooctylhexyl ether, Octaethylene glycol bis(1,1,2,2-tetrafluorobutyl) ether, hexaethylene glycol bis(1,1,2,2,3,3-hexafluoropentyl) ether, octapropylene glycol bis( 1,1,2,2-tetrafluorobutyl) ether, hexapropylene glycol bis(1,1,2,2,3,3-hexafluoropentyl) ether, sodium perfluorododecyl sulfonate, 1, 1,2,2,8,8,9,9,10,10-decafluorododecane, 1,1,2,2,3,3-hexafluorodecane, etc. Examples of these commercially available products include: "BM-1000" and "BM-1100" manufactured by BM Chemie, "MEGAFACF 470", "MEGAFACF 475", "MEGAFACF 554", and "MEGAFACF 470" manufactured by DIC. MEGAFACF 559", "FC430" manufactured by 3M Japan, and "DFX-18" manufactured by NEOS.

作為聚矽氧系界面活性劑,例如可例舉:Dow Corning Toray公司製造之「DC3PA」、「SH7PA」、「DC11PA」、「SH21PA」、「SH28PA」、「SH29PA」、「8032Additive」、「SH8400」、BYK-Chemie公司製造之「BYK(註冊商標,以下相同)323」、「BYK330」。 亦可包含除氟系界面活性劑及聚矽氧系界面活性劑以外之其他界面活性劑作為界面活性劑,作為其他界面活性劑,例如可例舉非離子性、陰離子性、陽離子性、兩性界面活性劑。As the silicone-based surfactant, for example, "DC3PA", "SH7PA", "DC11PA", "SH21PA", "SH28PA", "SH29PA", "8032Additive", "SH8400" manufactured by Dow Corning Toray ", "BYK (registered trademark, the same below) 323" and "BYK330" manufactured by BYK-Chemie. Other surfactants other than fluorine-based surfactants and silicone-based surfactants can also be included as surfactants. As other surfactants, for example, nonionic, anionic, cationic, and amphoteric interfaces can be mentioned. Active agent.

作為非離子性界面活性劑,例如可例舉:聚氧乙烯烷基醚類、聚氧乙烯聚氧丙烯烷基醚類、聚氧乙烯烷基苯基醚類、聚氧乙烯烷基酯類、聚氧乙烯脂肪酸酯類、甘油脂肪酸酯類、聚氧乙烯甘油脂肪酸酯類、季戊四醇脂肪酸酯類、聚氧乙烯季戊四醇脂肪酸酯類、山梨糖醇酐脂肪酸酯類、聚氧乙烯山梨糖醇酐脂肪酸酯類、山梨糖醇脂肪酸酯類、聚氧乙烯山梨糖醇脂肪酸酯類。作為該等之市售品,例如可例舉:花王公司製造之「EMULGEN(註冊商標;以下相同)104P」、「EMULGEN A60」等聚氧乙烯系界面活性劑等。As nonionic surfactants, for example, polyoxyethylene alkyl ethers, polyoxyethylene polyoxypropylene alkyl ethers, polyoxyethylene alkyl phenyl ethers, polyoxyethylene alkyl esters, Polyoxyethylene fatty acid esters, glycerin fatty acid esters, polyoxyethylene glycerin fatty acid esters, pentaerythritol fatty acid esters, polyoxyethylene pentaerythritol fatty acid esters, sorbitan fatty acid esters, polyoxyethylene sorbitan fatty acid esters Class, sorbitol fatty acid esters, polyoxyethylene sorbitol fatty acid esters. Examples of these commercially available products include polyoxyethylene-based surfactants such as "EMULGEN (registered trademark; the same hereinafter) 104P" and "EMULGEN A60" manufactured by Kao Corporation.

作為陰離子性界面活性劑,例如可例舉:烷基磺酸鹽類、烷基苯磺酸鹽類、烷基萘磺酸鹽類、聚氧乙烯烷基醚磺酸鹽類、烷基硫酸鹽類、烷基硫酸酯鹽類、高級醇硫酸酯鹽類、脂肪族醇硫酸酯鹽類、聚氧乙烯烷基醚硫酸鹽類、聚氧乙烯烷基苯基醚硫酸鹽類、烷基磷酸酯鹽類、聚氧乙烯烷基醚磷酸鹽類、聚氧乙烯烷基苯基醚磷酸鹽類、特殊高分子系界面活性劑。其中,較佳為特殊高分子系界面活性劑,進而較佳為特殊多羧酸型高分子系界面活性劑。作為陰離子性界面活性劑,例如烷基硫酸酯鹽類可例舉花王公司製造之「EMAL(註冊商標)10」等,烷基萘磺酸鹽類可例舉花王公司製造之「Pelex(註冊商標)NB-L」等,特殊高分子系界面活性劑可例舉花王公司製造之「HOMOGENOL(註冊商標,以下相同)L-18」、「HOMOGENOL L-100」等。Examples of anionic surfactants include alkyl sulfonates, alkylbenzene sulfonates, alkyl naphthalene sulfonates, polyoxyethylene alkyl ether sulfonates, and alkyl sulfates. Type, alkyl sulfate ester salts, higher alcohol sulfate ester salts, aliphatic alcohol sulfate ester salts, polyoxyethylene alkyl ether sulfates, polyoxyethylene alkyl phenyl ether sulfates, alkyl phosphates Salts, polyoxyethylene alkyl ether phosphates, polyoxyethylene alkyl phenyl ether phosphates, special polymer surfactants. Among them, a special polymer surfactant is preferred, and a special polycarboxylic acid polymer surfactant is more preferred. As an anionic surfactant, for example, alkyl sulfate ester salts may include "EMAL (registered trademark) 10" manufactured by Kao Corporation, and alkyl naphthalene sulfonates may include "Pelex (registered trademark) manufactured by Kao Corporation. ) NB-L" and so on. The special polymer-based surfactants include "HOMOGENOL (registered trademark, the same below) L-18" and "HOMOGENOL L-100" manufactured by Kao Corporation.

作為陽離子性界面活性劑,例如可例舉:四級銨鹽類、咪唑啉衍生物類、烷基胺鹽類。作為兩性界面活性劑,例如可例舉:甜菜鹼型化合物類、咪唑鎓鹽類、咪唑啉類、胺基酸類。該等中,較佳為四級銨鹽類,進而較佳為硬脂基三甲基銨鹽類。作為陽離子性界面活性劑或兩性界面活性劑,例如,作為烷基胺鹽類,可例舉花王公司製造之「Acetamin(註冊商標)24」,作為四級銨鹽類,可例舉花王公司製造之「Quartamin(註冊商標,以下相同)24P」、「Quartamin 86W」。 界面活性劑可單獨使用1種,亦可將2種以上併用。例如可例舉:聚矽氧系界面活性劑/氟系界面活性劑之組合、聚矽氧系界面活性劑/特殊高分子系界面活性劑之組合、氟系界面活性劑/特殊高分子系界面活性劑之組合。其中,較佳為聚矽氧系界面活性劑/氟系界面活性劑之組合。關於該聚矽氧系界面活性劑/氟系界面活性劑之組合,例如可例舉:BYK-Chemie公司製造之「BYK-300」或「BYK-330」/NEOS公司製造之「DFX-18」、BYK-Chemie公司製造之「BYK-300」、「BYK-330」/AGC SEIMI CHEMICAL公司製造之「S-393」、BYK-Chemie公司製造之「BYK-300」或「BYK-330」/DIC公司製造之「F-554」或「F-559」、Shin-Etsu Silicones公司製造之「KP340」/DIC公司製造之「F-478」或「F-475」、Dow Corning Toray公司製造之「SH7PA」/Daikin公司製造之「DS-401」、NUC公司製造之「L-77」/3M Japan公司製造之「FC4430」。 作為顯影改良劑,例如亦可使用包含有機羧酸或其酐之公知之顯影改良劑。 於本發明之感光性樹脂組合物包含塗佈性改善劑或顯影改良劑之情形時,關於塗佈性改善劑或顯影改良劑之含量,就感度之觀點而言,於感光性樹脂組合物之總固形物成分中,較佳為分別為20質量%以下,更佳為分別為10質量%以下。Examples of cationic surfactants include quaternary ammonium salts, imidazoline derivatives, and alkylamine salts. As an amphoteric surfactant, for example, betaine-type compounds, imidazolium salts, imidazolines, and amino acids may be mentioned. Among them, quaternary ammonium salts are preferred, and stearyl trimethyl ammonium salts are more preferred. As the cationic surfactant or amphoteric surfactant, for example, the alkylamine salt may be "Acetamin (registered trademark) 24" manufactured by Kao Corporation, and the quaternary ammonium salt may be manufactured by Kao Corporation. "Quartamin (registered trademark, the same below) 24P" and "Quartamin 86W". Surfactant may be used individually by 1 type, and may use 2 or more types together. For example, a combination of silicone-based surfactant/fluorine-based surfactant, a combination of silicone-based surfactant/special polymer-based surfactant, fluorine-based surfactant/special polymer-based interface A combination of active agents. Among them, a combination of polysiloxane-based surfactant/fluorine-based surfactant is preferred. Regarding the combination of the polysiloxane-based surfactant/fluorine-based surfactant, for example, "BYK-300" or "BYK-330" manufactured by BYK-Chemie / "DFX-18" manufactured by NEOS , BYK-Chemie company "BYK-300", "BYK-330"/AGC SEIMI CHEMICAL company "S-393", BYK-Chemie company "BYK-300" or "BYK-330"/DIC "F-554" or "F-559" manufactured by the company, "KP340" manufactured by Shin-Etsu Silicones, "F-478" or "F-475" manufactured by DIC, and "SH7PA" manufactured by Dow Corning Toray "/"DS-401" made by Daikin Company, "L-77" made by NUC Company/3 "FC4430" made by M Japan Company. As the development modifier, for example, a well-known development modifier containing an organic carboxylic acid or an anhydride thereof can also be used. When the photosensitive resin composition of the present invention contains a coatability improver or a development modifier, the content of the coatability improver or the development modifier is in terms of sensitivity from the viewpoint of sensitivity. The total solid content is preferably 20% by mass or less, and more preferably 10% by mass or less.

[1-1-11]矽烷偶合劑 本發明之感光性樹脂組合物亦可含有矽烷偶合劑,以改善與基板之密接性。作為矽烷偶合劑,例如可使用環氧系、甲基丙烯酸系、胺基系、咪唑系之矽烷偶合劑。就提昇密接性之觀點而言,尤佳為環氧系、咪唑系之矽烷偶合劑。 於本發明之感光性樹脂組合物包含矽烷偶合劑之情形時,矽烷偶合劑之含量就密接性之觀點而言,於感光性樹脂組合物之總固形物成分中,較佳為20質量%以下,更佳為15質量%以下。[1-1-11] Silane coupling agent The photosensitive resin composition of the present invention may also contain a silane coupling agent to improve the adhesion to the substrate. As the silane coupling agent, for example, epoxy-based, methacrylic-based, amino-based, and imidazole-based silane coupling agents can be used. From the viewpoint of improving adhesion, epoxy-based and imidazole-based silane coupling agents are particularly preferred. When the photosensitive resin composition of the present invention contains a silane coupling agent, the content of the silane coupling agent is preferably 20% by mass or less in the total solid content of the photosensitive resin composition from the viewpoint of adhesion , More preferably 15% by mass or less.

[1-1-12]磷酸系密接改善劑 本發明之感光性樹脂組合物亦可含有磷酸系密接改善劑,以改善與基板之密接性。作為磷酸系密接改善劑,較佳為含有(甲基)丙烯醯氧基之磷酸酯類,其中較佳為下述通式(Va)、(Vb)、(Vc)所表示者。[1-1-12] Phosphoric acid based adhesion improver The photosensitive resin composition of the present invention may also contain a phosphoric acid-based adhesion improver to improve the adhesion to the substrate. The phosphoric acid-based adhesion improving agent is preferably a (meth)acryloyloxy-containing phosphoric acid ester, and among these, those represented by the following general formulas (Va), (Vb), and (Vc) are preferred.

[化51]

Figure 02_image105
[化51]
Figure 02_image105

於上述通式(Va)、(Vb)、(Vc)中,R8 表示氫原子或甲基,r及r'為1~10之整數,s為1、2或3。In the above general formulas (Va), (Vb), and (Vc), R 8 represents a hydrogen atom or a methyl group, r and r'are integers of 1-10, and s is 1, 2, or 3.

於本發明之感光性樹脂組合物含有磷酸系密接改善劑之情形時,其含量並無特別限定,於感光性樹脂組合物之總固形物成分中,較佳為0.1質量%以上,更佳為0.2質量%以上,進而較佳為0.3質量%以上,又,較佳為5質量%以下,更佳為3質量%以下,進而較佳為1質量%以下。上述上限及下限可任意地組合,例如較佳為0.1~5質量%,更佳為0.2~3質量%,進而較佳為0.3~1質量%。藉由設為上述下限值以上,存在與基板之密接性提昇之傾向。又,藉由設為上述上限值以下,存在表面硬化性提昇之傾向。When the photosensitive resin composition of the present invention contains a phosphoric acid-based adhesion improver, its content is not particularly limited. In the total solid content of the photosensitive resin composition, it is preferably 0.1% by mass or more, more preferably 0.2% by mass or more, more preferably 0.3% by mass or more, more preferably 5% by mass or less, more preferably 3% by mass or less, and still more preferably 1% by mass or less. The above upper limit and lower limit can be combined arbitrarily, and for example, it is preferably 0.1 to 5% by mass, more preferably 0.2 to 3% by mass, and still more preferably 0.3 to 1% by mass. By setting it to the above lower limit or more, there is a tendency for the adhesion to the substrate to improve. In addition, by setting it to the upper limit or less, the surface hardenability tends to be improved.

[1-1-13]無機填充劑 本發明之感光性樹脂組合物亦可含有無機填充劑,以提昇作為硬化物之強度,並且提昇藉由與鹼可溶性樹脂之適度之相互作用(基質結構之形成)而得之塗佈膜之優異之平坦性及錐角。作為無機填充劑,例如可例舉:滑石、二氧化矽、氧化鋁、硫酸鋇、氧化鎂、藉由各種矽烷偶合劑對該等進行表面處理而得者。[1-1-13] Inorganic filler The photosensitive resin composition of the present invention may also contain an inorganic filler to increase the strength of the hardened product, and to improve the superiority of the coating film obtained by the moderate interaction with the alkali-soluble resin (formation of the matrix structure) The flatness and cone angle. As the inorganic filler, for example, talc, silica, alumina, barium sulfate, magnesium oxide, and those obtained by surface-treating these with various silane coupling agents.

作為無機填充劑之平均粒徑,較佳為0.005~20 μm,更佳為0.01~10 μm。此處,所謂平均粒徑,係指藉由貝克曼庫爾特公司等製造之雷射繞射散射粒度分佈測定裝置所測得之值。無機填充劑中,較佳為矽溶膠及矽溶膠改性物,其原因在於存在分散穩定性以及錐角之提昇效果優異之傾向。 於本發明之感光性樹脂組合物包含無機填充劑之情形時,作為其含量,就感度之觀點而言,於感光性樹脂組合物之總固形物成分中,較佳為5質量%以上,更佳為10質量%以上,又,較佳為80質量%以下,更佳為70質量%以下。上述上限及下限可任意地組合,例如較佳為5~80質量%,更佳為10~70質量%。The average particle diameter of the inorganic filler is preferably 0.005 to 20 μm, more preferably 0.01 to 10 μm. Here, the average particle size refers to the value measured by a laser diffraction scattering particle size distribution measuring device manufactured by Beckman Coulter, etc. Among the inorganic fillers, the silica sol and the modified silica sol are preferable because of the tendency of the dispersion stability and the improvement effect of the cone angle to be excellent. When the photosensitive resin composition of the present invention contains an inorganic filler, as its content, from the viewpoint of sensitivity, it is preferably 5% by mass or more in the total solid content of the photosensitive resin composition, and more It is preferably 10% by mass or more, more preferably 80% by mass or less, and more preferably 70% by mass or less. The above upper limit and lower limit can be combined arbitrarily, and for example, it is preferably 5 to 80% by mass, more preferably 10 to 70% by mass.

[1-1-14]溶劑 本發明之感光性樹脂組合物通常含有溶劑,且以使上述各成分溶解或分散於溶劑中之狀態進行使用。作為溶劑,並無特別限制,例如可例舉以下記載之有機溶劑。[1-1-14] Solvent The photosensitive resin composition of the present invention usually contains a solvent, and is used in a state where the above-mentioned components are dissolved or dispersed in the solvent. The solvent is not particularly limited, and for example, the organic solvents described below can be mentioned.

乙二醇單甲醚、乙二醇單乙醚、乙二醇單丙醚、乙二醇單丁醚、丙二醇單甲醚、丙二醇單乙醚、丙二醇單正丁醚、丙二醇第三丁醚、二乙二醇單甲醚、二乙二醇單乙醚、二乙二醇單正丁醚、甲氧基甲基戊醇、二丙二醇單乙醚、二丙二醇單甲醚、3-甲基-3-甲氧基丁醇、3-甲氧基-1-丁醇、三乙二醇單甲醚、三乙二醇單乙醚、三丙二醇甲醚等二醇單烷基醚類;乙二醇二甲醚、乙二醇二乙醚、二乙二醇二甲醚、二乙二醇二乙醚、二乙二醇二丙醚、二乙二醇二丁醚、二丙二醇二甲醚等二醇二烷基醚類;乙二醇單甲醚乙酸酯、乙二醇單乙醚乙酸酯、乙二醇單正丁醚乙酸酯、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯、丙二醇單丙醚乙酸酯、丙二醇單丁醚乙酸酯、乙酸甲氧基丁酯、乙酸3-甲氧基丁酯、乙酸甲氧基戊酯、二乙二醇單甲醚乙酸酯、二乙二醇單乙醚乙酸酯、二乙二醇單正丁醚乙酸酯、二丙二醇單甲醚乙酸酯、三乙二醇單甲醚乙酸酯、三乙二醇單乙醚乙酸酯、乙酸3-甲基-3-甲氧基丁酯、乙酸3-甲氧基-1-丁酯等二醇烷基醚乙酸酯類;乙二醇二乙酸酯、1,3-丁二醇二乙酸酯、1,6-己醇二乙酸酯等二醇二乙酸酯類;乙酸環己酯等乙酸烷基酯類;戊醚、二乙醚、二丙醚、二異丙醚、二丁醚、二戊醚、乙基異丁基醚、二己醚等醚類;丙酮、甲基乙基酮、甲基戊基酮、甲基異丙基酮、甲基異戊基酮、二異丙基酮、二異丁基酮、甲基異丁基酮、環己酮、乙基戊基酮、甲基丁基酮、甲基己基酮、甲基壬基酮、甲氧基甲基戊酮等酮類;甲醇、乙醇、丙醇、丁醇、己醇、環己醇、乙二醇、丙二醇、丁二醇、二乙二醇、二丙二醇、三乙二醇、甲氧基甲基戊醇、甘油、苄醇等一元或多元醇類;正戊烷、正辛烷、二異丁烯、正己烷、己烯、異戊二烯、二戊烯、十二烷等脂肪族烴類;環己烷、甲基環己烷、甲基環己烯、聯環己烷等脂環式烴類;苯、甲苯、二甲苯、異丙苯等芳香族烴類;甲酸戊酯、甲酸乙酯、乙酸乙酯、乙酸丁酯、乙酸丙酯、乙酸戊酯、異丁酸甲酯、乙二醇乙酸酯、丙酸乙酯、丙酸丙酯、丁酸丁酯、丁酸異丁酯、異丁酸甲酯、辛酸乙酯、硬脂酸丁酯、苯甲酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-甲氧基丙酸丙酯、3-甲氧基丙酸丁酯、γ-丁內酯等鏈狀或環狀酯類;3-甲氧基丙酸、3-乙氧基丙酸等烷氧基羧酸類;氯丁烷、氯戊烷等鹵代烴類;甲氧基甲基戊酮等醚酮類;乙腈、苯甲腈等腈類;四氫呋喃、二甲基四氫呋喃、二甲氧基四氫呋喃等四氫呋喃類等。Ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monobutyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol mono-n-butyl ether, propylene glycol tertiary butyl ether, diethyl Glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol mono-n-butyl ether, methoxymethylpentanol, dipropylene glycol monoethyl ether, dipropylene glycol monomethyl ether, 3-methyl-3-methoxy Glycol monoalkyl ethers such as butyl butanol, 3-methoxy-1-butanol, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, and tripropylene glycol methyl ether; ethylene glycol dimethyl ether, Diethylene glycol diethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol dipropyl ether, diethylene glycol dibutyl ether, dipropylene glycol dimethyl ether and other glycol dialkyl ethers ; Ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, ethylene glycol mono-n-butyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether Acetate, propylene glycol monobutyl ether acetate, methoxybutyl acetate, 3-methoxybutyl acetate, methoxypentyl acetate, diethylene glycol monomethyl ether acetate, diethylene glycol Monoethyl ether acetate, diethylene glycol mono-n-butyl ether acetate, dipropylene glycol monomethyl ether acetate, triethylene glycol monomethyl ether acetate, triethylene glycol monoethyl ether acetate, acetic acid 3 -Methyl-3-methoxybutyl ester, 3-methoxy-1-butyl acetate and other glycol alkyl ether acetates; ethylene glycol diacetate, 1,3-butanediol diethyl Ester, 1,6-hexanol diacetate and other glycol diacetates; cyclohexyl acetate and other alkyl acetates; amyl ether, diethyl ether, dipropyl ether, diisopropyl ether, dibutyl ether , Dipentyl ether, ethyl isobutyl ether, dihexyl ether and other ethers; acetone, methyl ethyl ketone, methyl amyl ketone, methyl isopropyl ketone, methyl isoamyl ketone, diisopropyl ketone Methyl ketone, diisobutyl ketone, methyl isobutyl ketone, cyclohexanone, ethyl amyl ketone, methyl butyl ketone, methyl hexyl ketone, methyl nonyl ketone, methoxymethyl pentanone Ketones such as methanol, ethanol, propanol, butanol, hexanol, cyclohexanol, ethylene glycol, propylene glycol, butylene glycol, diethylene glycol, dipropylene glycol, triethylene glycol, methoxymethylpentanol Monohydric or polyhydric alcohols such as alcohol, glycerin, and benzyl alcohol; aliphatic hydrocarbons such as n-pentane, n-octane, diisobutene, n-hexane, hexene, isoprene, dipentene, dodecane, etc.; cyclohexane Alkane, methylcyclohexane, methylcyclohexene, bicyclohexane and other alicyclic hydrocarbons; benzene, toluene, xylene, cumene and other aromatic hydrocarbons; pentyl formate, ethyl formate, acetic acid Ethyl acetate, butyl acetate, propyl acetate, pentyl acetate, methyl isobutyrate, ethylene glycol acetate, ethyl propionate, propyl propionate, butyl butyrate, isobutyl butyrate, isobutyl Methyl butyrate, ethyl octanoate, butyl stearate, ethyl benzoate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, methyl 3-methoxypropionate, Ethyl 3-methoxypropionate, propyl 3-methoxypropionate, butyl 3-methoxypropionate, γ-butyrolactone and other chain or cyclic esters; 3-methoxypropionate Alkoxycarboxylic acids such as acid and 3-ethoxypropionic acid; halogenated hydrocarbons such as chlorobutane and chloropentane; ether ketones such as methoxymethylpentanone; nitriles such as acetonitrile and benzonitrile; Tetrahydrofuran, dimethyltetrahydrofuran, dimethoxytetrahydrofuran, etc. Nan class and so on.

作為相當於上述溶劑之市售溶劑,例如可例舉:礦油精、Varsol#2、Apco#18溶劑、Apco稀釋劑、Socal溶劑No.1及No.2、Solvesso#150、Shell TS28溶劑、卡必醇、乙基卡必醇、丁基卡必醇、甲基溶纖劑、乙基溶纖劑、乙基溶纖劑乙酸酯、甲基溶纖劑乙酸酯、二乙二醇二甲醚(均為商品名)。As a commercially available solvent equivalent to the above-mentioned solvent, for example, mineral spirits, Varsol #2, Apco #18 solvent, Apco diluent, Socal solvent No. 1 and No. 2, Solvesso #150, Shell TS28 solvent, Carbitol, ethyl carbitol, butyl carbitol, methyl cellosolve, ethyl cellosolve, ethyl cellosolve acetate, methyl cellosolve acetate, diethylene glycol Dimethyl ether (all trade names).

溶劑能夠使感光性樹脂組合物中之各成分溶解或分散,可根據本發明之感光性樹脂組合物之使用方法進行選擇,就塗佈性之觀點而言,較佳為大氣壓下(1013.25 hPa)之沸點為60~280℃者,更佳為70~260℃者。例如較佳為丙二醇單甲醚、3-甲氧基-1-丁醇、丙二醇單甲醚乙酸酯、乙酸3-甲氧基-1-丁酯。The solvent can dissolve or disperse the components in the photosensitive resin composition, and can be selected according to the method of using the photosensitive resin composition of the present invention. From the viewpoint of coatability, it is preferably under atmospheric pressure (1013.25 hPa) The boiling point is 60 to 280°C, more preferably 70 to 260°C. For example, propylene glycol monomethyl ether, 3-methoxy-1-butanol, propylene glycol monomethyl ether acetate, and 3-methoxy-1-butyl acetate are preferable.

溶劑可單獨使用1種,亦可將2種以上併用。 關於溶劑,較佳為以感光性樹脂組合物中之總固形物成分成為較佳為10質量%以上、更佳為15質量%以上、進而較佳為18質量%以上,並且成為較佳為90質量%以下、更佳為50質量%以下、進而較佳為40質量%以下、尤佳為30質量%以下之方式進行使用。上述上限及下限可任意地組合,例如較佳為10~90質量%,更佳為10~50質量%,進而較佳為15~40質量%,尤佳為18~30質量%。藉由設為上述下限值以上,存在即便針對較高之膜厚亦可獲得塗膜之傾向。又,藉由設為上述上限值以下,存在可獲得適度之塗佈均勻性之傾向。A solvent may be used individually by 1 type, and may use 2 or more types together. Regarding the solvent, it is preferable that the total solid content in the photosensitive resin composition is preferably 10% by mass or more, more preferably 15% by mass or more, still more preferably 18% by mass or more, and more preferably 90%. It is used in a mass% or less, more preferably 50 mass% or less, still more preferably 40 mass% or less, and particularly preferably 30 mass% or less. The above upper limit and lower limit can be combined arbitrarily, and for example, it is preferably 10 to 90% by mass, more preferably 10 to 50% by mass, still more preferably 15 to 40% by mass, and particularly preferably 18 to 30% by mass. By setting it as the above-mentioned lower limit or more, there exists a tendency for a coating film to be obtained even for a high film thickness. Moreover, by setting it as the above upper limit or less, there exists a tendency to obtain moderate coating uniformity.

[1-2]感光性樹脂組合物之製備方法 本發明之感光性樹脂組合物係藉由將上述各成分利用攪拌機加以混合來製備。再者,亦可使用膜濾器等進行過濾,以使所製備之感光性樹脂組合物變得均勻。[1-2] Preparation method of photosensitive resin composition The photosensitive resin composition of the present invention is prepared by mixing the above-mentioned components with a mixer. Furthermore, it is also possible to perform filtration using a membrane filter etc. so that the prepared photosensitive resin composition may become uniform.

[2]阻隔壁及其形成方法 本發明之感光性樹脂組合物可良好地用於形成阻隔壁,尤其是用以劃分有機電致發光元件之有機層(發光部)之阻隔壁。本發明之阻隔壁係使本發明之感光性樹脂組合物硬化而獲得。 使用本發明之感光性樹脂組合物形成阻隔壁之方法並無特別限定,可採用先前公知之方法。作為阻隔壁之形成方法,例如可例舉包括如下步驟之方法:塗佈步驟,其係將感光性樹脂組合物塗佈於基板上而形成感光性樹脂組合物層;及曝光步驟,其係對感光性樹脂組合物層進行曝光。作為此種阻隔壁之形成方法之具體例,可例舉光微影法。[2] Barrier wall and its forming method The photosensitive resin composition of the present invention can be suitably used to form barrier ribs, especially barrier ribs for dividing the organic layer (light emitting part) of an organic electroluminescent device. The barrier rib of the present invention is obtained by curing the photosensitive resin composition of the present invention. The method of forming barrier ribs using the photosensitive resin composition of the present invention is not particularly limited, and a previously known method can be used. As a method of forming the barrier ribs, for example, a method including the following steps: a coating step, which is to coat a photosensitive resin composition on a substrate to form a photosensitive resin composition layer; and an exposure step, which is to The photosensitive resin composition layer is exposed. As a specific example of the method of forming such barrier ribs, photolithography may be mentioned.

光微影法中,將感光性樹脂組合物塗佈於基板之供阻隔壁形成之區域整個面上,而形成感光性樹脂組合物層。根據特定之阻隔壁之圖案對所形成之感光性樹脂組合物層進行曝光,其後,對經曝光之感光性樹脂組合物層進行顯影,而於基板上形成阻隔壁。In the photolithography method, the photosensitive resin composition is applied to the entire surface of the substrate where the barrier ribs are formed to form a photosensitive resin composition layer. Expose the formed photosensitive resin composition layer according to the pattern of the specific barrier rib, and then develop the exposed photosensitive resin composition layer to form barrier ribs on the substrate.

於光微影法中之將感光性樹脂組合物塗佈於基板上之塗佈步驟中,在應形成阻隔壁之基板上,使用輥式塗佈機、反向塗佈機、棒式塗佈機等接觸轉印式塗佈裝置、或旋轉塗佈機(旋轉式塗佈裝置)、淋幕式平面塗裝機等非接觸式塗佈裝置塗佈感光性樹脂組合物,並視需要藉由乾燥將溶劑去除,而形成感光性樹脂組合物層。In the coating step of applying the photosensitive resin composition on the substrate in the photolithography method, a roll coater, a reverse coater, and a bar coater are used on the substrate where the barrier wall should be formed. The photosensitive resin composition is applied by contact transfer coating equipment such as a machine, or a non-contact coating equipment such as a spin coater (rotary coating equipment), a curtain-type flat coater, etc., and if necessary The solvent is removed by drying, and a photosensitive resin composition layer is formed.

繼而,於曝光步驟中,利用負型光罩,對感光性樹脂組合物照射紫外線、準分子雷射光等活性能量射線,而根據阻隔壁之圖案局部地對感光性樹脂組合物層進行曝光。曝光時,可使用高壓水銀燈、超高壓水銀燈、氙氣燈、碳弧燈等發出紫外線之光源。曝光量因感光性樹脂組合物之組成而異,例如較佳為10~400 mJ/cm2 左右。Then, in the exposure step, the photosensitive resin composition is irradiated with active energy rays such as ultraviolet rays and excimer laser light using a negative mask, and the photosensitive resin composition layer is partially exposed according to the pattern of the barrier ribs. During exposure, high-pressure mercury lamps, ultra-high-pressure mercury lamps, xenon lamps, carbon arc lamps and other light sources that emit ultraviolet light can be used. The exposure amount varies depending on the composition of the photosensitive resin composition, and for example, it is preferably about 10 to 400 mJ/cm 2 .

繼而,於顯影步驟中,利用顯影液對根據阻隔壁之圖案進行過曝光之感光性樹脂組合物層進行顯影,藉此形成阻隔壁圖案。顯影方法並無特別限定,可使用浸漬法、噴霧法等。作為顯影液之具體例,可例舉:二甲基苄基胺、單乙醇胺、二乙醇胺、三乙醇胺等有機系顯影液、或氫氧化鈉、氫氧化鉀、碳酸鈉、氨、四級銨鹽等之水溶液。又,顯影液中亦可添加消泡劑或界面活性劑。Then, in the developing step, the photosensitive resin composition layer that has been exposed according to the pattern of the barrier ribs is developed with a developer, thereby forming the pattern of the barrier ribs. The development method is not particularly limited, and a dipping method, spray method, etc. can be used. Specific examples of the developer include organic developer such as dimethylbenzylamine, monoethanolamine, diethanolamine, and triethanolamine, or sodium hydroxide, potassium hydroxide, sodium carbonate, ammonia, and quaternary ammonium salts. And other aqueous solutions. In addition, a defoamer or a surfactant may be added to the developer.

其後,對顯影後之阻隔壁圖案實施後烘烤以使其受熱硬化,藉此獲得阻隔壁。後烘烤較佳為於150~250℃下進行15~60分鐘。Afterwards, post-baking is performed on the developed barrier rib pattern to be cured by heat, thereby obtaining the barrier rib. The post-baking is preferably performed at 150-250°C for 15-60 minutes.

於形成阻隔壁後亦可進行洗淨處理,以洗淨未曝光部。洗淨方法並無特別限定,可例舉:電漿照射、準分子光照射、UV(ultraviolet,紫外線)照射。準分子光照射或UV照射中,藉由光照射,活性氧能夠使附著於像素部之有機物分解而將其去除。After forming the barrier ribs, a cleaning process can also be performed to clean the unexposed areas. The cleaning method is not particularly limited, and examples thereof include plasma irradiation, excimer light irradiation, and UV (ultraviolet) irradiation. In excimer light irradiation or UV irradiation, the active oxygen can decompose and remove organic matter attached to the pixel portion by light irradiation.

阻隔壁之形成所使用之基板並無特別限定,可根據使用形成有阻隔壁之基板而製造之有機電致發光元件之種類來適當選擇。作為較佳之基板之材料,可例舉:玻璃、或各種樹脂材料。作為樹脂材料之具體例,可例舉:聚對苯二甲酸乙二酯等聚酯;聚乙烯、及聚丙烯等聚烯烴;聚碳酸酯;聚(甲基)丙烯酸系樹脂;聚碸;聚醯亞胺。 該等基板之材料中,就耐熱性優異之方面而言,較佳為玻璃、及聚醯亞胺。又,根據所製造之有機電致發光元件之種類,亦可預先於供阻隔壁形成之基板之表面設置ITO(Indium Tin Oxides,氧化銦錫)或ZnO(Zinc Oxide,氧化鋅)等透明電極層。The substrate used for the formation of the barrier ribs is not particularly limited, and can be appropriately selected according to the type of organic electroluminescence element manufactured using the substrate on which the barrier ribs are formed. As a preferable material for the substrate, glass or various resin materials can be cited. Specific examples of the resin material include: polyester such as polyethylene terephthalate; polyolefin such as polyethylene and polypropylene; polycarbonate; poly(meth)acrylic resin; Imine. Among the materials of these substrates, glass and polyimide are preferred in terms of excellent heat resistance. In addition, according to the type of organic electroluminescent element to be manufactured, a transparent electrode layer such as ITO (Indium Tin Oxides) or ZnO (Zinc Oxide) can also be pre-arranged on the surface of the substrate for forming the barrier ribs. .

本發明之感光性樹脂組合物由於表面硬化性及內部硬化性之控制性優異,故而可良好地用於形成具有階差之阻隔壁。此處,所謂具有階差之阻隔壁,係指具備高度不同之第1阻隔壁及第2阻隔壁之阻隔壁,例如意指第1阻隔壁之高度大於第2阻隔壁之阻隔壁。 藉由使用具有階差之阻隔壁,存在能夠使有機層(發光部)之膜厚變得均一之傾向。又,藉由於像素間具備第2阻隔壁,可確保像素間之絕緣性,能夠抑制除像素部以外之發光。Since the photosensitive resin composition of the present invention is excellent in the controllability of surface curability and internal curability, it can be suitably used to form barrier ribs having a step difference. Here, the barrier wall with a step difference refers to a barrier wall having a first barrier wall and a second barrier wall with different heights, for example, it means a barrier wall having a height of the first barrier wall greater than that of the second barrier wall. By using barrier ribs with a step difference, there is a tendency that the film thickness of the organic layer (light-emitting part) can be made uniform. In addition, since the second barrier ribs are provided between the pixels, the insulation between the pixels can be ensured, and light emission other than the pixel portion can be suppressed.

階差之高度即第1阻隔壁之上表面與第2阻隔壁之上表面之高低差較佳為0.7 μm以上,更佳為0.8 μm以上,進而較佳為0.9 μm以上。又,較佳為1.3 μm以下,更佳為1.2 μm以下,進而較佳為1.1 μm以下。上述上限及下限可任意地組合,例如較佳為0.7~1.3 μm,更佳為0.8~1.2 μm,進而較佳為0.9~1.1 μm。 藉由設為上述下限值以上,存在能夠確保線狀之噴墨塗佈性之傾向。又,藉由設為上述上限值以下,存在能夠確保像素間之絕緣性之傾向。The height of the step difference, that is, the height difference between the upper surface of the first barrier wall and the upper surface of the second barrier wall is preferably 0.7 μm or more, more preferably 0.8 μm or more, and still more preferably 0.9 μm or more. Furthermore, it is preferably 1.3 μm or less, more preferably 1.2 μm or less, and still more preferably 1.1 μm or less. The above upper limit and lower limit can be combined arbitrarily, and for example, it is preferably 0.7 to 1.3 μm, more preferably 0.8 to 1.2 μm, and still more preferably 0.9 to 1.1 μm. By setting it as the above-mentioned lower limit or more, there exists a tendency which can ensure linear inkjet coatability. In addition, there is a tendency that insulation between pixels can be ensured by setting it below the above upper limit value.

圖1及圖2表示具備具有階差之阻隔壁之基板之一例。圖1係俯視圖,圖2係沿圖1之線X-X之剖視圖。於基板1上具備具有階差之阻隔壁2,阻隔壁2中之開口區域,即被阻隔壁2劃分之區域成為像素部3。阻隔壁2中存在第1阻隔壁之上表面11及第2阻隔壁之上表面,由第1阻隔壁之上表面11與第2阻隔壁之上表面12之高低差形成階差13。Fig. 1 and Fig. 2 show an example of a substrate provided with barrier ribs having a step difference. Fig. 1 is a top view, and Fig. 2 is a cross-sectional view taken along the line X-X of Fig. 1. The substrate 1 is provided with barrier ribs 2 with a step difference, and the opening area in the barrier rib 2, that is, the area divided by the barrier rib 2 becomes the pixel portion 3. The barrier wall 2 has a first barrier wall upper surface 11 and a second barrier wall upper surface, and a step 13 is formed by the height difference between the first barrier wall upper surface 11 and the second barrier wall upper surface 12.

作為具有階差之阻隔壁之形成方法,例如可例舉於上述藉由光微影法之形成方法之曝光步驟中利用負型半色調光罩之方法。作為負型半色調光罩,例如可例舉與像素部3對應之部分為遮光部(透光率0%),與第1阻隔壁之上表面11對應之部分為平均透光率最高之開口部(完全透過開口部),且與第2阻隔壁之上表面12對應之部分成為平均透光率低於完全透過開口部之開口部(中間透過開口部)的光罩。根據該方法,藉由完全透過開口部與中間透過開口部之平均透光率之差,即曝光量之差,能夠產生殘膜率之差異,從而形成階差。 藉由以此方式使用半色調光罩,能夠藉由光微影法一次性形成具有階差之阻隔壁。於以此方式一次性形成之情形時,能夠形成第1阻隔壁與第2阻隔壁無明確邊界之連續之阻隔壁。As a method of forming a barrier rib with a step difference, for example, a method of using a negative halftone mask in the exposure step of the above-mentioned forming method by photolithography can be exemplified. As a negative halftone mask, for example, the portion corresponding to the pixel portion 3 is a light-shielding portion (light transmittance 0%), and the portion corresponding to the upper surface 11 of the first barrier rib is an opening with the highest average light transmittance. The portion (completely through the opening) and the portion corresponding to the upper surface 12 of the second barrier wall becomes a mask with an average light transmittance lower than that of the completely through opening (middle through opening). According to this method, the difference in the residual film rate can be caused by the difference in the average light transmittance between the complete transmission opening and the intermediate transmission opening, that is, the difference in the exposure amount, thereby forming a step difference. By using the halftone mask in this way, it is possible to form a barrier wall with a step difference at one time by the photolithography method. In the case of one-time formation in this way, a continuous barrier wall with no clear boundary between the first barrier wall and the second barrier wall can be formed.

[3]有機電致發光元件 本發明之有機電致發光元件具備本發明之阻隔壁。 使用具備藉由以上所說明之方法製造之阻隔壁圖案的基板,可製造各種有機電致發光元件。形成有機電致發光元件之方法並無特別限定,較佳為藉由如下方式來製造有機電致發光元件:藉由上述方法於基板上形成阻隔壁之圖案後,將墨水注入至基板上之由阻隔壁包圍之區域內而形成像素等有機層。 作為有機電致發光元件之類型,可例舉:底部發光型或頂部發光型。 底部發光型有機電致發光元件例如以如下方式製作:於積層有透明電極之玻璃基板上形成阻隔壁,並於由阻隔壁包圍之開口部積層電洞傳輸層、發光層、電子傳輸層、金屬電極層。頂部發光型有機電致發光元件例如以如下方式製作:於積層有金屬電極層之玻璃基板上形成阻隔壁,並於由阻隔壁包圍之開口部積層電子傳輸層、發光層、電洞傳輸層、透明電極層。 作為發光層,可例舉如日本專利特開2009-146691號公報或日本專利第5734681號公報中所記載之有機電致發光層。亦可使用如日本專利第5653387號公報或日本專利第5653101號公報中所記載之量子點。[3] Organic electroluminescence element The organic electroluminescence element of the present invention is equipped with the barrier ribs of the present invention. Various organic electroluminescent devices can be manufactured using a substrate provided with a barrier rib pattern manufactured by the method described above. The method of forming the organic electroluminescent device is not particularly limited. It is preferable to manufacture the organic electroluminescent device by the following method: after forming a pattern of barrier ribs on the substrate by the above method, the ink is injected onto the substrate. Organic layers such as pixels are formed in the area surrounded by the barrier ribs. As the type of the organic electroluminescence element, a bottom emission type or a top emission type can be mentioned. The bottom-emission type organic electroluminescence element is produced, for example, as follows: a barrier wall is formed on a glass substrate laminated with transparent electrodes, and a hole transport layer, a light-emitting layer, an electron transport layer, and a metal are laminated in the opening surrounded by the barrier wall. Electrode layer. The top-emission organic electroluminescence element is produced, for example, as follows: a barrier wall is formed on a glass substrate laminated with a metal electrode layer, and an electron transport layer, a light-emitting layer, and a hole transport layer are stacked on the opening surrounded by the barrier wall. Transparent electrode layer. As the light-emitting layer, an organic electroluminescent layer as described in Japanese Patent Laid-Open No. 2009-146691 or Japanese Patent No. 5736681 can be mentioned. It is also possible to use quantum dots as described in Japanese Patent No. 5653387 or Japanese Patent No. 5653101.

作為形成有機層形成用之墨水時所使用之溶劑,可使用水、有機溶劑、及該等之混合溶劑。有機溶劑只要能夠自墨水注入後所形成之皮膜去除即可,並無特別限定。作為有機溶劑,例如可例舉:甲苯、二甲苯、苯甲醚、對稱三甲苯、萘滿、環己基苯、丙酮、甲基乙基酮、甲基異丁基酮、環己酮、甲醇、乙醇、異丙醇、乙酸乙酯、乙酸丁酯、3-苯氧基甲苯。又,墨水中例如可添加界面活性劑、抗氧化劑、黏度調整劑、紫外線吸收劑。As the solvent used when forming the ink for forming the organic layer, water, organic solvents, and mixed solvents of these can be used. The organic solvent is not particularly limited as long as it can be removed from the film formed after the ink is injected. As the organic solvent, for example, toluene, xylene, anisole, symmetric trimethylbenzene, tetralin, cyclohexylbenzene, acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, methanol, Ethanol, isopropanol, ethyl acetate, butyl acetate, 3-phenoxytoluene. In addition, for example, surfactants, antioxidants, viscosity modifiers, and ultraviolet absorbers can be added to the ink.

作為將墨水注入至由阻隔壁包圍之區域內之方法,就能夠輕易地將少量墨水注入至特定位置之方面而言,較佳為噴墨法。有機層之形成所使用之墨水可根據所製造之有機電致發光元件之種類適當選擇。於藉由噴墨法注入墨水之情形時,關於墨水之黏度,只要能夠自噴墨頭良好地噴出墨水即可,並無特別限定,較佳為4~20 mPa・s,更佳為5~10 mPa・s。墨水之黏度可藉由墨水中之固形物成分含量之調整、溶劑之變更、黏度調整劑之添加等來進行調整。As a method of injecting ink into the area surrounded by the barrier wall, in terms of being able to easily inject a small amount of ink to a specific position, the inkjet method is preferred. The ink used for the formation of the organic layer can be appropriately selected according to the type of the organic electroluminescence device to be manufactured. When the ink is injected by the inkjet method, the viscosity of the ink is not particularly limited as long as the ink can be ejected from the inkjet head well. It is preferably 4-20 mPa·s, more preferably 5~ 10 mPa·s. The viscosity of the ink can be adjusted by the adjustment of the solid content of the ink, the change of the solvent, the addition of the viscosity regulator, etc.

[4]圖像顯示裝置 本發明之圖像顯示裝置包含本發明之有機電致發光元件。只要為包含本發明之有機電致發光元件之圖像顯示裝置即可,對圖像顯示裝置之式樣或構造並無特別限制,例如可使用主動矩陣型有機電致發光元件並按照常規方法進行組裝。例如可藉由如「有機EL顯示器」(Ohmsha,2004年8月20日發行,時任靜士、安達千波矢、村田英幸著)中記載之方法來形成本發明之圖像顯示裝置。例如可將發出白色光之有機電致發光元件與彩色濾光片進行組合來進行圖像顯示,亦可將RGB(Red-Green-Blue,紅綠藍)等之發光色不同之有機電致發光元件進行組合來進行圖像顯示。 [實施例][4] Image display device The image display device of the present invention includes the organic electroluminescence element of the present invention. As long as it is an image display device containing the organic electroluminescence element of the present invention, there is no particular limitation on the style or structure of the image display device. For example, an active matrix organic electroluminescence element can be used and assembled according to a conventional method. . For example, the image display device of the present invention can be formed by the method described in "Organic EL Display" (Ohmsha, issued on August 20, 2004, by Shishi Shi, Chinami Adachi, Hideyuki Murata). For example, organic electroluminescence elements that emit white light can be combined with color filters for image display, or organic electroluminescence with different luminous colors such as RGB (Red-Green-Blue) The components are combined for image display. [Example]

以下,例舉具體實施例對本發明進行說明,但本發明只要不超出其主旨,就不限定於以下實施例。 以下實施例及比較例中使用之感光性樹脂組合物之構成成分如下。Hereinafter, the present invention will be described with specific examples, but the present invention is not limited to the following examples as long as it does not exceed the gist. The constituent components of the photosensitive resin composition used in the following examples and comparative examples are as follows.

<光聚合起始劑> a-1:具有以下化學結構之化合物<Photopolymerization initiator> a-1: Compounds with the following chemical structures

[化52]

Figure 02_image107
[化52]
Figure 02_image107

a-2:BASF公司製造 IRGACURE OXE-01 a-3:BASF公司製造 IRGACURE OXE-02 a-4:常州強力電子新材料公司製造 PBG-305 a-5:保土谷化學工業公司製造 2,2'-雙(2-氯苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑a-2: IRGACURE OXE-01 manufactured by BASF a-3: IRGACURE OXE-02 manufactured by BASF a-4: PBG-305 manufactured by Changzhou Qiangli Electronic New Materials Co., Ltd. a-5: 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole manufactured by Hodogaya Chemical Industry Co., Ltd.

<鹼可溶性樹脂> b-1:具有以下結構單元之鹼可溶性樹脂(環氧(甲基)丙烯酸酯樹脂(固形物成分酸值為80 mgKOH/g,藉由GPC所測得之聚苯乙烯換算之重量平均分子量(Mw)為8000,係m及n為1~20者之混合物)<Alkali-soluble resin> b-1: Alkali-soluble resin with the following structural units (epoxy (meth)acrylate resin (solid content acid value 80 mgKOH/g, weight average molecular weight converted from polystyrene measured by GPC) ( Mw) is 8000, which is a mixture of m and n between 1 and 20)

[化53]

Figure 02_image109
[化53]
Figure 02_image109

上述式中之*表示與下述式所表示之1價基或氫原子之鍵結鍵。* In the above formula represents a bond with a monovalent group or a hydrogen atom represented by the following formula.

[化54]

Figure 02_image111
b-2:具有以下結構單元之鹼可溶性樹脂(環氧(甲基)丙烯酸酯樹脂(日本化藥公司製造之「ZCR-8029H」(重量平均分子量Mw=7000,酸值=62 mgKOH/g);具有下述式(C1)所表示之部分結構))[化54]
Figure 02_image111
b-2: Alkali-soluble resin with the following structural units (epoxy (meth)acrylate resin ("ZCR-8029H" manufactured by Nippon Kayaku Co., Ltd.)" (weight average molecular weight Mw = 7000, acid value = 62 mgKOH/g) ; Has the partial structure represented by the following formula (C1)))

[化55]

Figure 02_image113
[化55]
Figure 02_image113

<光聚合性化合物> c-1:日本化藥公司製造 二季戊四醇六丙烯酸酯(DPHA)<Photopolymerizable compound> c-1: Dipentaerythritol hexaacrylate (DPHA) manufactured by Nippon Kayaku Co., Ltd.

<撥液劑> d-1:DIC公司製造 MEGAFAC RS-72-K(含有通式(II)所表示之重複單元及氟原子之丙烯酸系樹脂) d-2:DIC公司製造 MEGAFAC RS-78(不含通式(II)所表示之重複單元而含有乙烯性不飽和基及氟原子之丙烯酸系樹脂) d-3:DIC(股)製造 MEGAFAC F-559(不含通式(II)所表示之重複單元及乙烯性不飽和基而含有氟原子之丙烯酸系樹脂) <添加劑> e-1:日本化藥公司製造 KAYAMER PM-21 <鏈轉移劑> f-1:2-巰基苯并咪唑(東京化成公司製造)<Liquid repellent agent> d-1: MEGAFAC RS-72-K manufactured by DIC Corporation (acrylic resin containing the repeating unit represented by the general formula (II) and fluorine atom) d-2: MEGAFAC RS-78 manufactured by DIC Corporation (acrylic resin that does not contain the repeating unit represented by the general formula (II) but contains an ethylenically unsaturated group and a fluorine atom) d-3: MEGAFAC F-559 manufactured by DIC (Stock) <Additives> e-1: KAYAMER PM-21 manufactured by Nippon Kayaku Corporation <Chain transfer agent> f-1: 2-Mercaptobenzimidazole (manufactured by Tokyo Chemical Co., Ltd.)

<感光性樹脂組合物之製備> 以表1中記載之調配比率使用各成分,且以感光性樹脂組合物之總固形物成分之含量成為19質量%之方式使用丙二醇單甲醚乙酸酯,將各成分攪拌至均勻,而製備出實施例1~3及比較例1~5之感光性樹脂組合物。再者,表1中之各成分之調配比率(質量%)意指感光性樹脂組合物之總固形物成分中之各成分之固形物成分之值。<Preparation of photosensitive resin composition> Each component was used in the blending ratio described in Table 1, and propylene glycol monomethyl ether acetate was used so that the content of the total solid component of the photosensitive resin composition became 19% by mass, and the components were stirred to be uniform to prepare The photosensitive resin compositions of Examples 1 to 3 and Comparative Examples 1 to 5 are shown. Furthermore, the blending ratio (mass %) of each component in Table 1 means the value of the solid component of each component in the total solid component of the photosensitive resin composition.

[表1]    實施例 比較例 1 2 3 1 2 3 4 5 調配比率 (A)光聚合起始劑 a-1 3.0 3.0 2.25          3.0 3.0 a-2          3.0             a-3             3.0          a-4       0.75                a-5                2.0       (B)鹼可溶性樹脂 b-1 48.1 24.1 20.1 48.1 48.1 48.1 48.1 20.1 b-2    24.1                   (C)光聚合性化合物 c-1 48.1 48.1 30.1 48.1 48.1 48.1 48.1 30.1 (D)撥液劑 d-1 0.3 0.3 0.3 0.3 0.3 0.3       d-2                   0.3    d-3                      0.3 (E)添加劑 e-1 0.5 0.5 0.5 0.5 0.5 0.5 0.5 0.5 (F)鏈轉移劑 f-1                1.0       評價結果 階差 第1阻隔壁①[μm] 1.5 1.5 1.5 1.5 1.5 無法形成阻隔壁 1.5 1.5 第2阻隔壁②[μm] 0.5 0.7 0.3 0.0 1.0 0.5 0.2 ΔH(①-②)[μm] 1.0 A 0.8 B 1.2 B 1.5 C 0.5 C 1.0 A 1.3 C 接觸角[度] 42 41 42 42 41 36 29 噴墨塗佈性 潰決 A A A B A B B 線狀塗佈性 A A A A B B B [Table 1] Example Comparative example 1 2 3 1 2 3 4 5 Allocation ratio (A) Photopolymerization initiator a-1 3.0 3.0 2.25 3.0 3.0 a-2 3.0 a-3 3.0 a-4 0.75 a-5 2.0 (B) Alkali-soluble resin b-1 48.1 24.1 20.1 48.1 48.1 48.1 48.1 20.1 b-2 24.1 (C) Photopolymerizable compound c-1 48.1 48.1 30.1 48.1 48.1 48.1 48.1 30.1 (D) Liquid repellent d-1 0.3 0.3 0.3 0.3 0.3 0.3 d-2 0.3 d-3 0.3 (E) Additives e-1 0.5 0.5 0.5 0.5 0.5 0.5 0.5 0.5 (F) Chain transfer agent f-1 1.0 Evaluation results Step difference The first barrier ①[μm] 1.5 1.5 1.5 1.5 1.5 Unable to form a barrier 1.5 1.5 The second barrier ②[μm] 0.5 0.7 0.3 0.0 1.0 0.5 0.2 ΔH(①-②)[μm] 1.0 A 0.8 B 1.2 B 1.5 C 0.5 C 1.0 A 1.3 C Contact angle [degrees] 42 41 42 42 41 36 29 Inkjet coatability Ruin A A A B A B B Linear coating A A A A B B B

使用實施例1~3及比較例1~5之感光性樹脂組合物,藉由以下記載之方法進行性能評價。Using the photosensitive resin compositions of Examples 1 to 3 and Comparative Examples 1 to 5, performance evaluation was performed by the method described below.

<接觸角測定用基板之製作及評價> 使用旋轉塗佈機以加熱硬化後成為1.5 μm之厚度之方式於玻璃基板上塗佈各感光性樹脂組合物。其後,以95℃於加熱板上加熱乾燥2分鐘,而獲得塗膜基板。繼而,於不使用光罩之情況下使用大日本科研公司製造之曝光機MA-1100以曝光量60 mJ/cm2 對所獲得之塗膜進行整面曝光。此時之波長365 nm下之強度為40 mW/cm2 。繼而,藉由24℃之2.38質量%TMAH(Tetramethylammonium Hydroxide,氫氧化四甲基銨)水溶液進行60秒鐘噴霧顯影,其後,用純水洗淨10秒鐘。將該基板於烘箱中以230℃加熱硬化30分鐘,而獲得接觸角測定用整面塗佈基板。<Production and evaluation of a substrate for contact angle measurement> Using a spin coater, each photosensitive resin composition was applied to a glass substrate so that it would have a thickness of 1.5 μm after heat curing. Thereafter, it was heated and dried on a hot plate at 95°C for 2 minutes to obtain a coated film substrate. Then, the exposure machine MA-1100 manufactured by Dainippon Scientific Research Co., Ltd. was used to expose the entire surface of the obtained coating film with an exposure amount of 60 mJ/cm 2 without using a mask. The intensity at the wavelength of 365 nm at this time is 40 mW/cm 2 . Then, spray development was performed for 60 seconds with a 2.38% by mass TMAH (Tetramethylammonium Hydroxide) aqueous solution at 24° C., and thereafter, it was washed with pure water for 10 seconds. This substrate was heat-cured in an oven at 230°C for 30 minutes to obtain a coated substrate for contact angle measurement on the entire surface.

接觸角之測定係使用協和界面科學公司製造之接觸角測定裝置Drop Master 500於23℃、濕度50%之條件下進行。向接觸角測定用基板上滴加丙二醇甲醚乙酸酯0.7 μL,測定1秒後之接觸角。將測定結果示於表1。接觸角越大,表示撥墨性越高。The measurement of the contact angle was carried out under the conditions of 23°C and 50% humidity using the contact angle measurement device Drop Master 500 manufactured by Kyowa Interface Science Co., Ltd. 0.7 μL of propylene glycol methyl ether acetate was dropped on the substrate for contact angle measurement, and the contact angle after 1 second was measured. The measurement results are shown in Table 1. The larger the contact angle, the higher the ink repellency.

<具有階差之阻隔壁及評價> 使用各感光性樹脂組合物,藉由以下所記載之方法形成阻隔壁並進行性能評價。<Barrier with step difference and evaluation> Using each photosensitive resin composition, a barrier rib was formed by the method described below, and performance evaluation was performed.

(阻隔壁之形成) 於表面形成有ITO膜之玻璃基板之ITO膜上,使用旋轉塗佈機以加熱硬化後成為1.5 μm之厚度之方式塗佈各感光性樹脂組合物。其後,以95℃於加熱板上加熱乾燥2分鐘,而獲得塗佈基板。使用光罩(開口寬度20 μm之線狀之完全透過開口部與開口寬度60 μm之線狀之中間透過開口部以交替相鄰之方式配置,且於該中間透過開口部內以70 μm之間隔配置有60 μm×240 μm之被覆部的光罩),以曝光間隙10 μm使用大日本科研公司製造之曝光機MA-1100對所獲得之塗膜進行曝光。中間透過開口部為藉由Cr氧化物之薄膜使波長365 nm下之透光率成為5%者。曝光時之波長365 nm下之強度為40 mW/cm2 ,曝光量為60 mJ/cm2 ,於空氣下進行。繼而,藉由24℃之2.38質量% TMAH(氫氧化四甲基銨)水溶液進行60秒鐘噴霧顯影,其後,用純水洗淨1分鐘。藉由該等操作,將無用部分去除,並將形成有圖案之基板於烘箱中以230℃加熱硬化30分鐘,而獲得具有階差之阻隔壁基板。(Formation of barrier ribs) On the ITO film of the glass substrate with the ITO film formed on the surface, each photosensitive resin composition was applied using a spin coater so as to have a thickness of 1.5 μm after heating and curing. Thereafter, it was heated and dried on a hot plate at 95°C for 2 minutes to obtain a coated substrate. Use a photomask (the linear fully transparent openings with an opening width of 20 μm and the linear middle transmission openings with an opening width of 60 μm are arranged alternately adjacent to each other, and are arranged at an interval of 70 μm in the middle transmission opening A mask with a covering part of 60 μm×240 μm), with an exposure gap of 10 μm, using an exposure machine MA-1100 manufactured by Dainippon Scientific Co., Ltd. to expose the obtained coating film. The middle transmission opening is a thin film of Cr oxide that has a light transmittance of 5% at a wavelength of 365 nm. During the exposure, the intensity at a wavelength of 365 nm was 40 mW/cm 2 , and the exposure was 60 mJ/cm 2 , and it was carried out in air. Next, spray development was performed for 60 seconds with a 2.38% by mass TMAH (tetramethylammonium hydroxide) aqueous solution at 24° C., and thereafter, it was washed with pure water for 1 minute. Through these operations, the useless part is removed, and the patterned substrate is heated and cured in an oven at 230° C. for 30 minutes to obtain a barrier rib substrate with a step difference.

(阻隔壁之膜厚測定) 針對上述具有階差之阻隔壁基板,測定與上述完全透過開口部對應之硬化膜(第1阻隔壁)、及與上述中間透過開口部對應之硬化膜(第2阻隔壁)之膜厚。測定時,使用Ryoka Systems公司製造之三維非接觸表面形狀測量系統Micromap MM3500-M100。(Measurement of film thickness of barrier wall) With respect to the barrier rib substrate having a step, the thickness of the cured film (first barrier rib) corresponding to the complete transmission opening and the cured film (second barrier rib) corresponding to the intermediate transmission opening was measured. In the measurement, the three-dimensional non-contact surface shape measurement system Micromap MM3500-M100 manufactured by Ryoka Systems was used.

(階差之評價) 算出第1阻隔壁與第2阻隔壁之膜厚差(階差,ΔH),並按照以下基準進行評價。將其結果示於表1。 A:階差ΔH為0.9 μm以上1.1 μm以下 B:階差ΔH為0.7 μm以上且未達0.9 μm,或者超過1.1 μm且為1.3 μm以下 C:階差ΔH未達0.7 μm或超過1.3 μm 再者,階差之範圍較佳為A及B,更佳為A。(Evaluation of level difference) The film thickness difference (step difference, ΔH) between the first barrier rib and the second barrier rib was calculated and evaluated in accordance with the following criteria. The results are shown in Table 1. A: The step difference ΔH is 0.9 μm or more and 1.1 μm or less B: The step difference ΔH is 0.7 μm or more and less than 0.9 μm, or more than 1.1 μm and less than 1.3 μm C: The step difference ΔH is less than 0.7 μm or more than 1.3 μm Furthermore, the range of the level difference is preferably A and B, more preferably A.

(噴墨塗佈適性評價) 針對上述具有階差之阻隔壁基板,使用Fuji Film公司製造之DMP-2831對與上述被覆部對應之像素區域進行噴墨塗佈。作為墨水,單獨使用溶劑(苯甲酸異戊酯),對每一像素區域進行180 pL之塗佈,按照以下基準對墨水有無潰決(墨水越過第1阻隔壁之現象)及墨水能否線狀地塗佈進行評價。存在阻隔壁之撥墨性越高,越可抑制潰決之傾向。又,存在階差越為合適範圍,線狀之塗佈性越良好之傾向。(Evaluation of inkjet coating suitability) For the barrier rib substrate with the step difference, DMP-2831 manufactured by Fuji Film is used for inkjet coating on the pixel area corresponding to the covered portion. As the ink, a solvent (isoamyl benzoate) is used alone, and 180 pL is applied to each pixel area. According to the following criteria, whether the ink is broken (the phenomenon that the ink crosses the first barrier wall) and whether the ink is linear The coating is evaluated. The higher the ink repellency of the barrier wall, the more likely it is to suppress the tendency of collapse. In addition, the more suitable the level difference is, the better the linear coatability tends to be.

(潰決評價) A:能夠將墨水塗佈於像素區域內,未向第1阻隔壁外溢出。 B:墨水自像素區域內越過第1阻隔壁而溢出(潰決)。(Route evaluation) A: The ink can be applied to the pixel area without overflowing outside the first barrier wall. B: Ink overflows from the pixel area over the first barrier wall (collapse).

(線狀之噴墨塗佈性) A:能夠橫跨複數個像素區域間不於第2阻隔壁上中斷地線狀地塗佈墨水。 B:墨水於複數個像素區域間中斷,未能線狀地塗佈。(Linear inkjet coating properties) A: The ink can be applied linearly without interrupting the second barrier wall across a plurality of pixel regions. B: The ink is interrupted between a plurality of pixel regions and cannot be applied linearly.

由表1之實施例1~3與比較例1~2之比較可知,實施例1~3中能夠確保第1阻隔壁與第2阻隔壁之高度差即階差為合適範圍,於噴墨塗佈後,線狀之塗佈性亦良好,且亦無潰決。 比較例1中,未能形成第2阻隔壁,於噴墨塗佈時雖能線狀地塗佈,但產生了潰決。 比較例2中,第2阻隔壁之膜厚變厚,線狀之墨水塗佈性不充分。 比較例3中,未能形成阻隔壁。 比較例4~5中,第1阻隔壁表面之接觸角較低,於噴墨塗佈時產生潰決,未能線狀地塗佈。From the comparison of Examples 1 to 3 in Table 1 and Comparative Examples 1 to 2, it can be seen that in Examples 1 to 3, the height difference between the first barrier wall and the second barrier wall, that is, the level difference, is within an appropriate range. After being clothed, the thread-like spreadability is also good, and there is no collapse. In Comparative Example 1, the second barrier wall could not be formed, and it could be applied linearly during inkjet application, but collapse occurred. In Comparative Example 2, the film thickness of the second barrier rib became thick, and the linear ink coatability was insufficient. In Comparative Example 3, the barrier ribs could not be formed. In Comparative Examples 4 to 5, the contact angle of the surface of the first barrier wall was low, and collapse occurred during inkjet coating, and the coating could not be applied in a line.

為了抑制藉由噴墨法塗佈墨水時墨水向第1阻隔壁外潰決,重要的是使撥液劑固定於阻隔壁之表面,確保阻隔壁表面之撥液性。然而,於紫外線曝光後之塗膜之硬化度不充分之情形時,在後續進行之顯影處理時膜表面之一部分會溶解,撥液劑會流出至顯影液中,從而阻隔壁表面之撥液性變差。 由於藉由使用主要利用i射線之肟酯系光聚合起始劑作為光聚合起始劑,會提昇塗膜之表面硬化度,故而作為確保阻隔壁表面之撥液性之方法有效。但是,於使用具有透過率不同之開口部之光罩即所謂之半色調光罩同時曝光出第1阻隔壁及第2阻隔壁,並歷經顯影、熱硬化之製程而形成各阻隔壁之情形時,存在第2阻隔壁之表面硬化度變得過高,難以控制與第1阻隔壁之階差之傾向。In order to prevent the ink from collapsing outside the first barrier wall when the ink is applied by the inkjet method, it is important to fix the liquid repellent on the surface of the barrier wall to ensure the liquid repellency of the barrier wall surface. However, when the curing degree of the coating film after UV exposure is insufficient, a part of the film surface will be dissolved during the subsequent development process, and the liquid repellent will flow out into the developer, thereby blocking the liquid repellency of the surface of the barrier wall. Getting worse. Since the use of an oxime ester photopolymerization initiator that mainly utilizes i-rays as a photopolymerization initiator increases the surface hardening of the coating film, it is effective as a method to ensure the liquid repellency of the barrier wall surface. However, when the first barrier wall and the second barrier wall are exposed at the same time by using a mask with openings with different transmittances, that is, a so-called halftone mask, and each barrier wall is formed through the process of development and thermal curing , There is a tendency that the surface hardening degree of the second barrier wall becomes too high, and it is difficult to control the step difference with the first barrier wall.

由於比較例2之感光性樹脂組合物所包含之光聚合起始劑為具有咔唑骨架者,故而第2阻隔壁之表面硬化度變得過高,其膜厚變厚。因此,於噴墨塗佈時,特定量之墨水會停留於像素區域內,無法流動至第2阻隔壁上,線狀之塗佈性不充分。 比較例3中,使用聯咪唑系起始劑作為光聚合起始劑,且為了提昇表面之硬化性而併用了鏈轉移劑,但光硬化性不充分,故而於顯影步驟中,阻隔壁被顯影液沖走,未能形成阻隔壁。Since the photopolymerization initiator contained in the photosensitive resin composition of Comparative Example 2 has a carbazole skeleton, the surface hardening degree of the second barrier rib becomes too high, and the film thickness thereof becomes thick. Therefore, during inkjet coating, a certain amount of ink stays in the pixel area and cannot flow onto the second barrier wall, and the linear coating performance is insufficient. In Comparative Example 3, a biimidazole-based initiator was used as the photopolymerization initiator, and a chain transfer agent was used in combination to improve the curability of the surface, but the photocurability was insufficient, so the barrier ribs were developed during the development step The liquid washed away and failed to form a barrier wall.

由於實施例1及比較例1之感光性樹脂組合物所包含之光聚合起始劑均為具有硫醚骨架者,故而表面之硬化性並不那麼高。然而,比較例1之感光性樹脂組合物所包含之光聚合起始劑中,自由基產生部位為苯基羰基,認為產生之自由基之遷移率較小,內部硬化性亦變弱。因此推測:於顯影時,相當於第1阻隔壁之側壁之部分被顯影液過度地顯影,該側壁無法保持撥液劑,由此於噴墨塗佈時產生潰決。又,認為由於內部硬化性較低,故而亦未能形成第2阻隔壁。Since the photopolymerization initiators contained in the photosensitive resin compositions of Example 1 and Comparative Example 1 all have a sulfide skeleton, the curability of the surface is not so high. However, in the photopolymerization initiator contained in the photosensitive resin composition of Comparative Example 1, the radical generation site is a phenylcarbonyl group, and it is considered that the mobility of the generated radicals is low, and the internal curability is also weakened. Therefore, it is inferred that during development, the portion corresponding to the side wall of the first barrier wall is excessively developed by the developer, and the side wall cannot hold the liquid repellent, and thus collapse occurs during inkjet coating. In addition, it is considered that since the internal hardenability is low, the second barrier wall cannot be formed.

實施例1之感光性樹脂組合物所包含之光聚合起始劑中,自由基產生部位為甲基羰基,認為產生之自由基之遷移率較大,內部硬化性亦變高。因此推測:於顯影時,相當於第1阻隔壁之側壁之部分之顯影性亦變得適度,該側壁亦能夠充分地保持撥液劑,從而得以抑制潰決。又,認為由於內部硬化性適度較高,故而能夠形成所需厚度之第2阻隔壁,線狀塗佈性亦良好。 如實施例3般,即便於使用通式(I)所表示之光聚合起始劑及除此以外之光聚合起始劑之情形時,亦能夠確保第1阻隔壁與第2阻隔壁之高度差即階差為合適範圍,第1阻隔壁表面之接觸角及線狀之塗佈性亦良好。但是,實施例1之階差為更佳之範圍。認為其原因在於:實施例1之感光性樹脂組合物中,通式(I)所表示之光聚合起始劑於總光聚合起始劑中所占之比率較高,因此內部硬化性更高。In the photopolymerization initiator contained in the photosensitive resin composition of Example 1, the radical generating site is a methyl carbonyl group, and it is considered that the mobility of the generated radical is relatively high, and the internal curability is also high. Therefore, it is presumed that during development, the developability of the portion corresponding to the side wall of the first barrier wall also becomes moderate, and the side wall can also sufficiently retain the liquid repellent, thereby suppressing collapse. In addition, it is considered that since the internal curability is moderately high, it is possible to form the second barrier rib of a desired thickness, and the linear coatability is also good. As in Example 3, even when the photopolymerization initiator represented by the general formula (I) and other photopolymerization initiators are used, the height of the first barrier wall and the second barrier wall can be ensured The difference, that is, the level difference, is within an appropriate range, and the contact angle of the surface of the first barrier wall and linear coatability are also good. However, the step difference of Example 1 is a more preferable range. It is believed that the reason is that in the photosensitive resin composition of Example 1, the photopolymerization initiator represented by the general formula (I) accounts for a higher proportion of the total photopolymerization initiator, and therefore the internal curability is higher. .

使用含有通式(II)所表示之重複單元及氟原子之丙烯酸系樹脂作為撥液劑對於確保阻隔壁表面之撥液性而言亦較為重要。於不具有通式(II)所表示之重複單元之情形時,存在紫外線曝光後撥液劑難以固定於塗膜之表面而流動至顯影處理之顯影液中,從而阻隔壁表面之撥液性變差之傾向。 比較例4中,使用含有乙烯性不飽和基及氟原子之丙烯酸系樹脂作為撥液劑,但交聯基之數量較少,故而認為於紫外線曝光後,撥液劑難以固定於塗膜之表面而會流動至顯影處理之顯影液中,阻隔壁表面之接觸角變低,無法確保撥液性。 比較例5中,由於撥液劑不具有通式(II)所表示之重複單元,且亦不具有乙烯性不飽和基,故而阻隔壁表面之接觸角變低,無法確保撥液性。The use of an acrylic resin containing the repeating unit represented by the general formula (II) and a fluorine atom as a liquid repellent is also important for ensuring the liquid repellency of the barrier wall surface. When there is no repeating unit represented by the general formula (II), it is difficult for the liquid repellent to be fixed on the surface of the coating film after ultraviolet exposure and flow into the developing solution of the development process, so that the liquid repellency of the barrier wall surface is changed. Poor tendency. In Comparative Example 4, an acrylic resin containing ethylenically unsaturated groups and fluorine atoms was used as the liquid repellent, but the number of crosslinking groups was small, so it was considered that the liquid repellent was difficult to fix on the surface of the coating film after UV exposure However, it will flow into the developing solution of the development process, and the contact angle of the barrier wall surface becomes low, and the liquid repellency cannot be ensured. In Comparative Example 5, since the liquid repellent did not have the repeating unit represented by the general formula (II) and did not have an ethylenically unsaturated group, the contact angle of the barrier wall surface became low, and the liquid repellency could not be ensured.

1:基板 2:具有階差之阻隔壁 3:像素部 11:第1阻隔壁之上表面 12:第2阻隔壁之上表面 13:階差1: substrate 2: barrier wall with step difference 3: Pixel section 11: The upper surface of the first barrier wall 12: The upper surface of the second barrier wall 13: step difference

圖1係表示具備具有階差之阻隔壁之基板之一例的俯視圖。 圖2係表示具備具有階差之阻隔壁之基板之一例的剖視圖。Fig. 1 is a plan view showing an example of a substrate provided with barrier ribs having a step. Fig. 2 is a cross-sectional view showing an example of a substrate provided with barrier ribs having a step.

Figure 109144648-A0101-11-0002-3
Figure 109144648-A0101-11-0002-3

Claims (11)

一種感光性樹脂組合物,其特徵在於:其係含有(A)光聚合起始劑、(B)鹼可溶性樹脂、(C)光聚合性化合物、及(D)撥液劑者,且 上述(A)光聚合起始劑含有下述通式(I)所表示之光聚合起始劑, 上述(D)撥液劑含有包含下述通式(II)所表示之重複單元及氟原子之丙烯酸系樹脂(D1); [化1]
Figure 03_image115
(式(I)中,R1a 表示可具有取代基之烷基、或可具有取代基之芳香族環基; R2a 表示烷基; R3a 表示1價取代基; n表示0或1; h表示0~2之整數) [化2]
Figure 03_image117
(式(II)中,R11 分別獨立地表示氫原子或甲基,R12 表示可具有取代基之碳數2~6之烷基,可被-O-、-C(=O)-、-S-、-NH-之任一者以上中斷; *表示鍵結部)。
A photosensitive resin composition characterized in that it contains (A) a photopolymerization initiator, (B) an alkali-soluble resin, (C) a photopolymerizable compound, and (D) a liquid repellent, and the above ( A) The photopolymerization initiator contains a photopolymerization initiator represented by the following general formula (I), and the above (D) liquid repellent contains acrylic acid containing a repeating unit represented by the following general formula (II) and a fluorine atom Series resin (D1); [化1]
Figure 03_image115
(In formula (I), R 1a represents an optionally substituted alkyl group or an optionally substituted aromatic cyclic group; R 2a represents an alkyl group; R 3a represents a monovalent substituent; n represents 0 or 1; h Represents an integer from 0 to 2) [化2]
Figure 03_image117
(In formula (II), R 11 each independently represents a hydrogen atom or a methyl group, and R 12 represents an optionally substituted alkyl group having 2 to 6 carbon atoms, which may be substituted by -O-, -C(=O)-, Any one or more of -S- and -NH- is interrupted; * indicates the bonding part).
如請求項1之感光性樹脂組合物,其中於上述式(I)中,R3a 為R4a -O-(其中,R4a 表示可具有取代基之烷基、或可具有取代基之芳香族環基),h為1。The photosensitive resin composition of claim 1, wherein in the above formula (I), R 3a is R 4a -O- (wherein, R 4a represents an alkyl group which may have a substituent or an aromatic group which may have a substituent Cyclic group), h is 1. 如請求項1或2之感光性樹脂組合物,其中上述通式(I)所表示之光聚合起始劑之含量相對於總光聚合起始劑為80~100質量%。The photosensitive resin composition according to claim 1 or 2, wherein the content of the photopolymerization initiator represented by the general formula (I) is 80-100% by mass relative to the total photopolymerization initiator. 如請求項1至3中任一項之感光性樹脂組合物,其中(B)鹼可溶性樹脂相對於上述(C)光聚合性化合物100質量份之含量為200質量份以下。The photosensitive resin composition according to any one of claims 1 to 3, wherein the content of the (B) alkali-soluble resin with respect to 100 parts by mass of the (C) photopolymerizable compound is 200 parts by mass or less. 如請求項1至4中任一項之感光性樹脂組合物,其中上述丙烯酸系樹脂(D1)具有氟烷基及/或氟伸烷基。The photosensitive resin composition according to any one of claims 1 to 4, wherein the acrylic resin (D1) has a fluoroalkyl group and/or a fluoroalkylene group. 如請求項1至5中任一項之感光性樹脂組合物,其中上述(B)鹼可溶性樹脂包含具有下述通式(i)或(iii)所表示之部分結構之樹脂; [化3]
Figure 03_image119
(式(i)中,Ra 表示氫原子或甲基,Rb 表示可具有取代基之2價烴基; 式(i)中之苯環可進而被任意取代基取代; *表示鍵結鍵) [化4]
Figure 03_image121
(式(iii)中,Re 表示氫原子或甲基,γ表示單鍵、-CO-、可具有取代基之伸烷基、或可具有取代基之2價環狀烴基; 式(iii)中之苯環可進而被任意取代基取代; *表示鍵結鍵)。
The photosensitive resin composition according to any one of claims 1 to 5, wherein the above-mentioned (B) alkali-soluble resin comprises a resin having a partial structure represented by the following general formula (i) or (iii); [化3]
Figure 03_image119
(In formula (i), R a represents a hydrogen atom or a methyl group, and R b represents a divalent hydrocarbon group that may have a substituent; the benzene ring in formula (i) may be further substituted with any substituent; * represents a bonding bond) [化4]
Figure 03_image121
(In formula (iii), R e represents a hydrogen atom or a methyl group, and γ represents a single bond, -CO-, an alkylene group which may have a substituent, or a bivalent cyclic hydrocarbon group which may have a substituent; formula (iii) The benzene ring in can be further substituted by any substituent; * represents a bonding bond).
如請求項1至6中任一項之感光性樹脂組合物,其用於形成阻隔壁。The photosensitive resin composition according to any one of claims 1 to 6, which is used to form a barrier wall. 如請求項7之感光性樹脂組合物,其用於藉由光微影法一次性形成具有階差之阻隔壁。The photosensitive resin composition according to claim 7, which is used to form a barrier wall with a step difference at a time by a photolithography method. 一種阻隔壁,其係使如請求項1至8中任一項之感光性樹脂組合物硬化而成。A barrier wall formed by curing the photosensitive resin composition according to any one of claims 1 to 8. 一種有機電致發光元件,其具備如請求項9之阻隔壁。An organic electroluminescence element provided with a barrier wall as claimed in claim 9. 一種圖像顯示裝置,其包含如請求項10之有機電致發光元件。An image display device comprising the organic electroluminescence element as claimed in claim 10.
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