TW202130109A - 靜電致動器 - Google Patents
靜電致動器 Download PDFInfo
- Publication number
- TW202130109A TW202130109A TW109120400A TW109120400A TW202130109A TW 202130109 A TW202130109 A TW 202130109A TW 109120400 A TW109120400 A TW 109120400A TW 109120400 A TW109120400 A TW 109120400A TW 202130109 A TW202130109 A TW 202130109A
- Authority
- TW
- Taiwan
- Prior art keywords
- electrode film
- electrostatic actuator
- electrodes
- electrode
- ribbon
- Prior art date
Links
- 239000010408 film Substances 0.000 claims description 91
- 239000010409 thin film Substances 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- -1 Polyethylene Terephthalate Polymers 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/06—Influence generators
- H02N1/08—Influence generators with conductive charge carrier, i.e. capacitor machines
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019112669 | 2019-06-18 | ||
| JP2019-112669 | 2019-06-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW202130109A true TW202130109A (zh) | 2021-08-01 |
Family
ID=74037151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW109120400A TW202130109A (zh) | 2019-06-18 | 2020-06-17 | 靜電致動器 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US11848625B2 (https=) |
| EP (1) | EP3989430A4 (https=) |
| JP (1) | JP7566337B2 (https=) |
| KR (1) | KR20220020836A (https=) |
| CN (1) | CN113994585A (https=) |
| TW (1) | TW202130109A (https=) |
| WO (1) | WO2020255977A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11888412B2 (en) * | 2017-07-14 | 2024-01-30 | Pixart Imaging Inc. | Stackable actuating element with profiled insulated electrode structures |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4330730A (en) * | 1980-03-27 | 1982-05-18 | Eastman Kodak Company | Wound piezoelectric polymer flexure devices |
| DE4127860A1 (de) | 1991-08-22 | 1993-02-25 | Deutsche Aerospace | Pumpensystem zur foerderung von fluessigen oder gasfoermigen medien |
| JP2001268948A (ja) * | 2000-03-21 | 2001-09-28 | Keiji Saneyoshi | 静電アクチュエータおよびそれを用いた動作機構 |
| JP3832338B2 (ja) * | 2001-12-25 | 2006-10-11 | 松下電工株式会社 | 電歪ポリマーアクチュエータ |
| ITPI20050095A1 (it) * | 2005-09-05 | 2005-12-05 | Federico Carpi | Attuatore, sensore e generator a polimeri elettroattivi in configurazione ripiegata |
| JP2008211922A (ja) | 2007-02-27 | 2008-09-11 | Yamaha Corp | 高分子静電型アクチュエータ |
| DE102008002495A1 (de) * | 2008-06-18 | 2009-12-24 | Robert Bosch Gmbh | Vielschichtaktor |
| DE102008002492A1 (de) * | 2008-06-18 | 2009-12-24 | Robert Bosch Gmbh | Faltaktor oder Faltsensor sowie Herstellungsverfahren für einen Faltaktor oder Faltsensor |
| JP5161006B2 (ja) * | 2008-08-29 | 2013-03-13 | 国立大学法人東京工業大学 | 静電アクチュエータの製造方法 |
| JP5458288B2 (ja) * | 2008-08-29 | 2014-04-02 | 国立大学法人東京工業大学 | 静電アクチュエータおよびその製造方法 |
| JP5318135B2 (ja) * | 2011-03-16 | 2013-10-16 | 株式会社東芝 | 静電アクチュエータ |
| JP6616607B2 (ja) * | 2015-07-14 | 2019-12-04 | 国立大学法人東京工業大学 | 静電アクチュエータおよび静電アクチュエータの製造方法 |
| US10903762B2 (en) * | 2015-09-02 | 2021-01-26 | Koninklijke Philips N.V. | Actuator device based on an electroactive or photoactive polymer |
| JP2017158366A (ja) | 2016-03-03 | 2017-09-07 | トヨタ自動車株式会社 | アクチュエータ |
| WO2018207707A1 (ja) | 2017-05-10 | 2018-11-15 | ソニー株式会社 | アクチュエータ、駆動部材、触覚提示装置および駆動装置 |
| JP7408149B2 (ja) * | 2020-06-11 | 2024-01-05 | ストローブ株式会社 | 積層型静電アクチュエータ |
-
2020
- 2020-06-17 WO PCT/JP2020/023659 patent/WO2020255977A1/ja not_active Ceased
- 2020-06-17 CN CN202080044236.9A patent/CN113994585A/zh active Pending
- 2020-06-17 EP EP20827349.0A patent/EP3989430A4/en not_active Withdrawn
- 2020-06-17 TW TW109120400A patent/TW202130109A/zh unknown
- 2020-06-17 KR KR1020217042576A patent/KR20220020836A/ko not_active Ceased
- 2020-06-17 JP JP2021528276A patent/JP7566337B2/ja active Active
- 2020-06-17 US US17/619,328 patent/US11848625B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| EP3989430A1 (en) | 2022-04-27 |
| WO2020255977A1 (ja) | 2020-12-24 |
| JP7566337B2 (ja) | 2024-10-15 |
| JPWO2020255977A1 (https=) | 2020-12-24 |
| US11848625B2 (en) | 2023-12-19 |
| CN113994585A (zh) | 2022-01-28 |
| KR20220020836A (ko) | 2022-02-21 |
| US20220368248A1 (en) | 2022-11-17 |
| EP3989430A4 (en) | 2023-07-19 |
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