TW202020076A - Abrasion-resistant coatings for thermal interfaces - Google Patents

Abrasion-resistant coatings for thermal interfaces Download PDF

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TW202020076A
TW202020076A TW108134794A TW108134794A TW202020076A TW 202020076 A TW202020076 A TW 202020076A TW 108134794 A TW108134794 A TW 108134794A TW 108134794 A TW108134794 A TW 108134794A TW 202020076 A TW202020076 A TW 202020076A
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thermally conductive
conductive film
heat
heat sink
inorganic particulate
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TWI841603B (en
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普那迪尤納 葛利
贾斯汀 科爾比
瑞德 J 切斯特菲爾德
保羅 A 彼得森
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德商漢高智慧財產控股公司
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    • HELECTRICITY
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    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
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    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
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    • H05K7/20445Inner thermal coupling elements in heat dissipating housings, e.g. protrusions or depressions integrally formed in the housing the coupling element being an additional piece, e.g. thermal standoff
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    • H05K7/20509Multiple-component heat spreaders; Multi-component heat-conducting support plates; Multi-component non-closed heat-conducting structures
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
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    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
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Abstract

A system having a removable electronic component employs an abrasion-resistant thermally conductive film as a thermal interface between the removable electronic component and a heat sink. The abrasion-resistant film reduces thermal impedance between the removable electronic component and the heat sink when the removable electronic component is repeatedly installed and removed from a chamber in a host device. The abrasion-resistant film includes a polymer formed from a silicon-containing resin and an inorganic particulate filler, the film may also be interlocked with a corrosion protection layer at the heat sink. A method of forming a heat sink is provided that minimizes increases in thermal impedance.

Description

用於熱介面之耐磨塗層Wear-resistant coating for thermal interface

本發明係關於作為發熱裝置與散熱器之間的熱介面之導熱薄膜。本發明更特定言之係針對一種耐磨導熱薄膜,其降低該發熱裝置與該散熱器之間之熱阻抗以允許重複安裝及卸除該發熱裝置。The present invention relates to a thermally conductive film as a thermal interface between a heat generating device and a heat sink. The present invention is more specifically directed to a wear-resistant thermally conductive film that reduces the thermal impedance between the heating device and the heat sink to allow repeated installation and removal of the heating device.

電子系統愈來愈依賴於更小封裝中之更快的速度及更大的能力。此外,電子系統繼續使用電子裝置之愈來愈複雜的陣列,包括可用各種及可替換組件操作之模組化陣列。可替換組件之實例包括光學收發器,諸如C形狀因數可插拔(CFP)光收發器及小形狀因數可插拔(SFP)光收發器,其可安裝於模組化系統中/或自模組化系統卸除。此類光收發器為「可插拔的」,此係因為其可插入主機裝置或系統且可自主機裝置或系統卸除而無需自主機裝置或系統卸除電力。可插拔收發器通常在由主機系統之各自框架界定之腔室或埠處接收。Electronic systems are increasingly dependent on faster speeds and greater capabilities in smaller packages. In addition, electronic systems continue to use increasingly complex arrays of electronic devices, including modular arrays that can operate with various and replaceable components. Examples of replaceable components include optical transceivers, such as C form factor pluggable (CFP) optical transceivers and small form factor pluggable (SFP) optical transceivers, which can be installed in modular systems and/or self-mode Disassemble the system. Such optical transceivers are "pluggable" because they can be plugged into and removed from a host device or system without removing power from the host device or system. Pluggable transceivers are usually received in chambers or ports defined by the respective frames of the host system.

為了防止可插拔電子組件中之熱積聚,可在接收腔室處及/或周圍使用熱耗散裝置以輔助將所產生之熱量遠離可插拔電子組件耗散。在典型實施例中,熱耗散裝置在安裝於腔室中時接觸可插拔電子組件,以使得可自可插拔電子組件以傳導方式耗散熱量。自可插拔電子組件至熱耗散裝置之熱傳導之效率在很大程度上受到可插拔電子組件與熱耗散裝置之間的介面之熱阻抗的限制。通常,部分介面中之非接觸可能妨礙熱傳遞,使得藉由傳導進行之熱傳遞僅限於部分接觸區域,其中可插拔電子組件與熱耗散裝置之各個表面相接觸。通常,接觸表面為金屬不均勻的。與表面剛性組合之不均勻表面阻礙表面之間的廣泛實體接觸。To prevent heat accumulation in the pluggable electronic components, heat dissipation devices can be used at and/or around the receiving chamber to assist in dissipating the generated heat away from the pluggable electronic components. In a typical embodiment, the heat dissipation device contacts the pluggable electronic component when installed in the chamber, so that the self-pluggable electronic component can dissipate heat in a conductive manner. The efficiency of heat conduction from the pluggable electronic component to the heat dissipation device is largely limited by the thermal impedance of the interface between the pluggable electronic component and the heat dissipation device. Generally, non-contact in some interfaces may hinder heat transfer, so that heat transfer by conduction is limited to part of the contact area, where pluggable electronic components are in contact with various surfaces of the heat dissipation device. Usually, the contact surface is metal non-uniform. The uneven surface combined with surface rigidity prevents extensive physical contact between the surfaces.

減少金屬表面之間的介面處的熱阻抗的一種方式為用柔性或適型熱介面材料(諸如糊劑、凝膠、薄膜或其類似物)塗佈金屬表面中之至少一者。雖然此等適型熱介面材料有效地用於可插拔電子組件及相關聯之熱耗散裝置之靜態應用中,但其無法耐受在諸如可插拔電子組件之動態環境中引發之磨耗力,諸如如下可插拔電子組件,其中可插拔電子組件重複地滑動至與熱耗散裝置之磨蝕接觸之腔室中及自該腔室滑出。因此,由於可插拔電子組件之重複安裝及卸除,此等適型熱介面材料傾向於在一時間段內崩解。該熱介面材料之降解導致將來自該可插拔電子組件之熱量轉移至該熱耗散裝置的熱阻抗提高。One way to reduce the thermal resistance at the interface between metal surfaces is to coat at least one of the metal surfaces with a flexible or conformable thermal interface material, such as paste, gel, film, or the like. Although these conformable thermal interface materials are effectively used in static applications of pluggable electronic components and associated heat dissipation devices, they cannot withstand the abrasion forces induced in dynamic environments such as pluggable electronic components , Such as a pluggable electronic component in which the pluggable electronic component repeatedly slides into and out of the chamber in abrasive contact with the heat dissipation device. Therefore, due to the repeated installation and removal of pluggable electronic components, these suitable thermal interface materials tend to disintegrate within a period of time. The degradation of the thermal interface material results in an increase in the thermal impedance of the heat transferred from the pluggable electronic component to the heat dissipation device.

因此,對於用於施加至可插拔電子組件與熱耗散裝置之間的介面之熱介面材料存在需求,該介面材料既足夠適型以減小介面之熱阻抗,且足夠耐磨以耐受來自主機裝置的可插拔電子組件與熱耗散裝置接觸之重複安裝及拆卸。期望此類耐磨性包括熱介面材料之內聚及熱介面材料與各個表面(諸如熱耗散裝置之表面)之黏著兩者。Therefore, there is a need for a thermal interface material that is applied to the interface between the pluggable electronic component and the heat dissipation device, the interface material is both adequately shaped to reduce the thermal resistance of the interface, and sufficiently wear-resistant to withstand Repeated installation and disassembly of the pluggable electronic components from the host device in contact with the heat dissipation device. Such abrasion resistance is expected to include both the cohesion of the thermal interface material and the adhesion of the thermal interface material to various surfaces, such as the surfaces of heat dissipation devices.

本文揭示一種系統,其包含界定腔室之框架、散熱器及可卸除電子組件,該電子組件以可卸除方式插入該腔室中以與該散熱器之熱傳遞區域熱接觸。該散熱器包含金屬基板,該金屬基板具有界定其間之厚度之第一表面及第二表面,該金屬基板具有基板熱阻抗;導熱薄膜,其安置於界定熱傳遞區域之第一表面或第二表面中之至少一者的至少一部分上,該導熱薄膜包含(1)由含矽樹脂形成之聚合物及(2)無機微粒填料。在塔柏(Taber)磨耗測試之前定義跨該厚度經由該熱傳遞區域的初始熱阻抗,且在完成塔柏磨耗測試時定義跨該金屬基板之該厚度經由該熱傳遞區域之磨耗熱阻抗,其中該磨耗熱阻抗大於該初始熱阻抗約50%以上。This document discloses a system that includes a frame defining a chamber, a heat sink, and removable electronic components that are removably inserted into the chamber to make thermal contact with the heat transfer area of the heat sink. The heat sink includes a metal substrate having a first surface and a second surface defining a thickness therebetween, the metal substrate has a substrate thermal impedance; a thermally conductive film disposed on the first surface or the second surface defining the heat transfer area On at least a portion of at least one of the at least one, the thermally conductive film includes (1) a polymer formed of silicone-containing resin and (2) an inorganic particulate filler. The initial thermal resistance across the thickness through the heat transfer area is defined before the Taber wear test, and the thermal resistance through the heat transfer area is defined across the thickness of the metal substrate when the Taber wear test is completed, wherein The abrasion thermal resistance is greater than the initial thermal resistance by about 50% or more.

另一實施例揭示一種系統,其包含:主機裝置,其包括界定腔室之框架;可卸除模組,其產生傳送至該模組之第一表面之熱量,該模組經由該腔室以可卸除方式安裝於該主機裝置中;及散熱器,其與該框架相關聯以耗散來自該第一表面之熱量。該散熱器包括第二表面,在該第二表面上施加導熱薄膜以界定該散熱器之熱傳遞區域,且其中施加導熱薄膜以界定該第一表面或該第二表面之至少一部分上的該散熱器之熱傳遞區域,且其中當將該模組安裝於該裝置中以准許熱量由該第一表面接收時,該導熱薄膜與該第一表面或該第二表面直接接觸。該系統在塔柏磨耗測試之前展現經由該熱傳遞區域之初始熱阻抗,且在完成塔柏磨耗測試之後展示經由該熱傳遞區域之磨耗熱阻抗,該磨耗熱阻抗大於該初始熱阻抗不超過約50%。Another embodiment discloses a system including: a host device including a frame defining a chamber; a detachable module that generates heat transferred to the first surface of the module, the module passes through the chamber to Removably installed in the host device; and a heat sink associated with the frame to dissipate heat from the first surface. The heat sink includes a second surface on which a thermally conductive film is applied to define the heat transfer area of the heat sink, and wherein a thermally conductive film is applied to define the heat dissipation on at least a portion of the first surface or the second surface The heat transfer area of the device, and wherein when the module is installed in the device to allow heat to be received by the first surface, the thermally conductive film is in direct contact with the first surface or the second surface. The system exhibits an initial thermal resistance through the heat transfer area before the Taber abrasion test, and exhibits abrasion thermal resistance through the heat transfer area after completing the Taber abrasion test, the abrasion thermal resistance is greater than the initial thermal resistance by no more than about 50%.

在又一實施例中,揭示一種系統,其中該系統包含:主機裝置,其包括界定腔室之框架;可卸除模組,其產生傳送至該模組之第一表面之熱量,該模組經由該腔室以可卸除方式安裝於該主機裝置中;散熱器,其與該框架相關聯以耗散來自該第一表面之熱量。該散熱器包括一種散熱器,其包括第二表面,及施加至該第一表面或該第二表面之導熱薄膜。當將該模組安裝於該裝置中以准許熱量由該第一表面接收時,該導熱薄膜與該第一表面直接接觸,該第二表面包括腐蝕保護層,且該導熱薄膜包括與該腐蝕保護層互鎖之含矽聚合物。In yet another embodiment, a system is disclosed, wherein the system includes: a host device including a frame defining a cavity; a removable module that generates heat transmitted to the first surface of the module, the module Removably installed in the host device via the chamber; a heat sink, which is associated with the frame to dissipate heat from the first surface. The heat sink includes a heat sink including a second surface, and a thermally conductive film applied to the first surface or the second surface. When the module is installed in the device to allow heat to be received by the first surface, the thermally conductive film directly contacts the first surface, the second surface includes a corrosion protection layer, and the thermally conductive film includes protection from the corrosion Silicon-containing polymer with interlocking layers.

在又一實施例中,提供一種用於形成散熱器之方法,其包含:提供具有第一表面之金屬基板、用轉化劑處理該第一表面以形成腐蝕保護層、製備具有含矽樹脂及無機微粒填料之前驅體、將該前驅體塗佈至該腐蝕保護層上、及原位固化以聚合該前驅體。由該樹脂形成之含矽聚合物與該腐蝕保護層互鎖。In yet another embodiment, a method for forming a heat sink is provided, which includes: providing a metal substrate having a first surface, treating the first surface with a conversion agent to form a corrosion protection layer, and preparing a silicon-containing resin and an inorganic The particulate filler precursor, coating the precursor onto the corrosion protection layer, and curing in situ to polymerize the precursor. The silicon-containing polymer formed by the resin interlocks with the corrosion protection layer.

本發明係關於適合於在安裝於主機裝置處時與主機裝置互動之可卸除電子組件。可卸除電子組件經由與散熱器之可滑動嚙合及脫嚙而安裝於主機裝置中及自主機裝置拆卸。散熱器通常定位於主機裝置之腔室/容器中,以使得安裝可卸除電子組件將其與散熱器熱接觸置放。該熱接觸藉由該可卸除電子組件與該散熱器之間的熱介面建立。熱介面至少部分地由本發明之熱介面構件填充。熱介面構件可較佳為呈薄膜或塗層形式之耐磨且黏性的主體。熱介面構件可黏著至可為散熱器之部分或熱耦合至散熱器之熱傳遞表面。將可卸除電子組件安裝至主機裝置之腔室/容器中將該可卸除電子組件之熱傳遞表面與熱介面本體熱接觸置放,該熱介面本體自身連接至散熱器。The invention relates to a detachable electronic component suitable for interacting with a host device when installed at the host device. The detachable electronic component is installed in and detached from the host device through sliding engagement and disengagement with the heat sink. The heat sink is usually positioned in the cavity/container of the host device so that the removable electronic component is installed and placed in thermal contact with the heat sink. The thermal contact is established by the thermal interface between the detachable electronic component and the heat sink. The thermal interface is at least partially filled by the thermal interface member of the present invention. The thermal interface member may preferably be a wear-resistant and viscous body in the form of a film or coating. The thermal interface member can be adhered to a portion that can be a heat sink or thermally coupled to the heat transfer surface of the heat sink. The removable electronic component is installed in the cavity/container of the host device and the heat transfer surface of the removable electronic component is placed in thermal contact with the thermal interface body, which is itself connected to the heat sink.

如本文所使用,術語「主機裝置」意欲意謂電腦或計算裝置、網路裝置、信號發射器、信號接收器、開關、資料儲存裝置、子系統、印刷電路板、積體電路、微處理器或其類似裝置。As used herein, the term "host device" is intended to mean a computer or computing device, network device, signal transmitter, signal receiver, switch, data storage device, subsystem, printed circuit board, integrated circuit, microprocessor Or similar devices.

圖1及圖2描繪本發明之實例系統10之橫截面示意圖。說明為沿著方向箭頭13安裝至主機裝置16之腔室14中之可卸除模組12展示於圖1中。圖2說明具有安裝於主機裝置16處之可卸除模組12的系統10。可卸除模組12可具有第一表面12a,由可卸除模組12產生之熱量轉移至該第一表面。預期由可卸除模組12產生之熱量可轉移至可卸除模組12之除第一表面12a以外之部分,但出於本說明書之目的,熱耗散經由第一表面12a引導至主機裝置16。可卸除模組12可為(例如)可插拔光收發器。1 and 2 depict schematic cross-sectional views of an example system 10 of the present invention. The removable module 12 illustrated as being installed into the chamber 14 of the host device 16 along the direction arrow 13 is shown in FIG. 1. FIG. 2 illustrates the system 10 with the removable module 12 installed at the host device 16. The removable module 12 may have a first surface 12a to which heat generated by the removable module 12 is transferred. It is expected that the heat generated by the removable module 12 can be transferred to the portion of the removable module 12 other than the first surface 12a, but for the purpose of this specification, the heat dissipation is directed to the host device via the first surface 12a 16. The removable module 12 may be, for example, a pluggable optical transceiver.

系統10包括用於經由第一表面12a自可卸除模組12耗散熱量之散熱器20。散熱器20可與主機裝置16之框架15相關聯。散熱器20通常由高導熱材料(諸如金屬、金屬合金及其類似物)構成,且可包括一或多個熱耗散裝置,其有效地耗散由可卸除模組12產生之熱量。在圖1中所說明之實施例中,散熱器20可包含板部分22及自板部分22延伸及熱耦合至板部分22之散熱片24。散熱片24提供增大之表面積以增強向與散熱片24接觸之冷卻介質(圖中未示)(諸如周圍空氣)中之熱傳遞。散熱器20可由多種導熱材料製成,該等導熱材料之實例包括但不限於鋁及銅。散熱器20之板部分22包括用於自可卸除模組12接收熱量之熱接收表面26。The system 10 includes a heat sink 20 for dissipating heat from the removable module 12 via the first surface 12a. The heat sink 20 may be associated with the frame 15 of the host device 16. The heat sink 20 is usually composed of a high thermal conductivity material (such as metal, metal alloy, and the like), and may include one or more heat dissipation devices, which effectively dissipate the heat generated by the removable module 12. In the embodiment illustrated in FIG. 1, the heat sink 20 may include a plate portion 22 and fins 24 extending from the plate portion 22 and thermally coupled to the plate portion 22. The heat sink 24 provides an increased surface area to enhance heat transfer to a cooling medium (not shown) in contact with the heat sink 24 (such as ambient air). The heat sink 20 may be made of various thermally conductive materials, and examples of such thermally conductive materials include but are not limited to aluminum and copper. The plate portion 22 of the heat sink 20 includes a heat receiving surface 26 for receiving heat from the removable module 12.

導熱薄膜30較佳地施加於熱接收表面26以界定熱傳遞區域「A」,其中來自可卸除模組12之熱量經由導熱薄膜30最有效地傳送至散熱器20。此熱傳遞區域「A」減小散熱器20之熱阻抗。熱傳遞區域「A」可為任何大小,較佳地約0.5-1.5 cm2 ,更佳地約1.0 cm2The thermally conductive film 30 is preferably applied to the heat receiving surface 26 to define the heat transfer area “A”, in which the heat from the removable module 12 is most efficiently transferred to the heat sink 20 via the thermally conductive film 30. This heat transfer area "A" reduces the thermal resistance of the heat sink 20. The heat transfer area "A" may be of any size, preferably about 0.5-1.5 cm 2 , more preferably about 1.0 cm 2 .

在熱接收表面26與熱耗散表面28之間界定厚度「T」。如圖1中所展示,當可卸除模組12如圖2中所說明而安裝時,散熱器20及導熱薄膜30可以引起與模組12之第一表面12a接觸的方式安裝至框架15。此接觸准許散熱器20接收由可卸除模組12產生之熱量,且以合適之方式耗散熱量。A thickness "T" is defined between the heat receiving surface 26 and the heat dissipating surface 28. As shown in FIG. 1, when the detachable module 12 is installed as illustrated in FIG. 2, the heat sink 20 and the thermally conductive film 30 may be mounted to the frame 15 in a manner that causes contact with the first surface 12 a of the module 12. This contact allows the heat sink 20 to receive the heat generated by the removable module 12 and dissipate the heat in a suitable manner.

當模組12安裝於主機裝置16之腔室14中時,導熱薄膜30熱耦合至模組12之第一表面12a,較佳與該第一表面直接接觸。因此,導熱薄膜30位於模組12與散熱器20之間的熱介面處。以此方式,經由導熱薄膜30將模組12熱耦合至散熱器20。When the module 12 is installed in the cavity 14 of the host device 16, the thermally conductive film 30 is thermally coupled to the first surface 12a of the module 12, preferably in direct contact with the first surface. Therefore, the thermal conductive film 30 is located at the thermal interface between the module 12 and the heat sink 20. In this way, the module 12 is thermally coupled to the heat sink 20 via the thermally conductive film 30.

導熱薄膜30為適型的、可變形的及/或可撓的以填充可卸除模組12之第一表面12a與熱接收表面26之間的間隙。因此,導熱薄膜30起作用以填充空隙,否則該等空隙將對可卸除模組12之第一表面12a與散熱器20之熱接收表面26之間的熱傳遞呈現相當大的阻抗。因此,導熱薄膜30在可卸除模組12與熱耗散表面28/散熱片24之間形成熱傳遞路徑之一部分。建立熱傳遞路徑,其經由傳導自第一表面12a、經由導熱薄膜30傳遞熱量且傳遞至熱接收表面26。The thermally conductive film 30 is conformable, deformable and/or flexible to fill the gap between the first surface 12a of the removable module 12 and the heat receiving surface 26. Therefore, the thermally conductive film 30 functions to fill the voids, otherwise these voids will present a considerable resistance to the heat transfer between the first surface 12a of the removable module 12 and the heat receiving surface 26 of the heat sink 20. Therefore, the thermally conductive film 30 forms a part of the heat transfer path between the detachable module 12 and the heat dissipation surface 28 / fin 24. A heat transfer path is established, which transfers heat from the first surface 12a via conduction, through the thermally conductive film 30, and to the heat receiving surface 26.

為了有效地填充可卸除模組12與散熱器20之間的介面處之空隙,導熱薄膜30較佳地展現相對低的彈性模數/楊氏模數,以及相對低的撓曲模數。在一些實施例中,導熱薄膜30具有小於約10 MPa且更佳小於約1 MPa之彈性模數/楊氏模數,其中在根據ASWTM-D395壓縮之後反彈大於約95%。可以導熱薄膜30之形狀或厚度之改變來調節其可撓性/變形性。在一些特別適用之實施例中,以小於約75 μm(例如約10-50 μm)之大體上均勻的厚度(「Tf 」)施加導熱薄膜30。In order to effectively fill the gap at the interface between the removable module 12 and the heat sink 20, the thermally conductive film 30 preferably exhibits a relatively low elastic modulus/Young's modulus and a relatively low flexural modulus. In some embodiments, the thermally conductive film 30 has an elastic modulus/Young's modulus of less than about 10 MPa and more preferably less than about 1 MPa, wherein the rebound after compression according to ASWTM-D395 is greater than about 95%. The flexibility/deformability can be adjusted by changing the shape or thickness of the thermal conductive film 30. In some particularly suitable embodiments, the thermally conductive film 30 is applied at a substantially uniform thickness ("T f ") of less than about 75 μm (eg, about 10-50 μm).

導熱薄膜30為導熱的、適型的及耐磨的,從而使得導熱薄膜30在與上文所描述之應用類似的應用中為耐用的,其中可卸除模組12重複地安裝及自主機裝置16之腔室14拆卸。通常伴有與導熱薄膜30之滑動實體接觸而安裝及重新安裝可卸除模組12。因此,由於此類重複安裝及拆卸損壞熱傳導膜30可顯著增加模組12之第一表面12a與散熱器20之熱接收表面26之間的介面處之熱阻抗。 因此,重要的是導熱薄膜30亦由於模組12與導熱薄膜30之間的滑動接觸而對磨耗具有抗性。在一些實施例中,導熱薄膜30可展現至少約0.1 W/m•K且更佳至少約0.5 W/m•K之導熱率,其中導熱率經由導熱薄膜30之厚度Tf 而量測。The thermally conductive film 30 is thermally conductive, conformable and wear-resistant, so that the thermally conductive film 30 is durable in applications similar to those described above, in which the removable module 12 is repeatedly installed and removed from the host device The chamber 14 of 16 is disassembled. The removable module 12 is usually installed and reinstalled with sliding contact with the thermally conductive film 30. Therefore, damage to the thermal conductive film 30 due to such repeated installation and removal can significantly increase the thermal resistance at the interface between the first surface 12a of the module 12 and the heat receiving surface 26 of the heat sink 20. Therefore, it is important that the thermally conductive film 30 is also resistant to wear due to the sliding contact between the module 12 and the thermally conductive film 30. In some embodiments, the thermally conductive film 30 may exhibit a thermal conductivity of at least about 0.1 W/m•K and more preferably at least about 0.5 W/m•K, where the thermal conductivity is measured by the thickness T f of the thermally conductive film 30.

導熱薄膜30較佳由一或多種聚合物成型樹脂及一或多種無機微粒填料形成。在一些實施例中,該聚合物成型樹脂為含矽熱固性樹脂。預期用於導熱薄膜30之例示性熱固性樹脂組合物包括環氧樹脂、丙烯酸酯及聚胺基甲酸酯。適用於本發明之熱結締薄膜30的聚合物成型樹脂之其他實例描述於美國專利第5,028,984號及第3,908,040號中,其以全文引用之方式併入本文中。The thermally conductive film 30 is preferably formed of one or more polymer molding resins and one or more inorganic particulate fillers. In some embodiments, the polymer molding resin is a silicon-containing thermosetting resin. Exemplary thermosetting resin compositions intended for the thermally conductive film 30 include epoxy resins, acrylates, and polyurethanes. Other examples of polymer molding resins suitable for the thermal connective film 30 of the present invention are described in US Patent Nos. 5,028,984 and 3,908,040, which are incorporated herein by reference in their entirety.

在一例示性實施例中,交聯聚合物網絡由兩部分鉑催化、加成固化聚矽氧聚合物形成,其使用與甲基氫矽氧烷-二甲基矽氧烷、三甲基矽烷氧基封端之共聚物反應的乙烯基封端之聚二甲基矽氧烷。In an exemplary embodiment, the cross-linked polymer network is formed of two-part platinum-catalyzed, addition-cured polysiloxane polymer, which is used in conjunction with methylhydrogensiloxane-dimethylsiloxane, trimethylsilane Oxygen-terminated copolymer reacts with vinyl-terminated polydimethylsiloxane.

無機微粒填料亦包括於導熱薄膜30中。在一些實施例中,無機微粒填料選自氧化鋁、金剛石、黏土、鋁矽酸鹽、氮化鋁、氮化硼、氧化鋁、氮化鋁、氧化鎂、氧化鋅、碳化矽、二氧化矽、氧化鈹、氧化銻及其組合之群。在特別適用之實施例中,無機微粒填料為氮化鋁。在另一實施例中,填料選自由以下組成之群:碳奈米管、石墨烯、富勒烯及石墨。Inorganic particulate fillers are also included in the thermally conductive film 30. In some embodiments, the inorganic particulate filler is selected from alumina, diamond, clay, aluminosilicate, aluminum nitride, boron nitride, alumina, aluminum nitride, magnesium oxide, zinc oxide, silicon carbide, silicon dioxide , Beryllium oxide, antimony oxide and combinations thereof. In a particularly suitable embodiment, the inorganic particulate filler is aluminum nitride. In another embodiment, the filler is selected from the group consisting of carbon nanotubes, graphene, fullerene, and graphite.

可以每一百份樹脂小於約300份(phr)且更佳地小於約150 phr之濃度將無機微粒填料添加至聚合物成型樹脂中。已出人意料地確定小於或等於50 phr之無機微粒填料濃度提供增強導熱薄膜30之耐磨性之益處。如下文更詳細地描述,減少將無機微粒填料裝載至導熱薄膜30可減少導熱薄膜在磨耗測試之後的降解,且因此使在磨耗測試之後的熱傳遞區域「A」處之熱阻抗的增加最小化。咸信更低之微粒填料濃度會減少對聚合物基質黏著至金屬基板的干擾。因此,更低的微粒填料濃度可准許展現增強之耐磨性的「更具韌性」交聯聚合物。儘管較少無機填料存在於導熱薄膜30中,但此類增強之耐磨性在磨耗測試之後維持更低熱阻抗。耐磨性及聚合物基質連續性之維持出人意料地在維持低熱阻抗方面比如下薄膜更好,該薄膜自身可由於更高無機微粒填料濃度含量而更具導熱性。The inorganic particulate filler can be added to the polymer molding resin at a concentration of less than about 300 parts per hundred parts resin (phr) and more preferably less than about 150 phr. It has been surprisingly determined that an inorganic particulate filler concentration of less than or equal to 50 phr provides the benefit of enhancing the wear resistance of the thermally conductive film 30. As described in more detail below, reducing loading of the inorganic particulate filler to the thermally conductive film 30 can reduce the degradation of the thermally conductive film after the wear test, and thus minimize the increase in thermal impedance at the heat transfer area "A" after the wear test . The lower particle filler concentration of Xianxin will reduce the interference with the adhesion of the polymer matrix to the metal substrate. Therefore, a lower concentration of particulate filler may permit "more tough" cross-linked polymers that exhibit enhanced wear resistance. Although less inorganic filler is present in the thermally conductive film 30, such enhanced wear resistance maintains a lower thermal resistance after the wear test. The maintenance of abrasion resistance and continuity of the polymer matrix is surprisingly better in terms of maintaining low thermal resistance, such as a lower film, which can itself be more thermally conductive due to higher inorganic particulate filler concentration content.

在一些實施例中,無機微粒填料之最大粒度可為小於約50 μm且更佳小於約25 μm。在例示性實施例中,無機微粒填料之平均粒度可介於約1-5 μm之間且更佳地為約3 μm。In some embodiments, the maximum particle size of the inorganic particulate filler may be less than about 50 μm and more preferably less than about 25 μm. In an exemplary embodiment, the average particle size of the inorganic particulate filler may be between about 1-5 μm and more preferably about 3 μm.

包括導熱薄膜30之散熱器可藉由將前驅體施加至板部分22之熱接收表面26,且在熱接收表面26處使前驅體原位固化來形成。在適用之實施例中,板部分22包含具有鋁或銅板部分22之第一表面(諸如熱接收表面26)的金屬基板。本發明涵蓋包括熱接收表面26處之金屬塗層的其他金屬或金屬合金。在一些實施例中,金屬基板之第一表面可用轉化劑處理以形成腐蝕保護層。轉化劑可為六價鉻、三價鉻、錫、氧化鈦、氧化鎂、不含鉻之阿洛丁(Alodine)及鋅中之至少一者。The heat sink including the thermally conductive film 30 may be formed by applying the precursor to the heat receiving surface 26 of the plate portion 22 and curing the precursor in situ at the heat receiving surface 26. In a suitable embodiment, the plate portion 22 includes a metal substrate having a first surface of the aluminum or copper plate portion 22 (such as the heat receiving surface 26). The invention covers other metals or metal alloys that include a metal coating at the heat receiving surface 26. In some embodiments, the first surface of the metal substrate may be treated with a conversion agent to form a corrosion protection layer. The conversion agent may be at least one of hexavalent chromium, trivalent chromium, tin, titanium oxide, magnesium oxide, chromium-free Alodine and zinc.

用於施加至金屬基板之經轉化處理第一表面的前驅體可包括含矽樹脂及無機微粒填料,其中該含矽樹脂可為聚合物成型樹脂。此類前驅體可以小於75 μm且較佳介於10-50 μm之間的厚度塗佈至腐蝕保護層上。可經由網版印刷、狹縫塗佈、浸塗、選擇性印刷、簾幕式塗佈、槽模施配或其他適合之塗佈技術將前驅體塗佈至腐蝕保護層上。前驅體材料可為液態、膏狀、凝膠狀、滑脂狀或稱為預固化狀態之其他形式。在一個實施例中,前驅體可為溶解於一或多種溶劑中之溶液。經塗佈之前驅體可藉由適當固化機制原位固化以聚合前驅體,其中由樹脂形成之含矽聚合物與腐蝕保護層互鎖。預期用於本文中之固化機制包括(但不限於)紫外線照射、熱輻射、音波處理、化學固化及其類似處理。The precursor for applying to the converted first surface of the metal substrate may include a silicon-containing resin and an inorganic particulate filler, wherein the silicon-containing resin may be a polymer molding resin. Such precursors may be applied to the corrosion protection layer with a thickness of less than 75 μm, and preferably between 10-50 μm. The precursor can be applied to the corrosion protection layer via screen printing, slit coating, dip coating, selective printing, curtain coating, slot die application, or other suitable coating techniques. The precursor material can be liquid, paste, gel, grease or other forms called pre-cured state. In one embodiment, the precursor may be a solution dissolved in one or more solvents. The coated precursor can be cured in situ by an appropriate curing mechanism to polymerize the precursor, wherein the silicon-containing polymer formed by the resin is interlocked with the corrosion protection layer. The curing mechanisms intended for use herein include, but are not limited to, ultraviolet radiation, thermal radiation, sonic treatment, chemical curing, and the like.

術語「互鎖」在本文中意欲意謂含矽聚合物與腐蝕保護層之間的結合,該結合至少部分涉及如「Chemical Adhesion of Silicone Elastomers on Primed Metal Surfaces: A Comprehensive Survey of Open and Patent Literatures」,Progress in Organic Coatings , Loic Picard等人,第80卷(2015)第120-141頁中所描述之機械互鎖,該專利之內容係以引用之方式併入本文中。此類結合之實例將聚矽氧彈性體偶合至上底漆金屬表面。The term "interlock" is intended herein to mean the bonding between the silicon-containing polymer and the corrosion protection layer, which at least partly involves, for example, "Chemical Adhesion of Silicone Elastomers on Primed Metal Surfaces: A Comprehensive Survey of Open and Patent Literatures" , Progress in Organic Coatings , Loic Picard et al., mechanical interlock described in pages 80-141 of Volume 80 (2015), the content of this patent is incorporated herein by reference. Examples of such bonding couple polysiloxane elastomers to primed metal surfaces.

現參看圖3之流程圖描述用於形成併有導熱薄膜30之散熱器20的例示性方法。為提供所需耐磨性,導熱薄膜呈現高水準之內聚力,以及高水準之與金屬熱接收表面26之黏著力。為輔助此類黏著,可處理熱接收表面26以用於增強與聚合物薄膜之結合。金屬表面可經鈍化以形成腐蝕保護層,該腐蝕保護層亦用以與導熱薄膜之聚合物互鎖。各種金屬表面處理可用以鈍化金屬表面,包括(但不限於)陽極化、鉻酸鹽轉化、鍍錫電及鋅電鍍。適用之金屬表面處理之實例為使用三價(1型)或六價(2型)鉻之鉻酸鹽轉化塗佈,該等鉻以Henkel Corporation、Madison Heights、MI之Bonderite或Alodine之商標市售。Referring now to the flowchart of FIG. 3, an exemplary method for forming the heat sink 20 incorporating the thermally conductive film 30 will be described. To provide the required wear resistance, the thermally conductive film exhibits a high level of cohesion and a high level of adhesion to the metal heat receiving surface 26. To assist such adhesion, the heat receiving surface 26 can be treated for enhanced bonding with the polymer film. The metal surface can be passivated to form a corrosion protection layer, which is also used to interlock with the polymer of the thermally conductive film. Various metal surface treatments can be used to passivate metal surfaces, including (but not limited to) anodization, chromate conversion, tin plating, and zinc plating. An example of a suitable metal surface treatment is chromate conversion coating using trivalent (type 1) or hexavalent (type 2) chromium, which is commercially available under the trademarks of Henkel Corporation, Madison Heights, Bonderite of MI, or Alodine .

其他適用之金屬表面處理包括以商標名EC2 可購自Henkel Corporation及如美國專利申請公開案第2017/0121841號中所描述之電子陶瓷塗佈,以及美國專利第6,946,401號;第6,361,833號;第4,162,947號及第3,434,943號及美國專利申請公開案第2010/0038254號中所描述之金屬表面處理,其各自之內容全文併入本文中。Other suitable metal surface treatments include those available under the trade name EC 2 from Henkel Corporation and electronic ceramic coating as described in US Patent Application Publication No. 2017/0121841, and US Patent Nos. 6,946,401; 6,361,833; The metal surface treatments described in 4,162,947 and 3,434,943 and U.S. Patent Application Publication No. 2010/0038254, the respective contents of which are incorporated herein in their entirety.

接著將經處理之金屬散熱器浸沒於諸如異丙醇、丙酮、烷烴或水之溶劑中以供超音波處理2-10分鐘。自超音波處理浴移除金屬散熱器且用電離氣槍(諸如購自Simco-Ion之「頂部噴槍靜態消除噴槍(Top Gun Static Elimination Gun)」)乾燥,以減少或消除來自金屬表面之靜電荷及微粒。The treated metal radiator is then immersed in a solvent such as isopropyl alcohol, acetone, alkanes or water for ultrasonic treatment for 2-10 minutes. Remove the metal radiator from the ultrasonic treatment bath and dry it with an ionizing air gun (such as the "Top Gun Static Elimination Gun" purchased from Simco-Ion) to reduce or eliminate the static charge from the metal surface and particle.

在電離空氣乾燥步驟之後,金屬散熱器用紫外輻射及臭氧處理以清潔溶劑殘餘物、聚矽氧油或焊劑。After the ionization air drying step, the metal radiator is treated with ultraviolet radiation and ozone to clean solvent residues, silicone oil or flux.

製備具有含矽樹脂及無機微粒填料之前驅體且將其施配至如上所述製備之腐蝕保護層上。可藉由網板印刷或諸如狹縫塗佈、浸塗或選擇性印刷之其他低量施配程序將前驅體施配於鈍化金屬表面之腐蝕保護層上。經塗佈之散熱器隨後在烘箱中在25-200℃下烘烤1-240分鐘以原位固化/聚合前驅體。A precursor with a silicone-containing resin and inorganic particulate filler is prepared and applied to the corrosion protection layer prepared as described above. The precursor can be applied to the corrosion protection layer on the passivated metal surface by screen printing or other low-volume application procedures such as slit coating, dip coating, or selective printing. The coated radiator is then baked in an oven at 25-200°C for 1-240 minutes to cure/polymerize the precursor in situ.

根據本發明之導熱薄膜組合物可視情況進一步包括一或多種流動添加劑、助黏劑、流變改質劑、韌化劑、助熔劑、反應速率控制劑及其類似物,以及其組合。反應速率調節劑之實例為四乙烯基四甲基環四矽氧烷。用以改良薄膜與金屬散熱器的黏著的實例或表面偶合劑/黏著促進劑包括環氧基官能三甲氧基矽烷、乙烯基官能三甲氧基矽烷及甲基丙烯酸酯官能三甲氧基矽烷。丁醇鈦(iv)可用於催化矽烷偶合劑與目標基板之縮合。韌化劑之實例可包括經六甲基二矽氮烷處理之煙霧狀二氧化矽。薄膜組合物 The thermally conductive film composition according to the present invention may further include one or more flow additives, adhesion promoters, rheology modifiers, toughening agents, fluxes, reaction rate control agents, and the like, and combinations thereof, as the case may be. An example of a reaction rate modifier is tetravinyltetramethylcyclotetrasiloxane. Examples or surface coupling agents/adhesion promoters used to improve the adhesion of the film to the metal heat sink include epoxy-functional trimethoxysilane, vinyl-functional trimethoxysilane, and methacrylate-functional trimethoxysilane. Titanium (iv) butoxide can be used to catalyze the condensation of the silane coupling agent with the target substrate. Examples of toughening agents may include fumed silica treated with hexamethyldisilazane. Film composition

以下組成意欲僅為例示性的,且表示可包括於本發明之薄膜組合物中的某些組分。實例材料 1 ( 對於鋁金屬基板 )

Figure 108134794-A0304-0001
實例材料 2 ( 對於銅金屬基板 )
Figure 108134794-A0304-0002
耐磨性測試 The following composition is intended to be exemplary only, and indicates certain components that can be included in the film composition of the present invention. Example material 1 ( for aluminum metal substrate )
Figure 108134794-A0304-0001
Example material 2 ( for copper metal substrate )
Figure 108134794-A0304-0002
Wear resistance test

測試塗佈有本發明之導熱薄膜之散熱器的耐磨性及熱效能。本文所使用之測試方法(名為「塔柏磨耗測試」)包括來自G133、F732、F2025、F2496及D4060之ASTM標準的概念以便分析塗層對磨耗之抗性。因為本發明之薄膜之成功依賴於在使用主機裝置之重複安裝及拆卸過程中對磨耗之抗性,所以該塔柏磨耗測試試圖定量分析薄膜之效能。與ASTM F732及F2496中所概述之方法類似,耐磨性之定量量測為經塗佈薄膜在磨耗測試過程中損失之體積百分比。體積損失可藉由計算磨耗後之質量損失(類似於ASTM G133及D4060)以重力方式測定。經塗佈薄膜之原始質量及損失質量准許對具有不同密度之塗層進行比較。 The heat resistance of the heat sink coated with the thermal conductive film of the present invention was tested. The test method used in this article (called the "Tarbo Abrasion Test") includes concepts from the ASTM standards of G133, F732, F2025, F2496, and D4060 in order to analyze the resistance of the coating to abrasion. Because the success of the film of the present invention depends on the resistance to abrasion during repeated installation and disassembly using the host device, the Taber Abrasion Test attempts to quantitatively analyze the performance of the film. Similar to the methods outlined in ASTM F732 and F2496, the quantitative measurement of abrasion resistance is the volume percent loss of the coated film during the wear test. The volume loss can be determined gravimetrically by calculating the mass loss after wear (similar to ASTM G133 and D4060). The original and lost quality of the coated film allows comparison of coatings with different densities.

往復式研磨器可購自模型5900下之Taber Industries。將塔柏往復式研磨器與來自3M Company之Scotch-Brite® 通用淨化墊作為研磨表面擬合。使用能夠量測最接近0.1 mg之分析天平測定裝載薄膜之質量以及磨耗測試之後的質量損失。程序 Reciprocating grinders are available from Taber Industries under model 5900. The Taber reciprocating triturated with from 3M Company of Scotch-Brite ® Universal purge fitting pad as a polishing surface. Use an analytical balance capable of measuring the closest to 0.1 mg to determine the quality of the loaded film and the mass loss after the wear test. program

藉由找到經塗佈基板之質量與經塗佈金屬基板之皮重之間的差值來確定薄膜質量。將待研磨之樣品置放於往復式研磨器上之夾具中且牢固地保持就位。接著將具有1吋2 面積之研磨墊與薄膜接觸置放,且施加5N之力。嚙合該往復式研磨器,且在每分鐘60轉之速率下線性做所需循環數目之往復運動。本文中所使用之往復「循環」包含跨越薄膜表面之兩個遍次,其中每一遍次覆蓋80 mm衝程長度。各樣品包括實例材料1或實例材料2之薄膜,其在參考圖3所描述之程序下被施加於1吋× 4吋之鋁搭接中。 The film quality is determined by finding the difference between the mass of the coated substrate and the tare weight of the coated metal substrate. Place the sample to be ground in the fixture on the reciprocating grinder and hold it firmly in place. Then, a polishing pad with an area of 1 inch 2 is placed in contact with the film, and a force of 5N is applied. Engage the reciprocating grinder and linearly reciprocate the required number of cycles at a rate of 60 revolutions per minute. The reciprocating "cycle" used in this article includes two passes across the surface of the film, each of which covers an 80 mm stroke length. Each sample included a film of Example Material 1 or Example Material 2, which was applied to a 1 inch by 4 inch aluminum lap under the procedure described with reference to FIG. 3.

完成往復循環後,自夾具卸除樣品,且在35 psi下用壓縮空氣移除任何鬆散材料/碎片,且用浸沒於異丙醇中之不起絨抹布擦拭乾淨。隨後使經研磨之樣品乾燥,且稱量以確定薄膜之質量損失。當暴露於往復研磨器之400個循環時,超過20%之任何薄膜質量損失視為薄膜耐久性失效。在50、100、200及400遍次中之每一者之後將樣品稱重。結果 After completing the reciprocating cycle, remove the sample from the fixture and remove any loose material/debris with compressed air at 35 psi and wipe it clean with a lint-free cloth immersed in isopropyl alcohol. The ground sample was then dried and weighed to determine the mass loss of the film. When exposed to 400 cycles of a reciprocating grinder, any film quality loss of more than 20% is considered a film durability failure. The samples were weighed after each of 50, 100, 200 and 400 passes. result

使用塔柏磨耗測試技術在塗佈有實例材料1但具有不同微粒填料濃度之鋁基板樣品上進行實驗。圖5-圖8說明在併有25、50、150或250 phr氮化鋁填料之樣品上的塔柏磨耗測試之結果。圖5-圖8說明對含有小於或等於50 phr無機填料之薄膜之耐磨性之出人意料的益處。結果在「相對質量損失」條形圖中尤其為說明性的,該等條形圖說明在塔柏磨耗測試時之相對質量損失,而非僅絕對質量損失,其可藉由薄膜塗層之初始質量來實現。熱效能測試 Experiments were performed on aluminum substrate samples coated with Example Material 1 but with different particulate filler concentrations using Taber Abrasion Test Technology. Figures 5-8 illustrate the results of the Taber abrasion test on samples incorporating 25, 50, 150, or 250 phr aluminum nitride filler. Figures 5-8 illustrate the unexpected benefits of abrasion resistance of films containing less than or equal to 50 phr inorganic filler. The results are especially illustrative in the "relative mass loss" bar graphs, which illustrate the relative mass loss during the Taber abrasion test, not just the absolute mass loss, which can be Quality to achieve. Thermal performance test

亦比較在塔柏磨耗測試之前及之後的熱阻抗,經由熱效能來測試耐磨性及耐久性。依照測試方法MET BASA#MET-5.4-01-1900-測試2.1在約1.0 cm2 之面積上測試熱阻抗。在塔柏磨耗測試之後,熱阻抗增加50%視為失效。實例 The thermal resistance before and after the Taber abrasion test was also compared, and the abrasion resistance and durability were tested by thermal performance. According to the test method MET BASA#MET-5.4-01-1900-Test 2.1, the thermal resistance was measured on an area of about 1.0 cm 2 . After the Taber abrasion test, a 50% increase in thermal resistance is considered a failure. Examples

在塔柏磨耗測試之後測試以下樣品之耐磨性與熱效能兩者:

Figure 108134794-A0304-0003
After the Taber abrasion test, the following samples were tested for both abrasion resistance and thermal performance:
Figure 108134794-A0304-0003

10:系統 12:可卸除模組 12a:第一表面 13:方向箭頭 14:腔室 15:框架 16:主機裝置 20:散熱器 22:板部分 24:散熱片 26:熱接收表面 28:熱耗散表面 30:導熱薄膜 T:厚度 Tf:均勻厚度 A:熱傳遞區域10: System 12: Removable module 12a: First surface 13: Direction arrow 14: Chamber 15: Frame 16: Host device 20: Heat sink 22: Plate part 24: Heat sink 26: Heat receiving surface 28: Heat Dissipative surface 30: thermally conductive film T: thickness T f : uniform thickness A: heat transfer area

圖1描繪本發明之系統之橫截面示意圖,其中可卸除模組安裝至主機裝置中。FIG. 1 depicts a schematic cross-sectional view of the system of the present invention, wherein the detachable module is installed in the host device.

圖2描繪本發明之系統之橫截面示意圖,其中該可卸除模組安裝至該主機裝置中。FIG. 2 depicts a schematic cross-sectional view of the system of the present invention, wherein the detachable module is installed in the host device.

圖3描繪用導熱薄膜塗佈金屬基板之步驟的流程圖。Figure 3 depicts a flow chart of the steps of coating a metal substrate with a thermally conductive film.

圖4為說明在塔柏磨耗測試之後來自其各個金屬基板之薄膜之絕對質量損失的圖表。FIG. 4 is a graph illustrating the absolute quality loss of thin films from each metal substrate after the Taber abrasion test.

圖5為說明在塔柏磨耗測試之後來自其各個金屬基板之薄膜之相對質量損失的圖表。Figure 5 is a graph illustrating the relative mass loss of thin films from each metal substrate after the Taber abrasion test.

圖6為說明在塔柏磨耗測試之後來自其各個金屬基板之薄膜之絕對質量損失的圖表。FIG. 6 is a graph illustrating the absolute quality loss of thin films from each metal substrate after the Taber abrasion test.

圖7為說明在塔柏磨耗測試之後來自其各個金屬基板之薄膜之相對質量損失的圖表。7 is a graph illustrating the relative quality loss of thin films from each metal substrate after the Taber abrasion test.

10:系統 10: System

12:可卸除模組 12: Removable module

12a:第一表面 12a: first surface

13:方向箭頭 13: direction arrow

14:腔室 14: chamber

15:框架 15: Frame

16:主機裝置 16: Host device

20:散熱器 20: radiator

22:板部分 22: Board section

24:散熱片 24: Heat sink

26:熱接收表面 26: heat receiving surface

30:導熱薄膜 30: Thermally conductive film

Claims (25)

一種系統,其包含: a.   框架,其界定腔室;及 b.   散熱器,其包含: 金屬基板,其具有界定其間之厚度的第一表面及第二表面,該金屬基板具有基板熱阻抗; 導熱薄膜,其安置於界定熱傳遞區域之該第一表面或該第二表面中之至少一者的至少一部分上,該導熱薄膜包含(1)由含矽樹脂形成之聚合物及(2)無機微粒填料, 其中在塔柏(Taber)磨耗測試之前定義跨該厚度經由該熱傳遞區域的初始熱阻抗,且在完成塔柏磨耗測試時定義跨該金屬基板之該厚度經由該熱傳遞區域之磨耗熱阻抗,其中該磨耗熱阻抗大於該初始熱阻抗約50%以上;及 電子組件,其以可卸除方式插入至該腔室中以用於熱接觸該散熱器之該熱傳遞區域。A system that includes: a. Frame, which defines the chamber; and b. Radiator, which contains: A metal substrate having a first surface and a second surface defining a thickness therebetween, the metal substrate has a substrate thermal resistance; A thermally conductive film disposed on at least a portion of at least one of the first surface or the second surface that defines the heat transfer area, the thermally conductive film includes (1) a polymer formed of silicon-containing resin and (2) inorganic Particulate filler, Where the initial thermal resistance across the thickness through the heat transfer area is defined before the Taber wear test, and the wear thermal resistance across the thickness of the metal substrate through the heat transfer area is defined when the Taber wear test is completed, Where the thermal resistance of the wear is greater than the initial thermal resistance by more than 50%; and An electronic component is detachably inserted into the chamber for thermal contact with the heat transfer area of the heat sink. 如請求項1之系統,其中該初始熱阻抗及該磨耗熱阻抗中之每一者各自小於該基板熱阻抗。The system of claim 1, wherein each of the initial thermal impedance and the abrasion thermal impedance is less than the substrate thermal impedance. 如請求項1之系統,其中該磨耗熱阻抗小於約1.8℃/W。The system of claim 1, wherein the abrasion thermal impedance is less than about 1.8°C/W. 如請求項1之系統,其中該無機微粒填料以小於或等於約50 phr之濃度存在於該薄膜中。The system of claim 1, wherein the inorganic particulate filler is present in the film at a concentration of less than or equal to about 50 phr. 如請求項4之系統,其中該無機微粒填料之最大粒度小於約50 μm。The system of claim 4, wherein the maximum particle size of the inorganic particulate filler is less than about 50 μm. 如請求項5之系統,其中該無機微粒填料之平均粒度為約3 μm。The system of claim 5, wherein the average particle size of the inorganic particulate filler is about 3 μm. 如請求項4之系統,其中該無機微粒填料係選自氧化鋁、氧化鋅、氧化鎂、氮化鋁、氮化硼、二氧化矽、金剛石、黏土、鋁矽酸鹽及其組合之群。The system of claim 4, wherein the inorganic particulate filler is selected from the group consisting of alumina, zinc oxide, magnesium oxide, aluminum nitride, boron nitride, silicon dioxide, diamond, clay, aluminosilicate, and combinations thereof. 如請求項1之系統,其中該基板之該厚度係在約10-100 μm之間。The system of claim 1, wherein the thickness of the substrate is between about 10-100 μm. 如請求項8之系統,其中該導熱薄膜之厚度小於約25 μm。The system of claim 8, wherein the thickness of the thermally conductive film is less than about 25 μm. 一種系統,其包含: 主機裝置,其包括界定腔室之框架; 可卸除模組,其產生傳送至該模組之第一表面之熱量,該模組可經由該腔室以可卸除方式安裝於該主機裝置中; 散熱器,其與該框架相關聯以耗散來自該第一表面之熱量,其中該散熱器包括第二表面; 施加導熱薄膜以界定該第一表面或該第二表面之至少一部分上的該散熱器之熱傳遞區域,且其中在該模組安裝於該裝置中以准許該熱量由該第一表面接收時,該導熱薄膜與該第一表面或該第二表面直接接觸, 其中該系統在塔柏磨耗測試之前展現經由該熱傳遞區域之初始熱阻抗,且在完成塔柏磨耗測試時展示經由該熱傳遞區域之磨耗熱阻抗,該磨耗熱阻抗大於該初始熱阻抗不超過約50%。A system that includes: The host device, which includes a frame defining the chamber; A detachable module, which generates heat transferred to the first surface of the module, the module can be detachably installed in the host device through the chamber; A heat sink associated with the frame to dissipate heat from the first surface, wherein the heat sink includes a second surface; Applying a thermally conductive film to define the heat transfer area of the heat sink on at least a portion of the first surface or the second surface, and wherein when the module is installed in the device to permit the heat to be received by the first surface, The thermally conductive film is in direct contact with the first surface or the second surface, Wherein the system exhibits an initial thermal resistance through the heat transfer area before the Taber abrasion test, and exhibits an abrasion thermal resistance through the heat transfer area when the Taber abrasion test is completed, the abrasion thermal resistance is greater than the initial thermal resistance and does not exceed About 50%. 如請求項10之系統,其中該導熱薄膜減小該散熱器與該第一表面之間的接觸區域之熱阻抗。The system of claim 10, wherein the thermally conductive film reduces the thermal impedance of the contact area between the heat sink and the first surface. 如請求項11之系統,其中該導熱薄膜包含由含矽樹脂形成之聚合物及無機微粒填料。The system of claim 11, wherein the thermally conductive film includes a polymer formed of silicone-containing resin and inorganic particulate filler. 如請求項12之系統,其中該無機微粒填料係以低於或等於約50 phr之濃度存在於該導熱薄膜中。The system of claim 12, wherein the inorganic particulate filler is present in the thermally conductive film at a concentration of less than or equal to about 50 phr. 如請求項13之系統,其中該無機微粒填料之最大粒度小於約50 μm。The system of claim 13, wherein the maximum particle size of the inorganic particulate filler is less than about 50 μm. 如請求項10之系統,其中該導熱薄膜之厚度係小於約25 μm。The system of claim 10, wherein the thickness of the thermally conductive film is less than about 25 μm. 一種系統,其包含: 主機裝置,其包括界定腔室之框架; 可卸除模組,其產生傳送至該模組之第一表面之熱量,該模組經由該腔室以可卸除方式安裝於該主機裝置中; 散熱器,其與該框架相關聯以耗散來自該第一表面之熱量,其中該散熱器包括第二表面,且施加導熱薄膜至該第一表面或該第二表面,且其中在該模組安裝於該裝置中以准許該熱量由該第一表面接收時,該導熱薄膜與該第一表面直接接觸,該第二表面包括腐蝕保護層,且該導熱薄膜包括與該腐蝕保護層互鎖之含矽聚合物。A system that includes: The host device, which includes a frame defining the chamber; A detachable module, which generates heat transferred to the first surface of the module, and the module is detachably installed in the host device through the chamber; A heat sink associated with the frame to dissipate heat from the first surface, wherein the heat sink includes a second surface, and a thermally conductive film is applied to the first surface or the second surface, and wherein the module When installed in the device to allow the heat to be received by the first surface, the thermally conductive film directly contacts the first surface, the second surface includes a corrosion protection layer, and the thermally conductive film includes an interlock with the corrosion protection layer Contains silicon polymer. 如請求項16之系統,其中該腐蝕保護層包括多孔氧化層、矽烷及甲基丙烯酸酯中之至少一者。The system of claim 16, wherein the corrosion protection layer includes at least one of a porous oxide layer, silane, and methacrylate. 如請求項17之系統,其中該導熱薄膜包括無機微粒填料,且該含矽聚合物係由含矽樹脂形成。The system of claim 17, wherein the thermally conductive film includes inorganic particulate filler, and the silicon-containing polymer is formed of silicon-containing resin. 如請求項18之系統,其中該無機微粒填料係以小於或等於約50 phr之濃度存在於該薄膜中。The system of claim 18, wherein the inorganic particulate filler is present in the film at a concentration of less than or equal to about 50 phr. 如請求項19之系統,其中該導熱薄膜減小該散熱器與該第一表面之間的接觸區域之熱阻抗。The system of claim 19, wherein the thermally conductive film reduces the thermal impedance of the contact area between the heat sink and the first surface. 一種用於形成散熱器之方法,其包含: 提供具有第一表面之金屬基板; 用轉化劑處理該第一表面以形成腐蝕保護層; 製備具有含矽樹脂及無機微粒填料之前驅體; 將該前驅體塗佈至該腐蝕保護層上且原位固化以聚合該前驅體, 其中由該樹脂形成之含矽聚合物與該腐蝕保護層互鎖。A method for forming a heat sink, which includes: Provide a metal substrate with a first surface; Treat the first surface with a conversion agent to form a corrosion protection layer; Preparation of precursors with silicone resin and inorganic particulate filler; Applying the precursor onto the corrosion protection layer and curing in situ to polymerize the precursor, The silicon-containing polymer formed by the resin interlocks with the corrosion protection layer. 如請求項21之方法,其中該轉化劑包括六價鉻、三價鉻、錫、氧化鈦、氧化鎂、不含鉻之阿洛丁(Alodine)及鋅中之至少一者。The method of claim 21, wherein the conversion agent includes at least one of hexavalent chromium, trivalent chromium, tin, titanium oxide, magnesium oxide, chromium-free Alodine and zinc. 如請求項21之方法,其包括藉由網版印刷、狹縫塗佈、浸塗、選擇性印刷或其組合將該前驅體塗佈至該腐蝕保護層上。The method of claim 21, which includes coating the precursor onto the corrosion protection layer by screen printing, slit coating, dip coating, selective printing, or a combination thereof. 如請求項22之方法,其中該含矽聚合物之厚度小於約25 μm。The method of claim 22, wherein the thickness of the silicon-containing polymer is less than about 25 μm. 如請求項21之方法,其中該無機微粒填料係以低於或等於50 phr之濃度存在。The method of claim 21, wherein the inorganic particulate filler is present at a concentration of less than or equal to 50 phr.
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