TW201913845A - Furnace equipment and heat exchange system for semi-conductor process and leak detection module for process equipment - Google Patents

Abstract

The present invention provides with a furnace equipment for a semi-conductor process. The furnace equipment comprises a reaction furnace, a heat exchange module and a leak detecting module. The reaction furnace generates a to-be-processed fluid having calorific capacity. The heat exchange module has a heat exchange fluid for a heat exchange with the calorific capacity. When leak of the heat exchange fluid reaching a specific amount is detected, the semi-conductor process is triggered to a specific operating state.

Description

Furnace tube equipment and heat exchange system for semiconductor manufacturing, and leak detection module for process equipment

The present invention relates to a furnace tube apparatus and a heat exchange system for a semiconductor process, and a leak detection module for a process equipment, and more particularly to a leak detection module in a heat exchange system.

During the processing of the process, an input reaction gas such as oxygen or nitrogen reacts with the material at a high temperature to generate an oxide, and a process equipment capable of generating a high temperature, such as a high-temperature furnace apparatus, which raises the temperature to more than one thousand degrees, is often required. In the manufacturing method of the semiconductor industry, electronic components are manufactured on germanium semiconductors (products include: dynamic memory, static memory, micro-virtual devices, etc.), while electronic components are completed by sophisticated complexes. Circuit (Integrated Circuit, IC for short); IC manufacturing process is the application of wafer oxide growth, lithography, etching, cleaning, impurity diffusion, ion implantation and thin film deposition, etc., the growth of oxide layer requires high temperature furnace device.

In the pre-semiconductor manufacturing process, the heat generated by the high-temperature furnace equipment allows oxidation and diffusion to proceed, and the high-temperature furnace equipment requires cooling treatment after the reaction gas or the exhaust gas to be discharged reaches a certain high temperature and reacts with the material. In general, a cooler is used for processing, but the cooler has a specific service life. If it exceeds the specified service life, there is often a problem that the pipeline is broken and the coolant leaks.

When the cooler has a problem of liquid leakage, the coolant will be reduced in the pipeline, and the pipeline in the cooler will be like an air-burning, causing the pipeline to expand, and the connection between the pipeline and the pipeline causes looseness or voids. Intensifying the leakage of the coolant, such a vicious cycle will cause the high temperature furnace to be unable to effectively cool down, affecting the entire process equipment and causing its damage.

In view of this, it is expected that there is a leak detection module for a process device, and the leak detection module can detect the liquid leakage condition at any time, regardless of the operating state of the process device, and detect When a liquid leakage phenomenon occurs, a signal is automatically sent to the process equipment, so that the process equipment automatically shuts down its own high temperature furnace, air pipe gate, cooler pump, exhaust fan and other devices to ensure safety. . At the same time, the process equipment sends an alarm through the wireless network to notify the relevant staff to handle.

The idea of the present invention is to provide a leak detection module for a cooling system of a process equipment, the leak detection module comprising a liquid leakage collecting tray and a liquid leakage detector disposed at a bottom of the liquid leakage collecting tray a measuring tape and a reaction unit or controller electrically connected to the leakage detecting, the liquid collecting tray can collect the leakage leaked from any part of the cooling system, and the reaction unit or the controller continuously sends a liquid leakage detecting signal Up to the liquid leakage detecting belt, and the leakage detecting belt changes the electrical parameter of the liquid leakage sensing portion when the liquid leakage reaches a certain amount, so that the liquid leakage detecting signal changes, the reaction unit or the control The device receives the changed liquid leakage detection signal to determine whether a liquid leakage condition occurs, and immediately sends a signal to the processing device by the reaction unit or the controller when the liquid leakage condition occurs, to automatically close the process. Equipment or reduce the operational efficiency of the process equipment. At the same time, the process equipment can be automatically notified to relevant personnel through the communication network.

According to the above concept, the present invention provides a furnace tube apparatus for a semiconductor process, comprising a reactor, a heat exchange module, and a leak detection module. The reactor produces a fluid to be treated having a heat. The heat exchange module has a heat exchange fluid for performing heat exchange with the heat. When the heat exchange fluid is detected to leak for a certain amount, the semiconductor process is placed in a specific operational state.

According to the above concept, the present invention provides a leak detection module for a process device, the process device having a heat exchange fluid for performing a heat exchange on the process device, the leak detection module including an external heat release An exchange fluid collection unit, a detection unit, and a reaction unit. The leakage heat exchange fluid collection unit is configured to collect a leaked heat exchange fluid, and the detection unit is configured to detect a specific amount of the heat exchange fluid that is leaked, and the reaction unit is caused by a specific amount The process device is in a specific operational state.

According to the above concept, the present invention provides a heat exchange system for a semiconductor process, comprising a heat exchange module and a leak detection module. The heat exchange module has a heat exchange fluid for performing a heat exchange in the semiconductor process. When the heat exchange fluid is detected to leak for a certain amount, the semiconductor process is placed in a specific operational state.

According to the above concept, the present invention provides a leak detection module for a process device, the process device having a heat exchange fluid for performing a heat exchange on the process device, the leak detection module including a control unit and A detection unit. The control unit is configured to control the process device to be in a specific operational state. The detecting unit is configured to collect a leaked heat exchange fluid, and when the leaked heat exchange fluid reaches a certain amount, issue a control signal to cause the process device to be in the specific operating state.

The invention can avoid the expansion of the pipeline when the cooling system has liquid leakage, and the connection between the pipeline and the pipeline causes looseness or gap, and the leakage of the coolant is aggravated, and the problem can be prevented at the beginning of the problem. In order to avoid the problem, the equipment around it will be damaged, and the leakage will not cause environmental pollution. Please refer to the following figures and drawings for further understanding of the present invention.

The present invention is provided to illustrate the spirit of the present invention. For the sake of brevity of the present invention, some of the elements are omitted, and the embodiments may be combined with each other to form a new embodiment, and in the preferred embodiment. The specific shapes, structures, devices, and parameter values are not intended to limit the present invention, and those skilled in the art can make modifications or refinements, which are within the scope of the present invention.

Please refer to the first figure, which is a schematic diagram of a furnace tube apparatus 10 for a semiconductor process in accordance with a preferred embodiment of the present invention. The furnace tube apparatus 10 includes a reaction furnace 101, a heat exchange module 102, and a leak detection module 103. The reactor 101 produces a fluid 12 to be treated having a heat. The heat exchange module 102 has a heat exchange fluid 14 for performing heat exchange with the heat. When the leakage detecting module 103 detects that the heat exchange fluid 14 leaks for a certain amount, the semiconductor process is placed in a specific operating state. For example, stopping the semiconductor process or reducing its operating speed.

The heat exchange fluid 14, the set of U-shaped heat pipes 16, and the set of fins 18 in the first figure are only schematic views in the heat exchange module 102, more specifically the heat exchange fluid 14 in the second figure. Flows in the set of U-shaped heat pipes 16. Please refer to the second figure, which is a schematic diagram of a heat exchange module 102 in accordance with a preferred embodiment of the present invention. The heat exchange module 102 includes a set of U-row heat pipes 16 and a set of fins 18. The U-shaped heat pipe 16 is configured to accommodate the heat exchange fluid 14 circulating therein, wherein each U-shaped heat pipe 161, 162 has a head end 1611, 1621 and a tail end 1621, 1622, for simplicity of explanation. Only two U-shaped heat pipes 161, 162 are connected in series. In the second figure, each of the heat sinks has a first through hole to form a plurality of first through holes 181 in the set of heat sinks, and a second through hole to form a plurality of second through holes 182 in the set of heat sinks, and are arranged in parallel And forming a plurality of intervals 180, the head end of each U-shaped heat pipe vertically passes through the plurality of first holes, and the tail end of each U-shaped heat pipe vertically passes through the plurality of second holes. For example, the head end 1611 of the U-shaped heat pipe 161 vertically passes through the plurality of first through holes 181, and the tail end 1612 of the U-shaped heat pipe 161 vertically passes through the plurality of second holes 182. The U-shaped heat pipe 16 includes a first and a second U-shaped heat pipe 161, 162. The tail end 1612 of the first U-shaped heat pipe 161 is connected in series with the head end 1621 of the second U-shaped heat pipe. The U-shaped heat-dissipating tubes 161, 162 may be asymmetric U-shaped tubes, for example, one side long and the other side short, so that the U-shaped heat-dissipating tubes 161, 162 are connected in series by the long side and the short side.

Referring to the first and second figures, the reactor 101 has a control valve 104. The heat exchange module 102 further includes a fan 105. When the semiconductor process is in a normal operating state of the specific operating state, the The control valve 104 is opened such that the fluid to be treated 12 in the reaction furnace 101 is discharged via a duct 106, and the fan 105 rotates to cause the fluid to be treated 12 to flow through the plurality of intervals 180 of the set of fins 18, and The heat exchange fluid 14 in the set of U-shaped heat pipes 16 absorbs the heat of the fluid to be treated 12, as indicated by the arrows in the second figure, the cooled fluid 12' from the other side of the set of heat sinks 18. The multiple gaps flow out. The arrangement of the set of fins 18 generally assumes a parallel arrangement, but may be elastically changed in accordance with the requirements of the installation to accommodate the surrounding machine space, such as a slightly curved arrangement in the second figure.

When the heat exchange module 102 is defective or reaches its service life, the problem of leakage of the heat exchange fluid 14 may occur. When the problem occurs, the occurrence of the leak can be quickly detected and notified to the relevant personnel for immediate treatment. Extremely important for safety. In the first figure, the furnace tube device 101 includes a control unit 107. When the leak detection module 103 detects that the heat exchange fluid 14 leaks to the specific amount, the control unit 107 uses a wireless network. 108 or a Bluetooth communication 110 issues an alert to a mobile device 109 for subsequent processing, such as automatically or manually shutting down the reactor 101 and the heat exchange module 102.

In the first figure, the heat exchange module 102 further includes a pump 111 that circulates the heat exchange fluid 14 in the heat exchange module 102. The heat exchange fluid 14 may be water, a condensing agent, or a refrigerant; and the fluid to be treated 12 includes at least one of a reactive gas and an exhaust gas. The leak detection module 103 includes a liquid leakage detecting strip 1031, 1032 and a liquid leakage collecting unit 1033, and is electrically connected to the furnace tube device 101 by a wire 112. The liquid leakage collecting unit 1033 is, for example, a horizontal disk shape similar to the drain basket to collect the liquid leakage. When the leakage liquid detecting strips 1031, 1032 detect that the heat exchange fluid 14 leaks to the specific amount, the leaking liquid detecting belt 14 is turned on to transmit a closing signal Sig1 to the furnace tube device 101, the furnace tube device The control unit 107 of 101 closes the reaction furnace 101 and the heat exchange module 102 to automatically stop the semiconductor process. In addition, the leak detection module 103 further includes a return pipe 113 for recovering the leaked heat exchange fluid 15 , and the furnace tube device 101 further includes a draft tube 114 for accommodating the heat exchange fluid 15 . The liquid leakage detecting strips 1031, 1032 in the first figure are only schematic views, which will be further described later.

Please refer to the third figure, which is a schematic diagram of a leak detection module 203 for a process device 201 according to another preferred embodiment of the present invention. The process device 201 has a heat exchange fluid 24 for performing a heat exchange on the process device 201. The leak detection module 203 includes a leakage heat exchange fluid collection unit 204, a detection unit 206, and a reaction unit. 205. The leakage heat exchange fluid collection unit 204 is configured to collect a leaked heat exchange fluid 25, and the detection unit 206 is configured to detect a specific amount of the heat exchange fluid 25 that is leaked. The reaction unit 205 is The process device 201 should be placed in a particular operational state with a certain amount.

The reaction unit 206 in the third figure may be disposed on or near the leakage heat exchange fluid collection unit 204, and electrically connected to the process device 201 by a wire 207 to pass the wire 207 when a leak occurs. A notification signal is transmitted to the process device 201 to be in a specific operational state, for example, after the process device stops operating the related device that is connected to the process device. The process device itself is automatically stopped.

In the third embodiment, the process device 201 is coupled to a heat exchange module 202. The heat exchange module 202 includes a pump 208, a head end 213 of a heat pipe 212, and a tail end 214 of the heat pipe 212. The venting heat exchange fluid collection unit 204 includes a return pipe 215 disposed at the bottom thereof. The process device 201 further includes a first draft pipe 209, a second draft pipe 210, and a third draft pipe 211. The pump 208 causes the heat exchange fluid 24 to flow in the heat pipe 212 by being connected to the head end 213 of the heat pipe 212, the return pipe 215, and the tail end 214 of the heat pipe 212, respectively. The third draft tube 211 to the second draft tube 210 form a circulation loop.

The escaping heat exchange fluid collection unit 204 in the third embodiment may preferably be in the shape of a disk covering the bottom surface of the heat exchange module 202, so as to facilitate the collection of the heat exchange module 202 at any place, and draining The disk is similar, as soon as there is a leak, the detection unit 206 can detect it immediately, and the reaction unit can react immediately. The return tube 215 can recover the leaked heat exchange fluid 25 to the second draft tube 210 of the process device 201 at any time. The second draft tube 210 is respectively associated with the return tube 215 at different positions. The third draft tube 211 is connected to collect the leaked heat exchange fluid 25 and the heat exchange fluid 24, respectively. The first draft tube 209 and the second draft tube 210 are interconnected, and the pump 208 can draw the heat exchange fluid 24 from the first draft tube to the heat pipe 212 to continue to absorb heat and heat. Thermal cycle. For example, the leaked heat exchange fluid 25 via the return line 215 and the heat exchange fluid 24 returning to the second draft tube 210 via the circulation, they converge in the first draft tube 209 and are pumped via the pump 208 To continue the loop. At the same time, the fluid to be treated 22 also enters the heat exchange module 202 for cooling by the suction of the fan 218.

Please refer to the fourth figure, which is a schematic diagram of a liquid leakage detecting strip 2063 and a reaction unit 206 according to a preferred embodiment of the present invention. Please refer to FIG. 5(a), (b), (c), and (d), which are schematic diagrams of the reaction unit 205 and the detecting unit 206 in different detection modes according to a preferred embodiment of the present invention. The fifth (a) and (b) are schematic diagrams of the first step and the second step in the disconnection detection mode, respectively. The fifth (c) and (d) are schematic diagrams of the first step and the second step in the liquid leakage detecting mode, respectively. The reaction unit 205 includes a cable 2051 and a signal transceiver 2052. The reaction unit 205 is electrically connected to the process device 201 by a wire 207 and is electrically connected to the detecting unit 206 by a cable 2051. In general, if the function of the liquid leakage detecting belt 2063 is normal, it is necessary to first detect whether there is a broken line, and then it is possible to continue detecting whether or not there is a liquid leakage condition. The leakage detecting strip 2063 includes two parallel wires 2064, 2065 disposed at a distance from the long edge of the liquid leakage detecting strip 2063, and the liquid leakage detecting strip 2063 is disposed in the leakage heat exchange fluid collection. The bottom of the interior of unit 204. The signal transceiver 2052 continuously applies a disconnection detection signal Scut as shown in the fifth diagram (a) to the two parallel wires 2064, or applies a liquid leakage detection signal Slek as shown in the fifth diagram (c).

Please refer to FIG. 4 and FIG. 5( a ) at the same time. The detecting unit 206 includes a liquid leakage detecting strip 2063 , a relay connector 2061 and a terminal connector 2062 . The relay connector 2061 is electrically connected to the signal transceiver 2052 by the cable, and receives the liquid leakage detection signal Slek or the disconnection detection signal Scut. The terminal connector 2062 is electrically connected to the relay connector 2061 by the liquid leakage detecting tape 2063. In a disconnection detection mode, the signal transceiver 2052 sends a disconnection detection signal Slek, which is transmitted to the leak detection strip 2063 via the cable 2051 and the relay connector 2061, when the leakage detection is performed. When the disconnection event does not occur in the strip 2063, the disconnection detection signal Slek returns to the signal transceiver 2052 through the terminal connector 2062 to be in the signal transceiver 2052, the cable 2051, and the relay connector 2061. A first circuit Cir1 is formed between the liquid leakage detecting strip 2063 and the terminal connector 2062. The signal transceiver 2052 does not receive the disconnection detecting signal Scut, thereby determining that the disconnection event has not occurred. For example, the output terminal 4 of the signal transceiver 2052 outputs the disconnection detection signal Scut, and the disconnection detection signal Scut can be an alternating voltage or a direct current voltage, for example, a square wave of preferably 10 volts for 200 milliseconds. During this period, the signal transceiver 2052 will enter a disconnection monitoring state, and the liquid leakage detecting signal Slek will stop. If no disconnection occurs during this period, the disconnection detection signal Scut sent by the signal transceiver 2063 is sequentially output via the cable 2051, the 4th input terminal and the 4th output of the relay connector 2061. a terminal, one of two parallel wires 2064 of the liquid leakage detecting tape 2063, the terminal connector 2062, another 2065 of two parallel wires of the liquid leakage detecting tape 2063, and a second input terminal of the relay connector The output terminal No. 2 and the first circuit Cir1 formed by the cable 2051 are returned to the No. 2 receiving terminal of the signal transceiver 2063, thereby detecting whether the liquid leakage detecting tape 2063 is open.

Please refer to the fourth figure and the fifth figure (b) at the same time. Once the liquid leakage detecting strip 2063, the broken portion 2066 includes at least one of the two parallel wires 2063, 2065, 2065 will be cut off, so the broken The line detection signal Scut cannot be transmitted back to the No. 2 receiving terminal of the signal transceiver 2052 by the first loop Cir1, and the signal transceiver 2052 does not receive the disconnection detection signal Scut, and the signal is in the disconnection monitoring state. The transceiver 2052 determines that the disconnection event occurs, and can be illuminated or a wire break signal is sent to the process device 201 by the wire 207. The process device 201 sends a disconnection signal to the mobile device 109. Automatically send a newsletter to inform the relevant personnel to handle. If there is an open circuit, repair or direct replacement of parts.

After the disconnection test is completed, the liquid leakage test can be performed, or the liquid leakage test can be performed first. Then, the disconnection detection is performed, and the order of the two can be exchanged. Please refer to FIG. 3, FIG. 4 and FIG. 5(c) simultaneously. In a liquid leakage detecting mode, the signal transceiver 2052 continuously transmits a liquid leakage detecting signal Slek via the cable 2051 and the relay. The connector 2061 is sent to the liquid leakage detecting belt 2063. When the liquid leakage detecting belt 2063 does not have a liquid leakage event, the liquid leakage detecting signal Slek is eliminated through the terminal connector 2062 or at the terminal connector. An open circuit is formed at 2062 and cannot be returned to the signal transceiver 2052, whereby the signal transceiver 2052 determines that the leak event has not occurred. For example, in the liquid leakage detecting mode, the No. 4 output terminal of the signal transceiver 2052 transmits the liquid leakage detecting signal Slek sequentially through the cable 2051, the No. 4 input terminal and the No. 4 output terminal of the relay connector 2061. And the lead 2064 of the leak detecting strip 2063 is transferred to the terminal connector 2062. When the terminal connector 2062 receives the liquid leakage detecting signal Slek, the liquid leakage detecting signal Slek is eliminated by the terminal connector 2062 or the circuit 2067 is formed at the terminal connector 2062, and cannot be returned to the signal receiving and receiving. The sensor 2052, whereby the signal transceiver 2052 determines that the leakage event has not occurred, as shown in the fifth diagram (a).

Please refer to FIG. 3, FIG. 4 and FIG. 5(d) at the same time. When the leaked heat exchange fluid 25 reaches the specific amount and the liquid leakage detecting belt 2063 detects the liquid leakage event, A second loop Cir2 is formed between a leak sensing portion 216 of the liquid leakage detecting strip 2064, the signal transceiver 2052, the cable 2051, and the relay connector 2061. The liquid leakage detecting signal Slek passes through the The resistance value between the two parallel wires 2064, 2065 and the liquid leakage sensing portion 216 is changed to change the liquid leakage detecting signal Slek, for example, the amplitude thereof becomes smaller, and the changed liquid leakage detecting signal Slek' is used by The second loop Cir2 is received by the signal transceiver 2052. When the signal transceiver 2052 detects that the change of the leak detection signal Slek exceeds a threshold, a shutdown signal is sent to the processing device 201. Similarly, in the third figure, the processing device 201 further includes a control unit 217. When the detecting unit 206 detects that the leakage event occurs, the signal transceiver 2052 that triggers the reaction unit 205 is controlled by a wire. 207 sends the shutdown signal to the process device 201 to shut down the process device 201.

Please refer to a sixth diagram, which is a schematic diagram of a heat exchange system 30 for a semiconductor process in accordance with another preferred embodiment of the present invention. The heat exchange system 30 for a semiconductor process includes a heat exchange module 301 and a leak detection module 302. The heat exchange module 301 has a heat exchange fluid 303 for performing heat exchange on the semiconductor process. When the heat exchange fluid 303 is detected to leak 304 for a specified amount, the semiconductor process is placed in a particular operational state.

Please refer to the seventh figure, which is a schematic diagram of a leak detection module 42 for a process device 41 according to another preferred embodiment of the present invention. The process device 41 has a heat exchange fluid 43 for performing a heat exchange on the process device 41. The leak detection module 42 includes a detection unit 421 and a control unit 422. The detecting unit 421 is configured to collect a leaked heat exchange fluid 44, and the control unit 422 is configured to control the process device 41 to be in a specific operating state, and when the leaked heat exchange fluid 44 reaches a certain amount At this time, a control signal Sig2 is issued to cause the process device 41 to be in the specific operational state.

Similarly, please refer to the third, fourth, and fifth figures (a) to (d) and the seventh figure. The control unit 422 includes a signal transceiver 2502. The signal transceiver 2052 is for two parallel wires. 2064, 2065 continuously apply a leak detection signal Slek or apply a wire break detection signal Scut. The detecting unit 421 is electrically connected to the control unit 422 by a cable 45, and includes a liquid leakage detecting strip 2063, a relay connector 2061, and a terminal connector 2062. The leakage detecting strip 2063 includes two parallel wires 2064, 2065 disposed at a distance from the long edge of the liquid leakage detecting strip 2063, and the liquid leakage detecting strip 2063 is disposed in the liquid leakage detecting module 42. The bottom of the interior. The relay connector 2061 is electrically connected to the signal transceiver 2052 by the cable 2051, and receives the liquid leakage detection signal Slek or the disconnection detection signal Scut. The terminal connector 2062 is electrically connected to the relay connector 2061 by the liquid leakage detecting strip 2063. In a disconnection detecting mode, the signal transceiver 2052 sends the disconnection detecting signal Scut through the cable. 2051 and the relay connector 2061 are sent to the liquid leakage detecting strip 2063. When the liquid leakage detecting strip 2063 does not have a disconnection event, the disconnection detecting signal Scut is returned to the through the terminal connector 2062. The signal transceiver 2052 is configured to form a first loop Cir1 between the signal transceiver 2052, the cable 2051, the leak detecting strip 2063, the relay connector 2061, and the terminal connector 2062. The controller 2052 thereby determines that the disconnection event has not occurred. When the disconnection detecting event occurs in the liquid leakage detecting strip 2063, the disconnection detecting signal Scut cannot be returned to the signal transceiver 2052 by the first loop Cir1, and the signal transceiver 2052 does not receive the disconnection. The signal Scut is detected to determine that the disconnection event has occurred.

In a liquid leakage detecting mode, the signal transceiver 2052 continuously transmits a liquid leakage detecting signal Slek, which is transmitted to the liquid leakage detecting belt 2063 via the cable 2051 and the relay connector 2061, when the liquid leakage detecting When the liquid leakage detecting event of the tape 2063 does not occur, the liquid leakage detecting signal Slek is eliminated through the terminal connector 2062 or forms an open circuit at the terminal connector 2062, and cannot be returned to the signal transceiver 2052, thereby The signal transceiver 2052 determines that the leak event has not occurred. When the leaked heat exchange fluid 44 reaches the specific amount and the liquid leakage detecting strip 2063 detects the liquid leakage event, a leak sensing portion 216 of the liquid leakage detecting strip 2063, the signal A second loop Cir2 is formed between the transceiver 2052, the cable 2051, and the relay connector 2061. The leakage detection signal Slek passes through the resistance between the two flat wires 2064, 2065 and the liquid leakage sensing portion 216. The change of the liquid leakage detecting signal Slek is changed, and the changed liquid leakage detecting signal Slek' is received by the signal transceiver 2052 by the second circuit Cir2, wherein when the signal transceiver 2052 detects When the change of the leak detection signal Slek exceeds a threshold, a shutdown signal Sig2 is sent to the process device 41. When the detecting unit detects 421 until the liquid leakage event occurs, the signal transceiver 2052 that triggers the control unit 422 sends the shutdown signal Sig2 to the processing device 41 via a wire 46 to close the processing device 41.

The drawings of the present invention are intended to be illustrative of various embodiments of the present invention The embodiments of the present invention provide sufficient content for those skilled in the art to implement the embodiments disclosed herein, or to implement embodiments derived from the disclosure of the present invention. It should be noted that the embodiments are not mutually exclusive, and some embodiments may be combined with other one or more embodiments to form a new embodiment, that is, the implementation of the present invention is not limited thereto. Embodiments of the present disclosure.

In summary, the present invention provides a leak detection module for a cooling system of a process equipment, the leak detection module including a liquid leakage collecting tray and a leak disposed at a bottom of the liquid leakage collecting tray a liquid detecting belt and a reaction unit or a controller electrically connected to the liquid leakage detecting, the liquid collecting tray can collect the leakage leaked from any part of the cooling system, and the reaction unit or the controller continuously sends a leak detection The test signal is sent to the liquid leakage detecting belt, and the leakage detecting belt changes the electrical parameter of the liquid leakage sensing portion when the liquid leakage reaches a certain amount, so that the liquid leakage detecting signal changes, the reaction unit Or the controller receives the changed liquid leakage detection signal, can determine whether a liquid leakage condition occurs, and immediately sends a signal to the processing device by the reaction unit or the controller to automatically close when the liquid leakage condition occurs. The process equipment or the operation efficiency of the process equipment is reduced. At the same time, the process equipment can be automatically notified to relevant personnel through the communication network. The invention can avoid the expansion of the pipeline when the cooling system has liquid leakage, and the connection between the pipeline and the pipeline causes looseness or gap, and the leakage of the coolant is aggravated, and the problem can be prevented at the beginning of the problem. In order to avoid the problem, the equipment around it will be damaged, and the leakage will not cause environmental pollution.

Therefore, even if the present invention has been described in detail by the above-described embodiments, it can be modified by those skilled in the art without departing from the scope of the appended claims.

10‧‧‧ furnace tube equipment

101‧‧‧Reaction furnace

103‧‧‧Leak Detection Module

102‧‧‧Heat exchange module

104‧‧‧Control valve

105, 218‧‧‧ fans

106‧‧‧Air duct

107‧‧‧Control unit

108‧‧‧Wireless network

109‧‧‧Mobile devices

110‧‧‧Blue Communication

111‧‧‧

112‧‧‧Wire

113‧‧‧Return pipe

12, 22‧‧‧ fluid to be treated

14‧‧‧Heat exchange fluid

16‧‧‧A set of U-shaped heat pipes

18‧‧‧A set of heat sinks

1031, 1032‧‧‧Leak detection belt

1033‧‧‧Liquid collection unit

15‧‧‧Dissipated heat exchange fluid

161‧‧‧First U-shaped heat pipe

1611, 1621‧‧‧ head end

162‧‧‧Second U-shaped heat pipe

1612, 1622‧‧‧End

180‧‧‧multiple intervals

182‧‧‧ plural second perforations

181‧‧‧ plural first perforations

201‧‧‧Processing equipment

202‧‧‧Heat Exchange Module

203‧‧‧Leak detection module

204‧‧‧External heat exchange fluid collection unit

205‧‧‧Reaction unit

206‧‧‧Detection unit

207‧‧‧ wire

208‧‧‧ pump

209‧‧‧First guide tube

210‧‧‧Second guide tube

211‧‧‧ Third guide tube

212‧‧‧heat pipe

213‧‧‧The end of the heat pipe

214‧‧‧The end of the heat pipe

215‧‧‧Return pipe

216‧‧‧Leakage sensing

217‧‧‧Control unit

24‧‧‧Heat exchange fluid

2051‧‧‧ cable

25‧‧‧External heat exchange fluid

2052‧‧‧Signal Transceiver

2061‧‧‧Relay connector

2063‧‧‧Leak detection belt

2062‧‧‧Terminal connector

Cir1‧‧‧ first circuit

Cir2‧‧‧second loop

Slek‧‧‧ leak detection signal

Scut‧‧‧ disconnection detection signal

Slek’ ‧‧‧Changed leak detection signal

2066‧‧‧Disconnection section

30‧‧‧Heat exchange system for a semiconductor process

2067‧‧‧Open circuit

301‧‧‧Heat Exchange Module

302‧‧‧Leak Detection Module

303‧‧‧Heat exchange fluid

41‧‧‧Processing equipment

43‧‧‧Heat exchange fluid

42‧‧‧Leak Detection Module

44‧‧‧External heat exchange fluid

45‧‧‧ cable

421‧‧‧Detection unit

422‧‧‧Control unit

12’ ‧‧‧Frozen fluid

46‧‧‧Wire

114‧‧‧drain tube

304‧‧‧Discharge of heat exchange fluid

First Figure: A schematic view of a furnace tube apparatus for use in a semiconductor process in accordance with a preferred embodiment of the present invention. Second Figure: Schematic representation of a heat exchange module in accordance with a preferred embodiment of the present invention. FIG. 3 is a schematic diagram of a leak detection module for a process device according to another preferred embodiment of the present invention. Fourth: Schematic diagram of a liquid leakage detecting belt and a reaction unit in a preferred embodiment of the present invention. Fig. 5(a) is a schematic view showing the first step of the preferred embodiment of the present invention in the disconnection detection mode. Fig. 5(b) is a schematic view showing the second step of the preferred embodiment of the present invention in the disconnection detection mode. Fig. 5(c) is a schematic view showing the first step of the preferred embodiment of the present invention in the liquid leakage detecting mode. Fig. 5(d) is a schematic view showing a second step of the preferred embodiment of the present invention in the liquid leakage detecting mode. Figure 6 is a schematic illustration of another preferred embodiment of the invention for a semiconductor process heat exchange system. Figure 7 is a schematic diagram of a leak detection module for a process device according to another preferred embodiment of the present invention.

Claims (10)

A furnace tube apparatus for a semiconductor process, comprising: a reactor to generate a fluid to be treated having a heat; a heat exchange module having a heat exchange fluid for performing heat exchange with the heat; A leak detection module causes the semiconductor process to be in a specific operational state when the heat exchange fluid is detected to leak for a certain amount. The furnace tube apparatus of claim 1, wherein the heat exchange module comprises: a set of U-shaped heat pipes configured to accommodate the heat exchange fluid circulating inside thereof, wherein each U-shaped heat pipe Having a head end and a tail end; and a set of fins, each fin having a first perforation to form a plurality of first perforations in the set of fins and having a second perforation to form a plurality of fins in the set of fins Two perforations, and are arranged in parallel to form a plurality of intervals, the head end of each U-shaped heat pipe vertically passes through the plurality of first perforations, and the tail end of each U-shaped heat pipe vertically passes through the plurality of second perforations The U-shaped heat pipe includes a first and a second U-shaped heat pipe, and a tail end of the first U-shaped heat pipe is connected in series with the head end of the second U-shaped heat pipe. The furnace tube apparatus of claim 2, wherein the reaction furnace has a control valve, and the heat exchange module further comprises a fan, when the semiconductor process is in a normal operating state of the specific operating state, Controlling the valve to open such that the fluid to be treated in the reactor is discharged via a duct that rotates to cause the fluid to be treated to flow through the plurality of fins of the set of fins and is in the U-shaped heat pipe of the set The heat exchange fluid absorbs the heat of the fluid to be treated. The furnace tube apparatus of claim 1, wherein: the furnace tube apparatus comprises a control unit, and when the leak detection module detects that the heat exchange fluid leaks to the specific amount, the control unit borrows Sending an alarm to a mobile device for subsequent processing by a wireless network or a Bluetooth communication; the heat exchange module further includes a pump that circulates the heat exchange fluid in the heat exchange module; The heat exchange fluid is water, a condensing agent, or a refrigerant; the fluid to be treated includes at least one of a reactive gas and an exhaust gas; and the leak detecting module includes a leak detecting layer, and Electrically connecting to the furnace tube device by a wire; when the leakage liquid detecting belt detects that the heat exchange fluid leaks to the specific amount, the liquid leakage detecting belt is turned on to transmit a closing signal to the furnace tube device The control unit of the furnace tube apparatus turns off the reaction furnace and the heat exchange module to automatically stop the semiconductor process. A leak detection module for a process device, the process device having a heat exchange fluid for performing a heat exchange on the process device, the leak detection module comprising: an external heat exchange fluid collection unit, Collecting a leaked heat exchange fluid; a detecting unit for detecting a specific amount of the heat exchange fluid; and a reaction unit for placing the process equipment in a specific amount according to a specific amount Operating status. The leak detection module of claim 5, wherein the process device is coupled to a heat exchange module, the heat exchange module includes a pump, a head end of a heat pipe, and the heat pipe a tail end, the leakage heat exchange fluid collecting unit comprises a return pipe disposed at a bottom thereof, the process device further comprising a first draft tube, a second draft tube, and a third draft tube, Connected to the head end of the heat pipe, the return pipe, and the tail end of the heat pipe, respectively, the pump causes the heat exchange fluid to flow in the heat pipe through the third draft pipe to the second The draft tube forms a circulation loop. The leak detection module of claim 5, wherein: the reaction unit comprises: a signal transceiver, continuously applying a liquid leakage detection signal to two parallel wires or applying a wire break detection signal: and a cable electrically connected to the reaction unit; the detecting unit comprises: a liquid leakage detecting tape, comprising two parallel wires disposed close to a long edge of the liquid leakage detecting tape, and the liquid leakage detecting tape a bottom portion disposed inside the leakage heat exchange fluid collection unit; a relay connector electrically connected to the signal transceiver by the cable, and receiving the liquid leakage detection signal or the disconnection detection signal; and a terminal The connector is electrically connected to the relay connector by the leakage detecting, wherein: in a disconnection detection mode, the signal transceiver sends a disconnection detection signal via the cable and the relay connector Transmitting to the leakage detecting belt, when the liquid leakage detecting belt does not have a disconnection event, the disconnection detecting signal is returned to the signal transceiver through the terminal connector to be in the signal transceiver, Cable, the leak Forming a first loop between the detecting strap, the relay connector, and the terminal connector, wherein the signal transceiver determines that the disconnection event does not occur; when the liquid leakage detecting zone occurs the disconnection event The disconnection detection signal cannot be transmitted back to the signal transceiver by the first loop, and the signal transceiver does not receive the disconnection detection signal, thereby determining that the disconnection event has occurred; In the mode, the signal transceiver continuously sends a liquid leakage detecting signal to the liquid leakage detecting belt via the cable and the relay connector, and when the liquid leakage detecting belt does not have a liquid leakage event, The leakage detection signal is eliminated after the terminal connector is formed or an open circuit is formed at the terminal connector, and cannot be returned to the signal transceiver, whereby the signal transceiver determines that the leakage event has not occurred; When the heat exchange fluid reaches the specific amount, when the liquid leakage detecting belt detects the liquid leakage event, at a liquid leakage sensing point of the liquid leakage detecting belt, the signal transceiver, the cable, the Forming a second loop between the relay connectors, The leakage detecting signal changes the resistance value of the leakage between the two flat wires and the leakage sensing portion, and the changed leakage detecting signal is used by the second circuit by the signal Transceiver receiving, wherein when the signal transceiver detects that the change of the liquid leakage detection signal exceeds a threshold, sending a shutdown signal to the processing device; and the processing device further includes a control unit, when the detecting unit The signal transceiver that triggers the reaction unit when the leakage event is detected detects the process device by sending the shutdown signal to the process device by a wire. A heat exchange system for a semiconductor process, comprising: a heat exchange module having a heat exchange fluid for performing a heat exchange in the semiconductor process; and a leak detection module detecting the heat exchange When the fluid leaks for a certain amount, the semiconductor process is placed in a specific operational state. A leak detection module for a process device, the process device having a heat exchange fluid for performing a heat exchange on the process device, the leak detection module comprising: a control unit for controlling the process device In a specific operating state; and a detecting unit for collecting a leaked heat exchange fluid, and when the leaked heat exchange fluid reaches a certain amount, issuing a control signal to cause the process device to be in the Specific operational status. The leakage detecting module of claim 9, wherein: the control unit comprises: a signal transceiver, continuously applying a liquid leakage detecting signal to two parallel wires or applying a wire break detecting signal: the detecting The measuring unit is electrically connected to the control unit by a cable, and comprises: a liquid leakage detecting belt, comprising two parallel wires disposed close to the long edge of the liquid leakage detecting tape, and the liquid leakage detecting The tape is disposed at the bottom of the inner portion of the liquid leakage detecting module; a relay connector is electrically connected to the signal transceiver by the cable, and receives the liquid leakage detecting signal or the wire breaking detecting signal; The terminal connector is electrically connected to the relay connector by the liquid leakage detecting, wherein: in a wire break detection mode, the signal transceiver sends a wire break detection signal, and the cable is connected to the relay via the cable Transmitting to the leakage detecting belt, when the liquid leakage detecting belt does not have a disconnection event, the disconnection detecting signal is returned to the signal transceiver through the terminal connector to be in the signal transceiver, The cable, the leak detection belt A first loop is formed between the relay connector and the terminal connector, and the signal transceiver determines that the disconnection event does not occur; when the liquid leakage detecting zone occurs the disconnection event, the disconnection The line detection signal cannot be transmitted back to the signal transceiver by the first loop, and the signal transceiver does not receive the disconnection detection signal, thereby determining that the disconnection event has occurred; in a liquid leakage detection mode, The signal transceiver continuously sends a liquid leakage detecting signal to the liquid leakage detecting belt via the cable and the relay connector, and the liquid leakage detecting is performed when the liquid leakage detecting belt does not have a liquid leakage event. After the signal is removed through the terminal connector or an open circuit is formed at the terminal connector, the signal transceiver cannot be returned to the signal transceiver, whereby the signal transceiver determines that the leakage event has not occurred; when the heat exchange fluid leaks out When the liquid leakage detecting belt detects that the liquid leakage event occurs, the liquid leakage sensing zone of the liquid leakage detecting belt, the signal transceiver, the cable, and the relay connector Forming a second loop between the leak detection The signal changes the resistance value between the two parallel wires and the leakage sensing portion, and the changed leakage detection signal is received by the signal transceiver by the second circuit. Transmitting a shutdown signal to the processing device when the signal transceiver detects that the change of the leakage detection signal exceeds a threshold; and triggering the control when the detecting unit detects that the leakage event occurs The signal transceiver of the unit sends the shutdown signal to the process device by a wire to shut down the process device.