TW201712720A - Producing method of fluorescent display tube and fluorescent display tube - Google Patents

Producing method of fluorescent display tube and fluorescent display tube Download PDF

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Publication number
TW201712720A
TW201712720A TW105129303A TW105129303A TW201712720A TW 201712720 A TW201712720 A TW 201712720A TW 105129303 A TW105129303 A TW 105129303A TW 105129303 A TW105129303 A TW 105129303A TW 201712720 A TW201712720 A TW 201712720A
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electrode
anode
display tube
fluorescent display
phosphor
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TW105129303A
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Chinese (zh)
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TWI607481B (en
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高野貞夫
菅野陽介
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雙葉電子工業股份有限公司
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00Electroluminescent light sources
    • H05B33/12Light sources with substantially two-dimensional radiating surfaces
    • H05B33/26Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
    • H05B33/28Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode of translucent electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/08Electrodes intimately associated with a screen on or from which an image or pattern is formed, picked-up, converted or stored, e.g. backing-plates for storage tubes or collecting secondary electrons
    • H01J29/085Anode plates, e.g. for screens of flat panel displays
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00Cathode ray tubes; Electron beam tubes
    • H01J31/08Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/16Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen with mask carrying a number of selectively displayable signs, e.g. charactron, numeroscope
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/14Manufacture of electrodes or electrode systems of non-emitting electrodes
    • H01J9/148Manufacture of electrodes or electrode systems of non-emitting electrodes of electron emission flat panels, e.g. gate electrodes, focusing electrodes or anode electrodes

Abstract

An objective of this invention is to realize a fluorescent display tube at low cost. The fluorescent display tube of this invention has improved display quality by both suppressing the character missing and narrowed gap between anodes. This invention provides a method for producing a fluorescent display tube having an anode with anode electrode and a fluorescent material, and a filament for emitting electrons for illuminating the fluorescent material, which contains an electrode forming step of exposing and patterning a conductive photosensitive layer formed by coating a printing paste containing conductive material from powders of any one of ZnO, ITO or SnO2, and photosensitive agent, for forming the anode electrode and a surrounding electrode.

Description

螢光顯示管之製造方法、螢光顯示管 Fluorescent display tube manufacturing method, fluorescent display tube

本發明有關於一種螢光顯示管及其製造方法,該螢光顯示管具有:具有陽極電極與螢光體的陽極,以及放出用以使螢光體發光的電子的燈絲。 The present invention relates to a fluorescent display tube having an anode having an anode electrode and a phosphor, and a filament emitting electrons for causing the phosphor to emit light, and a method of manufacturing the same.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本特開平11-339699號公報 [Patent Document 1] Japanese Patent Laid-Open No. Hei 11-339699

[專利文獻2]日本特開2009-272260號公報 [Patent Document 2] Japanese Laid-Open Patent Publication No. 2009-272260

作為用以顯示各種資訊的顯示裝置,已知有使用螢光顯示管(VFD:Vacuum Fluorescent Display)的顯示裝置。螢光顯示管是在真空容器內至少配置燈絲(直熱式陰極(directly-heated cathode))與陽極,於燈絲施加直流或交流或脈衝電壓使其加熱而放出熱電子,讓熱電子與形成於陽極的螢光體碰撞而發光以顯示所期望的圖案。 As a display device for displaying various kinds of information, a display device using a VFD (Vacuum Fluorescent Display) is known. The fluorescent display tube is provided with at least a filament (directly-heated cathode) and an anode in a vacuum vessel, and a direct current or an alternating current or a pulse voltage is applied to the filament to heat it to emit hot electrons, so that the hot electrons are formed The phosphor of the anode collides and illuminates to display the desired pattern.

作為具備螢光顯示管的顯示裝置,例如有使用作為車輛用的抬頭顯示器(Head-Up Display,以下標示 為「HUD」)者,但是在HUD的情況,使用者並非直接目視顯示在螢光顯示管的發光面(顯示面)的圖案,而是將從該發光面發出的圖案擴大投影在前面玻璃或整合器等對象物並目視,故考慮使用者所實際目視的顯示圖案的呈現時,盡可能地要求窄化陽極(螢光體)的配置間隔(陽極間之間隙)。 As a display device including a fluorescent display tube, for example, it is used as a head-up display for a vehicle (Head-Up Display, the following mark) "HUD", but in the case of HUD, the user does not directly visually display the pattern of the light-emitting surface (display surface) of the fluorescent display tube, but enlarges the pattern emitted from the light-emitting surface onto the front glass or Since the object such as the integrator is visually observed, it is required to narrow the arrangement interval (the gap between the anodes) of the anode (phosphor) as much as possible in consideration of the presentation of the display pattern actually viewed by the user.

然而,若窄化陽極間之間隙,則會變得容易發生於陽極的螢光體外緣部的亮度減低,亦即「缺字」。這是由於以區隔陽極間(陽極電極間)的方式配置的絕緣體的電位被設為接地電位,使得由於所謂的電子暗角使得從燈絲到達螢光體外緣部的電子量與螢光體中央部相比為較少的緣故。 However, if the gap between the anodes is narrowed, the brightness of the outer edge of the fluorescent body of the anode is likely to be reduced, that is, "missing". This is because the potential of the insulator disposed between the anodes (between the anode electrodes) is set to the ground potential, so that the amount of electrons from the filament reaching the outer edge of the phosphor and the center of the phosphor due to the so-called electronic vignetting angle There are fewer reasons for the department.

為了要抑制缺字,在陽極間設置作為平面柵的電極(周圍電極),藉由驅動該周圍電極控制螢光體周圍的電場是有效的。例如,上述專利文獻1中,揭示了設有平面柵的螢光顯示管。 In order to suppress the missing word, an electrode (surrounding electrode) as a planar gate is provided between the anodes, and it is effective to control the electric field around the phosphor by driving the peripheral electrodes. For example, Patent Document 1 discloses a fluorescent display tube provided with a planar grid.

又,就相關的傳統技術而言,除了上述專利文獻1,可再舉出上述專利文獻2。專利文獻2揭示了以光蝕刻(Photolithography)法形成陽極配線的技術。 Further, in addition to the above-described Patent Document 1, the above-mentioned Patent Document 2 can be further cited. Patent Document 2 discloses a technique of forming an anode wiring by a photolithography method.

在此,螢光顯示管可藉由對玻璃基板預定圖案化並積層形成配線層和絕緣層、電極層、以及螢光體而製造。此時,電極層與絕緣層的積層形成,從減少製造 成本的觀點來看,較理想為採用印刷形成(例如圖案印刷)。 Here, the fluorescent display tube can be manufactured by patterning a glass substrate and laminating a wiring layer, an insulating layer, an electrode layer, and a phosphor. At this time, the electrode layer and the insulating layer are laminated, and the manufacturing is reduced. From the standpoint of cost, it is desirable to use print formation (for example, pattern printing).

然而,若由印刷形成,相較於例如所謂的濺渡法、真空蒸鍍法等的薄膜形成來行圖案化的情況,會難以將陽極間之間隙窄化形成。特別是,若為了抑制缺字而要在陽極間形成上述的周圍電極時,陽極間之間隙會不得不變大,從所謂顯示圖案的精細感的觀點來看,會導致顯示品質的惡化。 However, when formed by printing, it is difficult to form a narrow gap between the anodes, as compared with, for example, a film formation by a so-called sputtering method or a vacuum deposition method. In particular, when the above-described peripheral electrode is formed between the anodes in order to suppress the missing word, the gap between the anodes has to be increased, and the display quality is deteriorated from the viewpoint of the fine feeling of the display pattern.

於是,本發明的目的在於克服上述的問題點,用更低成本實現以缺字的抑制與陽極間的窄間隙化的兩方面謀求提升顯示品質的螢光顯示管。 Accordingly, an object of the present invention is to overcome the above-mentioned problems and to realize a fluorescent display tube which improves display quality by both the suppression of missing characters and the narrow gap between anodes at a lower cost.

本發明的螢光顯示管的製造方法,是製造具有陽極,以及放出用以使前述螢光體發光的電子的燈絲的螢光顯示管的製造方法,所述陽極具有陽極電極與螢光體;該方法具有電極形成步驟,其係對塗布含有來自ZnO、ITO或SnO2的任一者的粉末的導電性材料與感光劑的印刷膏所形成的導電感光層進行曝光圖案化,形成前述陽極電極與前述陽極電極的周圍電極。 A method for producing a fluorescent display tube according to the present invention is a method for producing a fluorescent display tube having an anode and a filament for emitting electrons for emitting the phosphor, wherein the anode has an anode electrode and a phosphor; The method has an electrode forming step of performing exposure patterning on a conductive photosensitive layer formed by applying a conductive paste containing a powder of a powder derived from any one of ZnO, ITO or SnO 2 and a photosensitive paste to form the anode electrode. And the surrounding electrode of the foregoing anode electrode.

藉由上述的對導電感光層的曝光圖案化而形成陽極電極及其周圍電極,作為設有周圍電極以謀求抑制缺字的螢光顯示管,即便藉由印刷進行應成為電極的層的積層,亦可使陽極間之間隙微細化。進一步地,ZnO、ITO、SnO2對於曝光所使用的紫外線的穿透率較高,不易阻礙利用曝光的硬化作用,因此就此點而言亦有助於陽極 間之間隙的微細化。 The anode electrode and its surrounding electrodes are formed by the above-described exposure patterning of the conductive photosensitive layer, and the fluorescent display tube is provided with a peripheral electrode to suppress the missing word, and even if the layer to be the electrode is laminated by printing, It is also possible to make the gap between the anodes fine. Further, ZnO, ITO, and SnO 2 have a high transmittance for ultraviolet rays used for exposure, and are hard to hinder the hardening action by exposure. Therefore, this point also contributes to miniaturization of the gap between the anodes.

於上述本發明的螢光顯示管的製造方法中,於前述印刷膏中所述導電性材料的含有率理想設為40wt%至60wt%。 In the method for producing a fluorescent display tube according to the above aspect of the invention, the content of the conductive material in the printing paste is desirably 40% by weight to 60% by weight.

藉由適當地設定導電性材料的含有率,可在確保成膜精度的情況下形成應成為電極的膜。 By appropriately setting the content ratio of the conductive material, it is possible to form a film to be an electrode while ensuring the film formation accuracy.

於上述的本發明的螢光顯示管的製造方法中,前述導電性材料的粉末平均粒徑理想設為1μm至10μm。 In the method for producing a fluorescent display tube according to the above aspect of the invention, the conductive material preferably has a powder average particle diameter of from 1 μm to 10 μm.

藉由適當地設定導電性材料的粉末粒徑,可謀求兼顧良好的印刷性與圖案化特性兩者。 By appropriately setting the particle diameter of the conductive material, both good printability and patterning properties can be achieved.

於上述的本發明的螢光顯示管的製造方法中,前述感光劑理想為含有5wt%至10wt%的感光性樹脂。 In the above method for producing a fluorescent display tube of the present invention, the photosensitive agent is preferably contained in an amount of 5 wt% to 10 wt% of a photosensitive resin.

藉由適當地設定感光劑中的感光性樹脂的含有率,可謀求兼顧良好的印刷性與圖案化特性兩者。 By appropriately setting the content ratio of the photosensitive resin in the photosensitive agent, both good printability and patterning properties can be achieved.

於上述的本發明的螢光顯示管的製造方法中,前述導電感光層理想以5μm至15μm的膜厚形成。 In the above method for producing a fluorescent display tube of the present invention, the conductive photosensitive layer is preferably formed to have a film thickness of 5 μm to 15 μm.

藉由適當地設定導電感光層的膜厚,可謀求兼顧確保作為電極的良好特性與良好的圖案化特性兩者。 By appropriately setting the film thickness of the conductive photosensitive layer, it is possible to achieve both good characteristics as an electrode and good patterning properties.

而且,本發明的螢光顯示管具有:具有陽極電極與螢光體的陽極,以及放出用以使前述螢光體發光的電子的燈絲,其中,前述陽極電極形成有周圍電極,而且所述陽極電極與前述周圍電極含有作為導電性材料的 ZnO、ITO或SnO2的任一者的粉末。 Further, the fluorescent display tube of the present invention has: an anode having an anode electrode and a phosphor; and a filament emitting electrons for causing the phosphor to emit light, wherein the anode electrode is formed with a peripheral electrode, and the anode The electrode and the peripheral electrode include a powder of any one of ZnO, ITO, or SnO 2 as a conductive material.

上述的ZnO、ITO,SnO2由於對曝光所使用的紫外線的穿透率較高,不易阻礙利用曝光的硬化作用,因此於藉由印刷進行應成為電極的層的積層,對該層藉由曝光圖案化形成陽極電極與周圍電極時,可微細化陽極間之間隙。 The above-mentioned ZnO, ITO, and SnO 2 have a high transmittance for ultraviolet light used for exposure, and are hard to hinder the curing action by exposure. Therefore, the layer to be an electrode is laminated by printing, and the layer is exposed by exposure. When the anode electrode and the peripheral electrode are patterned, the gap between the anodes can be made fine.

依據本發明,可用更低成本實現以缺字的抑制與陽極間的窄間隙化的兩方面謀求提升顯示品質的螢光顯示管。 According to the present invention, it is possible to realize a fluorescent display tube which improves the display quality in both of the suppression of the missing word and the narrow gap between the anodes at a lower cost.

1‧‧‧螢光顯示管 1‧‧‧Fluorescent display tube

1a‧‧‧顯示部 1a‧‧‧Display Department

1b‧‧‧端子部 1b‧‧‧Terminal Department

1c‧‧‧驅動器 1c‧‧‧ drive

2‧‧‧玻璃容器 2‧‧‧glass containers

2a‧‧‧玻璃基板 2a‧‧‧glass substrate

3‧‧‧陽極 3‧‧‧Anode

4‧‧‧燈絲 4‧‧‧filament

5‧‧‧陽極配線 5‧‧‧Anode wiring

6‧‧‧周圍電極 6‧‧‧ surrounding electrodes

6a‧‧‧光蝕刻電極 6a‧‧‧Photoetching electrode

6b‧‧‧貫通電極 6b‧‧‧through electrode

7‧‧‧周圍電極配線 7‧‧‧Circumference wiring

8‧‧‧第一絕緣層 8‧‧‧First insulation

9‧‧‧第二絕緣層 9‧‧‧Second insulation

10‧‧‧顯示裝置 10‧‧‧ display device

11‧‧‧CPU 11‧‧‧CPU

12‧‧‧電源電路 12‧‧‧Power circuit

12a‧‧‧驅動電壓產生電路 12a‧‧‧Drive voltage generation circuit

12b‧‧‧周圍電極電壓產生電路 12b‧‧‧Circumference electrode voltage generating circuit

12c‧‧‧燈絲電壓產生電路 12c‧‧‧ filament voltage generating circuit

31‧‧‧螢光體 31‧‧‧Fluorite

32、32’‧‧‧陽極電極 32, 32'‧‧‧Anode electrode

32a‧‧‧光蝕刻電極 32a‧‧‧Photo Etching Electrode

32a’‧‧‧印刷電極 32a’‧‧‧Printed electrodes

32b、32b’‧‧‧貫通電極 32b, 32b'‧‧‧through electrodes

BK‧‧‧空白訊號 BK‧‧‧ blank signal

CLK‧‧‧時脈訊號 CLK‧‧‧ clock signal

Ef‧‧‧燈絲電壓 Ef‧‧‧ filament voltage

G‧‧‧間隙 G‧‧‧ gap

Ha1至Han‧‧‧配線 Ha1 to Han‧‧‧ wiring

LAT‧‧‧鎖存訊號 LAT‧‧‧Latch signal

pp‧‧‧導電性膏 Pp‧‧‧conductive paste

sF1‧‧‧第一訊號 sF1‧‧‧ first signal

sF2‧‧‧第二訊號 sF2‧‧‧second signal

SI‧‧‧數據訊號 SI‧‧‧ data signal

tBK‧‧‧空白訊號輸入端子 tBK‧‧‧Blank signal input terminal

tF1‧‧‧第一燈絲端子 tF1‧‧‧First filament terminal

tF2‧‧‧第二燈絲端子 tF2‧‧‧second filament terminal

tVd‧‧‧驅動電壓端子 tVd‧‧‧Drive voltage terminal

TVd‧‧‧驅動電壓端子 TVd‧‧‧Drive voltage terminal

tVin‧‧‧電源輸入端子 tVin‧‧‧Power input terminal

tVs‧‧‧周圍電極端子 tVs‧‧‧ peripheral electrode terminal

TVs‧‧‧周圍電極端子 TVs‧‧‧ surrounding electrode terminals

Vin‧‧‧電源電壓 Vin‧‧‧Power supply voltage

TF1‧‧‧第一燈絲端子 TF1‧‧‧First filament terminal

TF2‧‧‧第二燈絲端子 TF2‧‧‧second filament terminal

第1圖為實施態樣的螢光顯示管的概略剖面構造圖。 Fig. 1 is a schematic cross-sectional structural view showing a fluorescent display tube of an embodiment.

第2圖為實施態樣的具有螢光顯示管的顯示部的概略平面圖。 Fig. 2 is a schematic plan view showing a display unit having a fluorescent display tube in an embodiment.

第3圖為針對缺字產生主要原因的說明圖。 Figure 3 is an explanatory diagram of the main cause of missing characters.

第4圖為針對來自周圍電極的缺字抑制效果的說明圖。 Fig. 4 is an explanatory diagram for the effect of suppressing the word deficiency from the surrounding electrodes.

第5圖為針對實施態樣的螢光顯示管的製造方法的說明圖。 Fig. 5 is an explanatory view showing a method of manufacturing a fluorescent display tube according to an embodiment.

第6圖同樣為針對實施態樣的螢光顯示管的製造方法的說明圖。 Fig. 6 is also an explanatory view of a method of manufacturing a fluorescent display tube according to an embodiment.

第7圖為表示使用來自組成例1的印刷膏進行電極的圖案化的結果的圖。 Fig. 7 is a view showing the results of patterning of electrodes using the printing paste from Composition Example 1.

第8圖為表示使用來自組成例2的印刷膏進行電極的圖案化的結果的圖。 Fig. 8 is a view showing the results of patterning of electrodes using the printing paste from Composition Example 2.

第9圖為表示進行使用來自組成例3的印刷膏進行電極的圖案化的結果的圖。 Fig. 9 is a view showing the result of patterning the electrode using the printing paste from the composition example 3.

第10圖為表示實施態樣的具備螢光顯示管的顯示裝置的電路構成的方塊圖。 Fig. 10 is a block diagram showing a circuit configuration of a display device including a fluorescent display tube in an embodiment.

以下,說明本發明的實施態樣。 Hereinafter, embodiments of the present invention will be described.

又,說明照下列的順序進行。 Further, the description will be made in the following order.

<1.螢光顯示管的構造> <1. Fluorescent display tube construction >

<2.製造方法> <2. Manufacturing method>

<3.顯示裝置的構成> <3. Composition of display device >

<4.實施態樣的彙整> <4. Implementation of the integration of the situation >

<5.變形例> <5. Modifications>

<1.螢光顯示管的構造> <1. Fluorescent display tube construction >

第1圖以及第2圖針對本發明的實施態樣的螢光顯示管1的構造的說明圖,第1圖顯示螢光顯示管1的概略剖面構造,第2圖為例示形成於螢光顯示管1的陽極3的配置圖案的圖,表示具有螢光顯示管1的顯示部1a的概略平面圖。又,第1圖主要表示於顯示部1a的概略剖面構造。 1 and 2 are explanatory views of the structure of the fluorescent display tube 1 according to the embodiment of the present invention, wherein Fig. 1 shows a schematic cross-sectional structure of the fluorescent display tube 1, and Fig. 2 shows an example of formation on a fluorescent display. The diagram of the arrangement pattern of the anode 3 of the tube 1 shows a schematic plan view of the display unit 1a having the fluorescent display tube 1. Moreover, the first figure mainly shows the schematic cross-sectional structure of the display part 1a.

螢光顯示管1中,作為所謂的區段顯示型的螢光顯示管,對應欲實現的顯示圖案(圖中為數字、箭頭等圖形)的形狀、個數,配置有陽極3。例如,就第2圖中所例示的數字部分而言,為了可藉由所謂的7區段顯示切換 顯示任意的數值,於每位數配置著7個陽極3。 In the fluorescent display tube 1, as the so-called segment display type fluorescent display tube, the anode 3 is disposed in accordance with the shape and the number of the display patterns (the figures such as numerals and arrows) to be realized. For example, in the digital portion illustrated in FIG. 2, in order to be switchable by a so-called 7-segment display Any value is displayed, and 7 anodes 3 are arranged for each digit.

本實施態樣中,例示適用於車輛用的抬頭顯示器(以下稱「HUD」)裝置的螢光顯示管作為螢光顯示管1。 In the present embodiment, a fluorescent display tube that is applied to a head-up display (hereinafter referred to as "HUD") device for a vehicle is exemplified as the fluorescent display tube 1.

於螢光顯示管1中,在玻璃容器2內真空封裝著構造體,該構造體含有用以使陽極3發光的所需的配線、電極等(參考第1圖)。 In the fluorescent display tube 1, a structure is vacuum-packed in the glass container 2, and the structure includes necessary wirings, electrodes, and the like for causing the anode 3 to emit light (refer to Fig. 1).

於螢光顯示管1中,在構成玻璃容器2的底部的玻璃基板2a上,對每個陽極3形成用以對陽極3供給驅動電壓的陽極配線5。各陽極3具有光蝕刻電極32a、形成在光蝕刻電極32a上的螢光體31、以及與光蝕刻電極32a接合的貫通電極32b。 In the fluorescent display tube 1, an anode wiring 5 for supplying a driving voltage to the anode 3 is formed for each anode 3 on the glass substrate 2a constituting the bottom of the glass container 2. Each of the anodes 3 has a photoetching electrode 32a, a phosphor 31 formed on the photoetching electrode 32a, and a through electrode 32b bonded to the photoetching electrode 32a.

其中,於各陽極3中,以陽極電極32標示用貫通電極32b與光蝕刻電極32a所形成的電極。 In each of the anodes 3, an electrode formed by the through electrode 32b and the photo-etched electrode 32a is indicated by the anode electrode 32.

在各陽極配線5,接合對應的陽極3中的貫通電極32b,藉此可經由陽極配線5對光蝕刻電極32a施加驅動電壓。亦即,可使形成在陽極電極32上的螢光體31發光。 The through electrode 32b of the corresponding anode 3 is bonded to each anode wiring 5, whereby a driving voltage can be applied to the photoetching electrode 32a via the anode wiring 5. That is, the phosphor 31 formed on the anode electrode 32 can be made to emit light.

而且,在螢光顯示管1中,藉由第一絕緣層8與第二絕緣層9形成絕緣層。第一絕緣層8以一部分與玻璃基板2a相接的方式形成,第二絕緣層9以一部分與第一絕緣層8相接的方式形成。該等第一絕緣層8與第二絕緣層9所形成的絕緣層,以每個陽極3的陽極配線5以及陽極電極32彼此為絕電性絕緣的方式形成。 Further, in the fluorescent display tube 1, an insulating layer is formed by the first insulating layer 8 and the second insulating layer 9. The first insulating layer 8 is formed in such a manner that a part thereof is in contact with the glass substrate 2a, and the second insulating layer 9 is formed in such a manner that a part thereof is in contact with the first insulating layer 8. The insulating layers formed by the first insulating layer 8 and the second insulating layer 9 are formed such that the anode wiring 5 and the anode electrode 32 of each anode 3 are electrically insulated from each other.

而且,在螢光顯示管1中,形成有圍繞陽極 3的周圍的周圍電極6,以及用以供給需施加於周圍電極6的電壓的周圍電極配線7。周圍電極配線7形成在玻璃基板2a上,周圍電極6具有光蝕刻電極6a,以及將光蝕刻電極6a與周圍電極配線7之間接合的貫通電極6b。 Moreover, in the fluorescent display tube 1, a surrounding anode is formed The surrounding electrode 6 around 3 and the peripheral electrode wiring 7 for supplying a voltage to be applied to the surrounding electrode 6. The peripheral electrode wiring 7 is formed on the glass substrate 2a, and the peripheral electrode 6 has a photo-etching electrode 6a and a through electrode 6b that bonds the photo-etching electrode 6a and the peripheral electrode wiring 7.

周圍電極6以及周圍電極配線7,以陽極配線5以及陽極電極32之間以第一絕緣層8以及第二絕緣層9得到絕電性絕緣關係的方式來形成。 The peripheral electrode 6 and the peripheral electrode wiring 7 are formed such that the first insulating layer 8 and the second insulating layer 9 are electrically insulated from each other between the anode wiring 5 and the anode electrode 32.

另外,第1圖雖然只顯示一個將周圍電極6與周圍電極配線7之間接合的貫通電極6b,但可在複數個地方設置貫通電極6b。 In addition, in the first drawing, only one through electrode 6b that joins the peripheral electrode 6 and the peripheral electrode wiring 7 is shown, but the through electrode 6b may be provided in a plurality of places.

另外,於第1圖以及第2圖中,顯示部1a指包含上述所說明的玻璃基板2a、陽極3(包含陽極電極32)、陽極配線5、周圍電極6、周圍電極配線7、第一絕緣層8、以及第二絕緣層9的部分。 In addition, in the first drawing and the second drawing, the display unit 1a includes the glass substrate 2a, the anode 3 (including the anode electrode 32), the anode wiring 5, the peripheral electrode 6, the peripheral electrode wiring 7, and the first insulation described above. Layer 8, and portions of second insulating layer 9.

本實施態樣的螢光顯示管1,藉由對如上述設置的周圍電極6施加電壓,謀求缺字的抑制。 In the fluorescent display tube 1 of the present embodiment, by applying a voltage to the peripheral electrode 6 provided as described above, it is possible to suppress the missing word.

就此點而言,參照第3圖以及第4圖來說明。 In this regard, the description will be made with reference to FIGS. 3 and 4.

第3圖A是傳統的螢光顯示管的顯示部的概略剖面構造圖,第3圖B是燈絲4與陽極3之間的電位分布(圖中點虛線)以及電子軌道(圖中粗箭頭)的示意圖。 Fig. 3A is a schematic cross-sectional structural view of a display portion of a conventional fluorescent display tube, and Fig. 3B is a potential distribution between the filament 4 and the anode 3 (dotted line in the figure) and an electron track (thick arrow in the figure) Schematic diagram.

如第3圖A所示,於傳統的顯示部中,各陽極3所具有的陽極電極32’具有貫通電極32b’與例如以圖案印刷形成的印刷電極32a’,印刷電極32a’形成在第二絕緣層9上,貫通電極32b’接合在周圍經第二絕緣層9包 覆的印刷電極32a’與陽極電極5之間。而且,在印刷電極32a’上形成螢光體31。 As shown in FIG. 3A, in the conventional display portion, the anode electrode 32' of each anode 3 has a through electrode 32b' and a printed electrode 32a' formed, for example, by pattern printing, and the printed electrode 32a' is formed in the second. On the insulating layer 9, the through electrode 32b' is bonded around the second insulating layer 9 The printed electrode 32a' and the anode electrode 5 are covered. Further, a phosphor 31 is formed on the printed electrode 32a'.

依據此種傳統的構造,由於在各陽極3的周圍形成第二絕緣層9,因此即便透過陽極配線5對陽極3施加電壓,也如第3圖B所示,來自燈絲4的電子變得難以達到螢光體31的外緣部(圖中的虛線部)。這是因為,螢光體31周圍的第二絕緣層9的電位被設為接地電位,由於所謂的電子暗角,使得從燈絲4到達螢光體31的外緣部的電子量較螢光體31的中央部少的緣故。 According to such a conventional structure, since the second insulating layer 9 is formed around each anode 3, even if a voltage is applied to the anode 3 through the anode wiring 5, as shown in FIG. 3B, electrons from the filament 4 become difficult. The outer edge portion (the broken line portion in the drawing) of the phosphor 31 is reached. This is because the potential of the second insulating layer 9 around the phosphor 31 is set to the ground potential, and the amount of electrons from the filament 4 to the outer edge portion of the phosphor 31 is higher than that of the phosphor due to the so-called electronic vignetting angle. The central part of 31 is less.

此結果是於螢光體31的外緣部的發光光量,亦即顯示區段的外緣部的發光光量會不足,造成所謂的「缺字」。 As a result, the amount of light emitted from the outer edge portion of the phosphor 31, that is, the amount of light emitted from the outer edge portion of the display segment is insufficient, resulting in a so-called "missing word".

相對於此,若依據設有周圍電極6的實施態樣的螢光顯示管1,則如第4圖所示,於螢光體31的周邊部的電位可以比傳統者更高,使到達螢光體31的外緣部的電子量比傳統者更增大。 On the other hand, according to the fluorescent display tube 1 in which the surrounding electrode 6 is provided, as shown in FIG. 4, the potential at the peripheral portion of the phosphor 31 can be higher than that of the conventional one, so that the firefly is reached. The amount of electrons in the outer edge portion of the light body 31 is larger than that of the conventional one.

因此,可謀求「缺字」的抑制。 Therefore, it is possible to suppress the "missing word".

<2.製造方法> <2. Manufacturing method>

在此,如前述方式,特別是對於適用於HUD的螢光顯示管1,要求陽極3的配置間隔(陽極3間之間隙)盡可能的窄化。 Here, as described above, in particular, in the fluorescent display tube 1 applied to the HUD, it is required that the arrangement interval of the anodes 3 (the gap between the anodes 3) be as narrow as possible.

微細圖案的形成,例如使用濺鍍法、真空蒸鍍法等所謂的薄膜形成來進行圖案化是有效的,但由於會助長製造成本的增加,故較不理想。 The formation of the fine pattern is effective, for example, by patterning using a so-called film formation such as a sputtering method or a vacuum deposition method. However, it is less preferable because it contributes to an increase in manufacturing cost.

於是,於本實施態樣,螢光顯示管1中電極 層、絕緣層的積層形成可適用印刷形成,以謀求削減製造成本。 Thus, in the present embodiment, the electrode in the fluorescent display tube 1 The formation of a layer or an insulating layer can be applied by printing to reduce the manufacturing cost.

參考第5圖以及第6圖,說明實施態樣的螢光顯示管1的製造方法。 A method of manufacturing the fluorescent display tube 1 according to the embodiment will be described with reference to FIGS. 5 and 6.

實施態樣的製造方法,首先,進行第5圖A所示的配線形成步驟。在配線形成步驟,在玻璃基板2a上形成每個陽極3的陽極配線5,以及周圍電極6用的周圍電極配線7。本例中,陽極配線5、周圍電極配線7的材料使用鋁,該等的形成(圖案化)例如通過濺鍍法、光蝕刻法進行。 In the manufacturing method of the embodiment, first, the wiring forming step shown in FIG. 5A is performed. In the wiring forming step, the anode wiring 5 of each anode 3 and the peripheral electrode wiring 7 for the peripheral electrode 6 are formed on the glass substrate 2a. In the present example, aluminum is used as the material of the anode wiring 5 and the peripheral electrode wiring 7, and the formation (patterning) is performed by, for example, a sputtering method or a photolithography method.

其次,進行第5圖B所示的第一絕緣層形成步驟。在第一絕緣層形成步驟,避開應該形成陽極3的貫通電極32b以及周圍電極6的貫通電極6b的位置,進行在玻璃基板2a上的第一絕緣層8的形成。第一絕緣層形成步驟是藉由圖案印刷進行的。於本例,使用玻璃作為第一絕緣層8的材料,在第一絕緣層形成步驟,將玻璃膏進行圖案印刷後,藉由燒製使其硬化。 Next, the first insulating layer forming step shown in Fig. 5B is performed. In the first insulating layer forming step, the position of the through electrode 32b of the anode 3 and the through electrode 6b of the peripheral electrode 6 is formed, and the formation of the first insulating layer 8 on the glass substrate 2a is performed. The first insulating layer forming step is performed by pattern printing. In this example, glass is used as the material of the first insulating layer 8, and in the first insulating layer forming step, the glass paste is patterned and then cured by firing.

其次,藉由第5圖C所示的貫通電極形成步驟,分別於陽極配線5上形成貫通電極32b,於周圍電極配線7上形成貫通電極6b。貫通電極32b、6b的材料例如使用銀,於貫通電極形成步驟藉由將銀膏進行圖案印刷而形成貫通電極32b、6b。 Next, through the through electrode forming step shown in FIG. 5C, the through electrode 32b is formed on the anode wiring 5, and the through electrode 6b is formed on the peripheral electrode wiring 7. For example, silver is used as the material of the through electrodes 32b and 6b, and the through electrodes 32b and 6b are formed by pattern printing the silver paste in the through electrode forming step.

進一步地,藉由第5圖D所示的第二絕緣層形成步驟,以使第二絕緣層9與貫通電極32b、6b不接觸的方式來形成。在第二絕緣層形成步驟,將呈膏狀的第 2絕緣層9的形成材料進行圖案印刷。於本例的情況,使用與第一絕緣層8相同樣的玻璃作為第二絕緣層9,在第二絕緣層形成步驟將玻璃膏進行圖案印刷後,藉由燒製使其硬化。 Further, the second insulating layer forming step shown in FIG. 5D is formed such that the second insulating layer 9 and the through electrodes 32b and 6b are not in contact with each other. In the second insulating layer forming step, the paste-like portion 2 The material forming the insulating layer 9 is patterned. In the case of this example, the same glass as the first insulating layer 8 is used as the second insulating layer 9, and the glass paste is patterned in the second insulating layer forming step, and then cured by firing.

其次,進行第6圖A以及第6圖B所示的光蝕刻電極形成步驟。 Next, the photo-etching electrode forming step shown in FIGS. 6A and 6B is performed.

在光蝕刻電極形成步驟,對於藉由到上述的第二絕緣層形成步驟為止的步驟所作成的構造體上,首先如第6圖A所示,將導電性膏pp例如以網版印刷於其一面(全面塗抹狀地)塗布。導電性膏pp為含有導電性材料與感光劑的印刷用的膏,在本例,於導電性材料採用ZnO(氧化鋅)粉末,於感光劑採用屬於一種紫外線硬化樹脂的PVA-SBQ(PVA:聚乙烯基醇,SBQ:苯乙烯基吡啶鹽加成物),將該等藉由溶劑調整為所需的黏度(適合印刷的黏度),形成為膏狀。 In the photo-etching electrode forming step, for the structure formed by the step up to the second insulating layer forming step described above, first, as shown in FIG. 6A, the conductive paste pp is printed on the screen, for example, in a screen. One side (in total spread) is applied. The conductive paste pp is a paste for printing containing a conductive material and a sensitizer. In this example, ZnO (zinc oxide) powder is used for the conductive material, and PVA-SBQ (PVA: which is an ultraviolet curable resin is used for the sensitizer). Polyvinyl alcohol, SBQ: styryl pyridinium salt adduct), which is adjusted to a desired viscosity (suitable for printing viscosity) by a solvent to form a paste.

然後,在光蝕刻電極形成步驟中,使以上述方式的經塗布的導電性膏pp的溶劑乾燥,並通過用以分離形成應成為陽極電極32的光蝕刻電極32a與應成為周圍電極6應成為的光蝕刻電極6a的光蝕刻法進行圖案化。具體而言,為對乾燥後的導電性膏pp進行圖案曝光以及顯影。在本例,由於採用紫外線硬化樹脂,曝光僅以應成為光蝕刻電極32a的部分,以及應成為光蝕刻電極6a的部分作為對象而進行換言之,光蝕刻電極32a與光蝕刻電極6a的邊界部分非曝光對象)。另外,顯影例如進行水顯影。 Then, in the photo-etching electrode forming step, the solvent of the applied conductive paste pp in the above-described manner is dried, and the photo-etching electrode 32a to be the anode electrode 32 and the peripheral electrode 6 should be formed by separation. The photo-etching electrode 6a is patterned by photolithography. Specifically, the conductive paste pp after drying is subjected to pattern exposure and development. In this case, since the ultraviolet curable resin is used, the exposure is performed only for the portion to be the photo-etched electrode 32a and the portion to be the photo-etched electrode 6a, in other words, the boundary portion between the photo-etched electrode 32a and the photo-etched electrode 6a is not. Exposure object). Further, development is performed, for example, by water development.

藉由進行如此的曝光/顯影,形成如第6圖B所示的區隔光蝕刻電極32a與光蝕刻電極6a之間的間隙G。亦即,分別獨立地形成作為光蝕刻電極32a、光蝕刻電極6a的電極。 By performing such exposure/development, a gap G between the photo-etching electrode 32a and the photo-etching electrode 6a as shown in Fig. 6B is formed. That is, the electrodes as the photo-etching electrode 32a and the photo-etching electrode 6a are formed independently.

形成如上述的各電極後,藉由第6圖C所示的螢光體形成步驟在各光蝕刻電極32a上形成螢光體31。例如藉由圖案印刷形成螢光體31。 After forming the respective electrodes as described above, the phosphor 31 is formed on each of the photoetching electrodes 32a by the phosphor forming step shown in Fig. 6C. The phosphor 31 is formed, for example, by pattern printing.

藉此,於螢光顯示管1形成顯示部1a。 Thereby, the display portion 1a is formed in the fluorescent display tube 1.

如上述的本實施態樣,塗布含有導電性材料與感光劑的印刷膏(導電性膏pp)而形成導電感光層,對該導電感光層進行曝光圖案化而形成陽極電極32與周圍電極6。 In the above-described embodiment, a conductive paste (conductive paste pp) containing a conductive material and a sensitizer is applied to form a conductive photosensitive layer, and the conductive photosensitive layer is subjected to exposure patterning to form an anode electrode 32 and a peripheral electrode 6.

藉此,在製造設有陽極3的周圍電極6的螢光顯示管1之際,可採用較便宜的印刷形成,同時可微細化陽極電極32與周圍電極6之間的間隙G和周圍電極6的寬。亦即,在製造設有周圍電極6的螢光顯示管1之際,可謀求採用印刷形成所致的低成本化,同時可謀求陽極3間的窄間隙化。 Thereby, at the time of manufacturing the fluorescent display tube 1 provided with the peripheral electrode 6 of the anode 3, a relatively inexpensive printing formation can be employed, and the gap G between the anode electrode 32 and the peripheral electrode 6 and the peripheral electrode 6 can be miniaturized. Wide. In other words, when the fluorescent display tube 1 provided with the peripheral electrode 6 is manufactured, it is possible to reduce the cost due to printing formation and to achieve a narrow gap between the anodes 3.

另外,本例的情況,陽極3間的間隙的最小值設為30μm至40μm左右。 Further, in the case of this example, the minimum value of the gap between the anodes 3 is set to about 30 μm to 40 μm.

其中,在本例,導電性膏pp的導電性材料使用ZnO,而此點亦有助於陽極3間的窄間隙化。ZnO對紫外線的穿透率較高,不易阻礙利用曝光的硬化作用,故可謀求圖案化的精度提升。藉由謀求圖案化精度的提升, 可使陽極電極32與周圍電極6之間的間隙G、周圍電極6的寬微細化,使得陽極3間的間隙更窄化。 In this example, ZnO is used as the conductive material of the conductive paste pp, and this point also contributes to the narrow gap between the anodes 3. ZnO has a high transmittance to ultraviolet rays, and it is difficult to hinder the hardening effect by exposure, so that the precision of patterning can be improved. By seeking to improve the precision of the pattern, The gap G between the anode electrode 32 and the peripheral electrode 6 and the width of the peripheral electrode 6 can be made finer, so that the gap between the anodes 3 is made narrower.

又,對紫外線的穿透率高,合適於導電性膏pp的材料,另外可舉出ITO(氧化銦-錫),SnO2(氧化錫)等。 Further, the material having a high transmittance to ultraviolet rays is suitable for the material of the conductive paste pp, and examples thereof include ITO (indium oxide-tin) and SnO 2 (tin oxide).

其中,導電性膏pp所使用的導電性材料的合適的條件,可舉出:即使施加電壓亦不會發光,對螢光顯示管1內的真空特性沒有不良影響,不會因離子擴散而對螢光體31造成不良影響(具體而言為不導致螢光體31的亮度減低)等。滿足該等條件的導電性材料的例,除了上述的ZnO、ITO,SnO2之外,例如可舉出鋁等。 Among them, suitable conditions of the conductive material used for the conductive paste pp are that they do not emit light even when a voltage is applied, and have no adverse effect on the vacuum characteristics in the fluorescent display tube 1, and are not affected by ion diffusion. The phosphor 31 causes adverse effects (specifically, does not cause a decrease in luminance of the phosphor 31). Examples of the conductive material satisfying these conditions include, in addition to the above-described ZnO, ITO, and SnO 2 , aluminum or the like.

此外,就導電性膏pp而言,應考慮導電性材料的含量(含有率)。導電性材料的含有率過少時,會變得無法滿足作為電極的特性。反而言之,太多時會無法滿足作為印刷膏的黏度特性,導致成膜精度(例如膜壓的均勻性等)的減低。 Further, in the conductive paste pp, the content (content ratio) of the conductive material should be considered. When the content rate of the conductive material is too small, the characteristics as an electrode may not be satisfied. Conversely, when it is too much, the viscosity characteristics of the printing paste cannot be satisfied, resulting in a decrease in film formation precision (for example, uniformity of film pressure, etc.).

由該等觀點進行實驗,結果得知於導電性膏pp中導電性材料(在本例為ZnO粉末)的含有率,較佳設為40wt%(重量%)至60wt%。更佳為50wt%。 As a result of conducting experiments from these viewpoints, it is found that the content of the conductive material (in this example, ZnO powder) in the conductive paste pp is preferably 40% by weight to 60% by weight. More preferably 50% by weight.

而且,雖然是導電性材料的粉末粒徑,卻會成為左右導電性膏pp的特性的要因。粉末粒徑太大時,會變得難以確保適於印刷的膏體黏度,導致印刷性惡化;過小時,與基底的密著性會惡化而導致圖案化特性的惡化。又,與基底的密著性的惡化,推測主要原因是粒徑小時,則與導電性材料的比表面積增加,相對於感光劑的量, 與基底側固著的面積變得過大所致。 Further, although it is a powder particle diameter of the conductive material, it is a factor of the characteristics of the right and left conductive paste pp. When the particle size of the powder is too large, it becomes difficult to ensure the viscosity of the paste suitable for printing, which deteriorates the printability; when it is too small, the adhesion to the substrate is deteriorated to deteriorate the patterning property. Moreover, it is presumed that the deterioration of the adhesion to the substrate is such that when the particle diameter is small, the specific surface area with the conductive material increases, and the amount of the photosensitive agent increases. The area fixed to the base side becomes excessively large.

從上述的觀點進行實驗,結果為導電性材料的粉末平均粒徑較佳設為1μm至10μm,更佳為2μm。 As a result of carrying out the experiment from the above viewpoint, the average particle diameter of the powder of the conductive material is preferably from 1 μm to 10 μm, more preferably 2 μm.

進一步而言,關於導電性膏pp所使用的感光劑,感光性樹脂(在本例PVA-SBQ)的含量會成為左右圖案化精度的要因。 Further, regarding the photosensitive agent used for the conductive paste pp, the content of the photosensitive resin (in the present example, PVA-SBQ) is a factor for the accuracy of the left and right patterning.

感光劑中感光性樹脂的量過少時,會無法充分地得到利用曝光的硬化作用,導致圖案化特性的惡化;感光性樹脂的量過多時,則感光劑本身會變得不安定而凝膠化,變得難以維持在適合印刷的導電性膏pp的黏度。 When the amount of the photosensitive resin in the photosensitive agent is too small, the curing effect by exposure may not be sufficiently obtained, and the patterning property may be deteriorated. When the amount of the photosensitive resin is too large, the photosensitive agent itself may become unstable and gelatinized. It becomes difficult to maintain the viscosity of the conductive paste pp suitable for printing.

由此等觀點進行實驗,結果為於感光劑中感光性樹脂的含量(含有率)較佳設為5wt%至10wt%,更佳為7wt%。 As a result of the experiment, the content (content ratio) of the photosensitive resin in the photosensitive agent is preferably from 5 wt% to 10 wt%, more preferably 7 wt%.

而且,亦應考慮塗布導電性膏pp而形成的導電感光層的膜厚。導電感光層的膜厚若太厚時,會導致來自光蝕刻的圖案化特性的惡化,太薄時,電阻質會變高,導致作為電極的特性的惡化。 Further, the film thickness of the conductive photosensitive layer formed by applying the conductive paste pp should also be considered. When the film thickness of the conductive photosensitive layer is too thick, the patterning property from photoetching is deteriorated. When it is too thin, the resistance is high, and the characteristics of the electrode are deteriorated.

由此等觀點進行實驗,結果為導電感光層的厚度較佳設為5μm至15μm,更佳為10μm。 As a result of conducting experiments from the viewpoints, the thickness of the conductive photosensitive layer is preferably from 5 μm to 15 μm, more preferably 10 μm.

本案的發明人等,就導電性膏pp,使用下述的〔組成例1〕至〔組成例3〕製成的印刷膏進行圖案化精度的實驗。 The inventors of the present invention conducted experiments on the patterning accuracy of the conductive paste pp using the printing pastes prepared in the following [composition example 1] to [composition example 3].

〔組成例1〕 [Composition Example 1]

‧導電性材料A=(ZnO粉末,平均粒徑=2μm)…50wt% ‧ Conductive material A = (ZnO powder, average particle diameter = 2 μm)... 50% by weight

‧感光劑A=(PVA-SBQ:7wt%,糖類:8wt%,丙二醇:85wt%)…30wt% ‧ sensitizer A = (PVA-SBQ: 7wt%, sugar: 8wt%, propylene glycol: 85wt%)... 30wt%

‧溶劑=丙二醇…20wt% ‧ solvent = propylene glycol... 20wt%

〔組成例2〕 [Composition Example 2]

‧導電性材料B=(ZnO粉末,平均粒徑=0.1μm)…40wt% ‧ Conductive material B = (ZnO powder, average particle diameter = 0.1 μm)... 40wt%

‧感光劑A=(PVA-SBQ:7wt%,糖類:8wt%,丙二醇:85wt%)…30wt% ‧ sensitizer A = (PVA-SBQ: 7wt%, sugar: 8wt%, propylene glycol: 85wt%)... 30wt%

‧溶劑=丙二醇…30wt% ‧ solvent = propylene glycol... 30wt%

〔組成例3〕 [Composition Example 3]

‧導電性材料B=(ZnO粉末,平均粒徑=0.1μm)…40wt% ‧ Conductive material B = (ZnO powder, average particle diameter = 0.1 μm)... 40wt%

‧感光劑B=(PVA-SBQ:4wt%,單體:4wt%,丙二醇:92wt%)…30wt% ‧ sensitizer B = (PVA-SBQ: 4wt%, monomer: 4wt%, propylene glycol: 92wt%)... 30wt%

‧溶劑=丙二醇…30wt% ‧ solvent = propylene glycol... 30wt%

另外,於實驗中,改變組成例1與組成例2、3之間的溶劑的比例的不同,是謀求防止伴隨著導電性材料的粉末粒徑差異產生膏體黏度差異。 Further, in the experiment, the difference in the ratio of the solvent between the composition example 1 and the composition examples 2 and 3 was changed in order to prevent the difference in the viscosity of the paste due to the difference in the particle diameter of the conductive material.

第7圖、第8圖、第9圖表示分別使用來自上述的組成例1、組成例2、組成例3的導電性膏pp進行電極的圖案化的結果。另外,各圖中的B圖為對應的A圖的中央部擴大圖。 7 , 8 , and 9 show the results of patterning the electrodes using the conductive paste pp from the above-described composition example 1, composition example 2, and composition example 3, respectively. In addition, the B picture in each figure is an enlarged view of the center part of the corresponding A picture.

從該等第7圖至第9圖所示的結果,可確認使用設為平均粒徑=2μm的組成例1的導電性膏pp的情況(第7 圖),比起使用設為平均粒徑=0.1μm的組成例2、3的導電性膏pp的情況(第8圖,第9圖)更能提升圖案化精度。此為上述的平均粒徑的較佳數值的印證。 From the results shown in the above-mentioned 7th to 9th, it was confirmed that the conductive paste pp of the composition example 1 having an average particle diameter of 2 μm was used (No. 7). In the case of using the conductive paste pp of the composition examples 2 and 3 having an average particle diameter of 0.1 μm (Fig. 8, Fig. 9), the patterning accuracy can be improved. This is a confirmation of the preferred value of the above average particle diameter.

而且,就感光劑而言,相較於使用感光性樹脂的含量設為4wt%的組成例3的導電性膏pp的情況(第9圖),使用同樹脂的含量設為7wt%的組成例1、2的導電性膏pp的情況(第7圖,第8圖)可確認到圖案化精度的提升。這點為上述感光劑中感光性樹脂的含量的較佳條件(5wt%至10wt%)的印證。 In the case of the conductive paste pp of the composition example 3 in which the content of the photosensitive resin is 4% by weight (Fig. 9), a composition example in which the content of the resin is 7 wt% is used. In the case of the conductive paste pp of 1, 2 (Fig. 7, Fig. 8), the improvement of the patterning accuracy was confirmed. This is a confirmation of the preferable conditions (5 wt% to 10 wt%) of the content of the photosensitive resin in the above sensitizer.

另外,作為感光劑A、B的差異點,除了感光性樹脂的含有率以外,還有糖類/單體的差異。雖然無法斷言該等糖類/單體的差異完全不會影響到圖案化精度,但就感光劑A、B導致產生圖案化精度的差的主要原因而言,是由感光性樹脂的含有率的差所主導。 Further, as a difference between the photosensitizers A and B, in addition to the content ratio of the photosensitive resin, there are also differences in sugars/monomers. Although it cannot be said that the difference in the saccharide/monomer does not affect the patterning accuracy at all, the cause of the difference in patterning accuracy due to the sensitizers A and B is the difference in the content ratio of the photosensitive resin. Leading.

<3.顯示裝置的構成> <3. Composition of display device >

第10圖表示具備螢光顯示管1的顯示裝置10的電路構成的方塊圖。 Fig. 10 is a block diagram showing the circuit configuration of the display device 10 including the fluorescent display tube 1.

於第10圖中,顯示裝置10具備螢光顯示管1,同時具備CPU(中央處理器,Central Processing Unit)11以及電源電路12。 In the tenth diagram, the display device 10 includes a fluorescent display tube 1, and includes a CPU (Central Processing Unit) 11 and a power supply circuit 12.

CPU 11,為基於從外部(在本例為車輛端)輸入的數據、指令,產生於顯示部1a中是否使任意的陽極3點燈(發光)的數據(顯示數據),為了實現基於該顯示數據使陽極3點燈的工作,產生各種應給予螢光顯示管1的訊 號。具體而言,為產生數據訊號SI、時脈CLK,鎖存訊號LAT。 The CPU 11 is data (display data) generated by whether or not the arbitrary anode 3 is lit (lighted) in the display unit 1a based on data and commands input from the outside (in this example, the vehicle end), in order to realize the display based on the display. The data makes the anode 3 light work, and generates various signals that should be given to the fluorescent display tube 1. number. Specifically, in order to generate the data signal SI, the clock CLK, the signal LAT is latched.

而且,CPU 11對應從外部的指示,產生用於模糊控制(dimming control)的空白訊號BK。空白訊號BK為例如1周期設為5msec左右的PWM(脈寬調變,Pulse Width Modulation)訊號,具體而言,為控制陽極3的熄燈期間用的訊號。例如,H等級(開)表示陽極10的熄燈,L等級(關)表示陽極10的點燈。CPU 11為對應從外部指示的模糊的比例(%)調整空白訊號BK的運行(on-duty),亦即陽極3的熄燈期間的工作(比例)。具體而言,模糊的比例大(陽極3的亮度變得更小)時空白訊號BK的運行變大,模糊的比例變小時(陽極3的亮度變大)時空白訊號BK的運行變小。 Moreover, the CPU 11 generates a blank signal BK for dimming control corresponding to an instruction from the outside. The blank signal BK is, for example, a PWM (Pulse Width Modulation) signal having a period of about 5 msec, and specifically, a signal for controlling the period during which the anode 3 is turned off. For example, the H level (on) indicates that the anode 10 is turned off, and the L level (off) indicates the lighting of the anode 10. The CPU 11 adjusts the on-duty of the blank signal BK corresponding to the ratio (%) of the blur indicated from the outside, that is, the operation (proportion) of the anode 3 during the light-off period. Specifically, when the blur ratio is large (the brightness of the anode 3 becomes smaller), the operation of the blank signal BK becomes large, and when the blur ratio becomes small (the brightness of the anode 3 becomes large), the operation of the blank signal BK becomes small.

上述的空白訊號BK、數據訊號SI、時脈訊號CLK以及鎖存訊號LAT,為供給至螢光顯示管1的端子部1b。 The blank signal BK, the data signal SI, the clock signal CLK, and the latch signal LAT are supplied to the terminal portion 1b of the fluorescent display tube 1.

而且,於本例的情況,空白訊號BK也會供給至電源電路12。 Moreover, in the case of this example, the blank signal BK is also supplied to the power supply circuit 12.

螢光顯示管1具備上述的顯示部1a以及燈絲4,同時具備端子部1b以及驅動器1c。而且,螢光顯示管1具備用以輸入驅動器1c的工作電壓的驅動電壓端子TVd,用以輸入燈絲4的驅動電壓(以下標示為「燈絲電壓Ef」)的第一燈絲端子TF1與第二燈絲端子TF2,以及用以輸入應施加至顯示部1a中周圍電極6的周圍電極電壓的周圍電極用端子TVs。 The fluorescent display tube 1 includes the above-described display unit 1a and the filament 4, and includes a terminal portion 1b and a driver 1c. Further, the fluorescent display tube 1 is provided with a driving voltage terminal TVd for inputting the operating voltage of the driver 1c, and a first filament terminal TF1 and a second filament for inputting the driving voltage of the filament 4 (hereinafter referred to as "filament voltage Ef"). The terminal TF2 and the peripheral electrode terminal TVs for inputting the peripheral electrode voltage to be applied to the peripheral electrode 6 in the display portion 1a.

驅動器1c在透過端子部1b輸入從CPU 11產生的數據訊號SI、時脈訊號CLK、鎖存訊號LAT以及空白訊號BK的同時,可透過圖中以配線Ha1,Ha2,…,Han表示的分別與顯示部1a中的複數個陽極配線5(n個陽極配線5)的一者對應連接的各配線Ha,對各個陽極3(在本例為區段)個別地施加驅動電壓。 The driver 1c inputs the data signal SI, the clock signal CLK, the latch signal LAT, and the blank signal BK generated from the CPU 11 through the terminal portion 1b, and can be transmitted through the wirings Ha1, Ha2, ..., Han respectively. One of the plurality of anode wirings 5 (n anode wirings 5) in the display portion 1a is associated with each of the connected wirings Ha, and a driving voltage is individually applied to each of the anodes 3 (in this example, a section).

驅動器1c為依照時脈訊號CLK以及鎖存訊號LAT讀取來自串列數據(serial data)的數據訊號SI並進行串列/並列轉換。基於對每個藉由如此的串列/並列轉換所得到的各陽極3的數據(表示點燈/熄燈的2值數據),進行透過配線Ha1至Han對各陽極3的電壓施加的開/閉(ON/OFF)控制。 The driver 1c reads the data signal SI from the serial data according to the clock signal CLK and the latch signal LAT and performs serial/parallel conversion. The opening/closing of the voltage applied to each anode 3 by the transmission wirings Ha1 to Han is performed based on the data (the binary data indicating the lighting/lighting) of each of the anodes 3 obtained by such serial/parallel conversion. (ON/OFF) control.

藉此,藉由基於CPU 11所產生的顯示數據的圖案,將顯示部1a的陽極3點燈。 Thereby, the anode 3 of the display unit 1a is turned on by the pattern of the display data generated by the CPU 11.

而且,驅動器1c基於空白訊號BK,透過配線Ha1至Han進行對各陽極3施加電壓的開/閉控制。具體而言,依據空白訊號BK的反相訊號進行對各陽極3施加電壓的開/閉控制。 Further, the driver 1c performs on/off control of applying a voltage to each anode 3 through the wirings Ha1 to Han based on the blank signal BK. Specifically, the on/off control of applying a voltage to each anode 3 is performed in accordance with the inverted signal of the blank signal BK.

藉此,實現上述模糊的亮度調整。 Thereby, the blurring brightness adjustment described above is achieved.

另外,於本例中,陽極3的驅動電壓(陽極電壓)例如設為5.0V的直流電壓。 Further, in the present example, the driving voltage (anode voltage) of the anode 3 is, for example, a DC voltage of 5.0 V.

顯示部1a,對於先前的第1圖所示的周圍電極配線7,為與輸入端子TVs連接。藉此,可對周圍電極6施加周圍電極電壓。 The display unit 1a is connected to the input terminal TVs to the peripheral electrode wiring 7 shown in the previous FIG. Thereby, the surrounding electrode voltage can be applied to the surrounding electrode 6.

燈絲4是為了放出用以使在每個陽極3所形 成的螢光體31發光的電子而設置,基於電源電路12所產生/輸出的交流驅動訊號(後述的第一訊號sF1,第二訊號sF2),施加作為燈絲電壓Ef的交流電壓而驅動。 Filament 4 is intended to be discharged to form a shape at each anode 3 The emitted phosphor 31 emits electrons, and is driven by an AC drive signal (a first signal sF1 and a second signal sF2, which will be described later) generated and outputted by the power supply circuit 12, by applying an AC voltage as the filament voltage Ef.

如圖所示的燈絲4,分別於一端與第一燈絲端子TF1連接,於另一端與第二燈絲端子TF2連接。 The filaments 4 as shown are connected to the first filament terminal TF1 at one end and to the second filament terminal TF2 at the other end.

本例的情況,燈絲電壓Ef設為實效值=1V左右的交流電壓,相對於接地(0V)等級的平均電壓值例如設為-35V左右。 In the case of this example, the filament voltage Ef is set to an AC voltage of about 1 V effective value, and the average voltage value with respect to the ground (0 V) level is, for example, about -35 V.

電源電路12,例如具備:用以輸入車載電池作為供給源的電源電壓Vin的電源輸入端子tVin,與螢光顯示管1中的驅動電壓端子TVd、周圍電極端子TVs、第一燈絲端子TF1、第二燈絲端子TF2連接的驅動電壓端子tVd、周圍電極端子tVs、第一燈絲端子tF1、第二燈絲端子tF2及經輸入空白訊號BK的空白訊號輸入端子tBK,同時具備驅動電壓產生電路12a、周圍電極電壓產生電路12b以及燈絲電壓產生電路12c。 The power supply circuit 12 includes, for example, a power supply input terminal tVin for inputting a power supply voltage Vin as a supply source of the vehicle battery, and a drive voltage terminal TVd, a peripheral electrode terminal TVs, and a first filament terminal TF1 in the fluorescent display tube 1. The driving voltage terminal tVd connected to the two filament terminals TF2, the peripheral electrode terminal tVs, the first filament terminal tF1, the second filament terminal tF2, and the blank signal input terminal tBK via the input blank signal BK, and the driving voltage generating circuit 12a and the surrounding electrode The voltage generating circuit 12b and the filament voltage generating circuit 12c.

驅動電壓產生電路12a,為基於電源電壓Vin產生驅動器1c的工作電壓,並透過驅動電壓端子tVd輸出。 The driving voltage generating circuit 12a generates an operating voltage of the driver 1c based on the power source voltage Vin, and outputs it through the driving voltage terminal tVd.

而且,燈絲電壓產生電路12c為基於電源電壓Vin產生用以驅動燈絲4的第一訊號sF1、第二訊號sF2,透過第一燈絲端子tF1、第二燈絲端子tF2分別輸出。第一訊號sF1為設為以預定周期重覆開/閉的脈衝訊號,第二訊號sF2為設為第一訊號sF2的反相訊號。又,本例中的第一訊號 sF1、第二訊號sF2的譜峰電壓值(開啟期間的電壓值)設為1V左右。 Further, the filament voltage generating circuit 12c generates a first signal sF1 and a second signal sF2 for driving the filament 4 based on the power source voltage Vin, and outputs the first signal terminal tF1 and the second filament terminal tF2 through the first filament terminal tF1 and the second filament terminal tF2. The first signal sF1 is a pulse signal set to be repeatedly turned on/off at a predetermined period, and the second signal sF2 is an inverted signal set as the first signal sF2. Again, the first signal in this example The peak voltage value (voltage value during the turn-on period) of sF1 and second signal sF2 is set to about 1V.

周圍電極電壓產生電路12b,為基於電源電壓Vin產生用以驅動周圍電極配線7的周圍電極電壓,並透過周圍電極端子tVs輸出。 The ambient electrode voltage generating circuit 12b generates a peripheral electrode voltage for driving the peripheral electrode wiring 7 based on the power source voltage Vin, and outputs it through the peripheral electrode terminal tVs.

此時,周圍電極電壓產生電路12b的周圍電極電壓為與空白訊號BK同步開/閉。具體而言,在本例,為與空白訊號BK的反相訊號同步開/閉周圍電極電壓。 At this time, the ambient electrode voltage of the peripheral electrode voltage generating circuit 12b is turned on/off in synchronization with the blank signal BK. Specifically, in this example, the peripheral electrode voltage is turned on/off in synchronization with the inverted signal of the blank signal BK.

藉此,由於僅對應伴隨模糊的陽極3的開啟期間對周圍電極6施加電壓,所以可將在謀求缺字的防止方面的電力消耗抑制在最小限度,以謀求消耗電力的削減。 In this way, since the voltage is applied to the peripheral electrode 6 only in the opening period of the anode 3 accompanying the blur, the power consumption in preventing the occurrence of the missing word can be minimized, and the power consumption can be reduced.

又,周圍電極電壓無須與空白訊號BK同步開/閉。 Moreover, the ambient electrode voltage does not have to be turned on/off in synchronization with the blank signal BK.

<4.實施態樣的彙整> <4. Implementation of the integration of the situation >

如上述的實施態樣的螢光顯示管的製造方法,是製造具有:具有陽極電極(同32)與螢光體(同31)的陽極(同3)、以及放出用以使螢光體發光的電子的燈絲(同4)的螢光顯示管的製造方法,其中,該方法具有電極形成步驟,其為:對於塗布含有來自ZnO、ITO或SnO2的任一者的粉末的導電性材料與感光劑的印刷膏(導電性膏pp)所形成的導電感光層進行曝光圖案化,形成陽極電極與陽極電極的周圍電極(同6)者。 A method of manufacturing a fluorescent display tube according to the above embodiment is characterized in that an anode (the same 3) having an anode electrode (same as 32) and a phosphor (same 31) is produced, and a phosphor is emitted to emit light. A method for producing a fluorescent display tube of the same (fourth), wherein the method has an electrode forming step of applying a conductive material containing a powder derived from any one of ZnO, ITO or SnO 2 The conductive photosensitive layer formed of the photosensitive paste (conductive paste pp) is subjected to exposure patterning to form a peripheral electrode of the anode electrode and the anode electrode (same as 6).

藉由上述方式對導電感光層的曝光圖案化而形成陽極電極及陽極電極的周圍電極,作為設有周圍電極以謀求抑制缺字的螢光顯示管,即使藉由印刷進行應成 為電極的層的積層,亦可使陽極間的間隙微細化。進一步地,ZnO、ITO、SnO2對曝光所使用的紫外線的穿透率較高,不易阻礙利用曝光的硬化作用,所以就此點而言,亦有助於陽極間的間隙的微細化。 By patterning the exposure of the conductive photosensitive layer by the above-described method, the peripheral electrodes of the anode electrode and the anode electrode are formed, and the fluorescent display tube is provided with the peripheral electrode to suppress the missing word, and the layer to be the electrode is printed by printing. The layering can also make the gap between the anodes fine. Further, ZnO, ITO, and SnO 2 have a high transmittance for ultraviolet rays used for exposure, and are hard to hinder the hardening action by exposure. Therefore, this point also contributes to miniaturization of the gap between the anodes.

因此,可用更低成本實現以缺字的抑制與陽極間的窄間隙化的兩方面謀求提升顯示品質的螢光顯示管。 Therefore, it is possible to realize a fluorescent display tube in which the display quality is improved by both the suppression of the missing word and the narrow gap between the anodes at a lower cost.

其中,依據前述的實施態樣的製造方法,可窄化光蝕刻電極32a(陽極電極32)與光蝕刻電極6a(周圍電極6)之間的間隙G,藉由謀求如此的陽極電極32與周圍電極6之間的窄間隙化,可減低用以抑制缺字而應施加的周圍電極電壓的電壓值。亦即,藉由此點,依據實施態樣的製造方法,可謀求防止缺字並且削減電力消耗。 According to the manufacturing method of the foregoing embodiment, the gap G between the photo-etched electrode 32a (anode electrode 32) and the photo-etched electrode 6a (surrounding electrode 6) can be narrowed, by such an anode electrode 32 and surrounding The narrow gap between the electrodes 6 reduces the voltage value of the surrounding electrode voltage to be applied to suppress the missing word. In other words, according to the manufacturing method of the embodiment, it is possible to prevent the word shortage and reduce the power consumption.

進一步地,於實施態樣的製造方法中,前述印刷膏中導電性材料的含有率設為40wt%至60wt%。 Further, in the manufacturing method of the embodiment, the content of the conductive material in the printing paste is set to 40% by weight to 60% by weight.

藉由適當地設定導電性材料的含有率,可確保成膜精度的同時形成應成為電極的膜。 By appropriately setting the content of the conductive material, it is possible to form a film to be an electrode while ensuring the film formation precision.

又進一步,於實施態樣的製造方法中,導電性材料的粉末平均粒徑設為1μm至10μm。 Further, in the production method of the embodiment, the powder has an average particle diameter of 1 μm to 10 μm.

藉由適當地設定導電性材料的粉末粒徑,可謀求兼顧良好的印刷性與圖案化特性兩者。 By appropriately setting the particle diameter of the conductive material, both good printability and patterning properties can be achieved.

而且,於實施態樣的製造方法中,感光劑含有5wt%至10wt%的感光性樹脂。 Further, in the manufacturing method of the embodiment, the photosensitive agent contains 5 wt% to 10 wt% of the photosensitive resin.

藉由於感光劑中適當地設定感光性樹脂的含有率,可謀求兼顧良好的印刷性與圖案化特性兩者。 By appropriately setting the content ratio of the photosensitive resin in the photosensitive agent, both good printability and patterning properties can be achieved.

進一步地,於實施態樣的製造方法中,導電感光層以5μm至15μm的膜厚形成。 Further, in the manufacturing method of the embodiment, the conductive photosensitive layer is formed with a film thickness of 5 μm to 15 μm.

藉由適當地設定導電感光層的膜厚,可謀求兼顧確保作為電極的良好特性與良好的圖案化特性兩者。 By appropriately setting the film thickness of the conductive photosensitive layer, it is possible to achieve both good characteristics as an electrode and good patterning properties.

而且,實施態樣的螢光顯示管(同1),具有:具有陽極電極(同32)與螢光體(31)的陽極(同3),以及放出用以使螢光體發光的電子的燈絲,其中,陽極電極形成有周圍電極(同6),而且陽極電極與周圍電極含有作為導電性材料的ZnO、ITO或SnO2的任一者的粉末。 Further, the fluorescent display tube (same as 1) of the embodiment has an anode (the same as 3) having an anode electrode (same as 32) and a phosphor (31), and an electron for emitting light for emitting the phosphor. In the filament, the anode electrode is formed with a peripheral electrode (same as 6), and the anode electrode and the peripheral electrode contain powder of any one of ZnO, ITO or SnO 2 as a conductive material.

如上述的ZnO、ITO,SnO2由於對曝光所使用的紫外線的穿透率較高,不易阻礙利用曝光的硬化作用,因此於藉由印刷進行應成為電極的層的積層並對該層藉由曝光圖案化形成陽極電極與周圍電極時,可微細化陽極間的間隙。 As described above, ZnO, ITO, and SnO 2 have a high transmittance for ultraviolet light used for exposure, and it is difficult to hinder the hardening action by exposure. Therefore, layering of a layer to be an electrode is performed by printing and the layer is layered. When the exposure pattern is formed to form the anode electrode and the surrounding electrode, the gap between the anodes can be made fine.

因此,可用更低成本實現以缺字的抑制與陽極間的窄間隙化的兩方面謀求提升顯示品質的螢光顯示管。 Therefore, it is possible to realize a fluorescent display tube in which the display quality is improved by both the suppression of the missing word and the narrow gap between the anodes at a lower cost.

<5.變形例> <5. Modifications>

以上,說明本發明的實施態樣,但本發明不限定於上述所說明的具體例,於不超出本發明的範圍的範圍中,可採取多種的變形例。 The embodiment of the present invention has been described above, but the present invention is not limited to the specific examples described above, and various modifications can be made without departing from the scope of the invention.

例如,在上述中,例示了進行區段圖案顯示的類型的螢光顯示管,但本發明亦適合使用於進行點陣顯示的螢光顯示管,例如主動矩陣方式的螢光顯示管亦。 For example, in the above, a fluorescent display tube of a type in which a segment pattern display is performed is exemplified, but the present invention is also suitable for a fluorescent display tube for performing dot matrix display, for example, an active matrix type fluorescent display tube.

而且,本發明也適用於車輛用的HUD以外的其他的顯示裝置。 Moreover, the present invention is also applicable to display devices other than HUDs for vehicles.

2a‧‧‧玻璃基板 2a‧‧‧glass substrate

5‧‧‧陽極配線 5‧‧‧Anode wiring

6‧‧‧周圍電極 6‧‧‧ surrounding electrodes

6a‧‧‧光蝕刻電極 6a‧‧‧Photoetching electrode

6b‧‧‧貫通電極 6b‧‧‧through electrode

7‧‧‧周圍電極配線 7‧‧‧Circumference wiring

8‧‧‧第一絕緣層 8‧‧‧First insulation

9‧‧‧第二絕緣層 9‧‧‧Second insulation

31‧‧‧螢光體 31‧‧‧Fluorite

32‧‧‧陽極電極 32‧‧‧Anode electrode

32a‧‧‧光蝕刻電極 32a‧‧‧Photo Etching Electrode

32b‧‧‧貫通電極 32b‧‧‧through electrode

G‧‧‧間隙 G‧‧‧ gap

pp‧‧‧導電性膏 Pp‧‧‧conductive paste

Claims (6)

一種螢光顯示管的製造方法,該螢光顯示管具有:具有陽極電極與螢光體的陽極,以及放出用以使前述螢光體發光的電子的燈絲,該方法具有電極形成步驟:對塗布含有來自ZnO、ITO或SnO2的任一者的粉末的導電性材料與感光劑的印刷膏所形成的導電感光層進行曝光圖案化,形成前述陽極電極與前述陽極電極的周圍電極。 A method of manufacturing a fluorescent display tube comprising: an anode having an anode electrode and a phosphor; and a filament emitting electrons for causing the phosphor to emit light, the method having an electrode forming step: coating The conductive photosensitive layer containing the conductive material of the powder of any one of ZnO, ITO or SnO 2 and the photosensitive paste is subjected to exposure patterning to form the anode electrode and the peripheral electrode of the anode electrode. 如申請專利範圍第1項所述之螢光顯示管的製造方法,其中,於前述印刷膏中前述導電性材料的含有率設為40wt%至60wt%。 The method for producing a fluorescent display tube according to the first aspect of the invention, wherein the content of the conductive material in the printing paste is 40% by weight to 60% by weight. 如申請專利範圍第1項或第2項所述之螢光顯示管的製造方法,其中,前述導電性材料的粉末平均粒徑設為1μm至10μm。 The method for producing a fluorescent display tube according to the above aspect of the invention, wherein the conductive material has a powder average particle diameter of from 1 μm to 10 μm. 如申請專利範圍第1項至第3項中任一項所述之螢光顯示管的製造方法,其中,前述感光劑含有5wt%至10wt%的感光性樹脂。 The method for producing a fluorescent display tube according to any one of claims 1 to 3, wherein the photosensitive agent contains 5 wt% to 10 wt% of a photosensitive resin. 如申請專利範圍第1項至第4項中任一項所述之螢光顯示管的製造方法,其中,前述導電感光層以5μm至15μm的膜厚形成。 The method for producing a fluorescent display tube according to any one of claims 1 to 4, wherein the conductive photosensitive layer is formed to have a film thickness of 5 μm to 15 μm. 一種螢光顯示管,具有:具有陽極電極與螢光體的陽極,以及放出用以使前述螢光體發光的電子的燈絲;前述陽極電極形成有周圍電極,而且所述陽極電 極與前述周圍電極含有作為導電性材料的ZnO、ITO或SnO2的任一者的粉末。 A fluorescent display tube comprising: an anode having an anode electrode and a phosphor; and a filament emitting electrons for emitting the phosphor; the anode electrode is formed with a peripheral electrode, and the anode electrode and the peripheral electrode are A powder containing ZnO, ITO or SnO 2 as a conductive material.
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