TW201702474A - Energy-saving type dielectric barrier discharge plasma nox reduction device - Google Patents

Abstract

Disclosed is a nitrogen oxide reduction device using dielectric barrier discharge plasma. The plasma nitrogen oxide reduction device may limitedly emit nitrogen oxide with a form of NO2 at a final outlet of the plasma nitrogen oxide reduction device by arranging a combustion unit, a wet treatment unit, and a plasma oxidizing unit in a housing. The emitted nitrogen oxide is finally treated in a wet scrubber operated as a reducer at a final exhaust end.

Description

Energy-saving dielectric barrier discharge plasma nitrogen oxide emission reduction device

The present invention relates to the field of exhaust gas treatment, and more particularly to an energy-saving dielectric barrier discharge plasma nitrogen oxide capable of effectively treating exhaust gas containing nitrogen oxides (NO _x ) and other pollutants. Row of devices.

With the rapid development of industrialization, industrial activities that meet human needs are based on basic energy sources. However, with the increase in energy use, not only environmental pollution has occurred, but also the degree of pollution has become more serious. In the process of combustion, fossil fuels such as petroleum, coal, and natural gas, which occupy most of the energy resources, will inevitably emit atmospheric pollutants. Therefore, in order to sustain development in the future, human beings must achieve coordination between economic growth and environmental protection.

Air pollution caused by the use of energy is roughly classified into local pollution and international pollution according to the scope and corresponding range. Sulfur oxides and nitrogen oxides to acid rain, the harmful plants and animals compare local range, but, carbon dioxide, NO _x and other greenhouse gases global warming phenomena become relevant international dispute object.

Uncontrolled economic development for development, resulting in air pollution around domestic metropolises and industrial areas has reached a state of danger, and with the benefits of economic development, the implementation of various regulations on prevention of domestic air pollution, global concern The proposed methodology of global warming and the prospect of atmospheric pollutants due to the use of energy are all called important issues.

At present, as the demand for semiconductor displays increases, fluoride is more and more widely used, and here, the corresponding problem is stipulated for the total amount of the large amount of pollutants (NO _x ) generated after the processing of the semiconductor process gas. and the present processing technology of NO _x mainly used catalytic process, but excessive use of energy in the operation, so that, instead of the need to ensure technology, therefore, capable of solving problems of the conventional technology in place. [Progress Technical Literature] [Patent Literature]

(Patent Document 1) Korean Patent Publication 10-2011-0065985

[Problems to be solved by the invention]

The technical problem to be solved by the present invention is to provide a nitrogen oxide emission reduction type plasma oxidation device, in which a combustion portion, a wet treatment portion, and a plasma oxidation portion are sequentially disposed in a casing of a plasma nitrogen oxide emission reduction device, The form of the nitrogen oxides at the final discharge port is discharged in a limited manner by NO ₂ , whereby the nitrogen oxides can be efficiently treated. [Technical solution to solve the problem]

In order to solve the above problems, the present invention provides an energy-saving dielectric barrier discharge plasma NOx reduction device for treating exhaust gas, comprising: a combustion portion for performing combustion treatment on the exhaust gas; and a wet processing portion from the The combustion unit receives the combustion-treated gas and performs a wet treatment, and the plasma oxidation unit receives a plasma gas for treating the nitrogen oxides contained in the gas passing through the wet processing unit.

The energy-saving dielectric barrier discharge plasma NOx reducing device may further include an outer casing, and the combustion portion, the wet processing portion, and the plasma oxidizing portion may be disposed in the outer casing .

The energy-saving dielectric barrier discharge plasma NOx reducing device may further include a main exhaust pipe for discharging the nitrogen oxides that have been treated by the plasma gas to the outside of the casing And, the plasma oxidation portion may be installed in the outer casing in connection with a connection passage connected to the main discharge pipe.

The plasma gas may be O ₃ gas generated by plasma discharge of the plasma oxidation portion.

The nitrogen oxide may be oxidized with O ₃ generated from the plasma oxidation portion to be converted into NO ₂ .

The discharged NO ₂ may be treated by a reduction reaction in a wet treatment process of a subsequent treatment process.

The plasma oxidation portion may include: an internal electrode which is in the shape of a rod; a dielectric substance surrounding the internal electrode; and an external electrode which is inserted and mounted in a coil form outside the dielectric material, and An alternating current power source for generating plasma may be applied to the inner electrode and the outer electrode.

The outer electrode surface can be coated by thermal spraying.

The outer surface of the dielectric and the outer surface of the outer electrode may form the same height.

The plasma oxidation portion may generate a plasma by using a Dielectric Barrier Discharge (DBD) plasma. [Effects of the Invention]

According to the present invention, the plasma NOx reducing apparatus is disposed in the casing together with the plasma oxidizing unit that processes the nitrogen oxides contained in the gas passing through the combustion unit and the wet processing unit, and is At the final discharge port of the plasma oxide abatement device, the form of nitrogen oxides is restricted by NO ₂ . Further, the dielectric barrier discharge plasma of the plasma oxidation portion formed by the coil type electrode is released without adding another device, and the nitrogen oxide is treated, whereby the energy supplied to the device can be saved.

Such a plasma oxidation portion includes an internal electrode, a dielectric surrounding the internal electrode, and an external electrode inserted and mounted in a coil form outside the dielectric. The external electrode surface is coated by thermal spraying, and the dielectric is external and external. The height of the outside of the electrode is formed in the same manner, so that dust can be prevented from adhering between the electrodes, and the problem of heat generation or arcing occurring in the gap between the dielectric and the electrode can be solved.

The technical effects of the present invention are not limited to the above, and those skilled in the art will understand other technical effects not mentioned by the following contents.

The present invention is capable of various modifications and various embodiments and However, it should be understood that the invention is not intended to be limited to the specific embodiments, but all modifications, equivalents, and alternatives are included in the spirit and scope of the invention. In the description of the present invention, the detailed description of the known art may obscure the gist of the present invention, and the detailed description thereof will be omitted.

In the following, the embodiments of the present invention are described in detail with reference to the accompanying drawings, and the same or corresponding components are given the same reference numerals, and the repeated description thereof will be omitted.

In general, nitrogen oxides occur due to stationary sources such as thermal power plants and mobile sources such as automobiles, and nitrogen oxides generated in semiconductor processes are safely processed before releasing various harmful gases into the atmosphere. The combustion process in the scrubber is generated by the reaction of high temperature nitrogen and oxygen during combustion.

NO is emitted to the atmosphere, and is oxidized into NO ₂ , NO ₃ , N ₂ O _{4 ,} etc. by O ₃ , O ₂ , water, etc. in the atmosphere, most of which are NO ₂ , dissolved in the air to form suspended particles. It becomes acidic rain or forms photochemical smog by the sun's rays. The harm is very wide, and it mainly causes respiratory diseases, irritates the eyes, causes visual disturbances, or corrodes metal materials, and has a great influence on plant growth.

As a process for treating harmful gases such as SiH ₄ and NF ₃ used in a semiconductor process, a heat treatment apparatus is used, and the types of such heat treatment apparatuses are fuel type, electric heater type, and plasma type. In such a manner, a large amount of nitrogen oxides (NO, NO ₂ ) and the like are generated by the reaction of O ₂ , H ₂ O, and the like with N ₂ during the treatment. In particular, in the case of the fuel type and the plasma type, the generation ratio of NO in the nitrogen oxides is high due to the high operating temperature.

As another source of production, NH ₃ and NF ₃ in gases used in semiconductor processes, nitrogen factor (N+) decomposed from NH ₃ and NF ₃ during decomposition or chemical reaction, and O ₂ or H ₂ O in the atmosphere The reaction produces a large amount of nitrogen oxides (most of the NO).

Fig. 1 is a view schematically showing a gas purifying system to which a plasma oxidation unit of the present invention is applied. Fig. 2 is a view showing a plasma nitrogen oxide abatement device to which a plasma oxidation unit of the present invention is applied.

1 and 2, a gas purifying system for treating exhaust gas containing nitrogen oxides includes a process of treating exhaust gas used in the main processing apparatus 100 to a plasma of a suitable plasma oxidizing section 330 by a vacuum pump 200. The nitrogen oxide abatement device 300 is introduced, and the introduced exhaust gas is treated by the plasma nitrogen oxide abatement device 300, and then discharged to the atmosphere by the fan 500 through a subsequent process, that is, the wet scrubber 400.

Here, the plasma nitrogen oxide abatement device 300 to which the plasma oxidation unit 330 according to the present invention is applied may be a point-of-use (POU) which is a heat treatment device which is generally used for treating exhaust gas. The conventional POU scrubber may include the combustion portion 310 and the wet processing portion 320. However, the plasma nitrogen oxide abatement device 300 according to the present invention may include the combustion portion 310 and the wet processing portion 320 in the outer casing 301. A plasma oxidation unit 330 for discharging a plasma gas for treating nitrogen oxides contained in the gas passing through the wet processing unit 320 is disposed.

As shown in FIG. 2, the combustion unit 310 of the plasma NOx reduction apparatus 300 according to the present invention has an inflow pipe 311 connected to the upper portion, and exhaust gas used in semiconductor manufacturing or the like flows into the casing 301 through the inflow pipe 311. The exhaust gas flowing into the casing 301 is subjected to combustion treatment by the combustion unit 310, and the exhaust gas subjected to the combustion treatment is discharged to the wet processing unit 320 by the discharge pipe 312 which is formed by gradually narrowing the cross-sectional area of the lower portion of the combustion portion 310.

The combustion unit 310 is configured to treat the exhaust gas by passing the exhaust gas of the harmful component between the flames, and in order to improve the combustion efficiency, O ₂ and CH ₄ are injected through the combustion gas injection port 313 disposed in the upper portion of the combustion portion 301.

However, during the treatment, a large amount of nitrogen oxides (NO, NO ₂ ) and the like are generated by the reaction of O ₂ , H ₂ O, etc. with N ₂ , in particular, during combustion, the operating temperature is high due to combustion. The ratio of NO in the nitrogen oxides increases.

The exhaust gas treated in the combustion unit 310 passes through the wet processing unit 320 in order to treat the deposition of secondary by-products, the dissolution of the water-soluble gas, and the cooling of the high-temperature combustion gas.

The wet processing unit 320 may include a first nozzle 321 , a second nozzle 322 , a wet water tank 323 , a flow rate adjusting device 324 , a pump 325 , and a water supply pipe 326 in order to receive the combustion process gas from the combustion unit 310 and perform wet processing. .

In the wet processing unit 320, the water-soluble exhaust gas and the cerium oxide (SiO ₂ ) powder generated in the combustion unit 310 are adsorbed and dissolved by the spray of the nozzles 321 and 322, and are stored in the wet water tank 323 from the combustion unit 310. The treatment materials discharged from the nozzles 321, 322 are discharged. Preferably, the first nozzle 321 and the second nozzle 322 are disposed on the upper portion of the wet water tank 323.

The first nozzle 321 and the second nozzle 322 may be connected to the water supply pipe 326 to receive the supplied water from the wet water tank 323, and a pump 325 may be installed between the wet water tank 323 and the water supply pipe 326 so as to be The water of the lower wet water tank 323 disposed in the outer casing 301 is supplied to the upper nozzles 321, 322. Further, between the wet water tank 323 and the pump 325, a flow rate adjusting device 324 for adjusting the amount of water sprayed by the nozzles 321 and 322 can be disposed.

As described above, in the wet processing unit 320, the wet water tank 323, the flow rate adjusting device 324, the pump 325, and the water supply pipe 326 cooperate to function as a water circulation means such that the fixed temperature water is in the wet processing portion 320. Continuous circulation within.

The rear end of the wet processing section 320 may further include a main discharge pipe 327 for discharging the treated exhaust gas to the outside of the casing 301 and discharging it to a device provided for the post-treatment process.

The main discharge pipe 327 is formed to extend from the inside to the outside of the casing 301, and a main discharge pipe 327 formed in the inside of the casing 301 in the main discharge pipe 327 can be connected to the plasma oxidation portion 330 by a connection passage 328 connected to the main discharge pipe 327. . That is, the plasma oxidation unit 330 according to the present invention is disposed in the outer casing 301 of the plasma nitrogen oxide emission reduction device 300 together with the combustion unit 310 and the wet processing unit 320 to form a single scrubber apparatus.

Further, an AC power supply unit 340 that applies an AC power source to the plasma oxidation unit 330 may be included in the lower portion of the plasma oxidation unit 330.

As described above, the plasma oxidation unit 330 is disposed at the last end of the plasma nitrogen oxide abatement device 300, that is, the main discharge pipe 327, and the nitrogen oxide finally discharged to the outside of the casing 301 by the main discharge pipe 327 can be finally discharged. The (NO) form is restricted by NO ₂ .

That is, O ₃ generated by the plasma oxidation unit 330 by plasma discharge is oxidized by nitrogen oxides (NO) generated during combustion in the combustion process to be converted into NO ₂ , and the changed NO _{2 is} discharged by the main discharge. The tube is discharged to the outside of the outer casing 301, and the NO ₂ discharged to the outside of the outer casing 301 can effectively treat the nitrogen oxides by a subsequent treatment process, that is, a reduction reaction of the wet processing.

3 is a cross-sectional view for explaining a plasma oxidation portion of the present invention; FIG. 4 is a cross-sectional view for explaining a plasma oxidation portion of the present invention; and FIG. 5 is an enlarged view for explaining a plasma oxidation portion of the present invention.

Referring to FIGS. 3 to 5, the plasma oxidation portion 330 of the present invention may include an internal electrode 331, a dielectric 332, and an external electrode 333.

The internal electrode 331 may have an inner hollow rod shape and be formed of an electrical conductor material so as to pass current. The discharge gas discharged for the plasma can be introduced through the reaction gas introduction port 336 at the lower portion of the internal electrode 331, and the plasma gas generated by the discharge of the plasma can be discharged through the plasma gas discharge port (337) at the upper portion of the internal electrode 331. Preferably, the discharge gas that is discharged into the plasma may be O ₂ , and the plasma gas generated by the plasma discharge may be O ₃ .

The dielectric 332 surrounds a predetermined distance from one end of the internal electrode 331 to the other end, and has the same rod shape as the internal electrode 331. The dielectric material 332 is disposed between the internal electrode 331 and the external electrode 333 for preventing an arc or the like generated between the electrodes due to a high voltage applied to the electrode.

The external electrode 333 can be formed into a coil-type electrode structure formed in a coil form and inserted and mounted on the outer surface of the dielectric material 332. The interval between the coils may be inserted at the same interval, and the cross-section of the coil is formed such that insertion of the coil into the dielectric 332 prevents separation between the grooves formed in the dielectric 332 and the coil, and The dielectric outer surface 334 and the outer electrode outer surface 335 are disposed in the same height, and may have a quadrangular shape. However, the form of the cross section of the coil can be variously changed depending on the user.

The AC power is applied to the internal electrode 331 and the external electrode 333 by the AC power supply unit 340 attached to the lower portion of the plasma oxidation unit 330. For example, a voltage may be applied to the internal electrode 331, the external electrode 333 may be grounded, or the polarity of the internal electrode 331 and the external electrode 333 may be replaced, and a high voltage may be applied to both electrodes according to the AC power supply portion 340. That is, in the internal electrode 331 and the external electrode 333, a high voltage (±) may be applied to one side, and the other side may be grounded, or when one of the internal electrode 331 and the external electrode 333 is applied with a + electrode, the other side is applied to the other side. An -electrode can be applied.

Further, the internal electrode 331 and the external electrode 333 are conductive materials containing a metal, and can be made of aluminum (Al), stainless steel (STS), titanium (Ti), nickel (Ni), chromium (Cr), or copper (corrosion-resistant). It is formed of any one of Cu), tungsten (W), and platinum (Pt) or an alloy thereof. Preferably, a Hastelloy alloy containing nickel as a main component having good workability and corrosion resistance can be applied.

The dielectric material 332 can be applied to any one of MgO, Al ₂ O ₃ , TiO ₂ , and SiO ₂ which is an oxide series ceramic having a high dielectric constant.

The electrode surface of the external electrode 333 formed in the form of a coil can be coated by thermal spraying and inserted into the outside of the dielectric 332. Further, the outer electrode outer surface 335 inserted into the dielectric material 332 is disposed at the same height as the dielectric outer surface 334.

As described above, the surface of the external electrode 333 is coated by thermal spraying, and the outer electrode outer surface 335 is disposed at the same height as the dielectric outer surface 334, thereby preventing dust from adhering between the electrodes, and can be solved. A problem of heat generation or arcing that occurs between the electrical mass 332 and the gap between the electrodes.

The plasma oxidation portion 330 can be embodied in various sizes according to the user. According to the preferred size of the internal electrode 331 of the present invention, the height from one end to the other end is 1.5 m, and the height from one end to the other end of the dielectric material 332 is 1.2. m. Further, the height of the outer electrode 333 in the form of a coil from the end from the coil to the other end of the coil end was 0.95 m. The thickness of the coil and dielectric 332, as shown in Figure 4, is 2 mm and 7 mm, respectively.

A Dielectric Barrier Discharge (DBD) plasma device using such a coil-type electrode structure, an electric field (Electric field) generated between two electrodes by applying a high frequency and a high voltage, additionally forming a Faraday The induced electric field of Faraday's Law of Induction maximizes the strength of the electric field, thereby significantly reducing power consumption and producing plasma of excellent characteristics.

As described above, according to the plasma oxidation portion 330 of the present invention, plasma is generated by the dielectric barrier discharge plasma, and O _{2 is} converted into O ₃ by the occurrence of such plasma, and is connected to the channel 328 by The main discharge pipe 327 discharges O ₃ . O ₃ discharged to the main discharge pipe 327 as described above oxidizes and ionizes the pollutants present inside the main discharge pipe 327. For example, NO and CO are oxidized to NO ₂ and CO ₂ , THC is oxidized and ionized, and HF or dust is coarsened.

Thereby, the oxidation of nitrogen oxides occurring during combustion in the plasma nitrogen oxide abatement device 300 and O ₃ generated by plasma discharge is performed by using the plasma generated from the plasma oxidation portion 330 according to the present invention. The treatment, whereby the form of nitrogen oxides that enables the final discharge port of the plasma nitrogen oxide abatement device 300 is restricted by NO ₂ .

The reaction mechanism in which the nitrogen oxides are oxidized by the above-described plasma oxidation portion 330 is as follows.

NO+O ₃ =>NO ₂ -+O ₂

The nitrogen oxides discharged by the plasma oxidation portion 330 and discharged by the main discharge pipe 327 with NO _{2 are} as shown in FIG. 1 and are borrowed in the subsequent treatment process, that is, the wet process of the wet scrubber 400. It is finally treated by the reduction reaction. Also, the wet scrubber 400 treats, in addition to nitrogen oxides, the absorption of THC ionized during the pretreatment, the reduction of residual O ₃ in the pretreatment process, HF, and the like.

The main reaction mechanism for the reduction treatment using the above-described wet scrubber 400 is as follows.

NO ₂ +(Na ₂ S+α)=N ₂ +Na ₂ SO ₄

As described above, by the oxidation process of the plasma oxidation section 330 and the reduction process of the wet scrubber 400, the nitrogen oxides generated during the combustion process in the plasma nitrogen oxide abatement device 300 can be efficiently processed. <Experimental Example 1>

In order to evaluate the nitrogen oxide treatment performance of the apparatus to which the plasma oxidation unit of the present invention is mounted, a conversion efficiency test in which nitrogen oxides are converted into NO ₂ by plasma discharge in the plasma oxidation unit is performed.

Tables 1 and 2 show test data for equipment equipped with the plasma oxidation unit of the present invention.

According to the conditions of Experimental Example 1, the plasma O ₃ concentration of the oxidation stage was set to 40 ppm, and the reference air volume was set to 2 CMM. When the empty column speed is 1 m/s and the residence time is 2 sec, the NO ₂ conversion efficiency of nitrogen oxides at the time of plasma OFF and plasma ON is as shown in Table 1. The experimental results of oxidation rate according to time are shown in Table 2. .

[Table 1]

[Table 2]

It can be seen from Tables 1 and 2 that the energy nitrogen oxides by application of plasma are efficiently converted to NO ₂ . <Experimental Example 2>

In Experimental Example 2, in order to evaluate the nitrogen oxide treatment performance of the apparatus to which the plasma oxidation portion of the present invention was mounted, it was carried out that after 10 minutes of continuous startup, the plasma discharge of nitrogen oxides by the plasma oxidation portion was converted into Conversion efficiency test of NO ₂ .

Tables 3 to 6 are test materials of Experimental Example 2 performed on the apparatus to which the plasma oxidation portion of the present invention was mounted.

According to the conditions of Experimental Example 2, the plasma O ₃ concentration of the oxidation stage was set to 40 ppm, the reference air volume was set to 2 CMM, and the superficial velocity was set to 1 m/s, and the residence time was changed, as in the case of Experimental Example 1. The test was carried out in the same manner as in Experimental Example 1.

<Table 3>

<Table 4>

<Table 5>

<Table 6>

As shown in Tables 3 to 6, it was confirmed from the measurement results of the residence time of 0.5 to 2 sec that the treatment efficiency was 95% or more.

As described above, the plasma nitrogen oxide abatement device 300 includes the combustion portion 310 for burning the exhaust gas, the wet processing portion 320 that receives the combustion-processed gas from the combustion portion 310, and performs the wet treatment, and the wet processing portion 320 for processing. The plasma oxidation unit 330 in which the nitrogen oxides contained in the gas of the treatment unit 320 are introduced into the plasma gas is disposed in the outer casing 301, whereby the nitrogen can be oxidized at the final discharge port of the plasma nitrogen oxide emission reduction device 300. The morphology of the matter is limited by NO ₂ . Further, the dielectric barrier discharge plasma of the plasma oxidation portion 330 formed of the coil type electrode is released without adding another device, and the nitrogen oxide is treated, whereby the energy supplied to the device can be saved.

In addition, the embodiments of the present invention disclosed in the specification and the drawings are merely intended to facilitate the understanding of the specific examples and are not intended to limit the scope of the invention. Those skilled in the art of the present invention will appreciate that other modifications based on the technical idea of the present invention can be implemented in addition to the embodiments provided herein.

300‧‧‧Electrode NOx reduction device
301‧‧‧ Shell
310‧‧ Burning Department
320‧‧‧ Wet treatment department
330‧‧‧The Plasma Oxidation Department
331‧‧‧Internal electrodes
332‧‧‧ dielectric
333‧‧‧External electrode
334‧‧‧ dielectric outer surface
335‧‧‧External electrode outer surface
336‧‧‧Reaction gas introduction port
337‧‧‧Electrical gas discharge
340‧‧‧AC Power Supply Department

Fig. 1 is a view schematically showing a gas purifying system to which a plasma oxidation unit of the present invention is applied. Fig. 2 is a view showing a plasma NOx reducing apparatus to which a plasma oxidation unit of the present invention is applied. Fig. 3 is a cross-sectional view for explaining a plasma oxidation portion of the present invention. Fig. 4 is a cross-sectional view for explaining a plasma oxidation portion of the present invention. Fig. 5 is an enlarged view for explaining a plasma oxidation unit of the present invention.

301‧‧‧ Shell

310‧‧ Burning Department

311‧‧‧Inflow pipe

312‧‧‧Draining tube

313‧‧‧ combustion gas injection port

320‧‧‧ Wet treatment department

321‧‧‧1st nozzle

322‧‧‧2nd nozzle

323‧‧‧wet sink

324‧‧‧Flow adjustment device

325‧‧‧ pump

326‧‧‧Water supply pipe

327‧‧‧Main discharge pipe

328‧‧‧Connected channel

330‧‧‧The Plasma Oxidation Department

340‧‧‧AC Power Supply Department

Claims (10)

An energy-saving dielectric barrier discharge plasma nitrogen oxide emission reduction device, as an energy-saving dielectric barrier discharge discharge (Dielectric Barrier Discharge) plasma nitrogen oxide emission reduction device, characterized in that it comprises: a combustion unit that performs a combustion treatment on the exhaust gas; a wet processing unit that receives a combustion-processed gas from the combustion unit to perform a wet treatment; and a plasma oxidation unit that inputs a gas for processing the wet treatment unit A plasma gas containing nitrogen oxides. The energy-saving dielectric barrier discharge plasma nitrogen oxide abatement device according to claim 1, further comprising an outer casing, and wherein the combustion portion, the wet processing portion, and the plasma oxidation The portion is disposed in the outer casing. The energy-saving dielectric barrier discharge plasma nitrogen oxide abatement device according to claim 2, further comprising a main discharge pipe for oxidizing the nitrogen which has been treated by the plasma gas The object is discharged to the outside of the outer casing, and the plasma oxidation portion is connected in the outer casing to a connection passage connected to the main discharge pipe. The energy-saving dielectric barrier discharge plasma nitrogen oxide abatement device according to claim 1, wherein the plasma gas is generated by plasma discharge of the plasma oxidation portion. ₃ gases. The energy-saving dielectric barrier discharge plasma nitrogen oxide abatement device according to claim 4, wherein the nitrogen oxides are oxidized and converted by O ₃ generated from the plasma oxidation portion. Is NO ₂ . The energy-saving dielectric barrier discharge plasma NOx reducing device according to claim 5, wherein the converted NO ₂ is processed by a reduction reaction in a subsequent processing process, that is, a wet processing process. . The energy-saving dielectric barrier discharge plasma NOx reduction device according to claim 1, wherein the plasma oxidation portion comprises: an internal electrode in a rod shape; a dielectric material surrounding the The internal electrode and the external electrode are inserted and mounted in a coil form outside the dielectric, and an AC power source for generating plasma is applied to the internal electrode and the external electrode. The energy-saving dielectric barrier discharge plasma NOx reduction device according to claim 7, wherein the external electrode surface is coated by thermal spraying. The energy-saving dielectric barrier discharge plasma NOx reducing device according to claim 7, wherein an outer surface of the dielectric forms the same height as an outer surface of the external electrode. The energy-saving dielectric barrier discharge plasma nitrogen oxide abatement device according to claim 1, wherein the plasma oxidation portion utilizes Dielectric Barrier Discharge (DBD) plasma And produce plasma.