TW201623926A - Adaptive lighting apparatus for optical inspection - Google Patents

Abstract

An adaptive lighting apparatus for optical inspection, which is combined to an image capture apparatus. Multiple of illumination ranges and illumination angles are provided for optical inspection by using movable and rotatable illumination module of illumination apparatus. A phenomenon in which a defect and a defect residual are separated can be avoided during optical inspection. Therefore, the accuracy of optical inspection can be enhanced.

Description

Adjustable lighting device for optical inspection

An illuminating device suitable for optical detection, in particular to a lighting device combined with an image capturing device, is designed to provide a variety of illumination ranges and illumination angles of the optical detection system for complex optical inspection work.

Please refer to "Figure 1", "Figure 1" is a three-dimensional combination diagram of the existing optical inspection machine.

A conventional optical inspection machine includes a detection platform 10, a carrier 20, an image capturing device 40, and a plurality of illumination devices 50.

The detecting platform 10 is configured to provide an object to be tested, the carrier 20 is disposed above the detecting platform 10, and the image capturing device 40 having the lens 41 and the plurality of lighting devices 50 are respectively fixed on the carrier 20 for waiting Optical detection of the object.

The optical detecting machine optically detects the transparent object to be tested 70. In order to obtain a high-contrast image, a dark field illumination method is generally adopted, that is, the illumination device 50 illuminates the object to be tested 70 at an oblique illumination angle, so that the transparent portion is strong. The reflected light is almost completely reflected off, and is not captured by the image capturing device 40, and a relatively black portion is present in the detected image captured by the image capturing device 40. The portion of the object to be tested 70 having a flaw is scattered, so that scattered light is captured by the image capturing device 40, and a relatively white portion is displayed in the detected image captured by the image capturing device 40. . In this way, a high-contrast detection image can be obtained, as shown in "Fig. 2A", and "2A" is an optical detection image showing the transparent object to be tested by the existing optical inspection machine.

In order to enhance the amount of scattered light of the crucible, a highly reflective layer may be disposed under the transparent object to be tested 70 (if the transparent object to be tested 70 itself has a reflective layer (for example, a mirror), it is not required to be under the transparent object 70 to be tested. Setting the high-reflection layer) The optical detection result is shown in "Fig. 2A". It can be clearly seen in "Phase 2A" that the optical detection result has two white blocks. In fact, one of the high grayscale values is white. The block is the image of the 瑕疵 71 on the object to be tested 70, the 瑕疵 71 on the object to be tested 70 is the target to be detected, and the other low gray value white block is the 瑕疵 71 on the object 70 to be tested. The residual image 72, that is, the 瑕疵71 and the 瑕疵 residual shadow 72 are separated on the existing optical inspection machine.

Since the above optical detection results show that there are two possibilities for the two white blocks, one is that there are two turns 71 for the object to be tested 70, and the other is that there is only one turn 71 for the object to be tested 70 and the other is瑕疵71's 瑕疵 residual image 72, which affects the accuracy of the above optical detection results.

If the optical inspection machine performs optical detection on the non-transparent object to be tested 70, different illumination modes can be used to obtain completely different detection images. Taking the photoelectric element as an example, as shown in "2B", "2B" shows an optical detection image of an existing optical inspection machine that detects an opaque object to be tested at a high illumination angle. In "B2B" The detection image obtained by illuminating the non-transparent object to be tested 70 at a high vertical illumination angle is the gold-plated layer in the brighter part of "B2B", and is illuminated by a high illumination angle close to vertical. The layer is almost reflected by the image capture device 40, and a high grayscale image (presenting near white) is present in the detected image. Conversely, a non-gold plated layer, such as a portion of a wafer substrate, exhibits a low grayscale image (represented in gray) in the detected image.

The same object to be tested 70 is optically detected by another illumination mode, for example, a low illumination angle (dark field mode), and a completely different captured image is obtained, as shown in "2C" and "2C". For the existing optical inspection machine to detect the optical detection image of the opaque object to be tested at a low illumination angle, the gold plating layer is illuminated by the low illumination angle, so that the reflected light on the gold plating layer is also reflected at the same low angle, which makes the reflected light None of the images are captured by the image capture device 40. So the original bright center circle thus turns into the opposite black. It can be seen that using different illumination methods will change the captured image of the same object to be tested 70, which is very useful information for optical detection, and we can select different illumination methods according to our needs. However, the existing optical inspection machine must replace the different illumination devices 50, so that it is possible to make different detection images as described above.

In summary, the existing optical inspection machine can not only improve the problem of separation of the residual image, but also can provide multiple illumination angles and illumination ranges to obtain different detection images. Therefore, it is necessary to propose improved technical means to solve this problem.

The invention discloses an adjustable illuminating device suitable for optical detection, which can solve the problem of 瑕疵 residual image separation, can also provide free adjustment of the segmentless illumination angle and the illumination range, and can be easily combined with the image capturing device. In the above, the distance between the lighting device and the object to be tested is shortened to obtain the maximum lighting benefit, and the total power consumed by the light source is saved, wherein:

The first embodiment of the invention relates to an adjustable illumination device suitable for optical detection, comprising: a detection platform, a carrier, an image capturing device and a lighting device, the lighting device further comprising: a body, at least one moving component and at least A lighting module.

The detecting platform is configured to provide an object to be tested; the carrier is disposed above the detecting platform; the image capturing device is mounted on the carrier, and the lighting device is combined with the image capturing device.

The main body of the illuminating device has a central hole design, and the main body of the illuminating device is fixed to the image capturing device through the central hole; the moving parts of the illuminating device are respectively disposed on the main body of the illuminating device, and the moving part of the illuminating device is opposite to the main body of the illuminating device The horizontal movement is performed; the illumination modules of the illumination device are respectively pivoted on the moving parts of the illumination device, and the illumination module of the illumination device is free to rotate relative to the moving parts of the illumination device.

A second embodiment of the present invention is directed to: a detection platform, a carrier, an image capturing device, and a lighting device, the lighting device further comprising: a telescopic sleeve, a main body, and at least one movement A component and at least one lighting module.

The detecting platform is configured to provide an object to be tested; the carrier is disposed above the detecting platform; the image capturing device is mounted on the carrier, and the lighting device is combined with the image capturing device.

The telescopic kit of the illuminating device is composed of an inner kit and an outer kit which have a hollow shape, and one end of the telescopic sleeve of the illuminating device is fixed on the image capturing device, and the telescopic sleeve of the illuminating device provides the illuminating device for vertical movement; the main body of the illuminating device has a center a hole design, the center hole of the main body is fixed to the other end of the telescopic sleeve of the illumination device; the moving parts of the illumination device are respectively disposed on the main body of the illumination device, and the moving parts of the illumination device are horizontally moved relative to the main body of the illumination device; The lighting modules are respectively pivoted on the moving parts of the lighting device, and the lighting modules of the lighting device are free to rotate relative to the moving parts of the lighting device.

A third embodiment of the illuminating device suitable for optical detection disclosed in the present invention comprises: a main body, at least one moving part, and at least one lighting module.

The main body of the illuminating device has a central hole design, and the main body of the illuminating device is fixed to the external image capturing device through the central hole; the moving parts of the illuminating device are respectively disposed on the main body of the illuminating device, and the moving part of the illuminating device is opposite to the illuminating device The main body is moved; the lighting modules of the lighting device are respectively pivoted on the moving parts of the lighting device, and the lighting modules of the lighting device are freely rotated relative to the moving parts of the lighting device.

The device disclosed in the present invention is different from the prior art in that the present invention provides a variety of illumination ranges and illumination by combining the illumination device with the image capture device and utilizing the movable and rotating illumination module in the illumination device. The angle of the object to be tested for optical detection, in addition to avoiding the phenomenon of detecting the separation of 瑕疵 and 瑕疵 images in the prior art, and also providing optical detection of various illumination angles and illumination ranges, thereby producing different Detecting images can greatly improve the accuracy of optical detection or optical identification.

Through the above technical means, the present invention can achieve the technical effect of effectively improving the accuracy of optical detection.

The embodiments of the present invention will be described in detail below with reference to the drawings and embodiments, so that the application of the technical means to solve the technical problems and achieve the technical effects can be fully understood and implemented.

In the following, the first embodiment of the present invention is described as an adjustable illumination device suitable for optical detection, and please refer to "Fig. 3" and "Fig. 4", and "Fig. 3" A perspective view of an adjustable illumination device suitable for optical detection according to a first embodiment of the present invention; and FIG. 4 is a view showing illumination of an adjustable illumination device suitable for optical detection according to a first embodiment of the present invention; An exploded view of the device.

The illuminating device for the optical detection of the first embodiment of the present invention includes: a detection platform 10, a carrier 20, an image capturing device 40, and a lighting device 50. The lighting device 50 further includes: a main body 51. At least one moving component 52 and at least one lighting module 53.

The detecting platform 10 is configured to provide an object to be tested, and the detecting platform 10 can drive the object to be tested to move horizontally, or the detecting platform 10 is fixed. The carrier 20 is disposed above the detecting platform 10, and the image capturing device 40 is mounted. It is disposed on the carrier 20, and the carrier 20 can also drive the image capturing device 40 mounted on the carrier 20 to move horizontally, or the carrier 20 can be fixed.

The main body 51 of the illuminating device 50 has a central hole 511. The central hole 511 can be a circular hole, a square hole, a rectangular hole, a polygonal hole, etc., which are merely exemplified herein, and are not limited to the application scope of the present invention. The main body 51 of the device 50 can be fixed to the device of the image capturing device 40 or the lens 41 of the image capturing device 40 by means of a screwing manner, a snapping manner or a fitting manner, which is merely an example, and Without limiting the scope of application of the present invention, when the main body 51 of the illumination device 50 is fixed to the lens 41 of the image capturing device 40, the lens 41 of the image capturing device 40 is located at the center hole 511 of the main body 51.

At least one moving part 52 of the illuminating device 50 is respectively disposed at both ends of the main body 51 of the illuminating device 50, and the moving part 52 of the illuminating device 50 is horizontally movable with respect to the main body 51 of the illuminating device 50, notably, In the drawings, the two moving members 52 of the illuminating device 50 are respectively disposed on the main body 51 of the illuminating device 50, so that the moving member 52 of the illuminating device 50 can be provided relative to the illuminating device 50. The main body 51 is horizontally moved, and is merely illustrative here, and the present invention is not limited thereto.

The illumination module 53 of the illumination device 50 is respectively pivotally mounted on the moving component 52 of the illumination device 50, and the illumination module 53 of the illumination device 50 is rotatable relative to the moving component 52 of the illumination device 50, thereby adjusting the illumination mode of the illumination device 50. The angle of illumination of group 53 is notable. The illumination module 53 of the illumination device 50 includes a plurality of light-emitting diodes (LEDs) to provide illumination of the object to be tested, and the illumination mode of the illumination device 50. The group 53 can be rotated 360 degrees with respect to the moving part 52 of the illuminating device 50, and an angular scale is provided on the moving part 52 of the illuminating device 50 to provide a reference angle of rotation of the lighting module 53 of the illuminating device 50 to know The angle of adjustment of the illumination module 53 of the illumination device 50 further estimates the illumination angle of the illumination module 53 of the illumination device 50.

Next, please refer to FIG. 5, which is a perspective exploded view of the illuminating device, the shielding sheet and the outer casing of the illuminating device suitable for optical detection according to the first embodiment of the present invention.

The illuminating device 50 further includes a shielding piece 54. The shielding piece 54 of the illuminating device 50 can be screwed, snapped or fitted (herein for illustrative purposes only, and the invention is not limited thereto). The application area is disposed on the main body 51 of the illuminating device 50, and the shielding piece 54 of the illuminating device 50 provides a partial occlusion of the central hole 511 of the main body 51, and the shielding piece 54 of the illuminating device 50 provides a small portion of the central hole 511 of the main body 51. When the shielding piece 54 of the illuminating device 50 can provide a large amount of light entering, the effect of eliminating stray light is small, and when the shielding piece 54 of the illuminating device 50 provides the central hole 511 of the main body 51 mostly blocked, the illuminating device 50 The shielding piece 54 provides a small amount of light entering, but the effect of eliminating stray light is large, that is, the shielding piece 54 of the illumination device 50 is for providing control of the amount of light entering and the stray light can be eliminated, so that the shielding piece 54 of the illumination device 50 is Need to be made of opaque material.

In addition, the main body 51 of the illuminating device 50, the moving part 52 of the illuminating device 50, and the lighting module 53 of the illuminating device 50 can be covered by the outer casing 55 further included in the illuminating device 50 to provide the main body of the illuminating device 50. 51. Protection of the moving member 52 of the illuminating device 50 and the lighting module 53 of the illuminating device 50.

The main body 51 of the illuminating device 50, the moving member 52 of the illuminating device 50, the lighting module 53 of the illuminating device 50, the shielding piece 54 of the illuminating device 50, and the outer casing 55 of the illuminating device 50 can be combined to form the illuminating device 50. Please refer to FIG. 6 and FIG. 6 is a perspective view of the illumination device, the shielding sheet and the outer casing of the adjustable illumination device suitable for optical detection according to the first embodiment of the present invention.

Next, please refer to "7A" to "7C", and "7A" to "7C" are diagrams showing the illuminating device suitable for optical detection according to the first embodiment of the present invention. A schematic diagram of the illumination angle and illumination range of different moving positions of the moving parts and the different rotation angles of the lighting module.

In the seventh embodiment, the illumination module 53 of the illumination device 50 is adjusted to illuminate the object to be tested 70 at a vertical angle, and the illumination device 50 is adjusted through the moving member 52 of the illumination device 50 according to the illumination angle of the illumination module 53 of the illumination device 50. The horizontal position of the illumination module 53 , that is, the rotation angle of the illumination module 53 of the illumination device 50 is 0 degrees, so that the illumination module 53 of the illumination device 50 has an illumination angle of a vertical angle and is transmitted through the illumination device 50 . The moving part 52 adjusts the horizontal position of the lighting module 53 of the lighting device 50 to be the position closest to the object 70 to be tested.

The "figure 7B" is to adjust the illumination module 50 of the illumination device 50 to illuminate the object to be tested 70 at a high angle, and adjust the illumination device 50 through the moving member 52 of the illumination device 50 according to the illumination angle of the illumination module 53 of the illumination device 50. The horizontal position of the illumination module 53 , that is, the rotation angle of the illumination module 53 of the illumination device 50 is lower than 45 degrees, so that the illumination module 53 of the illumination device 50 illuminates the illumination diagram with an angle higher than 45 degrees and transmits The moving part 52 of the illuminating device 50 adjusts the horizontal position of the lighting module 53 of the illuminating device 50 to be at an appropriate position away from the object 70 to be tested.

The "figure 7C" is to adjust the illumination module 50 of the illumination device 50 to illuminate the object to be tested 70 at a low angle, and adjust the illumination device 50 through the moving member 52 of the illumination device 50 according to the illumination angle of the illumination module 53 of the illumination device 50. The horizontal position of the illumination module 53 , that is, the rotation angle of the illumination module 53 of the illumination device 50 is higher than 45 degrees, so that the illumination module 53 of the illumination device 50 illuminates the illumination diagram with an angle lower than 45 degrees and transmits The moving part 52 of the illuminating device 50 adjusts the horizontal position of the lighting module 53 of the illuminating device 50 to be the position farthest from the object 70 to be tested.

It can be clearly seen from "7A" to "7C" that different illumination positions of the moving member 52 and different rotation angles of the illumination module 53 can provide different illumination angles and different illumination ranges of the object to be tested 70, and The above is merely illustrative and is not intended to limit the scope of application of the present invention.

Next, please refer to "8A" and "8B", and "8A" shows the actual optical detection image of the illuminating device suitable for optical detection according to the present invention; "8B" is shown as The invention is applicable to the actual optical detection image of the illuminating device for optical detection through the image processing diagram.

The object to be tested 70 is optically detected by the illuminating device suitable for optical detection according to the first embodiment of the present invention. The optical detection result is as shown in FIG. 8A, and it can be clearly seen in FIG. 8A. The 瑕疵71 on the transparent object 70 to be tested and the portion of the ruthenium image 72 are not separated as in the prior art, and the optical detection result of the object to be tested 70 is image processed as shown in FIG. 8B. The 瑕疵 71 on the object to be tested 70 can be correctly found to avoid the interference of the ruthenium image 72 and affect the correctness of the optical detection result.

Next, the illuminating device suitable for optical detection according to the second embodiment of the present invention will be described. Please refer to "Fig. 9" and "Fig. 10", and "Fig. 9" is shown as A perspective view of an adjustable illumination device suitable for optical detection according to a second embodiment of the present invention; FIG. 10 is a perspective view of a lighting device suitable for optical detection of an adjustable illumination device according to a second embodiment of the present invention; Exploded map.

The adjustable illumination device for optical detection according to the second embodiment of the present invention includes: a detection platform 10, a carrier 20, an image capturing device 40, and a lighting device 50. The lighting device 50 further includes: a telescopic package 56. The main body 51, at least one moving part 52, and at least one lighting module 53.

The detecting platform 10 is configured to provide an object to be tested, and the detecting platform 10 can drive the object to be tested to move horizontally, or the detecting platform 10 is fixed. The carrier 20 is disposed above the detecting platform 10, and the image capturing device 40 is mounted. It is disposed on the carrier 20, and the carrier 20 can also drive the image capturing device 40 mounted on the carrier 20 to move horizontally, or the carrier 20 can be fixed.

The telescopic sleeve 56 of the illuminating device 50 may be composed of an inner sleeve 56A and an outer sleeve 56B that exhibit a hollow cylinder, or may be formed in a manner similar to a traditional camera bellows. (For the conventional camera bellows, please refer to the prior art description, and no longer carry out here. As described above, the end of the telescopic sleeve 56 of the illuminating device 50 (in the drawing, the inner kit 56A, and actually the outer kit 56B) can be screwed, snapped or fitted (here only For example, it is not limited to the application of the present invention, and is fixed on the device of the image capturing device 40 or the lens 41 of the image capturing device 40, which is merely illustrative and not limited thereto. The application range of the present invention, and the inner sleeve 56A and the outer sleeve 56B of the telescopic sleeve 56 of the illuminating device 50 are used to provide the illuminating device 50 for vertical movement, and the second embodiment differs from the first embodiment in that the illuminating device 50 is transmitted. The telescopic sleeve 56 adds a degree of freedom in vertical movement to adjust the vertical distance of the illumination device 50 from the object 70 to be tested and to change the illumination range and illumination level.

The main body 51 of the illuminating device 50 has a central hole 511. The central hole 511 can be a circular hole, a square hole, a rectangular hole, a polygonal hole, etc., which are merely exemplified herein, and are not limited to the application scope of the present invention. The main body 51 of the device 50 can be fixed to the illumination device 50 through a screwing manner, a snapping manner, a fitting manner, or a V-groove design (herein, by way of example only, and not limiting the scope of application of the present invention). The other end of the telescoping kit 56 (in the drawing, the outer kit 56B, but in fact, the inner kit 56A).

At least one moving part 52 of the illuminating device 50 is respectively disposed at both ends of the main body 51 of the illuminating device 50, and the moving part 52 of the illuminating device 50 is horizontally movable with respect to the main body 51 of the illuminating device 50, notably, In the drawings, the two moving members 52 of the illuminating device 50 are respectively disposed on the main body 51 of the illuminating device 50, so that the moving member 52 of the illuminating device 50 can be provided relative to the illuminating device 50. The main body 51 is horizontally moved, and is merely illustrative here, and the present invention is not limited thereto.

The illumination module 53 of the illumination device 50 is respectively pivotally mounted on the moving component 52 of the illumination device 50, and the illumination module 53 of the illumination device 50 is rotatable relative to the moving component 52 of the illumination device 50, thereby adjusting the illumination mode of the illumination device 50. The angle of illumination of group 53 is notable. The illumination module 53 of the illumination device 50 includes a plurality of light-emitting diodes (LEDs) to provide illumination of the object to be tested, and the illumination mode of the illumination device 50. The group 53 can be rotated 360 degrees with respect to the moving part 52 of the illuminating device 50, and an angular scale is provided on the moving part 52 of the illuminating device 50 to provide a reference angle of rotation of the lighting module 53 of the illuminating device 50 to know The angle of adjustment of the illumination module 53 of the illumination device 50 further estimates the illumination angle of the illumination module 53 of the illumination device 50.

Next, please refer to FIG. 11 and FIG. 11 is an exploded perspective view of the illuminating device, the shielding sheet and the outer casing of the illuminating device suitable for optical detection according to the second embodiment of the present invention.

The illuminating device 50 further includes a shielding piece 54. The shielding piece 54 of the illuminating device 50 can be screwed, snapped or fitted (herein for illustrative purposes only, and the invention is not limited thereto). The application area is disposed on the main body 51 of the illuminating device 50, and the shielding piece 54 of the illuminating device 50 provides a partial occlusion of the central hole 511 of the main body 51, and the shielding piece 54 of the illuminating device 50 provides a small portion of the central hole 511 of the main body 51. When the shielding piece 54 of the illuminating device 50 can provide a large amount of light entering, the effect of eliminating stray light is small, and when the shielding piece 54 of the illuminating device 50 provides the central hole 511 of the main body 51 mostly blocked, the illuminating device 50 The shielding piece 54 provides a small amount of light entering, but the effect of eliminating stray light is large, that is, the shielding piece 54 of the illumination device 50 is for providing control of the amount of light entering and the stray light can be eliminated, so that the shielding piece 54 of the illumination device 50 is Need to be made of opaque material.

In addition, the main body 51 of the illuminating device 50, the moving part 52 of the illuminating device 50, and the lighting module 53 of the illuminating device 50 can be covered by the outer casing 55 further included in the illuminating device 50 to provide the main body of the illuminating device 50. 51. Protection of the moving member 52 of the illuminating device 50 and the lighting module 53 of the illuminating device 50.

The main body 51 of the illuminating device 50, the moving member 52 of the illuminating device 50, the lighting module 53 of the illuminating device 50, the shielding piece 54 of the illuminating device 50, and the outer casing 55 of the illuminating device 50 can be combined to form the illuminating device 50. Please refer to FIG. 12, and FIG. 12 is a perspective view of the illumination device, the shielding sheet and the outer casing of the adjustable illumination device suitable for optical detection according to the second embodiment of the present invention.

Please refer to "13A" to "13D", and "13A" to "13D" are diagrams showing an adjustable illumination device suitable for optical detection according to a second embodiment of the present invention. Schematic diagram of the illumination angle and illumination range of different movement positions, different moving positions of moving parts and different rotation angles of the lighting module.

The "After 13A" is that the inner sleeve 56A of the telescopic kit 56 is completely incorporated into the outer sleeve 56B, and the illumination module 53 of the adjustment lighting device 50 illuminates the object to be tested 70 at a vertical angle, and according to the illumination mode of the illumination device 50. The group 53 illumination angle adjusts the horizontal position of the illumination module 53 of the illumination device 50 through the moving part 52 of the illumination device 50, that is, the rotation angle of the illumination module 53 of the illumination device 50 is 0 degree, thereby causing the illumination mode of the illumination device 50. The group 53 illumination angle is a vertical angle illumination diagram, and the horizontal position of the illumination module 53 of the illumination device 50 is adjusted to be the position closest to the object to be tested 70 by the moving part 52 of the illumination device 50.

In the "Fig. 13B", the inner sleeve 56A of the telescopic kit 56 is half incorporated into the outer sleeve 56B, and the illumination module 53 of the adjustment lighting device 50 is illuminated at a high angle to illuminate the object to be tested 70, and according to the illumination mode of the illumination device 50. The group 53 illumination angle adjusts the horizontal position of the illumination module 53 of the illumination device 50 through the moving part 52 of the illumination device 50, that is, the rotation angle of the illumination module 53 of the illumination device 50 is lower than 45 degrees, thereby making the illumination device 50 The illumination module 53 illuminates the illumination diagram with the angle higher than 45 degrees, and adjusts the horizontal position of the illumination module 53 of the illumination device 50 through the moving component 52 of the illumination device 50 to be at an appropriate position away from the object to be tested 70.

The "figure 13C" is that the inner sleeve 56A and the outer sleeve 56B of the telescopic kit 56 are completely extended, and the illumination module 53 of the illumination device 50 is adjusted to illuminate the object to be tested 70 at a low angle, and the illumination module 53 according to the illumination device 50. The illumination angle is adjusted by the moving part 52 of the illumination device 50 to adjust the horizontal position of the illumination module 53 of the illumination device 50, that is, the rotation angle of the illumination module 53 of the illumination device 50 is higher than 45 degrees, thereby causing the illumination mode of the illumination device 50. The group 53 illuminates the illumination diagram with an angle of less than 45 degrees, and adjusts the horizontal position of the illumination module 53 of the illumination device 50 through the moving part 52 of the illumination device 50 to the position farthest from the object to be tested 70.

The "figure 13D" is that the inner sleeve 56A and the outer sleeve 56B of the telescopic sleeve 56 are fully extended, and the illumination module 53 of the adjustment illumination device 50 is irradiated with the illumination angle of the illumination device 50 to illuminate the object to be tested 70 at a horizontal angle, and is illuminated according to the illumination module 53 of the illumination device 50. The illumination angle is adjusted by the moving part 52 of the illumination device 50 to adjust the horizontal position of the illumination module 53 of the illumination device 50, that is, the rotation angle of the illumination module 53 of the illumination device 50 is 90 degrees, whereby the illumination module 53 of the illumination device 50 is caused. The illumination angle is a horizontal angle illumination diagram, and the horizontal position of the illumination module 53 of the illumination device 50 is adjusted to be the position farthest from the object to be tested 70 by the moving part 52 of the illumination device 50.

It can be clearly seen from "Fig. 13A" to "Fig. 13D" that the different moving positions stretched by the telescopic sleeve 56, the different moving positions of the moving member 52, and the different rotational angles of the lighting module 53 can present the object to be tested 70. Different illumination angles and different illumination ranges, and the above are merely illustrative and are not intended to limit the scope of application of the present invention.

The results of "8A" and "8B" can be easily achieved by performing actual optical detection using the illuminating device suitable for optical detection according to the second embodiment of the present invention.

Next, please refer to FIG. 14 and FIG. 15 and FIG. 14 is an exploded perspective view of a lighting device suitable for optical detection of an adjustable illumination device according to a third embodiment of the present invention; Figure 15 is a perspective assembled view of an illumination device suitable for optical detection of an adjustable illumination device according to a third embodiment of the present invention.

The third embodiment of the present invention is applicable to an adaptive illumination device for optical detection. The illumination device 50 includes a main body 51, at least one moving component 52, and at least one illumination module 53.

The main body 51 of the illuminating device 50 has a central hole 511. The central hole 511 can be a circular hole, a square hole, a rectangular hole, a polygonal hole, etc., which are merely exemplified herein, and are not limited to the application scope of the present invention. The main body 51 of the device 50 can be fixed to the external image capturing device or the external image capturing device through a screwing manner, a snapping manner or a fitting manner, which is merely exemplified herein. Without limiting the scope of application of the present invention, when the main body 51 of the illumination device 50 is fixed to the lens of the external image capturing device, the lens of the image capturing device is located at the center hole 511 of the main body 51.

At least one moving part 52 of the illuminating device 50 is respectively disposed at both ends of the main body 51 of the illuminating device 50, and the moving part 52 of the illuminating device 50 is horizontally movable with respect to the main body 51 of the illuminating device 50, notably, In the drawings, the two moving members 52 of the illuminating device 50 are respectively disposed on the main body 51 of the illuminating device 50, so that the moving member 52 of the illuminating device 50 can be provided relative to the illuminating device 50. The main body 51 is horizontally moved, and is merely illustrative here, and the present invention is not limited thereto.

The illumination module 53 of the illumination device 50 is respectively pivotally mounted on the moving component 52 of the illumination device 50, and the illumination module 53 of the illumination device 50 is rotatable relative to the moving component 52 of the illumination device 50, thereby adjusting the illumination mode of the illumination device 50. Group 53 illumination angle, it is worth noting that the illumination module 53 of the illumination device 50 comprises a plurality of Light-Emitting Diodes (LEDs) to provide illumination of the object to be tested, and the illumination module of the illumination device 50 53 can be rotated 360 degrees with respect to the moving part 52 of the illuminating device 50, and an angular scale is provided on the moving part 52 of the illuminating device 50 to provide a rotation angle reference of the lighting module 53 of the illuminating device 50 to know the lighting. The angle of adjustment of the illumination module 53 of the device 50 further estimates the illumination angle of the illumination module 53 of the illumination device 50.

Next, please refer to FIG. 16 and FIG. 16 is a perspective exploded view of the illuminating device, the shielding sheet and the outer casing of the illuminating device suitable for optical detection according to the third embodiment of the present invention.

The illuminating device 50 further includes a shielding piece 54. The shielding piece 54 of the illuminating device 50 can be screwed, snapped or fitted (herein for illustrative purposes only, and the invention is not limited thereto). The application area is disposed on the main body 51 of the illuminating device 50, and the shielding piece 54 of the illuminating device 50 provides a partial occlusion of the central hole 511 of the main body 51, and the shielding piece 54 of the illuminating device 50 provides a small portion of the central hole 511 of the main body 51. When the shielding piece 54 of the illuminating device 50 can provide a large amount of light entering, the effect of eliminating stray light is small, and when the shielding piece 54 of the illuminating device 50 provides the central hole 511 of the main body 51 mostly blocked, the illuminating device 50 The shielding piece 54 provides a small amount of light entering, but the effect of eliminating stray light is large, that is, the shielding piece 54 of the illumination device 50 is for providing control of the amount of light entering and the stray light can be eliminated, so that the shielding piece 54 of the illumination device 50 is Need to be made of opaque material.

In addition, the main body 51 of the illuminating device 50, the moving part 52 of the illuminating device 50, and the lighting module 53 of the illuminating device 50 can be covered by the outer casing 55 further included in the illuminating device 50 to provide the main body of the illuminating device 50. 51. Protection of the moving member 52 of the illuminating device 50 and the lighting module 53 of the illuminating device 50.

The main body 51 of the illuminating device 50, the moving member 52 of the illuminating device 50, the lighting module 53 of the illuminating device 50, the shielding piece 54 of the illuminating device 50, and the outer casing 55 of the illuminating device 50 can be combined to form the illuminating device 50. Please refer to FIG. 17 and FIG. 17 is a perspective view of the illumination device, the shielding sheet and the outer casing of the adjustable illumination device suitable for optical detection according to the third embodiment of the present invention.

In summary, it can be seen that the difference between the present invention and the prior art is that the present invention provides a variety of illumination ranges and illumination by combining the illumination device with the image capture device and utilizing the movable and rotating illumination modules in the illumination device. The angle of the object to be tested for optical detection, in addition to avoiding the phenomenon of detecting the separation of the 瑕疵 and 瑕疵 images in the prior art, in addition, can also provide optical detection of a variety of different illumination angles and illumination range selection, resulting in different Detecting images can greatly improve the accuracy of optical detection or optical identification.

With this technical means, the existing optical inspection machine can not only improve the problem of separation of the residual image, but also can provide various illumination angles and illumination ranges to obtain different detection images, thereby achieving effective improvement of optical detection. The technical efficiency of the correct rate.

While the embodiments of the present invention have been described above, the above description is not intended to limit the scope of the invention. Any changes in the form and details of the embodiments may be made without departing from the spirit and scope of the invention. The scope of the invention is to be determined by the scope of the appended claims.

10‧‧‧Testing platform
20‧‧‧ Carrier
40‧‧‧Image capture device
41‧‧‧ lens
50‧‧‧Lighting device
51‧‧‧ Subject
511‧‧‧ center hole
512‧‧‧slot group
52‧‧‧moving parts
53‧‧‧Lighting module
54‧‧‧ occlusion piece
55‧‧‧Shell
56‧‧‧Flexing kit
70‧‧‧Articles to be tested
71‧‧‧瑕疵
72‧‧‧瑕疵 residual image θ‧‧‧ illumination angle

FIG. 1 is a perspective assembled view of a conventional optical inspection machine. Figure 2A shows an optical detection image of a transparent object to be tested detected by an existing optical inspection machine. Fig. 2B shows an optical detection image of an opaque object to be tested detected by a conventional optical inspection machine at a high illumination angle. Figure 2C shows an optical detection image of an opaque object to be tested detected by a conventional optical inspection machine at a low illumination angle. FIG. 3 is a perspective assembled view of an adjustable illumination device suitable for optical detection according to a first embodiment of the present invention. 4 is a perspective exploded view of a lighting device suitable for optical detection of an adjustable illumination device according to a first embodiment of the present invention. FIG. 5 is a perspective exploded view of the illumination device, the shielding sheet and the outer casing of the adjustable illumination device suitable for optical detection according to the first embodiment of the present invention. 6 is a perspective view of a lighting device, a shielding piece and an outer casing of an adjustable lighting device suitable for optical detection according to a first embodiment of the present invention. 7A to 7C are schematic plan views showing illumination angles and illumination ranges of different moving positions of the moving parts of the adjustable illumination device suitable for optical detection according to the first embodiment of the present invention and different rotation angles of the illumination module. Fig. 8A is a view showing an actual optical detection image of an adjustable illumination device suitable for optical detection according to the present invention. FIG. 8B is a view showing the image processing of the actual optical detection image of the illuminating device suitable for optical detection according to the present invention. FIG. 9 is a perspective assembled view of an adjustable illumination device suitable for optical detection according to a second embodiment of the present invention. FIG. 10 is a perspective exploded view of a lighting device suitable for optical detection of an adjustable illumination device according to a second embodiment of the present invention. 11 is a perspective exploded view of a lighting device, a shielding sheet and an outer casing of an adjustable lighting device suitable for optical detection according to a second embodiment of the present invention. 12 is a perspective view of a lighting device, a shielding piece and an outer casing of an adjustable lighting device suitable for optical detection according to a second embodiment of the present invention. 13A to 13D are schematic plan views showing illumination angles and illumination ranges of different moving positions of the moving parts of the adjustable illumination device suitable for optical detection according to the second embodiment of the present invention and different rotation angles of the illumination module. Figure 14 is a perspective exploded view of a lighting device suitable for optical detection of an adjustable illumination device according to a third embodiment of the present invention. Figure 15 is a perspective view of a lighting assembly of an adjustable lighting device suitable for optical detection according to a third embodiment of the present invention. Figure 16 is a perspective exploded view of the illumination device, the shielding sheet and the outer casing of the adjustable illumination device suitable for optical detection according to the third embodiment of the present invention. Figure 17 is a perspective view showing the illuminating device, the shielding piece and the outer casing of the illuminating device suitable for optical detection according to the third embodiment of the present invention.

10‧‧‧Testing platform

20‧‧‧ Carrier

40‧‧‧Image capture device

41‧‧‧ lens

50‧‧‧Lighting device

Claims (16)

An illuminating device suitable for optical detection, comprising: a detecting platform for providing an object to be tested; a carrier, the carrier is disposed above the detecting platform; And the image capturing device is mounted on the carrier; and an illumination device is combined with the image capturing device, the lighting device further comprises: a main body, the main body has a central hole The main body may be fixed to the image capturing device; at least one moving component, the moving component is respectively disposed on the main body, and the moving component is horizontally moved relative to the main body; and at least one illumination The module is pivoted on the moving component, and the lighting module is free to rotate relative to the moving component. An illuminating device suitable for optical detection according to claim 1, wherein the moving members are respectively disposed on a chute group of the main body to move the moving member relative to the main body. The illuminating device for optical detection according to the first aspect of the invention, wherein the lighting module comprises a plurality of light-emitting diodes (LEDs) to provide the object to be tested. illumination. The illuminating device for optical detection according to claim 1, wherein the moving component is provided with an angular scale to provide a reference of the rotation angle of the lighting module. An illuminating device suitable for optical detection according to claim 1, wherein the illuminating device further comprises a shielding piece, the shielding piece being disposed on the main body to provide stray light shielding. The illuminating device for optical detection according to claim 1, wherein the main body is fixed to the image capturing device through the center hole. An illuminating device suitable for optical detection, comprising: a detecting platform for providing an object to be tested; a carrier, the carrier is disposed above the detecting platform; The image capturing device is mounted on the carrier; and a lighting device is combined with the image capturing device, the lighting device further includes: a telescopic package, the telescopic package is presented An inner sleeve of a hollow shape and an outer sleeve, the telescopic sleeve being fixed at one end to the image capturing device, the telescopic sleeve providing the lighting device for vertical movement; and a body having a center a hole, the center hole may be fixed to the other end of the telescopic sleeve; at least one moving part, the moving part is respectively disposed on the main body, and the moving part is horizontally moved relative to the main body; and at least a lighting module, the lighting module is respectively pivoted on the moving component, and the lighting module is free to rotate relative to the moving component. An illuminating device suitable for optical detection according to claim 7, wherein the moving parts are a set of chutes respectively disposed on the main body to move the moving part relative to the main body. . An illuminating device for optical detection according to the seventh aspect of the invention, wherein the lighting module comprises a plurality of light-emitting diodes (LEDs) to provide the object to be tested. illumination. The illuminating device for optical detection according to claim 7, wherein the moving component is provided with an angular scale to provide a reference of the rotation angle of the lighting module. An illuminating device suitable for optical detection according to claim 7, wherein the illuminating device further comprises a shielding piece, the shielding piece being disposed on the main body to provide stray light shielding. An illuminating device suitable for optical detection, the illuminating device comprising: a main body, the main body having a central hole, the main body being fixable to an external image capturing device; at least one moving part, the moving The components are respectively disposed on the main body, and the moving component is moved relative to the main body; and at least one lighting module, the lighting module is respectively pivoted on the moving component, and the lighting module Free rotation with respect to the moving member. The illuminating device for optical detection according to claim 12, wherein the moving members are respectively disposed on a chute group of the main body to move the moving member relative to the main body. The illuminating device for optical detection according to claim 12, wherein the lighting module comprises a plurality of light-emitting diodes (LEDs) to provide the object to be tested. illumination. The illuminating device suitable for optical detection according to claim 12, wherein the moving component is provided with an angular scale to provide a reference of the rotation angle of the lighting module. An illuminating device suitable for optical detection according to claim 12, wherein the illuminating device further comprises a shielding piece, the shielding piece being disposed on the main body to provide stray light shielding.