TW201612543A - Dual-functional resonant based magnetic field sensor - Google Patents
Dual-functional resonant based magnetic field sensorInfo
- Publication number
- TW201612543A TW201612543A TW103132220A TW103132220A TW201612543A TW 201612543 A TW201612543 A TW 201612543A TW 103132220 A TW103132220 A TW 103132220A TW 103132220 A TW103132220 A TW 103132220A TW 201612543 A TW201612543 A TW 201612543A
- Authority
- TW
- Taiwan
- Prior art keywords
- magnetic field
- field sensor
- sensor
- dual
- based magnetic
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/028—Electrodynamic magnetometers
- G01R33/0286—Electrodynamic magnetometers comprising microelectromechanical systems [MEMS]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Measuring Magnetic Variables (AREA)
- Pressure Sensors (AREA)
- Gyroscopes (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW103132220A TWI531806B (zh) | 2014-09-18 | 2014-09-18 | 兩用共振型磁力計 |
US14/698,392 US20160084871A1 (en) | 2014-09-18 | 2015-04-28 | Dual-functional resonant magnetic field sensor |
CN201510295469.7A CN106199463B (zh) | 2014-09-18 | 2015-06-02 | 两用共振型磁力计 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW103132220A TWI531806B (zh) | 2014-09-18 | 2014-09-18 | 兩用共振型磁力計 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201612543A true TW201612543A (en) | 2016-04-01 |
TWI531806B TWI531806B (zh) | 2016-05-01 |
Family
ID=55525548
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW103132220A TWI531806B (zh) | 2014-09-18 | 2014-09-18 | 兩用共振型磁力計 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20160084871A1 (zh) |
CN (1) | CN106199463B (zh) |
TW (1) | TWI531806B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI612309B (zh) * | 2016-04-27 | 2018-01-21 | 國立交通大學 | 集積型多元感測元件 |
TWI625527B (zh) * | 2016-04-27 | 2018-06-01 | 國立交通大學 | 集積型多元感測器模組 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9250261B2 (en) * | 2012-12-28 | 2016-02-02 | Intel Corporation | Method, apparatus and system for providing metering of acceleration |
CN105445681A (zh) * | 2014-09-29 | 2016-03-30 | 硕英股份有限公司 | 共振型磁力计 |
US11131723B2 (en) | 2019-05-03 | 2021-09-28 | Hi Llc | Single controller for wearable sensor unit that includes an array of magnetometers |
CN110542869A (zh) * | 2019-06-21 | 2019-12-06 | 西北工业大学 | 基于模态局部化效应的微弱磁场测量装置及方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51123565A (en) * | 1975-04-21 | 1976-10-28 | Nippon Telegr & Teleph Corp <Ntt> | Three-dimention-position differential adjustment of processing article |
JPH0712905A (ja) * | 1993-06-29 | 1995-01-17 | Yokogawa Electric Corp | 磁気センサ |
US6717399B2 (en) * | 1999-07-15 | 2004-04-06 | Wabash Technologies, Inc. | Magnetic sensing device with offset compensation |
FR2858853B1 (fr) * | 2003-08-13 | 2006-01-13 | Sercel Rech Const Elect | Accelerometre a vibrations parasites reduites par forme des electrodes amelioree |
GB0322236D0 (en) * | 2003-09-23 | 2003-10-22 | Qinetiq Ltd | Resonant magnetometer device |
CN101531334B (zh) * | 2009-04-07 | 2011-05-11 | 杭州电子科技大学 | 一种磁驱动增大检测电容的微惯性传感器及其制作方法 |
CN102042829B (zh) * | 2009-10-10 | 2012-06-20 | 北京理工大学 | 全顺向电容式微机械陀螺 |
ITTO20091042A1 (it) * | 2009-12-24 | 2011-06-25 | St Microelectronics Srl | Giroscopio integrato microelettromeccanico con migliorata struttura di azionamento |
CN102288172B (zh) * | 2011-07-07 | 2013-06-05 | 西北工业大学 | 一种放大质量块运动速度的电容式微机械陀螺 |
CN103292799B (zh) * | 2013-05-30 | 2013-12-18 | 南京信息工程大学 | 一种硅微机械结构振动幅度的电学测量方法 |
-
2014
- 2014-09-18 TW TW103132220A patent/TWI531806B/zh not_active IP Right Cessation
-
2015
- 2015-04-28 US US14/698,392 patent/US20160084871A1/en not_active Abandoned
- 2015-06-02 CN CN201510295469.7A patent/CN106199463B/zh not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI612309B (zh) * | 2016-04-27 | 2018-01-21 | 國立交通大學 | 集積型多元感測元件 |
TWI625527B (zh) * | 2016-04-27 | 2018-06-01 | 國立交通大學 | 集積型多元感測器模組 |
Also Published As
Publication number | Publication date |
---|---|
CN106199463A (zh) | 2016-12-07 |
TWI531806B (zh) | 2016-05-01 |
US20160084871A1 (en) | 2016-03-24 |
CN106199463B (zh) | 2019-05-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |