201219960 Λ 六、發明說明： ' 【發明所屬之技術領域】 ‘， 本發明係有關投影型顯示裝置，其係藉由將經由光閥 (light valve)所調變之光束投影至螢幕（screen)以顯示影像 者。 【先前技術】 一般而言，因光學系統之低成本化（c〇st)及小型 (compact)化之故，一旦進行光學系統之零件數量的減少或 非球面透鏡(lens)之使用限制，則光學系統的像差會變大， 而螢幕的影像顯示面中之照度不均或色彩不均會變大。在 此，照度不均係為對於以任意平面上之2維表示之位置， 員示照度南低之分布（照度之不均勻分布），色彩不均係為 對於以任意平面上之2維表示之位置，顯示色彩變化之分 布（色度之不均勻分布）。 另外’近年來’伴隨著光閥的高解析度化及小型化， 像素之窄間距(pitch)化正在不斷進展。在藉由如同數位微 鏡裝置（Digital Micromirror Device ; DMD)( DMD :註冊商 標）的週期性構造以反射光線的光閥中’除正反射光線之 外，還會產生繞射光線。繞射光線之繞射角度間距係隨像 素間距越小而變得越大。因此像素間距越小，大次數的繞 射光線就越不能射入至投影光學系統，能利用於影像投影 之繞射光線的光量就會變少。再者，當因為光學系統之構 成及光學系統之像差的影響，使得光閥之影像形成區域(被 照明區域）内之射入光光量的差或者射入角度的差變大 323427 4 201219960 時，投影光學系統之射入面内之繞射光線光量的差就會變 大’結果，螢幕之影像顯示面的照度不均或色彩不均會增 加。 另一方面，在家庭劇院(home theater)用之投影变顯示 裝置中，因要求高對比（contrast)化之故，大多採用放大光 學系統之光圈值(FNO)(F-number)，並將光學系統小口徑化 之構成、及於光學系統之光路中設置光圈以進行光量之調 整的構成。若將光學系統小口徑化，則射入至光學系統的 繞射光線之光量會減少，故因光學系統的像差影響及光閥 的窄間距化之影響所產生之螢幕的影像顯示面之照度不均 及色彩不均之影響容易增加。 為了抑制螢幕的影像顯示面之照度不均或色彩不 均’提案有一種採用具備開口之光圈的裝置，該開口係為 包圍分離成複數個色彩成分之各光線之光束範圍的形狀 (例如參考專利文獻1)。 [先前技術文獻] (專利文獻） 專利文獻1 :日本特開2007—233003號公報(例如 段落0029) 【發明内容】 (發明所欲解決之課題） 然而’為了減少肇因於在光學系統所產生之像差的景, 響或光閥的窄間距化所產生之螢幕的影像顯示 衫 “ ★度不 均亦或色彩不均，而有將射入至光閥的影像形成 00巧之光 323427 201219960 束的照度分布予以補正的必要。因此，在採用具備包圍分 離成複數個色彩成分之各光線的光束範圍形狀之開口的光 圈之習知裝置中，並不能適當地減少螢幕的影像顯示面中 的照度不均或色彩不均。 於是，本發明係為了解決上述習知技術之課題所研創 者，其目的在於提供一種投影型顯示裝置，俾能適當地補 正螢幕之影像顯示面的照度分布。 (解決課題之手段） 有關本發明之投影型顯示裝置係具有：光源，將光束 射出；光閥，具有因應輸入影像資訊以形成影像之影像形 成區域；照明光學系統，將前述光束照射於前述影像形成 區域；投影光學系統，將根據形成於前述影像形成區域之 前述影像所調變之前述光束投影至螢幕之影像顯示面上； 前述照明光學系統係包含：光強度均勻化元件，將由前述 光源射出之前述光束的強度分布予以均勻化；第1光學系 統，將以前述光強度均勻化元件所均勻化之前述光束導引 至前述影像形成區域；開口規定構件，設置於前述第1光 學系統内之前述光束的傳播路徑上，且具有遮擋前述光束 之遮光部與使前述光束通過之開口部；前述開口規定構件 係配置於不與前述螢幕成為光學性共軛關係之位置，且具 備開口擴張部與開口縮小部之至少一方，該開口擴張部係 利用將前述影像形成區域或前述螢幕之影像顯示面予以分 割所得之複數個分割區域中相對性的照度之實測值或計算 值，且設置於對應於前述複數個分割區域内之前述相對性 6 323427 201219960 ' 的低照度分割區域之位置，且屬於縮小前述遮'光部並擴大 \ 前述開口部之缺口區域；該開口縮小部設置於對應於前述 、 複數個分割區域内之前述相對性的高照度分割區域之位 置，且屬於擴大前述遮光部並縮小前述開口部之突出部。 (發明之效果） 依據有關本發明之投影型顯示裝置，能以簡易之構成 將螢幕的影像顯示面中之照度分布予以補正。 【實施方式】 (實施形態1) 第1圖係為概略性顯示本發明實施形態1之投影型顯 示裝置的光學系統之構成的構成圖。如第1圖所示，有關 實施形態1之投影型顯示裝置係具有：光源燈(lamp)l，作 為光源而將光束（圖中以虛線顯示）予以射出；DMD元件 2,作為光閥，並具有因應輸入影像資訊而形成影像之影像 形成區域(被照明面）2a ;照明光學系統4，將由光源燈1 射出之光束照射至DMD元件2的影像形成區域2a ;投影 光學系統3，將藉由形成於DMD元件2之影像形成區域 2a的影像所調變之光束予以擴大而投影至螢幕5。 光源燈1係例如具有將白色光射出之發光體11a、及 設置於此發光體11a周圍之橢圓面鏡lib。橢圓面鏡lib 係反射由對應於橢圓的第1中心之第1焦點所射出的光 束，並使其收斂於對應橢圓的第2中心之第2焦點。發光 體11a係配置於橢圓面鏡lib之第1焦點附近，由此發光 體11a所射出之光束係收斂於橢圓面鏡lib之第2焦點附 7 323427 201219960 近。亦可使用拋物面鏡來取代橢圓面鏡lib。於此情況時， 只要藉由拋物面鏡使由發光體11a所射出之光束大致平行 後，再以聚光透鏡（condenser lens)(未圖示）收斂即可。另 外，亦能使用拋物面鏡以外的凹面鏡來取代橢圓面鏡lib。 照明光學系統4係具有：光強度均勻化元件41，將由 光源燈1所射出之光束的強度分布（亦即，垂直於光束行進 方向的面内之光強度分布）予以均勻化；第1光學系統，將 以光強度均勻化元件41所均勻化之光束，導引至DMD元 件2的影像形成區域2a;及開口規定構件6亦或61，設置 於將光強度均勻化元件41所均勻化之光束予以傳播之傳 播路徑上。開口規定構件6或61係具有遮擋此光束之遮光 部與使光束通過之開口部。第1光學系統係具有：中繼透 鏡(relay lens)群42,包含透鏡42a、42b並作為第2光學系 統；及鏡片群43，包含第1鏡片（mirror)43a及第2鏡片 43b並作為第3光學系統。第1圖中，中繼透鏡(relay lens) 群42雖以透鏡42a、42b之2片透鏡所構成，惟透鏡之片 數並非限定於2片者。同樣地，關於鏡片群43亦並非限定 於2片者。藉由中繼透鏡群42及鏡片群43，將由光強产 均勻化元件41所射出之光束導引至DMD元件2的影像$ 成區域2a。 光強度均勻化元件41係具有將光源燈1所射出之光 束之光強度予以均勻化之功能。亦即’藉由將此種光強度 予以均勻化之功能，減少照度不均。一般來說，以光強^ 均勻化元件41而言，係以玻璃或樹脂等透明材料製作， 4 323427 8 201219960 ::以:壁之内側成為全反射面的方式構成 #件响。所謂之多角柱狀之桿件 &狀之 形之柱狀構件。另外，以光強度均為多角 舉將鏡片狀之構件$ # 6 I & 。，可列 成之側並組合成筒狀而形 ]面形狀為多角形之管件⑽e)(管狀構件 ===均勻化元件41’係利用透明材料與空氣界 H 使光線反射複數次後，使光線由㈣面 (射出端）射出。多角形之管件之光強度均勻化元件q，係 利用朝向内側之鏡片（例如，表面鏡）的反射作用，使光線 反射複數次後，使光線由射出面射出。 光強度均勻化元件41 ’若確保光束之行進方向適當之 長度，則在内部反射複數次之光線會重疊並照射於光強度 均勻化元件41之射出面41b的附近。因此，於光強度均= 化元件41之射出面41b附近中，可得到大致均勻之強度分 布。由具有此大致均勻之強度分布的射出面41b所射出之 光線，係藉由中繼透鏡群42及鏡片群43被導向DMd元 件2，並將DMD元件2的影像形成區域2a予以照明。 開口規定構件6或61係配置於不與螢幕5成為光學 性共軛關係之位置。開口規定構件6或61具有開口擴大部 (例如後述之第11圖的符號61b)及開口縮小部（例如後述之 第15圖的符號63d)，該開口擴大部係利用分割螢幕5的 影像表示面所得之複數個分割區域(後述第8圖的符號ι〇1 至109)中相對性的照度之實測值或計算值’設置在對應於 複數個分割區域内之相對性的低照度分割區域之位置，且 9 323427 201219960 屬於縮小遮光部並擴大開口部之缺口區域；該開口縮小部 係設置在對應於複數個分割區域内之相對性的高照度分割 區域之位置，且屬於擴大遮光部並縮小開口部之突出部。 再者，亦可利用分割光閥的影像形成區域所得之複數個分 割區域中相對性的照度之實測值或計算值，以取代利用分 割螢幕5的影像顯示面所得之複數個分割區域（後述第8圖 的符號101至109)中相對性的照度之實測值或計算值。 另外，開口規定構件6或61較佳為配置於與屬於投 影光學系統3之光束射入側的投影光學系統開口部的共軛 位置或共輟位置附近。此係因此共輛位置中之光束直徑為 最小，故易於將開口規定構件6或61作成小型化。 第2圖係將照明光學系統4之作用予以概念性顯示之 示意圖。第2圖中，因將中繼透鏡群42及鏡片群43予以 示意顯示，故將其分別以1個透鏡元件如圖示所示，惟實 際上亦可為複數個透鏡元件之集合。於實施形態1中，照 明光學系統4係構成為光強度均勻化元件41之射出面 41b、與DMD元件2之影像形成區域2a成為光學性的共 軛關係。另外，將於照明光學系統4中與投影光系統3之 射入侧的開口部31成為共軛關係之位置，稱為照明光學系 統4之光圈位置45。 照明光學系統4的光圈位置45，係為由光強度均勻化 元件41所射出之光束的主光線大致聚光的位置。另外，光 圈位置45係與投影光學系統3之射入側的開口部31共軛 或大致共軛，並且與光強度均勻化元件41的射入面41a 10 323427 201219960 成為共輛或大致共輛的關係。因此，在照明光學系統4的 ·'·光圈位置45及光強夜均勻化元件41的射入面…的位 、置，即使例如光束的〜部分被切斷(cut)(例如，光束的一部 /刀被遮光部遮擋）’雖顯示於投影型顯示裝置之影像的亮度 下降’惟難以產生影像的—部分缺少顯示（例如顯示晝面的 角部附近或邊緣附近黑化（或暗化))的區域之缺失。 DMD元件2料有將對應於各像权可動式微鏡予 以平面性多數（例如數十萬個）配置之構成。DMD元件2係 因應像素資訊(輸入影像資訊）’而使複數片之微鏡的傾斜 角（傾角（tilt))各自變化而調變。調變後之光束被投影於螢 幕5的影像顯示面上，而於螢幕上顯示影像。換言之，Dmd 疋件2係為因應像素資訊而反射照明光，藉以射出用以形 成光學影像的調變光線之反射型光閥。 DMD元件2係由複數片微鏡中，將因應影像資訊而選 擇之微鏡，使其相對於基準面朝固定方向傾斜達角度（例如 12度）。射入至傾斜達角度α之微鏡的光束，係朝向投影 光學系統3而被反射。射入至傾斜達角度α之投影光學系 統3的光束，係被投影於螢幕5的影像顯示面上，而形成 〜像。再者，微鏡的基準面係為在微鏡未被驅動的狀態下 排列有微鏡之反射面。亦即，微鏡的基準面係為與微鏡所 形成之基板的表面朝向相同方向之面。射入至DMD元件2 中相對於基準面未傾斜之微鏡的光束，係朝不會對顯示於 鸯幕5的影像造成影響的方向反射’例如朝光吸收板(未圖 示）反射。射入至光吸收板的光束，係未被利用在螢幕5的 11 323427 201219960 影像顯不面之影像的开> 未傾斜之情況，係㈣=再者，所賴鏡相對於基準面 就如同DMD元件' 被驅動之情況。 言，使用第3圖⑷及第1之週期性構造物的繞射光線而 顯示包含於DMD元件2 ®(b)進行說明。第3圖⑷係為 數片微鏡。第3圖_^彡像形成區域2a之—部份的複 線反射的狀態。再者j由側面觀視應〇元件2時之光 以實線之箭號表示，繞^f DMD元件2之光線池係 统射光線係以虛線之箭號表示。 接者’在光線2〇a射a δ η 对入至DMD元件2的1片微鏡2b 的情況，就光線之動作推〜 戸進仃說明。若光線20a在微鏡2b 的反射面2c反射’則會射出正反射光施，並且產生繞射 光線。將正反射光2%稱為G次％，將繞射光線W稱為 1人光將、VO射光線22a稱為2次光將繞射光線^稱 為3 — 人光才目同地，若光線20a在反射面2c反射，則亦會 產生如同4人光、5次光之高次光(未圖示）。另外將繞射 光線21b稱》1次光，將繞射光線22b稱為-2次光，將 繞射光線23b稱為—3二欠光。相同地，若光線池在反射 面2c反射，則亦會產生如同—4:欠光、_5次光之高次光（未 圖不）。此時，眾所周知，若越為高次則繞射光線之強度將 會越小。 繞射光線2la、21b、22a、22b、23a、23b之反射的角 度間距/3 ’如式（1)所示，係由dmD元件2的像素間距 (pitch)d、光線2〇a的射入角度α、繞射次數m、及波長入 來決定。再者，將角度間距沒稱為繞射角度間距。 12 323427 201219960 201219960 0) d(sina ± sin^) =ιηλ “如將射入角度a設為固定時，關於DMD元件2 的=素間距d $ 13.7"m的情沉及像素間距d為7.6#m 的:况冑依光線的不同波長來計算關於繞射角度間距石 ^果顯示於第4圖。光線之波長λ為47Gnm、530nm及 < &、像素間距d為13·7以m的情况，繞射角度間距召 成為在波長λ 630腿(相當於紅色）為2.64。、在波長又 53〇nm(相當於綠色）為2.22。、在波長λ精腿(相當於藍色） ，另外，像素間距d為7·6 # m的情況，繞射角度 間距沒係成為在波長λ 630nm(相當於紅色）為 4.75°、在波 1 λ 530nm(相當於綠色）為4 〇〇。、在波長又47〇nm(相當於 藍色）為3.55。可得知若當像素間距d由13 7^變小為 7.6時，繞射角度間距召會變大。 另一方面，以光學系統的高對比化及小型化，甚至低 成本化為目的而言’㈣光學“ 4大多採用非遠心光學 系統(Non-Telecentdc 〇ptical System)。於此非遠心光學系 統的情況，-般而言，朝DMD元件2之射人光線的射入 角度’係依DMD元件2之影像形成區域内的位置而不同。 在第5圖中，將射入至DMD元件2之下部的光線51 之射入角51a，與將射入至DMD元件2之上部的光線52 之射入角52a進行崎。可得知光線51之射人角…較光 線52之射入角52a為大。如&，可得知特別是在非遠心光 學系統的情況，在DMD元件2的影像形成區域内的位置 323427 13 201219960201219960 Λ VI. Description of the invention: 'The technical field to which the invention pertains' The present invention relates to a projection type display device which projects a light beam modulated by a light valve onto a screen. The image is displayed. [Prior Art] In general, due to the reduction in the cost and the compactness of the optical system, once the number of parts of the optical system is reduced or the use of an aspheric lens is restricted, The aberration of the optical system becomes large, and uneven illumination or uneven color in the image display surface of the screen becomes large. Here, the illuminance unevenness is a distribution in which the illuminance is southerly (the uneven distribution of illuminance) in a position represented by two dimensions on an arbitrary plane, and the color unevenness is expressed in two dimensions on an arbitrary plane. Position, showing the distribution of color changes (uneven distribution of chromaticity). In addition, in recent years, along with the high resolution and miniaturization of the light valve, the pitch of the pixels has been progressing. In addition to the regular reflection light, a diffracted ray is generated by a periodic configuration such as a digital micromirror device (DMD) (DMD: DMD) (DMD: Registered Trademark). The diffraction angle spacing of the diffracted rays becomes larger as the pixel pitch is smaller. Therefore, the smaller the pixel pitch, the less the large amount of the diffracted ray can be incident on the projection optical system, and the amount of light that can be used for the image projection of the diffracted ray is reduced. Further, when the optical system is configured and the aberration of the optical system is affected, the difference in the amount of incident light or the difference in the incident angle in the image forming region (illuminated region) of the light valve becomes large 323427 4 201219960 The difference in the amount of diffracted light in the incident surface of the projection optical system becomes large. As a result, the illuminance unevenness or color unevenness of the image display surface of the screen increases. On the other hand, in a projection display device for a home theater, the aperture value (FNO) of the magnifying optical system is mostly used for the purpose of high contrast, and the optical is used. The configuration of the system is small in diameter, and the aperture is provided in the optical path of the optical system to adjust the amount of light. If the optical system is small in diameter, the amount of diffracted light incident on the optical system is reduced, so that the illumination of the image display surface of the screen due to the influence of the aberration of the optical system and the narrow pitch of the light valve is caused. The effects of unevenness and uneven color are likely to increase. In order to suppress illuminance unevenness or color unevenness on the image display surface of the screen, there is proposed a device using an aperture having an opening which is a shape surrounding a beam range of respective rays separated into a plurality of color components (for example, reference patent) Document 1). [Prior Art Document] (Patent Document) Patent Document 1: JP-A-2007-233003 (for example, paragraph 0029) [Summary of the Invention] (To solve the problem of the invention) However, in order to reduce defects caused by the optical system The image of the screen caused by the aberration of the aberration, the ringing of the light valve or the light valve shows that the image is “unevenly uneven or uneven in color, and there is an image that will be injected into the light valve to form the light 00427 201219960 The illuminance distribution of the beam is necessary for correction. Therefore, in a conventional device having an aperture that surrounds the opening of the beam range shape of each of the rays separated into a plurality of color components, the image display surface of the screen cannot be appropriately reduced. The present invention has been made in order to solve the problems of the above-described conventional techniques, and an object of the present invention is to provide a projection type display device capable of appropriately correcting the illuminance distribution of the image display surface of the screen. Means for Solving the Problem) A projection type display device according to the present invention has a light source for emitting a light beam, and a light valve having an input image information Forming an image forming region; the illumination optical system irradiates the light beam to the image forming region; and the projection optical system projects the light beam modulated according to the image formed in the image forming region onto an image display surface of the screen The illumination optical system includes: a light intensity equalizing element that homogenizes an intensity distribution of the light beam emitted from the light source; and a first optical system that guides the light beam uniformized by the light intensity equalizing element to The image forming region; the opening defining member is provided on the propagation path of the light beam in the first optical system, and has a light blocking portion that blocks the light beam and an opening through which the light beam passes; and the opening defining member is disposed At least one of an opening expansion portion and an opening reduction portion is provided at a position in which the screen is optically conjugated, and the opening expansion portion is formed by dividing the image forming region or the image display surface of the screen into a plurality of divisions. Actual measurement of relative illuminance in the region Or calculating a value, and is disposed at a position corresponding to the low illumination division region of the aforementioned relative 6 323427 201219960 ' in the plurality of divided regions, and belongs to a notch region that reduces the aforementioned light-shielding portion and enlarges the opening portion; The opening narrowing portion is provided at a position corresponding to the above-described relative high-luminance divided region in the plurality of divided regions, and belongs to a protruding portion that enlarges the light blocking portion and reduces the opening portion. (Effect of the Invention) According to the present invention The projection type display device can correct the illuminance distribution on the image display surface of the screen in a simple configuration. [Embodiment 1] FIG. 1 is a schematic display showing a projection type display according to Embodiment 1 of the present invention. A configuration diagram of a configuration of an optical system of the apparatus. As shown in Fig. 1, the projection display apparatus according to the first embodiment includes a light source lamp 1 and emits a light beam (shown by a broken line in the figure) as a light source. ; DMD component 2, as a light valve, and having an image forming area (illuminated surface) 2a for forming an image in response to input of image information; illumination The optical system 4 irradiates the light beam emitted from the light source lamp 1 to the image forming region 2a of the DMD element 2, and the projection optical system 3 expands the light beam modulated by the image formed in the image forming region 2a of the DMD element 2 Project to screen 5. The light source lamp 1 has, for example, an illuminator 11a that emits white light and an ellipsoid lib that is provided around the illuminator 11a. The elliptical mirror lib reflects the light beam emitted from the first focus corresponding to the first center of the ellipse and converges on the second focus of the second center corresponding to the ellipse. The illuminant 11a is disposed in the vicinity of the first focus of the ellipsoidal mirror lib, and the light beam emitted from the illuminator 11a converges on the second focus of the ellipsoidal mirror lib. You can also use a parabolic mirror instead of the elliptical mirror lib. In this case, the light beams emitted from the illuminator 11a are substantially parallel by a parabolic mirror, and then condensed by a condenser lens (not shown). In addition, a concave mirror other than a parabolic mirror can be used instead of the elliptical mirror lib. The illumination optical system 4 has a light intensity equalizing element 41 that homogenizes the intensity distribution of the light beam emitted from the light source lamp 1 (that is, the light intensity distribution in the plane perpendicular to the traveling direction of the light beam); the first optical system The light beam uniformized by the light intensity equalizing element 41 is guided to the image forming region 2a of the DMD element 2; and the opening defining member 6 or 61 is disposed on the light beam uniformizing the light intensity equalizing element 41. Spread on the path of transmission. The opening regulating member 6 or 61 has a light blocking portion that blocks the light beam and an opening portion through which the light beam passes. The first optical system includes a relay lens group 42 including lenses 42a and 42b as a second optical system, and a lens group 43 including a first lens 43a and a second lens 43b. 3 optical system. In Fig. 1, the relay lens group 42 is composed of two lenses of the lenses 42a and 42b, but the number of lenses is not limited to two. Similarly, the lens group 43 is not limited to two. The light beam emitted from the light intensity equalizing element 41 is guided to the image forming region 2a of the DMD element 2 by the relay lens group 42 and the lens group 43. The light intensity equalizing element 41 has a function of equalizing the light intensity of the light beam emitted from the light source lamp 1. That is, by illuminating such light intensity, the illuminance unevenness is reduced. In general, the light intensity equalizing element 41 is made of a transparent material such as glass or resin, and is formed by a method in which the inner side of the wall becomes a total reflection surface. The so-called polygonal columnar member & columnar member. In addition, the light intensity is multi-angled to the lens-like member $ # 6 I & a tubular member (10) e) which can be arranged on the side and combined into a cylindrical shape (the tubular member ===the homogenizing member 41' is formed by using the transparent material and the air boundary H to reflect the light for a plurality of times. The light is emitted from the (four) plane (the exit end). The light intensity of the polygonal tube is equalized by the reflection of the lens (for example, the surface mirror), so that the light is reflected multiple times and the light is emitted from the exit surface. When the light intensity equalizing element 41' ensures a proper length of the traveling direction of the light beam, the light which is internally reflected plural times overlaps and is irradiated to the vicinity of the emitting surface 41b of the light intensity equalizing element 41. Therefore, the light intensity A substantially uniform intensity distribution is obtained in the vicinity of the exit surface 41b of the uniformizing element 41. The light emitted from the emitting surface 41b having the substantially uniform intensity distribution is transmitted by the relay lens group 42 and the lens group 43. The DMd element 2 is guided, and the image forming region 2a of the DMD element 2 is illuminated. The opening defining member 6 or 61 is disposed at a position that is not optically conjugated to the screen 5. The member 6 or 61 has an opening enlarged portion (for example, a reference numeral 61b in Fig. 11 to be described later) and an opening narrowing portion (for example, a symbol 63d in Fig. 15 which will be described later), and the opening enlarged portion is obtained by dividing the image display surface of the screen 5 The measured value or calculated value of the relative illuminance in the plurality of divided regions (symbols ι 〇 1 to 109 in Fig. 8 to be described later) is set at a position corresponding to the low illuminance divided region of the relativeness in the plurality of divided regions, and 9 323427 201219960 belongs to a notch region in which the light shielding portion is reduced and the opening portion is enlarged; the opening reduction portion is provided at a position corresponding to the relative high illumination division region in the plurality of divided regions, and belongs to the enlarged light shielding portion and reduces the opening portion. In addition, the measured value or the calculated value of the relative illuminance in the plurality of divided regions obtained by dividing the image forming region of the light valve may be used instead of the plurality of divided regions obtained by dividing the image display surface of the split screen 5. Actual measured value or calculated value of relative illuminance in (symbols 101 to 109 in Fig. 8 to be described later). Further, the opening defining member 6 or 61 is preferably disposed and associated with The conjugate position or the conjugate position of the opening of the projection optical system on the light incident side of the projection optical system 3 is such that the beam diameter in the common position is the smallest, so that the opening defining member 6 or 61 is easily miniaturized. Fig. 2 is a schematic diagram showing the function of the illumination optical system 4 in a conceptual manner. In Fig. 2, since the relay lens group 42 and the lens group 43 are schematically shown, they are respectively shown as one lens element. In the first embodiment, the illumination optical system 4 is configured as an emission surface 41b of the light intensity equalizing element 41 and an image forming region 2a of the DMD element 2, as shown in the figure. The position of the illumination optical system 4 in the conjugate relationship with the opening 31 on the incident side of the projection light system 3 is referred to as the aperture position 45 of the illumination optical system 4. The diaphragm position 45 of the illumination optical system 4 is a position where the chief ray of the light beam emitted from the light intensity equalizing element 41 is substantially concentrated. Further, the diaphragm position 45 is conjugated or substantially conjugate with the opening portion 31 of the projection optical system 3 on the incident side, and becomes a common vehicle or a substantially common vehicle with the incident surface 41a 10 323427 201219960 of the light intensity equalizing element 41. relationship. Therefore, at the position of the entrance position of the illumination optical system 4 and the aperture position 45 of the luminous intensity uniformizing element 41, even if, for example, the portion of the light beam is cut (for example, one of the light beams) The part/knife is blocked by the light-shielding part. 'Although the brightness of the image displayed on the projection type display device is lowered', but the image is difficult to produce - part of the display is missing (for example, blackening (or darkening) near the corner or near the edge of the display face) The absence of the area. The DMD element 2 is configured to be arranged in a planarity (e.g., hundreds of thousands) corresponding to each of the image-capable movable micromirrors. The DMD element 2 adjusts the tilt angle (tilt) of the micromirrors of the plurality of slices in response to the pixel information (input image information). The modulated light beam is projected onto the image display surface of the screen 5, and the image is displayed on the screen. In other words, the Dmd element 2 is a reflection type light valve that reflects illumination light in response to pixel information, thereby emitting modulated light for forming an optical image. The DMD element 2 is a micromirror selected from a plurality of micromirrors that is tilted in the fixed direction with respect to the reference plane by an angle (for example, 12 degrees). The light beam incident on the micromirror inclined to the angle α is reflected toward the projection optical system 3. The light beam incident on the projection optical system 3 inclined at an angle α is projected onto the image display surface of the screen 5 to form an image. Further, the reference plane of the micromirror is a reflecting surface in which the micromirrors are arranged in a state where the micromirrors are not driven. That is, the reference plane of the micromirror is the surface facing the same direction as the surface of the substrate formed by the micromirror. The light beam incident on the micromirror which is not inclined with respect to the reference plane in the DMD element 2 is reflected toward a direction which does not affect the image displayed on the curtain 5, for example, toward a light absorbing plate (not shown). The light beam incident on the light absorbing plate is not used in the opening of the image of the screen 5, 323427 201219960. If the image is not tilted, the system is (4) = again, the mirror is as opposed to the reference surface. The case where the DMD component is driven. In other words, the diffracted ray of Fig. 3 (4) and the first periodic structure is used for display and is included in the DMD element 2 ® (b). Figure 3 (4) is a number of micromirrors. Fig. 3 shows the state of the complex line reflection of the portion of the image forming region 2a. Further, the light when the element 2 is viewed from the side is indicated by the arrow of the solid line, and the light source system of the DMD element 2 is indicated by the arrow of the broken line. In the case where the lighter 2 〇a emits a δ η into one micromirror 2b of the DMD element 2, the action of the light is pushed to 仃. If the light ray 20a is reflected on the reflecting surface 2c of the micromirror 2b, the specular reflected light is emitted and the diffracted ray is generated. The regular reflection light 2% is referred to as G times %, the diffracted light W is referred to as 1 person light, the VO light ray 22a is referred to as 2 times light, and the diffracted light is referred to as 3 - human light is the same, if When the light ray 20a is reflected on the reflecting surface 2c, high-order light (not shown) such as four-person light and five-time light is generated. Further, the diffracted ray 21b is referred to as "first-order light, the diffracted ray 22b is referred to as -2 times of light, and the diffracted ray 23b is referred to as -3 two under-lights. Similarly, if the light pool is reflected on the reflecting surface 2c, high-order light such as -4: under-light, _5-time light (not shown) is also generated. At this time, it is well known that the higher the intensity, the smaller the intensity of the diffracted light will be. The angular pitch /3' of the reflection of the diffracted rays 2la, 21b, 22a, 22b, 23a, 23b is as shown in the formula (1), and is obtained by the pixel pitch (ditch) d of the dmD element 2 and the incidence of the light ray 2〇a. The angle α, the number of diffractions m, and the wavelength are determined. Furthermore, the angular pitch is not referred to as the diffraction angle pitch. 12 323427 201219960 201219960 0) d(sina ± sin^) =ιηλ "If the injection angle a is fixed, the sigma and pixel pitch d of the DM spacing d $ 13.7"m for the DMD element 2 is 7.6 #m的: 胄 计算 According to the different wavelengths of light to calculate the diffraction angle spacing stone is shown in Figure 4. The wavelength λ of the light is 47Gnm, 530nm and <& pixel spacing d is 13·7 to m In the case where the diffraction angle is called to be 2.64 at the wavelength λ 630 (equivalent to red), 2.22 at a wavelength of 53 〇 nm (equivalent to green), and at the wavelength λ (corresponding to blue), Further, when the pixel pitch d is 7·6 # m, the diffraction angle pitch is not 4.75° at a wavelength λ 630 nm (corresponding to red) and 4 在 at a wave 1 λ 530 nm (corresponding to green). At a wavelength of 47 〇 nm (equivalent to blue) of 3.55, it can be seen that if the pixel pitch d is reduced from 13 7 to 7.6, the diffraction angle pitch becomes larger. On the other hand, the optical system For the purpose of high contrast, miniaturization, and even low cost, '(4) Optics' 4 mostly uses non-telecentric optical systems (Non-Telecen) Tdc 〇ptical System). In the case of the non-telecentric optical system, the angle of incidence of the incident light toward the DMD element 2 is generally different depending on the position in the image forming region of the DMD element 2. In Fig. 5, the incident angle 51a of the light ray 51 incident on the lower portion of the DMD element 2 is compared with the incident angle 52a of the light ray 52 incident on the upper portion of the DMD element 2. It can be seen that the angle of incidence of the light 51 is larger than the angle of incidence 52a of the light line 52. For example, &, the position in the image forming area of the DMD element 2, especially in the case of a non-telecentric optical system 323427 13 201219960
與射入角度α會產生偏差 箭號表示。 再者，光線51、52係以虛線的 射入至DMD元件2的光線之射人角度卜旦不同， 第3圖所示之正反射光20b亦會不同。第6圖係為顯示射 入角度α變化時之繞射角度間距^之變化的圖。第6圖中 之縱軸係為繞射角度間距々，橫軸為射入角度“。繞射角 度間距zs係為將像素間距d設為7知m，將波長設為 530nm，並基於式⑴加以計算。如第6圖所示，當射入角 度讀大，則繞射角度間距“變大。也就是說，若dmd tc件2的影像形成區域中之射人角度α有^時，繞射角 度間距/9也會產生差異。 第7圖係為顯示光束射入至投影光學系統3之射入侧 的開口。Ρ 31之不意圖。再者，光線2〇a係以實線之箭號表 不，繞射光係以虛線之箭號表示。投影光學系統3之射入 側的開π部31之大小係因應投影光學系統3的㈣值而 規定。亦即，投影光學系統3的FN〇值為大的情況，射入 侧的開口部31之大小會變，卜也就是說，投影光學系統3 成為小口徑。相反地，投影光學系統3的FN〇值為小的情 兄射入側的開口部31之大小就會變大。也就是說，投影 光學系統3成為大口徑。 如第7圖所示，±1次的繞射光線21a、2比係射入於 投影光學系統3之射入側的開口部31。但是，由第7圖可 得知，2次以上之高次的繞射光線係無法射入至投影光學 系統3之射入侧的開口部31。另外，亦可得知當投影光學 323427 14 201219960 系統3之射入側的開口部31為固定之大小的情況，一旦射 入光20a之射入角α改變，射入之繞射光線的光量也會改 變。其原因在於，射入至射入側的開口部31之繞射光的次 數係在正(plus)側與負（minus)侧改變之故。 另一方面，當射入側之開口部31的大小改變時，即 使射入角度α相同，射入至投影光學系統3之射入側的開 口部31之繞射光線的光量亦會改變。所謂「射入側的開口 部31之大小改變」，係為投影光學系統3之FNO改變。由 第7圖亦可得知，為了實現高對比化，當將投影光學系統 3的FNO放大時，射入之繞射光線的光量會變少。其原因 在於，當將射入側的開口部31之大小縮小時，高次之繞射 光線便無法射入至射入側的開口部31之故。 因為諸如此類之種種要因，而有由DMD元件2的影 像形成區域2a射入至投影光學系統3的射入侧之開口部 31之光束的光量變為不均勻的情形。例如，可列舉出因光 學系統的像差或構成之影響，而造成DMD元件2的影像 形成區域2a之光束的射入角度產生差異的情況、使投影光 學系統3的FNO放大之情況、及DMD元件2窄間距化之 情況等。當由DMD元件2的影像形成區域2a射入至投影 光學系統3的射入侧之開口部31之光束的光量變為不均勻 時，就會產生螢幕5之影像顯示面的照度不均或色彩不 均，而導致顯示於螢幕5的影像顯示面之影像的劣化。 因此，就螢幕5之影像顯示面的照度不均或顏色不均 之改善方法進行說明。將螢幕5的影像顯示面予以分割， 15 323427 201219960 " 並藉由測定或模擬（simulation)來確認各分割區域的照度 ·' 分布。第8圖所示之例中，係將螢幕5的影像顯示面分割 . 成9個區域。再者，亦可將DMD元件2的影像形成區域 螬 2a分割成9個區域，而不將螢幕5的影像顯示面分割成9 個區域。再者，複數個分割區域可為以縱Μ行（M為2以 上之整數）排列成橫Ν列（Μ為2以上之整數）之複數個區 域，亦可為3行3列以外之區域。 第9圖顯示開口規定構件6之開口部6a之形狀的示意 圖。一般的開口規定構件係如第9圖所示之開口規定構件 6，以圓形的開口部6a來規定照明光束直徑並控制照明光 束量。 將螢幕5的影像顯示面分割為9個之照度分布結果之 一例顯示於第10圖。第10圖係為以螢幕5之影像顯示面 之中央（第8圖中之分割區域105)為基準，顯示各分割區域 之相對亮度。縱軸為相對亮度，橫轴為螢幕5上之影像顯 示面的分割區域。相對亮度雖一般有表示照度、亮度、或 設計上之亮度的值等，惟在實施形態1中，係以照度顯示。 再者，於此，雖為了說明照度不均而顯示關於亮度之特性， 惟關於色彩不均之情況，關於色度之等色彩之特性，亦能 適用同樣的思考方式。 第10圖係為當以成為螢幕5之影像顯示面的中央之 分割區域105為基準時，以相對值顯示螢幕5的影像顯示 面中之亮度者。在第8圖之分割區域101中，亮度的相對 值為0.7，在分割區域102中，亮度的相對值為0.75，在 16 323427 201219960 分割區域1〇3中，亮度的相對值為〇.8。如此，根據第10 圖，可得知螢幕5的影像顯示面之亮度的不均勻偏大。 如第1〇圖所示，就關於消除螢幕5的影像顯示面之 照度不均的方法進行說明。如第2圖所示，dmd元件2 與光強度均勻化元件41的射出面仙係處於光學性的共梳 關係一。因此，假設在光強度均句化元件41的射出面仙 附近設置補正照度不均的構造，則會產生在dmd元件2 上的影像形成區域2a光束短缺而顯示暗影（暗化部份)之缺 失。 、 另一方面’投影光學系統3之射入側的開口部”及 照=先學系統4的光圈位置45，係與螢幕5不處於光學性 的共輛關係。朗光學系統4的_位置Μ係位 光學性共輛之位置。因此，即使在此等位置 S又置補正照度不均之構造’亦不會產生於螢幕5之影像顯 光束短缺而顯示暗影（暗化部份)之缺失，而能㈣ 中之:;不ΠΓ10圖所示之瑩幕5的影像顯示面 4的光m 蚊齡6配置麵明光學系統 =的先圈位置45附近。就該開口規定構件6之形狀進行探 將第9圖之開口規定構 61顯示於第11圖。第u圖係顯口 ^開口規定構件 消除螢幕5的影像顯示面中之昭.产：規:構件61，用以 開口規定編之開二 之开/狀的不意圖。開口規定 323427 17 201219960 構件61之開口部61a並非如同第9圖所示之開口部6a的 圓形，而成為補正螢幕5的影像顯示面之照度不均或色彩 不均之形狀。也就是說，於第11圖中之右側設有矩形之開 口區域(缺口部）61b。 特別對第10圖所示之相對亮度低（光量少）之分割區域 101、102、103之光量影響大的開口部61a的區域，係成 為第11圖所示之矩形之開口區域61b的部份。因朝分割區 域1(Π、102、103之光量少，故開口規定構件61的形狀係 對應於分割區域101、102、103，例如新設置矩形之開口 區域61b。亦即，開口規定構件61的開口部61a係在圓形 的開口部追加矩形的開口區域61b，而能容納較多之光量。 第11圖係為採用開口規定構件61時之螢幕5的影像 顯示面之照度分布。在第11圖中，縱軸係為相對亮度，橫 軸係為螢幕5上之影像顯示面的分割區域。菱形的點顯示 使用開口規定構件6時之值，而三角形的點係顯示使用開 口規定構件61時之值。相對亮度之測定方法係與第8圖相 同。第12圖中，相較於配置了具有圓形之開口部的開口規 定構件6之情況，可得知在開口規定構件61之情況，螢幕 5之影像顯示面的分割區域10卜102、103的光量會增加， 而改善影像顯示面之照度分布。 有關實施形態1之投影型顯示裝置，係為了將螢幕5 之影像顯示面的輝度不均或色彩不均加以補正，而在與投 影光學系統之射入侧的開口部31成為共軛位置的附近之 光傳播路徑上，配置將開口予以規定之開口規定構件6、 18 323427 201219960 61。此開口規定構件6、61係形成為將螢幕5的影像顯禾 面之照度分布予以補正的形狀。若於此位置配置開口规定 構件6、61 ’則能縮小開口規定構件6、ο。另外，能抑制 光線利用效率之劣化，並將螢幕5之影像顯示面的照度分 布予以補正。 再者，設在與投影光學系統之射入側的開口部31成 共軛位置之附近的理由，係因透鏡框等構造物的關係，而 有無法將開口規定構件6、61配置在共軛位置上之情況。 因此，在設計上，有在抑制弊害的範圍内將開口規定構件 6、61配置在離開共軛位置之位置之情況。以第丨圖之例 說明時，依據光學系統之設計’共軛位置距離照明光學系 統4之中繼透鏡群42之射出面非常近，而無法以中繼透鏡 群42與透鏡框之關係配置在共軛位置上。共軛位置係因光 學系統的設計不同，雖有成為鏡片群43的射出端側之情 況，惟在此情況下，因與鏡片群43的保持構件之干涉，亦 將開口規定構件6、61的配置位置加以移動。 因此，若根據有關實施形態丨之投影型顯示裝置，可 得到以下效果：能以低成本之簡易構成，構成光線利用率 良好、並抑制在螢幕5之影像顯示面中之照度不均或色彩 不均而顯示良好影像的光學系統。再者，根據有關實施形 態1之投影型顯示裝置，亦能得到容易將光學系統小型化 之效果。再者，照度分布係在任意之平面中，顯示對於以 2維表示之位置的照度高低之分布。 如同以上之說明，根據有關實施形態1之投影型顯示 323427 19 201219960 裝置，藉由將調整投影光量之開口規定構件6，配置於照 明光學系統4的光圈位置45附近，即不會產生在DMD元 件2上的影像形成區域2a光束短缺而顯示暗影（暗化部份) 的缺失。 另外，根據有關實施形態1之投影型顯示裝置，因將 開口規定構件6、61做成為不同形狀，以補正螢幕5之影 像顯示面的照度不均或色彩不均，故能良好地補正螢幕5 之影像顯示面的照度不均或色彩不均。如此，使用小型且 廉價之開口規定構件，而能良好地補正螢幕5的影像顯示 面之照度不均或色彩不均。 (實施形態2) 在實施形態2中，針對進一步改善藉由採用實施形態 1之開口規定構件61(第11圖）所得之照度分布（第12圖） 之開口規定構件63進行說明。第8圖所示之分割區域 107,相較於其他分割區域光量較少。將用以改善分割區域 107的開口部62a進行探討。 第13圖係為顯示開口規定構件62之開口部62a之形 狀之正面圖。在第13圖中，除了開口規定構件61的開口 區域61b之外，開口規定構件62的開口部62a復具備矩形 的開口區域62c。開口區域62c係對應於螢幕5之影像顯 示面的分割區域107。 第14圖係為顯示採用開口規定構件62時之螢幕5之 影像顯示面之照度分布。縱軸為相對亮度，橫軸為螢幕5 上之影像顯示面的分割區域。菱形的點係顯示使用開口規 20 323427 201219960 定構件6之情況的值，而三角形的點係顯示使用開口規定 構件62之情況的值。如第14圖所示，與採用開口規定構 件61之情況相比較，可得知營幕5之影像顯示面的分割區 域107的光量會增加，而改善螢幕5之影像顯示面之照度 分布。 有關實施形態2之投影型顯示裝置，係為了將螢幕5 之影像顯示面之亮度不均亦或色彩不均予以補正，而配置 將開口予以規定之開口規定構件62。此開口規定構件62 係形成為將螢幕5的影像顯示面之照度分布予以補正之形 狀。例如，藉由在對應於由正面觀看螢幕5時相對較暗之 區域的開口規定構件配置缺口部62b，即能縮小開口規定 構件62、63。另外，能抑制光線之利用效率的劣化，而將 螢幕5的影像顯示面之照度分布予以補正。 (實施形態3) 在實施形態3中，針對進一步改善藉由採用實施方式 2之開口規定構件62(第13圖）所得之照度分布（第14圖） 的開口規定構件63進行說明。於實施形態2中，如第14 圖所示，分割區域108之相對亮度係較其他分割區域之相 對亮度更為明亮。實施形態3中，開口規定構件63，係具 有能減低分割區域108之相對亮度之形狀。第15圖係為示 意顯示實施形態3.之開口規定構件63的開口部63a之形狀 的正面圖。第15圖所示之開口規定構件63的開口部63a， 係做成設有將對應於螢幕5的影像顯示面之分割區域107 之開口規定部63的區域63d予以遮光之突出部的形狀。 21 323427 201219960 第16圖係顯示在採用開口規 5 Γ顯示面之照度分布，為相對亮工 上之影像顯示面的分割區域。第】 仏軸為螢幕5 開口規定祕㈣ 細的點為使用 /現疋構件6之情況的值，三角形的 規定構件63之情況的值。如第16 _示，使用開口 之影像顯示區域的分割區域1〇8光 /知螢幕5 、善影像顯示面之照度分布。會減少’進一步改 有關實施形態3之投影型顯示裝置，係為 5 的影像顯示面之亮度不均或色彩不均予以補正，而在與^ 影光學系統之射入侧的開口部31之共輕位置附近的= 播路徑上，配置將開口予以規定之開口規定構件63。此開 口規定構件63係形成為將縣5的影像顯示面的照度分布 予以補正之形狀。若於此位置配置開口規定構件6 3，則能 縮小開口規定構件6 3。另外，能抑制光線之利用效率的劣 化，並將螢幕5之影像顯示面的照度分布予以補正。 (變形例） 在上述實施开> 態1至3中，雖已說明使用Dmd元件 以作為光閥的情況’惟亦可使用諸如穿透型或者反射型之 液晶顯示元件的其他光閥。 在上述實施形態1至3中，雖已說明開口規定構件5 之缺口部及突出部為矩形的情況，惟若為順應照明光學系 統之構造、配置、特性而提升照度均勻性的形狀，亦可為 矩形以外之形狀，例如包含曲線之形狀。 在上述實施形態1至3中，雖已說明除了具備圓形開 22 323427 201219960 光與系^並，、備缺口 或突出部之形狀，惟若為順應照明 =統之構造、配置、特性而提升照度均句性的形狀， ’、、于、了具備橢圓形的開口部等圓形以外的開口部，復具 備缺口部或突出部。 於上述實施形態1至3中’有使絲示「平行」、「垂 直」等零件間之位置關係或零件形狀的用語之情況，及大 致正方形、大致90度以及大致平形等附加「大致」亦或「大 體上」等用語的表現之情況。此等係表示包含考慮製造上 之A差及結構上之偏差等之範圍。因此，在申請專利範圍 中，即使例如有未記載「大致」等表現存在之情況 ，該表 現亦為包含考慮製造上之公差及結構上之偏差等之範圍 者。另外，在申請專利範圍中，例如記載有「大致」之情 況，係表不包含考慮製造上之公差及結構上之偏差等之範 圍。 【圖式簡單說明】 第1圖係為將有關本發明實施形態1至3之投影型顯 示裝置的光學系統之構成予以概略顯示之構成圖。 第2圖係為顯示有關實施形態1至3之照明光學系統 的光圈位置之示意圖。 第3圖（a)及(b)係為將有關實施形態1至3之DMD元 件之微鏡群的一部份予以概略顯示之正面圖以及說明繞射 光線之示意圖。 第4圖係為有關實施形態1至3之DMD元件上之繞 射光線的繞射角度間距之說明圖。 23 323427 201219960 第5圖係為顯示有關實施形態1至3之朝向投影光學 系統之射入光束的一例之示意圖。 第6圖係為顯示有關實施形態1至3之DMD元件之 繞射角度的計算例之圖。 第7圖係為顯示有關實施形態1至3之DMD元件之 繞射光線之示意圖。 第8圖係為顯示有關實施形態1至3之螢幕的影像顯 示面之分割區域之例的說明圖。 第9圖係為顯示有關比較例之開口規定構件的形狀之 正面圖。 第10圖係為顯示有關比較例之使用開口規定構件時 的螢幕之影像顯示面之亮度特性的說明圖。 第11圖係為顯示有關實施形態1之開口規定構件的形 狀之正面圖。 第12圖係為顯示有關實施形態i之螢幕之影像顯示 面之亮度特性的說明圖。 第13圖係為顯示有關實施形態2之開口規定構件的 形狀之正面圖。 ^ 14圖係為顯示有關實施形態2之螢幕之影像顯示 面之亮度特性的說明圖。 第15圖係為將有關實施形態3之開口規定構件的 狀予以示意顯示之正面圖。 y ? 16圖係為顯示有關實施形態3之螢幕之影像顯 面之売度特性的說明圖。 、 323427 24 201219960 【主要元件符號說明】 1 光源燈 2 DMD元件（光閥） 2a 被照明面（影像形成區域） 2b 微鏡 2c 反射面 3 投影光學系統 4 照明光學系統 5 螢幕 6、61、62、63 開口規定構件 6a、61a、62a、 63a 開口部 11a 發光體 lib 橢圓面鏡 20a 光線 20b 正反射光 21a、21b、22a 、22b、23a、23b繞射光線 31 射入側之開口部 41 光強度均勻化元件 41a 射入面 41b 射出面 42 中繼透鏡群（第2光學系統) 42a、42b 透鏡 43 鏡片群（第3光學系統） 43a 第1鏡片 25 323427 201219960 43b 第‘2鏡片 45 照明光學系統之光圈位置 51、52 光線 51a ' 52a 射入角 61b、62b、 62c、63b、63c 開口區域(缺口部、開口擴張部) 63d 遮光區域（突出部、開口縮小部） 101 至 109 分割區域 d 像素間距 m 繞射次數 a 射入角度 β 繞射角度間距 λ 波長 26 323427Deviation from the angle of incidence α is indicated by an arrow. Further, the rays 51 and 52 are different in the angle of the incident light of the light incident on the DMD element 2 in a broken line, and the specular reflection light 20b shown in Fig. 3 is also different. Fig. 6 is a view showing a change in the diffraction angle pitch ^ when the incident angle α is changed. In Fig. 6, the vertical axis is the diffraction angle pitch 々, and the horizontal axis is the incident angle. The diffraction angle pitch zs is such that the pixel pitch d is set to 7 m, and the wavelength is set to 530 nm, and based on the equation (1) Calculated as shown in Fig. 6, when the injection angle is read large, the diffraction angle pitch becomes "large. That is to say, if the angle of incidence α in the image forming region of the dmd tc member 2 is φ, the diffraction angle pitch /9 is also different. Fig. 7 is an opening showing the light beam incident on the incident side of the projection optical system 3. Ρ 31 is not intended. Furthermore, the light 2〇a is indicated by the arrow of the solid line, and the diffracted light is indicated by the arrow of the dotted line. The size of the opening π portion 31 on the incident side of the projection optical system 3 is defined in accordance with the (four) value of the projection optical system 3. In other words, when the FN 〇 value of the projection optical system 3 is large, the size of the opening portion 31 on the incident side is changed, that is, the projection optical system 3 has a small diameter. On the contrary, the size of the opening portion 31 of the projection optical system 3 whose FN 〇 value is small on the incident side of the lover is increased. That is, the projection optical system 3 becomes a large aperture. As shown in Fig. 7, the diffracted rays 21a and 2 of ±1 times are incident on the opening 31 of the projection optical system 3 on the incident side. However, as is understood from Fig. 7, the diffracted light of two or more times is not incident on the opening 31 of the projection optical system 3 on the incident side. Further, it is also known that when the opening portion 31 of the projection side of the projection optical 323427 14 201219960 system 3 is of a fixed size, once the incident angle α of the incident light 20a is changed, the amount of light of the incident diffracted light is also Will change. This is because the number of times of the diffracted light incident on the opening portion 31 on the incident side is changed on the plus side and the minus side. On the other hand, when the size of the opening portion 31 on the incident side is changed, even if the incident angle α is the same, the amount of light of the diffracted light that enters the opening portion 31 on the incident side of the projection optical system 3 also changes. The "change in the size of the opening portion 31 on the injection side" is changed by the FNO of the projection optical system 3. It can also be seen from Fig. 7 that in order to achieve high contrast, when the FNO of the projection optical system 3 is amplified, the amount of light of the diffracted light incident thereon becomes small. The reason for this is that when the size of the opening portion 31 on the incident side is reduced, the high-order diffracted light cannot enter the opening portion 31 on the incident side. There is a case where the amount of light of the light beam incident on the incident side opening portion 31 of the projection optical system 3 by the image forming region 2a of the DMD element 2 becomes uneven due to various factors such as these. For example, a case where the incident angle of the light beam of the image forming region 2a of the DMD element 2 is different due to the influence of the aberration or the configuration of the optical system, the case where the FNO of the projection optical system 3 is amplified, and the DMD are exemplified. The case where the element 2 is narrowly pitched, and the like. When the light amount of the light beam incident on the incident side opening portion 31 of the projection optical system 3 by the image forming region 2a of the DMD element 2 becomes uneven, illuminance unevenness or color of the image display surface of the screen 5 is generated. The unevenness causes deterioration of the image displayed on the image display surface of the screen 5. Therefore, a method of improving illuminance unevenness or color unevenness on the image display surface of the screen 5 will be described. The image display surface of the screen 5 is divided, 15 323427 201219960 " and the illumination of each divided area is confirmed by measurement or simulation. In the example shown in Fig. 8, the image display surface of the screen 5 is divided into nine regions. Further, the image forming area 螬 2a of the DMD element 2 can be divided into nine areas without dividing the image display surface of the screen 5 into nine areas. Further, the plurality of divided regions may be a plurality of regions arranged in a vertical row (M is an integer of 2 or more) in a horizontal column (Μ is an integer of 2 or more), and may be an area other than 3 rows and 3 columns. Fig. 9 is a view showing the shape of the opening portion 6a of the opening defining member 6. The general opening defining member is an opening defining member 6 as shown in Fig. 9, which defines the diameter of the illumination beam by the circular opening portion 6a and controls the amount of the illumination beam. An example of dividing the image display surface of the screen 5 into nine illuminance distribution results is shown in Fig. 10. Fig. 10 is a view showing the relative luminance of each divided area based on the center of the image display surface of the screen 5 (the divided area 105 in Fig. 8). The vertical axis is the relative brightness, and the horizontal axis is the divided area of the image display surface on the screen 5. Although the relative brightness generally has a value indicating illuminance, brightness, or design brightness, in the first embodiment, it is displayed in illuminance. In addition, although the characteristics regarding the brightness are shown in order to explain the illuminance unevenness, the same thinking mode can be applied to the characteristics of the color such as chromaticity with respect to the color unevenness. Fig. 10 is a view showing the brightness of the image display surface of the screen 5 as a relative value when the divided area 105 which is the center of the image display surface of the screen 5 is used as a reference. In the divided area 101 of Fig. 8, the relative value of the luminance is 0.7, and in the divided area 102, the relative value of the luminance is 0.75, and in the 16 323427 201219960 divided area 1〇3, the relative value of the luminance is 〇.8. Thus, according to Fig. 10, it can be seen that the unevenness of the brightness of the image display surface of the screen 5 is large. As shown in Fig. 1, a method of eliminating illuminance unevenness on the image display surface of the screen 5 will be described. As shown in Fig. 2, the dmd element 2 and the exit surface of the light intensity equalizing element 41 are in an optical co-comb relationship one. Therefore, it is assumed that a structure in which the correction illuminance unevenness is provided in the vicinity of the emission surface of the light intensity uniformizing element 41 causes a shortage of a light beam in the image forming region 2a on the dmd element 2 to display a shadow (dark portion). . On the other hand, the 'opening portion on the incident side of the projection optical system 3' and the aperture position 45 of the photographing system 4 are not in an optically shared relationship with the screen 5. The position of the optical system 4 is _ The position of the optical unit is optically common. Therefore, even if the position S is used to compensate for the uneven illumination structure, the image display beam of the screen 5 is not short and the shadow (dark portion) is missing. And (4) can be: in the image display surface 4 of the screen 5 shown in Fig. 10, the mosquito m is arranged near the first ring position 45 of the optical system = the shape of the opening member member 6 is explored. The opening configuration 61 of Fig. 9 is shown in Fig. 11. Fig. u shows the opening of the opening member of the screen 5 in the image display surface of the screen 5. The specification: member 61 is used to open the opening. The opening/closing of the member 61 is not the circular shape of the opening portion 6a as shown in Fig. 9, but the illuminance unevenness or color of the image display surface of the correction screen 5 is not specified. Uneven shape. That is, on the right side of Figure 11 In the opening area (notch portion) 61b, the area of the opening 61a having a large influence on the amount of light of the divided areas 101, 102, and 103 having a low relative luminance (the amount of light is small) shown in Fig. 10 is the eleventh figure. The portion of the rectangular opening region 61b is shown. Since the amount of light toward the divided region 1 (Π, 102, 103 is small, the shape of the opening defining member 61 corresponds to the divided regions 101, 102, 103, for example, a newly set rectangle In the opening region 61b, the opening portion 61a of the opening defining member 61 is formed by adding a rectangular opening region 61b to the circular opening portion, and can accommodate a large amount of light. Fig. 11 is a case where the opening defining member 61 is used. The illuminance distribution of the image display surface of the screen 5. In Fig. 11, the vertical axis is the relative brightness, and the horizontal axis is the divided area of the image display surface on the screen 5. The diamond dot indicates the value when the opening defining member 6 is used. The triangle dot indicates the value when the opening defining member 61 is used. The method of measuring the relative brightness is the same as that of Fig. 8. In Fig. 12, the opening regulating member 6 is disposed in comparison with the opening having the circular opening. Situation, available In the case of the opening defining member 61, the amount of light of the divided areas 10 102, 103 of the image display surface of the screen 5 is increased, and the illuminance distribution of the image display surface is improved. The projection type display device according to the first embodiment is for the screen. 5, the luminance unevenness or the color unevenness of the image display surface is corrected, and the opening regulation for defining the opening is arranged on the light propagation path in the vicinity of the conjugate position of the opening 31 on the incident side of the projection optical system. Member 6, 18 323427 201219960 61. The opening defining members 6, 61 are formed in a shape that corrects the illuminance distribution of the image display surface of the screen 5. If the opening defining members 6, 61' are disposed at this position, the opening defining members 6, ο can be narrowed. In addition, deterioration of light use efficiency can be suppressed, and illumination distribution on the image display surface of the screen 5 can be corrected. In addition, the reason why the opening portion 31 on the incident side of the projection optical system is in the vicinity of the conjugate position is that the opening defining members 6 and 61 cannot be arranged in the conjugate due to the relationship of the structure such as the lens frame. The situation at the location. Therefore, in the design, the opening defining members 6, 61 are disposed at positions apart from the conjugate position within the range in which the disadvantages are suppressed. In the case of the example of the optical diagram, the conjugate position is very close to the exit surface of the relay lens group 42 of the illumination optical system 4 depending on the design of the optical system, and cannot be arranged in the relationship between the relay lens group 42 and the lens frame. Conjugate position. The conjugate position is different from the design of the optical system, and may be the exit end side of the lens group 43. However, in this case, the opening defining members 6, 61 are also interfered with by the holding member of the lens group 43. Configure the location to move. Therefore, according to the projection type display device of the related embodiment, it is possible to obtain an effect that the light utilization efficiency is good and the illuminance unevenness or color in the image display surface of the screen 5 is suppressed. An optical system that displays good images. Further, according to the projection type display device of the first embodiment, it is possible to obtain an effect that the optical system can be easily miniaturized. Further, the illuminance distribution is in any plane, and shows the distribution of the illuminance at the position expressed in two dimensions. As described above, according to the projection type display 323427 19 201219960 of the first embodiment, the opening defining member 6 for adjusting the amount of projection light is disposed near the diaphragm position 45 of the illumination optical system 4, that is, it does not occur in the DMD element. The image forming area 2a on 2 has a shortage of light beams and shows the absence of a shadow (darkening portion). Further, according to the projection type display device of the first embodiment, since the opening defining members 6 and 61 are formed in different shapes to correct unevenness in illumination or color unevenness on the image display surface of the screen 5, the screen 5 can be satisfactorily corrected. The image display surface has uneven illumination or uneven color. As described above, it is possible to satisfactorily correct unevenness in illumination or color unevenness of the image display surface of the screen 5 by using a small and inexpensive opening defining member. (Embodiment 2) In the second embodiment, the opening defining member 63 of the illuminance distribution (Fig. 12) obtained by using the opening defining member 61 (Fig. 11) of the first embodiment will be described. The divided area 107 shown in Fig. 8 has a smaller amount of light than the other divided areas. The opening portion 62a for improving the divided region 107 will be discussed. Fig. 13 is a front elevational view showing the shape of the opening portion 62a of the opening defining member 62. In Fig. 13, in addition to the opening region 61b of the opening defining member 61, the opening portion 62a of the opening defining member 62 is provided with a rectangular opening region 62c. The opening area 62c corresponds to the divided area 107 of the image display surface of the screen 5. Fig. 14 is a view showing the illuminance distribution of the image display surface of the screen 5 when the opening defining member 62 is used. The vertical axis is the relative brightness, and the horizontal axis is the divided area of the image display surface on the screen 5. The point of the diamond shows the value of the case where the member 6 is fixed using the opening gauge 20 323427 201219960, and the point of the triangle indicates the value of the case where the member 62 is specified using the opening. As shown in Fig. 14, as compared with the case where the opening defining member 61 is used, it is known that the amount of light of the divided area 107 of the image display surface of the camp 5 is increased, and the illuminance distribution of the image display surface of the screen 5 is improved. In the projection type display device of the second embodiment, the opening defining member 62 for defining the opening is provided in order to correct unevenness in brightness or color unevenness of the image display surface of the screen 5. The opening defining member 62 is formed in a shape that corrects the illuminance distribution of the image display surface of the screen 5. For example, by providing the notch portion 62b in the opening defining member corresponding to the region which is relatively dark when the screen 5 is viewed from the front, the opening defining members 62, 63 can be narrowed. Further, the illuminance distribution on the image display surface of the screen 5 can be corrected by suppressing the deterioration of the light use efficiency. (Embodiment 3) In the third embodiment, the opening defining member 63 of the illuminance distribution (Fig. 14) obtained by using the opening defining member 62 (Fig. 13) of the second embodiment will be further described. In the second embodiment, as shown in Fig. 14, the relative luminance of the divided region 108 is brighter than the relative luminance of the other divided regions. In the third embodiment, the opening defining member 63 has a shape capable of reducing the relative brightness of the divided region 108. Fig. 15 is a front elevational view showing the shape of the opening 63a of the opening defining member 63 of the third embodiment. The opening 63a of the opening defining member 63 shown in Fig. 15 has a shape in which a protruding portion corresponding to the region 63d of the opening defining portion 63 of the divided region 107 of the image display surface of the screen 5 is shielded. 21 323427 201219960 Figure 16 shows the illuminance distribution on the display surface of the opening gauge, which is the divided area of the image display surface on the relatively bright. The 仏 axis specifies the secret for the opening of the screen 5 (4) The thin point is the value of the case where the member 6 is used, and the value of the triangular member member 63. As shown in the 16th _, the illuminance distribution of the divided area 1〇8 light/information screen 5 and the good image display surface of the image display area of the opening is used. In the case of the projection type display device of the third embodiment, the luminance unevenness or the color unevenness of the image display surface of the fifth embodiment is corrected, and the opening portion 31 of the incident side of the optical system is replaced. An opening defining member 63 for defining an opening is disposed on the = broadcast path near the light position. The opening regulating member 63 is formed in a shape that corrects the illuminance distribution of the image display surface of the county 5. When the opening defining member 63 is disposed at this position, the opening defining member 63 can be narrowed. Further, it is possible to suppress the deterioration of the light use efficiency and correct the illuminance distribution on the image display surface of the screen 5. (Modification) In the above-described embodiments 1 to 3, the case of using a Dmd element as a light valve has been described. However, other light valves such as a transmissive or reflective liquid crystal display element can be used. In the above-described first to third embodiments, the case where the notch portion and the protruding portion of the opening defining member 5 are rectangular is described, but the shape in which the illuminance uniformity is improved in accordance with the structure, arrangement, and characteristics of the illumination optical system may be used. A shape other than a rectangle, for example, a shape containing a curve. In the above-described first to third embodiments, it has been described that, in addition to the circular opening 22 323427 201219960 light and the system, the shape of the notch or the protruding portion is provided, but it is improved in conformity with the structure, arrangement, and characteristics of the lighting system. The shape of the illuminance is uniform, and the opening portion other than the circular shape such as the elliptical opening portion is provided with a notch portion or a protruding portion. In the above-described first to third embodiments, the term "the relationship between the positions of the components such as "parallel" and "vertical" or the shape of the part is indicated, and the "roughly" such as a square, a substantially 90 degree, and a substantially flat shape are also added. Or the performance of terms such as "substantially". These are meant to include ranges that take into account manufacturing A differences, structural variations, and the like. Therefore, in the scope of the patent application, even if there is a case where there is no such thing as "rough", the performance is included in the range of manufacturing tolerances and structural deviations. Further, in the scope of the patent application, for example, "roughly" is described, and the scope of the specification does not include consideration of manufacturing tolerances and structural deviations. [Brief Description of the Drawings] Fig. 1 is a configuration diagram schematically showing the configuration of an optical system of a projection type display device according to Embodiments 1 to 3 of the present invention. Fig. 2 is a view showing the aperture position of the illumination optical system of the first to third embodiments. Fig. 3 (a) and (b) are front views schematically showing a part of a micromirror group of the DMD elements according to the first to third embodiments, and a schematic view for explaining diffracted rays. Fig. 4 is an explanatory view showing the diffraction angle pitch of the diffracted rays on the DMD elements of Embodiments 1 to 3. 23 323427 201219960 Fig. 5 is a view showing an example of the incident light beams directed to the projection optical system according to the first to third embodiments. Fig. 6 is a view showing a calculation example of the diffraction angle of the DMD elements of the first to third embodiments. Fig. 7 is a view showing the diffracted rays of the DMD elements of the first to third embodiments. Fig. 8 is an explanatory view showing an example of a divided region of the image display surface of the screens of the first to third embodiments. Fig. 9 is a front view showing the shape of the opening defining member of the comparative example. Fig. 10 is an explanatory view showing the luminance characteristics of the image display surface of the screen when the opening defining member is used in the comparative example. Fig. 11 is a front elevational view showing the shape of the opening defining member of the first embodiment. Fig. 12 is an explanatory view showing the luminance characteristics of the image display surface of the screen of the embodiment i. Fig. 13 is a front elevational view showing the shape of the opening defining member of the second embodiment. Fig. 14 is an explanatory view showing the luminance characteristics of the image display surface of the screen of the second embodiment. Fig. 15 is a front elevational view showing the shape of the opening defining member of the third embodiment. The y 16 diagram is an explanatory diagram showing the temperature characteristics of the image display of the screen of the third embodiment. 323427 24 201219960 [Explanation of main component symbols] 1 Light source lamp 2 DMD component (light valve) 2a Illuminated surface (image forming area) 2b Micromirror 2c Reflecting surface 3 Projection optical system 4 Illumination optical system 5 Screen 6, 61, 62 63 opening defining members 6a, 61a, 62a, 63a opening portion 11a illuminating body lib ellipsoidal mirror 20a ray 20b regular reflected light 21a, 21b, 22a, 22b, 23a, 23b illuminating light 31 on the incident side opening portion 41 Intensity equalizing element 41a Injecting surface 41b Emitting surface 42 Relay lens group (second optical system) 42a, 42b Lens 43 Lens group (third optical system) 43a First lens 25 323427 201219960 43b No. 2 lens 45 Illumination optics System aperture position 51, 52 Light 51a' 52a Injection angles 61b, 62b, 62c, 63b, 63c Opening area (notch, opening expansion) 63d Light-shielding area (protruding, opening reduction) 101 to 109 Division area d Pixel pitch m diffraction times a injection angle β diffraction angle spacing λ wavelength 26 323427