201217139 六、發明說明： 【發明所屬之技術領域】 本發明是有關一種用於由濃液形成用作相位差膜之膜 的流延裝置及溶液製膜方法。 【先前技術】 通常，液晶顯示器上使用相位差膜，由於液晶顯示器的 大晝面化和高精細化，對相位差膜所要求之品質亦越來越 嚴格。作爲所要求之品質備受重視的是光學特性，作爲光 學特性有Re、Rth、慢軸的方向（取向角）的均勻性等。 其中，對慢軸的方向的均勻性之要求非常嚴格。具體而言， 要求在長形膜中的寬度方向上，將慢軸的偏離量（以下， 稱爲軸偏離量）相對於目的慢軸的方向抑制在_15。以上 1.5°以内的範圍，進一步要求在膜整個區域内將轴偏離量 抑制在-1。以上1。以内的範圍，抑制在_〇 4。以上〇 4。以内爲 較佳。再者，Re是膜面内的光學各向異性，Rth是膜面内 和膜厚方向的光學各向異性。對於連續進行難造而得到 之長形膜，在將nx設爲朗長邊方向的折射率、町設爲 膜的寬度方向的折射率、似設爲膜的厚度方向的折射率、 d設爲膜的厚度時，分別以如下公式求出⑸和尬。201217139 SUMMARY OF THE INVENTION [Technical Field] The present invention relates to a casting apparatus and a solution film forming method for forming a film for use as a retardation film from a dope. [Prior Art] Generally, a retardation film is used on a liquid crystal display, and the quality required for the retardation film is becoming more and more strict due to the large surface finish and high definition of the liquid crystal display. The optical characteristics are highly regarded as the required quality, and the optical characteristics include the uniformity of the direction (orientation angle) of Re, Rth, and the slow axis. Among them, the requirement for the uniformity of the direction of the slow axis is very strict. Specifically, it is required to suppress the amount of deviation of the slow axis (hereinafter referred to as the amount of axis deviation) from the direction of the target slow axis to _15 in the width direction of the elongated film. The above range of 1.5 or less further requires that the amount of axial deviation be suppressed to -1 over the entire area of the film. Above 1. Within the range, it is suppressed at _〇 4. Above 〇 4. It is better inside. Further, Re is an optical anisotropy in the film plane, and Rth is an optical anisotropy in the in-plane direction and the film thickness direction. In the case of the elongate film which is hard to be formed, the refractive index in the longitudinal direction of nx is set to the refractive index in the width direction of the film, and the refractive index in the thickness direction of the film is set to d. At the thickness of the film, (5) and 尬 were obtained by the following formulas, respectively.
Re= (ny-nx) xdRe= (ny-nx) xd
Rth= ((ny+nx) /2-nz) xd 作爲盤造用作相介r莫睹ηϋ n ..Rth=((ny+nx) /2-nz) xd is used as a disk for phase-inversion r睹ηϋ n ..
的市場越來越擴大，隨著該市場的擴大， 溶液製膜中膜的 4 201217139 39227pif 製造效率亦需要提高。 溶液製财法在工紅以連續方式進行H，連續 濃液來作爲流延膜並剝離流延膜爲止的流延製程 離流延膜亦即膜進行乾燥之乾燥製程。流延製程 ^眺程t提高流延製財的速度__製造效率的提 因此’爲了提高流延_乾騎度，以往使風像日本 ’J公開日召61-110520號公報或曰本專利公開昭 -055214號公報那樣流動。在日本專利公開昭61损汹 琥公報中，使乾燥風相對流延膜平行地流動，並使其 =以相對於流賴的行進方向成爲逆流或賴之^式流 ^。另外，在日本專利公開昭64_〇55214號公報中，對在 行進之支龍上由特定濃液形成之流賴噴吹垂直於 祺之乾燥風。 ' 此外，在日本專利公開昭64_〇55214號公報中，爲了 乾燥而對流賴喷吹風，將風的方向與支撐體表面所成之 角設爲45。〜80。或90。。在日本專利公開2〇〇3·1〇3544號 公報中，將從噴嘴朝向流延膜送出之風的方向設 5。〜 9〇〇 〇 ”’ 然而，藉由吹送風而使流延膜乾燥之方法中，爲了有 欸果甚至高效率地進行其乾燥，加熱作爲風喷吹之空氣並 而其變暖。如此，若將已加熱空氣吹送至流延膜，則支撑 體中未形成有流延膜之露出部份會慢慢昇溫。若支撐體的 路出部份的溫度過度昇高，則流延膜的各側部的溫度亦過 201217139 度上昇，產生起泡。 因此，爲了防止因向流延膜喷吹之風引起這種支撐體 侧部的露出部份的溫度上昇，在日本專利公開2〇〇5 〇47 i4丄 號公報中，設置遮風板，以免風接觸支撐體的露出部份。 然而，使風相對於流延膜平行地流動之方法與不喷吹 風之情況相比，乾燥速度較快，但存在於流延膜上產生向 流延方向延伸之細小條紋之類的問題。並且，在曰本專利 公開2003-103544號公報中，若對流延膜垂直地喷吹風， 貝J導致在風接觸到流延膜之後朝向上游側。被指出因該流 動而弓丨起膜厚變得不均勻之情況。 在此，日本專利公開2003-103544號公報的方法中， ，了^一步加快乾燥速度就要提高喷吹之氣體的溫度。但 疋，若如此提高氣體溫度，則在反復進行流延和剝離期間， 有=·支樓體的溫度在寬度方向上變得不均勻，所得到之膜 的光學特性、尤其是軸偏離量變成較大且在寬度方向上不 均勻者，或者支撐體的侧部逐漸翹曲。支撐體一旦開始翹 曲:則其翹起隨著繼續行進而慢慢變大，行進中的矯正幾 ^疋不可能的。並且，近年來，還有對膜的寬幅化的要求， =上的問題在伴隨朗寬幅化之支雜的寬幅化或用於謀 二進-步提高製造效率之支碰的長雜上，變得更加顯 【。另外，在日本專利公開2005_047141號公報的方法中， ^體相對於流延膜並行地流動於1對遮風板的一方與另— 之間，因此，氣體的溫度在流延膜的寬度方向上變得不 =勻。由於氣體的溫度在流延膜的寬度方向上變得不均勻， 6 201217139 39227pif 存在膜的光學特性巾尤妓#偏離量在寬度M上變得不 均勻之問題。 【發明内容】 因此’鑒於上述問題’本發明的目的在於提供一種， 爲了提咼基於溶液製膜的膜製造效率而謀求進一步提高流 延膜的乾騎度’並且謀求_慢軸的方向在寬度方向上 的均勻化，從而防止支撐體的翹曲之流延裝置和溶液製膜 方法。 、 爲了解決上述課題，本發明的流延裝置具備流延支撐 體、第1供氣部及1對第i遮風構件。流延支樓體爲環狀( 前述流延支雜在流延濃液之流延面形成流賴。前述流 延支樓體向長邊方向連續行進，並以從_位置返回流延 位置之方式循環。剝離位置是剝下前述流延膜之位置 述流延位置是流延前述毅之位置。前述第丨供氣 已加熱氣體。前述第1供氣部從與前述流延支 開口送出前述氣體。前述第i供氣部向相對於前述流延膜 的膜面垂直之方向送出前述氣體。前述丨對第i 件 沿f述流延支碰的行進路延伸1述第1遮 於如述流賴嫩的通過管—㈣述通過牛責ς 前述流延支禮體的寬度方向之内側。前述第 制前述氣體從前述流延膜__近向前^ t抑 部的露出部份流出。 支樓體侧 前述第1供氣部具有供氣導管和複數 前述供氣導管的底面與前述流延切體胃巧較佳。 _ 而配设，以便 201217139 39227pif = 流=，复:述:嘴向前述供氣導管的前 行進方向F /置。别述複數個噴嘴在前述流延支稽體的 前端。i述;開間隔而排列。前述開口設置於前述喷嘴的 縫狀。前述二口爲向前述流延支樓體的寬度方向延伸之狭 供氣導管^位Ϊ構件设置於距前述流延面的高度低於前述 開口二氣=爲較佳。排氣部從複數個 口在各個前述喷触十w 排氣相刖述複數個開 流延裝置間對置而設置。 述第2供氣部;出^!^°第2遮風構件爲較佳。前 氣=前述流延支撐體二 === 第2供氣部向相對於前述流”體別迷 前述第2姐構件介由麵的仃祕延伸。 件呈對向設置。前述第2 而與剛述第1遮風構 2:，非流延面中對應於前述露第 =?:;!述流延面的相反-側的表; -延裝置在别述第！供 較佳。前述第1供氣部設 :轉:、傷第3供氣部爲 面朝上而行進之第！扞、隹」延支撐體使前述流延 前述流延支樓體的行3 _部具有朝向 丁進方向上的上游側之開口。前述第3 201217139 39227pif 從別述開σ送出成騎所通過之前述流延膜的膜面 千灯的逆流之氣體。 述第3供㈣設置於前述歧支撐體使前述流延面 朝下而行進之第2行進區域爲較佳。 =發_雜製财法具備歧卿齡驟（Α步 =、_後的乾齡驟（B步驟）、__乾燥步驟（c 抑制步驟（D步驟）QA步驟，於向長邊方向連續 ^"^_之¥狀/711·延支撲體u延濃液而形成流延膜。B步驟， =述μ延支樓體剝下前述流延膜並進行乾燥。對剝下前 述延膜之後㈣賴延找體再次騎前述A步驟。c 2在相雜前賴賴_面垂直之料上似氣體來 對刚述流延膜進行乾燥。D步驟在前述c步驟巾進行。D 步驟藉由1對第i遮風構件抑制前述氣體從前述流延膜的 膜面附近向前述流延支撐體侧部的露出部份流出。前述i 對第1遮風構件配設於前述流延膜側緣的通過管路上或比 ^述通過管路更靠近前述流延讀體的寬度方向之内侧。 前述第1遮風構件沿前述流延支撐體的行進路延伸。 從具有供氣導管和在前端形成有開口之複數個喷嘴之 第1供氣部的前述開口送出前述氣體爲較佳。前述供氣導 管的底面與如述流延支撐體對置而配設，以便覆蓋所通過 之前述流延膜。前述喷嘴向前述供氣導管的前述底面突出 而設置。前述複數個噴嘴在前述流延支撐體的行進方向上 隔開間隔而排列。前述開口爲向前述支禮體的眘译 伸之狹縫狀。前述遮風構件設置於距流延面之高^低二前 201217139 jyzz/pif 述供氣導管之位置。前述流延面是 前述濃液之表面。 延炫體中流延 於高於前述第1遮風構件且與各個前述喷嘴 嘴之^置之位置則前述流延關邊的氣_較=嘴 溶液製膜方法進-步具備以下E步驟和 佳。E步驟對正從前述第1供氣部被喷吹前述氣體 流延膜喷吹已加熱氣體來使前述流延膜的溫度 步驟的前述氣體向相對於非流延面垂直之方㈣吹。：E 非流延面是前述流延支樓體的前述流延面的相反-側2 面:F步驟藉由第2遮風構件抑制前述氣體向前述= 面中對應於前述露出部份之侧部流出。前 流延纖的行進路延伸。前述第2遮風構：： 刚述〜延支賴而與前述第丨遮風構件呈對向設置。 C步=3綠=町G步驟爲較佳。G步驟在前述 c Y驟之魏π。G步簡由送 逆流之氣體來乾燥前述流延膜。前述c步驟 Μ μ」 體的别錢延膜進行。 撑體I的前述流延面朝下而行進之前述流延支 茯體上的剛述流延獏進行爲較佳。 依本發明，由於提高基於溶液 ==進一步提高流延膜的乾燥迷度=上 止支標體的翹曲。 輯低’並且防 【實施方式】 201217139 39227pif ，由第1圖所示之溶液製膜設備1〇實施本發明的第】 ^態樣爲較佳。溶液製膜設備職上游側依次具備流延 裝置u、第1拉幅機17、輥乾燥裝置21、第2拉幅機23、 ^機=及捲取裝置27。流延裝置15由聚合物溶解於溶 d中之/辰液11形成聚合物膜（以下，僅稱爲“膜，，）12。 1，機17 -邊以作爲保持手段之夾子16保_ 12的各 則j，-邊進行膜12的乾燥。餘燥裝置2卜邊以 支稽膜12，一邊進行乾燥。第2拉幅機23以作爲 之夾子22保持膜12的各側部，對膜12職予J 心j張力。分切機26切除藉由第1拉幅機17的夾子 ^ 機23的保持手段22保持之各側部的保持痕 跡將膜12捲繞於卷芯上，並作成輥狀。 旦美中’溶劑含有率（單位；％)是干 = A 具而S ’將溶劑的質量設爲Χ、膜12的質 劑含有率(單位;%)爲以{χ/㈣}_ 體之備形絲軸之作爲無端的流延支撐 捲繞於第1輥31和第2輕32 ^ f第2親32。帶30 輥32中至少任意一方爲 該驅動輥關向補來傳送接X之·駆純即可。藉由 送，帶3〇觀且向㈣方向m。之㈣。藉由該傳 流延模35向被傳送之::出連農二1:之流延模35。藉由從 連續流出濃液11，濃液U在 11 201217139 39227pif 帶30上流延而形成流延膜36。再者’以下將濃液u開始 接觸於帶30之位置稱爲流延位置pc。 第1輥31和第2輥32分別具備控制周面溫度之溫度 ^制器（未圖示）。第1親31簡面溫度成預定範圍之方 式冷卻。藉由冷卻第，帶3〇按每i周冷卻。由此， 即使連續打進而被後述之第1上游域供排氣單元41、第】 :游域供排氣單元42及第2下游域供排氣單元43持續加 熱’亦可更可靠地防止帶30的兩侧部3〇s (辦第3圖） 的溫度上昇。流延模35設置於第w3l上的帶3〇的上方， 流延位置PC設在第1輥31上。第2 ft 32以周面溫度成 == 的方式加熱。藉由加熱第2觀 效地乾 燥流延膜36。 第1輥31的周面溫度設爲3以上3 〇 較佳，5°C以上25t以下的制爲更佳 ^下 的範圍爲進一步較佳。第2棍32沾田C 乂上20 C以下 上5(TC以下的範圍爲較佳，坑以^面溫度設爲2〇°C以 佳省听町的範關的範圍爲更 流延模35不限於設置在位於第1觀31上之帶⑽的上 广設置於從第1轉31朝向第2報32 30的下方配設輥33，並在由輥33支：親:: 流延模35爲較佳。 Κ帶30#上方㈣ 關於從流延模35至帶3〇之濃液u 於帶30的行進方向上的上游設置減壓室，=示ί 12 201217139 jyzz /pif 減壓室吸引從流延模35流出之濃液il的上游侧區的氣團 並對前述區進行減壓。 將流延膜36固化至可向第1拉幅機17傳送之程度之 後，以包含溶劑之狀態從帶3〇剝下。在溶劑含有率較佳爲 20質量％以上50質量％以下的範圍、進一步較佳爲25質 量％以上45質量％以下的範圍内進行剝離爲更佳。藉由在 達到50質量％這樣的低溶劑含有率之後剝離，與以大於 5〇質量％之溶劑含有率剝離時相比，能夠使慢軸的方向更 可靠地均勻。另外，以20質量％以上剝離時，與以不到 20質量％剝離時相比，能夠更可靠地提高製造效率。 剝離時，用剝離用輥（以下，稱爲剝離輥）37支撐膜 12，將從帶30剝下流延膜36之剝離位置pp保持爲恒定。 剝離親37亦可以是具備驅動手段並沿周向旋轉之驅動輕。 再者，剝離在第1輕31上的帶3G上實施。若帶3〇循環而 從剝離位置返_流延位置pc，縣次流延新的濃液 行進之帶30的流延面朝上而 :進之第1仃進£域，包含流延膜形 :====置心。 行進區域’包含流延膜二 =二下而行進之第2 處具:更靠近下游 元-的下游具備有-下游域供二1元上:r:下氣: 13 201217139 ^yz-Δ /pif ί^ο氣的單42和第2下游域供排氣單元43。如此，沿 „ 行進路，從上游侧依次設置有第1上/〇 早元41、第1弟上游域供排氣 單元43。2料供魏單元42及第2下游域供排氣 ^是Γί;下游域供排氣單元的數量並不限定於; 用其他附圖in。和上游域供魏單元41，將利 第1下游域供排氣單元42具備流出已乾燥氣體 二二=氣體並排氣之排氣部47及控制器48。控制器 向=、乳。卩46送出氣體，並獨立調整其氣體的溫度、濕 度、來自供氣部46之流量及排氣部47中的吸引力。第^ 下游，供排氣單元43亦與第1下游域供排氣單元相同，具 備供氣部49、排氣部5〇及控制器51。 供氣部46、49配設於帶30的第2行進區域中比剝離 位置PP更罪近上游之位置。排氣部47配設於供氣部46 的上游’排氣部50配設於供氣部49的上游。流出氣體之 供氣部46、49的各流出口 46a、49a和吸引氣體之排氣部 47、50的各吸引口 47a、50a同爲向帶30的寬度方向延伸 之狹縫狀開口。供氣部46、49以流出口 46a、49a朝向帶 30行進方向上的上游侧之方式配設。排氣部47、50以吸 引口 47a、50a與帶30對置之方式配設。 藉由如上配設供氣部46、49和排氣部47、50，來自 供氣部46、49之氣體以相對於被傳送而通過之流延膜36 的膜面平行之逆流方式流動。藉由設爲逆流’能夠比順風 更有效地乾燥流延膜36。 201217139 jyZZ./pif 從第2輥32朝向剝離位置PP之帶3〇因爲於朝向下 方之可面上形成有流延膜36 ’所以無法用支撐手段從下方 支撐。因此，從苐2槪32朝向剝離位置pp之帶採取 因自重而向下突出的行進路徑。另外，在乾燥效率這一點 上’向相對於流延膜36垂直之方向噴吹氣體之情況比並行 流，的情況更優異。然而’爲了以比並行流動時更能提高 乾燥效率之程度的流量向垂直方向噴吹氣體，需要在流延 膜=6的下方设置較多的供氣手段。供氣手段配設得越多， 供氣手段與帶30相接觸之擔憂就越高。因此，藉由將供氣 =46、49均配設於從第2親32朝向制離位置pp之㈣ 的下方，財行之驗氣體賴第2親32躺剝離 PP之流延膜36進行乾燥。 1 游域於對於岐膜36平狀縣氣體之下 量’並不像本實施方式那樣限定於2, 本實施方式中，藉由控制器48 地控制第1下游域供排氣單元42和第二祕刀別獨立 43,但亦可以藉由1_制（下_供排氣單元 來自供氣部獨立地控制。 藉由使如此城之溫36 =、51加熱。 36，並進行乾燥。 、上"丨<動，加熱流延膜 在流延裝置15與第〗# 配設送風裝置（未圖示）。藉由^自之間的傳送路上亦可 行臈12的乾;^ 藉由來自錢風裝置之送風來進 15 201217139 ^y^z/pif 用剝離親37剝離流延膜36。被剝離之流延膜36、即 膜12被引導至第1拉幅機17。 第1拉幅機17用夾子16保持膜12並沿長邊方向傳送， 同時賦予寬度方向上的張力，擴展膜12的寬度。第1拉幅 機Π上從上游側依次形成有預熱區、拉伸區及鬆弛區。再 者’亦可沒有鬆弛區。 第1拉幅機17具備1對導軌（未圖示）及鏈條（未圖 示）導執δ又置於膜12的傳送路兩側，1對導執以預定間 隔分隔而配設。該導軌間隔在預熱區中爲恒定，在拉伸區 中隨著朝向下游而逐漸變寬，在鬆弛區中爲恒定。再者， 鬆弛區的導軌間隔亦可隨著朝向下游而逐漸變窄。 鏈條架設於驅動鏈輪及從動鏈輪（未圖示），且沿導執 移動自如地安裝。複數個夾子16以預定間隔安裝於鍵條 上。藉由驅動鏈輪的旋轉，夾子16沿導轨循環移動。 夾子16在第丨純機17的人明賴 並朝向出。移動，在出口附近解除保持。丨： 持之夾子16再次移動至人σ附近，保持新引導過來之 預熱區、拉伸區及鬆弛區是藉 的送错㈣自料54之乾燥風 外罢: 成者，並沒有明確的邊界。導管54 设置於膜12的傳送路上方。導 您1導管54 縫，從送職W具有送出餘風之狹 ^ 仏給。送風機將調整爲預定溫度 4庶度之乾紐風送至導管5 又 送路對置之方式配設。各狹_‘12^^=: 16 201217139 wzz/pif i伸t狀’在傳送方向上相互隔開預定間隔而形成。再 ::具有相同結構之導管設置於膜12的傳送路的下 方，^可設置於膜12的傳送路的上方和下方雙方。 之史極拉巾罐17中，邊傳送膜邊藉由來自導管54 度。U進行乾燥’並且藉由夾子b在預定時刻改變寬 %以，中膜12的溶劑含有率爲7質量％以上30質量 拉伸處理時的拉伸率ER1 (κ拉伸後的 較ί啦伸處理則中的膜宽^)}xl00)大於5%且在30°/❶以下爲 佳。處切U的溫度在8(rc以上16(rc以下爲較 機二:ft的在内:氣團，其溫度或濕度等藉由空調 複數個輥20上二/輥乾燥裝置21中，膜12被捲繞於 蒸發溶劑。在二^置21中，亦從臈12 率成爲5質量^至溶劑含有 再者，當從輥乾燥裝置21送出 =裝置21與第2拉幅機23之間設置2捧曲時’ ^ n料正_正捲曲，並裝置（未 第2拉幅機23向寬度方向拉伸膜 , 成爲具有所希朗光料性謂u 伸， 爲相位差_用。第2拉幅機23 12例如作 =構。再者，設置於第2拉幅機有d= (未圖示）⑽加減狀溫度之乾料 17 201217139 jy22/pif 流動。 ㈣if幅機23中的拉伸時的拉伸率ER2 (={(拉伸 (拉伸前的寬度）}xlG。）大於_上且在 。/以°下s 4較佳。拉伸開始_12的溶劑含有率在3質量 較佳。拉伸時膜12的溫度在130°C以上200°c以 下爲較佳》 作爲製造目的之膜12的光學特性，可以不使用第 二23。例如’在基於第i拉幅機17之拉伸中顯現作 爲目=之特性時’相不使用第2拉幅機23。 若膜12被引導過來，則第2拉幅機23的下游的分切 機^刀除包含因第1拉幅機Π或第2拉幅機23的各夾子 16、產生之保持痕跡之側部。將切除側部之膜12送至 捲置27 ’並捲取成輥狀。再者，在流延裝置15與第1 拉幅機17之間或第1拉幅機Π與報乾燥裝置21之間亦可 設置分切機。 參考第2〜第4圖，對第丨上游域供排氣單元41進行 説明。再者’爲了避免圖的繁雜化，在第3、第4圖中省 略第1輥31的圖示。 第^上游域供排氣單元41設置於流延位置PC的下游， 具備，氣部61、作爲遮風構件之遮風板62及排氣部63。 供氣。P 61向相對於在帶3G上形成之流賴36的膜面垂直 之方向噴吹氣體。如第3圖所示，形成於流延模35之狹縫 狀的濃液流出D 35a的長度小於帶3G的寬度。由此，流延 膜36形成於帶30的寬度方向上的中央部30c，以便帶30 201217139 观27pif 的:部3〇s露出。遮風板62抑制氣體從流延膜％的膜面 ^向帶3__部份流出。排氣㈣吸引流延膜 =周邊的_。以下分別對這些供氣部6卜遮風板62、 排氣β卩63進行詳細說明。 供氣部61具有供氣導管66、設置於供氣導管的上之 7個喷，67、送風機68及送風控制器69。送風機68 66l€di亂體°送風控制器69控制從送風機68 向供虱導⑽送出之氣體的溫度、濕度及流量。藉由該控 =調&來自嘴嘴67之氣體的流量及流速。氣體藉由送風控 |器69加熱。藉由將已加熱氣體作爲溫風並喷吹至流延膜 36來進行流延膜36的乾燥。 、 、供氣導管66是底面66a與帶30對置，以便覆蓋所通 過之抓延膜36之箱狀導管。複數個喷嘴67以在帶3〇的行 進方向上闕間隔㈣列之方式S&設。各喷嘴67在帶30 ^ ί度方向上成爲較長形狀，使前端朝向帶，且向供氣 導管66的底面6如突出而設置。在與帶30對置之前端形 成有將供氣導管66中的氣體送至外部之開口 67a。開口 67a 爲在帶30的寬度方向上較長之狹縫狀。 藉由從與帶30對置之開口 67a送出氣體，在相對於流 延膜=6的膜面垂直之方向上送出氣體。藉由在垂直方向上 ^吹氣體’能夠比以與膜面並行之流向喷吹時更有效地乾 燥流延膜36。因此，膜12的製造效率提高。再者，爲了 在垂直方向上送出氣體，可以不是來自噴嘴67之送風，例 如可以是在供氣導管66的底面66a形成開口（未圖示）並 201217139 從該開口送出之風。 另外’藉由在垂直方向上對膜面噴吹氣體來提高乾燥 效率。由此，能夠進一步降低剝離時的流延膜36、亦即流 延膜36在剝離位置Pp中的溶媒含有率，甚至能夠降低至 50質量％以下。如此，越是降低流延膜％在剝離位置pp 中的溶媒含有帛，越能夠使慢轴的方向在膜12喊度方向 上均勻。具體而言，能夠將與作爲目的之慢轴的方向所成 之角抑制在-1。以上1。以下的範圍，甚至較小地抑制在_04。 以上0.4。以下的範圍。流延膜36在剝離位置pp中的溶媒 含有率設爲20質量％以上50質量％以下的範圍爲較佳。 藉由以流延膜36在剝離位置pp中的溶媒含有率成爲5〇 ^量％以下之方式進行乾燥，能夠將慢軸的軸偏離量更可 靠地抑制在-1。以上1。以下的範圍。 開口 67a的形狀設爲狹縫狀爲較佳，但未必一定是狹 縫。例如，可以在噴嘴67的前端以向帶3〇的寬度方向排 列之方式形成圓形或矩形的複數個開口（未圖示）。 第3、第4圖中，將開口 67a的長度圖示爲短於設置 在兩侧之1對遮風板62的距離。但是，亦可將噴嘴67的 開口 67a形成爲長於1對遮風板62的距離，且比遮風板 62更堵住外側，從而使其短於丨對遮風板62的距離來使 用。 在本實施方式中’沿帶30的行進路排列設置有複數個 供氣導管66。但是，亦可利用向帶3〇的行進方向較長地 延伸至第2輥32之1個供氣導管，並在該供氣導管上設置 20 201217139 3y227pif 來储該態樣。另外，本實施方式中的各個供 別限定。上5又置有6個喷嘴Ο ’但噴嘴67的數量並未特 =液^的溶媒彿點設爲Tvb夺，來自供氣導管的 圍凰度设爲（TV_2〇C；> 以上(Tv+100。。) 以下的範 由設爲（TV_2(rC)以上，更加可靠地提高流 =的乾燥效率。並且，藉由設爲（Tv+贿）以下， 月^^可靠地防止流延膜％起泡。另外，當濃液11的 數個成份時，在溶媒成份的沸點中將沸點最低 來自噴嘴67之氣體的吹出速度、亦即流速設爲-=上25m/秒以下的範圍爲較佳。藉由設爲-秒以上的 1，更加可靠地提高流延膜36的乾燥效率。並且，藉由 ㈣25m/_下的流速’㈣更加可靠地防止流延膜36 起泡，或者能夠更加可靠地得到表面平滑之膜12。 遮風板62沿帶30的行進路延伸。遮風板62以豎立的 f勢配攻於流延膜36側緣的通過管路上或比通過管路更 罪近帶30的寬度方向之内側。由此，抑制來自供氣導管 66之已加熱氣體從流延膜36的膜面附近向帶3〇的側部 30s的露出部份流出。藉由抑制加熱氣體向側部30s流出， 能夠抑制側部30s的溫度上昇。因此，能夠得到慢軸方向 在寬度方向上均勻，甚至在膜整個區域中均勻之膜12，同 時能夠防止因帶30的溫度上昇引起之翹曲。再者，第3、 第4圖中’圖示有遮風板62配設於比流延膜36侧緣的通 21 201217139 39227pif 過管路更#近帶3Q的寬度方向之_之情況。 作爲遮風構件，可以使用像由底面覆蓋從流延膜36 的側緣36e遍及帶3〇的側部3〇s的區域那樣的塊形狀者來 代替遮風板62。 ，帶3〇的流延面30a爲高度基準遮風板62設爲低 ^供氣導管66。亦即，遮風板62的離帶3()最遠之緣部的 回度低於供氣導f 66的底面的高度。因此，如第2圖所示 般從帶3〇的側方觀察時，配設於供氣導管66的底面66a 嘴67並未被遮風板62覆蓋，而是在遮風板&與供氣 ΐ 66之間看得見。如此，各個噴嘴67與喷嘴67之間的 二間透過遮風板62與供氣導管66之間，與遮風板62的上 方或側方的㈣相通，此，流延膜36的膜面附近的空間 與遮風，62的上方或側方的空間空間性地連接，由此，若 來自供氣導管66之氣體接觸於流延膜36或遮風板62的内 壁’則被引導至遮風板62的上方或側方。 被夾在配設於流延臈36的兩侧緣36e附近之 1對遮風 板62之空間’由於來自供氣導管的之供氣，其壓力高於 比遮風板62更靠近侧方之外部空間。再者，如前所述，流 延膜36的膜_近的空間與遮風板62的上方或侧方的外 4空間空間性地連接。由於這些，流延膜36的周邊氣團被 迅速地取代爲從供氣導管66重新流出之氣體，因此更有效 地進行流延膜36的乾燥。 遮風板62以與帶30的距離m成爲1〇mm以上5〇mm 以下範圍之方式配設爲較佳，以成爲1〇mm以上4〇mma 22 201217139 •jyzz /pif Γί!圍之方式配設爲更佳。藉由將m設爲iGmm以上， 更可罪地防止遮風板62與帶30的接觸。藉由將 <»又，50mm以下，與大於5〇醜時相比，能夠更可靠地抑 制氣體從流延膜36的膜面附近向帶30的侧部3〇s流出。 遮風板62配設於流延膜36的侧緣36e的通過管路上 或比通過管路更靠近内側50mm的管路與通過管路之間的 上方爲較佳:亦即，遮風板62的外面與流延膜36的側緣 36e的通過管路的距離〇2設爲〇_以上5〇匪以下的範 圍爲較佳。藉由設爲通過管路上（D2=〇mm)或其内侧（D2 >0mm) ’能夠更可靠地抑制氣體從流延膜％的膜面附近 向帶30的側部3〇s流出。若使D2大於5〇mm，則與5〇mm 以下時相比，膜12的光學特性、尤其是慢軸的方向變成與 目的方向不同的方向之側部的寬度變大，有時不得不增大 應該用分切機26切除之寬度。 排氣部63具有吸引導管72、吸引機73及排氣控制器 74。吸引機73吸引氣體。排氣控制器74控制吸引機73 中的吸引力。藉由該控制，調整來自形成於吸引導管72 之開口 72a之氣體的吸引力。氣體藉由排氣控制器74被清 潔化並進行排氣。再者，被清潔化之排氣可以送至送風機 68 ’並用於來自供氣導管66之供氣。 複數個吸引導管72設置在高於遮風板62之位置。各 吸引喷嘴的各開口 72a在喷嘴67與喷嘴67之間對置。如 此’開口 67a配設於空間性地連接之流延膜36的膜面附近 的空間與遮風板62的上方或側方的外部空間之間。因此， 23 201217139 /pif 流延膜36周邊的氣團更迅速地被引導至遮風板62的上方。 由此，流延膜36周邊的氣團更迅速地取代爲來自供氣導管 66之新的氣體，流延膜36的乾燥進一步有效地進行。並 且，由於吸引導管72設置在高於遮風板62之位置，因此 可以更可靠地抑制氣體從流延膜36的膜面附近向帶30的 侧部30s的露出部份流出。因此，可以更可靠地防止侧部 30s的溫度上昇，並且能夠更可靠地謀求慢軸方向在膜12 的寬度方向上的均勻化。 再者，吸引導管72在帶30表面的法線方向上，以成 爲尚於遮風板62之位置之方式配設即可。例如，可以如本 實施方式，以開口 72a的下端低於供氣導管66的底面66; 之方式配設吸引導管72，或者亦可爲吸引導管72的底g 氣導管66的底面66a相同之高度，亦即開口 72a的下 鈿π於供氣導管66的底面66a。此外，吸引導管72在帶 3〇的行進方向上，以開口 72a位於喷嘴67與噴嘴之間 之方式配設即可。 土第1上游域供排氣單元41在供氣部61的上游、亦gF =延位置PC與供氣部61之間進一步具備供氣部77爲 具树嘴78、送風機79及魏控制器80 H 78送出之㈣的溫度、濕度及流量 調整來自噴嘴78之氣體的流量及流速。氣體藉由^ 几技制器80加熱，將該已加熱氣 、 膜％，從而進行流延膜36:作爲-風而噴吹蝴 24 201217139 jyzz/pif 喷嘴;78以開口 78a朝向帶30的行進方向上的下游側 、之細目對於所通過之 抓延膜36作爲順風在流延膜36上 可以抑制氣流對液珠的影響。其中 #由成爲順風， 是猶微向流延膜36側傾斜之方^ Q汗口 ^的方向可以 流延膜36之順風，則== 要氣體的流動成爲向 行之流動。 對於流的膜面平 來自喷嘴78之氣體流入供氣導管 延膜36之間，其大多數被吸引導管乃 卜6:/、抓 導管吸引。如此’藉由設置供氣部77並從：:二々二個 行流延膜30的乾燥，進一步提古後不久就進 並進-步提高膜12的㈣％的乾燥效率， 如以上，在本發明中，到從帶30剝離流延膜36爲止， 實施第1流賴錢製程和第2流賴錢·。第爲^ = 第？上游侧供排氣單元41在相對: 流延膜乾雜程是，藉㈣丨、f 2 τ 第 43，對經過第1流賴乾_程之後的流賴3=出成爲 無面平狀逆叙㈣心進雜賴36的乾 程。 、取 形成有流延膜36之帶3〇的中央部3 膜36之蒸發潛熱，其溫度不易上昇。所以，欲進 流延膜36的賴效率時1下第2實施態樣錄佳。° 在本發明的第2實施態樣巾，在流延裝置Μ上進一步 201217139 d f 設置有第2上游域供排氣單元 90設置於流延位置Pc的下漱 上游域供排氣單元 供排氣單元41呈對向配設。'，丨由帶30 *與第1上游域 第2上游域供排氣單元9〇鱼 41相同，具備供氣部9][、作爲碑、上游域供排氣單元 氣部（未圖示）。由於供氣部^風構件之遮風板％及排 92及排氣部的各結構基本技第、丨作爲^構件之遮風板 的供氣部6卜錢板62及_ 明與這些不同之處》 U 口此以下僅說 供氣部9i向相對於帶3〇的流延面*的相反 非=面3%垂直之方向噴吹氣體。遮風板 而與遮風板62呈對向，且以豎立的姿勢設置“ 92抑制從供氣部91的喷嘴％送出之氣體向側部 流延面30b流出。側部3〇s的非流延面·與侧部3〇s的 流延面3〇a對應，是招當於侧部30s的流延面3〇a的里侧 之區域。 遮風板92以與非流延面3〇b的距離D3等於遮風板62 與流延面30a的距離D1之方式，配設成1〇mm以上5〇mm 以下的範圍爲較佳，配設成1〇mm以上4〇mm以下的範圍 爲更佳。 複數個喷嘴93設置於與供氣導管96的非流延面3〇b 對置之對置面。排氣部的吸引導管97在帶3〇的行進方向 上設置成開口在噴嘴93與喷嘴93之間對置。該吸引導管 97在帶的非流延面3〇b的法線方向上，以開口成爲低於遮 26 201217139 3y22/pif 風板92，位置之方式配設即可。排氣部從 開口吸引流延膜36周邊的氣團。 丨等s 97的 如此’藉由利用第2上游域供排氣單元9 成有流延膜36之帶3G㈣央部施更可靠^使形 與第1實施態樣相比，進一牛接古、ώ 麦因此， 媪古膜12的创延膜的乾燥效率，並 H t 另夕卜，藉由提高流延膜％的乾焊 軸偏離量可以更可靠地抑制⑹。以上1〇以下的範 可以較小地抑制在-0.4。以上〇4以下的範圍。並且，在該 實施態樣中’亦藉由遮風板92抑制來自側部3〇s的非流^ 面之加熱，因此可以防止帶3〇的翹曲。 本發明中’帶30的寬度越寬越有效，製造之膜的寬度 越寬越有效。 本發明在製造用作液晶顯示器等的相位差膜之膜時爲 尤佳。 纖維素酿化物並未特別限定。纖維素醯化物的醯基可 以僅爲1種，或者亦可具有2種以上的醯基。當醯基爲2 種以上時，其中1個爲乙醯基爲較佳。用羧酸酯化纖維素 的經基之比例、亦即酿基的取代度滿足所有下述公式（j)〜 (ΙΠ)者爲較佳。再者，在以下公式（幻〜（ΠΙ)中，A 及B表示醯基的取代度’ a爲乙醯基的取代度，此外b爲 碳原子數3〜22的醯基的取代度。 (I) 2.0<A+B<3.0 (II) 1.0<A<3.0 27 201217139 jyzz /pif (III) 0<B<2.0 醯基的全取代度A+B在2.20以上2.90以下爲更佳， 在2.40以上2·88以下爲尤佳。另外，碳原子數3〜22的 醯基的取代度Β在0.30以上爲更佳，在〇 5以上爲尤佳。 其中，本發明在使用二醋酸纖維素（DAC)作爲纖維素醯 化物時，有尤其較大效果。 ，以下，舉出本發明的實施例及相對本發明之比較例。 詳細内容記載於實施例1中，在其他實施例及比較例中僅 記載與實施例1不同之條件。 [實施例1] 在第1圖所示之溶液製膜設備上追加第5圖所示之第 2上游域供排氣單元9〇，由濃液u製造出用作相位差膜之 膜12。作爲目的之膜12的厚度爲58μηι。 第1輥31的周面溫度設爲15¾，第2輥32的周面溫 度設爲40°C。 遮風板62與帶30的流延面3〇a的距離D1設爲l〇mm。 f 30到喷嘴67的開口 67a的距離設爲i50mm。遮風板62 的外面與'"il延膜36的侧緣的距離D2設爲0mm。從喷嘴 67送出之氣體的溫度設爲l35t，將風速設爲25m/秒。 在第1拉幅機17中’向寬度方向以8%的加寬率拉伸 包含溶媒之膜12。將溶媒含有率不到5質量％之膜12引 導至第2拉幅機23。在第2拉幅機23中，以在寬度方向 上成爲21%的加寬率之方式拉伸膜12。 在該實施例1中’未在流延膜36上確認到起泡。並且， 28 201217139 j^zz/pif ^帶30上確認到側部3〇s的翹曲或變形。剝離位置pp 處的，媒含有率爲33質量％。所得到之膜12的慢轴的轴 偏離量，在膜12的寬度方向上被抑制在·〇〇5。以上〇仍。 以下的fell内，在臈12的整個區域被抑制在]。以上1〇以 下的範圍内。 [實施例2] 遮風板62與帶30的流延面3〇a的距離m設爲4〇匪。 其他條件與實施例1相同。 在该貫施例2中味在流延膜36上確認到起泡。並且， 未在帶30上確認到側部30s的翹曲或變形。剝離位置pp 處的溶媒含有率爲33質量％。所得到之膜12的慢轴的轴 偏離罝，在膜12的寬度方向上被抑制在·〇 〇5。以上〇 〇5〇 以下的範圍内，在膜12的整個區域中被抑制在丨。以上1〇 以下的範圍内。 [實施例3] 遮風板62的外面與流延膜36的側緣36e的距離D2 設爲50mm。其他條件與實施例1相同。 在該實施例3中味在流延膜36上確認到起泡。並且， 未在帶30上確認到侧部30s的翹曲或變形。剝離位置pp 處的溶媒含有率爲33質量％。所得到之膜12的慢軸的軸 偏離量，在膜12的寬度方向上被抑制在_〇〇5。以上〇〇5。 以下的範圍内，在膜12的整個區域被抑制在_丨。以上1〇以 下的範圍内。 [比較例1] 29 201217139 /pif 才同未设置遮風板62和遮風板92。其他條件與實施例1 在該比較例1中，在反復實施流延和剝離期間，帶3〇 的側，30s翹曲，導致側部3〇s未接觸到第丨輥31。其結 果’流延膜36的側部溫度成爲溶媒的沸點以上，側部產生 了起泡。因此’未能製造出作爲目的之膜12。 [比較例2] 不運轉送風機68，不從喷嘴67送出氣體。並且，不 運轉吸引機73 ’氣團不會吸引至吸引導管72。藉由噴嘴 78，以成爲相對於流延膜並行之順風之方式對氣體進行供 氣。藉由喷嘴78供氣之氣體的溫度設爲135。(：，風速設爲 25m/秒。使被供氣之氣體在1對遮風板62之間流動，^ 從排氣部47的吸引口 47a吸引唭他條件與實施例j相同。 在該比較例2中，由於被供氣之氣體在丨對遮風板62 的其中一方與另一方之間流動，因此雖然未在流延膜上確 認到起泡，但剝離位置PP處的溶媒含有率爲6〇質量％ , 乾燥效率差。再者，由於在1對遮風板62之間流動之氣體 在寬度方向上的溫度中，從遮風板62的内側朝向外側存在 放熱，因此越是從中央朝向側部越變高，所得到之膜的軸 偏離量在膜的寬度方向上大到-0.5。以上0.5。以下。在膜的 整個區域亦大到-2°以上2。以下的範圍。 [比較例3] 使喷嘴67的角度相對於流延膜傾斜45。，並使從喷嘴 67供氣之氣體以45角度噴吹至流延膜。噴吹之後的氣體 201217139 jy2^/pif 流延臈並行之順風之方式流動。其 的其中-方與氣之氣體在1龍風板67 認到起泡，但_位置^處絲在流延膜上確 乾烨效率罢处的/谷媒3有率爲50質量％， 向=中=二 _側朝向外側存在放熱，因 3= Γ部越變高，所得到之膜的軸偏離量在 向上大_。以上02。以 亦大到-1.6。以上1.6。以下的範圍。 【圖式簡單說明】 细、、„術人員通過參考附圖並閱讀較佳實施例的詳 細說明’可以容易理解上述目的及優點。 第1圖是溶液製膜設備的概要圖。 第2圖是第1上游域供排氣單元的侧面概要圖。 第3圖是第1上游域供排氣單元的俯視概要圖。 第4圖是沿第3圖及第4圖的IV_IV線之截面圖。 第5圖是第2上游域供排氣單元的侧面概要圖。 【主要元件符號說明】 10 :溶液製膜設備 11 :濃液 12 :膜 15 :流延裝置 30 :帶 31 201217139 ^yzz/pif 41、 90 :第1、第2上游域供排氣單元 42、 43 :第1、第2下游域供排氣單元 46、 49、61、91 :供氣部 47、 50、63 :排氣部 66、 96 :供氣導管 72、97 :吸引導管 67、 93 :喷嘴 32The market is expanding, and as the market expands, the manufacturing efficiency of the film-forming film 4 201217139 39227pif also needs to be improved. The solution manufacturing method is a drying process in which the film is dried in a continuous manner in which H is continuously carried out, and a continuous dope is used as a casting film to peel off the cast film. The casting process ^眺程t increases the speed of casting and making money __The improvement of manufacturing efficiency is therefore 'in order to improve the casting _ dry riding degree, the wind has been like the Japanese 'J Public Daily Call No. 61-110520 or the 曰本 patent It flows like the publication of the publication No. 053214. In Japanese Laid-Open Patent Publication No. SHO 61, the dry air is caused to flow in parallel with the casting film, and is caused to flow in a countercurrent or a flow direction with respect to the traveling direction of the flow. Further, in Japanese Laid-Open Patent Publication No. SHO-64-554514, a dry wind which is formed by a specific dope on a traveling dragon is blown perpendicularly to the dry wind of the crucible. Further, in Japanese Laid-Open Patent Publication No. SHO 64-554514, the air blow is blown for drying, and the angle between the direction of the wind and the surface of the support is set to 45. ~80. Or 90. . In Japanese Laid-Open Patent Publication No. Hei. No. 3, No. 3,544, the direction of the wind sent from the nozzle toward the casting film is set to 5. ～9〇〇〇"' However, in the method of drying the cast film by blowing the wind, in order to carry out the drying even with high efficiency, the air which is blown by the wind is heated and warmed. When the heated air is blown to the casting film, the exposed portion of the support which is not formed with the casting film is gradually heated. If the temperature of the outgoing portion of the support is excessively increased, each of the cast film The temperature of the side portion also rises above 201217139 degrees, and foaming occurs. Therefore, in order to prevent the temperature of the exposed portion of the side portion of the support body from rising due to the wind blown onto the casting film, Japanese Patent Laid-Open Publication No. 2-5 In the 〇47 i4丄 bulletin, a windshield is provided to prevent the wind from contacting the exposed portion of the support. However, the method of causing the wind to flow in parallel with the casting film is faster than the case of not blowing the air. However, there is a problem in that the cast film is formed on the cast film to produce fine streaks extending in the casting direction. Further, in the publication of Japanese Laid-Open Patent Publication No. 2003-103544, if the cast film is sprayed vertically, the shell J causes the wind. Oriented after contact with the cast film It is pointed out that the film thickness becomes uneven due to the flow. In the method of Japanese Patent Laid-Open Publication No. 2003-103544, it is necessary to increase the drying speed in one step to increase the gas to be blown. However, if the gas temperature is increased as described above, the temperature of the fulcrum body becomes uneven in the width direction during repeated casting and peeling, and the optical characteristics of the obtained film, especially the axis. The amount of deviation becomes large and uneven in the width direction, or the side portion of the support body gradually warps. Once the support body starts to warp, its tilting becomes gradually larger as it continues to travel, and the correction in progress ^疋 Impossible. And, in recent years, there is also a requirement for the widening of the film. The problem of = is widened with the widening of the width or used to improve the manufacturing efficiency. Further, in the method of Japanese Patent Laid-Open Publication No. 2005_047141, the body is flowed in parallel with the casting film in one side of the pair of windshields and the other. Therefore, the temperature of the gas is in the cast film In the width direction, it becomes not uniform. Since the temperature of the gas becomes uneven in the width direction of the cast film, 6 201217139 39227pif The optical characteristics of the film are present, and the amount of deviation becomes uneven in the width M. SUMMARY OF THE INVENTION Therefore, in view of the above problems, an object of the present invention is to provide a method for further improving the dry riding degree of a cast film in order to improve the film production efficiency based on a solution film formation and to achieve a direction of the slow axis. In order to solve the above problems, the casting device of the present invention includes a casting support, a first gas supply portion, and a pair in order to achieve uniformity in the width direction and prevent warpage of the support body. The i-th windshield member. The casting branch body is annular (the aforementioned casting branch is formed on the casting surface of the casting dope). The aforementioned extension slab body continuously travels in the longitudinal direction and circulates in a manner of returning from the _ position to the casting position. The peeling position is a position at which the casting film is peeled off. The casting position is a position at which the aforementioned casting is performed. The aforementioned third gas supply has heated the gas. The first air supply unit sends the gas from the casting branch opening. The ith air supply unit sends the gas in a direction perpendicular to a film surface of the casting film. The above-mentioned 丨 extends the traveling path of the i-th piece along the f-casting support, and the first is blocked by the passing pipe as described in the above-mentioned section—(4). The foregoing gas is discharged from the exposed portion of the casting film __ near forward portion. The side of the branch body The first air supply unit has a gas supply duct and a bottom surface of the plurality of air supply ducts, and the caster body is preferably. _ and configured so that 201217139 39227pif = flow =, complex: said: mouth to the front of the air supply duct F / set. A plurality of nozzles are described at the front end of the aforementioned casting support. i said; arranged in intervals. The opening is provided in the slit shape of the nozzle. Preferably, the two ports are narrow gas supply conduits extending in the width direction of the casting branch body, and the height from the casting surface is lower than the opening two gas = preferably. The exhaust portion is provided from a plurality of ports facing each of the plurality of open casting devices. The second air supply unit is preferably a second air shielding member. Front air = the above-mentioned casting support 2 === The second air supply unit extends to the surface of the second sister member with respect to the flow body. The pieces are arranged oppositely. Just the first windshield 2: the non-casting surface corresponds to the opposite side of the above-mentioned dewth =?:;!; the opposite side of the casting surface; the extension device is described elsewhere! 1 gas supply part: turn:, the third supply part of the wound is facing upwards; the 捍, 隹" extension support makes the aforementioned row of the casting of the above-mentioned casting branch body 3 The opening on the upstream side in the direction. The third 201217139 39227pif sends out a σ upstream gas which is a countercurrent flow of the film surface of the cast film through which the ride passes. The third supply (four) is preferably provided in the second traveling region in which the disparity support body travels with the casting surface facing downward. = _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ "^_¥?/711· Extension of the puffing body u to form a cast film. Step B, = the μ extension of the building body peeling off the cast film and drying. Stripping the aforementioned film After that, (4) Lai Yan finds the body and rides the above-mentioned A step again. c 2 is used to dry the cast film just like gas on the vertical material before the mixing. The D step is carried out in the aforementioned c step towel. The first air shielding member is prevented from flowing out from the vicinity of the film surface of the casting film toward the exposed portion of the side surface of the casting support by the pair of i-th air shielding members. The first pair of first wind shielding members are disposed on the casting film side. The edge of the rim passes closer to the inner side in the width direction of the caster than the passage through the pipe. The first wind shield extends along the travel path of the cast support. Preferably, the gas is supplied to the opening of the first gas supply portion in which the plurality of nozzles having the opening are formed. The bottom surface of the gas supply conduit Arranging opposite to the casting support as described above to cover the through-casting film that passes therethrough. The nozzle is provided to protrude from the bottom surface of the air supply duct. The plurality of nozzles are in the traveling direction of the casting support The openings are arranged in a slit shape which is carefully translated into the above-mentioned branch body. The wind shielding member is disposed at a position higher than the height of the casting surface before the 201217139 jyzz/pif gas supply conduit. The casting surface is a surface of the dope. The gas swells in the slanting body are higher than the first wind shielding member and are disposed at the position of each of the nozzle nozzles. The film method further includes the following E step and the step E. The step of injecting the heated gas from the gas supply film by blowing the gas casting film from the first gas supply portion to relatively direct the gas in the temperature step of the casting film The non-casting surface is perpendicular to the square (four) blowing. The E non-casting surface is the opposite side 2 side of the casting surface of the casting branch body: the F step suppresses the gas by the second wind shielding member to the foregoing = the side of the face corresponding to the exposed part of the outflow The traveling path of the front flow fiber is extended. The second windshield structure is provided opposite to the first windshield member as described below. C step = 3 green = town G step is preferable. The step is to dry the gas casting film by sending a countercurrent gas in the above-mentioned γ. G step. The c-step 」 μ" body is extended by the film. The aforementioned casting surface of the support I faces downward. It is preferable to carry out the just-described casting enthalpy on the aforementioned casting support body. According to the present invention, the drying density of the casting film is further improved based on the solution == = the warpage of the above-mentioned support body is increased. Low 'and anti-embodiment】 201217139 39227pif, it is preferable to carry out the first aspect of the present invention from the solution film forming apparatus 1 shown in Fig. 1. The upstream side of the solution film forming apparatus is provided with a casting device in order. The first tenter 17, the roller drying device 21, the second tenter 23, the machine = and the winding device 27. The casting device 15 is formed of a polymer film (hereinafter, simply referred to as "film,") 12 in which the polymer is dissolved in the solution of the solvent d. 1. The machine 17 is protected by the clip 16 as a holding means. Each of the j and the sides of the film 12 is dried. The remaining device 2 is dried while the film 12 is being wound. The second tenter 23 holds the side portions of the film 12 as the clip 22, and the film The job is performed on the winding core by the cutting machine 26, and the film 12 is wound around the winding core by the holding marks of the respective side portions held by the holding means 22 of the clip machine 23 of the first tenter machine 17, and is formed. In the case of a roll, the solvent content (unit: %) is dry = A and S 'the mass of the solvent is set to Χ, and the mass content of the film 12 (unit: %) is {χ / (d)} The endless casting support is wound around the first roll 31 and the second light 32 ^ f second parent 32. At least one of the belt 30 rollers 32 is used to feed the drive roller It can be connected to X. It can be transmitted by means of 3 〇 且 向 向 向 向 向 向 向 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 : : : : : : 35. By continuously flowing the concentrated liquid 11, concentrated The liquid U is cast on the 11 201217139 39227pif belt 30 to form a casting film 36. Further, the position at which the dope u starts to contact the belt 30 is referred to as a casting position pc. The first roller 31 and the second roller 32 are respectively provided. The temperature controller (not shown) controls the temperature of the circumferential surface. The temperature of the first parent 31 is cooled to a predetermined range. By cooling, the belt 3 is cooled every i-week. The first upstream-stage air supply/exhaust unit 41, the following: the traveling-air supply/exhaust unit 42 and the second downstream-direction air supply and exhaust unit 43 are continuously heated, and the both side portions of the belt 30 can be more reliably prevented. The temperature rises in s (Fig. 3). The casting die 35 is disposed above the belt 3〇 on the w3l, and the casting position PC is provided on the first roller 31. The second ft 32 is at the circumferential temperature == The heating method is followed by drying the casting film 36 by heating. The circumferential temperature of the first roller 31 is preferably 3 or more and 3 〇, and the temperature of 5° C. or more and 25 t or less is more preferable. It is further preferred. The second stick 32 is smeared on the C. The upper part is above 20 C and the upper part is 5 (the range below TC is better, and the temperature of the pit is set to 2 〇 °C to the fan of the provincial listening town. The circumference of the belt 30 is not limited to the upper portion of the belt (10) provided on the first view 31, and is disposed below the first turn 31 toward the second report 32 30, and is disposed by the roller 33:亲:: The casting die 35 is preferred. The sling band 30# is above (4). The decomposing chamber is provided upstream from the casting die 35 to the doping liquid u with the band 3 于 in the traveling direction of the belt 30, = ί 12 201217139 The jyzz /pif decompression chamber attracts the air mass in the upstream side region of the dope il flowing out from the casting die 35 and decompresses the aforementioned region. After the casting film 36 is cured to such an extent that it can be conveyed to the first tenter 17, it is peeled off from the belt 3 in a state containing a solvent. It is more preferable that the solvent is contained in a range of preferably 20% by mass or more and 50% by mass or less, more preferably 25% by mass or more and 45% by mass or less. By peeling after reaching a low solvent content of 50% by mass, the direction of the slow axis can be more reliably uniform than when the solvent content is more than 5% by mass. In addition, when peeling is 20% by mass or more, the production efficiency can be more reliably improved than when it is peeled at less than 20% by mass. At the time of peeling, the film 12 is supported by a peeling roll (hereinafter referred to as a peeling roll) 37, and the peeling position pp of the cast film 36 is peeled off from the tape 30 to be kept constant. The peeling pro 37 can also be driven by a driving means and rotated in the circumferential direction. Furthermore, the peeling is performed on the belt 3G on the first light 31. If there is a 3 〇 cycle and return from the stripping position to the casting position pc, the casting surface of the new dope traveling zone 30 of the county is cast upwards: the first entanglement zone, including the cast film shape :====Intention. The traveling area 'containing the casting film two = two down and the second part of the traveling: the downstream of the downstream element - has the downstream - the downstream domain for two yuan: r: the gas: 13 201217139 ^yz-Δ /pif The gas unit 42 and the second downstream domain supply and exhaust unit 43. In this way, along the traveling path, the first upper/lower morning 41 and the first lower upstream domain supply and exhaust unit 43 are provided in order from the upstream side. The second supply for the Wei unit 42 and the second downstream domain is exhausted. The number of downstream supply and exhaust units is not limited to; with the other drawings in. and the upstream domain for the Wei unit 41, the first downstream domain supply and exhaust unit 42 is provided with the outflowing dry gas 22 = gas side by side The gas exhaust unit 47 and the controller 48. The controller sends the gas to the =, milk, and 46, and independently adjusts the temperature and humidity of the gas, the flow rate from the air supply unit 46, and the suction force in the exhaust unit 47. In the second downstream, the air supply and exhaust unit 43 is also provided with the air supply unit 49, the exhaust unit 5A, and the controller 51. The air supply unit 46 and 49 are disposed on the belt 30. 2 The traveling region is located closer to the upstream than the peeling position PP. The exhaust portion 47 is disposed upstream of the air supply portion 46. The exhaust portion 50 is disposed upstream of the air supply portion 49. The gas supply portion 46 for the outflowing gas The suction ports 47a and 50a of the respective outlets 46a and 49a of the 49 and the exhausting portions 47 and 50 of the suction gas are also extended in the width direction of the belt 30. The air supply portions 46 and 49 are disposed such that the air outlets 46a and 49a are directed toward the upstream side in the traveling direction of the belt 30. The exhaust portions 47 and 50 are disposed such that the suction ports 47a and 50a face the belt 30. By arranging the air supply portions 46, 49 and the exhaust portions 47, 50 as described above, the gas from the air supply portions 46, 49 flows in a countercurrent manner parallel to the film surface of the casting film 36 that is transported through. The cast film 36 can be dried more effectively than the downwind by the countercurrent flow. 201217139 jyZZ./pif The tape from the second roll 32 toward the peeling position PP is formed by casting a film on the lower surface. 36' is therefore not supported by the support means from below. Therefore, the belt from the 苐2槪32 toward the peeling position pp takes a traveling path that protrudes downward due to its own weight. In addition, the drying efficiency is relative to the casting film. The case where the gas is blown in the direction of 36 is superior to the case of the parallel flow. However, in order to blow the gas in the vertical direction at a flow rate higher than the degree of drying efficiency in parallel flow, it is necessary to cast a gas at a casting film = 6 More gas supply means are provided below. The more the segments are arranged, the higher the fear that the gas supply means is in contact with the belt 30. Therefore, the supply air = 46, 49 is disposed below the (four) from the second parent 32 toward the separation position pp The test gas of the financial company, the second parent 32, is peeled off, and the cast film 36 of the PP is dried. 1 The amount of the gas in the flat state of the diaphragm 36 is not limited to 2 as in the present embodiment. In the embodiment, the first downstream domain air supply and exhaust unit 42 and the second secret knife are independent 43 by the controller 48, but the system can also be independently operated by the air supply unit. control. By heating the temperature of this city 36 =, 51. 36, and dry. ,上"丨 <Moving, heating the cast film A blowing device (not shown) is disposed between the casting device 15 and the first #. It is also possible to carry out the drying of the crucible 12 by means of the transfer path between the two; ^ by the air supply from the money wind device 15 201217139 ^y^z/pif The cast film 36 is peeled off by the peeling pro-37. The peeled cast film 36, i.e., the film 12, is guided to the first tenter 17. The first tenter 17 holds the film 12 with the clip 16 and conveys it in the longitudinal direction while imparting a tension in the width direction to expand the width of the film 12. The first tenter has a preheating zone, a stretching zone, and a relaxation zone in this order from the upstream side. Furthermore, there may be no slack area. The first tenter 17 is provided with a pair of guide rails (not shown) and a chain (not shown) guide δ which are placed on both sides of the transport path of the film 12, and a pair of guides are arranged at predetermined intervals. The rail spacing is constant in the preheating zone, gradually widening toward the downstream in the stretching zone, and constant in the relaxation zone. Furthermore, the rail spacing of the slack zone can also be tapered as it goes downstream. The chain is mounted on the drive sprocket and the driven sprocket (not shown), and is movably mounted along the guide. A plurality of clips 16 are attached to the key strip at predetermined intervals. The clip 16 is cyclically moved along the guide rail by the rotation of the drive sprocket. The clip 16 is in the third pure machine and is directed toward the person. Move and release hold near the exit.丨: The clip 16 is moved to the vicinity of the person σ again, and the preheating zone, the stretching zone and the relaxation zone that are newly guided are borrowed and sent out. (4) The dry wind of the self-feeding 54 is out: The person is not clear. boundary. The conduit 54 is disposed above the transfer path of the membrane 12. Guide you 1 conduit 54 seam, from the delivery W has the narrowness of the residual wind to give. The blower will be adjusted to a predetermined temperature of 4 degrees, and the dry air will be sent to the duct 5 and the way of sending the opposite side. Each narrow _ '12^^=: 16 201217139 wzz/pif i stretched t-forms are formed at a predetermined interval from each other in the transport direction. Further, a conduit having the same structure is disposed below the transfer path of the film 12, and can be disposed both above and below the transfer path of the film 12. In the history of the towel cans 17, the film is conveyed by the blade 54 degrees. U is dried' and the width of the film b is changed at a predetermined time by the clip b, and the solvent content of the film 12 is 7% by mass or more and 30%. The elongation ratio ER1 at the time of stretching treatment (the κ stretched after stretching) The film width ^)}xl00) in the treatment is more than 5% and preferably 30 ° / ❶ or less. The temperature of the cut U is 8 (rc or more 16 (rc below is the machine 2: ft): air mass, its temperature or humidity, etc. by air conditioning a plurality of rollers 20 on the second/roll drying device 21, the film 12 is Wrapped in an evaporating solvent. In the second set 21, the ratio is also changed from 臈12 to 5 mass^ to the solvent. Further, when it is sent from the roll drying device 21, the device 21 is placed between the device 21 and the second tenter 23. When the music is curved, the device is stretched and the device is stretched (the second tenter 23 does not stretch the film in the width direction, and has a texture of u, which is a phase difference. The machine 23 12 is, for example, configured as a structure. Further, the second tenter is provided with d = (not shown) (10) and the dry material of the addition and subtraction temperature 17 201217139 jy22/pif flows. (4) When stretching in the frame 23 The elongation ratio ER2 (={(stretching (width before stretching)}xlG.) is greater than _upper and // is preferably s4 at °. The solvent content of the stretching start _12 is preferably 3 mass. The temperature of the film 12 at the time of stretching is preferably 130 ° C or more and 200 ° C or less. The optical characteristics of the film 12 for the purpose of production may not be the second 23 . For example, 'the drawing by the i-th tenter 17 Appearing in the middle When the characteristics are the same, the second tenter 23 is not used. If the film 12 is guided, the slitting machine downstream of the second tenter 23 includes the first tenter or the second. Each of the clips 16 of the tenter 23 and the side portion of the generated holding mark are fed to the winding portion 27' and wound into a roll shape. Further, in the casting device 15 and the first tenter A slitter may be provided between the machines 17 or between the first tenter Π and the newspaper drying device 21. Referring to Figures 2 to 4, the second upstream domain supply and exhaust unit 41 will be described. In the third and fourth figures, the illustration of the first roller 31 is omitted. The first upstream region supply and exhaust unit 41 is disposed downstream of the casting position PC, and includes an air portion 61 as a wind shield. The windshield 62 and the exhaust portion 63 of the member are supplied with gas. P 61 blows gas in a direction perpendicular to the film surface of the flow 36 formed on the belt 3G. As shown in Fig. 3, it is formed in the casting. The length of the slit-like dope outflow D 35a of the die 35 is smaller than the width of the tape 3G. Thereby, the casting film 36 is formed in the central portion 30c in the width direction of the tape 30 so that the tape 30 201217139 view 27pif The portion 3〇s is exposed. The windshield plate 62 suppresses gas from flowing out from the film surface of the casting film% to the belt 3__ portion. The exhaust gas (four) attracts the casting film=peripheral _. The air vent 62 and the exhaust gas 卩 63 will be described in detail. The air supply unit 61 includes an air supply duct 66, seven sprays provided on the air supply duct, 67, a blower 68, and a blower controller 69. The blower 68 66l The €di messy air supply controller 69 controls the temperature, humidity, and flow rate of the gas sent from the blower 68 to the supply guide (10). By this control, the flow rate and flow rate of the gas from the mouth 67 are adjusted. The gas is heated by a blower controller 69. The casting film 36 is dried by blowing the heated gas as warm air to the casting film 36. The air supply duct 66 is a box-shaped duct in which the bottom surface 66a is opposed to the belt 30 so as to cover the grasping film 36 passing therethrough. A plurality of nozzles 67 are provided in such a manner as to be spaced apart from each other in the direction of the belt 3 (S). Each of the nozzles 67 has a long shape in the direction of the belt 30 Ω, and the front end faces the belt, and is provided to protrude from the bottom surface 6 of the air supply duct 66. An opening 67a for supplying the gas in the air supply duct 66 to the outside is formed at the end opposite to the belt 30. The opening 67a is a slit shape that is long in the width direction of the belt 30. The gas is sent out from the opening 67a opposed to the belt 30, and the gas is sent in a direction perpendicular to the film surface of the casting film = 6. The cast film 36 can be dried more efficiently by blowing the gas in the vertical direction than when the gas is blown in parallel with the film surface. Therefore, the manufacturing efficiency of the film 12 is improved. Further, in order to feed the gas in the vertical direction, the air may not be supplied from the nozzle 67. For example, an air (not shown) may be formed in the bottom surface 66a of the air supply duct 66, and the wind blown from the opening may be 201217139. Further, the drying efficiency is improved by blowing a gas to the film surface in the vertical direction. Thereby, the solvent content of the casting film 36 at the time of peeling, that is, the flow film 36 at the peeling position Pp can be further reduced, and can be reduced to 50% by mass or less. Thus, the more the casting film % reduces the amount of the solvent contained in the peeling position pp, the more the direction of the slow axis can be made uniform in the direction of the film 12. Specifically, the angle formed by the direction which is the slow axis of interest can be suppressed to -1. Above 1. The following range is even less suppressed at _04. Above 0.4. The following range. The solvent content of the cast film 36 in the peeling position pp is preferably in the range of 20% by mass or more and 50% by mass or less. By drying the solvent content of the casting film 36 at the peeling position pp to be 5 〇 or less, the axial shift amount of the slow axis can be more reliably suppressed to -1. Above 1. The following range. It is preferable that the shape of the opening 67a is a slit shape, but it is not necessarily a slit. For example, a plurality of circular or rectangular openings (not shown) may be formed at the front end of the nozzle 67 so as to be aligned in the width direction of the belt 3''. In Figs. 3 and 4, the length of the opening 67a is shown as being shorter than the distance between the pair of windshields 62 provided on both sides. However, the opening 67a of the nozzle 67 may be formed to be longer than the distance between the pair of wind shields 62, and the outer side of the windshield 62 may be blocked more so that it is shorter than the distance of the weir to the windshield 62. In the present embodiment, a plurality of air supply ducts 66 are arranged along the traveling path of the belt 30. However, it is also possible to use a supply air duct extending to the second roller 32 for a long direction in the traveling direction of the belt 3, and to provide 20 201217139 3y227pif on the air supply duct to store the same. Further, each of the specifications in the present embodiment is limited. In the upper 5, there are 6 nozzles Ο 'but the number of nozzles 67 is not special = the solvent point of the liquid ^ is set to Tvb, and the radiance from the air supply duct is set to (TV_2〇C; > above (Tv +100.) The following example is set to (TV_2(rC) or more, and the drying efficiency of the flow= is more reliably improved. Further, by setting it as (Tv+Brit) or less, the casting film is reliably prevented from being %% of the casting film. In addition, when a plurality of components of the dope 11 are used, it is preferred that the blowing rate of the gas having the lowest boiling point from the nozzle 67, that is, the flow rate is set to -= 25 m/sec or less, at the boiling point of the solvent component. By setting it to 1 or more, the drying efficiency of the casting film 36 can be more reliably improved, and the casting film 36 can be more reliably prevented from being foamed by the flow rate '(4) at 25 m/_, or can be more reliably A smooth surface film 12 is obtained. The wind shield 62 extends along the travel path of the belt 30. The wind shield 62 is matched with the erecting f-direction on the side of the casting film 36 or is more sinful than passing through the pipeline. The inner side in the width direction of the belt 30. Thereby, the heated gas from the air supply duct 66 is suppressed from the vicinity of the film surface of the casting film 36. The flow out to the exposed portion of the side portion 30s of the belt 3 is suppressed. By suppressing the flow of the heating gas to the side portion 30s, the temperature rise of the side portion 30s can be suppressed. Therefore, the slow axis direction can be made uniform in the width direction, even in the film. The uniform film 12 in the entire region can prevent warpage caused by the temperature rise of the belt 30. Further, in FIGS. 3 and 4, the wind shield 62 is disposed on the side edge of the casting film 36. In the case of the windshield member, it is possible to use the side portion 3 which covers the side edge 36e of the casting film 36 from the side surface 36 of the tape 3 from the bottom surface. The block shape such as the area of s is replaced by the windshield 62. The flow surface 30a of the belt 3 is set so that the height reference windshield 62 is a low air supply duct 66. That is, the air gap of the wind shield 62 is The return of the farthest edge portion of 3() is lower than the height of the bottom surface of the air supply guide f 66. Therefore, when viewed from the side of the belt 3〇 as shown in Fig. 2, it is disposed in the air supply duct 66. The bottom surface 66a of the mouth 67 is not covered by the windshield 62, but is visible between the windshield & and the air supply cymbal 66. Thus, each spray 67 and the nozzle 67 pass between the windshield 62 and the air supply duct 66, and communicate with the upper side or the side (4) of the windshield 62. Here, the space and the cover near the film surface of the cast film 36 The space above or to the side of the wind 62 is spatially connected, whereby if the gas from the air supply duct 66 contacts the inner wall of the casting film 36 or the wind shield 62, it is guided above the wind shield 62. Or the side. The space of the pair of windshields 62 sandwiched between the side edges 36e of the casting weirs 36 is higher than the windshield 62 due to the supply of air from the air supply ducts. Near the side of the external space. Further, as described above, the space near the film of the casting film 36 is spatially connected to the outer space of the upper side or the side of the windshield 62. Due to this, the peripheral air mass of the casting film 36 is rapidly replaced with the gas which re-flows from the air supply duct 66, so that the drying of the casting film 36 is performed more efficiently. The windshield 62 is preferably disposed so as to have a distance m from the belt 30 of 1 〇 mm or more and 5 〇 mm or less, so as to be 1 〇 mm or more and 4 〇 mma 22 201217139 • jyzz / pif Γί! Set to better. By setting m to iGmm or more, contact of the windshield 62 with the belt 30 is more sinful. By <» Further, 50 mm or less, it is possible to more reliably suppress the gas from flowing out from the vicinity of the film surface of the casting film 36 to the side portion 3〇s of the belt 30, compared to when it is larger than 5 〇. It is preferable that the windshield 62 is disposed on the through-pipe 36 of the side edge 36e of the casting film 36 or above the pipe and the passage pipe 50 mm closer to the inner side through the pipe: that is, the windshield 62 The distance 〇2 between the outer surface and the side edge 36e of the casting film 36 through the pipe is preferably 〇_ or more and 5 〇匪 or less. By passing the pipe line (D2 = 〇mm) or the inside thereof (D2 > 0 mm)', it is possible to more reliably suppress the gas from flowing out from the vicinity of the film surface of the casting film % to the side portion 3 〇s of the belt 30. When D2 is larger than 5 〇 mm, the optical characteristics of the film 12, particularly the direction of the slow axis, becomes larger in the side direction of the direction different from the target direction, and may have to be increased. The width should be cut off by the slitter 26. The exhaust unit 63 has a suction duct 72, a suction unit 73, and an exhaust controller 74. The suction machine 73 attracts gas. The exhaust controller 74 controls the attractive force in the suction machine 73. By this control, the suction force from the gas formed in the opening 72a of the suction duct 72 is adjusted. The gas is purged and vented by the exhaust controller 74. Further, the cleaned exhaust gas can be sent to the blower 68' and used for the supply of air from the air supply conduit 66. A plurality of suction ducts 72 are disposed at a position higher than the wind shield 62. Each opening 72a of each suction nozzle faces between the nozzle 67 and the nozzle 67. The opening 67a is disposed between the space near the film surface of the space-joined casting film 36 and the space above or to the side of the windshield 62. Therefore, the air mass around the 23 201217139 /pif casting film 36 is guided more quickly above the wind shield 62. Thereby, the air mass around the casting film 36 is more rapidly replaced with the new gas from the gas supply conduit 66, and the drying of the casting film 36 is further efficiently performed. Further, since the suction duct 72 is disposed at a position higher than the wind shield 62, it is possible to more reliably suppress the outflow of gas from the vicinity of the film surface of the casting film 36 to the exposed portion of the side portion 30s of the belt 30. Therefore, it is possible to more reliably prevent the temperature rise of the side portion 30s, and it is possible to more reliably achieve uniformity of the slow axis direction in the width direction of the film 12. Further, the suction duct 72 may be disposed in the normal direction of the surface of the belt 30 so as to be positioned at the position of the windshield 62. For example, as in the present embodiment, the suction duct 72 may be disposed such that the lower end of the opening 72a is lower than the bottom surface 66 of the air supply duct 66, or the bottom surface 66a of the bottom duct of the suction duct 72 may be the same height. That is, the lower jaw of the opening 72a is π to the bottom surface 66a of the air supply duct 66. Further, the suction duct 72 may be disposed in the traveling direction of the belt 3 so that the opening 72a is located between the nozzle 67 and the nozzle. The soil first upstream-stage air supply and exhaust unit 41 further includes an air supply unit 77 as a tree-side nozzle 78, a blower 79, and a Wei controller 80 upstream of the air supply unit 61 and between the gF=extension position PC and the air supply unit 61. The temperature, humidity, and flow rate of (4) sent by H 78 adjust the flow rate and flow rate of the gas from the nozzle 78. The gas is heated by a plurality of technicians 80, and the heated gas, film %, is used to cast a film 36: as a wind, a blower 24 201217139 jyzz/pif nozzle; 78 with the opening 78a toward the belt 30 The downstream side of the direction, the fineness of the passing film 36 as a downwind on the casting film 36 can suppress the influence of the gas flow on the liquid bead. Wherein # becomes a downwind, which is the direction in which the side of the cast film 36 is inclined to the side of the casting film 36. The direction of the film can flow down the film 36, then == the flow of the gas becomes a forward flow. For the flow of the membrane surface, the gas from the nozzle 78 flows into the gas supply conduit between the membranes 36, most of which are attracted by the suction conduits 6:/, the gripping conduits. Thus, by setting the air supply portion 77 and drying from the two: two rows of the casting film 30, the drying efficiency of the film 12 is further increased and then increased, as in the above, in the present In the invention, the first flow processing and the second flow are performed until the cast film 36 is peeled off from the belt 30. The first is ^ = the first? The upstream side air supply and exhaust unit 41 is in the opposite direction: the cast film dry process is, by (4) 丨, f 2 τ 43th, the flow after the passage of the first flow lag 3 = the surface is flat Syria (4) The journey of the heart of the miscellaneous 36. The latent heat of vaporization of the film 3 of the central portion 3 in which the tape 3 of the casting film 36 is formed is not easily raised. Therefore, in order to enter the efficiency of the casting film 36, the second embodiment is better recorded. In the second embodiment of the present invention, the second upstream domain supply and exhaust unit 90 is provided in the lower upstream region of the casting position Pc for supplying and exhausting the exhaust unit on the casting device 2012201217139 df. Unit 41 is arranged in the opposite direction. ', the belt 30* is the same as the first upstream domain second upstream domain supply and exhaust unit 9 squid 41, and has an air supply unit 9] [, as a monument, an upstream field supply and exhaust unit gas unit (not shown) . The windshield plate % of the air supply part and the exhaust pipe part and the structure of the exhaust part and the exhaust part are basically the same, and the air supply part 6 of the windshield of the air member is the same as the air supply part 62 In the following, only the gas supply portion 9i is blown into the gas in a direction perpendicular to the opposite non-face 3% of the casting surface * of the belt 3'. The windshield is opposed to the windshield 62, and is provided in an upright posture "92. The gas sent from the nozzle % of the air supply portion 91 is prevented from flowing out to the side casting surface 30b. The non-flow of the side portion 3〇s The extension surface corresponds to the casting surface 3〇a of the side portion 3〇s, and is a region on the back side of the casting surface 3〇a of the side portion 30s. The wind shield 92 is formed with the non-casting surface 3〇. The distance D3 of b is equal to the distance D1 between the windshield 62 and the casting surface 30a, and is preferably set to a range of 1 mm or more and 5 mm or less, and is preferably set to a range of 1 mm or more and 4 mm or less. More preferably, a plurality of nozzles 93 are disposed on opposite faces of the non-casting surface 3〇b of the air supply duct 96. The suction duct 97 of the exhaust portion is provided in the traveling direction of the belt 3〇 to be opened at the nozzle 93 is opposed to the nozzle 93. The suction duct 97 is disposed in the normal direction of the non-casting surface 3b of the belt so that the opening is lower than the position of the cover 26 201217139 3y22/pif wind plate 92. The exhaust portion may suck the air mass around the casting film 36 from the opening. The s 97 is such that the second upstream domain supply and exhaust unit 9 is formed with the casting film 36 by the 3G (four) central portion. By comparing the shape of the ^ with the first embodiment, the drying efficiency of the film of the ruthenium film 12 is increased, and H t is further improved by increasing the cast film %. The amount of deviation of the welding axis can be more reliably suppressed (6). The above range of 1 〇 or less can be suppressed to a range of -0.4 to 〇4 or less, and in this embodiment, 'is also suppressed by the windshield 92. The heating from the non-flow surface of the side portion 3〇s can prevent the warpage of the belt 3〇. In the present invention, the wider the width of the belt 30 is, the more effective the film is, and the wider the width of the produced film is, the more effective it is. It is especially preferable to manufacture a film which is used as a retardation film of a liquid crystal display, etc. The cellulose brewing compound is not specifically limited. The sulfhydryl group of a cellulose telluride may be only one type, or may have two or more types of sulfhydryl groups. When two or more fluorenyl groups are used, one of them is preferably an acetamidine group. The ratio of the base group of the cellulose esterified with a carboxylic acid, that is, the degree of substitution of the brewing group, satisfies all of the following formula (j)~( ΙΠ) is better. Furthermore, in the following formula (phantom ~ (ΠΙ), A and B represent the degree of substitution of thiol' a Substituted acyl degree, in addition to carbon atoms, b acyl substitution degree of the number of 3~22. (I) 2.0 <A+B <3.0 (II) 1.0 <A <3.0 27 201217139 jyzz /pif (III) 0 <B <2.0 The complete substitution degree A+B of the fluorenyl group is more preferably 2.20 or more and 2.90 or less, and more preferably 2.40 or more and 2.88 or less. Further, the degree of substitution Β of the fluorenyl group having 3 to 22 carbon atoms is more preferably 0.30 or more, and more preferably 〇 5 or more. Among them, the present invention has a particularly large effect when cellulose diacetate (DAC) is used as the cellulose halide. Hereinafter, examples of the invention and comparative examples of the invention will be given. The details are described in the first embodiment, and only the conditions different from the first embodiment are described in the other examples and comparative examples. [Example 1] The second upstream-stage gas supply and exhaust unit 9A shown in Fig. 5 was added to the solution film forming apparatus shown in Fig. 1, and the film 12 serving as a retardation film was produced from the dope u. The film 12 as a target has a thickness of 58 μm. The circumferential temperature of the first roller 31 was 153⁄4, and the circumferential temperature of the second roller 32 was 40 °C. The distance D1 between the wind shield 62 and the casting surface 3A of the belt 30 is set to 10 mm. The distance from f 30 to the opening 67a of the nozzle 67 is set to i50 mm. The distance D2 between the outer surface of the windshield 62 and the side edge of the '"il film 36 is set to 0 mm. The temperature of the gas sent from the nozzle 67 was set to l35t, and the wind speed was set to 25 m/sec. In the first tenter 17, the film 12 containing the solvent was stretched at a width of 8% in the width direction. The film 12 having a solvent content of less than 5% by mass is guided to the second tenter 23. In the second tenter 23, the film 12 was stretched so as to have a widening ratio of 21% in the width direction. In this Example 1, foaming was not confirmed on the casting film 36. Moreover, 28 201217139 j^zz/pif ^ tape 30 confirmed the warpage or deformation of the side 3 〇 s. The media content of the peeling position pp was 33% by mass. The amount of deviation of the axis of the slow axis of the obtained film 12 is suppressed to 〇〇5 in the width direction of the film 12. The above is still the case. In the following fell, the entire area of 臈12 is suppressed in]. Above the range below 1〇. [Embodiment 2] The distance m between the wind shield 62 and the casting surface 3A of the belt 30 is set to 4 。. Other conditions are the same as in the first embodiment. In the Example 2, foaming was confirmed on the casting film 36. Further, warpage or deformation of the side portion 30s was not confirmed on the belt 30. The solvent content at the peeling position pp was 33% by mass. The axis of the slow axis of the obtained film 12 is deviated from 罝, and is suppressed in the width direction of the film 12 at 〇 〇 5 . In the range below 〇 〇 5 ,, it is suppressed in the entire region of the film 12. Above 1〇 below the range. [Embodiment 3] The distance D2 between the outer surface of the wind shield 62 and the side edge 36e of the casting film 36 was set to 50 mm. Other conditions are the same as in the first embodiment. In this Example 3, foaming was confirmed on the casting film 36. Further, warpage or deformation of the side portion 30s was not confirmed on the belt 30. The solvent content at the peeling position pp was 33% by mass. The amount of axial deviation of the slow axis of the obtained film 12 was suppressed to _〇〇5 in the width direction of the film 12. Above 〇〇 5. In the following range, the entire area of the film 12 is suppressed to 丨. Above the range below 1〇. [Comparative Example 1] 29 201217139 /pif The windshield 62 and the windshield 92 were not provided. Other Conditions and Example 1 In Comparative Example 1, the side of the belt 3 , was warped for 30 s during the repeated casting and peeling, and the side portion 3 〇 s did not contact the second nip roller 31. As a result, the side temperature of the casting film 36 is equal to or higher than the boiling point of the solvent, and foaming occurs on the side portion. Therefore, the film 12 as a target has not been produced. [Comparative Example 2] The blower 68 was not operated, and gas was not sent from the nozzle 67. Further, the suction unit 73 is not operated, and the air mass is not attracted to the suction duct 72. The gas is supplied to the gas by the nozzle 78 so as to be a downwind with respect to the casting film. The temperature of the gas supplied by the nozzle 78 was set to 135. (: The wind speed is set to 25 m/sec. The gas to be supplied flows between the pair of windshields 62, and the conditions of suction from the suction port 47a of the exhaust unit 47 are the same as those of the embodiment j. In Example 2, since the gas to be supplied flows between the one side and the other side of the windshield 62, the foaming rate is not confirmed on the casting film, but the solvent content rate at the peeling position PP is 6% by mass, the drying efficiency is inferior. Further, since the gas flowing between the pair of windshields 62 has a heat release in the width direction from the inner side toward the outer side of the wind shield 62, the more the center The more the side portion becomes higher, the amount of the axial deviation of the obtained film is as large as -0.5 to 0.5 or more in the width direction of the film, and is also as large as -2 or more and 2 or less in the entire region of the film. Comparative Example 3] The angle of the nozzle 67 was inclined 45 with respect to the casting film, and the gas supplied from the nozzle 67 was sprayed to the casting film at a 45 angle. The gas after the injection was 201217139 jy2^/pif. Parallel flow in the wind. The gas of the square and the gas is recognized in the 1st wind plate 67. However, the _ position ^ wire on the cast film does not dry up, the efficiency of the grain / grain 3 is 50% by mass, and there is an exotherm toward the outer side of the = middle = two side, because 3 = the higher the crotch The amount of the axis deviation of the obtained film is larger in the upper direction _. above 02. It is also as large as -1.6. The above 1.6. The following range. [Simplified description of the drawing] Fine, „surgery personnel refer to the drawings and read DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT The above objects and advantages can be easily understood. Fig. 1 is a schematic view of a solution film forming apparatus. Fig. 2 is a schematic side view of a first upstream domain air supply and exhaust unit. Fig. 3 is a first view. Fig. 4 is a cross-sectional view taken along line IV-IV of Fig. 3 and Fig. 4. Fig. 5 is a schematic side view of the second upstream domain supply and exhaust unit. DESCRIPTION OF REFERENCE NUMERALS 10: solution film forming apparatus 11: dope 12: film 15: casting apparatus 30: belt 31 201217139 ^yzz/pif 41, 90: first and second upstream domain supply and exhaust units 42, 43: 1. Second downstream domain supply and exhaust unit 46, 49, 61, 91: air supply unit 47, 50, 63: exhaust unit 66, 96: air supply duct 72, 97: The guide tube 67, 93: nozzle 32