201213152 六、發明說明： 【發明所屬之技術領域】 [0001] 本案係關於一種製造方法，尤指一種喷墨單元之製造方 法 。 【先前技#ί】 [0002] 隨著喷墨技術的進步，喷墨技術不再只是應用在傳統列 印市場上，近年更應用於平面顯示器以及半導體產業的 製程技術中，然而，為了降低成本以及節省製程時間， 紛紛尋求新的喷墨技術，這之中最被廣為應用的，就是 壓電式喷墨技術。 [0003] 請參閱第一圖A，其係為習知喷墨頭多層結構於切割前之 平面示意圖，如圖所示，習知喷墨頭多層結構1主要由多 層不鏽鋼板件以金屬融接接合技術堆疊而成，進而形成 喷墨頭多層結構1之微結構，其中喷墨頭多層結構1係具 有複數個喷墨單元100，請參閱第一圖B，每一噴墨單元 100係對應具有供墨液流入的入液流道101、供儲存墨液 的儲液室102、壓力腔體103、出液流道104以及供墨液 喷出的喷嘴孔105等微結構，且在喷墨單元100的入液流 道101、儲液室102'壓力腔體103、出液流道104及噴嘴 孔105等微結構上方係設置一振動板106，並在振動板 106的上方，且對應於壓力腔體103之位置設置一致動片 107 ° [0004] 請再參閱第一圖B，由於習知喷墨單元100係由多層不鏽 鋼板件所堆疊而成，採用此種方式在製作不鏽鋼板件時 需具備良好的尺寸精度，在組裝時也需將組裝誤差控制 099131850 表單編號A0101 第4頁/共25頁 0992055808-0 201213152 Ο [0005] 在一定範圍内，如此才不致使與喷嘴孔1 0 5對應之出液流 道104產生堵塞之情況，再加上一般在製造喷嘴孔105時 係以蝕刻製程在厚度200im以下且公差約在lOum左右的 喷嘴板件上進行，因此喷嘴板件的邊框尺寸容易因蝕刻 藥水濃度及時間等參數影響而變化，再加上多層不鏽鋼 板件間組裝之誤差，組合完成後，噴嘴孔105容易發生錯 位的情形，即喷嘴孔105的設置位置偏移，如第一圖B之 結構，如此將導致出液流道104縮小且非為直立式，將使 墨水不易噴出，以及喷出之液滴大小不一致而影響喷墨 品質。 Ο 再者，第一圖B所示之喷墨單元主要是使用金屬融接接合 製程來組裝的，其做法是先在各不鏽鋼板件表面上鍍金 ，再依照方向順序將各板件疊加起來，接著進行熱壓以 使每兩板件間的金原子擴散，最終達成融接動作。這種 組裝方式雖然有接合強度極佳的優點，但卻需要在無氧 的環境下，以500至1 000°C的高溫來進行，所以設備建立 較困難且昂貴，同時輔助熱壓的治具也須慎選，否則容 易變形、變質，甚至崩裂，且此高溫製程夾具崩裂或沾 粘嚴重，所以耗損速率極快，除了治具替換費用佔成本 高以外，在大量生產下品質也極不穩定。再者，金價曰 漸昂貴、融接製程不易批次化、以及表面處理不當容易 影響融接效果及良率等，這些都墊高了習知使用金屬融 接生產喷墨單元的製造成本。 因此，如何發展一種可改善上述習知技術缺失之喷墨單 元之製造方法，實為目前迫切需要解決之問題。 099131850 表單編號A0101 第5頁/共25頁 0992055808-0 [0006] 201213152 【發明内容】 [0007] 本案之主要目的在於提供一種噴墨單元的製造方法，俾 解決習知喷墨頭多層結構之喷墨單元使用金屬融接接合 製程來組裝，需要在無氧及高溫的環境下進行，治具替 換費用成本高，大量生產品質不穩定以及金價曰漸昂貴 等問題。 [0008] 為達上述目的，本案之一較廣義實施態樣為提供一種喷 墨單元之製造方法，適用於一喷墨頭多層結構，包含下 列步驟：（a)提供一喷孔層，其係具有一喷嘴孔；（b )將一中間流道層以及一連通層依序設置於該喷孔層之 上，以形成一入液流道 '一儲液室以及一出液流道；（c )將一壓力腔層設置於該連通層之上，以形成一壓力腔 體；（d)將一致動層設置於該壓力腔層之上；（e)於 該喷孔層、該中間流道層、該連通層、該壓力腔層以及 該致動層之相鄰層間設置至少一乾膜層；（f)對該喷孔 層、該中間流道層、該連通層、該壓力腔層、該致動層 及該乾膜層進行一熱壓製程，以形成一喷墨單元。 【實施方式】 [0009] 體現本案特徵與優點的一些典型實施例將在後段的說明 中詳細敘述。應理解的是本案能夠在不同的態樣上具有 各種的變化，其皆不脫離本案的範圍，且其中的說明及 圖示在本質上係當作說明之用，而非用以限制本案。 [0010] 請參閱第二圖A及第二圖B，其中第二圖A係為本案較佳實 施例之喷墨頭多層結構之結構示意圖，第二圖B係為第二 圖A所示之第一較佳實施例之喷墨單元的B-B剖面結構示 099131850 表單編號A0101 第6頁/共25頁 0992055808-0 201213152 [0011]201213152 VI. Description of the invention: [Technical field to which the invention pertains] [0001] The present invention relates to a manufacturing method, and more particularly to a method of manufacturing an ink jet unit. [0002] [0002] With the advancement of inkjet technology, inkjet technology is no longer only used in the traditional printing market. In recent years, it has been applied to the process technology of flat panel display and semiconductor industry, however, in order to reduce costs. As well as saving process time, they are looking for new inkjet technology. The most widely used one is piezoelectric inkjet technology. [0003] Please refer to FIG. 1A, which is a schematic plan view of a conventional multi-layer structure of an inkjet head before cutting. As shown, the conventional inkjet head multilayer structure 1 is mainly made of metal by a plurality of stainless steel plates. The bonding technology is stacked to form a microstructure of the ink-jet head multilayer structure 1, wherein the ink-jet head multilayer structure 1 has a plurality of ink-jet units 100. Referring to the first drawing B, each ink-jet unit 100 has a corresponding a microstructure in which the ink supply liquid flows into the liquid flow path 101, the liquid storage chamber 102 for storing the ink, the pressure chamber 103, the liquid discharge flow path 104, and the nozzle hole 105 from which the ink supply liquid is ejected, and the ink jet unit A vibration plate 106 is disposed above the microstructures of the liquid inlet passage 101, the liquid storage chamber 102', the pressure liquid passage 104, and the nozzle hole 105, and is disposed above the vibration plate 106 and corresponds to the pressure. The position of the cavity 103 is set to the constant motion piece 107 ° [0004] Please refer to the first figure B. Since the conventional ink jet unit 100 is formed by stacking a plurality of layers of stainless steel plates, in this way, when manufacturing stainless steel plates Need to have good dimensional accuracy and assembly when assembling Difference Control 099131850 Form No. A0101 Page 4 / Total 25 Page 0992055808-0 201213152 Ο [0005] Within a certain range, this does not cause the clogging of the outlet flow path 104 corresponding to the nozzle hole 105, plus Generally, when the nozzle hole 105 is manufactured, the etching process is performed on a nozzle plate having a thickness of 200 μm or less and a tolerance of about 10 μm. Therefore, the frame size of the nozzle plate member is easily changed by parameters such as etching concentration and time, and then In addition to the error of assembly between the multi-layer stainless steel plates, after the combination is completed, the nozzle holes 105 are prone to misalignment, that is, the position of the nozzle holes 105 is offset, as in the structure of the first figure B, which will result in the liquid flow path 104. Shrinking and not being upright will make the ink difficult to eject, and the size of the ejected droplets will be inconsistent and affect the inkjet quality. Ο Furthermore, the inkjet unit shown in the first figure B is mainly assembled by using a metal fusion bonding process by first plating gold on the surface of each stainless steel plate and then superimposing the plates in the order of direction. Then, hot pressing is performed to diffuse gold atoms between each of the two plates, and finally a fusion operation is achieved. Although this type of assembly has the advantage of excellent joint strength, it needs to be carried out at a high temperature of 500 to 1 000 ° C in an oxygen-free environment, so that the equipment is difficult and expensive to build, and the fixture for assisting hot pressing is also provided. It must also be carefully selected, otherwise it will be easily deformed, deteriorated or even cracked, and the high-temperature process fixture will crack or stick heavily, so the wear rate is extremely fast. In addition to the high cost of fixture replacement, the quality is also extremely unstable under mass production. . Furthermore, the price of gold is becoming more expensive, the process of melting is not easy to batch, and the surface treatment is not easy to affect the fusion effect and yield, which raises the manufacturing cost of using conventional metal fusion to produce inkjet cells. Therefore, how to develop a manufacturing method of an ink jet unit which can improve the above-mentioned conventional techniques is an urgent problem to be solved. 099131850 Form No. A0101 Page 5 / Total 25 Page 0992055808-0 [0006] [0007] [0007] The main purpose of the present invention is to provide a method for manufacturing an ink jet unit, which solves the spray of the multilayer structure of the conventional ink jet head. The ink unit is assembled using a metal fusion bonding process, and needs to be carried out in an oxygen-free and high-temperature environment, the cost of replacing the jig is high, the quality of mass production is unstable, and the price of gold is becoming more expensive. [0008] In order to achieve the above object, a broader aspect of the present invention provides a method of fabricating an ink jet unit suitable for use in an ink jet head multilayer structure comprising the steps of: (a) providing an orifice layer, Having a nozzle hole; (b) sequentially arranging an intermediate flow channel layer and a communication layer on the orifice layer to form an inlet flow channel 'a reservoir chamber and a liquid outlet channel; a pressure chamber layer is disposed on the communication layer to form a pressure chamber; (d) a uniform layer is disposed on the pressure chamber layer; (e) the orifice layer, the intermediate channel At least one dry film layer is disposed between the layer, the communication layer, the pressure chamber layer and adjacent layers of the actuation layer; (f) the orifice layer, the intermediate channel layer, the communication layer, the pressure chamber layer, the The actuation layer and the dry film layer are subjected to a hot pressing process to form an ink jet unit. [Embodiment] Some exemplary embodiments embodying the features and advantages of the present invention will be described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various aspects, and the description and illustration are in the nature of [0010] Please refer to FIG. 2A and FIG. 2B, wherein FIG. 2 is a schematic structural view of a multi-layer structure of an inkjet head according to a preferred embodiment of the present invention, and FIG. 2B is a second diagram A. The cross-sectional structure of the BB of the ink jet unit of the first preferred embodiment is shown in 099131850. Form No. A0101 Page 6 / Total 25 Page 0992055808-0 201213152 [0011]
G Ο [0012] 意圖’如第二圖A所示，本案喷墨頭多層結構2係為一多 層結構，主要係由多層板件及多層乾膜層（如第二圖B所 示）堆疊設置而成，以使噴墨頭多層結構2具有複數個喷 墨單元200。 請再參閱第二圖B，本案之喷墨單元200可由喷孔層201、 中間流道層202、連通層203 '壓力腔層204、致動層 205以及複數個乾膜層206所堆疊設置而成，於本實施例 中’每一喷墨單元200的喷孔層201可構成一噴嘴片，包 含一噴嘴孔211，中間流道層202可由第一板件20201、 第二板件20202、第三板件20203、第四板件20204、第 五板件20205、第六板件20206以及#一板件間夾持一乾 膜層206所堆疊而成’但板件之數量並不以此岛限，連通 層203則可由入口流道層2031、連通孔層2032以及兩者 之間夾持乾膜層206所堆疊設置而成，其中，入口流道層 2031以及連通孔層2032可分別由，一板件所構成，至於， 壓力腔層204亦可由一板件:所構成，致動層2〇5可為振動 板與致動片（未圖示）所組成，致動片可由但不限由鈐 欽酸船（Lead Zirconate Titanate，PZT)壓電材料所 形成’第一板件20201至第六板件20206、入口流道層 2031以及連通孔層2032可分別為一不鏽鋼板件。本案之 乾膜層206所使用的材質除了可使用一般具有阻擋水性々 劑的壓克力（A crylic)系列乾膜外，針對溶劑型及硬& 化墨水則可使用環氧樹脂（Epoxy)系列材質膠膜，作 以此為限。 請再參閱第二圖B，喷墨單元2〇〇係由喷孔層2〇 干間 099131850 表單编號A0101 第7頁/共25頁 0992055808-0 201213152 肌道層202、連通層2〇3、壓力腔層204以及致動層2〇5 序往上堆疊&置所形成，且於堆疊完成後，連通層_ 之入口流道層2031將堆疊形成具有供墨液流入的入B液流 道2〇7，中間流道層2〇2及入口流道層2〇31將堆疊形成供 儲存墨液的儲液室2〇8，壓力腔層2〇4將堆疊形成壓力腔 體209,連通層203及中間流道層2〇2將堆疊形成出液 流道210，以及喷孔層2〇1形成供墨液喷出的噴嘴孔Μι ，其中，入液流道207係與儲液室208及壓力腔體2〇9相 連通，出液流道210之兩端係分別與壓力腔體2〇9及噴嘴 孔211相連通。 [0013]請再參閱第二圖B，出液流道21〇係為由入口流道層2〇31 、連通孔層2032以及第六板件2G206至第一板件2〇2〇 對應到喷嘴孔211所構成的一個漸縮式流道結構，入口流 道層2031、連通孔層2032以及第六板件20206至第—板 件2 0 2 01之出液流道210的截面積係由壓力腔體2 〇 9朝喷 嘴孔211方向漸縮，且每相鄭層板件係依漸縮方向的原 則構成出液流道’亦即一相鄰層板件的出液流道截面積 大於下一個漸縮方向相鄰層板件的出液流道裁面積，也 就是說，入口流道層2031、連通孔層2032以及第六板件 20206至第一板件20201用以形成出液流道210的載面積 相較，截面積由大至小的順序依序為入口流道層2031、 連通孔層2032、第六板件20206、第五板件20205、第四 板件20204、第三板件20203、第二板件20202、第一板 件20201，即構成入口流道層2031的板件具有最大的截 面積’第·一板件20201的截面積則最小’如此一來’藉由 099131850 表單編號A0101 第8頁/共25頁 0992055808-0 201213152 出液流道21〇的截面積係由壓力腔體209朝喷嘴孔211方 向漸縮的技術特徵，即出液流道210係為一個漸縮式流道 、。構的设計，可導引墨液的流動方向且加快墨液的流速 ，使墨液可快速由喷嘴孔211喷出且喷出之液滴大小一致 〇 [0014] Ο 请再參閱第二圖A，本案之喷墨單元2〇〇所包含之噴孔層 201 '中間流道層202之第一板件20201、第二板件 2〇2〇2、第三板件20203、第四板件2〇2〇4、第五板件 20205、第六板件20206、連通層£〇3之入口流道層2〇31 及連通孔層2032、壓力腔層204、致動層205均各別具有 一對位檢查孔2011、20207、20208、20209、20210、 2021 1、20212、2033、2034、2041、2051，且每一對 位檢查孔的孔徑係柑異，且該複數個對位檢查孔2〇11、 20207 、 20208 、 20209 、 20210 、 20211 、 20212 、 〇 2033、2034、2041、2051的圓心係屬同心圓設置，其 中對位檢查孔的孔徑係’由小至大的順序依序為喷孔層2 〇 1 、第一板件20201、第二板件0202、第三板件20203、 第四板件20204、第五板件20205、第六板件20206、入 口流道層2031、連通孔層2032、壓力腔層204、致動層 205，即致動層205的對位檢查孔2〇51的孔徑最大，而喷 孔層201的對位檢查孔2011的孔徑最小，因此本案之喷墨 單元200所包含之喷孔層201、中間流道層202之第一板 件20201、第二板件20202、第三板件20203 '第四板件 20204、第五板件20205、第六板件20206、連通層203 之入口流道層2031及連通孔層2032、壓力腔層204、致 099131850 表單编號A0101 第9頁/共25頁 0992055808-0 201213152 動層205之間的組裝對位方式可藉由藉由每—板件^ 檢查孔係屬同心圓的特性來進行該多層板件之間的對^1 ，使得組裝完成後喷孔層201、中間流道層2〇2之第—^ 件2〇2(H、第二板件2〇2〇2、第三板件202()3、第四= 20204、第五板件20205、第六板件2〇2〇6、連通層= 之入口流道層2031、連通孔層2032、壓力腔層2〇4、 動層205之間不會發生偏移的情況，使噴墨單元2〇㈧欵 持正常的噴墨功能。 可保 [0015]請再參閱第二則，本案之喷|單元綱的製造方法係: :首先，提供噴孔層201，其係具有一喷嘴孔2 為 1，並 喷孔層201上方設置一層乾膜層2〇6，其中，乾膜層咖 係為一種感光性光阻材料，除了當接合膠層外，也可以 黃光製程定義出適當的開孔，以配合其上下所連接㈣ 關流道或孔洞圖形，以取代習知部分的微流道層。 剛接著，以兩相鄰板件之間来持一乾膜的方式依序將 中間流道層202所包含之第一板件20201、第二板件 20202、第三板件20203、第四板件2〇2〇4、第五板件 20205、第六板件20206設置於噴孔層2〇1上方之乾膜層 2〇6之上，並於第六板件2〇2〇6上方設置-乾膜層2〇6， 後續’同樣以兩相鄰板件之間夾持一乾膜層2〇6的方式依 序將連通層203所包含之入口流道層2〇31以及連通孔層 2032设置於第六板件2〇2〇6上方之乾膜層2〇6之上並 於連通孔層2032上方設置-乾膜層2〇6，以形成入液 流道207、儲液室208以及出液流道21〇。 099131850 然後，將壓力腔層204設置於連通層2〇3之連通孔層 Midi 第 10 頁/共 25 頁 0992055808-0 [0017] 201213152 2032上方之乾膜層206之上，以形成壓力腔體209，接著 ’於壓力腔層204上方設置一乾膜層206，並將致動層 205設置於壓力腔層204上方之乾膜層206之上，最後， 將已組裝對位完成之喷孔層201、中間流道層202、連通 層203、壓力腔層204、致動層205及乾膜層2〇6固定於加 熱治具上，然後以上下同時加溫的方式進行一熱壓製程 ’其使用溫度約介於150至20(Tc，壓力則在3至6 kg/cm2間，時間約需1小時，且於施壓的狀態下降溫至接 近室溫時才予以取出’以形成喷墨單元2〇〇。 Ο [0018]喷孔層所構成冬喷孔片則可以微電鑄方式來製作，因 為其尺寸相當;^且又為金屬材質，所以很容易產生皺折 或變形，甚至無法回復到原來的狀況，所以於本案之一 些實施例中也可以使用較不易變形的聚亞醯胺（ρι)材 料作為喷孔片。使用聚亞醯胺（PI)材料之噴孔片的噴 嘴孔211可使料分子雷射製作出㈣以25韻或5〇 Ο um為主。而無論是電_PI喷孔片，本案亦可將喷孔層 201的尺寸縮小'這_只可以.降低皺折變形的機會，更 因為面積大幅縮小的同時而也可以節省生產成本。 [0019] 雖然第二則所示之嘴.墨單元挪以—次熱壓的方式可以 達到批次化生產，但若組件的層數過多，除了熱傳導會 較不穩定而影響接合效果外，同時各相也越容易 位誤差，進而影響到魏敎性。再者，熱壓製程前的 板件製作、上乾膜層、以及所有板件上治具等步驟 為繁璘’需要花費更多的材料及時間成本，因此，於一 &貝丁 099131850 表單編號Α0Ι0Ι 第U頁/共25頁 0992055808-0 201213152 膜層306以及於部份板件上設置多層乾膜層306的方式， 使得組成喷墨單元300的總板件數減少，但是喷墨單元 3〇〇結構的總厚度仍然可以接近喷墨單元200的結構，例 如，若本實施例使用厚度為30um的乾膜層306，則相較於 第二圖B少掉的中間流道層202之第二板件20202、第四 板件20204部份可以更輕易的由各層間的乾膜層306來補 償’並在第三圖中的中間流道層302之第一板件3021、第 二板件3022、第三板件3023、第四板件3024間上兩層乾 膜層306，另外更可以改上三層乾膜層306來直接取代第 二圖B所示之入口流道層2031，槪得第三圖所示之喷墨單 . ' ........ . 元300在總厚度不變的情況下其組成板件可由11層減至8 層。 [0020] 請參閱第四圖’其係為本案第三較佳實施例之噴墨單元 之結構示意圖’如圖所示’本案另一種減少層數的做法 ’是將原第二圖B中精度要求較低的中間流道層202之第 一板件20201、第二板件20_2、第三板件20203，以及 第四板件20204、第真板件公〇紗5、第六板件20206分別 ." ....... ；' 合併成第四圖中的中間流道層402之第一板件4021及第二 板件4022 ’而第二圖B中所示之喷孔層201、連通層203 之入口流道層2031、連通孔層2032、壓力腔層204以及 致振動層205則因精度要求相對較高，所以仍然各自維持 獨立’依此結果，喷墨單元4 〇 〇的總組成板件將可以由11 層減至7層。 [0021] 請參閱第五圖，其係為本案第四較佳實施例之噴墨單元 之結構示意圖’相較於第四圖，若以多層乾膜層306來取 099131850 表單編號A0101 第12頁/共25頁 0992055808-0 201213152 Ο 代第四圖中的入口流道層2031，則此實施例之噴墨單元 500的組成板件將可再減至6層，一般而言，為避免接合 後的喷墨單元總厚度與第二圖Β所示之喷墨單元200產生 差異，第四圖及第五圖中的乾膜層206通常會希望越薄越 好，但在這種情況下，如果第五圖中還是以這麼薄的乾 膜層20 6來疊加取代第四圖中的入口流道層2031的話，勢 必需要非常多層的乾膜層206才行，將會耗費太多設置乾 膜層的時間，因此，於第五圖所示之實施例中可以使用 三層較厚的乾膜層306，例如：厚度30 um的乾膜層306 ，或是使用例如厚度50 um加上30 μηι共兩層乾膜層來達 成，當然，於其它實施例中，亦可以不同厚度及不同層 數的乾膜層來進行組合。 [0022] 請參閱第六圖，其係為本案第五較佳實施例之喷墨單元 之結構示意圖，相較於第五圖，若將第五圖中的壓力腔 層204及致動層205合併成如第六圖中的致動及壓力層 610，則此實施例之喷墨單元600的組成板件將可再減至5 Ο [0023] 層。 綜上所述，本案之喷墨單元之製造方法藉由以乾膜層接 合的方式來取代習知金屬融接製程，因為有乾膜層作為 膠層，所以各層金屬平板便不需要再鍍金，可省掉很多 成本，同時，其可以用簡單的熱壓設備及方法來組裝， 可批次化處理，使得生產過程更有效率。 本案得由熟知此技術之人士任施匠思而為諸般修飾，然 皆不脫如附申請專利範圍所欲保護者。 【圖式簡單說明】 表單編號A0101 099131850 第13頁/共25頁 0992055808-0 [0024] 201213152 [0025] 第一圖A :其係為習知喷墨頭多層結構於切割前之平面示 意圖。 [0026] 第一圖B :其係為第一圖A所示之喷墨單元之A-A剖面圖。 [0027] 第二圖A :其係為本案較佳實施例之喷墨頭多層結構之結 構示意圖。 [0028] 第二圖B :其係為第二圖A所示之第一較佳實施例之喷墨 單元的B-B剖面結構示意圖。 [0029] 第三圖：其係為本案第三較佳實施例之喷墨單元之結構 示意圖。 [0030] 第四圖：其係為本案第三較佳實施例之喷墨單元之結構 示意圖。 [0031] 第五圖：其係為本案第四較佳實施例之喷墨單元之結構 示意圖。 [0032] 第六圖：其係為本案第五較佳實施例之喷墨單元之結構 示意圖。 【主要元件符號說明】 喷墨頭多層結構：1、2 喷墨單元：100、200、300、 400 ' 500 、 600 入液流道：101、2 0 7 儲液室：102、208 壓力腔體：103、209 出液流道：104、210 喷嘴孔：105、211 噴孔層：201 中間流道層：202、302、402 第一板件：2020 1、3021、 4021 表單編號AD101 第14頁/共25頁 0992055808-0 099131850 201213152 第二板件：20202、3022、 4022 第三板件：20203、3023 第四板件：20204、3024 第五板件：20205 第六板件：20206 連通層：203、303 入口流道層：2031 連通孔層：2032 壓力腔層：204 致動層：20 5 乾膜層：206、306 致動及壓力層：61〇 對位檢查孔：2011、20207、 20208 、 20209 、 20210 、 20211 ' 20212 、 2033 、 2034 、2 041、2051 ，去, is' ：?-fc ^G Ο [0012] Intended as shown in FIG. 2A, the ink-jet head multilayer structure 2 of the present invention is a multi-layer structure mainly composed of a multi-layer plate member and a plurality of dry film layers (as shown in FIG. 2B). It is provided so that the ink jet head multilayer structure 2 has a plurality of ink jet units 200. Referring to FIG. 24 again, the inkjet unit 200 of the present invention may be stacked by the orifice layer 201, the intermediate runner layer 202, the communication layer 203 'pressure chamber layer 204, the actuation layer 205, and the plurality of dry film layers 206. In the present embodiment, the orifice layer 201 of each inkjet unit 200 can constitute a nozzle sheet, and includes a nozzle hole 211. The intermediate channel layer 202 can be composed of a first plate member 2021 and a second plate member 2022. The three plates 20203, the fourth plate 20204, the fifth plate 20205, the sixth plate 20206, and the #1 plate are sandwiched by a dry film layer 206. However, the number of the plates is not limited by this island. The communication layer 203 may be formed by stacking the inlet flow channel layer 2031, the communication hole layer 2032, and the dry film layer 206 between the two, wherein the inlet flow channel layer 2031 and the communication hole layer 2032 may be respectively The pressure chamber layer 204 can also be composed of a plate member: the actuating layer 2〇5 can be composed of a vibration plate and an actuating plate (not shown), and the actuating plate can be composed of, but not limited to, The first plate 2021 to the sixth plate 2 formed by the piezoelectric material of Lead Zirconate Titanate (PZT) 0206, the inlet flow channel layer 2031 and the communication hole layer 2032 are each a stainless steel plate member. The material used for the dry film layer 206 of the present invention can be an epoxy resin (Epoxy) for solvent-based and hard & inks, in addition to the A crylic series of dry films which generally have an aqueous barrier. Series material film, for this purpose. Referring to FIG. 2B again, the inkjet unit 2 is made up of the orifice layer 2 and the gap is 099131850. Form No. A0101 Page 7 / Total 25 Page 0992055808-0 201213152 Muscle layer 202, communication layer 2〇3, The pressure chamber layer 204 and the actuation layer 2〇5 are sequentially stacked and disposed, and after the stacking is completed, the inlet channel layer 2031 of the communication layer will be stacked to form an inflow B channel having an ink supply flow. 2〇7, the intermediate flow channel layer 2〇2 and the inlet flow channel layer 2〇31 will be stacked to form a liquid storage chamber 2〇8 for storing ink, and the pressure chamber layer 2〇4 will be stacked to form a pressure chamber 209, a communication layer 203 and the intermediate flow channel layer 2〇2 are stacked to form a liquid flow channel 210, and the orifice layer 2〇1 forms a nozzle hole 供1 for discharging the ink, wherein the liquid inlet channel 207 is connected to the liquid storage chamber 208 and The pressure chambers 2〇9 are in communication, and the two ends of the liquid outlet channel 210 are respectively connected to the pressure chambers 2〇9 and the nozzle holes 211. [0013] Referring again to FIG. 2B, the liquid flow channel 21 is connected to the nozzle by the inlet flow channel layer 2〇31, the communication hole layer 2032, and the sixth plate member 2G206 to the first plate member 2〇2〇. A tapered flow path structure formed by the hole 211, the cross-sectional area of the inlet flow channel layer 2031, the communication hole layer 2032, and the sixth plate member 20206 to the first plate member 2 0 2 01 is formed by the pressure. The cavity 2 〇9 is tapered toward the nozzle hole 211, and the phase plate of each phase forms a liquid flow path according to the principle of the tapered direction, that is, the cross-sectional area of the liquid flow channel of an adjacent layer plate member is larger than that of the lower portion. The outlet flow channel cutting area of the adjacent layer plate member in a tapered direction, that is, the inlet flow channel layer 2031, the communication hole layer 2032, and the sixth plate member 20206 to the first plate member 20201 are used to form the liquid flow path Compared with the loading area of 210, the cross-sectional area is in descending order of the inlet flow channel layer 2031, the communication hole layer 2032, the sixth plate member 20206, the fifth plate member 20205, the fourth plate member 20204, and the third plate. The piece 20203, the second plate 2022, the first plate 20201, that is, the plate constituting the inlet flow channel layer 2031 has the largest cross-sectional area 'the first plate 202 The cross-sectional area of 01 is the smallest 'so that'. By 099131850 Form No. A0101 Page 8 / Total 25 Page 0992055808-0 201213152 The cross-sectional area of the liquid flow path 21〇 is tapered by the pressure chamber 209 toward the nozzle hole 211. The technical feature is that the liquid outlet channel 210 is a tapered flow channel. The design can guide the flow direction of the ink and accelerate the flow rate of the ink, so that the ink can be quickly ejected from the nozzle hole 211 and the droplet size is consistent. [0014] Ο Please refer to the second figure. A. The first plate member 2011, the second plate member 2〇2〇2, the third plate member 20203, and the fourth plate member of the intermediate flow channel layer 202 included in the inkjet unit 2〇〇 of the present invention 2〇2〇4, the fifth plate member 20205, the sixth plate member 20206, the inlet flow channel layer 2〇31 of the communication layer 〇3, and the communication hole layer 2032, the pressure cavity layer 204, and the actuation layer 205 have respective a pair of inspection holes 2011, 20207, 20208, 20209, 20210, 2021 1, 20212, 2033, 2034, 2041, 2051, and each of the alignment inspection holes has a hole diameter, and the plurality of alignment inspection holes 2 The center points of 〇11, 20207, 20208, 20209, 20210, 20211, 20212, 〇2033, 2034, 2041, 2051 are concentric circles, and the apertures of the alignment inspection holes are sequentially sprayed from small to large. Hole layer 2 〇1, first plate 20102, second plate 0202, third plate 20203, fourth plate 20204, fifth plate 20205, sixth The plate member 20206, the inlet flow channel layer 2031, the communication hole layer 2032, the pressure chamber layer 204, and the actuation layer 205, that is, the alignment inspection hole 2〇51 of the actuation layer 205 has the largest aperture, and the alignment of the orifice layer 201 The aperture of the inspection hole 2011 is the smallest, so the nozzle layer 201 included in the inkjet unit 200 of the present invention, the first plate 20102 of the intermediate channel layer 202, the second plate 20102, and the third plate 20203 'fourth plate 20204, fifth plate member 20205, sixth plate member 20206, inlet flow channel layer 2031 and communication hole layer 2032 of communication layer 203, pressure chamber layer 204, and 099131850 Form No. A0101 Page 9 / Total 25 Page 0992055808-0 The assembly alignment mode between the movable layers 205 of 201213152 can be performed by checking the characteristics of the concentric circles of each hole by the per-plate member, so that the injection hole layer 201 is completed after the assembly is completed. , the second layer 2〇2 of the intermediate flow channel layer 2〇2 (H, the second plate member 2〇2〇2, the third plate member 202()3, the fourth=20204, the fifth plate member 20205, the first The six-plate member 2〇2〇6, the communication layer=the entrance flow channel layer 2031, the communication hole layer 2032, the pressure cavity layer 2〇4, and the movable layer 205 are not offset, so that Ink unit 2〇(8) Holds the normal inkjet function. Guaranteed [0015] Please refer to the second, the spray method of the case | The manufacturing method of the unit is: First, the orifice layer 201 is provided, which has a nozzle The hole 2 is 1, and a dry film layer 2〇6 is disposed above the orifice layer 201. wherein the dry film layer is a photosensitive photoresist material, in addition to the bonding layer, the yellow light process can also be appropriately defined. The opening is to match the upper and lower connected (4) closed flow path or hole pattern to replace the micro flow channel layer of the conventional part. Immediately thereafter, the first plate member 20201, the second plate member 2022, the third plate member 20203, and the fourth plate member included in the intermediate channel layer 202 are sequentially sequentially held by a dry film between two adjacent plates. 2〇2〇4, the fifth plate member 20205, and the sixth plate member 20206 are disposed on the dry film layer 2〇6 above the nozzle hole layer 2〇1, and are disposed above the sixth plate member 2〇2〇6- The dry film layer 2〇6, the subsequent 'the same is to sandwich the inlet flow channel layer 2〇31 and the communication hole layer 2032 included in the communication layer 203 by sandwiching a dry film layer 2〇6 between two adjacent plates. A dry film layer 2〇6 is disposed on the dry film layer 2〇6 above the sixth plate member 2〇2〇6 and above the communication hole layer 2032 to form the liquid inlet channel 207, the liquid storage chamber 208, and the outlet layer The liquid flow path is 21 〇. 099131850 Then, the pressure chamber layer 204 is disposed on the dry film layer 206 above the communication hole layer Midi of the communication layer 2〇3 to form a pressure chamber 209 above the 201213152 2032. Then, a dry film layer 206 is disposed above the pressure chamber layer 204, and the actuation layer 205 is disposed on the dry film layer 206 above the pressure chamber layer 204. Finally, the aligned pore layer 201 is assembled. The intermediate flow channel layer 202, the communication layer 203, the pressure chamber layer 204, the actuation layer 205, and the dry film layer 2〇6 are fixed on the heating fixture, and then heated and heated to perform a hot pressing process. It is between 150 and 20 (Tc, the pressure is between 3 and 6 kg/cm2, the time is about 1 hour, and it is taken out when the pressure is lowered to near room temperature) to form the ink jet unit 2 〇 [0018] The winter spray hole sheet formed by the orifice layer can be made by micro-electroforming, because its size is equivalent; and it is also made of metal, so it is easy to wrinkle or deform, or even return to the original The situation, so in some embodiments of the case can also be used less The deformed polyamidamine (ρι) material is used as a orifice sheet. The nozzle hole 211 of the orifice sheet of the polytheneamine (PI) material can be used to produce a laser of the material molecule (4) with 25 rhyme or 5 um um. Mainly. Regardless of the electric _PI orifice sheet, the size of the orifice layer 201 can also be reduced in this case. This can only reduce the chance of wrinkle deformation, and also save production cost while the area is greatly reduced. [0019] Although the second nozzle unit shown in the second embodiment can achieve batch production, if the number of layers of the assembly is too large, in addition to the heat conduction will be unstable and affect the joint effect, at the same time The more easily the phases are, the more the errors are affected, which in turn affects the Wei Wei. Moreover, the steps of making the plate before the hot pressing, the upper dry film layer, and the fixtures on all the plates are complicated. Material and time cost, therefore, in a & Beiding 099131850 form number Α0Ι0Ι page U / 25 pages 0992055808-0 201213152 film layer 306 and a layer of dry film layer 306 on the part of the plate, so that the composition of the spray The total number of plates of the ink unit 300 is reduced, but The total thickness of the ink unit 3〇〇 structure can still be close to that of the ink jet unit 200. For example, if the present embodiment uses a dry film layer 306 having a thickness of 30 μm, the intermediate flow channel layer is reduced compared to the second FIG. The second plate 2022 of the 202, the second plate 20204 portion can be more easily compensated by the dry film layer 306 between the layers and the first plate member 3021 of the intermediate flow channel layer 302 in the third figure Two dry film layers 306 are disposed between the two plates 3022, the third plate 3023, and the fourth plate 3024, and the three dry film layers 306 may be further modified to directly replace the inlet flow channel layer shown in FIG. 2031, Chad's inkjet sheet shown in the third figure. ' ........ The element 300 can be reduced from 11 layers to 8 layers with the total thickness unchanged. [0020] Please refer to the fourth figure, which is a schematic structural view of the inkjet unit of the third preferred embodiment of the present invention. As shown in the figure, 'another method for reducing the number of layers in the present case' is the accuracy of the original second figure B. The first plate member 20201, the second plate member 20_2, the third plate member 20203, and the fourth plate member 20204, the first plate member male yam 5, and the sixth plate member 20206 of the lower intermediate flow channel layer 202 are required respectively. . " . . . . ' merged into the first plate 4021 and the second plate 4022' of the intermediate flow channel layer 402 in the fourth figure and the orifice layer 201 shown in the second FIG. The inlet flow channel layer 2031, the communication hole layer 2032, the pressure cavity layer 204, and the vibration-promoting layer 205 of the communication layer 203 are still relatively independent due to the relatively high precision requirements, and accordingly, the inkjet unit 4 is The total composition of the panels will be reduced from 11 to 7 layers. [0021] Please refer to the fifth drawing, which is a schematic structural view of the inkjet unit of the fourth preferred embodiment of the present invention. Compared with the fourth figure, if the multi-layer dry film layer 306 is used, 099131850 is used. Form No. A0101, page 12 / Total 25 pages 0992055808-0 201213152 Ο In the fourth embodiment of the inlet flow channel layer 2031, the components of the ink jet unit 500 of this embodiment can be further reduced to 6 layers, in general, to avoid bonding The total thickness of the ink jet unit is different from that of the ink jet unit 200 shown in FIG. 2, and the dry film layer 206 in the fourth and fifth figures is generally desired to be as thin as possible, but in this case, if In the fifth figure, if such a thin dry film layer 20 is superimposed instead of the inlet flow channel layer 2031 in the fourth figure, it is necessary to require a very multi-layer dry film layer 206, which will cost too much to set the dry film layer. Therefore, in the embodiment shown in the fifth figure, three thicker dry film layers 306 can be used, for example, a dry film layer 306 having a thickness of 30 um, or a thickness of 50 um plus 30 μηι, for example. Two layers of dry film are achieved, of course, in other embodiments, they may be different thicknesses. And the number of different dry film layers combined. [0022] Please refer to the sixth figure, which is a schematic structural view of the inkjet unit of the fifth preferred embodiment of the present invention. Compared with the fifth figure, if the pressure chamber layer 204 and the actuation layer 205 in the fifth figure are used. When combined into the actuation and pressure layer 610 as in the sixth drawing, the constituent panels of the ink jet unit 600 of this embodiment can be further reduced to 5 Ο [0023] layers. In summary, the manufacturing method of the ink jet unit of the present invention replaces the conventional metal fusion process by means of dry film layer bonding. Since the dry film layer is used as a glue layer, the metal plates of each layer do not need to be gold plated. It can save a lot of cost, and at the same time, it can be assembled with simple hot pressing equipment and methods, and can be batch processed to make the production process more efficient. This case has been modified by people who are familiar with the technology, and is not intended to be protected by the scope of the patent application. [Simple Description of the Drawings] Form No. A0101 099131850 Page 13 of 25 0992055808-0 [0024] [0024] First Figure A: This is a plan view of a conventional ink jet head multilayer structure before cutting. [0026] First FIG. B is a cross-sectional view taken along line A-A of the ink jet unit shown in FIG. [0027] Fig. 2A is a schematic view showing the structure of a multi-layered structure of an ink jet head according to a preferred embodiment of the present invention. [0028] FIG. 2B is a schematic cross-sectional view showing the B-B of the ink jet unit of the first preferred embodiment shown in FIG. Third Fig.: is a schematic view showing the structure of an ink jet unit of a third preferred embodiment of the present invention. Fourth FIG. 4 is a schematic view showing the structure of an ink jet unit according to a third preferred embodiment of the present invention. [0031] Fig. 5 is a schematic view showing the structure of the ink jet unit of the fourth preferred embodiment of the present invention. [0032] Figure 6 is a schematic view showing the structure of the ink jet unit of the fifth preferred embodiment of the present invention. [Main component symbol description] Multi-layer structure of inkjet head: 1, 2 Inkjet unit: 100, 200, 300, 400 '500, 600 Inlet flow path: 101, 2 0 7 Liquid storage chamber: 102, 208 Pressure chamber : 103, 209 outlet flow path: 104, 210 nozzle hole: 105, 211 orifice layer: 201 intermediate channel layer: 202, 302, 402 first plate: 2020 1, 3021, 4021 form number AD101 page 14 / Total 25 pages 0992055808-0 099131850 201213152 Second plate: 20202, 3022, 4022 Third plate: 20203, 3023 Fourth plate: 20204, 3024 Fifth plate: 20205 Sixth plate: 20206 Connecting layer: 203, 303 inlet flow channel layer: 2031 communication hole layer: 2032 pressure cavity layer: 204 actuation layer: 20 5 dry film layer: 206, 306 actuation and pressure layer: 61 〇 alignment inspection hole: 2011, 20207, 20208 , 20209 , 20210 , 20211 ' 20212 , 2033 , 2034 , 2 041 , 2051 , go , is' :?-fc ^
099131850 表單編號Λ0101 第15頁/共25頁 0992055808-0099131850 Form number Λ0101 Page 15 of 25 0992055808-0