TW201121699A - Measurement calibration device and auxiliary stand thereof. - Google Patents

Measurement calibration device and auxiliary stand thereof. Download PDF

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Publication number
TW201121699A
TW201121699A TW98143691A TW98143691A TW201121699A TW 201121699 A TW201121699 A TW 201121699A TW 98143691 A TW98143691 A TW 98143691A TW 98143691 A TW98143691 A TW 98143691A TW 201121699 A TW201121699 A TW 201121699A
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TW
Taiwan
Prior art keywords
platform
pedestal
auxiliary
base
displacement
Prior art date
Application number
TW98143691A
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Chinese (zh)
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TWI386275B (en
Inventor
Jin-Fang Wu
yu-ting Lv
fu-quan Xu
Yin Zhuang
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Metal Ind Res & Dev Ct
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Application filed by Metal Ind Res & Dev Ct filed Critical Metal Ind Res & Dev Ct
Priority to TW98143691A priority Critical patent/TWI386275B/zh
Publication of TW201121699A publication Critical patent/TW201121699A/en
Application granted granted Critical
Publication of TWI386275B publication Critical patent/TWI386275B/zh

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Abstract

A measurement calibration device and its auxiliary stand are disclosed. The auxiliary stand is respectively disposed with a base, a first platform and a second platform by means of lamination. The base is fastened to the working platform of the machine table through magnetic sucking or locking manner. The first platform is installed on the base through a first direction sliding rail, and a first displacement driving mechanism is disposed between the base and the first platform to drive the first platform to shift in a first direction. In addition, the second platform is installed on the first platform through a second direction sliding rail, and a second displacement driving mechanism is disposed between the first platform and the second platform to drive the second platform to shift in a second direction. Accordingly, when the measurement calibration device is fastened to the second platform to perform error measuring operation, the displacements of the first platform or the second platform can be utilized to support the optical path calibration of laser beam, thereby further achieving goals of easy operation and fast accurate calibration.

Description

201121699 Description of the invention: [Technical field of the invention] In particular, the invention provides a measurement calibration device capable of assisting the measurement and calibration device to perform laser light and its auxiliary seat, thereby achieving easy operation and rapid and accurate adjustment, and [prior art] After the assembly or use period of the equipment, due to the difference in the freshening factors of the components on the assembly, the movable parts (such as the processing mains relative to the fixed parts (such as the workbench) will have different working positions. Therefore, after the machine equipment is assembled or used for a period of time, it is necessary to calibrate the relative position of the work position of the six pieces of mechanical origin and the fixed part. When the school material industry is in use, it is necessary to make a mistake. The calibrating device of the error value obtains the actual distance between the mechanical origin and the working position, that is, the actual distance between the άτ斗# and the ideal distance in the program, and the difference f' is measured after the error value is obtained. The error value ί ί Γ 取得 Γ Γ Γ Γ ί ί Γ ί ί ί ί ί 完成 完成 完成 完成 完成 完成 完成 完成 完成 完成 完成 完成 完成 完成 完成 完成 完成 完成 完成 完成 完成——The C language of the research of the industry is that there are three linear errors and three errors in each axial direction, including linear positioning error, horizontal straightness error, and yaw error, two limb errors, pitch error, The yaw error and the hysteresis ίϊί There are a total of ten errors in the three axes, plus the machine error between the axes; 佶ί3 has twenty-one static geometric errors. t is to be linearly determined by the measurement and calibration device of the laser interferometer - γ: ζ" 2, 2: segment space diagonal measurement, the measurement of linear positioning error includes i and linear positioning error measurement, and The diagonal measurement of the segmentation space includes the measurement of the diagonal of the measured body; the source of the linear positioning error of the γ axis is the same as that of the first figure of the first generation. - The laser light ', 7011' laser light source transceiver unit 1 1 front end is turned over with the first anti-201121699 lens group 12' and then the board seat 1〇 is mounted on the magnetic seat 14, using the magnetic seat 4 can be used for lightning The light source transceiver unit !i and the first mirror group 12 are mounted on the table ^ 5, and the second mirror group The 1 3 is mounted on the magnetic base 17 by a rod 16 , and the second mirror group 13 can be mounted on the processing spindles I and 8 by the magnetic base 27 , and the first mirror group 1 2 and The second mirror group 13 reflects the light beam projected by the laser light source transceiver unit 11 back to the laser light source transceiver unit. The unit 11 receives the reflection signal, and then the reflected signal is returned to the electric pickle to calculate The actual distance, and then the ideal distance from the program, can be calculated as the error value. However, before the measurement of the error recording, the optical path of the laser beam must be adjusted first. First, the JL spindle is added. 1 8 along the arrow Y, when moving horizontally to the proximal end, first adjust the plate seat 丄 (10) χ to the horizontal position ί the axial position of the first lens group 13 'to enable the laser wire to reflect to the ί * The position of the center of the mirror group 13 is reflected back to the neutral position of the f-light source transceiver unit 1 1 'refer to Fig. 2'. Then the machining spindle 1 8 is moved along the arrow to the γ axis. 'Because of the angle of reflection, the laser beam will deviate from the center of the mirror W 3 ,this
The angle of group 12 is such that the laser beam can be reflected to the second mirror J ί L, and the position of the center of the laser source transceiver unit 11 is returned, and then the spindle 18 is horizontally moved to the Y axis horizontally as shown in FIG. At the near end, due to the angle of the first mirror group 12, the can' laser beam will deviate from the center position of the second mirror group 丨3, and the scale must depend on the horizontal position of the entire plate 丨(10) 以 to make the ray Shooting ίί reverse, the center position of the second mirror group 1 3, and reflected back to the center of the laser source ancient #, the approach end of the horizontal end of the horizontal adjustment angle of the light of the light, can be near The end and the far end are measured for the same optical r/axial line mosquito bit error; 'However, the γ axial linear positioning has the following disadvantages in the measurement operation: • The near-end optical path is performed When adjusting, 'Because you need to adjust the axial position of the second mirror group', you must release the second mirror group 13 in the manual operation mode and then move it along the rod! 6 lifting displacement, however, the operation mode is very good. The second mirror group 丨3 is offset along the rod 丨6 and the angle of the 201121699 is not easy to change the position, and the wireless movement causes the optical path to be adjusted. ::, axial efficiency. The deviation of the 'interference' affects the operation of the optical path adjustment 2 When the adjustment is made, the X-axis manual operation mode of the pedestal 1 〇 is required to first move the plate seat 1 to the light below the Q-shift, which affects the light direction. When the line mosquito bit error measurement, the same will also produce the shortcomings of the description, and need to be improved. Referring to Figure 3, the diagonal measurement of the segmented space cuboid (four) mirror group 13 is not shielded by the outer cover, then the optical path of the proximal end adjusts the reflection angle of the anti-mirror group 13, and far _ optical path adjustment _ = - the reflection angle of the mirror group 13 so that the laser beam can be reflected to the center position of the second mirror group 13, and reflected back to the center of the laser light source transceiver unit 丄i When the two mirrors are covered by the outer cover (not shown), the optical path adjustment of the proximal end adjusts the sliding plate base 1 and the horizontal movement of the γ axis and the linear movement of the z-axis. The end of the light depends on the reflection angle of the school-integrated-reverse group i 2 so that the laser beam can be reflected to the center of the outer cover of the second mirror group 丄3, and the optical path is adjusted in the evening. After that, the same end and the far end can be made to obtain the same optical path for the error measurement of each diagonal line. However, when multiple near-end optical path adjustment is performed, the specific axis of the plate base i 需要 needs to be adjusted. To the horizontal position, the magnetic seat i 4 under the plate base 10 must be firstly moved in the manual operation mode, and then the plate seat ^ 0 The horizontal movement of the characteristic axis, however, in the process of the shift, the same is also the case that the valley has a different axial offset and is difficult to change the positioning problem, causing deviation in the adjustment of the optical path. However, the operational efficiency of the optical path adjustment is affected. Furthermore, when the optical path adjustment for the near end is performed, if the reflection angle adjusted by the second mirror group 13 is too large and the laser light source transceiver unit is touched, it is necessary. Rotating the plate holder i 避 to avoid the second mirror group 13 'At this time, the magnetic seat 201121699 14 under the plate holder 1 must also be pulled. 'Re-moving the slab 1 ◦ rotation of the appropriate angle, also caused the experience of difficult to operate adjustment, for the current work = the industry's research and development and production trials, after all, research and development to create a kind of easy ^ nine ' after long-term efforts to research and transfer, this ^The auxiliary pedestal of the book, with the mouth set i,: the 5th seat «' _ suction _ set way fixed above the earthen seat is erected in the first direction, σ, first in the room Positioning Jiang is a chess squad and setting a second platform between the pedestal and the first flat platform and the second platform, and the light path of the first laser beam is tender and lie to assist the purpose of the present invention. Provide a kind of purpose. The auxiliary pedestal can be erected below the first platform: its help. A third displacement drive mechanism is provided between the base and the base, and the fourth platform: the lower displacement is used for the first time of the near-end optical path adjustment; and the second shot group is further operated. The purpose of the rapid and accurate adjustment is the first on the glaze - the purpose of the invention is to provide a measurement calibration step. The auxiliary pedestal can be erected under the third platform with a fourth flat/, and an auxiliary seat. Angle rotation can be used. When the near-end optical path is adjusted to make the reflection angle of the fourth platform two mirror group adjustment too large, the first rotation on the spindle can be used to adjust the position of the laser light source transceiver unit. , avoid: the angle of the two angles is easy to operate and quickly and accurately adjusted. A mirror group 'Embodiment】 201121699 implementation; with; = Ming made further step-by-step understanding 'zine-better transmission, 6 diagram' The first embodiment of the invention is provided with auxiliary pedestal main mode The base 20, the first platform 21 and the second flat can be fixed on the table of the machine. In the embodiment, the ί=ίΓΞΪΓί is fixed on the table of the machine, The base 2 〇2 1, the base 2 0 and the first platform 2 1 are provided with the first and the 'the first direction guiding group includes the first-direction sliding rail 2 〇1; 'in this real + 'The first-direction guide group is attached to the base 2 〇 slide 2 01 ' and the slide plate 2 1 1 is provided below the first platform 21 2 1 1 'the base 2 0 and the first platform The displacement 'the first-displacement drive mechanism is included; = 3 ii to;; r, in the present embodiment, the first and the - seat 2 〇 2, moving the Japanese car, 0 Γ from the must fork in the ^ The other rotation portion 2 3 1 is linearly displaced in the direction of the rotation direction of the platform 2 1 , and the first stop is provided on the other side between the bases 1 , the first stop Moving plate 2 4, bolt 2 4 2 and screw 2 5, in this embodiment t solid ~ history has: ίϊΤ the other side of the first platform 21 by means of bolts 2 4 2 and 4 1 of the mosquito plate 2 4 'one stretched into the long groove 2 4 1 and can snail The screw on the i's 25' can lock the first platform 2 1 as Ιίίΐ displacement when the lock is fixed; the other - the second flat 3 is placed above the platform 21 and the second platform is provided between the second and the second platform The second direction shifting group, the present invention includes a second direction sliding rail 213 and a chute 2 21, and the C id two-direction guiding group is disposed above the first platform 21 with a second displacement driving mechanism. 'To drive the second platform 2 2 as the second party: 201121699 drive = gas includes a second seat 214, a second seat 2 2 2 and 2, a side square - right star ίί, the second displacement The drive mechanism is attached to the second platform 214 of the first platform ,ίίί:, the side of the second platform 2 2 is 02; Γί#ί::Γ2^^ is set to the right side of the right id if The second stop device 'the second stop is equipped with the second stop Li: i2?; 2 and the bolt 28, which is fixed in the present embodiment and the other side of the long slot 2 is by, for example, a bolt 2 7 2 And the first flat a? 疋 27' wear and stretch 27 1 and can be screwed into the machine platform. On the workbench 3, the second platform cup is wide and λq, and the first calibration device is installed. That is, the second platform is fixedly loaded with a single calibration device. The calibration device is fixed on the plate holder 31. The front end of the unit 3 2 is fixed with a first mirror group ί. The mirror group 34 is mounted on the magnetic base 3 6 3 6 with the rod 3 5 and the second mirror group 34 can be mounted on the processing = light. The first mirror group 3 3 and the second mirror group 34 reflect the laser beam of the laser beam back to the laser light source transceiver unit 3 2, and the radar signal can be used to transmit the reflected signal. Feedback to the base 2 下方 below the 3 1 (that is, the steep seat), and then the shifting of the seat 3 to work the specific 201121699. The first direction guide slot is provided with a first direction slide 4 3 i, and the third direction of the third direction slide 4 3 1 is a slot 4! 丄, another:; Set The first displacement drive machine 3 and the first-flat = T, - (10)__ include H: 4 ΓΓ side 5: this: in the embodiment, the first position = 丄 4 is provided with ^ support 4 1 2, - screw 4 5 Screwed to Ϊ4; 4 3 2 ' and fixed at one end to the first support bauxite another 4==r: platform 41 for the first-square = ^ a port 43" on the other side of the platform 4 1 a stopping device, the stopping device comprises a fixing plate 46, and the first stopping device is attached to the other side of the first platform 41
Jl flute If the bolts of the third platform 43 are bolted to the third platform 4, when the lock is fixed, the platform 4 can be limited to the displacement of the first direction; and the other platform is provided with the _-platform 42' A first direction guiding group is disposed between the upper portion of the first platform 41 and the second platform 42. The second direction guiding group includes a second direction sliding device 4 and a sliding slot 4 2, in this embodiment. The second direction guiding group is provided with a first direction sliding 413 above the first platform 1 and a sliding groove 4 21 of the first direction sliding rail 413 below the second platform 42. A second displacement driving mechanism is further disposed between the first platform 41 and the second platform 42 to drive the second platform 42 to perform displacement in a second direction, and the second displacement driving mechanism includes a second mounting 4 201121699 The ground-support 422 and the screw #48, in the embodiment, the second displacement drive mechanism is disposed on the side of the first platform 41 on the side of the second frame moving platform 42 with the thread. Then there is a second seat 42 2, a 4?_4^#, ί a ^41 4 2 24 ΐ!::! part 4 8 1 can be moved by the second platform 42 when rotating; ^_. The second stopping device comprises a fixing plate 49, a bolt: a ==, for example, a bolt 4 9 2 and a g with a long groove 4 9 i is extended to the long groove 4 91 and can be screwed to the first A platform 4 Ί上^^9 is worn, the second platform 4 2 is displaced in the second direction, and the other is (2); = erected above the fourth platform 44, and the third platform 43 is provided with a third-party guide Group, the third-party wizard shifting group package; ^ 4 4 1 and chute 4 3 3 'in this embodiment, (4) two directions; the side of the fourth platform 4 4 is provided with a third direction slide rail 4 4" i "The second side is provided with a sliding slot set in the third direction of the sliding rail 44丄. The flat 3 side ί(2)4ίΐ 4 1 has a third displacement "mechanism to drive the four platforms 4 4 There is a third stop ΐ, and the second platform 4 3 and the 2' 2 rt 止 second stop device are fixedly attached to the first id in the embodiment, the third stop device 5 2 1 ίϊί; 54 23 bolt 5 3, when locked, can be pf: system: flat four: ΐ, shift, · the fourth platform 44 system direction has a shaft hole 4 4 2 ' makes the fourth platform 4 = f 4 open Turn, and between the base 40 and the fourth platform 44; 201121699 (four) bolt 5, in this embodiment, the fourth stopping device is the other side of the Μ4^ screw-thread inspection 5 4, the bolt 5 4 is locked to the top frame to limit the rotation of the fourth platform 4 4; The pedestal 40 can be fixed + 'wire base 4 (10) (10) suction method 4 0 = 211 111 'The faucet of the second shi shi shi pedestal can be fixed to the machine calibration device by means of the pedestal 40 magnetic attraction method, the standard = the first mirror group 6 3, the second mirror group ^ 6 6 is attached to the magnetic base 66, and the magnetic mirror 6 6 is mounted on the jn main shaft 67, thereby The fine-number-reverse-t-tray, the light emitted by the source transceiver unit 62 is reflected back to the rear-receiver receiving and receiving material, and then compared with the ideal distance of the program, that is, the calibration is performed. When it is used as Χ-Υ_Ζ axial linear positioning error ί ί, then change ======= C accurately depends on the light path _ school, to achieve easy to operate - ancient 2W, this post two two real self-seat Because the right 笙-direction (that is, the z-axis) linear lifting displacement of the third flat two ^, the optical path adjustment when the need to adjust the second reverse 4 $ sexual lifting displacement, instead of the prior art must be manually three To the wire group 6 4, it is moved up and down along the rod member 65, so that the adjustment of the optical path of the 201121699 is achieved, and the operation efficiency is improved, and the operation efficiency is improved. 13 The auxiliary pedestal of the second embodiment of the present invention is provided Working force!, when the proximal optical path is adjusted, if the transmitter unit 6 2 is used to set the limb, the fourth flat touch can be used to adjust the position of the laser light source transceiver unit 62 to avoid a reflection. The rest of the 64, the laser beam can be adjusted to the accurate speed of the Shiguang Road's 'easy to operate and efficient to improve the efficiency of the ^ ^ amp; the layer of the auxiliary pedestal can not be easy to operate, and a real Miscellaneous 敝 敝 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进 进Fig. 3, Fig. 4, Fig. 5, Fig. 6, Fig. 7, Fig. 1. Schematic diagram of the near-end calibration of the linear positioning error measurement. Schematic diagram of axial linear positioning error measurement remote optical path calibration. The equation is a schematic diagram of the measurement of the near-end optical path of the segment space diagonal measurement. An exploded schematic view of a first embodiment of the present invention. A schematic diagram of the combination of the first embodiment of the present invention. A schematic diagram of the combination of the other embodiments of the present invention. The invention is in the form of an exploded view of the second embodiment of the present invention. = Fig. A schematic view of the combination of the second embodiment of the present invention. Figure 10 is a schematic cross-sectional view showing a second embodiment of the present invention. 1 is a diagram showing the intention of the optical path adjustment for the error value measurement according to the second embodiment of the present invention (1). Fig. 12 is a schematic diagram of the second embodiment of the invention applied to the adjustment of the optical path of the error value measurement (2). $ 1 3 H Invented the second real application of the optical path measurement of the difference measurement. Intention (3). S3 12 201121699
[Main component symbol description] Conventional part: 1 0 : Plate base 11: Laser light source transceiver unit 12: First mirror group 13: Second mirror group 14: Magnetic seat 15: Table 16: Rod 17: Magnetic Seat 18: Machining spindle Part of the invention: 2 0: Base 2 01: First direction slide 2 0 2 : First mount 21: First platform 211: Chute 212: First mount 213: Second direction Slide rail 214: second mount 2 2 : second platform 2 21 : chute 2 2 2 : second mount 2 3 : screw 2 31 : rotating portion 2 . 4 : fixed plate 2 41 : long groove 2 4 2 z bolt 2 5 : bolt 2 6 : screw 2 61 : rotating part 2 7 : fixing plate 2 71 : long groove 2 7 2 : bolt 2 8 : bolt 3 0 : table 3 1 : plate base 3 2 : laser source Transceiver unit 3 3 : first mirror group 3 4 : second mirror group 3 5 : rod 3 6 : magnetic seat 3 7 : machining spindle 4 0 : base 4 01 : pivot 41 : first platform 411 = Chute 412: first support 413: second direction slip 414: second mount IS] 13 201121699
4 2 : second platform 4 21 : chute 422 4 3 : third platform 4 31 : first direction slide 4 3 2 4 3 3 : chute 4 4 : fourth platform 4 41 : third direction slide 442 4 5 : Screw 4 5 1 4 6 : Fixing plate 4 61 : Long groove 46 2 4 7 : Bolt 4 8 : Screw 48 1 4 9 : Fixing plate 4 91 : Long groove 49 2 5 0 : Bolt 5 1: 5 2 : fixing plate 5 21 = long groove 5 2 2 5 3 : bolt 54 : 6 0 : table 6 1: 6 2 : laser light source transceiver unit 6 3 : 6 4 : second mirror group 6 5: 6 6 : Magnetic seat 6 7: :Second seat: First frame: Shaft hole: Rotating part: Bolt: Rotating part: Bolt and bolt: Bolt and bolt plate seat First mirror group rod processing spindle

Claims (1)

  1. 201121699 VII. Patent application scope: Base: The system is fixed on the system: the first flat i Ming ί is located above the pedestal, and has a first-direction motive i between the base; 2 the first platform is the first direction The first displacement of the displacement drive * two flat: the first side of the square = the mechanism of the second platform of the work "2", in the application of the scope of the patent application, the auxiliary pedestal between the first platform wire seat, its = = to the slide rail, and below the first platform is provided with 4 ·==== the auxiliary pedestal of the calibration calibration device, the first seat of the J screw thread is set, the first, the screw is screwed to the first The pedestal and the rotating portion of the first-supporting seat at one end can be moved to the first flat: the fifth and the pedestal further comprise a first-stop device, a plate, and a long slot It can be screwed onto the pedestal. The auxiliary pedestal of the measuring and calibrating device is described in the auxiliary pedestal of the measuring and calibrating described in item 5 of the Ϊ 利 , ,, where the 'the first stop shirt is tied to the - Flat ^ 33_ pedestal's plate, which is inserted into the long slot and can be screwed to the base to have a fixed slot to limit the displacement of the first platform for the first direction. The bolt on the top can be used to lock the patent. ^ ^ Patent application scope; in the measurement described in item L, the second flat disk 筮 ^ _ card device auxiliary pedestal, the 〆 thousandth and the first platform The second direction guiding group is connected to the first 15 S1 7 201121699 to the sliding door' and the second platform is provided with an auxiliary pedestal which is slid to the measuring and measuring device described in the item 8. The second side of the platform is provided with a second seat with a threaded thread; the second seat, the screw is screwed to the second frame, and has a support. When the rotating part of the screw rotates, it can be pushed and fixed. Linear displacement of one. 彳τ shifts the first platform to the second direction. 9. According to the quantity φ described in the scope of the patent application, the second platform and the first platform further include H set ^^ pedestal' The auxiliary pedestal of the measuring device of the measuring device, the difference between the two and the "==== long = can limit the displacement of the second platform in the second direction. . The upper bolt 'in the lock 1 is used as an auxiliary pedestal for the calibration device, and the system includes: a base: is fixed on the work table of the machine; and the 'fourth flat|jian is set on the pedestal society, and The rotary triad system along the pivot (10) angle is erected above the fourth platform, and is provided with a = direction guiding group and a third platform for driving a third displacement driving mechanism between the fourth platform; π/τ only Moving the first platform: erected above the third platform, and with the first direction guiding group and driving the first platform as a first displacement driving mechanism; and the second platform of the σ material direction displacement: the system is erected at the first Above the platform, and with the first platform side guide group to move and drive the second platform for the second direction position, = drive mechanism, above the second platform is fixed to install the measurement school ^ 1 2 Pi Yishen, Lee Flip ! The seat of the calibration device described in item i, wherein the base is magnetically fixed to the table of the machine: 201121699 • 13 seats: auxiliary of the measuring and calibration device described in item 1 The axis of the table, the fine platform can be used as the auxiliary pedestal of the calibrated attack according to the measurement of the upper phase of the angle of the '1', and the fourth stop The auxiliary table 1 e. of the calibration device is rotated. a seat, wherein the auxiliary platform of the third platform and the fourth flat portion is provided, and the side of the platform is provided with the fth side:;::::== the chute sliding on the third direction slide rail . The other side of the brother's side is s. 17. According to the scope of the patent application scope i i, the third platform is the fourth level of the second whistle device. It is in the third direction of the fourth platform; the moving mechanism, the third platform is used for the linear lifting in the third direction & when turning the bolt, it can be pushed up by 18:2: The scope of the patent patent area: 'The third platform and the fourth platform further include 畛19. According to the scope of the patent application, item i8, wherein the third stopping device is attached to the fixing plate of the third flat auxiliary table, one is extended In the long slot and can be screwed to the first: flat on the jj; long slot lock when the third platform can be used to limit the position of the third direction of the bolt 'in the second, according to J, please turn the third item The measuring platform and the first platform and the third platform are provided with a first side above the third platform; and a sliding slot is disposed on the first direction sliding rail. The bottom of the thousandth set is 21. According to the measurement of the scope of work in the patent application, the first position between the first platform and the third platform, i-drive H, is based on the mth square of the second platform. 17 ISI 201121699: Qiao two pushes the linear displacement at one end _ a direction. It can be moved to the first platform as the 2nd 2nd according to the scope of the patent application, which is described in item 1 of the patent application. "中中" The platform-to-platform and the third platform are more packaged; In the item A, the first stopping device is attached to the fixing plate of the auxiliary platform of the first platform, and the long-acting groove has a long groove m to limit the first platform to the first direction. The first & thousand. The bolt on the stage, in the amount of 2 items mentioned in item i, wherein the second platform and the auxiliary platform of the first platform are 5 seats: the side of the second platform is in Chushishi Production of a series of cup screw 5 in the second seat, and in a Qiu Jii 2 = one to the side of the suspected, can be transferred; seat according to the special range of the range of ^11 measurement calibration device The auxiliary stage/, the first level of the μ and the first platform further comprise a second stop device 27, which is adapted to the auxiliary pedestal of the calibration device according to the scope of claim 26, the second The stop device is attached to the other side of the second platform. The wearer extends into the long slot and can be screwed to:: flat length: when locked, the second platform can be restricted to the second position. screw The bolt is connected to the source, and includes an auxiliary pedestal, a pedestal, a laser ray, an auxiliary pedestal, and a fixed pedestal on the auxiliary pedestal. The slab is equipped with a laser light source transceiver unit on the 201121699. And a first mirror group, and a second mirror group is fixed on a processing spindle, wherein the auxiliary platform includes: a base: is fixed on a table of the machine; the first platform: the wire a first displacement drive mechanism at the top of the base and with a first direction guide group and a first platform for driving the first platform; and a second platform: the upper platform is mounted on the first platform, and a second direction guiding group is arranged between the first platform, and a second borrowing mechanism for the second direction displacement is purchased between the first platform, and a plate seat is fixedly arranged above the second platform; The first direction or the second platform is the second aspect of the flat-wife, and the laser beam 9 Q-beam mirror group of the residual light-emitting unit is then reflected to the second mirror group. The calibration device described in the item, wherein the counter The rod is hidden on the magnetic base, and the first mirror group is mounted on the processing spindle. The measuring device includes an auxiliary pedestal, a plate seat, a laser beam, a mirror group and a a second mirror group attached to the workbench and fixed on the auxiliary pedestal with a carrier-plate base, the plate base unit and the first mirror group, and on the -plus-base, wherein the auxiliary pedestal system includes: The flat frame is arranged above the base, and can be rotated above the pivoting second flat fourth platform along the pivot axis, and if the fourth platform is provided between the fourth platform for the third direction lifting displacement a second displacement driving mechanism; a sanding first flat third platform, and a third platform between the third platform and a displacement driving the first platform for the first direction displacement: being erected above the first platform, and The first platform is provided with the 201121699 two-direction guide group and the second platform for driving as one of the directions - the second one: the rotation of the C angle to the laser of the laser light source transceiver unit: the heart: The seventh reflection 敎, the New 反 帛 帛 反射 反射 reflection. The beam calibration apparatus according to the third application of the patent application scope, wherein the five reverse rods are mounted on the magnetic base, and the magnetic base ί is mounted on the machining spindle .
    20 ί
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI640388B (en) * 2017-11-10 2018-11-11 財團法人工業技術研究院 Servo tuning device and servo tuning method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM346484U (en) * 2008-08-11 2008-12-11 Jing-Mei Chen Multifunctional platform base for machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI640388B (en) * 2017-11-10 2018-11-11 財團法人工業技術研究院 Servo tuning device and servo tuning method
CN109782691A (en) * 2017-11-10 2019-05-21 财团法人工业技术研究院 Servo adjusting device and service regulation method

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