201111272 四、指定代表圖： (一) 本案指定代表圖為：第（1)圖。 (二) 本代表圖之元件符號簡單說明： 101 矽質晶圓基版； 102 矽質表面氩氧鍵； 103 FDTS ； 104 105 106 107 水蒸氣； FDTS分子頭端三個矽烷基將被氫氡基所取代； 鹽酸蒸汽； 矽氧共價鍵； 五、本案若有化學式時，請揭示最能顯示發明特徵的化學式： 六、發明說明： 【發明所屬之技術領域】 本發明係有關奈微米表面科學研究與工程應用領域，主要是整合 =微機電齡技術和科學理論設計H種可朝於石讀基版上製作 輪表面，並應麟職和雛表碰水性，使表面能夠制極端斥水與 抗沾黏的特性。 v、 【先前技術】 201111272 微量檢體、快速檢測及精確判定為醫學檢測技術所追求之長期願景與 未來趨勢。先前技術有關控制接觸角的專利（us Pat No 2007/0155897 Al)，描述設計表面薄膜可使水接觸角由9〇。〜115。。專利（us細％ 咖鹰綱6 A1)，描述可提供外在能量控制親疏水性。本案提出一種新 式的調控表面親疏水性的控制裝置，利用生化分子自組裝的特性，製作出 具備雙特性(疏雜魏桃)的錢分子絲面上，製㈣喊單、生物相 谷陡強。:i:重要的疋可藉由電場或磁場，來操控表面好_職疏水性。 籲本技術在操控液味上，具借高操控性、高機動性以及簡便的設計與製作。 本案設計可依檢測對象需求，採用不同之分子佈植於表面，可達成多選擇 性及南生化相雜。本技術之詳細具體實補將在後文陳述。 【發明内容】 本專利案發明的目的，在於具體實現奈微複合表面奈微機電製程之整 合，以奈米晶體與微結構製作，利用生化自組裝技術進行表面疏水性改質， 而石夕質基板表面上的奈米晶獅成鋪起驗侧賴金屬姆子間的氧 化還原反應本專利利用具有FDTS化學表面改質以及钱刻時間長短所影 …丁微。構複。表面之微液珠接觸角，在〇〜15論之間，隨著侧時間的 增加，树表面較高深寬_奈米晶體亦隨之增加；而在丨㈣_持續 的侧使得料“具有數目〇且尺核大的⑽，也使得表面有 較強的疏水性’然而奈米結構層的高度卻開始逐漸下降，顯細液亦開 始侧奈米a日體’而在3 G〜4 5恤之間奈米晶體高度明顯減少；持續的钱 刻明顯地使物帛_祕，咖剛轉械得更加平 201111272 坦，也因此存在於奈米結構間的孔_顯的縮減和變少，而這正是接觸角 下降的。根據這些接觸細結果證實，可藉由奈微結構的設計盘製 作的確能財職出極端疏雜並且低翁效觸複合表面。下文藉由且 體實施例配合所附的圖式詳加說明，更容易瞭解本發明的目的 '技術内容: 特點及其所達成的功效。 【實施方式】 本發明提丨-騎穎奈職合結構表狀設計與製㈣達成使表面具 _端斥水性和超抗黏性。主要提出二個最佳實施例^第―實施例的結構 不意圖’如圖1所示〇 本專利選肖疏水性分子4全氣基三知幾CF3(CF)7CH2CH2SiCi3 (1H, 1H, 2H, 2H.perfluorodecyltrichlorosilane, FDTS) » 構複合表面疏水性並降絲_遲職應。將個分子油沈積儀器，以 生化分子表面自組裝的方式絲-層疏水性的表面細進行表面改質。 FDTS分子所沈積化學薄膜的特性，其最主要的優點包括：該薄膜能夠形成 低自由此的表面覆蓋（l〇Wsurfaeeenergy，995 mJ/m2)、分子鍵綱的石夕燒群 與石夕質基板雜侃很強_氧共價賴，其細附著於紐上的穩定度 相备優異 '表面疏水性具有長時效性、能夠承受很高溫度製程（r>4000c) 而不被破壞或變質和超低黏滯係數。由於上述這些特徵，這類FDTS化學 分子已廣泛應用於生化微流體晶片上流道的表面改質，並被證實能夠有效 降低於流體傳輸過程中的殘留，並使奈微結構複合表面轉變為兼具抗黏滯 性與疏水性。本文量測於平坦晶圓表面上該疏水性分子薄膜層所對應到本 201111272 質接觸角為112°。其分子自組裝過程與機制如下： 首先，將已經清洗乾淨的試片載入分子氣相沈積儀，並預先使用氧電漿 進行表面，5•化’使⑦f表面（1G1)產生氫氧鍵⑽)；接著通人fdts(i〇3) 蒸汽與水統（104)㈣體巾進行化學反應；在浙8分子頭端三個石夕烧 基將被氫氧基所取代（1〇5)，並且形成鹽酸蒸汽（1〇6);而後FDTS分子含 有虱氧基的頭祕受職板上氫氧基的吸引而靠近，並且兩兩柳整齊地 排列’接^'FDTS分子頭端上相鄰§&對的氣氧基進__步經過脫水反應 並於表面上形餘強鍵結的魏倾鍵（1G7)。而整釘⑽自組裝薄膜的 品質好壞的_軸於整轉程的溫度、壓力與水蒸氣含量。 第一實施例的示意圖，如Μ所示。首先以石夕質晶圓基版（2〇1)為例， 於基版表面上製作第-層微結構陣列（2〇2)，在完成表面微結構的製作後， 緊接著是在這些微結構的表面上侧出奈米晶體（2()3)，首先，製備一種特 殊的匕予钱亥说其主要成分包括含有氫敗酸、過氧化氣和石肖酸銀溶液； 當硝酸銀驗料與判基板絲祕_，⑽銀軒躲性大於 表面上对子，鼠_子_化表面上的_子形成二氧财，而銀離 子自身獲得電子聽核縣子，完絲—統學氧化觀反應；所形成 氧匕夕的表面將進步被氫氟酸向下姓刻，至於仍停留於表面上的銀原 子則再次魏氧化氫所氧化成銀離子，而這是第二級化學氧化還原反應； 此時表面上的銀料又重複讀前軸作，並喊妓魏骑氧化還原 的反應’織表面制地概氟酸向，直_氧化聽紐消耗完， 才會停止钱刻反應；在完成_反應後，整片晶圓再用稀釋後的過氧化氫 201111272 青$在於帶走殘留表面上和奈米結構空隙中的銀原子，之後再進,_ 一樣的鮮作練序.標洗（_··ηΑ，3:1，90= 10 mm)和去水烘烤（120 °C，10 min)。 ， 浸泡於姆勤财，能输浸缝__】疏水度，纽刻時間 為l.5rmm可清楚觀_奈綠構表面上具有許多—束絲集的奈米線， 不米、。構層的平均向度（/1_)約為8 18心爾著侧時間的增加奈米 構表面層的同度有逐漸下降的趨勢。纽刻時間為⑹⑺匕，奈米結構表 面形貌相對其他二cases較為平坦沒有太大的起伏，奈米結構層力平均高度 為僅剩下G.73 m。其量麟果顯示侧液的浸鱗間明顯造成奈米結 構曰表面域的不同，進而影響表面具有不同疏水程度，如圓2b所示。化 學儀刻製程在相_控制條件τ，於料基板上所軸奈米㈣具有报均 勻的刀佈和較為-致性的表面粗麟徵，而這有助於確保製㈣可靠度和 重複性。 而上述奈米化學触刻製程，具有方便快速製作奈求晶體結構的優點，並 可直接與現有織電製程技碰合，具有高朗相雜和便雜。然而更 重要的是’這樣奈微複合表面技術將適合於目前廣泛以石夕質基板為基礎之 各項微機電元件，具有相當高應用價值和發展潛力。 本發明之麟雜與及其功效已藉由上賴明及實關充分揭露。任 何熟習此項技藝之人士在參照此等揭示内容下將可毫無困難地實施本發 明。因此，熟習此項技藝之人士根據本研究發明之精神及範缚下，對上述 實施例進行修飾與改變均應視為本發明之—部分。另外，以上已將本發明 201111272 做-誶細酬，細上所述者，僅為本創作之較佳實施綱已，當不能限 定本創作實獻_。即凡依本_㈣專·_作之料 等’皆應仍屬本創作之專利涵蓋範M®保護之射。 、修錦 【圖式簡單說明] 圖式說明： 第1圖有機石夕炫類的化學分子自組裝示意圖 第2圖浸泡化學關液方式、钱刻時間與接觸角示意圖 【主要元件符號說明】 圖示符號說明 101 矽質晶圓基版； 102 矽質表面氫氧鍵； 103 FDTS ； 104 水蒸氣； 105 FDTS分子頭端三個矽烷基將被氳氧基所取代； 106 鹽酸蒸汽； 107 矽氧共價鍵； 201 矽質晶圓基版； 202 微結構； 203 奈米結構；201111272 IV. Designated representative map: (1) The representative representative of the case is: (1). (2) A brief description of the symbol of the representative figure: 101 enamel wafer base; 102 enamel oxygen bond on the enamel surface; 103 FDTS; 104 105 106 107 water vapor; three decyl groups at the head end of the FDTS molecule will be hydroquinone Substituted by a base; hydrochloric acid vapor; covalent bond of helium; 5. If there is a chemical formula in this case, please disclose the chemical formula that best shows the characteristics of the invention: 6. Description of the invention: [Technical field of the invention] The present invention relates to the surface of the nanometer Scientific research and engineering applications, mainly integration = micro-electromechanical age technology and scientific theory design H can be used to make wheel surface on the stone reading base plate, and should be water-repellent on the ground and the young table, so that the surface can make extreme water repellent With anti-stick properties. v, [Prior Art] 201111272 Micro-samples, rapid detection and accurate determination are the long-term vision and future trends pursued by medical detection technology. The prior art patent (us Pat No 2007/0155897 Al) for controlling the contact angle describes the design of a surface film which allows the water contact angle to be 9 〇. ~115. . The patent (us fine % eagle eagle 6 A1), describes the external energy control to provide hydrophilicity. In this case, a new control device for controlling the surface hydrophobicity of the surface is proposed. The self-assembly characteristics of biochemical molecules are used to produce a cotton molecular surface with double characteristics (different Wei peach), which is made up of (4) shouting and strong bio-grain. :i: An important 疋 can control the surface by means of electric or magnetic fields. This technology is designed and manufactured with high handling, high maneuverability and simple handling in controlling liquid taste. The design of this case can be planted on the surface with different molecules according to the needs of the test object, which can achieve multiple choices and South Biochemistry. Detailed details of the technology will be set forth below. SUMMARY OF THE INVENTION The object of the invention is to realize the integration of the nano-composite surface nano-electromechanical process, the nano crystal and the microstructure, and the surface hydrophobicity modification by biochemical self-assembly technology, and The nano-crystal lion on the surface of the substrate is laid down to examine the redox reaction between the metal ions. This patent utilizes the chemical surface modification of FDTS and the length of time of the money... Ding Wei. Construction. The contact angle of the micro-beads on the surface, between the 〇~15 theory, as the side time increases, the surface of the tree is higher and deeper and wider - the nanocrystals also increase; while on the side of the 丨(4)_continuation, the material "has a number 〇 and the large nucleus (10) also makes the surface more hydrophobic. However, the height of the nanostructure layer begins to gradually decrease, and the fine liquid also begins to side nano-a body' in the 3 G~4 5 shirt. The crystal height between the nano crystals is significantly reduced; the continuous money engraving clearly makes the object _ secret, the coffee has just turned more flat 201111272, and therefore the pores between the nanostructures are reduced and reduced. This is the drop of the contact angle. According to the results of these contact details, it can be confirmed that the design of the nanostructure can be used to make extremely redundant and low-touch composite surfaces. The drawings are explained in detail, and it is easier to understand the purpose of the present invention. The technical content: characteristics and the effects achieved by the present invention. [Embodiment] The present invention provides a surface-based design and system (four) to achieve the surface With _ end water repellency and super anti-stick properties. The structure of the two preferred embodiments is not intended to be 'as shown in Fig. 1. 〇 专利 专利 疏水 疏水 疏水 疏水 疏水 疏水 疏水 疏水 疏水 疏水 疏水 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 Perfluorodecyltrichlorosilane, FDTS) » Composite surface hydrophobicity and silk drop _ late duty should be a molecular oil deposition instrument, the surface of the silk-layer hydrophobic surface is finely modified by biomolecular surface self-assembly. FDTS molecular deposition The most important advantages of the chemical film include: the film can form a low free surface coverage (l〇Wsurfaeeenergy, 995 mJ/m2), the molecular bond of the Shixi burning group and the stone ceremonial substrate is very strong _Oxygen covalently, its fine adhesion to the top is excellent in stability. 'Surface hydrophobicity is long-lasting, can withstand very high temperature processes (r>4000c) without being destroyed or deteriorated and ultra-low viscosity coefficient Due to these characteristics, such FDTS chemical molecules have been widely used in the surface modification of the flow channel on biochemical microfluidic wafers, and have been proven to be effective in reducing the residue in the fluid transport process and transforming the nanostructured composite surface into It has anti-viscosity and hydrophobicity. The hydrophobic molecular film layer on the surface of the flat wafer corresponds to the 201111272 mass contact angle of 112°. The molecular self-assembly process and mechanism are as follows: First, it will already The cleaned test piece is loaded into the molecular vapor deposition apparatus, and the surface is pre-treated with oxygen plasma to make the 7f surface (1G1) produce hydrogen-oxygen bonds (10); then pass the fdts (i〇3) steam and The water system (104) (4) body towel is chemically reacted; the three stone bases at the head end of Zhejiang 8 will be replaced by hydroxyl groups (1〇5), and form hydrochloric acid vapor (1〇6); then FDTS molecules The head of the methoxy group is attracted by the attraction of the hydroxyl group on the occupational plate, and the two vines are neatly arranged. The oxy group of the adjacent §& The dehydration reaction is carried out on the surface of the surface of the strongly bonded bond (1G7). The quality of the whole nail (10) self-assembled film is the temperature, pressure and water vapor content of the whole process. A schematic view of the first embodiment, as shown in Μ. First, taking the Shiyue wafer base plate (2〇1) as an example, a first-layer microstructure array (2〇2) is formed on the surface of the base plate, and after the surface microstructure is completed, the micro-structure is followed. The surface of the structure is coated with nanocrystals (2()3). First, a special type of yttrium is prepared. The main components include a solution containing hydrogen sulphuric acid, peroxygen gas and silver tartaric acid. With the substrate silk secret _, (10) silver Xuan hiding is greater than the surface pair, the _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Observing the reaction; the surface of the formed oxygen oxime will be progressively engraved by hydrofluoric acid, while the silver atom still remaining on the surface is oxidized by the hydrogen peroxide to silver ions, which is the second-stage chemical redox Reaction; at this time, the silver material on the surface repeats the reading of the pre-axis, and shouts the reaction of Wei riding the oxidation-reduction. The surface of the woven surface is fluorinated, and the oxidized hearing is consumed, and the reaction is stopped. After the completion of the reaction, the entire wafer is reused with diluted hydrogen peroxide 201111272 Take the silver atoms in the residual surface and in the nanostructure voids, and then proceed, _ the same fresh practice. Standard washing (_··ηΑ, 3:1, 90= 10 mm) and dewatering baking (120 °C, 10 min). Soaked in Mqincai, can infiltrate the seam __] hydrophobicity, the moment of engraving is 1.55mm, it can be clearly seen. There are many nanowires on the surface of the green structure, not rice. The average divergence (/1_) of the layer is about 8 18, and the increase in the surface time of the nanostructure has a tendency to gradually decrease. The engraving time is (6)(7)匕, and the surface morphology of the nanostructure is relatively flat and not too large and undulating compared to the other two cases. The average height of the nanostructure layer is only G.73 m. The amount of lining fruit shows that the immersion scale of the side liquid obviously causes the difference of the surface area of the nanostructure, and thus affects the surface with different hydrophobicity, as shown by the circle 2b. The chemical engraving process is in the phase _ control condition τ, and the axial nanometer (4) on the material substrate has a uniform knives and a relatively rough surface, which helps to ensure the reliability and repeatability of the system. . The above-mentioned nano-chemical etch process has the advantages of convenient and rapid fabrication of the crystal structure, and can be directly matched with the existing woven process technology, and has high ambiguity and complexity. More importantly, however, the nano-composite surface technology will be suitable for various micro-electromechanical components based on the current Shixia substrate, which has considerable application value and development potential. The invention and its efficacy have been fully disclosed by Shang Lai Ming and Guan Guan. Any person skilled in the art will be able to practice the invention without difficulty, with reference to such disclosure. Therefore, those skilled in the art, in light of the spirit and scope of the present invention, are to be construed as a part of the invention. In addition, the above has made the present invention 201111272 to be fine-grained, and the above is only a better implementation of the present invention, and when the creation cannot be limited. That is, all of the products of this _ (four) special _ _ should still belong to the patent of this creation to cover the scope of the M M protection. Fig. 1 shows the self-assembly diagram of chemical molecules in the organic stone Xixuan class. Figure 2 shows the immersion chemical shut-off method, the time of the engraved time and the contact angle [main symbol description] Illustrated symbol 101 enamel wafer base; 102 enamel surface hydroxide bond; 103 FDTS; 104 water vapor; 105 FDTS molecular head end three decyl groups will be replaced by decyloxy; 106 hydrochloric acid vapor; 107 矽 oxygen Covalent bond; 201 enamel wafer base; 202 microstructure; 203 nanostructure;