TW201100579A - Vacuum electricity introducing device - Google Patents
Vacuum electricity introducing device Download PDFInfo
- Publication number
- TW201100579A TW201100579A TW99120616A TW99120616A TW201100579A TW 201100579 A TW201100579 A TW 201100579A TW 99120616 A TW99120616 A TW 99120616A TW 99120616 A TW99120616 A TW 99120616A TW 201100579 A TW201100579 A TW 201100579A
- Authority
- TW
- Taiwan
- Prior art keywords
- vacuum
- conductor
- cavity wall
- electrode module
- power supply
- Prior art date
Links
- 230000005611 electricity Effects 0.000 title abstract description 6
- 239000004020 conductor Substances 0.000 claims abstract description 24
- 238000001816 cooling Methods 0.000 claims description 32
- 230000006698 induction Effects 0.000 claims description 10
- 230000000694 effects Effects 0.000 claims description 9
- 238000007599 discharging Methods 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 7
- 238000007789 sealing Methods 0.000 description 6
- 238000010891 electric arc Methods 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 210000001503 joint Anatomy 0.000 description 4
- 230000008021 deposition Effects 0.000 description 3
- 230000020169 heat generation Effects 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000000110 cooling liquid Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
Landscapes
- Plasma Technology (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW99120616A TW201100579A (en) | 2010-06-24 | 2010-06-24 | Vacuum electricity introducing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW99120616A TW201100579A (en) | 2010-06-24 | 2010-06-24 | Vacuum electricity introducing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201100579A true TW201100579A (en) | 2011-01-01 |
| TWI419990B TWI419990B (enrdf_load_stackoverflow) | 2013-12-21 |
Family
ID=44836628
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW99120616A TW201100579A (en) | 2010-06-24 | 2010-06-24 | Vacuum electricity introducing device |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW201100579A (enrdf_load_stackoverflow) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3809836A (en) * | 1972-12-21 | 1974-05-07 | Gen Electric | Vacuum-type electric circuit interrupter |
| JP4045953B2 (ja) * | 2002-12-27 | 2008-02-13 | 日新電機株式会社 | 真空アーク蒸着装置 |
-
2010
- 2010-06-24 TW TW99120616A patent/TW201100579A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TWI419990B (enrdf_load_stackoverflow) | 2013-12-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103766000B (zh) | Cvd装置以及cvd膜的制造方法 | |
| US10515786B2 (en) | Mounting table and plasma processing apparatus | |
| US20080302761A1 (en) | Plasma processing system and use thereof | |
| CN103915310B (zh) | 等离子体处理容器和等离子体处理装置 | |
| US8629370B2 (en) | Assembly for delivering RF power and DC voltage to a plasma processing chamber | |
| WO2017221829A1 (ja) | プラズマ処理装置 | |
| WO2015152490A1 (ko) | 비확산게터를 갖는 회전 양극형 엑스선관 | |
| JP2011091361A (ja) | 静電チャック | |
| JP4584722B2 (ja) | プラズマ処理装置および同装置により製造された半導体素子 | |
| US11990360B2 (en) | Electrostatic chuck (ESC) pedestal voltage isolation | |
| CN219759518U (zh) | 一种样品台组件及微波等离子体系统 | |
| CN111058016B (zh) | 半导体工艺炉的电极机构和半导体工艺炉 | |
| CN202871758U (zh) | 一种安全输送冷却气体的装置 | |
| JP6277398B2 (ja) | プラズマcvd装置及び配管内の成膜方法 | |
| TW201100579A (en) | Vacuum electricity introducing device | |
| KR102810211B1 (ko) | 심리스 전기 도관 | |
| JP6473332B2 (ja) | セグメント化されたアンテナアセンブリおよびプラズマ発生装置 | |
| CN113056572A (zh) | 真空处理装置 | |
| JP4839123B2 (ja) | 背面電子衝撃加熱装置 | |
| CN221918227U (zh) | 一种电极引出结构及热炉 | |
| TW201225746A (en) | Plasma apparatus | |
| CN116732502A (zh) | 一种带有偏压引线的样品台组件及mpcvd系统 | |
| JP2006319192A (ja) | 電極および該電極を用いたプラズマプロセス装置 | |
| CN223268757U (zh) | 镀膜设备 | |
| JP2000064052A (ja) | プラズマcvd装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |