TW201014787A - Method for fabricating carbon nanotube, wafer for growing carbon nanotube, and carbon nanotube device - Google Patents

Abstract

The invention discloses a method for fabricating a carbon nanotube, and the method comprises the following steps: providing a substrate; forming a catalyst layer on the substrate; forming a porous capping layer on the catalyst layer to finish a wafer; forming the carbon nanotube on the wafer. By the porous capping layer, the well-aligned carbon nanotube can grow on the wafer through thermal CVD.

Description

201014787 IX. Description of the invention: [Technical field of invention] A method for producing a high collimated carbon nanotube, a test piece for a carbon nanotube, and a nano carbon member having a high-precision carbon nanotube Lingnai [previous technology] quality, ίί; ίί is J-shaped: 嫉 it has a unique mechanical skill, high;;; and the characteristics of direct ratio. In terms of chemical properties, carbon bray = "conductivity is also very good. In terms of electrical properties, according to its social m have a good: S: S:, s = = prime ί sound synthesis * out of the auxiliary nano carbon f Growth. Due to the type of catalyst 6 201014787, the purpose of producing 冋 quality carbon nanotubes. For example, the above catalyst preparation method can include: (di ϊ ΐ ΐ = = = or recorded as a common splash of the material The effect is good; the growth of the polycarbon tube. The step is beneficial to the early wall nano ❹ ❹ (2) powder carrier method, using a carrier (such as alumina, oxygen and a solution containing a transition metal salt mixed, and into the stone Etc.) and reduction steps to obtain a transition metal catalyst on the carrier, and sintering at the same temperature to multi-layer catalyst method · sequentially on the stone substrate, splashing with the shape of the heating process is easy to react with oxygen Formation of aluminum oxide; metal formation = metallization of the metal layer grown in the carbon nanotubes.

Dem thermal t-cracking chemical vapor deposition method (Thennal Chemieal high, 为, _ to form a carbon nanotubes, which is based on the catalysis of the _ particles on the substrate to solve the problem The catalyst prepared by various preparation methods is used to heat the diameter of the carbon nanotubes or the growth of the carbon nanotubes, so that the carbon nanotubes of the New County tube can be obtained. The carbon nanotubes grown by the pyrolysis chemical vapor deposition method are used in the field. Therefore, it is not suitable for the carbon nanotubes requiring collimation. 201014787 [Invention] The invention is provided by The method of making the nano tube can be used to solve the problem of the prior art by solving the chemical gas, and the solution of the present invention is based on a specific embodiment. ? 丄 substrate 丄 formation of catalyst layer ====== ❿ m : s layer in the naphthalene tube. In this high-collimation ί m carbon ί, phase deposition method can form the invention on the test piece Another-Fan 4 is to provide a kind of use: Nai = thermal cracking chemical vapor deposition method on which i is high according to a specific implementation In the present invention, the plate, the catalyst layer and the porous cover layer U are formed on the catalyst layer. When the substrate test piece is at a high temperature (thermal cracking chemical arbor;; In the embodiment, the cap layer can prevent the toucher; the thief-shaped spurs "the hole of the hole-covering layer has collimation, so the hole, the length-to-diameter ratio and the high collimation." A further embodiment of the present invention is to provide a carbon nanotube having high collimation. The device is not ruined, and according to a specific embodiment, the catalyst layer is porous. Cover and nano carbon; J contains substrate, vapor deposition method is grown in S, and thermal cracking chemical vapor deposition method 201014787 is used to prevent the condensation of catalyst particles to form large particles = and there is a The method for producing a carbon nanotube according to the production method includes a sirloin sir, the substrate of the specific embodiment; in step S12, a touch is formed on the substrate, at::S10 , providing a coating layer on the media layer, forming a cover layer of two, and measuring it at S16' Forming a carbon nanotube on the sheet, and, in the step 本=本=实例, the substrate of step S10 can be, but is not limited to, the oxide' is formed by sputtering or other suitable processes. The porous covering layer of step S14 can be formed in practice: = emulsified zinc, oxidized dance, oxidized stone, oxidized Ming Cai 1J, oxygen or other suitable substance; nitride, such as milk as Ϊ aptamer: such as nitrogen Oxidation or other suitable = quality coating or thousands of times on the catalyst layer. In the specific tilting _ thickness can be, but not limited to I. 1 ~ 10 nm. Another aspect, coverage The thickness of the layer can be (U~1〇奈carbon tube#^^=3^_ method to form a nano- and a hole-forming layer on the test piece for thermal cracking chemical vapor deposition 9 201014787 to limit the catalyst layer The size of the catalyst particles agglomerated by heat, the carbon nanotubes are not caused by excessive catalyst particles and the holes of the porous cover layer can have high collimation, so that the J cover catalyst layer 'It can be used to carry out thermal cracking chemical vapor deposition to maintain f?(amT0US carbon)*^b^^5 Substantially the same length of said carbon nanotubes. Referring to Figure 2, Figure 2 is a schematic diagram showing another test piece 2 of a ruthenium-like carbon nanotube according to the present invention. In the practice of ϊ ΐ ΐ ΐ 2 2 2 2 2 2 2 2 2 2 2 2 2 2 i = = minus 2 includes substrate 20, catalyst layers 22 and 24. The catalyst layer 22 is formed on the substrate 2 and is formed on the catalyst layer 22 . Porous on the ^ Qiao cover layer Ϊ 10 2 2 3 L holes 240 are all aligned with the stone & day growth; to?

In the meantime, the number of the carbon nanotube I holes 240 is considered to be the end of the use of the porous 'not limited to the specific examples listed in the present specification. The material of the material, and the method of making the carbon nanotubes in the specific embodiment of the cracking:: vacuuming to the rain temperature f of κγ2τ〇γγ, and the temperature of the high temperature furnace; Γ Γ growth carbon tube household ^ ^ ^ and ^ high, rise 3; outside long C carbon source ^ ^; and used for other components 'can also be with the test piece itself ~: Cheng Nai ΐ ΐ ΐ 201014787 in practice ' The high temperature furnace addition rate of the above pyrolysis chemical vapor deposition method may be 3 to 30 ° C / min, preferably 5 to 1 (rc / min, and the temperature of the carbon nanotubes may be 65 ~ 85) Rc, preferably 〜8〇〇: C. In addition, carbon source gas can be used in methane, ethane, propylene, B, or acetylene or a mixture of gases and gases. The flow rate is 30~600 seem, preferably 8〇~18〇',,, and one; the various parameters of the pyrolysis chemical vapor deposition method provide the ancient ϋ = actually can be used according to the needs The carbon nanotube structure and the condition of the equipment that can be used for the chemical gasification method are adjusted, and it is rare to pay for it. Table-, Table-- indicates the type of carbon nanotubes produced by the present invention. (9) Turning and fine test piece growth (4) Nano carbon tube, cracking, vapor deposition, growth of nanocarbon, carbon source gas And use the iron alloy to drive the 』 rush layer material porous cover material

11 201014787

Too = for example - and the second example of the comparative example is the oxide layer of the 5 layers of the previous layer; the buffer layer is inaccurate i'i, for example, the grown carbon nanotubes are curved, for example, the long average length It is also about to exhibit collimation, and its layer is relatively thick on the surface of the non-micro-n carbon nanotubes - only the first example, the second embodiment and the third embodiment are respectively made of buckled aluminum and magnesium oxide as its porous cover. Floor. As shown in the table, the portion of the nanotube that grows in the second emulsion exhibits collimation, and the average length is about 5 μm, and the surface has no amorphous carbon film.实^ 12 201014787 ^The carbon nanotubes that are grown exhibit high collimation, but their diameter is slightly thicker. In the third embodiment, the growth s is collimated, and the average length can reach the height of the carbon of the official; = the growth of the third embodiment of the first embodiment is shown in the growth of H^ layer ❹ = step by step to grow Rate, and carbonization of amorphous carbon to increase the carbon nanotubes; ΐ 制 制 ,, _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The change of the 6th month and the equality of the arrangement in this office; Application:: According to the captain: Description = Width =: 2 The scope of the patent scope of the application should be rooted and the relationship may be MODIFICATION 13 201014787 BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing a method of fabricating a carbon nanotube according to an embodiment of the present invention. Fig. 2 is a schematic view showing a test piece for growing a carbon nanotube according to another embodiment of the present invention.

Figure 3 is a SEM image of the carbon nanotube film grown in Example 3 of Table 1. , J ❹ [Description of main component symbols] S10~S16: Process step 2 = Test piece 22 = Catalyst 240 : Hole 2 〇 . Substrate 24 : Porous cover layer

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Claims (1)

201014787 X. Patent application scope: 1. A method for manufacturing a carbon nanotube, comprising the steps of: providing a substrate; forming a catalyst layer on the substrate; forming a mask layer on the catalyst layer A test piece is completed; and the carbon nanotube is formed on the test piece. 2. The method of claim 1, wherein the catalyst layer is composed of a metal or an oxide thereof. 3. The method of claim 2, wherein the metal comprises at least 4 selected from the group consisting of iron, cobalt, nickel, rhodium, palladium, platinum, and alloys thereof. 6 The method of claim 1, wherein the porous covering layer is derived from f oxyscale, oxidizing, nitrogen cutting, nitrogen nurturing, nitrogen oxidizing, oxygen, oxidizing, oxidizing, oxidizing, and strontium aluminum. The oxygen group is composed of at least one material. The method of claim 1, wherein the porous cover layer is disposed on the catalyst layer by coating or chemical immersion. The method of claim 1, wherein the towel carbon nanotubes are formed on the test piece by splitting and vapor deposition. *, a test piece for growing a carbon nanotube, comprising: - a substrate; a catalyst layer formed on the substrate; and a porous cover layer formed on the catalyst layer; The carbon nanotube system is grown on the porous cover layer. 15 201014787 8. A test piece as claimed in the patent specification Fansei Metal or Oxide thereof, wherein the catalyst layer is the test piece described in the item, wherein the metal comprises a material selected from the group consisting of. At least the circumference of the group consisting of fun, flip and alloys thereof, wherein the porous cover layer is a heat-resistant layer 12, a hot crack, a carbon nanotube component, comprising: a substrate a catalyst layer formed on the substrate; a multi-layered cover layer formed on the catalyst layer; and a nanotube layer formed on the porous cover layer. 14. The carbon nanotube component described in item 13 of the patent scope is composed of a metal or an oxide thereof. ^ 'Media layer 15, ^ towel, please use the carbon nanotube component described in item M, 1 towel, iron, cobalt, nickel, ruthenium, palladium, turn and its alloy group t 16 , such as patent application The carbon nanotube component described in the thirteenth aspect, wherein the porosity 16 201014787 ίί layer ί 2 5 from = zinc: calcium oxide, nitrogen cut, nitrided, nitrogen oxide group at least one town, oxidation record And the nano carbon tube component according to Item 13, wherein the porous coating layer is disposed in the medium layer by a mineral film or chemical immersion method. , ΐ3ίΓ=13 of the carbon nanotube component, wherein the nanocarbon I layer is formed by thermal cracking chemical vapor deposition on the porous cover wide m 17