TW200942334A - Fluid transmission device having a plurality of double chamber vibrating structures - Google Patents

Fluid transmission device having a plurality of double chamber vibrating structures Download PDF

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Publication number
TW200942334A
TW200942334A TW97112269A TW97112269A TW200942334A TW 200942334 A TW200942334 A TW 200942334A TW 97112269 A TW97112269 A TW 97112269A TW 97112269 A TW97112269 A TW 97112269A TW 200942334 A TW200942334 A TW 200942334A
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Taiwan
Prior art keywords
valve
cavity
flow
fluid
cover
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TW97112269A
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Chinese (zh)
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TWI353891B (en
Inventor
Shin-Chang Chen
Ying-Lun Chang
Rong-Ho Yu
Shih-Che Chiu
Tsung-Pat Chou
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Microjet Technology Co Ltd
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Publication of TW200942334A publication Critical patent/TW200942334A/en
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Publication of TWI353891B publication Critical patent/TWI353891B/en

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Abstract

A fluid transmission device having a plurality of double chamber vibrating structures for transmitting a fluid is disclosed. The fluid transmission device includes a converging device and a plurality of double chamber vibrating structures mutually juxtaposed on the converging device. The converging device has two sides corresponding to each other, a plurality of first flow trenchs and a plurality of second flow trenchs passed through the two sides respectively, an input passage disposed between the two sides and connected with the plurality of first flow trenchs, and an output passage disposed between the two sides and connected with the plurality of second flow trenchs. Each one of the double chamber vibrating structures has a first chamber and a second chamber. The first chamber and the second chamber are symmetrical disposed on the two sides of the converging device. The first chamber and the second chamber comprise a valve cover, a valve membrane and a vibrating device respectively.

Description

200942334 九、發明說明: 【發明所屬之技術領域】 本案係關於一種流體輸送裝置,尤指一種具有複數個 雙腔體致動結構之流體輸送裝置。 【先前技術】 目前於各領域中無論是醫藥、電腦科技、列印、能源 Ο 等工業,產品均朝精緻化及微小化方向發展,其中微泵 浦、喷霧器、喷墨頭、工業列印裝置等產品所包含之流體 輸送結構為其關鍵技術,是以,如何藉創新結構突破其技 術瓶頸,為發展之重要内容。 請參閱第一圖,其係為習知微泵浦結構之結構示意 圖,習知微泵浦結構10係由閥體座11、閥體蓋體12、閥 體薄膜13、微致動器14及蓋體15所組成,其中,閥體薄 膜13係包含入口閥門結構131及出口閥門結構132,閥體 座11包含入口通道111及出口通道112、閥體蓋體12與 微致動器14間定義形成一壓力腔室123,閥體薄膜13設 置在閥體座11與閥體蓋體12之間。 當一電壓作用在微致動器14的上下兩極時,會產生 一電場,使得微致動器14在此電場之作用下產生彎曲, 當微致動器14朝箭號X所指之方向向上彎曲變形,將使 . 得壓力腔室123之體積增加,因而產生一吸力,使閥體薄 . 膜13之入口閥門結構131開啟,使液體可自閥體座11上 200942334 之入口通道111被吸取進來,並流經閥體薄膜13之入口闕 門結構131及閥體蓋體12上之入口閥月通道121而流入 * 壓力腔室123内,反之當微致動器14因電場方向改變而 朝箭號X之反方向向下彎曲變形時,則會歷縮壓力腔室123 之體積,使得壓力腔室123對内部之流體產生一推力’並 使間體薄膜13之入口閥門結構131、出口閥門結構132承 受一向下推力,而出口閥門結構132將開啟,旅使液體由 壓力腔室123經由閥體蓋體12上之出口閥門通道122、閥 魯 體薄膜13之出口閥門結構132,而從閥體座11之出口通 道112流出微泵浦結構1〇外,因而完成流體之傳輸過程。 雖然習知微泵浦結構10能夠達到輸送流體的功能’ 但是其係使用單一致動器配合單一壓力腔室、單一流通管 道、單一進出口以及單一對的閥門結構設計,若要使用微 栗浦結構10來提升流量,必須利用銜接機構將多個微幫 浦結構10進行連接並堆疊設置,然而此種連接方式除了 © 需額外耗費銜接機構之成本外,多個微泵浦結構10所組 合起來的體積將過大’使得最終產品之體積增加而無法符 合微小化之趨勢。200942334 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a fluid delivery device, and more particularly to a fluid delivery device having a plurality of dual cavity actuation structures. [Prior Art] At present, in various fields, such as medicine, computer technology, printing, energy and other industries, products are developing in the direction of refinement and miniaturization, among which micro pump, sprayer, inkjet head, industrial column The fluid transport structure contained in products such as printing devices is its key technology. It is how to break through its technical bottleneck with innovative structure and is an important part of development. Please refer to the first figure, which is a schematic structural view of a conventional micro-pump structure. The conventional micro-pump structure 10 is composed of a valve body seat 11, a valve body cover 12, a valve body film 13, a microactuator 14 and The cover body 15 is composed of a valve body film 13 including an inlet valve structure 131 and an outlet valve structure 132. The valve body seat 11 includes an inlet passage 111 and an outlet passage 112, and defines between the valve body cover 12 and the microactuator 14. A pressure chamber 123 is formed, and the valve body film 13 is disposed between the valve body seat 11 and the valve body cover 12. When a voltage is applied to the upper and lower poles of the microactuator 14, an electric field is generated, causing the microactuator 14 to bend under the action of the electric field, as the microactuator 14 is directed upward in the direction indicated by the arrow X. The bending deformation will increase the volume of the pressure chamber 123, thereby generating a suction force to make the valve body thin. The inlet valve structure 131 of the membrane 13 is opened, so that the liquid can be sucked from the inlet passage 111 of the 200942334 on the valve body seat 11. It flows in and flows through the inlet door structure 131 of the valve body film 13 and the inlet valve channel 121 on the valve body cover 12 into the pressure chamber 123, and vice versa when the microactuator 14 changes direction due to the electric field direction. When the arrow X is bent downward in the opposite direction, the volume of the pressure chamber 123 is reduced, so that the pressure chamber 123 generates a thrust to the internal fluid and the inlet valve structure 131 and the outlet valve of the interlayer film 13 are opened. The structure 132 is subjected to a downward thrust, and the outlet valve structure 132 is opened, bridging the liquid from the pressure chamber 123 via the outlet valve passage 122 on the valve body cover 12, the outlet valve structure 132 of the valve body film 13, and the slave valve Body outlet 11 112 outflow mini channels 1〇 outer pumping structure, thereby completing the transmission process fluid. Although the conventional micro-pump structure 10 can achieve the function of transporting fluids', but it uses a single actuator with a single pressure chamber, a single flow conduit, a single inlet and outlet, and a single pair of valve structure design, to use the micro Lipu The structure 10 is used to increase the flow rate, and the plurality of micro-pump structures 10 must be connected and stacked by using the connection mechanism. However, in addition to the cost of the connection mechanism, the multiple micro-pump structures 10 are combined. The volume will be too large to make the volume of the final product increase and not meet the trend of miniaturization.

因此,如何發展一種可改善上述習知技術缺失並達到 增加流量且縮小體積之具有複數個雙腔體致動結構之流 體輸送I置,實為目前迫切需要解決H *. 【發明内容】 本案之主要目的在於提供一種具有複數個雙腔體致 200942334 動結構之流體輸送裝置,俾解決以習知微泵浦結構來提升 、 流量時,必須利用銜接機構將多個微幫浦結構進行連接並 ·· 堆疊設置,將額外耗費銜接機構之成本,且多個微泵浦結 構所組合起來的體積過大,無法符合產品微小化之趨勢等 缺點。 為達上述目的,本案之一較廣義實施樣態為提供一種 具有複數個雙腔體致動結構之流體輸送裝置,用以傳送一 流體,其係包含:匯流裝置,其係具有:兩側面,其係相 ® 互對應;複數個第一流道及複數個第二流道,其係貫穿該 兩侧面;入口通道,其係設置於兩侧面之間,並與複數個 第一流道相連通;出口通道,其係設置於兩侧面之間,並 與複數個第二流道相連通;複數個雙腔體致動結構,彼此 之間係並排設置於匯流裝置上;其中,每一雙腔體致動結 構係具有第一腔體及第二腔體,其係對稱設置於匯流裝置 之兩侧面上,第一腔體及第二腔體係各自包括:閥體蓋體, Q 其係設置於匯流裝置上;閥體薄膜,其係設置於匯流裝置 與閥體蓋體之間;以及致動裝置,其週邊係設置於該閥體 蓋體上。 【實施方式】 體現本案特徵與優點的一些典型實施例將在後段的 說明中詳細敘述。應理解的是本案能夠在不同的態樣上具 有各種的變化,其皆不脫離本案的範圍,且其中的說明及 200942334 圖示在本質上係當作說明之用’而非用以限制本案。 本案主要係藉由匯流裝置及利用對稱堆疊的方式,將 複數個雙腔體致動結構與匯流裝置組成本案之流體輸送 裝置,能夠提昇流量及揚程,且流體輪送裝置的體積不會 過大,非常適合用於流量及揚程需求相對較高之應用場 合。 5月參閱第一圖’其係本案較佳實施例之具有複數個雙 ❹腔體致動結構之流體輸送裝置之分解結構示意圖,如圖所 示,本實施例之流體輸送裝置2係由匯流裝置2]1以及複 數個雙腔體致動結構所構成’於本案實施例中,將以流體 輸送裝置2包含2個雙腔體致動結構的實施態樣提出說 明’即第一雙腔體致動結構22及第二雙腔體致動結構23, 且第一雙腔體致動結構22與第二雙腔體致動結構23的結 構係實質上相同’但是本案之流體輪送裝置2可包含之雙 腔體致動結構並揭限於2個,可依實際需求增加設置。 ❹ 本案之流體輸送裝置2所包含之每一雙腔體致動結構 於匯流裝置21的上下侧面各包含—腔室,且每一雙腔體 致動結構彼此之間係並排設置於匯流裝置21上,請再參 閱第二圖並配合第三圖A,其中第三圖Α係為第二圖之組 裝完成後之結構示意圖,本案之第一雙腔體致動結構22 於匯流裝置21的第一侧面211上係具有第一腔體22&,而 第二侧面212上具有第二腔體22b ’第一腔體22a具有閥 體蓋體221a、閥體薄膜222a、致動裝置223a及蓋體224a, • 而第二腔體22b同樣具有閥體蓋體221b、閥體薄膜222b、 200942334 致動裝置223b及蓋體224b等結構,且第一腔體22a、第 、 二腔體22b係以匯流裝置21為中心鏡像對稱設置。 ·- 另外,本案之第二雙腔體致動結構23於匯流裝置21 的第一侧面211上同樣具有第一腔體23a,而第二侧面212 上同樣具有第二腔體23b,第一腔體23a具有閥體蓋體 231a、閥體薄膜232a、致動裝置233a及蓋體234a,而第 二腔體23b同樣具有閥體蓋體231b、閥體薄膜232b、致 動裝置233b及蓋體234b,且第一腔體23a、第二腔體23b ® 係以匯流裝置21為中心鏡像對稱設置。 至於,本實施例之第一雙腔體致動結構22係與第二 雙腔體致動結構23並排設置於匯流裝置21上,即第一雙 腔體致動結構22之第一腔體22a與第二雙腔體致動結構 23之第一腔體23a並排設置於匯流裝置21之第一侧面211 上,而第一雙腔體致動結構22之第二腔體22b與第二雙 腔體致動結構23之第二腔體23b並排設置於匯流裝置21 p 之第二侧面212上。 請參閱第二圖、第三圖A並配合第三圖B、第三圖C 及第三圖D,其中第三圖B係為本案第三圖A之流體輸送 裝置之匯流裝置的A-A或是a-a剖面圖,第三圖C係為本 案第三圖A之流體輸送裝置之匯流裝置的C-C剖面圖,第 三圖D係為本案第三圖A之流體輸送裝置之匯流裝置的 B-B剖面圖,如第二圖所示,匯流裝置21大致成一長條狀 矩形結構,具有相互對應之第一侧面211及第二侧面212, ; 且匯流裝置21設置有複數個第一流道、複數個第二流道、 200942334Therefore, how to develop a fluid transport I having a plurality of double-cavity actuating structures which can improve the above-mentioned prior art and reduce the volume and reduce the volume is urgently needed to solve H*. [Summary of the Invention] The main purpose is to provide a fluid delivery device having a plurality of dual-cavity 200942334 moving structures. When the conventional micro-pump structure is used to lift and flow, it is necessary to connect a plurality of micro-pull structures by using a coupling mechanism. · Stacking, which will cost extra cost of the connection mechanism, and the combined volume of multiple micro-pumped structures is too large to meet the shortcomings of product miniaturization. In order to achieve the above object, a broader aspect of the present invention provides a fluid delivery device having a plurality of dual-cavity actuation structures for delivering a fluid comprising: a confluence device having two sides, The phases are mutually corresponding; a plurality of first flow channels and a plurality of second flow channels are penetrated through the two sides; an inlet passage is disposed between the two sides and communicates with the plurality of first flow passages; a passageway disposed between the two sides and communicating with the plurality of second flow passages; the plurality of double-cavity actuating structures disposed side by side on the confluence device; wherein each of the two cavities The movable structure has a first cavity and a second cavity, which are symmetrically disposed on both sides of the confluence device, and the first cavity and the second cavity system each include: a valve body cover, Q is disposed on the confluence device And a valve body film disposed between the busbar device and the valve body cover body; and an actuating device, the periphery of which is disposed on the valve body cover body. [Embodiment] Some exemplary embodiments embodying the features and advantages of the present invention will be described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various embodiments and is not intended to limit the scope of the invention. In this case, a plurality of double-cavity actuating structures and a confluence device are formed into a fluid conveying device of the present invention by means of a confluence device and a symmetric stacking method, which can increase the flow rate and the lift, and the volume of the fluid transfer device is not excessively large. Ideal for applications where flow and head requirements are relatively high. Referring to FIG. 1A, FIG. 1 is a schematic exploded view of a fluid transport device having a plurality of double jaw cavity actuating structures according to a preferred embodiment of the present invention. As shown, the fluid transport device 2 of the present embodiment is connected by a flow. The device 2]1 and the plurality of dual-cavity actuation structures are formed in the embodiment of the present invention, and the embodiment in which the fluid delivery device 2 includes two dual-cavity actuation structures will be described as the first dual cavity. Actuating structure 22 and second dual cavity actuating structure 23, and first dual cavity actuating structure 22 and second double cavity actuating structure 23 are substantially identical in structure 'but fluid transfer device 2 of the present case The double-cavity actuation structure that can be included is limited to two, and can be increased according to actual needs. Each of the dual-cavity actuation structures included in the fluid delivery device 2 of the present invention includes a chamber on each of the upper and lower sides of the confluence device 21, and each of the dual-cavity actuation structures is disposed side by side to the confluence device 21 In addition, please refer to the second figure and cooperate with the third figure A, wherein the third figure is the structural diagram after the assembly of the second figure is completed, and the first double cavity actuating structure 22 of the present case is in the first embodiment of the confluence device 21. One side surface 211 has a first cavity 22& and the second side surface 212 has a second cavity 22b. The first cavity 22a has a valve body cover 221a, a valve body film 222a, an actuating device 223a and a cover. 224a, • The second cavity 22b also has a valve body cover 221b, a valve body film 222b, a 200942334 actuator 223b, a cover 224b, and the like, and the first cavity 22a, the second cavity 22b is confluent. The device 21 is symmetrically arranged in a central mirror. In addition, the second dual cavity actuating structure 23 of the present invention also has a first cavity 23a on the first side 211 of the confluence device 21, and the second side 212 also has a second cavity 23b, the first cavity The body 23a has a valve body cover 231a, a valve body film 232a, an actuating device 233a and a lid 234a, and the second cavity 23b also has a valve body cover 231b, a valve body film 232b, an actuating device 233b and a cover 234b. And the first cavity 23a and the second cavity 23b ® are mirror-symmetrically disposed around the current collecting device 21. As a result, the first dual cavity actuating structure 22 of the present embodiment is disposed side by side with the second dual cavity actuating structure 23 on the confluence device 21, that is, the first cavity 22a of the first dual cavity actuating structure 22. The first cavity 23a of the second dual cavity actuation structure 23 is disposed side by side on the first side 211 of the confluence device 21, and the second cavity 22b and the second dual cavity of the first dual cavity actuation structure 22 are disposed side by side. The second cavity 23b of the body actuating structure 23 is disposed side by side on the second side 212 of the confluence device 21p. Please refer to the second figure, the third figure A and the third figure B, the third figure C and the third figure D, wherein the third figure B is the AA of the confluence device of the fluid conveying device of the third drawing A of the present invention or Aa sectional view, the third drawing C is a CC sectional view of the confluence device of the fluid conveying device of the third drawing A of the present invention, and the third drawing D is a BB sectional view of the confluent device of the fluid conveying device of the third drawing A of the present invention, As shown in the second figure, the confluence device 21 is substantially in the form of a long rectangular structure having a first side surface 211 and a second side surface 212 corresponding to each other; and the confluence device 21 is provided with a plurality of first flow channels and a plurality of second flows. Road, 200942334

多圖B至第三圖D 入口通道215以及出口通道216,如矛賁穿第一侧面211 ·—所示,複數個第-流道可為實質上棄^^,而複數個第二 ·· 及第二側面212之複數個入口分流道“及第二側面212 流道則可為實質上垂直貫穿第一側面2口分流道213位於 之複數個出口匯流道214,換言之,八赛為同軸,而出口 第-側面211及第二侧面212上的開口出口匯流道214彼 匯流道2U亦然,且入口分流道213及 及第二侧面 此獨立(如第三圖B所示),因此第一挪 彼此相通。 Ό 212可透過入口分流道213及出口匯淥ρ . c;通道215及出口 請再參閱第三圖C及第三圖D,入 .^ β〆側面212間的官 通道216則為配置在第一侧面211及笫〆 、 線,入口通道215得、用以使外部之流艘輸送至/瓜體輸送裝 置2内,而出口通道216則是將流體由旅體輸送裝置2之 内部傳送至外部,且入口通道215與複數個入口分流道213 相連通(如第三圖D所示),而出口通道216則與複數個 ❹ 出口匯流道214連通(如第三圖c所系),換言之’當流 體輪送裝置2組裝完成時,複數個入口分流道213 <透過 入口通道215與外界/連通,而複數個出口匯流道214則可 透過出口通道216與外界連通。 請參閱第三圖Β及C,匯流裝置21之複數個出口匯 流道214接近第一侧面211的一端係向外擴充延伸,俾與 設置於第一侧面211上的閥體薄膜222a及232a共同定義 ·, 出一第二暫存室’即為圖中所示之出口暫存腔2141a,當 • 然,出口匯流道214接近第二側面212處同樣也與閥體薄 11 200942334 膜222b及232b設置出口暫存腔2141b,是以由第一腔體 ·· 22a、23a及第二腔體22b、23b匯入之流體可於出口暫存 ·. 腔2141a、2141b稍作緩衝,再平順地匯集於出口匯流道 214並沿出口通道216而輸出至流體輸送裝置2外。 而匯流裝置21之第一侧面211及第二侧面212上更 分別設有複數個凹槽結構’其中凹槽217a、218a、217b、 218b係以入口分流道213為中心環繞設置於出口分流道 213外圍’而凹槽219a、219b則以出口匯流道214為中心 ® 環繞設置於出口匯流道214外圍,以利用凹槽217a-219a、 217b-219b對應容收複數個密封環26(如第六圖A所示)。 於本實施例中,匯流裝置21可採用熱塑性塑膠材料 製成;至於密封環26則可為耐化性佳的軟性材質所構成 之圓環結構’例如:对曱醇或耐醋酸之橡膠環,但皆不以 此為限。 請再參閱第二圖’第一、第二雙腔體致動結構22、23 Q 之第一腔體22a、23a的閥體薄膜222a及232a、閥體蓋體 221a及231a、致動裝置223a、233a以及蓋體224a、234a 係堆疊設置於匯流裝置21之第一侧面211上,其中閥體 薄膜222a、232a位於匯流裝置21之第一侧面211及閥體 蓋體221a、231a之間,並對應於匯流裝置21及閥體蓋體 221a、231a設置’而閥體蓋體221a、231a上相對應之位 置則設置有致動裝置223a、233a,其主要包括振動薄膜 . 2231a、2331a、以及致動器2232a、2332a,且致動裝置 ' 223a、233a可受電壓驅動而振動,以驅動流體輸送裝置2 12 200942334 之作動’至於蓋體224a、234a則設置於致動裝置223a、 • 233a上相對於閥體蓋體221a、231a設置之—側’用以密 封整個第—腔體22a、23a,而當閥體薄膜222a、232a、闕 體蓋體22la、231a、致動裝置223a、233a及蓋體224a、 234a依序堆疊並利用鎖固元件(未圖示)等設置於匯流裝置 21之第一側面211後,便可構成第一雙腔體致動結構22 之第一腔體22a,第二雙腔體致動結構23之第一腔體23a。 ^ 而由於第一雙腔體致動結構22之第二腔體22b與第一腔 體22a係以匯流裝置21為中心地鏡像對稱設置在匯流裝置 21之第二側面212上,以及第二雙腔體致動結構23之第 二腔體23b與第一腔體23a係以匯流裴置21為中心地鏡像 對稱設置在匯流裝置21之第二侧面212上(如第二圖及第 六圖A所示),因此以下主要以第一雙腔體致動結構22之 第一腔體22a為例,說明本案流體輸送裝置2之細部結構。 請參閱第四圖A、B、C並配合第二圖及第三圖A ’其 〇 中第四圖A係為本案第三圖A之流體輸送裝置之第一雙腔 體致動結構之第一腔體之閥體蓋體的A-A剖面圖,第四圖 B係為本案第三圖A所示之第一、第二雙腔體致動結構之 第一腔體之閥體蓋體的C-C剖面圖,第四圖C係為本案第 三圖A所示之第一、第二雙腔體致動結構之第一腔體之閥 體蓋體的B-B刳面圖,如第二圖所示,第一雙腔體致動結 構22之第一腔體22a的閥體蓋體221a係設置於匯流裝置 • 21的第一側面211上,其具有一上表面2211a及一下表面 2212a ’其係以下表面2212a面對匯流裝置21之第一侧面 13 200942334 211 ’並將閥體薄膜221a夾設於下表面2212a與匯流裝置 ·· 21的第一側面211之間,而閥體蓋體221a包括貫穿上表 ·· 面2211a及下表面2212a之第一闕Π通道及第一閥Π通 道’於本實施例中,第一閥門通道可為入口閥門通道 2213a,第二閥門通道則可為出口閥門通道2214a (如第二 圖及第四圖B所示),其中入口閥門通道2213a係對應於 匯流裝置21之入口分流道213,出口閥門通道2214a則對 應於出口暫存區2141a(如第二圖及第六圖A所示)。此外, ® 閥體蓋體221a之入口閥門通道2213a接近下表面2212a 處係向外擴充延伸,俾與閥體薄膜222a共同定義出一第〜 暫存室’而本實施例之第一暫存室係由閥體蓋體221a之下 表面2212a於與入口閥門通道2213a相對應之位置產生部 份凹陷而形成之入口暫存腔2215a,且其係連通於入q問 門通道2213a(如第六圖A及第四圖C所示)。 請再參閱第二圖及第六圖A,闊體蓋體221a之上表$ ❹ 2211a有部份凹陷,俾與對應設置之致動裝置223a共同定 義出一壓力腔室2216a,且壓力腔室2216a係經由入t?問 門通道2213a與入口暫存腔2215a連通(如第四圖(:所 示)’同時壓力腔室2216a亦與出口閥門通道2214a相連通 (如第四圖B所示)。此外,閥體蓋體221a上具有複數铜 凹槽結構’其中閥體蓋體221a之下表面2212a具有以入〇 閥門通道2213a為中心環繞設置之凹槽22121a,以及以出 - 口閥門通道2214a為中心環繞設置之凹槽22122a、 22123a ’而上表面2211a則設有環繞壓力室2216a之四样 200942334 22111a’俾利用凹槽22121a-22123a、22111a容收密封環 27(如第六圖A所示)。至於閥體蓋體221a之材質可為熱塑 ’· 性塑膠材料’且其可選用之材料種類與匯流裝置21相同, 而密封環27之材質則可與密封環26相同,是以不再贅述。 請參閱第五圖並配合第二圖及第六圖A,其中第五圖 係為第二圖所示之第一雙腔體致動結構之第一腔體之閥 體薄膜之結構示意圖,如圖所示,閥體薄膜222a主要係以 傳統加工、或黃光蝕刻、或雷射加工、或電錄加工、或放 ϋ 電加工等方式製出’且為一厚度實質上相同之薄片結構, 具有複數個閥門結構,其係為鏤空的閥開關,於本實施例 中,閥體薄膜222a設有第一、第二鏤空閥門結構,其分別 為入口閥門結構2221a及出口閥門結構2222a,其中入口 閥門結構2221a對應於匯流裝置21之入口分流道213、閥 體蓋體221a之入口閥門通道2213a及入口暫存腔2215a, 而出口閥門結構2222a對應於匯流裝置21之出口匯流道 ❹ 214、出口暫存腔2141a及閥體蓋體2‘21a之出口閥門通道 2214a(如第六圖A所示)。 請再參閱第五圖,入口閥門結構2221a具有入口閥片 22211a及複數個環繞入口閥片22211a週邊設置的鏤空孔 洞22212a,此外,在孔洞22212a之間更具有與入口閥片 22211a相連接之延伸部22213a。而出口閥門結構2222a 之出口閥片22221a、孔洞22222a及延伸部22223a的配置 ' 皆與入口閥門結構2221a相同,於此不再贅述。於本實施 ; 例中’閥體薄膜222a實質上為厚度均一之可撓薄膜,且其 15 200942334 材質可選自任何耐化性佳的有機高分子材料或金屬材 ' 料,例如:聚亞醯胺(Polyimide,PI)、紹、鎳、不鏞鋼、銅、 ·- 铭合金、鎳合金或銅合金等材質,然選用之材質並無所設 限。 由於閥體薄膜222a係為可撓薄片,因此當閥體薄膜 222a設置於匯流裝置21之第一侧面211及閥體蓋體221a 之間時,若其承受壓力腔室2216a體積增加而產生之吸力 作用,入口閥門結構2221a及出口閥門結構2222a理應皆 ® 順勢向壓力腔室2216a之方向產生位移,然而由於閥體蓋 體221a其下表面2212a鄰近入口閥門通道2213a及出口閥 門通道2214a處之結構有所差異(如第四圖A及第六圖A 所示),因此當閥體薄膜222a受到壓力腔室2216a之負壓 吸引時,實質上僅入口閥門結構2221a可朝閥體蓋體221a 之方向產生位移(如第六圖B及第七圖B所示),出口閥門 結構2222a則貼附於閥體蓋體221a的下表面2212a而無法 q 開啟(如第六圖B及第八圖B所示),此時流體僅能從閥體 薄膜222a靠近匯流裝置21之一侧經由入口閥門結構 2221a之孔洞22212a流往靠近閥體蓋體22的一侧(如第六 圖B及第七圖B箭頭所示),並流入閥體蓋體221a之入口 暫存腔2215a及入口閥門通道2213a而傳送至壓力腔室 2216a内,且利用出口閥門結構2222a之關閉防止流體逆 流。 ' 同樣地,由於匯流裝置21之第一侧面211鄰近入口 • 分流道213及出口匯流道214處之結構不同(如第二圖及第 16 200942334 三圖B所示),因此當閥體薄膜222a受到壓力腔室2216a '* 之正壓推擠而承受自壓力腔室2216a傳遞而來的向下應力 : 時,實質上僅出口閥門結構2222a可朝匯流裝置21之方向 產生位移,入口閥門結構2221a則向下貼附於匯流裴置21 之第一側面211上而密封住匯流裝置21的入口分流道 213,即入口閥門結構2221a並無法開啟(如第六圖C及第 七圖C所示),是以流體僅能由壓力腔室2216a經出口閥門 結構2222a之孔洞22222a流入匯流裝置21之出口暫存腔 ® 2141a(如第六圖C及第八圖C所示)’如此一來,入口閥門 結構2221a便可因應壓力腔室2216a產生之負、正壓力差 而迅速的開啟或關閉,而出口閥門結構2222a則可對應於 入口閥門結構2221a關閉或開啟,以控制流體之進出並避 免流體逆流。 請再參閱第二圖’第一雙腔體致動結構22之第—腔 體22a之致動裝置223a包括振動薄膜2231a以及致動器 Q 2232a,致動裝置223a主要係利用振動薄膜2231a之週邊 固設於閥體蓋體221a上,俾與閥體蓋體221a共同定義出 壓力腔室2216a(如第六圖A所示)。致動裝置223a之振動 薄膜223la之材質可為單層金屬結構,例如:不鱗鋼金屬 或銅金屬’但不以此為限;當然’於一些實施例中,振動 薄膜2231a可於金屬材料上貼附一層耐生化高分子薄板材 料,以構成一雙層結構。至於致動器2232a則可貼附於振 • 動薄膜2231a上,致動器2232a係為一壓電板,可採用高 壓電係數之鍅鈦酸鉛(pZT)系列的壓電粉末製成。而蓋體 17 200942334 224a則對應設置於致動衰置223a上,俾利用蓋體224a及 ' 匯流裝置21之第一側面211共同將閥體薄膜222a、閥體 : 蓋體221a和致動裝置224a等結構夾設於其間,以組成本 案流體輸送裝置2之第一雙腔體致動結構22之第一腔體 22a(如第三圖A所示)。 請參閱第六圖A並配合第二圖及第三圖A,其中第六 圖A係為第二圖A之流體輪送裝置之A-A剖面於未作動 狀態之示意圖’至於,如第三圖A所示之流體輸送裝置之 φ a-a剖面的結構及作動方式係與a-A相同,因此以下將僅 以A-A剖面之結構提出說明。如圖所示,當第一雙腔體致 動結構22之第一腔體22a組裴設置於匯流裝置21之第一 側面211後,匯流裝置21之入口分流道213係對應於閥 體薄膜222a之入口閥門結構2221a、閥體蓋體221a之入 口暫存腔2215a和入口閥門通道2213a,匯流裝置21之出 口匯流道214則對應於出口暫存腔2141a、閥體薄膜222a ❹ 上之出口閥門結構2222a以及閥體蓋體221a上之出口閥門 通道2214a。 此外,匯流裝置21之第一侧面211上環繞入口分流 道213之凹槽217a(如第三圖B所示)内的密封環26厚度 係大於凹槽217a的深度,是以密封環26將部分凸出於凹 槽217a,並構成一微凸結構,使得閥體薄膜222a之入口 閥門結構2221a的入口閥片22211a形成•向上隆起,如此 微凸結構將抵觸閥體薄膜222a而對入口閥門結構2221a 頂推以產生一預力(Preforce)作用,有助於流體釋出時產生 18 200942334 更大之預蓋緊效果以防止逆流,並使入口閥片22211a與匯 流裝置21之第一側面211之間產生一間隙,以於流體進 : 入時利於入口閥門結構2221a順勢開啟。同樣地,設置於 閥體蓋體22la之下表面2212a並環繞出口閥門通道221如 外圍之凹槽22122a與密封環27亦形成—微凸結構,使閥 體薄膜222a之出口閥門結構2222a向下凸出而相對於闕體 蓋體221a形成一向下隆起,並使出口閥片22221&與閥體 φ 蓋體222a之下表面2212a間產生一間隙,而出口閥門結構 2222a入口闕門結構222 la之微凸結構僅方向反向設置, 但其功能相仿,因此不再贅述。上述之微凸結構除了使用 凹槽217a、22122a及密封環26、27搭配形成外,於一些 實施例中亦可採用半導體製程,例如:黃光蝕刻、鍍膜或 電鑄技術,直接在匯流裝置21及閥體篕體22U上形成該 些微凸結構,或者直接在匯流装置21及間體罢體.222a上 採與基材一體射出成型形成,其中該基材係可採用熱塑性 © 塑膠材料。至於閥體薄膜222a之其餘部分則服貼於閥體蓋 體222a及匯流裝置21之間’並透過設置於凹槽21 ga、219a 及22121a、22123a、22111a内之密封環26、27使各結構 之間緊密貼合,俾防止流體外溢。 請再參閱第六圖A’第一雙腔體致動結構22之第二腔 體22b之閥體薄膜222b、閥體蓋體221b、致動裝置223b 以及蓋體224b係設置於匯流裝置21之第二侧面212上, - 並以匯流裝置21為中心而與第一腔體22a之該些結構鏡像 . 對稱’由於第二腔體22b之各結構、功能皆與第一腔體22a 19 200942334 200942334 ❹ 相同’至於第二雙腔體致動結構23之第一腔體23a及第二 腔體23b的各結構、功能皆與第一雙腔禮致動結構22 : 及第二腔體23a相同,因此’為了簡化說明, 流趙雙腔體致動結構22之第—腔體223為例詳迷 際運作、]送過程,然而應當理解,本案流體輸送裝置2實 一腔體時,第一雙腔體致動結構22之第二腔體2此與第 與第〜,以及第二雙腔體致動結構23之第二腔體/2讣 體的輪^仏係以完全相同且同步之方式作動以進行流 ❹ 態示^閱第六圖B,其係為第六圖A之壓力腔室膨脹狀 2232a時。以第一腔體22&為例,當利用電壓驅動致動器 方向戀&致動裝置223a將會如圖所示,朝箭號a所指之 壓差,因變形,使得壓力腔室221如之體積增加而產生負 構U而形成一股吸力,故閥體薄膜222a之入口閥門結 力,此1及出口闕門結構2222&將因負壓而承受向外之拉 2215a的2於入口閥門結構2221&所對應的是人口暫存腔 及密封^間’因此其人,片22211a便可藉凹槽217a (如第少® 6所構成之微凸結構提供的預力順勢迅速開啟 21之入d、及第七圖,所示使流體大量地由匯流裝置 口分^、f f道215被吸取進來,流入匯流裝置21並於入 由閾體薄^13分流而使部分流體流往第-腔體22a,並經 222l2a ^ 上之入口閥門結構2221a的鏤空孔洞 門通道22^閥體盍體22U上之入口暫存區2215a、入口閥 a,進而傳送至壓力腔室2216a内,此時,由 200942334 於閥體薄膜222a之出口閥門結構2222a同時承受與入口閥 門結構2221a相同方向的拉力,且因閥體蓋體221a之下表 : 面2212a對應出口閥門結構2222a處之結構與對應入口閥 門結構222 la之結構不同,又凹槽22122a及密封環27可 提供一預蓋緊效果,故位於閥體薄膜222a上之出口閥門結 構2222a將因該拉力使得出口閥片22221a密封住出口闕門 通道2214a,因此流體不會逆流(如第六圖b及第八圖B所 示)。 〇 而當施加於致動器2232a的電場方向改變而如第六圖 C所示之朝箭號b之方向彎曲變形時,致動器2232a將使 致動裝置223a朝匯流裝置21方向變形,進而壓縮壓力腔 室2216a之體積’使壓力腔室2216a之體積減小而與外界 產生正壓力差’進而對壓力腔室2216a内部之流體產生一 推力’使流體瞬間大量宣洩而由出口閥門通道2214a流出 壓力腔室2216a外,於此同時,由於閥體薄膜222a之入口 ❹ 閥門結構2221a及出口閥門結構2222a亦承受壓力腔室 2216a之正壓產生的朝匯流裝置21方向之推力,因此設置 於密封環27上的出口閥門結構2222a之出口閥片22221a 便可藉一預力順勢迅速開啟,使流體可由壓力腔室2216a 經由閥體蓋體221a之出口閥門通道2214a、閥體薄膜222a 之出口閥門結構2222a的孔洞22222a進入匯流裝置21上 之出口暫存區2141a及出口匯流道214(如第六圖c及第八 ;圖C所示),最後再由出口通道216流出流體輸送裝置2 之外,因而完成流體之傳輸過程。 200942334 另一方面,當入口閥門結構2221a承受該朝匯流裝置 21方向之推力時,由於匯流裝置21之第一侧面211a靠近 入口分流道213處之結構與靠近出口匯流道214處不同, 且密封環26可提供預蓋緊效果,使得入口閥片22211a令 入口閥門結構2221a受壓成關閉狀態,進而密封住入口分 流道213 (如第六圖C及第七圖C所示),故流體無法通過 入口閥門結構2221a,因此便不會產生倒流的現象。 至於暫時儲存於入口暫存腔2215a内的流體,其將於 致動器2232a再受電壓致動且重複使致動裝置223a上凸變 形而增加壓力腔室2216a之體積時,再由入口暫存腔2215a 經入口閥門通道2213a而流入壓力腔室2216a内,並於致 動裝置223壓縮變形時自壓力腔室2216a排出,由此可知, 藉由改變電場方向,便可驅動致動裝置223a往復運動而使 流體輸送裝置2汲取、釋出流體,以達到流體的輸送之目 的。 請再參閱第七圖A〜C以及第八圖A〜C,其中第七圖 A係為第三圖A之流體輸送裝置之B-B剖面圖,第八圖A 係為第三圖A之流體輸送裝置之C-C剖面圖,如第七圖A 所示,入口通道215係為配置在匯流裝置21之第一侧面 211及第二侧面212間的管線,主要用來使外部之流體輸 送至流體輸送裝置2内,並與複數個入口分流道213相連 通,用以經由入口分流道213將流體分送至第一雙腔體致 動結構22之第一腔體22a及第二腔體22b,以及,第二雙 腔體致動結構23之第一腔體23a及第二腔體23b,以進行 22 200942334 流體之傳送稃序。如第八圖A所示,出口通道216係為為 配置在匯流装置21之第一侧面211及第二侧面212間的 :管線,主要用來將流體輸送至流體輸送裝置2外部,並與 複數個出口眞流道214相連通,用以經由出口匯流道214 及出口通道216將由第一雙腔體致動結構22之第一腔體 22a及第二胶體22b ’以及,第二雙腔體致動結構23之第 一腔體23a及第二腔體2扑所輸出之流體匯流並排至外部。 請參閱第七圖B及第八圖B,如第七圖B所示,流體 ❹流入入口通道215時’部分流體會先於第一雙腔體致動結 構22所對應之入口内流道213進入兩側之第一腔體22a 及第二腔體22b ’其餘再往内流至第一雙腔體致動結構23 所對應之入口内流道213並進入兩侧之第一腔體23a及第 二腔體23b後排出,若有橫向三組以上則依此類推。 當第一雙腔體致動結構22之第一腔體22a及第二腔體 22b,以及第二雙腔體致動結構23之第一腔體23a及第二 ❹ 腔體23b所包含之致動器受相同振動頻率之電壓驅動時, 所有的致動裝置將外凸,將導致所有的入口閥門結構開啟 並汲取流體進入腔體(如第七圖B所示),此時出口閥門 結構更為緊閉,避免流體回流(如第八圖B所示),至於 詳細的作動關係已於上述第六圖B中提出說明,於此不再 贅述。 反之,請再參閱第七圖C及第八圖C,當第一雙腔體 ' 致動結構22之第一腔體22a及第二腔體22b’以及第二雙 : 腔體致動結構23之第一腔體23a及第二腔體23b所包含之 23 200942334 致動器受相同振動頻率之電壓驅動時,所有的致動裝置將 '· 内凹而壓縮壓力腔室且產生正壓時,將導致所有的出口閥 .----..^:^--^.--5---^,---,-^-^----7^^.^ 門結構開啟並排出流體(如第八圖c所示),此時所有入 口閥門結構更為緊閉(如第七圖c所示),避免流體回流, 至於詳細的作動關係已於上述第六圖C中提出說明,於此 不再贅述。 綜上所述,本案之具有複數個雙腔體致動結構之流體 輸送裝置主要係利用匯流裝置將複數個流體輸送腔體整 ® 合為一,亦即將兩組閥體薄膜、閥體蓋體、致動裝置分別 堆疊設置於匯流裝置的第一、第二側面,以形成具有兩個 鏡像對稱的流體輸送腔體之雙腔體致動結構,並再利用將 複數個雙腔體致動結構並排設置於匯流裝置上的方式,以 達到在橫向進行複數個雙腔體致動結構的擴充整合,可將 流體輸送裝置之流體流量及揚呈提升為數倍,但體積確非 多個習知單腔體之流體輸送裝置之加總,是以可確實符合 ❹ 產品微小化之趨勢。 是以,本案之具有複數個雙腔體致動結構之流體輸送 裝置極具產業之價值,爰依法提出申請。 本案得由熟知此技術之人士任施匠思而為諸般修 飾,然皆不脫如附申請專利範圍所欲保護者。 24 200942334 【圖式簡單說明】 第一圖:其係為習知微泵浦結構之結構示意圖。 -第二圖:其係本案較佳實施例之具有複數個雙腔體致動蚌 構之流體輸送裝置之分解結構示意圖。 第三圖A:其係為第二圖之組裝完成後之結構示意圖。 第三圖B:其係為本案第三圖a之流體輸送裂置之匯流裝 置的A-A或是a_a剖面圖。 ❹第三圖C··其係為本案第三圖a之流體輸送裝置之匯流裝 置的C-C剖面圖。 第三圖D:其係為本案第三圖a之流體輸送装置之匯流裝 置的B-B剖面圖。 第四圖A.其係為本案第三圖A之流體輸送裝置之第一雙 腔體致動結構之第一腔體之閥體蓋體的A-A剖面圖。 第四圖B:其係為本案第三圖a所示之第一、第二雙腔體致 動結構之第一腔體之閥體蓋體的C-C剖面圖。 ❹®四圖C.其為本案第三圖a所示之第―、第二雙腔體致 動結構之第一腔體之閥體蓋體的B-B剖面圖。 第五圖:其係為第二圖所示之第一雙腔體致動結構之第一 腔體之閥體薄臈之結構示意圖。 第,、圖A.係為第三圖a之流體輸送裝置之Α·Α剖面於 未作動狀態之示意圖。 ' '第=圖Β ·其係為第六圖Α之壓力腔室膨脹狀態示意圖。 :第六圖C.其係為第六圖a之壓力腔室壓縮狀態示意圖。 第七圖A:其係為第三圖A之流體輸送裝置之B_B剖面圖。 25 200942334 第七圖B :其係為第七圖A之壓力腔室膨脹狀態示意圖。 '* 第七圖C :其係為第七圖A之壓力腔室壓縮狀態示意圖。 第八圖A:其係為第三圖A之流體輸送裝置之C-C剖面圖。 第八圖B :其係為第八圖A之壓力腔室膨脹狀態示意圖。 第八圖C:其係為第八圖A之壓力腔室壓縮狀態示意圖。 【主要元件符號說明】 微泵浦結構:10 閥體座:11 入口通道:111、215 出口通道:112、216 入口閥片通道:121 出口閥片通道:122 閥體蓋體:12、221a、221b、231a、231b 壓力腔室:123、2216a、2316a 閥體薄膜:13、222a、222b、232a、232b 微致動器:14 流體輸送裝置:2 蓋體:15、224a、224b、234a、234b 第一雙腔體致動結構:22 第二雙腔體致動結構:23 第一腔體:22a、23a 第二腔體:22b、23b 匯流裝置:21 第一侧面:211 第二侧面212 : 入口分流道:213 出口匯流道:214 出口 暫存腔: 2141a、2141b 上表面:2211a 下表面:2212a 入口閥門通道:2213a、2213b、2313a 出口閥門通道:2214a、2214b、2314a 26 200942334Multi-P through B to D-inlet channel 215 and outlet channel 216, as shown by the first side 211 of the spear, the plurality of first-channels may be substantially discarded, and the plurality of second-- And the plurality of inlet runners of the second side 212 and the second side 212 flow channel may be substantially perpendicular to the plurality of outlet channels 214 located through the first side 2 port runner 213. In other words, the eight matches are coaxial. The outlet outlet channel 214 on the outlet side surface 211 and the second side surface 212 is also the same as the manifold channel 2U, and the inlet branch channel 213 and the second side surface are independent (as shown in FIG. 3B), so the first movement Ό 212 can pass through the inlet runner 213 and the outlet sink ρ. c; the passage 215 and the outlet can refer to the third diagram C and the third diagram D, and the official passage 216 between the sides 212 of the . Disposed on the first side 211 and the 笫〆, line, the inlet passage 215 is configured to transport the outer flow boat to the body conveyor 2, and the outlet passage 216 is to pass the fluid from the interior of the body conveyor 2 Transfer to the outside, and the inlet passage 215 is in communication with a plurality of inlet runners 213 ( The third row D is shown, and the outlet passage 216 is in communication with a plurality of outlet outlets 214 (as in the third diagram c), in other words, when the fluid delivery device 2 is assembled, the plurality of inlet runners 213 < communicating with the outside through the inlet passage 215, and the plurality of outlet manifolds 214 can communicate with the outside through the outlet passage 216. Referring to Figures 3 and C, the plurality of outlet manifolds 214 of the manifold 21 are close to the first One end of the side surface 211 extends outwardly, and is defined by the valve body films 222a and 232a disposed on the first side surface 211. The second temporary storage chamber is the outlet temporary storage chamber 2141a shown in the drawing. When the outlet manifold 214 is close to the second side 212, it is also thin with the valve body 11 200942334. The membranes 222b and 232b are provided with the outlet temporary chamber 2141b, which is composed of the first chamber 22a, 23a and the second chamber. The fluids introduced into the bodies 22b, 23b can be temporarily stored at the outlets. The chambers 2141a, 2141b are slightly buffered, and are smoothly collected in the outlet manifold 214 and outputted to the outside of the fluid delivery device 2 along the outlet passage 216. The manifold 21 First side 211 and second side 212 is further provided with a plurality of groove structures respectively, wherein the grooves 217a, 218a, 217b, and 218b are circumferentially disposed around the periphery of the outlet branching passage 213 with the inlet branching passage 213 as the center, and the grooves 219a and 219b are connected to the outlet manifold. 214 is centered and disposed around the periphery of the outlet manifold 214 to accommodate a plurality of sealing rings 26 (as shown in FIG. 6A) by the grooves 217a-219a, 217b-219b. In this embodiment, the confluence device 21 can be made of a thermoplastic plastic material; as for the sealing ring 26, it can be a ring structure composed of a soft material with good chemical resistance, for example, a rubber ring of sterol or acetic acid, but not limited thereto. Referring to the second figure, the valve body films 222a and 232a of the first cavity 22a, 23a of the first and second dual cavity actuating structures 22, 23 Q, the valve body covers 221a and 231a, and the actuating device 223a 233a and the cover bodies 224a, 234a are stacked on the first side surface 211 of the confluence device 21, wherein the valve body films 222a, 232a are located between the first side surface 211 of the confluence device 21 and the valve body cover bodies 221a, 231a, and Corresponding to the arrangement of the manifold 21 and the valve body covers 221a, 231a and the corresponding positions on the valve body covers 221a, 231a are provided with actuating means 223a, 233a, which mainly comprise a vibrating membrane. 2231a, 2331a, and actuation The actuators 2232a, 2332a, and the actuators 223a, 233a can be driven by the voltage to vibrate to drive the fluid delivery device 2 12 200942334 to operate as the cover bodies 224a, 234a are disposed on the actuation devices 223a, 233a relative to The valve body covers 221a, 231a are disposed on the side - for sealing the entire first cavity 22a, 23a, and the valve body films 222a, 232a, the body cover 22la, 231a, the actuating means 223a, 233a and the cover 224a, 234a are stacked in sequence and utilize locking elements (not shown) ) And the like disposed on the first side surface 211 after the bus means 21, can constitute the first double-chamber actuating structure of the first chamber 22 of the body 22a, the second double-chamber actuating structure of the first chamber 23 of the body 23a. And because the second cavity 22b of the first dual cavity actuating structure 22 and the first cavity 22a are mirror-symmetrically disposed on the second side 212 of the confluence device 21 centered on the confluence device 21, and the second pair The second cavity 23b of the cavity actuating structure 23 and the first cavity 23a are disposed symmetrically on the second side 212 of the confluence device 21 centering on the confluence device 21 (as shown in the second figure and the sixth figure A). As shown in the following, the first cavity 22a of the first dual cavity actuating structure 22 is taken as an example to illustrate the detailed structure of the fluid transport device 2 of the present invention. Please refer to the fourth figure A, B, C and cooperate with the second figure and the third figure A'. The fourth picture A of the third embodiment is the first double cavity actuation structure of the fluid delivery device of the third figure A of the present case. AA cross-sectional view of the valve body cover of a cavity, and FIG. 4B is the CC of the valve body cover of the first cavity of the first and second dual cavity actuating structures shown in FIG. The cross-sectional view, the fourth figure C is the BB side view of the valve body cover of the first cavity of the first and second dual cavity actuating structures shown in the third figure A of the present case, as shown in the second figure. The valve body cover 221a of the first cavity 22a of the first dual cavity actuating structure 22 is disposed on the first side 211 of the confluence device 21, and has an upper surface 2211a and a lower surface 2212a. The surface 2212a faces the first side 13 of the confluence device 21 200942334 211 ' and sandwiches the valve body film 221a between the lower surface 2212a and the first side surface 211 of the confluence device 21, and the valve body cover 221a includes the through surface. The first channel of the surface 2211a and the lower surface 2212a and the first valve channel 'in this embodiment, the first valve channel can be the inlet valve 2213a, the second valve passage may be an outlet valve passage 2214a (as shown in the second and fourth panels B), wherein the inlet valve passage 2213a corresponds to the inlet branch passage 213 of the manifold 26, and the outlet valve passage 2214a corresponds to In the exit temporary storage area 2141a (as shown in the second figure and the sixth figure A). In addition, the inlet valve passage 2213a of the valve body cover 221a extends outwardly toward the lower surface 2212a, and defines a first temporary storage chamber together with the valve body film 222a. The first temporary storage chamber of the embodiment The inlet temporary cavity 2215a is formed by the lower surface 2212a of the valve body cover 221a at a position corresponding to the inlet valve passage 2213a, and is connected to the inlet door 2213a (as shown in the sixth figure). A and fourth figure C)). Referring to FIG. 2 and FIG. 6A again, the surface of the wide body cover 221a is partially recessed, and a corresponding pressure chamber 2216a is defined by the corresponding actuator 223a, and the pressure chamber is defined. 2216a is in communication with the inlet temporary chamber 2215a via the inlet gate channel 2213a (as shown in the fourth figure (shown)) while the pressure chamber 2216a is also in communication with the outlet valve passage 2214a (as shown in Figure 4B). In addition, the valve body cover 221a has a plurality of copper groove structures. The lower surface 2212a of the valve body cover 221a has a groove 22121a disposed around the inlet valve passage 2213a, and an outlet valve passage 2214a. The upper surface 2211a is provided with a groove 22122a, 22123a' disposed around the center, and the upper surface 2211a is provided with four types of surrounding the pressure chamber 2216a. The cover ring 27 is accommodated by the grooves 22121a-22123a, 22111a (as shown in FIG. The material of the valve body cover 221a may be a thermoplastic plastic material and the material type of the valve body 221a may be the same as that of the flow device 21, and the material of the sealing ring 27 may be the same as that of the sealing ring 26, Let me repeat. Please refer to the fifth figure and The second figure and the sixth figure A, wherein the fifth figure is a schematic structural view of the valve body film of the first cavity of the first dual cavity actuating structure shown in the second figure, as shown in the figure, the valve body The film 222a is mainly made by conventional processing, or yellow etching, laser processing, or electro-recording processing, or electric discharge processing, and is a sheet structure having substantially the same thickness, and has a plurality of valve structures. It is a hollow valve switch. In this embodiment, the valve body film 222a is provided with first and second hollow valve structures, which are an inlet valve structure 2221a and an outlet valve structure 2222a, respectively, wherein the inlet valve structure 2221a corresponds to the confluence. The inlet branch passage 213 of the device 21, the inlet valve passage 2213a of the valve body cover 221a, and the inlet temporary storage chamber 2215a, and the outlet valve structure 2222a corresponds to the outlet manifold 214 of the manifold 21, the outlet temporary chamber 2141a, and the valve body The outlet valve passage 2214a of the cover 2'21a (as shown in Figure 6A). Referring again to the fifth diagram, the inlet valve structure 2221a has an inlet valve piece 22211a and a plurality of turns disposed around the inlet valve piece 22211a. The hollow hole 22212a further has an extension portion 22213a connected to the inlet valve piece 22211a between the holes 22212a. The outlet valve piece 22221a, the hole 22222a and the extension portion 22223a of the outlet valve structure 2222a are disposed with the inlet valve structure. 2221a is the same and will not be described here. In the present embodiment, the valve body film 222a is substantially a flexible film having a uniform thickness, and the material of the material of the 2009 2009 334 may be selected from any organic polymer material or metal having good chemical resistance. Material, such as: Polyimide (PI), Shao, Nickel, stainless steel, copper, ·- Ming alloy, nickel alloy or copper alloy, etc., but the material selected is not limited. Since the valve body film 222a is a flexible sheet, when the valve body film 222a is disposed between the first side surface 211 of the manifold 21 and the valve body cover 221a, if it is subjected to the suction of the pressure chamber 2216a, the suction force is generated. The inlet valve structure 2221a and the outlet valve structure 2222a are all displaced to the direction of the pressure chamber 2216a. However, due to the structure of the lower surface 2212a of the valve body cover 221a adjacent to the inlet valve passage 2213a and the outlet valve passage 2214a, The difference (as shown in FIG. 4A and FIG. 6A), therefore, when the valve body film 222a is attracted by the negative pressure of the pressure chamber 2216a, substantially only the inlet valve structure 2221a can be directed toward the valve body cover 221a. The displacement is generated (as shown in FIG. 6B and FIG. 7B), and the outlet valve structure 2222a is attached to the lower surface 2212a of the valve body cover 221a and cannot be opened (as shown in FIG. 6B and FIG. In this case, the fluid can only flow from the side of the valve body film 222a close to the side of the confluence device 21 through the hole 22212a of the inlet valve structure 2221a to the side close to the valve body cover 22 (as shown in FIG. 6B and FIG. 7B). Arrow shown) And into the inlet 221a of the valve cap buffer cavity 2215a and inlet valve channel 2213a is transmitted to the pressure chamber 2216a, and the use of the outlet valve structure 2222a close to prevent reverse flow of fluid. Similarly, since the first side 211 of the confluence device 21 is different in structure from the inlet/sub-channel 213 and the outlet confluence 214 (as shown in the second figure and the 16th 200942334 three-figure B), the valve body film 222a Upon being subjected to the positive pressure push of the pressure chamber 2216a'* to withstand the downward stress transmitted from the pressure chamber 2216a: substantially only the outlet valve structure 2222a can be displaced toward the confluence device 21, the inlet valve structure 2221a Then, it is attached to the first side surface 211 of the manifold 21 to seal the inlet runner 213 of the flow device 21, that is, the inlet valve structure 2221a cannot be opened (as shown in FIG. 6C and FIG. 7C). That is, the fluid can only flow from the pressure chamber 2216a through the hole 22222a of the outlet valve structure 2222a into the outlet temporary cavity 2141a of the confluence device 21 (as shown in FIG. 6C and FIG. 8C). The valve structure 2221a can be quickly opened or closed in response to the negative and positive pressure differentials generated by the pressure chamber 2216a, and the outlet valve structure 2222a can be closed or opened corresponding to the inlet valve structure 2221a to control fluid ingress and egress. Free fluid reflux. Referring to FIG. 2 again, the actuator 223a of the first cavity of the first dual cavity actuating structure 22 includes a vibrating membrane 2231a and an actuator Q 2232a. The actuating device 223a mainly utilizes the periphery of the vibrating membrane 2231a. It is fixed on the valve body cover 221a, and the valve body 221a defines a pressure chamber 2216a (as shown in FIG. 6A). The material of the vibrating film 223la of the actuating device 223a may be a single-layer metal structure, such as: non-scale metal or copper metal 'but not limited thereto; of course, in some embodiments, the vibrating film 2231a may be on the metal material. A layer of biochemical resistant polymer sheet material is attached to form a two-layer structure. The actuator 2232a can be attached to the vibrating film 2231a, and the actuator 2232a is a piezoelectric plate made of a piezoelectric powder of a high piezoelectric coefficient lead zirconate titanate (pZT) series. The cover body 17 200942334 224a is correspondingly disposed on the actuation failure 223a, and the valve body film 222a, the valve body: the cover body 221a and the actuation device 224a are jointly used by the cover body 224a and the first side surface 211 of the confluence device 21. The structure is interposed therebetween to form the first cavity 22a of the first dual cavity actuating structure 22 of the fluid delivery device 2 of the present invention (as shown in FIG. 3A). Please refer to the sixth figure A and cooperate with the second figure and the third figure A, wherein the sixth figure A is a schematic diagram of the AA cross section of the fluid transfer device of the second figure A in an unactuated state. As shown in the third figure A The structure and operation of the φ aa cross section of the fluid transport device shown are the same as those of aA, and therefore the following description will be made only with the structure of the AA cross section. As shown, when the first cavity 22a of the first dual cavity actuation structure 22 is disposed on the first side 211 of the manifold 21, the inlet runner 213 of the manifold 21 corresponds to the valve body film 222a. The inlet valve structure 2221a, the inlet temporary chamber 2215a of the valve body cover 221a and the inlet valve passage 2213a, and the outlet manifold 214 of the manifold 21 correspond to the outlet valve chamber 141a and the outlet valve structure on the valve body membrane 222a. 2222a and an outlet valve passage 2214a on the valve body cover 221a. In addition, the thickness of the seal ring 26 in the first side surface 211 of the confluence device 21 surrounding the recess 217a of the inlet shunt 213 (as shown in FIG. 3B) is greater than the depth of the recess 217a, so that the seal ring 26 will be partially Projecting from the recess 217a and forming a micro-convex structure, the inlet valve piece 22211a of the inlet valve structure 2221a of the valve body film 222a is formed to be upwardly raised, such that the micro-convex structure will abut the valve body film 222a and the inlet valve structure 2221a Pushing to create a pre-force effect helps to create a greater pre-covering effect when fluid is released 18 200942334 to prevent backflow and between the inlet valve plate 22211a and the first side 211 of the manifold 21 A gap is created to facilitate the entry of the fluid into the inlet valve structure 2221a. Similarly, the lower surface 2212a of the valve body cover 22a and the outlet valve passage 221, such as the peripheral groove 22122a, and the seal ring 27 are also formed as a micro-convex structure, so that the outlet valve structure 2222a of the valve body film 222a is convex downward. A downward bulge is formed with respect to the body cover body 221a, and a gap is formed between the outlet valve piece 22221& and the lower surface 2212a of the valve body φ cover body 222a, and the outlet valve structure 2222a is formed by the entrance door structure 222 la The convex structure is only set in the opposite direction, but its function is similar, so it will not be described again. In addition to the use of the recesses 217a, 22122a and the seal rings 26, 27, the above-described micro-convex structure may also be a semiconductor process, such as yellow etching, coating or electroforming, directly in the confluence device 21, in some embodiments. The micro-convex structures are formed on the valve body body 22U, or are integrally formed by injection molding on the manifold device 21 and the body body body 222a, wherein the substrate is made of thermoplastic © plastic material. The remaining portion of the valve body film 222a is applied between the valve body cover 222a and the manifold 21 and passes through the seal rings 26, 27 provided in the grooves 21 ga, 219a and 22121a, 22123a, 22111a to make the structures. They fit snugly together to prevent fluid spillage. Referring to FIG. 6A, the valve body film 222b of the second cavity 22b of the first dual cavity actuating structure 22, the valve body cover 221b, the actuating device 223b, and the cover body 224b are disposed in the confluence device 21. The second side surface 212, and is mirrored by the current collecting device 21 and the structures of the first cavity 22a. The symmetry 'because of the structure and function of the second cavity 22b and the first cavity 22a 19 200942334 200942334相同 The same structure and function of the first cavity 23a and the second cavity 23b of the second dual cavity actuation structure 23 are the same as the first dual cavity actuation structure 22: and the second cavity 23a, Therefore, in order to simplify the description, the first cavity 223 of the flow double-cavity actuation structure 22 is a detailed operation, and the delivery process, however, it should be understood that when the fluid delivery device 2 of the present invention is a cavity, the first double The second cavity 2 of the cavity actuating structure 22 is identical and synchronized with the second and second body of the second and second dual cavity actuating structures 23 Actuation to perform the flow state is shown in Figure 6B, which is the pressure chamber expansion 2232a of Figure 6A. Taking the first cavity 22 & as an example, when the voltage is used to drive the actuator direction & the actuating device 223a will be as shown, the pressure difference indicated by the arrow a, due to the deformation, the pressure chamber 221 If the volume is increased to generate a negative U to form a suction force, the inlet valve of the valve body film 222a is forced, and the 1 and the exit door structure 2222& will be subjected to the external pull 2215a due to the negative pressure. The valve structure 2221& corresponds to the population temporary cavity and the sealing chamber'. Therefore, the person 2211a can use the groove 217a (such as the pre-stress provided by the micro-convex structure composed of the first few 6) to quickly open 21 Into d, and the seventh figure, the fluid is taken up in a large amount by the manifold device, and the ff channel 215 is sucked in, flows into the confluence device 21, and is shunted by the threshold thin body 13 to cause a part of the fluid to flow to the first - The cavity 22a is transferred to the pressure chamber 2216a through the inlet temporary storage area 2215a and the inlet valve a on the valve body body 22U of the inlet valve structure 2221a of the inlet valve structure 2221a. From 200942334, the valve structure 2222a at the outlet of the valve body film 222a is simultaneously subjected to the inlet and the inlet. The door structure 2221a has a pulling force in the same direction, and because the structure of the valve body cover 221a is the same as the structure of the face valve 2222a corresponding to the outlet valve structure 2222a and the corresponding inlet valve structure 222la, the groove 22122a and the sealing ring 27 are provided. A pre-tightening effect, so that the outlet valve structure 2222a on the valve body membrane 222a will cause the outlet valve piece 22221a to seal the outlet valve channel 2214a due to the pulling force, so that the fluid will not flow backward (as shown in Figure 6b and Figure 8). B shows). When the direction of the electric field applied to the actuator 2232a changes and is bent and deformed in the direction of the arrow b as shown in FIG. 6C, the actuator 2232a will cause the actuating device 223a toward the confluence device. The deformation in the direction of 21, which in turn compresses the volume of the pressure chamber 2216a, reduces the volume of the pressure chamber 2216a and creates a positive pressure difference with the outside, which in turn generates a thrust to the fluid inside the pressure chamber 2216a, causing the fluid to vent a large amount of time. The outlet valve passage 2214a flows out of the pressure chamber 2216a. At the same time, the inlet valve 2221a and the outlet valve structure 2222a of the valve body membrane 222a are also subjected to the pressure chamber 2216a. The thrust generated by the positive pressure in the direction of the confluence device 21, so that the outlet valve piece 22221a of the outlet valve structure 2222a disposed on the seal ring 27 can be quickly opened by a preload force, so that the fluid can be passed from the pressure chamber 2216a through the valve body cover. The outlet valve passage 2214a of the body 221a and the outlet 22222a of the outlet valve structure 2222a of the valve body membrane 222a enter the outlet temporary storage area 2141a and the outlet manifold 214 on the manifold device 21 (as shown in FIG. 6 and FIG. And finally exiting the fluid delivery device 2 from the outlet channel 216, thus completing the fluid transfer process. 200942334 On the other hand, when the inlet valve structure 2221a is subjected to the thrust in the direction of the confluence device 21, the structure of the first side surface 211a of the confluence device 21 near the inlet branch passage 213 is different from that near the outlet manifold 214, and the seal ring 26 can provide a pre-tightening effect, such that the inlet valve plate 22211a presses the inlet valve structure 2221a into a closed state, thereby sealing the inlet runner 213 (as shown in Figures 6C and 7C), so the fluid cannot pass. The inlet valve structure 2221a does not cause backflow. As for the fluid temporarily stored in the inlet temporary chamber 2215a, the actuator 2232a is again subjected to voltage actuation and repeatedly deforms the actuator 223a to increase the volume of the pressure chamber 2216a, and then is temporarily stored by the inlet. The chamber 2215a flows into the pressure chamber 2216a through the inlet valve passage 2213a, and is discharged from the pressure chamber 2216a when the actuator 223 is compressed and deformed. Thus, it can be seen that the actuator 223a can be driven to reciprocate by changing the direction of the electric field. The fluid delivery device 2 draws and releases fluid to achieve fluid delivery. Please refer to the seventh diagrams A to C and the eighth diagrams A to C, wherein the seventh diagram A is a BB cross-sectional view of the fluid transport device of the third diagram A, and the eighth diagram A is the fluid transport of the third diagram A. CC cross-sectional view of the device, as shown in FIG. 7A, the inlet passage 215 is a line disposed between the first side 211 and the second side 212 of the confluence device 21, and is mainly used for conveying external fluid to the fluid delivery device. 2, and connected to a plurality of inlet split runners 213 for distributing fluid to the first cavity 22a and the second cavity 22b of the first dual cavity actuation structure 22 via the inlet split runner 213, and The first chamber 23a and the second chamber 23b of the second dual chamber actuating structure 23 perform the transfer sequence of 22 200942334 fluid. As shown in FIG. 8A, the outlet passage 216 is a line disposed between the first side 211 and the second side 212 of the confluence device 21, and is mainly used for conveying fluid to the outside of the fluid delivery device 2, and The outlet chute 214 is in communication for passing the first cavity 22a and the second colloid 22b' of the first dual cavity actuating structure 22 and the second dual cavity via the outlet manifold 214 and the outlet channel 216. The first cavity 23a of the actuation structure 23 and the fluid output by the second cavity 2 are merged and discharged to the outside. Referring to FIG. 7B and FIG. 8B, as shown in FIG. 7B, when the fluid enthalpy flows into the inlet passage 215, a portion of the fluid will precede the inlet inner flow passage 213 corresponding to the first dual chamber actuation structure 22. The first cavity 22a and the second cavity 22b' entering the two sides flow further to the inlet inner flow channel 213 corresponding to the first dual cavity actuation structure 23 and enter the first cavity 23a on both sides and The second cavity 23b is discharged later, and if there are three or more lateral groups, the same is true. When the first cavity 22a and the second cavity 22b of the first dual cavity actuating structure 22, and the first cavity 23a and the second cavity 23b of the second dual cavity actuating structure 23 are included When the actuator is driven by the voltage of the same vibration frequency, all the actuators will be convex, which will cause all the inlet valve structures to open and draw fluid into the cavity (as shown in Figure 7B). In order to be closed, fluid backflow is avoided (as shown in FIG. 8B), and the detailed actuation relationship has been described in the sixth figure B above, and will not be described again. On the contrary, please refer to FIG. 7C and FIG. 8C again, when the first cavity 22a and the second cavity 22b' of the first double cavity 'actuating structure 22 and the second double: cavity actuating structure 23 When the actuators of the first cavity 23a and the second cavity 23b are driven by the voltage of the same vibration frequency, all the actuators will be recessed to compress the pressure chamber and generate a positive pressure. Will cause all the outlet valves.----..^:^--^.--5---^,---,-^-^----7^^.^ The door structure is opened and discharged Fluid (as shown in Figure 8c), at which point all inlet valve structures are more tightly closed (as shown in Figure 7c) to avoid fluid backflow. The detailed actuation relationship is illustrated in Figure 6 above. This will not be repeated here. In summary, the fluid delivery device having a plurality of dual-cavity actuation structures in the present invention mainly uses a confluence device to integrate a plurality of fluid delivery chambers into one, that is, two sets of valve body membranes and valve body covers. And actuating devices are respectively stacked on the first and second sides of the confluence device to form a dual cavity actuating structure having two mirror-symmetric fluid transport cavities, and reusing a plurality of dual cavity actuating structures Side-by-side arrangement on the confluence device to achieve the expansion and integration of a plurality of dual-cavity actuation structures in the lateral direction, which can increase the fluid flow rate and the elevation of the fluid delivery device by several times, but the volume is not a plurality of conventional singles. The sum of the fluid transport devices of the chamber is such that it can indeed meet the trend of miniaturization of the product. Therefore, the fluid delivery device with multiple double-cavity actuation structures in this case is of great industrial value and is submitted according to law. This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application. 24 200942334 [Simple description of the diagram] The first picture: it is a schematic diagram of the structure of the conventional micro-pump structure. - Second Figure: It is a schematic exploded view of a fluid transport device having a plurality of dual cavity actuated structures in accordance with a preferred embodiment of the present invention. Third figure A: It is a schematic structural view after the assembly of the second figure is completed. Figure 3B is a cross-sectional view of the A-A or a_a of the confluent device of the fluid transporting split of Figure 3 of the present invention. ❹Third Figure C is a C-C cross-sectional view of the manifold of the fluid delivery device of Figure 3 of the present invention. Fig. D is a cross-sectional view taken along the line B-B of the confluent device of the fluid transport device of Fig. 3 of the present invention. Figure A. A is a cross-sectional view of the valve body cover of the first cavity of the first dual cavity actuation structure of the fluid delivery device of Figure 3 of the present invention. Figure 4B is a C-C cross-sectional view of the valve body cover of the first cavity of the first and second dual cavity actuating structures shown in Fig. 3a of the present invention. ❹® Four Diagram C. It is a B-B cross-sectional view of the valve body cover of the first cavity of the first and second dual cavity actuation structures shown in the third figure a of the present invention. Fig. 5 is a schematic view showing the structure of the valve body of the first cavity of the first double cavity actuating structure shown in Fig. 2. Fig. A is a schematic view showing the Α·Α cross section of the fluid transport device of Fig. 3 in an unactuated state. ' '第图图Β · It is a schematic diagram of the pressure chamber expansion state of the sixth figure. Fig. C is a schematic view showing the compression state of the pressure chamber of the sixth figure a. Figure 7A is a cross-sectional view of the B_B of the fluid delivery device of Figure 3A. 25 200942334 Figure 7B: This is a schematic diagram of the expansion state of the pressure chamber of Figure 7A. '* Figure 7C: This is a schematic diagram of the pressure chamber compression state of Figure 7A. Figure 8A is a C-C cross-sectional view of the fluid delivery device of Figure 3A. Figure 8B is a schematic view showing the state of expansion of the pressure chamber of Figure 8A. Figure 8C is a schematic view showing the compression state of the pressure chamber of Figure 8A. [Main component symbol description] Micro-pump structure: 10 valve body seat: 11 inlet channel: 111, 215 outlet channel: 112, 216 inlet valve channel: 121 outlet valve channel: 122 valve body cover: 12, 221a, 221b, 231a, 231b Pressure chamber: 123, 2216a, 2316a Body film: 13, 222a, 222b, 232a, 232b Microactuator: 14 Fluid delivery device: 2 Cover: 15, 224a, 224b, 234a, 234b First dual cavity actuation structure: 22 Second dual cavity actuation structure: 23 First cavity: 22a, 23a Second cavity: 22b, 23b Confluence device: 21 First side: 211 Second side 212: Inlet shunt: 213 Outlet chute: 214 Outlet chamber: 2141a, 2141b Upper surface: 2211a Lower surface: 2212a Inlet valve channel: 2213a, 2213b, 2313a Outlet valve channel: 2214a, 2214b, 2314a 26 200942334

❹ 入口 暫存腔:2215a、2215b、2315a 致動裝置:223a、223b、233a、233b , 延伸部:22213a、22223a 入口閥門結構:2221a、131 出口閥門結構:2222a、132 匯流裝置:21 入口閥片:22211a 出 口闕片:22221a 孔洞:22212a、22222a 振動薄膜:2231a、2231b、2331a、2331b 致動器:2232a、2232b、2332a、2332b 方向:a、b、x 密封環:26、27 凹槽:217a、217b、218a、218b、219a、219b、22121a、 22121b、22122a、22123a、22111a 27入口 Entrance temporary storage chamber: 2215a, 2215b, 2315a Actuating device: 223a, 223b, 233a, 233b, Extension: 22213a, 22223a Entrance valve structure: 2221a, 131 Outlet valve structure: 2222a, 132 Confluence device: 21 inlet valve :22211a Exit cymbal: 22221a Hole: 22212a, 22222a Vibration film: 2231a, 2231b, 2331a, 2331b Actuator: 2232a, 2232b, 2332a, 2332b Direction: a, b, x Sealing ring: 26, 27 Groove: 217a , 217b, 218a, 218b, 219a, 219b, 22121a, 22121b, 22122a, 22123a, 22111a 27

Claims (1)

200942334 十、申請專利範圍: 1· 一種具有複數個雙腔體致動結構之流體輸送裝置,用以 ^ 傳送一流體,其係包含: 一匯流裝置,其係具有: 兩侧面,其係相互對應; 複數個第一流道及複數個第二流道,其係貫穿該兩 側面; Φ 一入口通道,其係設置於該兩侧面之間,並與該複 數個第一流道相連通; 一出口通道,其係設置於該兩侧面之間,並與該複 數個第二流道相連通; 複數個雙腔體致動結構,彼此之間係並排設置於該匯 流裝置上; 其中,每一該雙腔體致動結構係具有一第一腔體及一 第二腔體,其係對稱設置於該匯流裝置之該兩侧面上, ❹ 該第一腔體及該第二腔體係各自包括: 一閥體蓋體,其係設置於該匯流裝置上; 一閥體薄膜,其係設置於該匯流裝置與該閥體蓋體 之間;以及 一致動裝置,其週邊係設置於該閥體蓋體上。 2.如申請專利範圍第1項所述之具有複數個雙腔體致動結 . 構之流體輸送裝置,其中該閥體薄膜係具有一第一閥門結 ’ 構及一第二閥門結構分別對應該第一流道及該第二流道。 28 200942334 3.如申請專利範圍第2項所述之具有複數個雙腔體致動結 構之流體輸送裝置,其中該閥體薄膜與該閥體蓋體之間更 • 包括一第一暫存室,而該閥體薄膜與該匯流裝置之間更包 括一第二暫存室。 4·如申請專利範圍第3項所述之具有複數個雙腔體致動結 構之流體輸送裝置,其中該第一腔體及該第二腔體之該第 一閥門結構、該第一暫存區及該第一閥門通道係對應於該 匯流裝置之該第一流道,而該第二暫存區、該第二閥門結 ® 構及該第二閥門通道係對應於該匯流裝置之該第二流道。 5. 如申請專利範圍第1項所述之具有複數個雙腔體致動結 構之流體輸送裝置,其中該致動裝置係與該閥體蓋體定義 出一壓力腔室。 6. 如申請專利範圍第1項所述之具有複數個雙腔體致動結 構之流體輸送裝置,其中該流體包括氣體及液體。 7. 如申請專利範圍第1項所述之具有複數個雙腔體致動結 φ 構之流體輸送裝置,其中該致動裝置係包括一致動器及一 振動薄膜。 8. 如申請專利範圍第1項所述之具有複數個雙腔體致動結 構之流體輸送裝置,其中該第一流道係為入口分流道,該 第二流道係為出口匯流道。 9. 如申請專利範圍第1項所述之具有複數個雙腔體致動 結構之流體輸送裝置,其中複數個雙腔體致動結構之該第 ' 一腔體及該第二腔體所包含之該致動裝置的振動頻率係 . 相同。 29200942334 X. Patent application scope: 1. A fluid conveying device having a plurality of dual-cavity actuation structures for transmitting a fluid, comprising: a confluence device having: two sides, each of which corresponds to each other a plurality of first flow passages and a plurality of second flow passages extending through the two sides; Φ an inlet passage disposed between the two side surfaces and communicating with the plurality of first flow passages; an outlet passage Between the two sides, and connected to the plurality of second flow passages; a plurality of double-cavity actuation structures are disposed side by side on the confluence device; wherein each of the pairs The cavity actuating structure has a first cavity and a second cavity symmetrically disposed on the two sides of the flow device, and the first cavity and the second cavity system each include: a valve a body cover body is disposed on the flow collecting device; a valve body film disposed between the flow collecting device and the valve body cover body; and an actuating device, the periphery of which is disposed on the valve body cover body . 2. The fluid delivery device of claim 1, wherein the valve body film has a first valve junction and a second valve structure respectively. The first flow path and the second flow path should be used. A fluid delivery device having a plurality of dual-cavity actuation structures as described in claim 2, wherein the valve body membrane and the valve body cover further comprise a first temporary storage chamber And a second temporary storage chamber is further included between the valve body film and the flow collecting device. 4. The fluid delivery device of claim 3, wherein the first valve body and the first valve body of the second cavity are the first temporary storage And the first valve passage corresponds to the first flow passage of the flow device, and the second temporary storage region, the second valve junction structure and the second valve passage system correspond to the second flow of the flow collecting device Flow path. 5. A fluid delivery device having a plurality of dual chamber actuation structures as described in claim 1 wherein the actuation device defines a pressure chamber with the valve body cover. 6. A fluid delivery device having a plurality of dual cavity actuation structures as described in claim 1 wherein the fluid comprises a gas and a liquid. 7. The fluid delivery device of claim 1, wherein the actuation device comprises an actuator and a vibrating membrane. 8. The fluid delivery device of claim 1, wherein the first flow channel is an inlet flow channel and the second flow channel is an outlet manifold. 9. The fluid delivery device of claim 1, wherein the first cavity and the second cavity are comprised of a plurality of dual cavity actuation structures. The vibration frequency of the actuating device is the same. 29
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TWI453573B (en) * 2011-05-11 2014-09-21 Microjet Technology Co Ltd Heat dissipating device
CN109692575A (en) * 2018-12-19 2019-04-30 青岛科技大学 A kind of dual cavity membrane capacitance deionizer

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI453573B (en) * 2011-05-11 2014-09-21 Microjet Technology Co Ltd Heat dissipating device
CN109692575A (en) * 2018-12-19 2019-04-30 青岛科技大学 A kind of dual cavity membrane capacitance deionizer
CN109692575B (en) * 2018-12-19 2021-07-23 青岛科技大学 Double-chamber membrane capacitance deionization device

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