TW200913314A - White light emitting device and method for making same - Google Patents

White light emitting device and method for making same Download PDF

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Publication number
TW200913314A
TW200913314A TW96134524A TW96134524A TW200913314A TW 200913314 A TW200913314 A TW 200913314A TW 96134524 A TW96134524 A TW 96134524A TW 96134524 A TW96134524 A TW 96134524A TW 200913314 A TW200913314 A TW 200913314A
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light emitting
layer
white light
type semiconductor
semiconductor layer
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TW96134524A
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Chinese (zh)
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TWI377707B (en
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Chih-Ming Lai
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Foxsemicon Integrated Tech Inc
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Abstract

The present invention generally provides a white light emitting device and a method for making same. The white light emitting device includes a light emitting diode (LED) chip, a phosphor layer and a reflecting layer. The LED chip includes a substrate and a light emitting structure formed thereon. The light emitting structure includes a first-type semiconductor layer, an active layer and a second-type semiconductor layer arranged on the substrate in that order. The substrate has at least a cavity formed therein for partially exposing the first-type semiconductor layer. The LED chip has a plurality of sidewalls. The phosphor layer is formed in the at least a through hole and configured for wavelength conversion so as to produce a white light. The reflecting layer is formed on the sidewalls of the LED chip to surround the LED chip. The white light emitting device would produce a white light with an improved color uniformity via the use of the reflecting layer and the position configuration of the phosphor layer.

Description

200913314 ..九、發明說明: .【發明所屬之技術領域】 本發明涉及半導體發光領域,尤其係一種白光發光裝 置及其製作方法。 【先前技術】 目如’白光發光二極體(White Light Emitting Diode, Wh i te LED)作為一種白光發光裝置,因其具功耗低、壽命 長、體積小及亮度高等特性而被廣泛用作LCD顯示器背光 源、車用光源及通用照明光源,具體可參見Atsushi 〇kun〇 等人於 2003 IEEE Electronic Components and Technology200913314 .. IX. Description of the Invention: [Technical Field] The present invention relates to the field of semiconductor light-emitting, and more particularly to a white light-emitting device and a method of fabricating the same. [Prior Art] A white light emitting diode (Wh i te LED) is widely used as a white light emitting device because of its low power consumption, long life, small size, and high brightness. LCD display backlights, automotive light sources and general illumination sources, see Atsushi 〇kun〇 et al. 2003 IEEE Electronic Components and Technology

Conference 上發表之 “uniqUe fhite LED Packaging Systems” 一文。 如圖6所示,典型之白光發光二極體6〇包括一基座 62、一發光二極體晶片64以及一摻雜螢光物質之透明封裝 體66。該發光二極體晶片64由該基座62與透明封裝體⑽ 將其密封封裝。由於發光二極體晶片64之侧面與其正面(亦 即上表面)均有光線出射,而侧面出射之光線與正面出射之 光線之光強不同且穿透摻雜螢光物質之透明封裝體66之光 程差異較大,其將使得經螢光物質轉換而產生之白光顏色 不均勻,導致白光發光二極體之應用受限。 【發明内容】 下面將以實施例說明—種出光顏色均勻之白 置及其製作方法。 九裝 種白光發光裝置,其包括:—發光二極體晶片、營 200913314 200913314 光物質層及一反射層。發光— 基底上之發光結構,外光I構括—基底及位於 -與第-型半_導=::括:第-型半導體層、 一办Μ 層¥電類型相反之第二型半導體層以及 ;弟一型半導體層與第 第-型丰#®、 層之間之活性層, 方向排二:性層及第二型半導體層沿遠離基底之 半導體声,=上形成有至少一凹槽以暴露出部分第-型 ==體晶片之基底的至少-凹槽内,』 側面卜 光。反射層形成於發光二極體晶片之複數個 側面上以環繞發光二極體晶片。 ⑽_恤,㈣㈣:⑷提供 晶 本社接,片,其包括一基底及一形成於基底上之發 =’I光結構包括—第―型半導體 — =:=型相反之第二型半導體層以及-二二 声^體層之間之活性層’第—型半導體 :一 / θ及第二型半導體層沿遠離基底之方向排列,笋 =極體晶片具有複數個側面;⑻於發光二極體晶片之基"uniqUe fhite LED Packaging Systems" published at the conference. As shown in FIG. 6, a typical white light emitting diode 6A includes a pedestal 62, a light emitting diode wafer 64, and a transparent package 66 doped with a phosphor. The LED wafer 64 is hermetically sealed by the pedestal 62 and the transparent package (10). Since the side surface of the light-emitting diode chip 64 and the front side (ie, the upper surface) have light emission, the light emitted from the side surface is different from the light intensity of the light emitted from the front side and penetrates the transparent package 66 of the doped phosphor material. The difference in optical path length is large, which will cause the white light color generated by the conversion of the fluorescent substance to be uneven, resulting in limited application of the white light emitting diode. SUMMARY OF THE INVENTION Hereinafter, a white color uniform color and a method of fabricating the same will be described by way of examples. Nine is equipped with a white light emitting device, which comprises: a light emitting diode chip, a camp 200913314 200913314 light material layer and a reflective layer. Luminescence - the light-emitting structure on the substrate, the external light I consists of - the substrate and the - and the --type semi-conducting =:: including: the first-type semiconductor layer, the second layer of the semiconductor layer And an active layer between the first-type semiconductor layer and the first-type abundance layer, the direction of the second layer: the semiconductor layer and the second-type semiconductor layer are separated from the substrate by the semiconductor sound, and at least one groove is formed on the surface To expose at least a portion of the substrate of the portion-type == body wafer, the side surface is light. A reflective layer is formed on a plurality of sides of the light emitting diode chip to surround the light emitting diode wafer. (10) _ shirt, (4) (4): (4) providing a substrate, a film comprising a substrate and a substrate formed on the substrate = 'I optical structure including - the first type semiconductor - =: = opposite type of the second type semiconductor layer and - an active layer between the two acoustic layers - a type semiconductor: a / θ and a second type of semiconductor layer arranged in a direction away from the substrate, a bamboo shooter = a polar body wafer having a plurality of sides; (8) a light emitting diode chip Base

Hi成至少—凹槽以暴露出部分第一型半導體層;(Ο於 :“凹槽内形成一螢光物質層;以及⑷於發光二極體 日日片之设數個側面上形成一反射層。 相對於先前技術’該白光發光裝置藉由於發光二極體 曰曰^设數個側面形成反射層且將螢光物質層設置於發光 曰片之基底的至少—凹槽内;一方面側面漏光現象 "17制,另一方面發光二極體晶片所發出之光被集中 200913314 .到其上表面射出而使得其穿過螢光物質層之光程可大致相 同’從而可使得白光發光裝置之出絲色均勻。 【實施方式】 下面將結合附圖對本發明實施例作進一步之詳細說 日月。 、’。 參見圖1至圖3’本發明實施例提供之一種白光發光裝 置100’其包括一個發光二極體晶片12〇、一個螢光物質層 140以及一個反射層160。 該發光二極體晶片120包括一個基底122、一個n型半 導體層124、一個與n型半導體層124導電類型相反之p 型半V體層126、以及一位於n型半導體層124與p型半導 體層126之間之活性層125。該n型半導體層124、活性層 125及ρ型半導體層126通常構成一發光結構。該發光: 極體晶片120具有複數個侧面127。 該η型半導體層124、活性層125及ρ型半導體層 配置於基底122上且沿遠離該基底122之方向排列。該η 型半導體層124、活性層125及ρ型半導體層126均可由氮 化物半導體材料,如二元、三元或四元氮化物半導體材料 製成。該活性層125通常為一多量子井結構(1^丨衍?16Hi forming at least a recess to expose a portion of the first type semiconductor layer; (": forming a phosphor layer in the recess; and (4) forming a reflection on the plurality of sides of the dipole of the light emitting diode Compared with the prior art, the white light emitting device forms a reflective layer by a plurality of sides of the light emitting diode and a phosphor layer is disposed in at least a groove of the base of the light emitting chip; The light leakage phenomenon "17 system, on the other hand, the light emitted by the LED chip is concentrated 200913314. The optical path of the upper surface is emitted so that its light passage through the phosphor layer can be substantially the same 'so that the white light emitting device can be made The embodiment of the present invention will be further described in detail with reference to the accompanying drawings. FIG. 1 to FIG. 3 is a white light emitting device 100' provided by the embodiment of the present invention. The invention comprises a light emitting diode chip 12, a phosphor layer 140 and a reflective layer 160. The light emitting diode chip 120 comprises a substrate 122, an n-type semiconductor layer 124, and an n-type half. The bulk layer 124 has a p-type half V body layer 126 of opposite conductivity type and an active layer 125 between the n-type semiconductor layer 124 and the p-type semiconductor layer 126. The n-type semiconductor layer 124, the active layer 125 and the p-type semiconductor layer 126 A light-emitting structure is generally formed. The light-emitting body 120 has a plurality of side faces 127. The n-type semiconductor layer 124, the active layer 125, and the p-type semiconductor layer are disposed on the substrate 122 and arranged in a direction away from the substrate 122. The n-type semiconductor layer 124, the active layer 125, and the p-type semiconductor layer 126 may each be made of a nitride semiconductor material such as a binary, ternary or quaternary nitride semiconductor material. The active layer 125 is typically a multi-quantum well structure ( 1^丨衍?16

Quantum Well Structures,MQWs)。於一實施例中,該 η 型半導體層124及ρ型半導體層126可分別為η型氮化鋁 銦鎵(n-type AlInGaN)半導體層及ρ型氮化鋁銦鎵(p—type A1 InGaN)半導體層。 基底122上形成有一個凹槽128以暴露出部分n型半 200913314 圭者,η型半導體層124之位於凹槽說 :路/叹置有—透光之電流擴散層⑵⑹汀㈤ =Τ: 2所示)。凹槽128為-錐形凹槽, 其側壁為一斜面。凹槽128的鄰 口比其遠離η型半導體層124之1 ^導體層124之開 ,丄、#咖 之開口小。凹槽128的鄰近n ^體層124之開口的面積小於n型半導體層i24之鄰 近基底122的表面之面積。另外,可理解的是,凹槽⑽ 圖2所示之錐形凹槽,其還可為彻 Ϊ 方形凹槽,其側壁為垂直面。凹槽128 之冰度通常設置為小於或等於4〇〇微米。 =122可選為金屬及金屬合金、半 =,其巾,半導體可_(Sl)或碳切( 緣體可為氧化辞⑽)、二氧化石夕⑽2)、氧化鑭 氧化鎂(_或藍寳石(Sapphire)等。⑷當基底 料為金屬或金屬合金時’該基底⑵與η型半導體声124 形成歐姆接觸而可作為W發練置⑽ ,請之正電極(圖未示)則可設置於二= 層之遠離基請之—侧;該正負電極用於向發= 12〇提供電能;且於此情形下,該凹槽128之側 :射W具有光反射特性。㈦當基底a〗之材 ;斗為透光絶緣體化,由於基底 100之負電極(圖未示)通常需a ^ "毛光裝置 離基底122之-側,i正:^Γ導體層124之遠 導體層則可設置於p型半 丞甩之一側。(C)當基底122之材料 200913314 為半導體時,白光發光裝置100之負電極可為一與基底122 形成歐姆接觸之金屬電極(圖未示),其正電極(圖未示)則 可設置於P型半導體層之遠離基底122之一側。 螢光物質層140填充於發光二極體晶片12〇之基底122 上之凹槽128内,用於波長轉換以形成白光。具體的,該 螢光物質層14〇可為一填滿凹槽128之固化的螢光物質膠 體,其遠離η型半導體層124之一侧的表面優選為一平面二 及螢光物質層140主要由至少一種可吸收發光二極體晶片 120所發出之光的螢光物質及一透光樹脂構成;該透光樹脂 可選用黏性較好之矽樹脂(S i 1丨cone )。例如,當發光二極 體晶片120所發出之光為藍光時,該螢光物質層14〇中可 包含一種可吸收藍光而受激發出黃光或兩種可吸收藍光而 文激分別發出綠光及紅光之螢光物質;當發光二極體晶片 120所發出之光為紫外(uv)光時,該螢光物質層14〇中可包 含三種可吸收紫外光而受激分別發出紅光、綠光及藍光之 螢光物質。 · 反射層160形成於發光二極體晶片12〇之複數個側面 127上以%繞該發光一極體晶片120。反射層之設置可 防止發光二極體晶片120所發出之光從其複數個側面127 出射’進而避免側面漏光現象之發生。該反射層16〇可為 金屬或介電材料(Dielectric Material)。其中,介電材料 可為氮化矽(SiNx)或二氧化矽。 本發明第一實施例中之白光發光裝置1〇〇,其藉由於發 光二極體晶片120之複數個側面127形成反射層160且將 200913314 營光物質層140設置於笋弁_竑辨曰μ ι〇λ 凹槽m内.一方^ 〇的基底122之 内曰,方面側面漏光現象被有效抑制,另—方面 ^-極體4所發出之光㈣中到其上表 其穿過螢光物質屛夕土扣π, ^ 来梦番少山土大致相同,從而可使得白光發 光裝置之出光顏色均勻。 ’見圖4本發明第—實施例中之凹槽m並不限於一 個’其可設置為複數個,例如四個。圖4 ' 呈陣列式規則排佈,該四個凹槽128之鄰近 :: 口之總面積小於或等於n型半導體魏之= 抵的表面之面積。 、十-白2圖卜3及5 ’本發明第二實施例提供—種製作前 先裝置100之方法,該製作方法包括以下步驟: ::220:提供一發光二極體晶片’其包括—基底及形 =於基底上之-發光結構;該發光二極體晶片m包括複 固則面127。具體的,該發光結構通常包括n型半導體層 124、ρ型半導體層i26及位於η型半導體層124鱼ρ型 導體層126之間活性層125;η型半導體層124、活性層125 財導體層126沿遠離該基底122之方向形成於基底 22上。該發光結構可經由分子束蠢晶生長法㈤^心 eamEpUaxy)、有機金屬化學氣相沈積法等化學或物理方 式磊晶生長於基底122上。 步驟240:於發光二極體晶片之基底上形成至少一個凹 槽=暴露出部分該發光結構。具體的,經由飿刻、機械加 工或雷射加工等方式於該基纟122上形成至少一個凹槽 11 200913314 '.12 8以暴露出部分該私古&士 > 么7構之η型半導體層124。a中, -所採用之银刻方式可選用幹法餘刻方式,如電感式輕合等 離子體-反應離子㈣(iG卜RiE)等、或濕絲刻方式,如 光增強(Photo-Enhanced)化學蝕刻等。 體的步=於該至少一個凹槽内形成-榮光物質層。具 體的’可c括以下步驟:於該至少一個凹槽128内充填並 佈滿登光物質膠體;去除充填後多餘之螢光物質膠體以使 該營光物質膠體之遠離該n型半導體層124之表面= 吏 面;以及固化該螢光物質膠體以形成螢光物質層140。 :驟280··於該發光二極體晶片之該複數個側面⑻ 上形成一反射層。呈的,·^土4<> 極體晶mx縣奸光遮蓋物保護發光二 127妙”“㈣丄^ 晶片120之複數個侧面 ,…、、後利用光丰鍍膜技術於該發光二極體晶片1 複數個側面127上沈積一;5惠+@ 1 ftn. & ^ 裝置⑽。沈積反射層亂進而獲得-白光發光 可選的’於步驟_執行之前,還可包括步驟(圖未 不).將該發光二極體晶片12G之與其基底122相對的一側 與-個載板接合(Bonded)或黏貼(mc)unted)在—起,以有效 避免該發光二極體晶片120於形成該至少-個凹槽128 ’的 過程中因可能產生之應力而導致之破損,進 光裝置100之製作良率。 穴开臼尤土 可選的,於步驟執行之前,還可包括步驟(圖未 不於該發光二極體晶片12kn型半導體層124之位於 該至少-個凹槽128位置的暴露部分形成一 電 12 200913314 流擴散層123。 另外,本領域技術人員可理解的是,第一及第二實施 例中之發光二極體晶片12〇中的n型半導體層124與p型 半導體層126並不限於前述位置配置,該n型半導體層與p , ^ 佚位直弟一貫她例之白光發光裝置100 之製作方法中,亦可一次提供複數個形成於單一晶圓 (wafer)上之複數個發光二極體晶片,並且上述至少一個凹 槽以及螢光物質層之形成步驟相應地於該晶圓切割之前進 行;而反射層之形成步驟則通常係於該晶圓切割後進行。 綜上所述,本發明確已符合發明專利之要件,遂依法 提出專射請。惟,以上所述者僅為本發明之較佳實施方 式丄自不能以此限制本案之申請專利範圍。舉凡熟悉本案 技#之人士援依本發明之精神所作之等效修飾或變化,皆 應涵蓋於以下申請專利範圍内。 【圖式簡單說明】 圖1係本發明實施例提供之一種白光發光裝置之截面 不意圖。 圖2係圖1所示白光發光裝置之俯視示意圖。 圖3係本發明另一實施例提供之一種白光發光裝置之 俯視不意圖。 圖4係本發明再一實施例提供之一種白光發光裝置之 截面示意圖。 圖5係本發明第二實施例提供之一種白光發光裝置之 製作流程框圖。 ' 义 13 200913314 圖6係一種典型之白光發光二極體之截面示意圖。 【主要元件符號說明】 白光發光裝置 100 基底 122 電流擴散層 123 η型半導體層 124 活性層 125 Ρ型半導體層 126 複數侧面 127 凹槽 128 螢光物質層 140 反射層 160 白光發光二極體 60 基座 62 發光二極體晶片 64 透明封裝體 · 66 14Quantum Well Structures, MQWs). In one embodiment, the n-type semiconductor layer 124 and the p-type semiconductor layer 126 are respectively an n-type aluminum indium gallium nitride (n-type AlInGaN) semiconductor layer and a p-type aluminum indium gallium nitride (p-type A1 InGaN). ) a semiconductor layer. A recess 128 is formed on the substrate 122 to expose a portion of the n-type half 200913314. The n-type semiconductor layer 124 is located in the recess. The path/sigh is provided with a light-transmitting current diffusion layer (2) (6) Ting (5) = Τ: 2 Shown). The groove 128 is a tapered groove whose side wall is a sloped surface. The opening of the recess 128 is smaller than the opening of the conductor layer 124 of the n-type semiconductor layer 124. The area of the opening of the recess 128 adjacent to the n^ body layer 124 is smaller than the area of the surface of the n-type semiconductor layer i24 adjacent to the substrate 122. In addition, it can be understood that the groove (10) has a tapered groove as shown in Fig. 2, which may also be a rectangular groove having a side wall which is a vertical surface. The ice of the groove 128 is typically set to be less than or equal to 4 microns. =122 can be selected as metal and metal alloy, half =, its towel, semiconductor can be _ (Sl) or carbon cut (edge can be oxidized (10)), dioxide (10) 2), yttrium oxide magnesia (_ or blue Gemstone (Sapphire), etc. (4) When the base material is a metal or a metal alloy, the base (2) forms an ohmic contact with the n-type semiconductor sound 124 and can be used as a W (10), and the positive electrode (not shown) can be set. The two positive and negative electrodes are used to supply electric energy to the hair = 12 ;; and in this case, the side of the groove 128: the light W has a light reflection characteristic. (7) When the base a The material is transparent, because the negative electrode of the substrate 100 (not shown) usually needs a ^ " the light device is away from the side of the substrate 122, i is: the far conductor layer of the conductor layer 124 Then, it can be disposed on one side of the p-type semiconductor. (C) When the material 200913314 of the substrate 122 is a semiconductor, the negative electrode of the white light emitting device 100 can be a metal electrode that forms an ohmic contact with the substrate 122 (not shown). A positive electrode (not shown) may be disposed on one side of the P-type semiconductor layer away from the substrate 122. The phosphor layer 14 0 is filled in the recess 128 on the base 122 of the LED substrate 12 for wavelength conversion to form white light. Specifically, the phosphor layer 14 can be a solidified fill filled with the recess 128. The surface of the light substance colloid, which is away from the side of the n-type semiconductor layer 124, is preferably a plane 2 and the phosphor layer 140 is mainly composed of at least one kind of fluorescent substance capable of absorbing light emitted from the LED chip 120 and a transparent material. The light-transmissive resin may be selected from a viscous resin (S i 1丨cone ). For example, when the light emitted from the LED chip 120 is blue light, the phosphor layer 14 The invention may comprise a fluorescent substance which can absorb blue light and is excited by yellow light or two kinds of absorbable blue light and excites green light and red light respectively; when the light emitted by the light emitting diode chip 120 is ultraviolet (uv) light The phosphor layer 14 可 may include three kinds of phosphors that absorb ultraviolet light and are excited to emit red, green, and blue light respectively. · The reflective layer 160 is formed on the plurality of LEDs 12 The light-emitting one-pole wafer 120 is wound around the side 127 at % The reflective layer is disposed to prevent the light emitted by the LED chip 120 from exiting from the plurality of sides 127 thereof to prevent side leakage. The reflective layer 16 can be a metal or a dielectric material. The dielectric material may be tantalum nitride (SiNx) or cerium oxide. The white light emitting device 1 of the first embodiment of the present invention forms a reflective layer 160 by a plurality of side surfaces 127 of the light emitting diode chip 120. And the 200913314 camp light material layer 140 is placed in the groove m 竑 曰 曰 μ ι 〇 凹槽 m 凹槽 . . . 一方 一方 一方 凹槽 凹槽 基底 基底 基底 基底 基底 基底 基底 基底 基底 基底 基底 基底 基底 基底 基底 基底 基底 基底 基底 基底 基底 基底 基底 基底 基底 基底 基底 基底 基底 基底 基底 基底4 out of the light (4) to the above table, it passes through the fluorescent material, and the soil is π, ^, and the dreams are less than the same, so that the white light emitting device can make the light color uniform. Referring to Fig. 4, the groove m in the first embodiment of the present invention is not limited to one, and it may be provided in plural, for example, four. Fig. 4' is arranged in an array pattern, and the total area of the adjacent ports of the four grooves 128 is less than or equal to the area of the surface of the n-type semiconductor. The tenth embodiment of the second embodiment of the present invention provides a method for fabricating a pre-device 100, the method comprising the steps of: ::220: providing a light-emitting diode wafer 'which includes- Substrate and shape = light-emitting structure on the substrate; the light-emitting diode wafer m includes a cured surface 127. Specifically, the light emitting structure generally includes an n-type semiconductor layer 124, a p-type semiconductor layer i26, and an active layer 125 between the n-type semiconductor layer 124 and the fish p-type conductor layer 126; an n-type semiconductor layer 124, an active layer 125, and a financial conductor layer 126 is formed on substrate 22 in a direction away from the substrate 122. The light-emitting structure may be epitaxially grown on the substrate 122 by chemical or physical means such as molecular beam growth (e.e., eamEpUaxy) or organometallic chemical vapor deposition. Step 240: Forming at least one recess on the base of the light emitting diode wafer = exposing a portion of the light emitting structure. Specifically, at least one groove 11 200913314 '.12 8 is formed on the base 122 by means of engraving, machining or laser processing to expose part of the n-type of the private & Semiconductor layer 124. a, - the silver engraving method can be selected by dry method, such as inductive light-converging plasma-reactive ion (IV) (iG Bu RiE), or wet silk engraving, such as photo-enhanced Chemical etching, etc. Step of the body = forming a layer of glory material in the at least one groove. Specifically, the method may include the steps of: filling and filling the at least one groove 128 with the phosphor of the phosphor; and removing the excess phosphor of the phosphor after filling to move the colloid of the camping material away from the n-type semiconductor layer 124. Surface = ruthenium; and the phosphor of the phosphor is cured to form a layer of phosphor material 140. Step 280: forming a reflective layer on the plurality of sides (8) of the LED substrate. Presented,·^土4<> Polar body crystal mx county rape cover protects the light two 127 wonderful"" (four) 丄 ^ a plurality of sides of the wafer 120, ..., and then use the Guangfeng coating technology on the light-emitting diode One side of the body wafer 1 is deposited on the side 127; 5 Hui + @ 1 ftn. & ^ device (10). Depositing the reflective layer to obtain a white light illuminating optional 'Before the step _ is performed, a step (not shown) may be included. The side of the light emitting diode wafer 12G opposite to the substrate 122 and the carrier plate Bonded or embossed (mc) unblocked to effectively prevent the light-emitting diode wafer 120 from being damaged due to possible stress during the formation of the at least one groove 128'. The yield of the device 100 is good. Optionally, before the step is performed, the step may further include: forming an electric portion of the exposed portion of the at least one groove 128 of the 12kn-type semiconductor layer 124 of the LED chip. 12 200913314 The flow diffusion layer 123. Further, it will be understood by those skilled in the art that the n-type semiconductor layer 124 and the p-type semiconductor layer 126 in the light-emitting diode wafer 12 of the first and second embodiments are not limited. In the foregoing positional arrangement, the n-type semiconductor layer and the method of fabricating the white light-emitting device 100 of the example of the present invention can also provide a plurality of light-emitting diodes formed on a single wafer at a time. The polar body wafer, and the step of forming the at least one recess and the phosphor layer is performed before the wafer is cut; and the step of forming the reflective layer is usually performed after the wafer is cut. The present invention has indeed met the requirements of the invention patent, and has been specifically requested by law. However, the above description is only a preferred embodiment of the present invention, and the scope of the patent application of the present invention cannot be limited thereby. The equivalent modifications or variations of the present invention in the spirit of the present invention are intended to be included in the scope of the following claims. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross section of a white light emitting device according to an embodiment of the present invention. Figure 2 is a top plan view of a white light emitting device shown in Figure 1. Figure 3 is a plan view of a white light emitting device according to another embodiment of the present invention. Figure 4 is a white light according to still another embodiment of the present invention. Fig. 5 is a block diagram showing the manufacturing process of a white light emitting device according to a second embodiment of the present invention. 'Yi 13 200913314 Fig. 6 is a schematic cross-sectional view of a typical white light emitting diode. Description] White light emitting device 100 Substrate 122 Current diffusion layer 123 η-type semiconductor layer 124 Active layer 125 Ρ-type semiconductor layer 126 Complex side 127 Groove 128 Fluorescent material layer 140 Reflective layer 160 White light emitting diode 60 pedestal 62 Light-emitting two Polar Wafer 64 Transparent Package · 66 14

Claims (1)

200913314 、 '十、申請專利範圍: h一種白光發光裝置,其包括: 二發光二極體晶片,其包括—基底及—位於基底 ^該發光結構包括-第-型半導體層、-與該第 *體層導電類型相反之第二型半導體層以 . 型半導體層與該第二型半導妒屏於°亥弟— 半導體層、該活❹及層,該第-型 , 層及該弟二型半導體層沿遠離該基底之 2 形成有至少一凹槽以暴露出部分該第 —整朵物所1 k么光—極體晶片具有複數個側面; 至少一凹样内,田 該發先二極體晶片之該基底的該 — " 用於波長轉換以形成一白光;以及 二二;形成於該發光二極體晶片之該複數個側面上 衣,兀該發光二極體晶片。 2.如申請專利節 少—凹槽係為錐形凹样、^述之白光發光裝置’其中該至 大於並槽,其郇近該第一型半導體層之開口 …第—型半導體層之開口。 • 申睛專利範Jfl笛1 κ 少—凹# 第1項所述之白光發光裝置,其中該至 4. 如:C:或等於_微米。 少—_ 1乾圍第1項所述之白光發光裝置,其中該至 光二極tr該第—型半導體層㈣口之面積小於該發 積。—之該第~型半導體之鄰近該基底的表面之面 5. 如申請專利範圍 光物質層填滿該至少返之白光發光裝置,其中該營 凹槽’且其遠離該第一型半導體層 15 200913314 之表面係為—平面。 專利&㈣5項所述之白光發光裝置,其中該螢 '貝層為—固化之螢光物質膠體。 申請專利範圍第1項所述之白光發光裝置,其中該反 、k之材質為金屬或介電材料。 」如申%專利耗圍帛1項所述之白光發光裝置,其中該第 一1半^體層之位於該至少—凹槽位置之暴露部分設置有 一可透光之電流擴散層。 9·如申明專利圍第i項所述之白光發光裝置,其中該基 底之材質係為半導體或透光絕緣體。 1〇.如申請專㈣圍第1項所述之自光發光裝置,其中該基 底之材質為金屬或合金。 ⑴如申請專㈣圍第丨項所述之白光發光裝置,其中該發 光二極體晶片所發出之光的波長為紫外光至綠光。 12.如申睛專利範圍第丨項所述之白光發光裝置,其中該第 :型半導體層、活性層及第二型半導體層分別由氮化物半 導體材料製成。 13·種白光發光裝置之製作方法,其包括步驟: 提供-發光二極體晶片’其包括—基底及—形成於該基底 上之一發光結構,該發光結構包括一第一型半導體層、— 與該第一型半導體層導電類型相反之第二型半導體^以及 一位於該第—型半導體層與該第二.型半導體層之間^活性 層,該第一型半導體層、該活性層及該第二型半導體層沿 遠離該基底之方向排列,該發光二極體晶片具有複數二: 16 200913314 、-面, 、於二極體晶片之該基底上形成至少-凹槽且暴露出 部为該第一型半導體層,· 於該至少—凹槽内形成一螢光物質層;以及 於該發光二極體晶片之該複數個側面上形成—反射層。 14.如申請專利範圍第13項所述之白光發光裝置之製作方 法’其中於該至少一凹槽内形成該榮光物質層之 以下分步驟: 於談至少一凹槽内充填並佈滿一螢光物質膠體; 去除充填後多餘之螢光物質膠體以使該螢光物質膠體之遠 離該第一型半導體之表面為一平面;以及 固化該螢光物質膠體以形成該螢光物質層。 15.如申請專利範圍第13項所述之白韻光裝置之製作方 法,其中該反射層储由光學_之方式形成於該發光二 極體晶片之該複數個侧面上。 16·如申請專利範圍第13項所述之白綺光裝置之製作方 法,其中於該基底上形成該至少一 令i 时斗。 u h之刖,還包括步驟: 將該發光二極體晶片之與1該美庙如 人七 /、/、这基底相對的一側與一載板接 5或黏貼於起。 如申請專利範圍第!3項所述之白光發光裝置之製作方 法,其中於形成該螢光物質層之前還包括步驟. 於該第一型半導體層之位於該至· / w僧位置的暴露部分 幵’成一可透光之電流擴散層。 18.如申請專利範圍第13項所述之白光發光裝置之製作方 17 200913314 、 法,其中該至少一凹槽係藉由姓刻、機械加工或雷射加工 . 方法形成。 18200913314, '10. Patent application scope: h A white light emitting device comprising: a two-emitting diode wafer comprising: a substrate and a substrate; the light emitting structure comprising a --type semiconductor layer, - and the * a second type semiconductor layer of opposite conductivity type of the bulk layer and a second type of semiconductor layer and the second type of semiconductor layer, the active layer and the layer, the first type, the layer and the second type semiconductor The layer is formed with at least one groove along the 2 away from the substrate to expose a portion of the first-whole material. The polar body wafer has a plurality of sides; in at least one of the concave samples, the first diode The substrate of the wafer is used for wavelength conversion to form a white light; and 22; the plurality of side tops of the light emitting diode chip are formed on the light emitting diode chip. 2. If the patent application is small, the groove is a concave concave shape, and the white light emitting device is described as being larger than the parallel groove, which is close to the opening of the first type semiconductor layer... the opening of the first type semiconductor layer . • The application of the patented model Jfl flute 1 κ 少—凹# The white light emitting device of item 1, wherein the to 4. For example: C: or equal to _ micron. The white light emitting device of the first aspect, wherein the area of the photodiode tr of the first type semiconductor layer (four) is smaller than the volume. a surface of the first-type semiconductor adjacent to the surface of the substrate 5. The photo-material layer fills the at least white light-emitting device, wherein the battalion groove 'and away from the first-type semiconductor layer 15 The surface of 200913314 is - plane. The white light emitting device of the above-mentioned item, wherein the firefly 'bean layer is a solidified colloidal phosphor. The white light emitting device of claim 1, wherein the material of the reverse and k is a metal or a dielectric material. The white light emitting device of claim 1, wherein the exposed portion of the first one-half body layer at the at least one groove position is provided with a light-transmissive current diffusion layer. 9. The white light emitting device of claim i, wherein the material of the substrate is a semiconductor or a light transmitting insulator. The self-light-emitting device of the above-mentioned item (4), wherein the material of the substrate is a metal or an alloy. (1) The white light emitting device of claim 4, wherein the light emitted from the light emitting diode chip has a wavelength of ultraviolet light to green light. 12. The white light emitting device of claim 2, wherein the first semiconductor layer, the active layer and the second semiconductor layer are respectively made of a nitride semiconductor material. 13. A method of fabricating a white light emitting device, comprising the steps of: providing a light emitting diode wafer comprising: a substrate and a light emitting structure formed on the substrate, the light emitting structure comprising a first type semiconductor layer, a second type semiconductor opposite to the conductivity type of the first type semiconductor layer; and an active layer between the first type semiconductor layer and the second type semiconductor layer, the first type semiconductor layer, the active layer and The second type semiconductor layer is arranged away from the substrate, and the light emitting diode chip has a plurality of: 16 200913314, a surface, and at least a groove is formed on the substrate of the diode wafer and the exposed portion is formed. a first semiconductor layer, a phosphor layer is formed in the at least one recess; and a reflective layer is formed on the plurality of sides of the LED wafer. 14. The method of fabricating a white light emitting device according to claim 13, wherein the step of forming the luminescent material layer in the at least one recess is as follows: filling at least one groove and filling a firefly a colloid of the light substance; removing the excess phosphor of the phosphor after filling to make the surface of the phosphor colloid away from the surface of the first type semiconductor; and curing the phosphor of the phosphor to form the layer of phosphor. 15. The method of fabricating a white light optical device according to claim 13, wherein the reflective layer is formed by optical means on the plurality of sides of the light emitting diode chip. The method of fabricating a white light device as described in claim 13, wherein the at least one time bucket is formed on the substrate. After the step, the method further includes the step of: attaching or bonding the side of the light-emitting diode chip to the substrate opposite to the base of the temple. Such as the scope of patent application! The method for fabricating a white light emitting device according to any of the preceding claims, wherein the step of forming the phosphor layer further comprises the step of: forming an opaque portion of the first type semiconductor layer at the exposed portion to the / w僧 position Current spreading layer. 18. The method of fabricating a white light emitting device according to claim 13, wherein the at least one recess is formed by a method of surname, machining or laser processing. 18
TW96134524A 2007-09-14 2007-09-14 White light emitting device and method for making same TWI377707B (en)

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