200904592 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種供基板在各製程穩固定位的設備 ，特別是指一種可適用多尺寸基板的夾持承載設備。 【先前技術】 液晶顯示器在array、cell、m〇dule各段生產檢測或 修補製程中，都需利用一夾持承載設備將各種基板加以固 疋，且為了適應不同尺寸的基板，夾持承載設備也大多為 可調整。 如圖1及圖2所示，現有一種液晶基板夾持機構（申 請案號第92222351號專利案），包含—基座i、四組設置在 該基座1上的滑軌2及四可分別於該等滑軌2上滑移的滑 動座3。該等滑軌2是兩兩相對地呈十字狀延伸。該等滑動 座3各具有一定位件301及一固定部302，該等滑動座3利 用該等定位件301纟同夹固-液晶基板4，且以該固定部 302定位該等滑動座3於該滑軌2之預定位置。 雖然，這種液晶基板夾持機構利用該等滑動座3可沿 該等滑執2滑動，以適用於各種尺寸的基板，但實際使= 時會有下列缺失： 一、 當不同尺寸之液晶基板4欲放置在該等滑動座3 上時，必須分別調整各滑動座3的固定部3〇2，不僅操作相 當繁複、麻煩’且調整之速度緩慢 '效率差。 二、 該液晶基板4入料前，必須操作該等滑動座3對 應於該液晶基板4的長寬尺寸，再操作軸設在該等滑動座 200904592 的夕數調整件5，使得多數卡抵件6相對於各滑動座3的定 位件3〇1下降’且當該液晶基板4跨設在該等卡抵件6上 後’操作者又必須分別轉動該等調整件5，促使卡抵件6相 對於定位件3〇1才目對靠近並夾固該液晶基板4,因此，該液 晶基板4入料定位、移出操作都相當麻煩，產能低。此外 ’該等滑# 2是m設在該基座丨上無法位移，阻礙了由底 部對液晶基板4作業（例如f射修補缺陷點）的可行性。 【發明内容】 因此，本發明之-目的，即在提供一種利用自動化操 作以適用不同尺寸基板且入料快速、定位性佳、產能高之 可適用多尺寸基板的夾持承載設備。 本發明之另-目的，即在提供一種可由底部對基板作 業且可適用性廣泛之可適用多尺寸基板的夾持承載設備。 於是，本發明可適用多尺寸基板的夹持承載設備的一 態樣，包含-機架、-設置在該機架的夾持單元及一設置 在該機架的支樓單心該夹持單元具有—定位組及二對應 該定位組且彼此相對設置㈣制組，該定位組與該等夾制 組配合以供該基板三個側邊沿水平方向抵靠定位。該支撑 單π疋由多數支撐件共同界定出—沿水平設置且供承載該 基板的承托面，該等支撐件可沿垂直方向相對於基板產生 昇降’以及沿水平方向相對於該機架產生位移，以相對於 該基板改變支撐位置。 本發明可適用多尺寸基板的夾持承載設備的另一態樣 ’包含一機架、—設置在該機架的夾持單元及-設置在該 7 200904592 機架的支撐單元。該夾持單元具有一可定出一基準線之定 位組、二對應該定位組的夾制組及一與該定位組相對設置 =推抵組，該基準線是沿一第一方向延伸且供該基板抵靠 定位，該等夾制組各具有一沿一垂直於該第一方向的第二 方向延伸的橫桿、多數安裝在該橫桿上的夾桿及多數固設 在該橫桿上且可驅動該等夾桿沿第一方向移動的壓力缸， β亥等夾桿各具有一夾制部，該等夾制部可沿該第一方向對 該基板夾制定位，該推抵組具有一與該基準線配合以使基 板沿第二方向定位的推抵件。藉此，利用該夾持單元及該 支撐單元的配合，可供不同尺寸之基板快速定位，且基板 入料及移出快速、可提昇產能。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效，在 以下配合參考圖式之二個較佳實施例的詳細說明中，將可 清楚的呈現。 在本發明被詳細描述之前，要注意的是，在以下的說 明内容中’類似的元件是以相同的編號來表示。 如圖3〜圖5所示，本發明可適用多尺寸基板的夾持承 載设備較佳實施例，包含一機架1〇、二組設在該機架1〇的 導軌20、二設置在該機架的螺桿3〇、一設置在該機架 1〇的夾持單元40、一設置在該夾持單元40的支撐單元50 。且該夹持承載設備可供液晶顯示器各段生產、品質檢測 或修補製程中的各種基板之用，以下說明將以一液晶基板 100的修補製程為例，該液晶基板1〇〇具有平行設置的一第 200904592 -、二長侧邊12〇、13()及銜接於該第—、二長側邊12〇、 130之間的一第-、二短側邊14〇、14〇，，且其令三個周角 處各設有-歸零記號15G、15G，、15G”（見圖7)，並在機架 10底部設有一移載單元60及一雷射發射單元7〇。 該機架1G是以多數框桿u構成矩型立方框架狀，並具 有一頂部12及一設於該頂部12下方的底部13，該頂部Η 具有一對應進料方向的第一侧彡14 &一與該第一侧邊Μ 相反設置的第二側邊15 ’該第一、二侧邊14、15是沿一第 方向X延伸。另外，在該第一、二側邊14、Η之間又具 有第端16及一與該第一端部16相反設置的第二端 部17。 該等導軌20是呈長桿狀，分別組設在該機架ι〇的第 一、二側邊14、15 ’且由該第—端部16沿該第—方向乂延 伸至該第二端部i 7。 該等螺桿30分別設置在該機架1()的第―、二側邊14 、15且沿該第—方向χ延伸。 °亥夾持單元40是設置在該機架1〇的頂部12，並具有 一定位組41、對應該定位組41的-第-、二夾制組42、 43及-與蚊位組41相對設置的推抵組44。 =疋位組41具有—固設在該機架1G的第二側邊15的 疋木411四支固設在該固定架411頂端且沿一垂直於該 第，^向Χ的第二方向Υ延伸的^位桿412及多數軸設在 等定4杯412末端底部的滾輪413，且該等滾輪413的外 側周緣共同界疋出—供該液晶基板100第-長側邊120抵 200904592 罪定位的基準線L(如圖6所示），亦即，該基準線l是沿 該第—方向X延伸，且相切於該等滾輪413的外周緣上。 該第一、二夾制組42、43分別對應於該第一、二端部 16、17,並各具有二可分別沿該等導軌2〇滑動的滑座421 、431、一連接在該等滑座421、431間且沿該第二方向γ 延伸的橫桿422、432、多數間隔設置在該橫桿422、432上 的夾桿423、433、多數固設在該橫桿422、432上且可驅動 該等夾桿423、433沿第一方向X移動的壓力缸424、434 及二組設在該等滑座421、431内部且螺合該等螺桿3〇上 的伺服驅動器425、435。該等夾桿423、433的末端各設有 一以滾輪為例的夾制部426、436，該等夹制部似、㈣沿 該第一方向X共同對該液晶基板1〇〇第一、二短侧邊14〇、 140’夾制定位（如圖7所示）。200904592 IX. Description of the Invention: [Technical Field] The present invention relates to a device for stably holding a substrate in each process, and more particularly to a clamping and carrying device that can be applied to a multi-size substrate. [Prior Art] In the production inspection or repair process of array, cell, and m〇dule, the liquid crystal display needs to be fixed by a clamping carrier device, and the carrier device is clamped to accommodate different sizes of substrates. Also mostly adjustable. As shown in FIG. 1 and FIG. 2, there is a liquid crystal substrate clamping mechanism (Application No. 92222351), comprising: a base i, four sets of slide rails 2 and four respectively disposed on the base 1 a sliding seat 3 that slides on the rails 2. The slide rails 2 are oppositely extended in a cross shape. Each of the sliding bases 3 has a positioning member 301 and a fixing portion 302. The sliding bases 3 are clamped together with the liquid crystal substrate 4 by the positioning members 301, and the sliding portions 3 are positioned by the fixing portions 302. The predetermined position of the slide rail 2. Although the liquid crystal substrate clamping mechanism can be slid along the sliding handles 2 by the sliding seats 3 to be applicable to substrates of various sizes, the following defects are actually caused by the following: 1. When different sizes of liquid crystal substrates are used 4 When placing on the sliding seats 3, it is necessary to adjust the fixing portions 3〇2 of the respective sliding seats 3, which is not only complicated, troublesome, and the speed of the adjustment is slow, and the efficiency is poor. 2. Before the liquid crystal substrate 4 is charged, the slide holders 3 must be operated corresponding to the length and width dimensions of the liquid crystal substrate 4, and the operation axis is disposed on the plurality of adjustment members 5 of the sliding seats 200904592, so that most of the card offset members are 6 is lowered relative to the positioning member 3〇1 of each sliding seat 3 and after the liquid crystal substrate 4 is straddles the card-receiving members 6, the operator must respectively rotate the adjusting members 5 to urge the engaging members 6 The liquid crystal substrate 4 is approached and clamped with respect to the positioning member 3〇1. Therefore, the liquid crystal substrate 4 is relatively troublesome in feeding and removing operations, and the productivity is low. Further, the sliders #2 are m which are not displaceable on the susceptor, and the possibility of the bottom portion working on the liquid crystal substrate 4 (for example, repairing defective spots) is hindered. SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a clamping carrier device that can be applied to a multi-size substrate that utilizes an automated operation to accommodate substrates of different sizes and that is fast in feeding, good in positioning, and high in productivity. Another object of the present invention is to provide a clamping carrier device that is applicable to a multi-size substrate that can be used from a bottom to a substrate and that is widely applicable. Thus, the present invention is applicable to an aspect of a clamping and carrying device for a multi-size substrate, comprising: a frame, a clamping unit disposed in the frame, and a support unit disposed in the frame of the frame. The positioning group and the two pairs of positioning groups are disposed opposite each other (4), and the positioning group cooperates with the clamping groups to position the three sides of the substrate in a horizontal direction. The support π 共同 is jointly defined by a plurality of support members—a support surface disposed horizontally and for carrying the substrate, the support members being capable of lifting and lowering relative to the substrate in a vertical direction and generating a horizontally relative to the frame Displacement to change the support position relative to the substrate. Another aspect of the present invention that is applicable to a multi-size substrate holding carrier device' includes a frame, a clamping unit disposed in the frame, and a support unit disposed in the 7200904592 frame. The clamping unit has a positioning group that can define a reference line, a clamping group of two corresponding positioning groups, and a set opposite to the positioning group=pushing group, the reference line extends in a first direction and is provided The substrate is positioned against each other, and the clamping groups each have a crossbar extending in a second direction perpendicular to the first direction, a plurality of clamping rods mounted on the crossbar, and a plurality of fixing rods fixed on the crossbar And a pressure cylinder capable of driving the clamping rods to move in the first direction, wherein the clamping members each have a clamping portion, and the clamping portions can position the substrate along the first direction, the pushing group There is a pusher that cooperates with the reference line to position the substrate in the second direction. Thereby, by using the cooperation of the clamping unit and the supporting unit, the substrates of different sizes can be quickly positioned, and the substrate can be quickly loaded and removed, and the productivity can be improved. The above and other technical contents, features and effects of the present invention will be apparent from the following detailed description of the preferred embodiments of the invention. Before the present invention is described in detail, it is to be noted that in the following description, similar elements are denoted by the same reference numerals. As shown in FIG. 3 to FIG. 5, the present invention is applicable to a preferred embodiment of a clamping and carrying device for a multi-size substrate, comprising a frame 1 〇, two sets of guide rails 20 disposed on the frame 1 、, and two The screw 3 of the frame, a clamping unit 40 disposed at the frame 1 , and a supporting unit 50 disposed at the clamping unit 40. The clamping carrier device can be used for various substrates in the production, quality inspection or repair process of the liquid crystal display. The following description will take a repair process of a liquid crystal substrate 100, which has parallel arrangement. a second and second long sides 12〇, 13() and a first and second short sides 14〇, 14〇 connected between the first and second long sides 12〇, 130, and At each of the three corners, there are - zero mark 15G, 15G, 15G" (see Fig. 7), and a transfer unit 60 and a laser emitting unit 7 are provided at the bottom of the frame 10. 1G is formed by a plurality of frame rods u in a rectangular cubic frame shape, and has a top portion 12 and a bottom portion 13 disposed below the top portion 12, the top portion Η having a first side 彡 14 & The first side edge 15' is opposite to the second side 15'. The first and second side edges 14, 15 extend in a first direction X. In addition, there is another between the first side, the two side edges 14, and the first side edge The first end 16 and a second end portion 17 opposite to the first end portion 16. The guide rails 20 are formed in a long rod shape and are respectively assembled on the frame. The first and second sides 14, 15' of the ι〇 extend from the first end portion 16 along the first direction to the second end portion i7. The screws 30 are respectively disposed on the frame 1() The first and second sides 14 and 15 extend along the first direction. The clamping unit 40 is disposed at the top 12 of the frame 1 and has a positioning group 41 corresponding to the positioning group 41. - the first and second clamping groups 42, 43 and - the pushing group 44 disposed opposite to the mosquito bit group 41. The = clamping group 41 has a coffin 411 fixed to the second side 15 of the frame 1G Four rods 412 fixed on the top end of the fixing frame 411 and extending along a second direction perpendicular to the first direction, and a plurality of shafts 413 disposed at the bottom end of the four cups 412, and The outer circumference of the roller 413 is commonly drawn out—a reference line L (as shown in FIG. 6) for the first long side 120 of the liquid crystal substrate 100 to be located at 200904592, that is, the reference line 1 is along the first The direction X extends and is tangent to the outer circumference of the rollers 413. The first and second clamping groups 42, 43 respectively correspond to the first and second end portions 16, 17 and each has two along the Equal guide 2 Sliding slides 421, 431, a cross bar 422, 432 connected between the slides 421, 431 and extending along the second direction γ, a plurality of clips 423 spaced apart from the cross bars 422, 432, 433, a plurality of pressure cylinders 424, 434 fixed on the cross bars 422, 432 and driving the clamping rods 423, 433 to move in the first direction X, and two sets of screws disposed inside the sliding blocks 421, 431 and snails The servo drives 425 and 435 of the screw 3 are coupled to each other. The ends of the clamping rods 423 and 433 are respectively provided with a clamping portion 426 and 436 which are exemplified by rollers. The clamping portions are similar to (4) along the first The direction X collectively positions the first and second short sides 14A, 140' of the liquid crystal substrate 1 (as shown in FIG. 7).
該推抵組44具有二組設在該機架1〇頂部12且沿該第 一方向X延伸的導引件441、一與該等導引件441平行設置 的螺桿442、一可驅動該螺桿442轉動的馬達442，、一可沿 該等導引件441且受該螺桿442驅動的定位座443、一安裝 在該定位座443上的z向壓力虹物、—設置在該定位座 443下方且受該Z向慶力缸蝴驅動可沿—垂直於該第一、 一方向X、Y的第二方向z昇降的固定板445、一軸設在該 固定板445底部且沿該第二方向γ延伸的螺桿楊、一可驅 動該螺桿446轉動的馬達術、_螺設在該螺桿446上且受 該馬達447驅動可沿該第二方向γ移動的移動塊州、—安 裝在該移動塊448底部的驅動㈣梢，及—受該驅動麼虹 10 200904592 448連動的推抵件物，該推抵件物為兩個間隔設置的滾 輪。 °亥支撐單元50是設置在該機架10頂部12，並具有套 Λ荨導# 20上且位在該等夹制組間的一第一支撐 組51、—位在該第一支撐組51與該第二夾制組43之間的 第一支撐組52、一位在該第一支撐組51與該第一夾制組 42之間的第三支撐組53及一位在該第二支撐組52與該第 二夹制組43之間的第四支撐組54。 該第一、二、三、四支撐組51、52、53、54各具有二 可分別沿該等導軌20滑動的滑動塊511、521、531、541、 連接在該等滑動塊511、521、531、541間的支樓件512 、522、532、542、二組設在該等滑動塊 511、521、531、 541内部且螺合於該螺桿30上的伺服驅動器513、523、 533、543及二安裝在該等滑動塊511、521 ' 531、541與該 等支樓件512、522、532、542間的壓力缸514、524、534 、544 ’該第一、二、三、四支撐組51、52、53、54的支 撐件512、522、532、542都是沿該第二方向γ延伸且呈長 桿狀，且該等支撐件512、522、532、542受所對應的壓力 紅514、524、534、544驅動可沿第三方向ζ產生昇降。該 等支撑件512、522、532、542可共同界定出一沿水平設置 且可支樓該液晶基板100之修補面110的承托面55，並各 具有多數可對該液晶基板100吹氣或吸真空的氣孔56及多 數由一頂面凹設的凹槽57,該等凹槽57可供該等滾輪413 及失制部426、436穿過。 11 200904592 該移載單元6G是組設在該機架1G底部13，並具有一 i第方向X延伸的第一線性滑軌組6丨、一設置在該第 -線性滑軌組61上的滑板62、一組設在該滑板62且沿該 第二方向Y延伸的第二線性滑軌組63、—設置在該第二線 !·生/月執組63上的基座64…驅動該滑板62沿該第一方向 =相對於機架！〇移動的第一驅動組66、一驅動該基座料 沿該第二方向Y相對於該滑板62移動的第二驅動組67。 該雷射發射單元70是安裝在該移載單元6〇的基座料 上且位在該液晶基板100下方，受該第一、二驅動組66、 驅動可該第一方向X及第二方向γ相對於該液晶基板 100產生位移，並具有二對應該修補面urn且具有不同放大 倍率的攝影鏡頭71及二可發射不同光斑大小的雷射發射部 72 〇 該液晶基板100在進行修補之前，已預先經過前-工 作站的檢測，缺陷點座標也_址取得。再如3及圖6 所示，當欲對大尺寸（例如47时、37时）液晶基板剛進 行修補時’該夾持單元40的第_、二夾制組.Ο朝外 退移’利用機械手臂細將液晶基板刚送進該機架10頂 部12時’該液晶基板謂的第一長側邊12〇尚未抵靠定位 在該定位組的基準線L上’此時，該支揮單元5〇的氣 孔56吹氣，機械手臂200下降放片、移出。接著’如圖3 、圖5及7所示，該推抵組44的Z向Μ力紅444驅動該固 疋板445向下位移後’再利用該驅動· 448，驅動該推抵 件449推抵該液晶基板刚的第二長側邊13〇，且使液晶基 12 200904592 2 iu向移動’直到該第—長側邊⑽抵靠定位在該 基準線l上，繼續’該第一、二夹制組42、43分別向右、 ^立移’使得該等夾制部426、條夾持該液晶基板刚的 一短側邊140、140, ’隨即該驅動壓缸448,再驅動該 推抵件得往反方向退移，該Z向麼力紅444再驅動該固 疋板445向上昇起，再操作該支撐單元50的氣孔56吸真 空以固^該液晶基板刚’利用該移載單元⑽運載該雷射 發射單元70’以攝影鏡頭71讀取該液晶基板刚的歸零記 號150、150，、15〇，，後，就可依各缺陷點的座標位移，以雷 射發射部72對缺陷點逐一進行修補。再如圖3及8所示， 為了修補該第-、二、三、四支律組51、52、53、54對該 液晶基板刚遮蔽的部份，該第三、四支樓組Μ、％同時 破真空，並利用該屢力缸534、544驅動該支樓件532、M2 先下降再分別相對向内位移，再向上昇起頂持在液晶基板 100上後吸真空（此時，仍有該第一、二支撲組51、52對 液晶基板剛支撐）’之後，該第一、二支撐组51、52也 在破真空後，利用該壓力缸514、524驅動該支擇件512、 522先下降再分別相對向内位移，再向上昇起在液晶基 板⑽上後吸真空（此時，仍有該第三、四支撑组Μ、” 對液晶基板刚支揮），如此一來，即可利用該雷射發射部 72修補原先該第—、二、三、四支撐組5i、52 u所 遮蔽的區域。最後如圖3及圖9所示，該第三、四支撐組 53、54破真空後，利用該磨力缸別、5料驅動該支樓件 切、542先下降再分別相對向外位移，再向上昇起頂持在 13 200904592 f晶基板1〇0上（即回復至圖6、圖 一、二支揮組51、52也在破真空後’利用該壓力叙二 524驅動該支撐件512、522先下降再分 再向上昇起頂持在液晶基板上（即回復至圖/ ^移 原始位幻，且再操作該第一、二夹制，、圖7的 2:對-晶基…持，即可等待該機械手臂 3及圖10所示’當欲對中尺寸（例如…7 :==進行修補時，操作動作與圖6〜圖9類似 51、52對ρ 處僅在於：利用該第―、二支樓組 對液曰日基板刚就足以穩定支撐，而該第三、四支 並無作用’只會在該夹持單元4〇進行夾制、 釋放操作時，隨該第-、二夹制組42、43朝内 '外產生位 移。且為適用不同尺寸之液晶基板刚，該推抵組44可利 用^達447驅_ 446，可使移動塊蝴間接帶動推抵件 449沿第二方向Y位移。 因此，本發明之功效可歸納如下： 時，:用:=Γ:=:°欲人料至_10上 ^ 叉揮早π 50之支撐件512、522、532、542共 同界定出之承托面55’可在利用機械手臂2〇〇將該液晶基 板刚移人時獲得穩定支撐，且利肋失持單元扣的夹制 操作，即可使液晶基板1〇〇穩固、準確定位。在每一個液 晶基板1〇0執行完畢修補作業後，該夾持單元40都已呈朝 外退移狀態’相當方便機械手臂細將液晶基板謂移出 14 200904592 及再入料’因此，兮β S甘 u, Μ日日板100入料定位、移出操作都 相虽簡早、快速，可提昇產能。 觸沒有:死\支擇早70 50的輪替位移可使該液晶基板 ㊆’非常適合由底部進行雷射修補缺陷座標 點亦可適用於檢測工作站。 3)太路圖11所不（未見於圖11〜14之元件請配合參閱圖 3)’：發明的第二實施例與第一實施例的構成組件大致相 差異僅在於該支撐單元5〇僅具有一第一支樓組Μ 一第一支撑組52。且適用於對中、小尺寸（例如26忖 时）液晶基板刚進行修補，利㈣械手臂將液 晶隸刚送至該機架10頂部12，第一短側邊14〇尚未抵 靠疋位在該基準線L上，此時，該第_、二支撑組5U 對液晶基板刚產生支撐，且利用氣孔56吹氣，機械手臂 下降放片、移出。接著’如圖12所示，該推抵組料的 推抵件449推抵該液晶基板1〇〇的第二短側邊14〇，，且使 第-短側邊Η0抵靠定位在該定位組41的基準線l上，繼 續’該第-、二夾制組42、43向右、左位移，該等夾制部 426、436夾制在該液晶基板⑽第一、二長側邊12〇、13〇 後，該推抵組44隨即退移，再操作該第一、二支撐組51、 52的氣孔56吸真空以固定該液晶基板1〇〇’利用該 元60運載該雷射發射單元70，以攝影鏡頭71讀取該液晶 基板100的歸零記號150、15〇’、15〇，，後，就可依各缺陷= 的座標位移’以雷射發射部72對缺陷點逐一進行修補。 再如圖13所示，為了修補該第一、二支樓組51、52 15 200904592 2液晶基板】00遮蔽的部份，該第一支標組51破真, ^力虹514與動該切件512先下降再朝該第二支心 位移，再向上昇起頂持在液晶基板1〇〇上後吸真此 時，仍有該第二支律組52對液晶基板1〇〇支律第二 支揮組52也在破真空徭，去丨田麻 利用該壓力缸524驅動該支撐件 先下降再朝該第-切組51位移，再向上昇起頂持在 液晶基板⑽上後吸真空（此時，仍有該第-切组51對 液晶基板10G支樓），如此—來，即可利用該雷射發射部η 修補原先該第-、二支撐組51、52所遮蔽的區域。最後如 圖14所示’該第—、二支撑組51、52也在破真空後，利 用該壓力缸514、524驅動該支撐件512、522先下降再分 別相對向外位移，再向上昇起頂持在液晶基板ι〇〇上（即 回復至圖U、圖12的原始位置）’且再操作該第一、二夹 制組42、43向外移出，並取消對該液晶基板1〇〇的夾持， 即可等待該機械手臂200取片。 惟以上所述者，僅為本發明之較佳實施例而已，當不 能以此限定本發明實施之範圍，即大凡依本發明申請專利 範圍及發明說明内容所作之簡單的等效變化與修飾，皆仍 屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 圖1是現有一種液晶基板夾持機構的俯視示意圖； 圖2是沿圖1中之線H - Π的一剖面圖； 圖3是一立體組合圖，說明本發明可適用多尺寸基板 的夾持承載設備的一第一較佳實施例； 16 200904592 圖4是本發明上述較佳實施例之一俯視組合示意圖； 圖5是沿圖4中之線V -V的一剖面圖； 圖6是本發明上述較佳實施例之一操作示意圖，說明 中、大尺寸液晶基板以機械手臂移入一機架頂部； 圖7是本發明上述較佳實施例之一操作示意圖，說明 一夾持單7C對該液晶基板夾制、一支撐單元對液晶基板吸 真空固定； 圖8是本發明上述較佳實施例之一操作示意圖，說明 該支撐單元的支撐組位移以修補未能修補之區域； 圖9是本發明上述較佳實施例之一操作示意圖，說明 該支揮單元的支撑組破真空且回復至原位、夹持單元取消 夾制且以機械手臂取片； 輞作流程示意圖 圖1 〇是本發明上述較佳實施例之另神 ，說明適用於對一中尺寸液晶基板進行修補； =11是本發明之可適用多尺寸基板的夾持承載設備一 t較佳實施例的—操作示意圖，說明-中、小尺寸液晶 基板以機械手臂移入一機架頂部； 一 本發明第二較佳實施例之—操作示意圖，說明 真晶基板失制、一支揮單元對液晶基板吸 圖13是本發明第二較佳實施例之一 該支撐單元的；持痛作不意圖’說明 支=早疋的支撐組位移以修補未能修補之區域；及 圖14是本發明第二較 ^ ^. 佳實施例之一知作示意圖，說明 該支撐早兀的支撐組 圃口元月 具工且回復至原位、爽持單元取消 17 200904592 夾制且以機械手臂取片。 18 200904592 【主要元件符號說明】 100 · ·· …液日日基板 40…… …夾持單元 110 ···· …修補面 41…… …定位組 120… …第一長侧邊 411 ···· …固定架 130 ···· …第二長侧邊 412… …定位桿 140 …· …第一短側邊 413 .··. •滚輪 140,… …第二短側邊 42…… …第一夾制組 150… …歸零記號 421 ···· …滑座 150，… …·歸零記號 422 ··. …橫桿 150”…. …·歸零記號 423 ···· …夾桿 X....... …第 方向 424… •…壓力缸 Y....... …第二方向 425 ··.. …伺服驅動器 Z....... 第一方向 426… ••夾制σΡ L....... …基準線 43…… •…第二夾制組 10…… …機架 431… •…滑座 11…… …·框桿 432… …·橫桿 12…… …頂部 433… •…夾桿 13…… …·底部 434… …·壓力缸 14…… …·第一側邊 435… •…伺服驅動器 15…… •…第二側邊 436… •爽制部 16•… •…第一端部 44…·. •…推抵組 17···. •…第二端部 441… •…導引件 20•.… …·導執 442… …·螺桿 30···· …·螺桿 443… …·定位座 19 200904592 444 ·· …Z向壓力缸 532 ··· …支撐件 445 .··· …固疋板 533 ··· •…伺服驅動器 446 …· …螺桿 534… •…壓力缸 447 ··· …馬達 54…… .…第四支撐組 448 ·.·· …移動塊 541 ··· •…滑動塊 448’ … …驅動壓缸 542… …·支撐件 449 ·· …推抵件 543… …·伺服驅動器 50…… …支撐單元 544… •…壓力缸 51…… …第一支撐組 56…· …·氣孔 511 ···. …滑動塊 57·...· …·凹槽 512 · …支撐件 60··.· …·移載單元 513 ··· …伺服驅動器 61 ·.··· …·第一線性滑執組 514·". …·壓力缸 62••… •…滑板 52…… …第二支撐組 63•.… •…第二線性滑軌組 521… •…滑動塊 64••… …·基座 522… 支撑件 66·.... …·第一驅動組 523 ·· •…伺服驅動器 67 …·第二驅動組 524… •…壓力缸 70·...· …·雷射發射單元 53·‘··. •…第三支撐組 71 ····. •…攝影鏡頭 531… •…滑動塊 72•…· …·雷射發射部 20The pushing group 44 has two sets of guiding members 441 disposed on the top portion 12 of the frame 1 and extending along the first direction X, a screw 442 disposed in parallel with the guiding members 441, and a screw that can drive the screw a rotating motor 442, a positioning seat 443 that can be driven along the guiding member 441 and driven by the screw 442, and a z-direction pressure rainbow object mounted on the positioning seat 443, disposed under the positioning seat 443 And being driven by the Z-direction force cylinder, the fixing plate 445 can be raised and lowered along a second direction z perpendicular to the first direction, the first direction X, Y, and an axis is disposed at the bottom of the fixing plate 445 and along the second direction γ An extended screw yang, a motor that can drive the rotation of the screw 446, a moving block that is disposed on the screw 446 and driven by the motor 447 to be movable in the second direction γ, is mounted on the moving block 448. The bottom drive (four) tip, and the pusher that is driven by the drive of the rainbow 10 200904592 448, the pusher is two spaced rollers. The support unit 50 is disposed on the top portion 12 of the frame 10 and has a first support group 51 located on the sleeve guide 20 and located between the clamp groups, and is located at the first support group 51. a first support group 52 between the second clamping group 43 and a third support group 53 between the first support group 51 and the first clamping group 42 and a second support member A fourth support set 54 between the set 52 and the second set of clamps 43. The first, second, third, and fourth support groups 51, 52, 53, 54 each have two sliding blocks 511, 521, 531, 541 slidable along the guide rails 20, and are connected to the sliding blocks 511, 521, 531, 541 branch members 512, 522, 532, 542, two sets of servo drives 513, 523, 533, 543 disposed inside the sliding blocks 511, 521, 531, 541 and screwed onto the screw 30 And the first, second, third and fourth supports mounted on the sliding blocks 511, 521 '531, 541 and the supporting members 512, 522, 534, 542 The support members 512, 522, 532, 542 of the groups 51, 52, 53, 54 all extend in the second direction γ and have a long rod shape, and the support members 512, 522, 532, 542 are subjected to the corresponding pressure. The red 514, 524, 534, 544 drive can be raised and lowered in the third direction. The support members 512, 522, 532, and 542 can collectively define a support surface 55 that is horizontally disposed and can support the repair surface 110 of the liquid crystal substrate 100, and each of which has a plurality of air bubbles or can be blown to the liquid crystal substrate 100. The vacuum venting holes 56 and the plurality of recesses 57 recessed by a top surface are provided for the rollers 413 and the missing portions 426, 436 to pass therethrough. 11 200904592 The transfer unit 6G is a first linear slide group 6丨 disposed on the bottom 13 of the frame 1G and having an i-direction X extending, and is disposed on the first linear slide group 61. a slide plate 62, a set of second linear slide groups 63 disposed on the slide plate 62 and extending along the second direction Y, and a base 64 ... disposed on the second line! The skateboard 62 is along the first direction = relative to the frame! The first drive group 66 that moves, a second drive group 67 that drives the base material to move relative to the slider 62 in the second direction Y. The laser emitting unit 70 is mounted on the base material of the transfer unit 6〇 and located under the liquid crystal substrate 100. The first and second driving groups 66 are driven to drive the first direction X and the second direction. γ is displaced relative to the liquid crystal substrate 100, and has two pairs of photographic lenses 71 that have repaired surface urn and different magnifications, and two laser emitting portions 72 that can emit different spot sizes. Before the liquid crystal substrate 100 is repaired, The pre-work station has been tested in advance, and the defect point coordinates are also obtained. Further, as shown in FIG. 3 and FIG. 6, when a large-sized (for example, 47 o'clock, 37 o'clock) liquid crystal substrate is to be repaired, the first and second clamping groups of the holding unit 40 are retracted outward. When the mechanical arm feeds the liquid crystal substrate into the top 12 of the frame 10, the first long side 12 of the liquid crystal substrate is not yet positioned on the reference line L of the positioning group. At this time, the branch unit The 5 vents 56 are blown, and the robot arm 200 is lowered and released. Then, as shown in FIG. 3, FIG. 5 and FIG. 7, the Z-direction force red 444 of the pushing group 44 drives the fixing plate 445 to be displaced downward, and then the drive 448 is reused to drive the pushing member 449. Abutting the second long side 13〇 of the liquid crystal substrate, and moving the liquid crystal substrate 12 200904592 2 iu toward the top of the first long side (10) until the first long side (10) abuts on the reference line 1 The clamping groups 42 and 43 are respectively moved to the right, and the first clamping portion 426 and the strip sandwich a short side 140, 140 of the liquid crystal substrate, and then the driving cylinder 448 is driven to drive the pushing. The resisting member is retracted in the opposite direction, and the Z-direction force red 444 drives the fixing plate 445 to rise upward, and then the air hole 56 of the supporting unit 50 is operated to absorb vacuum to fix the liquid crystal substrate just using the transfer. The unit (10) carries the laser emitting unit 70' to read the zero-return marks 150, 150, and 15〇 of the liquid crystal substrate by the photographic lens 71, and then, according to the coordinate displacement of each defect point, the laser emitting unit 72 repaired the defect points one by one. As shown in FIGS. 3 and 8, in order to repair the first, second, third, and fourth branch groups 51, 52, 53, 54 which are just shielded from the liquid crystal substrate, the third and fourth branch groups are At the same time, the vacuum is broken, and the double-cylinders 534 and 544 are used to drive the branch members 532 and M2 to be lowered first and then displaced relatively inwardly, and then lifted up and held on the liquid crystal substrate 100 to absorb the vacuum (at this time, still After the first and second groups 51 and 52 are supported by the liquid crystal substrate, the first and second support groups 51 and 52 are also driven by the pressure cylinders 514 and 524 to drive the support member 512. 522 first descends and then moves inwardly relative to each other, and then rises up on the liquid crystal substrate (10) and then vacuums (at this time, the third and fourth support groups are still ”, "the liquid crystal substrate is just supported), thus The laser emitting portion 72 can be used to repair the area covered by the first, second, third, and fourth support groups 5i, 52u. Finally, as shown in FIGS. 3 and 9, the third and fourth support groups 53 are provided. After the vacuum is broken, 54 the mill is used to drive the branch to cut, and the 542 is lowered first and then displaced outwards respectively. Raising the top on the 13 200904592 f crystal substrate 1〇0 (ie, returning to FIG. 6, FIG. 1 and the second branch group 51, 52 are also under vacuum), using the pressure 252 to drive the support members 512, 522 First drop and then rise to the top of the liquid crystal substrate (ie, return to the image / transfer original position, and then operate the first, second clamping, Figure 2 2: p-crystal base... You can wait for the robot arm 3 and the figure shown in Figure 10. When the size is to be corrected (for example, when the repair is performed, the operation is similar to that of Fig. 6 to Fig. 9 and 51, 52 pairs of ρ are only used: ―, the second branch group is just enough to stabilize the support for the liquid helium substrate, and the third and fourth branches have no effect 'only when the clamping unit 4〇 is clamped and released, with the first -, The two clamping groups 42 and 43 are displaced inwardly. For the liquid crystal substrate of different sizes, the pushing group 44 can utilize the 447 drive 446 to enable the moving block to indirectly drive the pushing member 449 along the edge. The second direction Y displacement. Therefore, the effects of the present invention can be summarized as follows: When:: Use: = Γ: =: ° Desirable to _10 on ^ Fork SG 50 support 51 2. The support surface 55' jointly defined by 522, 532, and 542 can obtain stable support when the liquid crystal substrate is just moved by the robot arm 2, and the clamping operation of the rib loss unit buckle can be The liquid crystal substrate 1 is stably and accurately positioned. After each liquid crystal substrate 1〇0 performs the repairing operation, the clamping unit 40 has been retracted outwardly, which is quite convenient for the mechanical arm to finely remove the liquid crystal substrate. 200904592 and re-feeding 'Therefore, 兮β S Gan u, the daily positioning and removal operations of the daily board 100 are simple and fast, which can increase the production capacity. The touch is not: dead / support early 70 50 rotation displacement can make the liquid crystal substrate seven 'very suitable for laser repair defects from the bottom of the defect coordinates can also be applied to the inspection workstation. 3) The path of the slab is not shown in FIG. 11 (the components not shown in FIGS. 11 to 14 are referred to FIG. 3). The second embodiment of the invention is substantially different from the constituting components of the first embodiment only in that the supporting unit 5 is only There is a first branch group Μ a first support group 52. It is also suitable for repairing the liquid crystal substrate of medium and small size (for example, 26 忖), and the liquid (4) arm sends the liquid crystal to the top 12 of the frame 10, and the first short side 14 is not yet abutted. On the reference line L, at this time, the first and second support groups 5U are immediately supported by the liquid crystal substrate, and are blown by the air holes 56, and the robot arm is lowered and released. Then, as shown in FIG. 12, the pushing member 449 of the pushing material is pushed against the second short side 14〇 of the liquid crystal substrate 1〇〇, and the first short side edge 抵0 is positioned against the positioning. On the reference line l of the group 41, the 'the first and second clamping groups 42 and 43 are displaced to the right and left. The clamping portions 426 and 436 are sandwiched between the first and second long sides 12 of the liquid crystal substrate (10). After 〇, 13〇, the push group 44 is then retracted, and the air holes 56 of the first and second support groups 51, 52 are operated to vacuum to fix the liquid crystal substrate 1' to carry the laser emission by using the element 60. The unit 70 reads the zero-return symbols 150, 15〇', and 15〇 of the liquid crystal substrate 100 by the photographic lens 71, and then performs the defect points of the laser emission unit 72 one by one according to the coordinate displacement of each defect= repair. As shown in FIG. 13, in order to repair the portion of the first and second branch groups 51, 52 15 200904592 2 liquid crystal substrate 00, the first branch group 51 is broken, ^ Lihong 514 and moving the cut The member 512 first drops and then shifts toward the second center, and then rises up on the liquid crystal substrate 1 后 and then absorbs the truth. At this time, the second branch group 52 still has a law on the liquid crystal substrate. The two swinging groups 52 are also under vacuum, and the pressure is driven by the cylinder 524 to drive the support member to descend first and then to the first-cut group 51, and then lift up to the liquid crystal substrate (10) and then suck the vacuum. (At this time, the first-cut group 51 remains on the liquid crystal substrate 10G branch), so that the area covered by the first and second support groups 51, 52 can be repaired by the laser emitting portion η. Finally, as shown in FIG. 14 , after the vacuuming of the first and second supporting groups 51 and 52 is performed, the supporting members 512 and 522 are driven to lower and then respectively displaced outward and then rise upward. Holding on the liquid crystal substrate (ie, returning to the original position of FIG. U, FIG. 12)' and operating the first and second clamping groups 42, 43 to be removed outward, and canceling the liquid crystal substrate The clamping can wait for the robot arm 200 to take the piece. The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic plan view of a conventional liquid crystal substrate holding mechanism; FIG. 2 is a cross-sectional view taken along line H - 图 in FIG. 1; FIG. 3 is a perspective assembled view illustrating the application of the present invention. A first preferred embodiment of a multi-size substrate clamping carrier device; 16 200904592 FIG. 4 is a top plan view of a preferred embodiment of the present invention; FIG. 5 is a cross-sectional view taken along line V-V of FIG. Figure 6 is a schematic view of the operation of the above-mentioned preferred embodiment of the present invention, illustrating that the medium and large-sized liquid crystal substrate is moved into the top of a rack by a robot arm; Figure 7 is a schematic view of the operation of the preferred embodiment of the present invention, The clamping unit 7C clamps the liquid crystal substrate, and a supporting unit vacuums and fixes the liquid crystal substrate. FIG. 8 is a schematic view showing the operation of the supporting unit of the supporting unit for repairing the repaired portion. Figure 9 is a schematic view of the operation of the above-mentioned preferred embodiment of the present invention, illustrating that the support group of the support unit is broken and returned to the original position, the clamping unit is unpinned and the mechanical arm is used to take the piece; BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a further embodiment of the above preferred embodiment of the present invention, which is suitable for repairing a medium-sized liquid crystal substrate; and 11 is a preferred embodiment of the present invention. Example - operation diagram, illustrating - medium and small size liquid crystal substrate is moved into the top of a rack by a robot arm; a schematic diagram of the operation of the second preferred embodiment of the present invention, illustrating that the real crystal substrate is out of production, and a single unit is liquid crystal Figure 13 is a support unit of one of the second preferred embodiments of the present invention; the pain is not intended to illustrate the support group displacement of the branch = early repair to repair the unrepaired area; and Figure 14 is the first aspect of the present invention. Secondly, ^ ^. One of the best examples is a schematic diagram showing that the supporting group of the support group has a working month and returns to the original position, and the cooling unit is cancelled 17 200904592 and is taken by a mechanical arm. 18 200904592 [Description of main component symbols] 100 · ···Liquid day substrate 40...Clamping unit 110·····Repairing surface 41... Positioning group 120... First long side 411 ··· · Fixing frame 130 ····...Second long side 412... Positioning rod 140 ...·...First short side 413 . . . . • Roller 140, ... second short side 42... ... A clamping group 150... zero return symbol 421 ···· ... slide 150, ... ... zero mark 422 ··. ... cross bar 150".... ... zero mark 423 ···· ... clamp bar X....... ...direction 424... •...pressure cylinder Y..........second direction 425 ··.....servo drive Z....... first direction 426... •• ΡσΡ L.............reference line 43... •...Second clamping group 10...rack 431... •...slide 11... ...·frame 432... Rod 12... top 433... • ... clamp bar 13... ... bottom 434... pressure cylinder 14... first side 435... • servo drive 15... • second side 436... • Cool Department 16•... • ...the first end portion 44...·....the push group 17···....the second end portion 441... • the guide member 20•....the guide 442...the screw 30···· ... screw 443... ... positioning seat 19 200904592 444 · · Z-direction pressure cylinder 532 ··· ... support 445 ...··· ... solid plate 533 ··· •... servo drive 446 ... ... screw 534... •...pressure cylinder 447 ···...motor 54............fourth support group 448 ····...moving block 541 ····...sliding block 448' ... drive cylinder 542... support member 449 · · ... pusher 543 ... ... servo drive 50 ... ... support unit 544 ... ... ... pressure cylinder 51 ... ... first support group 56 ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ·...·groove 512 · ...support 60······transfer unit 513 ···...servo drive 61 ·······first linear slip group 514·". Cylinder 62••... •...Slideboard 52.........Second support set 63•....•...Second linear slide set 521...•...Sliding block 64••... pedestal 522... Braces 66······················································································· ··•...Third support group 71·····....Photographic lens 531... •...Sliding block 72•...····Laser transmitting unit 20