TW200845274A - Reduced capacity carrier, transport, load port, buffer system - Google Patents

Abstract

In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.

Description

200845274 IX. INSTRUCTIONS OF THE INVENTION: TECHNICAL FIELD The embodiments of the present invention relate to substrate processing systems, and more particularly to substrate transport systems, loaders, conveyors for processing device interfaces, and their equipment. 'Prior art

The primary pressure to manufacture electronic devices is demand from consumers for higher functionality and smaller, lower cost electronic devices. This primary power creates the original pressure on manufacturers for miniaturization and improved manufacturing efficiency. The manufacturer will then seek revenue in all aspects. In the case of a conductor arrangement, the conventional manufacturing facility or FAB is provided with discrete processing means such as clustering means or the like in its body (or basic structural structure) for carrying out the semiconductor substrate - or multiple additions. The conventional FAB is then organized around the processing device to convert the semiconductor substrate into the intended electronic device. For example, the processing device can be arranged in a conventional FAB located in the garrison. The substrate between the devices can be supported by a loader such as a bribe or FOUP to maintain the substrate in process substantially as clean as in the device. The inter-device linkage is provided by a handling system (such as the Chemical Materials Handling System, AMHS) that can transport the two-plate loader to the intended processing equipment in the FAB. As an example, the interface between the system and the processing device can be roughly divided into two parts, which are used to load and unload the loader to the processing device between the device and the device; the material handling system; Devices and loaders and 1; there are a variety of traditional-interface systems. Many conventional 5 200845274 interface systems result in one or more processing device interfaces, loader interfaces or material handling system interfaces that have the added cost or the inefficiency of loading and unloading substrates in the processing device due to complexity. The following examples, which are described in detail, will overcome the problems of conventional systems.

Industrial trends indicate that future 1C device designs are approximately 45 nm or less. In order to increase efficiency and reduce manufacturing costs, 1C devices of this size must be fabricated using larger semiconductor substrates or wafers. Conventional FABs are generally capable of handling wafers of 200mm or 300mm. Industry trends indicate that in the future, FABs must be sufficient to handle wafers larger than 300 mm, such as 450 mm wafers. It is important to know that using larger wafers will result in longer processing times per wafer. Therefore, when using larger wafers such as wafers of 300 mm or larger, it is preferable to use a smaller batch size for wafer processing to reduce the processing workload (WIP) in the FAB. At the same time, smaller wafer batch sizes can be used for special batch processing of wafers of any size, or for planar boards such as flat panels for flat panel displays or any other substrate. While the reduction of WIP and efficient special batch processing is driven by its use, the use of smaller processing lots in the FAB has a negative impact on traditional FAB productivity. For example, in comparison to larger batch sizes, smaller batch sizes will increase the delivery system load of a specific capacity delivery system (transport wafer batch). As shown in Figure 51A. Figure 51A shows the relationship between the batch size and the delivery rate (expressed as the amount of movement per hour) for several different process rates (represented by the wafer start amount in a predetermined period such as monthly, such as WSPM). Figure 51A also shows the lines of the highest capacity of a conventional FAB operating system (e.g., approximately 6000-7000 movements per hour). Therefore, the intersection of the system capacity line and the FAB 200845274 rate curve can identify the surface of the effective batch size. For example, a particular conventional delivery system achieves a FAB rate of approximately 24,000 WSPM with a minimum batch size of approximately 15 wafers. Using smaller wafer batches will result in a lower FAB rate. It is therefore desirable to provide a system in which the wafer loader, the interface between the loader and the processing device, the loader transport system (the transporter in the FAB, the storage location, etc.) are designed for use. A minimum of one and a maximum expected wafer size will not adversely affect the FAB rate. SUMMARY OF THE INVENTION The present invention provides a semiconductor workpiece processing system, wherein the system is provided with at least one processing device for processing a semiconductor workpiece for supporting at least one semiconductor workpiece container for reciprocating the at least one processing device, and extending A first conveying portion that forms a traveling direction is formed. The first conveyor has a component that connects the containers to support and transport the container to and from the at least one processing device in the direction of travel. When the container is supported by the first conveying portion, it is continuously conveyed in the traveling direction at a substantially constant rate. A second conveyor is coupled to the at least one processing device to reciprocate the container to the at least one processing device. The second conveying portion is separated from the first conveying portion and connected to the first conveying portion to attach and detach the container from the member of the first conveying portion. Another embodiment of the present invention provides a semiconductor workpiece processing system. The system is provided with at least one processing device for processing semiconductor workpieces for supporting at least one container of semiconductor workpieces for reciprocating the at least one processing device. A first conveying portion that extends and forms a traveling direction. The first conveying portion has a member for connecting the container, and the supporting and conveying container reciprocates to the at least one processing device along the traveling side 200845274. The system has a second delivery portion coupled to the at least one processing device and a first delivery portion connecting the container between the at least one processing device and the first delivery portion. When the container is supported by the first conveying portion, it travels in a traveling direction at a substantially constant rate. The fixed travel rate of the container is substantially independent of the rate of connection between the second transport portion and the at least one processing device. [Embodiment]

The above and other features of the present invention will become more apparent from the detailed description of the appended claims. Maishen, 1st, the work piece loader 200 forms a compartment 2〇2 for loading the work item S in an environment isolated from the atmosphere of the restroom. The shape of the loader 200 shown in the above figure is illustrated by way of example only, and the loader in the modified aspect may have any other desired shape. The loader is finely accommodated - the E box 21G is in the face chamber' as shown in the figure to support the guard s in the loader. The E-box 210 generally has an elongate support 21 〇s (two are shown in the embodiment as an example) 'with a work piece support frame distributed thereon to provide a column or a stack of supports or brackets, as shown for individual One or more supports = attached to the loader structure, as will be described in more detail below. In the = aspect, the loader may not be equipped with each type, type: and: the carrier structure is a single structure. The work piece is shown as two = :! circle: 300 faces '200 coffee or any semi-conductor of the expected size and shape. = 显示 = display raster / reticle or flat screen or any other suitable item. The loader can be made smaller or smaller than the conventional project 13 or 25 wafers. The loader can be used to load a small amount or even a single - 8 200845274 ft, or can be made into less than ten work pieces. A suitable example of a capacity reduction loader similar to that of a loader 2 is described in the application No. 7,231 of the application for application of the application for the application of the application. reference. And the loader 200 Dream:: The appropriate example for reducing the loader's processing device (such as the semiconductor manufacturing buffer 'positioner, etc.) and the interface for the delivery system is described in the United States of America Patent application slaughter: /24/θ';^ ^ ^ ^ # ^ ^ ^ ^ ^ ^ ^ ^ (4) = Please ^ US special account request No. 11/211, 236, "transfer (four) machine, both of which are As a reference in this case, it is similar to the loader = 2: The appropriate example is described in _. 3 The application of the United States ί :=Γ ° / 697, 52δ, "automated material handling system,,,,,,,,, In this case, it can be seen that the similar two = provide a reduction in the amount of work in the FAB processing, because the shape = work completed. The larger ones wait for the other work pieces to be erroneous; the features in the 系 are especially for the small-capacity loader. 2: The features of the embodiment of the invention are equally applicable to the loading of any work piece within it, or 25 or any other The predetermined number of pieces: the loader 2° can be used as a loader with a bottom surface and a top surface opening. This embodiment is a vertical or z-axis setting' and in a modified version 200845274 The top and bottom surfaces can be oriented along any other axis. The bottom and bottom openings represent the opening 2G4 of the loader (moved by the loader: :::s move in and out of the room). The alignment is generally aligned with:::: The plane surface of the piece (this implementation is roughly the same as z The shaft pairing machine 200 is also shown as follows; generally has a bottom, = military box 212. When closed, the door is pinned and = or the bottom part = Π seal can be used for the room 2 ° 2 and the outside Isolation to maintain any desired isolation atmosphere, such as inert gas, or the door can be opened for work piece loading and unloading. Represents a detachable or removable piece when the loader is opened. The support frame is implemented as shown in Fig. 1: 'The cover phase 200 generally has a hollow portion (hereinafter referred to as an outer casing) 214 for receiving and arranging the inside of the toilet member' and the wall portion (cap/cover, etc.) 216. As will be described in more detail below, the wall portion 216 or outer casing 214 can function as a loader. The wall portion is mated with the outer casing to close the loader' and separate to open the loader. In an embodiment, the peripheral and wall portions are such as Metal such as alloys' or made by any suitable procedure

Stainless steel. The wall is made of apricots, 53⁄4 + A _ / Λ, and is made into a piece-shaped member (single structure). In & more sad, the loader housing is made of any other suitable material, including a suitable non-metallic material. The box 21 can be mounted to the wall 216' and can be mounted to the housing in a modified form. The box can be mounted to the enclosure or door for easy removal of the box or substrate in the loader when the door is opened. Although the wall portion 2i6 in the illustrated embodiment is provided on the top side of the outer casing, in a modified aspect, the load hood can have a configuration on the outer top side and the wall portion on the bottom side. In yet another embodiment, the outer casing has a detachable wall portion (i.e., a loader having a top surface and a bottom surface opening) on the top side and the bottom side of 10 200845274. In other variations, the detachable wall portion is attached to the side of the loader in the embodiment of the door system passive assembly (eg, substantially no between the starter door and the loader and the door and device interface) The moving parts or components of the switch between them will be described in detail below.

Referring to Figure 2A, the loader 200 is shown positioned at the device interface 2010 of a suitable processing device. The processing device is of any intended type, such as a sequencer, a stacker, or a device that can perform one or more processing operations, such as material deposition, lithography, reticle, etching, polishing, measuring, or having one or more A device such as a processing module or a chamber for loading a lock. At least part of the processing device has a controlled atmosphere, and the device interface 2〇1〇 can provide loading and unloading of the work piece between the device and the loader 200 without causing control of the device or the loader 2 atmosphere. In the embodiment, the 埠 interface has a mouth or opening 2 〇 12, and the substrate can be loaded into the processing device through the mortise, and is provided with a door, a cover or a detachable component. 14 to close the cornice. The removable component in the modified aspect can partially obscure the opening. The Fig. 2〇14 in Fig. 2A is shown in a closed and open state for illustration. In the embodiment shown in Fig. 2A, the bottom side of the loader is loaded (10) in the z-direction to be connected to the device 以下 which will be described below. The top side wall portion 216 is used as the door of the loader 2〇〇. For example, the wall portion 216 can be attached to the cardia and disassembled in conjunction with the removal of the cardia, such as into the tamper-evident device interface. Removal of the wall 216 will result in unloading from the loader: the workpiece mounted thereon and the work piece (for access by the work piece/automatic operation). Referring again to Fig. 1, the 支承11 200845274 210 having the opposite support 210S can provide the S-box over the side-side access surface 21〇A' (the two sides) for the automatic operation of the workpiece (see also And there are: 壬: box Γ 装 装 装 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The configuration is shown in the following figure. The device has more than one work piece to operate the automatic manipulator G16B to advance, such as in the over-exit zone 21GA, 210Β m, the device may have more or less The work will be used to advance the multi-faceted automatic control device of the e-box. The surface:: between the automatic control devices of the box. In addition, the box: the 垃, the car, the vertical device, the workpiece can be unloaded. When the door is returned to its closed position, the load can be closed to return the carrier wall portion 216 to the housing 214. Referring to Figure 2, another loader of the embodiment is shown. Device bee A Ρ bow door; 1 side. In this embodiment, loading The casing 214 of the machine is used as a device in the embodiment of the chest. The door of the device has a shape similar to that of the loader casing. _: is used to enclose the casing to prevent the inside of the device from being moved outward by the casing to be loaded by the top surface (ie,沿着 along the (1) Z direction Πΐ '2: ί loader system descends from the overhead conveyor system. At the opening, the system moves the door downwards ((-) ζ direction), for example, into the bottom of the bottom 2 (four) The outer casing 214 is removed from the loader. Here, the loader = opening 'where the loader door (ie, the outer casing 214) is attached to the bottom and opened by the downward movement of the loader. The opening σ of the loader will be revealed. The work in the g-box is in mi6. In this embodiment, the automatic control device will set 12 200845274 with the Z-axis freedom to advance the vertically arranged cassette holder or the work piece therein. In a variant, the outer casing 216 has an integrally formed counterpart, such as a beam-type counterpart for mating the cassette when the housing is removed. Figures 2A-2B show that the loader 200 can be a top opening and a bottom opening. In another variant, the outer shell and the wall Directional reversal (the outer shell is on the top side of the wall), the top opening of the loader system is similar to Figure 2B but is a mirror image (ie lifting the outer casing) and the bottom opening is similar to Figure 2 but opposite (ie lowering the wall down) Referring again to Figure 1, as previously discussed, the wall portion 216 and the outer casing 214 are of a passive construction and are not provided with a moving element such as a stop lock that will contaminate the clean space of the device or container when moved. For example, the wall and the outer casing may be magnetically locked to each other. The magnetic lock may have permanent or electromagnetic elements 226, 228 or a combination thereof to be disposed on wall portion 216 or outer casing 214 as needed to lock and unlock the wall and The magnetic lock can have a reverse magnetic element that can be switched (ie, turned on or off) when current is passed through. For example, wall portion 216 can include a magnetic element 228 (e.g., ferrous material) and housing 214 can have a magnetic switching element 226 that can be activated to lock and unlock the wall and outer casing. In the examples of the second and second examples, the magnetic components of the wall portion and the operative magnetic members of the outer casing are thicker. Also counted with the Tuen Mun " face 2〇1〇, 2〇1〇, the magnetic lock 2〇28,, 2〇26, with. Locking the loader door (wall or casing, see Figure )α) to the door causes the loader door to unlock from the rest of the loader. The magnetic lock between the wall and the external call in the change heart can have any other desired configuration. The loader in the embodiment shown in Fig. 23 may include a mechanical coupling element such as a pivot pin, a motor light coupler device or a shape memory device to couple the pair 13 200845274, and the σ j member 2030 to the cardia interface. And interlock the loader to the itching door interface. The device in the embodiment is disposed on the wall portion, and in the modified aspect, the device is locked to the outside. From the 24th, it is known that the pivoting device encloses the sealing interface between the wall portion of the unloading type 2 and the crucible to trap the potential particles generated by the operation of the device itself. The passive load «with the loader Η provides a vacuum-phase clean and washable loader. As mentioned before, 'the loader door and the bottom (ie the alcove 216 ^ seal (four) compartment. In addition, when the loader and the device are connected, for example, the loading rights group), the loader door and the bottom each have a sealing interface to carry the aircraft. The door (i.e., wall portion 216 or outer casing 214 in Fig. 1) is sealed from the bottom of the door loader. In addition, the crucibles and crucibles have a seal. (6)c shows a loader 22 similar to the loader 22〇. The embodiment is connected to the device, where the seals are: 'loader and loader, 222, loader and Mouthwash (10), Tuen Mun * Mouth and all: door = carrier door) form an X-shaped structure (see Figure / Figure for details). In the non-embodiment, the loader sealing interface is shown in the top opening to: the mouth: the second in the modified state has a plurality of openings in the second::: from the 2: r top r bottom) of the sealing interface _ What is properly configured, for example, the sealing interface surface of == can have a sealing structure of any shape: a curved shape. It is roughly a χ 成 岔 ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 The orientation is generally horizontal or vertical in the form of +. In the embodiment, the loader is thin, with a top opening (wall 216 is raised upwards f: and TP is used as bottom loading) The loader is shown as an example of the device. In the present embodiment, the outer casing 14 has a male seal " face 214 Γ-like chamfered sealing surface 221 (:,, a%, although illustrated on the outer casing The sealing faces 222C, 22 are substantially = in the case of a change: the sealing faces may have an angle formed thereon or other J to enhance the reading effect and the surface is generally beveled to form a substantially f-X seal In the embodiment, the wall portion 216 of the loader, the sealing interface 2161, and the arrangement (as in FIG. 3A) are substantially oblique cutters to form the sealing faces 22iCD, and 224CD, as shown in FIG. 3A. , opposite shell and wall sealing surface 221C' '221CD, is Complementarity to form a sealing interface 221' when the wall # and the outer casing are closed. The loader interface 214, the upper beveled surface 221C' is generally wedge-shaped to provide a wall portion 216' when seated on the outer casing (see figure). In addition, the loader door and the loader sealing interface 221 in the embodiment are positioned such that the weight of the wall portion 216 can increase the sealing force of the interface. It can be seen that the box in this embodiment The working piece is supported by the wall portion 216' and seals the loader door with the loader. As can be seen from the third drawing, the sealing faces 222C' and 224CD are provided with the sealing faces 222P', 224PD on the p and the pD. 'Interacting with each other. 帛3B_ shows loading ^) 〇 ' is located at the cornice, and the sealing portions 222, 224 are closed. When the sealing 邛 222, 224' is sealed, all external interfaces are isolated (ie, the outer surface is controlled) Or 1C; 200845274

Potential contamination from the inner chamber in the isolation chamber on the inside of the loader or unit. As can be seen from Figure 3, the portion 220 of the shape provides the best cleanliness as it will form a substantially zero loss volume interface. This means that when the loader door or the door is opened, the sealing portion 22 is sealed so that the sealed shape does not create a space for the exposed outer side (i.e., becomes the inner side). From Section 3C, it can be seen that when the card is removed, the unloader will not cause any front seal/outer side to be exposed inside the loader/machine. It can be seen from Fig. 3C that the top opening furnace of the loader door in this embodiment will cause the loader to grab the chamber 2G2, which is located in the wall portion 216 and supported by the lift box. The loading compartment 2〇2 is connected to the inside of the unit and can be installed with a systemic air circulation system (not shown), resulting in a Venturi flow in the loading chamber. In the present embodiment, the circulating air flow in the loader compartment is located below the work piece of the pure box (suspended from the wall portion 216'), the possibility of deposition of particles due to cyclic interference (deposited from the workpiece) Sex is the lowest. The actual _ middle' loader in Figure 3A-3C is thinned by a suitable lifting device and berthed in the shovel. Appropriate recording devices are provided on the loader and the lifting device to position the loader on the device and the casing is positioned at the cornice. In the variant, the loader is held in the mouth of the I-Taiwan. The loader door 216 can be locked to the card door 2214 by means of a magnetic lock 'mechanical interlock (e.g., a sealing interface between the electrodes) or a "suction suction" produced in the sealing interface between the tips. : 1 2214 can be turned on/off by the appropriate device of the pre-monthly f sensor (not shown) by the wide enough index box (similar to the first box) (see Figure 4). In the embodiment of the load carrier 300, the load 16 200845274 machine 300 is similar to the loader 200 but is reversed, and the outer casing 314 is located at the top of the wall portion 316. Similar to the loader, the loader is 'top open shell as the bottom of the fm The opening device is a door. The loader shown in this embodiment has a body-formed conveying assembly 300M. For example, the loader green (or wall) 314, 316 has a conveying motion support such as a roller or an open support. And the reaction member can be activated by a driver or a motor to allow the loader to self-propel within the FAB (ie, without the use of a separate conveyor). Figure 4 shows a loader that is not mounted on the load magazine 3010 (substantially similar to the aforementioned) 3〇〇 as an example. The loader (10) is mounted on the top of the top surface of the loader. The loader door 316 is disposed opposite to or adjacent to the interface (the interface) is formed in the clamshell 314 to form an interface with the crucible 314. The loader 300 also has a shape substantially as shown in FIG. 3B. The shape seal 22 〇, a similar three-way, four-way or five-way "crossover, type (or zero loss volume) seal portion 14A is not a cross-sectional view of the seal portion 32 of the embodiment. A four-way seal portion of a bottom opening structure of 320 is implemented substantially similar to the seal portion. Fig. 4B is a cross-sectional view showing the interface between the seal portions of the sealing portion of another embodiment. In this embodiment, the sealed portion 320' is substantially similar to the sealing portion 32A. The 4b interface is double, with support flanges/parts such as, coffee. In the example, the edge 32r can operate the wall portion 316'. For example, the flange can form a door contact surface with the loader door although the components of the embodiment are not formed, and the component is in contact with the door in the change of the sad sample) The magnetic lock 326M can be positioned to secure the wall portion 316' to the outer casing 314 when the loader door is closed. In addition, the part is similar, 17 200845274 can be stacked 槔Η 3 (magnetic lock 3_' in H4. The magnetic lock is used to lock the wall 316 to the door 3〇14 to provide loader door removal operation. The loader housing portion 326 is positioned to activate the door lock 3_ (to lock the wall portion 316 to the 璋H) such that the (four) portion 316, and the outer casing 314, the lock is substantially (four) unlocked/closed. Conversely, when The door 3014, when closed, the door lock 3〇4〇, the unlocking/locking may cause the (4) 316, and the outer casing 314, the 3 is thin and locked. In the embodiment, the outer casing side portion 328' is engageable. The positioning/centering position 3〇12C' of the mouth 3 team is positioned when the loader is configured. The shape of the outer side portion 328 of Fig. 4B is only illustrated as an example, and the loader in the variable separation may have Any pre-deficiency position. As mentioned above, the X-shaped configuration of the sealing portion 32〇 can eliminate the cleaning operation of the sealing interface in front of the loader door. The purification volume of the loose sealing interface is substantially zero (for example, 4B). In the embodiment shown in the figure, the cornice has a purification line side

3〇1〇A is any type of sealing interface or its intervening. Figure 4C shows another section of the loader farm interface of the other. In the embodiment, the loading "eight has a support portion 328" to provide the loader 300" sits on the loader door (wall portion 316,,) (The loading door door will be loaded ^^ will be loaded with the weight distribution door.) In the installation and maintenance of the solid i. With the loader door seal 32 Γ, the sealing contact is roughly == 5C picture shows similar to the loader 3〇〇 The loading machine is further matched with the same. The top of the loader of the present embodiment is the bottom and bottom shock type (as indicated by the arrow +Z in the figure) = 18 200845274 The carrier casing 31 The system is used for riding _. If the 320A is the so-called three-way merging, it is not sealed; the hoarding, with the aforementioned sealing parts 320, 22, has zero purification, line or loss of the body surface Interface

埠口 3012A 对埠门3014A).本实 , , 丨 323 323A Μ , 1 ή Δ oil ) In this practical example, Tuen Mun 3014 Α 与. For example, the outer casing 316 can be located in the Tuen Mun Gu Yu. In the embodiment, the volume of the outer casing 316A and the cardia 3014A is reduced to a minimum. A seal may be placed between the outer casing 316::== interface Μ / 4· ^ η. (not shown) to seal the interface between them. As shown in the 5th figure, the present embodiment has a real material to purify and load the loader and refer to the other interface b interface of the loader and the interface shown in Fig. 2(2) '22〇' and the second line' The embodiment shown is substantially similar (bottom loading / top opening, top loading / bottom opening). The sealing interface 220, 220 is a four-way sealing portion having a substantially "cross" shape or an X-shaped configuration (the interface 221 wall portion 216 is opposite the outer casing 214, the interface 222 is facing the outer casing 214, and the interface 223 is opening the door to the door. 2014 and interface 224 Tuen Mun to the wall called). As shown in Fig. 2, the sealing interface 222, 224 of the present embodiment is positioned (e.g., vertical) substantially parallel to the direction of relative movement of the interface surface (such as when the loader is loaded and when the door is closed). In other words, movement of the loader or loader door to the closed position will not result in a sealed closure. One or more surfaces y forming the sealing interface 222, 224 in this embodiment are provided with an activated seal such as an expansion seal, a piezoelectric start seal or a shape memory member, whereby the frictional contact without the sealing interface is required Can start 19 200845274 dynamic seal and close the sealing interface. The sealed construction is described by way of example only. Referring to Figure 1, the loader housing 214 has an outer support 240 to operate the loader. The illustrated support 240 is such as a handle, but can be made into other

Appropriate form. The supports 240 of the embodiment are attached to opposite sides of the outer casing and are isolated as much as possible to optimize the stability of the loader. More or less support can be provided in the variant. Referring to Figure 6A, the loader housing 220A is provided with an aperture or groove member, sheet or filter 26A near the bottom of the housing. The size and shape of the orifice or groove of the member is designed to slow or reduce the strength of the tube or vortex caused by the loader door opening. The change in the volume of the tube or the vortex mitigation element can be placed in any suitable position in the loader. The housing of the loader 200A is shown at the bottom for only three example descriptions, while the loader in the modified version is attached to the top. Additional space and/or piping (not shown) may be provided inside to facilitate the smoothing/laminar flow of the work piece in the device. Fig. 6B shows another loader 2_ of the embodiment. The loader 2 has a thermostat 25 〇 ^ to maintain the work piece in the cabin at a temperature different from normal temperature. For example, the conventional loader housing or wall portion 214, 216 has a thermoelectric module that is thermally coupled to the workpiece by, for example, "2" to cause the temperature of the workpiece to be heated/literated. The temperature of the workpiece, which is higher than normal temperature, will be removed from the loader by the heat drive for the moon (the_Wesis). In the modified aspect, any other expected microwave energy, etc., can generate static two around each work piece in the other four more aspects, because Ya Wangjing 1:% to repel water molecules and particles of steam 20 200845274

Without reference to the PCT box 21〇 in the 'Examples (may also refer to the first nest bracket 2_ to provide the work piece supported by the bracket 0: to the limit. Each bracket can be one or more outside the second Congzhi Composition). As shown in Fig. 1A, the t-supporting fiber t-piece is supported (four) for straddle mounting. Each bracket 21GV has a lifting table = 2 and the working piece s on the bracket provides a restricted perimeter. The lifting surface can be inclined (relative to the vertical plane) to form a positioning guide for the seated guard s: the second blocking is 1 with respect to the bottom surface of the workpiece. Beveled to ensure contact with the work-face, such as in the surrounding area. Variations = The housing can have any suitable t-configuration to form a passive workpiece limit. In the other-changing aspect, the outer casing is not provided with passive working parts. Refer to Figure 7A-7B's similar to the loader 2Μ shown in the second section. ~The actual loader 2G()C system respectively Shown in the off and on state. In this example, the positive box 21GB has a varying height. When the loader is turned off, the box 2_ has the lowest height, and when the loader door (wall part 2ΐ6Β) ▲, the gain can be expanded to the highest height. When the box is expanded from the lowest to the most H, the bevel angle between the work pieces/brackets of the E-box will increase and the ::loader height' will provide the maximum space between the work pieces when entering and exiting. In the example, the m-bearing 2 bile has a bellows structure. The support is made of aluminum foil or any other suitable material (e.g., shape memory material) that provides sufficient flexibility without joint engagement. As shown, the E-box support 21 200845274 is attached to the top opening of the loader wall 216 仏 loader at the top (as removed from wall 216B in Figure 7B) or at the bottom opening (like removal as shown in Figure 2B). The outer casing 214B) will cause the cassette (windbox) to support 21 〇 SB to expand under the force of gravity. The cassette bellows can be compressed by closing the loader door. As shown in Fig. 7c, the bellows 210SB has a work piece support 210VB on which the work piece can be placed. The workpiece support 21 in the embodiment is formed into a shape corresponding to the joint portion 210PB of the bellows, and maintains a substantially fixed radial position when the bellows expands/folds (thus preventing between the work piece and the work raft support) Relative radial movement). It can be seen that the bellows g box can be pressed so that the work piece in the g box is effectively clamped between the adjacent folds of the bellows. It can be seen that the upper side tight portion only contacts the periphery of the workpiece. As shown in Fig. 7B, one of the devices or loaders in the embodiment is a beam-transparent pairer 2〇6〇B or other suitable device to determine the position of the workpiece s when the II cartridge is expanded. The workpiece is automatically manipulated and installed. No sensor is also provided to detect the proximity of the workpiece to ensure proper positioning of the workpiece. As described in the rain, the load-carrying machine with passive loader door and seal = the direct interface of the vacuum chamber such as the load lock. Fig. 8 shows a vacuum carrier (shown as a load lock) of another embodiment, which is directly matched to the t-carrier. The loader shown in Fig. 8 is thin, and the two-character loader (10)' fan is roughly similar. The load lock in the embodiment and =: V10 can be used to open/close the door 4014, so that the loader H can be turned on/off in this embodiment, and the top/bottom box 21〇. In the second two:: "The low or minimum interpolator 410 designed to provide a load lock grab room is placed on the side of the load lock compartment 400C 22 200845274 side, and arranged along the load lock compartment to reduce the cabin and load In the embodiment, the positioner 410 has a driving portion 412 and a coupling portion 41. The driving portion 412 shown in the embodiment has a motor drive system with a Trent drive belt or a bolt driver for raising/lowering. Shuttle 416. In this embodiment, the coupling portion 414 is a magnetic coupling that couples the shuttle 4^ on the drive portion to the cardia 4014. The pedal has a magnetic member (permanent or electromagnetic) or is placed thereon. The magnetic material forms the inner portion 414i of the magnetic coupling. The magnetic f-portion portion 4141 of the door can also lock the door to the door frame 4012. For example, the door frame 4012 can have a suitable magnetic member (as shown in FIG. 2B). The magnetic member 2〇28, similarly) is arranged to cooperate with the operation of the magnetic portion/magnetic member 4141 on the card door and lock the door and the mouth when the door is in the closed state. In the embodiment, the frame is 埠^ The magnetic lock component can be coupled to the magnetic coupling 4 on the door 4014 141 cooperate with the operation. In the modified aspect, the magnetic coupling between the door and the drive, and the magnetic lock between the door and the door frame can have any configuration. As shown in Fig. 8, the cabin wall 400W will drive The portion 412 is internally isolated from the compartment 400C. In the altered sadness (see also Figures 18-19), the drive unit 412 is a linear motor (e.g., t" linear drainage motor, LIM), in the reaction section 4141 of the Tuen Mun 4014. The operation is performed to initiate the movement of the cardia. The LIM may also be disposed outside the wall of the chamber and is separated from the wall. In the embodiment shown in the figure, two parts; including the magnetic material part 4122, or permanent The magnetic member forms a safety lock to maintain the shackle 4 〇 14 when the cabin is electrically activated. In the modified state, the Optimum accumulator can be connected to the driving portion for desired control to lower the slamming door to the closed state. Sadly, it can be seen from Fig. 8 and Fig. 18_19 that the seal between the cardia and the frame of the door is provided in the embodiment so that the weight of the door helps to seal the face of the face 23 200845274. For example, the magnetic coupling portion 4141 can also load the card 4014 with loading The door 216 is interlocked with each other. For example, the loader door may be provided with a suitable magnetic member (such as a permanent magnetic member) or a magnetic material 228, when activated, with the coupling portion 4141 (including, for example, electromagnetic or The magnetic field of the variability electric field cooperates to lock the cornice and the loader door. In this embodiment, the movement of the card is guided by an introducer that is isolated from the compartment. For example, as shown In the embodiment, the bellows 4B is used to connect the cardia to the cabin wall and the cardia movement guide 4006 is isolated from the cabin. The introducer in this embodiment is generally a telescopic component. The introducer is made of a hollow cylindrical bellows and may have any suitable configuration in a modified form. In another variation, the positioner can also have any other contemplated configuration. For example, a suitable locating motor can be placed in the wall of the cabin, but is isolated from the interior of the cabin, as described in U.S. Patent Application Serial No. 1/624,987, the entire disclosure of which is incorporated herein by reference. The mechanical guidance of the cardia initiates the controlled movement of the cardia. Apply pressure to the bellows to help the door close. Wind If 400B / can also be used to surround control systems such as vacuum lines, and power/signal lines connected to the door. The trick in this embodiment is provided with a 埠 PD1 连接 connected to a vacuum source to form a chamber pump squat, as will be described below. Fig. 9 shows a loader 3_〇0' provided on the vacuum chamber 400 of another embodiment. As shown in the embodiment, the loader 300 is a bottom open loader (similar to the loader 300 of Fig. 3). In this embodiment, the door 4 〇H is lowered to the laboratory when it is opened. The positioner (not shown) is attached to Fig. 8 24 200845274 The magnetic lock assembly 4026 is a permanent magnetic or magnetic material. The coil element 4028 in the embodiment is provided in the cabin as an example. The coil component in the modified aspect is provided on the outer side. The wall of the cabin is isolated from the interior of the cabin. The coil element is serpent or static with respect to the door frame. # Expecting the magnetic of the low magnetic lock is similar to that shown in Figures 18-19, but is used to move the card downward. The cabin and the door have magnetic locks 4028', 4026 for locking the closed door to the cabin frame. The door frame of the embodiment has one or more coil elements 4028 formed as shown on the side of the door frame of the magnetic lock. The coil elements can be placed as desired and produce a magnetic field of the operable door lock assembly 4〇26. The force on the door and the easy movement of the door can reduce the magnetic field strength. The coil elements of the modified aspect are movable, such as a shuttle mounted to the drive system and a magnetic coupling between the trick and the positioner. In a variant, the magnetic lock is similar to the aforementioned locking of the loader door to the loader. The permanent magnetic member or magnetic material on the door 4014, which is activated by the magnetic lock on the door frame, can also provide a coupling with the positioner, which is similar to that shown in Fig. 8. The cabin of the actual example shown in Figure 9 also has a bellows and a door guide similar to that shown in Figure 8: the bellows can be pressurized to help raise the door and remain closed. , especially when the loader door and the box are located in Tuen Mun. In a variant, the cabin has a bellows without a door guide. Connect the vacuum to the door to start the chamber pump through the door and loader jaw interface. Therefore, in the embodiment shown in Fig. 8, the cabin pumping system is provided at the cardia. Referring again to Fig. 8, in the embodiment, a load lock chamber pump such as a loader connected to the grab chamber can be used, and the trick door is moved from the closed state by the positioner 41. As can be seen from Fig. 8, in the embodiment, the loading operation of the loading lock chamber of the vacuum 埠 PD10 25 200845274 through the door is passed through the loader door 216 to the door of the door to the door of the door through the loader door/ The suction flow of the loader gas will create a negative pressure at the interface to prevent contaminants from entering the chamber. Figure 1 shows another embodiment of the loading lock chamber extraction operation through the door 5014. In this embodiment, the door-to-loader door space 5430 and the loading of the loader compartment 2〇2 can be performed before the loading lock chamber is extracted. For example, it is possible to apply true = and to introduce the purifying gas into the space 5430 from the door to the stern seal (or the Xiang Shi # valve). The loader door 216 is cracked for loading the lock chamber to 5400 gas into the loader, or the loader 200 can be cleaned by means of a suitable valve. For example, a gas supply from a cabin (as indicated by the dashed line in Figure 1) can be supplied to the loader to introduce the expected gas sample into the loader track as shown in Figure 10A, showing the load lock compartment 54〇〇 and loading The door loader 2 and the load lock compartment 5400 have a through hole (or gas sample supply) 5440 disposed as desired in the load lock wall portion. Therefore, the purge line in the embodiment is used for the nailing, and the exhaust of the cabin can be independently performed without being affected by the loader door. The f U diagram shows an embodiment of the loader door 316A and the door 6414 having a relatively mechanical tamper lock to lock the loader door to the loader 3140 and lock the shackle to the cornice 6412 or the cabin. 64〇〇d. Loader 314D, loader door 316D, 埠6412 and 646414 are passive (without joint lock). In this embodiment, the positioner can be used for both z-axis adjustment of the door and Used to rotate the card (for example, along the Z axis) to engage/disengage the lock plate to the door and loader door. In a variant, the 2-axis movement of the door and the rotation can be provided by different drive shafts. The 12th and 12th drawings respectively show the bottom views of the loading 26 200845274 casing 314D and the loader door 316D. The 13A-13B diagrams show the top views of the (loading lock) compartment 6400 and the door 6414 of the door 6414, respectively. The bottom surface of the loader housing has an engagement piece/surface 360D joined to the loader door 316D by the engagement surface 362D. It can be seen that the engagement/disengagement between the engagement surfaces 360D, 362D can be achieved by loader-to-load loading. The rotation of the machine 314D is started. The rotation of the loader door is controlled by the trick. Provided by 6414, as will be described in more detail below. The engagement between the stern and the loader can be of any desired configuration. The loader door 3 16D has a concave/convex torque coupling location 365D to be associated with the loader door 6414T. The torque coupling member is mated. In the illustrated embodiment, the jaw 6412 and the flap 6414 have interlocking or mating faces that are substantially similar to the joints of the loader and the loader door. As shown in Figures 13A, 13B, the cornice There is a joint surface 6460 (e.g., inwardly projecting), and the flap 6414 has a complementary joint surface 6462 to overlap and engage the jaw surface 6460. Thus, it can be seen that the joint faces 3600, 3620, and 上 on the loader in the embodiment The joint faces 6460, 6462 on the mouth are disposed opposite each other for simultaneous engagement/disengagement between the loader and the loader door and the jaw and the sill during rotation of the cardia.

Figure 14 shows the load lock compartment 400E and the positioner 6410E and the loader 300E. The positioner in this embodiment is axially coupled in series with the load lock compartment. Similar to the compartments 200, 300, 3000, the compartment 300E of the embodiment shown in Fig. 4 has a vacuum compatible top or bottom open compartment similar to that previously described. Cabin 6400E is similar to the aforementioned cabin. Figure 15 shows a load lock compartment and loader 300C having a reduced extraction volume configuration. In the illustrated embodiment, loader door 316F has a loader housing 314F 27 200845274 350F and a bottom 32l door. As shown in Fig. 15, when the load seal 327GF (the seal portion (2)) is attached to the outer casing D. When the δ loader door is opened, the top seal carrier shell (for example, (4) W Ρ seal 35 Κ: is closed 35m. — ίσΡ 350f seat and seal on the surface of the loader seat. (4) Heart # 35〇F will load the cabin The chamber is isolated from the load lock, and the extraction volume can be reduced when the I-load lock chamber is vacuumed. -nrf 16B shows another loader 300G and load lock in the inbound and outbound positions respectively. The compartment is 64. The loader has a bottom wall ^16G, a ring portion 314G and a top wall portion η. Here, M: open ^ ^ 3UG or one or more portions are operated as loader doors. The bottom and bottom wall portions 316G, 314PD can be (four) in the same manner, and the moving portion 314G forming the door has a top and bottom seal 35 〇, 321 (} for the beginning, the top wall portion and the bottom wall portion. The compartment 64〇〇g has an opening 埠6402G, through which the loader 3〇〇g can be nested into the loading lock chamber. The loading lock chamber 64嶋 has a groove view to The loader door 314G is lowered to provide the access opening of the loader. The page of the loader is 314PD, which can be packaged and locked. Thereby the load lock gambling chamber is sealed and the extraction of the cabin is provided. A suitable lifter/positioner can be provided to raise/low loader door 314G. Figures 17-17C show another top seal loader 300H of another embodiment And loading the lock chamber 64〇〇H. The loader 3〇〇H is the top seal flange 314H and the side opening 304H (set along the loading and unloading edge of the workpiece). The top seal flange of the loader in the embodiment The 314η is seated and sealed to the edge 6412Η of the compartment 如 as shown in Figure 17. The loader door 314DR can be moved radially outward and rotated at 200845274 as shown by the arrow 第 in Figure 17C. The opening system is described with reference to the embodiment: a tank-to-center notch valve. Although used for example, as shown in Fig. 18, the portion is also suitable for a controlled atmosphere, but may be a chamber. The interior of the loading chamber is referred to in Figures 29A and 29B, and the schematic operating system 10, 10 is schematically illustrated in the automated material handling system shown in the first map... and in 2: compartments. The system unit 15 has one or more compartments arranging portions 35 for transporting the souls: The inter-flight transport system unit 2〇, the delivery machine. The interval =:=Γ configuration (in the text "between" - the word is usually _== group county] and "inside" - Lang Chang). Transportation system department 15, 20,25,35 ^Mountain h and the inner loop is nested together in another 钤, 广 25 35 ( ( 即 即 ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( : : : : : : : : : : : , flat display screen and the like, and / or its loader special + conductor manufacturing parts to high-speed transmission in and out of the addition to the processing facilities (4) continuous processing device 3G. In the variant, any suitable material can be transferred in the automated material handling system. The transport system 1 can also be used to guide the work piece from one transfer station to another. One of the implementations of an automated material handling system for transporting workpieces with compartments and internal branches is described in US Patent No. 97,528 and Authorized Document No. 390-011338-US (PAR) "Automated Material Handling System", which will be cited below as a reference for this case. The automated material handling system shown in Figures 29A and 29B is a representative construction of the structure, and the automated material handling systems 10, 10 can be placed in any suitable component to accommodate the processing facility. Process any desired layout of the compartment and/or tooling. As can be seen from Figure 29, the compartments 15 can be placed on either side and connected to each other by any number corresponding to one or more processing ports 20. The outer side of the change pattern or the inner part of the ^^(4) compartment, and the traversing part of it may be separated from the group or arrangement of the processing devices in the same compartment. Picture 29

The partition (four) conveying portion 15 in the embodiment may also be connected by the transfer branch 5〇 for the workpiece to be directly moved between the transport portions 隔 in the compartment without the need for the work or the process compartment 45. In another embodiment, the transport unit 互相 can be interconnected by means of an internal transport unit (not shown). In another change = 曰, as shown in Fig. 29, the inter-segment transport unit 15 can be disposed between any 45 compartments 45, thereby serving the central compartment or transporting the fork compartment servo compartment or device group. Central trunk road. In the alternative-changing aspect, any number of nested loops, 29B®-- such as the number of N systems (eg, 29A and

Offense:: 斤不不糸1〇 〇 1〇,) is connected in parallel by the transport unit = connection = compartment transport unit 15. In other variations, the device can have any suitable configuration. In addition, any number of inter-inspection/interstitial systems can be arranged in a nested process. The 7-week field structure & connection is in the form of a compartment transport unit 15 to provide any suitable module system. Each track is pulled or moved (for example, interlocking cut surface, machine with/when paired device

At the same time, the end-to-end connection of the module is provided in the armpit of the women's compartment. The track die ancestor can be made to any suitable length of 30, 2008, 274, such as a few feet long, or made into any suitable shape, such as a straight strip or curved shape, to provide ease of installation and construction flexibility. The support can be transported from the bottom or in a modified state. In the sample, the obstruction system is a hanging type and a system. The obeying system may be provided with a roller bearing or any other suitable supporting surface for the workpiece to be transported along the road without the resistance of the roller. The wheel bearing system is a truncated cone or the obstruction is curved or curved. Inclined to provide additional direction stability for the work piece $ on the road (4) \ compartment conveyor belt 15 series belt conveyor system, track and drum type or key ▼ with star wheel conveyor system, wheel drive system or The magnetically actuated delivery system 2 is a motor for driving the delivery system having any suitable linear motor that has an unrestricted stroke to move the workpiece container along the delivery portion 15 within the compartment. The linear motor is a solid state motor without moving parts. For example, linear motors are rectified or non-rectified AC or DC motors, linear pilot motors, or linear stepper motors. The linear motor can be incorporated into the transport portion 15 of the compartment or into the workpiece transport or container of itself. In a variant, any suitable drive can be added to drive the work piece through the transport system in the compartment. In another variation, the in-cabin transport system is the path of the self-contained conveyor without the steering wheel. As will be explained below, by means of the sorting portion and the branching, the inner conveying portion i 5 can generally provide a non-interrupting two-speed movement or flow of the workpiece along the path of the conveying portion 15 in the compartment. This embodiment is preferred in comparison to conventional delivery systems that require material flow to be removed when the delivery container is added or removed on the conveyor line. _ As described above, the compartment inner conveying portion 20 in the embodiment can be formed into a processing or 31 200845274 two private rf45 'can be passed through the compartment sorting section 35 · connected to the compartment transport section "the compartment sorting section 35 can be set in For example, any compartment on the compartment or between the inner conveyors 20, 15 and providing the guard or guard container into/out of the transport unit 20 W needs to stop or deplete the material flow of the transport section Or the material flow of the inter-segment transport unit 2G. The sorting unit % of the shot is not intended to be a separate unit from the transport unit 15, 2, and the sorting path between the sorting unit or the transport 4-15G in the modified aspect. The system is combined with the conveying unit, but a separate sorting and conveying secret f is formed between the conveying portions. The sorting portion in the changing aspect can be set in the smashing room or the partition (four). It has a travel route and an aggressive or sorting route. An example of a delivery system for selectively advancing to switch the travel path without detracting from the travel route is described in the "Transport System" of U.S. Patent Application Serial No. U/211,236, the disclosure of which is incorporated herein by reference. The inter-strip transport unit 2G and the inter-sequence portion 35 have the same application as described above The transport is carried out in separate compartments. The 卩15 is quite similar. In the variant, the sorting section of the transport section in the compartment and the transport section between the compartment and the compartment has any suitable structure, shape or type, and can borrow any It can be seen that it can be driven in a suitable manner. As can be seen from Fig. 29A, the compartment sorting unit 35 in the embodiment has an input unit 35A and an output unit 35B corresponding to the moving direction R1 R2 in the compartment and the inter-compartment conveying unit 15, 2〇. Here, as a conventional example, the conventional setting member is used as the input of the component 20 (from the component 15) and the component 35B as the outlet/output of the component 20 (the input of the component 15). The direction of travel of the sorting section in the modified aspect is This will be achieved as follows. As will be described in more detail below, the workpiece container can exit the inter-tank transport portion 15 through the input port 35A and enter the inter-tank transport portion 35B through the output portion 35B. The sorting portion 35 has any suitable length to provide The working piece 32 200845274 is fed in and out of the conveying parts 15, 20. The inter-chamber conveying part 20 can extend within the passage connecting any number of processing devices 30 to the conveying system 10, 10'. As shown in Fig. 29A and the foregoing As described above, the inter-chamber transport unit 20 may also connect two or more inter-chamber transport units 15 to each other. The inter-chamber transport unit 20 as shown in FIGS. 29A and 29B has a closed loop shape, however, in a modified form There may be any suitable configuration or shape and may be applied to any process facility layout. The inter-chamber transport portion 20 in the embodiment is coupled to the processing device 30 by a transfer leg or branch 25, similar to the sorting portion 35. In the sample, the branching system is disposed in the inter-compartment conveying portion in a similar manner. The branching 25 can effectively grasp the workpiece conveying "offline", and has such that the input portion 25A and the output portion 25B correspond to the inter-compartment conveying portion 20. The traveling direction R2 is as shown in Fig. 29A. The branch 25 can be transported away from the workpiece and into the compartment transport section 20 through the input and output sections 25A, 25B without substantially interrupting the substantially fixed travel speed of the workpiece in the compartment transport section 20. In branch 25, the workpiece container can be stopped at a working interface station (not shown) corresponding to the processing station, such that the workpiece and/or the container itself is transferred into the processing device, or by any suitable means. The transfer device enters any other suitable work piece stacking area, such as a device front end module, an aligner or any other suitable transfer automatic handling device. In a variant, the workpiece transport section is directed to a predetermined split to initiate reordering (recombination) of the conveyor on a particular conveyor. The transfer or conversion of the workpiece loader between the various components 15, 20, 25, 35 can be controlled by a guidance system (not shown) that is coupled to a controller (not shown). The guiding system includes positioning means for determining the position to be transported along portion 33 200845274 - 35. The positioning device is of any suitable type: such as a continuous or distributed device such as optical, magnetic, bar code or base 2/sigma components 15, 20, 25, 35. The dispensing device can be queried by a suitable reading device provided on the wheeling portion for the controller to determine the position of the conveying portion on the components 15, 2G, 25, 35 and the kinetic energy state of the conveying portion. Alternatively, the device can sense and/or query sensing items on the conveyor, work loader or guard, such as rfid (Frequency Frequency Device) to identify position/kinetic energy. The positioning device comprises a discrete positioning device capable of detecting the position of the moving conveying unit by a single or combined knife-aligning device (for example, an i-field ranging device, an ultrasonic ranging device, or an internal GPS or an internal GPS 1 contact Internal positioning system). The controller can combine the feedback information from the guidance system from the guidance system to determine and maintain the transport path along the components 15, 20, 25, 35 and between the components. In the modified aspect, the guiding system may include any other suitable structure having a groove, an obstruction, and an obstruction to form a mechanical or guiding position on the workpiece conveying portion, and interacting structurally or mechanically. surface. In another variation, the four pieces 12, 20, 25, 35 may also include an electronic wire, such as a printed strip or body, to provide an electronic guide for the kingpiece transport portion (eg, to deliver an appropriate electromagnetic nickname from the transport portion) The electronic line detected by the appropriate guidance system). . Referring again to Figures 29A and 29B, an example of the operation of a delivery system 1 〇, 1 〇 is illustrated. 9 placed in a jade container such as shunt 25 can enter the conveyor system 10' 1G. In order to keep the flow direction of the barrier conveying portion 2G substantially uninterrupted and to move at a fixed speed, the container of the garnish can be passed through the branch 25 into the conveying portion 20 in the compartment 34 200845274. The work piece conveyor is accelerated in the branch 25 to cause the conveyor to travel at the same speed as the material in the transport portion 20 in the compartment flows. Since the branch 25 can allow the workpiece conveyor to accelerate, the conveyor will merge into the flow direction of the conveyor 20 within the compartment without obstructing the flow or colliding with any other conveyor traveling in the conveyor 20 within the compartment. . When combined with the inter-compartment transport unit 20, the work piece conveyor will wait for proper advancement in the shunt 25 so that it can freely enter the direction of the inter-chamber transport unit without colliding with any other work loaders or conveyors. Or causing a deceleration of the conveyor across the components in the compartment. The work piece conveyor will continue to travel at a fixed speed along the compartment transport portion 20 and be converted into an output arrangement area or portion 35B according to the right of way to convert the compartment member 15. In one embodiment, if there is no space in the output aligning portion 35B, the conveyor will continue to travel along the compartment inner conveying portion 20 until the output aligning portion 35B has a space. In the modified aspect, a transfer branch can be provided to connect the relative travel paths of the transport portion for the conveyor to switch between the transport paths to the entire circuit, such as the return bypass station, without traveling the transport portion. The conveyor can wait for proper advancement in the compartment output aligning portion 35B, and then accelerate and merge into the substantially constant fixed velocity flow of the compartment transport portion 15, substantially similar to the combination of the reference compartment inner transport portion 20. The conveyor continues to travel along the compartment transport portion 15 to the predetermined bay at a sustained speed and is diverted into the associated bay alignment input portion 35A for entry into the predetermined compartment component 20. In one embodiment, if there is no space in the input array portion 35A, the conveyor will continue to travel along the compartment inner conveying portion 15 until the input array portion 35A has space, similarly to the foregoing. The conveyor can be appropriately advanced and accelerated in the compartment input arranging portion 35A to be merged into the second compartment 35 200845274 in the conveying portion 20, and the second compartment inner conveying portion 2 will continue to have a constant fixed speed. The conveyor closes the transport portion 2 in the second compartment and the transport branch 25 into the transport interface and processing device 30. If the conveyor has no space in the shunt, due to the other conveyors in the shunt 25, the conveyor has access rights that continue along the inter-carriage transport 20 until the shunt 25 has space. Since the material flow in the compartment transport section 15 and the compartment inner transport section 2 is substantially uninterrupted and travels at a fixed rate, the system can maintain high workpiece productivity between the processing compartment and the processing apparatus. In the embodiment shown in Fig. 29A, the conveyor can be placed between the processing compartments by directly connecting the compartment alignment portion 35, the processing device, the compartment inner conveying portion 2, or the extension portion 40 of the inter-compartment conveying portion 15. Go straight. For example, as shown in Figs. 29A and 29B, the extending portion 40 connects the aligning portions 35 together. In a variant, the extensions 4 can be accessed by a processing device to another processing device by connecting together the delivery branches of the devices similar to the shunt 25. In another variation, the extensions can be directly coupled to any number or combination of components of the automated material handling system to provide a short range access path. In larger nested networks, the shorter path between the destinations of the conveyors created by extensions 40 will reduce the travel time of the conveyor' further increasing the productivity of the system. In addition, more sadly, the automated material handling system 10,1〇, the flow to the two-way. The conveying sections 15, 20, 25, 35, 4, 5, have side-to-side parallel traveling lanes, each moving in the opposite direction and having an exit ramp and a travel = lane surrounding and connecting opposite lanes. Each of the parallel passages of the conveyor portion can be assigned to a particular direction of travel and can be individually or simultaneously converted to cause each of the relative parallels. 36 200845274 The second system: reversed according to the conveying operation to match the conveying loading conditions. Example f The flow direction of the machine follows its relative direction. However, if there is a conveyor system installed in the facility and will be when it is, then the direction of travel of the parallel lanes will move more efficiently. In the modified aspect, the two-way travel lanes can be stacked (in each other = The mask between the processing device and the conveying branch 25 (4) The lowering machine W is to raise or lower the conveyor from the branching path to the branching direction of the material in the direction of the reinforcing clock. f bidirectional branching and other transmissions Fig. 20 shows a portion of the transport system of the transport system for transporting the loader to the plant station β in another embodiment. The solid state drive system 'and The above-mentioned U.S. Patent Application No. 〇 1〇/69^ is similar. (4) The track has a statically forcible segment that cooperates with the loader casing/hood box. The loader can be transported directly = Conveying. The transfer of the conveyor system traces in the asynchronous conveyor system and other detaching actions on the conveyor line are designed to eliminate the need to determine the impact of other loaders on specific loading machines. Transport rate factor The main system uses a main conveyor with on/off points = (see also Figures 297-298) to guide the loader away from the main wheel to initiate path changes and/or to station stations (such as buffers, stacks) The interface of the machine, etc., without affecting the transport of the main conveyor. A suitable example of a conveyor system with a branch and a door, 37 200845274 is described in the aforementioned U.S. Patent Application Serial No. 11/21, No. 1,236. The segments 500A, C, D in this embodiment have a scrolling set applied to the A1-D linear motor to cause movement along the main travel path 500M (shown in Figure 20A). Such as the segment shown in Figure 20 The piece 500B has a closure/outlet that can be represented as an access path 500S. The scrolling of the forcing device in this segment 500M can be designed to provide a 2-D planar motor to provide along the main path 500 and when the loader is It is expected that the start-up movement will be moved along the way of the road 500S (see Figure 20B). The motor controller is similar to the distribution control designer described in U.S. Patent Application Serial No. 11/178,615, the entire disclosure of which is incorporated by reference. Citation is for reference. In this embodiment, the driver eight motor system Zones are effectively controlled by zone controllers with appropriate zone control. Conveyor 500 is suitably supported to provide a mobile support loader. For example, in segments 500A, 500C and 500D, supports (eg, rollers, rollers) The loader can be provided to move along a 1-degree degree of freedom of the path 500M. The support in the segment 500B can allow the 2-degree degree of freedom of the loader to move. In other embodiments, the support can be provided on the loader. In another embodiment, an air bearing can be used to movably support the loader on the road. The guiding of the loader between the paths 500M and the routing to the path 500M can be by an steerable or articulated wheel such as on a loader. The guide system on the track, or the appropriate guidance system of the magnetic manipulator shown in Fig. 20B, is activated. Figure 20A shows an embodiment of a transport element 500A of system 500. The embodiment shows a segment 38 200845274 with a single travel route or path (eg, path 500M). As shown in Fig. 20A, the segment in the embodiment has a linear motor portion or a compensator 502A and a bearing surface 504 (A) as a motion support on the conveyor. As previously mentioned, the delivery segments in the modified aspect can have any other desired configuration. The guide 506A in the embodiment is used to guide the conveyor. In the modified state, the conveying section has a magnetic member or a magnetic support instead of the conveying guide. An electromagnet on the loader can be utilized to assist in detaching the loader from the way. Figure 20B shows another delivery section of the delivery system 500 of another embodiment. The segment 500A' has a plurality of travel routes (e.g., a handover route similar to the C segment 500B shown in Fig. 20) or a substantially parallel main travel route (similar to the route 500M) with a converter therebetween. In the embodiment illustrated in Fig. 20B, the travel route (similar to route 500M, 500S) is formed substantially by the 1-D motor portion 500A1 and the corresponding loader motion bearing surface/area 504A'. The transition or transition between the travel routes is formed by an arrangement of 2-D motor elements that can create a 2-D force on the conveyor to initiate a traverse between the travel paths 500M', 500S'. Figure 21 shows the interface or turning section of the transmission system of another embodiment. In the illustrated embodiment, the delivery section 500A" forms a plurality of intersections (routes 500M", 500S". The route of travel is substantially similar to route 500M (see Figure 20A). In an embodiment, the carriage can be traversed The specific route 500S", 500M" is until it is substantially aligned with the handover route. The 1-D motor of the predetermined route will cause the conveyor to move along the handover route. In the modified aspect, the interface may not be oriented at 90 degrees. The figure shows the bottom of the loader 1200 and the reaction elements therein. The opposite reaction element can be used in conjunction with the orientation phase 39 200845274 of the compensator part of the interface (see the embodiment of Fig. 21). There is substantially no need to stop at the interface change. Figure 20D shows the reaction element 1202FA disposed at the pivot of the loader 1200A, which can be rotated to the desired position as described in another embodiment. Figure 22 shows and 21st The interface in the figure is substantially similar to the obstruction section 500H" having a side storage location 500S". Figures 23-23A show the obstruction section 500 having a cut or opening 15000 to lift the loader lift or shuttle The arm of the machine (not shown) will be described in more detail below. In the embodiment, the opening 15000 allows the lateral advancement of the loader to grab the loader from the bottom side of the drive lane. Figure 24 shows There is a segment 2500A with a forcing device (such as a linear motor) 2502A offset from the loader/track centerline shown at arrow 2500M. Figures 25A-25B show a linear electric conveyor 3500 (with a buried loader 3200) The grounding force member and the reaction element are used to transport the substrate to the semiconductor FAB. In the illustrated embodiment, the conveyor 3500 is reversed (eg, the loader suspension and under the conveyor) to allow the loader to be bottomed. The side is directly advanced. The conveyor 3500 can also be similar to the aforementioned conveyor system segments 500A, 500A", 500A'". The magnetic retention forcer 3502 can be employed in the embodiment to maintain the coupling between the conveyor 3500 and the loader 3200. The force is derived from a linear motor coil (for example in a linear synchronous design) and/or by a separate magnetic component (not shown) by individual electromagnetic and/or specified use. The loader is connected to the conveyor. The disengagement system is quickly and preferably achieved without moving parts (such as electromagnetic switches). Fail-safe operation is ensured by the flux path between the loader and the conveyor and/or the passive mechanical holding position. The position of the intersection and the branch point (ie, the merge-branch position of the segment 40 200845274 like the segment 500B in Fig. 20) can be converted by the coil. In the modified aspect, a rotary or other path guiding device can be used to transfer the load. The machine is positioned between the travel paths of the conveyor 3200. The loader 3200 of the embodiment is designed such that the reactive elements are attached to the top and the substrate is advanced from the bottom of the loader. The loader 3200 of the embodiment has a magnetic plate that is configured to mate with the actuator of the conveyor 3500. The loader plate or flat portion includes a roller, support or other moving support surface (e.g., a reaction surface for air support in the conveyor). The plate also includes an electromagnetic coupling portion for detaching the container portion of the loader from the flat portion that remains attached to the conveyor when the workpiece container portion is loaded on the processing device 3030. In an embodiment, when loading the device, the conveyor 3200 places the loader on the device loading cassette and utilizes, for example, a designated vertical transfer mechanism 3040 (see Figures 26A-26B) to reduce the loader from the conveyor height to (control) The load interface 3032 of the device 3030. The vertical transfer device can also be used as a positioner to set up the wafer for wafer handling of the automated handling device. A suitable example of a vertical transfer device is described in U.S. Patent Application Serial No. 11/210,918, the disclosure of which is incorporated herein by reference. In the variant, the drive is a reverse-set power wheel accumulating drive with appropriate magnetic attraction to support the loader on the drive wheel. In another variation, the general design can be reversed so that the conveyor is below the loading raft, and the loader has a reaction section at the top. Figures 26A-26B show another example of reducing/lifting the loader directly from the conveyor system to the loading port/device interface. The loader in the embodiment shown in Figures 26A-26B can be integrally formed with the reaction plate. In another embodiment, 41 200845274 loses:::: ί: points: heart: when moving: _ machine keeps connected to the carrier and is generally "1" of the flat panel and the FAB Mixed structure of a conveyor vehicle with an embodiment

Load (such as with semiconductor load = motor vehicle side system for automatic transmission of effective load: feeder). The material can be “storage energy two=Γ vertical system, at least one motor power drive wheel, the sensor of the machine, and related control electronics. In addition, the 1 motor vehicle is equipped with or a plurality of reaction components (similar to the aforementioned transmission system, the system 500 (see also Figure 20) of the conveyor 4500 plate). The static linear motor forcing segment members cooperate with each other.

Real & Shooting' When the motor vehicle side travels along a path formed by _ or multiple forcing segments (similar to path 500M, 500J), the drive motor can be disengaged from the drive wheel, and the motor vehicle passes through the conveyor The electromagnetic coupling of the reaction elements in 4500 is promoted along the pure work (4). If the energy storage device (e.g., battery, supercapacitor, flywheel, etc.) in the motor vehicle needs to be recharged, the movement of the pilot wheel along the guide path can be used to convert the energy of the linear motor to the motor vehicle for storage. In the case of electrical energy storage, the motor drive motor and appropriate monitoring electronics can be reconnected as generators. This type of "flying-type charging has the benefit of simplification and durability, and this design has significant flexibility and fault tolerance. For example, the motor vehicle 4200 can be used to drive a spontaneous W-faulted conveyor section or along Obstacle or between working areas not supported by the conveyor (see Figures 27A, 27B). The number and length of the conveyor forcing sections can be tailored to the operating scheme as a transmission between the compartment conveyors 42 200845274 Machines, and the use of spontaneous motor vehicle movements such as in the compartment. Pilot maneuver can be applied to the flexible path selection 4-line guided turn can be used to avoid the use of curve forcing segment. Motivation ^: Move, and use security barriers and operator compartments as needed to respond to the poem, such as the link to _ theory ^ for level change, benefit (4) special storage energy to slow down the mobile ^ household ^ Difficult. k

Figure 28 shows another example of an integrally formed loader and transport vehicle. In contrast to the conventional motor vehicle type semiconductor automation in which the motor vehicle system is used to schedule the wafer loader in the FAB, each of the loaders 5200 in the present embodiment is a single-motor vehicle. The body-formed loader/motor vehicle 52GG in the embodiment is similar to the aforementioned motor vehicle 4 fan. The motor vehicle in the modified aspect includes an integrally formed loader 5202 and a motor vehicle 5204. The loader 52〇2 shown in Fig. 28 is a front side/side opening. In the modified state, the loader is open at the top or has other suitable guards. The motor vehicle can be driven directly to the load magazine to which the work piece is to be transferred, or can be engaged by another automated component such as a device buffer. Substantially permanently fixed = Carrier 5202 and Motor Vehicle 52〇4 eliminates the waiting time for dispatching empty vehicles when a large number of transfers are required, and also eliminates the associated difference in transmission time. In addition, the loader motor vehicle 5200 eliminates the need for empty vehicle movement, thereby reducing the total flow of the conveyor and the road, thereby improving system performance. In a variant, the loader and the motor vehicle have couplings to disengage the loader from the motor vehicle. Although the maneuver I and the loader < ratio system in the system,! ·· ! The relationship U is exempt from waiting. The delay of the loader transport during the motor vehicle can also be confirmed using the appropriate controller 43 200845274 to allow for separation under limited conditions (eg repair/maintenance of motor vehicle or workpiece loader components) ). On the other hand, the loader and the motor vehicle are maintained in one piece when transporting or engaging the device loading station or other automated components of the FAB. Figure 29C shows a plan view of a buffer system 6000 of a planar configuration of another embodiment of the interface between the transmission system 500 (or any other preloader delivery system) and the plant station 1000. The buffer system can be placed below the device station or components thereof or above the device station. The buffer system can be set to deviate (i.e., above or below) the operator access to the exit. Figure 30 is an elevational view of the buffer system. Fig. 29C-30 shows a buffer system provided on one side of the conveyor 500. The buffer system can be extended as needed to cover as much of the FAB plane as possible. In the illustrated embodiment, the operator walkway can be located in the elevated position of the buffer system. For the same reason, the buffer system can be extended overhead anywhere on the FAB. As shown in Fig. 29C-30, the buffer system 6000 of the embodiment has a shuttle system 6100 (which may have a suitable loading elevator or positioner) capable of at least 3-D movement, and a buffer station ST arranged therein. The shuttle system generally includes one or more guidance systems (e.g., guides) 6102 that provide at least 2-D traverse of the shuttle 6104 on the guidance system. The configuration of the shuttle system shown in Figures 29C-30 is for illustrative purposes only, and the shuttle system in the modified aspect may have any other contemplated configuration. In an embodiment, the shuttle system is shuttled or interposed between the conveyor 500, the buffer station ST and the equipment loading station LP (see Figure 29C). The shuttle 6102 can shuttle between the horizontally disposed conveyor 500 (e.g., via the access path 602 between the segments 600 of the conveyor) and the buffer storage 8 or the loading position LP on the station to load the loader 200 shuttles between them. As shown in Fig. 44 200845274 30, the shuttle 6104 in the embodiment may include a positioner 6106 to grab/place the loader on the conveyor 600, or the buffer station ST or the unit load 埠 LP. The buffer system is designed in a modular form to facilitate expansion or reduction of the system. For example, each module has a relative storage location ST and a shuttle way and a joint to be connected to other mounting modules of the buffer system. In a variant, the system has a buffer station module (with one or more integrated buffer stations) and a shuttle track module for modular installation of the shuttle. An elevational view of the buffer system 6000 in communication with the merge/branch path of the conveyor 500 is shown in FIG. The buffer system shuttle 6104 of the embodiment can access the loader that is directed to the conveyor's aggressive route. A stop (or lack of an access lane similar to route 602 in Figure 29C) will limit the shuttle's aggressive or disruptive travel path. Figure 32 is another elevational view showing multiple arrangements of buffer stations. The buffer system has buffer stations of any expected number arranged in any desired number of columns. The traversing shuttle (as indicated by arrow Y in Figure 32) can be adjusted by the module displacement of the lateral guide 61087. In another variation, the buffer station is arranged in a plurality of horizontal planes or levels (i.e., two or more levels - vertically separated to allow the loader height to pass between the levels). Multi-level buffering can be applied to loaders that reduce performance. Figure 33 shows another plan view of a buffer system having an interface with the guided vehicle loader V. Figure 34 shows an elevational view of an overhead buffer system 7000 similar to the aforementioned lower unit buffer system 6000. The overhead buffer system 7000 can be used in conjunction with a lower device buffer system (similar to system 6000). The illustrated overhead buffer system interfaces with overhead engine 500. In a variant, the overhead system can interface with a floor drive system or a floor-type motor vehicle. Appropriate control interlocks can be provided. 45 200845274 (for example, hardware) (4) The horizontal chess line with the effect of reducing money and money. A top shroud above the aisle can be used to prevent the suspended load from passing through the aisle space. Figure 35 shows the type of loop buffer system surface. The buffer station st of the system is freely movable, and is mounted on the track 81 (the closed circuit type in the illustrated embodiment) to move the buffer station ST between the loader positions, wherein the loader can be loaded into the buffer station. ST (for example with overhead loader) and the loading station LP of the device interface. The job interface may have a perspective view, a side view and a bottom view of the substrate loader 2000 of another embodiment shown in Figures 36A-36C. The loader 2 is not a typical loader. The loader of the illustrated embodiment is a bottom opening arrangement for illustration, and the loader of the modified embodiment can have any other desired configuration such as top opening π or side opening. The loader 2 of the embodiment shown in Figures 36A-36C is similar to the loaders 200, 200, '300 shown in Figures 1-3, and like parts are indicated by like numerals. The loader 2000 thus has a housing or housing 212 having one or more openings 2004 (only one opening is shown as an example in Figures 36A-36C) for the wafer input/output loader. The loader housing has a removable wall or member 2016 to form a cover or door for opening and closing the opening 2〇〇4. As previously described, the housing 2012 shown in the embodiment has a removable bottom wall 2 〇 16 for opening and closing the opening 2004. Any other component or wall of the loader in the modified aspect can be used to feed the wafer into/out of the loader. The detachable member 2016 can seal the rest of the housing 2〇14 as in the foregoing, and the housing 46 200845274 can be used to maintain an isolation atmosphere, such as inert gas, and a pressure difference from the atmospheric atmosphere. Air or vacuum, etc. The outer casing 2014 is similar to the removable wall portion 2 〇 16 in that the wall portion 216 and the outer casing 214 are passive structures and can be locked to each other by magnetic force or any other intended passive locking. The wall portion 2016 in the embodiment may include a magnetic element 2〇16C (e.g., steel material) and the outer casing 2014 may have a magnetic switch 2〇14S for initiating unlocking and unlocking of the wall and the outer casing. The magnetic components of the wall and the operating part of the housing 2〇14S can be designed [for the magnetic lock and the interface of the door (described in more detail below), so when the loader door (wall or casing, see section 36A) And 36C) Locking the door can cause the loader door and the rest of the loader to be unlocked. In a variant, the magnetic lock between the wall and the outer casing can have any other desired configuration. The metal passive loader 2000 and the loader doors 2〇16, 2〇14 provide a vacuum compatible clean washable loader. In the embodiment illustrated in Figures 36A-36C, the loader 2 is shown as being loadable with multiple wafers. The loader in the modified aspect can be used as a desired size to load a single wafer with or without an integrated wafer buffer, or any desired number of wafers. Similar to the loaders 200, 200, and 3 of the previous embodiment, the loader 2 is a reduced or small batch size loader compared to conventional 13 to 25 wafer loaders. As shown in Figures 36A-36B, the loader housing has a delivery system interface 2060. The conveyor system interface 2060 of the loader 2000 can be configured to interface with any desired delivery system, such as a transmission system similar to the second embodiment shown in Fig. 3. For example, the loader can include active components such as steel magnetic Material gaskets or components, set, or attached to the loader housing and may be linear or flat with the drive train conveyor to drive the loader along the conveyor.

Reference. 1 No. 10/697,528, which has been incorporated by reference to the embodiment shown in Fig. 36A-36C, the loading 棬AW 2060 also has a transportable system, the 丨4J:, when used to support the loader on the support surface Non-contact or contact: support ( ^. --B) in the transport "?: period or direction to firmly support the loader on the conveyor system. Blocking the surface of the plane, the surface or the surface of the support surface Connected or placed in the housing and connected by any suitable means to the air bearing (not shown) of the conveyor system to securely support the loading on the air bearing or by the conveyor system motor. A force 'such as a combination of magnetic forces, etc.) In a variant: the loader housing has one or more (active) air supports to direct air (戋 any desired gas) toward the (passive) transport system structure to provide = force (2: non-contact) but still stably support the loader on the structure of the conveyor system. In the example, a suitable air/gas supply source (such as a fan or gas system) can be connected to the loader to feed the air support of the loader. On another In a more aspect, both the carrier housing and the delivery system have an air bearing and a passive air bearing (eg, a lift air bearing in the conveyor system and a water-inducing air bearing in the loader). The loader 2000 can have the same 36B shows other operating members such as flanges 2068, flanges or surfaces. The loader 2000 of the embodiment has a device interface of 2〇7〇 for loading 48

200845274 The machine is connected to the loading part of the processing unit (eg loading cassette). The processing device is any type of person. In the embodiment, the interface 2 (four) is attached to the bottom of the loader. The device interface in the change sample is attached to any other desired side of the loader. In addition, the loader can have multiple device interfaces (e.g., bottom and side) for different configurations of the loader and device. The apparatus of the loader 2000 in the embodiment is shown in Fig. 36 (the figure is shown in Fig. 36. The structure of the device interface 2070 shown in the figure is only used as an example, but in the case of the modified state towel The machine may have any other configuration of the device interface. The device in the embodiment has the conditions set by the appropriate s clock standard of the loader (such as SEMIE. 47.i and E57 and any other suitable SEMI or Other standards), all of which are incorporated by reference in the present application. Therefore, the loader interface 2 (4) in the embodiment may include a kinetic energy coupling (KC) socket provided in accordance with the conditions of the standard E. 47. 1 and E57. The main and/or secondary κ c pins (not shown) are installed in the traditional loading and unloading interface. The loader interface 2070 also has a part of the loader's SEMI standard or a plurality of information pads. Loader interface sounds in the sample: One or more SEMI designation components may not be provided (for example, the interface may not be provided with a movable component, but the components may be coupled). However, the interface side of the housing corresponding to the component has a reserved area. Loader interface The loader can be employed to interface with a conventional loading interface of a conventional processing apparatus. It will thus be appreciated that, as described with respect to the previous embodiments, in order to couple the loader to the processing environment (or, for example, to maintain processing equipment) After the loading of the vacuum, the loader is required to make the interior of the loader substantially sealed in the processing environment, and the unclean surface on the wearer's machine is substantially isolated and sealed from the processing environment. ^ 49 200845274 Surface loader For example, the kinetic energy coupling between the loader/loading 埠 contact = 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载 装载The coupling can be adapted to provide a loader to display an embodiment of the kinetic energy of the embodiment on the load port interface == type; the pin (2) is not a cross-sectional view. The joint face 2072 generally has a pin direction (such as the configuration of the pin 2276, Provide one or more expected directions (4 such as 4 χ, ζ shown): = by the "loader's oblique machine: = \ _ ^ 1_ 2274 with compliance (such as the use of elasticity to carry;: such as :Sexual installation The circular lock' is formed by a groove made of a flexible material to form a groove on the pin material to provide a concave shape in the pre-compilation: Table = ^ outside the embodiment of the loader interface 2〇7〇 is designed to pass through the device The loading interface creates a non-contact bonding interface; for wafer loaders recommended by the loader, phase precision alignment can be set. The loader of the wafer loader and device needs to be η / transport entry device. Traditional positioning method General 1. The traditional mechanical coupling method is to contact the bottom surface of the loader. For example: the auxiliary =:= provides the introduction or cam to compensate for the misalignment and the south guide to return to the aligned position. This part is based on 200845274

The introduction surface of the loader is in sliding contact with the mating pin of the loader, which may cause wear and contaminants. The second problem with traditional mechanical coupling is that the loader needs to be roughly placed within the gripping range of the effective function of the traditional coupling. The loader conveyor system is used to increase the complexity of the wheeling system and/or increase the time to initiate a correct positioning (e.g., retry). Therefore, the design of the loader conveyor system must be sufficiently reproducible to set the loader within the gripping range of conventional mechanical coupling or in a nominally aligned position in conventional applications to prevent wear. However, the loader conveyor system cannot achieve reproducibility after several cycles, thus producing sliding contact-induced particles. The interface of loader 2000 provides the same reproducibility to provide a wafer loader to the processing apparatus by means of a non-contact (e.g., magnetic) coupling. This capability allows the conveyor system 70 to introduce features throughout to ease the set tolerance and subsequently accelerate the loading/unloading steps of the loader. Second, all actions to compensate for set errors can be made without substantial contact between the loader and the load port, reducing any phase slip as a cleaning consideration. As can be seen from Fig. 36C, the embodiment of the carrier can be used for the non-contact interface and the non-contact coupling 2071 of the loader can include substantially non-contact support. Or Meisheng No. 2072 and non-contact joints 2〇74 22? The smooth surface is formed to be used with the air nucleus of the loading ^ i 升 承 承 及 及 及 及 及 及 及 及 及 ( ( ( ( ( ( ( ( ( ( 装载 装载 装载 装载 “ “ “ “ “ “ “ “ “ “ “ “ “ “ Body: 51 200845274 may have interfaces that are substantially similar to each other and distributed over the loader housing (eg, the bottom side of the three components, so that the lifting action applied to the loader by the load 埠 air bearing is generally caused by pressure, from The air bearing is applied to the lifting surface member, and the resulting lifting system coincides with the mass center of gravity of the loader. The shape and number of the lifting surface members 2〇72 shown in Fig. 36C are only illustrated as an example, and in the modified aspect The lifting surface can have any desired shape and number. For example, the lifting surface can be a single continuous body (or substantially non-woven material extending substantially along the perimeter of the loader interface). It is located at the loader interface 2_ so that it is not connected to the semi-interface components (such as kinetic energy connection sockets, data gaskets, etc.). The position of the lifting surface 2〇72 is as far as possible from the CG under the restriction of the interface, and is made as expected. In order to produce the expected pressure distribution and tolerate, for example, the xy plane between the loader and the load weir. In the embodiment, the lifting surface 2〇72 is phase = early one axis (shown as the X axis in Fig. 36C, for example The two-sided reference axis), called the configuration, but not for any other axis of the loader interface. Therefore, the 2070 system is polarized so that the non-contact interface with the device loading interface can be hunt early - proper orientation This can be achieved. The instability of the loader ^ correct orientation machine can be detected by the loader: then it should be detected by the thief, or by the loader itself or the loader (four) and transmitted to stop The correct setting. The lifting surface 2072 can be expected to be inclined or offset to assist the proper alignment of the loader. The lifting surface can be moved or offset by mechanical means, in any other suitable way, so as to impact in the second The expected level of different scales and different directions; 2 = 52 200845274 machine to align the loader and load 埠.

Referring again to Figure 36C, there is one or more permanent magnetic member contact joints 2074 with 2074A iron as: 4C (the figure shows three or more magnetic pieces of magnetic parts) 1 1 Magnetic Du can provide a more linear/planar motor reverse in the moxibustion pattern: I: 4A-2°74C system, the transport system is divided into Hf parts, or (4) Motive reaction part =:, set. The coupling magnetic member 2074A side c is of sufficient size to be expected to be scented between the genus. As the loader and the loading 埠π单单=1, the coupling magnetic member 2074A- 2〇74C is one axis (: As shown in Figure 36c, the setting is symmetrical, but it is asymmetrical to all other axes of the loading L. The non-contact of the loader: when the loader is not in the expected orientation relative to the loading bee, the anti-== loading In other words, the non-contact coupling of the loader = the correct keying of the 'keying' to the I-loading' and the coupling will not engage all the eight and can not attempt to load. It can be detected in the loader. The loader is not placed in the load 璋 = suitable for the movement, and the appropriate signal is transmitted to cause the conveyor system to be removed or the load to be re-positioned in the proper orientation. The non-contact joint and/or (four) face in the modified aspect may be along The plurality of axes of the loader interface are symmetrically set. The difference reference 36D shows a bottom view of a different loader 2GGG similar to the loader described above, similar components are similarly numbered to indicate the carrier 2000, with a loader face ·,, with roughly and front" 36A-36C The non-contact coupling period is similar to the non-joining junction 207i'. In the embodiment shown in Fig. 36D, the non-contact coupling portion ,%, 53 200845274 has a steel magnetic material portion 2074A', 2074B', 2074C' ( It may be part or a separate part of the conveyor system motor reaction assembly in the loader to replace the permanent magnet. The steel material parts 2074A', 2074B', 2074C' have any predetermined shape, such as rectangular, cylindrical or Each of the portions 2074A', 2074B', and 2074C' is similar to each other, and in the modified aspect, the different common portions form the desired magnetic coupling and the directional members used in the respective portions. Sufficient size in the magnetic field loaded at the junction point and allows for initial misalignment between the loader and the loading ram when the loader is initially placed on the loading raft. The coupling sections 2074A', 2074B', 2074C' are dimensioned And being disposed on the loader interface such that the magnetic force acting on the loader biases the loader into an aligned position relative to the load magazine. As shown in FIG. 36D, the joint portion 20 in the embodiment 74A', 2074B', 2074C' may be distributed over the loader interface to form a single axis of symmetry (axis X) and bonded to the contactless coupling 2071' of the loader for attachment to the load port in a single orientation. The junctions in the example can have any other desired configuration. Figures 37A-D show perspective, end and side elevation and top views, respectively, of the device loading station or loading magazine 2300 of another embodiment. The loading cassette has a configuration for attaching and loading wafers from the bottom opening of a loader similar to the aforementioned loader 2000, 200', 300. The loading cassette in the modified aspect can have any other desired configuration. The load cassette 2300 has a suitable mounting interface such as a SEMI STD. The BOLTS interface is included for the loading of the loading unit to any intended processing unit or workstation. For example, the loading cassette can be installed/equipped with a control enclosure for EFEM, such as a processing device (described in more detail below), or can be (in a manner similar to that shown in Figure 14) for a large processing unit 54 200845274 == Vacuum transfer chamber) or atmospheric open inspection of processing equipment _ General: Department 2 =:: like the aforementioned loading 槔. Loading the loader loading interface 2302, and loading or retrieving the wafer into the loader or the wafer in the cassette can be received from the loader or the machine) m3G4 can be used to maintain the isolation enclosure (available for loading) Load lock on the loader) or controllability (highly clean and technical atmosphere. Mounted; 1 side 2302 has a loading plane 2302L·, when the loader is connected to the loader' is different from the conventional loader in the loader The setting & internal system has almost no protrusions at all. As can be seen from the figure, the anti-collision or shock-absorbing portion mounted on the outside of the f-loading area is used to move in place of the loader when the loader and the parent fork are out of alignment. The loading interface 2302 can have a loading opening and/or a mouth 2308 (in communication with the loading compartment 2304) and a door opening similar to the front opening. The shooting door 231 is generally flat and loaded with the loading interface. The plane is of the same height. The Tuen Mun 231〇 is sealed to the rim by a sealing arrangement similar to that shown in the above-mentioned reference 4A-4B. It can be seen that the loader housing and loader are connected and bonded to the loading port (10). The door system is relatively sealed to the loading port埠For the edge 23〇8R and the trick 2310, reference may be made to a substantially "zero volume wash" seal having a configuration similar to that shown in Figure 4A_4B. In the modified aspect, between the flange, the door, the loader housing and the loader door The seal may have any other desired configuration. The trick 2310 in the embodiment may be coupled to the fistula in a manner similar to that described above by a passive magnetic coupling or latch. In an embodiment, the magnetic coupling between the cardia and the fistula/ The latching element can be arranged and designed to activate a passive magnetic latch between the loader door and the housing while actuating the latch between the flap and the cymbal. Thus 55 200845274 For example, unlocking the slamming door and the cornice The loader door and the loader will also be unlocked, and the door lock will be locked to the loader. The load magazine of the embodiment may include a positioner 2306 and a washing/discharging system 2314 similar to those shown in Figures 8-14. Referring to FIG. 37D, the loading loader loading interface of the embodiment has a substantially non-contacting dielectric surface 2371 that can be mated with the non-contacting dielectric surface 2071 of the loader 2000, such as to connect the loader 2000 to the loading magazine 2300. as the picture shows, The interface portion 2371 of the embodiment may have one or more air bearings 2372 and a non-contact coupling portion 2374. The air bearing 2372 of the load cassette may be of any suitable type and configuration, such as a "keyed" configuration, generally Corresponding to the configuration of the lift zone 2072 on the loader interface. The air support 2372 is thus symmetrically disposed relative to the reference datum, which sets the alignment of the loader 2000 when coupled to the load weir. Appropriate air/gas The source (not shown) supports air support. Appropriate regulators (not shown) may be employed to maintain the desired airflow from the air support. The air supply and regulator of the air support are provided as required. For example, it is located outside or inside the loading compartment 2304, but is isolated from the interior enclosure of the compartment. The gas supply 2372S of the air bearing 2372 (see Figure 37C) can extend into the bellows or other flexible seals of the air bearing. The casing is used to isolate the gas supply from the loading compartment. In another embodiment, the air bearing gas supply may extend into the bellows seal of the isolation positioner in a manner similar to the wash and exhaust lines shown in FIG. The air/lifting zone of the loader in the embodiment is located in the loader door, so that the air bearing 2372 of the loading raft (in the lower side of the lifting zone) is disposed within the boundary of the stern 2310. The air bearing system in the modified aspect 56 200845274 is again in the 埠 frame or the 埠 flange, and the air supply of the air bearing is provided on the outside of the loading chamber of the loading raft. The air bearing 2372 in the embodiment is an orifice support (having a partial discharge port) or a porous medium air support having a substantially uniform discharge port. The pressure, mass flow and direction of the discharge of each air bearing 2372 (indicated by the vertical representation of the ΑΒ37C as an example) are fixed (substantially unchanged). The air bearing in the modified aspect has a varying drainage for changing the drainage characteristics (such as pressure, mass or direction, etc.) to offset the loader relative

Align the loading and loading of the load and the loader. Thus, it can be seen that the dimensions of the air bearing 2372 and the lifting pad 2 〇 72 on the loader are slanted to provide an expected misalignment limit or set area of the loader initially placed on the load ram. Referring to Figure 37, there is shown a plan view of another embodiment of the loading cassette 23 (9). The load 埠 2300' is attached to the load 埠 23 〇〇 _, and similar components are indicated by similar codes. In this embodiment, __ or a plurality of wire supports are added, and there is a - discharge nozzle. Lai Guanxu discharged σ 细_娜余合 to provide a guided total discharge. As an example, each nozzle of the row has a discharge port that can be angled at an angle to the other nozzle discharge port. Fixed or changed from the outlet of - or multiple tubes. #—The exhaust nozzle is connected to the exhaust. The resulting exhaust has the first-expected direction (ie, the rmr nozzle that is generally in the vertical direction stops or reduces the flow and will result in a final discharge, resulting in a directional component at the loading plane. In the case of changing the sample, the support nozzle is movable (for example, mounted on a tiltable platform: ;! gas official mouth), or the shape can be changed (for example, making two materials) "for the directional shopping guide. It can be seen that at the loading 57 200845274 The directional component of the gas bearing discharge port gives the loader mounted on the air bearing of the loading plane an impact in the opposite direction of the directional component of the discharge port and produces lateral movement of the loader in the loading plane Referring again to Figures 37A-37D, the non-contact coupling portion 2374 of the loading cassette has magnetic portions 2374A-2374C disposed to match the magnetic members 2074A-2074C (see Figure 36C) or the magnetic materials 2074A, -2074C of the loader, To form a magnetic lock/unlock connection between the loader and the loader (eg, between the loader door 2016 and the door 2310 and between the loader housing and the load frame). The magnetic properties of the load in the embodiment unit The 2374A-2374C also cooperates with the magnetic parts 2074A-2074C of the loader or the magnetic material parts 2074A, -2074C to form a loader position assisting device that can be used to adjust the position of the loader on the loading portion to achieve the positioning described below. The arrangement of the illustrated magnetic portions 2374A-2374C is described by way of example only, and the magnetic portion of the loaded non-contact loader coupling portion in the modified aspect can be configured/constructed as intended. Magnetic portion 2374A-2374C The operating magnetic member can activate the magnetic switch to generate a desired magnetic field when starting to shift the magnetic or magnetic portion of the loader in a desired direction (for example, to generate a lock/join between the loader and the loading cassette) and / Or the corrective force imparted to the loader. As can be seen from Figures 37A and 37D, the load port interface of the embodiment has a non-contact alignment system 2380 to teach the loader conveyor system about the position/positioning of the load port and to provide the loader at The initial setting of the loading port interface. As mentioned above, the setting area of the loading cassette is substantially free of flanges, and the initial setting of the loader on the setting area is between the loader and the loading cassette. There is substantially no contact (i.e., no frictional contact). In the illustrated embodiment, the alignment system 2380 has a mark arrangement or pattern that can be imaged by a suitable sensor 58 200845274. An illustration is shown in Figure 37D, and in a modified form Can use two D6>, : for the sensor to image and set all expectations = i not @不) is installed in the wheeling system of the loader such as CCD or CMOS imaging sensor can form images and their empty According to the Li device. The imaging data of the pattern can be used as (4) machine positioning data reading and joint cooking (

Set = relative to (four) machine position and teaching (four) machine transport ^ position. The loader 2_ in the embodiment is disposed by the transport system on a loading plane having no flanges in the set area = 2P. The set area in the embodiment is an area formed by the size of the loader ,, for example, about 20 faces with respect to the alignment axis of the load 埠. The actual set positioning error is any value and is not dependent on the aforementioned values and can be specified relative to the ratio of the subsidy mechanism after positioning the loader. Therefore, the alignment reproducibility of this combination is substantially the same as that of the conventional coupling method, while increasing the allowable loader positioning error. After the f-machine is loaded and sensed, an air film (air bearing) is activated to lift the loader and eliminate friction between the loader and the load port interface. At this time, the force applied to the loader is the relative position of its mass and the gravity relative to the horizontal reference plane and the lift itself. The loader lifting surface is connected to the air shims on the loading raft to lift the loader and achieve reproducible positioning (angular and lateral) of the loader relative to the loading raft. The loader floating on the air film will be positioned relative to the loading jaw. As previously mentioned, a magnetic coupling can be utilized to apply a force to the loader to translate or rotate the loader. Magnetics 59 Any method other than 200845274 can be used to apply force to the loader as long as it has sufficient impact and predictable target position. The connection between the loader and the loading raft is completed to clamp the two objects together and grasp the positioning. > Referring to the embodiment shown in Figs. 36A-36C, when the loader 2 is tied in the setting area, the permanent magnetic member 2〇74a_2〇74C is superimposed on the magnetic member 2374A.2374C of the loading cassette interface. . The wire support is energized and the load is magnetically activated by an electronic or mechanical device to display the magnetic pole relative to the magnetic preloader. The absence of friction in the interface will allow the loader to move freely over the X, Y and ΘΖ axes until the poles are naturally aligned but do not make substantial contact. The air bearing system is pre-applied with magnetic force by the loader and the magnetic material of the load during the entire process. Pre-stressing can effectively maintain the control of the loader and increase the air support. After a predetermined period of time or feedback from the sensor, the air bearing can be stopped and the loader can be lowered to the door of the loader. The magnetic member at this time is in full contact and provides a clamping force to support the loader to the cardia. In the embodiment shown in Fig. 36D, the loader 2 has steel slabs 2074A and 2074C (see Fig. 36D), which are of sufficient size to be positioned (by the I carrier conveyor system). Within the magnetic field of the junction point. The magnetic components that activate the air bearing and the loading cassette are electronically or mechanically activated to direct the field to the iron shim of the loader. The absence of friction at the interface will create an attractive force between the magnetic member and the iron shim to translate or rotate the loader to the aligned position. The air bearing system is pre-applied with a magnetic force. Pre-stressing can effectively maintain the control of the loader and increase the air bearing. After a predetermined period of time or after feedback from the sensor, the air bearing is known to lower the loader to the door of the load port. The magnetic force on the iron shim will provide a history to support the loader 60

200845274 Yu Tuen Mun. The loader in the embodiment can be driven by the guide air nozzle η 37E), as shown in Fig. 37E, and the one is the main one-guided two-roller nozzle system and the air-filled air nozzle The 2372 system provides a lateral application of force to the bottom surface to create a loader motion. The motion is aligned with the load on the loader on the loader of the controller. The change pattern 4 tube two = ^ on: the board 'enables the rotation/tilt of the plate to provide the intended side of the nozzle. The two-two nozzle guide discharge σ is opposite to the direction of movement of the loader. This action will provide a lateral force to translate the loader until the magnets are aligned. For example, the actual position and the comparative alignment position are ❹j loader = direction and how the force is applied to the loader with the air nozzle. The combination of changing the nozzle in the sample and the Wei link makes the rib align the rig to its position. 〃 Figure 37F shows a plan view of another embodiment of the load port interface. The loading cassette 2300" of the present embodiment is similar to the foregoing, except that the magnetic member 2374 disposed on the loading cassette is connected to the movable side movable platform shown by the arrow of Fig. 37ε. The loader in the embodiment is disposed on the loading cassette and the loader magnet is attracted to the load jaws coupled to the platform 2374S" when the air bearing is activated. The 1丫 platform, 2374s, is an air cylinder 'unthreaded bolt or electronic coil' that is linearly coded to provide a report of the displaced position. The coupling loader magnet and the loading phase are driven back to the aligned position. The support will be stopped when the destination point is reached and the loader 61 200845274 This method is applicable to the existing mobile X-Y platform. In this embodiment, Y and ΘΖ. Although it is not possible to improve the loader setting without being worn out, it is lowered to the door and clamped. Similarly, the coupling method, in which the kinetic energy pins are coupled to the two kinetic pin systems, is driven to align with X, and the operation is performed before the contact, but is a minimum feasible method. - Figure 3G shows an alternative embodiment of loading a fan A. The differential is driven by a mechanical starter 2374M to position the load 2 and align the point of attachment of the loader. The illustrated embodiment is configured to rotate relative to the inspection frame (as indicated by the arrows R, p =; the combination of air supports can be used to tilt the loading plane to transfer the loading to produce a translation relative to the pivoting angle direction. The quasi-μΪΓΓ longitudinal loading plane is in the direction of the appropriate loader so that the loader can be loaded with the magnetic parts. When the loader is in position, it can be properly aligned with the hi-door system to return to the original position to make it fit: The dreams and shame in the previous procedure and wafer. So the connection to the loading or loading station (such as gas type, cleanliness, or pressure) is different from the current work. For example, The specific order of the wafer of the loader can be used. Therefore, the loading surface of the machine and the specific device allows the appropriate gas species to be input or discharged as expected to make the pressure: to take small or introduce unintended gas when the loader is turned on. Type. The other device system is vacuumed, and the loading device of the matching device is extracted into a low voltage for the wafer system from the loader 62 200845274. Between the loader and the loader The face and ring = 1 system can provide the environment coordination between the loader and the device, roughly the same as the two ϋ 1 (M〇A and 14 are similar. The loader is loaded with 埠; 1 〃 the environment matching system is another A suitable embodiment is described in 8/25/05: ^Special Shots No. 11/21(), No. 918, which has been cited as the case\. ^ Refer to Figure 38A for the environment of the loader. The flow chart of the program for controlling the loading of the environment. In the % example shown in Figure 38A, the 'shock carrier (4) contains the same gas type (for example, the same type of inert gas). In the example, if the loader has a higher pressure than the process pressure, the machine will load (via) the chamber (4) into the chamber (or other suitable cavity) until it reaches equilibrium, if the loader is at a lower pressure. The gas from the loading bowl or other suitable source can be introduced (via the interface) into the loader until the loader and the mounting/device environment are balanced. In the embodiment shown in Figure 38B, the loading cassette can have a circumference. The atmosphere (in the case of clean air) and the balance between the loader and the loader can be borrowed The method described in Fig. 38A is achieved. Fig. 38c shows that the load 埠 has a vacuum environment (4). The change pattern of the towel and the loading bee have the initial difference gas type, and the initial environment of the loader is after the iron extraction. The type of gas of the load is input (for example, via a loading port) before the opening of the crucible. Referring again to Figure 37, and as previously described, the loading cassette of the embodiment has a lifting and lowering door 2310 (to open and Close the mouth) and lift ς the desired height in the wafer cassette to the loading (4) chamber for the wafer processing adjustment 2306. The positioner 2306 is linked to the above 8th, 9th, ι〇_ι〇Α, 14 63 200845274 is similar to the embodiment of Figure 18, and the positioning mechanism is isolated from the volume/environment occupied by the wafer. In summary, a suitable example of a locating mechanism has the following configurations: 丨· Leading screw with bellows—This mechanism uses a lead screw driven by an electric motor attached to a rafter mounted on the raft. Access to the clean area The part of the screw is enclosed by a bellows. The bellows are any materials such as metal, plastic or fiber woven fabric that remain clean and flexible during operation without fatigue. The bellows provides a barrier between the source of contamination and the clean area where the wafer is placed. The flexible nature of the bellows provides isolation of the entire stroke of the actuator. The feedback of the mechanism is through a rotor encoder on the motor, or a lead screw; or a linear encoder along the path of motion. (See Figure 14) 2. Compressed Cylinder with Bellows - Similar to the previous embodiment, the only difference is that the drive mechanism is a compression cylinder. It can be applied to moving compartments such as between two positions; for example, closing and lowering compartments. (See Figure 9) 3. Pilot screw of the compression cylinder remote drive - similar to the previous implementation W ’ only - the difference is that the drive mechanism is remotely placed outside the wafer body (see Figure 10). The loading raft is connected to the drive by a support structure. The drive is exposed to the deep clean zone but is controlled by air flow paths or labyrinth rings. The use of air flow necessitates that the drive be placed downstream of the wafer such that potentially contaminated material is on the underside of the wafer and is swept away. Adding a labyrinth ring or other “non-friction back seal further limits particle intrusion and provides a solid barrier between the drive and the clean area. Second, the drive can be remotely located outside of the processing unit environment. This will set the potential dirt mechanism. In a less clean fab environment but using a labyrinth ring to protect the processing environment. · 64 200845274 4. Zone mechanism with magnetically coupled jaws - This example uses a magnetic coupling plate and a crane mechanism (see Figure 8 but The reverse (iv) 联 coupling can be passed through the non-ferrous wall of the air gap to allow the drive zone to be isolated outside the clean zone. The drive mode is any of the aforementioned types, such as lead screws, compression cylinders or linear motors. In the clean area, the dry bearing performance can be combined with the air bearing guide to limit the direction of movement. Figure 39 shows the loading cassette 23 and the connected loader 2, and another embodiment A cross-sectional view of a wafer air flow management system. The loader and the loader are similar to the loader of the previous embodiment. In the embodiment shown in Fig. 39, The door is opened and locked to the loading chamber and positioned for L. When the loader is turned on and the wafer is machined, the air is circulated around the wafer to maintain the wafer: clarity. For example, In the processing program, the wafer can maintain a low position for a long time and increase the risk of the particles accumulating on the surface of the wafer. In addition, if there is no proper air flow, any contamination caused by the tilt mechanism will be On the surface of the wafer, as shown in the embodiment, at least part of the air flow in the process = will be "trapped" and redirected to flow through the wafer. The air is then returned to the processing environment. Downstream of the transfer plane (WTP). Real:: Column I, the air flow pattern is horizontally discharged through the back of the g丨 round box in a direction parallel to the top surface of the wafer. When leaving the cassette, the discharge path will vertically traverse the hole and Guide it to the ground through the discharge opening. This method can keep the surface of the clean and fixed air flowing through the wafer in Kaitan = or # sealed environment. In the case of air type attachment program A such as nitrogen or argon #作时' as shown in the re-directed existing Airflow and re-entry 65 200845274 Flow to the mainstream system to support the control loop gas environment used in the control loop. As shown in Figure 39, the air supply film in the embodiment is mounted on the upper side of the wafer access area to the processing microenvironment. Vertical plane. This position is reserved in the existing SEMI E63 standard F0UP door opener. The air film is designed to trap the volume of existing air laminar flow from the microenvironment and to make the air flow from vertical to horizontal. When the inside of the outer surface of the loading crucible is lowered, the diffuser element is placed on the wafer [the back of the box. The diffuser is formed, for example, by a solid plate that is partially open depending on the flow member. The diffuser is designed to manage the passage. The horizontal air level of the wafer provides a pressure differential before the air enters the exhaust end of the pipe. The exhaust end of the circuit in the embodiment is forced to drain to ensure a steady flow of air through the wafer. For example, an axial fan is mounted inside the exhaust end conduit to direct the output to the processing device microenvironment port. On the other hand, the unit can be used without a fan and air supply film. The diffusion H and exhaust duct can be configured to ensure a more uniform flow through the crystal. 40A-40D are schematic cross-sectional views showing wafer stoppers of the loader of the embodiment. The embodiment shown in the overview shows a radial wafer limiter. The side wall of the box can be translated to provide a clamping action. The mechanism is retained in the E-box and is driven by the loading or hanging housing to the cassette media. The change pattern is to translate the inside of the sidewall to the sling. The mechanism is stored in the outer casing and is driven by the loading 璋'. casing to 埠H (Z axis of 〇HT) or the hoistway to the ( box (loading Ζ shaft). Use advanced materials for transmission (ie shape memory metal or magnetic limiters, etc.). The embodiment shown in Fig. 6 shows a wafer stopper that uses a clamping force that roughly tangs the top surface of the wafer. The vertical translation fingers in the embodiment are integrally formed with the cassette. The mechanism is kept in the box. The mechanism is driven by the loading raft, the nacelle to the stern (the O-axis of the OHT) or the pod to the cassette (the Z-axis of the loading raft). Off-axis translation in the modified aspect The fingers are integrally formed with the pod housing or cassette. The fingers are translated toward the wafer at a deviation from the horizontal angle (see Figure 40C). The mechanism is driven by the loading raft, the nacelle to the door (the O-axis of the OHT) or the pod to the cassette (the Z-axis of the load). In another embodiment, the 2DOF fingers are integrally formed with the pod housing or cassette. The fingers are rotated and then translated vertically to engage the wafer (see Figure 40D). The mechanism is driven by the loading raft, the nacelle to the stern (the O-axis of the OHT) or the pod to the cassette (the Z-axis of the raft). The crystals that are limited to the loader in the modified aspect can have any other suitable configuration. For example, a wrap is formed between the wafer edge contact supports, such as support fingers that form a linear edge in contact with the wafer on the cassette. Referring to Figures 41-41b, there are shown schematic perspective views, end elevations and top views, respectively, of a representative processing apparatus having a processing apparatus PT and a conveyor system of another embodiment. The processing unit PT is like a column arranged in the FAB processing compartment. The conveyor system 3000 of the embodiment can provide a means of servicing the processing compartment, such as the compartment internal portion of the conveyor system 3000 series FAB wide conveyor system. The delivery system 3000 of the embodiment is substantially similar to a portion of the AMHS system shown in Figures 29A-29D above. Conveying system 3000 can be in communication with other (e.g., compartment) portions 3102 of the FAB AMHS system via a suitable delivery interface as shown in FIG. As shown in the foregoing, the configuration of the processing device PT in the illustrated device column is only described as an example, and has a plurality of rows of devices 67 200845274 (the non-continuous embodiment shows two rows R1, R2, and the modified aspect may have more More or less device columns). In the illustrated embodiment, the array of devices is configured to be substantially parallel (geometric, but mutually configurable) and to form a substantially parallel machine direction. The processing directions of the different device columns may be the same or opposite to each other. At the same time, the direction of processing along a particular arrangement is reversed such that the direction of machining along a portion or region of the array of devices is unidirectional, while the direction of processing of another portion or region of the same array of devices is in the opposite direction. The processing units of R1 and R2 are assigned to set different processing zones ΖΑ-ZC (see the example in Figure 41). Each processing zone ZA-ZC includes one or more processing units at R1 'R2. The processing zone in the modified aspect has a device arranged in a single row. It will thus be appreciated that processing equipment in a particular zone is associated with a processor, for example, having complementary processing and/or having a similar device throughput rate. For example, the device area ZA has a south throughput device (eg, about 5 wafers per hour (wpH)), and a medium throughput device (eg, about 75 WPH to less than 5 〇〇 wpH) can be placed on Device zone ZB, while devices with low throughput (eg, about 15 WpH to 100 WPH) can be placed in device zone ZC. It should be noted that the device sets any particular zone to be the same, and one or more devices in a particular zone may have different production volumes or processing procedures than other devices in a particular zone, but there is a relationship between the devices in the zone so that at least The equipment in the same area is managed with a tissue suitability for the purpose of transport. The device area shown in Fig. 41 is merely illustrative and the device area in the modified aspect may have any other desired configuration. As can be seen from Figure 41, the conveyor system 3 can be used to transport the loader to the device. The transport 3000 system is substantially similar to the implementation shown in Figures 29-35 above. The 41st ζ ΰ ® ~ Θ ^ B The delivery system in the example is not included in the example. (For example, the conveyor system is installed on the upper side/head of the unit). The delivery system in the modified aspect has any other suitable configuration, such as having a substructure (e.g., the delivery system is disposed on the underside of the device, similar to the delivery system illustrated in Figures 30-33). As can be seen from the 4i_4ib diagram, the conveyor system generally has a plurality of delivery secondary lines or sections. The transport system H in the actual system has a batch material/fast delivery section, such as an actuator (for example, the "actuator or any other suitable transmission benefit" as described in the figure 20_25B). The transmission II can be extended through all the devices. Zone, and can substantially fix the delivery rate to transport the loader without setting/unloading the drive at the loader (4) Stop/slow. The transport system 3_ in the embodiment also includes a storage station/location 30_ (see also 41B) Figure 3, the shuttle system portion 3 of the shuttle 3202 with one or more storage stations/locations is fine (see Figure 42), and the interface, delivery system portion 3300. The interface delivery system portion of the embodiment can be aggressively The loader transported by the transmission portion 31GG or at the load station of the storage station is transferred, and the loader is transferred to the loading portion of the processing device. In the embodiment, the storage station, the shuttle system portion 3200 and the interface conveying system portion can be formed in a selective manner. A selective mounting portion mounted on the conveyor system. In the embodiment, the conveyor system portion 3, 3300, 3200 can be modularized to mount a portion of the system portion that is selectively installed in the conveyor system. The transport system shuttle system, the interface system, and the portion of the storage system portion correspond to the processing device ^ ZA_ZC. It can be seen that the 'conveying system 3 _ can be designed to correspond to the processing device or processing device ^ in addition to the embodiment The wheeling system can be constructed in the area TA-TC, which is generally commensurate with and corresponds to the processing of Dream Fan Shuangxia (he ZA-ZC. Because of the system of 69 200845274, the system has different system structure and the faulty system and the wear-through system In the middle, the wire is collected from the TA-TC of the Handa system. The interface of the medium conveying system is constructed ^

:=ΓThe system has the ability to add, remove and can: the type does not C in the H ^ ^ difficult TAM ^ turn · _ interface conveyor can be scheduled = 11 through the example of the overhead crane) part 3310, 3320.

The interface and the storage system are installed in the conveyor line area to provide an expected device access rate, such as a processing device corresponding to the corresponding device area ZA_AC.

match. As detailed in Fig. 41A, the interface transport system has a "" a different number of conveyor travel planes (e.g., a partial area TC has a single interface transport ϋ travel plane, see item 48, while other areas ΤΒ The conveyors in the area with more than one conveyor travel plane ITC1, ITC2, see section 41 囷), can span each other. The figure does not have two planes, but more or fewer conveyor planes are available. While the conveyor system in the embodiment is configured with a generally horizontal travel plane, the transport system in the modified aspect can have any other desired configuration including a vertical travel plane for the interface conveyor to bypass. The overhead crane system (OGS) can be designed for low, medium, or high productivity. Modular assembly through on-site reconstruction can be adapted to changing factors or processing performance. The modular equipment can be divided into three types; low productivity, medium productivity, and high productivity. The configuration of the various modules depends on a number of factors including the expected rate of movement, storage capacity, and the distribution of expected production rates in the bay. Low productivity: For example, a low-productivity device or device area can be filled with 70 200845274 nandan (five) cranes 331 〇. This configuration provides all the expected movements without using the "feeder, automatic manipulator 3320 or shuttle system 32". In addition to I transferring the loader from the storage to the device, the overhead crane can be driven from the inside. Grab the loader and transfer the storage location. In order to make the loader moveable to the adjacent souther crane area, the loader is placed in the inter-inspector or on the storage base for the search of her adjacent overhead crane. This configuration allows an overhead crane to span another overhead crane until the middle sorghum crane has been moved. When two or more overhead cranes are operated together and one of them fails, the adjacent overhead crane will replace the operation of the ineffective. The working capacity will be reduced, but not completely shut down. Moderate Productivity: For example, a medium productivity device or device area can be satisfied with the addition of a “feeder, automatic manipulator 332” (eg additional overhead crane/conveyor) ). This configuration is substantially similar to the low productivity configuration, with only one feeder automatic manipulator 3320 and sequencer/shuttle 332 添加 added. The feeder automatic manipulator and sequencer/shuttle in the embodiment are used to perform the designation of the t-chassis actuator-to-reservoir movement. Each feeder automatic manipulator can employ two overhead crane loader robotic controls 3310, 33 12 on either side of the feeder (see Figure 44). However, the feeder in the modified aspect can be paired with a loader automatic manipulator. The purpose of the sequencer/shuttle is to receive the loader from the feeder and arrange it for storage. By constructing the "loader", the automatic manipulator can focus on the two-way movement of the reservoir to the device without the additional load of grabbing the loader from the inter-chassis actuator. The system can be adjacent to the low, medium, Or the high-productivity module cooperates. When the loader automatic control device fails, the adjacent loader automatic control device will enter and operate in the area of the failed automatic control device (see Figures 46 and 47). When a feeder mechanism fails, individual loaders will operate in the same manner as the low-productivity configuration from the T-device. They remain effective but have reduced capacity in both failure scenarios. High Productivity: An example of an overhead crane model in high-productivity systems The system is redesigned to meet the needs of a specific unit or equipment area. High productivity is equipped with automatic loader handling devices on both sides of the compartment, a feeder automatic control unit similar to the yield zone, and a loader ς A similar sequencer/shuttle that is ordered to the reservoir (see section 45. The operating device corresponds to the device set on the side-by-side, allowing = Move. The loader enters the high productivity zone through the inter-vehicle actuator system. The high-productivity construction has a failure tolerance for the loader automatic manipulator failure and/or the feeder automatic manipulator failure. If one of the loaders When the automatic control device fails, the other loader automatic control device will operate on both sides of the fault after the automatic control device is removed from the area. If the feeder fails, the loader automatic control device will be responsible for the drive system from the compartment. Grab the loader. If both the loader II automatic manipulator and the feeder automatic manipulator fail, the wiper will take care of all expected movements. Construction: low productivity, moderate productivity, and High productivity may depend on the expected rate of movement as a single individual operation or any of the three types of equipment. The system does not have any single point of failure and the loader process in the system is completely ineffective. In addition to individual or multiple components In addition to the failure tolerance limits of the failure, the system provides multiple effective movements of the loader 72

200845274: Special = quasi-mobile combination with periodicity in traffic under normal operating conditions, heart shift ===:, in order to resolve the loader area. The first _ Λ and the diverging load are far from the problematic multiple methods. Shicai moves the loader from the defect to the "feeder" in the thread of the defect. The automatic manipulator can self-tapping the feeder from the compartment and placing it in the appropriate storage position. Need, and the main storage device can be used to load the automatic control device, only the movement of the coke storage device and improve the total mobile capacity of the system. The feed benefits the short-distance movement for the _ transmission limited or interrupted 2 moves (for example, when entering the loader from a dock similar to Figure 20, there is no X, the actuator is interrupted.) The Feed II mechanism can reduce the workload of the overhead crane system. The driving mechanisms that support the various movements include Linear motor, ball / screw, 'pressure, shrink drive' belt drive, friction drive, magnetic propeller, etc. The following embodiments can be implemented according to the above-mentioned way. The feeder automatic control device is similar to the overhead crane loading automatic control device The difference is that it is fixed in the χ direction (the length of the barrier) and has the freedom of y (the lateral direction of the compartment) and the ζ (vertical) direction. The feeder mechanism is installed in the device. Loading the plane below the robotic manipulator for the loader automatic manipulator to pass without payload. The area above the loading zone allows the loader robotic manipulator to freely move through the feeder under payload conditions. The system is vertically positioned so that when the vehicle is in the raised state, it can pass through the inter-vehicle actuator and has sufficient space to move the loader 73 200845274. The feeder enters the straight stroke from above to grab from the inter-instrument actuator system. Clear short-range: r: structure r storage lane system and compartment == surface. Storage tank has two-way sequencer / shuttle = shuttle to the next position. Shuttle drive mechanism carrier & A snail 牟 擤 擤 罢 罢 I 。 。 — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — — The adjacent loader is automatically operated:: between the slots. For example, the loading sequence of the loader is as follows: =: The actuator is temporarily stopped at the feeder automatic control device along the compartment The fixed X position of the length. _ The automatic control device travels from the gamma position of the preceding item to the top of the loader on the inner clutch. The feeder automatic control device grabs the loader. The feeder automatic control device is along the Y direction (laterally The rafter travels to the specific shuttle path. The _feeder automatic manipulator sets the loader on the shuttle and continues the next action. The gum/sequester mechanism drives the loader in the χ direction. Move to the storage location and then grab and set the loader on the appropriate device. The advantages of the wide yoke system include increased wafer productivity over conventional systems. 'Multiple moving paths to complete the loader. Move' and With the enhanced 74 200845274 failure tolerance limit. According to another embodiment illustrated in Figure 48, the feeder automatic manipulator is a linear machine that resides on a plane below the shuttle and the inter-vehicle actuator system. The machine has the same degree of freedom as in Embodiment 1, and the loader is grasped from below instead of above. When the loader is grabbed from the inter-chassis actuator, it is driven laterally to the compartment and released to the appropriate shuttle. The advantage of this design is that the drive lane can be placed anywhere between the equipment limits. For example, the inter-chamber actuator may be present in the center rather than on the outside as shown in embodiment i. Another advantage of this design is that the loader automatic manipulator can pass through a feeder mechanism with a payload along any gamma position within the compartment, while the loader of embodiment 1 is limited to being located only in the load zone. Make this move inside. In addition, the loader automatic manipulator does not need to be in communication with the feeder to prevent impact. Both the feeder and the loader automatic manipulator can occupy the same vertical space with a payload rather than being connected to each other. The movement sequence of this configuration is the same as that of the embodiment, except that the loader is grasped from below rather than from above. In the modified aspect, the underlying overhead or mechanism can be moved along the χ (length of the inspection), γ (the lateral direction of the compartment), and ζ (the vertical direction of movement. In this configuration, due to the 3-axis feed, it can be moved to the special (4) The storage lane and the channel, so the shuttle shuttle/sequencer. For example, the loader is driven out of the compartment to 'position in the appropriate storage lane and then vertically translate to the initial position of the machine. In another embodiment shown in Fig. 49, the storage bar can be used to increase the storage capacity, and the vertical residual storage can be used to store the machine and the borrowing system to extend the cutting table to the highest arrival point. The volume of the same shape can be set along the entire length of the compartment. It can be seen that, as in the embodiment shown in Fig. 41, the interface or loading station of the processing device PT that is servoed by the conveying system 3 (see also 37A-37C and 39) may have different facing layers opposite each other. The surface layer of the loading station and/or processing apparatus to be described below is not specifically representative of the position or orientation of any side of the loading station or processing apparatus, but represents loading Station or processing unit The predetermined orientation of the designated loading station and/or processing device relative to the mating loading station and/or the wafer loaded into the processing device from the loader. The loader transported into and out of the processing device PT by the transport system 3000 when paired with different facings The different device loading stations will have different orientations corresponding to different facing layers of the opposite loading station. Thus the loaders that match the loading stations of the different processing devices that are servoed by the conveyor system 3000 can have different orientations relative to each other. The cradle interface for the loading station of the processing device is polarized for pairing the loader in the desired orientation, such as the surface layer corresponding to the loading station. The loader (generally similar to the loading of Figures 1-5 and 36A_36D) The machine may not have an isomorphous configuration relative to the loading station of the mating processing device PT. For example, the loader may have a casing or casing that is heterogeneous in shape or shape (see Figure 1 and Figure 36A), but the substrate can be loaded with the intended orientation relative to the reference frame of the processing device. Thus, when equipped with a loading station for the processing device ρτ, the loader can be loaded The substrate therein is in the intended orientation specified by the processing device. In the modified state towel, the loading fresh box has non-heterogeneous impurities (for example, the carrying machine is similar to FQUP, and has one such as a substrate transfer opening in the cover box expected The side cover box) to form the intended orientation to match the loader to the loading station of the processing apparatus. The carrier CAR 200 of the embodiment has an appropriate identification 76 200845274 or mark (eg structural or electronic type) to indicate loading The orientation of the machine. It can be seen that the control system (not shown) of the conveyor system 3000 can be appropriately designed or built into the program to identify and/or track the orientation of the loader CAR 200 from the loader's discriminator or indicia. The conveyor system 3 is a loader between the devices PT in the overall FAB. The control system can also be designed or built into the program to link the orientation of the loader CAR 200 to the surface of the loading station so that the conveyor system 3000 can load the loader and match the specific surface of the loading station corresponding to the loading station. The orientation. In the embodiments illustrated in Figures 41 and 50, the conveyor system 3000 can include, for illustrative purposes, a separate motion (e.g., loader rotation to change the orientation of the loader as shown in Figure 41) to the conveyor. Θ Drive system 3600. The drive system 3600 of the conveyor system can initiate zero movement or rotation of the loader regardless of the movement of the loader in any other direction (eg, X, y, ζ directions as shown in Fig. 41), as will be detailed below. . Thus, the conveyor system 3000 of the embodiment can perform a four-dimensional degree of freedom movement (x, y, ζ, one) of the conveyor loading and unloading device. In the variant, the conveyor system can have more or less freedom of loader transport. In an embodiment, the ram drive system 3600 can be used to initiate independent squat movement of the loader for an "on the fly" loader, as will be further described below. As previously described, the processing apparatus PT includes loading stations LSR1, LSR2 having relatively different facing layers from each other, which can be placed by the conveyor system 3000 in different loading orientations (corresponding to the surface layer of the loading station) in the loading station. Referring again to the embodiments shown in Figures 41 and 50, the processing device PT that is servoed by the transport system 3 can be arranged in ri, r2 rows (however, as described above in the modified aspect 77 200845274, the processing device and The corresponding load station can be set to any desired configuration, and may not have rows or columns but have any desired array or series configuration. As can be seen from Fig. 41A, in the embodiment, the processing means in the row R1, R2 can be positioned such that the corresponding loading stations LSR1, LSR2 of the processing apparatus substantially face each other. Thus, as can be seen from Fig. 41A, the loading station LSR1 or the processing device at the R1 row can face the direction opposite to the facing direction of the loading station LSR2 of the R2 row (indicated by the arrow LSA2) (e.g., a distance of about 180 degrees) ( This is indicated by the arrow LSA1 of Fig. 41A). The orientation direction of each row of the loading station is similar (for example, in the corresponding device row R1, R2, the loading station LSR1, LSR2 is generally facing the direction of LSR1, LSR2 respectively), and in the modified aspect, one or more rows and columns One or more of the devices may have load stations of different facing layers to other loading stations of the devices in the same device rank. In other variations, the loading station can be in different or more than 180 degrees of facing orientation. In another variation, the loading station of the device that is servoed by the delivery system can have a similar facing orientation. Figure 41A illustrates that the CAR 200 is assigned to the loading station LSR1. The loader CAR 200 on the loading station LSR1 in the illustrated embodiment corresponds to the orientation of the face layer (represented by arrow LSA1) of the loading station LSR1 (represented by the azimuth component CAR A, as an example). Figure 41A also shows that the loader CAR 200' (shown in phantom) corresponds to the surface of the loading station LSR2 (represented by arrow LSA2) when aligned with the loading station LSR2 (represented by component CARA'). As can be seen from Fig. 41A, in the embodiment, the orientation of the loader CAR 200 for the loading station LSR2 is 180 degrees from the orientation of the loader for the loading station LSR1. In the variant, the difference in orientation of the loader for loading stations with different facings may be greater or less than 180 degrees.实2008 200845274 In the embodiment, the conveyor system 3000, for example using the Θ drive system 3600, the rotatable loader CAR 200 (eg Θ rotation) orients the loader to the desired orientation CAR A, CAR A for pairing with the expected loading station Loader. As can be seen from Fig. 41A, the transport system 3000 of the transport system 3000 can initiate a 180 degree rotation of the loader, while in the embodiment the loader CAR 200 activated by the 0 drive system 3600 has a twist of approximately 270 degrees, below It will be further explained. In the variant, the Θ drive system can initiate any expected amount of e-rotation of the loader. Referring again to Fig. 41, the aforementioned conveyor system 3〇〇〇 in the embodiment generally has a quick transport portion 31〇0 (such as an actuator with or without a separate transport vehicle or other suitable mass or batch material conveyor) and interface. The transport system unit 3300 (connecting the loader between the rapid transport unit and the equipment loading station enables the transport unit 31 to maintain a substantially constant fixed transport rate during operation without being affected by container loading and unloading at the loading station). In Fig. 42, the interface conveying unit 3300 is shown as having an overhead crane 331, and the alternate interface conveying unit may have any other suitable configuration. In the example shown in Fig. 42, two cranes 3310 (the interface conveying system is modularly assembled with an expected number of overhead cranes) generally have a translation platform 33丨2, which provides two-axis travel (for example, X, The y-axis, as shown in Fig. 41, is a transverse body 3314. The jaws 3314 can have any suitable configuration and can include a crane apparatus that can be raised and lowered to initiate 2-axis travel using a machine clamp $ for picking up and gripping the loader CAR 2〇〇. The case of the broken-body motor vehicle is the AeroloaderTM transport vehicle produced by Bruker Automation. As mentioned in the month, the overhead crane 3310 can be designed (see Figures 43-45 79 200845274) to grab or place the loader on the loading station of the escort unit. Also in the embodiment: a storage station 3000S is provided (see, for example, FIG. 41B), and an interface transport portion (eg, co-operating crane 33 10) can access the container at any of the delivery actuator portions 3100, or at the storage station 3000S or at the processing device The loading station, and the mobile loader CAR 2GG can be moved between any of the expected sequences described above. As previously mentioned, Figure 50 shows, for example, between any of the actuators 3i 〇〇 Ri, 3i 〇〇 R2 and any of the loading stations LSR1, LSR2, either R1, R2 or any two loads in the same or different device ranks. A representative example of partial loader movement between stations LSR1, LSR2, or between any of the loading stations LSR1, LSR2 and storage station 3〇〇〇s, may be initiated by the overhead crane 3310 of the interface conveyor 33 . The overhead crane 3310 in the example includes a θ drive system 3600, as will be described in more detail below. As shown in Fig. 50, the loader CAR 200 of the embodiment can be rotated (as indicated by arrow Θ), such as when transported by the interface transport 3300, to change the loader orientation as desired. For example, when transported by the actuators 3100R1, 3100R2, the loader CAR 200 can have any orientation. In other words, the orientation of the loader CAR 200 on the actuator conveyor is different from that of the load ί, which is set at the loading stations LSR1, LSR2. For example, when the loader CAR 200 is placed in the actuator conveyor 3100R2 (as shown in Figure 50, the component CAR A) is the desired orientation of the loader for its intended loading station (e.g., component CAR A'). Approximately 270 degrees (clockwise). The loader CAR 200 can be moved by the overhead crane 3310 of the interface conveying section 3300 from the actuator 3100R2 to the intended loading station LSIU, generally as indicated by arrow C2L1 of Fig. 50. In an embodiment, the orientation of the loader can be 80 200845274

, (eg, approximately 270 degrees clockwise θ rotation) represented by the original orientation element CAR )) when the actuator to the expected loading orientation (represented by the component CARA') with the mating loader CAR 200 to the loading station LSR1 The Department of Transportation changes it. Figure 42A is a partial schematic perspective view of the overhead crane 3310 of the interface transport portion 3399 showing the example state when the loader car 2 is supported by the cross-body 3314 near the representative load 4 LSR2. The loader is lifted by a return crane that is close to the loading station LSR2 and oriented to the surface of the loading station. The states shown represent the state before pairing or after unpaired loaders and loading stations. It can be seen that the loader transported by the transport system 3000, such as the moving path (e.g., the moving path C2L1) shown in Fig. 5, is used to load and unload the loading station LSR1, and the LSR2 can be lifted by the overhead crane 331 shown in Fig. 42A. Position it. In an embodiment, the loader CAR 200 is used to change the θ rotation of the orientation, for example to provide a pairing with the wear station, which can be activated by a "flying type," because the overhead crane moves the loader to the loading station. The θ rotation of the stray loader can be initiated at any desired time when the loader is moved by the overhead crane. In a variant, the rotation of the loader may not be performed in a "flying style". In an embodiment, the overhead crane can remove the loader from the loading stations LSR1, LSR2 and move the loader to the intended actuators 3100R1, 3100R2 and can be rotated by rotation to change the orientation of the loader during movement. For example, the rotatable loader can pre-position the loader in an intended orientation, such as corresponding to its next intended destination or loading station (the next intended destination and its corresponding loader orientation can be identified by the conveyor system controller) ). As mentioned before, when the loader CAR 200 moves between the actuator conveyors 3l〇〇R1, 31〇〇R2 and the loading station 81 200845274 LSIU 'LSR2 or between the same or different stations, at least Temporary:: 1; R2 in the storage station 3_S. The orientation of the loading loader for the loading station may also be different from that of the F-loader. For example, go = by means of the interface conveying section 33. (eg elevated: 枓(d) Longitudinal device 3320, see the 42nd and 4th feeds

At the time, the loader can have a part in ##子子j000S, and Gushou# is different. The θ rotation of the Dream Machine (4) is then performed to change its orientation as needed when moving from the Health Station 3_S to the loading station (such as along the arrow path of Figure 5). The θ rotation of the loader is performed in a manner similar to the expected orientation. The loader can also be placed in the storage station 30 〇〇S by an overhead crane to provide subsequent connections. For example: similar to the manner of 'When the loader is unloaded from a loading station, the overhead starter can change the loading position by the rotation when the loader moves from the loading station to the storage station. The overhead crane of the embodiment can also rotate the loader to pre-align the loader as the loader moves from the actuator to the stray station. In the example, the overhead crane 331, which is set to start the loader to the loading station LSR1, LSR2 of different ranks R1, R2, can move the loader from the loading station of one row R1:, R2 to another row. R1 'R2 loading station (with one movement or a series of movements) and can be rotated by the movement to change the loader orientation (from the original position of the loading station corresponding to the loader being removed to the destination loading) The final position of the station). ~ 82 200845274 Referring again to Figures 42B-D, the θ drive system 3600 of the overhead crane 3310 in the embodiment is also included in the cross-body motor 3314. The construction of the Θ drive system illustrated and described below is by way of example only, and in the alternatives the Θ drive system may have any other suitable configuration. In the embodiment, the cross-body motor vehicle 3314 generally has a base motor vehicle portion 3340, a lifting mechanism 3342, and a loader clamping portion 3344. The pedestal motor vehicle 3340 in the embodiment is movably supported on the translation platform of the overhead crane (see Fig. 42). The lifting mechanism 3342 attaches the loader grip portion 3344 to the base motor vehicle portion 3340. The lifting mechanism 3342 can be raised and lowered to cause the loader gripping portion to move up and down relative to the base motor vehicle. The loader grip is designed to connect and hold the loader. Referring to Figures 42C-42D, a schematic perspective view and a top plan view of the loader grip portion 3344 are shown, respectively. The Θ drive system 3600 in the embodiment may be included in the loader grip portion 3344. In the case of a change, the drive system can be combined with the overhead crane cross-body in any other way. In an embodiment, the loader gripping portion 3344 can include upper and lower side portions 3344F, 3344R that are pivotally coupled to each other (eg, as a rotating shaft) to provide relative rotation between the components (along the arrowhead in Figure 42C) Show direction). In an embodiment, the upper side 3344F can be attached to a lifting strap or member 3342(see Figure 42). The lower side 3344R can have a loader clamping mechanism to engage the loader. It can be seen that the loader can be locked with respect to the lower side portion 3344R of the cross-body loader gripping portion when clamped by the gripping mechanism. In the embodiment illustrated in Figures 42B-D, the ram drive system 3600 is generally provided with a motor 3602 (e.g., a suitable servo or step motor), a drive shaft 3604 and an encoder 3606. The motor 3602 can have a stator fixed to the upper portion 3344F of the loader clamping portion 83 200845274 and a rotor mounted to the drive shaft 3604. The drive shaft 3602 can be fixed to the lower side portion 3344R of the loader grip portion. Thus, the motor can rotate the lower side 3344R and the loader held by the loader holder. Encoder 360 (of any suitable type) can identify the absolute and progressive position of the drive shaft to a control system (not shown). As previously mentioned, the Θ drive system of the embodiment can be designed to provide approximately 27 turns or θ rotation. Therefore, the conveyor system can be rotated by at least about 9 degrees of soil relative to the original orientation of the conveyor. The modified drive system can have any desired configuration and a corner of any desired range of the rotary loader. In a variation, the cylindrical loader slot is set up as needed to provide a higher storage density in the FAB. A cylindrical storage tank mounts the loaders on top of each other and provides a mechanism to lift the loader to a specific height. The mechanism of vertical motion is compression, mechanical, or magnetic. Fig. 51 is a schematic plan view showing the conveying system 4'' of another embodiment. The conveyor system illustrated in Figure 51 is a representative portion, such as the inter-chamber portion of a cable conveyor system, and the conveyor system in the modified aspect has any desired dimensions and configuration. The transport system 4000 of the embodiment shown in Fig. 51 is similar to the transport system 3000 shown in the aforementioned 41-50. Similar components are numbered similarly. Similar to the delivery system 3000, the delivery system 4000 of Figure 51 has a batch or rapid batch delivery of the 呷:deleller and the face 4 is thin. The intervening face 1 in this embodiment is merely illustrative and may have any desired configuration in the modified aspect: ::::: Any number of components of the expected number (eg, similar to the storage described above) ° Generally The interfacial portion 4200 has a plurality of feeder auto-operations 84 200845274 vertical devices that can be coupled between the bulk transport system portion 41 and the processing device. The batch transport system unit 4100 is generally similar to the aforementioned transport system 500, and a portion thereof is shown in FIG. In the embodiment illustrated in Fig. 51, the batch delivery system portion 4100 includes an obstruction having a solid state transmission system. The executor is similar to the actuators described in U.S. Patent Application Serial Nos. 1,697,528 and 11/211,236. In the embodiment shown in 帛 51, the conveyor system 4100 is an asynchronous conveyor system (similar to the conveyor system 5〇〇) in which the loader conveyor transported by the conveyor system is disconnected from the action of other loaders in transit. Thus - or multiple loaders can operate independently during transport (10) such as acceleration/deceleration, stop, load/unload without affecting the transport rate of other late or adjacent loaders in the loader conveyor stream of the conveyor system . In the embodiment shown in Fig. 51, the batch conveying system unit (hereinafter, the main conveying path 41_ is provided by the batch conveying f-plane). The batch feeder 4100 also has a plurality of side rails 41. s. The main transmission line shown in Figure 51 is the first circuit of the 4100 ,, and in the modified form can be any other desired shape, which can form the main transport path of the loader transported by the bulk conveyor ( Or transport stream). Although the embodiment of the system is based on the loader, and the features described in 'the same applies to the modified aspect, where (substrate) loader = set the payload plane or other by the bulk conveyor The transported activity is placed. The main transport path in the embodiment has a continuous and substantially fixed speed: so that the loader transported on the main transport path 41〇 can maintain the transport productivity of the transport on the main path. The high speed does not hinder the loader that stops at the conveyor. The side rail or branch 4i〇〇s can transfer the conveying speed of the loader in the batch transmission. The measuring operation is connected to the main conveying path 85 200845274. Said that the rate determination operation is performed by the side Not affected by the main transport path. The side rail 4100S can then form a loader buffer, loading station or path conversion device. In the embodiment, a side handle is shown as an example, and any desired number can be provided in the modified aspect. The configuration of the side rails of the illustrated embodiment is the bifurcation and reconnection of the substantially straight line segment of the main control, and is only illustrated as an example, and the side rail system in the modified aspect has any other expected constructor. In other words, the side-keeper may be split between the opposite sides of the main (in a particular compartment) or in different compartments or compartments - in the compartment (as shown in Figures 29A, 29B) The main rail is split between the main rails. The side handles in the change mode have different orientations from the main rails and can be above or below the main control. In the change pattern, the handover between the master and the sideman can be visually designed to present Such as roughly orthogonal handover or transfer. The main and side handles 4100M, 4100S in the embodiment may include modularized connections A, B, C, D, L for modular connection to assemble the bulk conveyor. The loader is driven by a linear motor to the bulk conveyor Tracks 4100S, 4100M. Similar to the previous way, the linear motor compensator can be placed on the rails 4100M, 4100S, and the linear motor reaction can be placed on the loader. The loader can be supported by, for example, contactless or lubricated bearings. (for example, air/gas support) maglev system, or suitable means such as contact support (for example, roller, ball/roller support), can be freely supported on the road and act on the appropriate solid support member of the loader. The loader has integrally formed movable supports, such as wheels, rollers, gas/air bearings, etc. The movable support that supports the loader on the main rail and the side rails has a track support for stably supporting the loaders on the rails. Any expected configuration, 86 200845274 and distributed along the main rail and side rails for the loader to move freely along the track. The linear motor in the embodiment is a linear guide motor (LIM), and any desired linear motor or any type of motor/driver can be used in the modified form to cause the loader to move on the main and side of the bulk conveyor. . As described above, the LIM forcing device (or step reel) 4120, 4120M, 4120S in the embodiment is disposed on the main and side-executing obstruction modules A, B, c, D of the forming conveyor. On L, the loader has the UM reaction:

Should be $ rate / component, as will be detailed below. The motor coil in the modified aspect can be worn by a woman in a machine or a motor vehicle, and the magnetic reaction unit is mounted on the road. Referring to Fig. 51, the main stipulations of the 41 〇〇 M and the side executor core groups A ′ B, C, D, and L are representative, and the expected configuration is in the modified state. Unless otherwise noted, the obstruction modules A, B, C, d, L are generally similar. As shown in Fig. 51, the obstruction section (module) in the embodiment generally includes a single track segment (for example, A, C, D, L) and handover (the change of the melon can be changed) Any other expected modularized components are listed, and the specific obscuring module in the modified aspect may include a plurality of different loading and unloading conveyor paths) which are substantially phased and extended, and are referred to as non- The single-segment piece in the embodiment of the multi-functional module 1 may include a segment of the substantially straight line = Γ) L and a curved segment c, and the single-piece piece in the modified aspect may have other expectations shape. The transfer section B, 4102, 4102, the side rails ^ example ^ 41 § 〇〇 S and the main keeper 41 〇〇 M junction. Implementation as shown in 51 ® . , showing two handover segments 4102, 4102, as an example. And the configuration of the handoff section 4102, 4102 shown in Fig. 51 is only 87 200845274 as an illustration, having a single rail junction/branch on one side of the main rail 4100M (for example, relative to the X-axis of Fig. 51) Show the left side of the direction). In the change pattern, the handover segment can be branched to the right of the master. In another variation, the interface segment can have any other desired configuration, such as multiple branches in a segment, on opposite sides of the master, substantially directly opposite or opposite each other, or in the master Multiple branches on one side (eg left and/or right). The single-piece pieces A, C, D, L in the embodiment may have similar shapes although they have different shapes (e.g., straight lines, bends, etc.). Each of the segments A, C, D, L may be included in a corresponding portion of the LIM enforcer 4120. At the same time, as shown in Fig. 51, when the modular rail members are assembled in the LIM compulsion unit (with different controllers) in combination operation (using appropriate controllers), the basic continuity of the main rail and the side handle can be formed. The LIM Forcer 4120M, 4120S operates on the reaction plate of the loader and drives the loader to move over the entire length of the main rail and the side rails. The obedience in the change aspect may include one or more segments of the integrator. The compensator 4120 or the primary coil assembler as the LIM typically includes, for example, a steel lamination and phase windings that may be integrally formed with the rail member or may be enclosed in a compelling housing that is coupled to the segment. The forcing portion of each of the segments A, C, D, L (see segment C shown in Figure 52) may be segmented or continuous. The curved rail member C can have a forcing portion 4120C whose phase winding is designed such that the coil assembly forms a curve that matches the arc of the obedience, or has a segmented compensator portion that is designed to form a rough A curved forcing portion. The forcing portion of the segment in the modified aspect can have any other desired shape. The forcing portions of the segments A, C, D, and L can be symmetrically disposed on the track and the loader seated on the road. The force changer in the change mode can be reversed. 88 200845274 Symmetrically set on the road and the loader on it. Figure 54 shows a schematic end view of a typical segment A and a typical loader 5000 that is freely supported thereon. As mentioned above, the track (master and side) 41〇〇M, 4100S is generally equipped with an active force/impacter for the loader 5000, which is movably supported and guided to initiate movement of the loader along the way. As previously mentioned, in the embodiment, the motor of the loader is driven by LIM, and the enforcers 4120M, 4120S are operated on the loader/element 510 of the loader. Referring again to Fig. 53, a bottom view of the typical loader 5000 and the reaction plate 51 of the loader is shown. The configuration of the reaction plates on the loader shown in Figure 53 is for illustrative purposes only, and the reaction plates of the loader in the variations may have any other suitable design. There may be more or fewer reaction plates in the variant. In the embodiment, the reaction plate 5100 is shown on the bottom side of the loader, and in the modified aspect, the reaction plate can be placed on any other desired side or portion of the loader. The reaction plate 5100 in the embodiment may be made of a metal such as steel or aluminum, but may be made of any other suitable material. One or more of the reaction plates may be made of steel (magnetic), which will be described in detail below. The reaction plates on the loader may include one or more plates 5 102' corresponding to the forces 4120M, 4120S on the tracks 4100M, 4100S to provide urging forces along the main or side rails. As shown in Figure $4. The reaction plate 5102 in Fig. 53 is illustrated as a single plate, but may also include any desired number of plates, such as the design shown in Figures 2, 2, 1). As described above, the enforcer 412 〇 (and the compensator portions 4120A, 4120C of the opposite segments in Figs. 52 and 54) and the corresponding reaction plate 5102 are arranged substantially symmetrically on the loader and the way. The LIM in the change pattern is against. 89 200845274 The loader 5000 of the embodiment shown in Fig. 54 is movably supported on the rail by a suitable air bearing 4200. The distribution of the air bearing shown in Fig. 54 is for illustrative purposes only, and the discharge port in the modified aspect can be used to provide any other desired air pressure distribution to stably support the loader on the track. The venting holes in the modified aspect are vented on the loader to lift the loader from the track. As previously mentioned, the movable support between the loader and the track in other variants is any other desired type and is attached to the segment or loader. Air vents of the air bearing 4200 and/or gas on the loader (the body impact zone may be used to create a directional force to initiate horizontal guidance of the loader relative to the road. Figures 51-52 and 54 show In an embodiment, the rails 4100M, 4100S may include a control and guidance system 413 to guide movement of the loader as it is pushed along the track. The guidance system 413 is extended along the main and side rails 4100M, 4100S. Non-contact system. Each of the rail members A, C, D, L in the embodiment includes a corresponding portion of the guiding system 413〇a, 413〇c (see Figures 52 and 54), when the segments are connected The general continuity guiding system for forming the rail f can be combined. The guiding system in the modified aspect is independent (the guiding system in other changing modes, any suitable type, and can be devious The support system (for example, the roller or wheel connected to the carrier or the loader to assist in keeping the loader moving along the way, positioning and horizontal positioning) into a body and/or with a linear motor (The following will be described). It is also 豸' and / or with the loader support and line The motor is independently set. The implementation is set on the road 41_, and the guidance system of the side s generally has a magnetic armature 4130M, 4130S extending substantially parallel to the (4) enforcer 412() of the obstruction order. 兮道?丨μ虹The μ 忒 guided track can be moved with the steel guide 90 200845274 in the loader to maintain the expected horizontal position of the loader relative to the road 4100M, 4100S. As mentioned above, the section in the embodiment The pieces A, C, D, L may each have a corresponding portion 1430A, 1430L of the guiding magnets as shown in Figures 52 and 54. The guiding magnetics of the segments A, C, D, L in the embodiment The handles 1430A, 1430L have two guide magnets 4132, 4134 (shown in Figure 54) along the LIM-enforcer 4120A but on the opposite side. The position of the guide magnets is shown as an example. The more or less guiding magnets in the modified aspect can be placed at any desired position. The steel guides/components of the loader that cooperate with the guiding magnet are the other parts of the linear motor that will be described below. Off-axis (relative to the X-axis) linear motor reaction plates 5104R, 5106R, 5104L, 5106L (see Figure 53), or Other suitable steel plates/components that are independently placed on the linear motor reaction plate. In other variations, the loader can guide the magnetic components, and the obstruction can be configured to cooperate with the magnetic components on the loader to form a guide. The steel/magnetic material track of the lead system. The guidance system also includes a positioning/position sensing system/device that is coupled to the controller to initiate movement of the loader along the way. The positioning system/device is in accordance with the previously cited US patent. The application described in Application No. 11/211,236 is similar. The appropriate Hall effect sensor of LIM can also be used to provide positioning feedback along the main and side handles. Referring to the schematic plan view of the aforementioned rail member C shown in Fig. 52 and the typical junction section B. The other junction segments of the batch conveyor 4100 are generally similar to the junction segment B. The segment B in the embodiment also has a switching linear motor forcing portion 4125. In the embodiment, a separate linear motor independent of the main and side linear motors is provided at the interface to start the loader 91 200845274

The transition between the main and the side executives will be detailed below. The linear motor is converted in the embodiment, but other suitable linear motors can be used. Any other suitable electronic or mechanical conversion system can be used to modify the aspect. As shown in Fig. 52, the LIM forcing unit 4125 (for the switching motor) in the present embodiment is provided offset from the main rail and the side LIM forcing units 4120M, 4120S. The main track compensator can also be further segmented 4122, 4124, 4126 as shown. The segments 4122, 4124, 4126 of the master enforcer are substantially separate as shown, or may be virtually separated from each other by the controller for independent separation of segments 4124 across the conversion LIM enforcer 4125 without being related. Other master LIM enforcer segments 4122, 4126. The guidance system for the Forcer Segments 4122, 4125, 4124, 4126 and the handover segment as shown in Figure 52 is for illustrative purposes only, and the handover segment in the variant aspect may have any other desired configuration. As shown in Fig. 52, the conversion LIM enforcer 4125 in the embodiment is offset from the main rail and the side effector in the direction of the side junction/branch (e.g., to the left of the X axis). The conversion LIM forcing unit 4125 in the embodiment has one end portion 4125M oriented substantially parallel to the main rail direction (shown as the X-axis), and another direction substantially parallel to the side-side local direction (such as the b-axis shown in FIG. 52). One end 4125S. In an embodiment, the lateral direction (b-axis) of the side entry in and out of the main rail is oriented at an acute angle relative to the main forward direction (X-axis). Therefore, the loader can use the X-axis impulse to initiate the transition and will not cancel the overall X-axis impulse when moving to the side (for example, it will not stop at the main controller). In the change pattern, the angle between the entrance and exit of the side handle and the direction of the main direction is set as needed. (such as diagonal, even in this case, the configuration of the conversion linear motor can utilize the X-axis impulse). As shown in Figures 52-53, the end of the conversion LIM forcing 4125 is 4125M 92 200845274

The system is configured to operate one or more of the reaction plates 5104, 5106 of the main rail or side rail LIM. The reaction plates 5104, 5106 are laterally offset (along the gamma axis). In addition, the reaction plates 5106L, 5106R can also be longitudinally (along the yaw axis) offset from the intended reference point (e.g., center point) of the loader (along the X-axis). The reaction plate in the embodiment is disposed on a diagonal axis different from the side axis γ by an angle α, β. The loader in the modified aspect may have any other desired reaction plate configurations with more or fewer reaction plates. As previously mentioned, one or more of the reaction plates 51〇4L, 51〇6 [converting the LIM forcing device 4125 to convert the loader from the main rail 41〇〇M to the side handle 1〇〇8 (and as in the 51st The figure shows the side-by-side 41〇〇; §, the section 41〇2, and the other end of the junction is the opposite.) As shown in Fig. 52, the guiding magnetic portion 413 in the embodiment is used for switching between the main rail and the side handle. As can be seen from Fig. 52, the guide magnet 4136 (the side of the peach side entrance) in the embodiment is interrupted, thereby eliminating the magnetic guidance of the loader in the transition zone. The opposite guide 4132 (opposite side of the side entry) may include components having a switchable transmission magnetic field. For example, the 'guide member 4132' can be made into a magnetic chuck similar to a permanent magnetic member and a wound coil. When the current is passed through the coil, the magnetic field of the magnetic member can be switched. The transmission magnetic component in the modified aspect may have any other desired configuration. When the loader is continuously on the main control, the guiding magnetic component 4132j is "on, and when the loader is switched to the side rail, it is "closed". ,,. When the magnetic component is to be guided, the loader will be allowed to move laterally freely (offset from the main control), and may no longer remain on the main control. Changing the guide magnet system of the sub-belt: On the loader, the cross-section guide guiding system may include a suitable coil to generate a balance magnetic field of the loader magnet. The junction section additionally has one or more transmission/operability guide disks (not shown) that are substantially aligned with the side rails 93 200845274 inlet 〇 > axis, and will be guided when "opened" The lead loader (moved by the forcing 4125) enters the side rail 4100S. When the loader system moves past the handover and continues on the main control, the pilot magnetic component will be "closed." Therefore, when the loader is switched from the master to the side, the LIM forcing portion 4124 is closed and the guided magnetic member 4132J is "closed". The conversion UM enforcer 4125 is activated. The loader moves under power from, for example, the forcing device 4122 until the conversion UM controller 4125 operates on the corresponding reaction plates 51〇4L, 51〇6L. The forcer 4125 will cause the loader to move from the master to the side entry and move the loader to the side until the side rail LIM enforcer 4120S operates on the corresponding reaction plate 51〇2 to continue moving along the side hold 4100S. The guide track 4130S obtains the magnetic elements of the loader to guide the loader to move along the side sill 41 〇〇s. The position feedback mechanism when the loader is switched to the main rail to the side rail is performed by a guiding/positioning system for obtaining the loader on the main rail before handing over the conversion to the Limer Positioning, continuous position feedback when the loader converts through the conversion of the LIM, and allows the handover to the side LIM. Thus, the positioning device is positioned by any suitable type, continuous or distributed device (e.g., optical, magnetic, bar code, reference band, laser/beam range or radio range) for position feedback during conversion. Referring to another plan view of the transfer section B' of the batch conveyor of another embodiment of Fig. 52A. The junction section B in this embodiment is similar to the section B shown in Fig. 52 except as otherwise indicated. The guiding magnetism in Fig. 52A is not shown. The master enforcer portion 412〇M on the segment B' also has a segmentation 4124 with adjacent aborts 4122', 4126, interrupted. The side-by-side LIM-enforcer 4120B in the embodiment of this invention can be extended along the main rail to be operated on the loader's reaction plate 5106L when the loader is attached to the main rail. The reaction plates 5102, 5106L' (shown in phantom) for the loader to initiate the conversion as shown in Fig. 52A. The reaction plate 5102 of the LIM is disposed on the main actuator segment 4124 (for example, adjacent to the "upstream, the main rail forcing 4122, and the reaction plate away from 5106L") and the side rail LIM forcing 4120B, Cooperate with the operation. Therefore, the main rail member 4124 can be switched, and the armor 4120B' may be activated to guide the loader to the side. The transition from the side to the main rail is also achieved in a similar manner. The linear motor of the main rail and the side rail is any suitable linear motor, such as a DC brushless motor or other brushless iron core motor. The permanent magnetic member reaction element in the modified aspect is set in the loader, and another change The permanent magnetic part in the aspect is set in the rail piece (core motor in the loader). The phase winder in the modified aspect is set on the track as expected (as shown in Figures 20A, 20B) Similarly, or the loader cancels the magnetic field between the magnetic member and the motor core to avoid the guidance provided by the interaction of the magnetic/core elements of the motor and allows the loader to be switched from one track to another. Referring again to Figure 51, implementation One or more of the rail members may have an area I for lifting the loader from the rail by, for example, an automatic manipulator of the interaction portion 4200. The guide magnets in the lift zone! There is a component with a transmission magnetic field, similar to the component 4mj shown in Fig. 2. The phase winder in the modified aspect can be used to cancel the magnetic component in the obey or loader like a linear motor, or in orbit or loading The magnetic field between the steel reaction plates in the machine, by means of "liberation, the loader that is trapped in the track, and helps 95 200845274 to lift the loader from the track. Referring again to Figure 53, in the embodiment One or more loaders 5 can have a coupler 5200 to couple one or more loaders into a loader train. The coupler is of any suitable type, such as a magnetic coupler operatively coupled to the controller The loader in the change mode is a mechanical coupler such as a mechanical coupler. The joint diagram of the coupler 5200 is shown in the figure in the modified state as expected on the loader. To be transported by the bulk conveyor side More than two ==. This action can be used as one or more of the transported carry-on machines as the moving engine' and the other loaders in the train are passive. 51 ^: Example - the carrier Trains. As can be seen from the figure, the whole batch is delivered during the loading and unloading process, providing the lowering of all loaders controlled by the “Moving Machine Movement” in the train; the load of the controller. The specific loading in the train. Position of the machine;:=

The Sit car is in contrast to the control of the _ reference (for example, “Starting the J engine,” when each loader is used as a separate train control on the train, the controller will set the identification loader to The general position on the road;:; The squatting position (4) The detailed positioning of the position can be borrowed from any other expected party: Da: The position of the second train can be reached to achieve the carrier. The loader train makes the object In order to support the expected operating parameters & In addition, the hair (four) engine position 96 200845274 can be stopped by one to become the engine _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The schematic end façade of the suffix ^β: The transport system Α4000 of another embodiment is provided only as a suitable configuration of the wheeling system of the embodiment shown in the example of Fig. 55. The transport system in the modified aspect can be With any general system similar to the previous, / 55 map implementation, the transport system Α 4_ features a similarly edited and shown in Figure 51 of the transport system 4 face ' (similar to the speed batch or a large number of _). Reunification 4000 generally includes a quick The delivery unit Μ100; ΓΓ4100 and a face 42〇〇. The fast batch 55 II - /, one or more fast batch delivery paths Α 4102 (the first delivery: = can be transferred, such as class \ machine said (9) in the middle Batch batch A4100 batch material,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, The path of the batch can be similar to the above-mentioned way:::: the face 4200. In the embodiment, the 'face A42〇〇 can be loaded with the wear and mass transfer and add m. The face is eight gamma general and ΐϊ=ΓΓ Port A4204. As described above, the storage unit -4:==Γ:4Α, provides a storage or buffer loader for a plurality of processing devices. The storage position A42〇4A can effectively buffer the loader of the I device. The configuration measures ^ τ 饮 邵 A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A The conveying system A4000 in the example may have a conveying manual cutting portion a4300 for Connecting the transported loader A5000, for example, on the bulk transport section path A41〇〇 at a substantially fixed rate for a long time; 丨wvw疋, the transport system A400 in the embodiment is an asynchronous transport system, even if the loader travel path is A portion of the delivery system path that is delivered at a substantially fixed rate. In an embodiment, the delivery manual cut-off A4300 can be loaded from the delivery system A4

The conveyor is transported at a substantially fixed rate. The loader of the transport speed measurement operation is interrupted. Referring again to Fig. 55, the path A41〇2 of the batch conveying section is provided with a batch actuator system of any desired type. Referring to Fig. 55A II, the path pure 〇 2 of the eight sides of the batch conveying section in the embodiment is illustrated as an example. From this, it can be seen that == return to the support or loading surface A46G4, the loading _ A5_ support 1 ] can be carried A4103 for transport. It can also be seen that the 'transport belt a agall>: two: the machine loading surface (formed or derived by the conveyor belt) can be moved along the path = to move at a substantially fixed conveying rate (in the second picture ^

顼^ is indicated. In the variant, the drive system used to drive the loader along the batch I can be of any desired construction. , ~ path can have the solid state such as the roller as described above, the liquid support and other mechanical components of the actuator are mounted ^ in two: there are various types of 'the path can be automated or semi-automatic in the two change state of the actuator system can be Designed to operate by the system path «substantially fixed rate of rotation" or operable to bring the rate of rotation to the second line 98 200845274. In this case, the conveyor hand (four) break can provide the desired path (or part of its actuator system operation to maintain a substantially fixed delivery rate without being affected by the load rate measurement operation of the loader delivered by the actuator system) In the embodiment shown in Fig. 55A, the system of the batch transport unit path A* indicates that the overhead system is located at the elevated position of the processing device. The batch transfer path in the modified aspect is set relative to The device and the device are loaded with any desired height of the device. The second embodiment shown in the figure (loader A5_, typical representative. Loader A5 and the above and 3-6A/6B) The loader shown in the figure is similar. The loader A5_ in the embodiment generally has an upper side face A5〇〇2 (for example, to provide connection and connection of the loader & on the upper side or the upper side of the loader) and a lower interface _八5_ (for example, to provide connection of the loader and to the underside of the loader or below). The loader may have a side opening, a top opening or a bottom opening as described above. The changeable loader may have Any expected connection/joining surface (for example, surface bonding) to connect the loader to the loading system and the loading device of the processing device, the loading device LP system of the processing device shown in the embodiment of Fig. 55 (typical representative, real towel, loading interface LP The lower side of the loader can be connected to the face of the face, and the device loading interface in the modified form can be designed to interface with the complementary loader engagement member on any desired side of the loader. As shown in Figure 55, relative to the wheel The loading interface of the device of the system A4000 [the position of ρ is only used as an example, and the loading interface of the device in the modified state can be positioned relative to the input. In the 55th, 55A, the delivery section of the batch = 2 ^ The drive system of the path A41G2 may have a loader 104 for engaging the upper side of the loader A5. The loader support shown in the 99 200845274 55'55 is capable of being properly represented. The engaging members cooperate and operate to be freely grasped from the transmission =::, and the support α during the conveyance process. The lower interface A5004, which is suspended from the lower side of the path, is loaded on the path f. The loading is performed by + Da W may be accessed (e.g., access ί). Change aspect, the path of the actuator

The loader can have any desired configuration to engage and support the loader in the drive to any desired side of the loader that can be engaged or attached to the underside of the loader). (For example, the transmission β is further referred to FIG. 55.) As can be seen from the foregoing, the eight sides of the delivery system are similar to the interface system 3300' 4200 shown in the above and the 41st to 46th and 51st. The interface system Α42〇〇 is selective. A varying number of conveyor travel planes (such as those constructed by overhead crane A42G1) are traversed by the shuttle and feed automatic manipulator A42G2. As previously described, the interface system in the sample can have any other desired configuration. In the embodiment, the A-frame crane A4201 and the storage position A42〇4 are embedded between the path A41〇2 of the batch conveying section. The feeding automatic control device 八42〇4 can be designed to be loaded by the k-loader upper interface A5002. Machine A5〇〇〇, and supporting the loader from above. The shuttle (not shown) can support the loader from below or above. The automatic control device and shuttle can change the face in the case of any kind. As described above, the manual disconnection between the batch conveying unit A41 and the intermediate surface portion 4200 by the loader can be performed by the manual cutting unit A43, which will be described in detail below. 100 200845274 As shown in Figures 55, 55A, the manual cut-off portion A4300 generally has a frame surface that can be accessed and intercepted by a loader transported along a bulk transport path, such as at a substantially fixed transport rate of the path, to load the loader from The path is disengaged and the loader is positioned at a lowering station for the automatic manipulator/shuttle machine of the face A4200. The manual cut-off portion A4300 of the embodiment has a number of references to the 55B-55D Loaders A4302 (one of which is illustrated as an example). As can be seen from the figure, the frame A4302 is a motor vehicle or any other suitable transmission mechanism or system that can be aligned when the loader is transported on the path at the transport rate. The loader A4302 can therefore travel a sufficient distance along the path of transport (shown by arrow X) for the frame to be attached to the loader and to disengage the loader from the bulk transport drive support A4104. The frame A4302 is illustrated as a motor vehicle riding on the road or path A4304. The road A4304 is located below the path A4102 of the bulk conveyor (see Figure 55). For example, the road A4304 can be The hanger is suspended from the overhead frame. In the illustrated embodiment, the road and the frame A4302 thereon are also disposed below the face portion. As described above, the manual cut-off frame in the modified aspect may have any other It is understood that the configuration of the manual cutting portion in the embodiment can be applied to the loader on the frame access path, such as an individual part of the path. The manual cutting portion can be distributed on the appropriate components of the path. As can be seen in detail in the 55D, the frame A4302 has a loader interface A4306 for engaging and intercepting the loader on the path. The loader interface A4306 of the frame A4302 can have any suitable configuration. The loader interface A4306 in an embodiment may have engagement members for engaging a lower interface A5004 such as the loader (see Figure 55A). For example, the frame interface Α43Ό6 may have a kinetic energy connection 101 200845274 knot component to assist the kinetic energy coupling component of the loader to create a passive alignment of the engagement between the loader and the frame and the fixed passive lock upon engagement. The frame interface in the modified state can have any other intended passive or active coupling or engagement system (e.g., clamping a magnetic chuck, etc.) to intercept the loader. As shown in Fig. 55B, the frame A4302 can be supported on the track A4304 so that the loader interface A4306 of the frame A4302 can be fully aligned with the loader A5000 to initiate the connection. It can be seen that the frame A4304 is sufficient for the frame A4302 to accelerate to match the travel rate of the path A4102, align and intercept the intended loader A5000 driven by the path and disconnect the loader from the path support A4204. The frame A4304 in the embodiment should be sufficient to decelerate the frame to the desired speed for manually cutting the interface system A4200 to the derating station DS. The descent station DS in the embodiment is statically determined and its position can be changed (e.g., along the manual cut-off section A4304). The frame in the modified aspect can be placed on the way, such as on the loop track, to move substantially at the rate of travel of the path. As detailed in Figs. 55A and 55D, the frame surface of the manual cutting portion A4300 in the embodiment has a Z-direction movement, thereby closing the loader with the path, and loading/unloading the loader from the path support. In the illustrated embodiment, the frame is provided with a suitable Z drive (such as a guide bolt, hydraulic, electronic-magnetic, etc.) for driving the frame interface A4306 in the Z direction. Thus, by way of example, in order to remove the loader from the path, the frame interface A4306 can be raised to contact the loader interface A5004 (the frame is aligned with the loader). The loader interface can be further raised, for example, after attaching the loader to initiate the release of the loader A5000 from the path (as an example, the frame travel rate relative to the path can be changed, such as acceleration/deceleration to benefit 102 200845274 ^ The carrier is released from the path support). The hopper that is released from the path can be lowered by the frame A4302 to allow the loader to clear the range of the loader driven by the path. Loading the loader (4) and ^ using the manual cut-off portion A43 can be achieved in a substantially similar but opposite manner. In a variant, the Z-direction movement of the frame interface can be initiated in any other desired manner, such as the support track can have a Z' drive or lifter, or the support surface of the frame can be at the same height as the rise and fall ramps Lift the frame to contact the door ίΐ ίί. In another variation, movement along the axis is initiated by a suitable drive or path or other bit device of the loader (e.g., the path support can have a ζ-axis drive). Again - two to close or move the loader and frame to manually disconnect the axis of the money loader from or out of the path (relative to the ground reference frame). "Top 4 direction Α 4300 ϋ彳 55B C picture is not as detailed as above. The manual cut-off part 3〇〇 has the lowering station DS setting accessed by the interface part a· Α 4202. The degrading station in the face longitudinal assembly can still deviate from the bulk transmission, the delivery range of the partial path and the loader on the upper transmission, such as γ ^ : the deviation of the change can be along any expectation == at 55th-55 Fig.), the general representative is formed from the path: := Lateral offset 'helps to help the facial class. Access upper side = two 1 (9) 2. In addition, in the embodiment, when the loader is framed by the frame A4302 3 When station DS, the upper interface of the loader can be self-synchronized from σ, 丨4 A42GG, and the frame is connected to Α5〇〇2〇, so the system frame is manually cut off in the embodiment towel machine" It can be designed to set the f 103 200845274 carrier in the storage position 'the face can access the dual carrier from the storage position ° another - change' aspect, the manual cut-off frame and the device can be connected to the loader - a common interface. In the embodiment, the top surface access is available for the interface to adopt the automatic feeding device A42 2 is connected to the loader stand demoting the DS. Changes in the manual aspects of the cutting portion can be reduced level station conveying direction departing from the scope of any suitable interfaces for accessing and portions contained in the machine-level station down.

As detailed in Figures 55B-55C, the loader A5_ of the embodiment can be moved back and forth by the frame A4302 to and from the lowering station DS. For example, the frame may have a suitable Y-drive (the drive may optionally provide a frame or at least the interface/support portion of the loader is free to move in an offset direction) to provide a frame to move the loader to the lowering station. For example (4), the side of the frame interface A can be placed on a freely movable support to move in the Y· direction. The frame in the modified aspect can be moved to the loader - and in the Y direction to move the loader to the lowering station. In still other embodiments, the obstruction may be made such as a curved (e.g., endless loop) offset from the delivery range such that the frame traveling along the track is directed to the derating station. Referring again to Figures 56-56A, a schematic plan view and elevational view of a typical transport system A4_ of another embodiment is shown. The delivery system A4000 of the embodiment shown in Fig. 56_56a is substantially similar to the previously described delivery system A4_ (similar components are represented by like numbers). The conveyor system, the general system, has a batch conveyor A4100, has a plurality of paths A41〇2, a face A4200, (illustrated as an overhead crane as an example) and a manual cut-off unit 430 ( Τ Manually cut the loader A 500 ' between the batch conveyor and the media face and provide the package with the expected bulk feed (4) to drive at a substantially fixed travel rate of dimension 104 200845274. In the embodiment, manually The separation or deviation between the lowering station DS' of the cutting portion A4300' and the conveying range TE' of the path A4102' (allowing the conveying rate to determine that the loader operation/work is performed outside the conveying range) can be changed by the direction of the path A4102 Startup. As detailed in Fig. 56, the path in the embodiment < has components A4102A, A4102B, A4102C' which are different from each other in direction. For example, at the junction of the bracket/splitting portion, the end of the path occurs. (See Figures 29A-29B and 51.) For example, in the embodiment shown in Figure 56, the path portions A4102A', A4102B, A4102C' having different directions are generally formed with two bends, each having a sufficient size to mention The desired separation between the delivery range TE' and the manual cut-off portion to form the lowering station DS. As previously mentioned, the direction and configuration of the illustrated path portion is illustrated by way of example only. The components of the embodiment have manual cuts. The broken portion A4300' is substantially similar to each other and similar to the manual cutting portion A4300 shown in the above and the 55A-55D. Each manual cutting portion A4300 has a frame and a lateral track A4304' for loading from the path A4102'. / Unloader A5000, (see also Figure 56A) (similar to the above). Each manual cut-off A4300D may have a lowering station DS' for the loader. In the embodiment, the descent station DS is substantially Align the way A4304' (also align the path of the transport range τ Ε, part of the downstream or upstream part, as shown in Figure 56.) In the embodiment, one of the manual cut-off parts A4300, A4300B can be used to load the loader Dismounting from the path, and another component can be used to load the loader on the path. For example, component A4300' can connect and grab the loader from path portion A4102A'. The unloading loader A5000' can be led To the drop station DS, such as is set Execute the end of A4304' to manually cut to the face A42〇〇. It is expected that the loader loaded on the path of 105 200845274 can be led to the part A43〇〇B by the face A4200, and the descent station DSB Manual cut-off is performed, and then the manual cut-off portion oob, the movable loader can be moved, the conveyance rate and direction of the path portion A41〇2c, and the loader loader are carried on the path. Each of the components can load/unload the loader to/from the path (eg, the track can have multiple lowering station settings to support the loader relative to the load or #, and/or the frame can be along the way _ To start loading and unloading (4). The delivery system A4000' can then be asynchronous.

Factory automation uses wafer identification to program wafer f-s scheduling and tracking operations. The ID is machine-readable and managed by a database in the host server. The wafer identification in the database is initiated by the failure state or software error of the wafer cut-off. Therefore, a reproducible reading step on each processing device can be used to solve this problem. The machine reading of the wafer typically occurs after loading the loader, the wafer is removed and the orientation ID is returned to the host for authentication and then the program is recognized. Traditionally, if an incorrect wafer is loaded, it will not be immediately ejected until it takes a lot of time to identify it. In addition, when the device is lost due to error, the wafer must be saved and reloaded into a loader/database that creates potential human error. The loader can be equipped with an on-board documentary data tag that can be used to read and store the wafers contained in the two. According to the above, there is an interlock to lock the loader-written iD tag to the loader. The writer's 1W sign is accompanied by the external number = / 〇 W. The signal is connected to the sensor and can be used to remove the door. The sensing 1 can be any suitable (four), such as optical, mechanical, 106 200845274 acoustic or electric valley. For example, a low voltage signal line can pass through the electrically conductive pad on the pod housing and the nacelle door. The pad is partially in contact when the door is closed to end the voltage flow. When the door is removed, the electrical flow is interrupted and the signal is generated on the loader ID tag. The wafer reading method of one of the embodiments is coupled with a software integrated label and method to detect if the door is open. For example, when the wafer is loaded and the door is locked in the sling, the integrated standard (4), the written person writes the human load, and the mountain. When the car arrives at the τ-device loading ,, the standard money is integrated with the private signing system. If the integrated tag is valid, the wafer system is assumed to be undisturbed and has an eve. If the integrated label is 纟安, it means the door has been removed and the wafer ID accuracy will be questioned. Based on this information, the host will force the device to check for integration. According to another embodiment, the integrated wafer 1*0 reader can be placed in the load magazine. The read 11 series is set to open the injectable 4 readable ID at Η to minimize the cycle time. The advantage of this embodiment is that it has a reduced cycle time compared to the method present in the processing apparatus, and the entire authentication procedure can be performed in the event of disconnection from the processing apparatus. According to another embodiment, a designated daughter digital display 11 can be added to the loader in each of the wafer slots in the loader. Is the integrated display system residing on the loader? The actual wafer m is associated. The string height is large enough to be read by a long distance between a similar operating shell and a ceiling mounted storage nest. The display of this embodiment shows the ID integration by _. If the integrated label is invalid, it will be graphically represented by a distinctive string or color. Wang Another - The embodiment integrates external wafer ID reading (4). The external wafer 〇 107 200845274 reader is placed outside the loading cassette and processing device such as in the AMHS system. The loader with the suspected wafer 1D is loaded into the external reader for certification. When the job is finished, the door will be closed and the integrated tag will be written to the writable loader ID. Then move the loader to the final destination storage/loading position. The benefit of this is that it is performed in parallel with the wafer loader standby time rather than in tandem with the device processing time. In addition, the external reader can be attached to the wafer orientation method. Referring to Fig. 57, there is shown a schematic elevational view of the loader door of still another embodiment. The loader door shown in Fig. 57 is similar to the loader of the foregoing and illustrated embodiment unless otherwise noted. The loader door has a conventional circular or cylindrical shape or perimeter (similar to loader 2000 in Figure 36C) and the loader in a modified form can have any other desired shape, such as having one or more flat perimeters. . The loader door 6070 (described in detail below) that is freely attached to the loader housing 6 〇 6 关闭 is closed to close the wafer (or other working area) opening in the outer casing and the inside of the isolating loader, shown on the loader 6 The bottom of 〇00 is only explained as an example. The loader door system in the modified aspect is placed on any other side or surface of the loader. As previously mentioned, the loader can be made of a metallic (non-ferrous) material or a non-metallic material such as a thermoplastic material. As previously mentioned, when the loader door 6070 is closed, the door 6070 and the outer casing 6060 form a seal 6080 between the interface between the loader door and the outer casing, as will be described in more detail below to bring the interior of the loader to the outside atmosphere. isolation. The loader door 6070 can be flash locked to the outer casing 6060, with the flash lock system 6072 fully securing the door to the outer casing and allowing the intended transport of the loader. The interrogation lock system 6072 is generally solid in the embodiment (i.e., substantially free of moving parts), 108 200845274 and in a variant aspect the latching system can have solid state or mechanical activation components. In the embodiment illustrated in Figure 57, the latching system 6〇72 includes a magnetic latching system 0074. The magnetic latch system 6074 typically has a magnetic or magnetic field portion 6074M and a reaction or platform portion 6〇7411 to react with the magnetic field portion to create a latching force and latch the door to latch to the outer casing. The magnetic portion 6074M of the embodiment is distributed substantially along the periphery of the container casing or, for example, the periphery of the door and casing interface to create a substantially (evenly distributed magnetic field) in the wafer opening of the loader casing. In the embodiment, the magnetic portion 6 The 〇74M is constructed of a flexible (ie, multi-polar) magnetic strip or magnetic tape. The flexible magnetic tape is shown schematically in Figure 57A. The magnetic or solid-state latching system in the altered sad form is constructed in any suitable manner. Attached or segmented and mounted on a loader to form any desired shape. In the embodiment illustrated in Figure 57A, the multi-polar magnetic component is attached to a flexible or flexible flexible non-magnetic material (eg The magnetic portion 6074M in the embodiment is illustrated as being mounted on a substantially flat surface of the outer casing. The reaction portion 6074R of a suitable ring or segment such as a ferrous material is illustrated as being mounted to the loader door. On the opposite surface, the magnetic part of the change state ί is mounted on the door, and the reaction part is mounted on the outer casing and can be placed on the raft and any other desired surface of the outer casing. When the door is closed, the reverse The portion is biased toward the flexible magnetic member of the magnetic portion to form a door sealing body along the opening. Referring to the 帛58 ffi system, a loader_〇 of another embodiment and a schematic elevational view of the loading bee 6300 are shown. The loader is substantially similar to the loader 6_ of Figure 57. The illustrated loader is attached or closely attached to the loader 6300. The load magazine 6300 is substantially similar to the load port illustrated above, unless otherwise stated in 109 200845274 The embodiment of the loading Zen loader is locked to the loading cassette and the loader door lock is locked. The loading magnet has a magnetic piece that is operated on the components of the loader, and the profit is also in the «machine (10) = for example, electromagnetic parts). In the embodiment, the loading of the door and the loader; the engagement of the loader door may result in loading of the loader door: == magnetic between the door of the machine (four) two = having the strength of the load to make the loader door and the loader Magnetic between the two) Open, load the door to unlatch and open the loader door. Conversely = when returning to its closed state, the loader door will automatically ask for the lock: 59A-D shows the loader housing door in several different embodiments, «the four direction between the outer casing and the loading door (or “χ”) interface.磁性 Refer to the magnetic interaction of the loader _〇 side shown in Figures 60-62. As previously mentioned, the assembly may include tampering with the lock line to lock the loader 6_, the lock flange, and the loader door _ to the loading door 6320. The solid state flash lock system may include a magnetic member such as an electromagnetic member 63〇2 that is coupled to the ferrous material 63〇1 in the loader housing 6_. Change the 'magnetic part (4) 2 of the sample to any suitable magnetic part. The ferrous material is similar to the above: The magnetic portion of the body 6074 is movable along the periphery of the loader casing 6〇6〇. In a variant, the magnetic portion has any suitable ferrous material of any suitable shape. Alternatively, the magnetic portion of the modified aspect is continuous or segmented and mounted on a loader to form any desired shape. The loading door Μ also includes a magnetic member 63〇4 that is substantially similar to the magnetic member 6302, and the loader door system includes 110 200845274 =:::= two: "3.3. The magnetic member 6302 in the modified aspect is moved by the z-axis of the lead-loading machine. The friction plate 63=moving 17==the loader door 6070,

Loader_0, any of the other H;; the alignment component in the modified aspect interacts with the general elastic manned. The alignment component is as shown in the figure. The Li: alignment component can be combined with the magnetic component. The F carrier (4) is loaded with the loader 4. Another change is that the alignment is achieved by any suitable means. = 2: The loader _, and the load 璋 _ are aligned with the loader to load itching. In addition, due to solidification. Therefore, hang in: 匕 only the minimum force is required to lock the loader to the loading contact! ^途# > ^ The size of the piece can be minimized, and the loader _〇 can be contacted while the loader is loading the surface. At the same time, it can be seen that the magnetic 63G4 in the loader flange and the loading door (4) can be stopped or closed during the most loader and TM operation. The stop operation of the magnetic parts (10) 02, 6304 will be «the carrier is placed on the loading and (9) and the loader casing Na Q consisting of the question lock system 4 6074 is turned away, and the latch of the loader door _〇, 111 200845274 /3⁄4, sealed. The magnetic members 6302, 63〇4 can be activated or turned on while the loader 6〇〇〇' contacts the load cassette 63〇〇 so that particulate matter is not allowed to enter the loader. As can be seen from Fig. 63, a sealing body can be provided to isolate the interior of the loader from the outside atmosphere. The seal can be brought into contact prior to activation or activation of the latch of the loader latch to the latching system. The sealing system is provided as a flat seal between the loader housing 6060, the load jaw flange 6310, and the loader door 6〇7〇, and the loading gate 6320. The sealing body may also be a 〇-shaped ring disposed between the loader housing 6〇6〇, the loader door 6070, and between the loading jaw flange 631〇 and the loading gate 6320. Any combination of flat seals and/or 0-rings can be used in the modified aspect. The sealing system is made of a deformed material such as foam material or rubber. The sealing system in the modified aspect is made of any suitable material. The sealing system of another embodiment is constituted by a magnetic member 7〇4〇 as shown in Figs. 64C-64E. In one embodiment illustrated in Figures 64A-64B, the sealing system has a molded sealing body 7〇5〇 that can simultaneously contact the shape of a plurality of surfaces. For example, the sealing body as shown in Fig. 64A has a curved top and a horned bottom. The second seal 1 body 7050 is deformable such that when the loader _ 〇 is lowered, its curved top portion will be deformed to contact the loader door 6070, respectively, with the load 埠 flange 631 ^ positions 7060B and 7060A. The sealing body between the loader housing 6060, the loading jaw flange 63ι and the loader housing 6060, and the loader door 6〇7〇 can be provided by a magnetic member, a 〇-ring, a flat seal or the like. . The sealing system in the modified state is provided by any suitable means. In addition to the contact position 7〇6〇a, when the loading pedal 16320 is in the closed state, the angular bottom of the sealing body can contact the loading jaw flange 631G to advance the lifting device/loading chamber 112. 200845274 The Ministry is isolated from the outside atmosphere. The seal 7050 in the figure is shown attached to the loading trick 6320, while in a modified version the seal can be attached to the loader housing 6060 'loader door 6070', loading the flange 63 10, loading 埠Any one of the doors 6320 or any other suitable location. The seal 7050 of the modified aspect may have an arm member extending between the loader housing 6060, the loader door 6070 and the load port. The sealing body in another modification has any suitable shape. The sealing body 7050 during operation can be passed through a seal formed at position 7060A to isolate the processing apparatus. Since the loading door 632 is opened, the sealing body 7040 will be disconnected for the loader door 6〇7〇 to be separated from the loader 6〇〇〇. The sealing body formed by the sealing body 7050 at the position 7060B prevents any contaminant/atmosphere between the loader, the door 6070' and the loading door 6320 from entering the ejector 6000' or the processing device/loading cassette. The opening operation of the loader will be explained below. The loader 6 抵达 arrived at the load 埠 6300 as described above. The loader 6000 can be mechanically coupled to the loading cassette 6300 by, for example, z•axis alignment members 6330, 6330' or the like. Loader housing 6060' may be allowed to float during mechanical attachment. The alignment component provides the minimum guidance of the loader during startup of the loader/loading latch system. The loader door 6070' can be latched to the loading door 6320 by the magnetic members 6303, 6304. The loader housing 6060' can be latched to the load jaw flange 6310 by magnetic members 6301, 6301. The magnetic members 6303, 6304 can be pressed to secure the loader door 6〇7〇 to the magnetic member of the loader housing 6060', and the loader door 6070, and the loader housing 6060 are unlocked and removed from the housing 6060'. . The wafer can be lowered from the loader 6000 down to the automatic manipulator transfer height. In this embodiment a bottom loaded loader is employed, however any suitable 113 200845274 can be employed in the variant (e.g., front loading, etc.). When the loader is turned off, the wafer will be lifted to the autopilot transfer height to the inside of the loader 6000'. Loader door 6070' will be embedded in loader housing 6060'. The loader door can be latched by the aforementioned loader door/loader housing latch system. The loader housing 6060' and the loader door 6070' can be simultaneously unlocked by closing the magnetic members 6302, 6304, and the like. In the variant, the loader housing and the loader door can be unlocked at different times and in any order. The loader can leave the load magazine. It is to be understood that the foregoing description is only illustrative of the invention. Those skilled in the art can make various modifications without departing from the invention. Therefore, the scope of the patent application of the present invention covers all modifications. 114 200845274 [Simple description of the round] (4) The device interface of the loader shown in the figure 2A of the working piece, the mouth and the other section ί, 2Β 3A-3C is a schematic cross-sectional view of the device interface and the different positions of another embodiment of the embodiment; Figure 4 of the machine is a further embodiment The interface between the loader and the device is the interface configuration of different embodiments: loading "the enlarged cross-section of the face portion between the devices"; 5A-5C is the loader and device partial elevation of the other embodiment Figure 6 shows a machine in three relative positions. Figure 6A.6B is another embodiment of the machine, set "face;elevation; T-loader relative schematic 7A-7B is another embodiment The work piece is a vertical view showing the loader at different positions; the machine's unreliable façade is shown in Fig. 8 is another example of the device; the other side of the machine is not intended to be ^_ another implementation Another schematic of the device interface and loader of the example 115 200845274 is a device of another embodiment Another schematic elevational view of the surface and the loader, and FIG. 1A is a schematic partial elevational view of the processing apparatus of another embodiment and a loader interposed therebetween; FIG. 11 is a processing of another embodiment A schematic elevational view of the loader between the device and the intervening device; Figure 12A-12B is a schematic bottom view of the loader (workpiece transfer) opening of the U-picture and the transport door of the loader; Figure 13A-13B Figure 14 is a schematic plan view of the interface between the device portion of the U-shaped device and the device for transporting the door; Figure 14 is a schematic elevational view of the processing device of the further embodiment and the loader interposed therebetween; Figure 15 is still another embodiment A schematic elevational view of the device interface and the loader; Figures 16A-16B are schematic elevational views of the device interface and loader in two different positions; Figure 17 is a schematic side view of the loader, 17A-17C is another plan view of a loader and device interface of another embodiment and a plan view of the device interface; and FIGS. 18-19 are schematic elevational views of the device interface and loader of another embodiment; Figure 2 is a schematic representation of another embodiment of the delivery system Fig. 20A-20B is a schematic partial view of a part of the transport system of Fig. 10; a plan view, and a schematic bottom view of different payloads of the transport system of another embodiment; 116 200845274 Part: Graphical representation of another embodiment of the other part of the embodiment:: Figure another - (10) Figures 25A-25B are different elevations of the transport system of another embodiment; j=B: is a different schematic elevational view of another embodiment of a transfer interface system for transferring a loader between a conveyor system and a device; Figure 27 is a schematic partial elevation view of another embodiment of the conveyor system And the 27th Β 27 Β 系 ( 四 四 四 四 四 四 四 四 ; ; ; ; ; ; ; ; ; ; 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 The description of the transfer system is shown in Fig. 29C, which is a schematic view of the conveying system and the processing device of the other embodiment. Fig. 30 is a schematic view showing the conveying system and the processing device shown in Fig. 29C. ; μ Figure 31 is another schematic partial elevation of the conveyor system; Figure 32 is another Another schematic partial elevational view of the delivery system of the example; Figures 33-34 are respectively a schematic plan view and an elevational view of another embodiment of the delivery system; Figure 35 is a delivery system of another embodiment. Another schematic plan view; 117 200845274 36A-36C is a bottom view, an elevation view and a bottom view of another embodiment of the transport device; 36D is another bottom view of the transport device of another embodiment; Figure 37A-37D is a perspective view, end and side view, and top view of a device loading station of an embodiment; Figure 37E is another Another device loading station of the embodiment,

Figure 37F is a plan view of another apparatus loading station of still another embodiment; Figure 37G is a plan view of another apparatus loading station of another embodiment, 38A-38C_ showing the flow of different procedures of different embodiments圃, Section 39® is a sectional view of a device loading station of another embodiment; 40A-40D® is a schematic sectional view of a substrate support of another embodiment, FIG. 41 and FIG. 41A_41B are processing of another embodiment The system is not intended to be a perspective view, the end elevation and the top view; Figure 42 is a schematic exploded perspective view of the portion of the system without the 41st; the 42A-42B are respectively the delivery system of Figure 41 and A relatively schematic partial perspective view of another part of the loader at different positions, and a 42th (^2D diagram is a schematic perspective view and a top view of the loader (4) of the input (10) shown in Fig. 41; 118 200845274 Figures 43-47 are schematic diagrams of different alternative arrangements of systems of different embodiments; Fig. 48 is a schematic elevational view of a system of yet another embodiment; Fig. 49 is a schematic partial perspective view of another embodiment of the system Figure 50 is another illustration of another embodiment of the processing system Figure 51; and Figure 51 is a schematic plan view of another embodiment of the delivery system;

Figure 51A shows the relationship between the batch size and the transport rate. · Figure 52-52A is a schematic partial plan view of a portion of the transport system of another embodiment; ~ Figure 52B is a transport system of another embodiment Fig. 53 is a schematic plan view of a motor vehicle of the transport system shown in Fig. 51; Fig. 54 is a schematic elevational view of the transport system of another embodiment; Fig. 55 is a diagram showing the transport of the embodiment A schematic end elevational view of the system; ... Figures 55A-55D are schematic partial side views of the delivery system, the delivery plan view shows the loading device transported by the delivery system at different locations, and the lateral side of the delivery system Fig. 56 and Fig. 56-56A are respectively a transfer system surface diagram and an end elevation diagram of still another embodiment. ^十57A图第 ΓΓ — — 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意 示意Another: Illustrated elevation; 119 200845274 - (4) 2 is a partial load diagram of the loader and the loading raft. The loader and the loading raft are not in two different positions; I have a partial two = another loader of another embodiment A schematic cross-sectional view of the 64A-E diagram of the loading port interface. Loader to Mounting (4) Interface of Different Relative Embodiments [Major Component Symbol Description] 10, 10, Automated Material Handling System 15 Compartment Transportation System Unit 20 Interscribing Transportation System Department 35 Interscribing Positioning Unit 25 Transportation Branch Line Or branching section 45 processing barrier 35A input section 35B output section 200 workpiece loader 202 compartment 204 opening 210 cassette 210S elongated support 212 cover box 214 hollow (outer casing) 216 wall (cap/cover) 220 loading Machine 221C,, 222C' beveled sealing surface 221CD, 224CD, sealing surface 222, 224, 320, 320", 321" sealing portion 240 outer support 300 loader. 120 200845274 314, 314'' housing 316, 316&quot Wall 314Γ Housing Interface 326, 328' Supporting Flange/Part 300, Loader 328" Support 400 Vacuum Chamber (Load Lock) 410 Positioner 412 Drive 414 Coupling 416 Shuttle 430 Loader Door Space 440 Through Hole 300F Loader 400F Loading Lock Chamber 316F Bottom Wall Portion 314F Ring Portion 314PD Top Wall Portion 470F Groove 300G Top Sealed Carrier 400G Loading lock compartment 314DR Loader door 500 Conveying system track 500A, C, D section 500M Main path 500S Access path 1000. Equipment station 3000 Conveying system 3100 Fast conveying part 3300 Interface conveying system part 3310 Overhead crane 3312 Translation Platform 3314 Transverse body 3320 Feed automatic control device 3340 Base motor vehicle part 3342 Lifting mechanism 3344 Loader cooling part 3600 Θ Drive system A4000 1 Conveying system A4100 Batch conveying part A420C 1 Interface part A4202 Shuttle part 121 200845274 A4204 Storage Department A4300 Handling Manual Cutting A4302 Frame A4304 Road A4306 Loader Interface A5000, 6000 Loader 6060 Loader Housing 6070 Loader Door 6072 Latching System 6300 Loading 埠6301, 6302, 6304 Magnetic Parts 6310 Loading 埠Flange 122

Claims (1)

200845274 X. Patent application scope: 1. A semiconductor workpiece processing system, comprising: at least one processing device for processing semiconductor jade parts, · a main conveying system having one or more fixed speed conveying circuits; At least one of the semiconductor components for transporting the container reciprocating to the at least one processing device; and extending the direction of travel, and having a member for connecting the container to support; The first-larger = 15 of the processing device is continuously conveyed at a substantially constant rate along the direction of travel of # in the direction of travel of the first conveying portion; and the kind of urging device is used to convey the container to and from at least a second conveying unit, the second conveying unit is connected to the first conveying unit and the first conveying unit is connected to the first conveying unit, wherein the second conveying unit is connected to the first conveying unit. Processing device. A processing apparatus for loading and unloading a container from at least one of the delivery units t, wherein the first-transmission motor dt supports and transports the distribution drive of the container without transporting the moving capacity. The second conveyor is a motor vehicle type system that can support and transport the motor vehicle. 123 200845274 4·If you apply for a patent scope! The system of claim 1, wherein the first support and transport container is provided along the second transport system to "send a motor vehicle, and the motor vehicle is used to load and unload the container from the system described in claim 5 of the fifth application. Wherein the second transport drive system allows the transport vehicle of the second transport portion to travel along at least two directions of travel of each other. 6. A semiconductor workpiece processing system, comprising: for performing a semiconductor work piece At least one processing device; a main conveying system having one or more fixed speed conveying circuits; a container for holding at least one semiconductor manufacturing member for transporting to >, a processing device; Extending and forming a direction of travel 'and having a connection capacity to reciprocate the transport container in the direction of travel to the first of the at least one processing device == the container is substantially continuously transported when supported by the first transport portion;疋 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接A conveyor portion spacer for loading and unloading the container from the transport H 2 transport 2 has a fixed travel rate that is substantially unaffected by the connection rate between the second transport portion and the processing device.