TW200842534A - Substrate processing system, control apparatus, setting information monitoring method and storage medium having setting information monitoring program stored therein - Google Patents

Substrate processing system, control apparatus, setting information monitoring method and storage medium having setting information monitoring program stored therein Download PDF

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Publication number
TW200842534A
TW200842534A TW096149361A TW96149361A TW200842534A TW 200842534 A TW200842534 A TW 200842534A TW 096149361 A TW096149361 A TW 096149361A TW 96149361 A TW96149361 A TW 96149361A TW 200842534 A TW200842534 A TW 200842534A
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Taiwan
Prior art keywords
setting information
information
interlock
condition
control device
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TW096149361A
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Chinese (zh)
Inventor
Munetaka Yamagami
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Tokyo Electron Ltd
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Publication of TW200842534A publication Critical patent/TW200842534A/en

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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Safety Devices In Control Systems (AREA)
  • Programmable Controllers (AREA)

Abstract

To monitor the matching of setting information stored in an interlock device and a controller. A substrate processing system 10 is provided with a host PC100 and a safety PLC300. The safety PLC300 stores setting information for operating an interlock function in an I/O table 3005 and an interlock condition table 3010, and a communication part 3015 transmits those setting information. The host PC100 stores the setting information received prior to the start of this system among the received setting information in an I/O table 1010 and an interlock condition table 1015. A temporary storage part 1020 temporarily stores the setting information received posterior to the start of this system. A collation part 1025 collates the setting information of each table stored in the temporary storage part 1020 with the setting information stored in each table. When there is any mismatching between the both collated setting information, a warning part 1035 issues warning.

Description

.200842534 九、發明說明 【發明所屬之技術領域】 本發明，係有關於：對被保持在具備有互鎖裝置之基 板處理系統以及互鎖裝置中之設定資訊作監視的控制裝 置、用以對被保持在互鎖裝置中之設定資訊作監視的方 法、以及記億有用以對被保持在互鎖裝置中之設定資訊作 監視之程式的記憶媒體。 【先前技術】 在半導體製造工廠中，係在被配設在工廠內之複數的 基板處理裝置處，對基板施加所期望之處理。在各基板處 理裝置處，係經由網路而被連接有控制裝置，從控制裝 置，係在特定之時機而輸出有控制訊號，根據此控制訊 號，例如，各種閥之開閉、驅動幫浦之馬達的旋轉角、 APC( Automatic Pressure Control:自動壓力調整器）之 閥體的開度等之各種機器係被驅動。如此這般，藉由依據 控制訊號來正常地對機器作驅動，而在基板處理裝置處對 基板施加所期望之處理。故而，當從控制裝置所輸出之控 制訊號係爲錯誤之訊號的情況時，在基板處理裝置內之機 器係會誤動作，而無法在基板處理裝置內保持所期望之氣 體環境。其結果，不僅會無法對基板施加所期望之處理， 而亦會成爲例如使搬送中之基板與機器發生衝突等事故的 產生原因。 於此，從先前技術起，係考案有：使用互鎖裝置，而 -4- 200842534 防止機器之誤動作的構造。互鎖裝置，係輸入從控制裝置 所輸出之控制訊號、和從對基板處理裝置內之各機器的狀 態作檢測之感測器而來之輸出訊號，而當所輸入之訊號係 滿足互鎖條件時，以不使控制訊號被輸出的方式而起作用 (互鎖功能）。 在此種互鎖裝置中，硬體互鎖裝置，由於係藉由電路 (硬體）而建構，因此在電路設計時之負擔係爲大。特別 是，近年，伴隨著工廠內之基板處理系統的多樣化以及複 雜化’在設§十時之負擔係更爲增大*而電路之變更、追加 亦變爲困難。 因此，爲了提局系統之保全性，而係開發有可將在電 路（硬體）中所建構之互鎖條件程式化（軟體）而作控制 之軟體互鎖裝置（例如，參考專利文獻1 )。此軟體互鎖 裝置中，安全 PLC ( Programmable Logic Controller )， 係爲被作了安全認證之軟體互鎖裝置。 [專利文獻1 ]日本特開平5 - 1 2 0 0 0 6號公報 【發明內容】 [發明所欲解決之課題] 然而，在硬體互鎖裝置中，藉由避免因應於錯誤之控 制訊號而使各機器被驅動，雖然能夠防止不必要的事故， 並確保工廠內之作業員的安全，但是，並不存在有能夠瞬 間發現錯誤之控制訊號被禁止的原因之手段。故而，爲了 找出係在何者之機器處產生有問題，必須要以人眼來對被 -5- .200842534 安裝在基板處理裝置之各機器處的感測器、開關之値作確 S忍。被設置在基板處理裝置中之機器，例如，若是考慮到 就算光是閥也有200個以上一事，則以人眼來對各機器之 狀態1個1個地作確認之作業，對於系統管理者來說，係 爲非常勞心費力之工作，且亦容易產生失誤。 又，不論是在硬體互鎖裝置又或是軟體互鎖裝置之任 一者的情況中’當裝置被版本升級（v e r s i ο n u p )時，伴 隨著互鎖裝置本身的變更，亦有必要對控制裝置側之相關 於互鎖功能的設定資訊作變更。但是，由於此些之更新作 業係以人的手動來進行，因此，會有僅進行了互鎖裝置本 身之升級’而忘記進行控制裝置側之設定資訊的更新之類 的事態。在此種情況中，由於控制裝置側之設定資訊與互 鎖裝置側之設定資訊係並未取得有統合性，因此互鎖裝置 並不會正常起作用。在此種狀況中，系統管理者，爲了找 尋出何處產生了問題，亦需要對感測器或開關之値1個1 個地作確認，而造成極大的負擔。 相對於此，亦可考案有：藉由另外設置對互鎖電路作 檢查之測定器，而將人手所致之確認作業自動化。但是， 在此情況中，係無法僅以既存之機器來將確認作業自動 化’爲了將測定器組入至既存之系統中，必須要花費時間 以及費用’且，不僅於此，亦存在有：就算僅爲暫時性， 亦會使系統之動作狀態成爲不安定之狀態的問題。 進而，在先前之互鎖裝置中，雖然係可以選擇不使互 鎖功能動作，但是，在進行了此種選擇後，也會有忘記將 -6- 200842534 其回復到正常狀態（使互鎖功能動作的狀態）的情況。在 此情況下，係有從互鎖裝置而輸出有錯誤之控制訊號的可 能性，其結果，在基板處理裝置之任一者的機器處，會產 生誤動作。 於此，在本發明中，係提供：對被保持在具備有互鎖 裝置之基板處理系統以及互鎖裝置中之設定資訊作監視的 控制裝置、用以對被保持在互鎖裝置中之設定資訊作監視 的方法、以及記憶有用以對被保持在互鎖裝置中之設定資 訊作監視之程式的記憶媒體。 [用以解決課題之手段] 亦即是，爲了解決上述課題，若藉由本發明之某一觀 點，則係提供一種基板處理系統，其係具備有：將用以對 基板處理裝置作控制之控制訊號輸出之控制裝置；和被連 接於前述控制裝置，並對從前述控制裝置所輸出之控制訊 號中的滿足特定之條件的控制訊號之輸出作禁止的互鎖 (interlock)功能之軟體互鎖裝置。 在此基板處理系統中，前述軟體互鎖裝置，係具備 有：記憶有用以使前述互鎖功能動作之設定資訊的第1條 件表格、和至少在前述基板處理系統之起動後，將被記憶 在前述第1條件表格中之設定資訊作送訊的第1通訊部。 前述控制裝置，係具備有··受訊藉由前述第1通訊部而被 送訊的設定資訊之第2通訊部、和將在前述所受訊之設定 資訊中，於前述控制裝置之起動前所受訊之設定資訊作記 -7- 200842534 憶的第2條件表格、和將在前述所受訊之 前述控制裝置之起動後所受訊之設定資訊 時記憶部、和將被記憶在前述暫時記憶部 被記憶在前述第2條件表格中之設定資 部；和在前述所比對之兩設定資訊有不一 出警告之警告部。 若藉由此，則用以使互鎖功能動作之 軟體互鎖裝置而被送訊，並在控制裝置中 此種狀態下，於基板處理系統之起動後， 鎖裝置所送訊而來之設定資訊，係暫時地 憶部中，並與在基板處理系統之起動前而 2表格的設定資訊作比對。比對之結果， 不一致的情況時，輸出警告。 此警告，係爲用以通知在第1條件表 格中之設定資訊係存在有差異一事者，藉 系統管理者在開始基板處理之實行前，先 果，系統管理者，係可在基板之處理被實 互鎖功能之問題又或是設定資訊之問題解 此，能夠提升基板處理時之產能。又，能 鎖裝置而輸出有錯誤之控制訊號所產生的 致之料想不到的事故之發生。 又，由於上述動作係全部爲自動進行 先前，係能夠防止因手動所造成之失誤 此，則關於設定資訊是否爲適正一事，係 設定資訊中，於 作暫時記億之暫 中之設定資訊與 訊作比對之比對 致的情況時，輸 設定資訊，係從 被預先登錄。在 而再度從軟體互 被記憶在暫時記 預先被登錄之第 當兩設定資訊有 格與第2條件表 由此，能夠催促 實行維修。其結 行前，便進行將 除的作業。藉由 夠防止由於從互 機器之誤動作所 ，因此，相較於 。進而，若藉由 僅使用既存之基 -8- 200842534 板處理系統的機器便自動地被判定，而不需要另外的測定 器，藉由此，能夠將該功能以低成本且容易地導入至基板 處理系統中。 亦可爲以下構成：前述控制裝置，係被連接於對應複 數之基板處理裝置而被設置之複數的軟體互鎖裝置，前述 第2通訊部，係分別受訊藉由各軟體互鎖裝置所送訊之第 1條件表格的設定資訊，前述第2條件表格，係將前述分 別所受訊之設定資訊中，在前述基板處理系統之起動前所 受訊的設定資訊，與各軟體互鎖裝置附加上關連並作記 憶，前述暫時記憶部，係將前述分別所受訊之設定資訊 中，在前述基板處理系統之起動後所受訊的設定資訊，與 前述各軟體互鎖裝置附加上關連並作暫時記憶，前述比對 部，係將被記憶在前述暫時記憶部之設定資訊與被記憶在 前述條件表格中之設定資訊，在每一軟體互鎖裝置中作對 照，前述警告部，係當前述所比對之兩設定資訊爲不一致 時，特定出存在有不一致之設定資訊的送訊源頭之軟體互 鎖裝置所對應之基板處理裝置，並作警告。 若是藉由此，則對於在互鎖裝置側之設定資訊與控制 裝置側之設定資訊是否有不一致一事，係對於複數之互鎖 裝置而分別被實行。藉由此，能夠防止對複數之基板處理 裝置的各機器送出錯誤的控制訊號。 又，若藉由此，則當在互鎖裝置側之設定資訊與控制 裝置側之設定資訊間存在有不一致的情況時，根據存在有 不一致之部分的設定資訊，基板處理裝置係自動地被特 -9 - 200842534 定，並在警告時被通知。藉由此，系統管理者，係可 預測到在被警告之基板處理裝置的機器中係產生有問 一面進行對問題之原因作確認的作業。此結果，相較 前，能夠減輕維修作業之負擔。 又，爲了解決上述課題，若藉由本發明之另一觀 則係提供一種控制裝置，其係被連接於具備有對從所 之控制訊號中的滿足特定之條件的控制訊號之輸出作 的互鎖（interlock)功能之軟體互鎖裝置，並將用以 板處理裝置作控制之前述控制訊號，輸出至前述軟體 裝置中。 上述控制裝置，係具備有：第2通訊部，係受訊 憶在前述軟體互鎖裝置處之第1條件表格中，並至少 述控制裝置之起動後，藉由被設置在前述軟體互鎖裝 之第1通訊部而被送訊的用以使互鎖功能動作之設 訊；和第2條件表格，係將在述所受訊之设疋資訊 於前述控制裝置之起動前所受訊之設定資訊作記憶； 時記憶部，係將在前述所受訊之設定資訊中’於前述 裝置之起動後所受訊之設定資訊作暫時記憶；和比對 係將被記憶在前述暫時記憶部中之設定資訊與被記憶 述第2條件表格中之設定資訊作比對；和警告部’係 述所比對之兩設定資訊有不一致的情況時’輸出警告 若藉由此，則係對被記憶在暫時記憶部中之設定 與在基板處理系統之起動前預先被登錄之第2條件表 之設定資訊作比對，其結果，當兩設定資訊係爲不 一面 題， 於先 點， 輸入 禁止 對基 互鎖 被記 在則 置中 定資 中， 和暫 控制 部， 在前 在前 〇 資訊 格中 一致 -10- 200842534 時，輸出警告。 藉由提供具備有此種功能之控制裝置，系統管理者， 係可在基板之處理被實行前，便進行將互鎖功能之問題作 解除的作業。藉由此，在能夠提升基板處理時之產能的同 時，亦能夠防止由於從互鎖裝置而輸出有錯誤之控制訊號 所產生的機器之誤動作所致之料想不到的事故之發生。 前述軟體互鎖裝置之第1條件表格，與前述控制裝置 之第2條件表格，係亦可藉由相同之形式，而記憶設定資 訊。 若藉由此，則能夠將被複製到暫時記憶部之第1條件 表格的內容和第2條件表格之內容的比對，以更佳之精確 度來進行。藉由此，能夠將設定資訊之不一致部分更正確 地檢測出來。其結果，根據設定資訊之不一致部分，能夠 將產生問題的原因更正確且更迅速地作把握。 亦可爲以下構成：前述第1以及第2條件表格，係分 別包含有將代表對應於構成前述基板處理裝置之複數的機 器之互鎖條件的設定資訊，與各機器附加上關連並作記憶 的第1以及第2互鎖條件表格，前述比對部，係將被記憶 在前述暫時記憶部中之第1互鎖條件表格的設定資訊與被 記憶在前述第2條件表格中之設定資訊作比對，前述警告 部，係在前述所比對之兩設定資訊有不一致的情況時，輸 出警告。 進而，亦可爲：前述警告部，係當前述所比對之兩設 定資訊爲不一致時，特定出與產生有不一致之設定資訊被 -11 - 200842534 附加有關連的被記憶在前述暫時記憶部又或 件表格中之基板處理裝置的機器，並作警告 若藉由此，則根據互鎖條件表格之不一 板處理裝置之機器作特定後的警告係被輸出 統管理者，係能夠以被預測爲產生有問題之 的任一之機器爲中心，來對感測器或是開關 其結果，相較於先前之對數百個左右的機器 確認，能夠顯著地減輕系統管理者所致之 時，能夠減少確認之失誤。藉由此，能夠使 本之業務的基板處理之基板處理裝置更爲安 亦可爲：前述第1以及第2條件表格 有：記憶有代表被輸入至前述軟體互鎖裝置 訊號的屬性資訊之設定資訊的第1以及第 格，前述比對部，係將被保存在前述暫時記 輸入輸出表格的設定貪訊’與被δ5 ;丨思在則述 表格中之設定資訊作比對，前述警告部，係 之兩設定資訊有不一致的情況時’輸出警告 進而，亦可爲：前述警告邰’係當則述 定資訊爲不一致時，特定出藉由產生有不一 而代表的輸入訊號之屬性資訊所預測出的基 機器，並作警告。 藉由此，系統管理者’亦能夠預測出何 生有問題，並以該機器爲中心’來對其周邊 開關之値作確認。藉由此，能夠顯著的減輕 是第2互鎖條 〇 致部分，對基 。藉由此，系 基板處理裝置 之値作確認。 一個一個地作 確認作業，同 遂行身爲其原 定的動作。 ，係分別包含 中之複數輸入 2輸入輸出表 憶部中之第1 第2輸入輸出 在前述所比對 〇 所比對之兩設 致之設定資訊 板處理裝置的 者的機器爲產 之感測器或是 系統管理者之 -12- 200842534 確認作業。另外，作爲輸入訊號之屬性資訊，係可列舉有 被附加在各感測器或各開關之名稱或ID (識別資訊）。 亦可爲：前述第1以及第2條件表格，係分別包含 有：將用以判斷是否禁止控制訊號之輸出的互鎖條件程式 化後之設定資訊作記憶的第1以及第2互鎖電路程式表 格，前述比對部，係將被保存在前述暫時記憶部中之第1 互鎖電路程式表格的設定資訊與被記憶在前述第2互鎖電 路程式表格中之設定資訊作比對，前述警告部，係在前述 所比對之兩設定資訊有不一致的情況時，輸出警告。 又，亦可更進而具備有：資訊產生部，係從被保存在 前述暫時記憶部中之第1互鎖電路程式表格之設定資訊’ 而將代表互鎖條件之電路構成以及代表對各電路之輸入輸 出訊號的設定資訊，作爲電路條件設定資訊而產生；和電 路條件表格，係將前述所產生的電路條件設定資訊中，在 前述控制裝置之起動前所產生的電路條件設定資訊作記 憶，前述暫時記憶部，係將前述所產生之電路條件設定資 訊中，在前述控制裝置之起動後所產生的電路條件設定資 訊作暫時記憶，前述對照部’係將被記憶在前述暫時記憶 部中之電路條件設定資訊與被記憶在前述電路條件表格中 之電路條件設定資訊作比對，前述警告部’係在前述所比 對之兩設定資訊有不一致的情況時’輸出警告。 進而，亦可爲：前述警告部’係當存在有前述不一致 時，特定出從產生有不一致之程式化後的互鎖條件設定資 訊又或是從產生有不一致之電路條件設定資訊所預測出的 -13- 200842534 電路，並作警告。 藉由此，系統管理者，亦能夠以被預測爲產生有 之基板處理裝置的任一之機器爲中心，來對感測器或 關之値作確認。其結果，相較於先前之對數百個左右 器一個一個地作確認，能夠顯著地減輕系統管理者所 確認作業。 又，爲了解決上述課題，若藉由本發明之另一觀 則係提供一種控制裝置，其係被連接於具備有對從所 之控制訊號中的滿足特定之條件的控制訊號之輸出作 的互鎖（interlock )功能之硬體互鎖裝置，並將用以 板處理裝置作控制之前述控制訊號，輸出至前述硬體 裝置中。 上述控制裝置，係具備有：第2通訊部，係受訊 憶在前述硬體互鎖裝置處之第1條件表格中’並至少 述控制裝置之起動後，藉由被設置在前述硬體互鎖裝 之第1通訊部而被送訊的用以使互鎖功能動作之設 訊；和第2條件表格，係將在前述所受訊之設定資訊 於前述控制裝置之起動前所受訊之設定資訊作記億； 時記憶部，係將在前述所受訊之設定資訊中’於前述 裝置之起動後所受訊之設定資訊作暫時記憶；和比對 係將被記憶在前述暫時記憶部中之設定資訊與被記憶 述第2條件表格中之設定資訊作比對；和警告部’係 述所比對之兩設定資訊有不一致的情況時’輸出警告 若藉由此，則藉由在硬體互鎖裝置之例如 問題 是開 的機 致之 點， 輸入 禁止 對基 互鎖 被記 在則 置中 定資 中， 和暫 控制 部， 在則 在則 〇 緩衝 -14- 200842534 (buffer )區域中，保存相關於用以使互鎖功能動作之邏 輯電路數以及對各電路之輸入輸出點數的設定資訊（硬體 之資訊），來比對硬體互鎖裝置側之設定資訊與控制裝置 側之設定資訊是否爲一致。 藉由此，能夠對構成影體互鎖裝置之硬體本身作比 對。其結果，系統管理者，係可根據當在兩設定資訊中有 不一致時所輸出的警告，而將解除互鎖功能之問題的作 業，在基板之處理實行前，而實行維修。 亦可爲：前述警告部，係當前述所比對之兩設定資訊 爲不一致時，特定出從產生有不一致之相關於邏輯電路數 以及對各電路之輸入輸出點數的設定資訊所預測出的基板 處理裝置的機器，並作警告。 又，亦可更進而具備有：訊息產生部，係當前述所比 對之兩設定資訊係爲不一致時，將代表根據產生有不一致 之設定資訊所預測出的錯誤之狀況的訊息動態地產生，前 述警告部，係將藉由前述訊息產生部所產生的訊息作輸 出。 若藉由此，則系統管理者，係可利用表示問題之狀況 的訊息等，而對被預測產生有問題之機器作更正確的把 握。藉由此，能夠更爲減輕維修作業的負擔。 亦可更進而具備有：處理實行控制部，係當前述所比 對之兩設定資訊爲一致時，以使基板之處理開始的方式而 作控制。 藉由此，當兩設定資訊不一致時，將互鎖裝置之問題 -15- 200842534 作解除的作業，係在基板之處理被實行前而進行，而當兩 設定資訊爲一致時，基板之處理係開始。藉由此，能夠藉 由使互鎖裝置正常的起作用，而使基板處理裝置安定的動 作。 又，爲了解決上述課題，若藉由本發明之另一觀點， 則係提供一種設定資訊監視方法，其係使用被連接於具備 有對從所輸入之控制訊號中的滿足特定之條件的控制訊號 之輸出作禁止的互鎖（interlock)功能之軟體互鎖裝置， 並將用以對基板處理裝置作控制之前述控制訊號，輸出至 前述軟體互鎖裝置中的控制裝置，而對被保持在前述軟體 互鎖裝置中之設定資訊作監視。 在上述設定資訊監視方法中，係從前述軟體互鎖裝 置，而受訊被記憶在前述軟體互鎖裝置處之第1條件表格 中，並至少在前述控制裝置之起動後，藉由前述軟體互鎖 裝置而被送訊的用以使互鎖功能動作之設定資訊；將在前 述所受訊之設定資訊中，於前述控制裝置之起動前所受訊 之設定資訊，記憶在第2條件表格中；將在前述所受訊之 設定資訊中，於前述控制裝置之起動後所受訊之設定資 訊，在暫時記憶部中作暫時記憶；將被記憶在前述暫時記 憶部中之設定資訊與被記憶在前述第2條件表格中之設定 資訊作比對；當前述所比對之兩設定資訊有不一致的情況 時，輸出警告。 進而，爲了解決上述課題，若藉由本發明之另一觀 點，則係提供一種記憶有設定資訊監視程式之記憶媒體， -16- 200842534 係爲被記憶有用以使電腦實行：使用連接有具備對所輸入 之控制訊號中的滿足特定之條件的控制訊號之輸出作禁止 的互鎖（interlock )功能之軟體互鎖裝置，並將用以對基 板處理裝置作控制之前述控制訊號輸出至前述軟體互鎖裝 置中之控制裝置，而對被保存在前述軟體互鎖裝置中之設 定資訊作監視的處理之設定資訊監視程式的記憶媒體。 在上述記憶有設定資訊監視程式之記憶媒體中，係使 電腦實行以下處理：從前述軟體互鎖裝置，而受訊被記憶 在前述軟體互鎖裝置處之第1條件表格中，並至少在前述 控制裝置之起動後，藉由前述軟體互鎖裝置而被送訊的用 以使互鎖功能動作之設定資訊的處理；和將在前述所受訊 之設定資訊中，於前述控制裝置之起動前所受訊之設定資 訊，記憶在第2條件表格中的處理；和將在前述所受訊之 設定資訊中，於前述控制裝置之起動後所受訊之設定資 訊，在暫時記憶部中作暫時記憶的處理；和將被記憶在前 述暫時記憶部中之設定資訊與被記憶在前述第2條件表格 中之設定資訊作比對的處理；和在前述所比對之兩設定資 訊有不一致的情況時，輸出警告的處理。 若藉由此些，則係比對軟體互鎖裝置側之設定資訊與 控制裝置側之設定資訊是否爲一致，其結果，當兩設定資 訊爲不一致時，則輸出警告。藉由此警告，系統管理者， 係能夠在開始基板處理之實行前，實行維修。其結果，藉 由在基板之處理被實行前結束將互鎖功能之問題解除的作 業，能夠使基板處理時之產能提升。 -17- 200842534 [發明之效果] 如以上所說明一般，若藉由本發明，則能夠對被保持 在互鎖裝置中之設定資訊的統合性作監視。 【貫施方式】 以下’針對本發明之合適的實施形態，參考所添附之 圖面並作詳細說明。另外，在以下之說明以及添附圖面 中’針對具備有相同之構成以及功能的構成要素，係藉由 附加相同之符號，而省略其重複說明。 (第1實施形態） 首先，針對本發明之第1實施形態的基板處理系統， 一面參考圖1以及圖2，一面作說明。圖1，係爲基板處 理系統之槪略圖，圖2，係爲構成基板處理系統之各機器 的配置圖。 (基板處理系統）BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a control device for monitoring setting information held in a substrate processing system and an interlock device having an interlock device, for A method of monitoring the setting information held in the interlock device, and a memory medium for storing a program for monitoring the setting information held in the interlock device. [Prior Art] In a semiconductor manufacturing plant, a desired process is applied to a substrate at a plurality of substrate processing apparatuses disposed in a factory. In each of the substrate processing apparatuses, a control device is connected via a network, and the control device outputs a control signal at a specific timing, and according to the control signal, for example, various valves are opened and closed, and the pump is driven. Various types of machines such as the rotation angle and the opening degree of the valve body of the APC (Automatic Pressure Control) are driven. In this manner, the desired processing is applied to the substrate at the substrate processing apparatus by normally driving the machine in accordance with the control signal. Therefore, when the control signal output from the control device is an erroneous signal, the machine in the substrate processing device malfunctions and the desired gas environment cannot be maintained in the substrate processing device. As a result, not only the desired processing cannot be applied to the substrate, but also an accident such as a collision between the substrate and the machine during transportation may occur. Here, from the prior art, the test cases include: the use of an interlock device, and -4- 200842534 to prevent the malfunction of the machine. The interlocking device is configured to input an output signal outputted from the control device and an output signal from a sensor for detecting the state of each machine in the substrate processing device, and when the input signal meets the interlock condition In the case of not causing the control signal to be output (interlock function). In such an interlocking device, since the hardware interlocking device is constructed by a circuit (hard body), the burden on the circuit design is large. In particular, in recent years, with the diversification and the complexity of the substrate processing system in the factory, the burden on the §10 is further increased*, and the circuit is changed and added. Therefore, in order to improve the security of the system, a software interlocking device that can control the interlocking conditions (software) constructed in the circuit (hardware) is developed (for example, refer to Patent Document 1) . In this software interlocking device, the Safety PLC (Programmable Logic Controller) is a software interlock device that is safety certified. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. 5 - 1 2 0 0 6 (Convention) [Problems to be Solved by the Invention] However, in the hardware interlocking device, by avoiding the control signal in response to an error When each machine is driven, it is possible to prevent unnecessary accidents and ensure the safety of workers in the factory. However, there is no means for which a control signal capable of detecting an error in an instant is prohibited. Therefore, in order to find out which machine is causing problems, it is necessary to use the human eye to correct the sensors and switches installed in the various substrates of the substrate processing apparatus. In the case of a device that is installed in the substrate processing apparatus, for example, if it is considered that there are more than 200 valves, the state of each device is checked by the human eye, and the system administrator It is said that it is a very laborious and laborious work, and it is easy to make mistakes. Moreover, in the case of either the hardware interlocking device or the software interlocking device, when the device is upgraded (versi ο nup), it is necessary to change the interlocking device itself. The setting information on the control device side related to the interlock function is changed. However, since such update work is performed manually by a person, there is a case where only the upgrade of the interlock device itself is performed, and the update of the setting information on the control device side is forgotten. In this case, since the setting information on the control device side and the setting information on the interlocking device side are not integrated, the interlock device does not function normally. In such a situation, the system administrator needs to confirm the fault of the sensor or the switch in order to find out where the problem has occurred, which is extremely burdensome. In contrast, it is also possible to automate the confirmation work by the human hand by additionally providing a measuring device for checking the interlock circuit. However, in this case, it is not possible to automate the confirmation operation only by the existing machine. In order to integrate the analyzer into the existing system, it takes time and expense, and not only, but also: It is only temporary, and it will also cause the state of the system to become unstable. Furthermore, in the previous interlocking device, although it is possible to choose not to operate the interlocking function, after performing such a selection, it is forgotten to return the -6-200842534 to the normal state (to make the interlocking function) The state of the action). In this case, there is a possibility that an error control signal is outputted from the interlock device, and as a result, a malfunction occurs in the device of any of the substrate processing apparatuses. Here, in the present invention, there is provided a control device for monitoring setting information held in a substrate processing system and an interlock device having an interlock device, and a setting for being held in the interlock device A method of monitoring information and a memory medium for storing a program for monitoring setting information held in an interlock device. [Means for Solving the Problem] In order to solve the above problems, according to one aspect of the present invention, there is provided a substrate processing system including: control for controlling a substrate processing apparatus a control device for signal output; and a software interlocking device that is connected to the control device and disables an interlock function of an output of a control signal that satisfies a specific condition from a control signal output from the control device . In the substrate processing system, the software interlocking device includes: a first condition table for storing setting information for operating the interlock function, and at least after activation of the substrate processing system, The first communication unit that transmits the setting information in the first condition table. The control device includes a second communication unit that receives the setting information transmitted by the first communication unit, and the setting information to be received before the start of the control device. The information of the received information is recorded in the second conditional form, and the memory of the setting information received after the start of the aforementioned control device is recorded. The memory unit is stored in the setting unit in the second condition table; and a warning unit that does not have a warning in the two comparison information. By this, the software interlocking device for operating the interlock function is sent, and in the state of the control device, after the substrate processing system is started, the setting of the lock device is sent. The information is temporarily recalled in the department and compared with the setting information of the table before the start of the substrate processing system. When the result of the comparison is inconsistent, a warning is output. This warning is used to notify that there is a difference in the setting information in the first condition table. Before the system administrator starts the implementation of the substrate processing, the system administrator can process the substrate. The problem of the real interlock function or the problem of setting the information can solve the problem, and the productivity of the substrate processing can be improved. Further, it is possible to lock the device and output an unexpected accident caused by an erroneous control signal. In addition, since all of the above actions are automatically performed beforehand, it is possible to prevent mistakes caused by the manual, and the setting information is set in the temporary information of the set information in the setting information. In the case of comparison, the input setting information is pre-registered. In the second time, the first setting information and the second condition table are registered in advance, and the maintenance can be urged. Before it is completed, the work to be removed is performed. By preventing the malfunction caused by the mutual machine, therefore, compared to . Further, if the machine is used only by using the existing base-8-200842534 board processing system, it is automatically determined without an additional measuring device, whereby the function can be introduced to the substrate at low cost and easily. Processing system. Alternatively, the control device may be connected to a plurality of software interlock devices provided corresponding to a plurality of substrate processing devices, and the second communication portion is separately received by each software interlock device. In the setting information of the first condition table, the second condition table is to add setting information received before the start of the substrate processing system to the setting information of the respective received signals, and the software interlocking device is added. The above-mentioned temporary memory unit associates the setting information received by the substrate processing system with the setting information of the above-mentioned respective substrate processing systems, and associates with the aforementioned software interlocking devices. Temporarily remembering that the comparison unit stores the setting information stored in the temporary memory unit and the setting information memorized in the condition table, and is compared in each software interlocking device, and the warning portion is as described above. When the two sets of comparison information are inconsistent, the substrate corresponding to the software interlocking device of the source of the transmission having the inconsistent setting information is specified. Device and warn. If this is the case, whether or not the setting information on the interlocking device side and the setting information on the control device side are inconsistent is performed for each of the plurality of interlocking devices. Thereby, it is possible to prevent an erroneous control signal from being sent to each of the plurality of substrate processing apparatuses. Further, if there is a discrepancy between the setting information on the interlocking device side and the setting information on the control device side, the substrate processing device is automatically adapted based on the setting information of the inconsistent portion. -9 - 200842534 Fixed and will be notified when warning. As a result, the system administrator can predict that the cause of the problem is confirmed in the machine of the substrate processing apparatus being warned. As a result, the burden of maintenance work can be reduced compared to the previous one. Further, in order to solve the above problems, another aspect of the present invention provides a control device that is connected to an interlock having an output of a control signal that satisfies a specific condition from a control signal thereof. (interlock) function software interlocking device, and outputting the aforementioned control signal for controlling the board processing device to the foregoing software device. The control device includes a second communication unit that is received by the software in the first condition table of the software interlock device, and at least the control device is activated, and is disposed in the software interlocking device. The first communication unit is configured to operate the interlock function; and the second condition table is used to set the received information before the start of the control device. Information for memory; the time memory department will temporarily remember the setting information received after the start of the device in the setting information received; and the comparison system will be memorized in the temporary memory unit. The setting information is compared with the setting information in the second condition table which is memorized; and when the warning unit 'is inconsistent with the two setting information of the comparison, the output warning is recorded by the The setting in the temporary memory unit is compared with the setting information of the second condition table registered in advance before the start of the substrate processing system. As a result, when the two setting information is not a problem, the input is prohibited, and the input is prohibited. mutual Is recorded in the home-in control unit and temporarily fixed, consistent -10-200842534, the warning is output in the previous first square grid information. By providing a control device having such a function, the system manager can perform the work of canceling the problem of the interlock function before the processing of the substrate is performed. As a result, it is possible to prevent an unexpected accident caused by a malfunction of the machine due to the output of an erroneous control signal from the interlock device while improving the productivity at the time of substrate processing. The first condition table of the software interlocking device and the second condition table of the control device may be stored in the same form to memorize the setting information. By this, it is possible to perform the comparison of the contents of the first condition table copied to the temporary memory unit and the contents of the second condition table with better accuracy. By this, it is possible to detect the inconsistent portion of the setting information more correctly. As a result, it is possible to grasp the cause of the problem more accurately and more quickly based on the inconsistency in the setting information. In addition, the first and second condition tables may include setting information indicating an interlock condition corresponding to a plurality of devices constituting the substrate processing apparatus, and may be associated with each device and memorized. In the first and second interlock condition tables, the comparison unit compares the setting information of the first interlock condition table stored in the temporary storage unit with the setting information stored in the second condition table. The warning unit outputs a warning when there is a mismatch between the two sets of the comparison information. Furthermore, the warning unit may be configured to be associated with the setting information that is inconsistent with each other when the setting information of the two comparisons is inconsistent, and is stored in the temporary memory unit. Or the machine of the substrate processing apparatus in the table, and if the warning is given, the warning system of the machine of the different board processing apparatus according to the interlock condition table is outputted to the manager, and can be predicted Centering on any machine that has a problem, the results of the sensor or switch can be significantly reduced by the system administrator compared to the previous confirmation of hundreds of machines. Can reduce the mistakes of confirmation. Therefore, the substrate processing apparatus for substrate processing of the present service can be made safer: the first and second condition tables include: setting of attribute information indicating the signal input to the software interlocking device. In the first and second sections of the information, the comparison unit is stored in the temporary information input and output table, and the warning information is compared with the setting information in the table by δ5; If the two sets of information are inconsistent, the 'output warning may be: the above warning 邰' is when the information is inconsistent, the attribute information of the input signal represented by the difference is specified. The predicted base machine is warned. In this way, the system administrator can also predict what is wrong with the problem and use the machine as the center to confirm the surrounding switch. By this, it is possible to significantly reduce the portion of the second interlocking strip, the base. Thereby, it is confirmed by the substrate processing apparatus. Confirming the work one by one, and doing the same as the original action. The system includes the first and second input and output of the input and output table, and the first and second input and output of the device for processing the setting information device of the two of the comparisons. Or system administrator -12- 200842534 Confirm the operation. Further, as the attribute information of the input signal, the name or ID (identification information) to be attached to each sensor or each switch may be listed. The first and second condition tables may include first and second interlock circuit programs for storing setting information for stabilizing the interlock condition for controlling the output of the control signal. In the table, the comparison unit compares the setting information of the first interlock circuit program table stored in the temporary memory unit with the setting information stored in the second interlock circuit program table, the warning The department outputs a warning when there is an inconsistency between the two settings information. Further, the information generating unit may further include a circuit configuration representing the interlock condition from the setting information of the first interlock circuit program table stored in the temporary memory unit, and representative of each circuit. The setting information of the input/output signal is generated as the circuit condition setting information; and the circuit condition table is used to memorize the circuit condition setting information generated before the start of the control device in the circuit condition setting information generated as described above, The temporary memory unit temporarily stores the circuit condition setting information generated after the start of the control device in the circuit condition setting information generated as described above, and the comparison unit 'is a circuit to be memorized in the temporary memory unit. The condition setting information is compared with the circuit condition setting information memorized in the circuit condition table, and the warning unit 'outputs a warning when there is a discrepancy between the two sets of comparison information. Further, the warning unit may be configured to specify the interlocking condition setting information from the occurrence of the stylization after the inconsistency or the circuit condition setting information in which the inconsistency occurs. -13- 200842534 Circuit and warn. Thereby, the system administrator can also confirm the sensor or the switch based on any of the devices predicted to generate the substrate processing apparatus. As a result, it is possible to significantly reduce the work confirmed by the system administrator as compared with the previous ones for hundreds of right and left devices. Further, in order to solve the above problems, another aspect of the present invention provides a control device that is connected to an interlock having an output of a control signal that satisfies a specific condition from a control signal thereof. (interlock) function hardware interlocking device, and outputting the aforementioned control signal for controlling the board processing device to the foregoing hardware device. The control device includes: a second communication unit that is received in the first condition table of the hardware interlock device; and at least the control device is activated, and is provided in the hardware body And the second condition table is configured to receive the information of the received information before the start of the control device by the first communication unit that locks the first communication unit; Set the information to record the billion; the time memory department will temporarily remember the setting information received after the start of the device in the setting information received; and the comparison system will be memorized in the temporary memory In the case where the setting information in the second condition table is compared with the setting information in the second condition table; and when the warning unit is inconsistent with the two setting information of the comparison, the output warning is used by For example, the problem of the hardware interlocking device is the point of opening, the input prohibiting the base interlock is recorded in the centralization fund, and the temporary control unit, and then the buffer is -14-200842534 (buffer) In the area, save relevant Whether the number of logic circuits for operating the interlock function and the setting information (hardware information) for the number of input and output points of each circuit are compared with the setting information on the hardware interlock device side and the setting information on the control device side. For consistency. Thereby, it is possible to compare the hardware itself constituting the shadow interlocking device. As a result, the system administrator can perform the maintenance of the problem of releasing the interlock function based on the warning output when there is a discrepancy between the two setting information, and before the processing of the substrate is performed. The warning unit may be configured to predict the difference between the number of logic circuits and the setting information of the number of input and output points of each circuit when the two sets of comparison information are inconsistent. The substrate processing device is machined and warned. Further, the message generating unit may be configured to dynamically generate a message representing a situation in which an error is predicted based on the setting information that is inconsistent when the two sets of the matching information are not identical. The warning unit outputs the message generated by the message generating unit. By doing so, the system administrator can use the message indicating the status of the problem, etc., to make a more accurate grasp of the machine that is predicted to have a problem. Thereby, the burden of maintenance work can be further reduced. Further, the processing execution control unit may be configured to control the processing of the substrate when the two sets of the comparison information are identical. Therefore, when the two setting information are inconsistent, the operation of the interlocking device -15-200842534 is performed before the processing of the substrate is performed, and when the two setting information is consistent, the processing of the substrate is performed. Start. Thereby, the operation of the substrate processing apparatus can be stabilized by causing the interlock device to function normally. Further, in order to solve the above problems, according to another aspect of the present invention, a setting information monitoring method is provided which is connected to a control signal having a condition that satisfies a specific condition in a control signal input from a pair. Outputting a software interlocking device for prohibiting an interlock function, and outputting the aforementioned control signal for controlling the substrate processing device to the control device in the software interlocking device, and the pair is held in the software body The setting information in the interlock device is monitored. In the above-described setting information monitoring method, the software interlocking means is received, and the received signal is stored in the first condition table at the software interlocking device, and at least after the start of the control device, the soft body is mutually The setting information for the interlock function to be sent by the lock device; the setting information received before the start of the control device in the setting information received is stored in the second condition table. In the setting information received as described above, the setting information received after the activation of the control device is temporarily stored in the temporary memory unit; the setting information to be memorized in the temporary memory unit is memorized The setting information in the second condition table is compared; when the two sets of the comparison information are inconsistent, a warning is output. Further, in order to solve the above problems, according to another aspect of the present invention, a memory medium in which a setting information monitoring program is stored is provided, and -16-200842534 is useful for being memorized for execution of a computer: a software interlocking device for inputting an interlocking function of a control signal that satisfies a specific condition in a control signal, and outputting the aforementioned control signal for controlling the substrate processing device to the aforementioned software interlock A control medium in the device, and a memory medium for setting a monitoring program for monitoring the setting information stored in the software interlock device. In the memory medium in which the information monitoring program is set, the computer is caused to perform the following processing: from the software interlocking device, the received signal is memorized in the first condition table at the software interlocking device, and at least in the foregoing After the start of the control device, the setting information for operating the interlock function is transmitted by the software interlocking device; and the setting information of the received signal is before the start of the control device The setting information received is memorized in the second condition table; and the setting information received after the activation of the control device in the setting information received is temporarily made in the temporary memory unit. The processing of the memory; and the processing of comparing the setting information memorized in the temporary memory unit with the setting information memorized in the second condition table; and the case where the setting information of the two comparisons is inconsistent When the warning is output. If this is the case, it is determined whether the setting information on the software interlocking device side and the setting information on the control device side are identical. As a result, when the two setting information are inconsistent, a warning is output. With this warning, the system administrator can perform maintenance before starting the substrate processing. As a result, the work for canceling the problem of the interlock function before the processing of the substrate is completed can increase the productivity at the time of substrate processing. -17- 200842534 [Effect of the Invention] As described above, according to the present invention, it is possible to monitor the integration of the setting information held in the interlock device by the present invention. [Comment] The following description of the preferred embodiments of the present invention will be described in detail with reference to the attached drawings. In the following description and the appended drawings, the same reference numerals are given to the components that have the same components and functions, and the repeated description thereof will be omitted. (First Embodiment) First, a substrate processing system according to a first embodiment of the present invention will be described with reference to Figs. 1 and 2 . Fig. 1 is a schematic diagram of a substrate processing system, and Fig. 2 is a configuration diagram of respective machines constituting a substrate processing system. (substrate processing system)

基板處理系統10，係具備有：上位PC 100、下位 P C 2 0 0 a 〜2 0 0 e 、安全 PLC ( Programmable Logic Controller ) 3 00a 〜3 00e、T Μ ( Transfer Module) 、PM (Process Module) 1〜PM4。各機器，例如，係藉由 Ethernet (登錄商標）等之網路400而分別被連接。又， 上位 PC100，係經由 LAN (Local Area Network) 500 而 - 18- 200842534 被連接於主電腦600。 如圖2所示一般，下位PC200b〜200e，係在PM1〜 PM4所被配設之清淨室Clri內，分別被配置在PM1〜PM4 之近旁。下位PC200a，係被配置於被配設在清淨室Cln 內部之各PM的中央之TM的近旁。 上位PC (相當於控制裝置），係被配置在從清淨室 Cln而被隔離之室外處。上位PC100，係藉由在其與下位 PC200之間而送收訊控希[J訊號，而對TM以及PM1〜PM4 分別作遙控控制。具體而言，上位PC 100，係在對於TM 之將基板作搬送之處理作遙控操作的同時，對於PM 1〜 PM4所施加之所期望的處理作遙控操作。藉由此，能夠極 力地抑制清淨室內之人的進出，而能夠將清淨室內之污染 控制在最小限度。但是，上位PC 1 00，係亦可爲被配置在 清淨室Cln內。 另外，TM以及PM1〜PM4，係相當於對基板作處理 之基板處理裝置。更具體而言，TM，係藉由未圖示之搬 送臂而搬送基板，PM，係對從TM所搬入之基板施加特 定之處理。作爲在各PM中所實行之特定處理的其中一 例，例如，係可列舉有：藉由Ρ Μ1內之濺鍍機器所實行 之濺鍍處理、藉由ΡΜ2內之蝕刻機器所進行之蝕刻處 理、藉由 ΡΜ3 內之 CVD ( Chemical Vapor Deposition :化 學蒸鍍薄膜成膜法）機器所實行之成膜處理、藉由PM4 內之有機EL機器所實行之6層有機EL膜蒸鍍處理等。 在TM、PM1〜PM4中，係分別被安裝有對各內部機 -19- 200842534 器之狀態作檢測的感測器群 TMs、PMls、PM2s、PM3s、 PM4s，其檢測値，係成爲被分別輸入至安全PLC3 00a〜 3 0 0e中。安全PLC 3 00，係相當於將在硬體互鎖裝置中於 硬體（安全電路）處所建構的互鎖（interlock )條件程式 化，並可在軟體中作控制之被作了安全認證之軟體互鎖裝 置。 在此些之安全PLC3 00中，係亦被輸入有從上位 PC 100所送訊的用以對TM又或是各PM作控制之控制訊 號。如此這般，安全PLC3 00，係輸入從上位PC 100而來 之控制訊號與從感測器群而來之輸出訊號，當從感測器群 而來之輸出訊號滿足任何一個的互鎖條件時，則以不將輸 出訊號送出至下位PC2 00的方式來作控制。藉由此，下 位PC200，能夠迴避由於將錯誤之輸出訊號作爲觸發 (trigger )而將各模組（TM、PM1〜PM4 )內之各機器作 驅動所產生的誤動作，例如，能夠迴避像是在將若是相混 合便會產生危險之氣體作供給時之時機上的錯誤，或是在 將基板作搬送的時機上之錯誤等。藉由此，在能夠避免基 板與機器衝突等之危險性並保護TM或PM內部之機器的 同時，亦能夠確保工廠內之作業員的安全。 主電腦600，係藉由與上位PC 100作資料之送收訊， 而進行資料管理等來對基板處理系統全體作管理。 接下來，作爲PM1〜PM4之內部構成的其中一例，針 對實行CVD處理之PM3以及實行6層連續有機EL蒸鍍 膜處理的PM4之內部構成，分別參考將被內藏在PM3內 -20- 200842534 之微波電漿處理裝置（CDV機器）之縱剖面圖作模式展 示之圖3、以及將被內藏在PM4內之6層連續EL蒸鍍裝 置的要部立體圖作模式展示之圖4，並作說明。 (PM3之內部構成） PM3之微波電漿處理裝置，係具備有在天花板面及底 面中央開口之有底立方體形狀的處理容器C。在處理容器 C之天花板面，係被安裝有蓋體302。在處理容器C之側 壁上部與蓋體3 02之相接面，係被設置有〇型環3 04，藉 由此，而將處理室內保持爲氣密。處理容器C以及蓋體 3 02，例如，係由鋁等之金屬所成，並被電性接地。 在處理容器C中，係被設置有用以於其內部載置玻璃 基板（以下，稱爲「基板」）G之支持器306。支持器 3 06，例如係由氮化鋁所成，於其內部，係被設置有給電 部3 0 8以及加熱器3 1 0。 在給電部3 0 8處，係經由整合器3 1 2 (例如，電容 器）’而被連接有高頻電源314。又，在給電部308處， 係經由線圈3 1 6，而被連接有高壓直流電源3〗8。高頻電 源3 1 4以及高壓直流電源3 1 8，係被接地。 糸δ Si* W 3 0 8，係成爲藉由從筒頻電源3 1 4所輸出之高 頻電力，而對處理容器C之內部施加特定之偏壓電壓。 又，給電部3 0 8，係成爲藉由從高壓直流電源3丨8所輸出 之直流電壓，而將基板G靜電吸著。 在加熱器3 10，係被連接有交流電源32〇，並成爲藉 -21 - 200842534 由從交流電源3 2 0所輸出之交流電壓’而將基板G保持 在特定之溫度。 在被設置於處理容器C之底面的開口之周緣’係被裝 著有伸縮管3 2 2之其中一端。又，於伸縮管3 2 2之另外一 端，係被固定接著有升降板324。如此這般，處理容器C 之底面的開口部份，係經由伸縮管322以及升降板3 24而 被密閉。 支持器3 06，係被配置在升降板324之上的筒體326 而支持，並與升降板324以及筒體326成爲一體而升降。 藉由此，支持器3 06，係成爲被調整爲因應於處理製程後 之高度。在支持器3 06之周圍，係被設置有用以將處理室 之氣體的流動控制在理想之狀態下的檔板3 28。 在蓋體3 02處，係被設置有：6根的導波管3 3 0、槽 型天線3 3 2、以及被形成在地磚（tile )上之複數枚的介 電質構件3 3 4。各導波管3 3 0，其剖面形狀係爲矩形狀， 並在蓋體3 02之內部被平行地並排設置。其內部，係藉由 氟素樹脂（例如 teflon (登錄商標））、氧化鋁 (Abo;)、石英等之介電構件336而被塡充，藉由該介 電構件3 3 6，依據λ gl=又c/ ( ε 1) 1/2之式，各導波管 3 3 0之管內波長λ g i係被控制。於此，λ c係爲自由空間 之波長，ε !係爲介電構件336之介電率。 各導波管3 3 0，係在上部開口，於該開口，可動部 3 3 8係可自由升降的被插入。可動部3 3 8，係由鋁等之身 爲非磁性體的導電性材料所形成。在蓋體3 02之外部的各 -22- 200842534 可動部3 3 8之上面，係分別被設置有升降機購340，而成 爲使可動部3 3 7 8作升降移動。藉由此種構成，各導波管 3 3 0，係以介電構件3 3 6之上面限度，而可任意地改變其 高度。 槽型天線3 3 2，係在蓋體3 02之下方而被與蓋體302 一體地形成。槽型天線3 0，係由鋁等之身爲非磁性體的 金屬所形成。在槽型天線3 0處，於各導波管3 3 0之下 面，係被空出有槽（開口）。在各槽內，係藉由氟素樹 脂、氧化鋁（ai2o3 )、石英等之介電構件而被塡充，藉 由該介電構件，依據λ g2= λ c/ ( ε 2 ) 1/2之式’各導波 管3 3 0之管內波長λ g2係被控制。於此，λ c係爲自由空 間之波長，ε 2係爲槽內的介電構件之介電率。 藉由此種構成，從未圖示之微波產生器所輸出之微 波，係傳播於各導波管3 3 0，並通過槽型天線3 3 2之槽’ 而透過各介電體組件334，而射入處理容器C之內部。在 各介電體組件3 3 4處，係在與基板G相對向之面被形成 有凹凸。藉由此，當藉由透過各介電體組件3 3 4之微波所 產生的表面波，在各介電體組件3 3 4之下面的表面傳播 時，電場能量之損失係增加，藉由此，能夠抑止表面波之 傳播。其結果，抑制駐波（Standing Wave )之產生，而 能夠產生均勻之電漿。 槽型天線3 3 2，係於其之下面’藉由爲了支持各介電 體組件3 3 4而被形成爲格子狀之樑342所支持。樑3 42 ’ 係由鋁等之非磁性體所形成。 -23- 200842534 在樑3 42處，係於其之下面，將短氣體噴 長氣體噴嘴3 46，以從樑3 42而垂下之狀態而 短氣體噴嘴344，係爲香菇狀，由金屬所形 部，氣體管344a係以從短氣體噴嘴344之側 橫向噴出的方式而貫通。長氣體噴嘴346，其 狀（筒狀），由金屬所形成，於其內部，氣體 以從長氣體噴嘴3 46之下端而將氣體朝正下方 而貫通。 在氣體管3 44a處，係經由氣體管線3 44b 氣體供給部3 4 8，藉由使從氣體供給部3 4 8所 體通過氣體管線344b以及氣體管344a，成爲 體噴射至處理室之較爲上方處。又，在氣體管 係經由氣體管線3 46b而被連接於氣體供給部 使從氣體供給部3 4 8所供給之矽烷氣體以及氮 是NHs氣體）通過氣體管線346b以及氣體管 能夠將矽院氣體以及氮氣體（又或是NH3氣 處理室之較爲下方處。 在冷卻水配管350處，係被連接有冷彳 3 5 2，藉由使從冷卻水供給源3 5 2所供給之冷 水配管中作循環並回到冷卻水供給源3 5 2，成 體3 02保持在所期望之溫度。 APC3 54，係對處理室內部之壓力作自動 (Dry Pump ) 3 5 6，係將處理室內部作槪略 (Turbo Molecular pump) 358，係對處理室內 嘴344以及 交互固定。 成，於其內 面而將氣體 外形係爲棒 管3 4 6 a係 噴出的方式 而被連接於 供給之氬氣 能夠將氬氣 3 4 6 a 處， 348 ，藉由 氣體（又或 346a，成爲 體）噴射至 即水供給源 卻水在冷卻 爲能夠將蓋 調節，DRP 抽氣，TMP 部作真空抽 -24 - 200842534 氣。藉由此些，處理室內部係被保持爲特定之真空度。閘 閥3 60，係爲在保持處理室內之氣密狀態的同時，用以將 基板G作搬入、搬出的開閉□。藉由此種構成，依據從 下位PC200d所送訊而來之驅動訊號，將各機器（例如、 微波產生器（未圖示）、高頻電源3 1 4、高壓直流電源 3 1 8、氣體供給部3 4 8之閥或質量流控制器（均爲未圖 示）、APC354、DRP356、TMP358、閘閥 360)等以特定 之時機來驅動。其結果，在將處理容器內保持在特定之真 空度的同時，在基板G被搬送至支持器3 06之狀態下， 被供給至處理容器內部之氬氣體、矽烷氣體以及氮氣體 (又或是NH3氣體），係藉由被射入至處理容器內之微 波的電場能量而被電漿化，並藉由所產生之電漿的作用， 而在基板G上形成氮化矽膜。 (感測器群） 在PM3中，作爲對PM3之內部機器的狀態作檢測之 感測器群PM3 s，係分別被安裝有感測器S 1〜S 5，其檢測 値（輸出訊號），係成爲被送出至安全PLC3 00d中。 具體而言，感測器S1，係爲ON/ OFF開關。感測器 S 1之開關，當蓋體3 02被關閉，處理容器C之天花板面 係爲關閉的情況時，藉由蓋體3 02之推壓力，而被投入 (開關開啓）。又，感測器S 1之開關，當蓋體3 02被開 啓，處理容器C之天花板面係爲開啓的情況時，藉由從蓋 體3 02之推壓力而被解放，而被切斷（開關關閉）。如此 -25- 200842534 這般，感測器s 1，係檢測出處理容器C之天花板面的開 閉狀態，並將其結果送出至安全PLC3 00d。 感測器S2，係爲被組入至閘閥3 60中之開口度感測 器，藉由檢測出閘閥3 60之開口度，檢測出閘閥3 60之開 閉的狀態，並將其結果送出至安全PLC3 00d。 感測器S3，係爲被安裝在DRP 3 5 6處之警報裝置，並 檢測出DRP 3 5 6之電源的ON/ OFF，當在特定之時機中 DRP3 5 6未動作時（電源關閉），則將警報輸出至安全 PLC3 00d。 感測器S4，係與感測器S1同樣的爲on/ OFF開 關，經由以基板G之有無來將開關〇N/ 0FF，而檢測出 基板G是否被放置在平台上，並將其結果送出至安全 PLC 3 00d。 感測器S5 ’係爲真空計，並以藉由蓋部τ而將該外 周固定的狀悲下’以貝通處理谷益C之側壁的方式而被安 裝。感測器s 5，係測定處理室內之真空壓，並將該値 (類比値）送出至安全PLC3 00d。 (P Μ 4之內部構成） 接下來’針對ΡΜ之6層連續有機EL蒸鍍裝置的內 部構成，一面參考圖4 一面作說明。在PM4中，係在基 板G上，連續性地蒸鍍包含有有機EL層之6層。 在PM4內’係內藏有6個的蒸鍍源41〇a〜4i〇f。在 6個的蒸鍍源410a〜41 Of中，係被收容有相異種類之成膜 -26- 200842534 材料，藉由將被收容在各蒸鍍源4 1 0中之壺，設 2 0 0〜5 0 0 °C左右的高溫，而成爲將各種成膜材料氣 在6個的蒸鍍源4 1 0 a〜4 1 0 f中，係經由6個 管42 0a〜42 Of，而被連結有 6個的吹出容器 430f。在6個的蒸鍍源410a〜410f中被氣化的各 材料，係分別通過6個的連結管420a〜42 Of，並從 在6個的吹出容器430a〜430f之上面的開口 OP 口）而吹出。 在各吹出容器43 0之間，係被設置有隔壁440 以此些之7個的隔壁440來將各吹出容器43 0作區 爲能夠防止從各吹出容器43 0所吹出之成膜材料的 子，混入至從相鄰之吹出容器430所吹出的成膜材 體分子中。 基板G，係在PM4之天花板面近旁，被靜電 具備有滑動機構之平台（均未圖示）上，並在被以 隔壁 440所區隔之各吹出容器 430a〜430f的些 處，以第1吹出器430a〜第2吹出器430b〜第3 4 3〇c〜第4吹出器43 0d〜第5吹出器43 0e〜第6 4 3 Of的順序，而以特定之速度來移動。藉由此，在 上，係經由從各吹出容器43 0a〜43 Of所分別吹出 材料，而成爲被連續地層積有6層之所期望的相異 另外，在 PM4中，亦與 PM2同樣的，被安 PM4之內部機器的狀態作檢測之感測器群PM4s， 値（輸出訊號），係成爲被送出至安全PLC300e 爲例如 化。 的連結 4 3 0 a 〜 種成膜 被設置 (吹出 ，藉由 隔，成 氣體分 料之氣 吸著於 7個的 許上方 吹出器 吹出器 基板G 之成膜 之膜。 裝有對 其檢測 處，但 -27 - 200842534 是，在此係省略其說明（亦省略對圖4之圖示）。 (P C之硬體構成） 接下來，針對PC之硬體的構成，一面參考圖5 —面 作說明。另外，由於下位PC200之硬體構成係爲和上位 P C 1 0 0爲相同，因此，在此係僅針對上位p C 1 0 0來作說 明。 上位 PC100，係具備有：ROM105、RAM110、 CPU1 15、匯流排120、內部介面（內部1/ F ) 125、以及 外部介面（外部1/ F ) 130。 在ROM 105中，係被記錄有：在上位PC 100中所實 行之基本程式、或是在異常時所起動之程式、各種配方 (recipe)等。在RAM110中，係被儲存有：制訂有用以 將被記憶在安全PLC3 00處之設定資訊與被記憶在上位 P C 1 0 0處之設定資訊作比對之處理程序的程式等之各種程 式或資料。另外，ROM 105以及RAM1 10，係爲記憶裝置 之其中一例，而亦可爲EEP ROM、光碟片、光磁碟片等之 記憶裝置。 CPU 1 1 5，係根據各種配方而對基板之處理作控制， 同時，對將被記憶在安全PLC3 00處之設定資訊與被記憶 在上位PC 1 00處之設定資訊所進行的比對作控制。匯流 排 120，係爲在 ROM105、RAM110、CPU115、內部介面 1 25以及外部介面1 3 0的各裝置之間進行資料之交換的路 徑。 -28- 200842534 內部介面1 2 5，係成爲輸入資料，並將必要之資料， 輸出至未圖不之螢幂或是揚聲器等處。外邰介面130，係 成爲在其與經由網路400而被連接之機器之間，進行資料 之送收訊。 (安全PLC之功能構成） 接下來，針對安全P L C 3 0 0之功能構成，一面參考以 區塊來將安全PLC 3 00之各功能作展示的圖6，一面作說 明。安全PLC3 00，係具備有藉由PLC側之1/ Ο表格 3 00 5、PLC側之互鎖條件表格3010、通訊部3015以及互 鎖控制部3 020所展示之各功能。 如圖7所不一般，I / Ο表格3 0 0 5，係記憶有：被輸 入至安全PLC 3 00中之各輸入訊號的輸出源頭（例如，感 測器名）的名稱資訊3 005 a、各輸入資訊之種類資訊 3 005b、儲存有各輸入訊號之STATUS (狀態）資訊的位 址 3005c 。 例如，當輸入訊號所持有之名稱資訊3 005a係爲 「Lid Open」時，則由於其之種類3 005 b「BOOL」，係顯 示1位元，而位址3 0 05 c之（位址.位元位置）係爲 (1.0)，因此，係在位址「1」之〇位元的位置，儲存感 測器S 1 (參考圖3 )之輸出値。例如，若是假定當蓋體 3 02爲開口時，感測器S1係輸出「1」，當蓋體3 02係爲 閉口時，感測器S1係輸出「0」，則若是在位址「1」之 0位元的位置係被儲存有「1」，則係爲表示蓋體3 0 2爲 -29- 200842534 開口之狀態，若是在位址「1」之0位元的位置係被儲存 有「0」，則係爲表示蓋體3 02爲閉口之狀態。 又，例如，當輸入訊號所持有之名稱資訊3 00 5 a’係 爲圖7之最終行所示的「V a c u u m s e n s 〇 r」時，則由於其 之種類 3 005b「CHANNEL」，係顯示16位元，而位址 3 0 0 5 c之位址係爲1 〇，因此，係在位址「1 0」之1 6位元 的位置，儲存感測器S 5所檢測出之處理室內的壓力値 (類比値）。 另外，名稱資訊3 0 0 5 a、種類資訊3 0 0 5 b以及位址 3 005c，係爲輸入訊號之屬性資訊的其中一例，除了感測 器名稱之外，例如，亦可爲被附加在開關上之名稱或是 ID (識別資訊）。 如圖8所示一般，在互鎖條件表格3 01 0中，代表互 鎖條件之設定資訊，係與各機器被附加以關連並被記憶。 於圖8中，作爲是否將使微波產生器成爲「ON」之控制 訊號的輸出作禁止之互鎖條件3010a，係設定有下述之5 個條件。例如，「Lid Open(l. 0) = =ON」，係指以下 之互鎖條件：當被記憶有蓋體3 02之狀態（STATUS )的 位址「1」之第〇位元係爲ON (亦即是，開口）的情況 時，對將微波產生器設爲「ON」之控制訊號輸出至下位 PC200 一事作禁止。關於蓋體3〇2之狀態係爲「ON (開 口）」或是「OFF (閉口）」一事，係藉由從圖3之感測 器S 1所送出之輸出訊號而隨時被更新。 「GV Open ( 1· 1 )=二ON」，係指以下之互鎖條 -30- 200842534 件：當被記憶有閘閥360之狀態的位址「1」之第1位元 係爲ON (亦即是，開口）的情況時’對將微波產生器設 爲「ON」之控制訊號輸出至下位PC2 00 —事作禁止。關 於閘閥3 60之狀態係爲「ON (開口）」或是「OFF (閉 口）」一事，係藉由從圖3之感測器S2所送出之輸出訊 號而隨時被更新。 「DRPAlarm ( 2· 1 ) = = ON」，係指以下之互鎖條 件：當被記憶有DRP3 5 6之狀態的位址「2」之第1位元 係爲ON (亦即是，輸出有警報）的情況時，對將微波產 生器設爲「ON」之控制訊號輸出至下位PC200 —事作禁 止。關於DRP3 5 6之警報裝置的狀態係爲「ON (輸出有警 報）」或是「OFF (未輸出有警報）」一事，係藉由從圖 3之感測器S 3所送出之輸出訊號而隨時被更新。 「Work Status ( 1 · 2 ) = = ON」，係指以下之互鎖條 件：當被記憶有基板G之靜電吸著狀態的位址「1」之第 2位元係爲ON (被除電，亦即是，基板G並未被靜電吸 著）的情況時，對將微波產生器設爲「ON」之控制訊號 輸出至下位PC200 —事作禁止。關於基板G之靜電吸著 狀態係爲「ON (被除電）」或是「〇fF (被靜電吸著）」 一事，係藉由從圖3之感測器S4所送出之輸出訊號而隨 時被更新。 「Vac cum Sensor < = l〇〇mTorr」，係指以下之互鎖 條件：若是被記憶有處理室內之真空狀態的位址「1 0」之 第16位元係爲100mT〇rr以下，則對將微波產生器設爲 -31 - 200842534 「ON」之控制訊號輸出至下位PC2 00 —事作禁止。關於 處理室內之真空狀態是否爲lOOmTorr以下一事，係藉由 從圖3之感測器S 5所送出之輸出訊號而隨時被更新。 如同以上所說明一般，當至少滿足有5個的互鎖條件 中之其中1個的情況時，安全PLC 300，係對將微波產生 器設爲「ON」之控制訊號輸出至下位PC200 —事作禁 止。 另外，被記憶在1/ 〇表格3 005中之機器的名稱 3 0 0 5 a、種類3 0 0 5 b以及位址3 0 0 5 c，還有互鎖條件表格 3010之互鎖條件3010a以及動作3010b，係僅爲用以使互 鎖功能動作而使用的設定資訊之其中一例。又，1/ 〇表 格3 0 0 5以及互鎖條件表格3 0 1 0，係僅爲記憶用以使互鎖 功能動作之設定資訊的第1條件表格之其中一例。 通訊部 3015，係當將安全 PLC 3 00作版本升級 (version up)等之在基板處理系統10的起動前、將PLC 本身作交換的時間點、以及基板處理系統1 0之起動後， 將被記憶在1/ 〇表格3 00 5以及互鎖條件表格301〇中之 設定資訊送訊至上位p c 1 0 0。另外，通訊部3 0 1 5，係相 當於第1通訊部。 互鎖控制部3 0 2 0，係被連接於分別設置在上位 PC100、下位PC2 00以及各PM (以及tm)處之感測器 群，並輸入從上位PC 1〇〇所輸出之控制訊號以及從感測 器群所輸出之輸出訊號（感測器値）。互鎖控制部 3 0 2 0，係根據所輸入之感測器値，而判定是否滿足互鎖條 -32- 200842534 件，並只要在滿足有任1個的互鎖條件時，則對將所輸入 之控制訊號輸出至下位P C 2 0 0 —事作禁止。 (上位PC之功能構成） 接下來，針對上位PC 100之功能構成，一面參考以 區塊來將上位 PC 1 00之各功能作展示的圖 9，一面作說 明。上位PC100，係具備有藉由通訊部1 005、1/ 〇表格 (上位PC ) 1010、互鎖條件表格（上位PC ) 1015、暫時 記憶部1 020、比對部1 025、訊息產生部1 03 0、警告部 1 03 5、輸入部1 040、記憶部1 04 5以及處理實行控制部 1 050所展示的各功能。 通訊部1 005，係受訊從安全PLC3 00所送訊之被記億 在I/O表格（PLC) 3 005以及互鎖條件表格（PLC) 3010中之設定資訊。另外，通訊部1〇〇5，係相當於第2 通訊部。 I / 〇表格（上位 p c ) 1 01 0 ’例如，係當將安全 PLC3 00作版本升級時等之伴隨著對安全PLC3 00之交換 而使被保持在安全PLC 3 00之內部的I/O表格的設定資 訊被變更時，將在基板處理系統1 0之起動前而藉由通訊 部3 0 1 5所送訊的I / 〇表格（p L c ) 3 0 0 5作記憶。 互鎖條件表格（上位PC ) 1 01 5 ’係和1/ Ο表格（上 位PC) 1010同樣的，係當伴隨著對安全PLC3 00之交換 而使被保持在安全PLC3 00之內部的互鎖條件表格的設定 資訊被變更時，將在基板處理系統1 〇之起動前而藉由通 -33- 200842534 訊部3 0 1 5所送訊的互鎖條件表格（PLC ) 3 01 0作記憶。 另外，1/ 0表格（上位PC ) 1 0 1 0以及互鎖條件表格 (上位PC ) 1 〇 1 5，係僅爲記憶在基板處理系統1 0之起動 前所受訊的各表格之設定資訊的第2條件表格之其中一 例。1/ 0表格（上位PC ) 1 0 1 0，係相當於第2輸入輸出 表格，互鎖條件表格（上位PC ) 1015，係相當於第2互 鎖條件表格。 暫時記憶部 1 020，係在基板處理系統 1 0 (上位 PC 100)之起動後，將藉由通訊部3015所送訊之I/O表 格（PLC ) 3 00 5以及互鎖條件表格（PLC ) 3010，作爲I /0表格（PLC之複製）1 020a以及互鎖條件表格（PLC 之複製）l〇20b而暫時地記憶。1/ 0表格（PLC之複製） 1 02 0a以及互鎖條件表格（PLC之複製）1 020b，係相當 於第1輸入輸出表格以及第1互鎖條件表格。 比對部1 025，係將被記憶在暫時記憶部1 020中之各 表格的設定資訊，與被記憶在第2條件表格中之設定資訊 作比對。具體而言’比對部1 〇 2 5 ’係將被gS憶在暫日寸δ己 億部1 0 2 0中之1/ 0表格（P L C之複製）1 0 2 0 a的設定資 訊，與被記憶在1/ 0表格（上位P C ) 1 0 1 0中之設定資 訊作比對。又，比對部1 〇 2 5，係將被記憶在暫時記憶部 1 020中之互鎖條件表格（PLC之複製）1 020b的設定資 訊，與被記憶在互鎖條件表格（上位p c ) 1 0 1 5中之設定 資訊作比對。 在作比對之兩1/ 〇表格以及作比對之兩互鎖條件表 -34- 200842534 格中，係藉由相同之形式而被記憶有設定資訊。故而，比 對，係只要使用從前端資料起而依序作匹配的方法即可。 訊息產生部1 〇 3 0，係當作比對之兩表格的設定資訊 有不一致時，動性的產生代表根據產生有不一致之設定資 訊所預測出的問題之狀況的訊息。例如，在圖8之互鎖條 件表格 3010中，當在「DRP Alarm (2. 1)中有不一致 時，訊息產生部1 〇 3 0，作爲代表問題之狀況的訊息，係 只要產生「於乾式幫浦中存在有問題，正禁止對乾式幫浦 之驅動」一般的訊息即可。 警告部1 0 3 5，係當所比對之兩設定資訊有不一致的 情況時，輸出警告。作爲警告之輸出方法，例如，警告部 1 〇 3 5係根據產生有不一致之設定資訊，而對成爲產生不 一致之原因的送訊源頭之安全PLC 3 00作預測，並特定出 對應於所預測之安全PLC3 00的PM又或是TM，而作警 告。PM又或是TM之特定，係可由被記憶在各表格中之 各機器的名稱以及位址等來作預測。 更具體而言，警告部1 03 5，係亦可將根據被與產生 有不一致之設定資訊附加有關連，並被記憶在暫時記憶部 1 02 0又或是互鎖條件表格（上位PC ) 1015中之互鎖條件 30 10a以及動作3010b，而預測出來的PM又或是TM之機 器作特定，並作警告。又，警告部1 03 5，係亦可對根據 藉由產生有不一致之設定資訊所表示的輸入資訊之屬性資 訊（圖7之各機器的名稱3 0 0 5 a、種類3 0 0 5 b以及位址 3 005c)所預測出來的PM內之機器作特定，並警告之。 -35- 200842534 輸入部1 040 ’例如，係將作業員起動基板處理系統 1 0之上位PC 1 00，並指示批量處理之開始的資訊等藉由 作業員之操作所輸入之資訊讀入。 在記憶部1 045中，係被記憶有：在PM1〜PM4處所 被實行之製程控制中所使用的各種配方（recipe )(濺鍍 用配方、鈾刻用配方、CVD用配方、有機EL用配方）。 處理實行控制部1 0 5 0，係根據從作業員而來之指示 (輸入資訊），來以使根據從記憶部1 〇45所選擇之任一 的配方中所顯示之處理程序而於各PM處對基板G實行所 期望之處理的方式，而輸出控制訊號。 另外，在以上所說明之上位PC 100的各部之功能， 實際上，係藉由圖5之CPU 1 1 5，來從記憶有記述實現此 些之功能的處理程序之程式（包含配方）的ROM 105或是 RAM 1 1 0等之記憶媒體中，讀出該當程式，並對該程式作 解釋並實行，而達成之。 (各P C之動作） 接下來，針對使用有以上所說明之上位PC 100的各 部之功能之比對處理，一面參考在圖1 0的比對處理中所 展示之流程圖，一面作說明。另外，在0表格（上位 P C ) 1 0 1 0以及互鎖條件表格（上位P C ) 1 〇 1 5中，係預先 被登錄有和在上位 P c 1 0 0之起動前而被記憶在安全 PLC300中之各表格之設定資訊爲相同之資訊。 -36- 200842534 (比對處理） 作業員，若是將上位PC 100之電源開啓，則係從圖 10之步驟1 000起，而開始比對處理，並前進至步驟 1 005，輸入部1 040，係判定在上位PC 100處是否被投入 有電源。當在上位PC 100處並未被投入有電源的情況 時，則直接前進至步驟1 095，而結束本處理。但是，在 此時間點，由於上位p c 1 ο 〇之電原係被投入，因此，前 進至步驟1010，暫時記憶部1 020，係將藉由通訊部1005 而（在上位PC之起動後）受訊之PLC側的互鎖條件表格 3 010，作爲互鎖條件表格（PLC複製）1 020b而作暫時記 憶。 接下來，前進至步驟1 0 1 5，暫時記憶部1 020，係將 藉由通訊部1〇〇5而（在上位PC之起動後）受訊之PCL 側的1/ 〇表格3 005，作爲1/ Ο表格（PLC複製）1 020a 而作暫時記憶，並前進至步驟1 020。 比對部1 02 5，係在步驟1 020中，比對互鎖條件表格 (上位PC ) 1010與互鎖條件表格（PLC複製）l〇20b是 否爲一致。比對之結果，當兩表格之設定資訊爲不一致 時，前進至步驟1 025，訊息產生部1 03 0，係根據兩表格 之差分（不一致部分之資料），而產生對被預測出發生有 問題之機器作特定的訊息。 接下來，前進至步驟1030，警告部1035，係藉由將 所產生之訊息輸出至顯示器或是揚聲器，而對作業員警告 係產生有問題，並前進至步驟1095，而結束本處理。 -37- 200842534 另一方面，在步驟1 0 2 0中，若是判定兩條件表格之 資料係爲一致，則前進至步驟1 03 5，藉由比對部1 025， 而比對兩1/ 〇表格之資料是否爲一致。當被判定爲一致 時，前進至步驟1 040，處理實行控制部1 0 5 0，係根據藉 由作業員之指示所選擇之配方，而在特定之時機下輸出用 以對被設置在各PM又或是TM處之各機器作控制的訊號 (控制訊號），並前進至步驟1 095，而結束本處理。藉 由此，基板G係被施加藉由作業員而指示之所期望的處 理。 以上所說明之上位PC 100所致的比對處理，係在對 應於複數之PM ( PM1〜PM4 )以及TM而設置之複數的安 全 PLC3 0 0a〜3 00e的每一之中被實行。具體而言，通訊 部1 005，係分別受訊藉由5個的安全PLC3 00所各別送訊 之被記憶在1/ 〇表格3 005以及互鎖條件表格3010中之 設定資訊。 在暫時記憶部1 020中，係將所受訊之設定資訊中’ 於上位PC 100 (基板處理系統10 )之起動後所受訊之設 定資訊，與各安全PLC3 00附加有關連並作記憶，在1/ 〇 表格1 〇 1 〇以及互鎖條件表格1 0 1 5中，係將所受訊之設定 資訊中，在前述基板處理系統之起動後所受訊的各設定資 訊，與各安全PLC 3 00附加關連，並暫時作記憶。比對部 1 025，係將被記憶在暫時記憶部1 020中之兩表格的設定 資訊，與被記憶在I / 〇表格1 〇 1 0以及互鎖條件表格 1 0 1 5之兩表格中的設定資訊，於每一安全P L C中作比 -38- 200842534 對。 最後，警告部1 〇3 5，當所比對之兩表格的設定資訊 有不一致時，將產生有不一致之設定資訊的送訊源頭之安 全PLC300所對應的PM又或是TM作特定，並作警告。 若藉由以上所說明知本實施形態的基板處理系統 1 〇，則用以使互鎖功能動作而使用之設定資訊，係從安全 PLC3 00而被送訊，並被預先登錄在I/O表格1〇1〇以及 互鎖條件表格1 〇 1 5的兩表格中。在此種狀態下，於上位 PC100之起動後，而再度從安全PLC300所送訊而來之設 定資訊，係暫時地被記憶在暫時記憶部1 020中，並與在 上位PC100之起動前而預先被登錄之第I/O表格1010 以及互鎖條件表格1 0 1 5的兩表格之設定資訊作比對。比 對之結果，當兩設定資訊有不一致的情況時，輸出警告。 藉由此警告，係能夠在開始基板G之處理之實行 前，催促系統管理者實行維修。其結果，系統管理者，係 可在基板之處理被實行前，便進行將互鎖功能之問題又或 是設定資訊之問題解除的作業。藉由此，能夠提升基板處 理時之產能。又，能夠防止由於從安全P L C 3 0 0而輸出有 錯誤之控制訊號所產生的機器之誤動作所致之料想不到的 事故之發生。 又，由於上述動作係全部爲自動進行，因此，相較於 先前，係能夠防止因手動所造成之失誤。進而，若藉由 此，則關於設定資訊是否爲適正一事，係僅使用既存之基 板處理系統1 0中所設置的機器便自動地被判定，而不需 -39- 200842534 要新的測定器。藉由此，能夠將此種功能低成本且容易地 導入至基板處理系統1 0中。 又，若藉由本實施形態之基板處理系統1 〇，則關於 在安全P L C 3 0 0側之設定資訊與上位P c 1 0 0側之設定資訊 是否存在有不一致一事之比對，係對於複數之安全 PLC 3 00而分別被實行。而，當安全PLC3 00側之設定資 訊與上位PC 1 00側之設定資訊有不一致時，係將根據不 一致部分之資料而特定出了 PM又或是TM之警告，自動 作輸出。藉由此，系統管理者，係能夠以被預測爲產生有 問題之P Μ又或是T Μ爲中心，來實行對所發生之問題的 確認作業。此結果，相較於先前，能夠顯著的減輕維修作 業之負擔。 (第2實施形態） 接下來，針對第2實施形態之基板處理系統1 〇作說 明。在第2實施形態中，在將被保持在安全PLC 3 00中之 互鎖電路程式與被轉送到上位PC 1 00之互鎖電路程式作 比對一點，係與第1實施形態之基板處理系統1 〇的以I / 〇表格以及互鎖條件表格爲比對對象之處相異。因此， 以此相異點爲中心，針對本實施形態之基板處理系統 1 〇，參考圖1 1〜圖1 4而作說明。 (安全P L C之功能構成） 如圖1 1所示一般，本實施形態之安全P L C 3 0 0，係除 -40- 200842534 了通訊部3 0 1 5、互鎖控制部3 020之外，代替在圖6之第 1實施形態中的安全PLC 3 00所具備之1/ 〇表格以及互鎖 條件表格，而具備有互鎖電路程式表格3 0 2 5。 如圖12所示一般，在互鎖電路程式表格3 02 5中，係 被保存有將用以使互鎖功能動作而設計的電路程式化後之 互鎖電路程式3 025 a。亦即是，在互鎖電路程式表格3 02 5 中，代替以電路來構成用以判斷是否禁止控制訊號之輸出 的互鎖條件，係作爲程式化後之設定資訊，而被記憶有互 鎖電路程式3 0 2 5 a。另外，互鎖電路程式表格3 0 2 5，係相 當於第1互鎖電路程式表格。第1互鎖電路程式表格，係 爲第1條件表格之其中一例。 (上位P C之功能構成） 接下來，針對上位PC 100之功能構成，一面參考以 區塊來將上位PC100之各功能作展不的圖13，一面作說 明。本實施形態之上位PC 1 00，代替第1實施形態之安全 PLC 3 00所具備的1/ 〇表格以及互鎖條件表格，係具備有 互鎖電路程式表格1 05 5。又，本實施形態之上位 P C 1 0 0，除了圖9之第1實施形態的上位p c 1 0 〇之各功能 之外’還追加有在資訊產生部1 060之區塊中所示之新功 能。 在互鎖電路程式表格1 〇 5 5中，係被記憶有：在基板 處理系統1 〇 (上位P C 1 0 0 )之起動前（例如，版本升級 前）’藉由安全PLC 3 0 0之通訊部3015所送訊的互鎖電 -41 - 200842534 路程式表格3 0 2 5之設定資訊。 另外’互鎖電路程式表格1 05 5，係相當於第2互鎖 電路程式表格。第2互鎖電路程式表格，係爲第2條件表 格之其中~'例。 資訊產生部1 060，係如圖12所示一般，從藉由通訊 部1 00 5所受訊之互鎖電路程式3 02 5之設定資訊，而將表 示互鎖條件之電路構成以及表示對各電路之輸入輸出資訊 的設定資訊，作爲電路條件設定資訊1 020dl而產生。例 如，資訊產生部1 060，係從互鎖電路程式3 025中，作爲 表示互鎖條件之電路構成，而解析出「AND」、 「OR」、『OUT』並作抽出，同時，作爲對各電路之輸 入訊號，抽出「LD警報」、「動作中」、「感測器 1」、「感測器2」、「動作要求」，作爲從各電路而來 之輸出訊號，抽出「輸出」，並作爲電路條件設定資訊而 產生。 在暫時記憶部1 020中，係被暫時記憶有：在基板處 理系統1 〇 (上位p c 1 0 0 )之起動後，藉由通訊部3 〇 1 5所 送訊的互鎖電路程式表格1 〇 2 0 c。又，在暫時記憶部丨〇 2 〇 中，藉由資訊產生部1 〇 6 0所產生之電路條件設定資訊， 係被暫時記憶在電路條件表格1 02 0d中。 (比對處理） 接下來，針對本實施形態之比對處理，一面參考圖 1 4之展示比對處理的流程圖，一面作說明。另外，在互 -42- 200842534 鎖電路程式表格（上位p c ) 1 〇 5 5中，係預先被記憶有和 在上位PC 1〇〇之起動前而被記憶在安全PLC3 00中之互鎖 電路程式表格（PLC) 3 025之設定資訊爲相同之資訊。作 業員，若是將上位PC 100之電源開啓，則係從圖14之步 驟1 400起，而開始比對處理，並前進至步驟1 005，輸入 部1 040 ’係判定在上位PC〗〇〇處被投入有電源，而前進 至步驟1 405。接下來，暫時記憶部1 020，係將藉由通訊 部1 005所受訊之PLC側的互鎖電路程式表格3 025，作爲 互鎖電路程式表格（PLC複製）1 020c而作暫時記憶。 接下來，前進至步驟1 4 1 0，資訊產生部1 0 6 0，係從 被記憶在互鎖電路程式表格（PLC複製）1 020c處之互鎖 電路程式中，將電路條件設定資訊作爲條件資料而產生。 接下來，前進至步驟1 4 1 5，比對部1 025，係比對被 記憶在互鎖電路程式表格（上位PC ) 1 05 5中之設定資訊 與被記憶在互鎖電路程式表格（PLC複製）1 020c中之設 定資訊是否爲一致。 另外，比對部1 02 5，係亦可比對被記憶在互鎖電路 程式表格（上位pC) 1 05 5中之設定資訊與被記憶在電路 條件表格1 020d中之設定資訊是否爲一致。 比對之結果’當兩表格之設定資訊爲不一致時，前進 至步驟1 025 ’訊息產生部1 03 0，係根據兩表格之差分 (不一致部分之資料），而產生對被預測出發生有問題之 機器作特定的訊息’之後，前進至步驟1 0 3 0，警告部 1 03 5，係藉由將所產生之訊息輸出至顯示器或是揚聲器， -43- 200842534 而將發生有問題一事對作業員作警告，並前進至步驟 1 4 9 5，而結束本處理。 另一方面，在步驟1415中，當藉由比對部1025而被 判定兩互鎖電路程式表格之資料係爲一致時，前進至步驟 1 040，處理實行控制部1 05 0，係根據藉由作業員之指示 所選擇之配方，而在特定之時機下輸出用以對被設置在各 PM又或是TM處之各機器作控制的訊號（控制訊號）， 並前進至步驟1495，而結束本處理。藉由此，基板G係 被施加藉由作業員而指示之所期望的處理。 若藉由以上所說明之本實施形態的基板處理系統 1 〇，則係對互鎖電路程式作比對。其結果，當兩程式有不 一致的情況時，輸出警告。藉由此，係能夠在開始基板G 之處理之實行前，催促系統管理者實行維修。其結果，系 統管理者，係可在基板之處理被實行前，便進行將互鎖功 能之問題又或是設定資訊之問題解除的作業，藉由此，能 夠提升基板處理時之產率。 (第3實施形態） 接下來’針對第3實施形態之基板處理系統1 〇作說 明。在第3實施形態中，在代替安全PLC3〇〇而使用有硬 體互鎖裝置之點上，係與第1又或是第2實施形態之基板 處理系統1 〇相異。又，在對被記憶在硬體互鎖裝置處之 硬體互鎖電路判定資料（亦即是，硬體（電路）本身）作 比對之點，係與比對對象爲軟體（程式或資料）之第2實 -44- 200842534 施形態的基板處理系統爲相異，因此，以此相異點爲中 心，針對本實施形態之基板處理系統1 〇，參考圖1 5〜圖 1 8而作說明。 (硬體互鎖裝置之功能構成） 針對硬體互鎖裝置之功能構成，一面參考以區塊來將 硬體互鎖裝置之各功能作展示的圖1 5，一面作說明。硬 體互鎖裝置，係具備有藉由通訊部3 0 1 5以及硬體互鎖電 路3 03 0所展示的各功能。如圖1 6所示一般，硬體互鎖電 路3 03 0，係具備有內部緩衝器3 03 0a。在內部緩衝器 3 03 0a中，係被記憶有：用以使互鎖功能動作而使用之反 映有邏輯電路數以及對各電路之輸入輸出點數的判定用資 料（硬體互鎖電路判定資料）。例如，在圖1 6所示之內 部緩衝器3 03 0a中，係被記憶有代表以下各事之判定用資 料：作爲對各電路之輸入輸出點數，輸入係爲「4」；作 爲遮輯電路數，NOR電路爲1個、AND電路爲4個、OR 電路爲3個。內部緩衝器3 03 0a，係爲第1條件表格之其 中一例。 (上位PC之功能構成） 接下來，針對本實施形態之上位PC 1 00之功能構 成，一面參考以區塊來將上位PC 100之各功能作展示的 圖17，一面作說明。本實施形態之上位PC 100，代替第1 實施形態之安全PLC3 00所具備的I/O表格以及互鎖條 -45- 200842534 件表格，係具備有硬體互鎖電路判定資料表格1 065。 通訊部1 005，係至少在上位PC1 00之起動後，受訊 藉由被設置在硬體互鎖裝置700處之通訊部3015所送訊 之硬體互鎖電路判定資料。硬體互鎖電路判定資料表格 1 06 5，係將所受訊之硬體互鎖電路判定資料中，在上位 PC 1 00之起動前所受訊之硬體互鎖電路判定資料作記憶。 硬體互鎖電路判定資料表格1 065，係爲第2條件表格之 其中一例。 暫時記憶部1 〇20，係將所受訊之設定資訊中，在上 位PC 1 0 0之起動後所受訊之硬體互鎖電路判定資料，暫 時地記憶在硬體互鎖電路判定資料表格1 02 0e中。比對部 1 02 5，係將被記憶在暫時記憶部1 020中之電路判定資 料，與被記憶在硬體互鎖電路判定資料表格1 065中之電 路判定資料作比對。警告部1 〇3 5，係當所比對之電路判 定資料有不一致的情況時，輸出警告。 (比對處理） 接下來，針對本實施形態之比對處理，一面參考圖 1 8之展示比對處理的流程圖，一面作說明。另外，在硬 體互鎖電路判定資料表格（上位PC ) 1 065中，係預先被 記憶有和在上位PC 1 00之起動前而被保持在硬體互鎖裝 置7 0 0中之硬體互鎖電路判定表格3 0 3 0 a之設定資訊爲相 同之資訊。 作業員，若是將上位PC 1〇〇之電源開啓，則係從圖 -46- 200842534 18之步驟1800起’而開始比對處理，並前進至步驟 1 0 0 5，輸入部1 〇 4 0，係判定在上位p c丨〇 〇處被投入有電 源，而前進至步驟1 8 0 5。接下來，暫時記憶部1 〇 2 0，係 將藉由通訊部1 〇 〇 5所受訊之硬體互鎖裝置側的硬體互鎖 電路判定資料，作爲硬體互鎖電路判定資料表格（複製） 1 0 2 0 e而作暫時記憶。 接下來，前進至步驟1 8 1 0，比對部1 〇25，係對被記 憶在硬體互鎖電路判定資料表格1 06 5中之電路判定資 料、與被記憶在硬體互鎖電路判定資料表格（複製） 1 02 0e中之電路判定資料是否爲一致一事進行比對。 比對之結果，當兩表格之資料爲不一致時，前進至步 驟1 0 2 5，訊息產生部1 0 3 0，係根據兩表格之差分（不一 致部分之資料）’而產生將被預測爲發生有問題之機器作 特定的訊息，接下來，前進至步驟1 0 3 0，警告步1 〇 3 5， 係藉由將所產生之訊息輸出至顯示器或是揚聲器，而將發 生有問題一事對作業員作警告，並前進至步驟1 8 9 5，結 束本處理。 另一方面，在步驟1810中，當藉由比對部1 025而被 判定兩硬體互鎖電路判定資料表格之資料係爲一致時，前 進至步驟1 〇 4 0，處理實行控制部1 〇 5 0，係根據藉由作業 員之指示所選擇之配方，而在特定之時機下輸出用以對被 設置在各PM又或是TM處之各機器作控制的訊號（控制 訊號），並前進至步驟1895，而結束本處理。藉由此， 基板G係被施加藉由作業員而指示之所期望的處理。 -47- 200842534 若藉由以上所說明之本實施形態的基板處理系統 1 0，則對兩硬體互鎖電路判定資料（亦即是，電路本身） 作比對之結果，當兩電路爲不一致時’係輸出警告。藉由 此，係能夠在開始基板G之處理之實行前，催促系統管 理者實行維修。其結果，系統管理者’係可在基板之處理 被實行前，便進行將互鎖功能之問題又或是設定資訊之問 題解除的作業，藉由此’能夠提升基板處理時之產率。 在上述實施形態中，各部之動作係相互有所關連，並 能夠一面考慮相互間之關連’ 一面作爲一連串的動作來進 行置換，藉由此，能夠將對被保持在互鎖裝置處之設定資 訊的統合性作監視之控制裝置的實施形態’作爲對同設定 資訊之統合性作監視之方法的實施形態。又’藉由將上位 控制裝置之各部的動作’置換爲各部之處理’能夠將對被 保持在互鎖裝置處之設定資訊的統合性作監視之控制裝置 之實施形態，設爲對同設定資訊之統合性作監視之程式的 實施形態。又，藉由將對同設定資訊之統合性作監視的程 式記憶在電腦可讀取之記錄媒體中’能夠將對同設定資訊 之統合性作監視的程式之實施形態’設爲被記錄有該程式 之電腦可讀取的記錄媒體之實施形態。 以上，雖然一面參考所添附之圖面’一面對本發明之 合適的實施形態作了說明’但是’不用說’本發明係並不 被此些相關例子所限定。明顯的’只要是同業者’則在申 請專利範圍所記載之範圍內’能夠想到各種之變更例又或 是修正例，關於此些’當然亦係屬於本發明之技術的範圍 -48- 200842534 內。例如，在本發明中所使用之基板，係並不限定爲玻璃 基板’而例如亦可爲砂晶圓。亦即是，在本發明中所使用 之基板’只要是被使用於有機EL顯示器或是電漿顯示 益、液晶顯不器（LCD: Liquid Crystal Display)等中的 基板即可，本發明之基板處理裝置，只要是可對此種基板 或晶圓等之被處理體施加所期望之處理的裝置即可。 又’作爲相關於本發明之基板處理裝置（P Μ )，除 了蝕刻裝置、CVD裝置等之外，亦有光阻劑塗布/顯像 裝置、洗淨裝置、CMP ( Chemical Mechanical Polishing :化學性機械硏磨）裝置、PVD ( Physical Vapor Deposition :物理氣相成長法）裝置、曝光裝置、離子注 入機等。又，在相關於本發明之基板處理裝置中，係亦可 實行熱擴散處理、灰化處理等。 【圖式簡單說明】 [圖1 ]本發明之第1以及第2實施形態中之基板處理 系統的槪略圖。 [圖2]同實施形態中之清淨室內的各機器之配置圖。 [圖3 ]同實施形態中之PM2的縱剖面。 [圖4]同實施形態中之PM4的立體圖。 [圖5 ]同實施形態中之P C的硬體構成圖。 [圖6]第1實施形態中之PLC的功能構成圖。 [圖7]展示1/ 〇表格之其中一例的圖。 [圖8 ]展示互鎖條件表格之其中一例的圖。 -49- 200842534 [圖9 ]第1實施形態中之上位p C的功能構成圖。 [圖1 0 ]展示第1實施形態之比對處理的流程圖。 [圖1 1]第2實施形態中之PLC的功能構成圖。 [圖12]展示互鎖電路程式之模式以及電路條件設定資 訊之其中一例的圖。 [圖13]第2實施形態中之上位PC的功能構成圖。 [圖1 4]展示第2實施形態之比對處理的流程圖 、 •^匕丰壽 [圖1 5 ]第3實施形態中之硬體互鎖裝置的功扣 圖。 φ —例的 [圖16]展示硬體互鎖電路之判定用資料之其 圖。 [圖1 7 ]第3實施形態中之上位P C的功能構成圖 [圖1 8 ]展示第3實施形態之比對處理的流稼圖 【主要元件符號說明】The substrate processing system 10 includes a higher-level PC 100, a lower-level PC 2 0 0 a to 2 0 0 e , a safety PLC (Programmable Logic Controller) 3 00a to 3 00e, a T Μ (Transfer Module), and a PM (Process Module). 1 ~ PM4. Each of the devices is connected by, for example, a network 400 such as Ethernet (registered trademark). Further, the upper PC 100 is connected to the host computer 600 via a LAN (Local Area Network) 500 - 18 - 200842534. As shown in FIG. 2, the lower PCs 200b to 200e are disposed in the clean room Clri in which PM1 to PM4 are disposed, and are disposed in the vicinity of PM1 to PM4, respectively. The lower PC 200a is disposed in the vicinity of the TM of the center of each PM disposed in the clean room Cln. The upper PC (corresponding to the control device) is placed outdoors from the clean room Cln. The upper PC 100 transmits and receives the control signal between the PC and the lower PC 200, and remotely controls the TM and the PM1 to the PM4, respectively. Specifically, the upper PC 100 performs a remote operation on the processing for transporting the substrate to the TM, and remotely operates the desired processing applied by the PMs 1 to PM4. As a result, it is possible to minimize the ingress and egress of people in the clean room, and to minimize the pollution in the clean room. However, the upper PC 1 00 may also be disposed in the clean room Cln. Further, TM and PM1 to PM4 are substrate processing apparatuses corresponding to the substrate. More specifically, the TM transports the substrate by a transfer arm (not shown), and the PM applies a specific process to the substrate loaded from the TM. Examples of the specific processing to be performed in each of the PMs include, for example, a sputtering process performed by a sputtering apparatus in the crucible 1 and an etching treatment by an etching apparatus in the crucible 2, The film formation process by the CVD (Chemical Vapor Deposition) device in ΡΜ3, the 6-layer organic EL film vapor deposition process performed by the organic EL device in PM4, and the like. In TM, PM1 to PM4, sensor groups TMs, PMls, PM2s, PM3s, and PM4s for detecting the state of each internal unit -19-200842534 are respectively mounted, and the detection signals are respectively input. To safety PLC3 00a~3 0 0e. Safety PLC 3 00 is equivalent to a software that is programmed to be interlocked in the hardware (safety circuit) in the hardware interlocking device and can be controlled in software. Interlocking device. In such a safety PLC 00, a control signal sent from the upper PC 100 for controlling the TM or each PM is also input. In this way, the safety PLC3 00 inputs the control signal from the upper PC 100 and the output signal from the sensor group, when the output signal from the sensor group satisfies any one of the interlock conditions. , it is controlled by not sending the output signal to the lower PC2 00. As a result, the lower PC 200 can avoid the malfunction caused by driving the respective devices in the respective modules (TM, PM1 to PM4) by using the erroneous output signal as a trigger. For example, it is possible to avoid the image being If it is mixed, there will be an error in the timing of the supply of the dangerous gas, or an error in the timing of transporting the substrate. As a result, it is possible to ensure the safety of workers in the factory while avoiding the danger of collision between the substrate and the machine and protecting the machine inside the TM or PM. The main computer 600 manages the entire substrate processing system by performing data management and the like by transmitting data to and from the upper PC 100. Next, as an example of the internal structure of PM1 to PM4, the internal structure of PM3 for performing CVD processing and PM4 for performing six-layer continuous organic EL vapor deposition film processing will be incorporated in PM3 -20-200842534, respectively. FIG. 3 is a schematic view showing a longitudinal section of a microwave plasma processing apparatus (CDV machine), and a perspective view of a main part of a six-layer continuous EL vapor deposition apparatus to be built in the PM 4, and is illustrated in FIG. . (Internal Configuration of PM3) The microwave plasma processing apparatus of PM3 is provided with a processing container C having a bottomed cubic shape which is open at the center of the ceiling surface and the bottom surface. A cover 302 is attached to the ceiling surface of the processing container C. The contact surface of the upper side wall of the processing container C and the lid body 302 is provided with a 〇-shaped ring 404, whereby the processing chamber is kept airtight. The treatment container C and the lid body 302 are, for example, made of a metal such as aluminum and electrically grounded. In the processing container C, a holder 306 for placing a glass substrate (hereinafter referred to as "substrate") G is placed inside the processing container C. The holder 3 06 is made of, for example, aluminum nitride, and is internally provided with a power supply unit 3 0 8 and a heater 3 10 . At the power supply unit 308, a high frequency power source 314 is connected via an integrator 3 1 2 (e.g., a capacitor). Further, at the power supply unit 308, a high voltage DC power supply 3 is connected via the coil 3 1.6. The high frequency power source 3 1 4 and the high voltage DC power source 3 18 are grounded.糸δ Si* W 3 0 8 is a specific bias voltage applied to the inside of the processing container C by the high-frequency power output from the cylindrical power source 3 14 . Further, the power supply unit 308 receives the DC voltage output from the high-voltage DC power supply 3丨8, thereby electrostatically absorbing the substrate G. In the heater 3 10, an AC power source 32 is connected, and the substrate G is held at a specific temperature by the AC voltage 'outputted from the AC power source 320'. One end of the bellows 3 2 2 is attached to the periphery of the opening provided on the bottom surface of the processing container C. Further, at the other end of the bellows 3 2 2, a lifting plate 324 is fixed. In this manner, the opening portion of the bottom surface of the processing container C is sealed by the extension tube 322 and the lift plate 34. The holder 306 is supported by the cylindrical body 326 disposed above the lifting plate 324, and is integrally raised and lowered with the lifting plate 324 and the cylindrical body 326. By this, the holder 306 is adjusted to the height after the processing. Around the holder 306, a baffle 3 28 is provided which is used to control the flow of the gas in the processing chamber to a desired state. At the cover body 310, six waveguide tubes 303, a slot antenna 332, and a plurality of dielectric members 338 formed on a tile are provided. Each of the waveguides 303 has a rectangular cross-sectional shape and is arranged side by side in parallel inside the cover 312. The inside thereof is filled with a dielectric member 336 such as a fluorocarbon resin (for example, teflon (registered trademark)), alumina (Abo;), quartz, or the like, by the dielectric member 3 3 6, according to λ gl = c / ( ε 1) 1/2, the wavelength λ gi of each of the waveguides 3 3 0 is controlled. Here, λ c is the wavelength of the free space, and ε is the dielectric constant of the dielectric member 336. Each of the waveguides 330 is open at the upper portion, and the movable portion 338 is inserted into the opening so as to be freely movable. The movable portion 338 is formed of a conductive material such as aluminum which is a non-magnetic material. On the upper surface of each of the -22-200842534 movable portions 3 3 8 outside the cover body 312, lifts 340 are provided, respectively, so that the movable portion 3 3 7 8 is moved up and down. With such a configuration, each of the waveguides 3 3 0 is arbitrarily changed in height by the upper limit of the dielectric member 336. The slot antenna 3 3 2 is formed integrally with the cover 302 below the cover 032. The slot antenna 30 is formed of a metal such as aluminum which is a non-magnetic body. At the slot antenna 30, a groove (opening) is formed below the respective waveguides 330. In each of the grooves, it is filled by a dielectric member such as fluorocarbon resin, alumina (ai2o3), quartz, or the like, by which the dielectric member is based on λ g2 = λ c / ( ε 2 ) 1/2 The wavelength λ g2 in the tube of each of the waveguides 3 3 0 is controlled. Here, λ c is the wavelength of the free space, and ε 2 is the dielectric constant of the dielectric member in the trench. With such a configuration, the microwaves outputted from the microwave generator (not shown) propagate through the respective waveguides 330 and pass through the dielectric members 334 through the slots of the slot antennas 33 2 . It is injected into the inside of the processing container C. At each of the dielectric members 343, irregularities are formed on the surface facing the substrate G. Thereby, when the surface wave generated by the microwaves transmitted through the respective dielectric members 334 propagates over the surface under the respective dielectric members 334, the loss of the electric field energy increases. Can suppress the spread of surface waves. As a result, the generation of a standing wave is suppressed, and a uniform plasma can be generated. The slot antenna 3 3 2 is attached to the lower side thereof by a beam 342 formed in a lattice shape in order to support the respective dielectric components 3 3 4 . The beam 3 42 ' is formed of a non-magnetic material such as aluminum. -23- 200842534 At the beam 3 42 below the short gas, the gas nozzle 3 46 is sprayed down from the beam 3 42 and the short gas nozzle 344 is shaped like a mushroom, which is shaped by a metal. In the portion, the gas pipe 344a is penetrated so as to be laterally ejected from the side of the short gas nozzle 344. The long gas nozzle 346 has a shape (cylindrical shape) formed of a metal, and a gas penetrates the gas from the lower end of the long gas nozzle 3 46 directly downward. At the gas pipe 3 44a, the gas supply unit 344 is passed through the gas line 3 44b, and the gas is supplied from the gas supply unit 384 to the processing chamber through the gas line 344b and the gas tube 344a. Above. Further, the gas pipe is connected to the gas supply unit via the gas line 3 46b, and the decane gas and the nitrogen gas supplied from the gas supply unit 384 are NHs gas.) The turf gas can be supplied through the gas line 346b and the gas pipe. Nitrogen gas (also in the lower part of the NH3 gas treatment chamber. In the cooling water pipe 350, the cold water is connected to the cold water pipe by the cooling water supply source 3 5 2 The cycle is returned to the cooling water supply source 3 5 2, and the adult body 302 is maintained at the desired temperature. APC3 54, the pressure inside the processing chamber is automatically (Dry Pump) 3 5 6, which is to be processed inside the chamber. The Turbo Molecular pump 358 is connected to the processing chamber mouth 344 and alternately fixed. The argon gas can be connected to the supplied argon gas by means of the inner surface of the gas tube being sprayed into the rod tube 3 4 6 a system. Argon gas 3 4 6 a, 348, by gas (or 346a, into the body) is sprayed to the water supply source, but the water is cooled to enable the cover to be adjusted, DRP pumping, TMP part for vacuum pumping - 200842534 gas. With this, the treatment room The gate valve 3 60 is an opening and closing □ for holding and unloading the substrate G while maintaining the airtight state in the processing chamber. According to this configuration, the lower PC 200d is used. The driving signal sent by the signal, for example, a microwave generator (not shown), a high-frequency power source 3 14 , a high-voltage DC power source 3 18 , a gas supply unit 348 valve or a mass flow controller (all not shown), APC354, DRP356, TMP358, gate valve 360, etc. are driven at a specific timing. As a result, the substrate G is transported to the holder while maintaining the specific vacuum in the processing container. In the state of 3 06, the argon gas, the decane gas, and the nitrogen gas (or NH3 gas) supplied to the inside of the processing vessel are plasma-formed by the electric field energy of the microwaves injected into the processing container. And a tantalum nitride film is formed on the substrate G by the action of the generated plasma. (Sensor group) In PM3, as a sensor group PM3 s for detecting the state of the internal machine of PM3, The sensors are respectively installed with sensors S 1 to S 5, The detection 値 (output signal) is sent to the safety PLC3 00d. Specifically, the sensor S1 is an ON/OFF switch. The switch of the sensor S 1 is closed when the cover 302 is closed. When the ceiling surface of the processing container C is closed, it is put in (switching on) by the pressing force of the lid body 302. Further, the switch of the sensor S1 is turned on when the lid body 302 is opened. When the ceiling surface of the container C is opened, it is released by the pressing force from the lid body 302, and is cut off (switch is closed). Thus, the sensor s 1 detects the open/close state of the ceiling surface of the processing container C, and sends the result to the safety PLC 3 00d. The sensor S2 is an opening degree sensor incorporated in the gate valve 360. By detecting the opening degree of the gate valve 360, the state of opening and closing of the gate valve 360 is detected, and the result is sent to safety. PLC3 00d. The sensor S3 is an alarm device installed at the DRP 3 5 6 and detects ON/OFF of the power of the DRP 3 5 6 when the DRP3 5 6 is not operating at a specific timing (the power is turned off), The alarm is output to safety PLC3 00d. The sensor S4 is an on/OFF switch similar to the sensor S1, and detects whether the substrate G is placed on the stage by the switch 〇N/0FF with the presence or absence of the substrate G, and sends the result. To safety PLC 3 00d. The sensor S5' is a vacuum gauge, and is mounted in such a manner that the outer periphery is fixed by the lid portion τ, and the side wall of the valley is treated with a beton. The sensor s 5 measures the vacuum pressure in the processing chamber and sends the 値 (analog 値) to the safety PLC 3 00d. (Internal configuration of P Μ 4) Next, the internal configuration of the six-layer continuous organic EL vapor deposition apparatus for ΡΜ will be described with reference to Fig. 4 . In PM4, six layers containing an organic EL layer were continuously deposited on the substrate G. In the PM4, there are six vapor deposition sources 41〇a to 4i〇f. In the six vapor deposition sources 410a to 41 Of, the different types of film formation -26-200842534 materials are accommodated, and the pots to be accommodated in the respective vapor deposition sources 4 1 0 are set to 200. At a high temperature of about ~50 °C, the various film-forming materials are connected to the six vapor deposition sources 4 1 0 a to 4 1 0 f, and are connected via six tubes 42 0a to 42 Of There are six blow-out containers 430f. Each of the materials vaporized in the six vapor deposition sources 410a to 410f passes through six connection pipes 420a to 42 Of and from the opening OP ports on the upper surfaces of the six blowing containers 430a to 430f. Blow it out. Between each of the blowing containers 430, a partition wall 440 is provided, and the seven outlet walls 440 are used to partition each of the blowing containers 43 0 into a film capable of preventing the film forming material blown from each of the blowing containers 430. It is mixed into the film-forming material molecules blown from the adjacent blowing container 430. The substrate G is placed near the ceiling surface of the PM4, and is provided with a platform (not shown) having a sliding mechanism by static electricity, and is first in each of the blowing containers 430a to 430f partitioned by the partition wall 440. The blower 430a to the second blower 430b to the third blower 43 to the fourth blower 43 0d to the fifth blower 43 0e to the 6 4 3 Of are moved at a specific speed. In this case, the material is blown out from each of the blowing containers 43a to 43 Of, and the desired difference is formed by continuously stacking six layers. In PM4, the PM4 is also the same as PM2. The sensor group PM4s, 値 (output signal) detected by the state of the internal device of the PM4 is sent to the safety PLC 300e for example. The connection 4 3 0 a ~ kind of film formation is set (blow-out, by gas separation, the gas into the film is sucked on the film formed by the seven upper blower blower substrates G. However, -27 - 200842534 is omitted here (the illustration of FIG. 4 is also omitted). (Hardware configuration of PC) Next, with respect to the configuration of the hardware of the PC, reference is made to FIG. In addition, since the hardware configuration of the lower PC 200 is the same as that of the upper PC 100, the above description is only for the upper p C 1 0 0. The upper PC 100 is provided with: ROM 105, RAM 110 CPU1 15, bus bar 120, internal interface (internal 1/F) 125, and external interface (external 1/F) 130. In ROM 105, the basic program executed in the upper PC 100 is recorded, Or a program that is started when an abnormality occurs, various recipes, etc. In the RAM 110, it is stored: a setting information useful to memorize the memory PLC 00 is stored at the upper PC 100. The setting information is used as a program for comparing the processing programs, etc. In addition, the ROM 105 and the RAM 1 10 are one example of a memory device, and may be a memory device such as an EEP ROM, an optical disk, a magneto-optical disk, etc. The CPU 1 1 5 is based on various recipes. The processing of the substrate is controlled, and at the same time, the comparison between the setting information stored in the safety PLC 300 and the setting information stored in the upper PC 100 is controlled. The bus 120 is in the ROM 105 and the RAM 110. The path for exchanging data between the CPU 115, the internal interface 165, and the external interface 1 30. -28- 200842534 The internal interface 1 2 5 is the input data, and the necessary information is output to the unmapped It is not a flash power or a speaker, etc. The external interface 130 is used to transmit and receive data between the devices connected to it via the network 400. (Functional configuration of the safety PLC) Next, The function of the safety PLC 300 is described with reference to Figure 6 which shows the functions of the safety PLC 3 00 in blocks. The safety PLC3 00 has the 1/Ο table 3 on the PLC side. 00 5, PLC side The functions shown in the lock condition table 3010, the communication unit 3015, and the interlock control unit 3 020. As shown in Fig. 7, the I/Ο table 3 0 0 5 is stored in the safety PLC 3 00. Name information of the output source (for example, sensor name) of each input signal 3 005 a, type information of each input information 3 005b, address 3005c storing STATUS information of each input signal. For example, when the name information 3 005a held by the input signal is "Lid Open", it is displayed as 1 bit by the type 3 005 b "BOOL", and the address is 3 0 05 c (address The bit position is (1.0), so the output of the sensor S 1 (refer to Fig. 3) is stored at the position of the bit "1". For example, if it is assumed that the cover 310 is open, the sensor S1 outputs "1", and when the cover 312 is closed, the sensor S1 outputs "0", if the address is "1" If the position of the 0-bit is stored as "1", it means that the cover 3 0 2 is in the state of -29-200842534, and if it is located at the 0-bit of the address "1", it is stored. "0" indicates that the lid 312 is in a closed state. Further, for example, when the name information 3 00 5 a' held by the input signal is "V acuumsens 〇r" as shown in the last line of Fig. 7, the type 3 005b "CHANNEL" is displayed 16 Bit, and the address of the address 3 0 0 5 c is 1 〇, therefore, in the position of 16 bits of the address "1 0", the processing room detected by the sensor S 5 is stored. Pressure 値 (analog 値). In addition, the name information 3 0 0 5 a, the type information 3 0 0 5 b, and the address 3 005c are examples of the attribute information of the input signal, and may be attached to, for example, in addition to the sensor name. The name or ID (identification information) on the switch. As shown in Fig. 8, in general, in the interlock condition table 301, setting information representing the interlock condition is attached to each machine to be associated and memorized. In Fig. 8, the following five conditions are set as the interlock condition 3010a for prohibiting the output of the control signal for turning the microwave generator "ON". For example, "Lid Open(l. 0) = =ON" refers to the following interlock condition: when the address of the address "1" in which the state of the cover (02) is memorized is ON ( In other words, in the case of the opening, the control signal for setting the microwave generator to "ON" is prohibited from being output to the lower PC 200. The state in which the state of the lid body 3 is "ON" or "OFF" is updated at any time by the output signal sent from the sensor S1 of Fig. 3. "GV Open (1·1) = 2 ON" means the following interlocking bar -30- 200842534: The first digit of the address "1" in the state in which the gate valve 360 is memorized is ON (also In other words, in the case of the opening, the control signal for turning the microwave generator to "ON" is output to the lower PC2 00 - the operation is prohibited. The state in which the state of the gate valve 3 60 is "ON" or "OFF" is updated at any time by the output signal sent from the sensor S2 of Fig. 3. "DRPAlarm ( 2· 1 ) = = ON" means the following interlock condition: when the address of the address "2" in which the status of DRP3 5 6 is remembered is ON (that is, the output has In the case of the alarm), the control signal for setting the microwave generator to "ON" is output to the lower PC 200. The status of the alarm device of DRP3 5 6 is "ON (output has alarm)" or "OFF (no alarm is output)", which is output signal from sensor S3 of Fig. 3 Feel free to be updated. "Work Status ( 1 · 2 ) = = ON" refers to the following interlock condition: when the second bit of the address "1" of the electrostatically absorbing state in which the substrate G is memorized is ON (is de-energized, In other words, when the substrate G is not electrostatically absorbed, the control signal for turning the microwave generator "ON" to the lower PC 200 is prohibited. The electrostatic absorption state of the substrate G is "ON (discharge)" or "〇fF (electrostatically absorbed)", and is always received by the output signal sent from the sensor S4 of FIG. Update. "Vac cum Sensor < = l〇〇mTorr" means the following interlocking condition: if the 16th bit of the address "1 0" in which the vacuum state of the processing chamber is stored is less than 100mT 〇rr, the microwave is generated. Set to -31 - 200842534 The control signal of "ON" is output to the lower PC2 00 - the operation is prohibited. Whether or not the vacuum state in the processing chamber is equal to or less than 100 mTorr is updated at any time by the output signal sent from the sensor S 5 of Fig. 3. As described above, when at least one of the five interlocking conditions is satisfied, the safety PLC 300 outputs a control signal for setting the microwave generator to "ON" to the lower PC 200. Prohibited. In addition, the name of the machine stored in 1/〇Table 3 005 is 3 0 0 5 a, the type 3 0 0 5 b, and the address 3 0 0 5 c, and the interlock condition 3010a of the interlock condition table 3010 and Act 3010b is only one example of setting information used to operate the interlock function. Further, the 1/〇 table 3 0 0 5 and the interlock condition table 3 0 1 0 are only one example of the first condition table for storing setting information for operating the interlock function. The communication unit 3015 is to perform a version upgrade of the safety PLC 300, etc., before the start of the substrate processing system 10, when the PLC itself is exchanged, and after the substrate processing system 10 is started, The setting information stored in the 1/〇 table 3 00 5 and the interlock condition table 301〇 is sent to the upper pc 1 0 0. Further, the communication unit 3 0 15 is equivalent to the first communication unit. The interlock control unit 3 0 2 0 is connected to the sensor groups respectively disposed at the upper PC 100, the lower PC 2 00, and each of the PMs (and tm), and inputs the control signals output from the upper PC 1 以及 and The output signal (sensor 値) output from the sensor group. The interlock control unit 3 0 2 0 determines whether the interlock bar -32-200842534 is satisfied according to the input sensor 値, and if it meets any one of the interlock conditions, The input control signal is output to the lower PC 2 0 0 - the operation is prohibited. (Functional Configuration of the Upper PC) Next, the functional configuration of the upper PC 100 will be described with reference to Fig. 9 in which the functions of the upper PC 100 are displayed in blocks. The upper PC 100 is provided with a communication unit 1 005, a 1/〇 table (upper PC) 1010, an interlock condition table (upper PC) 1015, a temporary memory unit 1 020, a comparison unit 1 025, and a message generation unit 103. 0, the warning unit 1 03 5, the input unit 1 040, the memory unit 1 04 5, and the respective functions displayed by the control unit 1 050. The communication unit 1 005 is the setting information of the received information sent from the safety PLC3 00 in the I/O table (PLC) 3 005 and the interlock condition table (PLC) 3010. Further, the communication unit 1〇〇5 corresponds to the second communication unit. I / 〇 table (upper pc) 1 01 0 'For example, when the safety PLC3 00 is upgraded, etc., the I/O table that is held inside the safety PLC 3 00 is exchanged with the exchange of the safety PLC 00. When the setting information is changed, the I/〇 table (p L c ) 3 0 0 5 sent by the communication unit 3 0 15 is memorized before the start of the substrate processing system 10 . The interlock condition table (upper PC) 1 01 5 ' is the same as the 1/ Ο table (upper PC) 1010, and is interlocked with the security PLC3 00. When the setting information of the table is changed, it will be memorized by the interlock condition table (PLC) 3 01 0 sent by the channel of the channel 33-200842534 before the start of the substrate processing system 1 . In addition, the 1/0 table (upper PC) 1 0 1 0 and the interlock condition table (upper PC) 1 〇1 5 are only for setting information of the tables received before the start of the substrate processing system 10. An example of the second conditional table. The 1/0 table (upper PC) 1 0 1 0 is equivalent to the second input/output table, and the interlock condition table (upper PC) 1015 is equivalent to the second interlock condition table. The temporary memory unit 1 020 is an I/O table (PLC) 3 00 5 and an interlock condition table (PLC) that are transmitted by the communication unit 3015 after the substrate processing system 10 (the upper PC 100) is started. 3010, temporarily stored as I / 0 table (PLC copy) 1 020a and interlock condition table (PLC copy) l 〇 20b. 1/0 table (copy of PLC) 1 02 0a and the interlock condition table (copy of PLC) 1 020b are equivalent to the first input/output table and the first interlock condition table. The matching unit 1 025 compares the setting information of each of the tables stored in the temporary storage unit 1 020 with the setting information stored in the second condition table. Specifically, the 'Comparative Part 1 〇 2 5 ' system will be remembered by gS in the setting of the 1/0 table (reproduction of PLC) 1 0 2 0 a of the temporary day inch δ hexaire part 1 0 2 0, and It is memorized by the setting information stored in the 1/0 table (upper PC) 1 0 1 0. Further, the matching unit 1 〇 2 5 is set in the interlock condition table (PLC copy) 1 020b stored in the temporary memory unit 1 020, and is stored in the interlock condition table (upper pc) 1 The setting information in 0 1 5 is compared. In the comparison of the two 1/ 〇 tables and the two interlocking condition tables -34- 200842534, the setting information is memorized by the same form. Therefore, the comparison is as long as the method of matching from the front-end data is used. When the message generating unit 1 〇 3 0 is used as the setting information of the two tables, the dynamic generation represents a message indicating the status of the problem predicted by the inconsistent setting information. For example, in the interlock condition table 3010 of FIG. 8, when there is an inconsistency in the "DRP Alarm (2. 1), the message generating unit 1 〇30, as the message representing the status of the problem, is generated as follows. There is a problem in the pump, and it is forbidden to drive the general message of the dry pump. The warning unit 1 0 3 5 outputs a warning when there is a mismatch between the two setting information. As a method of outputting the warning, for example, the warning unit 1 〇 3 5 predicts the safety PLC 300 that is the source of the communication that causes the inconsistency based on the setting information that is inconsistent, and specifies that it corresponds to the predicted one. The PM of the safety PLC3 00 is either TM or warning. The PM or TM specificity can be predicted by the name and address of each machine memorized in each table. More specifically, the warning unit 103 5 may also be associated with the setting information that is inconsistent with the generation, and may be memorized in the temporary memory unit 1 0 0 or the interlock condition table (upper PC) 1015 In the interlocking condition 30 10a and the action 3010b, the predicted PM or the TM machine is specified and warned. Further, the warning unit 1 03 5 may also have attribute information on the input information indicated by the setting information that is inconsistent (the names of the devices in FIG. 7 are 3 0 0 5 a, the type 3 0 0 5 b, and Address 3 005c) The machine within the predicted PM is specified and warned. -35- 200842534 The input unit 1 040 ', for example, activates the information on the start of the batch processing, such as the information on the start of the batch processing, by the operator, and reads the information input by the operator's operation. In the memory unit 1 045, various recipes (sputtering recipes, uranium engraving recipes, CVD recipes, and organic EL recipes) used in the process control performed at PM1 to PM4 are stored. ). The processing execution control unit 1 0 0 0 is based on an instruction (input information) from the worker to cause the processing program displayed in the recipe selected from any of the storage units 1 to 45 to be used in each PM. The control signal is outputted by performing the desired processing on the substrate G. Further, in the above description, the functions of the respective units of the upper PC 100 are actually stored in the ROM of the program (including the recipe) in which the processing program for realizing such functions is described by the CPU 1 15 of FIG. In the memory medium of 105 or RAM 1 1 0, the program is read, and the program is interpreted and implemented, and this is achieved. (Operation of each P C) Next, the comparison processing using the functions of the respective units of the upper PC 100 described above will be described with reference to the flowchart shown in the comparison processing of Fig. 10 . In addition, in the 0 table (upper PC) 1 0 1 0 and the interlock condition table (upper PC) 1 〇1 5, the system is registered in advance and is stored in the safety PLC 300 before the start of the upper P c 1 0 0 The setting information of each form in the table is the same information. -36- 200842534 (Comparative processing) If the power of the upper PC 100 is turned on, the operator starts the comparison processing from step 1 000 of FIG. 10, and proceeds to step 1 005, the input unit 1 040, It is determined whether or not power is supplied to the upper PC 100. When the power is not supplied to the upper PC 100, the process proceeds directly to step 1095, and the present process is ended. However, at this point of time, since the electric source of the upper pc 1 ο 被 is input, the process proceeds to step 1010, and the temporary memory unit 1 020 is received by the communication unit 1005 (after the startup of the upper PC). The interlock condition table 3 010 on the PLC side is temporarily stored as an interlock condition table (PLC copy) 1 020b. Next, proceeding to step 1 0 1 5, the temporary memory unit 1 020 is a 1/〇 table 3 005 on the PCL side that is received by the communication unit 1〇〇5 (after the startup of the upper PC). 1/ Ο form (PLC copy) 1 020a for temporary memory and proceed to step 1 020. The comparison unit 102 5, in step 1 020, compares whether the comparison interlock condition table (upper PC) 1010 and the interlock condition table (PLC copy) l〇20b are identical. As a result of the comparison, when the setting information of the two tables is inconsistent, proceeding to step 1 025, the message generating unit 1 03 0 is based on the difference between the two tables (inconsistent part), and the pair is predicted to have a problem. The machine makes a specific message. Next, proceeding to step 1030, the warning unit 1035 issues a problem to the operator warning by outputting the generated message to the display or the speaker, and proceeds to step 1095 to end the processing. -37- 200842534 On the other hand, in step 1 0 2 0, if it is determined that the data of the two condition tables are consistent, proceed to step 1 03 5, and compare the two 1/〇 tables by the comparison unit 1 025. Whether the information is consistent. When it is determined that the match is made, the process proceeds to step 1 040, and the process execution control unit 1 0 50 is outputted at a specific timing according to the recipe selected by the operator's instruction, and is set to be set in each PM. Or the signal (control signal) controlled by each machine at the TM, and proceeds to step 1 095 to end the process. Thereby, the substrate G is subjected to a desired process instructed by the operator. The comparison processing by the upper PC 100 described above is carried out for each of the plurality of security PLCs 300a to 00e which are provided for the plurality of PMs (PM1 to PM4) and TM. Specifically, the communication unit 1 005 is separately configured to receive the setting information stored in the 1/〇 table 3 005 and the interlock condition table 3010 by the five security PLCs 00. In the temporary memory unit 1 020, the setting information received after the activation of the upper PC 100 (substrate processing system 10) in the received setting information is associated with each safety PLC3 00 and is memorized. In the 1/〇 table 1 〇1 〇 and the interlock condition table 1 0 1 5, the setting information of the received information, the setting information received after the start of the substrate processing system, and each safety PLC are 3 00 additional related, and temporarily remember. The matching unit 1 025 is a setting information of two tables to be memorized in the temporary memory unit 1 020, and is stored in the two tables of the I / 〇 table 1 〇 1 0 and the interlock condition table 1 0 1 5 Set the information to be compared to -38- 200842534 in each safety PLC. Finally, the warning unit 1 〇3 5, when there is a discrepancy between the setting information of the two tables, the PM corresponding to the safety source of the communication source having the inconsistent setting information or the TM is specified, and caveat. According to the substrate processing system 1 of the present embodiment described above, the setting information used to operate the interlock function is transmitted from the safety PLC 300 and is registered in the I/O table in advance. 1〇1〇 and the two tables in the Interlock Condition Table 1 〇1 5 . In this state, the setting information sent from the safety PLC 300 after the activation of the upper PC 100 is temporarily stored in the temporary storage unit 1 020 and is advanced before the activation of the upper PC 100. The setting information of the two tables of the registered I/O table 1010 and the interlock condition table 1 0 1 5 is compared. As a result of the comparison, when there is an inconsistency between the two setting information, a warning is output. By this warning, it is possible to urge the system administrator to perform maintenance before starting the processing of the substrate G. As a result, the system administrator can perform the problem of canceling the problem of the interlock function or the problem of setting the information before the processing of the substrate is performed. Thereby, the productivity at the time of substrate processing can be improved. Further, it is possible to prevent an unexpected accident due to a malfunction of the device caused by the output of the control signal having an error from the safety P L C 300. Further, since all of the above-described operations are performed automatically, it is possible to prevent mistakes caused by the manual as compared with the prior art. Further, if this is the case, whether or not the setting information is correct is automatically determined using only the machine set in the existing substrate processing system 10, without the need for a new measuring device. Thereby, such a function can be introduced into the substrate processing system 10 at a low cost and easily. Further, according to the substrate processing system 1 of the present embodiment, the comparison between the setting information on the safety PLC 300 side and the setting information on the upper P c 1 0 0 side is inconsistent with the plural information. Safety PLC 3 00 is implemented separately. However, when the setting information on the safety PLC3 00 side is inconsistent with the setting information on the upper PC 100 side, the PM or TM warning is specified based on the data of the inconsistent part, and the output is automatically output. By this, the system manager can perform the confirmation of the problem that occurs, based on the predicted P or the T Μ. This result can significantly reduce the burden of maintenance work compared to the previous one. (Second Embodiment) Next, a description will be given of a substrate processing system 1 according to a second embodiment. In the second embodiment, the interlock circuit program held in the safety PLC 300 is compared with the interlock circuit program transferred to the upper PC 100, and the substrate processing system according to the first embodiment is used. 1 〇 The I / 〇 table and the interlock condition table are different for the comparison object. Therefore, the substrate processing system 1 of the present embodiment will be described with reference to Figs. 11 to 14 as a center of the difference. (Functional Configuration of Safety PLC) As shown in Fig. 11, in general, the safety PLC 300 in the present embodiment is replaced by the communication unit 3 0 1 5 and the interlock control unit 3 020 in addition to -40-200842534. The 1/〇 table and the interlock condition table included in the safety PLC 3 00 in the first embodiment of FIG. 6 are provided with an interlock circuit program table 3 0 2 5 . As shown in Fig. 12, in the interlock circuit program table 305, an interlock circuit program 3 025a in which a circuit designed to operate the interlock function is stored is stored. That is, in the interlock circuit program table 305 5, instead of using the circuit to form an interlock condition for determining whether to prohibit the output of the control signal, the program is configured as the programmed information, and the interlock circuit is memorized. Program 3 0 2 5 a. In addition, the interlock circuit program table 3 0 2 5 is equivalent to the first interlock circuit program table. The first interlock circuit program table is an example of the first condition table. (Functional Configuration of the Upper P C) Next, the functional configuration of the upper PC 100 will be described with reference to Fig. 13 in which the functions of the upper PC 100 are not displayed in blocks. In the upper PC 1 00 of the present embodiment, in place of the 1/〇 table and the interlock condition table included in the safety PLC 3 00 of the first embodiment, an interlock circuit program table 205 5 is provided. Further, in the upper-layer PC 1 0 0 of the present embodiment, in addition to the functions of the upper pc 1 0 第 of the first embodiment of Fig. 9, a new function shown in the block of the information generating unit 1 060 is added. . In the interlock circuit program table 1 〇 5 5, it is memorized: before the start of the substrate processing system 1 〇 (upper PC 1 0 0) (for example, before the version upgrade) 'communication by the safety PLC 300 Interlocking power sent by Ministry 3015 -41 - 200842534 Location form 3 0 2 5 setting information. In addition, the 'interlock circuit program table 1 05 5 is equivalent to the second interlock circuit program table. The second interlock circuit program table is the example of the second condition table. The information generating unit 1 060 is generally configured as shown in FIG. 12, and the circuit configuration and the indication indicating the interlock condition are set from the setting information of the interlock circuit program 305 received by the communication unit 1005. The setting information of the input and output information of the circuit is generated as the circuit condition setting information 1 020 dl. For example, the information generating unit 1 060 extracts "AND", "OR", and "OUT" from the interlock circuit program 3 025 as a circuit configuration indicating the interlock condition, and simultaneously extracts The input signal of the circuit extracts "LD alarm", "action", "sensor 1", "sensor 2", and "action request" as output signals from each circuit, and extracts "output". And generated as a circuit condition setting information. In the temporary memory unit 1 020, the interlock circuit program table 1 transmitted by the communication unit 3 〇1 5 after the start of the substrate processing system 1 〇 (the upper pc 1 0 0 ) is temporarily stored. 2 0 c. Further, in the temporary memory unit 〇 2 ,, the circuit condition setting information generated by the information generating unit 1 〇 60 is temporarily stored in the circuit condition table 102 0d. (Comparative Processing) Next, the comparison processing of the present embodiment will be described with reference to the flowchart of the display matching processing of Fig. 14. In addition, in the mutual-42-200842534 lock circuit program table (upper pc) 1 〇 5 5, the interlock circuit program which is memorized in advance and stored in the safety PLC 00 before the start of the host PC 1 系 is stored. The setting information of the table (PLC) 3 025 is the same information. The operator, if the power of the upper PC 100 is turned on, starts from step 1 400 of FIG. 14 and starts the comparison processing, and proceeds to step 1 005, and the input unit 1 040 'determines at the upper PC. The power is supplied, and the process proceeds to step 1405. Next, the temporary memory unit 1 020 temporarily stores the interlock circuit program table 3 025 on the PLC side received by the communication unit 1 005 as an interlock circuit program table (PLC copy) 1 020c. Next, proceeding to step 1 4 1 0, the information generating unit 1 0 6 0 is used as a condition from the interlock circuit program stored in the interlock circuit program table (PLC copy) 1 020c. Generated from the information. Next, proceeding to step 1 4 1 5, the comparison unit 1 025 compares the setting information memorized in the interlock circuit program table (upper PC) 1 05 5 and is memorized in the interlock circuit program table (PLC) Copy) Whether the setting information in 1 020c is consistent. Further, the matching unit 102 5 can also compare whether the setting information stored in the interlock circuit program table (upper pC) 205 5 matches the setting information stored in the circuit condition table 1 020d. The result of the comparison 'When the setting information of the two tables is inconsistent, proceeding to step 1 025 'the message generating unit 1 03 0 is based on the difference between the two tables (inconsistent part), and the pair is predicted to have a problem. After the machine makes a specific message', proceed to step 1 0 3 0, the warning part 1 03 5, by outputting the generated message to the display or the speaker, -43- 200842534, and the problem will occur. The officer gives a warning and proceeds to step 1 4 9 5 to end the process. On the other hand, in step 1415, when it is determined by the matching unit 1025 that the data of the two interlock circuit program tables is identical, the process proceeds to step 1 040, and the process execution control unit 100 0 0 is based on the operation. The member instructs the selected recipe, and outputs a signal (control signal) for controlling each machine set at each PM or TM at a specific timing, and proceeds to step 1495 to end the processing. . Thereby, the substrate G is subjected to a desired process instructed by the operator. According to the substrate processing system 1 of the present embodiment described above, the interlock circuit program is compared. As a result, a warning is output when there is an inconsistency between the two programs. By this, it is possible to urge the system manager to perform maintenance before starting the process of the substrate G. As a result, the system manager can perform the operation of canceling the problem of the interlocking function or setting the information before the processing of the substrate is performed, whereby the productivity at the time of substrate processing can be improved. (Third embodiment) Next, the substrate processing system 1 of the third embodiment will be described. In the third embodiment, the use of the hardware interlocking device in place of the safety PLC 3 is different from the substrate processing system 1 of the first or second embodiment. Moreover, in the hardware interlock circuit judgment data (that is, the hardware (circuit) itself) that is memorized in the hardware interlock device, the comparison object is a software (program or data). In the case of the substrate processing system of the second embodiment, the substrate processing system of the present embodiment is different. Therefore, with respect to the substrate processing system 1 of the present embodiment, reference is made to FIG. 15 to FIG. Description. (Functional Configuration of Hardware Interlocking Device) The functional configuration of the hardware interlocking device will be described with reference to Fig. 15 in which the functions of the hardware interlocking device are displayed in blocks. The hardware interlocking device is provided with functions exhibited by the communication unit 3 0 15 and the hardware interlock circuit 3000. As shown in Fig. 16. Generally, the hardware interlock circuit 300 0 0 is provided with an internal buffer 300 0 0a. In the internal buffer 3 03 0a, the data for judging the number of logic circuits and the number of input/output points for each circuit used for operating the interlock function (hard interlock circuit determination data) is stored. ). For example, in the internal buffer 303a shown in FIG. 16, the data for judging the following items is stored: as the number of input/output points for each circuit, the input system is "4"; The number of circuits is one for the NOR circuit, four for the AND circuit, and three for the OR circuit. The internal buffer 3 03 0a is an example of the first condition table. (Functional Configuration of the Upper PC) Next, the functional configuration of the upper PC 100 in the present embodiment will be described with reference to Fig. 17 in which the functions of the upper PC 100 are displayed in blocks. The upper PC 100 of the present embodiment is provided with a hardware interlock circuit determination data table 1 065 in place of the I/O table and the interlocking bar -45-200842534 table included in the safety PLC 00 of the first embodiment. The communication unit 1 005 determines the data by the hardware interlock circuit sent by the communication unit 3015 provided at the hardware interlock device 700 at least after the startup of the upper PC 100. The hardware interlock circuit decision data table 1 06 5 is used to memorize the hardware interlock circuit judgment data received before the start of the host PC 100 in the hardware interlock circuit judgment data. The hardware interlock circuit determination data table 1 065 is an example of the second condition table. The temporary memory unit 1 〇20 is temporarily stored in the hardware interlock circuit determination data table in the setting information of the received information, and the hardware interlock circuit determination data received after the startup of the upper PC 100 is temporarily stored. 1 02 0e. The comparison unit 1 02 5 compares the circuit determination data stored in the temporary memory unit 1 020 with the circuit determination data stored in the hardware interlock circuit determination data table 1 065. The warning unit 1 〇3 5 outputs a warning when there is a discrepancy between the circuit judgment data. (Comparative Processing) Next, the comparison processing of the present embodiment will be described with reference to the flowchart of the display matching processing of Fig. 18. In addition, in the hardware interlock circuit determination data table (upper PC) 1 065, the hardware bodies that are previously stored in the hardware interlocking device 700 before the start of the upper PC 100 are memorized. The setting information of the lock circuit determination table 3 0 3 0 a is the same information. The operator, if the power of the upper PC 1 is turned on, starts the comparison process from step 1800 of FIG. 46-200842534 18, and proceeds to step 1 0 0 5, the input unit 1 〇 4 0, It is determined that power is supplied to the upper pc丨〇〇, and the process proceeds to step 1805. Next, the temporary memory unit 1 〇 2 0 determines the data by the hardware interlock circuit on the hardware interlock device side that is received by the communication unit 1 〇〇 5 as the hardware interlock circuit decision data table ( Copy) 1 0 2 0 e for temporary memory. Next, proceeding to step 1 8 1 0, the comparison unit 1 〇 25, the pair of circuit determination data stored in the hardware interlock circuit determination data table 605, and the memory interlock circuit determination The data table (copy) 1 02 0e is used to determine whether the data is consistent. As a result of the comparison, when the data of the two tables is inconsistent, proceed to step 1 0 2 5, and the message generating unit 1 0 3 0 is generated based on the difference between the two tables (inconsistent data). The problematic machine makes a specific message. Next, proceed to step 1 0 3 0, warning step 1 〇 3 5, and the message will be generated by outputting the generated message to the display or the speaker. The officer will give a warning and proceed to step 1 8 9 5 to end the process. On the other hand, in step 1810, when it is determined by the comparison unit 1 025 that the data of the two hardware interlock circuit determination data tables is identical, the process proceeds to step 1 〇 4 0, and the process execution control unit 1 〇 5 0, according to the formula selected by the operator's instruction, output a signal (control signal) for controlling each machine set at each PM or TM at a specific timing, and proceed to At step 1895, the process ends. Thereby, the substrate G is subjected to a desired process instructed by the operator. -47- 200842534 According to the substrate processing system 10 of the present embodiment described above, the two hardware interlock circuit determination data (that is, the circuit itself) are compared, and when the two circuits are inconsistent When the 'system output warning. Thereby, it is possible to urge the system administrator to perform maintenance before starting the process of the substrate G. As a result, the system administrator can perform the operation of canceling the problem of the interlock function or setting the information before the processing of the substrate is performed, whereby the yield at the time of substrate processing can be improved. In the above embodiment, the operations of the respective units are related to each other, and the replacement can be performed as a series of operations while considering the relationship between them, whereby the setting information held at the interlock device can be set. The embodiment of the control device for monitoring the integration is an embodiment of a method for monitoring the integration of the setting information. In addition, the embodiment of the control device that monitors the integration of the setting information held by the interlock device by the operation of replacing the operations of the respective units of the upper control device with the processing of each unit is used as the setting information. The implementation of the program for monitoring the integration. Further, by storing a program for monitoring the integration of the setting information on a computer-readable recording medium, the embodiment of the program capable of monitoring the integration of the setting information is recorded as being recorded. The embodiment of the computer readable recording medium of the program. The present invention has been described with reference to the accompanying drawings, and is not to be construed as limited. It is obvious that 'as long as it is a peer', within the scope of the patent application, 'various examples or amendments can be conceived, and of course, these are also within the scope of the technology of the present invention -48-200842534. . For example, the substrate used in the present invention is not limited to the glass substrate ’, and may be, for example, a sand wafer. In other words, the substrate used in the present invention may be a substrate used in an organic EL display or a plasma display, a liquid crystal display (LCD), or the like. The processing device may be any device that can apply a desired process to the object to be processed such as the substrate or the wafer. Further, as a substrate processing apparatus (P Μ ) according to the present invention, in addition to an etching apparatus, a CVD apparatus, and the like, there are also a photoresist coating/developing device, a cleaning device, and CMP (Chemical Mechanical Polishing).硏) device, PVD (Physical Vapor Deposition) device, exposure device, ion implanter, etc. Further, in the substrate processing apparatus according to the present invention, thermal diffusion treatment, ashing treatment, or the like may be performed. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a substrate processing system according to first and second embodiments of the present invention. Fig. 2 is a layout view of each device in the clean room in the same embodiment. Fig. 3 is a longitudinal section of PM2 in the same embodiment. Fig. 4 is a perspective view of the PM 4 in the same embodiment. Fig. 5 is a view showing a hardware configuration of P C in the same embodiment. Fig. 6 is a view showing a functional configuration of a PLC in the first embodiment. [Fig. 7] A diagram showing an example of a 1/〇 table. [Fig. 8] A diagram showing an example of an interlock condition table. -49- 200842534 [Fig. 9] A functional configuration diagram of the upper bit p C in the first embodiment. [Fig. 10] A flowchart showing the comparison processing of the first embodiment. [Fig. 11] A functional configuration diagram of a PLC in the second embodiment. [Fig. 12] A diagram showing an example of the mode of the interlock circuit program and the circuit condition setting information. Fig. 13 is a view showing the functional configuration of an upper PC in the second embodiment. [Fig. 14] A flowchart showing the comparison processing of the second embodiment, and Fig. 15 is a diagram showing the power interlock of the hardware interlocking device in the third embodiment. φ - Example [Fig. 16] shows a graph of the judgment data of the hardware interlock circuit. [Fig. 1 7] Functional configuration diagram of the upper position P C in the third embodiment [Fig. 18] Flow diagram showing the comparison processing of the third embodiment [Description of main component symbols]

1 〇 :基板處理系統 100 ：上位PC 105 ： ROM 1 10 : RAM 115: CPU 1 2 0 :匯流排 1 2 5 :內部介面 1 3 0 :外部介面 200 ：下位PC -50- 2008425341 〇 : Substrate processing system 100 : Upper PC 105 : ROM 1 10 : RAM 115 : CPU 1 2 0 : Bus 1 2 5 : Internal interface 1 3 0 : External interface 200 : Lower PC -50- 200842534

200a ：下位 PC 200b ：下位 PC 200c ：下位 PC 200d ：下位 PC200a: Lower PC 200b: Lower PC 200c: Lower PC 200d: Lower PC

2 0 0 e :下位 P C2 0 0 e : lower P C

3 00 :安全 PLC 3 00a ：安全 PLC 3 00b ：安全 PLC 3 00c ：安全 PLC 3 00d ：安全 PLC 3 00e ：安全 PLC 302 :蓋體 3 0 4 : O型環 3 06 :支持器 3 0 8 :給電部 3 1 0 :加熱器 312 :整合器 3 1 4 :高頻電源 3 1 6 :線圏 3 1 8 :高壓直流電源 3 2 0 :交流電源 3 22 :伸縮管 3 24 :升降板 326 :筒體 200842534 3 2 8 :擋板 3 3 0 :導波管 3 3 2 :槽形天線 3 3 4 :介電質組件 3 3 6 :介電構件 3 3 8 :可動部 3 40 :升降機構 3 42 ··樑3 00 : Safety PLC 3 00a : Safety PLC 3 00b : Safety PLC 3 00c : Safety PLC 3 00d : Safety PLC 3 00e : Safety PLC 302 : Cover 3 0 4 : O-ring 3 06 : Support 3 0 8 : Power supply unit 3 1 0 : Heater 312 : Integrator 3 1 4 : High-frequency power supply 3 1 6 : Line 圏 3 1 8 : High-voltage DC power supply 3 2 0 : AC power supply 3 22 : Telescopic tube 3 24 : Lifting plate 326 : Cylinder 200842534 3 2 8 : baffle 3 3 0 : waveguide 3 3 2 : trough antenna 3 3 4 : dielectric component 3 3 6 : dielectric member 3 3 8 : movable portion 3 40 : lifting mechanism 3 42 ··梁

3 44 :短氣體噴嘴 344a :氣體管 3 44b :氣體管線 3 46 :長氣體噴嘴 3 46a :氣體管 3 46b :氣體管線 3 48 :氣體供給部 3 5 0 :冷卻水配管 3 52 :冷卻水供給源 354 ： APC 356 ： DRP 3 5 8 : TMP 3 6 0 :閘閥 4 0 0 :網路 4 1 0 a :蒸鍍源 4 1 0 b :蒸鍍源 -52 200842534 410c :蒸鍍源 410d :蒸鍍源 4 1 0 e .黑鑛源 410f :蒸鍍源 420a :連結管 4 2 0 b :連結管 420c :連結管 420d :連結管 420e :連結管 4 2 0 f :連結管 4 3 0 :吹出容器 4 3 0 a :吹出容器 43 0b ：吹出容器 4 3 0 c :吹出容器 4 3 0 d :吹出容器 43 0e :吹出容器 43 0f :吹出容器 4 4 0 :隔壁3 44 : short gas nozzle 344a : gas pipe 3 44b : gas line 3 46 : long gas nozzle 3 46a : gas pipe 3 46b : gas line 3 48 : gas supply part 3 5 0 : cooling water pipe 3 52 : cooling water supply Source 354 : APC 356 : DRP 3 5 8 : TMP 3 6 0 : Gate valve 4 0 0 : Network 4 1 0 a : evaporation source 4 1 0 b : evaporation source -52 200842534 410c : evaporation source 410d: steaming Plating source 4 1 0 e. Black ore source 410f: vapor deposition source 420a: connecting tube 4 2 0 b : connecting tube 420c : connecting tube 420d : connecting tube 420e : connecting tube 4 2 0 f : connecting tube 4 3 0 : blowing out Container 4 3 0 a : Blowing out container 43 0b : Blowing out container 4 3 0 c : Blowing out container 4 3 0 d : Blowing out container 43 0e : Blowing out container 43 0f : Blowing out container 4 4 0 : Next door

5 00 : LAN 6 0 0 :主電腦 700 :硬體互鎖裝置 1 0 〇 5 :通訊部 1010 : 1/ 0 表格 1 0 1 5 :互鎖條件表格 -53 200842534 1 020 :暫時記憶部 1 020a ： I / 〇 表格 1 020b :互鎖條件表格 1 020c :互鎖電路程式表格 1 0 2 0 d :電路條件表格 1 020dl :電路條件設定資訊 1 02 0e :硬體互鎖電路判定資料表格 1 0 2 5 :比對部 1 〇 3 0 :訊息產生部 1 03 5 :警告部 1 0 4 0 :輸入部 1 04 5 :記憶部 1 〇 5 0 :處理實行控制部 1 0 5 5 :互鎖電路程式表格 1 0 6 0 :資訊產生部 1 06 5 :硬體互鎖電路判定資料表格 3 0 0 5: I / Ο 表格 3 0 0 5 a :名稱資訊 3 0 0 5 b :種類資訊 3005c ：位址 3 0 1 0 :互鎖條件表格 3 0 1 0 a :互鎖條件 3 0 1 0 b :動作 3 0 1 5 :通訊部 -54- 200842534 3 02 0 ：互鎖控制部 3 02 5 :互鎖電路程式表格 302 5a ：互鎖電路程式 3030 :硬體互鎖電路 3 03 0a ：內部緩衝器硬體互鎖電路硬體互鎖電路判定 資料表格硬體互鎖電路判定表格硬體互鎖電路內部緩衝器 C :處理容器 G :基板 Cln :清淨室 OP :開口 S 1 :感測器 S 2 :感測器 S 3 :感測器 S 4 :感測器 S 5 :感測器 -55-5 00 : LAN 6 0 0 : Main computer 700 : Hardware interlock device 1 0 〇 5 : Communication unit 1010 : 1 / 0 Table 1 0 1 5 : Interlock condition table - 53 200842534 1 020 : Temporary memory unit 1 020a : I / 〇 Table 1 020b : Interlock condition table 1 020c : Interlock circuit program table 1 0 2 0 d : Circuit condition table 1 020dl : Circuit condition setting information 1 02 0e : Hardware interlock circuit decision data table 1 0 2 5 : Comparison unit 1 〇 3 0 : Message generation unit 1 03 5 : Warning unit 1 0 4 0 : Input unit 1 04 5 : Memory unit 1 〇 5 0 : Process execution control unit 1 0 5 5 : Interlock circuit Program table 1 0 6 0 : Information generation unit 1 06 5 : Hardware interlock circuit decision data table 3 0 0 5: I / Ο Table 3 0 0 5 a : Name information 3 0 0 5 b : Type information 3005c : bit Address 3 0 1 0 : Interlock condition table 3 0 1 0 a : Interlock condition 3 0 1 0 b : Action 3 0 1 5 : Communication unit -54- 200842534 3 02 0 : Interlock control unit 3 02 5 : Mutual Lock circuit program table 302 5a: Interlock circuit program 3030: Hardware interlock circuit 3 03 0a: Internal buffer hardware interlock circuit Hardware interlock circuit decision data table Hardware interlock circuit decision Table hardware interlock circuit internal buffer C: processing container G: substrate Cln: clean room OP: opening S 1 : sensor S 2 : sensor S 3 : sensor S 4 : sensor S 5 : Sensor-55-

Claims (1)

200842534 十、申請專利範圍 1 · 一種控制裝置，係爲被連接有具備對所輸入之控 制訊號中的滿足特定之條件的控制訊號之輸出作禁止的互 鎖（interlock)功能之軟體互鎖裝置，並將用以對基板處 理裝置作控制之前述控制訊號輸出至前述軟體互鎖裝置中 之控制裝置， 其特徵爲，具備有= 第2通訊部，係受訊被記憶在前述軟體互鎖裝置處之 第1條件表格中，並至少在前述控制裝置之起動後’藉由 被設置在前述軟體互鎖裝置中之第1通訊部而被送訊的用 以使互鎖功能動作之設定資訊；和 第2條件表格，係將在前述所受訊之設定資訊中’於 前述控制裝置之起動前所受訊之設定資訊作記憶；和 暫時記憶部，係將在前述所受訊之設定資訊中’於前 述控制裝置之起動後所受訊之設定資訊作暫時記憶；和 比對部，係將被記憶在前述暫時記億部中之設定資訊 與被記憶在前述第2條件表格中之設定資訊作比封·’和 警告部，係在前述所比對之兩設定資訊有不一致的情 況時，輸出警告。 2. 如申請專利範圍第1項所記載之控·制裝置’其 中，前述軟體互鎖裝置之第1條件表格，與即述控制裝置 之第2條件表格，係藉由相同之形式，而記憶設定資訊。 3. 如申請專利範圍第1項所記載之控制裝置，其 中， -56- 200842534 前述第1以及第2條件表格，係分別包含有將代表對 應於構成前述基板處理裝置之複數的機器之互鎖條件的設 定資訊，與各機器附加上關連並作記憶的第1以及第2互 鎖條件表格’ 前述比對部，係將被記憶在前述暫時記憶部中之第1 互鎖條件表格的設定資訊與被記憶在前述第2條件表格中 之設定資訊作比對’ 前述警告部，係在前述所比對之兩設定資訊有不一致 的情況時，輸出警告。 4. 如申請專利範圍第3項所記載之控制裝置，其 中，前述警告部，係當前述所比對之兩設定資訊爲不一致 時，特定出與產生有不一致之設定資訊被附加有關連的被 記憶在前述暫時記憶部又或是第2互鎖條件表格中之基板 處理裝置的機器，並作警告。 5. 如申請專利範圍第1項所記載之控制裝置，其 中， 前述第1以及第2條件表格，係分別包含有：記憶有 代表被輸入至前述軟體互鎖裝置中之複數輸入訊號的屬性 資訊之設定資訊的第1以及第2輸入輸出表格， 前述比對部，係將被保存在前述暫時記憶部中之第1 輸入輸出表格的設定資訊，與被記憶在前述第2輸入輸出 表格中之設定資訊作比對， 前述警告部，係在前述所比對之兩設定資訊有不一致 的情況時，輸出警告。 -57- 200842534 6. 如申請專利範圍第5項所記載之控制裝置，其 中，前述警告部，係當前述所比對之兩設定資訊爲不一致 時，特定出藉由產生有不一致之設定資訊而代表的輸入訊 號之屬性資訊所預測出的基板處理裝置的機器，並作警 告。 7. 如申請專利範圍第1項所記載之控制裝置，其 中， 前述第1以及第2條件表格，係分別包含有：將用以 判斷是否禁止控制訊號之輸出的互鎖條件程式化後之設定 資訊作記憶的第1以及第2互鎖電路程式表格， 前述比對部，係將被保存在前述暫時記憶部中之第1 互鎖電路程式表格的設定資訊與被記憶在前述第2互鎖電 路程式表格中之設定資訊作比對’ 前述警告部，係在前述所比對之兩設定資訊有不一致 的情況時，輸出警告。 8. 如申請專利範圍第7項所記載之控制裝置，其 中，係更進而具備有： 資訊產生部，係從被保存在前述暫時記憶部中之第1 互鎖電路程式表格之設定資訊，而將代表互鎖條件之電路 構成以及代表對各電路之輸入輸出訊號的設疋資訊’作爲 電路條件設定資訊而產生；和 電路條件表格，係將前述所產生的電路條件設定資訊 中，在前述控制裝置之起動前所產生的電路條件設定資訊 作記憶， -58- 200842534 前述暫時記憶部，係將前述所產 訊中，在前述控制裝置之起動後所產 訊作暫時記憶， 前述對照部，係將被記憶在前述 條件設定資訊與被記憶在前述電路條 設定資訊作比對， 前述警告部，係在前述所比對之 的情況時，輸出警告。 9.如申請專利範圍第8項所ΐ 中，前述警告部，係當存在有前述不 生有不一致之程式化後的互鎖條件設 有不一致之電路條件設定資訊所預 告。 1 0 . —種控制裝置，係爲被連接 制訊號中的滿足特定之條件的控制訊 鎖（interlock)功能之硬體互鎖裝置 理裝置作控制之前述控制訊號輸出至 之控制裝置， 其特徵爲，具備有： 第2通訊部，係受訊被記憶在前 第1條件表格中，並至少在前述控制 被設置在前述硬體互鎖裝置中之第1 以使互鎖功能動作之相關於邏輯電路 入輸出點數的設定資訊；和 生之電路條件設定資 生的電路條件設定資 暫時記憶部中之電路 件表格中之電路條件 兩設定資訊有不一致 己載之控制裝置，其 一致時，特定出從產 定資訊又或是從產生 时出的電路，並作警 有具備對所輸入之控 號之輸出作禁止的互 ，並將用以對基板處 前述硬體互鎖裝置中 述硬體互鎖裝置處之 裝置之起動後，藉由 通訊部而被送訊的用 數以及對各電路之輸 -59- 200842534 第2條件表格，係將在前述所受訊之設定資訊中’於 前述控制裝置之起動前所受訊之設定資訊作記憶；和 暫時記憶部，係將在前述所受訊之設定資訊中’於前 述控制裝置之起動後所受訊之設定資訊作暫時記憶；和 比對部，係將被記憶在前述暫時記憶部中之設定資訊 與被記憶在前述第2條件表格中之設定資訊作比對；和警 告部，係在前述所比對之兩設定資訊有不一致的情況時， 輸出警告。 11. 如申請專利範圍第1 0項所記載之控制裝置，其 中，前述警告部，係當前述所比對之兩設定資訊爲不一致 時，特定出從產生有不一致之相關於邏輯電路數以及對各 電路之輸入輸出點數的設定資訊所預測出的基板處理裝置 的機器，並作警告。 12. 如申請專利範圍第1項所記載之控制裝置，其 中，係更進而具備有： 訊息產生部，係當前述所比對之兩設定資訊係爲不一 致時，將代表根據產生有不一致之設定資訊所預測出的錯 誤之狀況的訊息動態地產生， 前述警告部，係將藉由前述訊息產生部所產生的訊息 作輸出。 1 3 ·如申請專利範圍第1項所記載之控制裝置，其 中，係更進而具備有： 處理實行控制部，係當前述所比對之兩設定資訊爲一 致時，以使利用前述基板處理裝置的基板之處理開始的方 -60- 200842534 式而作控制。 1 4. 一種基板處理系統，係爲具備有用以輸出對基板 處理裝置作控制之控制訊號的控制裝置、和被連接於前述 控制裝置，並具備有對從前述控制裝置所輸出之控制訊號 中的滿足特定之條件的控制訊號之輸出作禁止的互鎖 (interlock)功能之軟體互鎖裝置， 其特徵爲： 前述軟體互鎖裝置，係具備有： 記憶有用以使前述互鎖功能動作之設定資訊的第1條 件表格、和 至少在前述基板處理系統之起動後，將被記憶在前述 第1條件表格中之設定資訊作送訊的第1通訊部， 前述控制裝置，係具備有： 受訊藉由前述第1通訊部而被送訊的設定資訊之第2 通訊部、和 將在前述所受訊之設定資訊中，於前述基板處理系統 之起動前所受訊之設定資訊作記憶的第2條件表格、和 將在前述所受訊之設定資訊中，於前述基板處理系統 之起動後所受訊之設定資訊作暫時記憶之暫時記憶部、和 將被記憶在前述暫時記憶部中之設定資訊與被記憶在 前述第2條件表格中之設定資訊作比對之比對部、和 在前述所比對之兩設定資訊有不一致的情況時，輸出 警告之警告部。 15.如申請專利範圍第1 4項所記載之基板處理系 61 - 200842534 統，其中， 前述控制裝置，係被連接於對應複數之基板處理裝置 而被設置之複數的軟體互鎖裝置， 前述第2通訊部，係分別受訊藉由各軟體互鎖裝置所 送訊之第1條件表格的設定資訊， 前述第2條件表格，係將前述分別所受訊之設定資訊 中，在前述基板處理系統之起動前所受訊的設定資訊，與 各軟體互鎖裝置附加上關連並作記憶， 前述暫時記憶部，係將前述分別所受訊之設定資訊 中，在前述基板處理系統之起動後所受訊的設定資訊，與 前述各軟體互鎖裝置附加上關連並作暫時記憶， 前述比對部，係將被記憶在前述暫時記憶部之設定資 訊與被記憶在前述條件表格中之設定資訊，在每一軟體互 鎖裝置中作對照， 前述警告部，係當前述所比對之兩設定資訊爲不一致 時，特定出存在有不一致之設定資訊的送訊源頭之軟體互 鎖裝置所對應之基板處理裝置，並作警告。 1 6. —種設定資訊監視方法，係爲使用連接有具備對 所輸入之控制訊號中的滿足特定之條件的控制訊號之輸出 作禁止的互鎖（interlock)功能之軟體互鎖裝置，並利用 將用以對基板處理裝置作控制之前述控制訊號輸出至前述 軟體互鎖裝置中之控制裝置，而對被保存在前述軟體互鎖 裝置中之設定資訊作監視的方法， 其特徵爲= -62- 200842534 從前述軟體互鎖裝置，而受訊被記憶在前述軟體互鎖 裝置處之第1條件表格中，並至少在前述控制裝置之起動 後，藉由前述軟體互鎖裝置而被送訊的用以使互鎖功能動 作之設定資訊； 將在前述所受訊之設定資訊中，於前述控制裝置之起 動前所受訊之設定資訊，記憶在第2條件表格中； 將在前述所受訊之設定資訊中，於前述控制裝置之起 動後所受訊之設定資訊，在暫時記憶部中作暫時記憶； 將被記憶在前述暫時記憶部中之設定資訊與被記憶在 前述第2條件表格中之設定資訊作比對； 當前述所比對之兩設定資訊有不一致的情況時，輸出 警告。 1 7 . —種記憶有設定資訊監視程式之記憶媒體，係爲 被記憶有用以使電腦實行：使用連接有具備對所輸入之控 制訊號中的滿足特定之條件的控制訊號之輸出作禁止的互 鎖（interlock )功能之軟體互鎖裝置，並利用將用以對基 板處理裝置作控制之前述控制訊號輸出至前述軟體互鎖裝 置中之控制裝置，而對被保存在前述軟體互鎖裝置中之設 定資訊作監視的處理之設定資訊監視程式的記憶媒體， 其特徵爲，使電腦實行以下處理： 從前述軟體互鎖裝置，而受訊被記憶在前述軟體互鎖 裝置處之第1條件表格中，並至少在前述控制裝置之起動 後，藉由前述軟體互鎖裝置而被送訊的用以使互鎖功能動 作之設定資訊的處理；和 -63- 200842534 將在前述所受訊之設定資訊中，於前述控制裝置之起 動前所受訊之設定資訊，記憶在第2條件表格中的處理； 和 將在前述所受訊之設定資訊中，於前述控制裝置之起 動後所受訊之設定資訊，在暫時記憶部中作暫時記憶的處 理；和 將被記憶在前述暫時記憶部中之設定資訊與被記憶在 前述第2條件表格中之設定資訊作比對的處理；和 在前述所比對之兩設定資訊有不一致的情況時，輸出 警告的處理。 -64-200842534 X. Patent Application No. 1 · A control device is a software interlock device that is connected with an interlock function that prohibits the output of a control signal that satisfies a specific condition among the input control signals, And a control device for outputting the control signal for controlling the substrate processing device to the software interlock device, wherein the second communication portion is provided, and the received signal is memorized at the software interlock device. In the first condition table, at least after the start of the control device, 'setting information for operating the interlock function by the first communication unit provided in the software interlock device; and The second condition table is to memorize the setting information received before the start of the control device in the setting information received; and the temporary memory unit is in the setting information of the received message. The setting information received after the start of the control device is temporarily memorized; and the comparison unit is stored in the temporary information and the setting information and the The setting information stored in the second condition table is compared with the seal and the warning unit, and the warning is output when the two sets of the matching information are not identical. 2. The control device according to the first aspect of the patent application, wherein the first condition table of the software interlock device and the second condition table of the control device are stored in the same form. Set the information. 3. The control device according to the first aspect of the patent application, wherein -56- 200842534, the first and second condition tables respectively include interlocking means for representing a plurality of machines corresponding to the plurality of substrate processing apparatuses. The setting information of the condition is the first and second interlock condition table associated with each device and is memorized. The comparison unit stores the setting information of the first interlock condition table stored in the temporary memory unit. The warning unit is compared with the setting information stored in the second condition table. The warning unit outputs a warning when there is a mismatch between the two sets of the comparison information. 4. The control device according to the third aspect of the invention, wherein the warning unit specifies that the setting information that is inconsistent with the occurrence is added when the two sets of the comparison information are not identical. The machine of the substrate processing apparatus in the temporary memory section or the second interlock condition table is memorized and warned. 5. The control device according to claim 1, wherein the first and second condition tables respectively include: attribute information indicating a plurality of input signals input to the software interlock device; In the first and second input/output tables of the setting information, the matching unit stores the setting information of the first input/output table stored in the temporary storage unit and is stored in the second input/output table. The setting information is compared, and the warning unit outputs a warning when there is a mismatch between the two sets of the comparison information. The control device according to the fifth aspect of the invention, wherein the warning unit is configured to generate an inconsistent setting information when the two matching information sets are inconsistent. The attribute information of the input signal is represented by the predicted substrate processing device and is warned. 7. The control device according to claim 1, wherein the first and second condition tables respectively include: a setting for stabilizing an interlock condition for determining whether to prohibit output of the control signal The first and second interlock circuit program tables for information storage, wherein the comparison unit stores the setting information of the first interlock circuit program table stored in the temporary memory unit and is stored in the second interlock The setting information in the circuit program table is compared. The warning unit outputs a warning when there is a discrepancy between the two settings information. 8. The control device according to claim 7, wherein the information generating unit further includes: setting information from the first interlock circuit program table stored in the temporary memory unit, a circuit configuration representing an interlock condition and a setting information representing an input/output signal of each circuit are generated as circuit condition setting information; and a circuit condition table is set in the aforementioned circuit condition setting information in the foregoing control The circuit condition setting information generated before the start of the device is used for memory. -58- 200842534 The temporary memory unit temporarily stores the information produced by the control device after the start of the control device, and the control unit is The condition setting information stored in the condition is compared with the information stored in the circuit strip setting information, and the warning unit outputs a warning when the case is compared. 9. In the eighth aspect of the patent application, the warning unit is pre-announced when there is an inconsistent circuit condition setting information in which the staggered interlocking condition does not occur. The control device is a control device for controlling the control signal outputted by the hardware interlocking device of the control interlocking function that satisfies a specific condition in the connected signal, and the characteristic thereof is In addition, the second communication unit is configured to be memorized in the first condition table, and at least the control is set in the first of the hardware interlock devices to cause the interlock function to operate. The setting information of the number of input points of the logic circuit; and the circuit condition setting of the circuit condition setting of the raw circuit; the circuit condition in the circuit part table in the temporary memory part; the setting information has an inconsistent control device, and when it is consistent, the specific The circuit from the production information or from the time of generation, and the police have the mutual inhibition of the input of the input control number, and will be used to the hardware of the aforementioned hardware interlocking device on the substrate. After the start of the device at the interlock device, the number of messages sent by the communication unit and the second condition table for each circuit will be set in the above-mentioned information. In the information, the setting information received before the start of the control device is used for memorizing; and the temporary memory portion is to set the information of the received information after the start of the control device in the setting information received. Temporary memory; and comparison unit, which compares the setting information memorized in the temporary memory unit with the setting information memorized in the second condition table; and the warning unit, which is the aforementioned two comparisons When there is an inconsistency in the setting information, a warning is output. 11. The control device according to claim 10, wherein the warning unit specifies that the number of logic circuits associated with the inconsistency is different when the two sets of the comparison information are not identical. The setting of the number of input and output points of each circuit is predicted by the machine of the substrate processing apparatus, and a warning is issued. 12. The control device according to claim 1, wherein the information generating unit further includes: when the two sets of the matching information are inconsistent, the representative is set according to the inconsistency setting. The message of the status of the error predicted by the information is dynamically generated, and the warning unit outputs the message generated by the message generating unit. The control device according to the first aspect of the invention, further comprising: a processing execution control unit configured to use the substrate processing device when the two matching information sets are identical The processing of the substrate begins with the control of -60-200842534. 1 . A substrate processing system comprising: a control device for outputting a control signal for controlling a substrate processing device; and a control device connected to the control device and having a control signal outputted from the control device The software interlocking device for the interlocking function of the output of the control signal satisfying the specific condition is characterized in that: the software interlocking device is provided with: setting information for storing the interlocking function The first condition table and the first communication unit that transmits the setting information stored in the first condition table at least after the start of the substrate processing system, wherein the control device includes: a second communication unit that sets the information to be transmitted by the first communication unit, and a second communication unit that stores the setting information received before the activation of the substrate processing system in the received setting information. The condition table and the setting information received after the start of the substrate processing system in the setting information received as described above are temporarily memorized. The temporary memory unit and the setting information to be memorized in the temporary memory unit are compared with the setting information stored in the second condition table, and the setting information is inconsistent with the two matching information. In the case of a warning, the warning part is output. The substrate processing system 61-200842534 according to claim 14, wherein the control device is connected to a plurality of software interlock devices provided corresponding to a plurality of substrate processing devices, The communication unit is configured to receive the setting information of the first condition table sent by the software interlocking device, and the second condition table is the setting information of the respective received signals in the substrate processing system. The setting information received before the start is additionally associated with and stored by each of the software interlocking devices, and the temporary memory unit receives the information of the respective received signals after the start of the substrate processing system. The setting information of the message is additionally associated with the software interlocking device and temporarily stored, and the comparison unit is stored in the setting information of the temporary memory unit and the setting information memorized in the condition table. In the comparison of each software interlocking device, the warning portion is that when the two sets of comparison information are inconsistent, the specific presence or absence exists. The substrate processing device corresponding to the soft-locking device of the source of the communication is set and the warning is set. 1 6. A setting information monitoring method is a software interlocking device that uses an interlock function that prohibits an output of a control signal that satisfies a specific condition among the input control signals, and utilizes a method for monitoring a setting information stored in the software interlock device by outputting the control signal for controlling the substrate processing device to the control device in the software interlock device, wherein the method is: -62 - 200842534 from the aforementioned software interlocking device, wherein the received signal is memorized in the first condition table at the software interlocking device, and at least after the starting of the control device, is transmitted by the software interlocking device Setting information for operating the interlock function; in the setting information received, the setting information received before the start of the control device is stored in the second condition table; In the setting information, the setting information received after the start of the control device is temporarily memorized in the temporary memory; it will be memorized in the foregoing temporary The configuration information memory unit and the memory is set in the second condition of the information table for comparison; two configuration information when the comparison of the aforementioned inconsistency, it outputs a warning. 1 7 . A memory medium having a memory setting program for memory is useful for the computer to perform: using a connection with an output having a control signal for satisfying a specific condition in the input control signal. a software interlocking device for interlocking function, and outputting the control signal for controlling the substrate processing device to the control device in the software interlocking device, and storing the same in the software interlocking device The memory medium for setting the information monitoring program for setting the information monitoring program is characterized in that the computer performs the following processing: from the software interlocking device, the received signal is memorized in the first condition table at the software interlocking device. And at least after the start of the control device, the setting information for the interlock function is sent by the software interlocking device; and -63- 200842534 will be set in the aforementioned information The setting information received before the start of the control device is memorized in the second condition table; and will be described above In the setting information received, the setting information received after the activation of the control device is temporarily stored in the temporary memory unit; and the setting information to be memorized in the temporary memory unit is memorized. The setting information in the second condition table is a process of comparison; and when the setting information of the two comparisons does not match, a process of outputting a warning is output. -64-
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TWI509375B (en) * 2009-06-30 2015-11-21 Lam Res Corp Methods and arrangements for implementing automatic in-situ process control scheme during execution of recipe
US9740648B2 (en) 2014-01-31 2017-08-22 SCREEN Holdings Co., Ltd. Substrate treatment apparatus that controls respective units by master-slave method

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JPH0884383A (en) * 1994-09-13 1996-03-26 Toshiba Corp Supervisory controller
JP3550275B2 (en) * 1997-07-16 2004-08-04 株式会社東芝 Data transmission method of plant monitoring system
JP3942795B2 (en) * 2000-04-10 2007-07-11 株式会社リコー Camera mis-shooting prevention device and camera with wrong shooting prevention device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI509375B (en) * 2009-06-30 2015-11-21 Lam Res Corp Methods and arrangements for implementing automatic in-situ process control scheme during execution of recipe
US9740648B2 (en) 2014-01-31 2017-08-22 SCREEN Holdings Co., Ltd. Substrate treatment apparatus that controls respective units by master-slave method

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