TW200746519A - Deposition of LiCoO2 - Google Patents

Deposition of LiCoO2

Info

Publication number
TW200746519A
TW200746519A TW095145541A TW95145541A TW200746519A TW 200746519 A TW200746519 A TW 200746519A TW 095145541 A TW095145541 A TW 095145541A TW 95145541 A TW95145541 A TW 95145541A TW 200746519 A TW200746519 A TW 200746519A
Authority
TW
Taiwan
Prior art keywords
deposition
licoo2
layer
utilizing
battery
Prior art date
Application number
TW095145541A
Other languages
Chinese (zh)
Inventor
Hong-Mei Zhang
Richard E Demaray
Bernd J Neudecker
Original Assignee
Infinite Power Solutions Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/297,057 external-priority patent/US8636876B2/en
Priority claimed from US11/557,383 external-priority patent/US7959769B2/en
Application filed by Infinite Power Solutions Inc filed Critical Infinite Power Solutions Inc
Publication of TW200746519A publication Critical patent/TW200746519A/en

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

In accordance with the present invention, deposition of LiCoO2 layers in a pulsed-dc physical vapor deposition process is presented. Such a deposition can provide a low-temperature, high deposition rate deposition of a crystalline layer of LiCoO2 with a desired (101) or (003) orientation. Some embodiments of the deposition addresses the need for high rate deposition of LiCoO2 films, which can be utilized as the cathode layer in a solid state rechargeable Li battery. Embodiments of the process according to the present invention can eliminate the high temperature (> 700 DEG C) anneal step that is conventionally needed to crystallize the LiCoO2 layer. Some embodiments of the process can improve a battery utilizing the LiCoO2 layer by utilizing a rapid thermal anneal process with short ramp rates.
TW095145541A 2005-12-07 2006-12-06 Deposition of LiCoO2 TW200746519A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/297,057 US8636876B2 (en) 2004-12-08 2005-12-07 Deposition of LiCoO2
US11/557,383 US7959769B2 (en) 2004-12-08 2006-11-07 Deposition of LiCoO2

Publications (1)

Publication Number Publication Date
TW200746519A true TW200746519A (en) 2007-12-16

Family

ID=57914579

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095145541A TW200746519A (en) 2005-12-07 2006-12-06 Deposition of LiCoO2

Country Status (1)

Country Link
TW (1) TW200746519A (en)

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