TW200736600A - Method of inspecting a defect in a photomask and photomask - Google Patents
Method of inspecting a defect in a photomask and photomaskInfo
- Publication number
- TW200736600A TW200736600A TW096106076A TW96106076A TW200736600A TW 200736600 A TW200736600 A TW 200736600A TW 096106076 A TW096106076 A TW 096106076A TW 96106076 A TW96106076 A TW 96106076A TW 200736600 A TW200736600 A TW 200736600A
- Authority
- TW
- Taiwan
- Prior art keywords
- pattern
- photomask
- inspecting
- regions
- peripheral
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
- G03F1/84—Inspecting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0332—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their composition, e.g. multilayer masks, materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Nonlinear Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Inorganic Chemistry (AREA)
- Mathematical Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
A photomask 10 has a pixel pattern region 9 including a repetitive pattern in which a same pattern is repeated, and peripheral pattern regions 10A, 10B, 10C, and 10D formed around the pixel pattern region and having no repetitive pattern. In a method of inspecting a pattern defect in the photomask 10, the photomask has an unused space 21 without the pixel pattern region or the peripheral pattern regions. The unused space 21 is provided with inspecting pattern regions 20A, 20B, 20C, and 20D having patterns same as those of the peripheral pattern regions 10A, 10B, 10C, and 10D, respectively. By comparing the peripheral pattern regions and the inspecting pattern regions, the pattern defect in the peripheral pattern regions are inspected.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006043029 | 2006-02-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200736600A true TW200736600A (en) | 2007-10-01 |
Family
ID=38612596
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW096106076A TW200736600A (en) | 2006-02-20 | 2007-02-16 | Method of inspecting a defect in a photomask and photomask |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR20070083191A (en) |
CN (1) | CN101025563A (en) |
TW (1) | TW200736600A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI579558B (en) * | 2014-12-15 | 2017-04-21 | Nuflare Technology Inc | Inspection method and inspection device |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011215197A (en) * | 2010-03-31 | 2011-10-27 | Hoya Corp | Photomask and method for manufacturing the same |
CN106249553B (en) * | 2016-10-20 | 2018-03-13 | 南京华东电子信息科技股份有限公司 | A kind of periphery exposure method in panel of LCD manufacture |
CN108461414A (en) * | 2018-03-30 | 2018-08-28 | 上海华力微电子有限公司 | A method of increasing wafer-scanning area |
CN115097691B (en) * | 2022-08-29 | 2022-12-02 | 合肥晶合集成电路股份有限公司 | Mask plate and forming method |
-
2007
- 2007-02-16 TW TW096106076A patent/TW200736600A/en unknown
- 2007-02-16 KR KR1020070016425A patent/KR20070083191A/en not_active Application Discontinuation
- 2007-02-25 CN CNA2007100058623A patent/CN101025563A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI579558B (en) * | 2014-12-15 | 2017-04-21 | Nuflare Technology Inc | Inspection method and inspection device |
Also Published As
Publication number | Publication date |
---|---|
CN101025563A (en) | 2007-08-29 |
KR20070083191A (en) | 2007-08-23 |
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