TW200540404A - Miniature arbor revolving precision measurement device - Google Patents

Abstract

A miniature arbor revolving precision measurement device, adopting the conventional principle and framework of laser reflection. A testing standard probe is placed to an arbor of a machine bed of a miniature machine, such as a miniature lathe, a miniature drill, or a miniature carving machine. Spin errors in the arbor of the miniature machine bed would result in changes in reflected beam, so as to affect the location of a laser displacement detector towards which the reflected beam projects. The error value can then be obtained through mathematical computation.

Description

200540404 发明 Description of the invention: [Technical field to which the invention belongs] The present invention relates to a miniature main sleeve rotation accuracy measurement device, and particularly refers to a principle and structure composed of general laser light source reflection. And a miniature spindle rotation accuracy measuring device that obtains its error value. [Previous technology] In recent years, high precision positioning tools such as machine tools, various industrial machinery, and measuring instruments, plus ultra-precision processing machines, semiconductor process farms, electronic information equipment, and atomic force microscopes have been required. Whether it is in precision machinery, semiconductor 吝 IX γ A, the 1000-V industry, μ (nano) technology is moving towards miniaturization, refinement, nanotechnology and nano-level, and in mechanical processing, rotation Axis 6 is: the very important mechanical component 'The performance of the machine will affect the overall performance of the machine tool. Therefore, the development of measuring equipment, manufacturing technology and integration technology in the field of precision machinery is related to the detection technology of the rotation axis 6. Research is urgent. However, at present, the rotation error sources generated by the general rotation axis 6 can be divided into six_, as shown in the figure, but the rotation axis 6 error is defined as three position error accounts) < 5y (0), (5z (( 9) 'An angular yaw error ^ and an angular positioning error ε z (θ); and the rotating platform will subdivide the angular yaw error into X (^), 6 Υ (θ). In order to measure these six Error source 'The earliest rotating shaft measuring device used five probes 7 to analyze the error of rotating shaft 6, as shown in Figure 7. With the development of technology,' existing measuring technology of rotating shaft 6 has the following 10 200540404 IV This kind of classification is as follows: 1. Use standard ball / axis / rod directly, but do not compensate the standard axis & 〈Disease: This method is the earliest rotating axis 6 measurement technology, but it will be limited by Iran and Zhuncai. The processing accuracy of the ball / ball is not suitable for high-precision measurement. In the 2 QQ 〇I December Er ic thesis, the technology provided can measure the analytical sound of 1, but in the E. G1 eason article, he proposed Based on the current processing technology limit, the sphericity of the standard sphere is 75 nm. With the Air Spi The limit accuracy of ndle) can reach 50 _, so the first method cannot be achieved with the current two or two. Second, the standard ball / axis / rod is used directly, but the error of the standard axis is compensated, and the compensation method is more than a single probe. Multi-steps: Multi-steps using a single (multi) probe is the first method of error separation. The error of the above-mentioned rotation axis 6 must be added to the analysis accuracy. The required solution is ... It is mainly based on the theory of learning, and partly based on simulation samples / knife analysis. Therefore, the basic principle is explained as the data of Dan Shiwei's "Beijing use". Position the probe 7 so that

Taking the difficult part, the 3 U phenomenon u 疋 has an eccentricity problem ', which makes it difficult to locate the angular position. In addition, the repeatability of the search for the difference from the standard axis to be measured and the rotation difference (repeatabUuv) R 4... The repeatability of R and probe 7 is where this method must be overcome. Eight. 200540404 III. Standard ball / axis / rod is used directly, but the error compensation method for compensating the standard axis is set to (multi ~ pr〇ba): The multi-probe 7 setting is used once, because it is set once. There is still an angle setting error, and it is not easy to eliminate. Therefore, the difficulty of multiple settings and the repeatability of errors need not be considered. However, this method still has another big problem, the number of harmonics-s) is insufficient, and high order cannot be obtained. Therefore, this method can only be used for calibration and cannot be used for calibration. In other words, the results of error separation using multiple settings of a single probe can be used for fast Fourier transform, (FT) opening, and the expanded low-order spectral waves and the results of single setting using multiple probes can be used for calibration. Among the multi-probe methods, the three-point method is the most widely used method. The three-point method uses three displacement probes 7 to synchronize the true roundness and the rotation axis " bad element ', but this method cannot be measured High-frequency error elements, and other 'Xi' Shuo 7 measurement methods also have similar problems, as shown in Figure 9. Fourth, the standard ball / axis / rod is used directly, but the standard axis error compensation method is reversed. Reversal technique: Reverse technique is the earliest invention of error separation in measurement technology. It provides

4b JL, contribution. This method is theoretically a single probe multiple settings-a simple method. This method is the simplest, the most direct, but it is not easy to achieve high accuracy, because of the difficult point of multiple settings for a single probe. The schematic diagram is shown in Fig. 10 and Fig. 11 after reversing i 8 0. 200540404 However, in all of the above formulas ^ θ t ', the measurement accuracy will be affected by the processing accuracy of the test standard bar, and for micro-measurement. As far as processing machinery is concerned, it can not be very precise. Therefore, there are still many shortcomings in conventional articles. It is not a good designer and needs to be improved. In view of the shortcomings of the members of the rotary axis detection system of the machine tool used by Bu Yutian p and Bianbai, the inventor of this case was eager to improve and innovate. After years of painstaking and meticulous research, he finally successfully developed the micro-spindle rotation accuracy.测 装置。 Testing device. [Objective of the Invention] The purpose of the present invention is to provide a micro-spindle rotation accuracy measurement device that uses the principle of geometrical optical reflection as the theoretical basis to cover the laser light source after collimated and expanded beams on the other side of a reflective surface. Test the standard rod, and reflect the laser light source from the reflective surface on the micro-test standard rod, and design the optical path on the reflected light path, and enter the reflected light into two displacement sensors at different positions to get a four-degree-of-freedom Measure the displacement (x, y, 0 X, 0 y), and then calculate the spindle yaw angle and translation error value after calculation. This method can be applied to a variety of processing machinery and will not be affected by the test standard bar. The error will affect the measurement accuracy. [Summary] A micro-spindle rotation accuracy measurement device that can achieve the above-mentioned object of the invention, spoon 13 200540404 includes: laser light source, which is a semiconductor laser light, or other laser light sources;-displacement measurement device ' It is a displacement sensor used to sense the position of the laser source, and the values measured by the displacement measuring device are the deviation angle and the translation, which can be separated by calculating the error value; an angle quantity The measuring device is composed of a convex lens and a displacement sensor, and is used to sense the position of the laser light source. When the reflected light is displaced, the displacement sensing will be changed. The measurement error value is added to the convex lens in order to eliminate the translation error; a single optical path setting single i system, which has -collimation, expansion, and polarization beam splitter ⑽),-丨 ⑷ wave plate, and -pure purity, and the The collimating beam expanding system has a convex lens for beam expanding, which is used to produce a collimating beam expanding effect, and then the diameter of the laser light source is adjusted to the required size, and the polarization beam splitter can be used to change the direction of the laser light source. Laser light Penetrating and reflected light into the quarter-turn slide may turn the vibration direction of the laser light source 9. The beam splitter can divide the reflected light into transmitted light and reflected light, and the transmitted light will enter the displacement measuring device, and the reflected light will enter the angle measuring device. A test standard rod , Used to detect the amount of displacement of the main shaft, and when the main shaft has an error, it will cause the position of the reflected light of the laser light source on the end of the test standard rod to change, which can be measured by the above-mentioned measuring elements The spindle error is measured, and the test standard rod has a small round rod that can be placed on the collet of the working machine 14 200540404, and a reflective film is coated on the flat surface of the end of the circular rod, and the reflected light comes from the reflective film. Caused, and the area of the reflective film is much smaller than the projected area of the laser light source after the beam is expanded;-a mathematical operation system, which uses an angle measurement to measure the deviation of the yaw angle and a comprehensive measurement of the displacement measurement device The error value can be obtained after this mathematical operation. The operation system is as follows: δ. _Da d d .. hda: == :: == ::

cL will be changed according to the implementation of the coordinate definition], please refer to Figure 1 to Figure 5 for a device, which is-using the principle of light reflection to merge; = axis = precision measurement of four degrees of freedom The micro-spindle rotation accuracy measuring device:-:: of the inside measuring device-the laser light source i can use a general semiconductor laser light source. , Or ,, the thunder-displacement measurement m, material _ displacement sense _ position of the laser light source 1, and the displacement is used to sense the swing angle and translation of the person "m set 2 The measured value of 1 is bias ° The value can be calculated by calculating the separation error value. -The angle measuring device 3 'consists of -convex 0 1 and -displacement sensor 15 200540404 3 2 to sense the position of the laser light source χ, when the reflected light When a displacement occurs, the signal on the displacement sensor 32 will be changed to measure the error value, and the convex lens 31 is added to eliminate the translation error; an optical path setting unit 4 is provided with a standard A beam expanding system 4 丄, a polarizing beam splitter 4 2,-a λ wave plate 4 3, and-a beam splitter 4 4 are provided. The collimating beam expanding system 4 1 has a convex lens 4 1 丄 for beam expansion. To produce a collimated beam expansion effect, and then adjust the diameter of the laser light source i to the required size (about 2 i to 4 times the area of the reflective film), and the polarizing mirror 4 2 can be used to change Laser light source! The direction of travel, and further divide the laser light source 1 into penetrating and reflecting light. The 1 / 4λ slide 4 3 can separate the laser light source 丄The direction is turned 90 degrees 'and the beam splitter 4 2 can divide the reflected light into penetrating and reflecting light' and make the penetrating light break into the displacement measurement 2 and make the reflected light enter the angle measuring device. 3. Once a standard rod 5 is tested, it is used to detect the position of the main sleeve (not shown in Figure 10).

If there is a difference in the main axis of Tian, it will cause a laser light source hitting the end surface of the test standard rod 5! The reflected light produces a change in position, that is, the spindle error can be measured by the above-mentioned measuring element, and the test standard rod 5 presents a small round rod 51 placed on the husband's head of the working mother machine, and the round rod 5 The end plane is covered with a layer of anti-bladder (not shown in the figure), the reflected light is caused by 1 reflective film ', and the area of the reflective film is much smaller than the projected area of the laser light source; 〃 16 200540404 Measurement The yaw angle measured by the device 'after this mathematical operation system uses the angular block difference' and the comprehensive error value measured by the displacement measurement device 2 can be obtained by calculating the individual error values. The calculation system is as follows Alas. θα δ ', da d, d,

d a (L

da cL This operation system includes the use of Fourier transform and Fourier series theoretical series to eliminate the setting error (Setup Er ·), and the above formula will have a sign change due to the relationship of the coordinate definition. . The basic principle of the micro-spindle rotation accuracy measurement device is as shown in Fig. 2. The general-purpose laser light source is used. When the laser light source u comes, the collimated beam expansion system 41 is used to expand the laser light source 1, and Laser light source after beam expansion] The diameter should be about 2 to 4 times larger than the area of the reflective film covered on the test standard rod 5 '. Then the laser light source will pass through the polarizing beam splitter 42. Relationship, and the two lights of transmission and reflection are generated, and the vibration directions of the two lights are different by 90 degrees. \ And when the reflected light comes out, it will pass through a 1 / 4λ slide 43. In this embodiment, the function of the 1 / 4λ slide 4 3 is to turn the vibration direction of the disaster source 1 to 9 ° for the first time. When passing, the laser light source 1 has not rotated 90 degrees in the vibration direction, and it is placed on the wire chuck and covered with a small-area reflective surface. The test standard Fengfeng rod 5 'When the right spindle is ideal and error-free, the reflected light will The same point, but if the main axis of 200540404 is wrong, the reflected light will be displaced, as shown in Figure 3. After the light reflected by the position passes through the 1/4 λ slide 4 3 again, the vibration direction of the laser light source 1 has been rotated 90 degrees, and then passes through the polarization beam splitter 42,

At this time, the 'laser light source 1 will directly pass through the polarizing beam splitter 4 2 and will not generate reflected light, because the vibration direction of the laser light source 1 will be turned by the relationship of the secondary i / 4 λ glass 4 3 90 degrees, the reflected light will then pass through the positive beam splitter 42. In this embodiment, the positive beam splitter 42 is a general ordinary beam splitter. At this time, two lights are transmitted and reflected. The path of the reflected light is In the direction of 打, a convex lens 3 1 is added to the path, and then the displacement sensor 3 2 is driven. The reason for adding a convex lens 3 为了 here is to make the measured value only have a deflection angle. There are too many spears, and the deviation angle of the main axis can be calculated from 0 X 0 y. Therefore, the value measured on the displacement sensor 32 is caused by the yaw angle. Error value, the mathematical relationship of the error value is

,,,, Where da is the error value obtained on the displacement sensor, f is the focus, and ㊀ can be rewritten 4 /) when it is small, and can be explained with reference to Figure 4. The transmission technology of the tooth is the original reflected light path. The penetrating light will directly enter the displacement sensor 21 of the displacement measurement device 2. The measured value is the combination of the deflection angle and translation error. The error value is not the actual ordinary gray difference value on the displacement sensor 3 2 of the angle measurement device 3 18 200540404 The error value of the yaw angle can be obtained, and the translation error value can be obtained after calculation. The relationship is 5 to 1), ㈣ds is the displacement measuring device 2 = position sensor 2 丄, the measured error value is the reflection surface of the 4 standard rod installed on the main shaft to the displacement sensor 2 The distance between the top surface of the measuring instrument 2 "" is the yaw angle "and" P "is the translation error value. If the above is obtained, the relevant relationship is cL /

(L "ds—h.TaDkd, h, right to expand it into a two-dimensional relationship, which is% θα X δ d a d

X. cL hd ax d 〇yd 2 The sign of "2" in the sign of "2" will be because of the definition of the coordinates, and there will be a female 4% s-type standard bar 5 The reflecting surface cannot be completely parallel to the position sensor 3 The upper level of 2 has a deflection + surface, in other words, the test standard rod 5 itself is included, which causes the amount of error to be mixed in the signal difference in a similar manner. Fortunately, the deviation angle error of the Anshang is fixed here. It is called setting the wrong turn ^ ㈣ 叶 series theory (the concept of W 或是 or use Fu and: change ⑽… except the setting error, eliminate the amount of rhyme eccentricity) The remaining radius after the yaw angle in the direction) The value 19 200540404 is the error value of the spindle itself. When the micro-spindle rotation accuracy measuring device is used, as shown in FIG. 2 and FIG., The laser light source] passes through a collimated beam expansion system 4] and two convex lenses 4 !! After the laser light source is collimated and expanded by the system, the reflected light is produced by the polarizing beam splitter 42, and then passed through the A glass slide 43 and placed on the wire to check the standard rod. After the reflected light passes through the 1 / 4λ glass 4 3 again, it passes through the first mirror 4 2, and it will not pass here because the laser light source passes through the glass 4 3 again. There will be a beam splitting effect. The next two beams will pass through the beam splitter 4 4 'after splitting. One of the reflections will pass through a convex lens 3 1 and enter the displacement sensor 32'. The iron difference of the angle; the other way is to directly enter the displacement sensation in the direction of the channel penetration. "The data obtained from this displacement sensor is a composite error of 5x ..., 0x, βy. The calculation of 1) and formula (2) means that all the error values are not given out. If ^ ^ ^ is generated, the reflected light will be changed. , And then change the laser ^ 9 ΛΑ shot nine / original, 1 into the position of the displacement sensor 2 1 or 2 'This architecture is used to measure based on this principle. [Features and effects] The miniature spindle provided by the present invention Certificate $ π # ^ f. The monthly transfer measurement device has the following advantages compared with the aforementioned quotation and other conventional technologies: /-The rotation accuracy of the primary spindle and the positioning system are measured using general geometric optics. 20 200540404 The principle is the theoretical basis. 'The collimated and expanded laser beam is covered with a micro-test standard rod of the reflecting surface.' The micro-test standard rod reflects the laser light source, and the optical path history meter is used on the reflected light path. A reflected light hits two displacement sensors at different positions to get a four-degrees-of-freedom measurement displacement (x, y, ZX, θγ), and then calculate the main axis yaw angle and translation error after calculation. Value, and this method can be applied to a variety of guarding machinery, and will not affect the measurement accuracy due to the error of the test standard rod. The detailed descriptions above are specific to one of the feasible embodiments of the present invention. However, this embodiment is not a limitation The patentable scope Ming, who have not departing from the spirit of the present invention skill whom equivalent embodiments or variations could be made in the scope of the patent in the present case.

The 'this case is indeed not only innovative in terms of space type', but also can be compared with conventional ones. σ to enhance the above-mentioned multiple effects, should be in full compliance with the novelty and progress of the French foot invention patent requirements, according to the law to submit a request, and earnestly approve this invention patent application 'to encourage the invention, to the morale. [Brief description of the drawings] Detailed description and its attached effects; for details, please refer to the following ^ Detailed description of the present invention-Che Jiao Jia: a detailed understanding of the technical content of the sun and the moon and its embodiment The drawings are as follows: Figure 1 is a three-dimensional assembly of the micro-spindle rotation accuracy measuring device 21 200540404; Figure 2 is a description of the measurement principle of the micro-spindle rotation accuracy measurement device Figure 2 is the micro-spindle rotation accuracy measurement Trace diagram; The optical path analysis model of the measuring device, the track displacement and the angle of the reflected light of the micro-spindle rotation accuracy measurement device; Figure 5 is the measurement flowchart of the micro-spindle rotation accuracy measurement device; 6 is a schematic diagram of the six degrees of freedom error of the rotating platform of the conventional rotary axis rotation accuracy measurement device; eight and figure 7 are schematic diagrams of the traditional rotary axis measurement device for the conventional rotary axis rotation accuracy measurement device; Figure 8 is a schematic diagram of the measurement of the rotational accuracy of a conventional rotary shaft. Figure 9 is a schematic view of the measurement of a rotational accuracy of a conventional rotary shaft. Schematic diagram of the measurement method of the hair rotation axis I; Figure 10 is a schematic diagram of the use of a conventional rotary shaft rotation accuracy measurement installation; and Figure 10 is a schematic diagram of a conventional rotary axis rotation accuracy measurement device in the opposite direction. . Symbols of main parts] 1 Laser light source 2 Displacement measuring device 22 200540404 2 1 Displacement sensor 3 Angle measuring device 3 1 Convex lens 3 2 Displacement sensor 4 Optical path setting unit 4 1 Collimation beam expanding system 11 Convex lens 4 2 Polarizing beam splitter 4 3 λ slide 4 4 Beamsplitter 5 Test standard rod 5 1 Round rod 6 Spindle 7 Probe da Error value obtained on the displacement sensor

f focal length 0 a deflection angle 0 X deflection angle of the X axis of the main axis (9 y deflection angle of the Y direction of the main axis distance of the h axis test standard reflection surface to the displacement sensor table δ translation error value 23

Claims (1)

200540404 Scope of patent application: 1 · A miniature main shaft is used to lighten the back and forth ... "Hear device is a device that utilizes light reflectance and integrates two dimensional measuring devices to convert precision measuring devices, which includes ·· The four-degree-of-freedom miniature spindle return laser light source uses ordinary semiconductor laser light; a displacement amount is installed f and the two sets are used to sense the position of the laser light source, and the displacement measurement device is combined with the ae shift The measured values set by the clothing set are the yaw angle and the flat value, which can be separated by calculation to calculate the error value. An angle measuring device is formed by the convex side of a side and a displacement sensor. Sensing the position of the laser source field test, when there is a displacement of the reflected light, it will change the displacement of the displacement measurement test j state, and the measurement error is worse ^ and the child convex lens system is added. In order to eliminate the translation error;-the optical path setting unit is composed of a collimated beam expander system, a polarized knife light beam, an I wave plate and a beam splitter, and the collimated beam expander system has a beam expander Convex lens for collimated expanded beam As a result, the diameter of the laser light source can be adjusted to the required size, and the deflection knife can be used to change the direction of the laser light source, and the laser light source can be used to penetrate and reflect light. The glass slide can turn the direction of the laser light source by 90 degrees, and the beam splitter system can divide the reflected light into penetrating and reflecting light, and make the penetrating light enter the displacement measuring device, so that the reflected light will enter Angle measurement device; and 24 200540404, a test standard rod used to detect the displacement of the main shaft, and when the main shaft has an error, it will cause the position of the reflected light of the laser light source hitting the end of the test standard rod to change, The spindle error can be measured by the above-mentioned measuring elements, and the test standard rod has a small round rod that can be placed on the collet of the work machine, and a layer of reflection is coated on the end surface of the round rod. For a thin film, the reflected light is caused by the reflective surface, and the area of the reflective film is much smaller than the projection area of the laser light source after the beam is expanded. 2_ The micro-spindle rotation accuracy measurement device described in item 彳 of the patent application range uses a mathematical operation system, which uses the yaw angle error measured by the angle measurement device and the displacement measurement device. Synthesize the error values. After this mathematical operation, the individual error values can be obtained. The operation system is as follows 3. The micro-spindle rotation accuracy measuring device as described in item 2 of the patent scope, wherein the computing system includes a method of using Fourier transform and Fourier series theoretical series to eliminate assembly setting errors, and the above-mentioned public " The noise will change due to the definition of the coordinates. 4. The micro-spindle rotation accuracy measurement device 25 200540404 set as described in the patent claim ㈣i, among which the laser light source and displacement measurement device 4. The angle measuring device and the optical path setting unit can be modularized and assembled in a specific assembly box. 5. If the micro-spindle rotation accuracy measurement device described in 曱 Please patent scope! Among them, the displacement sensor can be a four-quadrant laser displacement sensor. Please refer to the scope of patent for the micro-spindle rotation accuracy measurement device, where the test standard rod can be made of steel, iron, material. J Station temple other As described in item 6 of the scope of the patent application, the micro-host ′ JL 4 4 is flat. The radius of the test standard bar is approximately plus the end slope covered with —s e ^ β 1 ^ reflective film. Shaft rotation accuracy Measure the size of the tool 26