TW200522129A - Improved valve door structure - Google Patents

Abstract

The present invention is an improved valve door structure which comprises a base, both sides of one surface of the base are each provided with a latch element, and a bottom fixing block is provided at the location of each latch element. The bottom fixing block has a latch slot corresponding to the latch element so that the latch element is received in the latch slot to fix the bottom fixing block. An upper fixing block is mounted on top of the bottom fixing block, and the end surfaces of the upper and bottom fixing blocks that engage define a groove each. The grooves hold a push rod therein. By matching the latch element with the latch slot, the valve door has good strength in structure, so that the valve door is prevented from being damaged by the impact due to temperature variation of operation or bad operation.

Description

200522129 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to a valve structure improvement, especially a valve used in semiconductor equipment and having better structural strength. [Prior art] Please refer to the seventh, eighth, ninth, and tenth drawings. The valve 6 includes a base 6 0, and a fixing seat 6 1 is provided on the top surface of the base 60. The base 6 1 is fixed to the base 60 by a plurality of screws 6 1 2 through the lock, and the upper end of the fixed base 6 1 has a groove 6 1 1 to provide a push rod 6 3 for placement. The bottom mask of 60 has a fitting groove 601 that can accommodate the sealing body 64, and a fixing block 6 2 is provided on the top surface of the fixing seat 61. The fixing block 6 2 has a groove on the side facing the push rod 63. 6 2 1 ， This groove 6 2 1 is a groove 6 1 that cooperates with the fixing base 6 1 1Clamp the push rod 6 3 between the fixing base 6 1 and the fixing block 6 2, and the fixing block 6 2 is screw 6 2 2 is fixed on the fixed seat 6 1 through the lock, and the valve 6 is actuated by using the push rod 63 to drive the valve 6 to close or open. Regarding the above valve structure, it is mainly used in related equipment of semiconductor factories, and related semiconductor processes need to use high and low temperature changes to achieve process requirements. Therefore, the valve 6 often needs to operate in environments with high and low temperature changes. Therefore, the valve 6 is subject to physical changes due to thermal expansion and contraction due to high and low temperature differences. The components of the aforementioned valve 6 structure are mainly fixed by screws 6 1 2 and 6 2 2, so when the temperature becomes high, The component of the valve 6 is expanded. When the component of the valve 6 is expanded according to the aforementioned structure, it will provide a screw lock 6 1 2, 6 2 2 to reduce the hole diameter set, and the screw 6 1

200522129 V. Description of the invention (2) 2 and 6 2 2 The diplomatic joints are facing the screw 6. Please refer to the sixth. The valve 6 can be normally stable. The bottom of the valve is scattered to its groups. Impact force capacity 1 2, 6 2 2 The semiconductor device will be stopped if it is subjected to shear stress for a long period of time. [Summary of the Invention] As mentioned above, the door 'makes it less likely for the semiconductor industry to become a valve during operation and improper operation. The knotting surface has ~ which can accommodate the bolt locking block, and one end of the bolt locking block is provided with an upper fixing block for each of the bolt rods. [Embodiment] The diameter will be enlarged 'so that the valve β > 1 2, 6 2 2 will generate a shear stress. :: As shown in the figure, when the normal closing procedure is executed :: 5, up, so the valve =: hit 7 heart [: ', and when the abnormal closing procedure is performed, the side that is equal to 6th will be contacted first Valve seat 5, and bean = in the middle of a certain part of the components, so that the screws, 6 ^ great stress, coupled with the effects of screws 6 丄 2, 6 2 2 will accelerate its fracture 'cause valve 6 damage and stop operation However, once the equipment of the semiconductor factory was damaged, it caused huge losses. The invention provides a valve with high structural strength, which can resist the shear stress generated when the temperature difference changes, and the impact force that makes the valve structure difficult to damage to reduce the cost. 2 Improved 'The valve has a base, the bottom of the base, and the card slot of the sealing body. The top surface of the base is provided with at least two lock bolts which are respectively provided with a lower fixing block and an embedded locking block. Slot, the top surface is provided with a pusher 'and a clampable pusher is fixed at the top of the lower fixing block

200522129 V. Description of the invention (3) Please refer to the first, second, third, and fourth figures. The valve 1 of the present invention is applied to semiconductor-related equipment and has a base 1 0. The bottom surface of the base 10 is provided with a clamping slot 12 for accommodating a sealing body 14. Two sides of the top surface of the base 10 are provided with two T-shaped locking blocks 1 1 which are slightly T-shaped in appearance, and A plurality of screw holes 1 3 are provided on the top surface of the base 10 and on both sides of each latching block 11. Each latching block 1 1 can be provided with a fixing block 2 respectively, and the bottom surface of the lower fixing block 2 corresponds to The latching block 11 is provided with a latching slot 2 1 so that the latching block 11 can be inserted into the latching slot 21 to position the lower fixing block 2, and the top of the lower fixing block 2 is provided with a accommodating push rod 3. The groove 2 2 is provided with a plurality of screw holes 2 3 and perforations 2 4 on both sides of the groove 2 2. The lower fixing block 2 is locked into the screw hole 13 through the perforation 2 4 through the locking element 4 3. It is fixed on the base 10. An upper fixing block 4 is provided at the top of each lower fixing block 2, and the upper fixing block 4 is fixed to the screw hole 2 3 of the lower fixing block 2 by screws 4 2 through the lock, and the bottom surface of the upper fixing block 4 is provided. There is a groove 41, which cooperates with the groove 2 2 of the lower fixing block 2 to firmly hold the push rod 3 between the upper and lower fixing blocks 4, 2. The valve can be driven by the force of the push rod 3. 1 Actor generates an action that is closed or opened. The present invention is mainly related to the assembly and implementation of the lower fixing block 2 and the base 10, that is, the latching block 11 on the base 10 is designed to be slightly larger than the latching groove 2 1 of the lower fixing block 2 during processing, and During assembly, the base 10 needs to be cooled at a low temperature and the lower fixing block 2 is to be heated at a high temperature, so that the size of the locking block 11 of the base 10 is reduced, and the locking groove 21 of the lower fixing block 2 is enlarged so that During assembly, the latching block 1 1 can be easily inserted into the latching slot 2 1.

200522129 V. Description of the invention (4) f ::: 'Don't talk about the latching groove 2 1 and the latching block 1 丄 to form an interference fit = two ^ and then fit the locking screw 4 3 to make the lower fixing block 2 securely set in the storm On the cliff 丄 U. Production + & "semiconductor devices will also be affected by temperature changes 9 4 Λ _ physical phenomenon, will make the locking element 4 of valve 1 粁 positive: the effect of two shear stress' Please refer to the fifth figure , Miscellaneous ”K, Η ^ 4+ ^, θ makes Jizhuang 1 0 steadily rest on the valve seat 5 and the door ^ ΐ 4 will close the passage 5 of the wide door seat 5 1 to close it, 1 1 1 Closing the impact cup of Rishou & Hikama door 1 is tilted while the door; f door 1 will perform the abnormal closing procedure, which will cause the valve shock force to be concentrated on the valve. ㈣ 石 ===- The latch block ii withstands 1 force, which is mainly caused by the base 10 2,43, which is broken by the smaller components and the locking element 4 3, which damages the valve i. The impact force is not easy to cause the locking element 42, 4 Block ii and the bolt to fix the wall? Every day, the base 10 and the lower U 疋 block 2 are combined and fixed, and the lock element is used to make the combination more stable. ☆, and the pre-absorption part 2 can withstand a large "product" can withstand 2, 43 will not be subjected to excessive stress to produce the locking element 4-the base is based on cost considerations 丄 〇: This creation is worth the effort The lower fixing block 2 can be made of stainless steel. The upper part can be made of aluminum alloy. It is larger than Minghe *. Therefore, when the valve is actuated, it is only prepared = steel hardness. Therefore, only the push rod 3 needs to be replaced. Without having to replace the entire group

Page 8 200522129

200522129 Brief description of the drawings [Simple description of the drawings] The first figure is an exploded perspective view of the present invention. The second figure is a three-dimensional combined appearance of the present invention. The third figure is a top view of the present invention. The fourth figure is a sectional view taken along line 4_4 of the third figure. The fifth diagram is an operation diagram of the valve of the present invention performing a normal closing procedure. The sixth diagram is an operation diagram of the valve of the present invention performing an abnormal closing procedure. The seventh figure is a three-dimensional combined appearance of a conventional valve. The eighth figure is a top view of a conventional valve. The ninth figure is a side view of a conventional valve showing a combined structure of a fixed seat and a base. The tenth figure is a side view of a conventional valve showing a combined structure of a fixed block and a fixed seat. The eleventh figure is an action diagram of a conventional valve when performing a normal closing procedure. The twelfth figure is an action diagram of a conventional valve when performing an abnormal closing procedure. (Figure number) 1 Valve 1 1 Bolt block 1 3 Screw hole 2 1 Bolt slot 2 3 Screw hole 3 Push rod 4 1 Groove 1 0 Base 1 2 Card slot 2 Lower fixing block 2 2 Groove 2 4 Perforation 4 Upper fixing block 4 2 Locking element 5 Valve seat 5 1 channel 4 3 Locking element 5 'Valve seat

Page 10 200522129

Page 11

Claims (1)

200522129 A base and at least two latching groove blocks of the base, and at least two top surfaces of the next push rod, upper and lower are fixed 2 The lower fixing 'enables each fixing block, and the application special rod system for pushing the fixed fixing block fixed block is a structural improvement, which includes: a card-like shape capable of containing and sealing on the surface, and at least two bolt locking blocks; The solid block is embedded in the top surface of the person, and is located in the groove of the lower fixing block only after the bolt is locked; Each of the upper fixing blocks is provided on the bottom surface of the lower fixing block and has a groove holder capable of accommodating the putter rod. The valve structure improvement described in item 1 of the dry range is made of aluminum alloy. 8.3. The valve structure is improved according to item χ in the scope of patent application, in which the lower fixing block is made of stainless steel. 4 · The valve structure improvement as described in item 丄 of the patent application scope, wherein the base is located on both sides of the lock block and is provided with screw holes, and the lower fixing block is provided with perforations corresponding to the screw holes. Locked into the screw hole through the perforation. 5 · The valve structure improvement described in item 1 of the scope of patent application, in which the latch block of the base is slightly T-shaped. 6 · The valve structure improvement according to item 1 of the scope of the patent application, wherein the volume of the locking block of the base is slightly larger than the locking groove of the lower fixing block, and the base is cooled and contracted during assembly, and the lower fixing is performed. After the block is heated and expanded, the latch block is embedded in the latch groove and cooled to normal temperature. Page 12 200522129 Page 13