TW200513525A - Chemical-mechanical planarization composition having PVNO and associated method for use - Google Patents
Chemical-mechanical planarization composition having PVNO and associated method for useInfo
- Publication number
- TW200513525A TW200513525A TW093130132A TW93130132A TW200513525A TW 200513525 A TW200513525 A TW 200513525A TW 093130132 A TW093130132 A TW 093130132A TW 93130132 A TW93130132 A TW 93130132A TW 200513525 A TW200513525 A TW 200513525A
- Authority
- TW
- Taiwan
- Prior art keywords
- composition
- associated method
- mechanical planarization
- pvno
- chemical
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 3
- 239000002184 metal Substances 0.000 abstract 3
- 229910052751 metal Inorganic materials 0.000 abstract 3
- 230000004888 barrier function Effects 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000010949 copper Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000007800 oxidant agent Substances 0.000 abstract 1
- 238000005498 polishing Methods 0.000 abstract 1
- 229920000642 polymer Polymers 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
- H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
Abstract
A composition and associated method for chemical mechanical planarization (or other polishing) are described. The composition comprises an abrasive and a polyvinylpyridine-N-oxide polymer. The composition possesses high selectivities for metal and barrier material removal in metal CMP. The composition may further comprise and oxidizing agent in which case the composition is particularly useful in conjunction with the associated method for metal CMP applications (e.g., copper CMP).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/683,231 US20050079803A1 (en) | 2003-10-10 | 2003-10-10 | Chemical-mechanical planarization composition having PVNO and associated method for use |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200513525A true TW200513525A (en) | 2005-04-16 |
TWI247796B TWI247796B (en) | 2006-01-21 |
Family
ID=34422691
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093130132A TWI247796B (en) | 2003-10-10 | 2004-10-05 | Chemical-mechanical planarization composition having PVNO and associated method for use |
Country Status (3)
Country | Link |
---|---|
US (2) | US20050079803A1 (en) |
JP (1) | JP2005175437A (en) |
TW (1) | TWI247796B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI456013B (en) * | 2012-04-10 | 2014-10-11 | Uwiz Technology Co Ltd | Polishing slurry composition |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6811680B2 (en) * | 2001-03-14 | 2004-11-02 | Applied Materials Inc. | Planarization of substrates using electrochemical mechanical polishing |
US6899804B2 (en) * | 2001-12-21 | 2005-05-31 | Applied Materials, Inc. | Electrolyte composition and treatment for electrolytic chemical mechanical polishing |
US7323416B2 (en) * | 2001-03-14 | 2008-01-29 | Applied Materials, Inc. | Method and composition for polishing a substrate |
US7582564B2 (en) * | 2001-03-14 | 2009-09-01 | Applied Materials, Inc. | Process and composition for conductive material removal by electrochemical mechanical polishing |
US7128825B2 (en) * | 2001-03-14 | 2006-10-31 | Applied Materials, Inc. | Method and composition for polishing a substrate |
US20060169597A1 (en) * | 2001-03-14 | 2006-08-03 | Applied Materials, Inc. | Method and composition for polishing a substrate |
US7160432B2 (en) * | 2001-03-14 | 2007-01-09 | Applied Materials, Inc. | Method and composition for polishing a substrate |
US20060249482A1 (en) * | 2003-05-12 | 2006-11-09 | Peter Wrschka | Chemical mechanical polishing compositions for step-ll copper line and other associated materials and method of using same |
US7390429B2 (en) * | 2003-06-06 | 2008-06-24 | Applied Materials, Inc. | Method and composition for electrochemical mechanical polishing processing |
US7247567B2 (en) * | 2004-06-16 | 2007-07-24 | Cabot Microelectronics Corporation | Method of polishing a tungsten-containing substrate |
US20070037892A1 (en) * | 2004-09-08 | 2007-02-15 | Irina Belov | Aqueous slurry containing metallate-modified silica particles |
US7531105B2 (en) * | 2004-11-05 | 2009-05-12 | Cabot Microelectronics Corporation | Polishing composition and method for high silicon nitride to silicon oxide removal rate ratios |
US20060249395A1 (en) * | 2005-05-05 | 2006-11-09 | Applied Material, Inc. | Process and composition for electrochemical mechanical polishing |
US20060249394A1 (en) * | 2005-05-05 | 2006-11-09 | Applied Materials, Inc. | Process and composition for electrochemical mechanical polishing |
JP2008546036A (en) * | 2005-06-07 | 2008-12-18 | アドバンスド テクノロジー マテリアルズ,インコーポレイテッド | Metal and dielectric compatible sacrificial antireflective coating purification and removal composition |
WO2007015551A1 (en) * | 2005-08-04 | 2007-02-08 | Asahi Glass Company, Limited | Polishing composition and polishing method |
JP2007059128A (en) * | 2005-08-23 | 2007-03-08 | Canon Inc | Organic electroluminescent display device and manufacturing method thereof |
JP2007088379A (en) * | 2005-09-26 | 2007-04-05 | Fujifilm Corp | Aqueous polishing slurry and chemical mechanical polishing method |
JP2007095713A (en) * | 2005-09-26 | 2007-04-12 | Fujifilm Corp | Polishing slurry for barrier layer |
US7585340B2 (en) * | 2006-04-27 | 2009-09-08 | Cabot Microelectronics Corporation | Polishing composition containing polyether amine |
JP2007299942A (en) * | 2006-04-28 | 2007-11-15 | Fujifilm Corp | Metal polishing composition, and chemical-mechanical polishing method using it |
US20070254485A1 (en) * | 2006-04-28 | 2007-11-01 | Daxin Mao | Abrasive composition for electrochemical mechanical polishing |
JP2008091569A (en) * | 2006-09-29 | 2008-04-17 | Fujifilm Corp | Polishing composition and polishing method |
US20080105652A1 (en) * | 2006-11-02 | 2008-05-08 | Cabot Microelectronics Corporation | CMP of copper/ruthenium/tantalum substrates |
US9343330B2 (en) * | 2006-12-06 | 2016-05-17 | Cabot Microelectronics Corporation | Compositions for polishing aluminum/copper and titanium in damascene structures |
US20080149884A1 (en) * | 2006-12-21 | 2008-06-26 | Junaid Ahmed Siddiqui | Method and slurry for tuning low-k versus copper removal rates during chemical mechanical polishing |
US20080148652A1 (en) * | 2006-12-21 | 2008-06-26 | Junaid Ahmed Siddiqui | Compositions for chemical mechanical planarization of copper |
US7915169B2 (en) * | 2007-11-02 | 2011-03-29 | Spansion Llc | Processes for forming electronic devices including polishing metal-containing layers |
US20090124173A1 (en) * | 2007-11-09 | 2009-05-14 | Cabot Microelectronics Corporation | Compositions and methods for ruthenium and tantalum barrier cmp |
CN103131330B (en) | 2008-02-01 | 2015-09-23 | 福吉米株式会社 | Composition for polishing and use its Ginding process |
WO2009150938A1 (en) * | 2008-06-11 | 2009-12-17 | 信越化学工業株式会社 | Polishing agent for synthetic quartz glass substrate |
US8247326B2 (en) * | 2008-07-10 | 2012-08-21 | Cabot Microelectronics Corporation | Method of polishing nickel-phosphorous |
US8506831B2 (en) | 2008-12-23 | 2013-08-13 | Air Products And Chemicals, Inc. | Combination, method, and composition for chemical mechanical planarization of a tungsten-containing substrate |
TWI465556B (en) * | 2010-09-14 | 2014-12-21 | Everlight Chem Ind Corp | Polishing composition for primary polishing of wafer |
US9039914B2 (en) | 2012-05-23 | 2015-05-26 | Cabot Microelectronics Corporation | Polishing composition for nickel-phosphorous-coated memory disks |
US9862862B2 (en) * | 2013-05-15 | 2018-01-09 | Basf Se | Chemical-mechanical polishing compositions comprising polyethylene imine |
US11085011B2 (en) | 2018-08-28 | 2021-08-10 | Entegris, Inc. | Post CMP cleaning compositions for ceria particles |
CN117659393A (en) * | 2022-08-31 | 2024-03-08 | 华为技术有限公司 | Leveling agent, composition and application thereof |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5939513A (en) * | 1994-01-19 | 1999-08-17 | The Procter & Gamble Company | Methods of removing pigment stain using detergent compositions containing polyamine N-oxide polymers |
KR970042941A (en) * | 1995-12-29 | 1997-07-26 | 베일리 웨인 피 | Polishing Compounds for Mechanical and Chemical Polishing Processes |
US5656767A (en) * | 1996-03-08 | 1997-08-12 | Computational Systems, Inc. | Automatic determination of moisture content and lubricant type |
US6648733B2 (en) * | 1997-04-04 | 2003-11-18 | Rodel Holdings, Inc. | Polishing pads and methods relating thereto |
US6585574B1 (en) * | 1998-06-02 | 2003-07-01 | Brian Lombardo | Polishing pad with reduced moisture absorption |
US6039633A (en) * | 1998-10-01 | 2000-03-21 | Micron Technology, Inc. | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies |
JP4366735B2 (en) * | 1998-11-05 | 2009-11-18 | Jsr株式会社 | Abrasives containing polymer particles |
KR100472882B1 (en) * | 1999-01-18 | 2005-03-07 | 가부시끼가이샤 도시바 | Aqueous Dispersion, Chemical Mechanical Polishing Aqueous Dispersion Composition, Wafer Surface Polishing Process and Manufacturing Process of a Semiconductor Apparatus |
IL128920A0 (en) * | 1999-03-10 | 2000-02-17 | Nova Measuring Instr Ltd | Method for monitoring metal cmp |
US6716805B1 (en) * | 1999-09-27 | 2004-04-06 | The Procter & Gamble Company | Hard surface cleaning compositions, premoistened wipes, methods of use, and articles comprising said compositions or wipes and instructions for use resulting in easier cleaning and maintenance, improved surface appearance and/or hygiene under stress conditions such as no-rinse |
US6348076B1 (en) * | 1999-10-08 | 2002-02-19 | International Business Machines Corporation | Slurry for mechanical polishing (CMP) of metals and use thereof |
US6435944B1 (en) * | 1999-10-27 | 2002-08-20 | Applied Materials, Inc. | CMP slurry for planarizing metals |
WO2001045899A1 (en) * | 1999-12-22 | 2001-06-28 | Toray Industries, Inc. | Polishing pad, and method and apparatus for polishing |
WO2001053040A1 (en) * | 2000-01-19 | 2001-07-26 | Rodel Holdings, Inc. | Printing of polishing pads |
US6736992B2 (en) * | 2000-04-11 | 2004-05-18 | Honeywell International Inc. | Chemical mechanical planarization of low dielectric constant materials |
EP1170356A1 (en) * | 2000-07-06 | 2002-01-09 | The Procter & Gamble Company | Laundry additive sachet |
US6743267B2 (en) * | 2001-10-15 | 2004-06-01 | Dupont Air Products Nanomaterials Llc | Gel-free colloidal abrasive polishing compositions and associated methods |
US6803353B2 (en) * | 2002-11-12 | 2004-10-12 | Atofina Chemicals, Inc. | Copper chemical mechanical polishing solutions using sulfonated amphiprotic agents |
-
2003
- 2003-10-10 US US10/683,231 patent/US20050079803A1/en not_active Abandoned
-
2004
- 2004-10-05 TW TW093130132A patent/TWI247796B/en not_active IP Right Cessation
- 2004-10-08 JP JP2004296557A patent/JP2005175437A/en active Pending
-
2005
- 2005-04-08 US US11/101,815 patent/US20050215183A1/en not_active Abandoned
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI456013B (en) * | 2012-04-10 | 2014-10-11 | Uwiz Technology Co Ltd | Polishing slurry composition |
Also Published As
Publication number | Publication date |
---|---|
JP2005175437A (en) | 2005-06-30 |
TWI247796B (en) | 2006-01-21 |
US20050079803A1 (en) | 2005-04-14 |
US20050215183A1 (en) | 2005-09-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |